JP2009069063A - Measurement method, shape measurement method, measuring device, and shape measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measurement method, a shape measurement method, a measuring device, and a shape measuring device, easily performing measurement and shortening the measurement period. <P>SOLUTION: This measurement method comprises processes of: irradiating an inspecting object with light at a first light quantity; acquiring a first image of a first scattered light scattered on the inspecting object with an image acquisition device; and detecting a first region where the light quantity of the first scattered light is smaller than in the other region of the inspecting object, based on the first image. The first light quantity means such light quantity that the light quantity of the first scattered light is larger than a detectable light quantity of the image acquisition device in the other region of the inspecting object. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a measurement method, a shape measurement method, a measurement device, and a shape measurement device.

It is important in the inspection of industrial products to detect the presence or absence of defects in the shape of industrial products and to measure whether or not the product has an accurate part shape (whether it is made according to design values). It has become. For example, measurement of a part shape is often performed by a three-dimensional measurement method using a light cutting method, a pattern projection method, a SFF (Shape From Focus) method, or a two-dimensional measurement method.
US Pat. No. 6,075,605

  However, if the industrial product is a metal part, it will adversely affect the shape defect detection results and shape measurement results due to the reflectivity of the metal material itself, unspecified patterns (various textures), reflection to surrounding light sources, etc. Sometimes.

  For example, when a metal part has a welded part, a blow hole or a flux formed at the welded part may be formed. Of these, the blowhole often does not reach the inside, making it difficult to measure the shape. Further, since the reflected light is not scattered with respect to the flux, there is a problem that it is difficult to obtain an image for three-dimensional measurement.

  Although it is conceivable to detect blowholes and flux parts only based on the results of the two-dimensional measurement method, if the test object is a metal, the reflected light of the ambient light source, the shape of the test object has an unspecified texture. The resulting reflected light or the like results in a very complicated image, which requires difficulty or a very long processing time.

  In view of such circumstances, an object of the present invention is to provide a measurement method, a shape measurement method, a measurement device, and a shape measurement device that can easily perform measurement and can reduce measurement time.

  In order to solve the above-mentioned problems, the following configurations corresponding to the respective drawings shown in the embodiments are adopted as each aspect illustrating the present invention. However, the reference numerals with parentheses attached to each element are merely examples of the element and do not limit each element.

  According to the first aspect illustrating the present invention, a step of irradiating the test object (M) with a first light amount and a first image of the first scattered light scattered on the test object ( P1) is acquired by the image acquisition device, and the first region (B1) in which the amount of the first scattered light is smaller than other regions in the test object is detected based on the first image. The first light amount is a light amount in which the light amount of the first scattered light is larger than the light amount detectable by the image acquisition device in the other region of the test object. Is provided.

  According to the first aspect exemplifying the present invention, the first image of the first scattered light when the test object is irradiated with light with the first light amount is acquired by the image acquisition device, and based on the first image The first region where the amount of the first scattered light is smaller than the other regions in the test object is detected. At this time, the first light quantity is set to such an amount that the light quantity of the first scattered light is larger than the light quantity that can be detected by the image acquisition device in other regions of the test object. The first region can be detected without considering elements that complicate the image such as reflected light of the peripheral light source and reflected light caused by the shape of the test object. Thereby, the said 1st area | region can be detected easily.

  According to the second aspect illustrating the present invention, a step of irradiating the test object (M) with a first light amount and a first image of the first scattered light scattered on the test object ( P1) is acquired by an image acquisition device, and the first region (B1) in which the amount of the first scattered light is larger than other regions in the test object is detected based on the first image. The first light quantity is a light quantity such that the first scattered light quantity is greater than the detectable light quantity of the image acquisition device in the first region. Is provided.

  According to the third aspect exemplifying the present invention, a shape measurement image for measuring the shape of the test object (M) is acquired, and the shape of the test object is measured based on the measurement image. In the shape measurement method, the step of irradiating the test object with a first light amount and the first image (P1) of the first scattered light scattered on the test object are acquired by an image acquisition device. Based on the step, the step of detecting the first region (B1) in which the amount of the first scattered light is smaller than the other region of the test object based on the first image, and the result of the detection And correcting the shape measurement image, wherein the first light amount is a light amount that can be detected by the image acquisition device in the other region of the test object. There is provided a shape measuring method characterized in that the amount of light is larger than the above.

