JP2007336765A - Armature for refrigerant-cooling linear motor, and refrigerant-cooling linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an armature for a refrigerant-cooling linear motor that is high in insulation reliability without damaging temperature performance of a linear motor, and a refrigerant-cooling linear motor. <P>SOLUTION: The armature for a refrigerant-cooling linear motor includes a winding fixing plate 13, a frame 5 formed so as to surround an armature winding 8 fixed to the winding fixing plate 13 in a frame shape, and an outer can 10 formed so as to hermetically seal an opening of the frame 5. The armature winding 8 is hermetically sealed by the outer can 10 so as to cool the armature winding 8, arranged in the hermetically-sealed space, with a refrigerant. The armature 1 includes a resin mold 9, which is molded in an air-core part of the armature winding 8 and composed by thinly coating the surface of the winding 8, an inner can 11 formed so as to be adhered to each of both side faces of the armature winding 8 with respect to a driving direction of the linear motor, and a refrigerant channel 12 formed in a space surrounded by the frame 5, outer can 10, and inner can 11. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a refrigerant-cooled linear motor armature and a refrigerant-cooled linear motor that are used for table feed of a semiconductor manufacturing apparatus or a machine tool and require a low temperature rise of a linear motor body.

2. Description of the Related Art Conventionally, a refrigerant-cooled linear motor that is used for table feed of a semiconductor manufacturing apparatus or a machine tool and requires a low temperature rise of a linear motor main body is, for example, as shown in FIG. 3 (see Patent Document 1). .
FIGS. 3A and 3B are diagrams for explaining the overall configuration of a refrigerant cooling linear motor common to the prior art and the present invention, which will be described later. FIG. 3A is a plan view thereof, and FIG. The front view seen from is shown. Here, an example of a movable magnet type linear motor is shown.
In FIG. 3, 1 is an armature, 2 is a field part, 3 is a permanent magnet, 4 is a field yoke, 5 is a frame, 6 is a refrigerant inlet, and 7 is a refrigerant outlet.
The linear motor includes an armature 1 having an armature winding 8 therein and a stator, and a field portion 2 having a permanent magnet 3 and a field yoke 4 and a mover. . The armature 1 has a frame 5 formed with a refrigerant inlet 6 and a refrigerant outlet 7 as a jacket for flowing and circulating the refrigerant therein. The mover is supported by a linear guide (not shown).

Next, the internal structure of the armature will be described with reference to FIG.
2A and 2B are armatures of a refrigerant cooling linear motor showing a conventional technique, in which FIG. 2A is a plan sectional view taken along line AA in FIG. 2B, and FIG.
In FIG. 2, 8 is an armature winding, 10 is an outer can, 12 is a refrigerant flow path, and 13 is a winding fixing plate.
The armature 1 basically includes a winding fixing plate 13, an armature winding 8 fixed to the winding fixing plate 13, and a frame 5 formed so as to surround the armature winding 8 in a frame shape. An outer can 10 formed while securing a coolant flow path so as to seal the opening of the frame 5, and a resin mold (not shown) in which the surface of the armature winding 8 is thin-coated. Composed.
Power is supplied to the armature winding 6 from a terminal block attached to the frame 5. The terminal block and the armature winding 6 are electrically connected by lead wires (not shown). The refrigerant is supplied from a refrigerant inlet 6 provided in the frame 5, passes through a refrigerant flow path 12 in contact with the surface of a resin mold (not shown), recovers heat generated from the armature winding 6, and is discharged from the refrigerant outlet 7. The
Thus, by directly cooling the armature winding with the refrigerant, it is possible to reduce the heat generation of the linear motor, and to improve the performance of the linear motor.
Japanese Patent No. 3539493 (Specifications, pages 4-5, FIG. 2)

