JP2010122043A5 - - Google Patents
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- JP2010122043A5 JP2010122043A5 JP2008295433A JP2008295433A JP2010122043A5 JP 2010122043 A5 JP2010122043 A5 JP 2010122043A5 JP 2008295433 A JP2008295433 A JP 2008295433A JP 2008295433 A JP2008295433 A JP 2008295433A JP 2010122043 A5 JP2010122043 A5 JP 2010122043A5
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- low coherence
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- coherence interferometer
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本発明を例示する低コヒーレンス干渉計の一態様は、低コヒーレンス干渉法に応じた光周波数幅を有し、且つ、その光周波数において強度変調されたスペクトルを有した広帯域変調光を生成する光源部と、前記光源部が生成した広帯域変調光を分岐して測定対象物と参照物との双方へ導くと共に、前記測定対象物からの測定光と前記参照物からの参照光とを干渉させて干渉信号を生成する光学系と、を備える。 An aspect of the low coherence interferometer illustrating the present invention is a light source unit that generates a broadband modulated light having an optical frequency width corresponding to a low coherence interferometry and having a spectrum that is intensity-modulated at the optical frequency. And branching the broadband modulated light generated by the light source unit to both the measurement object and the reference object, and causing interference between the measurement light from the measurement object and the reference light from the reference object An optical system for generating a signal.
また、本発明を例示する低コヒーレンス干渉装置の一態様は、低コヒーレンス干渉計の一態様と、前記測定対象物と前記参照物とを前記光学系の光軸方向に相対的に移動させる移動機構と、前記相対的な移動に伴い、前記光学系が生成する干渉信号を所定の時間間隔で取り込む制御装置と、前記制御装置が取り込んだ干渉信号に基づいて前記測定対象物における測定面の位置情報を算出する演算装置と、を備え、前記演算装置は、前記制御装置が取り込んだ干渉信号のエンベロープのピークの種類を判別し、その種類に応じたオフセット補正を前記位置情報へ施す。 Also, one aspect of the low coherence interference apparatus exemplifying the present invention is one aspect of a low coherence interferometer, and a moving mechanism that relatively moves the measurement object and the reference object in the optical axis direction of the optical system. And a control device that captures an interference signal generated by the optical system at a predetermined time interval with the relative movement, and positional information of the measurement surface on the measurement object based on the interference signal captured by the control device And an arithmetic unit that calculates the peak value of the envelope of the interference signal taken in by the control device, and performs offset correction according to the type on the position information.
また、本発明を例示する低コヒーレンス干渉測定方法は、低コヒーレンス干渉法に応じた光周波数幅を有し、且つ、その光周波数において強度変調されたスペクトルを有した広帯域変調光を生成することと、生成された広帯域変調光を分岐して測定対象物と参照物との双方へ導くと共に、前記測定対象物からの測定光と前記参照物からの参照光とを干渉させて干渉信号を生成することと、前記測定対象物と前記参照物とを光軸方向に相対的に移動させることと、前記相対的な移動に伴い、前記干渉により生成される干渉信号を所定の時間間隔で取り込むことと、取り込まれた干渉信号に基づいて前記測定対象物における測定面の位置情報を算出することと、を有し、前記算出することは、取り込まれた干渉信号のエンベロープのピークの種類を判別し、その種類に応じたオフセット補正を前記位置情報へ施すことを含む。 In addition, the low coherence interference measurement method exemplifying the present invention generates wideband modulated light having an optical frequency width corresponding to the low coherence interferometry and having a spectrum whose intensity is modulated at the optical frequency. The generated broadband modulated light is branched and guided to both the measurement object and the reference object, and the measurement light from the measurement object and the reference light from the reference object are interfered to generate an interference signal. And moving the measurement object and the reference object relative to each other in the optical axis direction, and capturing an interference signal generated by the interference at a predetermined time interval with the relative movement. Calculating the position information of the measurement surface of the measurement object based on the captured interference signal, and the calculating includes the type of the peak of the envelope of the captured interference signal Discriminated, it comprises applying an offset correction according to the type to the position information.
