JP2007183435A - Microscopic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscopic device equipped with a scanning probe microscope capable of preventing the occurrence of vibration due to noise and a current of air. <P>SOLUTION: An atomic force microscope 10 and an optical microscope 20 are attached to a microscope coupling member 40. The microscope coupling member 40 is held by a base housing part 50 through elastic members 54a, 54b, 54c and 54d. A front case 800A and a rear case 800B are attached to the base housing part 50 so as to cover over the atomic force microscope 10, the optical microscope 20 and the microscope coupling member 40. The front case 800A and the rear case 800B do not come into contact with the atomic force microscope 10, the optical microscope 20, and the microscope coupling member 40. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a microscope apparatus provided with a scanning probe microscope.

  In recent years, a scanning probe microscope (SPM) using a principle completely different from a conventional optical microscope or electron microscope has been developed and attracts attention.

  The scanning probe microscope includes a cantilever having a sharp pointed probe called a probe at its free end. In an atomic force microscope (AFM), which is an example of the above scanning probe microscope, when the probe is brought close to the sample, the atoms constituting the tip of the probe and the atoms constituting the sample An interatomic force is generated between This interatomic force displaces the free end of the cantilever.

  By electrically measuring the displacement of the free end of the cantilever and scanning the probe along the sample, three-dimensional information indicating the surface shape of the sample can be obtained. For example, when the probe is scanned while controlling the distance between the probe and the sample so that the displacement of the free end of the cantilever is kept constant, the tip of the probe moves along the unevenness of the sample surface. It is possible to obtain three-dimensional information indicating the surface shape of the sample from the position information of the tip.

  As another example of a scanning probe microscope, instead of using the atomic force generated between the probe atom and the sample surface atom, a tunnel current flowing between the probe and the sample is used. Some scanning tunneling microscopes can also obtain three-dimensional information on the sample surface.

  Here, in the scanning probe microscope as described above, the sensitivity of the probe needs to be very high. Therefore, slight vibrations of the probe become noise and affect the detection value. In view of this, various methods have heretofore been considered for preventing the vibration of the probe.

For example, in the drive device described in Patent Document 1, the probe is attached to the XY plane drive member via the Z direction drive member. The XY plane driving member is attached to the frame via a free end support member that is deformed in the XY direction but hardly deformed in the Z direction. With such a configuration, vibration in the Z direction is cut without interfering with horizontal scanning of the probe.
JP-A-8-334519

  However, with the configuration of the above-mentioned Patent Document 1, it is impossible to prevent the vibration of the probe that is generated by noise or conditioned air.

  An object of the present invention is to provide a microscope apparatus including a scanning probe microscope that can prevent generation of vibration due to noise, wind, and the like.

  (1) A microscope apparatus according to a first invention is installed on a first installation member, a second installation member supported on the first installation member via an elastic member, and a second installation member A scanning probe microscope, and a cover member that is provided on the first installation member and covers the scanning probe microscope and the second installation member so as not to contact the scanning probe microscope and the second installation member, The scanning probe microscope has a sample mounting table on which a sample is mounted, and a first moving mechanism for moving the material mounting table, and the cover member is a first for operating the first moving mechanism. The first operation unit and the first moving mechanism are capable of shifting to a connected state and a non-connected state.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope is installed on the second installation member. Further, the first installation member is provided with a cover member so as not to contact the second installation member and the scanning probe microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member and the scanning probe microscope.

  The first installation member is provided with a cover member so as to cover the second installation member and the scanning probe microscope. Thereby, it is possible to prevent the second installation member and the scanning probe microscope from vibrating due to disturbances such as noise and wind.

  Further, the cover member is not in contact with the second installation member and the scanning probe microscope. Therefore, even if the cover member is vibrated due to disturbance such as noise and wind, the vibration can be prevented from being transmitted to the second installation member and the scanning probe microscope.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  In addition, only when moving the sample mounting table, the first operating unit and the first moving mechanism can be connected to move the sample mounting table, and when measuring the sample, The first moving mechanism can be disconnected. Thereby, vibration generated in the cover member during measurement of the sample can be prevented from being transmitted to the scanning probe microscope.

  In addition, when moving the sample mounting table, it is not necessary to remove the cover member from the first installation member, so that the sample can be measured quickly.

  (2) A microscope apparatus according to a second invention is installed on a first installation member, a second installation member supported on the first installation member via an elastic member, and a second installation member The scanning probe microscope, the optical microscope installed on the second installation member, and the first installation member are scanned so as not to contact the scanning probe microscope, the optical microscope, and the second installation member. A scanning probe microscope, an optical microscope, and a cover member that covers the second installation member, the optical microscope having a second moving mechanism for moving the optical microscope, and the cover member being a second moving mechanism The second operating unit and the second moving mechanism are capable of shifting to a connected state and a non-connected state.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope and an optical microscope are installed on the second installation member. Further, the first installation member is provided with a cover member so as not to contact the second installation member, the scanning probe microscope, and the optical microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member, the scanning probe microscope, and the optical microscope.

  The first installation member is provided with a cover member so as to cover the second installation member, the scanning probe microscope, and the optical microscope. Thereby, it is possible to prevent the second installation member, the scanning probe microscope, and the optical microscope from vibrating due to disturbances such as noise and wind.

  Further, the cover member is not in contact with the second installation member, the scanning probe microscope, and the optical microscope. Therefore, even if vibration is generated in the cover member due to disturbance such as noise and wind, the vibration can be prevented from being transmitted to the second installation member, the scanning probe microscope, and the optical microscope.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  Further, the user can observe the surface shape of the sample microscopically at a high magnification with a scanning probe microscope, and can observe the surface shape of the sample macroscopically at a low magnification with an optical microscope.

  Further, only when moving the optical microscope, the second operating unit and the second moving mechanism can be connected to move the optical microscope. When measuring and observing a sample, the second operating unit and The second moving mechanism can be disconnected. Thereby, vibration generated in the cover member during measurement and observation of the sample can be prevented from being transmitted to the scanning probe microscope and the optical microscope.

  Further, when the optical microscope is moved, it is not necessary to remove the cover member from the first installation member, so that it is possible to quickly measure and observe the sample.

  (3) The first operating portion has a first fitting portion, the first moving mechanism has a first fitted portion fitted to the first fitting portion, 1 fitting part has a 1st magnet, 2nd fitting part has a 2nd magnet, and the 1st fitting part is guided to the 1st fitting part First and second magnets may be provided.

  In this case, since the first fitting portion is guided to the first fitted portion when the first operating portion is coupled to the first moving mechanism, the first operating portion and the first movement The connection with the mechanism can be performed quickly and reliably.

  (4) The microscope apparatus may further include an optical microscope installed on the second installation member. In this case, the user can observe the surface shape of the sample microscopically at a high magnification with a scanning probe microscope, and can observe the surface shape of the sample macroscopically at a low magnification with an optical microscope.

  (5) The optical microscope has a second movement mechanism for moving the optical microscope, and the cover member has a second operation unit for operating the second movement mechanism, The operation unit and the second moving mechanism may be capable of shifting to a connected state and a non-connected state.

  In this case, only when the optical microscope is moved, the optical microscope can be moved by connecting the second operation unit and the second moving mechanism. Further, at the time of measuring and observing the sample, the second operation unit and the second moving mechanism can be disconnected. Thereby, vibration generated in the cover member during measurement and observation of the sample can be prevented from being transmitted to the scanning probe microscope and the optical microscope.

  Further, when the optical microscope is moved, it is not necessary to remove the cover member from the first installation member, so that it is possible to quickly measure and observe the sample.

  (6) The second operation portion has a second fitting portion, the second moving mechanism has a second fitted portion fitted to the second fitting portion, The second fitting portion has a third magnet, the second fitting portion has a fourth magnet, and the second fitting portion is guided to the second fitting portion. Third and fourth magnets may be provided.

  In this case, since the second fitting portion is guided to the second fitted portion when the second operating portion is connected to the second moving mechanism, the second operating portion and the second movement The connection with the mechanism can be performed quickly and reliably.

  (7) The first installation member may include a limiting member that limits the swing of the second installation member. In this case, since the swing of the second installation member is limited by the limiting member, it is possible to prevent the second installation member from greatly vibrating when carrying the microscope apparatus. Thereby, failure of the scanning probe microscope can be surely prevented, and the microscope apparatus can be easily carried.

  (8) The microscope apparatus according to the third invention is installed on the first installation member, the second installation member supported on the first installation member via the elastic member, and the second installation member. And a scanning probe microscope that is provided on the first installation member and an exterior member that is provided in a non-contact manner with respect to the scanning probe microscope and the second installation member. And a first operation unit that is installed on the outer surface of the exterior member and performs an operation related to adjustment or setting related to the scanning probe microscope, and is provided inside the exterior member and on the scanning probe microscope side, The first operated part operated by the operating part is provided inside the exterior member, and the first operating part and the first operated part are connected to each other when operated by the first operating part, and scanning is performed. With a scanning probe microscope Sometimes those having a first connection portion to be disconnected.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope is installed on the second installation member. The first installation member is provided with an exterior member in non-contact with the second installation member and the scanning probe microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member and the scanning probe microscope.

  Further, the first installation member is provided with an exterior member in a non-contact manner with the second installation member and the scanning probe microscope. Thereby, even if the exterior member vibrates due to disturbance such as noise and wind, it is possible to prevent the second installation member and the scanning probe microscope from vibrating.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  Further, only when the adjustment or setting related to the scanning probe microscope is performed from the outside, the first operation portion supported by the exterior member and the first operated portion provided on the scanning probe microscope side are connected. Thus, operations related to adjustment or setting related to the scanning probe microscope can be performed, and the first operation unit and the first operated unit can be disconnected when measuring the sample. Thereby, vibration generated in the exterior member during measurement of the sample can be prevented from being transmitted to the scanning probe microscope.

  (9) A microscope apparatus according to a fourth invention is installed on a first installation member, a second installation member supported on the first installation member via an elastic member, and a second installation member And a scanning probe microscope that is provided on the first installation member and an exterior member that is provided in a non-contact manner with respect to the scanning probe microscope and the second installation member. And a first operating unit that is installed on the outer surface of the exterior member and that performs operations relating to adjustment or setting related to the scanning probe microscope, and is provided inside the exterior member and on the scanning probe microscope side, A first operated unit that performs adjustment or setting related to the scanning probe microscope based on an operation by the operating unit, and the first operated unit and the first operated unit that are provided inside the exterior member. The first Coupled during operation by work unit, and has a first connection portion to be connected to the measurement of the scanning probe microscope.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope is installed on the second installation member. The first installation member is provided with an exterior member in non-contact with the second installation member and the scanning probe microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member and the scanning probe microscope.

