JP2007334362A - Electron beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam device capable of recording information with high accuracy necessary for forming pits in a disk for producing a master. <P>SOLUTION: The electron beam device is equipped with: a disk rotation center detection unit 9 that detects a rotation center of a disk for producing a master held by a holding means 3 for a disk for producing a master; and an aligning means 5, 10 that align the rotation center of the disk 2 for producing a master held by the disk holding means 3 to the rotatory asymmetry center of information recording electron beam lens-barrels 21-1 to 21-4, 22-1 to 22-4, 23-1 to 23-4, and 24-1 to 24-4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an electron beam apparatus used for producing a master disk necessary for producing an optical disk.

  Among electronic disks used as information recording media in electronic information processing apparatuses, optical disks such as CD-ROMs and magneto-optical disks (MO) are portable large-capacity recording media and are widely used. Yes.

  Since these optical discs have pits (recesses), for example, a master disc is prepared by forming a resist layer on a glass substrate, and the master layer is manufactured by processing the resist layer of the master disc. In addition, a mold called a stamper is manufactured using this master disk, and then manufactured using this mold.

  Conventionally, a master has been manufactured by irradiating a resist layer of a master disk with a laser beam corresponding to digital information to be stored on the optical disk to form pits necessary for the master disk.

  However, since it is considered difficult to further increase the recording density in the production of a master using a laser beam, the production of a master using an electron beam has been studied. An electron beam apparatus has been proposed (Patent Document 1, Patent Document 2, Non-Patent Document 1).

In particular, in Patent Document 1 and Patent Document 2, a small electron beam is used for the purpose of improving the low throughput, which is a drawback of the electron beam apparatus due to the inability to collectively irradiate the electron beam irradiated portions of the master disk. There is described an electron beam apparatus in which lens barrels are two-dimensionally arranged so that a plurality of electron beams can be simultaneously irradiated onto a master disc.
JP-A-2-214046 JP-A-4-335226 44th Annual Meeting of the Japan Society of Applied Physics (1997) 31a-NF-9

  However, in the electron beam device described in Patent Document 1 and the electron beam device described in Patent Document 2, a malfunctioning electron beam column cannot be detected, and the malfunctioning electron beam mirror is not detected. When a cylinder is generated, it is not possible to immediately cope with this, and there is a problem in that work efficiency is greatly reduced.

  In the conventional electron beam apparatus, the alignment of the master disk and the electron beam barrel group depends on the accuracy of the stage mechanism system that holds the master disk, and the master disk and Since there was no means for positively aligning the electron beam column group, there was a problem that pits could not be formed with high accuracy.

  In view of such points, the present invention includes an electron beam column group in which a plurality of electron beams are arranged, and can improve throughput, and even when a defective electron beam column is generated, It is a first object of the present invention to provide an electron beam apparatus capable of minimizing a decrease in efficiency.

  In addition, the present invention includes an electron beam column group in which a plurality of electron beams are arranged, so that throughput can be improved and work efficiency is reduced even when a defective electron beam column is generated. In addition, the master disc can be aligned with the electron beam column group, and information necessary for pit formation on the master disc can be recorded with high accuracy. A second object of the present invention is to provide an electron beam apparatus which can be used.

  In the present invention, the electron beam apparatus according to the first aspect of the present invention includes a master disk preparation means for holding and rotating a master disk, and a rotation of the master disk held by the master disk holder. An information recording electron beam column group in which a plurality of information recording electron beam barrels are arranged rotationally symmetrically at different radial distances from the center, and defective information recording for detecting defective information recording electron beam column And electron beam column detection means.

  In the present invention, according to the electron beam apparatus of the first invention, a plurality of information recording electron beam barrels are provided at different radial distances from the rotation center of the master disc that is held by the master disc holder. Since the information recording electron beam column group is provided in a rotationally symmetrical manner, the electron beam irradiation to the electron beam irradiation location of the master disk is made by a plurality of information recording electron beam column columns that are rotationally symmetric. Can be shared and performed in parallel.

  In addition, since a defect information recording electron beam column detecting means for detecting a defective information recording electron beam column is provided, a defective information recording electron beam column can be automatically detected. And an information recording electron beam column group in which a plurality of information recording electron beam column tubes are rotationally symmetrically arranged at different radial distances of the master plate manufacturing disc held by the master disk manufacturing disc holding means. Therefore, when a defective information recording electron beam column is detected, another electron beam for information recording that is rotationally symmetric with respect to the electron beam irradiation site shared by the defective information recording electron beam column This can be done using a lens barrel.

  In the present invention, the electron beam apparatus according to the second aspect of the present invention is the electron beam apparatus according to the first aspect, comprising a spare information recording electron beam column corresponding to each of the plurality of information recording electron beam columns. It is.

  In the present invention, according to the electron beam apparatus of the second invention, similarly to the electron beam apparatus of the first invention, a plurality of pieces of information in which the irradiation of the electron beam to the electron beam irradiation portion of the master disk is rotationally symmetric. It can be shared by the recording electron beam column and can be performed in parallel, and when a defective information recording electron beam column is detected, the electron beam irradiation location shared by the defective information recording electron beam column Can be performed using a spare information recording electron beam column.

  In the present invention, the electron beam apparatus according to the third aspect of the present invention is the first or second aspect of the invention, wherein the defect information recording electron beam column detecting means is an original disk producing disk held by the original disk producing disk holding means. The configuration is such that a defective information recording electron beam column is detected based on the amount of reflected electrons or secondary electrons detected.

  In the present invention, according to the electron beam apparatus of the third aspect of the present invention, the same operation as that of the electron beam apparatus of the first or second aspect of the invention can be obtained, and a defective information recording electron beam can be obtained with a simple configuration. The lens barrel can be detected.

  In the present invention, the electron beam apparatus according to the fourth aspect of the present invention is the first or second aspect of the invention, wherein the defect information recording electron beam column detecting means detects the amount of defect of the electron beam current by detecting the leakage amount of the electron beam current. It is configured to detect a recording electron beam column.

  In the present invention, according to the electron beam apparatus of the fourth aspect of the present invention, the same operation as that of the electron beam apparatus of the first or second aspect of the invention can be obtained, and a defective information recording electron beam can be obtained with a simple configuration. The lens barrel can be detected.

  In the present invention, the electron beam apparatus according to the fifth aspect of the present invention is the first, second, third, or fourth aspect of the present invention, wherein the master disc prepared by the master disc preparation means is rotated at a constant angular velocity. In this case, there is provided an electron beam irradiation amount equalizing means for equalizing the electron beam irradiation amount per unit area at each point in the radial direction of the master disc.

