JP2007078633A - High sensitivity three-axis photoelectric field sensor - Google Patents

High sensitivity three-axis photoelectric field sensor Download PDF

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JP2007078633A
JP2007078633A JP2005270262A JP2005270262A JP2007078633A JP 2007078633 A JP2007078633 A JP 2007078633A JP 2005270262 A JP2005270262 A JP 2005270262A JP 2005270262 A JP2005270262 A JP 2005270262A JP 2007078633 A JP2007078633 A JP 2007078633A
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Yoshikazu Toba
良和 鳥羽
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Seikoh Giken Co Ltd
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<P>PROBLEM TO BE SOLVED: To provide a high sensitivity three-axis photoelectric field sensor by possessing a compact sensor head part and obtaining high sensitivity. <P>SOLUTION: Light of a signal light source 12 is converted into an electric signal by entering a uniaxial sensor head out of three-axis sensor heads 11 comprising the three uniaxial sensor heads having a photoelectric converter supplying electric power to a reflection optical modulator connected through an antenna via an optical circulator 13, a first optical switch 14 and a transmission single mode optical fiber 15 and the amplifier, receiving intensity modulation due to an electric field to be measured, returning the same route as outgoing, and entering an O/E converter 16 through the optical circulator 13. Light of a power light source 17 enters the photoelectric converter of the uniaxial sensor head detecting the electric field to be measured via a multi-mode optical fiber 24, a second optical switch 18 and a transmission multi-mode optical fiber 19 to supply electric power to the amplifier. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、主として、干渉型光導波路による光変調器を用いて電界の測定を行う光電界センサに係り、特に、X、Y、Zの3軸方向の電界の測定に好適な高感度3軸光電界センサに関する。   The present invention mainly relates to an optical electric field sensor that measures an electric field by using an optical modulator based on an interference type optical waveguide, and in particular, a highly sensitive triaxial that is suitable for measuring electric fields in three axial directions of X, Y, and Z. The present invention relates to an optical electric field sensor.

電気光学効果を利用した干渉型光導波路による光変調器を用いた光電界センサは、以下のような優れた特徴を持っている。即ち、金属部をほとんど持たないために被測定電界を乱さないこと、光ファイバで検出信号を伝送するので途中で誘導や電気的雑音の影響を受けないこと、結晶の電気光学効果を利用するので、高速応答が可能であり、かつその検出信号をそのまま少ない損失で伝送できること、センサ部に電源を必要としないことである。このような特質のゆえに光電界センサは、EMC分野などの電界測定に用いられている。   An optical electric field sensor using an optical modulator based on an interference type optical waveguide utilizing the electro-optic effect has the following excellent features. In other words, since it has almost no metal part, it does not disturb the electric field to be measured, it transmits the detection signal through the optical fiber, so it is not affected by induction or electrical noise, and uses the electro-optic effect of the crystal. The high-speed response is possible, and the detection signal can be transmitted as it is with little loss, and the power supply is not required for the sensor unit. Because of these characteristics, the optical electric field sensor is used for electric field measurement in the EMC field and the like.

X、Y、Zの3軸方向の電界を測定できる光電界センサの従来例を図5、図6、図7に従い説明する。これは、特許文献1および特許文献2に示されている。   A conventional example of an optical electric field sensor capable of measuring electric fields in the X, Y and Z triaxial directions will be described with reference to FIGS. This is shown in Patent Document 1 and Patent Document 2.

図5は、従来の3軸光電界センサの3軸センサヘッドの構成要素である1軸センサヘッドの構造を示す平面図である。   FIG. 5 is a plan view showing the structure of a uniaxial sensor head that is a constituent element of a triaxial sensor head of a conventional triaxial optical electric field sensor.

図5を参照すれば、1軸方向の電界測定用の光電界センサのセンサヘッド部は、一端側に反射ミラー51が設けられたLiNbO3結晶から成るLiNbO3結晶基板57上に他端側から一端側に向かって入出射光導波路58より分岐された2本の分岐光導波路59a,59bが反射ミラー51に結合されるように設けられると共に、LiNbO3結晶基板57における他端側の入出射光導波路58には、光ファイバ52が結合され、分岐光導波路59aを挟む所定の箇所には、電界を検出するアンテナの役割をする4対の対向する金属電極53が設置されて、反射型光変調器とアンテナが一体となって構成されている。 Referring to FIG. 5, one-axis direction of the sensor head of an optical electric field sensor for electric field measurements, from the other end on the LiNbO 3 crystal substrate 57 made of LiNbO 3 crystal is a reflection mirror 51 provided on one end side Two branched optical waveguides 59a and 59b branched from the incoming / outgoing optical waveguide 58 toward one end side are provided so as to be coupled to the reflecting mirror 51, and the incoming / outgoing optical light on the other end side in the LiNbO 3 crystal substrate 57 is provided. An optical fiber 52 is coupled to the waveguide 58, and four pairs of opposing metal electrodes 53 serving as antennas for detecting an electric field are installed at predetermined positions sandwiching the branch optical waveguide 59a, thereby reflecting light modulation. The instrument and the antenna are integrated.

