JP2010098130A - End effector - Google Patents

End effector Download PDF

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JP2010098130A
JP2010098130A JP2008267683A JP2008267683A JP2010098130A JP 2010098130 A JP2010098130 A JP 2010098130A JP 2008267683 A JP2008267683 A JP 2008267683A JP 2008267683 A JP2008267683 A JP 2008267683A JP 2010098130 A JP2010098130 A JP 2010098130A
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hand
substrate
end effector
portions
base member
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Tetsunori Otaguro
徹典 大田黒
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Hirata Corp
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Hirata Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an end effector which hardly generates dust and hardly causes the warpage and the vibration of a hand and a substrate. <P>SOLUTION: The end effector gripping a peripheral edge of a substrate W from the outside in a diametric direction includes a base member 11 attached to a robot hand H, a U-shaped hand member 12 provided on the base member 11, and an actuator 13 which is provided so as to be connected with the coupling side of the hand member 12 and driven to open and close the front end opening side of the hand member 12. The hand member 12 includes a pair of bilaterally symmetrical hands 121, a coupling flexible part 122 which couples both the hands 121 into one body and is connected to the actuator 13, and substrate gripping parts 30 which are provided at both hands 121 and grip a peripheral edge of the substrate W, and parts nearer the coupling flexible part of both hand parts 121 and the base member 11 are pin-connected by a turning support member 200, and both the hands 121 are provided so as to be freely turnable with respect to the base member 11. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ロボットハンドに取り付けられ、基板の周縁を径方向外方から把持するエンドイフェクタに係り、特に、３００ｍｍ、４５０ｍｍなどの大型の半導体ウエハに好適なエンドイフェクタに関するものである。   The present invention relates to an end effector which is attached to a robot hand and grips the periphery of a substrate from the outside in the radial direction, and more particularly to an end effector suitable for a large semiconductor wafer such as 300 mm or 450 mm.

半導体の製造工程において、半導体ウエハを各種の処理装置に搬入、搬出するためのウエハ搬送装置がある。例えば、ロボットハンドのアーム先端に取り付けられ、半導体ウエハを径方向外方からエッジグリップするエンドイフェクタがある。このようなエンドイフェクタとして、以下に示すものがある。   In a semiconductor manufacturing process, there is a wafer transfer device for carrying a semiconductor wafer into and out of various processing devices. For example, there is an end effector that is attached to the tip of an arm of a robot hand and edge grips a semiconductor wafer from the outside in the radial direction. Examples of such end effectors include the following.

特許文献１記載の半導体ウエハ支持用治具は、バネ性を持つ結合部によって一体に連結される２本のアームで、半導体ウエハを径方向から挟み込むと共に、各アームの内側対向面に形成される凹部に半導体ウエハの側面を嵌合させている。   The semiconductor wafer support jig described in Patent Document 1 is formed by two arms that are integrally connected by a coupling portion having a spring property, sandwiching the semiconductor wafer from the radial direction, and formed on the inner facing surface of each arm. The side surface of the semiconductor wafer is fitted into the recess.

また、特許文献２記載のウエハ搬送装置は、一対の人差し指（ハンド）を、ホルダ駆動機にてベアリングを中心に回転作動させて開閉させ、ウエハの側面部位を捉え、把持している。   Further, in the wafer transfer apparatus described in Patent Document 2, a pair of index fingers (hands) are rotated and operated around a bearing by a holder driving machine to open and close to grasp and hold a side surface portion of the wafer.

さらに、特許文献３記載のエンドイフェクタ（４００）は、第１アーム（４０２）および第２アーム（４０３）を有するボディ(４０１)を備えている。第１アーム（４０２）および第２アーム（４０３）の先端には、スロット(４１５)を有する円筒状のアクチュエータとして表されるサポートパッド４１０，４１２および４１４，４１６が、それぞれ設けられている。
実開昭６１−１９９０４９号公報 特開平８−２２７９３１号公報 米国特許出願公開第２００７／００２９２２７号明細書 Furthermore, the end effector (400) described in Patent Document 3 includes a body (401) having a first arm (402) and a second arm (403). Support pads 410, 412 and 414, 416 represented as cylindrical actuators having slots (415) are provided at the tips of the first arm (402) and the second arm (403), respectively.
Japanese Utility Model Publication No. 61-199049 JP-A-8-227931 US Patent Application Publication No. 2007/0029227

近年、半導体ウエハは直径が３００ｍｍに達しており、次世代半導体ウエハにいたっては直径が４５０ｍｍにも達する。４５０ｍｍウエハの場合、これまで以上にウエハの撓みや振動が大きくなる懸念がもたれている。
また、大型の半導体ウエハをハンドリングするウエハ搬送装置においては、必然的にハンドの長さも長くなる。よって、装置の駆動部（ウエハをエッジグリップするための駆動機構）にて発生した振動により、発塵や、ハンドおよびウエハの撓み、振動などが発生し、その結果、半導体ウエハの品質や搬送精度の低下を招くおそれがある。 In recent years, the diameter of semiconductor wafers has reached 300 mm, and the diameter of next-generation semiconductor wafers has reached 450 mm. In the case of a 450 mm wafer, there is a concern that the deflection and vibration of the wafer will increase more than ever.
In addition, in a wafer transfer apparatus that handles a large semiconductor wafer, the length of the hand inevitably increases. Therefore, the vibration generated by the drive unit of the device (drive mechanism for edge gripping the wafer) generates dust, bending of the hand and wafer, vibration, etc. As a result, the quality and transfer accuracy of the semiconductor wafer There is a risk of lowering.

以上の事情を考慮して創案された本発明の目的は、発塵や、ハンドおよび基板の撓み、振動が少ないエンドイフェクタを提供することにある。   An object of the present invention created in view of the above circumstances is to provide an end effector with less dust generation, bending of a hand and a substrate, and vibration.

上記目的を達成すべく請求項１に係る発明は、ロボットハンドに取り付けられ、基板の周縁を径方向外方から把持するエンドイフェクタにおいて、前記ロボットハンドに取り付けられるベース部材と、前記ベース部材に設けられるＵ字状のハンド部材と、前記ハンド部材の連結側に接続して設けられ、ハンド部材の先端開口側を開閉駆動するアクチュエータと、を備え、前記ハンド部材は、左右対称な一対のハンド部、前記両ハンド部を一体に連結し、前記アクチュエータに接続される連結可撓部、および両ハンド部に設けられ、前記基板の周縁を把持する基板把持部を有し、前記ハンド部材の前記先端開口側を開閉駆動すべく、前記両ハンド部の前記連結可撓部寄りの部分と前記ベース部材とを回動支持部材にてそれぞれピン結合し、両ハンド部をベース部材に対して回動自在に設けたエンドイフェクタである。   In order to achieve the above object, an invention according to claim 1 is an end effector that is attached to a robot hand and grips the peripheral edge of the substrate from the outside in the radial direction, and a base member attached to the robot hand; A U-shaped hand member provided on the connecting side of the hand member, and an actuator that opens and closes the front end opening side of the hand member. A joint flexible part connected to the actuator, and a substrate gripping part for gripping the peripheral edge of the substrate, and the hand member of the hand member. In order to open and close the front end opening side, the portions close to the connecting flexible portion of the both hand portions and the base member are respectively pin-coupled by a rotation support member, It is a end effector provided rotatably with respect to the de-portion base member.

以上の構成によれば、アクチュエータにてハンド部材の連結可撓部を駆動させるだけで、回動支持部材を中心に両ハンド部が回動して開閉駆動され、両ハンド部に設けられる基板把持部にて基板の周縁を径方向外方から把持することができる。   According to the above configuration, by simply driving the connecting flexible portion of the hand member with the actuator, both the hand portions are rotated around the rotation support member to be opened and closed, and the substrate grips provided on the both hand portions are provided. The peripheral edge of the substrate can be gripped from the outside in the radial direction by the portion.

請求項２に係る発明は、前記ハンド部材は、前記連結可撓部が板バネ状の薄板で構成され、その連結可撓部を支点に前記両ハンド部がＵ字状に湾曲形成され、前記回転支持部材にて前記ベース部材に対して回動自在に設けられる、請求項１記載のエンドイフェクタである。   According to a second aspect of the present invention, in the hand member, the connecting flexible portion is formed of a leaf spring-like thin plate, and both the hand portions are formed in a U shape with the connecting flexible portion as a fulcrum, The end effector according to claim 1, wherein the end effector is rotatably provided with respect to the base member by a rotation support member.

請求項３に係る発明は、前記アクチュエータは、前記両ハンド部の長手方向に沿って駆動自在であり、前記連結可撓部の中央部に１つ接続される、請求項１記載のエンドイフェクタである。   The invention according to claim 3 is the end effector according to claim 1, wherein the actuator can be driven along the longitudinal direction of the both hand portions, and is connected to the central portion of the connecting flexible portion. It is.

請求項４に係る発明は、前記基板把持部が、前記両ハンド部の上面に設けられる段差部であり、その段差部に前記基板の裏面周縁部が載置、支持されると共に、段差部にて基板の周縁が把持される、請求項１記載のエンドイフェクタである。   According to a fourth aspect of the present invention, the substrate gripping portion is a stepped portion provided on the upper surfaces of the two hand portions, and the back surface peripheral edge portion of the substrate is placed and supported on the stepped portion, and the stepped portion is The end effector according to claim 1, wherein a peripheral edge of the substrate is gripped.

