JP2006310689A - Manufacturing method of double-access flexible circuit board - Google Patents
Manufacturing method of double-access flexible circuit board Download PDFInfo
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- JP2006310689A JP2006310689A JP2005134140A JP2005134140A JP2006310689A JP 2006310689 A JP2006310689 A JP 2006310689A JP 2005134140 A JP2005134140 A JP 2005134140A JP 2005134140 A JP2005134140 A JP 2005134140A JP 2006310689 A JP2006310689 A JP 2006310689A
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- circuit board
- flexible circuit
- photosensitive polyimide
- wiring pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
Abstract
Description
本発明は、導体層の両面に接続用開口部を形成したダブルアクセス型可撓性回路基板の製造方法に係わり、とくに片面銅張可撓性回路基板の構造を基礎とする可撓性回路基板の製造方法に関する。 The present invention relates to a method of manufacturing a double access type flexible circuit board in which connection openings are formed on both sides of a conductor layer, and in particular, a flexible circuit board based on the structure of a single-sided copper-clad flexible circuit board. It relates to the manufacturing method.
ベース面にも接続ランドを設けた、ダブルアクセス型のプリント配線板を製造する方法としてプリパンチ法が非特許文献1に記載されている。これによると、銅箔とベースフィルム間に接着剤を介して張り合わせた銅張積層板(3層材)を製造する際に予め穴加工を施した接着剤付きベースフィルムを用いることで導体の両面から接続できる可とう性回路基板を製造することができる。
Non-Patent
近年、銅張積層板は耐熱性や回路全体の薄型化、ハロゲンフリーと難燃性の両立の要求に対応するため、銅箔とポリイミド層との間に接着剤を介さない無接着剤銅張板(2層材と称す)の適用範囲が広がっている。2層材を用いてダブルアクセス型のプリント配線板を製造するときのベースフィルム層への接続ランドの形成方法として、スクリーン印刷などで接続ランド部を避けてポリイミドワニスを塗布し乾燥させるやり方があるが、微小な開口ができない等、設計の自由度が低いという課題がある。そのほかにレーザー加工、プラズマ加工でベースフィルム層に接続ランドを形成する方法があるが、レーザー加工は単孔処理であるため生産性が低く、ランドに付着した焼成異物除去の工程が必要となるため生産コストが上昇する。また、プラズマ加工は一括処理が可能であるが、前処理としてマスキング工程が必要となるため生産性が低い。 In recent years, copper-clad laminates have a non-adhesive copper-clad laminate that does not use an adhesive between the copper foil and the polyimide layer in order to meet the requirements of heat resistance, overall circuit thickness reduction, and halogen-free and flame retardant compatibility. The range of application of plates (referred to as two-layer materials) is expanding. As a method for forming a connection land on the base film layer when manufacturing a double-access type printed wiring board using a two-layer material, there is a method of applying and drying a polyimide varnish by avoiding the connection land portion by screen printing or the like. However, there is a problem that the degree of freedom in design is low, for example, a minute opening cannot be made. In addition, there is a method of forming a connection land on the base film layer by laser processing or plasma processing, but since laser processing is a single hole process, productivity is low and a process of removing the burned foreign matter adhering to the land is required. Production costs increase. In addition, plasma processing can be performed in a batch, but the productivity is low because a masking step is required as a pretreatment.
これらの問題を解決するため、導体回路用金属箔の片面にポリイミド前駆体ワニスを塗布し、乾燥してポリイミド前駆体層を形成し、ポリイミド前駆体にフォトリソグラフ法用のフォトレジストをコーティングし、露光、現像によりランドアクセス用開口部を設け、その後、銅パターンをエッチング工法で製造した後、ポリイミド前駆体層を高温でイミド化することによりダブルアクセス型可とう性回路基板を製造できることが特許文献1に記載されている。 In order to solve these problems, a polyimide precursor varnish is applied to one side of a metal foil for a conductor circuit, dried to form a polyimide precursor layer, and a polyimide precursor is coated with a photoresist for photolithography, It is possible to manufacture a double access type flexible circuit board by providing a land access opening by exposure and development, and then manufacturing a copper pattern by an etching method and then imidizing a polyimide precursor layer at a high temperature. 1.