上記金属電極53は、三角形の金属膜の組み合わせにより形成され、矢印で示す方向(光導波路に対し54.7度の方向)の電界によって誘起された電圧を分岐光導波路59aに印加するように、そのパターンが決められる。   The metal electrode 53 is formed of a combination of triangular metal films, and applies a voltage induced by an electric field in a direction indicated by an arrow (direction of 54.7 degrees with respect to the optical waveguide) to the branched optical waveguide 59a. The pattern is decided.

この動作は、光ファイバ52から入射した光がLiNbO3結晶基板57上の入出射光導波路58を経て2本の分岐光導波路59a,59bに分岐され、このとき一方の分岐光導波路59aには金属電極53により電界が印加されて屈折率の変化が生じるが、他方の分岐光導波路59bには電界による屈折率の変化は無く、何れの分岐光導波路59a,59bを伝播する光も反射ミラー51で反射された後、分岐光導波路59a,59bを逆方向に伝播して再び入出射光導波路58で合波される。この合波に際して、2つの光路の屈折率の差異により生じる位相差のため干渉が生じ、合波後の光強度は変調され、この後この変調光は光ファイバ52に結合して出射する。 In this operation, light incident from the optical fiber 52 is branched into two branch optical waveguides 59a and 59b via an input / output optical waveguide 58 on the LiNbO 3 crystal substrate 57. At this time, one of the branch optical waveguides 59a includes a metal. Although an electric field is applied by the electrode 53 to cause a change in refractive index, the other branch optical waveguide 59b has no change in refractive index due to the electric field, and light propagating through any of the branch optical waveguides 59a and 59b is reflected by the reflection mirror 51. After being reflected, the light propagates in the opposite direction through the branched optical waveguides 59a and 59b and is multiplexed again by the input / output optical waveguide 58. During this multiplexing, interference occurs due to the phase difference caused by the difference in refractive index between the two optical paths, the light intensity after the multiplexing is modulated, and then this modulated light is coupled to the optical fiber 52 and emitted.

ここで、上記光導波路がTEモードまたはTMモードのいずれか一方の強度変調を与える伝搬モードのみしか導波しない場合には、光ファイバ52はシングルモード光ファイバをそのまま使用できる。両者の伝搬モードを導波する場合には、入射側に偏光分離器が必要となり、光ファイバ52には偏光保存光ファイバが使用される。   Here, when the optical waveguide only guides a propagation mode that applies intensity modulation of either the TE mode or the TM mode, a single mode optical fiber can be used as it is. When guiding both propagation modes, a polarization separator is required on the incident side, and a polarization-maintaining optical fiber is used as the optical fiber 52.

図6は、上記の1軸のセンサヘッド3個を正三角柱の支持部材に実装した3軸電界測定用光電界センサの3軸センサヘッドの断面図を示す。図6に示すように、正三角柱の支持部材63の側面に、上記と同様な3つの反射型光変調器64、65、66をそれぞれの光導波路方向が図6の紙面に垂直になるように配置する。   FIG. 6 shows a cross-sectional view of a triaxial sensor head of a triaxial electric field measuring optical electric field sensor in which the above three uniaxial sensor heads are mounted on a regular triangular prism support member. As shown in FIG. 6, three reflective optical modulators 64, 65, 66 similar to the above are provided on the side surface of the regular triangular prism support member 63 so that the direction of each optical waveguide is perpendicular to the paper surface of FIG. Deploy.

これにより、上記3つの反射型光変調器の金属電極の方向は互いに直交し、その直交3軸方向の被測定電界成分によってそれぞれのアンテナすなわち金属電極に誘起された電圧によって反射型光変調器への入射光は変調される。   As a result, the directions of the metal electrodes of the three reflection type optical modulators are orthogonal to each other, and the voltage induced in each antenna, that is, the metal electrode by the measured electric field components in the three orthogonal axes directions to the reflection type optical modulator. The incident light is modulated.

