JP2009236746A - Tracking laser interferometer - Google Patents

Tracking laser interferometer Download PDF

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JP2009236746A
JP2009236746A JP2008084392A JP2008084392A JP2009236746A JP 2009236746 A JP2009236746 A JP 2009236746A JP 2008084392 A JP2008084392 A JP 2008084392A JP 2008084392 A JP2008084392 A JP 2008084392A JP 2009236746 A JP2009236746 A JP 2009236746A
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rotation mechanism
reference sphere
section
laser interferometer
axis rotation
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JP5250286B2 (en
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Naoyuki Taketomi
尚之 武富
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Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
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Mitsutoyo Kiko Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To perform highly precise measurement by eliminating influence by a tensile force or a friction force due to contact of various wires or optical fibers to a reference sphere support section in a simple structure. <P>SOLUTION: A tracking laser interferometer comprises a reference sphere 10 as a reference for measurement, the reference sphere support section 12 for supporting the reference sphere, a rotation mechanism section 20 constituted by a first axis rotation mechanism 21 and a second axis rotation mechanism 22 for performing two-axial rotating around the reference sphere, and a laser interferometric length measurement device 30 mounted on the rotation mechanism section. The tracking laser interferometer tracks a target in accordance with information about light returned from a recursive reflection body (40) as the target and measures a distance of the recursive reflection body at a time when optical axes of emission light from the laser interferometric length measurement device mounted on the rotation mechanism section and the returned light are made parallel to each other, by referencing central coordinates of the reference sphere. An inner peripheral section of the first axis rotation mechanism 21 disposed on a base (14) of the tracking laser interferometer is made to be a hollow section. A cylindrical cover 60 is provided in the hollow section by interposing a gap between the hollow section and the reference sphere support section 12 and a wire to the second axis rotation mechanism 22 is provided so as to pass therethrough to the outside. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、追尾式レーザ干渉計に係り、特に、簡単な構成で、基準球支持部に配線の影響を与えることが無く、高精度の測定が可能な追尾式レーザ干渉計に関する。   The present invention relates to a tracking type laser interferometer, and more particularly to a tracking type laser interferometer having a simple configuration and capable of performing high-precision measurement without affecting the reference sphere support part.

特許文献１に記載されているように、図１に例示する如く、測定の基準を成す基準球１０と、該基準球１０を支持する基準球支持部１２と、前記基準球１０の周囲を２軸回転運動する、第一軸回転機構２１及び第二軸回転機構２２でなる回転機構部２０と、該回転機構部２０に搭載されたレーザ干渉測長機３０とを有し、ターゲットとなる再帰的反射体（レトロリフレクタ）（例えばキャッツアイ）４０からの戻り光の情報に基づきターゲットを追尾して、基準球１０の中心座標を基準とし、回転機構部２０に載ったレーザ干渉測長機３０からの出射光と戻り光の光軸が平行となるレトロリフレクタ４０との距離を測定する追尾式レーザ干渉計が知られている。図において、１４は固定台である。   As described in Patent Document 1, as illustrated in FIG. 1, a reference sphere 10 that serves as a measurement reference, a reference sphere support 12 that supports the reference sphere 10, and a periphery of the reference sphere 10 are divided into two. A revolving mechanism 20 including a first axis rotating mechanism 21 and a second axis rotating mechanism 22 that rotate in a shaft, and a laser interference length measuring machine 30 mounted on the rotating mechanism 20, and a target recursion The target is tracked based on the information of the return light from a retroreflector (retroreflector) 40 (for example, a cat's eye) 40, and the laser interference length measuring machine 30 mounted on the rotation mechanism unit 20 is based on the center coordinates of the reference sphere 10. 2. Description of the Related Art A tracking type laser interferometer that measures a distance between a light beam emitted from a light beam and a retroreflector 40 in which the optical axes of return light beams are parallel is known. In the figure, 14 is a fixed base.

又、同様な追尾式レーザ干渉計（光軸偏向型レーザ干渉計とも称する）は、特許文献２〜４にも記載されている。   Similar tracking laser interferometers (also referred to as optical axis deflection laser interferometers) are also described in Patent Documents 2 to 4.

