JP2009130926A - Ferrite phase shifter and automatic matching device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an effective excellent function as a phase shifter, which allows the temperature rise of ferrites to be suppressed and properties of the ferrites to be maintained, also when it is used with high power. <P>SOLUTION: The ferrite phase shifter includes a rectangular waveguide 11, approximately plate-shaped ferrites 13, 13, of which the respective mounting surfaces are closely disposed to face each other on opposite inner wall surfaces of wide surface of the rectangular waveguide 11, respectively, and a coil 12 which is wound around the periphery of the rectangular waveguide 11 at a position approximately corresponding to a ferrite 13 and through which currents run, wherein dielectric layers 14, 14 are provided on the opposite surfaces of approximately plate-shaped ferrites 13, 13, respectively, and a yoke is further provided at a position approximately corresponding to the approximately plate-shaped ferrites 13, 13 on outer wall surfaces of wide surface of the rectangular waveguide 11. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  In the present invention, a magnetic field is generated by passing a current from the outside of a rectangular waveguide to generate a magnetic field, thereby changing the magnetic properties of the ferrite to change the wavelength in the high-frequency waveguide and changing the phase of the propagating high-frequency. The present invention relates to a ferrite phase shifter and an automatic matching apparatus including the ferrite phase shifter.

  Ferrite phase shifters are known in which ferrite is provided in a waveguide to generate a magnetic field and change the phase of a high frequency wave propagating in the waveguide. The ferrite phase shifter is, for example, as shown in FIGS. Composed. The ferrite phase shifter 100 shown in FIGS. 18 to 20 includes a rectangular waveguide 101 having a substantially rectangular tube shape formed by an upper surface 101a, a lower surface 101b, and side surfaces 101c on both sides, and other rectangular shapes at both ends in the longitudinal direction. A flanged flange 101d is formed as a connecting portion when connecting to the waveguide. A coil 102 is wound in a substantially spiral shape at the approximate center of the rectangular waveguide 101. Flat spacers 103 made of a dielectric material are respectively provided above and below the rectangular waveguide 101, and the spacers 103 are disposed along the longitudinal direction of the rectangular waveguide 101. A rectangular parallelepiped ferrite 104 is fixed between the upper and lower spacers 103.

  When using the ferrite phase shifter, for example, the rectangular waveguide 101 is connected to another rectangular waveguide to form a waveguide path, and the rectangular waveguide 101 is connected via the waveguide path. In addition to propagating a high frequency inside, a current is passed through the coil 102 from the outside of the rectangular waveguide 101 to generate a magnetic field, thereby changing the magnetic properties of the ferrite to change the wavelength in the high frequency waveguide and propagate it. The phase of the high frequency is changed (see Non-Patent Document 1).

"Microwave Ferrite and its Applied Technology", pages 111-114, written by Tadashi Hashimoto, General Electronic Publishing Company, May 10, 1997

  By the way, in the ferrite phase shifter, when the input power increases, the loss of the ferrite increases and heat is generated. However, since the ferrite phase shifter 100 fixes the ferrite 104 via the spacers 103 and 103, the generated heat is generated. However, heat is not smoothly dissipated and the temperature of ferrite rises. Such a temperature rise of the ferrite greatly changes the properties of the ferrite, and becomes a factor that impairs the function as a phase shifter.

  The present invention has been proposed in view of the above problems, and even when used at high power, it is possible to suppress the temperature rise of the ferrite and maintain the properties of the ferrite, and to function well as a phase shifter. It is an object of the present invention to provide a ferrite phase shifter capable of stably exhibiting the above and an automatic matching device including the ferrite phase shifter.

  The ferrite phase shifter according to the present invention includes a rectangular waveguide, a substantially flat ferrite disposed in close contact with an inner surface of a wide surface facing the rectangular waveguide, and the ferrite. And a coil that is wound around the outer periphery of the rectangular waveguide at a substantially corresponding position and through which a current flows. The ferrite phase shifter of the present invention is characterized in that a dielectric layer is provided on the opposing surface of the substantially flat ferrite. It is preferable that the dielectric layers are provided on opposing surfaces of the substantially flat ferrite, and the dielectric layers are provided to face each other.

  The ferrite phase shifter according to the present invention is characterized in that the substantially flat ferrite is formed by arranging a plurality of ferrite pieces in parallel with a gap. The ferrite phase shifter according to the present invention is characterized in that a yoke is provided at a position substantially corresponding to the substantially flat ferrite on the outer wall surface of the wide surface of the rectangular waveguide. The ferrite phase shifter according to the present invention is characterized in that a permanent magnet is provided in a part of the yoke.

