JP2007222994A - Method of manufacturing entry sheet for drilling - Google Patents

Method of manufacturing entry sheet for drilling Download PDF

Info

Publication number
JP2007222994A
JP2007222994A JP2006047708A JP2006047708A JP2007222994A JP 2007222994 A JP2007222994 A JP 2007222994A JP 2006047708 A JP2006047708 A JP 2006047708A JP 2006047708 A JP2006047708 A JP 2006047708A JP 2007222994 A JP2007222994 A JP 2007222994A
Authority
JP
Japan
Prior art keywords
resin composition
drilling
composition layer
entry sheet
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006047708A
Other languages
Japanese (ja)
Other versions
JP4797690B2 (en
JP2007222994A5 (en
Inventor
Taro Yoshida
太郎 吉田
Reiki Akita
励紀 秋田
Yosuke Matsuyama
洋介 松山
Takuya Hazaki
拓哉 羽崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP2006047708A priority Critical patent/JP4797690B2/en
Publication of JP2007222994A publication Critical patent/JP2007222994A/en
Publication of JP2007222994A5 publication Critical patent/JP2007222994A5/ja
Application granted granted Critical
Publication of JP4797690B2 publication Critical patent/JP4797690B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Drilling And Boring (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an entry sheet for drilling, which provides excellent hole position accuracy at the time of drilling of a copper laminated sheet. <P>SOLUTION: In the method of manufacturing an entry sheet for drilling, a resin composition layer is attached to at least one surface of a metal foil. A surface smoothing processing of the resin composition layer is carried out. The surface roughness of the resin composition layer is 0.2 to 1.0 μm in center line average roughness (Ra), and 2 to 10 μm in ten-point average roughness (Rz). <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、プリント配線板の製造工程において、銅張積層板などのドリル孔明け加工の際に使用されるドリル孔明け用エントリーシートの製造方法に関するものである。   The present invention relates to a method for manufacturing an entry sheet for drilling used in drilling processing of a copper-clad laminate or the like in a printed wiring board manufacturing process.

プリント配線板材料に使用される銅張積層板のドリル孔明け加工方法としては、銅張積層板を重ねて、その最上部にアルミニウム箔等を配置し、ドリル孔明け加工を行う方法が一般的に採用されている。この際、加工孔の位置精度が十分でないと、後工程で銅張積層板に配線パターンを形成する際に、孔の設計位置とドリル加工された孔の実際の位置とにズレが生じ、パターンズレ不良が発生する問題がある。近年、プリント配線板材料に対する信頼性の向上の要求や高密度化の進展に伴い、孔位置精度の向上や孔壁粗さの低減などの高品質の孔明け加工が求められており、これに対応するために、ポリエチレングリコールなどの水溶性樹脂からなるシートを使用した孔明け加工法(例えば特許文献1参照)、金属箔に水溶性樹脂層を形成した孔明け用滑剤シート(例えば特許文献2参照)、熱硬化性樹脂薄膜を形成したアルミニウム箔に水溶性樹脂層を形成した孔明け用エントリーシート(例えば特許文献3参照)などが提案・実用化されている。ただ最近では、プリント配線板の小型化および軽量化のために配線パターンの微細化とスルーホールの小径化、合わせてプリント配線板表面孔位置のランドパターンの小径化が更に進み、許容される孔位置精度の範囲が益々狭くなってきている。このため、プリント配線板製造時の歩留まりを低下させ、生産コストを引き上げてしまう問題が生じ、より優れた孔位置精度を達成できるドリル孔明け用エントリーシートが切望されている。   As a drilling method for copper-clad laminates used for printed wiring board materials, a method is generally used in which a copper-clad laminate is stacked and aluminum foil or the like is placed on the top of the copper-clad laminate and drilled. Has been adopted. At this time, if the position accuracy of the processed hole is not sufficient, when the wiring pattern is formed on the copper-clad laminate in the subsequent process, a deviation occurs between the design position of the hole and the actual position of the drilled hole. There is a problem that misalignment occurs. In recent years, with the demand for improved reliability of printed wiring board materials and the progress of higher density, high-quality drilling such as improved hole location accuracy and reduced hole wall roughness has been demanded. In order to cope with this, a drilling method using a sheet made of a water-soluble resin such as polyethylene glycol (for example, see Patent Document 1), a drilling lubricant sheet in which a water-soluble resin layer is formed on a metal foil (for example, Patent Document 2) For example, a punching entry sheet (see, for example, Patent Document 3) in which a water-soluble resin layer is formed on an aluminum foil on which a thermosetting resin thin film is formed has been proposed and put to practical use. However, recently, in order to reduce the size and weight of printed wiring boards, miniaturization of wiring patterns and through-hole diameters have been further reduced, and land patterns on the surface of printed wiring boards have been further reduced in diameter. The range of position accuracy is getting narrower. For this reason, the problem of reducing the yield at the time of manufacture of a printed wiring board and raising production cost arises, and the entry sheet for drilling which can achieve more excellent hole position accuracy is eagerly desired.

特開平4−92494号公報JP-A-4-92494 特開平6−344297号公報JP-A-6-344297 特開2003−136485号公報JP 2003-136485 A

本発明の目的は、従来技術における上記した課題を解決する、銅張積層板のドリル孔明け加工において、優れた孔位置精度が得られるドリル孔明け用エントリーシートの製造方法を提供するものである。   SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing an entry sheet for drilling that can provide excellent hole position accuracy in drilling a copper-clad laminate that solves the above-described problems in the prior art. .