この種の追尾式レーザ干渉計では、出射光と戻り光の光軸のずれが所定の値（又は量）、又は所望の値（量）となるように回転機構部２０を回転してレーザ干渉測長機３０をレトロリフレクタ４０の方向に向け、そのときの出射光と戻り光の干渉状態からレトロリフレクタ４０までの距離を高精度に測定する。   In this type of tracking laser interferometer, the rotation mechanism unit 20 is rotated so that the deviation between the optical axes of the emitted light and the return light becomes a predetermined value (or amount) or a desired value (amount), thereby causing laser interference. The length measuring device 30 is directed toward the retroreflector 40, and the distance from the interference state between the outgoing light and the return light at that time to the retroreflector 40 is measured with high accuracy.

この追尾式レーザ干渉計では、第二軸回転機構２２のモータ２３やレーザ干渉測長機３０は、第一軸回転機構２１の回転側に配置されているので、各種信号配線５０、モータ配線５２、ファイバ線５４等を、回転側から固定側（固定台１４）まで導く必要がある。   In this tracking type laser interferometer, the motor 23 and the laser interferometer length measuring device 30 of the second axis rotation mechanism 22 are arranged on the rotation side of the first axis rotation mechanism 21, so that various signal wirings 50 and motor wirings 52 are provided. It is necessary to guide the fiber line 54 and the like from the rotation side to the fixed side (fixed base 14).

ドイツ特許出願ＤＥ２０２００４００７６４７Ｕ１号公開公報German patent application DE202004007647U1 特開昭６３−２３１２８６号公報Japanese Patent Laid-Open No. 63-231286 特開２００７−３０９６７７号公報JP 2007-309677 A 特開２００７−０５７５２２号公報JP 2007-057522 A

図１に示す如く、回転側の各種信号配線５０、モータ配線５２、ファイバ線５４を固定側（固定台１４）に直接配線した場合、回転機構部２０が回転するため、各種配線は十分な長さに設定する必要があり、図１に示したように配線が装置の外側に出てしまい、周りで作業する時の作業性が悪く、他装置等に配線が干渉したり、場合によっては、配線がターゲット（レトロリフレクタ４０）まで出射されるレーザ光線を遮蔽してしまう等の問題点を有していた。   As shown in FIG. 1, when the signal wires 50, the motor wires 52, and the fiber wires 54 on the rotation side are directly wired to the fixed side (fixed base 14), the rotation mechanism 20 rotates. As shown in FIG. 1, the wiring goes out of the device, the workability when working around is bad, the wiring interferes with other devices, etc. There is a problem that the wiring shields the laser beam emitted to the target (retroreflector 40).

一方、装置内側のスペースに配線を通し、固定側に配線を導く方法も考えられる。この方法によれば、装置外側に配線されないため、上記のような問題は発生しない。しかし、この方法でも、回転機構部２０が回転するので、各種配線は十分な長さに設定する必要があり、スペース内に配置された配線が移動してしまい、基準球支持部１２に配線が直接接触し、配線による張力、摩擦力が、基準球支持部１２に作用してしまう。すると、基準球支持部１２が変形するため、基準球１０が移動することになる。この配線による力は、再現性が無く、管理することが非常に困難である。又、この追尾式レーザ干渉計は、基準球１０を中心に回転機構部２０が回転しながらターゲット（レトロリフレクタ４０）と基準球１０との距離を測定するので、基準球１０が移動すると、測定基準が移動することになり、測定精度が低下する。   On the other hand, a method of passing the wiring through the space inside the apparatus and guiding the wiring to the fixed side can be considered. According to this method, since the wiring is not performed outside the apparatus, the above problem does not occur. However, even in this method, since the rotation mechanism unit 20 rotates, it is necessary to set various wirings to a sufficient length, and the wiring arranged in the space moves, and the wiring is connected to the reference sphere support unit 12. The direct contact and the tension and frictional force due to the wiring act on the reference ball support portion 12. Then, since the reference sphere support 12 is deformed, the reference sphere 10 moves. The force due to this wiring is not reproducible and is very difficult to manage. Further, this tracking laser interferometer measures the distance between the target (retroreflector 40) and the reference sphere 10 while the rotation mechanism 20 rotates around the reference sphere 10, so that the measurement is performed when the reference sphere 10 moves. The reference moves and the measurement accuracy decreases.

