JP2009229448A - Sample-etracting apparatus and sample-extracting attachment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simplify collection of samples that are to be analyzed microscopically. <P>SOLUTION: An sample-extracting apparatus includes: a grip 14 that is gripped by a user 8; an imaging member 21, fixed to the grip 14, which takes an image; an extracting member holder fixed to the grip 14; an extracting member 56, having a sample extracting section 56b that extracts samples that are to be analyzed microscopically and supported by the extracting member holder, in which the sample-extracting section 56b is disposed at the focal position of the imaging member 21; and an image display 12, electrically connected to the imaging member 21, which displays an image taken. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sample extraction device and a sample extraction attachment for taking out a sample to be microscopically analyzed with a microscopic analysis device such as an optical microscope, an electron microscope, an infrared microscope, or a Raman microscope, and in particular, microsampling for taking out a microscopic sample. The present invention relates to a sample take-out device and a sample take-out attachment that can be suitably used for the above.

  Conventionally, in order to inspect and analyze dust and foreign matter adhering to the surface of a semiconductor wafer or the like, a sampling device that collects a sample such as dust or foreign matter from a wafer is known. As such a sampling apparatus, a technique described in Patent Document 1 below is conventionally known as a sampling apparatus used in combination with an optical microscope.

  In Patent Document 1 (Japanese Patent Laid-Open No. 2002-162321), the objective lens of the optical microscope (M) for observing the sample can be moved in the vertical direction to the fixed frame (1) fixed at a predetermined position. Describes a technique relating to a sample collection device in which a sample supported by a sample stage of an optical microscope (M) is hooked and taken out by a sample collection needle (23) supported on the sample. Also, in Patent Document 1, the sample collection needle (23) moves upward while the tip of the sample collection needle (23) is placed at the focal position of the optical microscope (M) at the sample collection position where the sample is hooked. The stand-by position is out of focus. In the technique described in Patent Document 1, first, the sample collection needle (23) is held at a standby position shifted from the focus position, and the sample stage is moved and observed with the optical microscope (M). When a sample such as dust or foreign matter is found in the sample, the sample is collected by moving the sample collection needle (23) to the sample collection position corresponding to the focal position, hooking the sample, and then moving to the standby position. Yes. A sample collected by the technique described in Patent Document 1 is observed, inspected, analyzed, and the like in detail with a high-magnification optical microscope, electron microscope, infrared microscope, or the like.

FIG. 14 is an explanatory diagram of a conventional sampling method.
As in the technique described in Patent Document 1, sample collection is performed without using a large-scale system that uses two microscopes, ie, an electron microscope for performing detailed analysis and the like, and an optical microscope for collecting a sample. For the sake of simplicity, conventionally, the method shown in FIG. 14 is also widely adopted and executed.
In FIG. 14, a microscope 02 for performing detailed analysis is arranged on a laboratory table 01. The microscope 02 has a sample stage 02a on which a sample is set. A wafer 03 as an example of a sample deposit is supported on the table 01, and foreign matters such as dust and dust as an example of a sample adhere to the wafer 03. The user 04 who inspects the sample has a sample collection needle 06 and a magnifying glass (so-called magnifying glass) 07 for magnifying and observing the sample on the wafer 03 in both hands.
In the system shown in FIG. 14, the user 04 finds a sample attached to the wafer 03 while magnifying and observing the wafer 03 with the left-hand magnifying glass 07, and collects and samples the sample with the right-hand sampling needle 06. The sample is placed on the sample plate 08, set on the sample stage 02a, and inspected with the microscope 02.

JP 2002-162321 ("0028", "0034" to "0035", FIG. 1, FIG. 9, FIG. 10)

(Problems of conventional technology)
In the technique described in Patent Document 1, since the observation is performed with a microscope for taking out the sample, there is a problem that the taking out of the sample is precise and laborious, and the sample cannot be taken out easily. In addition, a plurality of microscopes are required, such as a sample extraction microscope and an analysis microscope, and there is a problem that the entire system becomes large and the cost increases. Further, since an optical microscope is used for taking out the sample, there is a problem that it is difficult to use when the sample adhering material is large such as a wafer that is not placed on the sample stage. Furthermore, in the technique described in Patent Document 1, a sample can be collected in a laboratory or the like where an optical microscope is installed. For example, in a case where a small sample is to be collected outside a laboratory such as a traffic accident site. In addition, it is troublesome to take out and set a microscope, and there is a problem that it is not easy to collect a sample.

  In the conventional technique shown in FIG. 14, it is possible to collect a sample more easily and at a lower cost than the technique described in Patent Document 1, but a sample is collected with the sample collection needle 06 while observing with the magnifier 07. In this case, it is necessary to first adjust the focal position of the magnifying glass 07 to the sample, and then to collect the sample by bringing the tip of the sample collection needle 06 into contact with the sample. At first glance, this work seems to be easy, but when actually performed, the perspective shifts due to the enlargement of the image by the magnifying glass 07, so even if the tip of the sampling needle 06 is intended to be aligned with the position of the sample, it is quite easy. Therefore, there is a problem that it is difficult to align the tip of the sampling needle 06 with the operator, and it requires operator's familiarity and skill.

  In view of the above-described circumstances, an object of the present invention is to simplify the collection of a sample to be microscopically analyzed.

In order to solve the technical problem, the sample taking-out device according to claim 1 comprises:
A gripping member gripped by the user;
An imaging member that is fixed to the gripping member and captures an image;
An extraction member holder fixed to the gripping member;
An extraction member having a sample extraction portion for extracting a sample to be microscopically analyzed, supported by the extraction member holder, and the sample extraction portion being disposed at a focal position of the imaging member;
An image display that is electrically connected to the imaging member and displays a captured image;
It is provided with.

The invention according to claim 2 is the sample take-out device according to claim 1,
A cylindrical and writing instrument-shaped gripping member;
The imaging member housed and fixed inside the gripping member;
An optical system arranged on the optical axis of the imaging member and fixed to the gripping member by being supported by the imaging member, setting a magnification for imaging, and adjusting a focal position;
It is provided with.

