JP2008265091A - Liquid droplet ejection head, manufacturing method for liquid droplet ejection head and liquid droplet ejector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent deformation of a remaining region formed adjacent to a piezoelectric body so as to make a working region of each piezoelectric plate uniform when the piezoelectric body is formed. <P>SOLUTION: In the inkjet recording head 74 including a piezoelectric bodies 42 individualized for each pressure chamber 14 from the piezoelectric plate 58 having common electrodes 48 and discrete electrodes 50 formed on the plate of piezoelectric elements 46 with the remaining regions 44 left uncut, connecting pieces 46A of the piezoelectric elements 46 which constitute the piezoelectric bodies 42 are connected to the remaining regions 44, and the discrete electrodes 50 of the remaining regions 44 are partly or wholly removed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a droplet discharge head including a nozzle for discharging a liquid, a method for manufacturing the droplet discharge head, and a droplet discharge apparatus including the droplet discharge head.

  An ink jet recording apparatus (droplet ejecting apparatus) that ejects ink droplets from a plurality of nozzles and records an image (including characters) on a recording medium such as recording paper, has a pressure chamber of the ink jet recording head (droplet ejecting head). By displacing the constituting diaphragm, the ink filled in the pressure chamber is ejected from the nozzle.

A piezoelectric element is provided on the diaphragm, and the piezoelectric element is deformed to displace the diaphragm by applying a voltage to the piezoelectric element. It is known that the deformation efficiency of the piezoelectric element is improved by individualizing the piezoelectric element corresponding to each pressure chamber (see Patent Document 1).
Japanese Patent No. 3522163

  By the way, when a piezoelectric plate having electrodes formed on the upper and lower surfaces of the piezoelectric element plate is blasted, and the piezoelectric body is formed after individualization, in order to make the processing area of each piezoelectric plate uniform, adjacent to the piezoelectric body Thus, a remaining region is formed.

  An object of the present invention is to prevent the deformation of the remaining region.

  According to the first aspect of the present invention, a piezoelectric plate in which electrodes are formed on the upper and lower surfaces of a piezoelectric element plate is processed, and a piezoelectric body that is individualized for each pressure chamber and a remaining region that is left uncut are obtained. In the droplet discharge head provided, the piezoelectric element constituting the piezoelectric body is connected to the remaining region, and the electrode of the remaining region is partially or entirely removed.

  The present invention according to claim 2 is characterized in that the remaining area is connected to another adjacent remaining area.

  According to a third aspect of the present invention, the piezoelectric plate having electrodes formed on the upper and lower surfaces of the piezoelectric element plate is divided into a first step of attaching the fixed plate to the fixed substrate and a piezoelectric body that is individualized for each pressure chamber. And a second step of leaving a residual region connected to the piezoelectric body, a third step of joining the piezoelectric body and the residual region to a diaphragm constituting the pressure chamber, and a connection with the piezoelectric body. And a fourth step of removing a part or all of the electrode in the remaining region.

  According to a fourth aspect of the present invention, there is provided a first step of removing a part or all of the electrodes in the remaining region connected to the piezoelectric body from the piezoelectric body plate having electrodes formed on the upper and lower surfaces of the piezoelectric element plate. The second step of attaching the electrode-removed region of the piezoelectric plate to the fixed substrate, and the piezoelectric region individually separated for each pressure chamber, and the remaining region connected to the piezoelectric member And a fourth step of joining the piezoelectric body and the remaining region to a diaphragm constituting the pressure chamber.

  According to a fifth aspect of the present invention, the liquid droplet ejection head according to the first or second aspect is provided.

  In the invention according to claim 1, since the remaining region is connected to the piezoelectric element constituting the piezoelectric body, when the piezoelectric body is individualized by blasting as compared with the case where the remaining area is not provided, There is no possibility that the blast mask is displaced and the remaining region is peeled off or the shape is deformed.

