JP2007024810A - Angular velocity sensor element and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of reducing erroneous detection and improving the durability/reliability of itself. <P>SOLUTION: The angular velocity sensor element comprises a vibration section 2; a fixing section 3 for supporting the vibration section 2; a drive electrode 6 that is formed on one surface of the vibration section 2 and excites the vibration section 2; and a detection electrode 7 that is formed on a surface in the same direction as the drive electrode 6 at the vibration section 2 and detects vibration generated in a direction vertical to the excitation direction by allowing the vibration section 2 to perform rotation. A protective film 8 for covering the drive electrode 6 and the detection electrode 7 is provided only on a surface where the drive electrode 6 and the detection electrode 7 are formed at the vibration section 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an angular velocity sensor element used for posture control of a moving body such as an aircraft and a vehicle, camera shake correction of a consumer device such as a navigation system and a camera, and a manufacturing method thereof.

  In general, angular velocity sensor elements used for attitude control of moving bodies such as airplanes and vehicles, and camera shake correction for consumer systems such as navigation systems and cameras, have columnar shapes, tuning fork shapes, and the alphabet " Some have an “H” shape. Here, a tuning fork shape will be described as an example. The angular velocity sensor element includes a fixed portion and a pair of columnar vibration portions, and two drive electrodes, one detection electrode, and a monitor electrode are formed on the same surface on the upper surface of each vibration portion. An electrode part for taking out the output to the outside is provided on the upper surface of the fixing part, and the electrode part for taking out the output is a wiring formed on the same plane as each of the drive electrode, the detection electrode and the monitor electrode Connected by pattern. After the angular velocity sensor element is mounted on a pedestal or the like, it is connected to an external circuit by wire bonding or the like, and is packaged together with an IC that is a processing circuit to become an angular velocity sensor.

  By applying an alternating voltage to the two drive electrodes of each vibration part of the angular velocity sensor element, the bending motion can be performed at the natural frequency. At this time, it is assumed that a certain part of the vibration part is moving at a speed V at a certain moment. When the angular velocity sensor element rotates at an angular velocity ω around an axis parallel to the longitudinal direction of the vibration part, a Coriolis force of F = 2 mV · ω is generated in the vibration part. Due to this Coriolis force, a charge is generated in the detection electrode, and this is amplified and processed by an external processing circuit to detect the angular velocity.

  When manufacturing an angular velocity sensor element, a protective film may be provided on the surface of the angular velocity sensor element in order to improve the durability and reliability of the angular velocity sensor element or prevent a short circuit due to adhesion of foreign matter between electrodes.

As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
Japanese Patent Laid-Open No. 11-145758

  However, since the conventional angular velocity sensor element forms a protective film by dipping and heat treatment over the entire surface of the vibration part, if the film thickness of the protective film is not uniform, the vibration part vibrates in addition to the vibration direction. As a result, there is a problem that even if the angular velocity is not applied, charges are generated in the detection electrode and erroneous detection is performed.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described conventional problems, and to provide an angular velocity sensor element that can reduce erroneous detection and improve the durability reliability of the angular velocity sensor element and a method for manufacturing the same. To do.

  In order to achieve the above object, the present invention has the following configuration.

  According to a first aspect of the present invention, there is provided a vibrating portion, a fixing portion that supports the vibrating portion, a drive electrode that is formed on one surface of the vibrating portion and excites the vibrating portion, and the vibrating portion. A detection electrode that is formed on a surface in the same direction as the drive electrode and that detects vibration generated in a direction perpendicular to the excitation direction when the vibration unit rotates. The drive electrode and the detection in the vibration unit A protective film that covers the drive electrode and the detection electrode is provided only on the surface on which the electrode is formed. According to this configuration, only the surface on which the drive electrode and the detection electrode are formed in the vibration unit is provided. Since the protective film covering the drive electrode and the detection electrode is provided, the durability reliability of the angular velocity sensor element can be improved, and the drive electrode and the detection electrode in the vibration part are formed. Since the protective film is not formed on the non-exposed surface, the area where the protective film is formed can be reduced, thereby having the effect of reducing the false detection caused by the variation in the thickness of the protective film as much as possible. .