  In the present invention, according to the electron beam apparatus of the fifth invention, the same operation as that of the first, second, third or fourth invention can be obtained, and the master disk is rotated at a constant angular velocity. Even in this case, information necessary for forming pits on the master disk can be recorded with high accuracy.

  In the present invention, the electron beam apparatus according to a sixth aspect of the present invention is the electron beam irradiation amount equalizing means according to the fifth aspect, wherein the electron beam irradiation amount equalizing means comprises one or more information recording electron beam barrels in one pit formation portion of the master disc. The number of the information recording electron beam barrels that irradiate one pit formation portion of the master disc is the outer circumference from the inner circumference of the master disc that is held by the master disc holder. It is configured to include the arrangement of the information recording electron beam column so that the number increases over the portion.

  In the present invention, according to the electron beam apparatus of the sixth invention, the same operation as that of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can have a simple configuration.

  According to a seventh aspect of the present invention, the electron beam apparatus according to the seventh aspect of the present invention is the electron beam irradiation amount equalizing means according to the fifth aspect, wherein the electron beam irradiation amount equalizing means Electron beam irradiation per unit area at each point in the radial direction of the master disc when the master disc is rotated at a constant angular velocity by controlling the amount of current. It is designed to make the quantity as uniform as possible.

  In the present invention, according to the electron beam apparatus of the seventh invention, the same operation as that of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can have a simple configuration.

  In the present invention, in the electron beam apparatus according to the eighth aspect based on the fifth aspect, the electron beam irradiation amount equalizing means controls the number of times the electron beam is irradiated to the 1 pit forming portion of the master disk. Makes it possible to equalize the electron beam irradiation amount per unit area as much as possible at each point in the radial direction of the master disc when the master disc is held at a constant angular velocity. It is configured to do.

  In the present invention, according to the electron beam apparatus of the eighth invention, the same operation as that of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means can be simply configured.

  In the present invention, the electron beam apparatus according to the ninth aspect is held by the master disk-producing disk holding means in the first, second, third, fourth, fifth, sixth, seventh or eighth invention. A rotation center detecting means for detecting a rotation of the master disk, a rotation center of the disk for holding the master disk held by the disk holding means for rotating the master disk, and rotation of a plurality of information recording electron beam columns. It has an alignment means for aligning the center of symmetry.

  In the present invention, according to the electron beam apparatus of the ninth invention, the same operation as that of the first, second, third, fourth, fifth, sixth, seventh or eighth invention can be obtained. At the same time, information necessary for forming pits on the master disc can be recorded with high accuracy.

  In the present invention, the electron beam apparatus according to the tenth aspect of the present invention is based on the ninth aspect, wherein the disk rotation center detecting means for preparing the master disk is mounted on the disk mounting surface of the master disk manufacturing disk mounting surface of the disk manufacturing disk holding means. Are formed in a rotationally symmetrical manner with the center of rotation of the master disk as the center of rotational symmetry, and the width along the rotation direction of the master disk is the same as that of the master disk, depending on the distance from the center of rotation. Reflected electrons or secondary electrons from a plurality of master disk-producing disk rotation center detection marks by irradiating an electron beam to the plurality of master-disk-producing disk rotation center detection marks. And an electron beam column for detecting the center of rotation of the disk for producing the master disk.

  In the present invention, according to the electron beam apparatus of the tenth invention, it is possible to obtain the same operation as that of the ninth invention, and the rotation center position of the master disk is simple and highly accurate. Can be detected.

  According to an eleventh aspect of the present invention, the electron beam apparatus according to the eleventh aspect of the invention is based on the ninth aspect, wherein the disk rotation center detecting means for rotating the master disk is rotationally symmetric with the rotation center of the disk for disk recording as the rotational symmetry center. Irradiate an electron beam onto a plurality of master disk manufacturing center detection marks that are formed and have different widths along the rotational direction of the master disk, depending on the distance from the center of rotation of the master disk. This includes an electron beam column for detecting a disk rotation center for producing a master and having a means for detecting reflected electrons or secondary electrons from the disk rotation center detecting mark for producing the master.

  According to the eleventh aspect of the present invention, the electron beam apparatus according to the eleventh aspect of the invention can obtain the same operation as that of the ninth aspect of the invention, and can detect the rotation center of the master disk with a simple configuration and with high accuracy. can do.

  In the present invention, the electron beam apparatus according to the twelfth aspect of the present invention is the same as the tenth or eleventh aspect of the present invention, as the disk rotation center detection electron beam column for master production, the same number as the disk rotation center detection mark for master production. The disk rotation center detection electron beam column for producing the master disk is arranged rotationally symmetrically with the rotational symmetry center of the plurality of information recording electron beam barrels as the rotational symmetry center.

  According to the electron beam apparatus of the twelfth aspect of the present invention, the same operation as that of the tenth or eleventh aspect of the invention can be obtained, and the detection signals of a plurality of master disk production disc rotation center detection marks can be simultaneously transmitted. Therefore, the rotation center of the master disc can be efficiently detected.

  In the present invention, an electron beam apparatus according to a thirteenth aspect of the present invention is the auxiliary disk rotation center for preparing a master disk corresponding to the electron beam column for detecting the disk rotation center for disk recording in the tenth, eleventh or twelfth invention. A detection electron beam column is arranged.

  According to the electron beam apparatus of the thirteenth aspect of the present invention, if a defective master disk manufacturing disk rotation center detection electron beam column is generated, a spare master disk manufacturing center of rotation electron beam mirror is detected. A tube can be used.

  According to a fourteenth aspect of the present invention, the electron beam apparatus according to the fourteenth aspect of the invention is based on the ninth, tenth, eleventh, twelfth or thirteenth aspect, wherein the alignment means is held by the original disk preparation disk holding means. And a moving means for moving the information recording electron beam column group so that the center of rotation of the optical disk and the rotational symmetry center of the plurality of information recording electron beam column columns coincide with each other. It is that.

  According to the electron beam apparatus of the fourteenth aspect of the present invention, the same operation as that of the ninth, tenth, eleventh, twelfth or thirteenth aspect of the invention can be obtained, and the master can be manufactured with a simple configuration. The disk for use and the electron beam column group can be aligned.

  According to the fifteenth aspect of the present invention, the electron beam apparatus according to the fifteenth aspect of the present invention is the master disc making disk according to the ninth, tenth, eleventh, twelfth or thirteenth aspect, wherein the alignment means is held by the master disc making disc holding means. And a plurality of deflectors in the information recording electron beam column so that the same electron beam irradiation as that in the case where the rotation center of the information recording beam coincides with the rotational symmetry center of the information recording electron beam column can be performed. It is comprised including the correction means which correct | amends the deflection | deviation signal supplied to.

