JP2008298520A - Scanning distance measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-sized and light-weight scanning distance measuring instrument for realizing a wide-range and high-speed two-dimensional scans. <P>SOLUTION: Laser light outputted from a laser output part 1 is transmitted and caused by a scanning mechanism for two-dimensionally scanning in a first direction and in a second direction orthogonal to the first direction, and the laser light reflected by a measuring object is received. By this scanning mechanism, the laser light is caused to scan in the first direction, by driving a polygonal mirror 3 with a first scan actuator so as to endlessly rotate around a first scan rotation axis, at all times, while the laser light is caused to scan in the second direction by driving a scan mirror base, comprising the first scan actuator and the polygon mirror 3, by a second scan actuator so as to endlessly rotate about a second scan rotation axis which is orthogonal to the first scan rotation axis. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention is an apparatus that scans light such as a laser and observes the reflected light to measure the distance, and in particular, scans light such as a laser in two-axis rotation directions to form a three-dimensional shape of a measurement target or measurement target environment. The present invention relates to a scanning distance measuring device that can be restored.

  There is a demand for high-speed measurement of a wide range of three-dimensional shapes for applications such as environment recognition and obstacle detection, and various two-dimensional scanning distance measuring devices using light such as lasers have been proposed.

  An example of a light beam scanning mechanism is described in Patent Document 1.

  FIG. 6 is a schematic diagram of a light beam scanning mechanism described in Patent Document 1. In FIG.

  In this light beam scanning mechanism, a light beam scanning mirror 101 includes a driven portion 102 made of a ferromagnetic material or a permanent magnet, and is pivotable about a rotation axis 103 orthogonal to the optical axis of the incident beam. It is supported. There is an electromagnetic member 104 provided with a magnetic pole 104-1 and a coil 104-2 as driving means for applying a magnetic force to the driven part 102 of the mirror to give the mirror 101 a rotational force around the axis of the rotary shaft 103. A motor 105 that is another driving unit rotates the mirror 101 and the electromagnetic member 104 about an axis orthogonal to the rotation shaft 103. Two-dimensional scanning of the light beam L is realized by rotation by the motor 105 and swinging by the magnetic force of the electromagnetic member 104.

  An example of a 3-D laser measurement device is described in Patent Document 2.

  In the present 3-D laser measuring apparatus, the measuring head having two support legs and a rotating head is rotatable by 180 ° about a vertical rotation axis. The rotary head has a rotatable mirror, and this mirror is continuously rotatable around a beam axis line of a measurement beam hitting the mirror and a rotation axis line arranged parallel or coaxially. The measurement beam is emitted from the rotary head and scanned. The support is provided with a rotatable mirror drive mechanism, a light emitter, and a light receiver.

  An example of a laser distance measuring device is described in Patent Document 3.

In this laser distance measuring device, a rotating polygon mirror that reflects a transmission laser beam emitted from a laser light source toward a target and receives a reception laser beam reflected by the target, and a reception laser beam reflected by the rotating polygon mirror for receiving light A concave mirror is provided for reflection on the optical system side. A frame on which a rotating polygon mirror, a concave mirror and a laser light source are mounted is configured to be rotatable about a pitch axis perpendicular to the rotation axis of the rotating polygon mirror (FIG. 1).
JP 2003-287663 A JP 2003-177014 A Japanese Patent No. 3463781

  The above scanning distance measuring device has the following problems.

  The first problem is that the configuration is complicated. The above scanning distance measuring device has a two-dimensional scanning mechanism, but the uniaxial scanning is a mechanism capable of infinite rotation and can be scanned by a simple actuator. However, in particular, the devices of Patent Literature 1 and Patent Literature 3 require reciprocal control for the other one-axis scanning. In order to realize reciprocal control, the configuration of the actuator and sensor becomes complicated.

  The second problem is that it is difficult to reduce the size and weight. This is also related to the complicated structure which is the first problem. The device of Patent Document 1 includes an electromagnetic member that applies a magnetic force to a driven portion of a mirror to swing the mirror, and these mirror and electromagnetic member are rotated around an axis orthogonal to the rotation axis by a motor. It is difficult to reduce the size of the electromagnetic member necessary for driving the motor.

  The apparatus of Patent Document 2 continuously rotates the mirror for one-axis scanning. However, the measuring head that is rotated halfway around the vertical axis of rotation has a configuration in which an optical emitter, a rotatable mirror drive mechanism, and a light receiver are all mounted.