  In the invention according to claim 2, the rigidity of the blast mask forming the remaining area is increased by connecting the remaining areas to each other as compared with the case where the present structure is not provided, and the shape of each remaining area is It can further prevent deformation.

  In the third aspect of the invention, in a state where the piezoelectric body and the remaining area are connected, the piezoelectric body and the remaining area are separated from the piezoelectric plate by blasting, and then joined to the diaphragm and connected to the piezoelectric body. Since some or all of the remaining region electrodes are removed, the shape of the remaining region is not deformed during processing as compared to the case where the present configuration is not provided.

  In the invention according to claim 4, the piezoelectric body and the remaining area are removed by blasting in a state where the piezoelectric body and the remaining area are connected after removing a part or all of the electrodes of the remaining area connected to the piezoelectric body. Since the piezoelectric element plate is separated from the piezoelectric element plate, it is not necessary to remove the electrode after joining the piezoelectric body and the remaining region to the diaphragm as compared with the case where the present configuration is not provided.

  According to the fifth aspect of the present invention, it is possible to obtain a liquid droplet ejection head in which the shape of the remaining region is not deformed as compared with the case where this configuration is not provided.

  The ink jet recording head 74 according to the first embodiment of the present invention will be described below. First, an outline of the ink jet recording apparatus 70 on which the ink jet recording head 74 is mounted will be described.

  The recording medium is a recording paper P, the conveyance direction of the recording paper P in the inkjet recording apparatus 70 is represented by an arrow S as a sub-scanning direction, and the direction perpendicular to the conveyance direction is represented by an arrow M as a main scanning direction.

  As shown in FIG. 1, the ink jet recording apparatus 70 includes a carriage 76 on which black, yellow, magenta, and cyan ink jet recording units 72 are mounted. A bracket 78 projects from the carriage 76 on the upstream side in the conveyance direction of the recording paper P. The bracket 78 has a circular opening 78A. A shaft 80 installed in the main scanning direction is inserted through the opening 78A.

  A driving pulley 84 and a driven pulley 86 constituting the main scanning mechanism 82 are disposed on both ends in the main scanning direction. A timing belt 88 is wound around the driving pulley 84 and the driven pulley 86. The timing belt 88 is fixed to a carriage 76, and the carriage 76 can reciprocate in the main scanning direction.

  In addition, the inkjet recording apparatus 70 is provided with a sub-scanning mechanism 94 including a transport roller 90 and a discharge roller 92. From the paper feed tray 96 in which the recording paper P before image printing is placed in a bundle, the recording paper is supplied. P is fed one by one and conveyed in the sub-scanning direction at a predetermined pitch.

  Further, as shown in FIG. 2, each color ink jet recording unit 72 includes an ink jet recording head 74 and an ink tank 98 that supplies ink thereto, and is formed on the lower surface of the ink jet recording head 74. The plurality of nozzles 10 (see FIG. 3B) are mounted on the carriage 76 (see FIG. 1) so as to face the recording paper P.

  Accordingly, the ink jet recording head 74 selectively ejects ink droplets from the nozzles 10 to the recording paper P while moving in the main scanning direction by the main scanning mechanism 82 (see FIG. 1), whereby a predetermined band region BE is obtained. In contrast, a part of the image based on the image data is recorded.

  When one movement in the main scanning direction is completed, the recording paper P is conveyed at a predetermined pitch in the sub scanning direction by the sub scanning mechanism 94 (see FIG. 1), and again the ink jet recording head 74 (ink jet recording unit 72). While moving in the main scanning direction (the direction opposite to the above), a part of the image based on the image data is recorded in the next band area. By repeating such an operation a plurality of times, the entire image based on the image data is recorded in full color on the recording paper P.

  Next, the configuration of the ink jet recording head according to the embodiment of the present invention will be described.