  In the ferrite phase shifter of the present invention, at least one elongated rectangular tube portion having a slit whose longitudinal direction is the longitudinal direction of the rectangular waveguide protrudes outwardly from each of the wide surfaces of the rectangular waveguide. It is characterized by providing. The ferrite phase shifter according to the present invention is characterized in that an insulating layer is provided outside the slit in the longitudinal direction. The ferrite phase shifter according to the present invention is characterized in that an elongated rectangular tube portion having the slit is arranged in parallel on each of the wide surfaces of the rectangular waveguide, and preferably on the outer side in the longitudinal direction of the slit. An insulating layer is provided. The ferrite phase shifter according to the present invention is characterized in that a dielectric is provided in the slit.

  Further, the ferrite phase shifter of the present invention is provided with at least one pair of holes having a structure that is cut off with respect to a propagating high frequency at both end positions in the longitudinal direction of the rectangular waveguide of the substantially flat ferrite, Inside the hole, the substantially flat ferrite and another ferrite are housed, the inner end of the other ferrite is connected to the substantially flat ferrite, and the outer ends of the other ferrite are connected to each other via a yoke. It is characterized by connecting. The hole having the cut-off structure is provided with a predetermined inner diameter and depth so that a high-frequency cutoff frequency determined by, for example, the inner diameter and depth of the hole is higher than a high-frequency frequency band propagating in the rectangular waveguide .

  The automatic matching device of the present invention is characterized in that a matching line using at least one ferrite phase shifter of the present invention as a matching element is provided in a transmission line between a power source and a load.

  The invention disclosed in this specification includes, in addition to the configurations of each invention and each embodiment, those specified by changing these partial configurations to other configurations disclosed in this specification, or these configurations. To which other configurations disclosed in the present specification are added and specified, or those partial configurations deleted and specified to the extent that partial effects can be obtained are included.

  The ferrite phase shifter and the automatic matching device of the present invention make the shape of the ferrite substantially flat so that heat is hard to accumulate, and the substantially flat ferrite is closely attached to the wide inner wall surface of the rectangular waveguide. It is possible to reduce the heat radiation resistance and smoothly radiate the heat generated by the ferrite through the wall surface of the rectangular waveguide, thereby obtaining a high cooling effect. Therefore, even when used at high power, it is possible to suppress the temperature rise of the ferrite to maintain the properties of the ferrite, and to stably exhibit a good function as a phase shifter.

  Further, by providing a dielectric layer on the opposing surface of the substantially flat ferrite, the electromagnetic field distribution generated inside the rectangular waveguide can be concentrated on the ferrite, and the high-frequency electromagnetic field strength in the ferrite can be increased. it can. Therefore, the phase change rate of ferrite can be improved.

  Also, by providing a yoke at a position substantially corresponding to the substantially flat ferrite on the wide outer wall surface of the rectangular waveguide, a magnetic circuit is constituted by the ferrite and the yoke, and the amount of current flowing through the coil is reduced. Or the number of turns of the coil can be reduced.

  Further, by forming the substantially flat ferrite by arranging a plurality of ferrite pieces in parallel with a gap, a large thermal stress is applied to the substantially flat ferrite due to the difference in expansion coefficient between the rectangular waveguide and the ferrite. Can be prevented and cracking can be prevented.

  Further, by providing a permanent magnet in a part of the yoke, it is possible to apply a magnetic bias, reduce the amount of phase change, and improve the responsiveness.

  Each of the wide surfaces of the rectangular waveguide is provided with at least one elongated rectangular tube portion having a slit whose longitudinal direction is the longitudinal direction of the rectangular waveguide, thereby providing an electric resistance against a variable magnetic field. And an eddy current generated on the outer wall surface of the wide surface by the variable magnetic field can be suppressed.

  Further, by providing an insulating layer on the outer side in the longitudinal direction of the slit, the effect of suppressing eddy currents by the elongated rectangular tube portion having the slit can be further enhanced.

  Further, by arranging the elongated rectangular tube portion having the slit in parallel on each of the wide surfaces of the rectangular waveguide, the electric resistance against the variable magnetic field is further increased, and the vortex generated on the outer wall surface of the wide surface by the variable magnetic field. The current can be further suppressed.

  Also, by providing a dielectric in the slit, the slit can be made capacitive, the impedance to high frequency can be lowered, and high frequency leakage can be prevented.

  Further, at least one pair of holes having a structure that cuts off the high frequency propagating at both ends of the substantially flat ferrite in the longitudinal direction of the rectangular waveguide, the substantially flat ferrite and By installing another ferrite, connecting the inner end of another ferrite to a substantially flat ferrite, and connecting the outer ends of the other ferrites via a yoke, a substantially flat ferrite and another ferrite are connected. The yoke and the magnetic circuit can be configured to reduce the amount of current flowing through the coil or to reduce the number of turns of the coil. Furthermore, the responsiveness of the variable magnetic field to the time change rate of the control current flowing through the coil can be improved.