The invention described in claim 3 is the sample take-out device according to claim 1,
The sample take-out part that is configured in a needle shape and is taken out by collecting the sample,
It is provided with.

The invention according to claim 4 is the sample take-out device according to claim 1,
The sample take-out part, which is configured in a blade shape and cuts out the sample,
It is provided with.

The invention according to claim 5 is the sample take-out device according to claim 1,
The sample take-out part constituted by tweezers and picking up and taking out the sample,
It is provided with.

The invention described in claim 6 is the sample take-out device according to claim 5,
The sample extraction unit having an illumination member that illuminates the focal position,
It is provided with.

In order to solve the technical problem, the sample removal attachment according to claim 7 comprises:
An extraction member holder that is fixed detachably with respect to a gripping member to which an imaging member for capturing an image is fixed and is gripped by a user;
An extraction member having a sample extraction portion for extracting a sample to be microscopically analyzed, supported by the extraction member holder, and the sample extraction portion being disposed at a focal position of the imaging member;
It is provided with.

According to the first aspect of the present invention, since the sample extraction portion for taking out the sample to be microscopically analyzed is arranged at the focal position of the imaging member, the perspective shift between the position observed by the imaging member and the sample extraction portion Therefore, it is possible to simplify the collection of a sample to be microscopically analyzed.
According to the invention described in claim 2, it is possible to magnify and take an image with the optical system, and it is possible to take out a minute sample.
According to invention of Claim 3, it can take out by attaching and extract | collecting a sample to the front-end | tip of a needle-like sample extraction part.

According to invention of Claim 4, it can take out by cutting a sample with an edge-shaped sample extraction part.
According to invention of Claim 5, a sample can be picked and taken out by the sample extraction part comprised by tweezers.
According to the sixth aspect of the present invention, the focal position can be illuminated.
According to the seventh aspect of the present invention, since the sample taking-out portion for taking out the sample to be microscopically analyzed is arranged at the focal position of the imaging member with the sample taking-out attachment attached to the gripping member, It is possible to eliminate the difference in perspective between the observation position and the sample extraction unit, and it is possible to simplify the collection of the sample to be microscopically analyzed.

Next, specific examples of embodiments of the present invention (hereinafter referred to as examples) will be described with reference to the drawings, but the present invention is not limited to the following examples.
In order to facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the left-right direction is the Y-axis direction, the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The direction indicated by Z and -Z or the indicated side is defined as the front side, the rear side, the right side, the left side, the upper side, the lower side, or the front side, the rear side, the right side, the left side, the upper side, and the lower side, respectively.
In the figure, “•” in “○” means an arrow heading from the back of the page to the front, and “×” in “○” is the front of the page. It means an arrow pointing from the back to the back.
In the following description using the drawings, illustrations other than members necessary for the description are omitted as appropriate for easy understanding.

FIG. 1 is an explanatory diagram of a sample extraction method using the sample extraction apparatus of Example 1 of the present invention.
FIG. 2 is an enlarged view of a main part of the sample taking-out apparatus of FIG.
In FIG. 1, in the sample inspection system S of the embodiment, a microscope analyzer 2 is arranged on a table 1. In Example 1, a micro Raman spectrophotometer as an example of the micro analyzer 2 is used. The microanalyzer 2 includes an analyzer main body 3, a sample stage 4 disposed below the analyzer main body 3, and an objective lens switching unit disposed above the sample stage 4 and capable of switching a plurality of objective lenses 5a. And 5. The analyzer main body 3 is connected to a computer apparatus PC as an example of an information processing apparatus for processing measured information (data). The computer apparatus PC includes a computer main body H1, a display (display) H2, Input devices (keyboard H3 and mouse H4) and the like.
1 and 2, a wafer W is placed on a table 1 as an example of a sample adhering member to which a sample such as dust or foreign matter to be microscopically analyzed by the microanalyzer 2 is attached. The sample attached to the wafer W is taken out by the user 8 using the sample taking-out device 11. The sample taken out is transferred to the sample plate 7 and held on the sample stage 4 of the analyzer main body 3 for microscopic analysis.

In FIG. 2, the sample extraction apparatus 11 according to the first embodiment includes an image display 12 to which a power supply cable 12 a that supplies power is connected, and a connection cable 13 a that supplies power from the image display 12 and transmits and receives image signals. A take-out device main body 13 connected to the display 12;
The image display 12 includes a display screen 12b, a stand (stand) 12c that supports the display screen 12b, and various input buttons 12d that adjust power on / off and brightness of the display image.

3A and 3B are cross-sectional views of a main part of the main body of the take-out device according to the first embodiment. FIG. 3A is a side view with the main part taken as a cross-section, and FIG.
FIG. 4 is an exploded explanatory view of the take-out device main body.
2 to 4, the take-out device main body 13 has a cylindrical gripping member 14 that the user 8 grips. The gripping member 14 of the first embodiment has a writing instrument shape, and is configured to be operable by gripping with a pen. The grip member 14 is formed with a cable passage portion 14 a extending in the axial direction of the cylinder, and an imaging member housing recess 14 b is formed in the front portion of the grip member 14.

3 and 4, the imaging member accommodation recess 14b is fixedly supported in a state where the imaging member 21 is accommodated. The imaging member 21 of the first embodiment is configured by a CCD (Charge Coupled Device) camera unit.
The imaging member 21 includes a rear imaging member body 22 accommodated in the imaging member accommodation recess 14 b and an attachment mounting portion 24 formed on the front side of the imaging member body 22.

The imaging member main body 22 houses therein a power circuit (not shown), an electric circuit for converting a captured image into an image to be displayed on the image display 12, and the like. A cable 13a is drawn from the rear end (−X end) of the imaging member body 22 through the cable passage portion 14a.
The attachment mounting part 24 has an attachment mounting surface 24a formed on the outer surface. The holding member mounted inside the attachment mounting part 24 extends in the axial direction from the front end and has a thread groove formed on the inner peripheral surface. A concave portion 24b is formed. A CCD element 22a, which is an example of an image sensor, is disposed behind the holding member mounting recess 24b.