  As shown in FIGS. 3A and 3B, the inkjet recording head 74 is provided with a common ink chamber 20 to which ink is supplied from an ink tank 98 (see FIG. 2). An opening 18 is provided in the common ink chamber 20, and the pressure chamber 14 communicates with the ink supply path 16 so that ink in the common ink chamber 20 is supplied.

  The inkjet recording head 74 includes a plurality of nozzles 10 arranged in a matrix and communicates with the pressure chamber 14 via the nozzle communication chamber 12. A vibration plate 30 having elasticity in the vertical direction is provided on the upper surface of the pressure chamber 14. As shown in FIG. 5, the piezoelectric bodies 42 are arranged in a matrix on the upper surface of the vibration plate 30 corresponding to the pressure chamber 14. Is arranged.

  All of the piezoelectric bodies 42 have substantially the same shape, and are formed to be slightly smaller than the rectangular pressure chamber 14 and are positioned above the pressure chamber 14 as shown in FIG. 42A and a circular portion 42B that is connected to the rectangular portion 42A and has a circular shape smaller than the rectangular portion 42A formed by bending from the end of the rectangular portion 42A.

  Further, as shown in FIG. 5, residual regions 44 are left between the rectangular portions 42 </ b> A of the piezoelectric bodies 42 adjacent in the column direction, and between the adjacent piezoelectric bodies 42 and between the piezoelectric bodies 42 and the residual regions 44. The piezoelectric body 42 is individualized by the through portion 40 formed in the above.

  The remaining region 44 has an elongated portion 44A between the rectangular portions 42A so that the penetration portion 40 has the same width in the entire peripheral portion of the piezoelectric body 42, and both ends (circular portions) of the elongated portion 44A. In the vicinity of 42B, wide portions 44B and 44C that are wider than the long portion 44A are formed.

  The wide portion 44B is connected to the circular portion 42B of the piezoelectric body 42 located above the long portion 44A by a connecting portion 150 having substantially the same width as the long portion 44A. The wide portion 44C is connected to a circular portion 42B of the piezoelectric body 42 provided adjacent to the piezoelectric body 42 by a connecting portion 152 having substantially the same width as the long portion 44A.

  As shown in FIG. 13C, the connecting portions 150 and 152 extend from the piezoelectric element 46 and extend from the piezoelectric body 42 and the remaining region 44, and extend from the common electrode 48 to the connecting portion 46A. The piezoelectric body 42 and the remaining region 44 are structurally connected by the connecting portion and the electrode portion constituting the connecting portions 150 and 152, but the upper electrode is removed. Therefore, it is electrically disconnected.

  On the other hand, the circular portion 42B shown in FIG. 4A serves as an electric pad portion for electrical connection, and the flexible substrate 36 is joined via the ball solder 34 (see FIG. 6F), so that a voltage is applied to the circular portion 42B. When applied, the rectangular portion 42A located above the pressure chamber 14 is deformed by electrostriction and becomes a drive unit that pressurizes the ink in the pressure chamber 14. As described above, when the ink in the pressure chamber 14 is pressurized, an ink droplet is ejected from the nozzle 10.

  As described above, the remaining region 44 and the piezoelectric body 42 are partially connected by the connecting portions 150 and 152, but the penetrating portion 40 is provided between the remaining region 44 and the piezoelectric body 42. Even when a voltage is applied to the piezoelectric body 42, the remaining region 44 does not deform together with the piezoelectric body 42.

  Next, a method for manufacturing the ink jet recording head 74 according to the embodiment of the present invention will be described.

  As shown in FIG. 6A, the ink jet recording head 74 includes a nozzle plate 21 in which the nozzles 10 (see FIG. 6B) are formed, and ink that forms the nozzle communication chamber 12 and the common ink chamber 20. The pool plates 22, 23, the through plate 24 that forms the opening 18 of the common ink chamber 20 and the nozzle communication chamber 12, the ink supply path plates 26, 27 in which the ink supply path 16 is formed, and the pressure chamber 14 The formed pressure chamber plate 28 is laminated and joined in order.