  The automatic alignment apparatus of the present invention can be electrically (electronic) driven while the conventional automatic alignment apparatus is mechanically driven. Accordingly, the matching speed can be increased to shorten the matching time, and the matching time, which was conventionally 1 to 2 seconds, can be set to 10 to 20 msec. Furthermore, since it is very difficult to break down, it can be made maintenance-free.

  An example of a ferrite phase shifter according to an embodiment of the present invention and an automatic matching device including the ferrite phase shifter will be described.

[Ferrite Phase Shifter of First Embodiment]
As shown in FIGS. 1 and 2, the ferrite phase shifter 10 of the first embodiment includes a rectangular waveguide 11 having a substantially rectangular tube shape formed by an upper surface 11a, a lower surface 11b, and side surfaces 11c on both sides. At both ends in the longitudinal direction, flange-shaped flanges 11d are formed as connection portions when connecting to other rectangular waveguides. A coil 12 through which a current is passed is wound in a substantially spiral shape at the substantially center of the outer periphery of the rectangular waveguide 11, and the coil 12 is inclined in a substantially vertical direction on the side surface 11c so as to be inclined outside the upper surface 11a and the lower surface 11b. It is wound to extend. The coil 12 is wound at a position substantially corresponding to a ferrite 13 described later.

  On the inner wall surfaces of the upper surface 11a and the lower surface 11b corresponding to the opposing wide surfaces of the rectangular waveguide 11, rectangular and elongated ferrite plates 13 are provided. The ferrite 13 has a wide surface on one side as a mounting surface, the mounting surface is disposed in close contact with each inner wall surface of the upper surface 11a or the lower surface 11b, and a rectangular waveguide whose longitudinal direction is a high-frequency propagation direction or the like. 11 are aligned with the longitudinal direction. The ferrite 13 on the upper surface 11a side and the 13 on the lower surface 11b side are arranged on the inner wall surface so as to face each other, and the wide surfaces on the other side of the ferrites 13 and 13 (the wide surface opposite to the mounting surface) face each other. .

  The material of the ferrite 13 is appropriate as long as it can be applied. For example, a garnet ferrite is preferable. In addition, the configuration in which the ferrite 13 is fixed to the rectangular waveguide 11 is also appropriate as long as it can be applied. For example, the ferrite 13 can be fixed with an adhesive having excellent heat dissipation or can be screwed.

  When the waveguide path is constituted by the ferrite phase shifter 10 of the first embodiment, other rectangular waveguides are arranged before and after the rectangular waveguide 11, and the flanges 11d and 11d at both ends thereof are interposed. Connect with other rectangular waveguides. When using the waveguide, for example, a high frequency is propagated in the rectangular waveguide 11 by the waveguide, and a current is applied to the coil 12 wound around the outer periphery of the rectangular waveguide 11. To generate a magnetic field or to change the magnetic field by changing the current flowing through the coil 12, thereby changing the magnetic properties of the ferrite to change the wavelength in the high-frequency waveguide and changing the phase of the high-frequency wave to propagate. .

  In the ferrite phase shifter 10 according to the first embodiment, since the ferrite 13 has a flat plate shape, heat is not easily accumulated in the ferrite 13, and the ferrite 13 is placed on the wide surface of the rectangular waveguide 11 (in this example, the upper surface 11a and the lower surface). By adhering closely to the inner wall surface of 11b), the heat generated in the ferrite 13 can be smoothly radiated through the wall surface of the rectangular waveguide 11, and a high cooling effect can be obtained. Therefore, even when used at high power, it is possible to maintain the characteristics of the ferrite 13 by suppressing the temperature rise of the ferrite 13, and to stably exhibit a good function as the ferrite phase shifter 10. it can.

