JP2008032673A - Method and apparatus for inspecting rolling device component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method for quickly measuring the thickness of a coating formed on the surface of a rolling device component, such as a track wheel without causing increase in cost. <P>SOLUTION: A means for measuring the thickness of the coating formed on a surface of the rolling device component such as the track wheel uses a magnetic induction sensor 4 comprising an AC magnetic field forming coil 4a for forming an AC magnetic field in a space containing a coating formed face of the rolling device component; and a detection coil 4b for utilizing a magnetic induction phenomenon, and detecting the changes in the AC magnetic field formed by the AC magnetic field forming coil 4a, and measures the thickness of the coating, based on the change in an induced electromotive force generated in the detection coil 4b of the magnetic induction sensor 4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a technique for measuring and inspecting the thickness of a coating film formed on the surface of a rolling device component of a rolling device such as a rolling bearing, a ball screw, and a linear motion guide bearing device, and the conductivity of the rolling device component.

  When rolling bearings such as ball bearings are used as spindle support bearings for machine tools, for example, a coating made of diamond-like carbon (DLC) or the like is used to improve the seizure resistance and wear resistance of the bearing rings and rolling elements. May be formed on the raceway surface of the raceway or the surface of the rolling element (see, for example, Patent Document 1). In this case, if the thickness of the coating formed on the raceway surface of the race or the surface of the rolling element is too thick or too thin, the coating may peel off. It is necessary to inspect whether the thickness is appropriate.

As a method for measuring the thickness of the coating formed on the surface of rolling device parts such as races and rolling elements and checking whether the thickness is appropriate, ultrasonic flaw detection is used. For example, there is a method of measuring the thickness of the coating by using it and inspecting whether or not the thickness is an appropriate thickness.
In addition, when a rolling bearing such as a ball bearing is used as a motor shaft support bearing of an electric motor, for example, when a motor current flows in a portion that supports the motor shaft, corrosion called electric corrosion occurs in the rolling bearing, This will shorten the life of the rolling bearing. For this reason, when the rolling bearing is used as a rotating shaft support bearing for various electric devices or an axle support bearing for a railway vehicle, an insulating coating made of ceramics or synthetic resin is formed on the surface of the outer raceway or inner raceway. In many cases, current is prevented from flowing through the rolling bearing (see, for example, Patent Document 2). In this case, if the thickness of the insulating coating formed on the surface of the outer race or the inner race is too thin, it becomes difficult to prevent electrolytic corrosion. Therefore, the conductivity of the rolling bearing is measured and the conductivity is measured. It is necessary to check whether or not the electric conductivity is appropriate.

As a method of measuring the electrical conductivity of a rolling bearing and checking whether the electrical conductivity is appropriate, the electrical resistance value between the shaft and the bearing housing is measured, and the electrical conductivity is determined from the measurement result. There is a method of inspecting whether or not the electric conductivity is appropriate (for example, see Patent Document 3), or a method of measuring the electric resistance value of the rolling bearing by applying a high voltage to the rolling bearing.
JP 2003-254341 A JP 2002-48145 A JP 2003-259598 A

However, the method of measuring the thickness of the film using the ultrasonic flaw detection method and inspecting whether the thickness is an appropriate thickness has a problem that the inspection time becomes long. In addition, since an ultrasonic medium is used, there is a problem that a process such as cleaning is required and the cost is increased.
In addition, the method described in Patent Document 2 has a problem that an apparatus for measuring conductivity becomes large, and it takes time and effort.

The present invention has been made paying attention to the above-mentioned problems, and its purpose is to measure the thickness of the coating formed on the surface of the rolling device component in a short time without incurring an increase in cost. Another object of the present invention is to provide a rolling device component inspection method and a rolling device component inspection device.
Another object of the present invention is to provide a rolling device component inspection method and a rolling device component capable of measuring the electrical conductivity of the rolling device component having an insulating coating on the surface without requiring much labor and time. It is to provide an inspection apparatus.