図7は、従来の3軸光電界センサ装置全体の構成を示し、互いに直交する2つの直線偏波からなる光源73から出射した光は、シングルモード光ファイバ78、光サーキュレータ74、光スイッチ75、および伝送シングルモード光ファイバ76を経て、3軸センサヘッド70の1つの反射型光変調器に入射し、被測定電界による強度変調を受けて、再び、伝送シングルモード光ファイバ76に入射する。その後、変調された光は光スイッチ75、光サーキュレータ74を経て、O/E変換器77に入射し、電気信号に変換される。光スイッチ75により光変調器を選択することにより、直交する3軸方向の電界を順次測定することができる。   FIG. 7 shows the entire configuration of a conventional three-axis optical electric field sensor device. Light emitted from a light source 73 composed of two linearly polarized waves orthogonal to each other includes a single mode optical fiber 78, an optical circulator 74, an optical switch 75, Then, it passes through the transmission single mode optical fiber 76 and enters one reflection type optical modulator of the triaxial sensor head 70, undergoes intensity modulation by the electric field to be measured, and enters the transmission single mode optical fiber 76 again. Thereafter, the modulated light passes through the optical switch 75 and the optical circulator 74, enters the O / E converter 77, and is converted into an electric signal. By selecting an optical modulator by the optical switch 75, it is possible to sequentially measure electric fields in three orthogonal directions.

特開2002−257884号公報JP 2002-257484 A 特開2004−212137号公報JP 2004-212137 A

3軸光電界センサは、通常、狭い領域での電界や被測定物に近接した領域での電界の検出に利用されるので、センサヘッド部分には小型化が要求される。そこで、上記従来例のように、LiNbO3結晶基板上に設置した金属電極パターンをアンテナとしている。このような場合、上述のようにアンテナ長が制限されるので電界によりアンテナに誘起される電圧は非常に小さく、検出感度は非常に小さくなってしまう。そこで、従来の3軸光電界センサは電界強度が大きい場合の計測用途に限られており、適用領域が大幅に制限されていた。 Since the triaxial optical electric field sensor is usually used for detecting an electric field in a narrow area or an electric field in an area close to the object to be measured, the sensor head portion is required to be downsized. Therefore, as in the above conventional example, a metal electrode pattern placed on a LiNbO 3 crystal substrate is used as an antenna. In such a case, since the antenna length is limited as described above, the voltage induced in the antenna by the electric field is very small, and the detection sensitivity becomes very small. Therefore, the conventional three-axis optical electric field sensor is limited to the measurement application when the electric field strength is large, and the application area is greatly limited.

そこで、本発明は、小型のセンサヘッド部を有し、かつ高感度が得られ、広い範囲で応用が可能な高感度3軸光電界センサを提供することを課題とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide a high-sensitivity triaxial optical electric field sensor that has a small sensor head part, has high sensitivity, and can be applied in a wide range.

上記目的を達成するために、本発明の高感度3軸光電界センサでは、互いに異なる方位の電界成分に感度を有する3つのアンテナと、それらのアンテナにそれぞれ接続された3つの電気的な増幅器と、それらのそれぞれの増幅器からの電圧により入射光に対してそれぞれ強度変調を与える3つの反射型光変調器と、前記増幅器のそれぞれに電力を供給するための3つの光電変換器とからなる3軸センサヘッドと、無変調光を発生する信号用光源と、この信号用光源からの無変調光が入射する光サーキュレータと、この光サーキュレータからの出射光の光路を切替える少なくとも3つの出力ポートを持つ第一の光スイッチと、その第一の光スイッチの各ポートの出力光を前記反射型光変調器に導くための3つの信号用の光ファイバと、前記反射型光変調器から前記信号用の光ファイバ、前記第一の光スイッチ、前記光サーキュレータを介して戻ってきた前記強度変調を与えられた出力光を電気信号に変換するO/E変換器と、前記光電変換器に光を供給するための電力用光源と、その電力用光源からの光を前記それぞれの光電変換器に導くための3つの電力用の光ファイバと、前記電力用光源から出射された光を上記3つの電力用の光ファイバに切り替えるための第二の光スイッチを備えている。   In order to achieve the above object, in the high-sensitivity triaxial optical electric field sensor of the present invention, three antennas having sensitivity to electric field components in different directions, and three electric amplifiers connected to the antennas, respectively, A three-axis system comprising three reflective optical modulators that respectively modulate the intensity of incident light with voltages from their respective amplifiers, and three photoelectric converters for supplying power to each of the amplifiers A sensor head, a signal light source for generating unmodulated light, an optical circulator for receiving unmodulated light from the signal light source, and at least three output ports for switching optical paths of light emitted from the optical circulator One optical switch, three signal optical fibers for guiding output light of each port of the first optical switch to the reflective optical modulator, and the reflection An O / E converter that converts the intensity-modulated output light returned from the optical modulator through the optical fiber for the signal, the first optical switch, and the optical circulator into an electrical signal; A power light source for supplying light to the photoelectric converter, three power optical fibers for guiding light from the power light source to the respective photoelectric converters, and emitted from the power light source A second optical switch for switching the light to the three power optical fibers is provided.