  The apparatus of Patent Document 3 has a configuration in which a rotating polygon mirror, a concave mirror, and a laser light source can be integrally rotated around a pitch axis, and there are still many components and it is difficult to reduce the size.

  And if the mechanism to be driven becomes heavier, it will hinder the realization of high-speed scanning.

[Object of invention]
An object of the present invention is to provide a scanning type distance measuring device that realizes two-dimensional scanning that is small, lightweight, wide range, and high speed.

In order to solve the above-described problem, the scanning distance measuring device according to the present invention is configured so that the laser beam output from the laser output unit is two in the first direction and the second direction orthogonal to the first direction by the scanning mechanism. A scanning distance measuring device that scans and transmits in a dimension and receives laser light reflected by a measurement object,
In the scanning mechanism, the laser beam is scanned in the first direction by driving the polygon mirror at an infinite rotation around the first scanning rotation axis by the first scanning actuator. The scanning mirror base composed of the actuator and the polygon mirror is driven by infinite rotation around the second scanning rotation axis that is orthogonal to the first scanning rotation axis by the second scanning actuator. Scanned in the direction.

In another scanning distance measuring device of the present invention, the laser beam output from the laser output unit is two-dimensionally scanned in a first direction and a second direction orthogonal to the first direction by a scanning mechanism. And a scanning distance measuring device that receives the laser beam reflected by the measurement object,
In the scanning mechanism, the laser beam is first swung around a scanning rocking shaft by a scanning rocking link mechanism that receives power that is constantly rotated infinitely from the first scanning actuator. And a scanning mirror base composed of the first scanning actuator, the plane mirror, and the scanning oscillating link mechanism around the scanning rotation axis perpendicular to the scanning oscillating axis by the second scanning actuator. By always driving infinitely, scanning is performed in the second direction.

  In the scanning distance measuring device of the present invention, the polygon mirror is always driven to infinite rotation, and the scanning mirror base composed of the polygon mirror and the drive mechanism is always driven to infinite rotation in the direction orthogonal to the above rotation. is doing. As a result, the number of components can be reduced, the size and weight can be reduced, and the scanning speed can be increased.

  In another scanning distance measuring device according to the present invention, the plane mirror is swung with the power that is always rotated indefinitely as an input, and the scanning mirror base composed of the plane mirror and the drive mechanism is further swung. Always drives infinite rotation in the orthogonal direction. As a result, the number of components can be reduced, the size and weight can be reduced, and the scanning speed can be increased.

  The scanning distance measuring device of the present invention is characterized by a two-dimensional laser beam scanning mechanism.

  An outline of Example 1-4 described later will be described.

  In the first and second embodiments, the light output from the laser projector is first reflected by the polygon mirror that is always rotating infinitely around the first scanning rotation axis and scanned in the first direction. There is a scanning mirror base composed of a mirror for scanning in a first direction and an actuator for driving the mirror. The scanning mirror base always rotates infinitely around a second scanning rotation axis that is coaxial with the axis on which laser light is projected by the actuator for scanning in the second direction and is orthogonal to the first scanning rotation axis. With this configuration, the laser beam is scanned in a two-dimensional direction orthogonal to each other. In addition, regarding the expression of the second scanning rotation axis orthogonal to the first scanning rotation axis, the two axes are actually arranged at a certain distance as described later, and this case is included.

  The laser beam reflected by the measurement object returns to the mirror and is reflected. The reflected light is received by the light receiving unit. By measuring the time until the laser beam is transmitted and received or the phase difference that has occurred, the distance to the measurement object can be calculated.

  By transmitting the actuator control signal to the scanning mirror base and the angle information signal of the polygon mirror by the slip ring mounted on the second scanning rotation shaft, the scanning mirror base can be rotated infinitely.

  Since the mechanism driven in the second direction is only the scanning mirror base, it is possible to reduce the number of components and reduce the size and weight. Further, since the scanning mirror base is made small and light, the scanning speed in the second direction can be increased.

  Since the two axes are always driven by infinite rotation, scanning is possible, and the scanning control system is simplified.

  Further, the distance information around the scanning distance measuring device is constantly measured by always performing biaxial scanning. A specific example of scanning will be described. Scan 10 times per second on the second scan axis. If 10.1 scans are executed for one scan of the second scan rotation axis on the first scan rotation axis, 101 scans are executed per second. By executing biaxial scanning at an infinite rotation all the time, it is possible to measure details of the three-dimensional shape around the scanning distance measuring device in a short time of 1 second.