  The method for inspecting a rolling device part according to the invention of claim 1 is a method for measuring the thickness of the coating formed on the surface of the rolling device component, and as a means for measuring the thickness of the coating, An alternating magnetic field forming coil for forming an alternating magnetic field in a space including the film forming surface of the rolling device part, and a detecting coil for detecting a change in the alternating magnetic field formed by the alternating magnetic field forming coil by an electromagnetic induction phenomenon The thickness of the coating is measured from a change in induced electromotive force generated in the detection coil of the electromagnetic induction sensor.

  The method for inspecting a rolling device part according to the invention of claim 2 is a method for measuring the electrical conductivity of the rolling device part having an insulating coating on the surface thereof, and as a conductivity measuring means for measuring the electrical conductivity, An AC magnetic field forming coil for forming an AC magnetic field in a space including the insulating film forming surface of the rolling device part, and a detection for detecting a change in the AC magnetic field formed by the AC magnetic field forming coil by an electromagnetic induction phenomenon An electromagnetic induction sensor comprising a coil is used, and the conductivity of the rolling device component is measured from a change in induced electromotive force generated in the detection coil of the electromagnetic induction sensor.

A method for inspecting a rolling device part according to a third aspect of the invention is the method for inspecting a rolling device part according to the second aspect, wherein the insulating coating is formed on a surface of the rolling bearing part of the rolling bearing for preventing electric corrosion. It is an insulating layer.
According to a fourth aspect of the present invention, there is provided a rolling device component inspection method according to the second or third aspect, wherein the insulating coating is made of ceramic.

According to a fifth aspect of the present invention, there is provided the rolling device component inspection method according to any one of the first to fourth aspects, wherein the change in electromotive force generated by electromagnetic induction is an amplitude or Whether or not the thickness of the film or the conductivity is an appropriate value is inspected with a threshold value when the amount of phase change becomes a predetermined value.
A rolling device part inspection device according to a sixth aspect of the invention is a device for measuring the thickness of a coating film formed on the surface of the rolling device component, and includes a coating forming surface of the rolling device component. An alternating magnetic field forming coil that forms an alternating magnetic field in the space, a detection coil that detects a change in the alternating magnetic field formed by the alternating magnetic field forming coil by an electromagnetic induction phenomenon, and an inductance change of the detecting coil is detected. And an inductance change detecting means.

  A rolling device part inspection apparatus according to a seventh aspect of the present invention is an apparatus for measuring the electrical conductivity of a rolling device part having an insulating coating on its surface, and includes an insulating film forming surface of the rolling device component. An alternating magnetic field forming coil that forms an alternating magnetic field in the space, a detection coil that detects a change in the alternating magnetic field formed by the alternating magnetic field forming coil by an electromagnetic induction phenomenon, and an inductance change of the detecting coil is detected. And an inductance change detecting means.

According to the first, fifth, and sixth aspects of the present invention, it is not necessary to use the ultrasonic flaw detection method when measuring the thickness of the coating formed on the surface of the rolling device part. It is possible to measure the thickness of the coating formed in a short time without causing an increase in cost.
According to invention of Claims 2-5 and 7, since it is not necessary to measure the electrical resistance value between a shaft and a housing when measuring the electrical conductivity of rolling device parts, it has an insulating coating on the surface. The electrical conductivity of the rolling device parts can be measured without much labor and time.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows an example of a film thickness measuring device used when measuring the thickness of a coating (for example, a diamond-like carbon coating) formed on the surface of a rolling device component such as a bearing ring. In the figure, reference numeral 11 denotes a film thickness measuring device for measuring the thickness of a film formed on the surface of the rolling device component. The film thickness measuring device 11 includes an electromagnetic induction sensor 4.

