JP2009002828A - Device for detecting position of actuator - Google Patents

Device for detecting position of actuator Download PDF

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Publication number
JP2009002828A
JP2009002828A JP2007164847A JP2007164847A JP2009002828A JP 2009002828 A JP2009002828 A JP 2009002828A JP 2007164847 A JP2007164847 A JP 2007164847A JP 2007164847 A JP2007164847 A JP 2007164847A JP 2009002828 A JP2009002828 A JP 2009002828A
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Prior art keywords
scale
actuator
optical path
actuator position
magnet
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JP2007164847A
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Japanese (ja)
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Hiroyuki Ono
裕幸 小野
Kei Ono
慶 大野
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International Manufacturing and Engineering Services Co Ltd IMES
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International Manufacturing and Engineering Services Co Ltd IMES
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Priority to JP2007164847A priority Critical patent/JP2009002828A/en
Priority to PCT/JP2008/061219 priority patent/WO2009001746A1/en
Publication of JP2009002828A publication Critical patent/JP2009002828A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55—Track change, selection or acquisition by displacement of the head
    • G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5569—Track change, selection or acquisition by displacement of the head across disk tracks details of specially adapted mobile parts, e.g. electromechanical control devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/596—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks
    • G11B5/59677—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for track following on disks with optical servo tracking
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0358—Lorentz force motors, e.g. voice coil motors moving along a curvilinear path

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for detecting position of an actuator, capable of heightening a servo frequency band by increasing the resonance frequency by minimizing the distance between a scale and a driving part, and improving the disturbance suppression performance. <P>SOLUTION: This actuator has an arm and a voice coil motor across a pivot, a coil of the voice coil motor is provided with a scale facing to a magnet close to the coil, and an optical path hole which communicates, from the yoke outward to the scale, is made in the magnet facing to the scale and a yoke, on which the magnet is mounted, and sensor light is irradiated from the yoke outward toward the scale through the optical path hole, and a photodetector for receiving the sensor light reflected by the scale or transmitted through the scale and reading the scale is provided. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、アクチュエータの位置検出装置、より具体的には、ハードディスク装置等に使用されるヘッドスタックアッセンブリのロータリー型ボイスコイルモータ（以下「ＶＣＭ」という）の可動部の位置検出に適した位置検出装置に関する。   The present invention relates to a position detection device suitable for detecting the position of a movable part of a rotary voice coil motor (hereinafter referred to as “VCM”) of a head stack assembly used in an actuator position detection device, more specifically, a hard disk device or the like. Relates to the device.

従来、ハードディスク装置において、ヘッドスタックアッセンブリを駆動するＶＣＭの可動部の機械的な位置を検出する装置として、位置検出用のスケールをアクチュエータの上部に置き、スケールに光を照射してその反射光を受光してアクチュエータの位置、ロータリーアクチュエータでは回転角を検出するものが提案されている（特許文献１、特許文献２）。このような従来装置の場合、位置検出器とアクチュエータとは独立しているので、アクチュエータの位置を目標値と一致させるためには、閉ループによるサーボ制御が必須である。アクチュエータとしては、通常、ＶＣＭが使用されている。
特開平３-２１１４１８号公報 特開２００５-１９６８２９号公報 Conventionally, as a device for detecting the mechanical position of a movable part of a VCM that drives a head stack assembly in a hard disk device, a scale for position detection is placed on the top of the actuator, and the reflected light is irradiated by irradiating the scale with light. There has been proposed one that detects the position of the actuator by receiving light and the rotation angle of the rotary actuator (Patent Documents 1 and 2). In such a conventional apparatus, since the position detector and the actuator are independent, in order to make the position of the actuator coincide with the target value, servo control by a closed loop is essential. As the actuator, a VCM is usually used.
JP-A-3-21418 JP 2005-196829 A

しかし、従来の方法では、スケールを置く位置は、駆動源であるＶＣＭとはピボットを介して反対側にあり、ＶＣＭから距離がある。この距離がもたらす機械共振の影響によって上記サーボ制御のゲインが制限され、よって外乱抑制性能を一体以上に上げることが困難であった。特に特許文献１に記載された発明の場合は、スケールを置くためにのみＶＣＭに枝が設けられており、これによるＶＣＭ重量の増加と剛性の低下による測定精度の低下は避けられない。   However, in the conventional method, the position where the scale is placed is opposite to the drive source VCM via the pivot, and is at a distance from the VCM. The servo control gain is limited by the influence of mechanical resonance caused by this distance, and therefore it is difficult to increase the disturbance suppression performance beyond that. In particular, in the case of the invention described in Patent Document 1, a branch is provided in the VCM only for placing a scale, and an increase in the VCM weight and a decrease in measurement accuracy due to a decrease in rigidity are inevitable.

