JP2006303202A - Printed board with built-in component and manufacturing method thereof - Google Patents

Printed board with built-in component and manufacturing method thereof Download PDF

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Publication number
JP2006303202A
JP2006303202A JP2005123133A JP2005123133A JP2006303202A JP 2006303202 A JP2006303202 A JP 2006303202A JP 2005123133 A JP2005123133 A JP 2005123133A JP 2005123133 A JP2005123133 A JP 2005123133A JP 2006303202 A JP2006303202 A JP 2006303202A
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Prior art keywords
electronic component
component
wiring board
printed wiring
built
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Japanese (ja)
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Koichi Takahashi
浩一 高橋
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Nippon CMK Corp
CMK Corp
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Nippon CMK Corp
CMK Corp
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Priority to JP2005123133A priority Critical patent/JP2006303202A/en
Publication of JP2006303202A publication Critical patent/JP2006303202A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a printed board with built-in component capable of solving a problem of unnecessary radiation noise due to an electronic component arranged in the printed board and capable of easily drawing out a circuit wire from the electronic component, and to provide a method for manufacturing the printed board with built-in electronic component. <P>SOLUTION: In the printed board with built-in component where the electronic component 6 is arranged on a conductive layer of an inner layer part of the printed board, a cover-shaped shielding body 34 of which the side face and upper surface consist of a metallic conductor is arranged on the upper part of the electronic component 6, the electronic component 6 is arranged in the cover-shaped shielding body, and space between the cover-shaped shielding body 34 and the electronic component 6 is tightly sealed by insulating resin. The method for manufacturing the printed board with built-in electronic component comprises a process for forming a circuit wire from a pad in which the electronic component 6 is arranged, a process for laminating prepreg with a punching and a double-sided copper-plated laminating board with a through-hole on the upper part of the electronic component 6, and a process for applying a cover-state conductor plating on the upper part of the through-hole. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、内蔵された電子部品からの不要輻射雑音を遮蔽し、かつ、外部雑音から当該内蔵された電子部品及び回路配線を保護する電子部品内蔵型のプリント配線板及びその製造方法に関する。   The present invention relates to an electronic component built-in type printed wiring board that shields unnecessary radiation noise from an embedded electronic component and protects the embedded electronic component and circuit wiring from external noise, and a method of manufacturing the same.

近年、プリント配線板の小型化、高密度化が求められる中で、従来はプリント配線板の表面に実装されていた各種の電子部品をプリント配線板の内部に導入することによって得られる部品内蔵型のプリント配線板に関する技術がある。この部品内蔵型のプリント配線板は、電子部品がプリント配線板の内部に導入された構造となっているため、表面実装部の小スペース化や高密度化に対応でき、前記プリント配線板のさらなる発展に大きく寄与するものである。   In recent years, there has been a demand for miniaturization and higher density of printed wiring boards. In the past, various types of electronic components that were mounted on the surface of printed wiring boards have been incorporated into printed wiring boards. There are technologies related to printed wiring boards. This component built-in type printed wiring board has a structure in which electronic components are introduced into the printed wiring board, so that it can cope with a reduction in the space and density of the surface mounting portion, It greatly contributes to development.

加えて、部品内蔵型のプリント配線板は電気的な配線構造が、従来の平面的な表面実装部からプリント配線板の内層部分を使用することで、例えば、LSI直下に受動部品を配置する構造などの立体的な配置が可能になるため、LSIの高速伝送時のリードインダクタンスを低減することが可能になり、動作に対応するための信号配線を最適化にする際に有効であるなどの利点も有する。   In addition, the component built-in type printed wiring board has an electrical wiring structure that uses the inner layer portion of the printed wiring board from the conventional planar surface mounting portion, for example, a structure in which passive components are arranged directly under the LSI. This makes it possible to reduce the lead inductance during high-speed transmission of LSI, and is effective in optimizing the signal wiring to support the operation. Also have.

しかしながら、部品内蔵型のプリント配線板には、不要輻射雑音の問題がある。これは、電子部品の高機能化や高速化に伴い、電子部品から発生する電磁波が、通信障害や電子部品間の干渉による誤作動などを生じさせるものとして大きな問題となっていた。また同様に、埋設した電子部品及び回路配線から発生する不要輻射雑音により、周辺に配置されている電子部品及び回路配線が誤作動などを生じさせることもあり、この点でも大きな問題となっていた。   However, the component built-in type printed wiring board has a problem of unnecessary radiation noise. This has been a major problem as electromagnetic waves generated from electronic components cause malfunctions due to communication failure and interference between electronic components, as electronic components become more functional and faster. Similarly, unnecessary radiation noise generated from the embedded electronic components and circuit wiring may cause malfunctions in the electronic components and circuit wiring arranged in the vicinity, which is also a big problem in this respect. .

斯かる部品内蔵型のプリント配線板における不要輻射雑音の問題を解決する技術としては、例えば図7に示されるようなプリント配線板が既に報告されている(特許文献1参照)。   As a technique for solving the problem of unnecessary radiation noise in such a component built-in type printed wiring board, for example, a printed wiring board as shown in FIG. 7 has already been reported (see Patent Document 1).

すなわち、電子部品80から発生する不要輻射雑音を遮蔽するために、電子部品80を実装するエリア内部である収納部に蓋をする上部配線板72の下側片面、あるいは両面に金属膜78を形成するものであり、さらに、電子部品80を実装するエリアとして各種形状の収納穴が設けられた中部配線板73の収納穴の内壁側面部に金属膜である金属導体層74を設けることで、この電子部品を実装するエリアが外部から完全に密閉され、この密閉されたエリア内部に気密空間75を有する構成により解決するものである。   That is, in order to shield unnecessary radiation noise generated from the electronic component 80, a metal film 78 is formed on one or both sides of the lower side of the upper wiring board 72 that covers the storage portion inside the area where the electronic component 80 is mounted. Furthermore, by providing a metal conductor layer 74, which is a metal film, on the inner wall side surface portion of the storage hole of the central wiring board 73 provided with storage holes of various shapes as an area for mounting the electronic component 80, The problem is solved by a configuration in which an area for mounting an electronic component is completely sealed from the outside, and an airtight space 75 is provided inside the sealed area.