The electromagnetic induction sensor 4 includes an alternating magnetic field forming coil 4a that forms an alternating magnetic field in a space including a film forming surface of the rolling device component, and changes in the alternating magnetic field formed by the alternating magnetic field forming coil 4a by an electromagnetic induction phenomenon. An AC current as an exciting current is supplied from an AC power source 5 to the AC magnetic field forming coil 4a.
The film thickness measuring device 11 shown in FIG. 1 includes an inductance change detection circuit 6 that detects an inductance change of the detection coil 4b of the electromagnetic induction sensor 4, and a detection coil detected by the inductance change detection circuit 6. And a film thickness calculation circuit (or conductivity calculation circuit) 7 for calculating the thickness (or conductivity) of the film from the inductance change of 4b and a preset calibration value. Is output to a display device 9 such as a CRT, and is also output to a recording device 10 such as a printer.

The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. The AC magnetic field forming coil 4a and the detection coil 4b are housed in one casing.
As an example of the object to be measured shown in FIG. 1, a cross section of a ball bearing in which a coating is formed on the raceway surfaces of the outer race and the inner race is shown in FIG. As shown in the drawing, a coating 15 is formed on the raceway surfaces of the outer raceway ring 13 and the inner raceway ring 14 by subjecting the outer raceway ring 13 and the inner raceway ring 14 to surface treatment. Examples of the surface treatment include electroplating, electroless plating, chemical conversion treatment, vacuum plating, hot dipping, thermal spraying, surface hardening, coating of ceramic, diamond-like carbon, and the like. Examples of the coating material include phosphorus compounds, nickel compounds, sulfur compounds, halogen compounds, nitride compounds, and carbon compounds.

  When measuring the thickness of the coating film 15 formed on the surface of the bearing ring using the film thickness measuring device 11 shown in FIG. 1, the bearing ring 13 on which the coating film 15 of the ball bearing shown in FIG. 2 is formed. The electromagnetic induction sensor 4 is brought close to the surface of (or 14), and an alternating current is supplied from the alternating current power source 5 to the alternating magnetic field forming coil 4a of the electromagnetic induction sensor 4 in this state. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source 5, and the alternating magnetic field is excited by the excitation of the alternating magnetic field forming coil 4a in the space including the film forming surface of the race 13 (or 14). It is formed.

  Thus, when an alternating magnetic field is formed in the space including the film forming surface of the race 13 (or 14), an induced electromotive force is generated in the detection coil 4b of the electromagnetic induction sensor 4. At this time, the amplitude and phase of the induced electromotive force generated in the detection coil 4b change according to the thickness of the coating film 15 formed on the surface of the raceway ring 13 (or 14). Therefore, the inductance change of the detection coil 4 b is detected by the inductance change detection circuit 6, and the inductance change of the detection coil 4 b detected by the inductance change detection circuit 6 is supplied to the film thickness calculation circuit 7, whereby the thickness of the coating film 15 is increased. Can be measured.

  As described above, as means for measuring the thickness of the coating 15, the AC magnetic field forming coil 4a that forms an AC magnetic field in the space including the coating forming surface of the rolling device component, and the AC magnetic field forming coil 4a By using the electromagnetic induction sensor 4 including the detection coil 4b for detecting the change in the formed alternating magnetic field by the electromagnetic induction phenomenon, the coating 15 formed on the surface of the rolling device component such as the race ring is formed. Since it is not necessary to use the ultrasonic flaw detection method when measuring the thickness, the thickness of the coating formed on the surface of the rolling device component can be measured in a short time without causing an increase in cost.

  Next, FIG. 3 shows an example of a conductivity measuring device used when measuring the conductivity of a rolling device component having an insulating coating on the surface. In the figure, reference numeral 1 denotes a bearing ring as a rolling device part, 2 denotes an insulating coating formed by spraying ceramics on the surface of the bearing ring 1, and 3 denotes a conductivity of the rolling device part such as a rolling bearing. The conductivity measuring device 3 includes an electromagnetic induction sensor 4.