請求項５に係る発明は、前記基板把持部が、前記両ハンド部の対向する側面に設けられる溝部であり、その溝部にて前記基板の周縁が把持される、請求項１記載のエンドイフェクタである。   The invention according to claim 5 is the end effector according to claim 1, wherein the substrate gripping portion is a groove portion provided on the opposing side surfaces of the both hand portions, and the periphery of the substrate is gripped by the groove portion. It is.

請求項６に係る発明は、前記基板把持部は、前記ハンド部の上面にそれぞれ２つ設けられる前記段差部で構成され、各段差部はハンド部の上面に近い方から第１段差、第２段差の２つの段差を有し、前記両ハンド部の４つの前記第１段差上に、前記基板の裏面周縁部が載置、支持される、請求項４に記載のエンドイフェクタである。   According to a sixth aspect of the present invention, the substrate gripping portion includes the two step portions provided on the upper surface of the hand portion, and each step portion has a first step and a second step from the side closer to the upper surface of the hand portion. 5. The end effector according to claim 4, wherein the back edge peripheral portion of the substrate is placed and supported on the four first steps of the two hand portions.

請求項７に係る発明は、前記基板把持部は、前記ハンド部の上面にそれぞれ１つ設けられる前記段差部および前記ベース部材に少なくとも１つ設けられるベース側段差部で構成され、前記各段差部は１段の段差からなる第１段差を有し、前記各ベース側段差部はベース部材の上面に近い方から第３段差、第４段差の２つの段差を有し、前記両ハンド部の２つの前記第１段差および前記ベース部材の少なくとも１つの前記第４段差上に、前記基板の裏面周縁部が載置、支持される、請求項４に記載のエンドイフェクタである。   According to a seventh aspect of the present invention, the substrate gripping portion includes the step portion provided on the upper surface of the hand portion and the base side step portion provided on the base member, and each step portion. Has a first step consisting of a single step, and each base-side step portion has two steps of a third step and a fourth step from the side closer to the upper surface of the base member, and 2 of the two hand portions. 5. The end effector according to claim 4, wherein a back surface peripheral edge portion of the substrate is placed and supported on at least one of the first step and the fourth step of the base member.

請求項８に係る発明は、前記第１段差および前記第４段差は、前記両ハンド部の先端上面および前記第３段差の上面に設けられるピンで構成される、請求項７に記載のエンドイフェクタである。   The invention according to claim 8 is the end effect according to claim 7, wherein the first step and the fourth step are configured by pins provided on the upper surfaces of the front ends of the both hand portions and the upper surface of the third step. Kuta.

請求項９に係る発明は、前記連結可撓部は前記ベース部材の本体部上に設けられ、前記両ハンド部の大部分は本体部から迫り出して設けられる、請求項２記載のエンドイフェクタである。   The invention according to claim 9 is the end effector according to claim 2, wherein the connecting flexible portion is provided on the main body portion of the base member, and most of the both hand portions are provided protruding from the main body portion. It is.

請求項１０に係る発明は、前記ベース部材は、前記本体部と一体に設けられ、かつ、前記基板把持部にて把持される前記基板の裏面を支持する基板支持部を有する、請求項９記載のエンドイフェクタである。   The invention according to claim 10 is characterized in that the base member has a substrate support portion that is provided integrally with the main body portion and supports the back surface of the substrate held by the substrate holding portion. It is an end effector.

請求項１１に係る発明は、前記ベース部材の前記本体部および前記基板支持部はその内部に気体供給通路を有し、前記気体供給通路の一端は前記本体部の表面に開口され、前記気体供給通路の他端は前記基板支持部の基板対向面に開口される、請求項１０記載のエンドイフェクタである。   According to an eleventh aspect of the present invention, the main body portion and the substrate support portion of the base member have a gas supply passage therein, and one end of the gas supply passage is opened on the surface of the main body portion, and the gas supply The end effector according to claim 10, wherein the other end of the passage is opened on a substrate facing surface of the substrate support portion.

本発明によれば、基板の周縁を径方向外方から把持する両ハンド部を開閉させるための駆動部が、アクチュエータと、ハンド部と回動支持部材の両境界部だけであり、発塵や、ハンド部および基板の撓み、振動が少ないエンドイフェクタが得られるという優れた効果を発揮する。   According to the present invention, the drive unit for opening and closing both the hand parts that grip the peripheral edge of the substrate from the outside in the radial direction is only the actuator and both boundary parts of the hand part and the rotation support member. An excellent effect is obtained in that an end effector with less bending and vibration of the hand part and the substrate can be obtained.

以下、本発明の好適一実施の形態を添付図面に基づいて説明する。
本発明の好適一実施の形態に係るエンドイフェクタの斜視図を図１に示す。
図１に示すように、本実施の形態に係るエンドイフェクタ１００は、ロボットハンドＨのアームＡの先端に取り付けられ、基板（例えば、半導体ウエハ）Ｗの周縁を径方向外方から把持（エッジグリップ）するものである。
エンドイフェクタ１００は、アームＡの先端に取り付けられる板状のベース部材１１と、ベース部材１１の上面に設けられるＵ字状のハンド部材１２と、ハンド部材１２の連結側（図１中では左下側）に接続して設けられ、ハンド部材１２の先端開口側（図１中では右上側）を開閉駆動する１つのアクチュエータ１３と、を備える。ハンド部材１２は、ベース部材１１の下面に設けてもよい。 DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a preferred embodiment of the invention will be described with reference to the accompanying drawings.
FIG. 1 shows a perspective view of an end effector according to a preferred embodiment of the present invention.
As shown in FIG. 1, an end effector 100 according to the present embodiment is attached to the tip of an arm A of a robot hand H, and grips the edge of a substrate (for example, a semiconductor wafer) W from the outside in the radial direction (edge). Grip).
The end effector 100 includes a plate-like base member 11 attached to the tip of the arm A, a U-shaped hand member 12 provided on the upper surface of the base member 11, and a connection side of the hand member 12 (lower left in FIG. 1). And an actuator 13 that opens and closes the distal end opening side (upper right side in FIG. 1) of the hand member 12. The hand member 12 may be provided on the lower surface of the base member 11.

ベース部材１１の本体部１１０におけるロボットハンド取付側（図１中では左下側）には取付穴１４１が貫通形成される。これらの取付穴１４１に対応して、アームＡにも取付穴１４２が貫通形成される。本体部１１０はアームＡの上面に載置され、貫通穴１４１，１４２に挿通されるピンなどの締結手段１４０により、本体部１１０とアームＡとが固定される。   A mounting hole 141 is formed through the body 110 of the base member 11 on the robot hand mounting side (lower left side in FIG. 1). Corresponding to these mounting holes 141, mounting holes 142 are also formed through the arm A. The main body 110 is placed on the upper surface of the arm A, and the main body 110 and the arm A are fixed by fastening means 140 such as pins inserted through the through holes 141 and 142.

ハンド部材１２は、左右対称な一対のハンド部１２１、両ハンド部１２１を一体に連結し、アクチュエータ１３に接続される連結可撓部１２２、両ハンド部１２１の上面に設けられ、基板Ｗの裏面周縁部が載置、支持されると共に、基板Ｗの周縁が把持される基板把持部３０、および両ハンド部１２１の連結可撓部１２２寄りの位置に開口形成されるハンド穴１２４を有する。一方、本体部１１０のハンド穴１２４に対向する部分それぞれには、ベース穴１５１が開口形成される。ここで、両ハンド部１２１および連結可撓部１２２は、別々の部材同士を一体に連結したもの、１つの部材からなる一体物のいずれであってもよいが、製造性、組立性の観点に立つと、一体物の方が好ましい。   The hand member 12 is provided on the upper surface of the pair of hand portions 121, the both hand portions 121, the connecting flexible portion 122 connected to the actuator 13, and the both hand portions 121. The peripheral edge portion is placed and supported, and has a substrate gripping portion 30 where the peripheral edge of the substrate W is gripped, and a hand hole 124 formed at a position near the connecting flexible portion 122 of both hand portions 121. On the other hand, a base hole 151 is formed in each part of the main body 110 facing the hand hole 124. Here, both the hand part 121 and the connecting flexible part 122 may be either one in which separate members are integrally connected, or one unit consisting of one member, but in terms of manufacturability and assemblability. When standing, a monolith is preferred.