このようなスケールは、ハードディスク装置の試験装置として使用されることが多いが、その場合にはヘッドジンバルアッセンブリやメディアを容易に交換可能なことが必要になる。このとき、特にセンサ光としてレーザ光を用いる場合は、通常安全上の特別な措置が必要となる。特許文献１に開示された記載された方法では、運用時においてもセンサ光が一次光、二次光として作業者の目に入る可能性があり、作業者にゴーグルの着用を義務づけるなどの特別な措置が必要になる。   Such a scale is often used as a test device for a hard disk device. In that case, it is necessary that the head gimbal assembly and the medium can be easily replaced. At this time, in particular, when laser light is used as the sensor light, special measures for safety are usually required. In the method disclosed in Patent Document 1, the sensor light may enter the eyes of the worker as primary light and secondary light even during operation, and the operator is required to wear special goggles. Measures are needed.

かかる課題に鑑みてなされた本発明は、スケールと駆動部の距離を最小化して共振周波数を上げることにより、サーボ周波数帯域を上げ、外乱抑制性能を向上させることができるアクチュエータの位置検出装置を得ることを目的とする。   The present invention has been made in view of such problems, and obtains an actuator position detection device that can increase the servo frequency band and improve the disturbance suppression performance by minimizing the distance between the scale and the drive unit and increasing the resonance frequency. For the purpose.

かかる課題を解決する本発明は、ピボットを挟んでアームとボイスコイルモータを備えたアクチュエータであって、前記ボイスコイルモータのコイルに、該コイルに近接したマグネットと対向するスケールを設け、前記スケールに対向するマグネット及び該マグネットが装着されたヨークに、このヨーク外方からスケールまで連通する光路穴を開け、前記ヨークの外方から前記光路穴を通して前記スケールに向けてセンサ光を照射し、スケールで反射またはスケールを透過したセンサ光を受光してスケールを読み取る光検出器を設けたことに特徴を有する。   The present invention for solving such a problem is an actuator including an arm and a voice coil motor with a pivot interposed therebetween, and a scale facing the magnet close to the coil is provided on the coil of the voice coil motor. An optical path hole communicating from the outside of the yoke to the scale is formed in the opposing magnet and the yoke on which the magnet is mounted, and sensor light is irradiated from the outside of the yoke through the optical path hole toward the scale. It is characterized in that a photodetector for reading the scale by receiving sensor light reflected or transmitted through the scale is provided.

前記光検出器は、前記スケールで反射し、前記光路穴を通って戻った反射センサ光を受光する構成が好ましい。   The photodetector is preferably configured to receive reflected sensor light reflected by the scale and returned through the optical path hole.

前記スケールは、非磁性材で形成することが好ましいが、弱透磁性材で形成することもできる。弱透磁性材で形成した場合は、前記コイルを挟んで配置されたマグネットから略等距離に配置する。   The scale is preferably formed of a non-magnetic material, but can also be formed of a weak magnetic permeability material. When formed with a weakly magnetically permeable material, it is disposed at approximately the same distance from the magnet disposed with the coil interposed therebetween.

前記スケールは、前記センサ光が入射する面に、前記ピボットを中心とした放射状に延びる明暗部が円周方向に所定ピッチで設けられるのが実際的である。   The scale is practically provided with light and dark portions extending radially about the pivot at a predetermined pitch in the circumferential direction on the surface on which the sensor light is incident.

前記光路穴は、前記マグネットの円周方向略中央位置に開けるのが好ましい。さらに前記光路穴の内周面には、反射防止加工を施すことが好ましい。   The optical path hole is preferably opened at a substantially central position in the circumferential direction of the magnet. Furthermore, it is preferable to apply antireflection processing to the inner peripheral surface of the optical path hole.

前記光検出器は、センサ光としてレーザ光を射出することができる。   The photodetector can emit laser light as sensor light.