  In the third and fourth embodiments, a single plane mirror or a pair of plane mirrors that are oscillated by the scanning oscillation axis by an input that is always infinitely rotated is used instead of the polygon mirror that is always infinitely rotated. There is a scanning mirror base composed of a plane mirror for scanning in a first direction and an actuator for driving the plane mirror. The scanning mirror base always rotates infinitely around the scanning rotation axis that is coaxial with the axis projected by the laser by the scanning actuator in the second direction and orthogonal to the scanning oscillation axis. With this configuration, the laser beam is scanned in a two-dimensional direction orthogonal to each other.

  In the third and fourth embodiments, as in the first and second embodiments, the mechanism driven in the second direction is only the scanning mirror base, so that the number of components can be reduced and the size and weight can be reduced. Further, since the scanning mirror base is made small and light, the scanning speed in the second direction can be increased.

  Since the two axes are always driven by infinite rotation, scanning is possible, and the scanning control system is simplified.

  Hereinafter, specific examples of the best mode for carrying out the invention will be described in detail as Example 1-4 with reference to the drawings.

  Hereinafter, in the description of the embodiments, for convenience of the two scanning directions, the first direction is referred to as vertical scanning, and the second direction is referred to as horizontal scanning. When the entire apparatus is tilted as a substance, the actual scanning direction is tilted from vertical or horizontal. For example, if the entire device is placed sideways, the vertical and horizontal positions are reversed. The vertical scanning actuator is a first scanning actuator, and the horizontal scanning actuator is a second scanning actuator.

[Example 1]
FIG. 1 is a schematic diagram showing the configuration of the first embodiment of the present invention.

  A first embodiment of the scanning distance measuring device of the present invention will be described with reference to FIG.

  The laser output light 2 output from the laser output unit 1 fixed to the apparatus body is reflected by the polygon mirror 3 that is always driven to rotate infinitely by the vertical scanning rotation shaft 7 by the vertical scanning actuator 6, and is reflected on the measurement object 4. Fired towards. An angle sensor is incorporated in the vertical scanning actuator 6.

  The vertical scanning mirror base composed of the vertical scanning actuator 6 and the polygon mirror 3 is further driven infinitely by the horizontal scanning actuator 8 around the horizontal scanning rotation axis 9 to horizontally drive the laser beam scanned in the vertical direction. Scan in the direction. An angle sensor is incorporated in the horizontal scanning actuator 8.

  When the output light 2 is reflected by the measurement target 4, the reflected light 5 returns to the polygon mirror 3 and is reflected by the polygon mirror 3 toward the laser output unit 1. Further, the reflected light 5 is reflected by the half mirror 10 fixed to the apparatus main body and received by the light receiving sensor 11 which is also fixed to the apparatus main body.

  A method for measuring the distance will be described. The distance from the optical path is measured by measuring the time from when the laser output unit 1 emits pulsed laser light until the light receiving sensor 11 receives the reflection of the laser light. As another distance measurement method, the laser beam may be modulated at a certain frequency, the phase difference between the laser beam received by the light receiving sensor 11 and the laser beam emitted by the laser output unit 1 may be measured, and the distance of the optical path may be measured. .

  The direction in which the laser is emitted in the biaxial scanning direction is measured by an angle sensor for vertical scanning and an angle sensor for horizontal scanning.

  By combining the information of the angle sensor in the direction in which the laser is emitted and the distance information in that direction, the three-dimensional shape around the scanning distance measuring device can be measured.

  Next, the arrangement of the rotating shaft will be described. A horizontal scanning rotary shaft 9 is arranged coaxially with the direction of the laser beam of the laser output unit 1. The vertical scanning rotation axis 7 is orthogonal to the direction of the laser beam of the laser output unit 1, and further, when the polygon mirror 3 rotates, the laser beam is reflected in an appropriate direction so that the laser beam is reflected from a certain axis. Place them at a distance. The vertical scanning rotation shaft 7 is arranged at the center of the polygon mirror 3.

  For the vertical scanning actuator 6 and the angle sensor on the vertical scanning mirror base, the slip ring 12 disposed on the horizontal scanning rotating shaft 9 is used for supplying power for driving the actuator and transmitting information of the angle sensor information. And do it. As a result, the vertical scanning mirror base can be rotated infinitely around the horizontal scanning rotation axis 9.

