JP2007044627A - Apparatus for manufacturing display unit and method for manufacturing display unit using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a display unit capable of forming an organic EL layer having a required film quality by accurately coating a required amount of an organic solution on a required region while preventing a nozzle from being clogged with the organic solution if the area of a pixel forming region becomes comparatively large, and a method for manufacturing the display unit using the same. <P>SOLUTION: The apparatus for manufacturing a display unit comprises a liquid droplet spraying mechanism spraying liquid droplets of the organic solution, a substrate movable mechanism on which a panel substrate to be coated with the organic solution is placed. A nozzle head 11 provided on the liquid droplet spraying mechanism has a plurality of nozzles NZL which are communicated with a single solution chamber 11c, and is so configured that the droplets of a predetermined amount of the organic solution are sprayed from a plurality of the nozzles NZL at the same time by supplying a predetermined amount of the organic solution from a pump part 12 at a predetermined cycle to coat a plurality of pixel forming regions set on the panel substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a display device manufacturing apparatus and a display device manufacturing method using the manufacturing apparatus, and in particular, to manufacture a display device including a display panel in which a plurality of display pixels made of organic electroluminescence elements are arranged. The present invention relates to a device and a manufacturing method of a display device for applying an organic material to a formation region of each display pixel arranged in the display panel using the manufacturing device.

  In recent years, organic electroluminescence elements (hereinafter referred to as “organic EL elements”) are being used as next-generation display devices following liquid crystal display devices (LCDs) that are widely used as monitors and displays for personal computers, video equipment, portable information equipment, and the like. Research and development of a display (display device) including a light-emitting element type display panel in which self-light-emitting elements such as light-emitting diodes (LEDs) and the like are two-dimensionally arranged have been actively conducted.

  In particular, a light-emitting element type display using an active matrix driving method has a faster display response speed, no viewing angle dependency, higher luminance and higher contrast, and higher display image quality than liquid crystal display devices. The liquid crystal display device does not require a backlight unlike the liquid crystal display device, and has a very advantageous feature that it can be further reduced in thickness and weight.

Here, an organic EL element will be briefly described as an example of a self-light-emitting element applied to a light-emitting element type display.
FIG. 11 is a schematic cross-sectional view showing a schematic configuration and a principle of operation of a polymer type organic EL element.
As shown in FIG. 11, the organic EL element is roughly formed on one surface side (upper side in the drawing) of a transparent insulating substrate 211 such as a glass substrate.
An anode (anode) electrode 212 made of a transparent electrode material such as thin oxide (ITO), an organic EL layer 213 made of an organic compound or the like (organic material), and a cathode (cathode) electrode 214 made of a metal material and having reflection characteristics. It has a configuration in which the layers are sequentially stacked.
The organic EL layer 213 includes, for example, a hole transport layer (hole injection layer) 213a made of an organic polymer hole transport material and an electron transport light emission made of an organic polymer electron transport light emitting material. The layer (light emitting layer) 213b is laminated.

  In the organic EL element having such an element structure, as shown in FIG. 11, a positive voltage is applied to the anode electrode 212 and a negative voltage is applied to the cathode electrode 214 by the DC voltage source 215, thereby being injected into the hole transport layer 213a. The light hν is emitted based on the energy generated when the holes and the electrons injected into the electron-transporting light-emitting layer 213b recombine in the organic EL layer 213.

  Then, the light hν is transmitted through the anode electrode 212 made of a transparent electrode material or reflected by the cathode electrode 214 having reflection characteristics, so that the other surface side of the insulating substrate 211 (the lower side in the drawing; the viewing side). To be released. At this time, the emission intensity of the light hν is controlled according to the amount of current flowing between the anode electrode 212 and the cathode electrode 214.

  By the way, in the organic EL element as described above, various methods have been devised as a manufacturing process for forming the hole transport layer 213a and the electron transporting light emitting layer 213b constituting the organic EL layer 213. The liquid material (hereinafter referred to as “organic solution” for convenience) in which the above-described organic polymer-based hole transport material or electron transporting light-emitting material is dispersed or dissolved in a solvent is ejected in the form of droplets. It is considered that a droplet discharge method (so-called ink jet method) in which droplets are deposited and applied to a light emitting region (that is, an organic EL element forming region) of a display pixel is effective.

  Here, when a display panel in which such organic EL elements (display pixels) are arranged has a mode corresponding to a color image, a set of color pixels (organic EL elements) constituting each display pixel. A predetermined organic material corresponding to the above, for example, an electron transporting light emitting material having each emission color of red (R), green (G), and blue (B) is selected, and an electron transporting light emitting layer for each organic EL element A method of selectively applying (separating) as 213b is applied. A display panel manufacturing method (organic EL element manufacturing method) to which such an ink jet method is applied is described in detail in, for example, Patent Document 1 and the like.

Japanese Patent Laid-Open No. 10-12377 (page 3, FIG. 1)

However, the above-described display device manufacturing method (organic EL element manufacturing method) has the following problems.
That is, in a manufacturing apparatus that is applied to the inkjet manufacturing method shown in the prior art, a technique that is applied to an inkjet printer that is widely used as a peripheral device of a personal computer is used. In known ink jet printers, in order to express characters and images printed on paper with high definition, extremely small droplets are ejected multiple times (for example, several tens of times) at a high operating frequency. The ink jet head (nozzle part) and the discharge pump are appropriately configured and controlled so that the liquid drops are deposited.

  Therefore, when such an inkjet technique is applied to a display device manufacturing apparatus (when applied to an organic material coating process for forming an organic EL layer), a minute droplet is formed on the insulating substrate constituting the display panel. In the case of using a solution containing an organic material (hole transport material, electron transporting light-emitting material) peculiar to the organic EL element as described above, it has a feature that it can be applied with high positional accuracy. In other words, it is very difficult to stably discharge liquid droplets with high accuracy.

  In particular, an organic solution in which an organic material is dissolved in an organic solvent has a characteristic that it easily dries due to the boiling point of the organic solvent. There has been a problem that pixel defects occur due to variations in ejection and flight direction. In addition, there is a problem that the burden of maintenance for eliminating nozzle clogging increases.

  Furthermore, when manufacturing a display panel for a large-sized television, the size (pixel size) of each display pixel (one display pixel is constituted by an organic EL element having a set of RGB emission colors) is relatively large. Therefore, for example, in a discharge operation with a small droplet amount of about several pl to several tens of pl, which is generally applied in an ink jet system, about several tens of droplets are deposited and applied in one pixel formation region. It is necessary to perform processing. In this case, since the timing of drying the droplets in the pixel formation region is not uniform, the film thickness of the organic EL layer (hole transport layer, electron transporting light emitting layer) varies, and as a result, each display pixel There is also a problem in that the light emission characteristics vary from one device to another and the display quality is affected.