本発明にかかるアクチュエータの位置検出装置は、前記アームの先端部にはヘッドジンバルアセンブリが着脱自在に装着され、前記ボイスコイルモータが前記アームを前記ピボットを軸心として回動させる、ヘッドスタックアッセンブリに適用することができる。   The actuator position detection device according to the present invention is a head stack assembly in which a head gimbal assembly is detachably attached to a tip portion of the arm, and the voice coil motor rotates the arm around the pivot. Can be applied.

本発明によれば、アクチュエータの位置を示すスケールから駆動力を発生するＶＣＭまでの距離を最小化し、機械共振周波数をほぼ無視できる程度にまで上げることができる。
このスケールは非磁性材であることが好ましいが、若干の透磁性がある材料を用いる場合でも、ＶＣＭの両極磁石から等距離位置に置くことにより、磁界分布、ひいてはアクチュエータ位置によるトルク変動に対する影響を最小化できる。
使用する光センサが強いレーザ光であっても、レーザ光がＶＣＭから殆ど漏れないので、安全ゴーグルを使用するなどの特別な措置が不要になる。 According to the present invention, the distance from the scale indicating the position of the actuator to the VCM that generates the driving force can be minimized, and the mechanical resonance frequency can be increased to an almost negligible level.
This scale is preferably a non-magnetic material, but even when a material with a slight permeability is used, placing it at an equidistant position from the bipolar magnet of the VCM has an effect on the torque fluctuation due to the magnetic field distribution and consequently the actuator position. Can be minimized.
Even if the optical sensor to be used is a strong laser beam, since the laser beam hardly leaks from the VCM, special measures such as using safety goggles are not necessary.

以下添付の図面を参照して、本発明を説明する。図１は、本発明を適用したハードディスクドライブ（以下「ＨＤＤ」という）用のアクチュエータの実施形態を上方から見た斜視図、図２は同実施形態を下方から見た斜視図である。なおこのアクチュエータは、ハードディスクドライブの試験装置に適用される。   The present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view of an embodiment of an actuator for a hard disk drive (hereinafter referred to as “HDD”) to which the present invention is applied, and FIG. 2 is a perspective view of the embodiment viewed from below. This actuator is applied to a hard disk drive testing apparatus.

このアクチュエータは、ピボット１１を軸心として揺動自在に形成されていて、ピボット１１から延びるアーム１３の先端部には、サスペンション１５を介して磁気ヘッド１７が装着されている。一方、ピボット１１には、アーム１３とは反対側に、ＶＣＭを構成するコイル２１が装着されている。このコイル２１は、ピボット１１を介してアーム１３と一体に回動するように固定された、ピボット１１から放射方向に延びる一対のコイルアーム部１９の間に装着されている。   This actuator is swingably formed with the pivot 11 as an axis, and a magnetic head 17 is attached to the tip of an arm 13 extending from the pivot 11 via a suspension 15. On the other hand, a coil 21 constituting a VCM is attached to the pivot 11 on the side opposite to the arm 13. The coil 21 is mounted between a pair of coil arm portions 19 extending in the radial direction from the pivot 11 and fixed so as to rotate integrally with the arm 13 via the pivot 11.

さらにこのコイルアーム部１９及びコイル２１の下面側には、スケール２３が装着されている（図２）。スケール２３には、ピボット１１の軸心を中心として放射状に延びる明縞２３ａ及び暗縞２３ｂが、同軸心を中心とした円周方向に所定ピッチで交互に配置されている。スケール２３は、コイル２１で囲まれた空間内に設けるか、コイル２１の下面に密着させて設けることが好ましい。   Further, a scale 23 is mounted on the lower surface side of the coil arm portion 19 and the coil 21 (FIG. 2). On the scale 23, bright stripes 23a and dark stripes 23b extending radially about the axis of the pivot 11 are alternately arranged at a predetermined pitch in the circumferential direction about the coaxial center. The scale 23 is preferably provided in a space surrounded by the coil 21 or in close contact with the lower surface of the coil 21.