  In the example of the first embodiment, the substantially flat ferrite is constituted by the single flat plate ferrite 13 in the shape of an elongated flat plate. However, the substantially flat ferrite of the present invention is not limited to the above-described configuration. For example, FIG. As shown in the example, the substantially flat ferrite may be configured by arranging a plurality of ferrite pieces in parallel with a gap, and such a configuration can be applied to each embodiment described later. FIG. 3 (a) is a configuration in which a plurality of elongated strip-shaped ferrite pieces 131a are arranged side by side with a slight gap 132a therebetween to form a rectangular and substantially flat ferrite 13a. . In FIG. 3B, a plurality of strip-shaped ferrite pieces 131b are arranged side by side in a matrix with a slight gap 132b between them, and a rectangular and generally flat ferrite 13b is formed as a whole. FIG. 3C shows a rectangular flat plate-like ferrite 13c as a whole, in which a plurality of rectangular flat ferrite pieces 131c are arranged in a matrix with a slight gap 132c therebetween. . In FIG. 3D, a plurality of strip-shaped ferrite pieces 131d each having a shape obtained by slicing a circular plate at predetermined intervals in a predetermined direction are arranged in a row with a slight gap 132d therebetween, and are circular as a whole. This constitutes the substantially flat ferrite 13d.

  By the said structure, it can prevent that a large thermal stress generate | occur | produces in the substantially flat ferrite 13a-13d by the difference in the expansion coefficient of the rectangular waveguide 11 and the ferrite 13a-13d, and can prevent a crack.

[Ferrite Phase Shifter of Second Embodiment]
As shown in FIG. 4, the ferrite phase shifter 10 of the second embodiment has a wide surface on the other side of each of the ferrites 13 and 13 (wide surface opposite to the mounting surface), that is, each of the opposing surfaces of the ferrites 13 and 13. The dielectric layer 14 is provided over the entire surface, and the dielectric layers 14 and 14 are provided to face each other. The dielectric layer 14 of the present embodiment is provided by fixing a flat dielectric to the ferrite 13. However, the configuration in which the dielectric layer 14 is provided is appropriate. For example, the dielectric layer 14 is applied to the ferrite 13. It may be provided. The material of the dielectric layer 14 is appropriate as long as it is applicable. However, it is preferable to use a material with low high-frequency loss and good heat resistance, such as an alumina porcelain. Other configurations of the ferrite phase shifter 10 of the second embodiment are the same as those of the ferrite phase shifter 10 of the first embodiment.

  The ferrite phase shifter 10 of the second embodiment can obtain the same effect as that of the first embodiment, and can provide an electromagnetic field distribution generated in the rectangular waveguide 11 by providing the dielectric layer 14. Thus, the high-frequency electromagnetic field strength in the portion of the ferrite 13 can be increased, whereby the phase change rate due to the ferrite 13 can be improved.

[Ferrite Phase Shifter of Third Embodiment]
As shown in FIGS. 5 and 6, the ferrite phase shifter 10 according to the third embodiment includes a coil 12 wound around a rectangular waveguide 11 with a smaller number of turns than the first embodiment, and a rectangular conductor. A yoke 15 is provided at a position corresponding to the elongated flat plate-like ferrite 13 on each outer wall surface of the upper surface 11 a and the lower surface 11 b corresponding to the wide surface of the wave tube 11.

  The yoke 15 is formed in a U-shaped plate shape in a side view, and is disposed so as to surround the outside of the coil 12 with the U-shape, and both ends thereof are made of ferrite 13 following the longitudinal direction of the rectangular waveguide 11. It arrange | positions corresponding to the both ends of a longitudinal direction, and is being fixed to each outer wall surface of the upper surface 11a and the lower surface 11b. In addition, the yoke 15 in the present embodiment has a configuration in which the permanent magnet 151 is provided at a substantially central portion thereof, but the portion corresponding to the permanent magnet 151 may be the yoke 15 made of the same material as the other portions. Further, the yoke 15 and the permanent magnet 151 in the present embodiment are formed with substantially the same width as the rectangular ferrite 13, but the width can be appropriately set as necessary. Moreover, if the permanent magnet 151 is a structure provided as a part of the yoke 15, the magnitude | size and the position to arrange | position are appropriate. The material of the yoke 15 and the permanent magnet 151 is appropriate as long as it is applicable. The yoke 15 may be a ferrite core, for example, and the permanent magnet 151 may be a ferrite magnet, a rare earth magnet, or the like. Other configurations of the ferrite phase shifter 10 of the third embodiment are the same as those of the ferrite phase shifter 10 of the first embodiment.

  The ferrite phase shifter 10 according to the third embodiment can obtain the same effect as that of the first embodiment, and can reduce the amount of current flowing through the coil 12 by forming a magnetic circuit with the ferrite 13 and the yoke 15. Or the number of turns of the coil 12 can be reduced. Further, by providing the permanent magnet 151 in a part of the yoke 15, it is possible to apply a magnetic bias, reduce the amount of phase change, and improve the responsiveness.

