JP2007062132A - Micro-biochemical device, its manufacturing method and manufacturing method of mold for micro-biochemical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a micro-biochemical device or the like capable of forming a complicated three-dimensional structure precisely, rapidly and simply. <P>SOLUTION: In the manufacturing method of the micro-biochemical device, a photosetting resin liquid is selectively irradiated with light to form a cured resin layer by repeating collective exposure using a projection region as a unit to form a cured resin layer and the cured resin layer is successively laminated to form a three-dimensional shape. This manufacturing method is especially effective in the case that the structure of the micro-biochemical device or the like is the complicated three-dimensional structure having an overhang part. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a microbiochemical device characterized in that a photocurable resin liquid is selectively irradiated with light to form a cured resin layer, and the cured resin layer is sequentially laminated to form a three-dimensional structure. The present invention relates to a manufacturing method, a manufacturing method of a micro biochemical device mold, and a micro biochemical device manufactured by a micro biochemical device mold.

  In recent years, MEMS (Micro Electro Mechanical Systems) have attracted attention in the medical and bio fields. MEMS refers to a system that is manufactured using a three-dimensional microfabrication technique (micromachining) and has a fine three-dimensional structure having high functions. With the advent of MEMS, it is possible to reduce the size of various devices, and to improve the performance of various devices such as high sensitivity, high speed response, and high spatial resolution.

  Conventionally, blood pressure measuring devices and the like have been difficult to purchase and measure at home due to their large size, but today, small electronic blood pressure monitors have appeared and can be easily checked and managed by anyone at home. It became so. The MEMS pressure sensor greatly contributes to the downsizing of the sphygmomanometer.

  Furthermore, in recent years, the importance of DNA analysis technology has been increasing, and intensive research has been conducted on DNA separation technology as an important technology. As a method for separating DNA, for example, electrophoresis is known. This is a method of performing electrophoresis using a gel or polymer as a separation carrier. In particular, a DNA electrophoresis chip that constructs a complex channel on a microchip and performs DNA separation in the channel is used for downsizing the DNA electrophoresis chip (space saving, sample saving, reagent saving, saving Waste liquid), multi-array parallel processing (saving time and space saving), one-process / automation (dead volume, saving time, man-power saving), faster interfacial reaction (reducing reaction time, improving production efficiency), etc. Have advantages.

  The devices used in the medical field such as a small pressure sensor and a DNA electrophoresis chip, and the biotechnology field in a broad sense, and devices and structures for analysis, reaction, and inspection are collectively referred to as a microbiochemical device in this specification. I decided to.

  Microbiochemical devices need to produce very sophisticated structures. Furthermore, in the case of electrical devices such as electrodes and sensors, a thin metal layer is provided on the surface of the transparent substrate by vapor deposition or the like to provide conductivity, and not only the groove shape but also a more complicated three-dimensional structure. For example, by forming a thin piece partly floating from the surface of the substrate, a sensor for detecting strain against mechanical vibration can be formed.

  As a conventional method for producing a DNA electrophoresis chip, a microchannel is formed on a silicon wafer by cutting a transparent substrate such as glass or by wet etching using a lithography technique and hydrogen fluoride on a silicon wafer. Has been proposed (Non-Patent Document 1). Also, a manufacturing method (Non-patent Document 2) for forming a flow channel on a glass substrate, or a method for producing a micro flow channel by pressing a flow channel pattern in a heated and softened state using a polymethylmethacrylate substrate. (Non-Patent Document 3) has been proposed. In addition, when a lithography technique or the like is used, a technique for forming a structure having an overhang portion by adopting an intermediate process for providing a sacrificial layer is also known (Patent Documents 1 and 2).