コイルアーム部１９、コイル２１及びスケール２３を挟んで、これらと非接触状態で、上部マグネット２５ａ、２５ｂ及び下部マグネット２５ｃ、２５ｄが配置されている（図３、図４、図６及び図７参照）。これらの上部マグネット２５ａ、２５ｂと下部マグネット２５ｃ、２５ｄは、上部ヨーク２７と下部ヨーク２９に固定されている。ヨーク２７、２９は、３本のスペーサ軸３１によって所定間隔に保持され、マグネット２５ａ乃至２５ｄとコイルアーム部１９、コイル２１及びスケール２３とを非接触状態に保持する。これらのコイルアーム部１９、コイル２１、マグネット２５ａ乃至２５ｄ及びヨーク２７、２９によって、ＶＣＭが構成されている。   The upper magnets 25a and 25b and the lower magnets 25c and 25d are arranged in a non-contact state with the coil arm part 19, the coil 21, and the scale 23 interposed therebetween (see FIGS. 3, 4, 6, and 7). ). These upper magnets 25 a and 25 b and lower magnets 25 c and 25 d are fixed to the upper yoke 27 and the lower yoke 29. The yokes 27 and 29 are held at predetermined intervals by the three spacer shafts 31, and hold the magnets 25a to 25d and the coil arm portion 19, the coil 21 and the scale 23 in a non-contact state. The coil arm portion 19, the coil 21, the magnets 25 a to 25 d, and the yokes 27 and 29 constitute a VCM.

さらに下部ヨーク２９、及び下部マグネット２５ｃ、２５ｄの円周方向略中央位置となる境界部分には、これらを貫通して下部ヨーク２９の外側からスケール２３まで連通する光路穴２９ａ、２６が形成されている（図７参照）。これらの光路穴２９ａ、２６は、スケール２３の明暗縞２３ａ、２３ｂを検出する光検出器としての光センサ４１の光路となる。これらの光路穴２９ａ、２６の内周面には、反射防止加工、例えば黒色あるいはセンサ光波長吸収色塗料の塗布などを施すことが好ましい。   Further, optical path holes 29a and 26 that pass through the lower yoke 29 and the scale 23 from the outside of the lower yoke 29 are formed in the boundary portion of the lower yoke 29 and the lower magnets 25c and 25d, which is substantially the center position in the circumferential direction. (See FIG. 7). These optical path holes 29a and 26 serve as optical paths of an optical sensor 41 as a photodetector for detecting the light and dark stripes 23a and 23b of the scale 23. The inner peripheral surfaces of these optical path holes 29a and 26 are preferably subjected to antireflection processing, for example, application of black or sensor light wavelength absorption color paint.

以上の構成からなるアクチュエータは、ピボット１１が測定装置のブロックに対して回動自在に支持され、上部、下部ヨーク２７、２９が前記ブロックに固定される。さらに下部ヨーク２９の下方に、光センサ４１が固定される（図４、図５及び図７参照）。そうしてアーム１３の先端に装着された磁気ヘッド１７を測定装置に搭載されたスピンドルモータによって回転駆動される磁気ディスクに対して、コイル２１への通電制御によりアクセスさせる。   In the actuator having the above structure, the pivot 11 is supported so as to be rotatable with respect to the block of the measuring apparatus, and the upper and lower yokes 27 and 29 are fixed to the block. Further, the optical sensor 41 is fixed below the lower yoke 29 (see FIGS. 4, 5 and 7). Thus, the magnetic head 17 mounted on the tip of the arm 13 is accessed by the energization control to the coil 21 with respect to the magnetic disk that is rotationally driven by the spindle motor mounted on the measuring device.

光センサ４１は、発光素子４３ａ及び受光素子４３ｂを備えたフォトリフレクタ方式のセンサである。光センサ４１の発光素子４３ａから射出したセンサ光Ｌ１が光路穴２９ａ、２６を通ってスケール２３に入射し、スケール２３の明暗縞２３ａ、２３ｂで反射した反射センサ光Ｌ２が、再び光路穴２６、２９ａを通って光センサ４１の受光素子４３ｂに入射する。反射センサ光Ｌ２の強度は、センサ光Ｌ１が入射した明暗縞２３ａ、２３ｂの位置に応じて変わるので、受光素子４３ｂが受光した反射センサ光Ｌ２の強度を測定することによって、センサ光Ｌ１がスケール２３に入射した位置を検出し、アーム１３の回転角を測定できる。なお、この実施形態では、アーム１３が停止している位置からの回転角を測定する構成である。   The optical sensor 41 is a photo reflector type sensor including a light emitting element 43a and a light receiving element 43b. The sensor light L1 emitted from the light emitting element 43a of the optical sensor 41 enters the scale 23 through the optical path holes 29a and 26, and the reflected sensor light L2 reflected by the light and dark stripes 23a and 23b of the scale 23 again becomes the optical path hole 26, The light enters the light receiving element 43b of the optical sensor 41 through 29a. Since the intensity of the reflected sensor light L2 changes according to the positions of the light and dark stripes 23a and 23b on which the sensor light L1 is incident, the sensor light L1 is scaled by measuring the intensity of the reflected sensor light L2 received by the light receiving element 43b. The rotation angle of the arm 13 can be measured by detecting the position incident on 23. In this embodiment, the rotation angle from the position where the arm 13 is stopped is measured.