[Example 2]
FIG. 2 is a schematic diagram showing the configuration of the second embodiment of the present invention.

  A second embodiment of the scanning distance measuring device of the present invention will be described with reference to FIG.

  This embodiment is characterized in that the polygon mirror 3 has a regular polygonal column shape having multiple sides of four. Such a polygon mirror always has a side whose angle to a side is 90 degrees. In FIG. 2, the polygon mirror has a quadrangular shape.

  The laser output light 2 output from the laser output unit 1 fixed to the apparatus body is reflected by the polygon mirror 3 that is always driven to rotate infinitely by the vertical scanning rotation shaft 7 by the vertical scanning actuator 6, and is reflected on the measurement object 4. Fired towards. An angle sensor is incorporated in the vertical scanning actuator 6.

  The vertical scanning mirror base composed of the vertical scanning actuator 6 and the polygon mirror 3 is further driven infinitely by the horizontal scanning actuator 8 around the horizontal scanning rotation axis 9 to horizontally drive the laser beam scanned in the vertical direction. Scan in the direction. An angle sensor is incorporated in the horizontal scanning actuator 8.

  When the output light 2 is reflected by the measurement object 4, the reflected light 5 returns to the polygon mirror 3, is reflected by the polygon mirror 3 in the direction opposite to the laser output unit 1, and is received by the light receiving sensor 11 fixed to the apparatus main body. The use of the slip ring 12 is the same as in the first embodiment.

  By making the polygon mirror 3 into a polygonal column shape having sides that are multiples of 4, there are sides at an angle of 90 degrees with the mirror that reflected the output light 2. Since the reflected light 5 can be reflected in the opposite direction to the laser output unit by the mirror on the side, it is possible to avoid the problem of interference between the output light and the reflected light by the half mirror.

[Example 3]
FIG. 3 is a schematic diagram showing the configuration of the third embodiment of the present invention.

  A third embodiment of the scanning distance measuring device of the present invention will be described with reference to FIG.

  The present embodiment is characterized in that vertical scanning is realized not by a polygon mirror but by a swinging plane mirror (hereinafter also simply referred to as “mirror”) connected to an infinitely rotating actuator by a link mechanism.

  The link that is always driven to rotate indefinitely by the vertical scanning actuator rotating shaft 24 by the vertical scanning actuator 23 is connected to the vertical scanning oscillating link mechanism 25, and the short point of the link becomes the short point of the vertical vertical scanning mirror 21. Connected. The vertical scanning mirror 21 is configured to be swung around the vertical scanning rocking shaft 22. An angle sensor is incorporated in the vertical scanning actuator 23.

  The laser output light 2 output from the laser output unit 1 fixed to the apparatus main body is reflected by the vertical scanning mirror 21 and emitted toward the measurement target. When the output light 2 is reflected by the object to be measured, the reflected light 5 returns to the vertical scanning mirror 21, is reflected by the vertical scanning mirror 21 in the direction of the laser output unit 1, and is further reflected by the half mirror 12 fixed to the apparatus main body. Light is received by a light receiving sensor 11 fixed to the apparatus main body.

  Although not shown, the vertical scanning mirror base composed of the vertical scanning actuator 23, the vertical scanning mirror 21, and the vertical scanning oscillating link mechanism 25 is further moved by the horizontal scanning actuator around the horizontal scanning rotation axis as in the first embodiment. Infinite rotation is always performed, and the laser beam scanned in the vertical direction is scanned in the horizontal direction. An angle sensor is incorporated in the horizontal scanning actuator.

  The vertical scanning rocking shaft 22 is disposed so as to be orthogonal to the direction of the laser beam output from the laser output unit 1.

  With this configuration, the vertical scanning of the laser beam is a reciprocating motion. Since the vertical scanning mirror 21 is oscillated by the link mechanism, the structure is complicated. However, the vertical scanning actuator 23 itself performs simple infinite rotation, and the control is simple.

  In addition, a plane mirror is used instead of a polygon mirror, which is lighter than a solid polygon mirror and has a small moment of inertia around the swing axis. For this reason, drive control is easy even if the plane mirror is swung.

[Example 4]
FIG. 4 is a schematic diagram showing the configuration of the fourth embodiment of the present invention.