また、上記の方法の2層材のベースフィルムとしてフォトレジスト機能をもつ感光性ポリイミドを利用することも可能である。感光性ポリイミドの具体例としてポリイミド前駆体にエステル結合やイオン結合を介して感光基を導入したネガ型感光性ポリイミド前駆体、側鎖にo−ニトロベンジルエステル基を有する構造としたポジ型感光性ポリイミドがある。
ポリイミド前駆体を用いて絶縁層を逐次に形成するプロセスでは、ポリイミド前駆体は被覆材料としては脆く、かつ配線パターン形成工程におけるフォトレジスト現像の弱アルカリ液に浸漬して加水分解することで表層が劣化する。そのため、配線パターン形成工程では、絶縁層を薬液から保護することと、アクセス用開口部から露出した導体層の保護を目的として、弱粘着テープを保護フィルムとして用いる必要があり、生産性が悪い(機械的特性、耐薬品性)。 In the process of sequentially forming an insulating layer using a polyimide precursor, the polyimide precursor is brittle as a coating material, and the surface layer is formed by being immersed in a weak alkaline solution for photoresist development in the wiring pattern forming process and hydrolyzed. to degrade. Therefore, in the wiring pattern forming step, it is necessary to use a weak adhesive tape as a protective film for the purpose of protecting the insulating layer from the chemical solution and protecting the conductor layer exposed from the access opening, resulting in poor productivity ( Mechanical properties, chemical resistance).
また、配線パターン形成工程では、導体層の銅のエッチングにより露出したポリイミド前駆体の面も強酸により加水分解を受けて脆弱な層を形成することになり、カバーコートの密着性、絶縁信頼性が問題となる(機械的特性、耐薬品性)。さらに、現像および熱硬化工程が片面ずつ逐次行なわれることや、イミド化反応での体積収縮が避けられないため(寸法安定性)、反りの発生が懸念される(寸法安定性)。 In the wiring pattern formation process, the surface of the polyimide precursor exposed by copper etching of the conductor layer is also hydrolyzed by a strong acid to form a fragile layer, and the cover coat adhesion and insulation reliability are improved. Problems (mechanical properties, chemical resistance). Furthermore, since the development and thermosetting processes are sequentially performed one side at a time and volume shrinkage due to imidization reaction is unavoidable (dimensional stability), there is a concern that warpage may occur (dimensional stability).
本発明は上述の点を考慮してなされたもので、機械的特性、耐薬品性、絶縁信頼性および寸法安定性の良好なダブルアクセス型可撓性回路基板を提供することを目的とする。 The present invention has been made in view of the above points, and an object of the present invention is to provide a double access type flexible circuit board having good mechanical properties, chemical resistance, insulation reliability, and dimensional stability.
上記目的達成のため、本発明では、
導体層の一面に感光性ポリイミドの被覆層を配して積層板を形成し、
前記導体層をエッチング加工により配線パターンを形成し、
前記配線パターンの露出面に前記導体層と同様の感光性ポリイミドからなる被覆層を配し、
前記両被覆層をフォトエッチング加工して開口し、前記配線パターンの両面に接続ランドを形成する
ことを特徴とするダブルアクセス型可撓性回路基板の製造方法、
を提供するものである。
In order to achieve the above object, in the present invention,
A laminated board is formed by arranging a coating layer of photosensitive polyimide on one surface of the conductor layer,
Forming a wiring pattern by etching the conductor layer;
Arranging a coating layer made of the same photosensitive polyimide as the conductor layer on the exposed surface of the wiring pattern,
A method of manufacturing a double-access-type flexible circuit board, comprising: opening the two coating layers by photoetching; and forming connection lands on both sides of the wiring pattern;
Is to provide.