The electromagnetic induction sensor 4 electromagnetically induces an alternating magnetic field forming coil 4a that forms an alternating magnetic field in a space including the insulating film forming surface of the rolling device component, and changes in the alternating magnetic field formed by the alternating magnetic field forming coil 4a. An AC current as an exciting current is supplied from an AC power source 5 to the AC magnetic field forming coil 4a.
3 includes an inductance change detection circuit 6 that detects an inductance change of the detection coil 4b of the electromagnetic induction sensor 4, and a signal (detection signal) output from the inductance change detection circuit 6. A conductivity calculating circuit (film thickness calculating circuit) 7 for calculating the conductivity (or film thickness) of the rolling device component from a calibration value set in advance and an inductance change amount of the coil 4b, and the conductivity calculating circuit 7 And a determination circuit 8 for determining whether or not the electrical conductivity of the rolling device component calculated in (1) is an appropriate conductivity, and the determination result of the determination circuit 8 is output to a display device 9 such as a CRT. At the same time, it is output to a recording device 10 such as a printer.

The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. Further, the alternating magnetic field forming coil 4a and the detecting coil 4b are accommodated in one casing.
When measuring the conductivity of a rolling device part such as a race ring using such a conductivity measuring device 3, the electromagnetic induction sensor 4 is brought close to the surface of the race ring 1 on which the insulating coating 2 is formed. Then, an alternating current is supplied from the alternating current power source 5 to the alternating magnetic field forming coil 4a of the electromagnetic induction sensor 4. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source 5, and an alternating magnetic field is formed by exciting the alternating magnetic field forming coil 4a in the space including the insulating film forming surface of the race 1. .

  Thus, when an alternating magnetic field is formed in the space including the insulating film forming surface of the raceway ring 1, an induced electromotive force is generated in the detection coil 4b of the electromagnetic induction sensor 4. At this time, the amplitude and phase of the induced electromotive force generated in the detection coil 4 b change according to the thickness of the insulating coating 2 formed on the surface of the raceway ring 1. Accordingly, the inductance change of the detection coil 4b is detected by the inductance change detection circuit 6, and the inductance change of the detection coil 4b detected by the inductance change detection circuit 6 is supplied to the conductivity calculating circuit 7 to thereby provide a rolling device component. Can be obtained. Further, by supplying the calculation result of the conductivity calculation circuit 7 to the determination circuit 8, it is possible to inspect whether or not the conductivity of the rolling device component has an appropriate thickness.

  As described above, the AC magnetic field forming coil 4a that forms an AC magnetic field in the space including the insulating coating forming surface of the race 1 as the conductivity measuring means for measuring the conductivity of the rolling device component, and this AC magnetic field By using the electromagnetic induction sensor 4 including the detection coil 4b that detects the change of the alternating magnetic field formed by the formation coil 4a by the electromagnetic induction phenomenon, the conduction of the rolling device component having an insulating coating on the surface thereof. Since it is not necessary to measure the electrical resistance value between the shaft and the housing when measuring the rate, the electrical conductivity of the rolling device parts can be measured without much labor and time.

In the above-described embodiment of the present invention, the case where the conductivity of the bearing race is measured has been described. However, the present invention is not limited to this. For example, the screw shaft of the ball screw or the guide rail of the linear motion guide bearing device The present invention can also be applied when measuring the electrical conductivity.
Next, FIG. 4 shows an example of a film thickness measuring device used for measuring the thickness of a solid lubricating film formed by shot peening molybdenum disulfide on the inner peripheral surface of the outer race of the rolling bearing. . The film thickness measuring apparatus shown in the figure includes a turntable 16, an electromagnetic induction sensor 4 disposed above the turntable 16, and the electromagnetic induction sensor 4 around the Z axis in the figure (in the direction of the arrow θz in the figure). ), A sensor elevating mechanism 18 for elevating and driving the electromagnetic induction sensor 4 in the Z-axis direction in the figure, and the electromagnetic induction sensor 4 in the figure X. A sensor positioning mechanism 19 for positioning the sensor by moving in the axial direction and the Y-axis direction, and a rolling device component positioning mechanism 20 for positioning the inspection object by moving the turntable 16 in the X-axis direction in the figure, Roller device parts such as the outer race 13 are placed on the upper surface of the turntable 16.