3 and 4, a lens holding member 26 is supported on the front side of the imaging member 21. At the rear of the lens holding member 26, a mounted portion 26a having an outer diameter corresponding to the holding member mounting recess 24b and having a thread groove formed on the outer peripheral surface is formed. A thread ring 27 having a thread groove 27a that meshes with the inner peripheral surface is mounted on the mounting groove portion 26a. Therefore, the lens holding member 26 is adjusted at the screwed position by being screwed into the holding member mounting recess 24b in a state where the screw ring 27 is mounted, and is fixed at the position screwed by the so-called double nut method. It is locking.
The lens holding member 26 is formed with a lens mounting through-hole 26 c extending in the central axis direction of the lens holding member 26. A lens fixing screw hole 26 d extending from the outer surface to the lens mounting through hole 26 c is formed at the front end portion of the lens holding member 26.

3 and 4, a lens unit 31 is supported on the front side of the lens holding member 26. The lens unit 31 is formed in a substantially cylindrical shape as a whole, and a receiving portion 31a to be received in the lens mounting through hole 26c is formed in the rear portion. At the center of the lens unit 31, a ring-shaped lens positioning edge 31b is formed for abutment with the front end edge of the lens holding member 26 for positioning. In addition, a plurality of lenses 31 c as an example of an optical system are accommodated in the lens unit 31. The lens 31c has a focal point set at a focal position A, enlarges the image, and forms an image on the imaging element 22a.
Accordingly, the lens unit 31 is held in the lens holding member 26 by the lens fixing screw N1 mounted in the lens fixing screw hole 26d in the state accommodated in the lens mounting through hole 26c, and loosens the lens fixing screw N1. Thus, the lens unit 31 can be replaced. That is, by preparing a plurality of lens units 31 having different magnifications, it is possible to mount the lens units 31 having an enlargement magnification corresponding to the size of the target sample. In addition, the lens unit 31 can change the magnification of the lens by changing the front-rear direction.

5A and 5B are explanatory views of the frame of the sample removal attachment, FIG. 5A is a front view, FIG. 5B is a view seen from the direction of arrow VB in FIG. 5A, FIG. 5C is a view seen from the direction of arrow VC in FIG. These are the figures seen from the arrow VD direction of FIG. 5A.
3 and 4, a sample take-out attachment 41 is detachably attached to the attachment attachment portion 24 of the imaging member 21. The sample removal attachment 41 has an attachment frame 42 attached to the attachment mounting portion 24. In FIG. 5, the attachment frame 42 includes a thick plate-like frame main body 42a and a pair of left and right holder support portions 42b and 42c protruding upward in a bifurcated shape from the upper end of the frame main body 42a.

  The frame main body 42a is formed with a circular attached hole 42a1 having an inner diameter corresponding to the outer diameter of the attachment attaching portion 24 and penetrating in the front-rear direction. Further, an attachment fixing through hole 42a2 extending from the outer surface to the attachment hole 42a1 is formed in the lower right portion of the frame main body 42a. In FIG. 3B, the attachment frame 42 is attached to the attachment fixing through hole 42a2 with the screw K2 while being fitted to the attachment attachment portion 24.

  The holder support portions 42b and 42c are formed with circular hole-shaped holder support through holes 42b1 and 42c1 penetrating in the left-right direction. The holder support member 42b on the right side is formed with a holder fixing through hole 42b2 extending from the upper end surface to the holder support through hole 42b1. The left holder support member 42c is formed with a support fixing through hole 42c2 extending from the upper end surface to the holder supporting through hole 42c1.

6A and 6B are explanatory views of the extraction member holder of the sample extraction attachment, in which FIG. 6A is a front view, FIG. 6B is a view seen from the direction of arrow VIB in FIG. 6A, and FIG. is there.
3B and 6, the holder supporting portions 42 b and 42 c are supported in a state in which a cylindrical extraction member holder 46 extending in the left and right direction as an example of a rotation holding member passes through the holder supporting through holes 42 b 1 and 42 c 1. Has been. The extraction member holder 46 includes a large diameter portion 46a having an outer diameter corresponding to the inner diameter of the holder supporting through hole 42b, and a small diameter portion 46b formed on the left side of the large diameter portion 46a and having a smaller diameter than the large diameter portion 46a. Have A circular hole-shaped extraction member penetration support hole 46c penetrating in the front-rear direction is formed in the left-right center portion of the extraction member holder 46, that is, on the left side of the large diameter portion 46a. Inside the large-diameter portion 46a, a detachable screw mounting portion 46d extending in the axial direction (left-right direction) from the right end to the extraction member through-supporting hole 46c and having a screw groove formed therein is formed. The small diameter portion 46b of the take-out member holder 46 is formed with a screw hole-shaped support fixing portion 46e extending in the axial direction from the left end and having a screw groove formed on the inner peripheral surface.

FIG. 7 is an explanatory view of a holder support of a sample take-out attachment, FIG. 7A is a front view, and FIG. 7B is a view seen from the direction of arrow VIIB in FIG. 7A.
3B and 7, a cylindrical holder support 51 extending in the left-right direction as an example of a rotation holding auxiliary member is supported in the holder supporting through hole 42c1 of the left holder supporting member 42c. The holder support 51 is formed to penetrate from the upper end to the holder through hole 51a through a holder through hole 51a that penetrates in the axial direction (left and right direction) with an inner diameter corresponding to the outer diameter of the small diameter portion 46b of the mounting member holder 46. And a rotational position fixing screw mounting hole 51b having a thread groove formed on the inner peripheral surface.
3A and 4, a sample collection member 56 as an example of a sample extraction member is supported in the extraction member through support hole 46 c of the extraction member holder 46. The sample collection member 56 has a handle portion 56a as an example of a supported portion having an outer diameter corresponding to the inner diameter of the extraction member through support hole 46c. A needle-like sample collection needle portion 56b as an example of a sample extraction portion is supported at the front end portion of the handle portion 56a.