  Further, the first installation member is provided with an exterior member in a non-contact manner with the second installation member and the scanning probe microscope. Thereby, even if the exterior member vibrates due to disturbance such as noise and wind, it is possible to prevent the second installation member and the scanning probe microscope from vibrating.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  Further, only when the adjustment or setting related to the scanning probe microscope is performed from the outside, the first operation portion supported by the exterior member and the first operated portion provided on the scanning probe microscope side are connected. Thus, adjustment or setting related to the scanning probe microscope can be performed based on the operation by the first operation unit, and the first operation unit and the first operated unit are disconnected when measuring the sample. Can do. Thereby, vibration generated in the exterior member during measurement of the sample can be prevented from being transmitted to the scanning probe microscope.

  (10) The microscope apparatus is provided on the outer surface of the outer packaging member, and is operated from the outside to switch between connection and non-connection between the first operation unit and the first operated unit. May further be included.

  In this case, by operating the first switching unit, the connection state between the first operation unit and the first operated unit can be easily switched.

  (11) A microscope apparatus according to a fifth invention is provided on a first installation member, a second installation member supported on the first installation member via an elastic member, and a second installation member. The scanning probe microscope, the optical microscope installed on the second installation member, the first installation member, and non-contact with the scanning probe microscope, the optical microscope and the second installation member A second operation unit that is supported by the exterior member and installed on the outer surface of the exterior member and that performs operations related to adjustment or setting related to the optical microscope; and A second operated part that is provided inside and on the optical microscope side and is operated by the second operating part, and is provided inside the exterior member, and the second operating part and the second operated part are provided Operation by the second operation unit Connected to, and has a second connecting portion to be disconnected during the measurement of the optical microscope.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope and an optical microscope are installed on the second installation member. The first installation member is provided with an exterior member in a non-contact manner with the second installation member, the scanning probe microscope, and the optical microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member, the scanning probe microscope, and the optical microscope.

  Further, the first installation member is provided with an exterior member in a non-contact manner with the second installation member, the scanning probe microscope, and the optical microscope. Thereby, even if the exterior member vibrates due to disturbance such as noise and wind, it is possible to prevent the second installation member, the scanning probe microscope, and the optical microscope from vibrating.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  Further, only when the adjustment or setting related to the optical microscope is performed from the outside, the second operation unit supported by the exterior member and the second operated unit provided on the optical microscope side are connected to each other, and the optical microscope is connected. The operation relating to the adjustment or setting can be performed, and at the time of measuring the sample, the second operation unit and the second operated unit can be disconnected. Thereby, vibration generated in the exterior member during measurement of the sample can be prevented from being transmitted to the scanning probe microscope.

  (12) A microscope apparatus according to a sixth invention is installed on the first installation member, the second installation member supported on the first installation member via the elastic member, and the second installation member The scanning probe microscope, the optical microscope installed on the second installation member, the first installation member, and non-contact with the scanning probe microscope, the optical microscope and the second installation member A second operation unit that is supported by the exterior member and installed on the outer surface of the exterior member and that performs operations related to adjustment or setting related to the optical microscope; and A second operation part that is provided on the inner side and provided on the optical microscope side and that performs adjustment or setting related to the optical microscope based on an operation by the second operation part, and an inner side of the exterior member, and a second operation Part and number And the operated portion of, connected during operation by the second operation unit, and has a second connecting portion to be disconnected during the measurement of the optical microscope.

  In the microscope apparatus according to the present invention, the second installation member is supported on the first installation member via the elastic member. A scanning probe microscope and an optical microscope are installed on the second installation member. The first installation member is provided with an exterior member in a non-contact manner with the second installation member, the scanning probe microscope, and the optical microscope.

  In this case, the vibration generated in the first installation member is attenuated by the elastic member. Thereby, the vibration of the first installation member can be prevented from being transmitted to the second installation member, the scanning probe microscope, and the optical microscope.

  Further, the first installation member is provided with an exterior member in a non-contact manner with the second installation member, the scanning probe microscope, and the optical microscope. Thereby, even if the exterior member vibrates due to disturbance such as noise and wind, it is possible to prevent the second installation member, the scanning probe microscope, and the optical microscope from vibrating.

  As a result, it is possible to reliably prevent vibrations from occurring in the scanning probe microscope. As a result, the sample can be accurately measured.

  Further, only when the adjustment or setting related to the optical microscope is performed from the outside, the second operation unit supported by the exterior member and the second operated unit provided on the optical microscope side are connected to each other, and the second operation unit is connected. The adjustment or setting related to the optical microscope can be performed based on the operation by the operation unit, and the second operation unit and the second operated unit can be disconnected when measuring the sample. Thereby, vibration generated in the exterior member during measurement of the sample can be prevented from being transmitted to the scanning probe microscope.

  (13) The microscope apparatus includes a second switching unit that is provided on the outer surface of the exterior member and switches between connection and non-connection between the second operation unit and the second operated unit by being operated from the outside. Furthermore, you may have.

  In this case, it is possible to easily switch the connection state between the second operation unit and the second operated unit by operating the second switching unit.

  ADVANTAGE OF THE INVENTION According to this invention, it can prevent reliably that a vibration arises in a scanning probe microscope. As a result, the sample can be accurately measured.

  Hereinafter, a microscope apparatus according to an embodiment of the present invention will be described with reference to the drawings.

(1) Configuration of Microscope Device FIG. 1 is a diagram illustrating an appearance of a microscope device according to the present embodiment. As shown in FIG. 1, the microscope apparatus 1 according to the present embodiment includes an apparatus unit 700 and an exterior unit 800. The exterior portion 800 is made of, for example, plastic. The microscope apparatus 1 is connected to a personal computer 900 by a cable ca.

  In FIG. 1, the microscope apparatus 1 is shown in a perspective view, and the personal computer 900 is shown in a front view. Here, in the perspective view of the microscope apparatus 1, two directions orthogonal to each other in the horizontal plane are defined as an X direction and a Y direction, and a direction perpendicular to the X direction and the Y direction is defined as a Z direction. In particular, the direction of the arrow is represented by +, and the direction opposite to the arrow is represented by-. In addition, the X direction, the Y direction, and the Z direction are similarly defined in FIGS. 2, 3, 5, 6, 8 to 15, 17, 18, and 20 to 24 described later.

  2 is a perspective view showing the apparatus unit 700, and FIG. 3 is an assembled perspective view of the microscope apparatus 1 of FIG.

  As shown in FIGS. 2 and 3, the microscope apparatus 1 according to the present embodiment integrally includes an atomic force microscope (AFM) 10 and an optical microscope 20. The atomic force microscope 10 and the optical microscope 20 are attached to the microscope connecting member 40 and are held by the base housing unit 50.

  As shown in FIG. 3, the base housing unit 50 includes a bottom plate 51 that is disposed so as to be parallel to the XY plane. Support legs 53a, 53b, 53c, and 53d extending in the Z direction are attached to the four corners of the bottom plate 51. Reinforcing plates 52a, 52b, 52c, and 52d are attached to the four sides of the bottom plate 51 so as to surround the four support legs 53a, 53b, 53c, and 53d and the bottom plate 51.

  An interface board 80 for connecting the microscope apparatus 1 and an external apparatus is attached to the reinforcing plate 52c on the back side of the microscope apparatus 1. In the present embodiment, a cable (not shown) is connected from the atomic force microscope 10 and the optical microscope 20 to the interface board 80 and a cable ca (FIG. 1) is connected from the personal computer 900. Thereby, communication between the atomic force microscope 10 and the optical microscope 20 and the personal computer 900 becomes possible.

  When the device unit 700 is assembled, elastic members 54a, 54b, 54c, and 54d are attached to the upper ends of the four support legs 53a, 53b, 53c, and 53d, respectively. Details of the elastic members 54a, 54b, 54c, and 54d will be described later.

  The microscope connecting member 40 has a structure in which an AFM fixing member 41 and an optical microscope fixing member 42 are integrally formed. The AFM fixing member 41 has a substantially box shape and has a sample mounting table accommodation space 41 s therein. The optical microscope fixing member 42 has a rectangular tube shape, and has an optical microscope accommodation space 42s inside.

  In the microscope connecting member 40, the atomic force microscope 10 is attached to the AFM fixing member 41, and the optical microscope 20 is attached to the optical microscope fixing member 42. Thereby, the atomic force microscope 10 and the optical microscope 20 are integrally connected.

  Details of attachment of the atomic force microscope 10 and the optical microscope 20 to the microscope connecting member 40 will be described later.

  In a state where the atomic force microscope 10 and the optical microscope 20 are coupled, the four corners on the upper end side of the microscope coupling member 40 in the XY plane are the supported portions 43a, 43b, 43c, 43d, and the elastic members 54a, 54b, 54c. , 54d.

  As a result, as shown in FIG. 2, the atomic force microscope 10 and the optical microscope 20 connected to each other by the microscope connecting member 40 are elastically held by the base housing unit 50.

  The atomic force microscope 10 includes an AFM scanner 11 and a sample mounting table 30. The AFM scanner 11 is attached on the AFM fixing member 41 of the microscope connecting member 40.

  Specifically, as shown in FIG. 3, an AFM scanner support 44 is formed at the upper end of the AFM fixing member 41. The AFM scanner support portion 44 is L-shaped in a plan view and has a horizontal upper surface. An AFM scanner 11 is attached on this upper surface.

  As shown in FIG. 2, a mirror holder 26 and a cantilever holding portion (not shown) are provided below the AFM scanner 11. The mirror holder 26 holds the mirror 25 of the optical microscope 20, and the cantilever holding portion holds a cantilever provided with a probe to be described later.

  When the sample M is observed with the atomic force microscope 10, the displacement of the cantilever in the Z direction, that is, the displacement in the Z direction of the cantilever holding portion connected to the piezoelectric element 110 (FIG. 5) described later is personalized through the cable ca (FIG. 1). Sent to the computer 900. Thereby, the personal computer 900 displays an image based on the displacement of the cantilever on a display device described later.