このような図7に示される構造体は、電子部品を実装するエリアが外部から完全に密閉されることで、電子部品80から発生する不要輻射雑音を遮蔽し、隣接する他の電子部品への干渉を抑制することができる構造体となり、前記の不要輻射雑音などの問題を解消し得る。   In such a structure shown in FIG. 7, the area where the electronic component is mounted is completely sealed from the outside, so that unnecessary radiation noise generated from the electronic component 80 is shielded, and other adjacent electronic components are shielded. It becomes a structure which can suppress interference and can solve problems, such as the above-mentioned unnecessary radiation noise.

しかしながら、図7に示される構造体は、電子部品80からの配線の引き回しにおいて問題を生じる。すなわち、電子部品80を密閉構造とすることで不要輻射雑音の問題が解消するが、密閉構造としていることで電子部品80からの配線は、下部配線板71に配置される、はんだバンプ79と接続ランド70及び非貫通導通穴77を介して、電子部品80の下層へ引き出すことが必要になり、同層に配置される他の隣接する電子部品との接続が困難であり、高密度化するプリント配線板を背景に回路配線の引き回しにおいて問題となっていたのが実状であった。   However, the structure shown in FIG. 7 causes a problem in routing the wiring from the electronic component 80. That is, the problem of unnecessary radiation noise is solved by making the electronic component 80 a sealed structure, but the wiring from the electronic component 80 is connected to the solder bump 79 disposed on the lower wiring board 71 by making the sealed structure. It is necessary to draw out to the lower layer of the electronic component 80 through the land 70 and the non-penetrating conduction hole 77, and it is difficult to connect with other adjacent electronic components arranged in the same layer, and the print density is increased. The actual situation was a problem in the routing of circuit wiring against the background of the wiring board.

特開2002−84070号公報JP 2002-84070 A

このような背景に基づき本発明が解決しようとする課題は、プリント配線板の内部に配置された電子部品による不要輻射雑音の問題を解消することに加え、当該電子部品からの回路配線を引き出し易くすることで、電子部品の高密度な配置が容易に行なえる部品内蔵型のプリント配線基板を提供することにある。   Based on this background, the problem to be solved by the present invention is to solve the problem of unnecessary radiation noise caused by electronic components arranged inside the printed wiring board, and to easily draw out circuit wiring from the electronic components. Accordingly, it is an object of the present invention to provide a component-embedded printed wiring board that can easily arrange high-density electronic components.

本発明者は、上記課題を解決するために種々検討を重ねた。その結果、プリント配線板の内部に配置される電子部品の上方面に、絶縁基材と予め当該電子部品を収納できる形状に加工したスルーホールを順に積み重ね、当該スルーホールの上面に導体を設けることにより形成される蓋型形状のシールド体により覆われた電子部品を有する部品内蔵型プリント配線板が有効であることを見出して発明を完成するに至った。   The inventor has made various studies in order to solve the above problems. As a result, on the upper surface of the electronic component placed inside the printed wiring board, an insulating base material and through holes that have been processed in advance to accommodate the electronic component are sequentially stacked, and a conductor is provided on the upper surface of the through hole. The present invention has been completed by finding that a component-embedded printed wiring board having an electronic component covered with a lid-shaped shield body formed by the above method is effective.

すなわち、本発明は、プリント配線板の内層部の導体層に電子部品が配置された部品内蔵型プリント配線板において、当該電子部品の上方面に、側面部と上面部とが金属導体からなる蓋型形状のシールド体が設けられていると共に、当該蓋型形状のシールド体の内部に電子部品が配置され、かつ当該蓋型形状のシールド体と前記電子部品との間が絶縁樹脂にて密封封止されていることを特徴とする部品内蔵型プリント配線板により上記課題を解決したものである。   That is, the present invention provides a component-embedded printed wiring board in which an electronic component is arranged on a conductor layer of an inner layer portion of the printed wiring board, and a lid having a side surface portion and an upper surface portion made of a metal conductor on the upper surface of the electronic component. A mold-shaped shield body, an electronic component is disposed inside the lid-shaped shield body, and the lid-shaped shield body and the electronic component are hermetically sealed with an insulating resin. The above-described problems are solved by a component built-in type printed wiring board characterized by being stopped.

また、本発明は、前記シールド体と、前記電子部品が配置された導体層とが非接触状態となっていることを特徴とする部品内蔵型プリント配線板により上記課題を解決したものである。   In addition, the present invention solves the above-described problems with a component-embedded printed wiring board characterized in that the shield body and the conductor layer on which the electronic component is disposed are in a non-contact state.

また、本発明は、前記シールド体内部において電子部品が配置されたパッドと、当該パッドと同一層部におけるシールド体外部の他のパッドとが回路配線により接続されていることを特徴とする部品内蔵型プリント配線板により上記課題を解決したものである。   Further, the present invention provides a built-in component characterized in that a pad in which an electronic component is arranged inside the shield body and another pad outside the shield body in the same layer as the pad are connected by circuit wiring. The above-mentioned problem is solved by a mold printed wiring board.

また、本発明は、前記電子部品が、受動部品、能動部品又はモジュールであることを特徴とする部品内蔵型プリント配線板により上記課題を解決したものである。   In addition, the present invention solves the above-described problems with a component-embedded printed wiring board, wherein the electronic component is a passive component, an active component, or a module.

また、本発明は、プリント配線板の内層部に電子部品が配置された部品内蔵型プリント配線板の製造方法において、当該電子部品が配置されるパッド部から回路配線を形成する工程と、当該電子部品の上方面に、あらかじめ抜き部を設けたプリプレグとあらかじめスルーホールを設けた両面銅張り積層板とを積層する工程と、当該スルーホールの上方面に蓋状態の導体めっきを付与する工程からなることを特徴とする部品内蔵型プリント配線板の製造方法により上記課題を解決したものである。   According to another aspect of the present invention, there is provided a method of manufacturing a component-embedded printed wiring board in which an electronic component is disposed on an inner layer portion of the printed wiring board, and a step of forming circuit wiring from a pad portion where the electronic component is disposed; It consists of a step of laminating a prepreg provided with a punched portion in advance on the upper surface of the part and a double-sided copper-clad laminate provided with a through hole in advance, and a step of applying a conductor plating in a lid state on the upper surface of the through hole. The above-described problems are solved by a method for manufacturing a component built-in type printed wiring board.