  According to the third aspect exemplifying the present invention, the first image of the first scattered light when the test object is irradiated with light with the first light amount is acquired by the image acquisition device, and based on the first image A first area in which the amount of the first scattered light is smaller than the other areas is detected, and a shape measurement image for measuring the shape of the test object is corrected based on the detection result. At this time, since the first light quantity is set so that the light quantity of the first scattered light is larger than the light quantity detectable by the image acquisition device in the other region of the test object, the shape measurement image As a result, the shape of the test object can be measured appropriately and easily even when a difficult-to-acquire location is formed on the test object.

  According to the fourth aspect illustrating the present invention, a shape measurement image for measuring the shape of the test object (M) is acquired, and the shape of the test object is measured based on the measurement image. In the shape measurement method, the step of irradiating the test object with a first light amount and the first image (P1) of the first scattered light scattered on the test object are acquired by an image acquisition device. Based on the step, the step of detecting the first region (B1) in which the amount of the first scattered light is larger than the other regions of the test object based on the first image, and the result of the detection And correcting the shape measurement image, wherein the first light amount is such that the first scattered light amount is larger than the detectable light amount of the image acquisition device in the first region. A shape measuring method is provided which is characterized in that the amount of light.

  According to the fifth aspect illustrating the present invention, a light source (10) that emits light toward the test object (M) and an image (P1) of scattered light scattered on the test object are acquired. And a control device (12) for detecting a predetermined region of the test object in which the amount of scattered light is smaller than other regions based on the image of the scattered light. The measuring device (1) is characterized in that the light source is capable of emitting a first amount of light such that the amount of scattered light is greater than the amount of light detectable by the acquisition device.

  According to the fifth aspect exemplifying the present invention, the scattered light when the test object is irradiated with light having the first light quantity such that the light quantity of the scattered light is larger than the detectable light quantity of the acquisition device. In the image of the test object, it is possible to detect a predetermined area of the test object in which the amount of scattered light is small compared to other areas based on the image of the scattered light. The predetermined region can be detected without considering elements that have an unspecified texture, such as reflected light of a peripheral light source and reflected light caused by the shape of the test object, without complicating elements in the image. Thereby, a predetermined area | region can be detected easily.

  According to the sixth aspect exemplifying the present invention, a light source (10) that emits light toward the test object (M) and an image (P1) of scattered light scattered on the test object are acquired. And a control device (12) for detecting a predetermined region of the test object in which the amount of the scattered light is larger than other regions based on the image of the scattered light. The measuring device (1) is characterized in that the light source is capable of emitting a first amount of light such that the amount of scattered light is greater than the amount of light detectable by the acquisition device.

  According to the seventh aspect of the present invention, a shape measurement image for measuring the shape of the test object (M) is acquired, and the shape of the test object is measured based on the shape measurement image. A light source (130) that emits light toward a test object, an acquisition device (131) that acquires an image of scattered light scattered on the test object, and the scattered light And a control device that detects a predetermined region of the test object in which the amount of scattered light is smaller than other regions based on the image of the test object, and corrects the shape measurement image based on the detection result ( 132), and the light source is capable of emitting a first amount of light such that the amount of the scattered light is greater than the amount of light that can be detected by the acquisition device. ) Is provided.

  According to the seventh aspect exemplifying the present invention, the scattered light when the test object is irradiated with light having the first light quantity such that the light quantity of the scattered light is larger than the detectable light quantity of the acquisition device. And detecting a predetermined region of the test object in which the amount of scattered light is smaller than other regions based on the image of the scattered light, and based on the result of this detection, Since the shape measurement image for measuring the shape is corrected, the shape of the test object can be appropriately and easily measured even when the test object has a portion that is difficult to obtain as the shape measurement image.