スケール２３は、コイル２１に近接しているので、これらの間の固有振動周波数は非常に高くなり、温度変化による影響も非常に小さく、誤差は無視できる値まで小さくなる。したがって、非常に高い回転角測定精度が得られる。   Since the scale 23 is close to the coil 21, the natural vibration frequency between them becomes very high, the influence due to the temperature change is very small, and the error becomes a negligible value. Therefore, very high rotation angle measurement accuracy can be obtained.

光センサ４１と下部ヨーク２９とを密着させると、光センサ４１から射出された検出光が漏れる隙間は、ヨーク２７、２９とコイルアーム部１９、コイル２１またはスケール２３との間隙だけである。したがって、発光素子４３ａとして強力なレーザを発振する素子を使用しても、漏れるレーザ光が非常に少ないので、使用者がゴーグル等を装着する等、特別な運用上の制限もない。   When the optical sensor 41 and the lower yoke 29 are brought into close contact with each other, the gap through which the detection light emitted from the optical sensor 41 leaks is only the gap between the yokes 27 and 29 and the coil arm portion 19, the coil 21, or the scale 23. Therefore, even if an element that oscillates a powerful laser is used as the light emitting element 43a, the amount of laser light that leaks is very small, so there are no special operational restrictions such as the user wearing goggles or the like.

スケール２３は非磁性材であることが好ましいが、若干の透磁性がある材料（弱透磁性材）を用いてもよい。弱透磁性材を使用する場合は、スケールを上部マグネット２５ａ、２５ｂ及び下部マグネット２５ｃ、２５ｄから等距離に配置することにより、磁界分布、ひいてはコイル２１の位置によるトルク変動に対する影響を最小化できる。   The scale 23 is preferably a non-magnetic material, but a material with a slight permeability (weakly permeable material) may be used. When a weak magnetic permeability material is used, by arranging the scales at equal distances from the upper magnets 25a and 25b and the lower magnets 25c and 25d, the influence on the torque fluctuation due to the magnetic field distribution and consequently the position of the coil 21 can be minimized.

図示実施形態では、光センサ４１を下部ヨーク２９の下に配置する構成としたが、上部ヨーク２７の上に配置する構成としてもよい。この場合は、上部ヨーク２７及び上部マグネット２５ａ、２５ｂの境界部に、光路穴２９ａ、２６同様の光路穴を形成し、スケール２３同様のスケールをコイル２１の上部に配置する。   In the illustrated embodiment, the optical sensor 41 is arranged below the lower yoke 29, but may be arranged above the upper yoke 27. In this case, an optical path hole similar to the optical path holes 29 a and 26 is formed at the boundary between the upper yoke 27 and the upper magnets 25 a and 25 b, and a scale similar to the scale 23 is disposed above the coil 21.