また、前記第一の光スイッチと第二のスイッチは、一つの反射型光変調器及びそれに接続された増幅器に電力を供給する光電変換器に対して同時にそれぞれ信号用光源からの無変調光および電力用光源からの光を与えるように選択する機能を持つことが望ましい。   In addition, the first optical switch and the second switch respectively include a non-modulated light from a signal light source and a photoelectric converter that supplies power to one reflective optical modulator and an amplifier connected thereto. It is desirable to have a function of selecting to provide light from the power source.

また、前記信号用光源は、発振周波数がわずかに異なり、互いに直交する2つの直線偏波を合波して出力するレーザ光源であってもよい。   The signal light source may be a laser light source that oscillates slightly and oscillates and outputs two linearly polarized waves orthogonal to each other.

上述の構成により、本発明によれば、小型のセンサヘッド部を有し、かつ高感度が得られ、広い範囲で応用が可能な高感度3軸光電界センサを提供することができる。   With the above-described configuration, according to the present invention, it is possible to provide a high-sensitivity triaxial optical electric field sensor that has a small sensor head portion, has high sensitivity, and can be applied in a wide range.

次に、図1〜図4に基づいて、本発明の実施の形態について説明する。   Next, an embodiment of the present invention will be described with reference to FIGS.

図2は、本発明の高感度3軸光電界センサの一実施の形態における3軸センサヘッド部の外観斜視図である。22は信号用の3本の光ファイバと電力用の3本の光ファイバの束、21は非金属の保持ロッド、20は3軸センサヘッドである。   FIG. 2 is an external perspective view of a triaxial sensor head portion in an embodiment of the high sensitivity triaxial optical electric field sensor of the present invention. 22 is a bundle of three optical fibers for signals and three optical fibers for electric power, 21 is a non-metallic holding rod, and 20 is a three-axis sensor head.

この3軸センサヘッドの大きさはφ50×70mmであり、3軸方向の電界を測定するため、3つのアンテナロッド、3つの電気的な増幅器、3つの光電変換器、3つの反射型光変調器が収められている。   The size of this triaxial sensor head is φ50 × 70 mm, and in order to measure the electric field in the triaxial direction, three antenna rods, three electrical amplifiers, three photoelectric converters, and three reflective optical modulators Is contained.

上記3軸センサヘッド20を上面から見たときの断面図を図3に示す。正三角形の断面を有する三角柱の支持部材31の3つの側面にx軸方向の電界を測定する1軸センサヘッド32、y軸方向の電界を測定する1軸センサヘッド33、z軸方向の電界を測定する1軸センサヘッド34がそれぞれ配置されている。それぞれの1軸センサヘッドには、それぞれの方向の電界に対応したアンテナロッド35、電気的な増幅器37、光電変換器38、反射型光変調器36がそれぞれ配置されている。このような構成により、3次元直交座標軸、x、y、z軸方向の電界測定が可能になる。   A sectional view of the triaxial sensor head 20 as viewed from above is shown in FIG. A uniaxial sensor head 32 that measures an electric field in the x-axis direction, a uniaxial sensor head 33 that measures an electric field in the y-axis direction, and an electric field in the z-axis direction on three side surfaces of a triangular prism support member 31 having an equilateral triangular cross section. A uniaxial sensor head 34 to be measured is disposed. In each uniaxial sensor head, an antenna rod 35, an electrical amplifier 37, a photoelectric converter 38, and a reflective light modulator 36 corresponding to the electric field in each direction are arranged. With such a configuration, electric field measurement in the three-dimensional orthogonal coordinate axes, x, y, and z-axis directions becomes possible.

ここで用いる1軸センサヘッドの構成の概略図を図4に示す。上述の図5の従来のセンサヘッドと同様に、反射型光変調器36はLiNbO3結晶基板41上に作製されたTi拡散光導波路からなる入出射光導波路42、2本の分岐光導波路43、その一方の分岐光導波路を挟んで設けられた金属電極44、反射ミラー45よりなり、入出射光導波路42の入射端には光ファイバ46が結合している。 A schematic diagram of the configuration of the single-axis sensor head used here is shown in FIG. Similar to the conventional sensor head of FIG. 5 described above, the reflective optical modulator 36 includes an input / output optical waveguide 42 made of a Ti diffusion optical waveguide fabricated on a LiNbO 3 crystal substrate 41, two branched optical waveguides 43, The optical fiber 46 is coupled to the incident end of the input / output optical waveguide 42. The optical electrode 46 includes a metal electrode 44 and a reflection mirror 45 provided with one branch optical waveguide interposed therebetween.