  A fourth embodiment of the scanning distance measuring device according to the present invention will be described with reference to FIG.

  Similar to the third embodiment, a swinging plane mirror is used.

  In this embodiment, the plane mirror that is connected to the infinitely rotating actuator by a link mechanism and swings is a pair of mirrors. A feature is that vertical scanning is realized by two mirrors.

  One of the mirrors is a vertical scanning output mirror that reflects the output light 2 of the laser and directs it toward the measurement object, and is simply called an “output mirror”, and the other is a vertical scanning input mirror that receives the reflected light 5 from the measurement object. This is called “input mirror”.

  The vertical scanning actuator / drive transmission mechanism 51 is a vertical scanning actuator having a drive transmission mechanism. As a result, the output mirror rocking link mechanism 34 receives the output mirror link mechanism rotating shaft 33 and the input mirror link rocking link mechanism 44 receives the input of the infinite rotation driving at all times. An angle sensor is incorporated in the vertical scanning actuator / drive transmission mechanism 51.

  The short point of the link of the output mirror swing link mechanism 34 is connected to the short point of the output mirror 31. The short point of the link of the input mirror swing link mechanism 44 is connected to the short point of the input mirror 41. As a result, the output mirror 31 swings around the output mirror swing shaft 32, and the input mirror 41 swings around the input mirror swing shaft 42. The angle formed by the mirror surfaces of the output mirror 31 and the input mirror 41 is controlled to be orthogonal.

  The laser output light 2 fixed to the apparatus main body is reflected by the vertical scanning output mirror 31 and emitted toward the measurement target. The reflected light reflected by the measurement target is reflected by the input mirror 41 in the direction opposite to the laser output unit 1 and received by the light receiving sensor 11 fixed to the apparatus main body.

  The vertical scanning mirror base is composed of the vertical scanning actuator / drive transmission mechanism 51, the output mirror 31, the input mirror 41, the output mirror swing link mechanism 34, and the input mirror swing link mechanism 44. As in the third embodiment, the vertical scanning mirror base is always driven by an infinite rotation around the horizontal scanning rotation axis by a horizontal scanning actuator, and scans the laser beam scanned in the vertical direction in the horizontal direction. An angle sensor is incorporated in the horizontal scanning actuator.

  The mirror which vertically scans the input and output of the laser beam is divided, and the output mirror 31 and the input mirror 41 are controlled so that the angles formed by the mirror surfaces are orthogonal to each other. Thereby, since the reflected light 5 can be reflected in the opposite direction to the laser output unit 1, it is possible to avoid the problem of interference between the output light and the reflected light by the half mirror.

  Next, in Examples 1 and 2, the locus of laser light will be described.

  It is a conceptual diagram which shows the locus | trajectory of the laser in Example 1, 2 of this invention.

  When the actuator for vertical scanning cannot perform scanning at high speed many times with respect to one horizontal scanning, the phases of horizontal scanning and vertical scanning are shifted. Thus, the density of vertical scanning can be increased by performing horizontal scanning several times. In the example of FIG. 5, vertical scanning is executed 4.75 times for one horizontal scanning. In this case, by performing horizontal scanning four times, the phase of the trajectory for vertical scanning is shifted little by little, and high density measurement can be performed. In Examples 3 and 4, the laser trajectory is a trajectory reciprocating in the vertical direction. Even in these embodiments, it is possible to measure with high density by shifting the phases of horizontal scanning and vertical scanning.

  The scanning distance measuring device of the present invention can be applied to an application for detecting an obstacle by being mounted on a mobile robot or an automobile. In addition, the apparatus of the present invention can be applied to an application for enabling the remote operation more reliably by measuring the surrounding environment of the robot and transmitting the information to the operator in the remote operation robot. Furthermore, the apparatus of the present invention can be applied to an application for measuring the environment around the autonomously moving robot and estimating the robot's own position.

