JP2008068888A - Holding member of identification component, and substrate storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a holding member of an identification component, which can fit a plurality of identification components, and attaches/detaches them to/from a substrate storage container, and also to provide a holding member of an identification component having a water-draining through hole convenient for cleaning. <P>SOLUTION: The holding member 4 of the identification component to be fitted to a substrate storage container for storing precision substrates has: a base part 6; and a front wall part 7 and a side wall part 8 erecting from the base part. A locking part for fixing the holding member to the substrate storage container is provided on the side wall part erected on both side parts of the base part, and a wall face 29 for displaying a bar code and a pair of card case holding parts 30 for holding a card case are erected on the front wall part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate storage container for storing a precision substrate such as a semiconductor wafer, and more particularly to a holding member for an identification component attached to the substrate storage container.

2. Description of the Related Art Conventionally, there is known a substrate storage container that is used for carrying a precision substrate (hereinafter sometimes simply referred to as a substrate) to a semiconductor production factory or for transporting and storing between processes in the semiconductor production factory.
As such a substrate storage container, one having a card holder for holding a process management card has been used (see Patent Document 1). Not only process management cards but also various identification parts such as barcodes, RFID tags, infopads, etc. have been used, but card cases that store identification parts holding members and process communication tables are stored on the board. It was used by being individually adapted to the specifications of the factory that uses the container. These holding members and card cases are for holding and storing a single identification part or card case (hereinafter also referred to as an identification part), and a separate one is prepared for each company / factory / line. There was a need.

Attempts have also been made to use holding members and card cases that can accommodate a plurality of identification components. For example, an attempt to attach a card case that can handle a plurality of cards to the back of the substrate storage container (see Patent Document 2) and the orientation of the responder (ID tag) (non-contact type information medium) can be changed to a plurality of directions. (Refer to Patent Document 3).
However, these attempts also correspond to the same identification component, and no attempt has been made to attach different identification components.

Such a substrate storage container may be used with a plurality of identification parts attached. In that case, a holding part or a card holder (card case, hereinafter also referred to as an attachment part or a holding part) corresponding to the type of identification part to be used. ) Had to be prepared.
Preparing multiple types of mounting parts is troublesome in terms of management and has a problem that it cannot cope with a sudden specification change. In addition, since conventional drainage parts do not take into account the drainability after washing, there is a concern that it takes time to dry after washing, and that residual moisture adversely affects the substrate storage container. It was.

JP-A-4-225257 JP 2004-55868 A International Publication No. WO04 / 0779818

  In view of the above circumstances, the present invention provides an identification component holding member that can be attached to and detached from a substrate storage container, to which a plurality of identification components can be attached, and includes a drainage through hole that is convenient for cleaning and the like. It is an object to provide a holding member for an identification component.

An identification component holding member of the present invention is for solving the above-described problem, and is an identification component holding member attached to a substrate storage container for storing a precision substrate, wherein the holding member includes a base and a base. A front wall portion and a side wall portion that rise from the side wall portion, and the side wall portion that is erected on both sides of the base portion and faces each other is provided with a locking portion for fixing the holding member to the substrate storage container, The front wall portion is provided with a wall surface for displaying a barcode and a pair of card case holding portions for holding a card case.
The card case holding part has an L-shaped card case holding surface, and the card case holding surface holds one side and both sides of the card case so as to be in contact with each other, and supports the card case from the other end. It is preferable that a space for allowing a precise substrate to be confirmed is formed between the card case holding portion and the column portion.

Further, at least one holding portion for holding the RFID tag is formed on the base portion and / or the front wall portion, and a through hole is provided in the base portion. The through hole has a through hole. It is possible to attach an InfoPad component that holds identification information in the form of a plug that closes the surface, and a portion partitioned by a rib protruding from the base of the base is provided with one or a plurality of draining through holes for draining Preferably it is.
In addition, the substrate storage container of the present invention has a locking portion capable of fixing the holding member for the identification component as described above, and the identification member is attached to the holding member.

According to the present invention, it is possible to hold a plurality of different types of identification parts and process management tables with a single part (holding member), which can reduce costs, facilitate parts inventory and product management, and quickly. It is possible to respond to various specification changes.
Moreover, since the drainage through-holes are formed everywhere, drainage after washing is good and productivity is improved.

  The present invention is based on the fact that it is possible to provide a substrate storage container with two or more types of identification parts. The types of identification parts that can be applied in the present invention are not particularly limited, and can include ordinary barcodes, RFID tags, infopads, and process communication tables. Here, the barcode may be a two-dimensional barcode such as PDF, QR, DATA MATRIX, etc. in addition to the bar-shaped barcode. In addition, the barcode may be printed on a label, affixed to the wall, or directly processed by laser marking. A transparent protective film is coated on the barcode surface with a heat seal or ultrasonic seal. Also good.