On the other hand, in the photo-curing modeling method (hereinafter referred to as “optical modeling method”), modeling is performed based on data of a cross-sectional group obtained by slicing a three-dimensional model to be modeled into a plurality of layers. Usually, light is first applied to the surface of the photocurable resin liquid in a region corresponding to the lowermost cross section. Then, the photocurable resin liquid on the liquid surface portion irradiated with light is photocured, and a cured resin layer having one cross section of the three-dimensional model is formed. Next, an uncured photocurable resin liquid is coated on the surface of the cured resin layer with a predetermined thickness. At this time, it is common to coat the cured resin layer by immersing it in a photocurable resin liquid filled in the resin tank by a predetermined thickness. In addition, a relatively small amount of a photocurable resin is applied to the entire surface by a recoater every time one cured resin layer is formed. Then, laser beam scanning is performed on the surface along a predetermined pattern, and the coat layer portion irradiated with light is cured. The cured portion is laminated and integrated with the lower cured resin layer. Thereafter, a desired three-dimensional model is formed by repeating the light irradiation and the coating of the photocurable resin liquid while switching the cross section handled in the light irradiation process to an adjacent cross section (see Patent Document 3 and Patent Document 4). The stereolithography method is a technique that can easily and quickly form a three-dimensional structure having an overhang portion based on CAD data.
Trends Anal. Chem. Manz, A.M. 1991, 10, 144-149 J. et al. Anal. Chem. Fan, Z. H. 1994, 66, 177-184 Anal. Chem. Martynova, L.M. 1997, 69, 4783-4789 JP 2004-69733 A JP 2004-9183 A JP 56-144478 A JP-A-62-35966

  When the cutting method or the techniques of Non-Patent Documents 1 to 3 described above are used, the formation of these methods is basically limited to a structure having no overhang portion. Producing a microbiochemical device or a microbiochemical device mold having a complicated three-dimensional structure having an overhang portion such as crossing (hereinafter collectively referred to as “microbiochemical device etc.”) It was difficult. In addition, if an intermediate process for forming a sacrificial layer is employed, a process for removing the sacrificial layer after the formation of the three-dimensional structure is required. For example, the manufacturing process becomes complicated and a long time is required for manufacturing. was there. Further, in the conventional stereolithography method, it is difficult to increase the resolution of the modeled object, and the typical resolution is several tens of μm, and it can be used for manufacturing a micro biochemical device that requires higher resolution. It was difficult

  By forming a more complicated three-dimensional structure, it can be expected that the physical burden on the patient is reduced and a rapid test result is provided, particularly in the medical field. In addition, if such a complicated three-dimensional microbiochemical device can be manufactured quickly and easily, cost reduction can be realized and reduction of medical costs for patients can be expected.

  The present invention has been made in view of the above-described background, and the object of the present invention is to provide a microbiochemistry capable of forming a complicated three-dimensional structure and capable of forming accurately, quickly and easily. It is to provide a method for manufacturing a device or the like.

  The method for producing a microbiochemical device or the like according to the present invention includes forming a cured resin layer by selectively irradiating light to a photocurable resin liquid by repeating collective exposure in units of projection regions. The layers are sequentially stacked to form a three-dimensional structure. The present invention is particularly effective when the structure of a microbiochemical device or the like is a complicated three-dimensional structure having an overhang portion.

Here, when the area of the projection region is 100 mm ² or less, a micro biochemical device or the like can be formed with higher accuracy by using the optical modeling method according to the present invention.
Similarly, when the thickness of one layer of the cured resin layer is 10 μm or less, a micro biochemical device or the like can be formed with higher accuracy by using the optical modeling method according to the present invention.

  The method for producing a microbiochemical device or the like according to the present invention is suitably used when the photocurable resin liquid is cured by light reflected by a digital mirror device.

  Moreover, the manufacturing method of the micro biochemical device etc. which concerns on this invention manufactures the micro biochemical device etc. which used ceramics which gave strength more as a material by mix | blending ceramic powder with the said photocurable resin liquid. can do. Moreover, the microbiochemical device etc. which have the characteristic of a filler can be manufactured by mix | blending a filler with the said photocurable resin liquid.

  According to the present invention, it is possible to provide a manufacturing method such as a micro biochemical device that can form a complicated three-dimensional shape and can be formed accurately, quickly and easily. Have.

  Hereinafter, an example of an embodiment to which the present invention is applied will be described. It goes without saying that other embodiments may also belong to the category of the present invention as long as they match the gist of the present invention.

[Embodiment 1 (Method for Producing Micro Biochemical Device)]
FIG. 1 is a diagram for explaining an example of a device configuration of a photo-curing modeling apparatus (hereinafter referred to as “optical modeling apparatus”) that manufactures a micro biochemical device according to the first embodiment. As shown in the figure, the optical modeling apparatus 100 includes a light source 1, a digital mirror device (hereinafter abbreviated as “DMD”) 2, a lens 3, a modeling table 4, a dispenser 5, a recoater 6, a control unit 7, and a storage unit 8. Etc.