  According to the eighth aspect of the present invention, a shape measurement image for measuring the shape of the test object (M) is acquired, and the shape of the test object is measured based on the shape measurement image. A light source (130) that emits light toward a test object, an acquisition device (131) that acquires an image of scattered light scattered on the test object, and the scattered light A control device that detects a predetermined region of the test object that has a larger amount of scattered light than the other regions based on the image of the test object, and corrects the shape measurement image based on the detection result ( 132), and the light source is capable of emitting a first amount of light such that the amount of the scattered light is greater than the amount of light that can be detected by the acquisition device. ) Is provided.

  According to the present invention, it is possible to obtain a measurement method, a shape measurement method, a measurement device, and a shape measurement device that can easily perform measurement and can reduce measurement time.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is a front view schematically showing the configuration of the measuring apparatus 1 according to the present embodiment. FIG. 2 is a plan view schematically showing the configuration of the measuring device 1. FIG. 3 is a plan view showing the configuration of the test object M measured by the measuring device 1.

  As shown in FIG. 1, the measurement device 1 is a device that measures the surface of the test object M on the stage S1 in a non-contact manner, and includes a light source 10, an image acquisition device 11, and a control device 12. . The test object M is a metal part in which, for example, a metal member M1 and a metal member M2 are welded. A weld M3 is formed on the upper side of the test object M in the drawing. As shown in FIG. 3, an unspecified pattern 20 is formed on the surfaces of the metal member M1 and the metal member M2. In the welded part M3, a blow hole 21 and a flux 22 generated during welding are formed.

  The light sources 10 emit light toward the object M, and a plurality of, for example, four light sources 10 are arranged around the image acquisition device 11 as shown in FIG. In FIG. 1, only the light source 10 arranged in the left-right direction in the drawing is shown, and the remaining two are not shown. Moreover, it is preferable that the light source 10 emits uniform light from directly above the object M.

  Returning to FIG. 1, the image acquisition device 11 is a device that captures an image of scattered light scattered by the test object M, and includes, for example, a CCD camera or a CMOS sensor. The image acquisition device 11 can capture an image in units of pixels, and an image sensor is provided for each pixel. Each image sensor has a detectable light amount set in 256 steps, for example, 0 to 255. The image acquisition device 11 is provided with a diaphragm (not shown) that adjusts the intensity of the detection light.

  The control device 12 controls the measurement device 1 in an integrated manner. For example, adjustment of the light amount and light emission time of the light source 10, the state of a diaphragm unit (not shown) provided in the image acquisition device 11, imaging time, and the like. Control. The control device 12 includes an image processing circuit (not shown) that performs processing such as binarization processing on the image acquired by the image acquisition device 11.

Next, the operation of the measuring apparatus 1 configured as described above will be described. In the present embodiment, a case where the surface of the test object M shown in FIG. 3 is measured will be described as an example.
When the test object M is irradiated, scattered light is generated on the test object M. In the present embodiment, the light source 10 emits a first light amount L1 such that the amount of scattered light is larger than the amount of light that can be detected by the image acquisition device 11. For example, the metal member M1, the metal member M2, and the welded part M3 on the surface of the metal member M1, the metal member M2, and the welded part M3 shown in FIG. 3 or on the pattern 20 formed on the surface of the metal member M1 and the metal member M2. The light L1 is irradiated on the boundary with the flux 22 and the like. On the other hand, the light L1 is hardly irradiated inside the blow hole 21.

  In an area of the test object M irradiated with the light L1, scattered light D1 is generated on the surface of the test object M. In the blow hole 21 where the light L1 is hardly irradiated, almost no scattered light D1 is generated. Moreover, since the light L1 is reflected by the flux 22, almost no scattered light D1 is generated. In the image acquisition device 11, an image (first image) P1 of the scattered light D1 generated on the test object M is acquired.

FIG. 4 is a diagram schematically showing the image P1 acquired at this time.
Since the light quantity of the light L emitted from the light source 10 is the first light quantity that makes the light quantity of the scattered light D1 larger than the light quantity that can be detected by the image acquisition device 11, the surfaces of the metal member M1 and the metal member M2 Or the pattern 20 on the surface, the metal member M1, the boundary between the metal member M2 and the welded portion M3, and the like in the region where the amount of scattered light D1 is large is the maximum light amount value that can be detected by each image sensor. (For example, 255). Therefore, as shown in FIG. 4, in the image P1, the entire area is displayed uniformly white (W1).