  Then, as shown in FIG. 6B, the surface of the nozzle plate 21 is covered with a water repellent coating film 19, and the nozzle 10 is formed by an excimer laser. As shown in FIG. After the formation, the vibration plate 30 is bonded to the pressure chamber plate 28.

  The material of the nozzle plate 21 is polyimide, and the materials of the ink pool plates 22 and 23, the through plate 24, the ink supply path plates 26 and 27, the pressure chamber plate 28, and the vibration plate 30 are SUS.

  The nozzle plate 21, ink pool plate 22, ink pool plate 23, through plate 24, ink supply path plates 26 and 27, pressure chamber plate 28, and vibration plate 30 are bonded using an adhesive. The bonded one is called a flow path plate unit 52.

  Here, separately, a piezoelectric unit 54 including a piezoelectric body 42 to which a voltage is applied and a remaining region 44 (see FIG. 5) to which no voltage is applied is created. A method for manufacturing the piezoelectric unit 54 will be described in accordance with the flowchart shown in FIG.

  First, in step 100, the piezoelectric material block is lapped to form a piezoelectric element plate 46P having a desired thickness.

  Next, in step 102, as shown in FIG. 8A, electrodes are formed on the upper and lower surfaces of the piezoelectric element plate 46P by sputtering or the like. Then, as shown in FIG. 8B, the piezoelectric plate 58 is obtained by dicing into a rectangular shape.

  Next, in step 104, the diced piezoelectric plate 58 is peeled off by a peelable adhesive such as a heat-foamable adhesive film 57 (heated at a predetermined temperature after bonding, as shown in FIG. 8C). The adhesive force is greatly reduced), and is temporarily bonded to the fixed substrate 56.

  In step 106, a blast mask 62 is affixed on the electrodes of the piezoelectric plate 58 temporarily bonded.

  As shown in FIG. 9, the blast mask 62 is configured by attaching a piezoelectric body 42 (see FIG. 5) and masks 64, 66 in the shape of the remaining region 44 to a sheet, and between the masks 64, 66. A gap 68 is formed in the.

  The mask 64 and the mask 66 that are adjacent to each other in the horizontal direction are connected by connecting portions 67 and 69. As a result, the mask 66 is not completely individualized, but is partially continuous with the adjacent mask 64.

  The blast mask 62 is affixed onto the piezoelectric plate 58 as shown in FIG. In step 108, as shown in FIG. 10B, blast abrasive grains are sprayed from above the blast mask 62 to perform blasting.

  As a result, as shown in FIG. 10C, the portion of the piezoelectric plate 58 covered with the blast mask 62 (the piezoelectric member 42 and the remaining region 44) is not ground and corresponds to the gap 68 (see FIG. 9). The etched portion is ground to form the piezoelectric body 42 and the remaining region 44. At this time, connecting portions 150 and 152 are also formed between the piezoelectric body 42 and the remaining region 44 to connect them.

  In step 110, the blast mask 62 on the piezoelectric plate 58 is removed as shown in FIG.

  After the blast mask 62 is removed from the piezoelectric plate 58, an adhesive is applied to the piezoelectric plate 58 in step 112, and this surface is used as the diaphragm of the flow path plate unit 52 as shown in FIG. Then, the fixed substrate 56 is pressed while being heated.

  Then, as shown in FIG. 11B, the fixed substrate 56 is removed. As a result, as shown in FIG. 11C, the piezoelectric plate 58 is pressure-bonded onto the diaphragm 30, and the individualized piezoelectric body 42, the remaining region 44, and the connecting portions 150 and 152 are bonded to the diaphragm 30. Is done.

  Here, the connecting portions 150 and 152 are formed on the connecting portion 46A extending from the piezoelectric element 46 and positioned between the piezoelectric body 42 and the remaining region 44, and on both surfaces (upper and lower surfaces) of the connecting portion 46A extending from the common electrode 48. (Hereinafter, for convenience of explanation, the electrode on the upper surface is referred to as “individual electrode 50”, and the electrode on the lower surface is referred to as “common electrode 48”). It is in the state electrically connected by 152.