  In addition, in order to enable the discharge operation of a minute droplet amount of about several pl to several tens of pl as described above, the structure of the inkjet head is as fine as several tens of μm corresponding to the particle size of the droplet. There is a problem that it is necessary to manufacture a nozzle with a hole diameter processed, and the manufacturing apparatus is expensive. In addition, when a nozzle having such a fine hole diameter is applied, there is a problem that the above-described clogging is more likely to occur.

  Therefore, in view of the above-described problems, the present invention provides a nozzle (discharge unit) that uses an organic solution even when the area of a pixel formation region to which a solution containing an organic material (organic solution) is applied is relatively large. ) Is applied to the desired area with high precision, and an organic EL layer with the desired film quality is formed to produce a display panel with uniform light emission characteristics. It is an object of the present invention to provide a display device manufacturing apparatus that can be used, and a display device manufacturing method to which the manufacturing apparatus is applied.

The invention described in claim 1
In a display device manufacturing apparatus including a display panel in which a plurality of display pixels are arranged,
A plurality of nozzles for discharging a material solution to the display pixel have a nozzle head provided in communication with a single solution storage chamber.

It is preferable that a check valve is provided in the flow path of the material solution, and a pump unit that supplies the material solution to the nozzle head is provided.
A pump control unit that supplies the material solution to the nozzle head via the pump unit, and simultaneously discharges a predetermined amount of the material solution in droplets from the plurality of nozzles of the solution storage chamber; Is preferred.

It is preferable that an operation frequency of the discharge operation in the pump control unit is set to 1 Hz to 20 Hz.
It is preferable that the pump unit includes a pump having a discharge capacity of 1 nl to 1 ml for supplying the material solution for one discharge operation.

The nozzle head includes a housing having an open end on one side and having a space serving as the solution storage chamber, and a plate provided with the plurality of nozzles and closing the open end of the housing. It is preferable to have a configuration.
The plate may be formed of a thin plate formed by using an electrolytic plating method, or may be formed of a resin film.

Each of the plurality of nozzles has a hole diameter of the nozzle set so that one to several drops of the droplet-shaped material solution has a droplet amount that uniformly applies to the entire pixel formation region. Preferably it is.
It is preferable that the nozzle diameter of each of the plurality of nozzles is set so that the particle size of the droplet-like material solution is smaller than the dimension in the short direction of the pixel formation region. .

The light emitting functional layer formed by the material solution is a charge transport layer such as a hole injection layer or an electron transport layer constituting an electroluminescence element, or a light emitting layer, and the material solution contains a predetermined organic material, It may be an aqueous solution or an organic solution dissolved in an organic solvent.
The material solution is preferably a polyethylenedioxythiophene / polystyrenesulfonic acid aqueous solution.

The material solution is a fluorene polymer solution or a phenylene vinylene polymer solution.
The material solution may be a solution in which the material is dissolved or a suspension in which the material is dispersed.

In a method for manufacturing a display device including a display panel in which a plurality of display pixels according to the present invention are arranged,
The method includes a step of discharging a material solution to a formation region of the display pixel simultaneously from a plurality of nozzles communicating with a single solution storage chamber.
In such a manufacturing method, the supply amount of the material solution related to one discharge operation is preferably 1 nl to 1 ml, and the operation frequency of the discharge operation is preferably set to 1 Hz to 20 Hz.

In the step of discharging the material solution to the plurality of pixel formation regions, each of the pixel formation regions is uniformly applied by one to several droplets of the material solution discharged from the plurality of nozzles. It is preferred that
In the step of simultaneously discharging the material solution to the formation regions of the plurality of pixels, the particle diameter of the droplets of the material solution discharged from the plurality of nozzles is smaller than the size in the short direction of the pixel formation region. It is preferable.

The light emitting functional layer formed by the material solution is a charge transport layer such as a hole injection layer or an electron transport layer constituting an electroluminescence element, or a light emitting layer, and the material solution contains a predetermined organic material, It may be an aqueous solution or an organic solution dissolved in an organic solvent.
In the method for manufacturing the display device, a first material solution is supplied to a single solution storage chamber provided in the nozzle head, and a predetermined amount of the first material solution is simultaneously discharged in the form of droplets. Forming a hole injection layer in each of the plurality of pixel formation regions; supplying a second material solution to a single solution storage chamber provided in the nozzle head; And forming the light emitting layer on the hole injection layer at the same time.

  Each of the display pixels arranged in the display panel is configured as a set of a plurality of different color pixels, and the step of simultaneously forming the light emitting functional layer of the material solution in the plurality of pixel formation regions includes the display The second material solution corresponding to the color is simultaneously applied to a specific color pixel among the plurality of color pixels of the pixel.

  In the present invention, it is configured to be applied to a plurality of display pixel formation regions (pixel formation regions) arranged in the display panel and to simultaneously form a light emitting functional layer in the plurality of pixel formation regions. Compared to the inkjet manufacturing apparatus (manufacturing method) shown in the prior art, each pixel is formed by increasing the appropriate amount of liquid for one discharge operation and by performing the discharge operation a small number of times (one to several times). The material solution can be applied so as to spread sufficiently over the entire area. In particular, by supplying 1 nl to 1 ml of a material solution (organic solution) to a nozzle head having a single solution storage chamber (solution chamber) using a pump having a relatively low operating frequency of 1 Hz to 20 Hz, When 1 nl to 10 nl of the material solution is simultaneously ejected in droplets from a plurality of nozzles formed to communicate with the solution storage chamber, or the operation frequency of the ejection operation in the nozzle head is set to 1 Hz to 20 Hz. It is also possible to form a film uniformly while suppressing clogging.

DESCRIPTION OF EMBODIMENTS Hereinafter, a display device manufacturing apparatus according to the present invention and a display device manufacturing method to which the manufacturing apparatus is applied will be described in detail with reference to embodiments.
<Display device manufacturing device>
First, a display device manufacturing apparatus according to the present invention will be described.
FIG. 1 is a schematic configuration diagram showing an embodiment of a display device manufacturing apparatus according to the present invention.