  The electromagnetic induction sensor 4 includes an alternating magnetic field forming coil 4a (see FIG. 5) that forms an alternating magnetic field in a space including the film forming surface of the rolling device component, and an alternating magnetic field formed by the alternating magnetic field forming coil 4a. The detection coil 4b detects a change by an electromagnetic induction phenomenon, and an alternating current as an exciting current is supplied from an alternating current power source to the alternating magnetic field forming coil 4a. The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. The AC magnetic field forming coil 4a and the detection coil 4b are accommodated in one casing, and the AC magnetic field forming coil 4a and the detection coil 4b are accommodated in one casing, so that an integrated unit is obtained. As well as improving the workability, it can be installed in a narrow space inside the rolling bearing to detect defects.

  When measuring the thickness of the solid lubricant film formed on the inner peripheral surface of the outer race 13 using the film thickness measuring device shown in FIG. 4, first, place the outer race 13 on the upper surface of the turntable 16. Place. Next, the turntable 16, the sensor swing mechanism 17, the sensor elevating mechanism 18, the sensor positioning mechanism 19, and the rolling device component positioning mechanism 20 are driven to bring the electromagnetic induction sensor 4 closer to the inner peripheral surface of the outer raceway ring 13, In this state, an AC current is supplied from an AC power source (not shown) to the AC magnetic field forming coil 4 a of the electromagnetic induction sensor 4. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source, and the alternating magnetic field 21 (see FIG. 6) is exchanged in the space including the lubricating film forming surface of the outer race 13 with the alternating magnetic field forming coil 4a. Formed by excitation.

When the alternating magnetic field 21 is formed in the space including the lubricating film forming surface of the outer race 13 in this manner, an induced electromotive force according to the thickness of the solid lubricating film is applied to the detection coil 4b of the electromagnetic induction sensor 4. Therefore, the thickness of the solid lubricating film formed on the inner peripheral surface of the outer race 13 can be measured from the induced electromotive force generated in the detection coil 4b of the electromagnetic induction sensor 4.
As described above, as means for measuring the thickness of the coating film such as the solid lubricant film, the AC magnetic field forming coil 4a that forms an AC magnetic field in the space including the film forming surface of the rolling device component, and the AC magnetic field forming The thickness of the coating formed on the surface of the rolling device component by using the electromagnetic induction sensor 4 including the detection coil 4b that detects the change of the alternating magnetic field formed by the coil 4a by the electromagnetic induction phenomenon. Since it is not necessary to use an ultrasonic flaw detection method when measuring the thickness, the thickness of the coating formed on the surface of the rolling device component can be measured in a short time without causing an increase in cost.

  Next, FIG. 7 shows an example of a film thickness measuring apparatus used for measuring the thickness of the diamond-like carbon film formed on the surface of the machined cage. The film thickness measuring apparatus shown in FIG. 1 includes a turntable 16, an electromagnetic induction sensor 4 disposed above the turntable 16, and a sensor swing that drives the electromagnetic induction sensor 4 to swing around a vertical axis. A moving mechanism 17 and a sensor lifting mechanism 18 that drives the electromagnetic induction sensor 4 to move up and down via the sensor swing mechanism 17. Device parts are placed.

  The electromagnetic induction sensor 4 includes an alternating magnetic field forming coil 4a (see FIG. 5) that forms an alternating magnetic field in a space including the film forming surface of the rolling device component, and an alternating magnetic field formed by the alternating magnetic field forming coil 4a. The detection coil 4b detects a change by an electromagnetic induction phenomenon, and an alternating current as an exciting current is supplied from an alternating current power source to the alternating magnetic field forming coil 4a. The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. The AC magnetic field forming coil 4a and the detection coil 4b are housed in one casing.