Therefore, in FIG. 3B, in the sample extraction attachment 41, the extraction member holder 46 has a support fixing screw on the support fixing portion 46e of the small diameter portion 46b with the small diameter portion 46b passing through the holder through hole 51a of the holder support 51. By screwing N2, the support holder 51 is attached in a rotatable state.
Then, the holder support 51 is fixed to the attachment frame 42c by the support fixing screw N3 in a state where the attachment member holder 46 and the holder support 51 are passed through the holder supporting through holes 42b1 and 42c1. As a result, the holder support 51 is attached to the attachment frame 42 so as not to move and rotate, and the take-out member holder 46 is held in a state where it cannot move and rotate in the axial direction with respect to the attachment frame 42. At this time, the left and right positions of the mounting member holder 46 are finely adjusted by providing the support fixing through-hole 42c2 with a gap that is movable in the front-rear direction, so-called play and rattling. It is possible.
Then, by attaching the screw K3 to the holder fixing through hole 42b2, the extraction member holder 46 can be held so as not to rotate.

  As an example of the sample removing member attaching / detaching member, the attaching / detaching screw mounting portion 46d of the extracting member holder 46 has the handle 56a of the sample collecting member 56 passed through the extracting member through support hole 46c of the extracting member holder 46. The detachable screw N4 is screwed. Therefore, by tightening the detachable screw N4, the handle 56a can be tightened at the tip of the detachable screw N4 and held in an axially immovable state, and by loosening the detachable screw N4, the tightening of the handle 56a is released. The sampling member 56 can be attached and detached and exchanged.

  Therefore, in the sample take-out attachment 41 of the first embodiment, the handle 56a can be finely adjusted in the left-right direction (Y-axis direction) by loosening the support fixing screw N3, and the handle can be finely adjusted by loosening the detachable screw N4. 56a can be moved in the axial direction, and the handle 56a can be rotated by loosening the detachable screw K3. As a result, by combining these movements, the tip position of the sample collection needle portion 56b can be moved and adjusted to an arbitrary position on the optical axis of the image sensor 22a. The sample collection member 56 of Example 1 is adjusted and set so that the tip position of the sample collection needle portion 56 b matches the focal position A of the imaging member 21.

FIG. 8 is an explanatory view of a sample cutting member which is another example of the sample extraction member of Example 1, FIG. 8A is an explanatory view of the main body of the extraction apparatus with the sample cutting member mounted, and FIG. 8B is a sample cutting member. 8C is a diagram viewed from the direction of arrow VIIIC in FIG. 8B, FIG. 8D is a diagram illustrating the cutting blade, and FIG. 8E is a diagram viewed from the direction of arrow VIIIE in FIG. 8D.
In FIG. 8, a sample cutting member 61, which is an example of a sample extraction member, can be attached to the extraction member holder 46 so as to replace the sample collection member 56. The sample cutting member 61 has a handle portion 62 as an example of a supported portion having an outer diameter corresponding to the inner diameter of the extraction member through support hole 46c, and an example of a cutting member main body is provided at the tip of the handle portion 62. The head part 63 is supported. In FIG. 8B, the handle portion 62 has a handle portion main body 62 a supported by the extraction member holder 46. At the front end of the handle portion main body 62a, a small-diameter rod-like head mounting portion 62b having a thread groove formed on the surface is formed.

The head portion 63 has a block-shaped blade support member 64 connected to the handle portion 62 and a cutting blade 66 supported on the front end surface of the blade support member 64. A cutout portion 64b is formed at the rear lower end of the blade support member 64. The cutout portion 64b is cut out so as to incline forward with respect to the rear surface 64a. The cut portion 64b is formed with a screw-like attached portion 64c, which can be attached to the screw of the head attaching portion 62b. A blade mounting portion 64d formed by a screw hole penetrating in the front-rear direction is formed at the upper end portion of the blade support member 64.
The cutting blade 66 has an attached portion 66a formed by a through hole having the same diameter as the blade attaching portion 64d at the upper end portion. At the lower end portion of the cutting blade 66, a blade portion 66b as an example of a sample taking-out portion is provided. The cutting blade 66 is attached to the blade support member 64 by a blade attachment screw 67 that passes through the attached portion 66a and is screwed into the blade attachment portion 64d.
In the sample cutting member 61 of Example 1, the tip of the blade portion 66 b of the cutting blade 66 is adjusted so as to coincide with the focal position A of the imaging member 21.

FIG. 9 is an explanatory diagram of a modified example of the sample cutting member of Example 1, FIG. 9A is an explanatory diagram of the head portion of the sample cutting member of the first modified example corresponding to FIG. 8B, and FIG. 9B is a second modified example. It is explanatory drawing of the head part of the sample cutting member of an example.
The head part 63 ′ of the sample cutting member shown in FIG. 9A is omitted from the cut part 64b as compared with the head part 63 shown in FIG. Therefore, in the state where the head portion 63 ′ is mounted on the handle portion 62, the head portion 63 ′ shown in FIG. 9A is compared with the angle α formed by the cutting blade 66 and the optical axis of the head portion 63 shown in FIG. The angle α ′ formed by the cutting blade 66 and the optical axis is increased. It is also possible to prepare a sample cutting member 61 having a head portion 63 shown in FIG. 8 and a sample cutting member 61 ′ having a head portion 63 ′ shown in FIG. 9A, respectively, and attach / detach to / from the extraction member through support hole 46c. In addition, the head portions 63 and 63 'can be attached to and detached from the handle portion 62 supported by the take-out member through support hole 46c.

  The head portion 63 ″ of the sample cutting member 61 ″ shown in FIG. 9B is formed with a blade support surface 64f extending obliquely below the side surface 64e with respect to the blade support member 64 shown in FIG. Therefore, the angle α ″ formed by the cutting blade 66 supported by the blade support surface 64f and the optical axis is the acute angle α, α ′ formed by the cutting blade 66 and the optical axis shown in FIGS. In contrast, an obtuse angle can be used.