  On the other hand, in the blowhole 21 formed in the test object M, the light L is hardly irradiated and the scattered light D1 is hardly generated, so the light amount value detected by the image acquisition device 11 is a small value (for example, about 40). . In the flux 22, although the light L is irradiated, the scattered light D1 is hardly generated, so the light amount value detected by the image acquisition device 11 is a small value (for example, about 40). This light quantity value varies depending on the size and shape of the blow hole 21 and the flux 22, but is extremely small compared to the maximum detectable light quantity value of each image sensor. Therefore, as shown in FIG. 4, in the image P1, the area where the blow hole 21 and the flux 22 are formed is displayed black (B1).

  Furthermore, the scattered light is generated also in the flux 22 by increasing the amount of light irradiated to the object M. Therefore, next, the light M2 having a second light amount that is larger than the first light amount of the light L1 and sufficiently generates the scattered light D2 in the flux 22 is emitted from the light source 10 to irradiate the object M, An image of scattered light D2 generated on the specimen M is acquired.

FIG. 5 is a diagram schematically showing the image P2 acquired at this time.
As shown in the figure, for example, for the areas where the amount of scattered light D2 is large, such as the surface of the metal member M1 and the metal member M2, the pattern 20 on the surface, the boundary between the metal member M1 and the metal member M2 and the welded part M3, The light quantity value is detected as the maximum light quantity value (for example, 255) that can be detected by each image sensor, and as shown in FIG. 5, the entire area is uniformly displayed in white (W2). Moreover, since the light quantity of the scattered light D2 is sufficiently large also in the flux 22, the light quantity value is detected as the maximum light quantity value (for example, 255) that can be detected by each image sensor. Therefore, as shown in FIG. 5, the entire area is displayed uniformly white (W2).

  On the other hand, even when the light L2 having a large amount of light from the light source 10 is emitted, the light irradiated into the blowhole 21 is only slightly increased, and the scattered light D2 is hardly generated. That is, in the blow hole 21, the degree of change in the amount of scattered light is less than the degree in which the amount of light applied to the object M changes. Therefore, in the blowhole 21, the light quantity value detected by the image acquisition device 11 is a slightly increased value (for example, about 60). This light quantity value is extremely small compared to the maximum detectable light quantity value of each image sensor. Therefore, as shown in FIG. 5, the area where the blow hole 21 is formed is still displayed black (B1).

  When comparing the image P1 and the image P2, the area where the blowhole 21 is formed and the area where the flux 22 is formed are displayed in black in the image P1, but the blowhole 21 is formed in the image P2. It can be seen that only the region is displayed in black, and the region where the flux 22 is formed is displayed in white. Therefore, by comparing these two images, the formation region of the blow hole 21 and the formation region of the flux 22 are identified.

  The first light amount and the second light amount may be obtained in advance when performing the measurement, and the images P1 and P2 may be obtained based on the optimum values. Further, for example, the first light amount and the second light amount may be changed by changing the irradiation time of the light L1 or the light L2 from the diaphragm (not shown) of the image acquisition device 11 or the light source 10.

  As described above, according to the present embodiment, the image P1 of the scattered light D1 when the object M is irradiated with light with the first light amount is acquired, and the other of the objects M is detected based on the image P1. Since the region B1 in which the amount of scattered light is smaller than the region (region displayed in black) B1 is detected, the reflected light of the peripheral light source, the reflected light caused by the shape of the test object, etc. The region B1 can be detected without considering elements that complicate the image P1. Thereby, the region B1 can be easily detected.

  Further, according to the present embodiment, the light M2 is emitted from the light source 10 so that the scattered light D2 is sufficiently generated in the flux 22 larger than the first light quantity of the light L1, and the object M is irradiated. Then, since the image P2 of the scattered light D2 generated on the test object M is acquired and, for example, the blow hole 21 and the flux 22 are identified based on the image P2, more accurate measurement can be performed. Measurement reliability can be improved.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 6 is a diagram schematically illustrating the configuration of the shape measuring apparatus 101 according to the present embodiment.
As shown in the figure, the shape measuring apparatus 101 measures the three-dimensional shape of the test object N on the stage S2 in a non-contact manner by a method called a phase shift method (a kind of pattern projection method) and performs the test. This is a device that measures the surface of the object N in a non-contact manner, and includes a pattern projection device 102, a measurement device 103, and a control device 104. Further, the test object N is a metal part having the same configuration as that of the test object M of the first embodiment, and has the same pattern, blow hole, and flux as those of the first embodiment.