本発明によれば、プリント配線板の内層部に配置された電子部品の上方面に、側面部と上面部とが金属導体からなる蓋型形状のシールド体が配置されているので、埋設した電子部品から発生する不要輻射雑音を遮蔽することができる結果、隣接する他の電子部品への干渉を抑制でき、同時に外部雑音から埋設した電子部品及び回路への影響を防ぐこともできる。しかも、当該電子部品からの回路配線の引回しを、電子部品が配置された同一の層にて行なうことができる。   According to the present invention, the lid-shaped shield body having the side surface portion and the upper surface portion made of the metal conductor is disposed on the upper surface of the electronic component disposed in the inner layer portion of the printed wiring board. As a result of the unnecessary radiation noise generated from the components being shielded, interference with other adjacent electronic components can be suppressed, and at the same time, the influence of external noise on the embedded electronic components and circuits can be prevented. In addition, the circuit wiring from the electronic component can be routed in the same layer where the electronic component is disposed.

以下本発明の実施の形態を図面と共に説明する。   Embodiments of the present invention will be described below with reference to the drawings.

まず、第1の実施の形態について、図1〜図4を用いて説明する。   First, a first embodiment will be described with reference to FIGS.

図1(a)に示したように、まず、始めに絶縁材2の両面に銅箔1a及び銅箔1bを積層してなる両面銅張り積層板10を用意する。次いで、図1(b)に示したように両面銅張り積層板10に層間接続ビア3を設けた後に、片面の銅箔1aのみを回路形成し、回路配線4及び電子部品を実装するためのパッド5を設ける。   As shown in FIG. 1A, first, a double-sided copper-clad laminate 10 in which a copper foil 1a and a copper foil 1b are laminated on both sides of an insulating material 2 is prepared. Next, after providing the interlayer connection via 3 in the double-sided copper-clad laminate 10 as shown in FIG. 1B, a circuit is formed only on one side of the copper foil 1a, and the circuit wiring 4 and the electronic component are mounted. A pad 5 is provided.

前記層間接続ビア3は、主にレーザーによるコンフォーマルビア形成方法やカッパーダイレクトビア形成方法などを用いて穴あけ形成した後に、導体めっきを付与して形成する。   The interlayer connection via 3 is formed by forming a hole mainly using a conformal via forming method or a copper direct via forming method using a laser, and then applying conductor plating.

また、銅箔1aの回路形成に関しては、ドライフィルムを使用した露光、現像、エッチング、剥離の工程を順次行なうサブトラクティブ回路形成方法などにより形成する。ここで、図1(b)における回路配線4及び電子部品を実装するためのパッド5の各導体の厚みは、要求されるプリント配線板の構造に従い調整する。図1(b)上においては、導体のエッチング量を調整したところで、回路配線4の導体厚みをパッド5の導体厚みより薄い状態を示しているが、前記両方の導体厚みは同一の厚さでも良い。   Further, regarding the circuit formation of the copper foil 1a, it is formed by a subtractive circuit forming method or the like in which the steps of exposure, development, etching, and peeling using a dry film are sequentially performed. Here, the thickness of each conductor of the circuit wiring 4 and the pad 5 for mounting the electronic component in FIG. 1B is adjusted according to the required structure of the printed wiring board. In FIG. 1 (b), when the etching amount of the conductor is adjusted, the conductor thickness of the circuit wiring 4 is shown to be thinner than the conductor thickness of the pad 5, but both the conductor thicknesses may be the same. good.

次いで、パッド5上に電子部品6を配置し、配置後は図1(c)に示される電子部品実装後のプリント配線板11を得る。ここでの電子部品6の配置方法としては、はんだペーストを使用した実装の形態の他に、導電性フィルム接着剤や異方性導電接着剤を使用したプレイスメント方式の実装形態などにより行われる。   Subsequently, the electronic component 6 is arrange | positioned on the pad 5, and the printed wiring board 11 after the electronic component mounting shown by FIG.1 (c) is obtained after arrangement | positioning. As a method for arranging the electronic component 6 here, in addition to a mounting form using a solder paste, a placement type mounting form using a conductive film adhesive or an anisotropic conductive adhesive is used.

図1(c)に示される電子部品実装後のプリント配線板11は、電子部品6が配置されるパッド5aから2通りの回路配線の引き回しが行なえる。すなわち、1つは電子部品6が配置されるパッド5aから層間接続ビア3を介して下層の導体への接続方法、もう1つは電子部品6が配置されるパッド5aから回路配線4を介して同一の層に配置される他のパッド5bへの接続方法である。   The printed wiring board 11 after mounting the electronic component shown in FIG. 1C can perform two types of circuit wiring from the pad 5a on which the electronic component 6 is arranged. That is, one is a connection method from the pad 5a on which the electronic component 6 is disposed to the underlying conductor via the interlayer connection via 3, and the other is from the pad 5a on which the electronic component 6 is disposed via the circuit wiring 4. This is a connection method to another pad 5b arranged in the same layer.

また、ここで使用される電子部品6としては、チップ形状の抵抗体やコンデンサなどの受動部品、もしくはICやLSIなどの能動部品、あるいはモジュールなどが好適に使用される。   In addition, as the electronic component 6 used here, a passive component such as a chip-shaped resistor or capacitor, an active component such as an IC or LSI, or a module is preferably used.

次に、図2を用い、前記電子部品6をプリント配線板の内部に内蔵してなる構造体及び電子部品6からの回路配線の引き回し方法について説明する。   Next, a structure in which the electronic component 6 is built in the printed wiring board and a method for routing circuit wiring from the electronic component 6 will be described with reference to FIG.

まず、図2(a)に示されるように、電子部品6をプリント配線板の上に配置してなる先に得られた電子部品実装後のプリント配線板11を使用し、当該電子部品6の上方面よりあらかじめ抜き部25を設けたプリプレグ24及びあらかじめスルーホール23を設けた両面銅張り積層板20を順に重ねて積層する。   First, as shown in FIG. 2 (a), a printed wiring board 11 after mounting an electronic component obtained by placing the electronic component 6 on a printed wiring board is used, and the electronic component 6 From the upper surface, a prepreg 24 provided with a punched portion 25 in advance and a double-sided copper-clad laminate 20 provided with a through hole 23 in advance are stacked in order.