アンテナロッド35は、反射型光変調器36の外部に設置され、そこに誘起された電圧は電気的な増幅器37により増幅され、上記金属電極44に印加される。電気的な増幅器37は電力用光ファイバ39によって電力光を供給された光電変換器38から誘起される電圧により駆動される。   The antenna rod 35 is installed outside the reflection type optical modulator 36, and the voltage induced therein is amplified by an electric amplifier 37 and applied to the metal electrode 44. The electric amplifier 37 is driven by a voltage induced from a photoelectric converter 38 supplied with power light by a power optical fiber 39.

なお、図4は、センサヘッドの構成、動作を説明するため、アンテナロッド35、増幅器37、光電変換器38、反射型光変調器36は、それらの大きさ、配置などは模式的に示しているが、実際には電界の検出に与える影響を少なくするために、図3に示すように正三角柱の支持部材31の3つの側面にコンパクトに実装されている。   4 schematically illustrates the size and arrangement of the antenna rod 35, the amplifier 37, the photoelectric converter 38, and the reflective optical modulator 36 in order to explain the configuration and operation of the sensor head. In practice, however, in order to reduce the influence on the detection of the electric field, it is compactly mounted on the three side surfaces of the support member 31 of the regular triangular prism as shown in FIG.

本実施の形態では、支持部材31の断面形状は正三角形で各アンテナロッドの角度は図5と同様な向きに54.7度となっているが、本発明では、アンテナロッドは反射型光変調器とは分離されているため、その方向は支持部材の形状との組み合わせで互いに直交すればよく、支持部材の形状、アンテナロッドの角度は上記にはとらわれない。例えば、支持部材の断面形状を直角三角形、アンテナロッドの向きを反射型光変調器の光導波路方向と上記直角三角形の直角を挟む2辺の方向とすることができる。   In this embodiment, the cross-sectional shape of the support member 31 is an equilateral triangle, and the angle of each antenna rod is 54.7 degrees in the same direction as in FIG. 5, but in the present invention, the antenna rod is a reflection type light modulation. Since it is separated from the vessel, the directions may be orthogonal to each other in combination with the shape of the support member, and the shape of the support member and the angle of the antenna rod are not limited to the above. For example, the cross-sectional shape of the support member can be a right triangle, and the direction of the antenna rod can be a direction of two sides sandwiching the right angle of the right triangle of the optical waveguide direction of the reflective optical modulator.

また、金属電極44は2本の分岐光導波路43の両方にプッシュプルに電圧が印加されるような形状でも良く、また、広帯域の感度特性を得るためには分割電極構成としても良い。   In addition, the metal electrode 44 may have a shape in which a voltage is applied to both the two branch optical waveguides 43 in a push-pull manner, and may have a split electrode configuration in order to obtain broadband sensitivity characteristics.

次に、図1を参照して、本実施形態の高感度3軸光電界センサについて説明する。11は本実施の形態の3軸センサヘッド、12は互いに直交する2つの直線偏波を出力する信号用光源、13は光サーキュレータ、14は第1の光スイッチ、15は信号伝送用の伝送シングルモード光ファイバ、16はフォトダイオードとアンプからなるO/E変換器である。一方、17は電力用光源、18は第2の光スイッチ、19は電力伝送用の伝送マルチモード光ファイバである。   Next, the highly sensitive three-axis optical electric field sensor of this embodiment will be described with reference to FIG. 11 is a three-axis sensor head of this embodiment, 12 is a signal light source that outputs two linearly polarized waves orthogonal to each other, 13 is an optical circulator, 14 is a first optical switch, and 15 is a transmission single for signal transmission. A mode optical fiber 16 is an O / E converter including a photodiode and an amplifier. On the other hand, 17 is a power light source, 18 is a second optical switch, and 19 is a transmission multimode optical fiber for power transmission.