本発明は上述のように、導体層の一面に耐薬品に優れる感光性ポリイミドを配して積層板を形成し、配線パターンを形成した後、両面同時に接続ランドを形成する製造方法であるため、配線パターン形成時に材料の劣化がなくなり、機械特性、耐薬品性および絶縁信頼性を向上することができる。また、ポリイミドを用いた、両面一括の接続ランド形成工程であるため、体積収縮や反りが改善される。 As described above, the present invention is a manufacturing method in which a photosensitive polyimide having excellent chemical resistance is arranged on one surface of a conductor layer to form a laminated board, and after forming a wiring pattern, a connection land is simultaneously formed on both sides. When the wiring pattern is formed, the material is not deteriorated, and the mechanical characteristics, chemical resistance and insulation reliability can be improved. Moreover, since it is a double-sided connection land formation process using polyimide, volume shrinkage and warping are improved.
以下、添付図面を参照して本発明の実施例を説明する。 Embodiments of the present invention will be described below with reference to the accompanying drawings.
以下、本発明において、ベースフィルムの材料としてポジ型の感光性ポリイミドを使用した場合について説明する。ここで使用するポジ型感光性ポリイミドは、その目的の特性に応じて種々選択し使用することができる。 Hereinafter, in the present invention, the case where positive photosensitive polyimide is used as the material of the base film will be described. The positive photosensitive polyimide used here can be variously selected and used depending on the intended characteristics.
図1(a)ないし(e)は、本発明の一実施例における工程を順番を追って示したものである。この図1(a)は、本発明に係る方法での最初の工程を示したもので、導体層1の一面に感光性ポリイミドベース層2を形成する。
1 (a) to 1 (e) show the steps in one embodiment of the present invention in order. FIG. 1A shows the first step in the method according to the present invention, in which a photosensitive
続けて導体層1をエッチング加工して配線パターンを形成する(図1(b))。後に、配線パターンの露出面に感光性ポリイミドベース層2と同様の感光性ポリイミドを用いて感光性ポリイミドカバー層3を形成する(図1(c))。両面の感光性ポリイミド層をフォトエッチング加工して開口(図1(d))することで、配線パターンの両面に接続ランドを形成したダブルアクセス型可撓性回路基板を製造できる(図1(e))。
Subsequently, the
感光性ポリイミドベース層2および感光性ポリイミドカバー層3は、大別して2種類のものを利用でき、有機溶剤現像のネガ型と、アルカリ現像のポジ型とである。感光性ポリイミドベース層2および感光性ポリイミドカバー層3には、絶縁膜の化学成分中にポリイミドよりも化学的特性、機械的特性の劣るアクリルやエポキシ等の架橋成分を含まないから、絶縁膜として優れた特性を有する。
The photosensitive
たとえば感光性ポリイミドの具体例として、非感光性の溶媒可溶型ポリイミドヘキノンジアジド化合物を混合してポジ型感光性ポリイミドとした反応現象型レジストがある(非特許文献2)。 For example, as a specific example of photosensitive polyimide, there is a reaction phenomenon type resist in which a non-photosensitive solvent-soluble polyimide hequinonediazide compound is mixed to form a positive photosensitive polyimide (Non-patent Document 2).
そして、感光性ポリイミドの中でも、ポリイミドにキノンジアジド化合物を混合したポジ型感光性ポリイミドを用いることが好ましい。このポジ型感光性ポリイミドは、市販されている一般的なものでもよいし、市販の溶媒可溶型キノンジアジド化合物を混合し、感光性を付与したものでもよい。たとえば、アルカリ現象型のポジ型感光性ポリイミドとして、日産化学社製RN−902などを用いることができる。 Among the photosensitive polyimides, it is preferable to use a positive photosensitive polyimide obtained by mixing a quinonediazide compound with polyimide. This positive photosensitive polyimide may be a commercially available general one, or a commercially available solvent-soluble quinonediazide compound mixed to impart photosensitivity. For example, RN-902 manufactured by Nissan Chemical Co., Ltd. can be used as the alkaline phenomenon type positive photosensitive polyimide.
次に、図1(a)ないし(e)に示した本発明に係る製造方法の各工程を説明する。 Next, each step of the manufacturing method according to the present invention shown in FIGS. 1 (a) to (e) will be described.