  Therefore, in step 114, a mask for removing only the individual electrodes 50 of the connecting portions 150 and 152 is formed, and this mask is attached on the piezoelectric body 42 and the remaining region 44 to perform an etching process. As a result, as shown in FIGS. 11D and 12B, only the individual electrodes 50 of the connecting portions 150 and 152 are removed by etching, and the piezoelectric body 42 and the remaining region 44 are electrically disconnected from each other. It becomes.

  An ink jet recording head 74 manufactured by the above manufacturing method is shown in FIG. 13A is a plan view of the inkjet recording head 74, FIG. 13B is a cross-sectional view taken along the line BB of FIG. 13A, and FIG. 13C is FIG. It is CC sectional drawing of.

  As shown in FIG. 13B, the piezoelectric body 42 is almost completely individualized for each pressure chamber 14. Further, as shown in FIG. 13C, the remaining region 44 is connected to the piezoelectric body 42 by a connecting piece 46 </ b> A extending from the piezoelectric element 46 constituting the connecting portions 150 and 152. Since the individual electrode 50 is removed, the piezoelectric body 42 and the remaining region 44 are electrically disconnected.

  With such a configuration, when the piezoelectric body 42 is formed by blasting, there is no possibility that the blast mask is displaced and the remaining region 44 is peeled off or the shape is deformed.

  In the present embodiment, the individual electrodes 50 of the connecting portions 150 and 152 are removed, so that the piezoelectric body 42 and the remaining region 44 are electrically disconnected from each other. However, FIGS. 14A and 14B ), The piezoelectric body 42 and the remaining region 44 may be electrically disconnected by removing not only the connecting portions 150 and 152 but also the individual electrodes 50 in the entire remaining region 44.

  Next, a method for manufacturing the piezoelectric unit 54 constituting the ink jet recording head 74 according to the second embodiment of the present invention will be described in accordance with the flowchart shown in FIG. In addition, about the structure similar to 1st Embodiment, the same code | symbol as 1st Embodiment is provided and the description is abbreviate | omitted.

  First, in step 120, as shown in FIG. 16A, the piezoelectric material block is lapped to form a piezoelectric element plate 46P having a desired thickness.

  Next, in step 122, as shown in FIG. 16B, electrodes are formed on the upper and lower surfaces of the piezoelectric element plate 46P by sputtering or the like.

  Then, in step 124, a mask for removing the portions that become the connecting portions 150 and 152 of the individual electrode 50 is formed, and this mask is attached onto the individual electrode 50 to perform an etching process.

  Accordingly, as shown in FIGS. 16C and 17, the individual electrode 50 is removed so as to surround the region corresponding to the connecting portions 150 and 152 (see FIG. 5), and the portion from which the individual electrode 50 is removed. Then, the connecting piece 46 </ b> A extending from the piezoelectric element 46 and positioned between the piezoelectric body 42 and the remaining region 44 is exposed. FIG. 17 is a diagram showing a state in which the piezoelectric element plate 46P having the common electrode 48 formed on the upper surface and the individual electrode 50 formed on the lower surface is viewed from the individual electrode 50 side. The piezoelectric element plate 46P is diced into a rectangular shape to form a piezoelectric plate 58.

  Next, in step 126, the diced piezoelectric plate 58 is peeled off by a peelable adhesive such as a heat-foamable adhesive film 57 (heated at a predetermined temperature after bonding, as shown in FIG. 16D). The adhesive force is greatly reduced), and is temporarily bonded to the fixed substrate 56.

  Then, in step 128, a blast mask 62 is attached on the temporarily bonded common electrode 48 of the piezoelectric plate 58, and in step 130, as shown in FIG. Blasting is performed by spraying grains.