ここで、プリプレグ24の抜き部25はルーター穴あけなどにより行ない、当該抜き部25の大きさは電子部品6と同様の大きさもしくは電子部品6より若干大きく形成することが良い。これは、使用するプリプレグ24により積層加熱時の流れる樹脂成分の量が異なり、当該プリプレグ24の樹脂流れ量を考慮するためである。   Here, the extraction part 25 of the prepreg 24 is performed by router drilling or the like, and the size of the extraction part 25 is preferably the same size as the electronic component 6 or slightly larger than the electronic component 6. This is because the amount of the resin component that flows during the lamination heating differs depending on the prepreg 24 to be used, and the amount of resin flow of the prepreg 24 is taken into consideration.

また、前記両面銅張り積層板20へのスルーホール23の形成は、例えば次の手順にて行なう。始めに、両面銅張り積層板を用意して、ドリルもしくはルーターによりスルーホール用の穴あけを行なう。当該スルーホールの開口部の大きさは前記プリプレグ24に設けた抜き部25と同様の大きさもしくは若干大きく形成することが良い。これは、積層加熱時にプリプレグ24より流れる樹脂成分を当該スルーホール23内に充填させるためである。   The through hole 23 is formed in the double-sided copper-clad laminate 20 by the following procedure, for example. First, prepare a double-sided copper-clad laminate and drill through holes with a drill or router. The size of the opening of the through hole is preferably the same as or slightly larger than that of the punched portion 25 provided in the prepreg 24. This is because the through hole 23 is filled with the resin component flowing from the prepreg 24 during the lamination heating.

次いで、スルーホールの開口部をデスミアなどにより洗浄し、銅めっき22を付着させた後に、求められる構造に回路形成を行なう。スルーホール23部の回路形成に関しては、ドライフィルムを使用した露光、現像、エッチング、剥離の工程を順次行なうサブトラクティブ回路形成方法などにより形成する。ここで同時に、図1(a)におけるスルーホール23の付近において求められる構造の回路配線(図示省略)を形成しても良い。このようにして、図2(a)に示される両面銅張り積層板20を得る。   Next, the opening of the through hole is washed with desmear or the like, and after the copper plating 22 is attached, a circuit is formed in the required structure. With respect to the circuit formation of the through-hole 23 part, it is formed by a subtractive circuit formation method or the like in which the steps of exposure, development, etching and peeling using a dry film are sequentially performed. At the same time, circuit wiring (not shown) having a structure required in the vicinity of the through hole 23 in FIG. In this way, the double-sided copper-clad laminate 20 shown in FIG. 2A is obtained.

ここでのスルーホール23の構造は、図2(a)に示される垂直な壁面の構造でも良く、また、スルーホール23の壁面はテーパー角度を有する斜めの形状でも良い。これは、前記のような積層加熱時にプリプレグ24より流れる樹脂成分を当該スルーホール23内に充填し易い構造体となるためである。さらに、スルーホール23は電子部品6をシールドすることを主要な役割としているため、当該電子部品6のシールドが行ない易い構造であることが重要である。そのため、スルーホール23の構造は、円形構造の他に四角形構造や多角形構造として使用することが良い。   The structure of the through hole 23 may be a vertical wall surface structure shown in FIG. 2A, and the wall surface of the through hole 23 may be an oblique shape having a taper angle. This is because the resin component that flows from the prepreg 24 at the time of laminating heating as described above becomes a structure that can be easily filled into the through hole 23. Furthermore, since the through hole 23 has a main role of shielding the electronic component 6, it is important that the through hole 23 has a structure that can easily shield the electronic component 6. Therefore, the through hole 23 is preferably used as a quadrangular structure or a polygonal structure in addition to the circular structure.

次いで、図2(a)に示される構造体で積層加熱プレスを行なうことにより、加熱にてプリプレグ24内の樹脂26の成分が流れ、電子部品6の周辺を隙間無く、密封封止状態にすると共に、両面銅張り積層板20のスルーホール23内を隙間無く充填し、積層終了後には図2(b)に示されるL1からL4の4層構造の部品内蔵型のプリント配線板が得られる。   Next, by performing a laminated heat press with the structure shown in FIG. 2A, the components of the resin 26 in the prepreg 24 flow by heating, and the periphery of the electronic component 6 is sealed and sealed without any gaps. At the same time, the through hole 23 of the double-sided copper-clad laminate 20 is filled without any gaps, and after completion of the lamination, a four-layered component built-in type printed wiring board of L1 to L4 shown in FIG. 2B is obtained.

ここで、図2(b)に示される構造体において、プリプレグ24内の樹脂26が盛り上がりL1部において凸部となる場合がある。このような場合には、積層終了後にバフ研磨などによる物理研磨処理を行ない、表層部分の平坦化を行ない、図2(b)に示されるような表面が平坦な構造体を得る。   Here, in the structure shown in FIG. 2 (b), the resin 26 in the prepreg 24 may rise and become a convex portion at the L1 portion. In such a case, a physical polishing process such as buffing is performed after the lamination is completed, and the surface layer portion is flattened to obtain a structure having a flat surface as shown in FIG.

図2(b)に示される構造体は、プリント配線板の内層部に配置された電子部品6の側面部にスルーホール23からなるシールド体を配置した構造となり、電子部品6から発生する不要輻射雑音を遮蔽し、また、隣接する他の電子部品から干渉を抑制することができる。   The structure shown in FIG. 2B has a structure in which a shield body made of a through hole 23 is arranged on the side surface portion of the electronic component 6 arranged in the inner layer portion of the printed wiring board, and unnecessary radiation generated from the electronic component 6 is obtained. Noise can be shielded and interference from other adjacent electronic components can be suppressed.

また、前記スルーホール23からなるシールド体は、図2(b)に示される構造体においてL1及びL2に位置する。すなわち、前記スルーホール23からなるシールド体は、電子部品6が配置されるパッド5や回路配線4からなるL3の導体層と非接触状態の構造となる。   The shield body composed of the through hole 23 is located at L1 and L2 in the structure shown in FIG. That is, the shield body formed of the through hole 23 has a structure in a non-contact state with the L3 conductor layer including the pad 5 on which the electronic component 6 is disposed and the circuit wiring 4.