また、光検出器及びスケールとして透過型のものを使用することもできる。この場合は、スケールの明暗縞を透過部と遮光部を有するスリットにより形成し、上部ヨーク２７及び上部マグネット２５ａ、２５ｂの境界部にも光路穴を形成し、発光素子及び受光素子を上部ヨーク２７及び下部ヨーク２９の外側に配置して、発光素子から射出され、前記スリットを透過したセンサ光を受光素子で受光するように形成する。なお、マグネット２５ａ乃至２５ｄ及びヨーク２７または２９に光路穴を開けると、磁界分布の乱れが懸念されるが、この実施形態では光路穴を開けた部分が左右の上部マグネット２５ａ、２５ｂ及び下部マグネット２５ｃ、２５ｄの境界部でありＮＳ極の切り替え点であり、磁束密度が小さい領域なので、光路穴を開けたことによる影響はほとんどない。   Moreover, a transmissive | pervious thing can also be used as a photodetector and a scale. In this case, light and dark stripes of the scale are formed by slits having a transmission part and a light shielding part, and an optical path hole is also formed at the boundary between the upper yoke 27 and the upper magnets 25a and 25b. And it arrange | positions on the outer side of the lower yoke 29, and it forms so that the sensor light inject | emitted from the light emitting element and permeate | transmitted the said slit may be received by a light receiving element. If the optical path holes are formed in the magnets 25a to 25d and the yoke 27 or 29, there is a concern about the disturbance of the magnetic field distribution. In this embodiment, the portions where the optical path holes are formed are the left and right upper magnets 25a and 25b and the lower magnet 25c. 25d, the NS pole switching point, and the region where the magnetic flux density is low, there is almost no influence from opening the optical path hole.

この実施形態では、アーム１３及びコイル２１が基準位置に停止している状態から、コイル２１に通電されてコイル２１、アーム１３がピボット１１を軸として回動するときに変化する受光素子４３ｂの出力を測定することにより、アーム１３の回転角を測定できる。この構成によれば、アーム１３の単位回転角と磁気ヘッド１７が磁気ディスク上で直径方向に移動する距離とを予め演算して求めておけば、アーム１３の回転角に基づき磁気ヘッド１７を磁気ディスク上で直径方向に所望の距離移動させることができる。また、逆にアーム１３の回転角を測定することにより、磁気ヘッド１７が移動した距離を求めることができる。   In this embodiment, the output of the light receiving element 43b that changes when the coil 21 and the arm 13 are rotated about the pivot 11 by energizing the coil 21 from the state where the arm 13 and the coil 21 are stopped at the reference position. Can be measured to measure the rotation angle of the arm 13. According to this configuration, if the unit rotation angle of the arm 13 and the distance that the magnetic head 17 moves in the diametrical direction on the magnetic disk are calculated in advance, the magnetic head 17 is magnetized based on the rotation angle of the arm 13. A desired distance can be moved in the diameter direction on the disk. Conversely, by measuring the rotation angle of the arm 13, the distance traveled by the magnetic head 17 can be obtained.

本発明にかかるアクチュエータの位置検出装置を適用したヘッドスタックアッセンブリの実施形態のアーム部分を上方から見た斜視図である。It is the perspective view which looked at the arm part of embodiment of the head stack assembly to which the position detection apparatus of the actuator concerning this invention was applied from upper direction. 同ヘッドスタックアッセンブリの実施形態のアーム部分を下方から見た斜視図である。It is the perspective view which looked at the arm part of embodiment of the head stack assembly from the lower part. 同ヘッドスタックアッセンブリの実施形態をマグネットを透視して示した斜視図である。FIG. 3 is a perspective view showing an embodiment of the head stack assembly through a magnet. 同ヘッドスタックアッセンブリと位置検出装置の実施形態の外観を上方から見て示す斜視図である。It is a perspective view which shows the external appearance of embodiment of the same head stack assembly and a position detection apparatus seeing from upper direction. 同ヘッドスタックアッセンブリと位置検出装置の実施形態の外観を下方から見て示す斜視図である。It is a perspective view which shows the external appearance of embodiment of the same head stack assembly and a position detection apparatus seeing from the downward direction. 同ヘッドスタックアッセンブリのマグネット及びヨーク部分を下方から見て示す斜視図である。It is a perspective view which shows the magnet and yoke part of the head stack assembly as seen from below. 本発明にかかるアクチュエータの位置検出装置の要部を縦断して示す断面図である。It is sectional drawing which shows the principal part of the position detection apparatus of the actuator concerning this invention longitudinally.