  According to the second aspect of the present invention, in particular, the protective film is also formed at the boundary portion between the vibrating portion and the fixing portion, and a groove is formed in the protective film located at the boundary portion, or the vibrating portion is formed. In this configuration, a missing portion is provided without forming a protective film. According to this configuration, the vibration portion and the fixing portion, which are the portions with the largest distortion when vibrating in the vibration portion, are provided. Since the groove is formed in the protective film located at the boundary, or the missing part is provided without forming the protective film at the boundary between the vibrating part and the fixed part, the angular velocity can be detected efficiently. It has a working effect.

  In the invention according to claim 3 of the present invention, in particular, the protective film in the vibration part is formed with one or two or more grooves in a direction perpendicular to the longitudinal direction of the vibration part. Since the increase in bending rigidity due to the formation of the protective film can be reduced, the reduction in drive efficiency can be reduced.

  According to the fourth aspect of the present invention, in particular, the protective film is formed on both the surface on which the drive electrode and the detection electrode are formed in the vibration portion and the surface facing this surface. For example, since the protective film can be formed evenly on the upper and lower surfaces of the vibration part, there is an effect that an unnecessary signal in the vertical direction is not generated during vibration.

  According to the fifth aspect of the present invention, the protective film is made of a material having a thermal expansion coefficient equal to the thermal expansion coefficient of the vibrating part. The portion has the effect of not receiving stress from the protective film.

  The invention according to claim 6 of the present invention is particularly that the protective film is formed of a resin-based material. According to this configuration, the operation of the vibration part is not hindered and the mechanical strength is excellent. This has the effect of obtaining a protective film.

  In the invention according to claim 7 of the present invention, in particular, the thickness of the protective film is set in a range of 0.1 μm to 5 μm. According to this configuration, the vibration portion is set by setting an optimum film thickness. It has an effect that the effect as a protective film can be obtained without hindering the operation.

  In the invention according to claim 8 of the present invention, in particular, a package is added and an angular velocity sensor element is arranged inside the package. According to this configuration, the angular velocity is mainly affected by the package against mechanical impact. The sensor element is protected by a package and a protective film to improve durability and reliability, and the protective film is mainly used to prevent a short circuit between the electrodes. It has the effect that it can be performed.

  According to the ninth aspect of the present invention, in particular, the package is configured by joining at least two parts by welding, and according to this configuration, the angular velocity sensor element can be easily arranged in the package. It has the effect of being able to.

  According to a tenth aspect of the present invention, in the method for manufacturing one or more angular velocity sensor elements from one plate-like wafer, a plurality of drive electrodes are directly or indirectly provided on one surface of the wafer. A step of forming a plurality of detection electrodes, a step of forming a protective film covering the drive electrodes and the detection electrodes, and a step of dividing the wafer into pieces of a predetermined shape to form angular velocity sensor elements. Therefore, according to this manufacturing method, since the protective film covering the drive electrode and the detection electrode is formed, it is possible to improve the durability reliability of the angular velocity sensor element, and after forming the protective film Since the wafer is divided, the protective film is not formed on the divided surface of the wafer, that is, the side surface of the angular velocity sensor element. The one having an effect that can be reduced as much as possible.

  According to the eleventh aspect of the present invention, in particular, a plurality of drive electrodes and a plurality of detection electrodes in the plate-shaped wafer are formed before the step of dividing the plate-shaped wafer into pieces of a predetermined shape. In this manufacturing method, a protective film is formed on both the surface on which the drive electrodes and the like in the angular velocity sensor element are formed and the surface facing this surface. Therefore, the protective film is evenly positioned on the upper and lower surfaces of the vibration part, and this has the effect of preventing unnecessary signals from being generated in the vertical direction during vibration.

  In the invention according to claim 12 of the present invention, in particular, the protective film is formed by spin coating or dipping. According to this manufacturing method, an excellent protective film can be stably obtained by an inexpensive method. It has the effect.