  As a result, as shown in FIG. 16F, the portion of the piezoelectric plate 58 covered with the blast mask 62 (the piezoelectric member 42 and the remaining region 44) is not ground and corresponds to the gap 68 (see FIG. 9). The etched portion is ground to form the piezoelectric body 42 and the remaining region 44. At this time, connecting portions 150 and 152 are also formed between the piezoelectric body 42 and the remaining region 44 to connect them.

  In step 132, the blast mask 62 on the piezoelectric plate 58 is removed.

  After the blast mask 62 is removed from the piezoelectric plate 58, in step 134, an adhesive is applied to the piezoelectric plate 58, and this surface is laminated facing the diaphragm 30 of the flow path plate unit 52, and heated. While pressing the fixed substrate 56, the fixed substrate 56 is removed.

  An ink jet recording head 74 manufactured by the above manufacturing method is shown in FIG. 18A is a plan view of the inkjet recording head 74, FIG. 18B is a cross-sectional view taken along line BB in FIG. 18A, and FIG. 18C is FIG. It is CC sectional drawing of.

  As shown in FIG. 18B, the piezoelectric body 42 is almost completely individualized for each pressure chamber 14. Further, as shown in FIG. 18C, the remaining region 44 is connected to the piezoelectric body 42 by a connecting portion 46A constituting the connecting portions 150 and 152, but the individual electrodes 50 of the connecting portions 150 and 152 are connected. Since it is removed, the piezoelectric body 42 and the remaining region 44 are electrically disconnected.

  In this way, after removing a part of the individual electrodes 50 (individual electrodes 50 on the connecting portions 150 and 152) of the remaining region 44 connected to the piezoelectric body 42, the piezoelectric body 42 and the remaining region 44 are connected. Thus, since the piezoelectric body 42 and the remaining area 44 are separated from the piezoelectric element plate 46P by blasting, it is not necessary to remove the individual electrode 50 after joining the piezoelectric body 42 and the remaining area 44 to the diaphragm 30.

  In the present embodiment, the piezoelectric body 42 and the remaining region 44 are formed by a blasting method, but these may be formed by an etching method.

  Further, in the ink jet recording apparatus 70 of the above embodiment, black, yellow, magenta, and cyan ink jet recording units 72 are mounted on the carriage 76, and the ink jet recording heads 74 of these colors are selectively selected based on image data. Although ink droplets are ejected and a full-color image is recorded on the recording paper P, ink jet recording in the present invention is not limited to recording characters and images on the recording paper P.

  That is, the recording medium is not limited to paper (recording paper P), and the liquid to be ejected is not limited to ink. For example, it is used industrially, such as creating color filters for displays by ejecting ink droplets on polymer film or glass, or forming bumps for component mounting by ejecting welded solder onto a substrate. The inkjet recording head 74 according to the present invention can be applied to all droplet ejecting apparatuses.

  In the ink jet recording apparatus 70 of the above embodiment, the example of the partial width array (PWA) having the main scanning mechanism 82 and the sub scanning mechanism 94 has been described. However, the ink jet recording in the present invention is not limited to this, and the paper width A corresponding so-called Full Width Array (FWA) may be used. Rather, since the present invention is effective for realizing a high-density nozzle arrangement, it is suitable for FWA that requires one-pass printing.

  Furthermore, the shape of the blast mask is not limited to that shown in FIG. 9 of the present embodiment. For example, as shown in FIG. 19A, the mask 154 and the mask 156 are connected by a wide connecting portion 158. It is good also as the shape made to do. In addition, as shown in FIGS. 19B and 19C, when the piezoelectric body portion 160 is rectangular, the remaining region portions 162 provided between the adjacent piezoelectric body portions 160 in the column direction are arranged. The remaining region 162 and the piezoelectric body 160 may be connected by connecting portions 164 and 166.