本発明者らは孔明け用エントリーシートの樹脂組成物層の表面状態に注目して鋭意研究を重ねた結果、樹脂組成物層の表面粗さを特定範囲に抑制することで良好な穴位置精度が得られる事を見出し本発明に到達した。即ち本発明は、金属箔の少なくとも片面に樹脂組成物層を付着させたドリル孔明け用エントリーシートの製造方法において、該樹脂組成物層の表面平滑化処理を行い、樹脂組成物層の表面粗さを、中心線平均粗さ(Ra)で 0.2〜1.0μm、十点平均粗さ(Rz)で 2〜10μmとするドリル孔明け用エントリーシートの製造方法であり、好ましくは該樹脂組成物を加熱溶融して、樹脂組成物層を形成させ、該樹脂組成物層を金属箔と貼り合せるドリル孔明け用エントリーシートの製造方法であり、該樹脂組成物層の厚みが10〜200μmであるドリル孔明け用エントリーシートの製造方法であり、更に好ましくは該樹脂組成物が水溶性樹脂(a)を含有する樹脂組成物であるドリル孔明け用エントリーシートの製造方法であり、該金属箔が厚み50〜500μmのアルミニウム箔であるドリル孔明け用エントリーシートの製造方法である。   As a result of intensive studies focusing on the surface state of the resin composition layer of the punching entry sheet, the present inventors have achieved excellent hole position accuracy by suppressing the surface roughness of the resin composition layer to a specific range. The present invention has been found. That is, the present invention provides a method for producing an entry sheet for drilling in which a resin composition layer is attached to at least one side of a metal foil, and the resin composition layer is subjected to a surface smoothing treatment to obtain a surface roughness of the resin composition layer. Is a manufacturing method of an entry sheet for drilling, wherein the center line average roughness (Ra) is 0.2 to 1.0 μm and the ten-point average roughness (Rz) is 2 to 10 μm, preferably the resin composition A drill having a thickness of 10 to 200 μm, wherein the resin composition layer is formed by heating and melting to form a resin composition layer, and the resin composition layer is bonded to a metal foil. A method for producing an entry sheet for drilling, more preferably a method for producing an entry sheet for drilling, wherein the resin composition is a resin composition containing a water-soluble resin (a), and the metal foil has a thickness. 50-500μm aluminum foil This is a method of manufacturing an entry sheet for drilling.

本発明で得られるドリル孔明け用エントリーシートを使用する事で、従来技術と比較してドリル加工において高い孔位置精度が得られた。これにより課題であったプリント配線板製造の後工程において配線のパターンズレ不良が少なくなり、歩留まり向上が図れるため、プリント配線板の製造コストを引き下げることができる。   By using the drill hole entry sheet obtained in the present invention, higher hole position accuracy was obtained in drilling than in the prior art. As a result, wiring pattern misalignment defects are reduced in the subsequent process of manufacturing the printed wiring board, which is a problem, and the yield can be improved, so that the manufacturing cost of the printed wiring board can be reduced.

本発明は、金属箔の少なくとも片面に、樹脂組成物層を付着させたドリル孔明け用エントリーシートの製造方法において、該樹脂組成物層の表面平滑化処理を行い、樹脂組成物層の表面粗さを、中心線平均粗さ(Ra)で 0.2〜1.0μm、十点平均粗さ(Rz)で 2〜10μmとするドリル孔明け用エントリーシートの製造方法である。金属箔の少なくとも片面に付着させる樹脂組成物層は、通常1層であるが、1層以上の複合層であってもよく、複合層の場合、樹脂組成物層の表面とは、複合層の表面を意味する。   The present invention provides a method for producing an entry sheet for drilling in which a resin composition layer is attached to at least one surface of a metal foil, wherein the resin composition layer is subjected to a surface smoothing treatment to obtain a surface roughness of the resin composition layer. This is a method for producing an entry sheet for drilling in which the center line average roughness (Ra) is 0.2 to 1.0 μm and the ten-point average roughness (Rz) is 2 to 10 μm. The resin composition layer attached to at least one surface of the metal foil is usually one layer, but may be one or more composite layers. In the case of a composite layer, the surface of the resin composition layer is defined as the composite layer. Means surface.

本発明で規定する表面粗さの中心線平均粗さ(Ra)と十点平均粗さ(Rz)は、JIS-B0601で定義されるものである。中心線平均粗さ(Ra)とは、粗さ曲線からその中心線の方向に測定長さLの部分を抜取り、この抜取り部分の中心線と粗さ曲線との偏差の絶対値を算術平均した値である。十点平均粗さ(Rz)とは断面曲線から基準長さLだけ抜き取った部分の平均線に対し、最高から5番目までの山頂の標高の平均値と最深から5番目までの谷底の標高の平均値との差の値である。表面粗さの測定方法には一般に市販されている表面粗さ計を用いる。表面粗さ計には微細プローブによる接触式、レーザーを使用した非接触式などがあるが、いずれの方式でも樹脂組成物層の表面粗さを測定することは可能であり、具体的な表面粗さ計としては、例えば(株)東京精密製の表面粗さ計サーフコムなどがある。   The center line average roughness (Ra) and ten-point average roughness (Rz) of the surface roughness defined in the present invention are defined by JIS-B0601. The centerline average roughness (Ra) is a portion of the measurement length L in the direction of the centerline from the roughness curve, and the arithmetic average of the absolute value of the deviation between the centerline of the sampling portion and the roughness curve. Value. The ten-point average roughness (Rz) is the average value of the highest elevation from the top to the fifth and the lowest elevation from the deepest to the bottom, relative to the average line of the reference length L extracted from the cross-section curve. It is the value of the difference from the average value. A commercially available surface roughness meter is generally used as a method for measuring the surface roughness. The surface roughness meter includes a contact type using a fine probe and a non-contact type using a laser. However, any method can measure the surface roughness of the resin composition layer. An example of the gauge is a surface roughness meter Surfcom manufactured by Tokyo Seimitsu Co., Ltd.

本発明のドリル孔明け用エントリーシートの製造方法では、金属箔に付着させる樹脂組成物層に使用する樹脂組成物は特に限定されないが、銅張積層板の孔明け加工後に加工孔および銅張積層板全体を洗浄する際に洗浄が容易となる、水溶性樹脂(a)を含有する樹脂組成物が好ましい。この樹脂組成物中には、各種添加剤も使用可能であり、例えば有機または無機の充填剤、染料、着色顔料等が目的に合わせて用いられる。   In the method for producing an entry sheet for drilling according to the present invention, the resin composition used for the resin composition layer attached to the metal foil is not particularly limited, but the processed hole and the copper-clad laminate are formed after the drilling of the copper-clad laminate. A resin composition containing the water-soluble resin (a) is preferable because it facilitates cleaning when the entire plate is cleaned. Various additives can also be used in the resin composition. For example, organic or inorganic fillers, dyes, coloring pigments, and the like are used in accordance with the purpose.