FIG. 10 is an explanatory diagram of a state in which the positioning member is mounted on the sample extraction member of Example 1, FIG. 10A is an explanatory diagram of a state in which the positioning member is mounted to perform positioning at the time of replacement, and FIG. It is explanatory drawing of the state which mounted | wore the positioning member in order to perform the positioning at the time of sample extraction.
In FIG. 10, a positioning member 68 is mounted on the handle portions 56a and 62 of the sample extraction members 56 and 61 to 61 ″. The positioning member 68 has a block-shaped positioning member main body 68a. The positioning member main body 68a is supported by the handle portions 56a and 62 by penetrating the handle portions 56a and 62. The positioning member main body 68a includes the handle portions 56a and 62. A position fixing screw 68b that can be contacted is screwed.

Therefore, as shown in FIG. 10A, when the positioning member 68 is attached to the focal position A side of the attachment frame 42, first, the sample extraction members 56, 61 to 61 are placed with the positioning fixing screw 68b loosened. In this state, the positioning member main body 68a is moved along the handle portions 56a and 62 and brought into contact with the mounting member holder 46. Then, the positioning fixing is performed. The screw 68b is tightened to fix the positioning member main body 68a to the handle portions 56a and 62.
In the case where the positioning member 68 is not attached, when the sample extraction members 56 and 61 to 61 ″ are exchanged, the tip is adjusted to the focal position A every time the sample extraction members 56 and 61 to 61 ″ are attached. Position adjustment is required. In particular, after mounting and positioning, the position is adjusted again when removing and reattaching. On the other hand, when the position of the sample take-out members 56, 61-61 ″ is adjusted, the position-finding member 68 is fixed, and when the sample take-out members 56, 61-61 ″ are attached again, By simply inserting the positioning member 68 until it comes into contact with the mounting member holder 46, the tips of the sample take-out members 56 and 61-61 ″ can be adjusted to the focal position A, and positioning can be performed easily.

As shown in FIG. 10B, when the positioning member 68 is mounted on the side opposite to the focal position A across the mounting member holder 46, the tips of the sample extraction members 56, 61 to 61 ″ are the focal position A. The positioning member main body 68a is brought into contact with the mounting member holder 46 in a state adjusted so as to coincide with the positioning member, the positioning fixing screw 68b is tightened, and the positioning member main body 68a can be fixed to the handle portions 56a and 62. .
In this way, for example, while the imaging member 21 is observing and searching for the sample, the tip portions of the sample extraction members 56 and 61 to 61 ″ are in contact with the wafer W by mistake, and the wafer W or In order to prevent the tip of the sample take-out member 56, 61-61 ″ from being damaged, the attaching / detaching screw N4 is loosened to move the tip of the sample take-out member 56, 61-61 ″ from the focal position A to the handle 56a, After the sample to be sampled is confirmed by shifting to the rear side in the axial direction of 62, the positioning member main body 68a is brought into contact with the mounting member holder 46 so that the tips of the sample extraction members 56 and 61-61 ″ are brought into the focal position A. It can be easily restored.

  The sample extraction attachment 41 of Example 1 attached to the imaging member 21 includes the attachment frame 42, the extraction member holder 46, the holder support 51, the sample collection member 56 or the sample cutting members 61, 61 ′, 61 ″, and support fixing screws. N3, an attachment fixing member K2, a holder fixing member K3, etc. Further, the take-out device main body 13 of Example 1 includes the gripping member 14, the rear end cap 16, the imaging member 21, the lens holding member 26, The sample unit 11 includes a lens unit 31, a sample extraction attachment 41, and the like. The sample extraction device 11 according to the first embodiment includes the extraction device main body 13, the image display 12, and the like.

(Operation of Example 1)
FIG. 11 is an explanatory diagram of the operation of the first embodiment, FIG. 11A is an explanatory diagram in a state where the sample is not focused, and FIG. 11B is an explanatory diagram in a state where the sample is collected while being focused on the sample.
In the sample inspection system S according to the first embodiment having the above-described configuration, when the sample attached to the wafer W is collected in order to perform the microscopic analysis by the microanalyzer 2, the user 8 uses the sample take-out device 11 to take the wafer. A sample is taken from W. At this time, the user 8 grasps the gripping member 14 of the take-out device main body 13 to which the sample collection member 56 is fixed, and refers to the image picked up by the image pickup member 21 and displayed on the image display 12 while taking out the pick-up device main body 13. To operate.

In FIG. 11, since the focal position A of the imaging member 21 is set in advance at the tip of the sample collection needle portion 56 b of the sample collection member 56, the sample collection needle is always displayed in the image displayed on the image display 12. It is displayed at the same position on the screen 12b (in the center of the screen in FIG. 11) with the tip of the portion 56b in focus. Therefore, the user 8 operates the take-out device main body 13 while referring to the screen 12b so that the sample 71 to be collected is aligned with the position of the sample collection needle 56b on the screen 12b, so that the sample 71 is the sample collection needle. It can be collected (taken out) by adhering to the tip of the part 56b by electrostatic force or physical catching.
Therefore, in the sample collection member 56 of the first embodiment, the focal position A of the imaging member 21 is previously aligned with the tip of the sample collection needle portion 56b, that is, the observation range and the position where the sample 71 is collected are the first. Therefore, the sample 71 can be taken out only by operating the take-out device main body 13 so that the sample 71 is focused and observed. Therefore, as in the prior art shown in FIG. 14, it takes less time for sampling due to a shift in perspective, and the sample taking-out device 11 of the first embodiment can reduce the work and can be easily performed. Further, as in the prior art described in Patent Document 1, a minute sample can be collected without using a microscope, and a sample is collected from a sample deposit (wafer W or the like) that is not placed on the sample holder of the microscope. In addition, it is not limited to rooms such as laboratories and laboratories, and samples can be easily collected outdoors.

  If the sample is stuck on the wafer W and cannot be taken out simply by contacting the sample collection needle portion 56b, the sample cutting members 61, 61 ', 61 "are mounted and the sample S is cut. Thus, it is possible to take out the sample. At this time, since the tips of the sample cutting members 61, 61 ′, 61 ″ are set at the focal position A, the perspective as in the prior art shown in FIG. As compared with the case where the position to be cut and the position to be cut are shifted and cutting may fail, the position to be cut can be easily cut.