  The display device manufacturing apparatus (display panel manufacturing apparatus) according to the present embodiment includes, for example, a polyethylenedioxythiophene PEDOT as a conductive polymer and a polystyrene sulfonic acid PSS (hereinafter referred to as “PEDOT”) as a hole transport material. / PSS ") in a strongly acidic aqueous ink dispersed in an aqueous solvent, or as an electron transporting luminescent material, for example, a fluorene polymer or a phenylene vinylene polymer is selected from tetralin, tetramethylbenzene, mesitylene, xylene. An organic solvent-based ink (material solution; corresponding to the above ink) dissolved in an aromatic organic solvent such as a droplet discharge mechanism that discharges the droplet as a droplet having a predetermined particle size and an organic solution are applied A panel substrate (insulating substrate) is placed on the nozzle head provided in the droplet discharge mechanism. (For details, which will be described later) is configured to have relative a substrate moving mechanism for relatively moving the two-dimensional coordinate direction.

(Droplet ejection mechanism)
As shown in FIG. 1, the droplet discharge mechanism includes at least a nozzle head 11 that discharges an organic solution, a pump unit 12 that supplies the organic solution to the nozzle head 11, and a nozzle head in the pump unit 12. 11 includes a pump control unit 13 that controls the supply state of the organic solution to 11, and a solution tank 14 that stores the organic solution.

(Nozzle head)
FIG. 2 is a schematic configuration diagram illustrating an example of a nozzle head applied to the manufacturing apparatus according to the present embodiment. Here, FIG. 2A is a plan view (top view) of the nozzle head, FIG. 2B is a front view of the nozzle head, and FIG. 2C is a bottom view of the nozzle head ( FIG. 2D is a side view of the nozzle head. FIG. 3 is a configuration diagram showing a specific example of a nozzle head applied to the manufacturing apparatus according to the present embodiment. 3A shows a cross section of the nozzle head (AA cross section in FIG. 2A), and FIG. 3B shows the nozzle plate (BB arrow in FIG. 3A). Figure).

  The nozzle head 11 is located above a substrate stage 21 to be described later and has a predetermined direction with respect to the movement direction of the substrate stage 21 (X-Y2 axis direction; indicated by arrows Xm and Ym in FIG. 1A). It is fixed in place. The nozzle head 11 has a hollow rectangular parallelepiped shape, for example, as shown in FIGS. 2 and 3, and the lower surface (nozzle surface; FIG. 2C) of the rectangular parallelepiped facing the substrate stage 21. A plurality of nozzles (discharge ports) NZL are linearly arranged in the longitudinal direction, and an organic EL layer material supplied from a pump unit 12 described later is provided on the upper surface (FIG. 2A) facing the nozzle surface. A solution injection port INJ into which an organic solution (material solution) dissolved or dispersed in an aqueous solvent such as water or a lipophilic organic solvent is injected is provided.

  Specifically, as shown in FIG. 3, such a nozzle head 11 is roughly configured to include a head unit housing 11 a and a nozzle plate 11 b, and the head unit housing 11 a and the nozzle plate 11 b. Are tightly coupled to each other to form a solution chamber (solution storage chamber; the above-described hollow portion) 11c that temporarily stores an organic solution injected by a pump unit 12 described later. Here, the tight coupling between the head housing 11a and the nozzle plate 11b may be a method in which both are bonded, or an O-ring (resin ring) is provided on the contact surface between the head housing 11a and the nozzle plate 11b. The nozzle plate 11b may be embedded and pressed against the O-ring so as to be in close contact with the O-ring.

  Specifically, as shown in FIG. 3, the head housing 11a has a rectangular parallelepiped shape in which a space serving as a solution chamber 11c is formed so as to have an open end on a surface tightly coupled to the nozzle plate 11b. ing. The inside of the solution chamber 11c formed by tightly coupling with the nozzle plate 11b is composed of a single space. For example, red (R) and green (G) that are emission colors of display pixels arranged in the display panel. ) And blue (B), only one of the organic solutions (electron transporting luminescent materials) is injected from the pump unit 12 through the solution injection port INJ and stored.

  A solution inlet INJ provided in the head housing 11a is connected to a discharge port of a pump unit 12 described later using a tube, and a predetermined amount of organic solution is discharged from the solution tank 13 by driving the pump unit 12. Is pushed out toward the nozzle head 11, and a predetermined amount of organic solution is simultaneously discharged from the plurality of nozzles NZL formed on the nozzle plate 11b. As will be described later, the discharged organic solution has a desired pattern on the panel substrate PSB as the substrate stage 21 moves in the XY two-axis direction (two-dimensional coordinate direction) with respect to the nozzle head 11. Applied.

FIG. 4 is a process cross-sectional view illustrating an example of a nozzle plate manufacturing method applied to the manufacturing apparatus according to the present embodiment.
The nozzle plate 11b forms a single solution chamber 11c in which an organic solution is stored by closely contacting, coupling, and closing the open end of the space provided in the head housing 11a. A plurality of nozzles NZL having a predetermined shape and size are formed on the nozzle plate 11b with a predetermined arrangement pattern.

Here, the nozzle plate 11b can be satisfactorily formed by applying, for example, a nickel (Ni) plating method.
Specifically, as shown in FIG. 4A, after a resist film is applied to a predetermined thickness on a conductive base plate (for example, a plate made of stainless steel) BPL to form a resist film RST. Using a photo-etching method, as shown in FIG. 4B, a plurality of resist materials RST corresponding to a desired nozzle shape, size, and arrangement pattern are left.

  Next, as shown in FIG. 4C, an electrolytic plating method is used to cover the base plate BPL and form a nickel plating layer NIP having a thickness that exposes at least the upper surface of the resist material RST, and then etching. 4D, only the resist material RST exposed from the nickel plating layer NIP is dissolved and removed. Thereby, a plurality of apertures HL having a desired shape and arrangement pattern are formed at the positions where the resist material RST is left. Thereafter, as shown in FIG. 4E, the nickel plating layer NIP is peeled from the base plate BPL, thereby forming a plurality of nozzles NZL having a desired shape and arrangement pattern as shown in FIG. 3B. The nozzle plate 11b thus obtained is obtained.

  In the nozzle plate 11b shown in the present embodiment (FIGS. 2 and 3), a plurality of nozzles NZL are linearly arranged in the longitudinal direction of the nozzle head 11 (head portion housing) having a rectangular parallelepiped shape. However, the present invention is not limited to this. Further, if the nozzle head 11 discharges only a monochromatic light emitting layer material from the nozzle NZL, that is, if the nozzle head 11 for red, the nozzle head 11 for green, and the nozzle head 11 for blue, respectively, the above nozzle plate 11b, the pitch P1 between the nozzles NZL is equal to the panel substrate PSB (display panel), and the red (R), green (G), and blue (B) color pixels (organic EL elements) are repeatedly arranged regularly and regularly. The nozzles NZL are arranged so as to correspond to an integral multiple of 3 (for example, 3 times) the pitch P2 (see FIG. 6) in the arrangement direction of the nozzles NZL.