向かい合うハンド穴１２４およびベース穴１５１には、両ハンド部１２１をベース部材１１に対して回動自在に支持すべく、図２に示すように、回転支持部材（ピン）２００がそれぞれ挿設される。回転支持部材２００は、中央部を構成する円板状のピン体２０１の両側に小径段差部であるベースピン部２０２およびハンドピン部２０３をそれぞれ有する。ベースピン部２０２はベース穴１５１に嵌入され、ピン体２０１の下面がベース部材１１の上面に着座される。ハンドピン部２０３はハンド穴１２４に遊嵌、挿通され、ハンドピン部２０３の上端部にワッシャー２１１を介してナット２１２が螺合される。   As shown in FIG. 2, rotation support members (pins) 200 are respectively inserted into the facing hand hole 124 and the base hole 151 so as to rotatably support both hand portions 121 with respect to the base member 11. . The rotation support member 200 includes a base pin portion 202 and a hand pin portion 203 which are small-diameter step portions on both sides of a disk-shaped pin body 201 constituting the center portion. The base pin portion 202 is fitted into the base hole 151, and the lower surface of the pin body 201 is seated on the upper surface of the base member 11. The hand pin portion 203 is loosely fitted and inserted into the hand hole 124, and a nut 212 is screwed to the upper end portion of the hand pin portion 203 via a washer 211.

ハンド部材１２は、連結可撓部１２２が板バネ状の薄板で構成され、その連結可撓部（板バネ部）１２２を支点に両ハンド部１２１を湾曲させて左右対称なＵ字状に形成される。このＵ字状のハンド部材１２における両ハンド部１２１が、回転支持部材２００にてベース部材１１に取り付けられている。このとき、連結可撓部１２２はベース部材１１の本体部１１０上に設けられ、両ハンド部１２１の大部分（ハンド穴１２４よりも先の部分）は本体部１１０から迫り出して設けられる。図１中では、連結可撓部１２２が、ロボットハンド側（図１中では左下側）に引っ張られた（又は押された）ときに、両ハンド部１２１が閉駆動され、ハンド部材１２の先端開口側（図１中では右上側）に押された（又は引っ張られた）ときに、両ハンド部１２１が開駆動される。   In the hand member 12, the connecting flexible portion 122 is configured by a thin plate of a leaf spring shape, and both the hand portions 121 are curved with the connecting flexible portion (plate spring portion) 122 as a fulcrum to form a symmetrical U-shape. Is done. Both hand portions 121 of the U-shaped hand member 12 are attached to the base member 11 by a rotation support member 200. At this time, the connecting flexible portion 122 is provided on the main body portion 110 of the base member 11, and most of the both hand portions 121 (portions ahead of the hand holes 124) are provided so as to protrude from the main body portion 110. In FIG. 1, when the connecting flexible portion 122 is pulled (or pushed) to the robot hand side (lower left side in FIG. 1), both the hand portions 121 are driven to close, and the tip of the hand member 12. When pushed (or pulled) to the opening side (upper right side in FIG. 1), both hand portions 121 are driven to open.

本体部１１０上には、両ハンド部１２１の長手方向に沿って駆動自在なアクチュエータ１３が、ハンド部材１２の連結可撓部１２２の中央部に接続される。アクチュエータ１３としては、両ハンド部１２１の長手方向に沿って連結可撓部１２２を進退駆動させることができるものであればよく、例えば、モータ、ソレノイド、エアシリンダ、圧電素子などが挙げられる。また、アクチュエータ１３として形状記憶合金製のワイヤを用い、そのワイヤに電流を流して加熱し、温度変化に伴う変形力により連結可撓部１２２を進退駆動させるようにしてもよい。この場合、ワイヤは本体部１１０上に設ける必要はなく、連結可撓部１２２に接続されてさえすればよい。   On the main body 110, the actuator 13 that can be driven along the longitudinal direction of both hand portions 121 is connected to the central portion of the coupling flexible portion 122 of the hand member 12. The actuator 13 may be any actuator that can drive the connecting flexible portion 122 forward and backward along the longitudinal direction of the both hand portions 121. Examples thereof include a motor, a solenoid, an air cylinder, and a piezoelectric element. Alternatively, a wire made of a shape memory alloy may be used as the actuator 13, and a current may be passed through the wire to heat it, and the connecting flexible portion 122 may be driven forward and backward by a deformation force accompanying a temperature change. In this case, the wire does not need to be provided on the main body portion 110, and only needs to be connected to the connecting flexible portion 122.

図３に示すように、基板把持部３０は、両ハンド部１２１の上面に設けられる段差部である。段差部は両ハンド部１２１にそれぞれ２つ設けられ、各段差部はハンド部１２１の上面に近い方から第１段差３１、第２段差３２の２つの段差で構成される。両ハンド部１２１の４つの第１段差３１の水平面上に、基板Ｗの裏面周縁部の一部（図３中のＺ領域）が載置される。両ハンド部１２１の４つの第１段差３１は、ハンド部材１２の先端開口側を閉じ、基板Ｗの周縁を基板把持部３０にてエッジグリップした際にほぼ真円をなすように、図４に示すように、それぞれのハンド部１２１における２つの第１段差３１は同心の円弧状に形成される。また、ハンド部１２１の円弧はそれぞれ同径（図４中ではｒ１）に形成される。一方、各第２段差３２の水平面は連続しており、面一となっている。   As shown in FIG. 3, the substrate gripping portion 30 is a stepped portion provided on the upper surfaces of both the hand portions 121. Two stepped portions are provided in each of the hand portions 121, and each stepped portion is composed of two steps of a first step 31 and a second step 32 from the side closer to the upper surface of the hand portion 121. On the horizontal plane of the four first steps 31 of the two hand portions 121, a part of the rear surface peripheral edge portion (Z region in FIG. 3) of the substrate W is placed. The four first steps 31 of the both hand portions 121 close to the front end opening side of the hand member 12 and form a substantially perfect circle when the peripheral edge of the substrate W is edge gripped by the substrate gripping portion 30 in FIG. As shown, the two first steps 31 in each hand part 121 are formed in a concentric arc shape. Further, the arcs of the hand portion 121 are formed to have the same diameter (r1 in FIG. 4). On the other hand, the horizontal surfaces of the second steps 32 are continuous and flush with each other.

図３に示すように、第１段差３１の垂直面は、フラット（溝なし）であってもよいが、図５、図６に示すように、第１段差３１の垂直面に凹状の溝５０を設けてもよい。溝５０の断面形状は、図５に示すＵ字状、図６に示すＶ字状など特に限定するものではない。第１段差３１の垂直面に溝５０を設けることで、より確実に、基板把持部３０による基板Ｗの周縁の把持が可能となる。   As shown in FIG. 3, the vertical surface of the first step 31 may be flat (no groove), but as shown in FIGS. 5 and 6, a concave groove 50 is formed on the vertical surface of the first step 31. May be provided. The cross-sectional shape of the groove 50 is not particularly limited, such as a U shape shown in FIG. 5 or a V shape shown in FIG. By providing the groove 50 on the vertical surface of the first step 31, the peripheral edge of the substrate W can be more reliably gripped by the substrate gripping portion 30.

また、ハンド部１２１の上面に２つの段差を形成し、第１段差３１、第２段差３２を設ける代わりに、図７、図８に示すように、ハンド部１２１の上面に１つの段差を形成して第２段差３２をなすと共に、ハンド部１２１の上面に垂直軸周りに回転自在なローラ（ピン）７０を設けて第１段差３１の垂直面をなすようにしてもよい。ローラ７０の周面に、図５、図６に示した凹状の溝５０を設けてもよい。また、ローラ７０の代わりに固定ピンを設けてもよい。図７、図８に示すように、ローラ（ピン）７０にて第１段差３１の垂直面をなすことで、図３、図５、および図６に示したハンド部１２１に比べて、ハンド部１２１の全体の厚みｔを薄くすることができる。その結果、ハンド部１２１の重量低減を図ることができ、ハンド部１２１の自重による撓みがより少なくなる。   Also, instead of providing the first step 31 and the second step 32 by forming two steps on the upper surface of the hand portion 121, one step is formed on the upper surface of the hand portion 121 as shown in FIGS. Then, the second step 32 may be formed, and a roller (pin) 70 that is rotatable around the vertical axis may be provided on the upper surface of the hand unit 121 to form the vertical surface of the first step 31. The concave groove 50 shown in FIGS. 5 and 6 may be provided on the peripheral surface of the roller 70. Further, a fixing pin may be provided instead of the roller 70. As shown in FIGS. 7 and 8, by forming a vertical surface of the first step 31 with a roller (pin) 70, the hand portion is compared with the hand portion 121 shown in FIGS. 3, 5, and 6. The total thickness t of 121 can be reduced. As a result, the weight of the hand part 121 can be reduced, and the bending of the hand part 121 due to its own weight is further reduced.

さらに、両ハンド部１２１の上面に設ける基板把持部３０は、図３、図５、および図６に示した下に凹の段差部であってもよいが、図９に示すように、上に凸の段差部であってもよい。図９に示す上に凸の段差部（基板把持部３０）を有するハンド部１２１においても、図７、図８に示したローラ（ピン）７０を有するハンド部１２１と同様に、ハンド部１２１の全体の厚みｔを薄くすることができる。   Further, the substrate gripping portion 30 provided on the upper surfaces of the two hand portions 121 may be a stepped portion having a concave shape as shown in FIGS. 3, 5, and 6, but as shown in FIG. A convex stepped portion may be used. In the hand portion 121 having the upward convex step portion (substrate gripping portion 30) shown in FIG. 9, the hand portion 121 of the hand portion 121 is similar to the hand portion 121 having the roller (pin) 70 shown in FIGS. The overall thickness t can be reduced.