  Details of the configuration in which the probe provided on the cantilever of the AFM scanner 11 is scanned along the surface of the sample M will be described later.

  As shown in FIG. 3, the sample mounting table 30 is accommodated in the sample mounting table accommodating space 41 s of the microscope connecting member 40. The sample mounting table 30 includes a moving plate 30a, a Z direction moving mechanism 30b, and an XY direction moving mechanism 30c.

  According to FIG. 3, the Z direction moving mechanism 30b is provided on the XY direction moving mechanism 30c, and the moving plate 30a is provided on the Z direction moving mechanism 30b.

  The XY direction moving mechanism 30c has two motors Ma and Mb. The Z-direction moving mechanism 30b has one motor (not shown). These three motors are connected to an operation control unit 81 shown in FIG. The operation control unit 81 is connected to an X-direction electric switch SW1, a Y-direction electric switch SW2, and a Z-direction electric switch SW3 shown in FIG. These switches SW1 to SW3 are provided on the front side of the exterior portion 800 as shown in FIG.

  Instead of the X-direction electric switch SW1, the Y-direction electric switch SW2, and the Z-direction electric switch SW3, a moving plate lowering switch, a lowest point switch, and an illumination switch may be provided.

  In this case, the moving plate lowering switch is used to lower the moving plate 30a on which the sample M is placed. The lowest point switch is used to move the moving plate 30a on which the sample M is placed to the lowest point where the moving plate 30a can move in the Z direction. The illumination switch is used to turn on or off illumination (not shown) provided in the microscope apparatus 1.

  The user operates the Z-direction moving mechanism 30b by operating the Z-direction electric switch SW3. Thereby, the moving plate 30a on which the sample M is placed can be moved in the Z direction (vertical direction).

  Further, the user operates the XY direction moving mechanism 30c by operating the X direction electric switch SW1 and the Y direction electric switch SW2. Thereby, the moving plate 30a on which the sample M is placed can be moved in the X direction and the Y direction (horizontal direction).

  The optical microscope 20 includes a lens storage unit 21, an optical axis conversion unit 22, an electric zoom lens barrel 23, a CCD (charge coupled device) camera box 24, a mirror 25 (FIG. 2), a mirror holder 26 (FIG. 2), and an idle base 27. Is provided. The optical axis conversion unit 22 includes an optical axis conversion mirror 22a. Details of the idle base 27 will be described later.

  The electric zoom lens barrel 23 includes a zoom adjustment device 231 and a focus adjustment device 232 shown in FIG. The CCD camera box 24 incorporates a CCD camera 241 shown in FIG.

  The lens storage unit 21 of the optical microscope 20 is attached to the optical axis conversion unit 22, and the optical axis conversion unit 22 is attached to the upper end of the electric zoom lens barrel 23. A CCD camera box 24 is provided at the lower end of the electric zoom lens barrel 23. Inside the optical axis conversion unit 22, an optical axis conversion mirror 22 a is disposed on an extension line of the axis of the electric zoom barrel 23.

  The electric zoom lens barrel 23 of the optical microscope 20 is supported by a floating pedestal 27.

  The loose pedestal 27 is mounted on the optical microscope fixing member 42 of the microscope connecting member 40 so as to be slightly inclined with respect to an axis parallel to the Z direction. As a result, the electric zoom lens barrel 23 supported by the idle base 27 is accommodated in the optical microscope accommodating space 42s.

  The floating pedestal 27 is fixed on the optical microscope fixing member 42 by screwing the connecting member 42c (FIG. 2) and a connecting member 42d (see FIG. 14), which will be described later, onto the upper surface of the optical microscope fixing member 42. This is done by attaching the floating pedestal 27 to the connecting members 42c and 42d. Details will be described later.

  The exterior portion 800 (FIG. 1) includes a front case 800A and a rear case 800B as shown in FIG. The front case 800A is attached to the front side of the device unit 700 by screwing it to the reinforcing plates 52a, 52b, 52d. The rear case 800B is attached to the back side of the device unit 700 by screwing it to the reinforcing plates 52b, 52c, 52d. Thereby, as shown in FIG. 1, the front surface, the back surface, both side surfaces, and the top surface of the atomic force microscope 10, the optical microscope 20, the microscope connecting member 40, and the base housing unit 50 are covered with the exterior unit 800. The front case 800A and the rear case 800B are in close contact with each other.

  A substantially rectangular window 801 is formed on the front case 800A. A substantially rectangular fitting member 802 is detachably attached to the window portion 801. In a state where the fitting member 802 is attached to the window portion 801, the inner peripheral surface of the window portion 801 and the outer peripheral surface of the fitting member 802 are in close contact with each other.

  When observing the sample M, the user removes the fitting member 802 from the window 801 and places the sample M on the sample mounting table 30 through the window 801. Thereafter, the fitting member 802 is attached to the window portion 801.

  A window 803 is formed in the rear case 800B. The window 803 exposes a predetermined area on the back side of the interface board 80 to the outside. A connector (not shown) for electrically connecting the microscope apparatus 1 and an external apparatus is provided in the exposed region. In this example, a cable ca (see FIG. 1) is connected to the connector.

  An optical microscope moving operation unit 60 having a Y-direction operation knob 60a and a vertical operation knob 60b is provided on the front side of the front case 800A.

  The floating pedestal 27 of the optical microscope 20 has two moving mechanisms. One moving mechanism moves the electric zoom barrel 23 and each component attached thereto in the Y direction, and the other moving mechanism moves the electric zoom barrel 23 and each component attached thereto to the electric zoom barrel. It is moved in a direction along the axis 23.

  Both of these two moving mechanisms are connected to a coupling mechanism 70 provided on the optical microscope fixing member 42. The coupling mechanism 70 is detachably attached to the optical microscope moving operation unit 60.

  When moving the optical microscope 20, the user connects the optical microscope moving operation unit 60 and the connecting mechanism 70. The optical microscope 20 can be moved in the Y direction by operating the Y direction operation knob 60a. Further, the optical microscope 20 can be moved in a direction along the axis of the electric zoom lens barrel 23 by operating the vertical operation knob 60b. Details will be described later.

  Here, the mirror 25 is positioned above the sample M in a state where the sample M is mounted on the sample mounting table 30. In this case, illumination light emitted from a light source (not shown) is applied to the sample M, and reflected light from the sample M is applied to the mirror 25.

  The reflected light from the sample M is reflected by the mirror 25 and is reflected by the optical axis conversion mirror 22 a in the optical axis conversion unit 22 through the lens in the lens storage unit 21. The reflected light from the optical axis conversion mirror 22 a is taken into the CCD camera box 24 through the electric zoom lens barrel 23. Thereby, an image of the sample M is formed on the CCD camera in the CCD camera box 24.

  When the sample M is observed with the optical microscope 20, an image of the sample M formed on the CCD camera is sent to the personal computer 900 through the cable ca. Thereby, the personal computer 900 displays an image of the sample M on a display device described later.

(2) Control System of Microscope Device The control system of the microscope device 1 will be described. FIG. 4 is a block diagram for explaining a control system of the microscope apparatus 1. As shown in FIG. 4, the microscope apparatus 1 according to the present embodiment includes an atomic force microscope 10, an optical microscope 20, an interface board 80, an operation control unit 81, a storage unit 82, an X-direction electric switch SW1, and a Y-direction electric motor. A switch SW2 and a Z-direction electric switch SW3 are provided.

  The atomic force microscope 10 includes an AFM scanner 11 and a sample mounting table 30, and the optical microscope 20 includes a zoom adjustment device 231, a focus adjustment device 232, and a CCD camera 241.

  In the microscope apparatus 1, the above-described components are electrically connected to each other. The interface board 80 is connected to the personal computer 900 via the cable ca.

  The operation control unit 81 includes, for example, a CPU (Central Processing Unit) or a microcomputer, and controls operations of other components in the microscope apparatus 1.

  The storage unit 82 includes a memory, for example, and stores a program related to the operation of each component unit.

  The sample mounting table 30 includes an X direction movement motor, a Y direction movement motor, and a Z direction movement motor. These motors correspond to the motor Ma, the motor Mb, and the Z-direction moving mechanism 30b in FIG. 3, respectively.

  When the user operates the X-direction electric switch SW1, the operation control unit 81 operates the X-direction moving motor. Similarly, when the user operates the Y-direction electric switch SW2 and the Z-direction electric switch SW3, the operation control unit 81 operates the Y-direction movement motor and the Z-direction movement motor.

  As a result, as described above, the moving plate 30a on which the sample M of FIG. 2 is placed can be moved in the X direction, the Y direction, and the Z direction.

  In FIG. 4, a zoom adjustment device 231 included in the optical microscope 20 adjusts the magnification of the optical microscope 20. The focus adjustment device 232 adjusts the focal position of the optical microscope 20.

  When the user inputs the magnification of the optical microscope 20 with the input device 95 of the personal computer 900 described later, a signal indicating the magnification of the optical microscope 20 is given from the personal computer 900 to the operation control unit 81. Thus, the operation control unit 81 operates the zoom adjustment device 231 based on the given signal. As a result, the magnification of the optical microscope 20 is adjusted.

  When the user inputs the focal position of the optical microscope 20 using the input device 95 of the personal computer 900 described later, a signal indicating the focal position of the optical microscope 20 is given from the personal computer 900 to the operation controller 81. Thus, the operation control unit 81 operates the focus adjustment device 232 based on the given signal. As a result, the focal position of the optical microscope 20 is adjusted.

  The CCD camera 241 of the optical microscope 20 outputs an image of the sample M to the personal computer 900. Thereby, the image of the sample M observed by the optical microscope 20 is displayed on the display device 91 of the personal computer 900 described later.

  The personal computer 900 includes an interface board 90, a display device 91, a ROM (read only memory) 92, a RAM (random access memory) 93, a CPU 94, an input device 95, a recording medium driving device 96, and an external storage device 97.

  The interface board 90 is connected to the interface board 80 of the microscope apparatus 1 via the cable ca.

  The display device 91 is composed of a liquid crystal display panel, a CRT (cathode ray tube) or the like, and displays an image of the sample M observed by the atomic force microscope 10 and an image of the sample M observed by the optical microscope 20.

  The ROM 92 stores a system program. The recording medium driving device 96 includes a CD (compact disk) drive, a DVD (digital versatile disk) drive, and the like, and reads / writes data from / to a recording medium 98 such as a CD / DVD drive.