また、当該電子部品6は実装パッド5aに配置され、当該から実装パッド5aの回路配線4の引回しが、同一の層(図2(b)内L3層目)にて行なえることとなり、他のパッド5bとの電気的な接続が可能になる。さらに、電子部品6は実装パッド5aに配置され、当該から実装パッド5aから層間接続ビア3を介して下層(図2(b)内L4層目)への配線の引き回しが可能になる。   Further, the electronic component 6 is arranged on the mounting pad 5a, and the circuit wiring 4 of the mounting pad 5a can be routed on the same layer (L3 layer in FIG. 2B). The electrical connection with the pad 5b becomes possible. Furthermore, the electronic component 6 is disposed on the mounting pad 5a, and from there, wiring can be routed from the mounting pad 5a to the lower layer (L4 layer in FIG. 2B) via the interlayer connection via 3.

次いで、図2(b)に示される構造体の表面に化学銅めっき及び電解銅めっきを順に行ない、銅めっき31が付着された図3(a)に示される構造体を得る。   Next, chemical copper plating and electrolytic copper plating are sequentially performed on the surface of the structure shown in FIG. 2B to obtain the structure shown in FIG. 3A to which the copper plating 31 is attached.

次いで、図3(a)に示される構造体の表面に付着された銅めっき31部の回路形成をサブトラクティブ方法などにより行ない、スルーホール23に接続される蓋部34の形成及び必要とされる回路配線を形成し、図3(b)に示される構造体を得る。   Next, the circuit formation of the 31 parts of the copper plating attached to the surface of the structure shown in FIG. 3A is performed by a subtractive method or the like, and the formation of the lid part 34 connected to the through hole 23 is required. Circuit wiring is formed to obtain the structure shown in FIG.

ここで、当該図3(b)に示される構造体は、プリント配線板の内層部に配置された電子部品6の上方面に、スルーホール23による側面部と蓋部34による上面部とが金属導体からなる蓋型形状のシールド体を配置した構造となっている。   Here, in the structure shown in FIG. 3B, the side surface portion by the through hole 23 and the upper surface portion by the lid portion 34 are metal on the upper surface of the electronic component 6 disposed in the inner layer portion of the printed wiring board. A lid-shaped shield body made of a conductor is arranged.

プリント配線板の内層部に配置された電子部品6の上方面に、側面部と上面部とが金属導体からなる蓋型形状のシールド体を配置することで、埋設した電子部品6から発生する不要輻射雑音を遮蔽し、隣接する他の電子部品への干渉を抑制でき、同時に外部雑音から埋設した電子部品及び回路への影響を防ぐ効果も有する。   By disposing a lid-shaped shield body having a side surface portion and an upper surface portion made of a metal conductor on the upper surface of the electronic component 6 disposed in the inner layer portion of the printed wiring board, there is no need to generate from the embedded electronic component 6 It can shield radiation noise, suppress interference with other adjacent electronic components, and at the same time, has an effect of preventing the influence of external noise on embedded electronic components and circuits.

また、図3(b)に示される構造体において、電子部品6の下方面に前記回路形成の際に、電子部品6よりも面積の広い銅部36を形成することで、当該銅部36は電子部品6の下方面のシールドとしても良い。これは、前記電子部品6を外部雑音より保護する際に、電子部品6の上方面と下方面の両面でシールドした方が効果的であり、加えて、前記回路形成により当該銅部36は容易に形成できる利点を有するためである。   Further, in the structure shown in FIG. 3B, the copper part 36 is formed on the lower surface of the electronic component 6 by forming the copper part 36 having a larger area than the electronic component 6 when forming the circuit. It is good also as a shield of the lower surface of the electronic component 6. FIG. This is because when the electronic component 6 is protected from external noise, it is more effective to shield both the upper surface and the lower surface of the electronic component 6. In addition, the copper portion 36 can be easily formed by the circuit formation. This is because it has the advantage that it can be formed.

さらに、図3(b)に示される構造体において、電子部品6の上方面の蓋部34及び下方面の銅部36は、平面で平坦な構造であるため電源層として使用することができる。   Further, in the structure shown in FIG. 3B, the lid 34 on the upper surface and the copper portion 36 on the lower surface of the electronic component 6 can be used as a power supply layer because they have a flat and flat structure.

次に、図3(b)に示される構造体へのビルトアップ構造を図4を用いて説明する。   Next, the built-up structure to the structure shown in FIG. 3B will be described with reference to FIG.

図4では、先に得られた図3(b)に示される構造体に、プリプレグ32及び銅箔を積層により順に積み重ね、層間接続ビア3を設けた後に、回路形成によりパッド5及び必要とされる回路配線35を形成したものである。このように、プリプレグ32及び銅箔を積層により順に積み重ねることで目的とする層数を有する部品内蔵型の多層プリント配線板を形成することができる。   In FIG. 4, after the prepreg 32 and the copper foil are sequentially stacked on the structure shown in FIG. 3 (b), the interlayer connection via 3 is provided, and then the pads 5 and the required are formed by circuit formation. Circuit wiring 35 is formed. In this manner, a component built-in type multilayer printed wiring board having a desired number of layers can be formed by sequentially stacking the prepreg 32 and the copper foil in a stacked manner.

図4に示される構造体は、本発明における部品内蔵型プリント配線板の構造体である。当該構造体の機能としては、プリント配線板の内層部に配置された電子部品6の上方面に、スルーホール23からなる側面部と蓋部34からなる上面部とが金属導体からなる蓋型形状のシールド体を配置することで、埋設した電子部品6から発生する不要輻射雑音を遮蔽し、隣接する他の電子部品への干渉を抑制でき、同時に外部雑音から埋設した電子部品及び回路への影響を防ぐ。   The structure shown in FIG. 4 is a structure of a component built-in type printed wiring board according to the present invention. As a function of the structure, a lid-type shape in which a side surface portion made of a through hole 23 and an upper surface portion made of a lid portion 34 are made of a metal conductor on the upper surface of the electronic component 6 arranged in the inner layer portion of the printed wiring board. By arranging the shield body, unnecessary radiation noise generated from the embedded electronic component 6 can be shielded, interference with other adjacent electronic components can be suppressed, and at the same time, the influence on the embedded electronic components and circuits from external noise prevent.

また、電子部品6が配置された導体層と、前記蓋型形状のシールド体とが非接触状態となっているため、当該非接触状態の箇所において回路配線の配置が可能になる結果、電子部品6からの回路配線の引き回しが広範囲に行なえるので有利である。   In addition, since the conductor layer on which the electronic component 6 is arranged and the lid-shaped shield body are in a non-contact state, circuit wiring can be arranged at the non-contact state, and as a result, the electronic component This is advantageous because the circuit wiring from 6 can be routed over a wide range.