  If the nozzle NZL of the nozzle head 11 discharges only a plurality of light emitting layer materials, that is, the red nozzle NZL, the green nozzle NZL, and the blue nozzle NZL are provided in accordance with the arrangement of each color pixel. In the case of one nozzle head 11, in the nozzle plate 11b, the pitch P1 between the nozzles NZL is red (R), green (G), and red (R), which are arranged regularly and regularly on the panel substrate PSB (display panel). The blue (B) color pixels (organic EL elements) are arranged so as to correspond to an integral multiple (for example, 1 time) of the pitch P2 (that is, the display pixel width) in the arrangement direction of the nozzles NZL.

In addition, in the nozzle plate 11b for the hole injection layer formed on all pixels regardless of the emission color of the light emitting layer, the pitch P1 between the nozzles NZL is equal and regular to the panel substrate PSB (display panel). An integer multiple (for example, 1 time) of the pitch (that is, the display pixel width) of the red (R), green (G), and blue (B) color pixels (organic EL elements) in the arrangement direction of the nozzles NZL. It is arranged corresponding to.
Note that the pixel width W in the arrangement direction of the nozzles NZL is longer than the diameter D2 of the droplets discharged from the nozzle NZL so that the discharged droplets do not leak to the adjacent pixels.

  Further, the hole diameter D1 of each nozzle NZL is, for example, about 0.1 mm to 0.2 mm so that the droplet amount related to one ejection operation can be set to about 1 nl to 10 nl as described later. Is set in the range. Thereby, compared with the nozzle (hole diameter: several tens of micrometers) of the inkjet head applied to the prior art mentioned above, it can form simply and with high precision. Further, as a result of various investigations by the inventors of the present application, the plate thickness of the nozzle plate 11b is approximately equal to the hole diameter of the nozzle NZL (aspect ratio 1: 1; for example, about 0.1 mm to 0.2 mm thickness). Thus, it has been found that the above-described manufacturing method can be applied to form the nozzle NZL, peel off the base plate BPL, and the like without any practical problem.

  In the present embodiment, the case where the electrolytic plating method is applied and the thin plate made of the nickel plating layer NIP is formed as the nozzle plate 11b has been described. However, the present invention is not limited to this, and the plastic plate A laser processing method may be applied to the film (resin film) to use a hole processed in the nozzle portion.

  Further, the nozzle head 11 is configured as shown in FIG. 1A so that the clearance (separation distance) between the nozzle 11b (nozzle surface) and the panel substrate PSB (or the substrate stage 21) can be adjusted. In addition, it may be attached to an arm member (not shown) capable of moving in the direction perpendicular to the moving direction (XY direction) of the substrate stage 21 (indicated by an arrow Zm). .

  Then, the substrate stage 21 (that is, the panel substrate PSB placed on the substrate stage 21) is placed in the X-Y2 axial direction (2) with respect to the nozzle head 11 composed of such a head housing 11a and the nozzle plate 11b. By moving in the dimension coordinate direction), the organic solution discharged from each nozzle NZL of the nozzle head 11 is deposited and applied to a desired position on the panel substrate PSB.

(Pump part)
FIG. 5 is a diagram illustrating a configuration example of a pump unit applied to the manufacturing apparatus according to the present embodiment and waveforms of drive signals supplied to the pump unit.
For example, as shown in FIG. 5A, the pump unit 12 applicable to the display device manufacturing apparatus according to the present embodiment is organic to the suction port INH through which the organic solution is sucked from the solution tank 14 and the nozzle head. Check valves (check valves) CVI and CVO provided in each of the discharge ports OUT for discharging the solution, a pump chamber 12a provided in the solution flow path FLW between the check valves CVI and CVO, and the pump chamber A laminated piezoelectric actuator 12d that controls the pressure in the pump chamber 12a by reciprocating a diaphragm 12b provided on the side of 12a and a pressing member 12c directly connected to the diaphragm 12b, and a spring that can expand and contract in the direction of the arrow 12e, and each of these components is well suited for a so-called piezo pump provided in a single pump housing 12z. It can be.

  Here, the check valve CVI on the inlet INH side is opened only in the direction in which the organic solution is sucked into the pump chamber 12a from the solution tank 14 due to the pressure difference, and the reverse direction (suction from the pump chamber 12a). The check valve CVO on the discharge port OUT side is open only in the direction in which the organic solution is discharged from the pump chamber 12a to the nozzle head 11 due to the pressure difference. Thus, it is configured to be closed in the reverse direction (from the discharge port OUT side toward the pump chamber 12a).

  Thus, in this embodiment, compared with the discharge pump applied to the ink jet system as shown in the above-described prior art, the pump unit 12 has a discharge amount (amount of organic solution supplied to the nozzle head). A pump having a structure with a large amount, high discharge accuracy, and low operating frequency during discharge is applied.

  Specifically, the conventional technology has a configuration in which an inkjet discharge pump is used. As described above, the discharge pump in this case has a discharge amount of several tens of pl (for example, 30 pl), and a very small amount of droplets are deposited many times at a relatively high operating frequency of several kHz.

  On the other hand, in the present embodiment, the discharge amount per time is about 1 nl to 1 ml, which is 30 times more than the conventional discharge pump, and the discharge amount can be set in a wide range and with high accuracy. A pump having a very low operating frequency of about 1 Hz to 20 Hz at the time of discharge is applied. A specific comparison between this embodiment and the prior art will be described later.

  In such a pump unit 12, the laminated piezoelectric actuator 12d expands and contracts based on the drive signal from the pump control unit 13, so that the transmission member 12f coupled to the laminated piezoelectric actuator 12d is disposed on the pump housing 12z side. The pressing member 12c, which vibrates around the fulcrum and is coupled to the vibration end of the transmission member 12f, vibrates so as to push and pull the diaphragm 12b.

  That is, by reducing the laminated piezoelectric actuator 12d by a drive signal, the diaphragm 12b directly connected to the pressing member 12c operates to expand (expand) the volume of the pump chamber 12a (that is, in the right direction in the drawing). The organic solution is taken into the pump chamber 12a from the solution tank 14 through the suction port INH (check valve CVI), while the diaphragm 12b reduces the volume of the pump chamber 12a by extending the laminated piezoelectric actuator 12d. The organic solution is discharged from the pump chamber 12a to the nozzle head 11 via the discharge port OUT (check valve CVO).