  The input device 95 includes a keyboard and a mouse, and is used for a user to input various commands and data. In the present embodiment, for example, the magnification of the optical microscope 20 is input by a keyboard, and the observation position of the sample M by the atomic force microscope 10 is specified by a mouse. Details will be described later.

  The external storage device 97 is composed of a hard disk device or the like, and stores a program read from the recording medium 98 via the recording medium driving device 96.

  The CPU 94 executes a program stored in the external storage device 97 on the RAM 93, controls each component of the personal computer 900, and outputs various signals to the microscope apparatus 1.

  Instead of the recording medium 98, another recording medium such as a semiconductor memory such as a ROM or a hard disk device may be used. The program may be downloaded to the external storage device 97 through the Internet.

(3) Details of Control System of Atomic Force Microscope Using Contact Mode Details of the control system of the atomic force microscope 10 of the microscope apparatus 1 will be described. Here, the contact mode is a measurement mode in which, in the atomic force microscope 10, a probe, which will be described later, is brought close to a position in contact with the sample M and scanned along the sample surface.

  FIG. 5 is a block diagram showing a control system when the contact mode of the atomic force microscope 10 of FIG. 2 is used.

  The atomic force microscope 10 includes a leaf spring-shaped cantilever 100, a probe 101, and a piezoelectric element 110.

  A probe 101 is provided at the tip of the cantilever 100. When the probe 101 is brought close to the sample M, an atomic force is generated between the probe 101 and the sample M, and the cantilever 100 bends in the vertical direction.

  The probe 101 is scanned along the surface of the sample M by the piezoelectric element 110 provided in the AFM scanner 11. The piezoelectric element 110 moves the cantilever 100 in the X direction and the Y direction in order to scan the probe 101 along the surface of the sample M.

  Even if the probe 101 is scanned along the surface of the sample M by moving the moving plate 30a (see FIG. 2) of the sample mounting table 30 in the X direction and the Y direction while the probe 101 is fixed. Good. A voice coil motor may be used instead of the piezoelectric element 110.

  The piezoelectric element 110 operates the cantilever 100 in the Z-axis direction so as to keep the deflection amount of the cantilever 100 constant, that is, so as to keep the atomic force generated between the probe 101 and the sample M constant. Based on a change in the voltage value applied to the piezoelectric element 110 in order to keep the atomic force between the probe 101 and the sample M constant, position information of the cantilever 100 in the Z direction is acquired. Shape information relating to the surface shape of the sample M is acquired from this position information. As a result, the three-dimensional shape information of the sample M can be imaged.

  The piezoelectric element 110 is controlled by the operation control unit 81. The operation control unit 81 includes a CPU 131, a displacement detection unit 132, a Z direction servo circuit 133, and an XY direction servo circuit 134.

  The Z direction servo circuit 133 controls the piezoelectric element 110 so that the probe 101 of the cantilever 100 operates in the Z direction. Further, the XY direction servo circuit 134 controls the piezoelectric element 110 so that the probe 101 of the cantilever 100 moves in the X direction and the Y direction. The displacement detector 132 will be described later.

  Here, an operation in the atomic force microscope 10 for keeping the amount of deflection of the cantilever 100 caused by the unevenness of the surface of the sample M constant will be described.

  The cantilever 100 incorporates a displacement sensor including, for example, a strain gauge. As a result, a signal corresponding to a minute displacement of the cantilever 100 is output.

  The output signal of the displacement sensor is given to the displacement detector 132 of the operation controller 81. Accordingly, the displacement detection unit 132 detects the amount of deflection of the cantilever 100.

  Based on the displacement of the cantilever 100 detected by the displacement detector 132, the CPU 131 of the operation controller 81 controls the piezoelectric element 110 so as to keep this displacement constant.

  Based on the deflection amount of the cantilever 100 detected by the displacement detection unit 132, the CPU 131 of the operation control unit 81 controls the piezoelectric element 110 so as to keep the deflection amount constant.

  The operation control unit 81 is connected to the personal computer 900 via the interface board 80 (see FIGS. 3 and 4). Thereby, as described above, the displacement of the cantilever 100 in the Z direction (the displacement of the cantilever holding portion in the Z direction) is sent to the personal computer 900 through the cable ca. As a result, an image based on the three-dimensional shape information of the sample M is displayed on the display device 91 of FIG.

  In the present embodiment, the contact mode is used as the observation mode of the atomic force microscope 10, but the present invention is not limited to this, and the probe 101 is not brought into contact with the sample M. May be used, and a non-contact mode (damping mode) in which the vicinity of the surface of the sample M is scanned may be used.

  In the above, in order to detect the amount of deflection of the cantilever 100, a self-sensing method in which a displacement sensor is built in the cantilever 100 is used. However, the cantilever 100 is irradiated with laser light, and the reflected light from the cantilever 100 is detected. An optical lever method may be used in which the amount of deflection of the cantilever 100 is detected by a detector.

(4) Moving Method of Optical Microscope Next, a moving method of the optical microscope 20 (see FIGS. 2 and 3) will be described with reference to the drawings. The position adjustment of the optical microscope 20 is performed in order to make the center of the region where the probe 101 can be moved by the piezoelectric element 110 and the center of the observation field of view by the optical microscope 20 match.

  As described above, in the microscope apparatus 1 according to the present embodiment, when operating the floating base 27 of the optical microscope 20, the user connects the optical microscope moving operation unit 60 and the connection mechanism 70. First, the mechanism of the optical microscope moving operation unit 60 will be described.

(4-1) Optical Microscope Movement Operation Unit FIG. 6 is an enlarged perspective view of the front side of the optical microscope movement operation unit 60, and FIGS. 7 and 8 show the relationship between the optical microscope movement operation unit 60 and the coupling mechanism 70. FIG. FIGS. 9 and 10 are enlarged perspective views of the back side of the optical microscope moving operation unit 60, and FIGS. 11 and 12 are diagrams showing some of the components of the optical microscope moving operation unit 60. FIG. . FIG. 13 is a top view of the coupling mechanism 70.

  As shown in FIG. 6, the optical microscope moving operation unit 60 includes a Y-direction operation knob 60a, a vertical operation knob 60b, and a pressing unit 60c on the front side of the front case 800A. The Y direction operation knob 60a and the up / down direction operation knob 60b are provided to be rotatable in the circumferential direction. The pressing portion 60c is provided so as to be movable in the Y direction with respect to the front case 800A.

  As shown in FIGS. 7 and 8, a fixed cylinder 61a is attached to one end of the Y-direction operation knob 60a. The Y-direction operation knob 60a is provided with a connecting shaft 62a. The connecting shaft 62a is inserted through the fixed cylinder 61a, is fixed in the circumferential direction with respect to the Y-direction operation knob 60a, and is provided so as to be movable in the X direction. The fixed cylinder 61a is fixed to the front case 800A. The Y-direction operation knob 60a is provided so as to be rotatable with respect to the fixed cylinder 61a.

  With such a configuration, the connecting shaft 62a can be rotated on the back side of the front case 800A by rotating the Y-direction operation knob 60a on the front side of the front case 800A. In the same configuration, a connecting shaft 62b is provided in the vertical operation knob 60b, and a fixed cylinder 61b is provided at one end of the vertical operation knob 60b. Similarly to the fixed cylinder 61a, the fixed cylinder 61b is fixed to the front case 800A.

  The fitting ring 63a is fixed at a predetermined position of the connecting shaft 62a, and the fitting ring 63b is fixed at a predetermined position of the connecting shaft 62b. Each of these fitting rings 63a and 63b has a fitting groove, and the moving plate 69 is fitted into this fitting groove as described later (see FIGS. 8, 9 and 10).

  Further, locking rods 64a and 64b are provided at the distal ends of the connecting shaft 62a and the connecting shaft 62b (see FIGS. 7, 9 and 10). These locking rods 64a and 64b are provided for locking the connecting shafts 62a and 62b to the rotating members 71 and 72 of the connecting mechanism 70, respectively, as will be described later.

  As shown in FIGS. 9 and 10, a rectangular fixing plate 65 (see FIG. 11A) is attached to the fixing members 61a and 61b on the back side of the front case 800A. Two restricting rods 65a and two restricting rods 65b are respectively provided in the upper part of the fixing plate 65 in the vicinity of both end portions. Through holes 65c and 65d are formed below the restriction rod 65a of the fixed plate 65 and below the restriction rod 65b, respectively. The connecting shaft 62a and the connecting shaft 62b are inserted through the through hole 65c and the through hole 65d, respectively.

  A rectangular connecting plate 67 (see FIG. 11B) is attached to the back side of the pressing portion 60c. In the vicinity of both ends of the connecting plate 67, spring stoppers 67a and 67b are formed. Also, through holes 67c and 67d are formed in the spring stoppers 67a and 67b, respectively. Convex protrusions 67e and 67f are formed at the center of the connecting plate 67. Note that the pressing portion 60c and the connecting plate 67 may be formed as separate components or may be integrally formed.

  Bar-shaped support members 66a and 66b are fixed to both sides of the pressing portion 60c on the back side of the front case 800A. The support members 66a and 66b are inserted through the through holes 67c and 67d, respectively. Accordingly, the connecting plate 67 is instructed to be fixed in the X direction and the Z direction on the back side of the front case 800A and to be movable in the Y direction.

  As shown in FIGS. 9 and 10, a fixing member 68 (see FIG. 12D) is attached on the back side of the front case 800 </ b> A so as to cover the side and the lower side of the connecting plate 67. The fixing member 68 has a rectangular base portion 68a. Hooks 68b and 68c are formed at both ends on the front side of the base 68a. Further, hook-shaped portions 68d and 68e are formed at positions inside the both ends on the back side of the base portion 68a, and the mounting portion protrudes to the back side at the center portion on the back side of the base portion 68a. 68f is formed.

  As shown in FIGS. 9 and 10, the fixing member 68 is fixed by screwing the hooks 68b and 68c to the front case 800A. One ends of the support members 66a and 66b are screwed to the hooks 68d and 68e, respectively. Spring members SP are attached to the support members 66a and 66b between the hooks 68c and 68d and the spring stoppers 67a and 67b of the connecting plate 67, respectively.

  A sliding auxiliary body 68g (FIG. 12E) is fixed to the mounting portion 68f of the fixing member 68. An auxiliary groove 68h is formed in the sliding auxiliary body 68g. Further, a locking portion 68i is formed in the center portion on the back side of the auxiliary groove 68h. The role of the locking portion 68i will be described later.