本発明においてドリル孔明け用エントリーシートの樹脂組成物層として好適に使用される水溶性樹脂(a)とは、常温、常圧において、水100gに対し、1g以上溶解する高分子化合物であれば、特に限定されるものではない。より好適なものとしては、ポリエチレンオキサイド、ポリプロピレンオキサイド、ポリビニルアルコール、ポリアクリル酸ソーダ、ポリアクリルアミド、ポリビニルピロリドン、カルボキシメチルセルロース、ポリテトラメチレングリコール、ポリエーテルエステル(b)が例示され、1種あるいは2種以上を適宜混合して使用することも可能である。また、ドリル孔明け時に潤滑効果を高めるために、これらの水溶性樹脂(a)に水溶性滑剤(c)を併用することが好ましい。   In the present invention, the water-soluble resin (a) suitably used as the resin composition layer of the drill hole entry sheet is a polymer compound that dissolves 1 g or more in 100 g of water at room temperature and normal pressure. There is no particular limitation. More preferred examples include polyethylene oxide, polypropylene oxide, polyvinyl alcohol, sodium polyacrylate, polyacrylamide, polyvinyl pyrrolidone, carboxymethyl cellulose, polytetramethylene glycol, polyether ester (b), and one or two of them. It is also possible to use a mixture of the above as appropriate. In order to enhance the lubricating effect when drilling, it is preferable to use a water-soluble lubricant (c) in combination with these water-soluble resins (a).

本発明において好適に使用される水溶性樹脂(a)の1種であるポリエーテルエステル(b)とは、ポリアルキレンオキシドのエステル化物であれば、特に限定されるものではない。 代表的な例としては、ポリエチレングリコール、ポリエチレンオキサイド、ポリプロピレングリコール、ポリテトラメチレングリコール、ポリプロピレンオキサイドやこれらの共重合物で例示されるグリコール類、またはエチレンオキサイド類の重合物と、フタル酸、イソフタル酸、テレフタル酸、セバシン酸等、及びそれらのジメチルエステル、ジエチルエステル等、ピロメリット酸無水物等で例示される多価カルボン酸、その無水物、またはそのエステルとを反応させて得られる樹脂などが挙げられ、1種もしくは2種以上を適宜混合して使用することも可能である。   The polyether ester (b), which is one of the water-soluble resins (a) preferably used in the present invention, is not particularly limited as long as it is an esterified product of polyalkylene oxide. Typical examples include polyethylene glycol, polyethylene oxide, polypropylene glycol, polytetramethylene glycol, glycols exemplified by polypropylene oxide and copolymers thereof, or polymers of ethylene oxide, and phthalic acid, isophthalic acid. Terephthalic acid, sebacic acid, and the like, and dimethyl esters, diethyl esters and the like, polymellitic carboxylic acids exemplified by pyromellitic acid anhydride, the anhydrides, or resins obtained by reacting the esters, etc. It is also possible to use one kind or a mixture of two or more kinds as appropriate.

本発明において水溶性樹脂(a)に併用する水溶性滑剤(c)としては、具体的には、ポリエチレングリコール、ポリプロピレングリコール;ポリオキシエチレンオレイルエーテル、ポリオキシエチレンセチルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンノニルフェニルエーテル、ポリオキシエチレンオクチルフェニルエーテルなどで例示されるポリオキシエチレンのモノエーテル類;ポリオキシエチレンモノステアレート、ポリオキシエチレンソルビタンモノステアレート;ヘキサグリセリンモノステアレート、デカヘキサグリセリンモノステアレートなどで例示されるポリグリセリンモノステアレート類;ポリオキシエチレンプロピレン共重合体などが挙げられ、1種もしくは2種以上を適宜配合して使用することも可能である。水溶性滑剤(c)の配合量は、水溶性樹脂(a)と水溶性滑剤(c)の配合量の合計100重量部に対して、10〜90重量部、より好ましくは20〜80重量部である。水溶性滑剤(c)が10重量部未満ではドリル孔明け時の潤滑性に問題が生じ易く、90重量部を超えると樹脂層が脆くなる。   Specific examples of the water-soluble lubricant (c) used in combination with the water-soluble resin (a) in the present invention include polyethylene glycol, polypropylene glycol; polyoxyethylene oleyl ether, polyoxyethylene cetyl ether, polyoxyethylene stearyl ether, Polyoxyethylene monoethers exemplified by polyoxyethylene lauryl ether, polyoxyethylene nonylphenyl ether, polyoxyethylene octylphenyl ether, etc .; polyoxyethylene monostearate, polyoxyethylene sorbitan monostearate; hexaglycerin mono Examples include polyglycerol monostearates exemplified by stearate, decahexaglycerol monostearate, and the like; polyoxyethylene propylene copolymers and the like. Can be used in combination of two or more. The blending amount of the water-soluble lubricant (c) is 10 to 90 parts by weight, more preferably 20 to 80 parts by weight with respect to 100 parts by weight of the total blending amount of the water-soluble resin (a) and the water-soluble lubricant (c). It is. If the water-soluble lubricant (c) is less than 10 parts by weight, there is a problem in lubricity when drilling, and if it exceeds 90 parts by weight, the resin layer becomes brittle.

本発明において使用される金属箔としては、厚み50〜500μmのアルミニウム箔が好ましい。アルミニウム箔の厚みが50μm未満では積層板のバリが発生し易く、500μmを超えると、発生する切り粉の排出が困難になる。アルミニウム箔の材質としては、純度95%以上のアルミニウムが好ましく、具体的には、JIS-H4160に規定される、5052、3004、3003、1N30、1050、1070、1085などが例示されるが、純度99.3%以上のアルミニウムがより好ましい。金属箔に、高純度のアルミニウム箔を使う事でドリルビットの衝撃の緩和や食いつき性が向上し、樹脂組成物層によるドリルビットの摩擦熱による発熱の軽減効果と相俟って、加工孔の内壁品質が向上する。また、これらアルミニウム箔に、予め厚さ0.1〜10μmの接着用皮膜が形成されているアルミニウム箔の使用が樹脂組成物との密着性の点から最も好ましい。接着用皮膜に使用される接着剤としては、ウレタン系、酢酸ビニル系、塩化ビニル系、ポリエステル系及び、それらの共重合体や、エポキシ系、シアネート系などの接着剤が例示される。   The metal foil used in the present invention is preferably an aluminum foil having a thickness of 50 to 500 μm. If the thickness of the aluminum foil is less than 50 μm, burrs of the laminate are likely to occur, and if it exceeds 500 μm, it becomes difficult to discharge the generated chips. As the material of the aluminum foil, aluminum having a purity of 95% or more is preferable, and specifically, 5052, 3004, 3003, 1N30, 1050, 1070, 1085, etc. defined in JIS-H4160 are exemplified. More than 99.3% aluminum is more preferable. By using high-purity aluminum foil for the metal foil, the impact of the drill bit is reduced and the biting property is improved. Combined with the effect of reducing the heat generated by the frictional heat of the drill bit by the resin composition layer, The inner wall quality is improved. In addition, the use of an aluminum foil in which an adhesive film having a thickness of 0.1 to 10 μm is previously formed on these aluminum foils is most preferable from the viewpoint of adhesion to the resin composition. Examples of the adhesive used for the adhesive film include urethane-based, vinyl acetate-based, vinyl chloride-based, polyester-based and copolymers thereof, and epoxy-based and cyanate-based adhesives.