  The pattern projection device 102 includes a light emitting unit 120 and a projection unit 121, and the projection unit 121 is provided with a collimator lens 122, a pattern generation element 123, and a projection lens 124.

  The light emitting unit 120 includes a light emitting element such as a light emitting diode that emits light of a predetermined wavelength. The collimator lens 122 is an optical element that converts the diffused light emitted from the light emitting unit 120 into parallel light. The pattern generation element 123 is a light modulation element having, for example, a liquid crystal device and a transmissive diffusion plate, and converts incident light into light and dark parallel striped pattern light generated by a sine wave. The projection lens 124 is an optical element that projects pattern light onto the test object M.

The measurement device 103 includes a light source 130 and an image acquisition device 131.
The configurations of the light source 130 and the image acquisition device 131 are the same as those of the light source 10 and the image acquisition device 11 (see FIG. 1) in the first embodiment.

  The control device 104 comprehensively controls the pattern projection device 102 and the measurement device 103. For example, the control device 104 controls a light source adjustment circuit that adjusts the light amount and light emission time of the light emitting unit 120 and the light source 130, and the pattern generation element 123. A pattern control circuit, a three-dimensional shape measurement circuit for measuring the three-dimensional shape of the test object based on the image acquired by the image acquisition device 131, and a surface shape measurement circuit for measuring the surface shape of the test object based on the image The image acquisition device 131 includes an image acquisition control circuit that controls a state of an aperture (not shown), an imaging time, and the like.

Next, an operation for measuring the three-dimensional shape of the test object M using the shape measuring apparatus 101 configured as described above will be described.
First, an image of scattered light that is scattered on the specimen N by irradiating the specimen N with the first amount of light and the second quantity of light by the same technique as in the first embodiment (in the first embodiment) Image corresponding to the image P1 and the image P2). Based on the acquired image, the position and shape of the blowhole and flux are detected.

  Next, the test object N is irradiated with pattern light, and an image for shape measurement is acquired. First, the light emitting unit 120 emits light. This light becomes parallel light in the collimator lens 122 and enters the pattern generating element 123. In the pattern generating element 123, the light is converted into light and dark parallel striped pattern light generated by a sine wave by the liquid crystal element and scattered by the transmission diffusion plate. The pattern light is projected onto the object N by the projection lens 124. When the pattern light image is projected onto the test object N, the image acquisition device 131 captures the image and acquires the pattern light image. This pattern light image corresponds to a shape measurement image.

  On the other hand, since the pattern light is not irradiated into the blow hole formed in the test object N, it is difficult to obtain an image of the region where the blow hole is formed. Further, since the pattern light is reflected on the flux formed on the test object N, it is difficult to obtain an image of a region where the flux is formed.

  Therefore, next, the shape measurement image is interpolated based on the position and shape of the blowhole and flux detected from the image of the scattered light on the test object N. Specifically, based on the positions and shapes of the blowholes and the flux, the shapes of the blowholes and the flux are written in the shape measurement image by a method called linear interpolation or a method called nearest neighbor interpolation.

  Further, for example, after a shape measurement image is displayed on a display device (not shown), a region in which blow holes and flux are formed in the shape measurement image displayed on the display device is displayed ( Add certain information). Moreover, you may display that this area | region is an area | region where the reliability of a measurement result is low (addition of predetermined information). Furthermore, for the region where the blowhole and the flux are formed, the light amount of the light emitting unit 120 may be increased to acquire the shape measurement image again (update of the shape measurement image).