一方、ベース部材１１は、両ハンド部１２１の基板把持部３０により把持される基板Ｗの裏面中央部を支持すべく、図１に示すように、基板支持部１１１を有していてもよい。基板支持部１１１は、本体部１１０と一体に形成され、基板Ｗの裏面中央部へ向かって延設されるフレーム部１１２と、フレーム部１１２の先端に設けられ、基板Ｗの裏面と対向する円盤状の支持本体部１１３とで構成される。支持本体部１１３の中央部には基板支持ピン１１４が設けられる。また、基板支持ピン１１４の周りには、後述する気体供給通路１１７に連通される複数の気体噴出孔１１５が、同心状に設けられる。   On the other hand, the base member 11 may have a substrate support portion 111 as shown in FIG. 1 in order to support the center of the back surface of the substrate W gripped by the substrate gripping portions 30 of the both hand portions 121. The substrate support part 111 is formed integrally with the main body part 110 and extends toward the center of the back surface of the substrate W. The disk 112 is provided at the tip of the frame part 112 and faces the back surface of the substrate W. It is comprised with the support body part 113 of a shape. Substrate support pins 114 are provided at the center of the support body 113. A plurality of gas ejection holes 115 communicating with a gas supply passage 117 described later are provided concentrically around the substrate support pins 114.

ここで、支持本体部１１３には、基板支持ピン１１４および気体噴出孔１１５の少なくとも一方が設けられていればよい。支持本体部１１３が基板支持ピン１１４だけを有するときは、基板Ｗの裏面に支持本体部１１３の基板支持ピン１１４が接触される。支持本体部１１３が気体噴出孔１１５だけを有するときは、支持本体部１１３と基板Ｗの裏面とは非接触とされる。また、図１においては、支持本体部１１３を、フレーム部１１２における基板Ｗの裏面中央部と対向する位置に１つだけ設けた場合を例に挙げたが、２つ以上の支持本体部１１３をフレーム部１１２に設けてもよい。   Here, the support main body 113 only needs to be provided with at least one of the substrate support pins 114 and the gas ejection holes 115. When the support body 113 has only the substrate support pins 114, the substrate support pins 114 of the support body 113 are brought into contact with the back surface of the substrate W. When the support main body 113 has only the gas ejection holes 115, the support main body 113 and the back surface of the substrate W are not in contact with each other. Further, in FIG. 1, the case where only one support main body 113 is provided at a position facing the center of the back surface of the substrate W in the frame portion 112 is described as an example, but two or more support main bodies 113 are provided. You may provide in the flame | frame part 112. FIG.

支持本体部１１３に気体噴出孔１１５を設ける際は、本体部１１０およびフレーム部１１２の内部に気体供給通路１１７が設けられる。気体供給通路１１７の一端は、本体部１１０におけるロボットハンド取付側（図１中では左下側）の表面に開口される。この気体供給通路１１７における本体部１１０の開口に、取付部材１４３の一端側が嵌入される。取付部材１４３の他端側に気体供給管１４４が接続される。   When the gas ejection hole 115 is provided in the support main body 113, the gas supply passage 117 is provided inside the main body 110 and the frame part 112. One end of the gas supply passage 117 is opened on the surface of the main body 110 on the robot hand mounting side (lower left side in FIG. 1). One end of the attachment member 143 is fitted into the opening of the main body 110 in the gas supply passage 117. A gas supply pipe 144 is connected to the other end side of the attachment member 143.

ハンド部材１２の構成材としては、基板Ｗのハンドリングを行う部材の構成材として慣用のものが適用可能であり、特に限定されるものではないが、耐熱性があり、軽量で、撓みの少ないものが好ましい。例えば、ステンレス鋼、アルミ、スーパーエンジニアリングプラスティック（好ましくはＰＥＥＫ）、炭素繊維強化プラスティック、エンジニアリングプラスティックなどが挙げられる。ハンド部材１２における連結可撓部（板バネ部）１２２は、必ずしもバネ材で構成する必要はなく、金属やプラスティックの薄板材で構成してもよい。また、ベース部材１１の構成材としては、ハンド部材１２と同様のものが適用可能である。   As a constituent material of the hand member 12, a conventional one can be applied as a constituent material of the member for handling the substrate W, and is not particularly limited, but has heat resistance, light weight, and little deflection. Is preferred. Examples thereof include stainless steel, aluminum, super engineering plastic (preferably PEEK), carbon fiber reinforced plastic, and engineering plastic. The connecting flexible portion (leaf spring portion) 122 in the hand member 12 does not necessarily need to be formed of a spring material, and may be formed of a thin plate material of metal or plastic. Further, as the constituent material of the base member 11, the same material as the hand member 12 can be applied.

回転支持部材２００および基板支持ピン１１４は摺動、接触部であることから、それらの構成材としては、低発塵性のものが好ましく、例えば、ＰＥＥＫが挙げられる。
気体供給通路１１７、１１８に供給する気体としては、基板Ｗに塵埃などが付着しないよう清浄気体が好ましく、例えば、窒素ガスなどが挙げられる。 Since the rotation support member 200 and the substrate support pin 114 are sliding and contact portions, those constituent materials are preferably those having low dust generation properties, for example, PEEK.
The gas supplied to the gas supply passages 117 and 118 is preferably a clean gas so that dust or the like does not adhere to the substrate W, and examples thereof include nitrogen gas.

次に、本実施の形態の作用を説明する。
本実施の形態に係るエンドイフェクタ１００を用い、ＦＯＵＰカセットなどに多段に収容された基板Ｗを任意の処理装置に移載する動作（搬入動作）について説明する。
先ず、図示しないハンド進退機構にてエンドイフェクタ１００を前進させ、ハンド部材１２がＦＯＵＰカセット内に収容されたある基板Ｗの下方に挿入される。 Next, the operation of this embodiment will be described.
An operation (loading operation) of transferring substrates W accommodated in multiple stages in a FOUP cassette or the like to an arbitrary processing apparatus using the end effector 100 according to the present embodiment will be described.
First, the end effector 100 is advanced by a hand advance / retreat mechanism (not shown), and the hand member 12 is inserted below a certain substrate W accommodated in the FOUP cassette.

次に、図示しない昇降機構にてエンドイフェクタ１００の全体を上昇させる。これにより、基板把持部３０における４つの第１段差３１の水平面にて基板Ｗがすくい上げられ、基板Ｗの裏面周縁部の一部が４つの第１段差３１の水平面にて支持される。よって、基板Ｗの裏面周縁部が、４点で水平支持されるため、基板Ｗの水平方向の撓みがより少なくなる。その結果、後述する４つの第１段差３１の垂直面によるエッジグリップの際に、基板Ｗの周縁における高さ位置の位置ずれが発生するおそれがより少なくなる。ここで、特に大型の基板Ｗをハンドリングするときは、基板Ｗの中央部における撓みがより顕著になる。このため、ベース部材１１に基板支持部１１１を設けておき、この基板支持部１１１と４つの第１段差３１にて、基板Ｗの裏面を下方から支持するようにしてもよい。   Next, the entire end effector 100 is raised by a lifting mechanism (not shown). As a result, the substrate W is scooped up by the horizontal planes of the four first steps 31 in the substrate gripping portion 30, and a part of the rear peripheral edge of the substrate W is supported by the horizontal planes of the four first steps 31. Therefore, since the peripheral edge of the back surface of the substrate W is horizontally supported at four points, the substrate W is less bent in the horizontal direction. As a result, there is less possibility that a positional deviation of the height position on the periphery of the substrate W will occur during edge grip by the vertical surfaces of the four first steps 31 described later. Here, when handling a large substrate W in particular, the bending at the center of the substrate W becomes more prominent. For this reason, the substrate support 111 may be provided on the base member 11 and the back surface of the substrate W may be supported from below by the substrate support 111 and the four first steps 31.

次に、アクチュエータ１３をロボットハンド側に駆動させる。これにより、板バネ部である連結可撓部１２２がロボットハンド側に弾性変形され、連結可撓部１２２と一体の両ハンド部１２１が、両回転支持部材２００を回転中心にして互いに接近する方向に回動される。これによって、ハンド部材１２の先端開口側が閉駆動される。両ハンド部１２１を閉じた際に、各ハンド部１２１における２つの第１段差３１が形成する円弧の中心同士が一致するようハンド部材１２は調整されている。よって、ハンド部材１２の先端開口側を閉駆動させることで、基板把持部３０における４つの第１段差３１の各垂直面がほぼ真円をなす。その結果、基板Ｗの周縁が各垂直面にてエッジグリップされると共に、基板Ｗのセンタリングがなされる。このセンタリングは、アクチュエータ１３の駆動方向の延長線上に、基板Ｗの中心が位置決めするようになされる。   Next, the actuator 13 is driven to the robot hand side. As a result, the connecting flexible portion 122, which is a leaf spring portion, is elastically deformed toward the robot hand, and the two hand portions 121 integral with the connecting flexible portion 122 approach each other around the rotation support members 200 as the rotation center. Is rotated. As a result, the tip opening side of the hand member 12 is driven to close. When both hands 121 are closed, the hand member 12 is adjusted so that the centers of the arcs formed by the two first steps 31 in each hand 121 coincide. Therefore, by closing the front end opening side of the hand member 12, the vertical surfaces of the four first steps 31 in the substrate gripping portion 30 form a substantially perfect circle. As a result, the peripheral edge of the substrate W is edge gripped at each vertical surface, and the substrate W is centered. This centering is performed such that the center of the substrate W is positioned on an extension line in the driving direction of the actuator 13.