本発明のドリル孔明け用エントリーシートの製造方法において、金属箔上に樹脂組成物層を付着させる方法としては、例えば、樹脂組成物を、適宜加熱溶融して、直接金属箔上に塗工して樹脂組成物層を形成させる方法や、予め樹脂組成物層(シート)を形成し、金属箔の少なくとも片面に樹脂組成物層(シート)を重ね、ロール等で加熱するか又は接着剤等により、貼り合わせる方法などがある。樹脂組成物層(シート)の製造方法としては、工業的に使用される公知の方法であれば、特に限定されない。具体的には、樹脂組成物をロールやニーダー、または他の混練手段を使用し、適宜加熱溶融して混合し、ロール法やカーテンコート法などで、離型フィルム上に樹脂組成物層を形成する方法や、樹脂組成物をロールやT−ダイ押出機等を使用し、予め所望の厚さの樹脂組成物シートに成形する方法などが例示される。   In the method for producing an entry sheet for drilling according to the present invention, as a method for attaching the resin composition layer on the metal foil, for example, the resin composition is appropriately heated and melted and directly applied onto the metal foil. The resin composition layer is formed in advance, or the resin composition layer (sheet) is formed in advance, the resin composition layer (sheet) is overlaid on at least one surface of the metal foil, and heated with a roll or the like or by an adhesive or the like There is a method of pasting together. The method for producing the resin composition layer (sheet) is not particularly limited as long as it is a known method used industrially. Specifically, the resin composition is appropriately heated and melted and mixed using a roll, kneader, or other kneading means, and a resin composition layer is formed on the release film by a roll method or a curtain coat method. And a method of forming a resin composition into a resin composition sheet having a desired thickness in advance using a roll, a T-die extruder, or the like.

本発明の製造方法で得られるドリル孔明け用エントリーシートの樹脂組成物層の厚みは、10〜200μmの範囲が好ましく、20〜100μmの範囲がより好ましい。樹脂組成物層の厚みが10μm未満では、ドリル加工時の発熱防止効果が不足して孔壁粗さが増加し、200μmを超えると、ドリルビットへの樹脂の巻き付きが増加して孔位置精度が低下する。   The thickness of the resin composition layer of the entry sheet for drilling obtained by the production method of the present invention is preferably in the range of 10 to 200 μm, more preferably in the range of 20 to 100 μm. If the thickness of the resin composition layer is less than 10 μm, the effect of preventing heat generation during drilling will be insufficient and the hole wall roughness will increase, and if it exceeds 200 μm, the winding of the resin around the drill bit will increase and the hole position accuracy will be increased. descend.

本発明のドリル孔明け用エントリーシートの製造方法は、該樹脂組成物層の表面平滑化処理を行い、樹脂組成物層の表面粗さを、中心線平均粗さ(Ra)で 0.2〜1.0μm、十点平均粗さ(Rz)で 2〜10μmの範囲にすることを特徴とする。樹脂組成物層の表面平滑化処理を行わない製造方法で得られるドリル孔明け用エントリーシートの樹脂組成物層の表面粗さは、中心線平均粗さ(Ra)で 1.2〜5.0μm、十点平均粗さ(Rz)で 10〜25μm程度であり、特に樹脂組成物層の厚みが厚いものは、表面粗さが大きくなる傾向がある。これらのドリル孔明け用エントリーシートを使用した場合は、特にドリル径が0.3mmφ以下の小径の場合に孔位置精度の悪化が顕著となってくる。   The method for producing an entry sheet for drilling according to the present invention includes a surface smoothing treatment of the resin composition layer, and the surface roughness of the resin composition layer is 0.2 to 1.0 μm in terms of centerline average roughness (Ra). The ten-point average roughness (Rz) is in the range of 2 to 10 μm. The surface roughness of the resin composition layer of the entry sheet for drilling obtained by a manufacturing method that does not perform the surface smoothing treatment of the resin composition layer is 1.2 to 5.0 μm in centerline average roughness (Ra), ten points. The average roughness (Rz) is about 10 to 25 μm, and particularly when the resin composition layer is thick, the surface roughness tends to increase. When these drill hole entry sheets are used, the deterioration of the hole position accuracy becomes remarkable particularly when the drill diameter is a small diameter of 0.3 mmφ or less.