次に、この電界センサの動作について説明する。信号用光源12から出射した互いに直交する2つの直線偏波の光は、シングルモード光ファイバ23、光サーキュレータ13、第1の光スイッチ14、および伝送シングルモード光ファイバ15を経て、3軸センサヘッド11の中の1つの1軸センサヘッドに入射し、被測定電界による強度変調を受けて、再び、伝送シングルモード光ファイバ15に入射する。その後、変調された光は第1の光スイッチ14、光サーキュレータ13を経て、O/E変換器16に入射し、電気信号に変換される。一方、電力用光源17からから出射した光はマルチモード光ファイバ24を経て、第2の光スイッチ18、および伝送マルチモード光ファイバ19を経て、3軸センサヘッド11に入射し、被測定電界を検出している1軸センサヘッドの光電変換器に入射して電力を生成し、その増幅器に電力を供給する。   Next, the operation of this electric field sensor will be described. Two orthogonally polarized light beams emitted from the signal light source 12 pass through a single-mode optical fiber 23, an optical circulator 13, a first optical switch 14, and a transmission single-mode optical fiber 15, and a three-axis sensor head. 11 is incident on one uniaxial sensor head 11, is subjected to intensity modulation by the electric field to be measured, and enters the transmission single mode optical fiber 15 again. Thereafter, the modulated light passes through the first optical switch 14 and the optical circulator 13, enters the O / E converter 16, and is converted into an electrical signal. On the other hand, the light emitted from the power light source 17 passes through the multi-mode optical fiber 24, enters the triaxial sensor head 11 through the second optical switch 18 and the transmission multi-mode optical fiber 19, and generates an electric field to be measured. The light is incident on the photoelectric converter of the detected single-axis sensor head to generate power, and the power is supplied to the amplifier.

他の2軸方向に対しては、第1および第2の光スイッチ14、18により光路を切り替えることにより第1の軸方向と同様に動作する。   With respect to the other two axial directions, the first and second optical switches 14 and 18 are operated in the same manner as the first axial direction by switching the optical path.

このような構成により、本実施の形態の高感度3軸光電界センサは、第1の光スイッチ及び第2の光スイッチのスイッチングによる軸の選択により3軸方向の電界をそれぞれ測定することが可能となる。   With such a configuration, the high-sensitivity three-axis optical electric field sensor according to the present embodiment can measure the electric fields in the three-axis directions by selecting the axes by switching the first optical switch and the second optical switch. It becomes.

なお、高感度を得るための電気的な増幅器への電力の供給をより簡単に行うためには、1つの光電変換器によりまとめて3つの増幅器への給電を行う方法が考えられ、この場合には電力用光ファイバは1本で良く、また第2の光スイッチも不要となる。また、第2の光スイッチの代わりに光を3分岐する光カップラの使用も考えられる。   In order to more easily supply power to an electric amplifier for obtaining high sensitivity, a method of feeding power to three amplifiers by one photoelectric converter can be considered. Requires only one optical fiber for power, and the second optical switch is not required. In addition, use of an optical coupler that divides light into three instead of the second optical switch is also conceivable.

しかし、これらの場合には、1つの軸の電界の測定を行うときに他のアンテナに誘起された電圧が増幅されているため、被測定軸の電界検出に大きな影響を与えることが実験的に明らかとなった。そこで本発明では電力供給用の光電変換器を各3軸で分離し、被測定軸以外ではアンテナで誘起された電圧が増幅されるのを防ぐことを可能とすることにより上記干渉を防止している。   However, in these cases, since the voltage induced in the other antenna when the electric field of one axis is measured is amplified, it may experimentally affect the electric field detection of the axis to be measured. It became clear. Therefore, in the present invention, the photoelectric converter for power supply is separated on each of the three axes, and it is possible to prevent the voltage induced by the antenna from being amplified other than the axis to be measured, thereby preventing the interference. Yes.

以上のように、従来の3軸光電界センサが電磁ノイズに対する装置の耐性試験、即ち、イミュニティ試験などの場合のように、強電界を測定する用途に応用が限られていたのに比べ、本発明により得られた小型のセンサヘッド部を有し、かつ高感度を有する高感度3軸光電界センサは、従来に比べて20dB以上の感度改善が得られるもので、装置などが放出するノイズの測定、即ち、エミッション測定用途などにも使用することができ、広い範囲で応用が可能となる。   As described above, the conventional three-axis optical electric field sensor has a limited application to the use of measuring a strong electric field as in the case of a tolerance test of an apparatus against electromagnetic noise, that is, an immunity test. The high-sensitivity triaxial optical electric field sensor having a small sensor head portion obtained by the invention and having high sensitivity can obtain a sensitivity improvement of 20 dB or more as compared with the conventional one. It can also be used for measurement, that is, emission measurement applications, and can be applied in a wide range.