  In the present invention, according to the electron beam apparatus of the fifteenth aspect of the invention, the same operation as that of the ninth, tenth, eleventh, twelfth or thirteenth aspect of the invention can be obtained, and the master can be manufactured with a simple configuration. The disk for use and the electron beam column group can be aligned.

  In the present invention, according to the electron beam apparatus of the first invention, the electron beam irradiation to the electron beam irradiation portion of the master disc is shared by a plurality of information recording electron beam barrels that are rotationally symmetric, and in parallel. Therefore, the throughput can be improved, and when a defective information recording electron beam column is detected, the electrons to the electron beam irradiation location shared by the defective information recording electron beam column are detected. Since beam irradiation can be performed using another information recording electron beam column that is rotationally symmetric, even if a defective information recording electron beam column is generated, the reduction in work efficiency is minimized. Can be suppressed.

  Further, in the present invention, according to the electron beam apparatus of the second invention, similarly to the electron beam apparatus of the first invention, a plurality of electron beams irradiated to the electron beam irradiation site of the master disk are rotationally symmetrical. The information recording electron beam column can be shared and performed in parallel, so that throughput can be improved, and when a defective information recording electron beam column is detected, defective information recording is performed. Electron beam irradiation can be performed on the electron beam irradiation location shared by the electron beam column for the use of the electron beam column for spare information recording. In addition, a decrease in work efficiency can be minimized.

  In the present invention, according to the electron beam apparatus of the third invention, the same effect as that of the electron beam apparatus of the first or second invention can be obtained, and defect information recording electron beam column detecting means is provided. Is configured to detect a defective information recording electron beam column based on the amount of reflected electrons or secondary electrons detected from the master disk, so that it is possible to detect defective information recording electrons with a simple configuration. A special effect that the beam barrel can be detected can be obtained.

  In the present invention, according to the electron beam apparatus of the fourth invention, the same effect as the electron beam apparatus of the first or second invention can be obtained, and an electron beam column detecting means for recording defective information. Is configured to detect a defective information recording electron beam column by detecting the leakage amount of the electron beam current, so it can detect a defective information recording electron beam column with a simple configuration. The special effect of being able to do it can be acquired.

  Further, in the present invention, the electron beam apparatus according to the fifth aspect of the present invention can obtain the same effects as those of the electron beam apparatus according to the first, second, third or fourth aspect of the invention, and can also be used for producing a master disk. Is prepared with electron beam irradiation amount equalizing means for equalizing the electron beam irradiation amount per unit area at each point in the radial direction of the master disk when rotating at a constant angular velocity. Even when the recording disk is rotated at a constant angular velocity, it is possible to obtain a special effect that information necessary for pit formation on the master disk can be recorded with high accuracy.

  In the present invention, according to the electron beam apparatus of the sixth aspect of the present invention, the same effect as the electron beam apparatus of the fifth aspect of the invention can be obtained, and the electron beam irradiation amount equalizing means is a master disk manufacturing disk. One pit formation portion is irradiated with an electron beam by one or more information recording electron beam barrels, and the number of information recording electron beam barrels irradiating one pit formation portion of the master disc is the number for master production. Since the information recording electron beam column is arranged so as to increase from the inner periphery to the outer periphery of the disk, the electron beam irradiation amount equalizing means can be simplified. A special effect can be obtained.

  In the present invention, according to the electron beam apparatus of the seventh invention, the same effect as the electron beam apparatus of the fifth invention can be obtained, and the electron beam irradiation amount equalizing means is a master disk production disk. By controlling the amount of current of the electron beam applied to the disk, the master disk produced by the master disk holder is rotated at a constant angular velocity at each point in the radial direction of the master disk. Since the electron beam irradiation amount per unit area is configured to be equalized as much as possible, it is possible to obtain a special effect that the electron beam irradiation amount equalizing unit can have a simple configuration.

  In the present invention, according to the electron beam apparatus of the eighth invention, the same effect as that of the electron beam apparatus of the fifth invention can be obtained. By controlling the number of times of irradiation of the electron beam irradiating one pit forming portion of the master disk, the master disk is held in the radial direction of the master disk when it is rotated at a constant angular velocity. Since the electron beam irradiation amount per unit area at each point is configured to be equalized as much as possible, it is possible to obtain a special effect that the electron beam irradiation amount equalizing means can be simplified. it can.

  In the present invention, according to the electron beam apparatus of the ninth invention, the same effects as those of the first, second, third, fourth, fifth, sixth, seventh or eighth invention can be obtained. And an alignment means for aligning the rotation center of the master disk and the rotational symmetry centers of the plurality of information recording electron beam barrels. A special effect that recording can be performed with high accuracy can be obtained.

  In the present invention, according to the electron beam apparatus of the tenth invention, the same effect as that of the ninth invention can be obtained, and the master disk preparation rotation center detecting means is the master disk preparation disk holding means. Irradiating an electron beam to a plurality of master disk-producing disk rotation center detection marks formed on the master disk-producing disk mounting surface and a plurality of master-producing disk rotation center detection marks to detect reflected electrons or secondary electrons. Since it is configured to include an electron beam column for detecting the center of rotation of the master disk for manufacturing the master disk, it is possible to detect the rotation center position of the disk for master disk manufacturing with a simple configuration and with high accuracy. A special effect can be obtained.

  According to the eleventh aspect of the present invention, the electron beam apparatus according to the eleventh aspect of the invention can obtain the same effects as those of the ninth aspect of the invention, and the master-preparing disk rotation center detecting means is formed on the master-preparing disk. In addition, a plurality of master disk-producing disk rotation center detection marks are configured to include a master disk-producing disk rotation center detection electron beam column having means for irradiating an electron beam to detect reflected electrons or secondary electrons. Therefore, it is possible to obtain a special effect that the rotation center position of the master disk can be detected with a simple configuration and high accuracy.

  Further, in the present invention, according to the electron beam apparatus of the twelfth aspect of the invention, it is possible to obtain the same operation as that of the tenth or eleventh aspect of the invention. Suppose that the same number of disc rotation center detection electron beam column as the master disc production center detection mark are arranged in rotational symmetry with the rotational symmetry centers of the plurality of information recording electron beam barrels as rotational symmetry centers. Therefore, it is possible to simultaneously obtain detection signals for a plurality of master disk production disc rotation center detection marks, and to efficiently detect the rotation center of the master production disk.