  The light source 1 is mounted with a laser beam capable of oscillating. The photo-curable resin liquid can be cured by irradiating a photo-curable resin liquid described later with a laser beam generated from the light source 1. Therefore, it is necessary to mount a laser beam having a wavelength capable of curing the photocurable resin liquid 10. Specific examples of the light source 1 include a laser diode (LD) that generates 405 nm laser light and an ultraviolet (UV) lamp.

  The digital mirror device (DMD) 2 is a device developed by Texas Instruments, and hundreds of thousands to millions of micromirrors that move independently on a CMOS semiconductor, for example, 480,000 to 1.31 million are spread. It is what has been. Individual micromirrors can be tilted by about ± 10 degrees, for example, about ± 12 degrees about the diagonal line by an electrostatic field effect. By controlling the angle of each micromirror, it is possible to irradiate a desired position of a photocurable resin liquid formed on a modeling table described later.

  The micromirror provided in the DMD 2 has a square shape in which the length of one side of the pitch of each micromirror is about 10 μm, for example, 13.68 μm. The interval between adjacent micromirrors is, for example, 1 μm. The entire DMD 2 used in the first embodiment has a square shape of 40.8 × 31.8 mm (of which the mirror portion has a square shape of 14.0 × 10.5 mm). It is composed of 786,432 micromirrors having a length of 13.68 μm. The laser beam emitted from the light source 1 is reflected by a micromirror that is a constituent member of the DMD 2. In the DMD 2, the laser beam reflected toward the condensing lens 3 is irradiated to the photocurable resin liquid 10 on the modeling table 4.

  The lens 3 plays a role of guiding the laser beam reflected by the DMD 2 onto the photocurable resin liquid 10 to form a projection region. The lens 3 may be a condenser lens using a convex lens or a concave lens. When a concave lens is used, a projection area larger than the actual size of DMD 2 can be obtained. The lens 3 according to the first embodiment is a condensing lens composed of a convex lens, and reduces incident light about 15 times and condenses it on a coat layer 9 formed of the photocurable resin liquid 10.

  The modeling table 4 is composed of a flat mounting table. The coating layer 9 of the photocurable resin liquid 10 is formed on the modeling table 4, and the photocurable resin liquid 10 is cured by being irradiated with a laser beam through the lens 3. The modeling table 4 is configured so that horizontal movement and vertical movement can be freely moved by a driving mechanism (not shown), that is, a moving mechanism. With this drive mechanism, stereolithography can be performed over a desired range. The dispenser 5 is configured to store the photocurable resin liquid 10 and supply a predetermined amount of the photocurable resin liquid 10 to a predetermined position. The recoater 6 includes, for example, a blade mechanism and a moving mechanism, and is configured so that the photocurable resin liquid 10 can be uniformly applied.

  The control unit 7 controls the light source 1, DMD 2, modeling table 4, dispenser 5, and recoater 6 according to control data including exposure data. The control unit 7 can typically be configured by installing a predetermined program in a computer. A typical computer configuration includes a central processing unit (CPU) and memory. The CPU and the memory are connected to an external storage device such as a hard disk device as an auxiliary storage device via a bus. This external storage device functions as the storage unit 8 of the control unit 7. A storage medium drive device such as a flexible disk device, a hard disk device, or a CD-ROM drive that functions as the storage unit 8 is connected to a bus via various controllers. A portable storage medium such as a flexible disk is inserted into a storage medium driving apparatus such as a flexible disk apparatus. The storage medium can store a predetermined computer program for executing the present embodiment by giving instructions to the CPU in cooperation with the operating system.

  The storage unit 8 stores control data including exposure data of cross-sectional groups obtained by slicing a three-dimensional model to be modeled into a plurality of layers. Based on the exposure data stored in the storage unit 8, the control unit 7 mainly controls the angle control of each micromirror in the DMD 2 and the movement of the modeling table 4 (that is, the position of the laser beam irradiation range with respect to the three-dimensional model). Instructing the modeling of the three-dimensional model.

  The computer program is executed by being loaded into a memory. The computer program can be compressed or divided into a plurality of pieces and stored in a storage medium. In addition, user interface hardware can be provided. Examples of the user interface hardware include a pointing device for inputting such as a mouse, a keyboard, or a display for presenting visual data to the user.