まず銅箔1の一面に、ポジ型感光性ポリイミド2を設ける(図1(a))。これは、スクリーン印刷法で銅箔1の一面にポジ型感光性ポリイミドを塗布し、次いで乾燥することにより行なう。これにより、導体層である銅箔1の感光性ベース層2が形成される。
First, a positive
次に、銅箔1の他面にフォトレジストフィルムをラミネートし、フォトリソグラフ法により導体回路パターンに対応したエッチングレジストのパターンを形成する。そして、銅箔1の他面をエッチングすることにより配線パターンを形成し、エッチングレジストを除去することにより導体回路を形成する(図1(b))。
Next, a photoresist film is laminated on the other surface of the
続いて、配線パターンの上に、スクリーン印刷法によりポジ型感光性ポリイミド層3を塗布し乾燥させると、感光性カバー層3が形成される(図1(c))。
Subsequently, when the positive
この後、銅箔1の両面から感光性ベース層2および感光性カバー層3を露光マスク(図示せず)を介して高圧水銀灯等を用いて露光した後に、水酸化ナトリウム等のアルカリ溶液で現像し、次いでアルコール等の有機溶媒を含有する水溶液や温水によってリンスし露光部分を除去する。これにより、感光性ベース層2、感光性カバー層3につき同時に、接続ランド部4が形成される(図1(d))。
Thereafter, the
最後に、大気雰囲気または窒素雰囲気中で、感光性ベース層2および感光性カバー層3のポリイミドを一括加熱して溶剤および感光剤を揮発除去する。
Finally, the polyimide of the
このようにして、ベース層2およびカバー層3からのアクセスが可能なダブルアクセス型片面可撓性回路基板が完成する(図1(e))。
In this way, a double-access type single-sided flexible circuit board that can be accessed from the
上記実施例では、ポジ型感光性ポリイミドを用いたが、酸、アルカリに耐性のあるものであればその目的の特性に応じて種々選択して使用することができ、有機溶剤現像型のネガ型感光性ポリイミドを用いてもよい。たとえば、有機溶剤現像型の値が型感光性ポリイミドとして、富士フイルムエレクトロニクスマテリアル社製のDurimide7000シリーズを用いることができる。 In the above embodiment, positive photosensitive polyimide was used, but it can be selected and used depending on the intended characteristics as long as it is resistant to acids and alkalis. Photosensitive polyimide may be used. For example, Durimide 7000 series manufactured by FUJIFILM Electronics Materials Co., Ltd. can be used as an organic solvent developing type value photosensitive polyimide.
1 導体層
2 感光性ポリイミドベース層
3 感光性ポリイミドカバー層
4 接続ランド
DESCRIPTION OF
Claims (4)
前記導体層をエッチング加工により配線パターンを形成し、
前記配線パターンの露出面に前記導体層と同様の感光性ポリイミドからなる被覆層を配し、
前記両被覆層をフォトエッチング加工して開口し、前記配線パターンの両面に接続ランドを形成する
ことを特徴とするダブルアクセス型可撓性回路基板の製造方法。 A laminated board is formed by arranging a coating layer of photosensitive polyimide on one surface of the conductor layer,
Forming a wiring pattern by etching the conductor layer;
Arranging a coating layer made of the same photosensitive polyimide as the conductor layer on the exposed surface of the wiring pattern,
A method of manufacturing a double access type flexible circuit board, wherein both the covering layers are opened by photoetching, and connection lands are formed on both sides of the wiring pattern.
前記感光性ポリイミドは、アルカリ現像型のポジ型感光性ポリイミドである
ことを特徴とするダブルアクセス型可撓性回路基板の製造方法。 In the manufacturing method of the double access type flexible circuit board according to claim 1,
The method for producing a double access flexible circuit board, wherein the photosensitive polyimide is an alkali developing type positive photosensitive polyimide.
前記アルカリ現像型のポジ型感光性ポリイミドは、有機溶媒可溶型ポリイミドにキノンジアジド化合物を混合してなるものである
ことを特徴とするダブルアクセス型可撓性回路基板の製造方法。 In the manufacturing method of the double access type flexible circuit board according to claim 2,
The method for producing a double access flexible circuit board, wherein the alkali developing type positive photosensitive polyimide is obtained by mixing a quinonediazide compound with an organic solvent soluble polyimide.