符号の説明Explanation of symbols

１１ ピボット
１３ アーム
１７ 磁気ヘッド
１９ コイルアーム部
２１ コイル
２３ スケール
２３ａ 明縞
２３ｂ 暗縞
２５ａ ２５ｂ 上部マグネット
２５ｃ ２５ｄ 下部マグネット
２６ 光路穴
２７ 上部ヨーク
２９ 下部ヨーク
２９ａ 光路穴
４１ 光センサ
４３ａ 発光素子
４３ｂ 受光素子 DESCRIPTION OF SYMBOLS 11 Pivot 13 Arm 17 Magnetic head 19 Coil arm part 21 Coil 23 Scale 23a Bright stripe 23b Dark stripe 25a 25b Upper magnet 25c 25d Lower magnet 26 Optical path hole 27 Upper yoke 29 Lower yoke 29a Optical path hole 41 Optical sensor 43a Light emitting element 43b Light receiving element

Claims (9)

ピボットを挟んでアームとボイスコイルモータを備えたアクチュエータであって、
前記ボイスコイルモータのコイルに、該コイルに近接したマグネットと対向するスケールを設け、
前記スケールに対向するマグネット及び該マグネットが装着されたヨークに、このヨーク外方からスケールまで連通する光路穴を開け、
前記ヨークの外方から前記光路穴を通して前記スケールに向けてセンサ光を照射し、スケールで反射またはスケールを透過したセンサ光を受光してスケールを読み取る光検出器を設けたこと、を特徴とするアクチュエータの位置検出装置。 An actuator with an arm and a voice coil motor across the pivot,
The coil of the voice coil motor is provided with a scale facing the magnet close to the coil,
An optical path hole communicating from the outside of the yoke to the scale is opened in the magnet facing the scale and the yoke on which the magnet is mounted,
A light detector is provided which irradiates sensor light from the outside of the yoke through the optical path hole toward the scale, receives sensor light reflected by the scale or transmitted through the scale, and reads the scale. Actuator position detection device. 請求項１記載のアクチュエータの位置検出装置において、前記光検出器は、前記スケールで反射し、前記光路穴を通って戻った反射センサ光を受光するアクチュエータの位置検出装置。 2. The actuator position detecting device according to claim 1, wherein the photodetector receives reflected sensor light reflected by the scale and returned through the optical path hole. 請求項１または２記載のアクチュエータの位置検出装置において、前記スケールは非磁性材で形成されているアクチュエータの位置検出装置。 3. The actuator position detection device according to claim 1, wherein the scale is made of a non-magnetic material. 請求項１または２記載のアクチュエータの位置検出装置において、前記スケールは弱透磁性材で形成され、前記コイルを挟んで配置されたマグネットから略等距離に配置されているアクチュエータの位置検出装置。 The actuator position detecting device according to claim 1 or 2, wherein the scale is made of a weakly magnetically permeable material and is arranged at a substantially equal distance from a magnet arranged with the coil interposed therebetween. 請求項１乃至４のいずれか一項記載のアクチュエータの位置検出装置において、前記スケールは、前記センサ光が入射する面に、前記ピボットを中心とした放射状に延びる明暗部が円周方向に所定ピッチで設けられているアクチュエータの位置検出装置。 5. The actuator position detecting device according to claim 1, wherein the scale has a predetermined pitch in a circumferential direction with light and dark portions extending radially about the pivot on a surface on which the sensor light is incident. Actuator position detection device provided in. 請求項１乃至５のいずれか一項記載のアクチュエータの位置検出装置において、前記光路穴は、前記マグネットの円周方向略中央位置に開けられているアクチュエータの位置検出装置。 6. The actuator position detection device according to claim 1, wherein the optical path hole is opened at a substantially central position in a circumferential direction of the magnet. 請求項１乃至６のいずれか一項記載のアクチュエータの位置検出装置において、前記光路穴の内周面には反射防止加工が施されているアクチュエータの位置検出装置。 The actuator position detection device according to any one of claims 1 to 6, wherein an anti-reflection process is applied to an inner peripheral surface of the optical path hole. 請求項１乃至７のいずれか一項記載のアクチュエータの位置検出装置において、前記光検出器は、センサ光としてレーザ光を射出するアクチュエータの位置検出装置。 The actuator position detection device according to claim 1, wherein the light detector emits laser light as sensor light. 請求項１乃至８のいずれか一項記載のアクチュエータの位置検出装置において、前記アームの先端部にはヘッドジンバルアセンブリが着脱自在に装着され、前記ボイスコイルモータは、前記アームを前記ピボットを軸心として回動させるアクチュエータの位置検出装置。 9. The actuator position detecting device according to claim 1, wherein a head gimbal assembly is detachably attached to a tip portion of the arm, and the voice coil motor has the arm centered on the pivot. The position detection device of the actuator to be rotated as
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