その他の方法で、固定側と回転側の双方向に電気信号を供給することができるものとして、スリップリングがある。このスリップリングを用いれば、基準球の変動は無くなる。しかし、スリップリングは、回転リングとブラシが接触することで信号を伝送しているために、信号Ｓ／Ｎの低下、メンテナンスの課題がある。又、追尾式レーザ干渉計においては、多種の信号伝送が必要であるため、スリップリングが大きくなり、そのスペースが必要で装置が大きくなり、且つ、コストが高い、又、クロストーク発生などの多数の課題が発生する。   Another method that can supply an electric signal in both directions of the fixed side and the rotating side is a slip ring. If this slip ring is used, the fluctuation of the reference sphere is eliminated. However, since the slip ring transmits a signal by the contact between the rotating ring and the brush, there is a problem of a decrease in signal S / N and a problem of maintenance. In addition, since tracking laser interferometers require various signal transmissions, the slip ring is large, the space is required, the device is large, the cost is high, and there are many occurrences such as crosstalk. Issue arises.

本発明は、前記従来の問題点を解消するべくなされたもので、簡単な構成で、基準球支持部への配線による影響を無くし、高精度測定を可能とすることを課題とする。   The present invention has been made to solve the above-described conventional problems, and an object thereof is to eliminate the influence of wiring to the reference sphere support portion with a simple configuration and to enable high-precision measurement.

本発明は、測定の基準を成す基準球と、該基準球を支持する基準球支持部と、前記基準球の周囲を２軸回転運動する、第一軸回転機構及び第二軸回転機構でなる回転機構部と、該回転機構部に搭載されたレーザ干渉測長機を有し、ターゲットとなる再帰的反射体からの戻り光の情報に基づきターゲットを追尾して、基準球の中心座標を基準とし、回転機構部に載ったレーザ干渉測長機からの出射光と戻り光の光軸が平行となる再帰的反射体との距離を測定する追尾式レーザ干渉計において、装置の基部に設置される第一軸回転機構の内周部を中空とし、該中空に、前記基準球支持部との隙間を介して筒状カバーを設け、その外部を第二軸回転機構への配線が通過するようにして、前記課題を解決したものである。   The present invention includes a reference sphere that forms a reference for measurement, a reference sphere support that supports the reference sphere, and a first axis rotation mechanism and a second axis rotation mechanism that rotate around the reference sphere in two axes. It has a rotating mechanism and a laser interferometer that is mounted on the rotating mechanism, and tracks the target based on the information of the return light from the recursive reflector that is the target, and uses the center coordinates of the reference sphere as a reference. In a tracking laser interferometer that measures the distance between the light emitted from the laser interferometer and the recursive reflector in which the optical axis of the return light is parallel, it is installed at the base of the device. The inner periphery of the first shaft rotation mechanism is hollow, a cylindrical cover is provided in the hollow via a gap with the reference ball support portion, and the wiring to the second shaft rotation mechanism passes through the outside. Thus, the above-mentioned problem is solved.

ここで、前記筒状カバーを２重とし、その内側を第二軸回転機構への配線が通過するようにすることができる。   Here, the cylindrical cover can be doubled, and the wiring to the second shaft rotating mechanism can pass through the inside.

本発明によれば、低価格な部品で、基準球支持部に対する各種配線、光ファイバ等の接触による張力や摩擦力による影響を無くして、高精度な測定が可能となる。又、配線が装置外側に大きくはみ出ることも無いため、作業スペースを拡大すると共に、他装置等との干渉も無くなり、信頼性の高い測定が可能となる。更に、スリップリングと比較すると、配線は有線であるため、各種信号間によるクロストークや信号劣化が無く、メンテナンスの必要も無く、信頼性の高い信号伝送が可能となる。   According to the present invention, it is possible to perform high-accuracy measurement with low-cost parts without the influence of tension or frictional force caused by contact of various wirings, optical fibers, or the like with respect to the reference sphere support. In addition, since the wiring does not protrude largely outside the apparatus, the work space is expanded and interference with other apparatuses is eliminated, so that highly reliable measurement is possible. Furthermore, compared with the slip ring, since the wiring is wired, there is no crosstalk or signal deterioration between various signals, no maintenance is required, and highly reliable signal transmission is possible.