As the photocurable resin liquid 10, one that is cured by a laser beam is selected. As the laser beam, for example, visible light or ultraviolet light can be suitably used. For example, an acrylic resin corresponding to 405 nm having a curing depth of 15 μm or more (500 mJ / cm ² ) and a viscosity of 1500 to 2500 Pa · s (25 ° C.) can be used.

  Next, the optical modeling operation of the optical modeling apparatus 100 according to the first embodiment will be described. First, the uncured photocurable resin liquid 10 is accommodated in the dispenser 5. The modeling table 4 is in the initial position. The dispenser 5 supplies the stored photocurable resin liquid 10 on the modeling table 4 by a predetermined amount. The recoater 6 sweeps the photocurable resin liquid 10 so as to stretch and forms a coat layer 9 for one layer to be cured.

The laser beam emitted from the light source 1 enters the DMD 2. The DMD 2 is controlled by the control unit 7 according to the exposure data stored in the storage unit 8, and the control unit 7 irradiates the laser beam to a desired position of the coat layer 9 formed by the photocurable resin liquid 10. Thus, the angle of the micromirror is adjusted. Thereby, the laser beam reflected from the micromirror is irradiated onto the coating layer 9 of the photocurable resin liquid 10 through the condenser lens 3, and the laser beam reflected from the other micromirrors is applied to the photocurable resin liquid 10. The coating layer 9 can be prevented from being irradiated. Irradiation of the laser beam to the photocurable resin liquid 10 is performed for 0.4 seconds, for example. At this time, the projection region of the photocurable resin liquid 10 onto the coat layer 9 is, for example, about 1.3 × 1.8 mm, and can be reduced to about 0.6 × 0.9 mm. The area of the projection region is usually desirably 100 mm ² or less.

  By using a concave lens for the lens 3, the projection area can be expanded to about 6 × 9 cm. If the projection area is enlarged beyond this size, the energy density of the laser beam applied to the projection area is lowered, so that the photocurable resin liquid 10 may be insufficiently cured. In the case of forming a three-dimensional model larger than the size of the laser beam projection area, for example, the modeling table 4 is moved horizontally by a moving mechanism to move the irradiation position of the laser beam and irradiate the entire modeling area. Laser beam irradiation is performed one shot at each projection area. Control of laser beam irradiation to each projection area will be described in detail later.

  In this way, by moving the projection area and performing irradiation of the laser beam with each projection area as a unit, that is, exposure, the coat layer 9 of the photocurable resin liquid 10 is cured, and the first layer A cured resin layer is formed. The lamination pitch for one layer, that is, the thickness of one cured resin layer is, for example, 1 to 50 μm, preferably 2 to 10 μm, and more preferably 5 to 10 μm. In the conventional stereolithography method, it is difficult to increase the resolution of a modeled object, and the typical resolution is several tens of μm, and it is difficult to use the microbiochemical device that requires higher resolution. . According to the optical modeling method according to the first embodiment, for example, the resolution can be increased to about 5 μm in the stacking direction, and the planar resolution parallel to the modeling table can be increased to about 2 μm.

  Subsequently, a second layer of a three-dimensional model having a desired shape is simultaneously formed in the same process. Specifically, the photocurable resin liquid 10 supplied from the dispenser 5 is applied to the outside of the cured resin layer formed as the first layer so as to be stretched beyond the three-dimensional model by the recoater 6. Then, a second cured resin layer is formed on the first cured resin layer by irradiating with a laser beam. Thereafter, the third and subsequent cured resin layers are sequentially deposited in the same manner. And after completion | finish of deposition of the last layer, the modeling thing formed on the modeling table 4 is taken out. The molded object removes the uncured photocurable resin liquid adhering to the surface by washing or other methods. Thereafter, the molded article may be further irradiated with an ultraviolet lamp or the like as necessary to further cure.

  Next, an example of a micro biochemical device that can be manufactured by the manufacturing method according to the present embodiment will be described. As long as the three-dimensional structure of the microbiochemical device is within the resolution range of the above-described stereolithography apparatus, an arbitrary structure can be manufactured. For example, various medical or biosensors typified by a small pressure sensor mounted on a small blood pressure measuring device, various DNA chips used for DNA electrophoresis chip or gene structure analysis, various biochips, or biodevices, Drug delivery system (sustained release) pharmaceutical microcapsules and the like can be produced. In the case of electrical devices such as electrodes and sensors, a thin metal layer is provided on the surface of the transparent substrate by vapor deposition, etc. to provide conductivity, and not only the groove shape but also a more complicated three-dimensional structure is formed. Thus, for example, by forming a thin piece partly floating from the surface of the substrate, a sensor for detecting strain against mechanical vibration can be obtained. The manufacturing method of a micro biochemical device or the like according to this embodiment is particularly suitable for manufacturing a micro biochemical device or the like having a complicated three-dimensional structure having an overhang portion.