本発明のドリル孔明け用エントリーシートの製造方法における樹脂組成物層の表面平滑化処理方法としては、樹脂組成物層の表面粗さが、中心線平均粗さ(Ra)で 0.2〜1.0μm、十点平均粗さ(Rz)で 2〜10μmの範囲になる表面平滑化処理方法であれば特に限定されないが、機械的な平滑化処理が好ましい。機械的な平滑化処理方法としては、得られた樹脂組成物層(シート)または樹脂組成物層を金属箔と付着させたシートを、圧着ロールに通す方法、プレス機によって加圧プレスを行う方法、樹脂組成物の表面を研磨装置で研磨を行う方法などが例示される。圧着ロールまたはプレス機による加圧の圧力は0.05〜0.5MPaの範囲が好ましく、特に0.1〜0.3MPaがより好ましい。圧力0.05Mpa未満では表面粗さの十分な改善効果が得られず、0.5MPaを超えると樹脂組成物層の厚みが変化する可能性が生じる。研磨装置で樹脂組成物の表面の研磨を行う方法としては、微細な研磨剤を使用する方法や研磨ロールに通す方法などがある。   As the surface smoothening treatment method of the resin composition layer in the method for producing an entry sheet for drilling according to the present invention, the surface roughness of the resin composition layer is 0.2 to 1.0 μm in terms of centerline average roughness (Ra), The surface smoothing method is not particularly limited as long as it has a 10-point average roughness (Rz) in the range of 2 to 10 μm, but mechanical smoothing is preferable. As a mechanical smoothing method, the obtained resin composition layer (sheet) or a sheet in which the resin composition layer is attached to a metal foil is passed through a pressure-bonding roll, and a pressure press is performed by a press. A method of polishing the surface of the resin composition with a polishing apparatus is exemplified. The pressure applied by the pressure roll or press is preferably in the range of 0.05 to 0.5 MPa, and more preferably 0.1 to 0.3 MPa. If the pressure is less than 0.05 MPa, a sufficient effect of improving the surface roughness cannot be obtained, and if it exceeds 0.5 MPa, the thickness of the resin composition layer may change. Examples of a method for polishing the surface of the resin composition with a polishing apparatus include a method using a fine abrasive and a method of passing through a polishing roll.

本発明の製造方法で得られるドリル孔明け用エントリーシートは、銅張積層板または多層銅張積層板をドリル孔明け加工する際に、銅張積層板または多層銅張積層板を1枚または複数枚を重ねたものの少なくとも最上面に、ドリル孔明け用エントリーシートの樹脂組成物層面側を上にして配置して使用する。以下に、実施例、比較例を示し、本発明を具体的に説明する。   The drill hole entry sheet obtained by the manufacturing method of the present invention is one or a plurality of copper-clad laminates or multilayer copper-clad laminates when drilling a copper-clad laminate or multilayer copper-clad laminate. At least the uppermost surface of the stacked sheets is used by placing the drilling entry sheet with the resin composition layer surface side up. Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples.

(実施例1)
数平均分子量15万のポリエチレンオキサイド(商品名:アルコックスR-150、明成化学工業製)65重量部と数平均分子量20,000のポリエチレングリコール(商品名:PEG20000、三洋化成工業製)35重量部を、ニーダーを使用して温度150℃で窒素ガスシール下に混練した後、100℃の加熱ロールに通して厚さ50μmの樹脂組成物シートAを得た。(樹脂組成物シートAの表面粗さは、中心線平均粗さ(Ra)で 1.9μm、十点平均粗さ(Rz)で 12μmであった。)次いで、樹脂組成物シートAを、25℃、圧力0.2MPaの圧着ロールにかけ、樹脂組成物シートBを得た。(樹脂組成物シートBの表面粗さは、中心線平均粗さ(Ra)で 0.8μm、十点平均粗さ(Rz)で 6μmであった。)この樹脂組成物シートBを、予め接着用皮膜としてポリエステル系接着剤(商品名:R820、セメダイン製)を5μm塗工した厚さ100μmのアルミニウム箔(材質:1N30)の片面に重ね、85℃の加熱ロールを使用して接着させ、ドリル孔明け用エントリーシートを得た。(ドリル孔明け用エントリーシートの樹脂組成物層の表面粗さは、中心線平均粗さ(Ra)で 0.7μm、十点平均粗さ(Rz)で 6μmでであった。)このドリル孔明け用エントリーシートを、厚さ0.8mmの銅張積層板を3枚重ねた上に、樹脂組成物層面側を上にして配置し、重ねた銅張積層板の下側には当て板(紙フェノール積層板)を配置してドリルビット:0.3mmφ、回転数:120,000rpm、送り速度:20μm/rev.の条件でドリル孔明け加工を行い、孔位置精度評価を行った結果を表1に示した。
Example 1
65 parts by weight of polyethylene oxide having a number average molecular weight of 150,000 (trade name: Alcox R-150, manufactured by Meisei Chemical Co., Ltd.) and 35 parts by weight of polyethylene glycol having a number average molecular weight of 20,000 (trade name: PEG 20000, manufactured by Sanyo Chemical Industries) After kneading under a nitrogen gas seal at a temperature of 150 ° C. using a kneader, the mixture was passed through a heating roll at 100 ° C. to obtain a resin composition sheet A having a thickness of 50 μm. (The surface roughness of the resin composition sheet A was 1.9 μm in centerline average roughness (Ra) and 12 μm in 10-point average roughness (Rz).) Next, the resin composition sheet A was treated at 25 ° C. The resin composition sheet B was obtained by applying it to a pressure-bonding roll having a pressure of 0.2 MPa. (The surface roughness of the resin composition sheet B was 0.8 μm in the center line average roughness (Ra) and 6 μm in the ten-point average roughness (Rz).) The resin composition sheet B was previously bonded. Overlay on one side of 100 μm thick aluminum foil (material: 1N30) coated with 5 μm of polyester adhesive (trade name: R820, manufactured by Cemedine) as a film, and adhere using a 85 ° C heating roll to drill holes I got an entry sheet for dawn. (The surface roughness of the resin composition layer of the entry sheet for drilling was 0.7 μm for the centerline average roughness (Ra) and 6 μm for the ten-point average roughness (Rz).) The entry sheet for the sheet is placed with three copper-clad laminates with a thickness of 0.8 mm on top, and the resin composition layer side facing up. Table 1 shows the results of drill hole drilling under the conditions of drill bit: 0.3mmφ, rotation speed: 120,000rpm, feed rate: 20μm / rev. .