[Ferrite Phase Shifter of Fourth Embodiment]
As shown in FIGS. 7 and 8, the ferrite phase shifter 10 according to the fourth embodiment has a rectangular waveguide 11 at both longitudinal ends of the ferrite 13 corresponding to the longitudinal direction of the rectangular waveguide 11. The rectangular tube portion 11e is formed so as to protrude outward, and the hole 11f in the rectangular tube portion 11e is a hole whose size and depth are cut off with respect to the high frequency that propagates. . In this embodiment, a pair of holes 11f and 11f are formed for one ferrite 13, and two pairs of holes 11f are provided for the ferrites 13 and 13 on both sides.

  Inside each hole 11f, a rectangular columnar ferrite 16 corresponding to the shape and size of the hole 11f is housed, and the inner end of the ferrite 16 is connected to the end of the ferrite 13 in the rectangular waveguide 11. . Further, between the tips of the rectangular tube portions 11e and 11e projecting in the same direction, an elongated flat plate-like yoke 152 is installed, and both end portions of the yoke 152 are in contact with the ferrite 16 and the ferrite projecting in the same direction. The outer ends of 16 and 16 are connected to each other via a yoke 152.

  The coil 12 is wound around the rectangular waveguide 11 with a smaller number of turns than in the first embodiment, and the wound coil 12 is a U-shaped portion composed of a rectangular tube portion 11e and a yoke 152. Is surrounded. The material of the ferrite 16 and the material of the yoke 152 are appropriate as long as they are applicable. The ferrite 16 may be, for example, garnet ferrite, and the yoke 152 may be, for example, a ferrite core. The widths of the ferrite 16, the yoke 152, and the hole 11f are formed to be substantially the same as the width of the ferrite 13 in the present embodiment, but these widths can be appropriately set as necessary. Incidentally, a part of the yoke 152 such as a central portion thereof can be made a permanent magnet as in the third embodiment. Other configurations of the ferrite phase shifter 10 of the fourth embodiment are the same as the ferrite phase shifter 10 of the first embodiment.

  In the ferrite phase shifter 10 of the fourth embodiment, in addition to the same effects as those of the first embodiment, the flat ferrite 13, another quadrangular prism-like ferrite 16, and the yoke 152 constitute a magnetic circuit. As a result, the amount of current flowing through the coil 12 can be reduced, or the number of turns of the coil 12 can be reduced. In addition, the cut-off hole 11f can prevent unnecessary high-frequency radiation and intrusion of electromagnetic waves from the outside, and can improve the responsiveness of the variable magnetic field to the time change rate of the control current flowing through the coil 12. Further, when a permanent magnet is provided in a part of the yoke 152, a magnetic bias can be applied to reduce the amount of phase change and to further improve the responsiveness.

[Ferrite Phase Shifter of Fifth Embodiment]
As shown in FIGS. 9 to 11, the ferrite phase shifter 10 of the fifth embodiment has a high-frequency propagation direction in the longitudinal direction (rectangular) on the upper surface 11a and the lower surface 11b corresponding to the wide surfaces of the rectangular waveguide 11, respectively. The elongated rectangular tube portion 11g is provided to project outward, and the slit 11h in the elongated rectangular tube portion 11g is disposed with the longitudinal direction of the rectangular waveguide 11 as the longitudinal direction. Yes. The elongated rectangular tube portion 11g and the slit 11h are provided at positions substantially corresponding to the ferrite 13 in the rectangular waveguide 11. In this embodiment, the elongated rectangular tube portion 11g and the slit 11h are disposed in the ferrite 13 in a top view. The length may be longer than the length of the ferrite 13. The coil 12 is wound around the outer end of the elongated rectangular tube portion 11g, and is spirally wound with a smaller number of turns than the coil 12 of the first embodiment.

  An inner wall 11i and an outer wall 11j are doubled at the inner part of the flange 11d at both ends in the longitudinal direction of the rectangular waveguide 11, and the outer wall 11j is provided outside the inner wall 11i at a predetermined interval. Between the inner wall 11i and the outer wall 11j is a circumferential gap 11k having an L shape in cross section. The gap 11k opens to the outside of the rectangular waveguide 11 at a position corresponding to the tip of the outer wall 11j, and the inner wall 11i It opens to the inside of the rectangular waveguide 11 at a location corresponding to the tip, and penetrates into and out of the rectangular waveguide 11. An insulator 17 having a shape corresponding to the shape of the gap 11k is provided in the gap 11k. The outer wall 11j integrated with the inner wall 11i, the insulator 17, and the flange 11d is appropriately fixed, for example, by being fitted to each other. Other configurations of the ferrite phase shifter 10 of the fifth embodiment are the same as those of the ferrite phase shifter 10 of the first embodiment.