However, the conventional refrigerant-cooled linear motor as shown in FIG. 2 employs a non-conductive refrigerant in order to suppress the temperature increase of the linear motor and to maintain the electrical insulation performance of the linear motor. (E.g., fluorine-based inert refrigerant having extremely low electrical conductivity and high insulation; hydrofluorether (HFE) manufactured by Sumitomo 3M). However, non-conductive refrigerant has a drawback of low thermal conductivity, and the cooling effect of the linear motor has come to a limit.
In recent years, there has been a high demand for a low temperature rise specification for linear motors, and it has become necessary to use a refrigerant having excellent thermal conductivity.
For example, when pure water is used as a refrigerant, the insulation performance of pure water is inferior to that of a conventional refrigerant. Conventional armature windings of a linear motor are provided with a thin resin mold in order to increase the reliability of the insulation performance of the linear motor. However, the use of pure water is insufficient. In addition, the water absorption of the resin over time is inevitable, and there is a possibility that the long-term reliability of the insulation performance of the linear motor is lacking.
The present invention has been made in view of such problems, and an object thereof is to provide a refrigerant cooling linear motor armature and a refrigerant cooling linear motor having high insulation reliability without impairing the temperature performance of the linear motor. To do.

In order to solve the above-mentioned problem, claim 1 of the present invention includes a winding fixing plate, a frame formed so as to surround the armature winding fixed to the winding fixing plate in a frame shape, An outer can formed to seal the opening of the frame, the armature winding is sealed by the outer can, and the armature winding disposed in the sealed space is cooled by a refrigerant In the refrigerant-cooled linear motor armature, the armature winding is molded with respect to the driving direction of the linear motor, and a resin mold that is molded on the air core portion of the armature winding and the surface of the winding is thinly coated. And a refrigerant passage formed in a space surrounded by the frame, the outer can and the inner can.
According to a second aspect of the present invention, in the refrigerant-cooled linear motor armature according to the first aspect, the inner can is made of a thin non-magnetic metal material so as to completely separate the armature winding from the refrigerant. It is characterized by that.
According to a third aspect of the present invention, the armature according to the first or second aspect and a plurality of permanent magnets arranged opposite to each other via a magnetic gap and alternately having different polarities on the field yoke are arranged next to each other. And a field cooler that is arranged side by side, and that has one of the armature and the field magnet as a stator and the other as a mover. It is characterized by constituting a linear motor.

According to the first aspect of the present invention, the armature winding is formed so as to contact the inner can constituting the refrigerant flow path, and is directly cooled by the refrigerant flowing through the refrigerant flow path. It is possible to reduce the increase in the surface temperature of the outer can as well as to reduce it.
According to the invention of claim 2, the armature winding and the refrigerant are separated by the inner can made of a non-magnetic thin metal, and the water absorption rate is almost zero because it is a metal. Therefore, the initial insulation performance can be maintained over time, and the insulation reliability of the refrigerant-cooled linear motor can be sufficiently ensured.
According to the invention of claim 3, the heat recovery rate of the refrigerant can be increased and the temperature rise of the armature surface can be reduced by using pure water having a larger thermal conductivity and constant pressure specific heat than the conventional HFE. it can.
According to the invention of claim 4, the armature of the refrigerant cooling linear motor and the field having the permanent magnet are opposed to each other, and either one of the armature or the field is configured as a stator and the other is configured as a mover. Therefore, the refrigerant cooling linear motor having the effects of claims 1 to 3 can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is an armature of a refrigerant cooling linear motor showing an embodiment of the present invention. FIG. 1A is a plan sectional view taken along line AA of FIG. 1B, and FIG. In addition, about the same component as this invention, the same code | symbol is attached | subjected, the description is abbreviate | omitted, and only a different point is demonstrated.

In FIG. 1, 11 is an inner can and 9 is a resin mold.
The present invention is different from the prior art as follows.
That is, the armature 1 is molded in the air core portion of the armature winding 8 and the resin mold 9 having a thin coating on the surface of the winding 8 and the armature winding with respect to the driving direction of the linear motor. 8 is provided with an inner can 11 formed so as to be in close contact with both side surfaces, and a refrigerant flow path 12 formed in a space surrounded by the frame 5, the outer can 10, and the inner can 11. .