  As described above, according to the present embodiment, an image of scattered light when the object N is irradiated with light is obtained, and compared with other regions of the object N based on the image of the scattered light. Since the region for detecting the amount of scattered light is detected and the shape measurement image for measuring the shape of the test object N is interpolated based on the result of this detection, it is acquired as the shape measurement image on the test object N. Even when there is a portion that is difficult to perform, the shape of the test object N can be measured appropriately and easily.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. FIG. 7 is a diagram schematically showing the configuration of the shape measuring apparatus 201 according to this embodiment.
As shown in the figure, the shape measuring apparatus 201 measures the three-dimensional shape of the test object Q on the moving stage S3 in a non-contact manner by a technique called a light cutting method, and also measures the surface of the test object Q. This is a non-contact measuring device, and includes a laser light projection device 202, a measuring device 203, and a control device not shown. Since the configuration of the measurement device 203 is the same as the configuration of the measurement device 103 in the second embodiment, a description thereof will be omitted.

  The laser light projector 202 has a laser light source 220 and a cylindrical lens 221. The light emitted from the laser light source 220 is lined by the cylindrical lens 221, and the line-shaped light is projected onto the test object Q. The shape measurement of the test object Q is performed by imaging the light on the line projected on the test object Q from another angle while moving the stage S3 in a predetermined direction (the lower right direction in FIG. 7). Images can be acquired.

  Also in the present embodiment, an image of scattered light when the measurement object 203 is irradiated with light on the test object Q is obtained, and compared to other regions of the test object Q based on the image of the scattered light. It is possible to detect an area where the amount of scattered light is small and to interpolate a shape measurement image for measuring the shape of the test object Q based on the detection result. For this reason, the shape of the test object Q can be measured appropriately and easily even when the test object Q has a portion that is difficult to obtain as a shape measurement image.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. FIG. 8 is a diagram schematically illustrating the configuration of the shape measuring apparatus 301 according to the present embodiment. In the present embodiment, directions in the figure will be described using an XYZ coordinate system. It is assumed that the X axis and the Y axis perpendicular to each other are set in a direction parallel to the surface of the stage S4, and the Z axis is set in a direction perpendicular to the surface of the stage S4.

  As shown in the figure, the shape measuring device 301 measures the three-dimensional shape of the test object R on the moving stage S4 in a non-contact manner by a technique called SFF (Shape From Focus) method, and the test object. This is a device that measures the surface of R in a non-contact manner, and includes a focus measure detection device 302, a measurement device 303, and a control device (not shown).

  The focus measure detection device 302 calculates a focus measure for each pixel obtained by dividing the region on the stage S4 in a matrix, and detects the focal position where the focus measure is maximized for each pixel, thereby detecting the surface position of the object. It is a device for identifying. Note that the configuration of the measurement device 303 is the same as the configuration of the measurement device 103 in the second embodiment, and thus the description thereof is omitted.

  When performing measurement by the shape measuring apparatus 301, for example, an image sequence in which the focus position of the test object R is slightly different is acquired while moving the stage S4 on which the test object R is placed in the + Z direction. Each of the image sequences is a shape measurement image for measuring the shape of the test object R. Next, with respect to all acquired image sequences, a focus measure is calculated for each pixel in the image, and a change in the focus measure at the same coordinate (XY coordinate) of each image in the image sequence is detected. The Z distance of the image including the maximum value among the focus measures at the same coordinates becomes the focus position, and the focus position is measured as the surface position of the test object R.

  Also in the present embodiment, an image of scattered light when the measuring object 303 is irradiated with light on the test object R is acquired, and compared to other regions of the test object R based on the image of the scattered light. It is possible to detect an area where the amount of scattered light is small and to interpolate a shape measurement image for measuring the shape of the object R based on the detection result.

The technical scope of the present invention is not limited to the above-described embodiment, and appropriate modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the case where the first light amount and the second light amount are emitted from the light source when the image of the scattered light is acquired by the measurement device has been described as an example. However, the present invention is not limited to this. For example, the scattered light image may be acquired by the third light amount light having a light amount larger than the second light amount, or the scattered light image may be acquired in a plurality of stages by the larger light amount light. I do not care.

  In the above embodiment, the case where the maximum light amount value that can be detected by the image sensor is 255 out of 256 steps has been described as an example. However, the present invention is not limited to this. For example, a predetermined threshold value is set. The threshold value may be the maximum light quantity value that can be detected.