  The ferrite phase shifter 10 according to the fifth embodiment has the same effect as the first embodiment, but also has an elongated rectangular tube portion 11g and a slit 11h to increase the magnetic resistance against the variable magnetic field and make it variable. Eddy currents generated on the outer wall surface of the wide surface by a magnetic field can be suppressed. Further, by providing the insulator 17 on both outer sides in the longitudinal direction of the slit 11h, the rectangular waveguide 11 constituting the ferrite phase shifter 10 is insulated from the rectangular waveguide connected to the front and rear thereof, and eddy current is suppressed. The effect can be further enhanced.

  In the example of the fifth embodiment, each of the upper surface 11a and the lower surface 11b of the rectangular waveguide 11 is provided with one elongated rectangular tube portion 11g having one slit 11h or one slit 11h. Narrow rectangular tube portions 11g having two-dot chain line slits 11h are provided on both outer sides of an elongated rectangular tube portion 11g having nine solid-line slits 11h, and slits are formed on the upper surface 11a and the lower surface 11b of the rectangular waveguide 11, respectively. An elongated rectangular tube portion 11g or slit 11h having a slit 11h on each of the upper surface 11a and the lower surface 11b of the rectangular waveguide 11, such as a configuration in which three elongated rectangular tube portions 11g or slits 11h are arranged in parallel. By arranging a plurality of these in parallel, the magnetic resistance to the variable magnetic field can be further increased, and the eddy current generated on the outer wall surface of the wide surface can be further suppressed by the variable magnetic field. Te is preferred. The configuration in which the elongated rectangular tube portion 11g having the slit 11h or the slit 11h is arranged in parallel on each of the upper surface 11a and the lower surface 11b can be applied to each embodiment including the elongated rectangular tube portion 11g having the slit 11h. .

[Ferrite Phase Shifter of Sixth Embodiment]
As shown in FIG. 12, the ferrite phase shifter 10 of the sixth embodiment includes a dielectric 18 in the slit 11h of the ferrite phase shifter 10 of the fifth embodiment, and has a shape corresponding to the slit 11h. A sheet-like dielectric 18 having a size is inserted into the slit 11 h, and the inner end of the dielectric 18 is in contact with the upper surface of the ferrite 13. The material of the dielectric 18 is appropriate as long as it can be applied. For example, a Teflon sheet is preferable (Teflon is a registered trademark). Other configurations of the ferrite phase shifter 10 of the sixth embodiment are the same as those of the ferrite phase shifter 10 of the fifth embodiment.

  The ferrite phase shifter 10 of the sixth embodiment has the same effect as that of the fifth embodiment. In addition, the dielectric 11 is provided in the slit 11h, so that the slit 11h portion is capacitive, and is resistant to high frequencies. Impedance can be lowered and high frequency leakage can be prevented.

[Ferrite Phase Shifter of Seventh Embodiment]
The ferrite phase shifter 10 of the seventh embodiment is basically a combination of the configurations of the second, third, and fourth embodiments and the configuration of the sixth embodiment including the configuration of the fifth embodiment. Yes, configurations not particularly mentioned below use the configurations of the first to sixth embodiments. As shown in FIGS. 13 and 14, the ferrite phase shifter 10 of the seventh embodiment has a rectangular waveguide 11 composed of an upper surface 11a, a lower surface 11b, a side surface 11c, and a flange 11d. 11 are attached to the inner wall surfaces of the upper surface 11a and the lower surface 11b so that a rectangular and elongated ferrite 13 faces each other. Dielectric layers 14 and 14 are provided on the surface opposite to the mounting surface of the ferrites 13 and 13, and the dielectric layers 14 and 14 are disposed to face each other.

  On the upper surface 11a and the lower surface 11b at both longitudinal ends of the rectangular waveguide 11 of the ferrite 13, a rectangular tube portion 11e is formed so as to protrude outward, and a hole 11f in the rectangular tube portion 11e is formed. A hole whose size and depth are cut off with respect to the high frequency to propagate. Each hole 11 f is provided with a rectangular pillar-shaped ferrite 16 corresponding to the shape of the hole 11 f and longer than the depth of the hole 11 f, and the inner end of the ferrite 16 is connected to the end of the ferrite 13. Further, the outer end of the ferrite 16 slightly protrudes to the outside of the rectangular tube portion 11e, and the outer ends of the ferrites 16 and 16 protruding in the same direction are the yoke 152 and the permanent magnet 151 provided on a part of the yoke 152. Connected through.