以下図面を参照して、本発明の実施形態を詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

本発明の第１実施形態は、図１と同様な追尾式レーザ干渉計において、図２に示す如く、本発明を第一軸回転機構２１の外周部２１Ａが回転するタイプの追尾式レーザ干渉計に適用したもので、装置の基部（固定台１４）に設置される第一軸回転機構２１の内周部２１Ｂを中空とし、該中空に基準球支持部１２を設け、その外周部に、所望の隙間を有する円筒カバー６０を設け、その外部に、回転側に設置された第二軸回転機構２２、レーザ干渉測長機３０、基準球１０の表面とレーザ干渉測長機３０間の距離を測定する変位計３２からのモータ線・各種信号線７０、ファイバ線・各種信号線７２を通過させて、固定台１４側のコネクタ８０に導くようにしたものである。   The first embodiment of the present invention is a tracking laser interferometer similar to that shown in FIG. 1, and is a tracking laser interferometer of the type in which the outer peripheral portion 21A of the first shaft rotating mechanism 21 rotates as shown in FIG. The inner peripheral portion 21B of the first shaft rotation mechanism 21 installed in the base portion (fixing base 14) of the apparatus is made hollow, the reference ball support portion 12 is provided in the hollow, and the outer peripheral portion has a desired And a distance between the surface of the reference sphere 10 and the laser interference length measuring device 30 is set outside the second shaft rotation mechanism 22, the laser interference length measuring device 30 installed on the rotation side. The motor line / various signal lines 70 and the fiber line / various signal lines 72 from the displacement meter 32 to be measured are passed through and guided to the connector 80 on the fixed base 14 side.

ここで、第一軸回転機構２１は、水平方向の回転で、方位方向に回転し、第二軸回転機構２２は、仰角方向に回転する。   Here, the first axis rotation mechanism 21 rotates in the azimuth direction by horizontal rotation, and the second axis rotation mechanism 22 rotates in the elevation direction.

又、前記変位計３２は、特許文献４に記載したように、レーザ干渉測長機３０と基準球１０の表面の距離を実測して、高精度の測定を可能とするためのものである。   The displacement meter 32 is for measuring the distance between the surface of the laser interferometer 30 and the reference sphere 10 as described in Patent Document 4 to enable high-precision measurement.

本実施形態では、第一回転軸機構２１の方位方向の回転に対しては、内周部２１Ｂの中空に設置された円筒カバー６０のところで、配線の遊びが設けられ（円筒カバーに巻き付けるなどにより遊びを設ける）、内部で処理される。又、配線の外部に出ている部分で遊びを作り、第二軸回転機構２２の仰角方向の回転に対応している。   In the present embodiment, with respect to the rotation of the first rotating shaft mechanism 21 in the azimuth direction, a play of wiring is provided at the cylindrical cover 60 installed in the hollow of the inner peripheral portion 21B (for example, by wrapping around the cylindrical cover). Provide play), processed inside. Further, a play is made at a portion outside the wiring, corresponding to the rotation of the second shaft rotation mechanism 22 in the elevation direction.

本実施形態によれば、回転機構部２０が回転し、その中空内で各種配線が移動しても、円筒カバー６０に配線が接触するため、配線の摩擦や張力は、円筒カバー６０のみに影響を与える。従って、基準球支持部１２に配線による影響が無くなり、基準球１０の変動も無くなる。   According to the present embodiment, even if the rotation mechanism unit 20 rotates and various wirings move within the hollow space, the wiring contacts the cylindrical cover 60, so that the friction and tension of the wiring affects only the cylindrical cover 60. give. Therefore, the reference sphere support 12 is not affected by the wiring, and the reference sphere 10 is not changed.

次に、図３を参照して、本発明の第２実施形態を説明する。   Next, a second embodiment of the present invention will be described with reference to FIG.

本実施形態は、本発明を第一軸回転機構２１の内周部２１Ｂが回転するタイプの追尾式レーザ干渉計に適用したもので、第一軸回転機構２１の外周部２１Ａが固定台１４に固定されている点を除き、第１実施形態と同様であるので説明は省略する。   In the present embodiment, the present invention is applied to a tracking type laser interferometer in which the inner peripheral portion 21B of the first shaft rotating mechanism 21 rotates, and the outer peripheral portion 21A of the first shaft rotating mechanism 21 is attached to the fixed base 14. Since it is the same as that of 1st Embodiment except the point fixed, description is abbreviate | omitted.

次に、図４を参照して、本発明の第３実施形態を説明する。   Next, a third embodiment of the present invention will be described with reference to FIG.

本実施形態は、第２実施形態において、円筒カバーを第一軸回転機構２１側にも設けた二重構造の円筒カバー６２としたものである。   This embodiment is a double-structured cylindrical cover 62 in which the cylindrical cover is also provided on the first shaft rotating mechanism 21 side in the second embodiment.