  As shown in FIGS. 9 and 10, a moving plate 69 (see FIG. 12F) is attached to the back side of the connecting plate 67. The moving plate 69 includes a substantially rectangular base portion 69q and connecting portions 69r and 69s protruding from the base portion 69q in the −Z direction. As shown in FIGS. 9 and 10, the connecting projections 67e and 67f of the connecting plate 67 (FIG. 11B) are screwed to the connecting portions 69r and 69s. Two through holes 69a and two through holes 69b are formed in the vicinity of the upper portion of the base portion 69q (FIG. 12 (f)). In addition, elliptical through holes 69c and 69d are formed below the through holes 69a and 69b, respectively. As shown in FIGS. 9 and 10, the through holes 69a and 69b of the moving plate 69 are provided so that the regulation rods 65a and 65b can be inserted and removed.

  Fitting rings 63a and 63b provided on the connecting shafts 62a and 62b are fitted into the through holes 69c and 69d. Thereby, the connecting shafts 62a and 62b are fixed to the moving plate 69 in the X direction and the Y direction.

  A sliding pin 69t is attached to the side portion of the connecting portion 69r so as to be rotatable in the YZ plane. The protrusion at the end of the sliding pin 69t is fitted in the auxiliary groove 68h. As a result, the end of the sliding pin 69t can be slid along the auxiliary groove 68h.

  9 shows a state where the pressing unit 60c of FIG. 6 is not pressed, and FIG. 10 shows a state after the pressing unit 60c of FIG. 6 is pressed once. In the present embodiment, when the user presses down the pressing part 60c from the state of FIG. 9, the connecting plate 67 provided on the back side of the pressing part 60c moves to the back side together with the pressing part 60c. Further, the moving plate 69 attached to the connecting plate 67 moves in the same manner, and the connecting shafts 62a and 62b provided on the Y-direction operation knob 60a and the up-and-down operation knob 60b are pulled out to the back side.

  Here, when the moving plate 69 moves back and forth, the protrusion at the end of the sliding pin 69t attached to the moving plate 69 slides in the auxiliary groove 68h of the sliding auxiliary body 68g. When the user presses the pressing portion 60c once from the state of FIG. 9, the end of the sliding pin 69t moves to the position indicated by the dotted line A1. At this time, the spring member SP is gradually compressed, and a reaction force is generated in the spring member SP to push the connecting plate 67 back to the front side. When the end portion of the sliding pin 69t moves to A1, the pressing portion 60c cannot be pushed further back, and the user releases the pressing portion 60c. Thus, the auxiliary pin 69t is pushed back together with the connecting plate 67 and the moving plate 69 by the reaction force applied by the spring member SP. At this time, the protrusion at the end of the sliding pin 69t is guided to the locking portion 68i provided in the auxiliary groove 68h by the auxiliary groove 68h and locked there. Thereby, since the positions of the connecting plate 67 and the moving plate 69 are maintained, it is possible to maintain the state where the connecting shafts 62a and 62b are pulled out to the back side.

  Next, when the user presses the pressing portion 60c once again, the protrusion at the end of the sliding pin 69t is guided to the position indicated by the dotted line A2 by the auxiliary groove 68h. When the end portion of the sliding pin 69t moves to A2, the pressing portion 60c cannot be pushed further back, and the user releases the pressing portion 60c. At this time, a force is exerted on the spring member SP to push the connecting plate 67 back to the front side, so that the sliding pin 69t, the connecting plate 67 and the moving plate 69 return to the positions shown in FIG. .

  Thus, when the user presses the pressing portion 60c once, the connecting shafts 62a and 62b can be led to the back side, and when the user presses the pressing portion 60c again, the connecting shafts 62a and 62b are returned to the original positions. It can be returned to the state. Thereby, the connection shafts 62a and 62b can be inserted into and removed from the rotating members 71 and 72 of the connection mechanism 70 described later.

(4-2) Connection Mechanism Next, the connection mechanism 70 will be described with reference to FIGS. 7, 8, and 13. Rotating members 71 and 72 are provided on the front side of the coupling mechanism 70 at positions facing the Y-direction operation knob 60a and the vertical-direction operation knob 60b. A fitting hole 73 into which the connecting shaft 62a can be inserted and removed is formed in the rotating member 71 (see FIG. 7). The fitting hole 73 has a hole 73a having a circular cross section having a diameter slightly larger than the connecting shaft 62a at the center, and a hole having a substantially rectangular cross section into which the locking rod 64a can be inserted and removed on both sides of the hole 73a. Part 73b.

  As shown in FIG. 8, magnets M <b> 1 and M <b> 2 are embedded above and below the hole 73 a of the rotating member 71. A magnet M3 is also embedded in the distal end portion of the connecting shaft 62a. Thereby, the locking rod 64a of the connecting shaft 62a can be easily guided to the holes 73b and 73c. Thereby, the connecting shaft 62a can be easily and reliably inserted into and removed from the rotating member 71. Similarly, the rotation member 72 has a fitting hole 74 into which the connecting shaft 62b can be inserted and removed. The fitting hole 74 has hole parts 74a and 74b similar to the hole parts 73a and 73b.

  Further, as described above, the fixing plate 65 of the optical microscope moving operation unit 60 is provided with the restriction rods 65a and 65b (see FIGS. 9 and 10). These restricting rods 65a and 65b do not hinder the rotation of the connecting shafts 62a and 62b when the connecting shafts 62a and 62b are inserted into the rotating members 71 and 72 (the state shown in FIG. 10), but the connecting shafts 62a and 62b. In a state in which is not inserted into the rotating members 71 and 72 (the state shown in FIG. 9), the rotation of the connecting shafts 62a and 62b can be prevented. Accordingly, the circumferential positions of the locking bars 64a and 64b when the connecting shafts 62a and 62b are extracted from the rotating members 71 and 72 can be easily held. Thereby, the locking rods 64a and 64b of the connecting shaft 62a can be more easily guided to the holes 73b and 74b.

  A shaft SF <b> 1 (see FIGS. 8 and 13) is integrally formed on the back side of the rotating member 71. The rotating member 71 is attached to the substrate 76 such that the shaft SF1 passes through one end of the support plate 75a and the substrate 76. The rotating member 71 is rotatably attached to the support plate 75 a and the substrate 76, and the support plate 75 a is fixed to the substrate 76. A gear G1 is fixed to one end of the shaft SF1. Therefore, the gear G1 can be rotated by rotating the rotating member 71.

  In the vicinity of the other end of the support plate 75a, one end of the shaft SF2 is rotatably supported. The other end of the shaft SF2 is rotatably supported in the vicinity of one end of the support plate 75b. Three gears G2, G3, and G4 are fixed to the shaft SF2 between the support plate 75a and the support plate 75b. The gear G2 and the gear G1 mesh with each other, and the rotation of the gear G1 is transmitted to the shaft SF2 through the gear G2. As a result, the shaft SF2 rotates and the gears G3 and G4 rotate.

  A shaft SF3 is rotatably supported near the other end of the support plate 75b. A gear G5 is fixed to the shaft SF3. The gear G5 and the gear G4 are engaged with each other, and the rotation of the gear G4 is transmitted to the shaft SF3 via the gear G5. The rotation of the shaft SF3 moves the optical microscope 20 in the Y direction as will be described later. Therefore, the optical microscope 20 is moved in the Y direction by rotating the Y direction operation knob 60a in a state where the connecting shaft 62a (see FIG. 7) of the optical microscope moving operation unit 60 is inserted into the rotating member 71 of the connecting mechanism 70. be able to.

  A shaft SF4 (see FIG. 13) is integrally formed on the back side of the rotating member 72. The rotating member 72 is attached to the substrate 76 such that the shaft SF4 penetrates the vicinity of one end of the support plate 75c and the substrate 76. The rotating member 72 is rotatably attached to the support plate 75 c and the substrate 76, and the support plate 75 c is fixed to the substrate 76. A gear G6 is fixed to one end of the shaft SF4. Therefore, the gear G6 can be rotated by rotating the rotating member 72.

  In the vicinity of the other end portion of the support plate 75c, one end portion of the shaft SF5 is rotatably supported, and the vicinity of one end portion of the support plate 75d is fixed. Three gears G7, G8, and G9 are fixed to the shaft SF5. The gear G7 and the gear G6 are engaged with each other, and the rotation of the gear G6 is transmitted to the shaft SF5 through the gear G7. Thereby, the shaft SF5 rotates and the gear G8 and the gear G9 rotate.

  In the vicinity of the other end of the support plate 75d, the shaft SF6 is supported so as to be rotatable and movable in the Y direction. A gear G10 is fixed to the shaft SF3. The gear G10 meshes with at least one of the gears G7, G8, and G9, and when the gears G7, G8, and G9 rotate, the rotation is transmitted to the shaft SF6 via the gear G10. The rotation of the shaft SF10 moves the optical microscope 20 in the vertical direction as will be described later. Accordingly, the optical microscope 20 is moved in the vertical direction by rotating the vertical operation knob 60b in a state where the connection shaft 62b (see FIG. 7) of the optical microscope moving operation unit 60 is inserted into the rotating member 72 of the connection mechanism 70. be able to.

(4-3) Configuration of Guiding Pedestal Next, the floating pedestal 27 (see FIG. 3) of the optical microscope 20 will be described with reference to FIGS.

  14 is a perspective view of the optical microscope 20 of FIG. 2 as viewed from a substantially −X direction, FIG. 15 is a side view of the optical microscope 20, FIG. 16 is a front view of the optical microscope 20, and FIGS. 18 is a diagram for explaining the details of the idle base 27.

  As shown in FIGS. 14-16, the floating base 27 of the optical microscope 20 is comprised from the Y direction moving member 27a and the vertical movement auxiliary members 27b and 27c. A through hole (see FIG. 17) through which the electric zoom lens barrel 23 is inserted is formed at the center of the Y-direction moving member 27a and the vertical movement assisting members 27b and 27c. The optical microscope 20 is mounted on the floating pedestal 27 by inserting the electric zoom lens barrel 23 through the above-described through hole formed in the floating pedestal 27 and moving the optical axis conversion unit 22 up and down by the fixing member 221. This is done by fixing it on top.