  In the invention according to claim 13 of the present invention, in particular, the lower electrode is formed on the wafer, and the drive electrode and the detection electrode are formed so as to face the lower electrode through the piezoelectric body. The step of polarizing the piezoelectric body is added before the step of forming a film. According to this manufacturing method, the step of forming a protective film after the step of performing polarization that requires the wafer to be heated to a high temperature. Since the protective film is provided, the protective film has an effect that it is not damaged by heat during polarization.

  According to the fourteenth aspect of the present invention, in particular, the step of putting the angular velocity sensor element into the package is added. According to this manufacturing method, the angular velocity sensor element is mainly affected by the package against mechanical shock. In order to improve durability and reliability, the package and the protective film are used, and the prevention of short circuit between the electrodes is mainly performed using the protective film, so that the angular velocity sensor element is protected more appropriately. It has the effect that it can be performed.

  According to the fifteenth aspect of the present invention, in particular, in the step of placing the angular velocity sensor element in a package, the angular velocity sensor element is covered with at least two parts, and the at least two parts are joined by welding. According to this manufacturing method, the angular velocity sensor element can be easily arranged in the package.

  As described above, the angular velocity sensor element of the present invention includes a vibrating portion, a fixing portion that supports the vibrating portion, a drive electrode that is formed on one surface of the vibrating portion and excites the vibrating portion, and the vibrating portion. A detection electrode that is formed on a surface in the same direction as the drive electrode and that detects vibration generated in a direction perpendicular to the excitation direction when the vibration unit rotates. The drive electrode and the detection in the vibration unit Since the protective film that covers the drive electrode and the detection electrode is provided only on the surface on which the electrode is formed, the drive electrode and the detection electrode are provided on the surface on which the drive electrode and the detection electrode are formed in the vibration unit. A covering protective film can be formed, whereby the durability reliability of the angular velocity sensor element can be improved, and the drive electrode and the detection electrode in the vibration part are not formed Since the protective film is not formed, the area for forming the protective film can be reduced, thereby producing an excellent effect that false detection due to variations in the thickness of the protective film can be reduced as much as possible. is there.

(Embodiment 1)
Hereinafter, with reference to the first embodiment, the inventions according to claims 1, 5 to 7, 10, 12, and 13 of the present invention will be described. Here, FIG. 1 is a top view of the angular velocity sensor element according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view taken along line AA of FIG. 1, and FIG. 3 is a diagram of manufacturing the angular velocity sensor element according to Embodiment 1 of the present invention. FIG.

  1 to 3, reference numeral 1 denotes a substrate made of Si, and the substrate 1 has a substantially tuning fork shape. Reference numeral 2 denotes a vibrating portion that can vibrate on the tuning-fork-shaped substrate 1, and the vibrating portion 2 has a rectangular parallelepiped shape, and is arranged in parallel two in parallel. Reference numeral 3 denotes a fixing portion that supports the vibrating portion 2. Reference numeral 4 denotes a lower electrode formed on the vibrating portion 2, and three lower electrodes 4 are formed substantially parallel to the longitudinal direction of each vibrating portion 2. Reference numeral 5 denotes a piezoelectric body formed on each lower electrode 4, and the piezoelectric body 5 is composed of a PZT (lead zirconate titanate) thin film. Reference numeral 6 denotes a drive electrode formed on the piezoelectric bodies 5 located on both sides of the three piezoelectric bodies 5, and 7 denotes a drive electrode formed on the piezoelectric body 5 located in the center among the three piezoelectric bodies 5. Detection electrode. Reference numeral 8 denotes a protective film formed on the surface of the vibrating portion 2 where the drive electrode 6 and the detection electrode 7 are formed so as to cover the drive electrode 6 and the detection electrode 7. A connection electrode 9 is electrically connected to the drive electrode 6 or the detection electrode 7 and is physically connected to a lead wire or the like for connection to an external electric circuit (not shown). As a method for connecting the connection electrode 9 and an external electric circuit, for example, there is a method of connecting by wire bonding, but a lead wire may be connected by soldering. Alternatively, a land may be formed on a substrate of an external electric circuit and connected by a face-down method in which the land is brought into direct contact with the land.