RFID stands for R adio F requency Id entification, is an electronic device for reading and writing data using radio waves. A system using RFID is configured by individually attaching an RFID tag to a substrate storage container as a responder, and arranging a host computer, a workstation, an interrogator (reader / writer), etc. in a semiconductor production process.
The interrogator is composed of a controller, a transceiver, and an antenna, and exchanges information with a host computer or workstation under the control of the interrogator. This interrogator has a function of reading and confirming or writing information on the responder, and is installed in a device in which the substrate storage container is used or a predetermined device in the process.

An RFID tag (responder) is composed of an antenna, a transceiver, and a memory, and is installed in a precision substrate storage container to store (record) a lot of semiconductor wafers, processing in the process, or processing progress.
In such an RFID system, it is possible to manage the process while reading the data of the RFID tag and performing confirmation and rewriting. As the RFID tag, an antenna, a transceiver, and a memory enclosed in a cylindrical casing such as glass or resin, or a film sandwiched between two layers of films is used.

The infopad is a sensor that is used to detect the type of substrate storage container and the number of substrates stored when the substrate storage container is mounted on the substrate processing apparatus. However, it is detected whether there is a through-hole or a recess where the sensor is not detected at a predetermined position of the container body, or whether the through-hole or the recess is blocked by the infopad plug and detected. This is to confirm the specifications of the base storage container by combining the results.
The info pad plug only needs to have a surface to be detected that can be locked to the periphery or the vicinity of the through hole or the concave portion and detected by the sensor.

The infopad has a disk to be detected and at least two locking claws protruding on the opposite side of the disk to be detected, or a disk to be detected and a disk smaller than this disk A cylindrical member having a diameter and extending to the opposite side of the surface to be detected may be used.
The cylindrical end portion may be an opening, and a locking claw may be formed on at least a part of the end portion, and the periphery of the through hole may be sandwiched by cooperation with a disk. Or it is a cylindrical member extended on the opposite side to a to-be-detected surface and a to-be-detected surface, and this may be meshed | engaged with the latching claw provided in the predetermined position of the board | substrate storage container.

The substrate storage container of the present invention is a container that includes a housing having an opening at least at one of the front, the plane, or the bottom, and can store a substrate horizontally or vertically inside. In addition, a sealed container in which the opening of the casing is closed so as to be sealed with a lid, a container for storing a cassette or jig for storing a substrate in the casing, and the like can be used.
Either a lid that opens and closes manually or one that incorporates a latch mechanism that can be automatically operated from the outside can be used.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is an exploded perspective view showing a substrate storage container according to an embodiment of the present invention.
FIG. 2 is a perspective view showing the identification component holding member according to the embodiment of the present invention.
FIG. 3 is a front view illustrating the identification component holding member according to the embodiment of the present invention.
FIG. 4 is a plan view illustrating the identification component holding member according to the embodiment of the present invention.
FIG. 5 is an enlarged explanatory perspective view of the corner portion of the holding portion of the identification component of the present invention.
FIG. 6 is a bottom view illustrating a state in which the identification component holding member according to the embodiment of the present invention is attached to the container body.
7A is a perspective view showing an identification component (infopad) according to an embodiment of the present invention, and FIG. 7B shows an identification component (infopad) according to another embodiment of the present invention. It is a perspective view.
8A is a plan view showing an identification component (RFID tag) according to an embodiment of the present invention, FIG. 8B is a partial cross-sectional view thereof, and FIG. 8C is another embodiment of the present invention. It is an explanatory elevational view showing the identification component (RFID tag).
FIG. 9 is an explanatory perspective view illustrating a state in which the process management table is attached to the identification component holding member according to the embodiment of the present invention.

  In FIG. 1, the substrate storage container has an opening in the front, a container body 1 having a pair of substrate support portions 3 that horizontally support a precision substrate (not shown) at regular intervals, and the opening of the container body 1 is closed. The identification component holding member 4 can be attached to the back surface. A pair of locking grooves 5 (FIG. 6) for fixing the identification component holding member 4 are formed on the bottom surface of the container body 1 so as to protrude from the bottom surface.