その後、ハンド進退機構にてエンドイフェクタ１００を後退させ、エンドイフェクタ１００にてエッジグリップされた基板Ｗが、ＦＯＵＰカセット内から取り出される。取り出された基板Ｗは、エンドイフェクタ１００にてエッジグリップされたまま、所望の処理装置における所定の箇所に移動される。   After that, the end effector 100 is moved backward by the hand advance / retreat mechanism, and the substrate W edge-gripped by the end effector 100 is taken out from the FOUP cassette. The taken-out substrate W is moved to a predetermined position in a desired processing apparatus while being edge gripped by the end effector 100.

エンドイフェクタを処理装置の所定の受け渡し位置に移動させた後、アクチュエータ１３をハンド部材先端側に駆動させる。これにより、板バネ部である連結可撓部１２２がハンド部材先端側に弾性変形され、連結可撓部１２２と一体の両ハンド部１２１が、両回転支持部材２００を回転中心にして互いに離間する方向に回動される。そして、ハンド部材１２の先端開口側が開駆動され、エッジグリップが解除（把持ＯＦＦ）される。このとき、基板Ｗは、４つの第１段差３１の水平面のみで支持された状態である。   After the end effector is moved to a predetermined delivery position of the processing apparatus, the actuator 13 is driven to the front end side of the hand member. As a result, the connecting flexible portion 122, which is a leaf spring portion, is elastically deformed toward the distal end side of the hand member, and the two hand portions 121 integral with the connecting flexible portion 122 are separated from each other with the two rotation support members 200 as the rotation center. Rotated in the direction. Then, the distal end opening side of the hand member 12 is driven to open, and the edge grip is released (gripping OFF). At this time, the substrate W is in a state of being supported only by the horizontal surfaces of the four first steps 31.

その後、昇降機構にてエンドイフェクタ１００の全体を下降させる。これにより、４つの第１段差３１の水平面にて支持された基板Ｗが、処理装置の所定の受け渡し位置に移載され、搬入動作が完了する。   Thereafter, the entire end effector 100 is lowered by the lifting mechanism. Thereby, the substrate W supported by the horizontal surfaces of the four first steps 31 is transferred to the predetermined delivery position of the processing apparatus, and the carry-in operation is completed.

処理装置に搬入され、所定の処理が施された基板Ｗは、処理装置からＦＯＵＰカセット（又は他の処理装置）へ搬出、移載される。この基板Ｗの搬出動作も、前述した搬入動作と同様の手順にてなされる。   The substrate W that has been loaded into the processing apparatus and subjected to the predetermined processing is carried out from the processing apparatus to the FOUP cassette (or other processing apparatus) and transferred. The unloading operation of the substrate W is also performed in the same procedure as the above-described loading operation.

本実施の形態に係るエンドイフェクタ１００は、基板Ｗの周縁を把持する左右のハンド部１２１を、連結可撓部１２２を介して一体に構成しており、連結可撓部１２２を１箇所駆動させるだけで、すなわち１つのアクチュエータ１３で、両ハンド部１２１が左右対称に開閉駆動される。ここで、前述した特許文献３記載のエンドイフェクタにおいては、両ハンド部にアクチュエータがそれぞれ設けられ、両ハンド部が独立駆動される。よって、両アクチュエータのずれ（非同期）に起因して両ハンド部の開閉駆動にバラツキが生じ、両ハンド部による基板のセンタリング精度にバラツキが生じる。これに対して、本実施の形態に係るエンドイフェクタ１００は、１つのアクチュエータ１３で両ハンド部１２１を左右対称に開閉駆動させることから、両ハンド部１２１の開閉駆動にバラツキが生じることはない。その結果、両ハンド部１２１による基板Ｗのセンタリング精度にばらつきが生じることはなく、常に安定している。よって、両ハンド部１２１による基板Ｗのセンタリング精度が大幅に向上する。   In the end effector 100 according to the present embodiment, the left and right hand portions 121 that grip the periphery of the substrate W are integrally configured via a connecting flexible portion 122, and the connecting flexible portion 122 is driven at one location. In other words, the two hand portions 121 are opened / closed symmetrically by the single actuator 13. Here, in the above-described end effector described in Patent Document 3, actuators are provided in both hand portions, and both hand portions are driven independently. Therefore, due to the displacement (asynchronous) of both actuators, variation occurs in the opening / closing drive of both hand portions, resulting in variation in the centering accuracy of the substrate by both hand portions. On the other hand, since the end effector 100 according to the present embodiment causes both the hand portions 121 to be opened / closed symmetrically by the single actuator 13, the opening / closing drive of the both hand portions 121 does not vary. . As a result, the centering accuracy of the substrate W by the two hand portions 121 does not vary and is always stable. Therefore, the centering accuracy of the substrate W by both the hand portions 121 is greatly improved.

また、本実施の形態に係るエンドイフェクタ１００において、両ハンド部１２１を開閉駆動させる際の可動部（摺動部）は、ハンド部１２１と回転支持部材２００とが係合、接続される部分だけであるので、両ハンド部１２１の開閉に伴う発塵を最小限に抑えることができる。   In the end effector 100 according to the present embodiment, the movable part (sliding part) when the both hand parts 121 are opened and closed is a part where the hand part 121 and the rotation support member 200 are engaged and connected. Therefore, dust generation associated with opening and closing of both hand portions 121 can be minimized.

また、本実施の形態に係るエンドイフェクタ１００は、前述したように、両ハンド部１２１を開閉駆動させる際の可動部を最小限としているため、発塵抑制の他に、開閉駆動に伴う両ハンド部１２１の先端の撓みや振動が少なくなる。この撓み、振動の抑制効果は、ハンド部１２１の長さが長くなるほど、すなわち基板Ｗのサイズが大型になるほど、より顕著に現れる。この撓み、振動の抑制の結果、両ハンド部１２１による基板Ｗの正確なセンタリング（エッジグリップの再現性）が可能となる。   In addition, as described above, the end effector 100 according to the present embodiment minimizes the movable portion when the both hand portions 121 are driven to open and close, so that in addition to suppressing dust generation, The bending and vibration at the tip of the hand part 121 are reduced. The effect of suppressing bending and vibration becomes more prominent as the length of the hand portion 121 increases, that is, as the size of the substrate W increases. As a result of the suppression of the bending and vibration, accurate centering of the substrate W (edge grip reproducibility) by both the hand portions 121 is possible.

また、基板Ｗのセンタリングを行うエッジグリップ時に、基板Ｗと基板把持部３０との接触、摺動領域は、基板Ｗの裏面周縁部および周縁の一部、すなわち基板Ｗの裏面の内で、４つの第１段差３１における各水平面および各垂直面（図４に示す４つの接触領域Ｚ）と対向する領域だけである。よって、エッジグリップに伴う基板Ｗと基板把持部３０との接触、摺動面積は少なく、基板Ｗの前後左右方向（水平方向）のずらし動作はごくわずかである。このため、基板把持部３０による把持に伴う基板Ｗへの影響は最小限に抑えることができる。このことは、基板Ｗの開放（把持ＯＦＦ）時においても同様である。   Further, at the time of edge grip for centering the substrate W, the contact and sliding area between the substrate W and the substrate gripping portion 30 are 4 in the back surface peripheral portion and part of the peripheral surface of the substrate W, that is, the back surface of the substrate W. Only the regions facing the horizontal surfaces and the vertical surfaces (four contact regions Z shown in FIG. 4) in the first step 31 are provided. Therefore, the contact and sliding area between the substrate W and the substrate gripping portion 30 associated with the edge grip is small, and the shifting operation of the substrate W in the front-rear and left-right directions (horizontal direction) is very small. For this reason, the influence on the board | substrate W accompanying the holding | grip by the board | substrate holding part 30 can be suppressed to the minimum. This is the same when the substrate W is opened (gripping OFF).

本実施の形態の作用においては、アクチュエータ１３を、ロボットハンド側に駆動させたときにハンド部材１２の先端開口側が閉駆動し、ハンド部材先端側に駆動させたときにハンド部材１２の先端開口側が開駆動する例にて説明を行ったが、特にこれに限定するものではない。例えば、アクチュエータ１３を、ハンド部材先端側に駆動させたときに閉駆動し、ロボットハンド側に駆動させたときに開駆動するように調整してもよい。また、アクチュエータ１３は、ロボットハンド側およびハンド部材先端側に駆動させたときに開駆動し、アクチュエータ１３駆動させていないとき（非駆動時）に閉駆動するように調整してもよい。これらの調整は、連結可撓部１２２の板バネとしての機能を調整することで、任意に調整可能である。   In the operation of the present embodiment, when the actuator 13 is driven to the robot hand side, the tip opening side of the hand member 12 is driven to close, and when the actuator 13 is driven to the hand member tip side, the tip opening side of the hand member 12 is Although an example in which the drive is opened has been described, the present invention is not particularly limited thereto. For example, the actuator 13 may be adjusted so as to be closed when driven to the tip side of the hand member and to be opened when driven to the robot hand side. Further, the actuator 13 may be adjusted so as to be opened when driven to the robot hand side and the tip end side of the hand member, and to be closed when the actuator 13 is not driven (when not driven). These adjustments can be arbitrarily adjusted by adjusting the function of the connecting flexible portion 122 as a leaf spring.