In Example 1, the sample cutting members 61 and 61 ′ are moved from the front (back side on the screen) to the rear (front side on the screen) with the tip of the blade 66 b in contact with the sample. Thus, the sample can be cut so as to cut the surface thinly with a scissors, and the sample cutting member 61 ″ can cut the sample by moving it from the rear to the front. Alternatively, the sample piece can be cut from a large sample. If the blade 66b is in contact with a large sample, the sample can be cut by pushing it in the thickness direction of the sample or moving it in the left-right direction. By exchanging the sample cutting members 61, 61 ′, 61 ″ and changing the moving direction according to the usage and the user's convenience, the sample piece can be easily cut and taken out into an arbitrary shape.
The cut or cut sample is attached to the tip of the cutting blade 66 or is replaced with the sample collecting member 56 and collected by the sample collecting member 56 to take out the sample and place it on the sample plate 7. Can be conveyed to the sample stage 4.

  Furthermore, in the first embodiment, the image magnification can be changed by exchanging the lens unit 31, and the lens unit 31 can be exchanged by changing the magnification of each lens unit 31 to match the focal position A. After that, even without adjusting the sample take-out members 56, 61, 61 ', 61 ", it can be used quickly with its tip aligned with the focal position A. At this time, the optical system of the lens unit 31, etc. In this case, when the one having a large depth of focus is selected, the sample 71 far from the tip of the sample take-out members 56, 61, 61 ′, 61 ″ is also easily displayed on the screen 12b.

Further, in the first embodiment, when the positioning member 68 is mounted on the handle portions 56a and 62, when the sample is exchanged (in the case of FIG. 10A) or when the sample is observed and the sample is searched (in the case of FIG. 10B), , 61-61 ″ can be easily positioned. That is, the reproducibility (reproducibility at the time of replacement or reproducibility at the time of search) of the sample take-out member 56, 61-61 ″ to the focal position A is increased. And easily.
Although the positioning member 68 is disposed on the focal position A side or the opposite side of the mounting member holder 46, the positioning member 68 is disposed on both sides so as to sandwich the mounting member holder 46 from both sides. It is also possible to use one of the positioning fixing screws 68b after loosening it.

12 is an explanatory view of the take-out device main body of the second embodiment, FIG. 12A is a side view corresponding to FIG. 3 of the first embodiment, and FIG. 12B is a plan view with the light source member removed from FIG.
FIG. 13 is an explanatory diagram of each part constituting the take-out device main body of Example 2, FIG. 13A is an explanatory diagram of an attachment frame of Example 2, FIG. 13B is an explanatory diagram of a tweezer support member, and FIG. It is explanatory drawing of.
Next, the second embodiment of the present invention will be described. In the description of the second embodiment, the same reference numerals are given to the components corresponding to the components of the first embodiment, and the detailed description thereof will be given. Omitted.
The second embodiment is different from the first embodiment in the following points, but is configured in the same manner as the first embodiment in other points.

  In FIG. 12, in the take-out device main body 13 ′ according to the second embodiment, the sample take-out attachment 41 ′ according to the second embodiment is mounted instead of the sample take-out attachment 41 according to the first embodiment. 12 and 13, the sample take-out attachment 41 ′ has holder support portions 42b ′ and 42c ′ that are longer in the vertical direction than the holder support portions 42b and 42c of the first embodiment. Respective holes 42b1, 42b2, 42c1, and 42c2 configured in the same manner as in the first embodiment are formed in the upper portions of the holder support portions 42b 'and 42c'. In FIG. 13A, a pair of left and right pin support recesses 81, 82 extending in the left-right direction from the inner surfaces of the holder support portions 42b ', 42c' are formed below the holder support portions 42b ', 42c'. The pin support recesses 81 and 82 are inserted with tweezers outer surface support pins 83 and 84 as an example of an extraction portion outer surface support member. The inner ends of the tweezers outer surface support pins 83 and 84 are holder support. It protrudes inward from the inner surfaces of the portions 42b 'and 42c'.

  In FIG. 12A, the extraction member holder 46 supports a support rod 86 as an example of an illuminating member support, instead of the sample extraction members 56, 61, 61 ′, 61 ″ of the first embodiment. An LED light 87 as an example of an illuminating member that illuminates the focal position A is supported on the front end portion of the support rod 86. The LED light 87 is supplied with power via a wiring (not shown). Yes.

12A and 13B, a tweezer support member 88 as an example of a support member for an extraction member is supported at the rear end portion of the support rod 86. In FIG. 13C, the tweezer support member 88 has a plate-shaped main body 88a. A support rod through hole 88b as an example of a support through hole penetrating in the front-rear direction is formed in the upper portion of the main body 88a, and the support rod 86 is held in a state of passing through the support rod through hole 88b. Is done.
A support fixing screw hole 88c extending from the upper end surface to the support rod through hole 88b is formed at the upper end of the main body 88a, and is an example of a support fixing member screwed into the support fixing screw hole 88c. The axial position of the support rod 86 is fixed by the rod fixing screw N11.
A lower portion of the main body 88a is formed with a groove 88d for fixing the takeout member that extends in the front-rear direction and extends upward from the lower end. A fixing screw hole 88e penetrating in the left-right direction is formed at the lower end of the groove 88d.

  A tweezers 89 as an example of a sample taking-out member is supported on the groove 88d. 12B, the tweezers 89 includes a rear base end portion 89a, a movable portion 89b that extends in front of the base end portion 89a and is movable in a direction approaching and separating from each other, and a movable portion. And an extraction portion 89c as an example of a sample extraction portion formed at the tip of 89b. The tweezers 89 are supported by the tweezer support member 88 by tightening the fixing screw N12 to be attached to the fixing screw hole 88e in a state where the base end portion 89a is inserted into the groove portion 88d. Therefore, the tweezers 89 according to the first embodiment is indirectly held by the extraction member holder 46 via the tweezer support member 88 and the support rod 86.