  Here, the drive signal supplied from the pump control unit 13 to the pump unit 12 includes, for example, each element of a frequency Fd, a voltage value Vd, and a voltage waveform. It can be controlled to the operating state. Specifically, the number of times the diaphragm 12b is reciprocated (vibrated) per unit time can be controlled by the frequency component of the drive signal, and the movement amount (signal width) of the diaphragm 12b can be controlled by the voltage value component of the drive signal. ) Can be taken in and the discharge amount (flow rate) of the organic solution can be controlled, and the discharge state of the organic solution from the nozzle head 11 can be controlled by the voltage waveform component of the drive signal.

  In particular, by setting the voltage waveform of the drive signal to the laminated piezoelectric actuator 12d to a sine wave as shown in FIG. 5B, the organic solution can be continuously discharged from the nozzle head 11, while FIG. As shown in (c), by setting a rectangular wave (pulse wave), the organic solution can be ejected (flyed droplets) as a desired amount of droplets. Here, in this embodiment, as will be described later, 1 to 5 drops (preferably 1 drop) of an organic solution is applied to each pixel formation region arranged two-dimensionally on the panel substrate PSB and applied. In the case of performing the process, a drive signal composed of a rectangular wave as shown in FIG. 5C is supplied to the pump unit 12. In this case, the organic solution is discharged from the pump chamber 12a at the rising timing of each rectangular wave, and the organic solution is sucked into the pump chamber 12a at the falling timing.

  Further, as described above, since the discharge amount of the organic solution can be set by the height of the rectangular wave (voltage value Vd), the drop amount of the organic solution discharged from the ink head 11 to each pixel formation region ( The amount of droplets) can be controlled, and the driving cycle 1 / Fd of the pump unit 12 can be set by the interval (cycle) between the rectangular waves. Therefore, the time interval of the organic solution ejection operation in the ink head 11 is controlled. can do.

(Substrate moving mechanism)
As shown in FIG. 1, the substrate moving mechanism includes, for example, a substrate stage 21 on which the panel substrate PSB is placed and fixed, and XY2 that moves the substrate stage 21 in two axial directions orthogonal to the X and Y directions. The mounting position (alignment state of the alignment mark) of the panel substrate PSB with respect to the axis robot 22 and the substrate stage 21 (or the nozzle head 11 fixed at a predetermined position with respect to the substrate stage 21) is detected and adjusted. Alignment (positioning) camera 23, an image processing unit 24 for analyzing the image captured by the alignment camera 23, and the substrate stage 21 with respect to the nozzle head 11 based on the analysis result. And a robot control unit 25 that controls the movement amount of the XY biaxial robot 22 so as to be set at the position.

Here, the substrate stage 21 includes a vacuum suction mechanism and a mechanical support mechanism for fixing the placed panel substrate PSB at a predetermined position, and the placed and fixed panel substrate PSB. A temperature adjustment mechanism (temperature adjustment mechanism) for setting to a predetermined temperature condition is provided.
The XY 2-axis robot moves independently in the X-axis direction and the Y-axis direction, so that the substrate stage 21 attached to the XY 2-axis robot (that is, the mounted and fixed panel substrate PSB). ) In the two-dimensional coordinate direction and set to a predetermined position with respect to the nozzle head 11.

  Further, the substrate stage 21 is finely moved in the rotation direction (θ direction) in addition to the XY two-axis direction for alignment (positioning) of the initial ejection position of the nozzle head 11 with respect to the panel substrate PSB. Is configured to be possible. Further, the alignment camera 23 for detecting the alignment mark formed in advance on the panel substrate PSB is also fixed at a predetermined position with respect to the moving direction of the substrate stage 21, similarly to the nozzle head 11 described above. .

  As described above, in the display device manufacturing apparatus according to the present embodiment, a single discharge amount is relatively large (for example, about 1 nl to 1 ml), and the discharge amount can be set in a wide range and with high accuracy. Furthermore, by applying a pump having a relatively low operating frequency during discharge (for example, about 1 Hz to 20 Hz), a predetermined amount (for example, 1 nl) is simultaneously obtained from a plurality of nozzles NZL provided in the nozzle head 11. These organic solutions are individually ejected and applied to the plurality of pixel formation regions set on the panel substrate PSB by applying droplets simultaneously.

  Here, when the difference with the manufacturing apparatus of the ink jet system shown in the prior art is specifically verified, in the prior art, since the ink jet technology applied to the printer device is diverted, on the specifications of the ink jet head, It is known that ejection failure (non-ejection) occurs at a rate of once every 50,000 to 100,000 times. In other words, since the inkjet technology is originally a device technology for printing characters and images on paper, even when ink non-ejection occurs at the above frequency, the print image quality is not greatly deteriorated. Absent. On the other hand, in an organic EL element (display panel) manufacturing technique, pixel defects occur due to the occurrence of non-ejection of an organic solution only once, depending on the size (pixel size) of each pixel formation region. As a result, the manufacturing yield may be reduced and the display quality may be deteriorated.

  Therefore, in the display device manufacturing apparatus according to the present embodiment, as described above, the pump unit configured to send the organic solution to the nozzle head has a relatively low operating frequency during discharge (for example, 1 Hz to 20 Hz). By applying a piezo pump of a degree, a discharge operation is executed at a very low speed compared to a general discharge frequency (operation frequency; for example, 1 kHz or more) applied to the ink jet technology shown in the prior art. Therefore, non-ejection of the organic solution due to the malfunction (operation failure) of the pump hardly occurs, and the occurrence of pixel defects can be suppressed as much as possible.

  In addition, when a piezo pump is applied as the pump, since it has a configuration in which a check valve is provided in the flow path (suction port and discharge port) of the organic solution, in a state where the pump is not operating, The organic solution is not supplied to the nozzle head, and it is possible to prevent a phenomenon in which the organic solution leaks from the nozzle and is accidentally deposited on the panel substrate. Further, in the configuration to which the piezo pump is applied, the discharge amount can be set in the range of 1 nl to 1 ml and the discharge operation with high resolution and high accuracy is possible. By appropriately setting the number and the discharge amount from the pump, an organic solution having a relatively large amount of liquid droplets can be simultaneously discharged from a plurality of nozzles in one discharge operation.