Schematic which shows the structure of Example 1 of this invention. Schematic which shows the structure of Example 2 of this invention. Schematic which shows the structure of Example 3 of this invention. Schematic which shows the structure of Example 4 of this invention. The conceptual diagram which shows the locus | trajectory of the laser in Example 1, 2 of this invention. Schematic of the light beam scanning mechanism described in Patent Document 1

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Laser output part 2 ... Output light 3 ... Polygon mirror 4 ... Measurement object 5 ... Reflected light 6 ... Vertical scanning actuator 7 ... Vertical scanning rotating shaft 8 ... Horizontal scanning actuator 9 ... Horizontal scanning rotating shaft 10 ... Half mirror 11 ... Light reception Sensor 12 ... Slip ring 21 ... Vertical scanning mirror 22 ... Vertical scanning oscillating shaft 23 ... Vertical scanning actuator 24 ... Vertical scanning actuator rotating shaft 25 ... Vertical scanning oscillating link mechanism 31 ... Output mirror 32 ... Output mirror oscillating shaft 33 ... Output mirror link mechanism rotating shaft 34 ... Output mirror swing link mechanism 41 ... Input mirror 42 ... Input mirror swing shaft 43 ... Input mirror link mechanism rotary shaft 44 ... Input mirror swing link mechanism 51 ... Vertical scanning actuator / drive transmission mechanism

Claims (12)

The laser beam output from the laser output unit is scanned and transmitted two-dimensionally in a first direction and a second direction orthogonal to the first direction by a scanning mechanism, and the laser beam reflected by the measurement target is transmitted. A scanning distance measuring device for receiving,
In the scanning mechanism, the laser beam is scanned in the first direction by driving the polygon mirror at an infinite rotation around the first scanning rotation axis by the first scanning actuator. The scanning mirror base composed of the actuator and the polygon mirror is driven by infinite rotation around the second scanning rotation axis that is orthogonal to the first scanning rotation axis by the second scanning actuator. A scanning distance measuring device that is scanned in a direction.   The laser beam reflected by the measurement object returns to the polygon mirror and is reflected to the laser output unit side, and is further reflected between the laser output unit and the polygon mirror in the direction of the light receiving sensor by a half mirror. The scanning distance measuring device according to claim 1, wherein an optical path reaching the light receiving sensor is configured.   3. The scanning distance measuring device according to claim 1, wherein the scanning direction of the laser beam is measured by an angle sensor around the first scanning rotation axis and an angle sensor around the second scanning rotation axis. .   The power supply for driving and the signal transmission of information to the first scanning actuator and the angle sensor around the first scanning rotation axis are performed by a slip ring arranged on the second scanning rotation axis. The scanning distance measuring device according to claim 3, wherein   The scanning distance measuring apparatus according to claim 1, wherein the polygon mirror has a polygonal column shape having sides that are multiples of four.   The laser beam reflected by the measurement object returns to the polygon mirror, reflects in the direction of the light receiving sensor installed on the opposite side of the laser output unit, and constitutes an optical path through which the reflected light reaches the light receiving sensor. The scanning type distance measuring device according to claim 5. The laser beam output from the laser output unit is scanned and transmitted two-dimensionally in a first direction and a second direction orthogonal to the first direction by a scanning mechanism, and the laser beam reflected by the measurement target is transmitted. A scanning distance measuring device for receiving,
In the scanning mechanism, the laser beam is first swung around a scanning rocking shaft by a scanning rocking link mechanism that receives power that is constantly rotated infinitely from the first scanning actuator. And a scanning mirror base composed of the first scanning actuator, the plane mirror, and the scanning oscillating link mechanism around the scanning rotation axis perpendicular to the scanning oscillating axis by the second scanning actuator. The scanning type distance measuring device is characterized in that it is scanned in the second direction by always driving infinite rotation.   The laser beam reflected by the measurement object returns to the plane mirror and reflects to the laser output unit side, and further reflects in the direction of the light receiving sensor by a half mirror installed between the laser output unit and the plane mirror. The scanning distance measuring device according to claim 7, wherein an optical path through which the reflected light reaches the light receiving sensor is formed.   The plane mirrors are a pair of mirrors, and the surfaces of the pair of mirrors are perpendicular to the scanning rocking axis by a scanning rocking link mechanism that receives power that is constantly rotated infinitely from the first scanning actuator. The scanning distance measuring device according to claim 7, wherein the scanning distance measuring device is swung so as to form   The laser light reflected by the measurement object returns to the pair of mirrors, reflects in the direction of the light receiving sensor installed on the opposite side to the laser output unit, and constitutes an optical path through which the reflected light reaches the light receiving sensor. The scanning distance measuring device according to claim 9.   A mobile robot comprising the scanning distance measuring device according to claim 1.   An automobile equipped with the scanning distance measuring device according to any one of claims 1 to 10.

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