Further, in a state where the movable parts 89b of the tweezers 89 are separated from each other, the outer surface of the movable part 89b is held at a preset position so as not to come into contact with the tweezers outer surface support pins 83 and 84 and be separated too much. .
Note that the tip of the extraction part 89c of the tweezers 89 is arranged corresponding to the focal position A, and the user brings the movable part 89b close together with fingers to pick up the sample, and the tips of the extraction part 89c contact each other. In the state, the extraction part 89c is set to coincide with the focal position A. The adjustment for aligning the extraction portion 89c with the focal position A is performed by shifting the support rod 86 in the axial direction or by shifting the position of the tweezer support member 88 with respect to the support rod 86 in the same manner as in the first embodiment. Is possible.

(Operation of Example 2)
In the sample inspection system S according to the second embodiment having the above-described configuration, the image display 12 is in a state where a finger is attached to the outer surface of the movable portion 89b of the tweezers 89 while holding the holding member 14 of the take-out device main body 13 ′. The extraction apparatus body 13 is operated while referring to the image displayed on the screen so that the sample 71 to be extracted corresponds to the position of the extraction unit 89c on the screen 12b. And the sample 71 can be taken out by the extraction part 89c by pressing the movable part 89b so as to be sandwiched between fingers. Therefore, in the sample inspection system S of the second embodiment, a minute sample can be easily taken out as in the first embodiment.
Further, in the sample inspection system S of the second embodiment, the focal position A is illuminated by the LED light 87, and the sample 71 can be easily taken out even in a dark place or a room where illumination is insufficient.

(Example of change)
As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. Modification examples (H01) to (H015) of the present invention are exemplified below.
(H01) In the above embodiment, the lens unit 31 is an interchangeable type. However, the present invention is not limited to this configuration, and an optical system capable of manual or automatic focus adjustment is provided so that the focal position A and magnification can be adjusted without replacement. An adjustable configuration is also possible.
(H02) In the above-described embodiment, the sample extraction members 56, 61, 61 ′, 61 ″ are exemplified as the case of sample collection or cutting. However, it is also possible to prepare tweezers or a knife as the sample extraction member. However, the present invention is not limited to this, and for example, it is possible to attach a so-called dropper-shaped sample extraction member that takes out a sample by sucking out a liquid sample, or to a biological sample such as a plant or an animal. In addition, it is possible to attach a member for applying, spraying, etc. Further, for example, it is possible to mount a miniplane described in JP-A-7-294399.

(H03) In the above-described embodiment, it is desirable to provide a configuration for adjusting the tip position of the sample take-out members 56, 61, 61 ', 61 ". Can be adjusted, the configuration for adjusting the tip positions of the sample take-out members 56, 61, 61 ', 61 "can be omitted.
(H04) In the above-described embodiment, the writing tool (pen) -type gripping member 14 is employed, but is not limited to the pen-shaped shape, and a gripable handle shape, for example, a toothbrush handle shape, a flashlight, etc. It is possible to make arbitrary shapes, such as a shape like.
(H05) In the above embodiment, the image display 12 (monitor) is configured separately from the take-out device main body 13, but it is also possible to adopt a configuration in which the monitor is fixed to the take-out device main body 13. In addition, the image display 12 and the take-out device main body 13 are connected by a wired cable, but may be in a wireless format. When the transmission / reception of information is made wireless, the take-out device main body 13 can be made wireless by making it a dry battery type or a rechargeable battery type, and the cable does not hinder the work, and the operability is further improved compared to the case of the cable type. Can be improved.

(H06) In the above-described embodiment, the sample take-out attachment 41 is detachable from the imaging member 21, but can be fixed so as not to be detachable. Alternatively, the attachment frame 42 and the like can be fixed so that only the sample take-out members 56, 61, 61 ′, 61 ″ can be attached and detached.
(H07) In the above-described embodiment, the sample take-out members 56, 61, 61 ′, 61 ″ are detachable by tightening or loosening the detachable screw N4, but the sample take-out members 56, 61, 61 are exemplified. The configuration for detachably fixing ', 61 "is not limited to this configuration, and any conventionally known detachable fixing method such as a method for detachably fixing using a leaf spring can be employed. is there.

(H08) In the above embodiment, the imaging member 21 is fixed to the gripping member 14, and the sample take-out attachment 41 is attached to the imaging member 21, so that the gripping member 14 is indirectly connected via the imaging member 21. However, the present invention is not limited to this configuration, and for example, a configuration in which the sample extraction attachment 41 is directly fixed to the gripping member 14 may be employed. Further, instead of the configuration in which the gripping member is supported on the rear end portion of the handle 56a of the sample extraction member 56, that is, in the embodiment, the sample extraction member is fixed to the gripping member + imaging member, the sample extraction is performed. The imaging member may be fixed to the member + gripping member.
(H09) In the above embodiment, a so-called image fiber may be employed for the optical system, and an image at the focal position A may be formed on the imaging member via the image fiber.

(H010) In the above embodiment, the image display 12 (monitor) is installed on the table, but the present invention is not limited to this configuration, and any conventionally known display can be used. For example, a conventionally known head mounted display can be used. By using a head-mounted display, it is expected that observation can be performed while viewing the direction of the wafer W, and operability is further improved, as compared with the case where the monitor 12 is viewed from a position different from the position of the wafer W where the sample is actually collected. The
(H011) Although the case where the positioning member 68 is mounted is illustrated in the above embodiment, the present invention is not limited to this configuration. For example, scales and the like are formed in advance on the handle portions 56a and 62, and the tip is at the focal position A. It is also possible to make it easy to locate the position at the time of remounting by storing and taking note of the scale in a state that coincides with. In addition, a similar effect can be obtained by writing marks on the handle portions 56a and 62 with a magic or the like.