Claims (14)
前記光源部が生成した広帯域変調光を分岐して測定対象物と参照物との双方へ導くと共に、前記測定対象物からの測定光と前記参照物からの参照光とを干渉させて干渉信号を生成する光学系と、
を備えた低コヒーレンス干渉計。 A light source unit for generating broadband modulated light having an optical frequency width corresponding to low coherence interferometry and having a spectrum whose intensity is modulated at the optical frequency ;
The broadband modulated light generated by the light source unit is branched and guided to both the measurement object and the reference object, and the interference light is generated by interfering the measurement light from the measurement object and the reference light from the reference object. An optical system to generate,
Low coherence interferometer with
前記強度変調の特性は、光周波数の周期関数で表される
低コヒーレンス干渉計。 The low coherence interferometer according to claim 1,
The intensity modulation characteristic is expressed by a periodic function of optical frequency.
Low coherence interferometer.
前記強度変調の特性は、光周波数の正弦関数で表される
低コヒーレンス干渉計。 The low coherence interferometer according to claim 1 or 2,
The characteristic of the intensity modulation is expressed by a sine function of optical frequency.
Low coherence interferometer.
前記強度変調の特性は、光周波数の周期パルス関数で表される
低コヒーレンス干渉計。 The low coherence interferometer according to claim 1 or 2,
The intensity modulation characteristic is expressed by a periodic pulse function of optical frequency.
Low coherence interferometer.
前記光源部は、
低コヒーレンス干渉法に応じた光周波数幅を有した広帯域光を生成する広帯域光源と、
前記広帯域光源が生成した広帯域光のスペクトルをその光周波数において強度変調することにより、前記広帯域変調光を生成する干渉フィルタと、
を備えた低コヒーレンス干渉計。 In the low coherence interferometer according to any one of claims 1 to 4,
The light source unit is
A broadband light source for generating broadband light having an optical frequency width corresponding to low coherence interferometry ;
An interference filter that generates the broadband modulated light by intensity-modulating the spectrum of the broadband light generated by the broadband light source at the optical frequency ;
Low coherence interferometer with
前記干渉フィルタは、
ファブリペロエタロン型の干渉フィルタである
低コヒーレンス干渉計。 The low coherence interferometer according to claim 5,
The interference filter is
A low-coherence interferometer, a Fabry-Perot etalon-type interference filter.
前記広帯域光源は、
出射波長を時間変調する波長走査型光源である
低コヒーレンス干渉計。 The low coherence interferometer according to claim 5 or 6,
The broadband light source is:
Low coherence interferometer is out morphism wavelength scanning light source for modulating the wavelength time.
前記光源部は、
出射波長を時間変調する波長走査型光源を含む
低コヒーレンス干渉計。 In the low coherence interferometer according to any one of claims 1 to 4,
The light source unit is
Low coherence interferometer including a wavelength scanning light source for modulating the output morphism wavelength time.
前記測定対象物と前記参照物とを前記光学系の光軸方向に相対的に移動させる移動機構と、
前記相対的な移動に伴い、前記光学系が生成する干渉信号を所定の時間間隔で取り込む制御装置と、
前記制御装置が取り込んだ干渉信号に基づいて前記測定対象物における測定面の位置情報を算出する演算装置と、を備え、
前記演算装置は、
前記制御装置が取り込んだ干渉信号のエンベロープのピークの種類を判別し、その種類に応じたオフセット補正を前記位置情報へ施す
低コヒーレンス干渉装置。 The low coherence interferometer according to any one of claims 1 to 8,
A moving mechanism for relatively moving the measurement object and the reference object in the optical axis direction of the optical system;
A control device that captures interference signals generated by the optical system at a predetermined time interval with the relative movement;
An arithmetic device that calculates position information of a measurement surface of the measurement object based on an interference signal captured by the control device , and
The arithmetic unit is:
A low-coherence interference device that discriminates the type of an envelope peak of an interference signal captured by the control device and applies offset correction according to the type to the position information.