  Further, in the present invention, the electron beam device according to the thirteenth invention can obtain the same effects as those of the electron beam device according to the tenth, eleventh or twelfth invention, and can detect the center of rotation of the disk for producing the master disk. In this case, if a defective master disk preparation disk rotation center detection electron beam column is generated, a spare disk rotation center detection electron beam column detection disk is arranged in correspondence with the electron beam column. Therefore, a spare disk rotation center detection electron beam column for preparing a master can be used, and from this point, it is possible to obtain a special effect that the throughput can be improved.

  According to the electron beam apparatus of the fourteenth aspect of the present invention, the same effects as those of the ninth, tenth, eleventh, twelfth or thirteenth aspects of the invention can be obtained, and the aligning means is a master disk. Including a moving means for moving the master disk manufacturing disk holding means or the information recording electron beam column group so that the rotation center of the manufacturing disk and the rotational symmetry center of the plurality of information recording electron beam lens columns coincide with each other. Therefore, it is possible to obtain a special effect that the master disk and the electron beam column group can be aligned with a simple structure.

  According to the fifteenth aspect of the present invention, the electron beam apparatus according to the fifteenth aspect can obtain the same effects as those of the ninth, tenth, eleventh, twelfth or thirteenth aspects. In the plurality of information recording electron beam column so that the same electron beam irradiation as that in the case where the rotation center of the disc for production coincides with the rotational symmetry center of the information recording electron beam column can be performed. Since the correction means for correcting the deflection signal to be supplied to the deflector is configured, it is possible to achieve the special effect that the master disk and the electron beam column group can be aligned with a simple configuration. Obtainable.

  Hereinafter, a first embodiment and a second embodiment of the present invention will be described with reference to FIGS.

(First embodiment. FIG. 1 to FIG. 10)
FIG. 1 is a conceptual diagram of a first embodiment of the present invention. In FIG. 1, 1 is a vacuum chamber, 2 is a master disk for manufacturing a master disk necessary for manufacturing an optical disk, and the master disk 2 is formed by, for example, applying an electron beam resist to a glass substrate. Configured.

  Further, 3 is a disk-producing disk holding means for holding and rotating the disk-producing disk 2 horizontally, 4 is a stage for rotating and moving the disk-producing disk holding means 3, and 5 is a rotation of the stage 4. It is a stage control unit that controls movement.

  The master disk preparation means 3 may be provided with a mechanism for rotating the master record disk 2, and the stage 4 may be configured to only move the master disk preparation means 3.

  Reference numeral 6 denotes a plurality of information recording electron beam barrels for recording information necessary for forming pits on the master disc 2 and a plurality of centers for detecting the rotation center of the master disc 2. This is an electron beam column group in which an original beam manufacturing disk rotation center detection electron beam column is arranged.

  Reference numeral 7 denotes an electron beam irradiation control for controlling the irradiation of the electron beam to the master disk 2 by the information recording electron beam lens barrel and the master disk-producing disk rotation center detecting electron beam cylinder constituting the electron beam column group 6. Part.

  Reference numeral 8 denotes a defect in which a defective electron beam column is detected from a reflected electron detection amount obtained through a reflected electron detector provided in the information recording electron beam column and the disk rotation center detection electron beam column for producing the master disc. This is an electron beam column detector.

  Reference numeral 9 denotes a master disk manufacturing center for detecting the rotation center of a master disk from a reflected electron detection signal obtained via a backscattered electron detector included in the master disk manufacturing center of rotation electron beam column. It is.

  Reference numeral 10 denotes a system controller that performs overall control of the apparatus such as control of the stage control unit 5 and the electron beam irradiation control unit 7.

  FIG. 2 is a schematic plan view of the disk holding means 3 for producing a master disk. In FIG. 2, 12 is a disk mounting surface for master recording, 13 is a disk mounting location for master recording, 14 is a rotation center of the disk mounting surface 12 for master recording, that is, a rotation center of the disk 2 for master recording, and arrow A Indicates the rotation direction of the master disk-producing disk holding means 3, that is, the rotation direction of the master disk-producing disk 2.

  Further, 15-1 to 15-4 are formed in a rotationally symmetrical manner at an interval of 90 ° with respect to the rotation center 14 of the master disc 2 on the outer peripheral portion of the master disc-mounting portion 13 on the master disc-mounting surface 12. This is a disc rotation center detection mark for producing a master of the same shape.

  FIG. 3 is a schematic cross-sectional view along the line BB in FIG. 2, and the disk rotation center detection marks 15-1 to 15-4 for forming a master disk have a convex shape with a constant height, and The planar shape is an isosceles triangle, and the height direction of the isosceles triangle is formed so as to coincide with the radial direction of the master disc 2 mounted on the master disc mounting surface 12.

  FIG. 4 is a schematic diagram showing a planar configuration of the electron beam column group 6. In FIG. 4, 17 is an electron beam column arrangement disk, and 18 is the center of the electron beam column group 6 in which the center of rotation 14 of the master disk 2 is to coincide.

  Reference numerals 19-1 to 19-4 denote information recording electron beam barrel arrangement blocks on which information recording electron beam barrels are arranged. These information recording electron beam barrel arrangement blocks 19-1 to 19- Reference numeral 4 denotes a portion corresponding to the electron beam irradiation surface of the master disc 2 and is set to be rotationally symmetric with the center 18 of the electron beam column group 6 as the rotational symmetry center.

  Reference numerals 20-1 to 20-4 are electron beam column arrangement blocks for disc rotation center detection for master disc production in which electron beam barrels for disc rotation center detection for master disc production are arranged. The center detection electron beam barrel arrangement blocks 20-1 to 20-4 are also set to be rotationally symmetric with the center 18 of the electron beam barrel group 6 as the rotational symmetry center.

  Reference numerals 21-1 to 24-1 denote an information recording electron beam column arranged in the information recording electron beam column arrangement block 19-1, and reference numeral 25-1 denotes an electron beam column for detecting a disk rotation center for producing a master. This is an electron beam column for detecting the center of rotation of a master for producing a master arranged in the arrangement block 20-1.

  Reference numerals 21-2 to 24-2 denote an information recording electron beam column arranged in the information recording electron beam column arrangement block 19-2, and reference numeral 25-2 denotes an electron beam column for detecting a disk rotation center for producing a master. This is an electron beam column for detecting a disk rotation center for producing a master, which is arranged in the arrangement block 20-2.

  Reference numerals 21-3 to 24-3 denote information recording electron beam barrels arranged in the information recording electron beam barrel arrangement block 19-3, and reference numeral 25-3 denotes an electron beam barrel for detecting a disk rotation center for producing a master. This is an electron beam column for detecting a disk rotation center for producing a master, which is arranged in the arrangement block 20-3.