  Here, “having an overhang portion” means that the overhang portion is present at least in part when viewed from the vertical direction even when the three-dimensional structure is rotated and installed in any direction. To do. In addition, the overhang portion is a portion having a structure in which the horizontal width of the upper portion is larger than the horizontal width of a certain portion. Typically, the overhang portion is in contact with the column portion and the column portion than the column portion. However, it is not limited to a linear structure, but includes a shape having a curved surface that rises in the vertical direction and protrudes in the horizontal direction, and a so-called reverse tapered shape. It is a concept. For example, the cylindrical shape is an overhang when viewed from the vertical direction with the cylindrical side in contact with the horizontal plane, but there is no overhang when viewed from the vertical direction with the bottom in contact with the horizontal plane. It is not a three-dimensional structure having an overhang portion. On the other hand, the spherical shape is a three-dimensional structure having an overhang portion. The manufacturing method of the present invention is particularly suitable for modeling a three-dimensional structure having an overhang portion. If the structure has no overhang portion when viewed from a certain direction, the overhang portion is essentially difficult to manufacture. This is because even if other manufacturing methods are used, it may be possible to form the three-dimensional structure.

  The photocurable resin liquid used in Embodiment 1 is not particularly limited, but a photocurable resin liquid composition comprising a radical polymerizable compound and / or a cationic polymerizable compound is usually preferable. Used for. In addition, a photopolymerization initiator corresponding to radical polymerization or cationic polymerization is usually added to these photocurable resin liquid compositions.

  The three-dimensional object made of the cured product obtained by the above-described stereolithography method is taken out from the stereolithography apparatus, and after removing the unreacted composition (uncured) remaining on the surface and inside thereof, it is washed as necessary. To do. Here, as the cleaning agent, alcohol-based organic solvents typified by alcohols such as isopropyl alcohol and ethyl alcohol; ketone-based organic solvents typified by acetone, ethyl acetate, methyl ethyl ketone, etc .; aliphatics typified by terpenes Based organic solvents.

  Through the above process, a microbiochemical device made of a cured product of a photocurable resin can be obtained. According to the said manufacturing method, the micro biochemical device which can achieve weight reduction can be manufactured. Moreover, since it consists of resin material, it is suitable for using for a disposable use. It is possible to cope with the increase in the number of discarded items due to the disposal by incineration. Therefore, it can be expected that various processes such as cleaning are unnecessary and various inspections are performed quickly. It can also be expected to reduce the economic burden of patients in the medical field.

  When it is desired to manufacture the micro biochemical device with ceramic, ceramic powder can be blended with the photocurable resin liquid composition. The number average particle size of the ceramic powder is usually 0.01 to 0.5 μm as measured by electron microscopy. Preferably, it is 0.02-0.3 micrometer, More preferably, it is 0.05-0.2 micrometer. The particle size of the ceramic powder is measured by electron microscopy, but scanning electron microscopy is particularly preferred. The shape of the ceramic powder is not particularly limited as long as it has a granularity that can define the particle size. For example, it is not limited to a spherical shape, and may be a pulverized body or the like. The particle diameter in the case of a shape other than a spherical shape is defined by the maximum diameter in the electron microscope image. The mixing amount of the ceramic powder in the photocurable resin liquid is not particularly limited, but it is necessary that the coating layer 9 formed from the photocurable resin liquid 10 is sufficiently hardened by the laser beam.

  The material constituting the ceramic powder is not particularly limited as long as it does not substantially absorb the light having the irradiation wavelength. For example, oxides such as alumina, zirconia, titania, zinc oxide, ferrite, barium titanate, apatite, silica, carbides such as zirconium carbide and silicon carbide, nitrides such as aluminum nitride, silicon nitride, and sialon (SiAlON), or Various ceramics such as a mixture thereof can be used. Usually, as the component (A), alumina, zirconia, silica, aluminum nitride, silicon nitride, or a mixture thereof is preferably used.