(実施例2)
ポリエチレングリコール・ジメチルテレフタレート重縮合物(商品名:パオゲンPP-15、第一工業製薬製)50重量部、ポリオキシエチレンモノステアレート(商品名:ノニオンS-40、日本油脂製)50重量部を、ニーダーを使用して温度150℃の窒素雰囲気中で混練した後、100℃の押出機にて、厚さ100μmの樹脂組成物シートCを得た。(樹脂組成物シートCの表面粗さは、中心線平均粗さ(Ra)で 1.7μm、十点平均粗さ(Rz)で 16μmであった。)次いで、この樹脂組成物シートCを、プレス機を用いて25℃、圧力0.3MPaで、120秒間プレスを行い、樹脂組成物シートDを得た。(樹脂組成物シートDの表面粗さは、中心線平均粗さ(Ra)で 0.5μm、十点平均粗さ(Rz)で 5μmであった。)この樹脂組成物シートDを、厚さ50μmのアルミ箔(材質:1070)の片面に重ね、90℃の加熱ロールを使用して接着させ、ドリル孔明け用エントリーシートを得た。(ドリル孔明け用エントリーシートの樹脂組成物層の表面粗さは、中心線平均粗さ(Ra)で 0.6μm、十点平均粗さ(Rz)で 4μmであった。)このドリル孔明け用エントリーシートを、厚さ0.1mmの銅張積層板を4枚重ねた上面に、樹脂組成物層表面側を上にして配置し、重ねた銅張積層板の下側には当て板(紙フェノール積層板)を配置してドリルビット:0.15mmφ、回転数:160,000rpm、送り速度:15μm/rev.の条件でドリル孔明け加工を行い、孔位置精度評価を行った結果を表1に示した。
(Example 2)
Polyethylene glycol dimethyl terephthalate polycondensate (trade name: Paogen PP-15, Daiichi Kogyo Seiyaku Co., Ltd.) 50 parts by weight, polyoxyethylene monostearate (trade name: Nonion S-40, made by Nippon Oil & Fats) 50 parts by weight After kneading in a nitrogen atmosphere at a temperature of 150 ° C. using a kneader, a resin composition sheet C having a thickness of 100 μm was obtained with an extruder at 100 ° C. (The surface roughness of the resin composition sheet C was 1.7 μm in the center line average roughness (Ra) and 16 μm in the ten-point average roughness (Rz).) Next, the resin composition sheet C was pressed. A resin composition sheet D was obtained by pressing for 120 seconds at 25 ° C. and a pressure of 0.3 MPa using a machine. (The surface roughness of the resin composition sheet D was 0.5 μm in centerline average roughness (Ra) and 5 μm in 10-point average roughness (Rz).) The resin composition sheet D was 50 μm in thickness. An aluminum foil (material: 1070) was stacked on one side and bonded using a 90 ° C heating roll to obtain an entry sheet for drilling. (The surface roughness of the resin composition layer of the entry sheet for drilling was 0.6 μm for the centerline average roughness (Ra) and 4 μm for the ten-point average roughness (Rz).) The entry sheet is placed on the top of four stacked copper-clad laminates with a thickness of 0.1 mm, with the resin composition layer surface side facing up. Table 1 shows the results of drill hole drilling with a drill bit of 0.15 mmφ, rotation speed: 160,000 rpm, feed rate: 15 μm / rev. .

(比較例1)
実施例1で得られた樹脂組成物シートAをそのまま使用して、予め接着用皮膜としてポリエステル系接着剤(R820)を5μm塗工した厚さ100μmのアルミニウム箔(材質:1N30)の片面に重ね、85℃の加熱ロールを使用して接着させ、ドリル孔明け用エントリーシートを得た。(ドリル孔明け用エントリーシートの樹脂組成物層の表面粗さは、中心線平均粗さ(Ra)で 1.8μm、十点平均粗さ(Rz)で 12μmであった。)この孔明け用エントリーシート使用して実施例1と同様にドリル孔明け加工を行い、孔位置精度評価を行った結果を表1に示した。
(Comparative Example 1)
The resin composition sheet A obtained in Example 1 is used as it is, and is laminated on one side of a 100 μm thick aluminum foil (material: 1N30) coated with 5 μm of a polyester-based adhesive (R820) as an adhesive film in advance. And an adhesive sheet using a heating roll at 85 ° C. to obtain an entry sheet for drilling. (The surface roughness of the resin composition layer of the drilling entry sheet was 1.8 μm for the centerline average roughness (Ra) and 12 μm for the ten-point average roughness (Rz).) Table 1 shows the results of drilling using the sheet in the same manner as in Example 1 and evaluating the hole position accuracy.

(比較例2)
実施例2で得られた樹脂組成物シートCをそのまま使用して、厚さ50μmのアルミ箔(材質:1070)の片面に重ね、90℃の加熱ロールを使用して接着させ、ドリル孔明け用エントリーシートを得た。(このドリル孔明け用エントリーシートの樹脂組成物層の表面粗さは、中心線平均粗さ(Ra)で 1.7μm、十点平均粗さ(Rz)で 15μmであった。)この孔明け用エントリーシートを使用して実施例2と同様にドリル孔明け加工を行い、孔位置精度評価を行った結果を表1に示した。
(Comparative Example 2)
Using the resin composition sheet C obtained in Example 2 as it is, overlaying it on one side of a 50 μm thick aluminum foil (material: 1070) and bonding it using a 90 ° C. heating roll, for drilling I got an entry sheet. (The surface roughness of the resin composition layer of this entry sheet for drilling was 1.7 μm in centerline average roughness (Ra) and 15 μm in 10-point average roughness (Rz).) Table 1 shows the results of drilling using the entry sheet in the same manner as in Example 2 and evaluating the hole position accuracy.

(表1)
項 目 実施例1 実施例2 比較例1 比較例2
樹脂組成物層の表面粗さ(単位μm)
中心線平均粗さ(Ra) 0.7 0.6 1.8 1.7
十点平均粗さ(Rz) 6 4 12 15
孔位置測定結果(単位μm)
平均+3σ 21 12 36 18
最大 40 35 45 40
プリント配線板の歩留まり 97% 97% 80% 83%
(Table 1)
Item Example 1 Example 2 Comparative Example 1 Comparative Example 2
Surface roughness of resin composition layer (unit: μm)
Centerline average roughness (Ra) 0.7 0.6 1.8 1.7
Ten-point average roughness (Rz) 6 4 12 15
Hole position measurement result (unit: μm)
Average + 3σ 21 12 36 18
Maximum 40 35 45 40
Printed circuit board yield 97% 97% 80% 83%