  Reference numerals 21-4 to 24-4 denote information recording electron beam barrels arranged in the information recording electron beam barrel arrangement block 19-4, and reference numeral 25-4 denotes an electron beam barrel for detecting a disk rotation center for producing a master. This is an electron beam column for detecting the center of rotation of a master for producing a master arranged in the arrangement block 20-4.

  The information recording electron beam column 21-1 to 21-4 can share the electron beam irradiation of the same track group, and the center 18 of the electron beam column group 6 has a rotational symmetry center at an interval of 90 °. Arranged in rotational symmetry.

  Further, the information recording electron beam barrels 22-1 to 22-4 can share the electron beam irradiation of the same track group, with the center 18 of the electron beam barrel group 6 being a rotationally symmetric center at an interval of 90 °. Arranged in rotational symmetry.

  The information recording electron beam barrels 23-1 to 23-4 can share the electron beam irradiation of the same track group, and the center 18 of the electron beam barrel group 6 has a rotational symmetry center at an interval of 90 °. Arranged in rotational symmetry.

  The information recording electron beam column 24-1 to 24-4 can share the electron beam irradiation of the same track group, and the center 18 of the electron beam column group 6 has a rotational symmetry center at an interval of 90 °. Arranged in rotational symmetry.

  Further, the electron beam column 25-1 to 25-4 for disc rotation center detection for master disc production correspond to the marks 15-1 to 15-4 for disc rotation center detection for master disc production, and the electron beam barrel group 6 Are arranged in a rotationally symmetric manner with an interval of 90 °, with the center 18 of the rotation being the center of rotational symmetry.

  That is, in the first embodiment of the present invention, four different radial distances from the rotation center 14 of the master disk 2 held by the master disk holder 3 on the electron beam column-arranged disk 17. Each of the four information recording electron beam barrels 21-1 to 21-4, 222-1 to 22-4, 23-1 to 23-4, 24-1 to 24-4 is arranged rotationally symmetrically. Yes.

  For example, as shown in FIG. 5, the information recording electron beam barrels 21-1 to 21-4, 22-1 to 22-4, 23-1 to 23-4, 24-1 to 24-4 Correspondingly, spare information recording electron beam barrels 26-1 to 26-4, 27-1 to 27-4, 28-1 to 28-4, 29-1 to 29-4 may be provided. good.

  Further, for example, as shown in FIG. 6, a disk rotation center detecting electron beam column 30 for spare master disk production is associated with the disk rotation center detecting electron beam column 25-1 to 25-4 for master disk production. -1 to 30-4 may be arranged.

  It should be noted that one electron beam column for detecting the disk rotation center for producing the master disk is sufficient if the work efficiency is not taken into consideration.

  Further, although not shown, as spare electron beam barrels, for example, spare information recording electron beam barrels 26-1 to 26-4, 27-1 to 27-4, 28-1 shown in FIG. ˜28-4, 29-1 to 29-4, and, for example, a spare master production disk rotation center detection electron beam column 30-1 to 30-4 shown in FIG. 6 may be provided. good.

  FIG. 7 is a conceptual diagram of the information recording electron beam column 21-1, and other information recording electron beam column 21-2 to 21-4, 222-1 to 22-4, 23-1 to 23-. 4, 24-1 to 24-4 and the disk rotation center detection electron beam column 25-1 to 25-4 for producing the master disc have the same structure.

  It should be noted that spare information recording electron beam barrels 26-1 to 26-4, 27-1 to 27-4, 28-1 to 28-4, 29-1 to 29-4, and spare master disk rotation When the center detection electron beam column 30-1 to 30-4 are provided, they are also of the same structure.

  In FIG. 7, 32 is an electron source, 33 is a gate electrode that extracts electrons for forming an electron beam from the electron source 32, and 34 is an anode electrode that accelerates electrons extracted from the electron source 33 to form an electron beam 35. is there.

  Reference numeral 36 denotes an electron beam diameter control lens that controls the diameter of the electron beam 35 and controls the current amount of the electron beam applied to the master disc 2 in combination with an electron beam diameter limiting aperture described later. A blanker for controlling irradiation and non-irradiation to the master disk 2, 38 is a blanking electrode, and 39 is an aperture plate.

  Reference numeral 40 denotes an electron beam diameter limiting aperture for limiting the diameter of the electron beam 35, and reference numeral 41 denotes a focusing lens that focuses the electron beam 35 on the electron beam resist surface of the master disk 2.

  Further, 42 is a deflector for deflecting the electron beam 35 to control the irradiation position on the master disk 2 and 43 is a reflected electron from the master disk 2 when the electron beam 35 is irradiated to the master disk 2. Is a backscattered electron detector.

  In the first embodiment of the present invention configured as described above, the master disc of the master disc preparation means 3 is irradiated before the electron beam irradiation for recording information necessary for pit formation on the master disc 2 is performed. The rotation center 14 of the master disk 2 mounted on the master disk preparation location 13 on the master disk mounting surface 12 is detected, and the rotation center 14 of the master disk 2 and the center 18 of the electron beam column group 6 are detected. Can be matched.

  Here, when the rotation center 14 of the master disk 2 is detected, the master disk-rotating center detection electron beam column 25-1 is rotated while the master disk holder 3 is rotated by 1/4. ˜25-4 is used to simultaneously irradiate the disk-mounting surface 12 for producing a master of the master-producing disk holding means 3 with an electron beam.

  In this way, in the master disk preparation disk rotation center detection electron beam column 25-1 to 25-4, the master disk preparation disk rotation center detection marks 15-1 to 15-5 are respectively connected via the backscattered electron detector. The reflected electron detection signals S1 to S4 obtained by detecting the reflected electrons from 15-4 can be obtained.

  In this case, when the rotation center 14 of the master disk 2 and the center 18 of the electron beam column group 6 coincide with each other, the reflected electron detection signals S1 to S4 are shown in FIG. Thus, the signals have the same H level width T1 to T4.

  On the other hand, for example, as shown in FIG. 9, when the rotation center 14 of the master disk 2 is displaced in the direction of arrow C with respect to the center 18 of the electron beam column group 6, As shown in FIG. 10, the reflected electron detection signals S1 to S4 are signals in which the H level widths T1 to T4 are set to T1 <T2 <T3> T4.

  Therefore, in this case, the master disk preparation disk rotation center detection unit 9 calculates the position of the rotation center 14 of the master disk preparation disk 2 from the widths T1 to T4 of the reflected electron detection signals S1 to S4, and this is used as a system. Transfer to the controller 10.