さらに、図3(b)に示される構造説明において記載した如く、電子部品6の上方面の蓋部34及び下方面の銅部36は、平面で平坦な構造であるため電源層として使用することができる。そのために、図4に示される構造体において、蓋部34及びの銅部36の外層方面に回路配線35を形成した場合に、当該回路配線35は信号線として使用することができることから伝送線路となり、下層が電源グランド層であることからマイクロストリップラインを形成できるので有利である。   Further, as described in the structural description shown in FIG. 3B, the upper cover portion 34 and the lower copper portion 36 of the electronic component 6 have a flat and flat structure and should be used as a power supply layer. Can do. Therefore, in the structure shown in FIG. 4, when the circuit wiring 35 is formed in the outer layer direction of the lid portion 34 and the copper portion 36, the circuit wiring 35 can be used as a signal line. Since the lower layer is a power ground layer, it is advantageous because a microstrip line can be formed.

次に、第2の実施の形態について、図5及び図6を用いて説明する。   Next, a second embodiment will be described with reference to FIGS.

図5(a)に示したように、まず、始めに前記図1(c)で得た電子部品実装後のプリント配線板11を用意する。次いで、当該電子部品実装後のプリント配線板11の下方面よりプリプレグ32及び銅箔33を順に配置する。併せて、当該電子部品実装後のプリント配線板11の上方面よりあらかじめ開口部を設けたプリプレグ24、あらかじめスルーホール23を設けた両面銅張り積層板20、プリプレグ32及び銅箔33を順に配置し、積層により接着する。   As shown in FIG. 5A, first, the printed wiring board 11 after the electronic component mounting obtained in FIG. 1C is prepared. Next, the prepreg 32 and the copper foil 33 are sequentially arranged from the lower surface of the printed wiring board 11 after mounting the electronic component. In addition, a prepreg 24 provided with an opening in advance from the upper surface of the printed wiring board 11 after mounting the electronic component, a double-sided copper-clad laminate 20 provided with a through hole 23 in advance, a prepreg 32 and a copper foil 33 are arranged in this order. Adhere by lamination.

ここで、プリプレグ24の開口部はルーター穴あけにより行ない、当該開口部の大きさは電子部品6と同様の大きさもしくは電子部品6より若干大きく形成することが良い。これは、使用するプリプレグ24により積層加熱時の流れる樹脂成分の量が異なり、当該プリプレグ24の樹脂流れ量を考慮するためである。   Here, the opening of the prepreg 24 is preferably formed by router drilling, and the size of the opening is preferably the same size as the electronic component 6 or slightly larger than the electronic component 6. This is because the amount of the resin component that flows during the lamination heating differs depending on the prepreg 24 to be used, and the amount of resin flow of the prepreg 24 is taken into consideration.

また、前記両面銅張り積層板20へのスルーホール23の形成は次の手順にて行なう。始めに、両面銅張り積層板を用意して、ドリルもしくはルーターによりスルーホール用の穴あけを行なう。当該スルーホール開口部の大きさは前記プリプレグ24に設けた抜き部25と同様の大きさもしくは若干大きく形成することが良い。これは、積層加熱時にプリプレグ24より流れる樹脂成分を当該スルーホール23内に充填させるためである。   The through hole 23 is formed in the double-sided copper-clad laminate 20 in the following procedure. First, prepare a double-sided copper-clad laminate and drill through holes with a drill or router. The size of the through hole opening is preferably the same as or slightly larger than that of the punched portion 25 provided in the prepreg 24. This is because the through hole 23 is filled with the resin component flowing from the prepreg 24 during the lamination heating.

ここでのスルーホール23の構造は、図5(a)に示される垂直な壁面の構造でも良く、また、スルーホール23の壁面はテーパー角度を有する斜めの形状でも良い。これは、前記のような積層加熱時にプリプレグ24より流れる樹脂成分を当該スルーホール23内に充填し易い構造体となるためである。   The structure of the through hole 23 here may be the structure of a vertical wall surface shown in FIG. 5A, and the wall surface of the through hole 23 may be an oblique shape having a taper angle. This is because the structure in which the resin component flowing from the prepreg 24 at the time of laminating heating is easily filled in the through hole 23 is obtained.

次いで、前記スルーホール開口部に、銅めっき22を付着させ、また目的とする構造に回路形成を行ない図5(a)に示される両面銅張り積層板20を得る。   Next, copper plating 22 is attached to the through-hole opening, and a circuit is formed in the target structure to obtain a double-sided copper-clad laminate 20 shown in FIG.

図5(a)に示される構造体で積層による加熱を行なうことで、抜き部を設けたプリプレグ24及びプリプレグ32内の樹脂26の成分が流れ、電子部品6の周辺を隙間無く包むとともに、両面銅張り積層板20のスルーホール23内を隙間無く充填し、積層終了後には図5(b)に示される6層構造の部品内蔵型のプリント配線板が得られる。   By heating by lamination with the structure shown in FIG. 5 (a), the components of the resin 26 in the prepreg 24 and the prepreg 32 provided with the punched portion flow, and the electronic component 6 is wrapped around without gaps. The through-hole 23 of the copper-clad laminate 20 is filled without any gaps, and after completion of the lamination, a six-layer structure built-in printed wiring board shown in FIG. 5B is obtained.

次いで、図5(b)に示される6層構造の部品内蔵型のプリント配線板に、スルーホール23に接続されるように層間接続ビア3を設けた後に、表面の銅箔の回路形成をサブトラクティブ方法などにより行ない、蓋部34の形成及び必要とされる回路配線を形成し、図6に示される構造体を得る。   Next, after providing the interlayer connection via 3 so as to be connected to the through hole 23 on the printed wiring board with a built-in component shown in FIG. 6 and the like, and the formation of the lid 34 and the necessary circuit wiring are performed to obtain the structure shown in FIG.