  Next, a method for manufacturing the angular velocity sensor element according to Embodiment 1 of the present invention will be described.

  First, Pt and Ti that become the lower electrode 4 are formed on the substrate 1, which is a disc-shaped wafer made of Si, by sputtering or vapor deposition so as to have a film thickness of about 0.4 μm, and subsequently the piezoelectric body 5. A PZT film having a thickness of about 2.5 μm is formed. On top of this, Au and Ti to be the drive electrode 6 or the detection electrode 7 are formed so as to have a film thickness of about 0.3 μm. Thereafter, the thin films laminated as described above are processed into a predetermined pattern shape by photolithography and etching. Next, by applying a voltage between the drive electrode 6 and the lower electrode 4 and between the detection electrode 7 and the lower electrode 4, the polarization vector direction of the piezoelectric body 5 is made uniform. Thereafter, a polyimide to be the protective film 8 is applied and dried by spin coating. This state is shown in FIG. Then, the protective film 8 is patterned into a predetermined shape by photolithography and wet processing. At this time, the protective film 8 is not formed on the connection electrode 9 or the portion where dicing is performed when the element is divided. Thereafter, a heat treatment for curing the polyimide is performed at 250 to 300 ° C., and the effect of stabilizing the piezoelectric body 5 can be obtained at the same time by this heat treatment. After forming the protective film 8, etching and dicing are performed to form and divide each element, thereby obtaining an angular velocity sensor element.

  Next, the operation of the angular velocity sensor element manufactured as described above will be described.

  The piezoelectric body 5 has piezoelectric characteristics, and generates a strain when a voltage is applied, and generates a potential when a mechanical strain is generated. Utilizing this property, the vibration part 2 of the angular velocity sensor element is excited. Specifically, when an AC voltage is applied between the drive electrode 6 and the lower electrode 4 facing the drive electrode 6, the phase of voltage application to the two drive electrodes 6 in one vibrating portion 2 is shifted by 180 °, etc. By devising the above, the vibration unit 2 can be excited in the left-right direction in FIG. A voltage is similarly applied to the drive electrode 6 in the other vibration part 2. At this time, the two vibrating parts 2 are vibrated so as to be closed or opened instead of being vibrated in a substantially parallel state. That is, in FIG. 1, when the right vibrating portion 2 is tilted to the right, the left vibrating portion 2 is tilted to the left, while when the right vibrating portion 2 is tilted to the left, the left vibrating portion 2 is Make a vibration that tilts to the right.

  When the angular velocity sensor element is caused to perform an angular velocity motion around an axis parallel to the longitudinal direction of the vibrating portion 2 during such vibration, the vibrating portion 2 is moved to the front side or the rear side of the drawing in FIG. 1 by Coriolis force. Accordingly, a potential is generated in the piezoelectric body 5 in contact with the detection electrode 7. By knowing this potential, the angular velocity given to the angular velocity sensor element can be detected.

  In the angular velocity sensor element according to Embodiment 1 of the present invention described above, the protective film 8 is formed so as to cover the drive electrode 6 and the detection electrode 7 only on the surface of the vibration unit 2 on which the drive electrode 6 and the detection electrode 7 are formed. And since the protective film 8 is not formed in the side surface and back surface of the vibration part 2 in which the drive electrode 6 and the detection electrode 7 are not formed, the area which forms the protective film 8 can be made small. That is, by forming the protective film 8 only in necessary portions, it is possible to reduce false detections due to variations in the thickness of the protective film 8 as much as possible, and to improve the durability reliability of the angular velocity sensor element. .

  Further, if the protective film 8 is made of a material having a thermal expansion coefficient equal to the thermal expansion coefficient of the vibrating part 2, even if the operating temperature changes, no thermal stress is substantially generated in the vicinity of the detection electrode 7, Thereby, it is possible to detect the angular velocity with high accuracy regardless of the operating temperature.