  Here, in the manufacturing apparatus according to the present embodiment, when the amount of the organic solution droplet that can be discharged with high resolution and high accuracy while specifically preventing leakage of the organic solution from the nozzle is specifically examined, As described above, in an experiment in which the hole diameter of the nozzle provided in the nozzle head is 0.1 mm, the number of nozzles is 12, and an organic solution having a concentration of 2.5% made of PEDOT / PSS is discharged from each nozzle, about 1 nl or so. It has been found that stable and good discharge performance (discharge operation and discharge accuracy) can be obtained with a small amount of droplets.

  On the other hand, when an equivalent comparative experiment was conducted on the inkjet manufacturing apparatus shown in the prior art with the nozzle hole diameter set to several tens of μm, a relatively stable discharge operation was achieved with a droplet volume of about 30 to 60 pl. Turned out to be done. That is, for these reasons, in the manufacturing apparatus according to the present embodiment, the organic material having a droplet amount of approximately 16 times or more in a single ejection operation is more stable and better than the manufacturing apparatus shown in the related art. Can be applied.

  Therefore, according to the manufacturing apparatus including the nozzle head according to the present embodiment, even a display pixel (pixel formation region) having a large application area of the organic solution, such as a display panel applied to a large television or the like. Since an organic solution with a sufficient amount of droplets can be stably applied to each of the plurality of pixel formation regions by one discharge operation, an organic EL layer (light emitting functional layer; Hole injection layer, light emitting layer) can be formed, and the light emission characteristics of each display pixel (organic EL element) can be made uniform.

  In addition, the hole diameter of each nozzle provided in the nozzle head that discharges the organic solution can be increased, and the concentration of the organic solution can be reduced as will be described later. In addition, it is possible to manufacture a display panel (display device) with excellent display quality by suppressing the occurrence of pixel defects due to non-ejection (application failure) of the organic solution. Furthermore, since the hole diameter of each nozzle can be set large, it is possible to apply a relatively simple method to the hole drilling of the nozzle, and to reduce the maintenance burden for eliminating nozzle clogging. be able to.

<Manufacturing method of display device>
Next, a method for manufacturing a display device (display panel) to which the manufacturing apparatus having the above-described configuration is applied will be described.
6 and 7 are process cross-sectional views illustrating an example of a method for manufacturing a display device (display panel) according to the present embodiment. Here, regarding the organic EL elements formed in each pixel formation region, the above-described schematic configuration (FIG. 11) will be referred to as appropriate, and the corresponding configurations will be described with the same reference numerals. FIG. 8 is a schematic configuration diagram illustrating an example of a pixel formation region of a color display panel on which an organic EL layer is formed in the manufacturing method according to the present embodiment. FIG. 9 is a diagram illustrating the manufacturing method according to the present embodiment. It is process sectional drawing which shows an example at the time of manufacturing a color display panel. In FIG. 8, only a pixel formation region for one display pixel is shown for the sake of illustration, and hatching is given for convenience in the plan view in order to clarify each configuration.

  First, as shown in FIG. 6A, each pixel formation region Apx set on one surface side (upper side in the drawing) of a panel substrate PSB made of a transparent insulating substrate, as shown in FIG. After each, an anode electrode 112 made of at least a transparent electrode material such as ITO is formed, and then, as shown in FIG. 6B, a partition wall made of an insulating resin material or the like in a boundary region with an adjacent pixel formation region Apx. (Bank) 121 is formed.

  Here, the anode electrode 112 is exposed in the pixel formation region Apx surrounded by the partition wall 121. In this embodiment, for the sake of illustration, a configuration in which only the anode electrode is formed in each pixel region is shown. However, a thin film transistor as a switching element is provided so as to be connected to each anode electrode. There may be.

  Further, the display panel manufactured by the manufacturing method according to the present embodiment may correspond to gradation display (monochrome display) in which each display pixel (pixel formation region Apx) is formed of a single emission color. For example, as shown in FIG. 8, each display pixel PIX is configured as a set of red (R), green (G), and blue (B) color pixels (pixel formation regions Apxr, Apxg, Apxb). It may correspond to gradation display (color display) using mixed light of these emission colors.

  Next, for example, by irradiating the surface of the panel substrate PSB with an ultraviolet ray in an oxygen gas atmosphere, active oxygen radicals are generated to decompose and remove organic substances on the ITO surface constituting the anode electrode 112 to make them lyophilic. Also on the surface 121, radicals are generated to make it lyophilic. After that, the panel substrate PSB is irradiated with ultraviolet rays in a fluoride gas atmosphere, for example, to bond fluorine to the surface of the partition wall 121 to make it liquid repellent, and only the surface of the anode electrode (ITO) 112 becomes lyophilic. Having a hydrophilic / hydrophobic pattern.

  Next, as shown in FIG. 6 (c), using the above-described display device manufacturing apparatus (see FIG. 1), from the nozzle head 11H (having the same configuration as the nozzle head 11 described above) to the organic polymer type An organic solution (first material solution) HMC obtained by adding a hole transport material (for example, PEDOT / PSS described above) to an aqueous solvent (for example, 90 wt% of water and 10 wt% of ethanol) is discharged in the form of droplets, and After droplets are applied and applied onto the anode electrode 112 having liquidity, it is heated and dried and fixed, and as shown in FIG. 6D, a hole transport layer (hole injection layer) 113a made of a hole transport material is formed. Form.

  Here, when the manufacturing apparatus according to the present embodiment is applied, as shown in FIG. 2 and FIG. 3, predetermined droplets are simultaneously obtained from a plurality of nozzles communicating with a single solution chamber provided in the nozzle head 11H. Since the amount of the organic solution HMC is discharged, as shown in FIG. 6C, the organic solution HMC can be applied to the plurality of pixel formation regions Apx at the same time.

  In FIG. 6C, for convenience of illustration, the case where the organic solution HMC is simultaneously ejected and deposited on three adjacent pixel formation areas Apx from the nozzle head 11H is shown. For example, in the nozzle head 11H to which the nozzle plate 11b as shown in FIGS. 2 and 3 is applied, an organic solution HMC made of a hole transport material is simultaneously applied to the 12 pixel formation regions Apx to form a hole transport layer. 113a can be formed.

  Next, as shown in FIG. 6E, an organic polymer-based polymer is produced from the nozzle head 11E (having the same configuration as the nozzle head 11 described above) using the display device manufacturing apparatus (see FIG. 1) described above. An organic solution (second material solution) EMC obtained by adding an electron-transporting light-emitting material (for example, the above-described fluorene polymer) to a lipophilic organic solvent (for example, mesitylene) is discharged in the form of droplets, and the hole transport is performed. After droplets are applied and applied onto the layer 113a, heat treatment is performed for drying and fixing, and as shown in FIG. 7F, an electron transporting light emitting layer (light emitting layer) 113b made of an electron transporting light emitting material is formed. .