  In the case of measuring the thickness of the diamond-like carbon film formed on the surface of the punching cage 22 using the film thickness measuring apparatus shown in FIG. Placed on. Next, the turntable 16, the sensor swinging mechanism 17, and the sensor lifting mechanism 18 are driven to bring the electromagnetic induction sensor 4 closer to the inner peripheral surface of the machined cage 22, and in this state, the electromagnetic induction sensor 4 is supplied from an AC power source (not shown). AC current is supplied to the AC magnetic field forming coil 4a. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source, and the alternating magnetic field is formed by exciting the alternating magnetic field forming coil 4a in the space including the DLC film forming surface of the machined cage 22. The

  In this way, when an alternating magnetic field is formed in the space including the DLC film forming surface of the punched cage 22, an induced electromotive force according to the thickness of the diamond-like carbon film is generated by the detection coil 4b of the electromagnetic induction sensor 4. Therefore, the thickness of the diamond-like carbon film formed on the surface of the machined cage 22 can be measured from the induced electromotive force generated in the detection coil 4b of the electromagnetic induction sensor 4.

  As described above, as means for measuring the thickness of a film such as a diamond-like carbon film, the AC magnetic field forming coil 4a that forms an AC magnetic field in the space including the film forming surface of the rolling device part, and the AC magnetic field formation The thickness of the coating formed on the surface of the rolling device component by using the electromagnetic induction sensor 4 including the detection coil 4b that detects the change of the alternating magnetic field formed by the coil 4a for the electromagnetic induction phenomenon. Since it is not necessary to use the ultrasonic flaw detection method when measuring the thickness, the thickness of the coating formed on the surface of the rolling device component can be measured in a short time without causing an increase in cost.

  Next, FIG. 8 shows an example of a conductivity measuring device used for measuring the conductivity of the outer race when the insulating coating is formed on the outer peripheral surface of the outer race by ceramic spraying. The conductivity measuring device shown in the figure includes a turntable 16, an electromagnetic induction sensor 4 disposed above the turntable 16, and a sensor swing that drives the electromagnetic induction sensor 4 to swing about a vertical axis. A mechanism 17 and a sensor elevating mechanism 18 that drives the electromagnetic induction sensor 4 to move up and down via the sensor swinging mechanism 17 are provided. On the upper surface of the turntable 16, an outer raceway ring 13 as an object to be measured is provided. It is supposed to be placed.

  The electromagnetic induction sensor 4 includes an alternating magnetic field forming coil 4a (see FIG. 5) that forms an alternating magnetic field in a space including the film forming surface of the rolling device component, and an alternating magnetic field formed by the alternating magnetic field forming coil 4a. The detection coil 4b detects a change by an electromagnetic induction phenomenon, and an alternating current as an exciting current is supplied from an alternating current power source to the alternating magnetic field forming coil 4a. The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. The AC magnetic field forming coil 4a and the detection coil 4b are housed in one casing.

  When the conductivity of the outer race 13 is measured using the conductivity measuring device shown in FIG. 8, first, the outer race 13 is placed on the upper surface of the turntable 16. Next, the turntable 16, the sensor swing mechanism 17, and the sensor lifting mechanism 18 are driven to bring the electromagnetic induction sensor 4 closer to the outer peripheral surface of the outer race 13, and in this state, the AC of the electromagnetic induction sensor 4 is supplied from an AC power source (not shown). An alternating current is supplied to the magnetic field forming coil 4a. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source, and the alternating magnetic field is formed by exciting the alternating magnetic field forming coil 4a in the space including the insulating coating forming surface of the outer race ring 13. .