本発明の高感度3軸光電界センサにおいては、互いに直交する2つの直線偏波を出力する光源を用いることにより光変調器の偏波依存性を解消することができ、それに伴い、光スイッチング方式、光伝送路の偏波無依存化が可能となり汎用部品の使用、ほぼ1軸センサと同様な部品構成が可能となり実用性の高い装置が実現できる。   In the highly sensitive three-axis optical electric field sensor of the present invention, the polarization dependency of the optical modulator can be eliminated by using a light source that outputs two linearly polarized waves orthogonal to each other. Thus, the polarization of the optical transmission path can be made independent, the use of general-purpose parts, and the construction of parts almost the same as a single-axis sensor can be realized, thereby realizing a highly practical device.

上述の2つの光源の発信周波数差は、それにより発生するビートノイズが測定周波数領域に影響を及ぼさないように、測定周波数の上限の2倍程度以上の値、例えば、測定周波数が3GHzの場合は、6GHz程度以上に設定される。   The difference between the transmission frequencies of the two light sources described above is a value that is at least twice the upper limit of the measurement frequency so that beat noise generated thereby does not affect the measurement frequency region, for example, when the measurement frequency is 3 GHz. , About 6 GHz or more.

また、部品の共通化のため、電力供給用の光ファイバとしてもシングルモード光ファイバを用いることも可能である。   In addition, a single mode optical fiber can be used as an optical fiber for supplying power for common parts.

本発明の一実施の形態における高感度3軸光電界センサの構成を示す図。The figure which shows the structure of the highly sensitive triaxial optical electric field sensor in one embodiment of this invention. 本発明の一実施の形態における3軸センサヘッドの外観斜視図。1 is an external perspective view of a three-axis sensor head according to an embodiment of the present invention. 本発明の一実施の形態における3軸センサヘッドを上面から見たときの断面図。Sectional drawing when the triaxial sensor head in one embodiment of this invention is seen from the upper surface. 本発明の一実施の形態における3軸センサヘッドの構成要素である1軸センサヘッドの構成を示す図。The figure which shows the structure of the uniaxial sensor head which is a component of the triaxial sensor head in one embodiment of this invention. 従来の3軸光電界センサの3軸センサヘッドの構成要素である1軸センサヘッドの構造を示す平面図。The top view which shows the structure of the uniaxial sensor head which is a component of the triaxial sensor head of the conventional triaxial optical electric field sensor. 従来の3軸光電界センサの3軸センサヘッドを上面から見たときの断面図。Sectional drawing when the triaxial sensor head of the conventional triaxial optical electric field sensor is seen from the upper surface. 従来の3軸光電界センサの構成を示す図。The figure which shows the structure of the conventional triaxial optical electric field sensor.

符号の説明Explanation of symbols

11 3軸センサヘッド
12 信号用光源
17 電力用光源
13,74 光サーキュレータ
14 第1の光スイッチ
18 第2の光スイッチ
15,76 伝送シングルモード光ファイバ
23,78 シングルモード光ファイバ
24 マルチモード光ファイバ
19 伝送マルチモード光ファイバ
16,77 O/E変換器
20,70 3軸センサヘッド
21 非金属保持ロッド
22 信号用の3本の光ファイバと電力用の3本の光ファイバの束
31,63 支持部材
32 x軸方向の電界を測定する1軸センサヘッド
33 y軸方向の電界を測定する1軸センサヘッド
34 z軸方向の電界を測定する1軸センサヘッド
35 アンテナロッド
36,64,65,66 反射型光変調器
37 電気的な増幅器
38 光電変換器
46,52 光ファイバ
39 電力用光ファイバ
41,57 LiNbO3結晶基板
42,58 入出射光導波路
43,59a,59b 分岐光導波路
44,53 金属電極
45,51 反射ミラー
11 3-axis sensor head 12 Signal light source 17 Power light source 13, 74 Optical circulator 14 First optical switch 18 Second optical switch 15, 76 Transmission single mode optical fiber 23, 78 Single mode optical fiber 24 Multimode optical fiber 19 Transmission multimode optical fiber 16, 77 O / E converter 20, 70 Triaxial sensor head 21 Non-metal holding rod 22 Bunch of three optical fibers for signals and three optical fibers for power 31, 63 Member 32 Uniaxial sensor head 33 for measuring the electric field in the x-axis direction Uniaxial sensor head 34 for measuring the electric field in the y-axis direction Single-axis sensor head 35 for measuring the electric field in the z-axis direction Antenna rods 36, 64, 65, 66 Reflective light modulator 37 Electrical amplifier 38 Photoelectric converter 46, 52 Optical fiber 39 Power optical fiber 41, 7 LiNbO 3 crystal substrate 42, 58 input and output optical waveguide 43,59a, 59b branch optical waveguides 44 and 53 metal electrodes 45 and 51 reflecting mirrors

Claims (3)