次に、本実施の形態の変形例を添付図面に基づいて説明する。
（第１変形例）
図１の第１変形例を図１０に示す。
図１に示したエンドイフェクタ１００は、ハンド部１２１だけに基板把持部３０が設けられたものであった。一方、図１０に示す第１変形例のエンドイフェクタ１０１は、ハンド部１２１およびベース部材１１の両方に基板把持部３０が設けられる点で異なっている。エンドイフェクタ１０１のその他の構成は、図１に示したエンドイフェクタ１００と同様であり、相違点のみを以下に説明する。 Next, a modification of the present embodiment will be described with reference to the accompanying drawings.
(First modification)
A first modification of FIG. 1 is shown in FIG.
The end effector 100 shown in FIG. 1 has the substrate gripping portion 30 provided only in the hand portion 121. On the other hand, the end effector 101 of the first modification shown in FIG. 10 is different in that the substrate gripping portion 30 is provided on both the hand portion 121 and the base member 11. The other configuration of the end effector 101 is the same as that of the end effector 100 shown in FIG. 1, and only the differences will be described below.

図１１に示すように、基板把持部３０は、両ハンド部１２１の上面にそれぞれ１つ設けられる段差部と、ベース部材１１の本体部１１０に少なくとも１つ（図１０中では２つを図示）設けられるベース側段差部３３０で構成される。
各段差部は、１段の段差からなる第１段差３１である。また、各ベース側段差部３３０は２つの段差からなり、本体部１１０の上面に近い方から第３段差３３３、第４段差３３４の順に設けられる。ベース側段差部３３０は、図９に示した段差部のように、上に凸の段差部である。これらの両ハンド部１２１の２つの第１段差３１およびベース部材１１の２つの第４段差３３４にて、基板Ｗの裏面周縁部が支持される。 As shown in FIG. 11, at least one substrate gripping portion 30 is provided in each of the step portions provided on the upper surfaces of both hand portions 121 and the main body portion 110 of the base member 11 (two are shown in FIG. 10). It is comprised by the base side level | step-difference part 330 provided.
Each step portion is a first step 31 composed of one step. Each base-side step portion 330 includes two steps, and is provided in the order of the third step 333 and the fourth step 334 from the side closer to the upper surface of the main body 110. The base-side stepped portion 330 is a stepped portion that is convex upward, like the stepped portion shown in FIG. The back peripheral edge of the substrate W is supported by the two first steps 31 of the two hand portions 121 and the two fourth steps 334 of the base member 11.

両ハンド部１２１の各第１段差３１は、ハンド部材１２の先端開口側を閉じ、基板Ｗの周縁を基板把持部３０にてエッジグリップした際にほぼ真円をなすように、それぞれのハンド部１２１における１つの第１段差３１は同心の円弧状に形成される。また、ベース部材１１の各第４段差３３４も、同心の円弧状に形成される。そして、これらハンド部１２１の円弧およびベース部材１１の円弧はそれぞれ同径に形成される。   Each first step 31 of both hand portions 121 closes the tip opening side of the hand member 12 and each hand portion forms a substantially perfect circle when the peripheral edge of the substrate W is edge gripped by the substrate gripping portion 30. One first step 31 in 121 is formed in a concentric arc shape. Each fourth step 334 of the base member 11 is also formed in a concentric arc shape. The arc of the hand portion 121 and the arc of the base member 11 are formed to have the same diameter.

ここで、基板Ｗのサイズによっては、図１０に二点鎖線で示すように、支持本体部１１３を、ベース部材１１の上面における基板Ｗの裏面中央部に対向する位置に直接設け、基板Ｗの裏面中央部を支持するようにしてもよい。   Here, depending on the size of the substrate W, as shown by a two-dot chain line in FIG. 10, the support main body portion 113 is directly provided at a position facing the center of the back surface of the substrate W on the upper surface of the base member 11. You may make it support a back surface center part.

本変形例のエンドイフェクタ１０１を用い、ＦＯＵＰカセットなどに多段に収容された基板Ｗを任意の処理装置に移載する動作（搬入動作）について説明する。
先ず、図示しないハンド進退機構にてエンドイフェクタ１０１を前進させ、ベース部材１１の先端側がＦＯＵＰカセット内に収容されたある基板Ｗの下方に挿入される。 An operation (loading operation) of transferring the substrates W accommodated in multiple stages in a FOUP cassette or the like to an arbitrary processing apparatus using the end effector 101 of this modification will be described.
First, the end effector 101 is advanced by a hand advance / retreat mechanism (not shown), and the tip end side of the base member 11 is inserted below a certain substrate W accommodated in the FOUP cassette.

次に、図示しない昇降機構にてエンドイフェクタ１０１の全体を上昇させる。これにより、基板把持部３０における２つの第１段差３１および２つの第４段差３３４の各水平面にて基板Ｗがすくい上げられ、基板Ｗの裏面周縁部の一部が各第１段差３１および各第４段差３３４の各水平面にて支持される。これにより、基板Ｗの水平方向の撓みがより少なくなり、後述する各第１段差３１および各第４段差３３４の各垂直面によるエッジグリップの際に、基板Ｗの周縁における高さ位置の位置ずれが発生するおそれがより少なくなる。ここで、特に大型の基板Ｗをハンドリングするときは、基板Ｗの中央部における撓みがより顕著になる。このため、本体部１１０に支持本体部１１３を設けておき、この支持本体部１１３と各第１段差３１および各第４段差３３４にて、基板Ｗの裏面を下方から支持するようにしてもよい。   Next, the entire end effector 101 is raised by a lifting mechanism (not shown). As a result, the substrate W is scooped up at each horizontal plane of the two first steps 31 and the two fourth steps 334 in the substrate gripping portion 30, and a part of the peripheral edge of the back surface of the substrate W is separated from each of the first steps 31 and each of the first steps. It is supported on each horizontal plane of the four steps 334. As a result, the horizontal deflection of the substrate W is further reduced, and the positional displacement of the height position at the periphery of the substrate W during edge grip by the vertical surfaces of the first step 31 and the fourth step 334 described later. Is less likely to occur. Here, when handling a large substrate W in particular, the bending at the center of the substrate W becomes more prominent. For this reason, the main body 110 may be provided with the support main body 113, and the back surface of the substrate W may be supported from below by the support main body 113, the first steps 31 and the fourth steps 334. .

次に、ハンド進退機構にてエンドイフェクタ１０１全体をわずかに後退させ、２つの第４段差３３４の垂直面に、基板Ｗのエンドイフェクタ先端側の周縁を当接させる。
その後、アクチュエータ１３をロボットハンド側に駆動させる。これにより、板バネ部である連結可撓部１２２がロボットハンド側に弾性変形され、連結可撓部１２２と一体の両ハンド部１２１が、両回転支持部材２００を回転中心にして互いに接近する方向に回動される。これによって、ハンド部材１２の先端開口側が閉駆動され、両ハンド部１２１の第１段差３１の垂直面が、基板Ｗのロボットハンド側の周縁に当接される。 Next, the end effector 101 as a whole is slightly retracted by the hand advance / retreat mechanism, and the peripheral edge of the end effector tip side of the substrate W is brought into contact with the vertical surface of the two fourth steps 334.
Thereafter, the actuator 13 is driven to the robot hand side. As a result, the connecting flexible portion 122, which is a leaf spring portion, is elastically deformed toward the robot hand, and the two hand portions 121 integral with the connecting flexible portion 122 approach each other around the rotation support members 200 as the rotation center. Is rotated. As a result, the front end opening side of the hand member 12 is driven to close, and the vertical surface of the first step 31 of both hand portions 121 is brought into contact with the peripheral edge of the substrate W on the robot hand side.

この当接の際に、両ハンド部１２１の各第１段差３１が形成する円弧と、ベース部材１１の各第４段差３３４が形成する円弧の中心同士が一致するようベース部材１１およびハンド部材１２は調整されている。よって、ハンド部材１２の先端開口側を閉駆動させることで、基板把持部３０における各第１段差３１および各第４段差３３４の各垂直面がほぼ真円をなす。その結果、基板Ｗの周縁が各垂直面にてエッジグリップされる。   At the time of this contact, the base member 11 and the hand member 12 so that the arcs formed by the first steps 31 of the hand portions 121 and the arcs of the fourth steps 334 of the base member 11 coincide with each other. Has been adjusted. Therefore, the vertical surfaces of the first step 31 and the fourth step 334 in the substrate gripping portion 30 form a perfect circle by driving the front end opening side of the hand member 12 to close. As a result, the peripheral edge of the substrate W is edge gripped at each vertical surface.