  Moreover, since the protective film 8 is made of a resin-based material, the protective film 8 that does not hinder the operation of the vibration unit 2 and is excellent in mechanical strength can be obtained.

  Furthermore, if the thickness of the protective film 8 is set to a thickness in the range of 0.1 μm to 5 μm, the operation of the vibration unit 2 is not hindered and the effect as the protective film 8 is obtained.

  Furthermore, if the protective film 8 is formed by spin coating or dip, an excellent protective film 8 can be obtained by a stable and inexpensive method.

  In addition, since the step of forming the protective film 8 is provided after the step of polarizing the piezoelectric body 5, the effect that the protective film 8 is not damaged by the heat at the time of polarization can be obtained.

(Embodiment 2)
Hereinafter, the second and second embodiments of the present invention will be described with reference to the second embodiment.

  FIG. 4 shows a cross-sectional view of the angular velocity sensor element according to the second embodiment of the present invention. In FIG. 4, the same configuration as that of the first embodiment of the present invention described above is used. The same number is given and the explanation is omitted.

  As shown in FIG. 4, the second embodiment of the present invention is different from the first embodiment described above in that the angular velocity sensor element is surrounded by a package 12.

  In FIG. 4, 10 is an upper package, 11 is a lower package, and the lower package 11 and the upper package 10 constitute a package 12. An angular velocity sensor element is arranged inside the package 12. The material constituting the package 12 may be metal, ceramic, or the like. In order to weld the upper package 10 and the lower package 11 in order to seal the package 12, at least the upper package 10 and the lower package 11 are used. The joint part with the package 11 needs to be a metal. By arranging the angular velocity sensor element inside the package 12 in this way, the angular velocity sensor element can be protected from an external mechanical shock. Further, since the angular velocity sensor element can be prevented from being oxidized by evacuating the package 12 or filling nitrogen and removing oxygen, durability reliability of the angular velocity sensor element can also be improved. In this case, since the lower electrode 4, the piezoelectric body 5, the drive electrode 6, and the detection electrode 7 are covered with the protective film 8 by forming the protective film 8, the durability and reliability of these electrodes and the like are also improved. In addition, the angular velocity sensor element can be further strongly protected by a synergistic effect with the protection by the package 12.

  In this case, it is necessary to join the upper package 10 and the lower package 11 so as to seal the package 12 in a sealed state. Although welding can be used as this joining method, the metal constituting the package 12 may be peeled off from the package 12 and mixed into the package 12 during the welding. Even in such a case, since the protective film 8 covers the lower electrode 4, the drive electrode 6, and the detection electrode 7, it is possible to prevent a short circuit therebetween.

  As described above, the angular velocity sensor element according to the second embodiment of the present invention surrounds the angular velocity sensor element with the package 12, so that the angular velocity sensor element can be mainly protected by the package 12 against mechanical impact. Further, the durability and reliability are improved by the package 12 and the protective film 8, and further, the protective film 8 is mainly used for preventing the short-circuit between the electrodes, so that the angular velocity sensor element is more appropriately protected. It is something that can be done.

  Further, when the package 12 is sealed by welding, metal pieces may be scattered during welding, but in this case as well, since it is covered with the protective film 8, the space between the lower electrode 4, the drive electrode 6, and the detection electrode 7 is covered. Can be prevented.

(Embodiment 3)
Hereinafter, the invention described in the fourth and eleventh aspects of the present invention will be described using the third embodiment.

  FIG. 5 shows a cross-sectional view of the angular velocity sensor element according to the third embodiment of the present invention. In FIG. 5, the same structure as that of the first embodiment of the present invention described above is used. The same reference numerals are given, and the description thereof is omitted.

  As shown in FIG. 5, the third embodiment of the present invention is different from the first embodiment described above in that the protective film 8 is provided on the surface on which the drive electrode 6 and the like in the vibrating portion 2 are formed, and on this surface. It is a point formed on both of the opposite surfaces.