互いに異なる方位の電界成分に感度を有する3つのアンテナと、それらのアンテナにそれぞれ接続された3つの電気的な増幅器と、それらのそれぞれの増幅器からの電圧により入射光に対してそれぞれ強度変調を与える3つの反射型光変調器と、前記増幅器のそれぞれに電力を供給するための3つの光電変換器とからなる3軸センサヘッドと、無変調光を発生する信号用光源と、この信号用光源からの無変調光が入射する光サーキュレータと、この光サーキュレータからの出射光の光路を切替える少なくとも3つの出力ポートを持つ第一の光スイッチと、その第一の光スイッチの各ポートの出力光を前記反射型光変調器に導くための3つの信号用の光ファイバと、前記反射型光変調器から前記信号用の光ファイバ、前記第一の光スイッチ、前記光サーキュレータを介して戻ってきた前記強度変調を与えられた出力光を電気信号に変換するO/E変換器と、前記光電変換器に光を供給するための電力用光源と、その電力用光源からの光を前記それぞれの光電変換器に導くための3つの電力用の光ファイバと、前記電力用光源から出射された光を上記3つの電力用の光ファイバに切り替えるための第二の光スイッチを備えたことを特徴とする高感度3軸光電界センサ。   Intensity modulation is applied to incident light by three antennas having sensitivity to electric field components in different directions, three electrical amplifiers connected to the antennas, and voltages from the respective amplifiers. A three-axis sensor head comprising three reflective optical modulators and three photoelectric converters for supplying power to each of the amplifiers, a signal light source for generating unmodulated light, and a signal light source An optical circulator to which the unmodulated light is incident, a first optical switch having at least three output ports for switching the optical path of light emitted from the optical circulator, and output light from each port of the first optical switch. Three optical fibers for signals to be led to the reflective optical modulator, the optical fiber for signals from the reflective optical modulator, the first optical switch, the front An O / E converter that converts the intensity-modulated output light returned through the optical circulator into an electric signal, a power light source for supplying light to the photoelectric converter, and the power light source Three power optical fibers for guiding light from the power converter to each of the photoelectric converters, and a second optical switch for switching the light emitted from the power light source to the three power optical fibers A high-sensitivity triaxial optical electric field sensor characterized by comprising: 前記第一の光スイッチと第二のスイッチは、一つの反射型光変調器及びそれに接続された増幅器に電力を供給する光電変換器に対して同時にそれぞれ信号用光源からの無変調光および電力用光源からの光を与えるように選択する機能を持つことを特徴とする請求項1に記載の高感度3軸光電界センサ。   The first optical switch and the second switch are for the non-modulated light from the signal light source and the power for the photoelectric converter that supplies power to one reflective optical modulator and an amplifier connected thereto, respectively. 2. The high-sensitivity triaxial optical electric field sensor according to claim 1, which has a function of selecting so as to give light from a light source. 前記信号用光源は、発振周波数がわずかに異なり、互いに直交する2つの直線偏波を合波して出力するレーザ光源であることを特徴とする請求項1または2のいずれかに記載の高感度3軸光電界センサ。   3. The high sensitivity according to claim 1, wherein the signal light source is a laser light source that oscillates slightly and oscillates and outputs two linearly polarized waves orthogonal to each other. 3-axis optical electric field sensor.
JP2005270262A 2005-09-16 2005-09-16 High sensitivity three-axis photoelectric field sensor Pending JP2007078633A (en)

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CN102156214A (en) * 2011-04-29 2011-08-17 重庆大学 Double-light-path leakage current optical fiber sensor device
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CN110208632A (en) * 2019-07-09 2019-09-06 深圳创维数字技术有限公司 A kind of method, system and storage medium for electromagnetic compatibility testing
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JPH11509070A (en) * 1996-04-15 1999-08-03 アルカテル・アルストム・コンパニイ・ジエネラル・デレクトリシテ Variable gain type optical amplifier having a constant pass band and optical link loss change automatic compensation system including the amplifier
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Publication number Priority date Publication date Assignee Title
JP2010002625A (en) * 2008-06-19 2010-01-07 Ricoh Co Ltd Powder conveying device, process cartridge and image forming apparatus
CN102156214A (en) * 2011-04-29 2011-08-17 重庆大学 Double-light-path leakage current optical fiber sensor device
CN107843775A (en) * 2017-12-20 2018-03-27 中国科学院大气物理研究所 Posture can perceive thunder cloud three-dimensional electric field sonde
CN107843775B (en) * 2017-12-20 2024-02-27 中国科学院大气物理研究所 Three-dimensional electric field sonde capable of sensing thunderstorm cloud in gesture
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