Next, the operation will be described with reference to FIGS.
The linear motor supplies electric power to the terminal block of the armature 1 from the outside, and causes a predetermined current corresponding to the electrical relative position of the field element as the mover and the armature as the stator to flow through the armature winding. Thus, a thrust is generated in the mover by acting on the magnetic field created by the permanent magnet, and the mover moves in the traveling direction indicated by the arrow.
At this time, the armature winding generates heat due to copper loss. Heat generated in the armature winding is thermally conducted to the resin mold 9 formed by thin coating on the air core portion and the surface of the winding, and is further conducted from the resin mold 9 to the inner can 11. In parallel with this, the refrigerant is supplied to the refrigerant inlet 6 provided in the frame 5 of the armature, and the refrigerant flows in a certain space between the outer can 10, the inner can 11 and the frame 5. After flowing through the path 12, the armature winding 1 that is discharged toward the refrigerant outlet 7 and circulates through the refrigerant flow path 12 to generate heat due to copper loss is cooled.

Therefore, in the embodiment of the present invention, the armature winding is formed so as to contact the inner can constituting the refrigerant flow path, and is directly cooled by the refrigerant flowing through the refrigerant flow path. It is possible to reduce the increase in the surface temperature of the outer can as well as to reduce it.
Further, since the inner can 11 that covers the outer surface of the armature winding 1 is employed, the inner can 11 is made of a non-magnetic thin metal, and therefore has a very low water absorption rate and directly enters the resin mold 9. And no deterioration of insulation.
In particular, when pure water is used as the refrigerant, a refrigerant cooling linear motor with high insulation reliability can be obtained without impairing the temperature performance of the linear motor.

  The material of the outer can, inner can and winding fixing frame may be a resin material instead of a non-magnetic metal material. For example, a thermoplastic resin such as epoxy resin or polyphenylene sulfide (PPS) is used. It is done.

  Since the refrigerant-cooled linear motor of the present invention has a structure in which the armature winding is completely covered with a thin non-magnetic metal material, the insulation performance does not deteriorate due to water absorption of the resin over time. By eliminating the contact of the windings, the coolant can be made water, and as a result, it can be applied to a positioning mechanism of a semiconductor manufacturing apparatus that uses pure water, for example.

BRIEF DESCRIPTION OF THE DRAWINGS It is an armature of the refrigerant | coolant cooling linear motor which shows the Example of this invention, Comprising: (a) is a plane sectional view which follows the AA line of (b), (b) is a front sectional view. It is an armature of the refrigerant cooling linear motor which shows a prior art, and (a) is a plane sectional view which meets an AA line of (b), and (b) is a front sectional view. It is a figure for demonstrating the whole structure of the refrigerant | coolant cooling linear motor common to a prior art and this invention, Comprising: (a) is the top view, (b) is the front view seen from the arrow B direction of (a) Is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Armature 2 Field part 3 Permanent magnet 4 Field yoke 5 Frame 6 Refrigerant inlet 7 Refrigerant outlet 8 Armature winding 9 Resin mold 10 Outer can 11 Inner can 12 Refrigerant flow path 13 Winding fixed plate

Claims (4)

A winding fixing plate, a frame formed so as to surround the armature winding fixed to the winding fixing plate in a frame shape, and an outer can formed so as to seal the opening of the frame A coolant-cooled linear motor armature that seals the armature winding with the outer can and cools the armature winding disposed in a sealed space with a refrigerant.
A resin mold formed on the core of the armature winding and thinly coated on the surface of the winding;
An inner can formed so as to be in close contact with both side surfaces of the armature winding with respect to the driving direction of the linear motor,
A refrigerant passage formed in a space surrounded by the frame and the outer can and the inner can;
A coolant-cooled linear motor armature characterized by comprising:   2. The refrigerant-cooled linear motor armature according to claim 1, wherein the inner can is made of a thin non-magnetic metal material so as to completely separate the armature winding from the refrigerant.   The refrigerant cooling linear motor armature according to claim 1, wherein the refrigerant flowing through the refrigerant flow path is water or pure water.   The armature according to claim 1, and a field portion that is arranged so as to face the armature through a magnetic gap and has a plurality of permanent magnets alternately having different polarities arranged side by side on the field yoke. A coolant-cooling linear motor, wherein either the armature or the field portion is a stator and the other is a mover, and the armature and the field portion are relatively moved.

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