本実施形態によれば、配線の回転部への接触を確実に防止できる。   According to this embodiment, the contact of the wiring with the rotating part can be reliably prevented.

前記実施形態は、いずれも、特許文献４に記載の追尾式レーザ干渉計と同様に、変位計３２を設けてレーザ干渉測長機３０と基準球１０の表面の距離を実測しているので、高精度の測定が可能である。なお、用途によっては変位計３２を省略することも可能である。   In any of the above embodiments, as with the tracking laser interferometer described in Patent Document 4, the displacement meter 32 is provided to measure the distance between the surface of the laser interferometer 30 and the reference sphere 10. High-precision measurement is possible. The displacement meter 32 may be omitted depending on the application.

又、前記実施形態においては、いずれも、駆動や案内方法は省略しているが、駆動ではベルト、摩擦、ダイレクトモータ方式等、案内では、転がり軸受、空気軸受等いろいろあるが、その方法を制限するものではない。カバーの断面形状も円形に限定されず、楕円形や矩形等、他の形状であってもよい。   In the above embodiments, the driving and guiding methods are omitted, but there are various belts, friction, direct motor methods, etc. for driving, rolling bearings, air bearings, etc. for guiding, but the methods are limited. Not what you want. The cross-sectional shape of the cover is not limited to a circle, and may be another shape such as an ellipse or a rectangle.

ＤＥ２０２００４００７６４７Ｕ１に記載された従来技術を示す断面図Sectional view showing the prior art described in DE202004007647U1 本発明の第１実施形態を示す断面図Sectional drawing which shows 1st Embodiment of this invention 同じく第２実施形態を示す断面図Sectional drawing which similarly shows 2nd Embodiment 同じく第３実施形態を示す断面図Sectional drawing which similarly shows 3rd Embodiment

符号の説明Explanation of symbols

１０…基準球
１２…基準球支持部
２０…回転機構部
２１…第一軸回転機構
２２…第二軸回転機構
３０…レーザ干渉測長機
４０…レトロリフレクタ
６０、６２…円筒カバー
７０、７２…配線 DESCRIPTION OF SYMBOLS 10 ... Reference sphere 12 ... Reference sphere support part 20 ... Rotation mechanism part 21 ... 1st axis | shaft rotation mechanism 22 ... 2nd axis | shaft rotation mechanism 30 ... Laser interference length measuring machine 40 ... Retro reflector 60, 62 ... Cylindrical cover 70, 72 ... wiring

Claims (2)

測定の基準を成す基準球と、該基準球を支持する基準球支持部と、前記基準球の周囲を２軸回転運動する、第一軸回転機構及び第二軸回転機構でなる回転機構部と、該回転機構部に搭載されたレーザ干渉測長機を有し、
ターゲットとなる再帰的反射体からの戻り光の情報に基づきターゲットを追尾して、基準球の中心座標を基準とし、回転機構部に載ったレーザ干渉測長機からの出射光と戻り光の光軸が平行となる再帰的反射体との距離を測定する追尾式レーザ干渉計において、
装置の基部に設置される第一軸回転機構の内周部を中空とし、
該中空に、前記基準球支持部との隙間を介して筒状カバーを設け、
その外部を第二軸回転機構への配線が通過することを特徴とする追尾式レーザ干渉計。 A reference sphere that forms a reference for measurement, a reference sphere support that supports the reference sphere, and a rotation mechanism that includes a first axis rotation mechanism and a second axis rotation mechanism that rotate around the reference sphere in two axes; , Having a laser interference length measuring device mounted on the rotating mechanism,
The target is tracked based on the information of the return light from the recursive reflector as a target, and the light emitted from the laser interference length measuring machine mounted on the rotation mechanism unit and the light of the return light with reference to the center coordinates of the reference sphere. In a tracking laser interferometer that measures the distance to a retroreflector whose axes are parallel,
The inner periphery of the first shaft rotation mechanism installed at the base of the device is hollow,
In the hollow, a cylindrical cover is provided via a gap with the reference sphere support,
A tracking type laser interferometer characterized in that a wiring to the second axis rotation mechanism passes outside. 前記筒状カバーが２重とされ、その内側を第二軸回転機構への配線が通過することを特徴とする請求項１に記載の追尾式レーザ干渉計。   2. The tracking laser interferometer according to claim 1, wherein the cylindrical cover is doubled, and a wiring to the second shaft rotation mechanism passes through the inside of the cylindrical cover.
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