(H012) In the above-described embodiment, a conventionally known microscopic Raman spectrophotometer has been exemplified as an example of the microscopic analysis device. However, the microscopic analysis device is not limited to this configuration, and a scanning electron microscope (SEM) or transmission electron Any microanalyzer such as an electron microscope such as a microscope (TEM) or an optical microscope can be used according to the purpose and application of the microanalysis.
(H013) As illustrated in the above embodiment, the sample taken out is not directly set on a sample stage such as a microscope, but is stored once in a sample storage box or the like and transported to a place where a microscope is placed, or a microscope. It is also possible to separate the extracting operation and the analyzing operation, such as storing until the usable time.

(H014) In the embodiment, the configuration of the first embodiment and the configuration of the second embodiment can be combined. For example, in the tweezer support member 88 as an example of the support member for the take-out member according to the second embodiment, a hole through which the handle portions 56a and 62 can pass instead of the groove portion 88d is formed and supported so that the LED light 87 can focus. While illuminating the position A, the sample 71 can be sampled by the sample collection needle portion 56 b, or the sample 71 can be cut by the cutting blade 66.
(H015) In the above-described embodiment, when illumination is unnecessary, the LED light 87 of Embodiment 2 can be removed from the support rod 86 and only the tweezers 89 can be configured.

FIG. 1 is an explanatory diagram of a sample extraction method using the sample extraction apparatus of Example 1 of the present invention. FIG. 2 is an enlarged view of a main part of the sample taking-out apparatus of FIG. 3A and 3B are cross-sectional views of a main part of the main body of the take-out device according to the first embodiment. FIG. 3A is a side view with the main part taken as a cross-section, and FIG. FIG. 4 is an exploded explanatory view of the take-out device main body. 5A and 5B are explanatory views of the frame of the sample removal attachment, FIG. 5A is a front view, FIG. 5B is a view seen from the direction of arrow VB in FIG. 5A, FIG. 5C is a view seen from the direction of arrow VC in FIG. These are the figures seen from the arrow VD direction of FIG. 5A. 6A and 6B are explanatory views of the extraction member holder of the sample extraction attachment, in which FIG. 6A is a front view, FIG. 6B is a view seen from the direction of arrow VIB in FIG. 6A, and FIG. is there. FIG. 7 is an explanatory view of a holder support of a sample take-out attachment, FIG. 7A is a front view, and FIG. 7B is a view seen from the direction of arrow VIIB in FIG. 7A. FIG. 8 is an explanatory view of a sample cutting member which is another example of the sample extraction member of Example 1, FIG. 8A is an explanatory view of the main body of the extraction apparatus with the sample cutting member mounted, and FIG. 8B is a sample cutting member. 8C is a diagram viewed from the direction of arrow VIIIC in FIG. 8B, FIG. 8D is a diagram illustrating the cutting blade, and FIG. 8E is a diagram viewed from the direction of arrow VIIIE in FIG. 8D. FIG. 9 is an explanatory diagram of a modified example of the sample cutting member of Example 1, FIG. 9A is an explanatory diagram of the head portion of the sample cutting member of the first modified example corresponding to FIG. 8B, and FIG. 9B is a second modified example. It is explanatory drawing of the head part of the sample cutting member of an example. FIG. 10 is an explanatory diagram of a state in which the positioning member is mounted on the sample extraction member of Example 1, FIG. 10A is an explanatory diagram of a state in which the positioning member is mounted to perform positioning at the time of replacement, and FIG. It is explanatory drawing of the state which mounted | wore the positioning member in order to perform the positioning at the time of sample extraction. FIG. 11 is an explanatory diagram of the operation of the first embodiment, FIG. 11A is an explanatory diagram in a state where the sample is not focused, and FIG. 11B is an explanatory diagram in a state where the sample is collected while being focused on the sample. 12 is an explanatory view of the take-out device main body of the second embodiment, FIG. 12A is a side view corresponding to FIG. 3 of the first embodiment, and FIG. 12B is a plan view with the light source member removed from FIG. FIG. 13 is an explanatory diagram of each part constituting the take-out device main body of Example 2, FIG. 13A is an explanatory diagram of an attachment frame of Example 2, FIG. 13B is an explanatory diagram of a tweezer support member, and FIG. It is explanatory drawing of. FIG. 14 is an explanatory diagram of a conventional sampling method.

Explanation of symbols

8 ... user,
11 ... Sample extraction device,
12 ... Image display,
14 ... gripping member,
21 ... Imaging member,
31c: Optical system,
41. Sample removal attachment,
46 ... Extraction member holder,
56b, 66b, 89c ... sample extraction part,
56, 61, 61 ', 61 ", 89 ... extraction member,
71 ... Sample,
A: Focus position.

Claims (7)

A gripping member gripped by the user;
An imaging member that is fixed to the gripping member and captures an image;
An extraction member holder fixed to the gripping member;
An extraction member having a sample extraction portion for extracting a sample to be microscopically analyzed, supported by the extraction member holder, and the sample extraction portion being disposed at a focal position of the imaging member;
An image display that is electrically connected to the imaging member and displays a captured image;
A sample take-out apparatus comprising: A cylindrical and writing instrument-shaped gripping member;
The imaging member housed and fixed inside the gripping member;
An optical system that is arranged on the optical axis of the imaging member and is fixed to the gripping member by being supported by the imaging member, and sets a magnification for imaging;
The sample extracting device according to claim 1, further comprising: The sample take-out part that is configured in a needle shape and is taken out by collecting the sample,
The sample extracting device according to claim 1, further comprising: The sample take-out part, which is configured in a blade shape and cuts out the sample,
The sample extracting device according to claim 1, further comprising: The sample take-out part constituted by tweezers and picking up and taking out the sample,
The sample extracting device according to claim 1, further comprising: The sample extraction unit having an illumination member that illuminates the focal position,
The sample extracting device according to claim 5, comprising: An extraction member holder that is fixed detachably with respect to a gripping member to which an imaging member for capturing an image is fixed and is gripped by a user;
An extraction member having a sample extraction portion for extracting a sample to be microscopically analyzed, supported by the extraction member holder, and the sample extraction portion being disposed at a focal position of the imaging member;
A sample removal attachment characterized by comprising:

Images