  When a three-dimensional product obtained by photocuring a photocurable resin liquid containing a ceramic powder is fired, a microbiochemical device composed of a ceramic fired body is obtained. Compared to the cured product of the photocurable resin liquid, a microbiochemical device having high mechanical strength, durability, and heat resistance of the microbiochemical device can be obtained. In addition, the baking method used here is not specifically limited, A well-known method can be used.

  When it is desired to increase the heat resistance of the microbiochemical device according to the present embodiment, a filler capable of improving heat resistance (hereinafter simply referred to as “heat-resistant filler”) is blended in the photocurable resin liquid composition. be able to. The number average particle size of the heat-resistant filler is usually 10 to 1000 nm as measured by electron microscopy. The particle size of the heat-resistant filler is measured by electron microscopy, but scanning electron microscopy is particularly preferable. The shape of the filler is not particularly limited as long as it has a granularity that can define the particle size. For example, it is not limited to a spherical shape, and may be a pulverized body or the like. The particle diameter in the case of a shape other than a spherical shape is defined by the maximum diameter in the electron microscope image.

  Examples of the heat-resistant filler that can be suitably used include silica particles and elastomer particles. The material constituting the filler is not particularly limited as long as it does not substantially absorb light having an irradiation wavelength. Although the addition amount of a filler is not specifically limited, It is necessary to make the photocurable resin into an amount that can be sufficiently cured by a laser beam. In addition, it replaces with a heat resistant filler, and a conductive filler, a magnetic filler, etc. may be mixed with a photocurable resin liquid, and the characteristic of the hardened | cured material obtained may be changed. By adding various fillers, a microbiochemical device having desired physical properties can be obtained.

  According to the first embodiment, a desired microbiochemical device can be accurately and easily shaped by repeating light irradiation and coating with a photocurable resin liquid while switching the cross section handled in the light irradiation process to an adjacent cross section. can do. It is also possible to manufacture a microbiochemical device having a complicated three-dimensional structure. In addition, there is an advantage that microbiochemical devices having different shapes can be easily and quickly manufactured only by rewriting exposure data stored in the storage unit 8. Therefore, the present invention is particularly suitable for providing a small amount of various types of micro biochemical devices and order-made micro biochemical devices. In addition, a structure having an overhang structure can be formed easily and quickly. Furthermore, by mixing ceramic powder and various fillers into the photocurable resin liquid, it is possible to increase mechanical strength, heat resistance, etc. Can be manufactured.

[Embodiment 2 (Manufacturing Method of Micro Biochemical Device Mold)]
Next, a method for manufacturing a micro biochemical device mold will be described. The basic stereolithography method is the same as that of the first embodiment except for the following points. That is, in Embodiment 1 described above, the micro biochemical device itself is modeled and manufactured by the optical modeling method. However, in Embodiment 2, a mold used for manufacturing the micro biochemical device is modeled by the optical modeling method. Differ in manufacturing. Here, the mold includes a female mold and a master mold. Both can be modeled and manufactured by the optical modeling method. Here, the female mold means a mold for copying a shape from the mold to manufacture a micro biochemical device, and the master mold is a prototype of the micro biochemical device to be finally manufactured, It refers to a mold for copying the shape of the master mold to produce the aforementioned female mold.

  As the female mold, for example, the first female substrate and the second female substrate can be joined to each other so that the internal space has the shape of the target object. . In this case, the first female substrate and the second female substrate are provided with positioning means in addition to the joining means. As specific examples of the joining means and the positioning means, a convex portion is provided on the frame body portion or the like of the first female substrate, and a concave portion to be fitted to the convex portion is provided on the second female substrate so that these can be fitted together. A method can be mentioned. Further, an engaging portion such as a pin and an engaged portion that engages with the pin may be provided on the first female substrate and the second female substrate. In addition, an injection port for injecting a liquid for forming a microbiochemical device into an internal space formed when the first female substrate and the second female substrate are joined is provided as the first female substrate or / And formed on the second female substrate at the same time as the optical modeling.

  Instead of the method of forming the first female substrate and the second female substrate as the female mold, an integral female mold having an internal space structure of a desired modeled object may be manufactured by a direct optical modeling method. Good. Also in this case, an injection port for injecting a liquid for forming a microbiochemical device into the internal space is simultaneously formed by an optical modeling method. In addition, at the time of stereolithography, instead of the method of forming the injection port, a through-hole for injecting a liquid for forming a microbiochemical device may be formed after modeling the female mold.