  Here, when the manufacturing apparatus according to the present embodiment is applied, a predetermined number of nozzles communicating with a single solution chamber provided in the nozzle head 11E can be simultaneously selected from a plurality of nozzles in the same manner as the hole transport layer 113a forming process described above. Since the organic solution EMC of a droplet amount is discharged, as shown in FIG. 6E, the organic solution EMC can be applied to a plurality of pixel formation regions Apx at the same time.

  6 (e) also shows a case where the organic solution EMC is simultaneously ejected and deposited on three adjacent pixel formation areas Apx from the nozzle head 11E for convenience of illustration. When the nozzle plate 11b as shown in FIG. 3 is applied, the electron transporting light emitting layer 113b can be formed by simultaneously applying the organic solution EMC made of the electron transporting light emitting material to the 12 pixel formation regions Apx. it can.

  By the way, when the display panel manufactured by the manufacturing method according to the present embodiment has the display pixels PIX as shown in FIG. 8 and is compatible with color display (color display panel) (that is, red). (R), green (G), and blue (B) having display pixels PIX each having a set of color pixels, as shown in FIGS. 6A to 6D, After forming the hole transport layer 113a, as shown in FIGS. 9A, 9B, and 9C, for example, each color of red (R), green (G), and blue (B) from the nozzle head 11E. Organic solutions EMCr, EMCg, and EMCb made of electron-transporting luminescent materials corresponding to the luminescent color of the pixels are made into droplets in different processing steps for each color of red (R), green (G), and blue (B). The hole transport layer 11 for each pixel formation region Apxr, Apxg, Apxb. After depositing and coating on a, heat treatment to dry and fix, as shown in FIG. 9D, electron transporting light emitting layer (light emitting layer) 113bR, 113bG, 113bB made of electron transporting light emitting material. Respectively.

  Also in this case, the organic solution EMC having a predetermined droplet amount is simultaneously discharged from a plurality of nozzles communicating with a single solution chamber provided in the nozzle head 11E, as in the above-described step of forming the hole transport layer 113a. Therefore, as shown in FIGS. 9A, 9B, and 9C, the organic solutions EMCr, EMCg, and EMCb can be simultaneously applied to the pixel formation regions Apxr, Apxg, and Apxb of each color. .

  In addition, in the coating process of the hole transport material HMC and the electron transport light emitting material EMC (EMCr, EMCg, EMCb) described above, the surface of the partition wall 121 has liquid repellency. Even when a droplet of the electroluminescent material EMC is deposited on the partition wall 121, it is repelled and applied only to each pixel forming region Apx (Apxr, Apxg, Apxb) having lyophilic properties. .

  Next, as shown in FIG. 7G, lithium, barium, or the like is included so as to face the anode electrode 112 through at least the organic EL layer 113 (the hole transport layer 113a and the electron transport light emitting layer 113b) described above. After the cathode electrode 114 made of an electrode material having reflection characteristics is integrally formed in common with each pixel formation region Apx, as shown in FIG. 7 (h), on the panel substrate PSB including the cathode electrode 114, A protective insulating film and a sealing resin layer 115 are formed, and a sealing substrate 116 is further bonded to complete a display panel in which display pixels PIX made of organic EL elements are two-dimensionally arranged.

  In the above-described manufacturing method of the display device, the processing steps for forming both the hole transport layer 113a and the electron transporting light emitting layer 113b constituting the organic EL layer 113 (FIGS. 6C and 6E). In addition, although the case where the display device manufacturing apparatus having the above-described configuration is applied has been described, it may be applied only to the processing step of forming either the hole transport layer 113a or the electron transport light emitting layer 113b. good.

Next, operational effects of the display device manufacturing apparatus and the display device manufacturing method according to the present embodiment will be described by setting specific numerical conditions and comparing with the above-described conventional technology.
FIG. 10 is a conceptual diagram showing a comparative example of a process of applying an organic material to a display pixel (pixel forming region) constituting a large display panel by applying a conventional ink jet printer.

The display device manufacturing apparatus according to the present embodiment and the manufacturing method including a series of processing steps using the manufacturing apparatus have a relatively low resolution, such as a large television or a display panel for a monitor. It can be favorably applied to manufacture of a display panel having a large size.
Specifically, for example, when a display panel having a diagonal size of 30 inches and a pixel number of 1280 RGB × 768 (resolution 50 ppi) is examined, as shown in FIG. 8, red (R) and green (G) constituting the display pixel PIX are shown. The pixel size (pixel width Ppx × pixel length Lpx) of each color pixel of blue (B) is a rectangular shape of 169.5 × 508.5 μm, and in order to prevent color mixture between the light emitting layers between the color pixels, When the stripe-shaped partition wall 121 having a width Wbk = 20 μm and a height Hbk = 20 μm is provided, the effective pixel width (opening width) Wpx is 149.5 μm, and the coating volume of the organic solution per one color pixel is 1.52 nl. (= 149.5 × 508.5 × 20 μm).

  In the display panel shown in the above numerical conditions, since the pixel size is relatively large, the coating amount of the organic solution for forming the organic EL layer 113 (the hole transport layer 113a and the electron transporting light emitting layer 113b) (that is, the above-mentioned) However, since the organic solution applied to the adjacent pixel formation region should not overflow, the opening width Wpx of 149.5 μm between the partition walls 121 and the application volume of 1.52 nl are set. In consideration of the amount of liquid droplets (coating amount) that falls within these values, about 1 nl is appropriate.

  Here, in the inkjet manufacturing apparatus shown in the prior art, the amount of droplets of the organic solution ejected from the nozzle is generally set to about several tens of pl, so using such a manufacturing apparatus, FIG. 10 shows a case where an organic solution having a droplet amount of 1 nl is applied to each pixel formation region (the application region is a pixel effective width (opening width) Wpx × pixel length Lpx = 149.5 × 508.5 μm). As described above, the above-described operation of discharging the small droplets of several tens of pl several times while moving the nozzle head in the longitudinal direction (vertical direction in the drawing) of the coating region is performed in the short direction (horizontal direction in the drawing). It is necessary to execute an operation that scans multiple times. In this case, when the application timing of the organic solution is different, the drying condition of the organic solution is different in the pixel formation region, resulting in variations in film thickness and poor emission characteristics of each display pixel (organic EL element). It has the problem of becoming uniform.