本変形例のエンドイフェクタ１０１は、本体部１１０の全長が、図１に示したエンドイフェクタ１００のものと比較して長くなるので、その分だけ重量増となる。しかしながら、本変形例のエンドイフェクタ１０１は、両ハンド部１２１全体が本体部１１０の上に設けられており、また、基板把持部３０の一部を構成するベース側段差部３３０も本体部１１０上に設けられている。このため、エンドイフェクタ１０１においては、基板把持部３０の撓みがほとんどなく、図１に示したエンドイフェクタ１００と比較して基板Ｗに生じる撓み量がより少なくなる。   In the end effector 101 of this modification, the overall length of the main body 110 is longer than that of the end effector 100 shown in FIG. However, in the end effector 101 of this modification example, both the hand portions 121 are entirely provided on the main body portion 110, and the base side stepped portion 330 constituting a part of the substrate gripping portion 30 is also the main body portion 110. It is provided above. For this reason, in the end effector 101, there is almost no bending of the board | substrate holding part 30, and the bending amount which arises in the board | substrate W compared with the end effector 100 shown in FIG. 1 becomes smaller.

（第２変形例）
図１のエンドイフェクタの第２変形例、言い換えると、図１０のエンドイフェクタの変形例を図１２に示す。
図１０に示したエンドイフェクタ１０１は、両ハンド部１２１全体が本体部１１０の上に載設されていた。また、基板把持部３０における各第１段差３１の各垂直面は下に凹の段差で、各第４段差３３４の各垂直面は上に凸の段差で構成されるものであった。 (Second modification)
FIG. 12 shows a second modification of the end effector of FIG. 1, in other words, a modification of the end effector of FIG.
In the end effector 101 shown in FIG. 10, the entire hands 121 are mounted on the main body 110. Further, each vertical surface of each first step 31 in the substrate gripping portion 30 is a concave step down, and each vertical surface of each fourth step 334 is a convex step upward.

一方、図１２に示す第２変形例のエンドイフェクタ１０２は、両ハンド部１２１が本体部１１０の両側から迫り出して設けられ、また、各第１段差３１および各第４段差３３４の各垂直面がローラ（ピン）７０で構成されている点で異なっている。エンドイフェクタ１０２のその他の構成は、図１０に示したエンドイフェクタ１０１と同様であり、相違点のみを以下に説明する。   On the other hand, in the end effector 102 of the second modification shown in FIG. 12, both hand portions 121 are provided so as to protrude from both sides of the main body portion 110, and each vertical step of each first step 31 and each fourth step 334 is provided. The difference is that the surface is constituted by a roller (pin) 70. Other configurations of the end effector 102 are the same as those of the end effector 101 shown in FIG. 10, and only the differences will be described below.

図１２に示すように、両ハンド部１２１は、本体部１１０の短手方向（図１２中では左右方向）の両端部から、外側に大きく迫り出して設けられている。すなわち、ハンド部材１２は、連結可撓部１２２は本体部１１０の上に載設されているが、両ハンド部１２１の大部分（先端側）は本体部１１０の両側から迫り出して設けられている。
両ハンド部１２１を本体部１１０の両側から迫り出して設けることで、本体部１１０の短手方向において、各第１段差３１の位置と各第４段差３３４の位置とがずれて、見かけ上ほぼ三角形を形成することになる。その結果、エンドイフェクタ１０２においては、基板Ｗのエッジグリップの際に、図１０に示したエンドイフェクタ１０１ではできなかった基板Ｗのセンタリングが可能となる。 As shown in FIG. 12, both hand portions 121 are provided so as to largely protrude outward from both ends of the main body portion 110 in the short direction (left and right direction in FIG. 12). That is, in the hand member 12, the connecting flexible part 122 is mounted on the main body part 110, but most of the hand parts 121 (tip side) protrude from both sides of the main body part 110. Yes.
By providing both hand parts 121 so as to protrude from both sides of the main body part 110, the position of each first step 31 and the position of each fourth step 334 are shifted in the short direction of the main body part 110, and apparently substantially. A triangle will be formed. As a result, in the end effector 102, when the edge grip of the substrate W is performed, the centering of the substrate W that cannot be performed by the end effector 101 shown in FIG.

また、図１３に示すように、各第１段差３１は、両ハンド部１２１の先端上面にローラ７０を設け、各第４段差３３４は、ベース側段差部３３０における第３段差３３３の上面にローラ７０を設けて構成される。基板Ｗの周縁のエッジグリップは３点把持が好ましいため、第３段差３３３の上面に設けるローラ７０の数は１つが好ましいが、基板ＷのＶノッチが嵌り込むのを避けるべく、２つ以上設けてもよい（図１２中では２つを図示）。第３段差３３３の上面にローラ７０を２つ以上設けるときは、エッジグリップの安定性を高めるべく、ローラ７０同士を近接して配置することが好ましい。   Further, as shown in FIG. 13, each first step 31 is provided with a roller 70 on the upper surface of the tip of both hand portions 121, and each fourth step 334 is a roller on the upper surface of the third step 333 in the base-side step portion 330. 70 is provided. Since the edge grip on the periphery of the substrate W is preferably gripped at three points, the number of the rollers 70 provided on the upper surface of the third step 333 is preferably one, but two or more are provided to avoid the V notch of the substrate W being fitted. (Two are shown in FIG. 12). When two or more rollers 70 are provided on the upper surface of the third step 333, it is preferable that the rollers 70 are arranged close to each other in order to improve the stability of the edge grip.

本変形例のエンドイフェクタ１０２は、図１０に示したエンドイフェクタ１０１と比較して、本体部１１０の短手方向（図１２中の左右方向）長さは短くし、両ハンド部１２１における本体部１１０の短手方向長さは、本体部１１０から迫り出すように長くしている。よって、本変形例のエンドイフェクタ１０２は、エンドイフェクタ１０１と比較して本体部１１０の重量がより軽くなることから、エンドイフェクタ全体の軽量化を図ることができる。また、エンドイフェクタ１０２は、図１０に示したエンドイフェクタ１０１と比較して、両ハンド部１２１の先端同士間の距離がより長いことから、基板Ｗのエッジグリップの安定性がより高まる。   In the end effector 102 of this modification, the length of the main body 110 in the short direction (left and right direction in FIG. 12) is shorter than that of the end effector 101 shown in FIG. The length of the main body 110 in the short direction is made long so as to protrude from the main body 110. Therefore, the end effector 102 according to the present modification is lighter than the end effector 101 in that the weight of the main body 110 is reduced, so that the weight of the end effector as a whole can be reduced. Further, the end effector 102 has a longer distance between the tips of the hand portions 121 than the end effector 101 shown in FIG.

（第３変形例）
図１のエンドイフェクタの第３変形例を図１３に示す。
エンドイフェクタ１００，１０１，１０２（載置型）は、両ハンド部１２１にて、基板Ｗの裏面周縁部を下方から支持しつつ、周縁をエッジグリップするものであった。
一方、図１３に示す第３変形例のエンドイフェクタ１０３（グリップ型）は、両ハンド部１２１にて、基板Ｗの周縁のみをエッジグリップする点で異なっている。エンドイフェクタ１０３のその他の構成は、図１に示したエンドイフェクタ１００と同様であり、相違点のみを以下に説明する。 (Third Modification)
FIG. 13 shows a third modification of the end effector of FIG.
The end effectors 100, 101, and 102 (mounting type) are configured to edge grip the periphery of the substrate W while supporting the periphery of the back surface of the substrate W from below.
On the other hand, the end effector 103 (grip type) of the third modified example shown in FIG. 13 is different in that only the peripheral edge of the substrate W is edge gripped by both hand portions 121. The other configuration of the end effector 103 is the same as that of the end effector 100 shown in FIG. 1, and only the differences will be described below.

図１３に示すように、両ハンド部１２１の先端開口側（図１３中では上側）は、基板Ｗを挟み込むことができるように大きく開口され、かつ、両ハンド部１２１の先端は基板Ｗの周縁形状に沿って内側に湾曲されている。両ハンド部１２１の先端内側（対向する側面）には、基板Ｗの周縁と同じ円弧形状の溝部４３０が設けられている。これらの溝部４３０が基板把持部３０となる。両溝部４３０の横断面形状は、図５、図６に示したように、Ｕ字状、Ｖ字状が好ましい。   As shown in FIG. 13, the front end opening side (upper side in FIG. 13) of both hand portions 121 is wide open so as to sandwich the substrate W, and the front ends of both hand portions 121 are the peripheral edges of the substrate W. Curved inward along the shape. An arc-shaped groove 430 that is the same as the periphery of the substrate W is provided on the inner side (opposite side surfaces) of the both hand portions 121. These groove portions 430 become the substrate gripping portion 30. As shown in FIGS. 5 and 6, the cross-sectional shape of both groove portions 430 is preferably U-shaped or V-shaped.

ここで、特に大型の基板Ｗをハンドリングするときは、エンドイフェクタ１００と同様に、ベース部材１１に基板支持部１１１を設けておき、この基板支持部１１１と両溝部４３０にて、基板Ｗの裏面を下方から支持するようにしてもよい。   Here, when handling a particularly large substrate W, similarly to the end effector 100, a substrate support 111 is provided on the base member 11, and the substrate support 111 and both groove portions 430 are used to The back surface may be supported from below.