  Therefore, the system controller 10 determines the H level width T1 of the reflected electron detection signals S1 to S4 based on the calculated value of the position of the rotation center 14 of the master disk 2 that has been transferred from the master disk rotation center detector 9. A stage so that the disk-producing disk holding means 3 is moved so that T4 will be the same, that is, the rotation center 14 of the disk-producing disk 2 and the center 18 of the electron beam column group coincide with each other. By controlling the control unit 5, the stage control unit 5 moves the stage 4 so that the rotation center 14 of the master disk production disk 2 and the center 18 of the electron beam column group coincide with each other.

  From the beginning, the rotation center 14 of the master disk 2 and the center 18 of the electron beam column group 6 coincide with each other, or the rotation center 14 of the master disk disk 2 and the electron beam column group 6 After matching the center 18, the electron beam irradiation for recording information necessary for forming pits on the master disc 2 is performed.

  Electron beam irradiation for recording information necessary for forming pits on the master disk 2 is performed by information recording electron beam column 21-1 to 21-4, 222-1 to 22-4, 23. -1 to 23-4 and 24-1 to 24-4 are used at the same time to share the electron beam irradiation spot of the master disk 2 and are performed in parallel.

  Here, when a defective information recording electron beam column is generated, the defective information recording electron beam column is detected by the defective electron beam column detector 8, and the defective information recording electron beam column is detected. The cylinder is notified to the system controller 10.

  In this case, the system controller 10 uses the other information recording electron beam column that is rotationally symmetric with the electron beam irradiation position shared by the defective information recording electron beam column to irradiate with the electron beam. The controller 5 and the electron beam irradiation controller 7 are controlled.

  For example, when the information recording electron beam column 22-1 becomes defective, the system controller 10 uses the information recording electron beam column 22-2, for example, and uses the information recording electron beam column 22-2. 22-1 controls to irradiate the electron beam irradiation to the part which shares the electron beam irradiation.

  Thus, according to the first embodiment of the present invention, the information recording electron beam column 21-1 to 21-4, 222-1 to 22-4, 233-1 to 23-4, 24-1 are used. 24-4 can be used at the same time to share the electron beam irradiation location of the master disc 2 and irradiate it in parallel, so that the throughput can be improved.

  In addition, according to the first embodiment of the present invention, before the master disk 2 is irradiated with the electron beam, the center of rotation of the master disk 2 is detected and the stage 4 is moved to detect the master disk. Since the rotation center 14 of the disc 2 and the center 18 of the electron beam column group 6 can be aligned, information necessary for pit formation on the master disc 2 can be recorded with high accuracy. Instead of moving the master disk-producing disk holding means 3, the electron beam column group 6 may be moved.

  If the rotation center 14 of the master disk 2 and the center 18 of the electron beam column group 6 do not coincide with each other, the rotation center 14 of the master disk disk 2 and the center 18 of the electron beam column group 6 are the same. Are matched with each other so that the same electron beam irradiation can be performed as in the information recording electron beam barrels 21-1 to 21-4, 222-1 to 22-4, 23-1 to 23-. 4 and 24-1 to 24-4, by providing a correction means for correcting the deflection signal supplied to the deflector, the rotation center 14 of the master disc 2 and the center 18 of the electron beam column group 6 are aligned. You may comprise so that it may perform.

  In addition, according to the first embodiment of the present invention, the master disk preparation disk rotation center detection marks 15-1 to 15-4 are provided on the master disk preparation disk mounting surface 12 of the master disk preparation disk holding means 3, and the master disk is provided. Since the production disk rotation center detection electron beam column 25-1 to 25-4 is provided, the rotation center 14 of the master disk production disk 2 can be detected with a simple configuration and high accuracy. it can.

  In addition, according to the first embodiment of the present invention, since the defective electron beam column detector 8 is provided, a defective information recording electron beam column and a defective master disk producing disk rotation center detecting electron beam mirror are provided. The cylinder can be automatically detected.

  Then, the electron beam column-arranged disk 17 is different from the rotation center 14 of the master disk 2 mounted on the master disk-mounting portion 13 of the master disk-mounting surface 12 of the master disk-holding means 3 of the master disk 4. Four information recording electron beam barrels 21-1 to 21-4, 222-1 to 22-4, 233-1 to 23-4, 24-1 to 24-4 are rotated for each radial distance. In addition to arranging them symmetrically, the four electron beam barrels 25-1, 25-2, 25-3, 25-4 for detecting the disk rotation center for producing the master disk are arranged rotationally symmetrically.

  Therefore, when a defective information recording electron beam column is detected, other information recording electron beam mirrors that are rotationally symmetric with respect to the electron beam irradiation location that the defective information recording electron beam column shares Since a cylinder can be used, even when a defective information recording electron beam column is generated, a reduction in work efficiency can be minimized.

  In addition, when an electron beam column for detecting the rotation center of a defective master disk is detected, the electron beam irradiation at the electron beam irradiation part shared by the disk rotation center detection electron beam column for manufacturing a defective master disk is rotationally symmetrical. Therefore, even if a defective information recording electron beam column is generated, a reduction in work efficiency can be minimized.

  Further, according to the first embodiment of the present invention, the information recording electron beam column 21-1 to 21-4, 222-1 to 22-4, 233-1 to 23-4, 24-1 to 24- 4 and the electron beam column 25-1 to 25-4 for detecting the center of rotation of the disk for producing the master disk are provided with a backscattered electron detector for detecting the reflected electrons from the disk 2 for making the master disk. Since the defective electron beam column detector 8 for detecting the electron beam column is provided, it is possible to detect a defective electron beam column with a simple configuration.

  The information recording electron beam column 21-1 to 21-4, 22-1 to 22-4, 23-1 to 23-4, 24-1 to 24-4, and the disk rotation center detection electron for producing the master disc The beam barrels 25-1 to 25-4 are provided with secondary electron detectors for detecting secondary electrons from the master disk 2 and a defective electron beam column is detected from the detected amount of secondary electrons. An electron beam column detector may be provided to detect a defective electron beam column.

  Further, for example, a leakage electron beam current detector for detecting an electron beam current leaking to the gate electrode 33, the anode electrode 34, the electron beam diameter limiting aperture 40, etc. provided in the electron beam column is provided, and the electron beam current is provided. By detecting the amount of leakage, a defective electron beam column may be detected.

Second Embodiment FIG. 11
FIG. 11 is a diagram showing a main part of the second embodiment of the present invention, and is a schematic diagram showing a planar configuration of the electron beam column group 45 provided in the second embodiment of the present invention. In FIG. 11, parts corresponding to those in FIG. 4 are denoted by the same reference numerals, and redundant description thereof is omitted.

  The second embodiment of the present invention is an electron beam apparatus suitable for application to the case where the master disk 2 is rotated at a constant angular velocity, and includes an electron beam column group 45 shown in FIG. The configuration is generally the same as that of the first embodiment of the present invention shown in FIG.