<測定方法>
1)表面粗さ:500mm×400mmサイズのシートの四隅と中央部の計5箇所から100mm×100mmのサンプルを切り出し、それぞれのサンプルについて、端と中央部の2箇所を、測定幅10mm、測定スピード0.3mm/秒の条件で、表面粗さ測定装置(東京精密製サーフコム)で測定、合計10箇所の平均値を算出。
2)孔位置精度:重ねた銅張積層板の最下板の裏側について、ビット5本×3000孔/本=15000孔の指令座標とのズレを測定し、平均と標準偏差および最大値を示す。
3)プリント配線板の歩留まり:孔位置精度測定に使用した銅張積層板に銅メッキを行い、孔径より50μm大きい形のランドパターンで500孔連結のチェーンパターンを30ブロック形成したプリント配線板とし、電気導通の有無により歩留まりを求めた。
<Measurement method>
1) Surface roughness: Cut out a 100mm x 100mm sample from a total of 5 corners in the four corners and the center of a 500mm x 400mm size sheet, and for each sample, 2 places at the edge and the center, measuring width 10mm, measuring speed Measured with a surface roughness measuring device (Surfcom manufactured by Tokyo Seimitsu) under the condition of 0.3 mm / sec.
2) Hole position accuracy: On the back side of the bottom plate of the stacked copper-clad laminate, measure the deviation from the command coordinates of 5 bits x 3000 holes / piece = 15000 holes, and show the average, standard deviation and maximum value .
3) Printed wiring board yield: A copper-clad laminate used for hole position accuracy measurement is plated with copper, and a printed wiring board is formed with 30 blocks of a chain pattern of 500 holes connected with a land pattern 50 μm larger than the hole diameter. The yield was determined by the presence or absence of electrical continuity.

Claims (5)

金属箔の少なくとも片面に樹脂組成物層を付着させたドリル孔明け用エントリーシートの製造方法において、該樹脂組成物層の表面平滑化処理を行い、樹脂組成物層の表面粗さを、中心線平均粗さ(Ra)で 0.2〜1.0μm、十点平均粗さ(Rz)で 2〜10μmとするドリル孔明け用エントリーシートの製造方法。   In the manufacturing method of the drill hole entry sheet in which the resin composition layer is attached to at least one surface of the metal foil, the resin composition layer is subjected to a surface smoothing treatment, and the surface roughness of the resin composition layer is determined from the center line. A method for producing an entry sheet for drilling, in which the average roughness (Ra) is 0.2 to 1.0 μm and the ten-point average roughness (Rz) is 2 to 10 μm. 請求項1記載のドリル孔明け用エントリーシートの製造方法において、該樹脂組成物を加熱溶融して、樹脂組成物層を形成させ、該樹脂組成物層と金属箔とを貼り合せるドリル孔明け用エントリーシートの製造方法。   2. The method for producing an entry sheet for drilling according to claim 1, wherein the resin composition is heated and melted to form a resin composition layer, and the resin composition layer and the metal foil are bonded together. Entry sheet manufacturing method. 該樹脂組成物層の厚みが10〜200μmである請求項1または2記載のドリル孔明け用エントリーシートの製造方法。   The method for producing an entry sheet for drilling according to claim 1 or 2, wherein the resin composition layer has a thickness of 10 to 200 µm. 該樹脂組成物が水溶性樹脂(a)を含有する樹脂組成物である請求項1〜3のいずれかに記載のドリル孔明け用エントリーシートの製造方法。   The method for producing an entry sheet for drilling according to any one of claims 1 to 3, wherein the resin composition is a resin composition containing a water-soluble resin (a). 該金属箔が厚み50〜500μmのアルミニウム箔である請求項1〜4のいずれかに記載のドリル孔明け用エントリーシートの製造方法。   The method for producing an entry sheet for drilling according to any one of claims 1 to 4, wherein the metal foil is an aluminum foil having a thickness of 50 to 500 µm.
JP2006047708A 2006-01-27 2006-02-24 Method of manufacturing entry sheet for drilling Active JP4797690B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006047708A JP4797690B2 (en) 2006-01-27 2006-02-24 Method of manufacturing entry sheet for drilling

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006018530 2006-01-27
JP2006018530 2006-01-27
JP2006047708A JP4797690B2 (en) 2006-01-27 2006-02-24 Method of manufacturing entry sheet for drilling

Publications (3)

Publication Number Publication Date
JP2007222994A true JP2007222994A (en) 2007-09-06
JP2007222994A5 JP2007222994A5 (en) 2009-07-23
JP4797690B2 JP4797690B2 (en) 2011-10-19

Family

ID=38545272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006047708A Active JP4797690B2 (en) 2006-01-27 2006-02-24 Method of manufacturing entry sheet for drilling

Country Status (1)

Country Link
JP (1) JP4797690B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009151107A1 (en) * 2008-06-10 2009-12-17 三菱瓦斯化学株式会社 Entry sheet for drilling
WO2011025144A2 (en) * 2009-08-26 2011-03-03 (주)상아프론테크 Entry sheet for printed circuit board hole boring, water-soluble lubricating resin composition used with same and production method for same
KR101041924B1 (en) * 2009-08-26 2011-06-16 (주)상아프론테크 Entry Sheet for Drilling hole in Printed Circuit Boards, Lubricant Resin Composition and Method for Preparing the Same
WO2011158510A1 (en) * 2010-06-18 2011-12-22 三菱瓦斯化学株式会社 Drill hole entry sheet
CN103056918A (en) * 2012-12-21 2013-04-24 深圳市柳鑫实业有限公司 Aluminum sheet for improving accuracy of hole site of drill hole and manufacturing method
CN103282168A (en) * 2010-12-28 2013-09-04 三菱瓦斯化学株式会社 Drill entry sheet
CN103552126A (en) * 2009-06-05 2014-02-05 三菱瓦斯化学株式会社 Cover plate for drilling
JP2018024056A (en) * 2016-08-10 2018-02-15 昭北ラミネート工業株式会社 Entry board for small-bore diameter drilling, and small-bore diameter drilling method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102380892B (en) * 2010-09-03 2014-04-02 北京航天新风机械设备有限责任公司 Hole machining method of reinforced resin matrix composite prepreg of fiber fabric

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000025000A (en) * 1998-07-16 2000-01-25 Showa Alum Corp Entry sheet
JP2000061896A (en) * 1998-08-17 2000-02-29 Minami Denshi Kogyo Kk Patch for drilling
JP2003117891A (en) * 2001-10-18 2003-04-23 Iwatani Materials Corp Printed wiring board boring entry sheet, and printed wiring board boring method using the printed wiring board boring entry sheet
JP2003136485A (en) * 2001-10-31 2003-05-14 Mitsubishi Gas Chem Co Inc Entry sheet for boring and drilled hole boring method
JP2003179328A (en) * 2001-12-13 2003-06-27 Mitsubishi Gas Chem Co Inc Entry sheet for drilling
JP2004009193A (en) * 2002-06-05 2004-01-15 Otomo Kagaku Sangyo Kk Stiffening plate for perforation processing for printed board or the like