  In FIG. 5, 8 is a protective film, and this protective film 8 is formed not only on the surface where the drive electrode 6 and the detection electrode 7 are formed in the vibration part 2, but also on the surface facing this surface. .

  This manufacturing method of the angular velocity sensor element can be performed in the same manner as the manufacturing method of the angular velocity sensor element in the first embodiment of the present invention described above, and the drive electrode 6 and the detection electrode 7 in the vibration part 2 are formed. The protective film 8 may be formed on the surface facing the surface before or after the step of forming the protective film 8 on the surface.

  Thus, by forming the protective films 8 evenly on the upper and lower surfaces of the vibration part 2, it is possible to obtain an effect that no unnecessary signal in the vertical direction is generated during vibration.

  Note that the angular velocity sensor element according to the third embodiment of the present invention can also be configured to surround the angular velocity sensor element with the package 12 as described in the second embodiment of the present invention. Even in this case, the same effects as those of the second embodiment of the present invention can be obtained.

(Embodiment 4)
Hereinafter, with reference to the fourth embodiment, the present invention described in claims 2 and 3 will be described.

  FIG. 6 shows a side view of the angular velocity sensor element according to the fourth embodiment of the present invention. In FIG. 6, the same structure as that of the first embodiment of the present invention described above is used. The same number is given and the explanation is omitted.

  As shown in FIG. 6, the fourth embodiment of the present invention is different from the first embodiment of the present invention described above in that the shape of the protective film 8 is changed.

  The angular velocity sensor element shown in FIG. 6 is formed on the protective film 8, the vibrating portion 2, and the fixing portion 3, respectively, and the protective film 8 is not formed on the boundary portion between the vibrating portion 2 and the fixing portion 3. A missing part is provided. In this manufacturing method, the protective film 8 may be formed in a state where the boundary portion between the vibrating portion 2 and the fixing portion 3 is masked, while the protective film 8 is formed on the entire upper surface of the vibrating portion 2 in FIG. After that, the missing portion may be formed by etching or the like.

  According to this configuration, since the protective film 8 at the boundary between the vibrating portion 2 and the fixing portion 3 that is the portion with the largest distortion when vibrating in the vibrating portion 2 is omitted, the angular velocity can be detected efficiently. It can be done.

  The configuration of the angular velocity sensor element according to the fourth embodiment of the present invention is not limited to the above configuration, and various variations can be taken. These will be described with reference to FIGS.

  FIG. 7 shows a side view of the first variation of the angular velocity sensor element according to the fourth embodiment of the present invention. The angular velocity sensor element shown in FIG. The protective film 8 is also formed at the boundary portion of the thin film and is formed thinner than the other portions. In other words, a groove is formed in the protective film 8 located at the boundary between the vibrating portion 2 and the fixing portion 3. In this way, it is possible to protect the angular velocity sensor element at the boundary between the vibrating portion 2 and the fixing portion 3 and to detect the angular velocity efficiently.

  FIG. 8 shows a side view of a second variation of the angular velocity sensor element according to the fourth embodiment of the present invention. The angular velocity sensor element shown in FIG. 8 is perpendicular to the longitudinal direction of the vibrating portion 2 in the protective film 8. In this direction, one or more grooves are formed. According to this configuration, since the increase in bending rigidity due to the formation of the protective film 8 on the vibrating portion 2 can be reduced, the angular velocity can be detected efficiently.

  6 to 8 can be arranged in the package 12 as in the second embodiment of the present invention, and the third embodiment of the present invention shown in FIG. Thus, the protective film 8 can be formed on the upper and lower sides of the vibration part 2. Furthermore, if both the second embodiment and the third embodiment of the present invention are applied, the protective film 8 can be formed above and below the vibrating portion 2 as well as being arranged in the package 12. is there.

  INDUSTRIAL APPLICABILITY The angular velocity sensor element and the manufacturing method thereof according to the present invention can reduce false detection and can improve the durability reliability of the angular velocity sensor element. In addition to the system, it is useful as a sensor for camera shake correction of consumer devices such as cameras.