  In FIG. 11, reference numerals 46-1 to 55-1 denote information recording electron beam barrels arranged in the information recording electron beam barrel arrangement block 19-1, and reference numerals 46-2 to 55-2 denote information recording electron beam mirrors. An information recording electron beam column arranged in the cylinder arrangement block 19-2, 46-3 to 55-3 are information recording electron beam column arranged in the information recording electron beam column arrangement block 19-3, Reference numerals 46-4 to 55-4 denote information recording electron beam barrels arranged in the information recording electron beam barrel arrangement block 19-4.

  These information recording electron beam barrels 46-1 to 55-1, 46-2 to 55-2, 46-3 to 55-3, and 46-4 to 55-4 are included in the first embodiment of the present invention. The configuration is the same as that of the information recording electron beam column.

  Here, the information recording electron beam column 46-P (where P = 1, 2, 3, 4) is used to irradiate the 1-pit forming portion of the master disc 2 with an electron beam. However, the information recording electron beam column 47-P and 48-P constitute a small group of information recording electron beam columns that irradiate an electron beam onto the 1 pit formation portion of the master disc 2 with these two. ing.

  Further, the information recording electron beam column 49-P, 50-P, 51-P is a small information recording electron beam column that irradiates an electron beam to the 1 pit formation portion of the master disc 2 with these three. It constitutes a group.

  The information recording electron beam column 52-P, 53-P, 54-P, 55-P is an information recording electron that irradiates the 1-pit forming portion of the master disk 2 with these four. It constitutes a small group of beam barrels.

  Further, the information recording electron beam column 46-1 to 46-4 are arranged at the center of the electron beam column group 45 so that the electron beam irradiation can be shared with respect to the electron beam irradiation point of the same track group of the master disc 2. They are arranged in a rotationally symmetric manner with an interval of 90 ° with 18 as a rotationally symmetric center.

  Also, an information recording electron beam mirror subgroup consisting of information recording electron beam barrels 47-1, 48-1 and an information recording electron beam mirror consisting of information recording electron beam barrels 47-2, 48-2. Information recording comprising an information recording electron beam column small group consisting of a small tube group, information recording electron beam column tubes 47-3 and 48-3, and information recording electron beam column 47-4 and 48-4 The electron beam column small group is 90 ° with the center 18 of the electron beam column group 45 as the rotational symmetry center so that the electron beam irradiation can be shared with the electron beam irradiation point of the same track group of the master disk 2. Arranged rotationally symmetrically at intervals.

  In addition, an information recording electron beam column subgroup consisting of information recording electron beam column 49-1, 50-1, 51-1, information recording electron beam column 49-2, 50-2, 51-2. Information recording electron beam column subgroup consisting of information recording electron beam column subgroups 49-3, 50-3, 51-3, and information recording electron beam mirror The information recording electron beam column subgroup consisting of the cylinders 49-4, 50-4, 51-4 is arranged so as to share the electron beam irradiation with respect to the electron beam irradiation positions of the same track group of the master disc 2. The beam barrel groups 45 are arranged rotationally symmetrically at intervals of 90 ° with the center 18 of the beam barrel group 45 as the rotationally symmetric center.

  Further, an information recording electron beam column subgroup consisting of information recording electron beam column 52-1, 53-1, 54-1, 55-1, information recording electron beam column 52-2, 53-2. , 54-2, 55-2, an information recording electron beam column sub-group, and an information recording electron beam column 52-3, 53-3, 54-3, 55-3. The information recording electron beam column small group consisting of the tube small group and the information recording electron beam column 52-4, 53-4, 54-4, 55-4 is the same track group of the master disc 2 Are arranged in a rotationally symmetrical manner with an interval of 90 ° with the center 18 of the electron beam column group 45 as a rotationally symmetric center so that the electron beam irradiation can be shared with respect to the electron beam irradiated portions.

  That is, in the second embodiment of the present invention, one pit formation portion of the master disc 2 is irradiated with an electron beam by one or more information recording electron beam barrels, and one pit formation of the master disc 2 is formed. The information recording electron beam column is arranged so that the number of the information recording electron beam column irradiating the portion increases from the inner peripheral part to the outer peripheral part of the master disk production disk 2.

  According to the second embodiment of the present invention thus configured, the information recording electron beam barrels 46-1 to 55-1, 46-2 to 55-2, 46-3 to 55-3, 46- 4 to 55-4 can be used simultaneously to share the electron beam irradiation on the electron beam irradiation portion of the master disk 2 and perform it in parallel, so that the throughput can be improved.

  Further, when the master disk 2 is rotated at a constant angular velocity, the linear speed of the master disk 2 is higher in the outer peripheral portion than in the inner peripheral portion, but the second embodiment of the present invention is used. According to the present invention, the information recording electron beam column is arranged so that the number of information recording electron beam columns for irradiating one pit formation portion of the master disc 2 is increased from the inner periphery to the outer periphery. Even when the master disk 2 is rotated at a constant angular velocity, the electron beam irradiation amount per unit area at each point in the radial direction of the master disk 2 can be equalized as much as possible. Information necessary for pit formation on the master disc 2 can be recorded with high accuracy.

  Electron beam diameter control lenses provided in the information recording electron beam barrels 46-1 to 55-1, 46-2 to 55-2, 46-3 to 55-3, and 46-4 to 55-4. To control the amount of electron beam current applied to the master disc 2 to equalize the electron beam dose per unit area at each point in the radial direction of the master disc 2 as much as possible. You may comprise so that it may do.

  Further, blanking electrodes provided in the information recording electron beam barrels 46-1 to 55-1, 46-2 to 55-2, 46-3 to 55-3, and 46-4 to 55-4 are controlled. In addition, by controlling the number of times the electron beam is irradiated to the pit formation portion, the electron beam irradiation amount per unit area at each point in the radial direction of the master disk 2 is configured to be as uniform as possible. Also good.

  Further, according to the second embodiment of the present invention, as in the first embodiment of the present invention, the center of rotation 14 of the master disc 2 is detected before the electron beam irradiation to the master disc 2 is performed. Since the center of rotation 14 of the master disk 2 and the center 18 of the electron beam column group 6 can be aligned, the information necessary for pit formation on the master disk 2 can be obtained from this point. Recording can be performed with high accuracy.