  When manufacturing a micro biochemical device from a female mold, for example, a silane compound having a hydrolyzable group is injected into the female mold, and a hydrolysis / condensation reaction is caused by heating or the like. To obtain a three-dimensional structure made of polysiloxane. By separating the three-dimensional structure from the female mold, a micro biochemical device can be obtained. When the first female substrate and the second female substrate are joined, they may be separated to obtain a microbiochemical device. When an integrally formed female mold having a desired spatial structure of the modeled object is used, the female mold can be opened with a scalpel or the like, and the microbiochemical device can be taken out.

  The liquid for forming the micro biochemical device is a material that satisfies various properties such as mechanical strength and durability required for the micro biochemical device, and can be cured by an appropriate method after being poured into a mold and filled. There is no limitation to the above example. For example, molten metal may be used, and after filling a thermosetting uncured resin such as an acrylic resin, heat is applied to cure inside the mold, or a thermoplastic resin is melted and filled. Later, the inside of the mold may be cooled to be cured. Moreover, ceramic powder and a filler can also be mix | blended with these resin.

  If the structure of the female mold is complicated, the female mold may not be peeled unless the female mold is destroyed. In such a case, for example, the cured resin constituting the female mold is burned away by heat treatment at 300 ° C. for about 6 hours, or is immersed in an organic solvent such as ethanol and subjected to ultrasonic treatment for about 1 hour. The female mold can be destroyed by a method such as swelling of the cured resin constituting the mold. Even if the female mold made of a photocurable resin liquid is not broken due to peeling, the mechanical strength is inferior to that of a mold or the like, so the number of times that a micro biochemical device can be manufactured is limited. is there. However, unlike a mold, a female mold can be obtained easily and quickly, which is effective when trial manufacture of microbiochemical devices having various shapes.

  When it is desired to use the female die of the micro biochemical device as a ceramic material, the ceramic powder can be blended with the photocurable resin liquid composition by the same method as in the first embodiment. Thereby, the female type | mold of a micro biochemical device with high mechanical strength compared with the hardened | cured material of the said photocurable resin liquid can be obtained. Thereby, durability of a female type | mold can be improved. Moreover, the female type | mold of a filler containing micro biochemical device can also be obtained by mix | blending a filler with a photocurable resin liquid composition by the method similar to the said Embodiment 1. FIG.

  The female mold of the microbiochemical device may be manufactured by a vacuum casting method. The vacuum casting method is a method for producing a replica by using FRP or silicon rubber as a replica mold instead of a mold and pouring resin into the mold in a vacuum. For example, the following manufacturing method can be adopted as the vacuum casting method. The master mold of the micro biochemical device is manufactured by the photocuring method. At this time, an injection port for injecting molding resin or the like from the female mold is also formed at the same time. Next, this is set in a mold. The amount of silicon resin is calculated and weighed according to the size of the mold and the size of the master mold. Thereafter, a curing agent is injected into the silicon resin and stirred to perform preliminary desorption, and this is poured into a mold and vacuum delamination. Thereby, silicon resin can be filled to every corner. In order to accelerate the curing of the silicon resin, heat at a constant temperature is applied for a predetermined time.

  After the silicone resin is completely cured, the mold is removed, a knife is inserted into the silicone resin, the female mold is opened, and the master mold is removed. Thereafter, the amount of molding resin is calculated and measured, and a curable resin such as a two-component curable polyurethane resin is injected from a female injection port made of silicon in a vacuum state. Due to the difference between the vacuum state and the atmospheric pressure, the resin can be spread to every corner of the female internal space structure. Thereafter, it is cured by heating at a constant temperature. After curing, the microbiochemical device can be obtained by cooling to room temperature and removing the mold. Since the silicon resin is used as the female mold of the micro biochemical device, it is excellent in flexibility. For this reason, damage to the master mold can be reduced. When silicon resin is used as the female mold, generally about 20 to 50 microbiochemical devices can be obtained. Therefore, it is particularly suitable when a small amount is desired.