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000025000A (en) * 1998-07-16 2000-01-25 Showa Alum Corp Entry sheet
JP2000061896A (en) * 1998-08-17 2000-02-29 Minami Denshi Kogyo Kk Patch for drilling
JP2003117891A (en) * 2001-10-18 2003-04-23 Iwatani Materials Corp Printed wiring board boring entry sheet, and printed wiring board boring method using the printed wiring board boring entry sheet
JP2003136485A (en) * 2001-10-31 2003-05-14 Mitsubishi Gas Chem Co Inc Entry sheet for boring and drilled hole boring method
JP2003179328A (en) * 2001-12-13 2003-06-27 Mitsubishi Gas Chem Co Inc Entry sheet for drilling
JP2004009193A (en) * 2002-06-05 2004-01-15 Otomo Kagaku Sangyo Kk Stiffening plate for perforation processing for printed board or the like

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009151107A1 (en) * 2008-06-10 2009-12-17 三菱瓦斯化学株式会社 Entry sheet for drilling
CN102119074A (en) * 2008-06-10 2011-07-06 三菱瓦斯化学株式会社 Entry sheet for drilling
JP4821930B2 (en) * 2008-06-10 2011-11-24 三菱瓦斯化学株式会社 Entry sheet for drilling
RU2507065C2 (en) * 2008-06-10 2014-02-20 Мицубиси Гэс Кемикал Компани, Инк. Drilling mask
KR101346269B1 (en) 2008-06-10 2013-12-31 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 Entry sheet for drilling
CN103552126A (en) * 2009-06-05 2014-02-05 三菱瓦斯化学株式会社 Cover plate for drilling
WO2011025144A2 (en) * 2009-08-26 2011-03-03 (주)상아프론테크 Entry sheet for printed circuit board hole boring, water-soluble lubricating resin composition used with same and production method for same
WO2011025144A3 (en) * 2009-08-26 2011-04-21 (주)상아프론테크 Entry sheet for printed circuit board hole boring, water-soluble lubricating resin composition used with same and production method for same
KR101041924B1 (en) * 2009-08-26 2011-06-16 (주)상아프론테크 Entry Sheet for Drilling hole in Printed Circuit Boards, Lubricant Resin Composition and Method for Preparing the Same
CN102143815A (en) * 2009-08-26 2011-08-03 象牙芙蓉太克股份有限公司 Entry sheet for printed circuit board hole boring, water-soluble lubricating resin composition used with same and production method for same
CN103079781A (en) * 2010-06-18 2013-05-01 三菱瓦斯化学株式会社 Drill hole entry sheet
JP5067519B2 (en) * 2010-06-18 2012-11-07 三菱瓦斯化学株式会社 Entry sheet for drilling holes
WO2011158510A1 (en) * 2010-06-18 2011-12-22 三菱瓦斯化学株式会社 Drill hole entry sheet
CN103079781B (en) * 2010-06-18 2014-04-09 三菱瓦斯化学株式会社 Drill hole entry sheet
KR101619749B1 (en) 2010-06-18 2016-05-12 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 Drill hole entry sheet
CN103282168A (en) * 2010-12-28 2013-09-04 三菱瓦斯化学株式会社 Drill entry sheet
RU2526652C1 (en) * 2010-12-28 2014-08-27 Мицубиси Гэс Кемикал Компани, Инк. Drilling mask
CN103282168B (en) * 2010-12-28 2015-09-30 三菱瓦斯化学株式会社 Cover plate for drilling hole
CN103056918A (en) * 2012-12-21 2013-04-24 深圳市柳鑫实业有限公司 Aluminum sheet for improving accuracy of hole site of drill hole and manufacturing method
JP2018024056A (en) * 2016-08-10 2018-02-15 昭北ラミネート工業株式会社 Entry board for small-bore diameter drilling, and small-bore diameter drilling method

Also Published As

Publication number Publication date
JP4797690B2 (en) 2011-10-19

Similar Documents

Publication Publication Date Title
JP4797690B2 (en) Method of manufacturing entry sheet for drilling
JP5011823B2 (en) Method of manufacturing entry sheet for drilling
JP5195404B2 (en) Method of manufacturing entry sheet for drilling
JP3169026B2 (en) Lubricating sheet for small holes
JP5445524B2 (en) Entry sheet for drilling
JP4752910B2 (en) Entry sheet for drilling
KR100832918B1 (en) Lubricant sheet for making hole and method of making hole with drill
JP5198809B2 (en) Entry sheet for drilling
JP2003136485A (en) Entry sheet for boring and drilled hole boring method
JP2008055644A (en) Resin-coated metal sheet and method for boring printed-wiring board using the metal sheet
KR100620474B1 (en) Process for producing heat-resistant flexible laminate and heat-resistant flexible laminate produced thereby
WO2012105481A1 (en) Resin-coated metal plate
JP5041621B2 (en) Metal foil composite sheet for drilling and drilling processing method
JP4706283B2 (en) Method for producing heat-resistant flexible metal laminate
JP4605323B2 (en) Drilling lubricant sheet and drilling method
JP5344065B2 (en) Entry sheet for drilling
JP5167612B2 (en) Entry sheet for drilling
JP2002080880A (en) Lubricant sheet for drilling and method of drilling
JP2011097066A (en) Drilling metal foil composite sheet and drilling work method
JP2003225892A (en) Method for drilling
JP2016042540A (en) Manufacturing method of multilayer circuit board
JP4449196B2 (en) Drilling lubricant sheet and drilling method
JP2003094389A (en) Backing plate for boring process and method for manufacturing the same
JP2005280153A (en) Method for manufacturing flexible metal laminate
JP2003127013A (en) Drilling method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090204

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090608

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100519

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100712

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100715

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100810

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110302

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20110317

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110317

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20110418

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20110421

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110705

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110718

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140812

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4797690

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140812

Year of fee payment: 3