ここで、当該図6に示される構造体は、プリント配線板の内層部に配置された電子部品6の上方面に、スルーホール23及び層間接続ビア3による側面部と、蓋部34による上面部とが金属導体からなる蓋型形状のシールド体を配置した構造となっている。斯かる構造により、電子部品6から発生する不要輻射雑音を遮蔽し、隣接する他の電子部品から干渉を抑制できる。また、当該電子部品6からの回路配線の引回しを、電子部品が配置された同一の層にて行なうことができる。   Here, the structure shown in FIG. 6 includes an upper surface of the electronic component 6 arranged in the inner layer portion of the printed wiring board, a side surface portion by the through hole 23 and the interlayer connection via 3, and an upper surface portion by the lid portion 34. And a lid-shaped shield body made of a metal conductor. With such a structure, unnecessary radiation noise generated from the electronic component 6 can be shielded, and interference from other adjacent electronic components can be suppressed. In addition, the circuit wiring from the electronic component 6 can be routed in the same layer where the electronic component is disposed.

試験例
本発明における、スルーホール23と蓋部34からなる蓋型形状のシールド体について、そのシールド効果を確認するために、電界強度を比較するシミュレーション試験を行なった。シミュレーション試験に使用するプリント配線板の構造体としては、(i)図4に示される部品内蔵型プリント配線板の構造体よりスルーホール23と蓋部34を除いたプリント配線板の構造体(シールド機能が無い構造)と、(ii)図4に示される本発明の部品内蔵型プリント配線板の構造体(シールド機能を有する構造)とを使用した。
Test Example A simulation test for comparing the electric field strength was performed on the lid-shaped shield body including the through hole 23 and the lid portion 34 in the present invention in order to confirm the shielding effect. As a printed wiring board structure used for the simulation test, (i) a printed wiring board structure (shield) excluding the through-hole 23 and the lid 34 from the component built-in printed wiring board structure shown in FIG. The structure having no function) and (ii) the component-embedded printed wiring board structure (structure having a shield function) shown in FIG. 4 were used.

試験方法としては、CST社製の電磁界解析シミュレータ(MW−Studio)を使用して、前記2種の構造体におけるモデルを作製し、非定常解析によって電界強度の比較を検討した。   As a test method, an electromagnetic field analysis simulator (MW-Studio) manufactured by CST was used to prepare models of the two types of structures, and comparison of electric field strength was examined by unsteady analysis.

解析方法としては、埋設された部品が接続される配線の始端部から、電圧0.4[V]、立ち上り時間50[ps]の矩形信号を入力し、当該配線の終端部より出力させる。その時に、埋設された部品の上部1mmの位置に配置した電界強度解析用の測定端子にて、入力信号に対しての電界の強度を時間軸によって解析した。   As an analysis method, a rectangular signal having a voltage of 0.4 [V] and a rise time of 50 [ps] is input from the start end of the wiring to which the embedded component is connected, and is output from the end of the wiring. At that time, the strength of the electric field with respect to the input signal was analyzed on the time axis at the measurement terminal for electric field strength analysis arranged at a position 1 mm above the embedded part.

すなわち、図4に示される部品内蔵型プリント配線板の構造体において、入力端子部90より0.4[V]の矩形信号を入力し、当該矩形信号を出力端子部91より出力させる。その際に、信号の入出力における電界強度の測定箇所を、図4に示される部品内蔵型プリント配線板の蓋部34の上方向部に設置して測定することで、埋設された部品の上部における電界強度の解析を行った。   That is, in the structure of the component built-in type printed wiring board shown in FIG. 4, a rectangular signal of 0.4 [V] is input from the input terminal portion 90, and the rectangular signal is output from the output terminal portion 91. At that time, the measurement location of the electric field intensity at the input / output of the signal is installed on the upper part of the lid part 34 of the component built-in type printed wiring board shown in FIG. Analysis of the electric field strength was performed.

前記測定の結果について、(i)図4に示される部品内蔵型プリント配線板の構造体よりスルーホール23と蓋部34を除いたプリント配線板の構造体(シールド機能が無い構造)の場合を図8(a)に示し、(ii)図4に示される本発明の部品内蔵型プリント配線板の構造体(シールド機能を有する構造)の場合を図8(b)に示した。   With respect to the measurement results, (i) the case of a printed wiring board structure (structure without a shield function) excluding the through hole 23 and the lid 34 from the component built-in printed wiring board structure shown in FIG. FIG. 8B shows the case of the structure (structure having a shield function) of the component built-in type printed wiring board of the present invention shown in FIG.

図8(a)に示されるシールド機能が無い構造の場合、矩形信号入力時に埋設した電子部品の上部の電界強度は最大4500[V/m]となることが確認された。一方、図8(b)に示される本発明のシールド機能を有する構造の場合、矩形信号入力時に埋設した電子部品の上部の電界強度は最大1300[V/m]となることが確認された。したがって、図4に示される本発明のシールド機能を有する部品内蔵型プリント配線板の構造体は、埋設された部品のシールド構造により、矩形信号を入力した時に埋設部品や回路配線から発生する不要輻射雑音を遮蔽する効果が得られたことが確認された。   In the case of the structure without the shielding function shown in FIG. 8A, it was confirmed that the electric field strength at the upper part of the electronic component embedded at the time of inputting the rectangular signal was 4500 [V / m] at the maximum. On the other hand, in the case of the structure having the shielding function of the present invention shown in FIG. 8B, it was confirmed that the electric field strength at the upper part of the electronic component embedded at the time of rectangular signal input was 1300 [V / m] at the maximum. Therefore, the component-embedded printed wiring board structure having the shielding function of the present invention shown in FIG. 4 has unnecessary radiation generated from the embedded component and the circuit wiring when a rectangular signal is input due to the shield structure of the embedded component. It was confirmed that the effect of shielding noise was obtained.

すなわち、前記(i)シールド機能が無い構造の場合には、埋設された電子部品及びその周辺の回路配線から発生する不要輻射雑音の影響を、当該部品の上層に配置した信号線(伝送線路)や電子部品等が受ける不具合を生じる。   That is, (i) in the case of a structure without a shielding function, the signal line (transmission line) arranged on the upper layer of the component is subjected to the influence of unnecessary radiation noise generated from the embedded electronic component and its peripheral circuit wiring. And problems that electronic parts receive.

一方、前記(ii)本発明のシールド機能を有する構造の場合には、埋設された電子部品及びその周辺の回路配線から発生する不要輻射雑音による不具合を防ぐことが可能になり、当該部品の上層に配置した信号線(伝送線路)や電子部品等を配置した場合にも、不要輻射雑音の影響を遮蔽する効果を有する。   On the other hand, in the case of the structure having the shield function of (ii) the present invention, it becomes possible to prevent problems caused by unnecessary radiation noise generated from the embedded electronic component and its peripheral circuit wiring. Even when a signal line (transmission line), an electronic component, or the like arranged in the above is arranged, it has an effect of shielding the influence of unnecessary radiation noise.