前記感光性ポリイミドは、有機溶剤現像型のネガ型感光性ポリイミドである
ことを特徴とするダブルアクセス型可撓性回路基板の製造方法。 In the manufacturing method of the double access type flexible circuit board according to claim 1,
The photosensitive polyimide is a negative photosensitive polyimide of an organic solvent development type. A method for producing a double access flexible circuit board.
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JP2005134140A JP2006310689A (en) | 2005-05-02 | 2005-05-02 | Manufacturing method of double-access flexible circuit board |
KR1020060039241A KR20060114647A (en) | 2005-05-02 | 2006-05-01 | Method for producing flexible circuit board of double access type |
TW095115470A TWI384915B (en) | 2005-05-02 | 2006-05-01 | Method for manufacturing double-access-type flexible circuit board |
CN2006100819121A CN1870859B (en) | 2005-05-02 | 2006-05-08 | Manufacturing method of two-face exposed flexible circuit board |
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JP2008288422A (en) * | 2007-05-18 | 2008-11-27 | Kinsus Interconnect Technology Corp | Flexible printed wiring board, and manufacturing method thereof |
JP2016514543A (en) * | 2013-03-26 | 2016-05-23 | グーグル インコーポレイテッド | System and method for encapsulating electronic circuitry in a wearable device |
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TWI577251B (en) * | 2015-12-01 | 2017-04-01 | 同泰電子科技股份有限公司 | Rigid-flex circuit board and manufacturing method thereof |
KR102260413B1 (en) | 2019-10-02 | 2021-06-02 | 한화솔루션 주식회사 | Fpcb manufacturing method of double access method |
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JP2002156758A (en) * | 2000-11-16 | 2002-05-31 | Ube Ind Ltd | Method for producing high-density flexible board using photosensitive polyimide |
JP2002246732A (en) * | 2001-02-16 | 2002-08-30 | Nitto Denko Corp | Method of manufacturing wiring circuit board |
JP2003017815A (en) * | 2001-06-29 | 2003-01-17 | Optrex Corp | Flexible wiring board and manufacturing method therefor |
-
2005
- 2005-05-02 JP JP2005134140A patent/JP2006310689A/en active Pending
-
2006
- 2006-05-01 KR KR1020060039241A patent/KR20060114647A/en not_active Application Discontinuation
- 2006-05-01 TW TW095115470A patent/TWI384915B/en not_active IP Right Cessation
- 2006-05-08 CN CN2006100819121A patent/CN1870859B/en not_active Expired - Fee Related
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JPH04206677A (en) * | 1990-11-30 | 1992-07-28 | Hitachi Chem Co Ltd | Manufacture of double-access flexible printed wiring board |
JPH07307564A (en) * | 1994-05-10 | 1995-11-21 | Hitachi Chem Co Ltd | Manufacture of wiring board |
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JP2002043699A (en) * | 2000-07-27 | 2002-02-08 | Sony Chem Corp | Flexible wiring board and method for manufacturing the same |
JP2002156758A (en) * | 2000-11-16 | 2002-05-31 | Ube Ind Ltd | Method for producing high-density flexible board using photosensitive polyimide |
JP2002246732A (en) * | 2001-02-16 | 2002-08-30 | Nitto Denko Corp | Method of manufacturing wiring circuit board |
JP2003017815A (en) * | 2001-06-29 | 2003-01-17 | Optrex Corp | Flexible wiring board and manufacturing method therefor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008288422A (en) * | 2007-05-18 | 2008-11-27 | Kinsus Interconnect Technology Corp | Flexible printed wiring board, and manufacturing method thereof |
JP2016514543A (en) * | 2013-03-26 | 2016-05-23 | グーグル インコーポレイテッド | System and method for encapsulating electronic circuitry in a wearable device |
Also Published As
Publication number | Publication date |
---|---|
CN1870859A (en) | 2006-11-29 |
CN1870859B (en) | 2012-06-27 |
KR20060114647A (en) | 2006-11-07 |
TW200640314A (en) | 2006-11-16 |
TWI384915B (en) | 2013-02-01 |
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