本変形例のエンドイフェクタ１０３は、基板Ｗと両ハンド部１２１との接触領域が溝部４３０だけであることから、図１に示したエンドイフェクタ１００と比較して、エッジグリップに伴う基板Ｗと基板把持部３０との接触、摺動面積はより少なくなる。このため、基板把持部３０による把持に伴う基板Ｗへの影響をより少なくすることができる。   In the end effector 103 of this modification, the contact area between the substrate W and both the hand portions 121 is only the groove portion 430, and therefore, the substrate W accompanying the edge grip is compared with the end effector 100 shown in FIG. And the sliding area of the substrate gripping portion 30 are reduced. For this reason, the influence on the board | substrate W accompanying the holding | grip by the board | substrate holding part 30 can be decreased more.

以上、本発明は、上述した実施の形態に限定されるものではなく、他にも種々のものが想定されることは言うまでもない。   As described above, the present invention is not limited to the above-described embodiment, and it goes without saying that various other things are assumed.

本発明の好適一実施の形態に係るエンドイフェクタの斜視図である。1 is a perspective view of an end effector according to a preferred embodiment of the present invention. 図１のII−II線断面図である。It is the II-II sectional view taken on the line of FIG. 図１のIII−III線断面図である。It is the III-III sectional view taken on the line of FIG. 図１における基板把持部の平面図である。It is a top view of the board | substrate holding part in FIG. 図３の第１変形例である。It is the 1st modification of FIG. 図３の第２変形例である。It is the 2nd modification of FIG. 図３の第３変形例である。It is the 3rd modification of FIG. 図３の第４変形例である。It is the 4th modification of FIG. 図３の第５変形例である。It is the 5th modification of FIG. 図１のエンドイフェクタの第１変形例である。It is a 1st modification of the end effector of FIG. 図１０のXI−XI線断面図である。It is the XI-XI sectional view taken on the line of FIG. 図１のエンドイフェクタの第２変形例である。It is a 2nd modification of the end effector of FIG. 図１２のXIII−XIII線断面図である。It is the XIII-XIII sectional view taken on the line of FIG. 図１のエンドイフェクタの第３変形例である。It is a 3rd modification of the end effector of FIG.

符号の説明Explanation of symbols

１１ ベース部材
１２ ハンド部材
１３ アクチュエータ
３０ 基板把持部
１００ エンドイフェクタ
１２１ ハンド部
１２２ 連結可撓部
２００ 回動支持部材
Ｈ ロボットハンド
Ｗ 基板







DESCRIPTION OF SYMBOLS 11 Base member 12 Hand member 13 Actuator 30 Board | substrate holding part 100 End effector 121 Hand part 122 Connection flexible part 200 Rotation support member H Robot hand W Board | substrate







Claims (11)

ロボットハンドに取り付けられ、基板の周縁を径方向外方から把持するエンドイフェクタにおいて、
前記ロボットハンドに取り付けられるベース部材と、
前記ベース部材に設けられるＵ字状のハンド部材と、
前記ハンド部材の連結側に接続して設けられ、ハンド部材の先端開口側を開閉駆動するアクチュエータと、
を備え、
前記ハンド部材は、左右対称な一対のハンド部、前記両ハンド部を一体に連結し、前記アクチュエータに接続される連結可撓部、および両ハンド部に設けられ、前記基板の周縁を把持する基板把持部を有し、
前記ハンド部材の前記先端開口側を開閉駆動すべく、前記両ハンド部の前記連結可撓部寄りの部分と前記ベース部材とを回動支持部材にてそれぞれピン結合し、両ハンド部をベース部材に対して回動自在に設けた、
ことを特徴とするエンドイフェクタ。 In the end effector attached to the robot hand and gripping the peripheral edge of the board from the outside in the radial direction,
A base member attached to the robot hand;
A U-shaped hand member provided on the base member;
An actuator that is connected to the connection side of the hand member, and that opens and closes the tip opening side of the hand member;
With
The hand member is a pair of symmetrical left and right hand portions, a joint flexible portion connected to the actuator, and a substrate that grips the periphery of the substrate. Having a gripping part,
In order to open and close the front end opening side of the hand member, the base member is pin-coupled with the base member and a portion of the both hand portions near the connecting flexible portion, and both the hand portions are base members. Rotating with respect to,
End effector characterized by that. 前記ハンド部材は、前記連結可撓部が板バネ状の薄板で構成され、その連結可撓部を支点に前記両ハンド部がＵ字状に湾曲形成され、前記回転支持部材にて前記ベース部材に対して回動自在に設けられる、
請求項１記載のエンドイフェクタ。 In the hand member, the connecting flexible portion is formed of a leaf spring-like thin plate, the both hand portions are formed in a U-shape with the connecting flexible portion as a fulcrum, and the base member is formed by the rotation support member. Provided to be rotatable with respect to
The end effector according to claim 1. 前記アクチュエータは、前記両ハンド部の長手方向に沿って駆動自在であり、前記連結可撓部の中央部に１つ接続される、
請求項１記載のエンドイフェクタ。 The actuator can be driven along the longitudinal direction of the both hand parts, and one actuator is connected to the central part of the coupling flexible part.
The end effector according to claim 1. 前記基板把持部が、前記両ハンド部の上面に設けられる段差部であり、その段差部に前記基板の裏面周縁部が載置、支持されると共に、段差部にて基板の周縁が把持される、
請求項１記載のエンドイフェクタ。 The substrate gripping portion is a stepped portion provided on the upper surfaces of the two hand portions, and the peripheral edge of the back surface of the substrate is placed and supported on the stepped portion, and the periphery of the substrate is gripped by the stepped portion. ,
The end effector according to claim 1. 前記基板把持部が、前記両ハンド部の対向する側面に設けられる溝部であり、その溝部にて前記基板の周縁が把持される、
請求項１記載のエンドイフェクタ。 The substrate gripping portion is a groove portion provided on the opposite side surfaces of the both hand portions, and the periphery of the substrate is gripped by the groove portion.
The end effector according to claim 1. 前記基板把持部は、前記ハンド部の上面にそれぞれ２つ設けられる前記段差部で構成され、各段差部はハンド部の上面に近い方から第１段差、第２段差の２つの段差を有し、
前記両ハンド部の４つの前記第１段差上に、前記基板の裏面周縁部が載置、支持される、
請求項４に記載のエンドイフェクタ。 The substrate gripping portion is composed of two step portions provided on the upper surface of the hand portion, and each step portion has two steps of a first step and a second step from the side closer to the upper surface of the hand portion. ,
On the four first steps of the two hand portions, the peripheral edge of the back surface of the substrate is placed and supported,
The end effector according to claim 4. 前記基板把持部は、前記ハンド部の上面にそれぞれ１つ設けられる前記段差部および前記ベース部材に少なくとも１つ設けられるベース側段差部で構成され、
前記各段差部は１段の段差からなる第１段差を有し、
前記各ベース側段差部はベース部材の上面に近い方から第３段差、第４段差の２つの段差を有し、
前記両ハンド部の２つの前記第１段差および前記ベース部材の少なくとも１つの前記第４段差上に、前記基板の裏面周縁部が載置、支持される、
請求項４に記載のエンドイフェクタ。 The substrate gripping portion is composed of one step portion provided on the upper surface of the hand portion and a base side step portion provided on at least one base member,
Each of the step portions has a first step composed of one step,
Each of the base side stepped portions has two steps, a third step and a fourth step from the side closer to the upper surface of the base member,
On the two first steps of the two hand portions and the at least one fourth step of the base member, a back surface peripheral portion of the substrate is placed and supported.
The end effector according to claim 4. 前記第１段差および前記第４段差は、前記両ハンド部の先端上面および前記第３段差の上面に設けられるピンで構成される、
請求項７に記載のエンドイフェクタ。 The first step and the fourth step are configured with pins provided on the upper end surfaces of the both hand portions and the upper surface of the third step,
The end effector according to claim 7. 前記連結可撓部は前記ベース部材の本体部上に設けられ、前記両ハンド部の大部分は本体部から迫り出して設けられる、
請求項２記載のエンドイフェクタ。 The connecting flexible portion is provided on the main body portion of the base member, and most of the both hand portions are provided protruding from the main body portion,
The end effector according to claim 2. 前記ベース部材は、前記本体部と一体に設けられ、かつ、前記基板把持部にて把持される前記基板の裏面を支持する基板支持部を有する、
請求項９記載のエンドイフェクタ。 The base member includes a substrate support portion that is provided integrally with the main body portion and supports a back surface of the substrate that is gripped by the substrate grip portion.
The end effector according to claim 9. 前記ベース部材の前記本体部および前記基板支持部はその内部に気体供給通路を有し、前記気体供給通路の一端は前記本体部の表面に開口され、前記気体供給通路の他端は前記基板支持部の基板対向面に開口される、
請求項１０記載のエンドイフェクタ。

The main body portion and the substrate support portion of the base member have a gas supply passage therein, and one end of the gas supply passage is opened on the surface of the main body portion, and the other end of the gas supply passage is the substrate support. Open to the substrate facing surface of the part,
The end effector according to claim 10.

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