2 is a perspective view, FIG. 3 is a front view, FIG. 4 is a plan view, FIG. 5 is an enlarged explanatory perspective view of a corner portion, and as shown in FIG. It consists of a plate-like base 6 attached in parallel to the bottom surface, a front wall 7 rising from one end of the base 6 so as to be parallel to the rear side wall of the container body 1, and a pair of side walls 8. . It is preferable that the corner portions of the base portion and the front wall portion 7 have curved surfaces of R2 to R20 so that the laminate bag for packing the substrate storage container is not torn even if it is impacted.
Both side wall portions 8 of the base portion 6 project from the end portion of the base portion 6 in an L-shaped cross section, and a pair of fixing portions 9 having locking claws 10 that engage with the locking grooves 5 (FIG. 6) of the substrate storage container are provided. Is formed. Thereby, the identification component holding member 4 is fixed to the substrate storage container.

On the other end side of the base portion 6, a U-shaped cutout portion 11 having a substantially U shape is formed along the center line in the width direction, and a plate shape separated left and right by the U-shaped cutout portion 11. A plurality of through-holes 12 having different radii are formed symmetrically in the base portion 6, and an info pad (component) 16 (FIG. 7) is attached so as to block these through-holes 12 as necessary. It is done.
As shown in FIG. 2, the through-hole 12 has a concentric outer circumference circle 13 having a large diameter and an inner circumference circle 14 having a small diameter. The outer circumference circle 13 and the inner circumference circle 14 are A step portion 15 is formed between them.

An example of an info pad (component) 16 that is one of the identification members of the present invention is shown in FIG. In the embodiment shown in FIG. 7A, the diameter is larger than the inner circumferential circle 14 of the through-hole 12, and the diameter is smaller than the flat portion 17 to be detected and the inner circumferential circle 14. A fixing claw 19 that protrudes outward in the radial direction so as to sandwich the stepped portion is formed at the end of the cylindrical portion 18. FIG. 7B shows an infopad component 16 according to another embodiment, and the fixing claw 19 is an example formed at a plurality of locations instead of the entire circumference.
In this case, instead of the cylindrical portion extending from the flat portion, a plurality of support portions 20 for supporting the fixed claws are provided, and the fixed claws 19 are provided there.

As shown in FIG. 2 (upper surface side) and FIG. 4 (lower surface side), a reinforcing rib 22 (FIG. 2) is provided on the upper surface of the flat surface 21 (the lower surface in FIG. 4) of the base 6 of the identification component holding member 4. ) Are formed, and each of the sections surrounded by the ribs 22 has one or more triangular or quadrangular drainage holes 23 (drainage through holes) for improving drainability when washed. Is formed.
On the opposite side of the one end side where the U-shaped notch 11 is provided, that is, the other end side, straddling the center line in the left-right direction, along the center line, FIG. As shown to b), in order to hold | maintain the RFID tag 24, the 1st holding groove 25 (refer also FIG. 9) which protrudes in the bottom face direction is formed in the vicinity of the center line.

The first holding groove 25 accommodates the cylindrical RFID tag 24, and a locking projection 26 for holding the RFID tag 24 is formed so as to face the center line direction from the left and right side walls. It is fixed in the line direction.
In addition, a second holding groove 27 formed with a locking projection 28 for holding the RFID tag in a direction perpendicular to the center line is provided at one end of the base portion 6. In the illustrated example, the first holding groove is shown at one end portion of the lower surface of the base portion, and the second holding groove is shown at one end portion of the upper surface of the base portion, but the installation position is limited to these. It is not a thing, and it does not interfere even if the upper and lower surfaces of a base are reversed, and it does not matter at an internal part instead of one end.
In this way, since the directivity of the RFID tag can be changed and held, even a factory with different equipment specifications (transmission / reception direction) of the RFID tag can be handled by changing the direction of the RFID tag.

  The RFID tag is a cylindrical RFID tag, and a holding groove for holding the RFID tag is provided. However, when a film-like RFID (not shown) is used, the flat portion of the base portion or the front wall portion is used. It can be affixed to the flat part through heat sealing, ultrasonic sealing, or adhesive. A protective film can also be provided so as to cover such a film-like RFID tag.

Near the center of one end of the base, a barcode display wall surface 29 (FIG. 3) is formed that rises substantially vertically from here. A barcode label can be attached to the barcode display wall surface 29 or can be directly written by laser marking. The barcode may be a two-dimensional barcode such as PDF, QR, DATA MATRIX.
Further, a protective film may be attached to the surface of the bar code label with a heat seal or the like.

  On both sides of one end of the base portion, a pair of card case holding portions 30 standing upright so as to surround the barcode display wall surface, and a card case holding portion 30 positioned on the back side of the barcode display wall surface. The card case 33 (FIG. 5) that has been pointed into is provided with a pair of support columns 31 that support the card case 33 so that it does not fall out. A protrusion 34 that protrudes toward the card case can be provided in the vicinity of the lower end of the card case of the support column in order to bend and hold the card case with the holding portion (FIG. 5). The holding force of the card case can be adjusted by the protrusion amount of the protrusion. Further, the inner side of the upper side of the barcode display wall surface can also prevent the card case central portion from being bent. An elongated space portion 32 is formed between the card case holding portion 30 and the support column portion 31, and the total number of substrates stored inside can be confirmed from the back surface of the substrate storage container.