  Further, in the above-described embodiment, the case where a predetermined area where the amount of scattered light is small compared to other areas is detected as an example is described, but the present invention is not limited to this. You may detect the predetermined area | region where the light quantity of scattered light is large compared with another area | region among test objects.

It is a front view showing a schematic structure of a measuring device concerning a 1st embodiment of the present invention. It is a top view which shows schematic structure of the measuring device which concerns on this embodiment. It is a top view which shows the structure of the test object which is the object of the measuring device which concerns on this embodiment. It is a figure which shows the image acquired by the measuring device which concerns on this embodiment. It is a figure which shows an image similarly. It is a front view which shows schematic structure of the measuring device which concerns on 2nd Embodiment of this invention. It is a figure which shows schematic structure of the measuring device which concerns on 3rd Embodiment of this invention. It is a figure which shows schematic structure of the measuring device which concerns on 4th Embodiment of this invention.

Explanation of symbols

  M, N, Q, R ... Test object 1 ... Measuring device 10 ... Light source 11 ... Image acquisition device 12 ... Control device 20 ... Pattern 21 ... Blow hole 22 ... Flux 101, 201, 301 ... Shape measuring device 102 ... Pattern projection Apparatus 103, 203, 303 ... Measuring apparatus

Claims (32)

Irradiating the object with light with the first light quantity;
Acquiring a first image of the first scattered light scattered on the specimen by an image acquisition device;
Detecting a first region in which the amount of the first scattered light is small compared to other regions of the test object based on the first image,
The first light amount is a light amount in which the light amount of the first scattered light is larger than the light amount detectable by the image acquisition device in the other region of the test object. Method. The measurement method according to claim 1, wherein the first light amount is set in advance based on the light amount of the first scattered light in the other region of the test object. The measurement method according to claim 1 or 2, wherein the detection result of the first region is displayed. Irradiating the object with light with a second light quantity larger than the first light quantity;
Obtaining a second image of the second scattered light scattered on the specimen;
The method includes: detecting a second region in which the amount of the second scattered light is smaller than other regions of the test object based on the second image. 4. The measurement method according to any one of 3. The measurement method according to claim 4, wherein the second light amount is set in advance based on the light amount of the second scattered light in the other region of the test object. The measurement method according to claim 4, wherein a detection result of the second region is displayed. The measurement method according to claim 4, wherein a region in which the first region and the second region are common is extracted. The measurement method according to claim 7, wherein the extraction result of the common area is displayed. The test object is made of metal,
The first region includes a flux and a blow hole,
The measurement method according to any one of claims 4 to 8, wherein the second region includes a blow hole. The test object is made of metal,
The measurement method according to claim 7 or 8, wherein the common region includes a blow hole. Irradiating the object with light with the first light quantity;
Acquiring a first image of the first scattered light scattered on the specimen by an image acquisition device;
Detecting a first area where the amount of the first scattered light is larger than other areas of the test object based on the first image,
The measurement method, wherein the first light amount is a light amount in the first region such that the light amount of the first scattered light is larger than a light amount that can be detected by the image acquisition device. A shape measurement method for acquiring a shape measurement image for measuring the shape of a test object, and measuring the shape of the test object based on the shape measurement image,
Irradiating the object with light with a first light quantity;
Acquiring a first image of the first scattered light scattered on the specimen by an image acquisition device;
Detecting a first region in which the amount of the first scattered light is smaller than other regions of the test object based on the first image;
Correcting the shape measurement image based on the detection result, and
The shape is characterized in that the first light amount is a light amount such that the light amount of the first scattered light is larger than the light amount detectable by the image acquisition device in the other region of the test object. Measurement method. Irradiating the object with light with a second light quantity larger than the first light quantity;
Obtaining a second image of the second scattered light scattered on the specimen;
Based on the second image, detecting a second region of the test object in which the amount of the second scattered light is small compared to other regions;
The shape measurement method according to claim 12, further comprising: correcting the shape measurement image based on the detection result. Irradiating the object with light with a second light quantity larger than the first light quantity;
Obtaining a second image of the second scattered light scattered on the specimen;
Based on the second image, detecting a second region of the test object in which the amount of the second scattered light is small compared to other regions;
Extracting a region common to the first region and the second region;