  The Y-direction moving member 27a is slidably supported by the idle base support base 46. The guide pedestal 27 is formed with a through-hole 46a (see FIG. 14) having a circular cross section having a diameter larger than the diameter of the electric zoom lens barrel 23. The electric zoom lens barrel 23 is inserted into the through hole 46a. The idle base support 46 is supported by an L-shaped inclined fixing member 45a and a plate-shaped inclined fixing member 45b.

  Two guide shafts 45c and 45d are provided between the inclined fixing member 45a and the inclined fixing member 45b. The guide shafts 45c and 45d are inserted through the Y-direction moving member 27a. By the guide shafts 45c and 45d, the moving direction of the Y-direction moving member 27a is limited to the Y direction.

  The inclined fixing member 45a and the inclined fixing member 45b are fixed to the connecting member 42c and the connecting member 42d so as to be slightly inclined with respect to the axis parallel to the Z direction. As described above, the connection member 42c and the connection member 42d are fixed to the upper surface of the optical microscope fixing member 42 of FIG. Thereby, the optical microscope 20 can be installed in an inclined state on the optical microscope fixing member 42.

  Hereinafter, the configuration of the floating pedestal 27 will be described in more detail with reference to the drawings. As shown to Fig.17 (a), the screw hole N1 is formed in the side surface of the one end side of the Y direction of the Y direction movement member 27a. One end of the shaft SF3 (see FIG. 14) is screwed into the screw hole N1. Also, two auxiliary shafts 271 and 272 are formed on the upper surface of the Y direction moving member 27a on the other end side in the Y direction so as to extend in the Z direction. Further, auxiliary shafts 273 and 274 are formed on the upper surfaces of both side portions in the X direction of the Y direction moving member 27a so as to extend in the Z direction. A shaft support member 275 is fixed to the upper surface on the other end side of the Y-direction moving member 27a. The shaft fixing member 275 supports the shaft SF6 so as to be rotatable and movable in the Y direction.

  As shown in FIG. 17B, the vertical movement assisting member 27b is placed on the Y-direction moving member 27a. On one side in the Y direction of the vertical movement assisting member 27b, a wedge portion B1 having a substantially triangular cross section and an inclined surface B2 on the upper surface is formed. The wedge part B1 is formed with two through holes 281 and 282 having an elliptical cross section. The auxiliary shafts 273 and 274 of the Y-direction moving member 27a are inserted through the through holes 281 and 282, respectively. The minor axis of the ellipse of the through holes 281 and 282 is substantially equal to the diameter of the auxiliary shafts 273 and 274. Thereby, the vertical movement assisting member 27b can move in the Y direction, but is prevented from moving in the X direction. A screw hole N2 is formed in the side surface on the other end side in the Y direction of the vertical movement assisting member 27b. One end of the shaft SF6 is screwed into the screw hole N2.

  As shown in FIG. 18C, the vertical movement assisting member 27c is placed on the vertical movement assisting member 27b. On the upper surface on one side in the Y direction of the vertical movement assisting member 27c, through holes 291 and 292 having a circular cross section are formed. The auxiliary shafts 271 and 272 are inserted through the through holes 291 and 292. On the other side in the Y direction of the vertical movement assisting member 27b, a wedge portion C1 having a substantially triangular cross section and an inclined surface C2 on the lower surface is formed. The wedge part C1 has two through holes 293 and 294 having a circular cross section. The auxiliary shafts 273 and 274 are inserted through the through holes 293 and 294, respectively. The diameters of the through holes 291 to 294 are substantially equal to the diameters of the auxiliary shafts 271 to 274. Accordingly, the vertical movement assisting member 27c can move in the Z direction, but is prevented from moving in the X direction and the Y direction.

  The vertical movement assisting member 27b and the vertical movement assisting member 27c are in contact with each other at the inclined surface B2 and the inclined surface C2. In this case, when the vertical movement assisting member 27b moves in the -Y direction, the vertical movement assisting member 27c moves upward. Further, when the vertical movement assisting member 27b moves in the + Y direction, the vertical movement assisting member 27c moves downward.

  Finally, as shown in FIG. 18D, linear guides 295 and 296 for assisting the vertical movement of the vertical movement assisting member 27c are attached.

  In such a configuration, when the user moves the optical microscope 20 in the Y direction, the shaft SF3 (see FIG. 14) is rotated by rotating the Y direction operation knob 60a (see FIG. 6). In this case, since the shaft SF3 is screwed to the side surface of the Y-direction moving member 27a, the Y-direction moving member 27a moves in the + Y direction or the −Y direction according to the rotation of the shaft SF3. Here, since the vertical movement assisting members 27b and 27c are placed on the Y-direction moving member 27a, they move in the + Y direction or the −Y direction along with the movement of the Y-direction moving member 27a. Thereby, the optical microscope 20 moves in the + Y direction or the −Y direction. When the optical microscope 20 moves in the Y direction, the shaft SF6 can move in the Y direction together with the vertical movement assisting member 27b.

  When the user wants to move the optical microscope 20 up and down, the shaft SF6 (see FIG. 14) is rotated by rotating the vertical operation knob 60b (see FIG. 6). In this case, since the shaft SF6 is screwed to the side surface of the vertical movement assisting member 27b, the vertical movement assisting member 27b moves in the + Y direction or the −Y direction according to the rotation of the shaft SF6. With the movement of the vertical movement assisting member 27b, the vertical movement assisting member 27c moves up and down as described above. Thereby, the optical microscope 20 moves up and down in the direction along the axis of the electric zoom lens barrel 23.

(4-4) Elastic Member Next, the elastic member 54a in FIG. 3 will be described. The configuration of the elastic members 54b, 54c, 54d is the same as that of the elastic member 54a described below.

  FIG. 19A is a perspective view of the elastic member 54a, and FIG. 19B is a cross-sectional view of the elastic member 54a.

  As shown in FIG. 19, the elastic member 54 a includes connecting portions 401 and 402 and an elastic body 403. The connection part 401 is attached on the support leg 53a (refer FIG. 3). The connecting portion 402 is attached to the supported portion 43a (see FIG. 3).

  The elastic body 403 is formed so as to cover the coiled spring CSP with the gel material GL. As the gel material GL, for example, a polyurethane gel molded by mixing two liquids of an impact absorbing material and an anti-vibration material can be used. The gel material GL preferably has a low hardness.

(5) Effect As described above, in the microscope apparatus 1 according to the present embodiment, the microscope connecting member 40 in which the atomic force microscope 10 and the optical microscope 20 are installed as shown in FIG. 54b, 54c and 54d. In this case, the vibration generated in the base housing unit 50 is attenuated by the elastic members 54a, 54b, 54c, and 54d, so that vibration is generated in the microscope apparatus 1 and the optical microscope 20 when the sample is measured and observed. Can be prevented. Thereby, it is possible to accurately measure and observe the sample.

  The microscope connecting member 40 is supported only by the elastic members 54a, 54b, 54c, 54d. That is, the atomic force microscope 10, the optical microscope 20, and the microscope connecting member 40 are not in contact with the base casing 50. In this case, it is possible to reliably prevent the vibration of the base casing 50 from being transmitted to the atomic force microscope 10 and the optical microscope 20.

  Further, the atomic force microscope 10 and the optical microscope 20 and the personal computer 900 are electrically connected via an interface board 80 provided in the base housing unit 50. In this case, even if vibration occurs in the personal computer 900 and the cable ca connected thereto, the vibration is attenuated by the interface board 80. Further, since the interface board 80 is attached to the base casing 50, the vibration of the interface board 80 is attenuated by the elastic members 54a, 54b, 54c, and 54d. That is, in the present embodiment, vibration from an external device connected to the interface board 80 can be sufficiently prevented from being transmitted to the atomic force microscope 10 and the optical microscope 20.

  In addition, an exterior portion 800 (a front case 800A and a rear case 800B) is attached to the base housing unit 50 so as to cover an area excluding the bottom surface of the base housing unit 50. In this case, since the exterior portion 800 is not in contact with the atomic force microscope 10, the optical microscope 20, and the microscope connecting member 40, even if vibration due to disturbance such as noise and wind occurs in the exterior portion 800, the vibration is The elastic members 54a, 54b, 54c and 54d are attenuated.

  As a result, vibrations can be reliably prevented from occurring in the atomic force microscope 10 and the optical microscope 20, so that the sample can be measured and observed reliably and accurately.

  In the present embodiment, an optical microscope moving operation unit 60 for operating the optical microscope 20 is provided in the front case 800A. Therefore, it is not necessary to remove the front case 800A and the rear case 800B when moving the optical microscope 20, so that the sample can be measured and observed quickly.

  Moreover, the optical microscope movement operation part 60 and the connection mechanism 70 are provided so that insertion / removal is possible. In this case, since the optical microscope moving operation unit 60 and the coupling mechanism 70 can be connected only when the optical microscope 20 is moved, vibration generated in the front case 800A during measurement and observation of the sample is caused by the atomic force microscope 10, Transmission to the optical microscope 20 and the microscope connecting member 40 can be reliably prevented.

  In the above description, the operation target for the optical microscope 20 is that the optical microscope 20 is moved in a plane perpendicular to the optical axis direction, and the floating pedestal 27 (second operated portion) and the coupling mechanism 70 (second operation). However, the present invention is not limited to this, and the optical microscope 20 may be moved in the optical axis direction. Further, an optical filter (which is disposed in a plane substantially orthogonal to the optical axis direction of the optical microscope 20 inside the optical microscope 20 or between the optical microscope 20 and the sample mounting table 30 and can be inserted into and removed from the optical axis of the optical microscope 20 ( An insertion / removal operation (not shown) may be set as an operation target, and switching of an optical filter switching plate (not shown) on which a plurality of the optical filters are arranged may be set as an operation target. In addition, a switching operation of a plurality of objective lenses (not shown) attached to the optical microscope 20 may be the operation target.

  In addition, as described above, the operation related to the optical microscope 20 is not limited to mechanically transmitting the operation of the operation unit, and a switch or the like (second operated unit) provided on the optical microscope 20 side is provided. By operating, the operation may be electrically transmitted to the optical microscope 20 side, and the adjustment and setting may be performed. For example, zoom adjustment of the zoom adjustment device 231, variable aperture (not shown), focus adjustment of the focus adjustment device 232, adjustment of the gain or exposure time of the CCD image sensor of the CCD camera 241, and the like are listed as the operation targets.