  Moreover, you may use the lost wax method as a female type | mold of a micro biochemical device. In the lost wax method, first, a master mold of a micro biochemical device is manufactured by a photocuring method. At this time, an injection port for injecting a resin solution, molten metal, or the like for forming a micro biochemical device from the female mold into the internal space is also formed at the same time. Next, a step of applying and hardening a gypsum or ceramic slurry to the master mold is repeated, and this is fired to obtain a female mold of the microbiochemical device. According to the female mold of the micro biochemical device manufactured by the lost wax method, the metal micro biochemical device can be obtained because it has heat resistance sufficient to pour molten metal. Thereby, the metal micro biochemical device with high mechanical strength can be obtained.

  In the case of manufacturing a micro biochemical device from a master mold, for example, after electroforming Ni on the surface of the master mold, the master mold is peeled off to produce a female mold in which the shape of the master mold is copied. Thereby, a female die can be obtained. By using a metallic female mold, the durability of the female mold can be greatly improved. In this female mold, a silane compound having a hydrolyzable group is injected and reacted in the same manner as described above, and a microbiochemical device made of polysiloxane can be obtained by peeling from the female mold. In addition, a micro biochemical device made of metal can be obtained by pouring molten metal into a female mold.

  According to the second embodiment, a desired microbiochemical device mold can be accurately and easily obtained by repeating the light irradiation and the coating of the photocurable resin liquid while switching the cross section handled in the light irradiation process to the adjacent cross section. Can be shaped. Moreover, the micro biochemical device which consists of various materials, such as a resin material, a metal material, a ceramic material, can be manufactured using the type | mold for micro biochemical devices manufactured by the manufacturing method which concerns on this Embodiment 2. FIG. For this reason, the micro biochemical device which consists of a material optimal for various uses can be obtained.

FIG. 3 is an explanatory diagram illustrating an example of a schematic configuration of the optical modeling apparatus according to the first embodiment.

Explanation of symbols

1 Light source 2 DMD
DESCRIPTION OF SYMBOLS 3 Condensing lens 4 Modeling table 5 Dispenser 6 Recoater 7 Control part 8 Memory | storage part 9 Coat layer 10 Photocurable resin liquid 100 Optical modeling apparatus

Claims (15)

  By repeating collective exposure with the projection area as a unit, selectively irradiating light to the photocurable resin liquid to form a cured resin layer, and sequentially laminating the cured resin layer to form a three-dimensional structure. A method for producing a microbiochemical device, which is characterized.   The method for manufacturing a microbiochemical device according to claim 1, wherein the three-dimensional structure of the microbiochemical device has an overhang portion.   The manufacturing method of the micro biochemical device of Claim 1 or 2 whose said photocurable resin liquid contains ceramic powder. The microbiochemical device manufacturing method according to claim 1, wherein an area of the projection region is 100 mm ² or less.   The method for manufacturing a microbiochemical device according to any one of claims 1 to 4, wherein a thickness of one layer of the cured resin layer is 10 µm or less.   The method of manufacturing a microbiochemical device according to any one of claims 1 to 5, wherein the photocurable resin liquid is cured by light reflected by a digital mirror device.   By repeating collective exposure with the projection area as a unit, selectively irradiating light to the photocurable resin liquid to form a cured resin layer, and sequentially laminating the cured resin layer to form a three-dimensional structure. A method for producing a mold for a microbiochemical device, which is characterized.   The manufacturing method of the type | mold for microbiochemical devices of Claim 7 with which the three-dimensional structure of the said microbiochemical device has an overhang part. The method of manufacturing a mold for a microbiochemical device according to claim 7 or 8, wherein the area of the projection region is 100 mm ² or less.   The thickness of one layer of the said cured resin layer is 10 micrometers or less, The manufacturing method of the type | mold for microbiochemical devices of any one of Claims 7-9 characterized by the above-mentioned.   The method for producing a microbiochemical device mold according to any one of claims 7 to 10, wherein the photocurable resin liquid is cured by light reflected by a digital mirror device.   The method for producing a microbiochemical device mold according to any one of claims 7 to 11, wherein the microbiochemical device mold is a female mold for producing a microbiochemical device.   The method for manufacturing a micro biochemical device mold according to any one of claims 7 to 11, wherein the micro biochemical device mold is a master mold for manufacturing a micro biochemical device female mold.   The method for producing a mold for a microbiochemical device according to claim 12 or 13, wherein the photocurable resin liquid contains a ceramic powder.   The micro biochemical device manufactured using the micro biochemical device type | mold manufactured by the manufacturing method of the micro biochemical device type | mold of any one of Claims 7-14.

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