  Further, an elongated rectangular tube portion 11g having the longitudinal direction of the rectangular waveguide 11 as a longitudinal direction is provided on the upper surface 11a and the lower surface 11b so as to protrude outward, and extends into the elongated rectangular tube portion 11g in the longitudinal direction. A slit 11h is formed. The elongated rectangular tube portion 11g of the present embodiment is provided between the pair of rectangular tube portions 11e and 11e, and is formed integrally with the rectangular tube portions 11e and 11e, and the slit 11h is a hole in the rectangular tube portions 11e and 11e. 11f and 11f. A dielectric 18 is inserted into the slit 11h, the inner end of the dielectric 18 abuts on the upper surface of the ferrite 13, and both longitudinal ends of the rectangular waveguide 11 of the dielectric 18 are ferrite in the holes 11f and 11f. 16 and 16 are in contact.

  The coil 12 is wound around the outside of the elongated rectangular tube portion 11g and the dielectric 18 so as to be inserted between the elongated rectangular tube portion 11g and the dielectric 18 and the yoke 152, and the coil according to the first embodiment. It is wound spirally with a number of turns less than twelve.

  Insulators 17 are provided on both outer sides in the longitudinal direction of the slit 11h. On one end side in the longitudinal direction of the rectangular waveguide 11 (the right end in FIG. 14), an insulator 17 is provided in the inner portion of the flange 11d adjacent to the flange 11d with the same configuration as that of the fifth embodiment. Further, on the other end side in the longitudinal direction of the rectangular waveguide 11 (left end in FIG. 14), an insulator 17 having the same configuration as that of the fifth embodiment is provided in an inner portion separated from the flange 11d by a predetermined distance. Yes. That is, the inner wall 11i and the outer wall 11j are doubled at a predetermined position on the other end side, and the outer wall 11j is provided outside the inner wall 11i with a predetermined interval. Between the inner wall 11i and the outer wall 11j is a circumferential gap 11k having an L shape in cross section. The gap 11k opens to the outside of the rectangular waveguide 11 at a position corresponding to the tip of the outer wall 11j, and the inner wall 11i It opens to the inside of the rectangular waveguide 11 at a location corresponding to the tip, and penetrates into and out of the rectangular waveguide 11. An insulator 17 having a shape corresponding to the shape of the gap 11k is provided in the gap 11k.

  The ferrite phase shifter 10 of the seventh embodiment has the same effects as the ferrite phase shifter 10 of the first to sixth embodiments.

[Example of automatic matching apparatus including ferrite phase shifter of embodiment]
Next, an example of an automatic matching apparatus including the ferrite phase shifter 10 of the above embodiment will be described. Note that the appropriate ferrite phase shifter 10 of the first to seventh embodiments can be used for the ferrite phase shifter 10 in the automatic matching device of this example.

  As shown in FIG. 15, the automatic matching device of this example is a waveguide (transmission line) composed of a rectangular waveguide 11 between a power source 21 and a load 22, a rectangular waveguide 32 described later, and the like. In addition, a traveling wave / reflected wave detector 23 and a matching unit 25 using the ferrite phase shifter 10 as a matching element are sequentially provided, and the detection result of the traveling wave / reflected wave detector 23 is taken into the control circuit 24, and the control circuit 24 changes the amount of the control current passed through the matching unit 25 according to the detection result, and changes the phase of the ferrite phase shifter 10 according to the changed control current, thereby automatically matching the power source 21 and the load 22. It is something to take. The traveling wave / reflected wave detector 23 is arranged on the power input side of the automatic matching device, calculates and obtains the absolute value | Γ | of the reflection coefficient and the signal of the phase angle θ from the signals of the traveling wave and the reflected wave, and the control circuit 24. The control circuit 24 changes the control current to a value corresponding to the input result by referring to a correspondence table such as a Smith chart table that is set and stored in accordance with the control program that is set and stored.

  Here, an example of the matching unit 25 using the ferrite phase shifter 10 as a matching element will be described.

  As shown in FIG. 16, the matching unit 25a of the first example forms a waveguide path by connecting rectangular waveguides 32, and a high-frequency signal HF is supplied to the waveguide path from the power source 21 toward the load 22. In addition, one end of each of the plurality of ferrite phase shifters 10 is connected to and connected to the side of the rectangular waveguide 32 constituting the waveguide, and is short-circuited to the other end of each ferrite phase shifter 10. Each plate 31 is provided. The matching unit 25a of the first example changes the phase at a point P corresponding to the other end of each ferrite phase shifter 10 to change the impedance matching state.

  As shown in FIG. 17, the matching device 25 b of the second example connects a rectangular waveguide 32 and the ferrite phase shifter 10 to form a waveguide path, and guides the waveguide from the power source 21 toward the load 22. A high-frequency signal HF is passed through the pipe, and one end of the ferrite phase shifter 10 is connected to the side of the rectangular waveguide 32 connected in front of the ferrite phase shifter 10 constituting the waveguide. The shorting plate 31 is provided at the other end of the ferrite phase shifter 10. The matching device 25b of the second example changes the phase between the point P corresponding to the other end of the ferrite phase shifter 10 connected to the side portion and the ferrite phase shifter 10 constituting the waveguide, The impedance matching state is changed.