  As an example of the operation by the above-described switch or the like (second operated part), the above-described zoom position and aperture operation are electrically transmitted by an electrical command by pressing the push switch. . Other examples include commands for switching adjustment of the optical filter using a toggle switch, and commands for moving and zooming the optical microscope 20 using a seesaw switch. In addition, the usage forms of various switches etc. are not limited to said example.

  Further, for example, the exposure time and gain adjustment of the CCD image sensor may be mechanically performed by rotating the volume of the variable resistor by rotating the coupling mechanism 70 described above.

  Further, as an example of the second operation unit or the second moving mechanism (second operated unit and second connecting unit) with respect to the optical microscope 20, the optical microscope moving operating unit 60, the connecting mechanism 70, and the floating base 27 are provided. Of course, the present invention is not limited to this, and the operation unit provided in the exterior unit 800 is extended and the above-described switch (second operated unit) provided on the optical microscope side is operated. Also good. Conversely, the second operated part provided on the optical microscope 20 side may be extended and the second operated part may be operated via the second operating part provided on the exterior part 800.

  That is, the present invention includes an operation related to the physical setting state of the optical microscope 20 such as the position of the optical microscope 20 and switching of the optical filter, and the control contents of the optical microscope 20 such as zooming and gain adjustment of the CCD image sensor. The operation related to the adjustment or setting can be operated by the user from the outside, and the operation unit and the connecting mechanism 70 on the optical microscope 20 side are connected only when operated, and disconnected when measuring and observing the sample. The vibration generated in the part 800 can be reliably prevented from being transmitted to the atomic force microscope 10 and the optical microscope 20.

  The elastic members 54a, 54b, 54c and 54d have an elastic body 93 in which the spring CSP and the gel material GL are integrally formed. In this case, vibrations can be more reliably damped in the elastic members 54a, 54b, 54c, and 54d.

  In the above embodiment, the sample mounting table 30 is moved by the X-direction electric switch SW1, the Y-direction electric switch SW2, and the Z-direction electric switch SW3. However, the floating pedestal 27 described with reference to FIGS. The pedestal having the same configuration as that of the optical microscope moving operation unit 60, and the connection mechanism having the same configuration as the connection mechanism 70 can be used. In this case, it can prevent more reliably that a vibration generate | occur | produces in the atomic force microscope 10, the optical microscope 20, and the microscope connection member 40. FIG.

  The operation target for the atomic force microscope 10 is not limited to the movement of the sample mounting table 30 (first operated portion) of the atomic force microscope 10 in the planar direction or the orthogonal direction. The rotation about the axis may be the target. Further, the operation target may be movement of the cantilever 100 of the atomic force microscope 10 in a plane parallel to the plane of the sample mounting table 10 or movement in a direction perpendicular to the plane of the sample mounting table 10.

  In addition, the operation related to the atomic force microscope 10 is not limited to mechanically transmitting the operation of the operation unit, and a switch or the like (first operated part) provided on the atomic force microscope 10 side is operated. By doing so, the operation may be electrically transmitted to the atomic force microscope 10 side, and the adjustment and setting may be performed. For example, by operating an operation part (first operation part) such as a switch provided on the atomic force microscope 10 side, the setting condition (deflection amount) of the cantilever 100, the damping force in the damping mode, and the amplitude amount Adjustment of the scanning amount and the like can be given as an operation target.

  As an example of the operation by the above switch or the like, the adjustment or operation of the deflection amount, the damping force, the amplitude amount, and the scanning amount is electrically performed by an electrical command by pressing the push switch. Other examples include a switching adjustment command for the cantilever 100 using a toggle switch, a movement of the atomic force microscope 10 using a seesaw switch, and a command for adjusting the position of the cantilever 100. In addition, the usage form of various switches is not limited to said example.

  Further, as a connecting portion to the atomic force microscope 10, the first operation portion provided in the exterior portion 800 is extended, and the above-described switch (first operated portion) provided on the atomic force microscope side is provided. You may operate. Conversely, the first operated part provided on the atomic force microscope 20 side may be extended and the first operated part may be operated via the first operating part provided on the exterior part 800.

  That is, according to the present invention, operations related to the physical setting state of the atomic force microscope 10 such as movement of the atomic force microscope 10, movement of the sample mounting table 30, and switching of the cantilever 100, deflection amount, damping force, scanning amount, etc. The operation related to adjustment or setting of the atomic force microscope 10 including the control content of the atomic force microscope 10 can be operated by the user from the outside, and only when the operation unit is operated, the operation unit and the coupling mechanism on the atomic force microscope 10 side are provided. Since they are connected and disconnected when measuring and observing the sample, it is possible to reliably prevent vibration generated in the exterior portion 800 from being transmitted to the atomic force microscope 10 and the optical microscope 20.

(6) Other Embodiments FIG. 20 is a view showing a microscope connecting member 40 and a base housing portion 50 of a microscope apparatus 1 according to another embodiment of the present invention. A weight W is attached to an arbitrary position on the bottom surface of the microscope connecting member 40 in FIG. The attachment position and weight of the weight W are set so that the vibration generated in each component can be reliably damped in consideration of the weight and installation position of each component of the microscope apparatus 1. Thus, by attaching the weight W to the microscope connecting member 40 according to each component, vibration generated in the atomic force microscope 10, the optical microscope 20, and the microscope connecting member 40 can be surely attenuated. In particular, by considering the natural frequencies of the elastic members 54a, 54b, 54c, and 54d, it becomes possible to remove vibrations at desired frequencies of the components of the microscope apparatus 1. The weight W is not in contact with the base casing 50.

  Further, the weight W is formed with a through hole 301 having a circular cross section and penetrating in the X direction. A limit shaft 302 having a diameter smaller than that of the through hole 301 is inserted into the through hole 301. Further, when the microscope connecting member 40 is attached to the elastic members 54 a, 54 b, 54 c, 54 d, one end portion of the limiting shaft 302 is fixed to the mounting hole 303 formed in the reinforcing plate 52 b and the other end of the limiting shaft 302 is attached. The portion is fixed to an attachment hole (not shown) formed in the reinforcing plate 52d at a position facing the attachment hole 303. At this time, the limiting shaft 302 is not in contact with the weight W in the through hole 301.

  With this configuration, in the present embodiment, movement of the microscope connecting member 40 is restricted by the restriction shaft 302. Therefore, when carrying the microscope apparatus 1, it can prevent that the microscope connection member 40 vibrates greatly. Thereby, failure of the atomic force microscope 10 and the optical microscope 20 can be surely prevented, and the microscope apparatus 1 can be easily carried.

  Note that when the weight W is not provided, the through hole 301 may be formed in the microscope connecting member 40. Further, the movement of the microscope connecting member 40 may be restricted by forming a concave portion in the microscope connecting member 40 and forming a convex portion corresponding to the concave portion in the base casing 50. In addition, the convex part of the base housing | casing part 50 is formed so that it may not contact the concave part of the microscope connection member 40. FIG.

  Further, the number and shape of the weights W are not limited to the shape shown in FIG. 20, and it is preferable to appropriately determine the number and shape so that vibrations at desired frequencies of the respective constituent elements can be removed.

  FIG. 21 shows another example of the attachment position of the weight W. For example, when the weight of the optical microscope 20 (FIG. 3) is smaller than that of the atomic force microscope 10 (FIG. 3), the weight W is placed on the lower surface of the optical microscope fixing member 42 of the microscope connecting member 40 as shown in FIG. May be attached. In this case, since the load applied to the elastic members 54a, 54b, 54c, 54d (FIG. 20) can be made uniform, the vibration of the microscope apparatus 1 (FIG. 1) can be reliably removed.

  Further, in FIG. 21, a through hole 311 that penetrates the weight W and the microscope connecting member 40 in the X direction is formed. A through hole 312 that penetrates the weight W in the Y direction is formed. Limiting shafts (not shown) are inserted into the through holes 311 and 312 respectively, and both ends of each limiting shaft are fixed to the reinforcing plates 52a, 52b, 52c, and 52d in the same manner as in FIG.

  In this case, the movement of the microscope connecting member 40 in the X direction, the Y direction, and the Z direction is surely limited by the limiting shaft. Therefore, when carrying the microscope apparatus 1 (FIG. 1), it is possible to reliably prevent the microscope connecting member 40 from vibrating greatly. Thereby, failure of the atomic force microscope 10 (FIG. 3) and the optical microscope 20 (FIG. 3) can be prevented more reliably, and the microscope apparatus 1 can be carried more easily.

  Moreover, in the said embodiment, as shown in FIG.7, FIG.9 and FIG.10, fitting the front-end | tip part of connecting shaft 62a, 62b to the fitting holes 73, 74 of the rotating members 71, 72, respectively. Thus, the connecting shafts 62a and 62b and the rotating members 71 and 72 are connected to each other. However, the shapes of the connecting shafts 62a and 62b and the rotating members 71 and 72 are not limited to the above example.

  22-24 is a figure which shows the other example of connecting shaft 62a, 62b and the rotation members 71,72. As shown in FIGS. 22 to 24, in this example, substantially rectangular rotating plates 601a and 601b are provided at the tip ends of the connecting shafts 62a and 62b, respectively. At both ends of the rotating plates 601a and 601b, substantially fan-shaped engaging portions 602a and 602b are respectively provided. The rotating members 71 and 72 are also provided with rotating plates 701a and 701b and engaging portions 702a and 702b, similarly to the connecting shafts 62a and 62b. The shafts SF1 and SF4 (FIG. 13) are integrally formed on the back surfaces of the rotating plates 701a and 701b, respectively.

  In such a configuration, when the user presses down the pressing unit 60c (FIG. 3), the rotating plates 601a and 601b and the rotating plates 701a and 701b approach each other. In this state, when the user rotates the Y-direction operation knob 60a and the vertical operation knob 60b, the rotating plates 601a and 601b rotate. Thereby, the engaging portions 602a and 602b engage with the engaging portions 702a and 702b, and the rotating plates 701a and 701b rotate in conjunction with the rotation of the rotating plates 601a and 601b. As a result, the shafts SF1 and SF4 (FIG. 13) rotate and the optical microscope 20 can be moved.

  In the rotary plates 601a and 601b, two magnets M4 are embedded at positions symmetrical to each other about the connecting shafts 62a and 62b. Further, as shown in FIG. 22, two magnets M5 are embedded in the rotary plates 701a and 701b at positions symmetrical to each other about the shafts SF1 and SF4 (FIG. 13). Moreover, the magnet M4 and the magnet M5 are provided so that the same pole may face each other. For example, when the magnet M4 is provided so that the N pole is on the back side, the magnet M5 is provided so that the N pole is on the front side.