1 is a perspective view showing an ink jet recording apparatus to which an ink jet recording head according to a first embodiment of the present invention is applied. It is a perspective view which shows the inkjet recording unit to which the inkjet recording head was applied. (A) is a perspective view which shows the structure of an inkjet recording head, (B) is the elements on larger scale of (A). (A) is an enlarged view showing a piezoelectric body of an ink jet recording head, and (B) is a cross-sectional view taken along the line BB of (A). It is a top view which shows the piezoelectric material of an inkjet recording head. (A)-(F) are process drawings which represent the manufacturing process of an inkjet recording head typically. It is a flowchart which shows the process of manufacturing the piezoelectric material of an inkjet recording head. (A)-(C) are explanatory drawings which show the manufacturing method of a piezoelectric plate. It is a top view which shows the mask used for the manufacturing process of a piezoelectric material. (A)-(D) are process drawings which represent the process of the sandblasting to a piezoelectric plate typically. (A)-(C) are explanatory drawings which show the process of attaching a piezoelectric plate to a diaphragm. (A), (B) is explanatory drawing which shows the process of individualizing the piezoelectric material attached to the diaphragm. (A) is a top view of an inkjet recording head, (B) is a BB cross-sectional view of (A), and (C) is a CC cross-sectional view of (A). It is a top view of the inkjet recording head of another form, (B) is BB sectional drawing of (A). It is a flowchart which shows the process of manufacturing the piezoelectric material of the inkjet recording head which concerns on the 2nd Embodiment of this invention. (A)-(C) are explanatory drawings which show the manufacturing method of a piezoelectric plate, (D)-(F) is process drawing which represents the process of the sandblasting to a piezoelectric plate typically. It is explanatory drawing which shows the state which looked at the inkjet recording head from the individual electrode side. (A) is a top view of an inkjet recording head, (B) is a BB cross-sectional view of (A), and (C) is a CC cross-sectional view of (A). It is a top view which shows the mask used for the manufacturing process of the piezoelectric material of the inkjet recording head of another form.

Explanation of symbols

14 Pressure chamber 30 Diaphragm 42 Piezoelectric body 44 Remaining region 46 Piezoelectric element 46P Piezoelectric element plate 48 Common electrode (electrode)
50 Individual electrode (electrode)
58 Piezoelectric Plate 70 Inkjet Recording Device (Droplet Discharge Device)
74 Inkjet recording head (droplet ejection head)

Claims (5)

In a liquid droplet ejection head comprising a piezoelectric body in which electrodes are formed on the upper and lower surfaces of a piezoelectric element plate, and a piezoelectric body that is individualized for each pressure chamber and a remaining region that is left uncut,
The droplet discharge head according to claim 1, wherein a piezoelectric element constituting the piezoelectric body is connected to the remaining region, and an electrode in the remaining region is partially or entirely removed.   The droplet discharge head according to claim 1, wherein the remaining area is connected to another adjacent remaining area. A first step of attaching a piezoelectric plate having electrodes formed on the upper and lower surfaces of the piezoelectric element plate to a fixed substrate;
Cutting into individualized piezoelectric bodies for each pressure chamber and leaving a remaining region connected to the piezoelectric bodies;
A third step of joining the piezoelectric body and the remaining region to a diaphragm constituting the pressure chamber;
A fourth step of removing a part or all of the electrode in the remaining region connected to the piezoelectric body;
A method for manufacturing a droplet discharge head, comprising: A first step of removing a part or all of the remaining region of the electrode connected to the piezoelectric body from the piezoelectric plate having electrodes formed on the upper and lower surfaces of the piezoelectric element plate;
A second step of affixing the side of the piezoelectric plate from which the electrode of the remaining region has been removed to a fixed substrate;
Cutting into individualized piezoelectric bodies for each pressure chamber and leaving a remaining region connected to the piezoelectric body;
A fourth step of joining the piezoelectric body and the remaining region to a diaphragm constituting the pressure chamber;
A method for manufacturing a droplet discharge head, comprising:   A droplet discharge apparatus comprising the droplet discharge head according to claim 1.

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