  In the example of FIG. 17, the position of the ferrite phase shifter 10 connected to the side portion of the rectangular waveguide 32 constituting the waveguide path is set to the power supply side with respect to the ferrite phase shifter 10 constituting the waveguide path. However, the position may be on the load side with respect to the ferrite phase shifter 10 constituting the waveguide.

  The automatic alignment device can be electrically (electronic) driven while the conventional automatic alignment device is mechanically driven. Accordingly, the matching speed can be increased to shorten the matching time, and the matching time, which was conventionally 1 to 2 seconds, can be set to 10 to 20 msec. Furthermore, since it is very difficult to break down, it can be made maintenance-free.

  The ferrite phase shifter of the present invention, such as the ferrite phase shifter 10 of the first to seventh embodiments described above, is a matching element of a matching device in an appropriate automatic matching device other than the first and second examples. In addition to the matching device of the automatic matching device, it can be installed in various devices or circuits within the applicable range.

  The present invention can be used as, for example, a phase shifter that changes the phase of an electromagnetic wave propagating in a waveguide.

The top view which shows the ferrite phase shifter of 1st Embodiment. The side view which shows the ferrite phase shifter of 1st Embodiment. The top view which shows the modification of a substantially flat ferrite. A side view showing a ferrite phase shifter of a 2nd embodiment. The top view which shows the ferrite phase shifter of 3rd Embodiment. A side view showing a ferrite phase shifter of a 3rd embodiment. The top view which shows the ferrite phase shifter of 4th Embodiment. The partially vertical side view which shows the ferrite phase shifter of 4th Embodiment. The top view which shows the ferrite phase shifter of 5th Embodiment. The partial longitudinal section side view showing the ferrite phase shifter of a 5th embodiment. FIG. 10 is a cross-sectional view of the ferrite phase shifter of FIG. Sectional drawing which shows the ferrite phase shifter of 6th Embodiment. The top view which shows the ferrite phase shifter of 7th Embodiment. The partially vertical side view which shows the ferrite phase shifter of 7th Embodiment. The block diagram of the example of an automatic alignment apparatus. Explanatory drawing of the 1st example of an automatic matching apparatus provided with the matching device using a ferrite phase shifter. Explanatory drawing of the 2nd example of an automatic matching apparatus provided with the matching device using a ferrite phase shifter. The top view which shows the conventional ferrite phase shifter. The side view which shows the conventional ferrite phase shifter. FIG. 20 is a cross-sectional view of the ferrite phase shifter of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,100 ... Ferrite phase shifter 11, 101, 32 ... Rectangular waveguide 11a, 101a ... Upper surface 11b, 101b ... Lower surface 11c, 101c ... Side surface 11d, 101d ... Flange 11e ... Square cylinder part 11f ... Hole 11g ... Elongated angle 11h ... Slit 11i ... Inner wall 11j ... Outer wall 11k ... Gap 12, 102 ... Coil 13, 16, 104 ... Ferrite 14 ... Dielectric layer 15, 152 ... Yoke 151 ... Permanent magnet 17 ... Insulator 18 ... Dielectric 103 ... Spacer 21 ... Power source 22 ... Load 23 ... Traveling wave / reflected wave detector 24 ... Control circuit 25, 25a, 25b ... Matching device 31 ... Short-circuit plate

Claims (5)

A rectangular waveguide;
A substantially plate-like ferrite disposed in close contact with the inner surface of the opposing wide surface of the rectangular waveguide in close contact with each other;
A coil that is wound around the outer periphery of the rectangular waveguide at a position substantially corresponding to the ferrite and through which a current flows,
A ferrite phase shifter, wherein a dielectric layer is provided on each of opposing surfaces of the substantially flat ferrite, and the dielectric layers are provided to face each other.   2. The ferrite phase shifter according to claim 1, wherein the substantially flat ferrite is formed by arranging a plurality of ferrite pieces in parallel with a gap.   3. The ferrite phase shifter according to claim 1, wherein a yoke is provided at a position substantially corresponding to the substantially flat ferrite on the outer wall surface of the wide surface of the rectangular waveguide.   4. The ferrite phase shifter according to claim 3, wherein a permanent magnet is provided on a part of the yoke.   An automatic matching apparatus comprising a matching line using at least one ferrite phase shifter according to claim 1 as a matching element in a transmission line between a power source and a load.

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