The shape measurement method according to claim 12, further comprising: correcting the shape measurement image based on the extraction result. The shape measurement method according to claim 12, wherein the correction is interpolation of the shape measurement image. The shape measurement method according to any one of claims 12 to 14, wherein the correction is addition of predetermined information to the shape measurement image. The shape measurement method according to claim 12, wherein the correction is an update of the shape measurement image. The shape measurement method according to any one of claims 12 to 17, wherein the shape measurement image is acquired by any one of a light cutting method, a pattern projection method, and an SFF method. A shape measurement method for acquiring a shape measurement image for measuring the shape of a test object, and measuring the shape of the test object based on the shape measurement image,
Irradiating the object with light with a first light quantity;
Acquiring a first image of the first scattered light scattered on the specimen by an image acquisition device;
Detecting a first area where the amount of the first scattered light is larger than other areas of the test object based on the first image;
Correcting the shape measurement image based on the detection result, and
The shape measurement method, wherein the first light amount is a light amount in the first region such that the light amount of the first scattered light is larger than a light amount that can be detected by the image acquisition device. A light source that emits light toward the object;
An acquisition device for acquiring an image of scattered light scattered on the specimen;
A control device that detects a predetermined region in which the amount of the scattered light is small compared to other regions of the test object based on the image of the scattered light; and
The measuring device, wherein the light source is capable of emitting a first light amount such that a light amount of the scattered light is larger than a detectable light amount of the acquisition device. The measuring device according to claim 20, wherein the light source is capable of emitting light having a second light amount that is greater than the first light amount. A region where the first region detected by the control device by emitting the first light amount and the second region detected by the control device by emitting the second light amount are extracted. The measuring device according to claim 21, further comprising an extraction unit. A light source that emits light toward the object;
An acquisition device for acquiring an image of scattered light scattered on the specimen;
A control device that detects a predetermined region in which the amount of the scattered light is larger than other regions of the test object based on the image of the scattered light;
The measuring device, wherein the light source is capable of emitting a first light amount such that a light amount of the scattered light is larger than a detectable light amount of the acquisition device. A shape measuring device for acquiring a shape measurement image for measuring the shape of the test object, and measuring the shape of the test object based on the shape measurement image,
A light source that emits light toward the object;
An acquisition device for acquiring an image of scattered light scattered on the specimen;
Based on the image of the scattered light, a predetermined area in which the amount of the scattered light is smaller than other areas of the test object is detected, and the shape measurement image is corrected based on the detection result. A control device, and
The shape measuring device, wherein the light source is capable of emitting a first light amount such that a light amount of the scattered light is larger than a detectable light amount of the acquisition device. The shape measuring device according to claim 24, wherein the light source is capable of emitting light having a second light amount that is greater than the first light amount. A region where the first region detected by the control device by emitting the first light amount and the second region detected by the control device by emitting the second light amount are extracted. The shape measuring device according to claim 25, further comprising an extraction unit. The shape measurement device according to claim 26, wherein the control device corrects the shape measurement image based on the extraction result. The shape measurement apparatus according to any one of claims 24 to 27, wherein the correction is an interpolation of the shape measurement image. The shape measurement apparatus according to any one of claims 24 to 27, wherein the correction is addition of predetermined information to the shape measurement image. The shape measurement apparatus according to any one of claims 24 to 27, wherein the correction is an update of the shape measurement image. The shape measurement apparatus according to any one of claims 24 to 30, wherein the shape measurement image is acquired by any one of a light cutting method, a pattern projection method, and an SFF method. A shape measuring device for acquiring a shape measurement image for measuring the shape of the test object, and measuring the shape of the test object based on the shape measurement image,
A light source that emits light toward the object;
An acquisition device for acquiring an image of scattered light scattered on the specimen;
Based on the image of the scattered light, a predetermined region having a larger amount of the scattered light than the other regions of the test object is detected, and the shape measurement image is corrected based on the detection result. A control device, and
The shape measuring device, wherein the light source is capable of emitting a first light amount such that a light amount of the scattered light is larger than a detectable light amount of the acquisition device.

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