  When an alternating magnetic field is formed in the space including the insulating coating forming surface of the outer race 13 in this manner, an induced electromotive force according to the thickness of the insulating coating formed on the outer peripheral surface of the outer race 13 is electromagnetic. It occurs in the detection coil 4 b of the induction sensor 4. Therefore, by extracting the induced electromotive force generated in the detection coil 4b of the electromagnetic induction sensor 4 as the conductivity information of the outer race ring 13, the conductivity of the outer race ring 13 having an insulating film on the outer peripheral surface can be measured. it can.

  Next, FIG. 9 shows an example of a conductivity measuring device used for measuring the conductivity of the outer race when a ceramic insulating coating is formed on the end face of the outer race. The conductivity measuring apparatus shown in the figure includes a turntable 16, an electromagnetic induction sensor 4 disposed above the turntable 16, and the electromagnetic induction sensor 4 around the X axis (in the direction of the arrow θx in the figure). A sensor swing mechanism 17 that swings in the direction of movement, a sensor lift mechanism 18 that drives the electromagnetic induction sensor 4 to move up and down in the Z-axis direction in the figure via the sensor swing mechanism 17, and an X axis in the figure. A sensor positioning mechanism 19 for positioning the sensor by moving in the direction and the Y-axis direction, and a rolling device component positioning mechanism 20 for positioning the object to be inspected by moving the turntable 16 in the X-axis direction in FIG. On the upper surface portion of the table 16, an outer race 13 as a measurement object is placed.

  The electromagnetic induction sensor 4 includes an alternating magnetic field forming coil 4a (see FIG. 5) that forms an alternating magnetic field in a space including the film forming surface of the rolling device component, and an alternating magnetic field formed by the alternating magnetic field forming coil 4a. The detection coil 4b detects a change by an electromagnetic induction phenomenon, and an alternating current as an exciting current is supplied from an alternating current power source to the alternating magnetic field forming coil 4a. The detection coil 4b is wound coaxially with the AC magnetic field forming coil 4a with a part thereof in contact with the AC magnetic field forming coil 4a. Further, the AC magnetic field forming coil 4a and the detection coil 4b are accommodated in one casing, and the AC magnetic field forming coil 4a and the detection coil 4b are accommodated in one casing, thereby integrating the unit. As well as improving the workability, it can be installed in a narrow space inside the rolling bearing to detect defects.

  When the conductivity of the outer race 13 is measured using the conductivity measuring device shown in FIG. 9, first, the outer race 13 is placed on the upper surface of the turntable 16. Next, the turntable 16, the sensor swinging mechanism 17, the sensor lifting mechanism 18, the sensor positioning mechanism 19 and the rolling device component positioning mechanism 20 are driven to bring the electromagnetic induction sensor 4 closer to the end surface of the outer race ring 13, and this state Then, an AC current is supplied from an AC power source (not shown) to the AC magnetic field forming coil 4a of the electromagnetic induction sensor 4. Then, the alternating current magnetic field forming coil 4a is excited by the alternating current supplied from the alternating current power source, and the alternating magnetic field is formed by exciting the alternating magnetic field forming coil 4a in the space including the insulating coating forming surface of the outer race ring 13. .

  When an alternating magnetic field is formed in the space including the insulating film forming surface of the outer raceway 13 in this way, an induced electromotive force according to the thickness of the insulating coating formed on the end face of the outer raceway 13 is electromagnetic induction. It occurs in the detection coil 4 b of the sensor 4. Therefore, by extracting the induced electromotive force generated in the detection coil 4b of the electromagnetic induction sensor 4 as the conductivity information of the outer race 13, the conductivity of the outer race 13 having an insulating film on the end face can be measured. .