  Further, according to the second embodiment of the present invention, when a defective information recording electron beam column is detected, the defective information recording electron beam column does not constitute an information recording electron beam column small group. In the case of the information recording electron beam column, the electron beam irradiation to the electron beam irradiation portion shared by the defective information recording electron beam column is made rotationally symmetric without constituting the information recording electron beam column group. The information recording electron beam column can be performed by using some other information recording electron beam column, and the defective information recording electron beam column is a group of information recording electron beam columns. In this case, since it can be performed by using another information recording electron beam column small group which is rotationally symmetric, even when a defective information recording electron beam column is generated, the work efficiency is reduced. Minimize It is possible.

  Also in the second embodiment of the present invention, a spare information recording electron beam column is provided corresponding to the information recording electron beam column that does not constitute the information recording electron beam column subgroup, and the information recording is performed. A spare information recording electron beam barrel small group may be provided in correspondence with the electron beam barrel small group, or a spare disk rotation center detection electron beam barrel for preparing a master disk may be provided. Also good.

1 is a conceptual diagram of a first embodiment of the present invention. FIG. 3 is a schematic plan view of a master disc-producing disc holding means provided in the first embodiment of the present invention. It is a schematic sectional drawing in alignment with the BB line of FIG. It is a schematic diagram which shows the planar structure of the electron beam column group with which 1st Embodiment of this invention is provided. It is a schematic diagram which shows the example which arrange | positions the preliminary | backup electron beam barrel for information recording to the electron beam barrel arrangement | positioning disk with which 1st Embodiment of this invention is provided. It is a schematic diagram showing an example in which an electron beam column for detecting a disk rotation center for preparing a master disk is arranged on an electron beam column arrangement disk provided in the first embodiment of the present invention. 1 is a conceptual diagram of an information recording electron beam column included in a first embodiment of the present invention. It is a timing chart which shows an example of the backscattered electron detection signal obtained via the backscattered electron detector of the electron beam column for disc rotation center detection for master disc preparation provided in the first embodiment of the present invention. It is a schematic diagram for demonstrating the detection method of the rotation center of the disc for master recording in 1st Embodiment of this invention. It is a timing chart which shows the other example of the backscattered electron detection signal obtained via the backscattered electron detector of the electron beam column for disk rotation center detection for master disk preparation with which 1st Embodiment of this invention is provided. It is a schematic diagram which shows the principal part of 2nd Embodiment of this invention (schematic diagram which shows the planar structure of the electron beam barrel group with which 2nd Embodiment of this invention is provided).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Disc for producing master discs 3 Disc holding means for producing master discs 4 Stage 5 Stage controller 6 Electron beam column group 7 Electron beam irradiation controller 8 Defective electron beam column detector 9 9 Disc rotation center detector for producing master disc 10 System controller

Claims (9)

A master-producing disc holding means for holding and rotating the master-producing disc;
An information recording electron beam column in which a plurality of information recording electron beam columns are rotationally symmetrically arranged at different radial distances from the center of rotation of the master plate manufacturing disk held by the master disk manufacturing disk holding means. Group,
Equalizing the electron beam irradiation amount per unit area at each point in the radial direction of the master disk when the master disk is held at a constant angular velocity when held on the master disk holding means. Electron beam irradiation leveling means;
A master rotation disc detection center detecting means for detecting a rotation center of the master copy disc held by the master preparation disc holding means;
An electron comprising alignment means for aligning a rotation center of the master disk manufacturing disk held by the master disk manufacturing disk holding means with a rotational symmetry center of the plurality of information recording electron beam column. Beam device. The electron beam irradiation amount equalizing means irradiates one pit formation portion of the master disc with one or more information recording electron beam columns, and forms one pit portion of the master disc. The information recording electron beam column is arranged so that the number of the information recording electron beam column that irradiates is increased from the inner periphery to the outer periphery of the master disc that is held by the master disc holder. The electron beam apparatus according to claim 1, comprising: The electron beam irradiation amount equalizing means is held by the master disk preparation disk holding means by controlling the amount of electron beam current irradiated to the master disk preparation disk held by the master disk preparation disk holding means. The electron beam irradiation amount per unit area at each radial point of the master disk when the master disk is rotated at a constant angular velocity is equalized. The electron beam apparatus according to claim 1. The electron beam irradiation amount equalizing means controls the number of times of irradiation of the electron beam applied to one pit formation portion of the master disk making disk, thereby holding the master disk making disk held by the master making disk holding means. 2. The electron beam irradiation amount per unit area at each point in the radial direction of the master disk when the disk is rotated at a constant angular velocity is configured to be equalized. Electron beam device. The master disk making disk rotation center detecting means,
The master disk is formed in a rotationally symmetric manner with the center of rotation of the master disk as a rotational symmetry center outside the master disk-mounting portion of the master disk for mounting the master disk. A plurality of master disk production center rotation mark detection marks of the same shape whose width along the rotation direction differs depending on the distance from the rotation center of the master disk production disk,
Rotating master disk for rotation having a means for detecting reflected electrons or secondary electrons from the plurality of master disk-producing disk rotation center detection marks by irradiating the plurality of master disk-producing disk rotation center detection marks with an electron beam. The electron beam apparatus according to any one of claims 1 to 4, wherein the electron beam apparatus includes a center detection electron beam column. The master production disk rotation center detecting means is formed on the master production disk in a rotational symmetry with the rotation center of the master production disk as a rotational symmetry center, and a width along a rotation direction of the master production disk. Irradiates an electron beam to a plurality of master disk manufacturing disk rotation center detection marks having the same shape, which differ depending on the distance from the rotation center of the master disk manufacturing disk, and reflected electrons from the master disk manufacturing disk rotation center detection mark or The electron beam apparatus according to any one of claims 1 to 4, wherein the electron beam apparatus is configured to include an electron beam column for detecting a disk rotation center for producing a master disk having means for detecting secondary electrons. As the electron beam column for detecting the center of rotation of the master disk, the same number of electron beam columns for detecting the center of rotation of the master disk as the number of marks for detecting the center of rotation of the master disk, the plurality of information recording electron beams 7. The electron beam apparatus according to claim 5, wherein the electron beam apparatus is arranged in a rotational symmetry with the rotational symmetry center of the lens barrel as a rotational symmetry center. The aligning means is configured to produce the master so that the center of rotation of the master disk making disk held by the master disk making disk holding means matches the rotational symmetry center of the plurality of information recording electron beam column. 8. The electron beam apparatus according to claim 1, further comprising a moving means for moving the information disk holding means or the information recording electron beam column group. The aligning means is an electron beam similar to the case where the center of rotation of the master disk preparation disk held by the master disk preparation disk holding means is coincident with the rotational symmetry center of the information recording electron beam column. 8. A correction means for correcting a deflection signal supplied to a deflector in the plurality of information recording electron beam column so as to perform irradiation is configured. The electron beam apparatus according to any one of the above.

Images