  On the other hand, in the manufacturing apparatus according to the present embodiment, an organic solution having a droplet amount of about 1 nl can be discharged from each nozzle in one discharge operation. In this case, a droplet amount of 1 nl Since the particle size of the organic solution is approximately 124 μm, if the application position accuracy during discharge (positioning accuracy of the substrate stage) is about ± 10 μm, the influence on adjacent pixels (overflow of the organic solution) is prevented. In addition, it is possible to apply the ink so as to be satisfactorily deposited between the partition walls of the pixel formation region (the organic solution is sufficiently spread over the entire region of the pixel formation region).

  In the display panel having the numerical conditions described above, the dry fixing process after applying the organic solution is performed, for example, after applying the organic solution containing the hole transport material, for example, in a hot plate in an air atmosphere. The substrate is dried and fixed at a temperature of 120 to 160 ° C. for 5 to 10 minutes. After applying the organic solution containing the electron-transporting light-emitting material, the substrate is dried and fixed for 5 to 10 minutes at a temperature of 80 to 120 ° C. using a hot plate in a nitrogen atmosphere.

  As a result, it is possible to form a hole transport layer or an electron transporting light emitting layer having a uniform film thickness while suppressing variations in the dryness of the organic solution, and electron transporting light emission of each color of red, green, and blue The layer can be formed satisfactorily without color mixing with adjacent color pixels, and uniform light emission characteristics and good display quality can be realized between the display pixels.

  Further, in the display panel shown in the above numerical conditions, when the film thickness of the hole transport layer and the electron transporting light emitting layer is formed to be 50 nm and 70 nm, respectively, the amount of droplets is set to 1 nl as described above, and the organic solution The concentration of the organic solution made of a hole transport material (hole injection material) can be set to 0.38 wt%, and the concentration of the organic solution made of an electron transporting light emitting material can be set to 0.59 wt%. It is assumed that the specific gravity of the organic EL layer is 1 and the specific gravity of the organic solvent is 0.9).

  On the other hand, in the inkjet manufacturing apparatus shown in the prior art, when applying a hole transport material and an electron transporting light emitting material, the concentration of the organic solution is generally set to about 0.7 to 1.0 wt%. Therefore, in this embodiment, the concentration of each organic solution for forming the hole transport layer and the electron transporting light emitting layer can be set thin. For this reason, it becomes difficult to cause clogging of the nozzle NZL due to these transport materials and light emitting materials.

  Further, in the inkjet manufacturing apparatus shown in the prior art, the nozzle hole diameter of a nozzle head that is generally used is about several tens of μm (for example, 20 to 30 μm), whereas this embodiment In the manufacturing apparatus according to the above, since the nozzle hole diameter can be set to 100 μm (0.1 mm) or more, the discharge area of the nozzle hole is 25 times or more by the area ratio, and the nozzle clogging due to the organic solution occurs. In addition, since the concentration of the organic solution can be reduced as described above, nozzle clogging can be further suppressed and the occurrence of pixel defects can be significantly suppressed. The maintenance burden on the nozzle head can be reduced.

It is a schematic block diagram which shows one Embodiment of the manufacturing apparatus of the display apparatus which concerns on this invention. It is a schematic block diagram which shows an example of the nozzle head applied to the manufacturing apparatus which concerns on this embodiment. It is a block diagram which shows the specific example of the nozzle head applied to the manufacturing apparatus which concerns on this embodiment. It is process sectional drawing which shows an example of the manufacturing method of the nozzle plate applied to the manufacturing apparatus which concerns on this embodiment. It is a figure which shows the example of 1 structure of the pump part applied to the manufacturing apparatus which concerns on this embodiment, and the waveform of the drive signal supplied to the said pump part. It is process sectional drawing (the 1) which shows an example of the manufacturing method of the display apparatus (display panel) which concerns on this embodiment. It is process sectional drawing (the 2) which shows an example of the manufacturing method of the display apparatus (display panel) which concerns on this embodiment. It is a schematic block diagram which shows an example of the pixel formation area of the color display panel in which an organic EL layer is formed in the manufacturing method which concerns on this embodiment. It is process sectional drawing which shows an example at the time of manufacturing a color display panel in the manufacturing method which concerns on this embodiment. It is a conceptual diagram which shows an example of the process which apply | coats an organic material with respect to the display pixel (pixel formation area) which comprises a large sized display panel by applying a prior art. It is a schematic sectional drawing which shows schematic structure and an operation principle of a polymer type organic EL element.

Explanation of symbols

11 Nozzle head 12 Pump unit 13 Pump control unit 14 Solution tank 14
11a Head housing 11a
11b Nozzle plate 11b
NZL nozzle PSB panel substrate PIX display pixel Apx pixel formation region HMC, EMC organic solution 112 anode electrode 113 organic EL layer 113a hole transport layer 113b electron transport light emitting layer 114 cathode electrode 121 partition

Claims (9)

In a display device manufacturing apparatus including a display panel in which a plurality of display pixels are arranged,
An apparatus for manufacturing a display device, comprising: a nozzle head in which a plurality of nozzles that discharge a material solution to a display pixel formation region are provided in communication with a single solution storage chamber. The display device manufacturing apparatus according to claim 1, wherein a check valve is provided in a flow path of the material solution, and the pump device supplies the material solution to the nozzle head. A pump control unit that supplies the material solution to the nozzle head via the pump unit, and simultaneously discharges a predetermined amount of the material solution in droplets from the plurality of nozzles of the solution storage chamber; The display device manufacturing apparatus according to claim 2. The display device manufacturing apparatus according to claim 3, wherein an operation frequency of the discharge operation in the pump control unit is set to 1 Hz to 20 Hz. 5. The display device according to claim 2, wherein the pump unit includes a pump having a discharge capacity of 1 nl to 1 ml of the supply amount of the material solution related to one discharge operation. Manufacturing equipment. The nozzle head includes a housing having an open end on one side and having a space serving as the solution storage chamber, and a plate provided with the plurality of nozzles and closing the open end of the housing. 6. The display device manufacturing apparatus according to claim 1, wherein the display device manufacturing apparatus has a configuration. In a method for manufacturing a display device including a display panel in which a plurality of display pixels are arranged,
A method for manufacturing a display device, comprising the step of simultaneously discharging a material solution from a plurality of nozzles communicating with a single solution storage chamber to the display pixel formation region. The method for manufacturing a display device according to claim 7, wherein the supply amount of the material solution for one discharge operation is 1 nl to 1 ml. 9. The method for manufacturing a display device according to claim 7, wherein the operating frequency of the discharge operation is set to 1 Hz to 20 Hz.

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