The top view of the angular velocity sensor element in Embodiment 1 of this invention AA line sectional view of FIG. The elements on larger scale during manufacture of the angular velocity sensor element in Embodiment 1 of this invention Sectional drawing of the angular velocity sensor element in Embodiment 2 of this invention Sectional drawing of the angular velocity sensor element in Embodiment 3 of this invention Side view of angular velocity sensor element according to embodiment 4 of the present invention. Side view of first variation of same angular velocity sensor element Side view of second variation of same angular velocity sensor element

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Vibrating part 3 Adhering part 4 Lower electrode 5 Piezoelectric body 6 Drive electrode 7 Detection electrode 8 Protective film 9 Connection electrode 10 Upper package 11 Lower package 12 Package

Claims (15)

A vibration part, a fixing part that supports the vibration part, a drive electrode that is formed on one surface of the vibration part and that excites the vibration part, and is formed on a surface in the same direction as the drive electrode in the vibration part; And a detection electrode that detects vibration generated in a direction perpendicular to the excitation direction when the vibration unit performs a rotational movement, and the drive electrode and the detection electrode are formed only on the surface on which the drive electrode and the detection electrode are formed. An angular velocity sensor element provided with a protective film covering the detection electrode. A protective film is also formed at the boundary between the vibration part and the fixed part, and a groove is formed in the protective film located at the boundary, or no protective film is formed at the boundary between the vibration part and the fixed part. The angular velocity sensor element according to claim 1, wherein a missing portion is provided in the sensor. The angular velocity sensor element according to claim 1 or 2, wherein one or two or more grooves are formed in the protective film in the vibration part in a direction perpendicular to the longitudinal direction of the vibration part. The angular velocity sensor element according to any one of claims 1 to 3, wherein the protective film is formed on both the surface on which the drive electrode and the detection electrode are formed in the vibration portion and the surface opposite to the surface. The angular velocity sensor element according to claim 1, wherein the protective film is made of a material having a thermal expansion coefficient equal to that of the vibration part. The angular velocity sensor element according to claim 1, wherein the protective film is formed of a resin-based material. The angular velocity sensor element according to claim 1, wherein the thickness of the protective film is set in a range of 0.1 μm to 5 μm. The angular velocity sensor element according to claim 1, wherein a package is added and an angular velocity sensor element is disposed inside the package. The angular velocity sensor element according to claim 8, wherein the package is configured by joining at least two or more parts by welding. Forming a plurality of drive electrodes and a plurality of detection electrodes directly or indirectly on one surface of the wafer in a method of manufacturing one or more angular velocity sensor elements from a single plate-like wafer; A method for manufacturing an angular velocity sensor element, comprising: forming a protective film covering the drive electrode and the detection electrode; and dividing the wafer into pieces having a predetermined shape to form an angular velocity sensor element. Claims in which a step of forming a protective film on a surface of the plate-like wafer where a plurality of drive electrodes and a plurality of detection electrodes are not formed is added before the step of dividing the plate-like wafer into pieces having a predetermined shape. Item 11. A method for manufacturing an angular velocity sensor element according to Item 10. The method of manufacturing an angular velocity sensor element according to claim 10 or 11, wherein the protective film is formed by spin coating or dipping. A lower electrode is formed on the wafer, and a drive electrode and a detection electrode are formed so as to face the lower electrode through a piezoelectric body, and the piezoelectric body is polarized before the step of forming a protective film. The manufacturing method of the angular velocity sensor element of Claim 10 or 11 which added the process to perform. The manufacturing method of the angular velocity sensor element which added the process of putting the said angular velocity sensor element in a package to the manufacturing method of the angular velocity sensor element in any one of Claims 10-13. 15. The method of manufacturing an angular velocity sensor element according to claim 14, wherein the step of placing the angular velocity sensor element in a package is a process of covering the angular velocity sensor element with at least two or more parts and joining the at least two or more parts by welding. .

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