Figure 9 is representative of the state of attaching the process management table to identify the component holding member, is sandwiched by the pair of the card case holder 30, the card cases 33 is shown being held. The card case includes a transparent sheet-like casing having an opening at one end, a card-like process communication table inserted into the casing through the opening, and a process management table. Thus, by displaying a contact table etc. using a card case, the operator's confirmation mistake in the case of a small lot, an emergency prototype, etc. can be prevented.

  In the illustrated example, a surface for displaying a barcode, a card case holding part for holding a card case, a holding part (first and second holding grooves) for holding an RFID tag, and a through hole for holding an infopad (component) are provided. An example that combines all and has a drain through hole is shown, but this is not necessarily limited to this, and it is possible to reduce costs, inventory of parts and products by dealing with any two or more types of identification parts Needless to say, it is easy to manage and can respond to sudden specification changes. Moreover, if it corresponds to 2 or more types of identification components, an effect will be acquired irrespective of the presence or absence of a water drain through hole.

  According to the present invention, since it can cope with other types of identification parts, it can be used as a carrier case regardless of differences in identification systems in companies, factories, and lines. There is no need to pay attention, and this is a big advantage in the technical field of transferring and storing substrates.

It is an expansion perspective view showing a substrate storage container of an embodiment of the present invention. It is a perspective view showing the identification component holding member of embodiment of this invention. It is a front view showing the identification component holding member of embodiment of this invention. It is a top view showing the identification component holding member of embodiment of this invention. It is a corner part expansion explanatory perspective view of the holding | maintenance part of the identification component of this invention. It is a bottom view showing the state which attached the identification component holding member of embodiment of this invention to the container main body. (A) is a perspective view showing the identification component (info pad) of one embodiment of the present invention, and (b) is a perspective view showing the identification component (info pad) of another embodiment of the present invention. . (A) is a plan view showing an identification component (RFID tag) according to one embodiment of the present invention, (b) is a partial cross-sectional view thereof, and (c) is an identification component (an identification component) according to another embodiment of the present invention ( It is an explanatory elevational view showing an RFID tag. It is explanatory perspective view showing the state which attached the process management table | surface to the identification component holding member of embodiment of this invention.

Explanation of symbols

1: Container body 2: Cover body 3: Substrate support part 4: Holding member 5 (of identification part): Locking groove 6: Base part 7: Front wall part 8: Side wall part 9: Fixing part 10: Locking claw 11: U-shaped notch 12: through hole 13: outer circle 14: inner circle 15: step 16: infopad (component)
17: Flat portion 18: Cylindrical portion 19: Fixed claw 20: Support portion 21: Flat surface (of base) 22: Rib 23: Drainage hole (drainage through hole)
24: RFID tag 25: First holding groove 26: Locking protrusion 27 (for the first holding groove) 27: Second holding groove 28: Locking protrusion 29 (for the second holding groove) 29: Bar code Display wall 30: card case holding part 31: support part 32: space part 33: card case 34: protrusion

Claims (7)

  An identification component holding member attached to a substrate storage container for storing a precision substrate, wherein the holding member has a base portion, a front wall portion and a side wall portion rising from the base portion, and is erected on both sides of the base portion. The side wall portions facing each other are provided with a locking portion for fixing the holding member to the substrate storage container, and the front wall portion has a wall surface for displaying a barcode and a pair of cards for holding the card case. An identification component holding member, wherein a card case holding portion is erected.   The card case holding part has an L-shaped card case holding surface, and the card case holding surface holds one side and both sides of the card case so as to be in contact with each other, and supports the card case from the other end. The identification component holding member according to claim 1, further comprising a support portion.   The identification member holding member according to claim 1, wherein a space in which a precision substrate can be confirmed is formed between the card case holding portion and the support column portion.   The identification member holding member according to claim 1, wherein at least one holding portion for holding an RFID tag is formed on the base portion and / or the front wall portion.   The base portion is provided with a through hole, and an info pad component that holds identification information in a plug shape that closes the through hole can be attached to the through hole. Identification component holding member.   6. The identification member holding member according to claim 1, wherein one or a plurality of draining through holes for draining are provided in a portion partitioned by a rib protruding from the base of the base.   A substrate storage container for storing a precision substrate, comprising a locking portion capable of fixing the holding member of the identification component according to any one of claims 1 to 6, wherein the identification member is attached to the holding member. A substrate storage container.

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