  In this case, when the rotating plates 601a and 601b and the rotating plates 701a and 701b approach each other, the magnets M4 and M5 guide the rotating plates 601a and 601b and the rotating plates 701a and 701b at positions orthogonal to each other. Is done. Accordingly, when the user tries to connect the connecting shafts 62a and 62b and the rotating members 71 and 72 by pressing the pressing portion 60c of FIG. 3, the engaging portions 602a and 602b and the engaging portions 702a and 702b are connected. Can be prevented from coming into contact with each other. As a result, the optical microscope moving operation unit 60 and the connection mechanism 70 can be easily and reliably connected.

(7) Correspondence between each component of claims and each part of the embodiment In the above embodiment, the base casing 50 corresponds to the first installation member, and the microscope connecting member 40 is the second installation member. The atomic force microscope 10 corresponds to a scanning probe microscope, the exterior portion 800 corresponds to a cover member, and a connection mechanism having the same configuration as the sample mounting table 30 and the connection mechanism 70 is a first moving mechanism. The operation unit having the same configuration as the optical microscope movement operation unit 60 corresponds to the first operation unit, the floating base 27 and the coupling mechanism 70 correspond to the second movement mechanism, and the optical microscope movement operation unit. 60 corresponds to the second operation portion, the connecting shaft 62a and the connecting shaft 62b correspond to the second fitting portion, the rotating member 71 and the rotating member 72 correspond to the second fitted portion, and the magnet M3. And magnet M4 corresponds to the third magnet, Stone M1, magnets M2 and the magnets M5 corresponds to the fourth magnet, limiting shaft 302 is equivalent to limiting member.

  The pressing unit 60c corresponds to the second switching unit, and the pressing unit having the same configuration as the pressing unit 60c corresponds to the first switching unit, and has the same configuration as the sample mounting table 30 and the coupling mechanism 70. The connecting mechanism corresponds to the first operated part and the first connecting part, the floating base 27 corresponds to the second operated part, and the connecting mechanism 70 corresponds to the second connecting part.

  The present invention can be effectively used for measuring the surface shape of various materials.

It is a figure which shows the external appearance of the microscope apparatus which concerns on this Embodiment. It is a perspective view which shows an apparatus part. It is an assembly perspective view of the microscope apparatus of FIG. It is a block diagram for demonstrating the control system of a microscope apparatus. It is a block diagram which shows the control system in the case of using the contact mode of the atomic force microscope of FIG. It is an expansion perspective view of the front side of an optical microscope movement operation part. It is a figure which shows the relationship between an optical microscope movement operation part and a connection mechanism. It is a figure which shows the relationship between an optical microscope movement operation part and a connection mechanism. It is an expansion perspective view of the back side of an optical microscope movement operation part. It is an expansion perspective view of the back side of an optical microscope movement operation part. It is the figure which showed a part of component of the optical microscope movement operation part. It is the figure which showed a part of component of the optical microscope movement operation part. It is a top view of a connection mechanism. FIG. 3 is a perspective view of the optical microscope of FIG. 2 viewed from a substantially −X direction. It is a side view of an optical microscope. It is a front view of an optical microscope. It is a figure for demonstrating the detail of an idle base. It is a figure for demonstrating the detail of an idle base. (A) is a perspective view of an elastic member, (b) is sectional drawing of an elastic member. It is the figure which showed the microscope connection member and base housing | casing part of the microscope apparatus which concerns on other embodiment of this invention. It is a figure which shows the other example of the attachment position of a weight. It is a figure which shows the other example of a connection shaft and a rotation member. It is a figure which shows the other example of a connection shaft and a rotation member. It is a figure which shows the other example of a connection shaft and a rotation member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microscope apparatus 10 Atomic force microscope 11 AFM scanner 20 Optical microscope 21 Lens storage part 22 Optical axis conversion part 22a Optical axis conversion mirror 23 Electric zoom lens barrel 27 Pedestal base 27a Y direction moving member 27b, 27c Vertical movement auxiliary member 30 Sample Mounting table 40 Microscope connecting member 41 AFM fixing member 41s Sample mounting table accommodation space 42 Optical microscope fixing member 42c, 42d Connection member 43a, 43b, 43c, 43d Supported portion 44 AFM scanner supporting portion 45a, 45b Tilt fixing member 45c, 45d Guide shaft 46 Floating pedestal support 50 Base housing 52a, 52b, 52c, 52d Reinforcing plate 53a, 53b, 53c, 53d Support leg 54a, 54b, 54c, 54d Elastic member 60 Optical microscope moving operation 60a Y direction operation knob 60b Vertical control knob 60c Pressing part 61a, 61b Fixed cylinder 62a, 62b Connecting shaft 67 Connecting plate 70 Connecting mechanism 71, 72 Rotating member 73, 74 Fitting hole 75a, 75b, 75c, 75d Support plate 80, 90 Interface board 100 Cantilever 101 Probe 403 Elastic body 700 Device portion 800 Exterior portion 801 Window portion 802 Fitting member 800A Front case 800B Rear case 900 Personal computer ca Cable CSP Spring GL Gel material M Sample M1, M2, M3, M4, M5 Magnet N1, N2 Screw hole SF1, SF2, SF3, SF4, SF5, SF6 Shaft SP Spring member W Weight

Claims (13)

A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
A cover member that is provided on the first installation member and covers the scanning probe microscope and the second installation member so as not to contact the scanning probe microscope and the second installation member;
The scanning probe microscope is
A sample mounting table on which the sample is mounted;
A first moving mechanism for moving the sample mounting table;
The cover member has a first operation unit for operating the first moving mechanism,
The microscope apparatus, wherein the first operation unit and the first moving mechanism can be shifted to a connected state and a non-connected state. A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
An optical microscope installed on the second installation member;
A cover provided on the first installation member and covering the scanning probe microscope, the optical microscope, and the second installation member so as not to contact the scanning probe microscope, the optical microscope, and the second installation member With members,
The optical microscope has a second moving mechanism for moving the optical microscope,
The cover member has a second operation unit for operating the second moving mechanism,
The microscope apparatus, wherein the second operation unit and the second moving mechanism can be shifted to a connected state and a non-connected state. The first operation part has a first fitting part,
The first moving mechanism has a first fitted portion to be fitted to the first fitting portion,
The first fitting portion has a first magnet;
The second fitted portion has a second magnet,
The microscope apparatus according to claim 1, wherein the first and second magnets are provided so that the first fitting portion is guided to the first fitted portion. The microscope apparatus according to claim 1, further comprising an optical microscope installed on the second installation member. The optical microscope has a second moving mechanism for moving the optical microscope,
The cover member has a second operation unit for operating the second moving mechanism,
The microscope apparatus according to claim 4, wherein the second operation unit and the second moving mechanism are capable of shifting to a connected state and a non-connected state. The second operation part has a second fitting part,
The second moving mechanism has a second fitted portion fitted to the second fitting portion,
The second fitting portion has a third magnet;
The second fitted portion has a fourth magnet;
6. The microscope apparatus according to claim 2, wherein the third and fourth magnets are provided so that the second fitting portion is guided to the second fitted portion. The microscope apparatus according to claim 1, wherein the first installation member includes a limiting member that limits swinging of the second installation member. A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
In a microscope apparatus provided with an exterior member provided in the first installation member and provided in a non-contact manner with respect to the scanning probe microscope and the second installation member,
A first operation unit supported by the exterior member and installed on an outer surface of the exterior member and performing an operation related to adjustment or setting related to the scanning probe microscope;
A first operated part which is provided inside the exterior member and on the scanning probe microscope side and is operated by the first operating part;
It is provided inside the exterior member, and the first operation unit and the first operated unit are connected during operation by the first operation unit, and are not connected during measurement by the scanning probe microscope. And a first connecting portion. A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
In a microscope apparatus provided with an exterior member provided in the first installation member and provided in a non-contact manner with respect to the scanning probe microscope and the second installation member,
A first operation unit that is supported by the exterior member and installed on the outer surface of the exterior member, and that performs operations related to adjustment or setting related to the scanning probe microscope;
A first operated part that is provided inside the exterior member and on the scanning probe microscope side and that performs the adjustment or setting related to the scanning probe microscope based on the operation by the first operating part;
It is provided inside the exterior member, and the first operation unit and the first operated unit are connected when operated by the first operating unit, and are connected when measured by the scanning probe microscope. And a first connecting portion. It further includes first switching means that is provided on the outer surface of the exterior member and switches between connection and disconnection between the first operation portion and the first operated portion by being operated from the outside. The microscope apparatus according to claim 8 or 9, wherein the microscope apparatus is characterized. A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
An optical microscope installed on the second installation member;
In a microscope apparatus provided with an exterior member provided in the first installation member and provided in a non-contact manner with respect to the scanning probe microscope, the optical microscope, and the second installation member,
A second operation unit that is supported by the exterior member and is installed on an outer surface of the exterior member and performs an operation related to adjustment or setting related to the optical microscope;
A second operated part that is provided inside the exterior member and on the optical microscope side and is operated by the second operating part;
The second operating part and the second operated part are connected to each other when operated by the second operating part, and are not connected when measuring the optical microscope. 2. A microscope apparatus comprising two connecting portions. A first installation member;
A second installation member supported on the first installation member via an elastic member;
A scanning probe microscope installed on the second installation member;
An optical microscope installed on the second installation member;
In a microscope apparatus provided with an exterior member provided in the first installation member and provided in a non-contact manner with respect to the scanning probe microscope, the optical microscope, and the second installation member,
A second operation unit that is supported by the exterior member and is installed on an outer surface of the exterior member and performs an operation related to adjustment or setting related to the optical microscope;
A second operated part that is provided inside the exterior member and on the optical microscope side and that performs the adjustment or setting related to the optical microscope based on the operation by the second operating part;
The second operating part and the second operated part are connected to each other when operated by the second operating part, and are not connected when measuring the optical microscope. 2. A microscope apparatus comprising two connecting portions. And a second switching unit that is provided on the outer surface of the exterior member and is operated from the outside to switch between connection and non-connection between the second operation unit and the second operated unit. The microscope apparatus according to claim 11 or 12, characterized in that:

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