It is a figure which shows an example of the film thickness measuring apparatus used when measuring the thickness of the film formed in the surface of rolling device components. It is a figure which shows an example of the to-be-measured object shown in FIG. It is a figure which shows an example of the electrical conductivity test | inspection apparatus used when measuring the electrical conductivity of the rolling device components which have an insulating film on the surface. It is a figure which shows an example of the film thickness measuring apparatus used when measuring the thickness of the solid lubricating film formed in the internal peripheral surface of the outer race of a rolling bearing. It is a figure which shows schematic structure of an electromagnetic induction sensor. It is a figure which shows the alternating current magnetic field formed with the coil for alternating current magnetic field formation of an electromagnetic induction sensor. It is a figure which shows an example of the film thickness measuring apparatus used when measuring the thickness of the diamond-like carbon film formed on the surface of the machined cage. It is a figure which shows an example of the electrical conductivity measuring apparatus used when measuring the electrical conductivity of the outer race which has an insulating film in an outer peripheral surface. It is a figure which shows an example of the electrical conductivity measuring apparatus used when measuring the electrical conductivity of the outer race which has an insulating film in an end surface.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Track ring 2 Insulation film 4 Electromagnetic induction sensor 4a Coil for alternating current magnetic field formation 4b Coil for detection 5 AC power supply 6 Inductance change detection circuit 7 Film thickness calculation circuit (conductivity calculation circuit)
DESCRIPTION OF SYMBOLS 8 Judgment circuit 9 Display apparatus 10 Recording apparatus 13 Outer race ring 14 Inner race ring 15 Coating 16 Turntable 17 Sensor swing mechanism 18 Sensor raising / lowering mechanism 19 Sensor positioning mechanism 20 Rolling component positioning mechanism 21 AC magnetic field 22 Machined cage

Claims (7)

  A method for measuring the thickness of a coating film formed on the surface of a rolling device component, wherein an AC magnetic field is applied to a space including a coating forming surface of the rolling device component as a means for measuring the thickness of the coating device. An electromagnetic induction sensor comprising: an alternating magnetic field forming coil to be formed; and a detection coil for detecting a change in the alternating magnetic field formed by the alternating magnetic field forming coil by an electromagnetic induction phenomenon. A method for inspecting a rolling device part, comprising measuring the thickness of the coating from a change in induced electromotive force generated in the detection coil.   A method for measuring the electrical conductivity of a rolling device part having an insulating coating on its surface, wherein an AC magnetic field is applied to a space including the insulating coating forming surface of the rolling device component as a conductivity measuring means for measuring the electrical conductivity. An electromagnetic induction sensor comprising: an alternating magnetic field forming coil that forms a magnetic field; and a detection coil that detects a change in the alternating magnetic field formed by the alternating magnetic field forming coil by an electromagnetic induction phenomenon. A method for inspecting a rolling device part, comprising measuring the electrical conductivity of the rolling device part from a change in induced electromotive force generated in the detection coil.   3. The method for inspecting a rolling device part according to claim 2, wherein the insulating coating is an insulating layer formed on a surface of the rolling bearing part of the rolling bearing for preventing electric corrosion.   4. A method for inspecting a rolling device part according to claim 2, wherein the insulating coating is made of ceramic.   5. The rolling device component inspection method according to claim 1, wherein a change in electromotive force generated by electromagnetic induction is a threshold when a change in amplitude or phase becomes a predetermined value. A method for inspecting a rolling device component, comprising inspecting whether the thickness of the coating or the conductivity is an appropriate value.   An apparatus for measuring the thickness of a coating formed on the surface of a rolling device component, the alternating magnetic field forming coil for forming an alternating magnetic field in a space including the coating forming surface of the rolling device component, and the alternating current A detection coil for detecting a change in an alternating magnetic field formed by the magnetic field forming coil by an electromagnetic induction phenomenon, and an inductance change detecting means for detecting an inductance change of the detection coil. Inspection equipment for moving parts.   An apparatus for measuring the electrical conductivity of a rolling device part having an insulating coating on the surface thereof, an alternating magnetic field forming coil for forming an alternating magnetic field in a space including the insulating coating forming surface of the rolling device component, and the alternating current A detection coil for detecting a change in an alternating magnetic field formed by the magnetic field forming coil by an electromagnetic induction phenomenon, and an inductance change detecting means for detecting an inductance change of the detection coil. Inspection equipment for moving parts.

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