生成された広帯域変調光を分岐して測定対象物と参照物との双方へ導くと共に、前記測定対象物からの測定光と前記参照物からの参照光とを干渉させて干渉信号を生成することと、The generated broadband modulated light is branched and guided to both the measurement object and the reference object, and an interference signal is generated by causing the measurement light from the measurement object and the reference light from the reference object to interfere with each other. When,
前記測定対象物と前記参照物とを光軸方向に相対的に移動させることと、Relatively moving the measurement object and the reference object in the optical axis direction;
前記相対的な移動に伴い、前記干渉により生成される干渉信号を所定の時間間隔で取り込むことと、Capturing the interference signal generated by the interference with the relative movement at a predetermined time interval;
取り込まれた干渉信号に基づいて前記測定対象物における測定面の位置情報を算出することと、を有し、Calculating position information of a measurement surface of the measurement object based on the captured interference signal, and
前記算出することは、Said calculating is
取り込まれた干渉信号のエンベロープのピークの種類を判別し、その種類に応じたオフセット補正を前記位置情報へ施すことを含む、 Determining the type of the peak of the envelope of the captured interference signal, and applying offset correction according to the type to the position information,
低コヒーレンス干渉測定方法。 Low coherence interference measurement method.
前記ピークの種類には、前記ピークの強度が含まれる The peak type includes the intensity of the peak
低コヒーレンス干渉装置。 Low coherence interferometer.
前記測定面の位置情報には、前記測定面の形状が含まれる The position information of the measurement surface includes the shape of the measurement surface.
低コヒーレンス干渉装置。 Low coherence interferometer.
前記ピークの種類には、前記ピークの強度が含まれる The peak type includes the intensity of the peak
低コヒーレンス干渉測定方法。 Low coherence interference measurement method.
前記測定面の位置情報には、前記測定面の形状が含まれる The position information of the measurement surface includes the shape of the measurement surface.
低コヒーレンス干渉測定方法。 Low coherence interference measurement method.
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| JP2008295433A JP5228828B2 (en) | 2008-11-19 | 2008-11-19 | Low coherence interferometer, low coherence interferometer, and low coherence interferometry method |
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| JP2008295433A JP5228828B2 (en) | 2008-11-19 | 2008-11-19 | Low coherence interferometer, low coherence interferometer, and low coherence interferometry method |
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| JP2010122043A JP2010122043A (en) | 2010-06-03 |
| JP2010122043A5 true JP2010122043A5 (en) | 2012-07-12 |
| JP5228828B2 JP5228828B2 (en) | 2013-07-03 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2010261776A (en) * | 2009-05-01 | 2010-11-18 | Canon Inc | Device for measuring optical interference |
| JP2010261890A (en) * | 2009-05-11 | 2010-11-18 | Canon Inc | Light wave interference measuring device |
| CN102322801B (en) * | 2011-08-09 | 2012-12-12 | 天津大学 | Oscillating type demodulation device with high signal-to-noise ratio and low coherent interference displacement and demodulation method for demodulation device |
| JP6030346B2 (en) * | 2012-05-31 | 2016-11-24 | 株式会社ミツトヨ | Shape measuring instruments |
| KR101382004B1 (en) | 2013-04-03 | 2014-04-04 | 조선대학교산학협력단 | Low coherence interferometry using a frequency-modulated laser diode |
| JP2017049117A (en) * | 2015-09-02 | 2017-03-09 | 株式会社東京精密 | Dimension measurement device and reference optical path length scanning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003148909A (en) * | 2001-11-08 | 2003-05-21 | Canon Inc | Interference device |
| JP3934490B2 (en) * | 2002-06-21 | 2007-06-20 | フジノン株式会社 | Low coherent fringe analysis method |
| JP4543180B2 (en) * | 2004-08-18 | 2010-09-15 | 国立大学法人東京農工大学 | Shape measuring method, shape measuring device, and frequency comb light generator |
| JP2006078446A (en) * | 2004-09-13 | 2006-03-23 | Nikon Corp | Interference measurement method and device |
| WO2007044786A2 (en) * | 2005-10-11 | 2007-04-19 | Zygo Corporation | Interferometry method and system including spectral decomposition |
| US7460242B2 (en) * | 2006-08-30 | 2008-12-02 | University Of Central Florida Research Foundation, Inc. | Systems and methods for high-precision length measurement |
| JP4602372B2 (en) * | 2007-03-14 | 2010-12-22 | 株式会社トプコン | Optical image measuring device and optical image measuring method |
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