加えて、前記埋設された電子部品及びその周辺の回路配線自身も、前記上層に配置した電源や回路配線等からの不要輻射雑音の影響を受けない構造となり、シールド機能を介して互いに干渉しないことで、不要輻射雑音を低減する効果があることが確認された。   In addition, the embedded electronic component and the surrounding circuit wiring itself are not affected by unnecessary radiation noise from the power supply, circuit wiring, etc. arranged in the upper layer, and do not interfere with each other through the shielding function. Thus, it was confirmed that there is an effect of reducing unnecessary radiation noise.

本発明における部品内蔵型プリント配線板は、埋設された電子部品及び回路配線をシールド材で覆うことにより不要輻射雑音を遮蔽し、同時に、外部雑音の影響からも電子部品及び回路配線を保護することが可能になることで、部品内蔵型プリント配線板のEMC(electromagnetic compatibility)特性が向上する。
加えて、雑音対策として部品間などに充分な絶縁スペースを設ける必要がなくなるために、部品内蔵型プリント配線板の高密度化が可能となる。
The printed wiring board with built-in component according to the present invention shields unnecessary radiation noise by covering embedded electronic components and circuit wiring with a shielding material, and at the same time protects electronic components and circuit wiring from the influence of external noise. Therefore, EMC (electromagnetic compatibility) characteristics of the component built-in type printed wiring board are improved.
In addition, since it is not necessary to provide a sufficient insulating space between components as a noise countermeasure, it is possible to increase the density of the component built-in type printed wiring board.

本発明の第1の実施の形態を示す概略断面工程説明図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional process explanatory diagram illustrating a first embodiment of the present invention. 図1に引き続く概略断面工程説明図。FIG. 2 is a schematic cross-sectional process explanatory diagram subsequent to FIG. 1. 図2に引き続く概略断面工程説明図。FIG. 3 is a schematic cross-sectional process explanatory diagram subsequent to FIG. 2. 図3に引き続く概略断面工程説明図。FIG. 4 is a schematic cross-sectional process explanatory diagram subsequent to FIG. 3. 本発明の第2の実施の形態を示す概略断面工程説明図。Schematic cross-sectional process explanatory drawing which shows the 2nd Embodiment of this invention. 図5に引き続く概略断面工程説明図。FIG. 6 is a schematic cross-sectional process explanatory diagram subsequent to FIG. 5. 従来の部品内蔵型プリント配線板の概略断面説明図。The schematic cross-section explanatory drawing of the conventional component built-in type printed wiring board. 試験例における試験結果を示すグラフ。The graph which shows the test result in a test example.

符号の説明Explanation of symbols

1,1a,1b:銅箔
2:絶縁材
3:層間接続ビア
4:回路配線
5,5a,5b:パッド
6:電子部品
10:両面銅張り積層板
11:電子部品実装後のプリント配線板
20:両面銅張り積層板
22:銅めっき
23:スルーホール
24:プリプレグ
25:抜き部
26:樹脂
31:銅めっき
32:プリプレグ
33:銅箔
34:蓋部
35:回路配線
36:銅部
70:接続ランド
71:下部配線版
72:上部配線版
73:中部配線版
74:金属導体層
75:気密空間
77:非貫通導通穴
78:金属膜
79:バンプ
80:電子部品
DESCRIPTION OF SYMBOLS 1, 1a, 1b: Copper foil 2: Insulating material 3: Interlayer connection via 4: Circuit wiring 5, 5a, 5b: Pad 6: Electronic component 10: Double-sided copper clad laminated board 11: Printed wiring board 20 after electronic component mounting : Double-sided copper-clad laminate 22: Copper plating 23: Through hole 24: Pre-preg 25: Extraction part 26: Resin 31: Copper plating 32: Pre-preg 33: Copper foil 34: Lid part 35: Circuit wiring 36: Copper part 70: Connection Land 71: Lower wiring plate 72: Upper wiring plate 73: Middle wiring plate 74: Metal conductor layer 75: Airtight space 77: Non-penetrating conduction hole 78: Metal film 79: Bump 80: Electronic component

Claims (5)

プリント配線板の内層部の導体層に電子部品が配置された部品内蔵型プリント配線板において、当該電子部品の上方面に、側面部と上面部とが金属導体からなる蓋型形状のシールド体が設けられていると共に、当該蓋型形状のシールド体の内部に電子部品が配置され、かつ当該蓋型形状のシールド体と前記電子部品との間が絶縁樹脂にて密封封止されていることを特徴とする部品内蔵型プリント配線板。   In a component built-in type printed wiring board in which electronic components are arranged on a conductor layer of an inner layer portion of the printed wiring board, a lid-shaped shield body having a side surface portion and an upper surface portion made of a metal conductor is provided on the upper surface of the electronic component. Provided that an electronic component is disposed inside the lid-shaped shield body and the gap between the lid-shaped shield body and the electronic component is hermetically sealed with an insulating resin. A printed wiring board with built-in components. 前記シールド体と、前記電子部品が配置された導体層とが非接触状態となっていることを特徴とする請求項1に記載の部品内蔵型プリント配線板。   The component built-in printed wiring board according to claim 1, wherein the shield body and the conductor layer on which the electronic component is disposed are in a non-contact state. 前記シールド体内部において電子部品が配置されたパッドと、当該パッドと同一層部におけるシールド体外部の他のパッドとが回路配線により接続されていることを特徴とする請求項1又は2のいずれか1項に記載の部品内蔵型プリント配線板。   The pad in which the electronic component is disposed inside the shield body and another pad outside the shield body in the same layer portion as the pad are connected by circuit wiring. The component built-in type printed wiring board according to Item 1. 前記電子部品が、受動部品、能動部品又はモジュールであることを特徴とする請求項1〜3のいずれか1項に記載の部品内蔵型プリント配線板。   The component built-in printed wiring board according to claim 1, wherein the electronic component is a passive component, an active component, or a module. プリント配線板の内層部に電子部品が配置された部品内蔵型プリント配線板の製造方法において、当該電子部品が配置されるパッド部から回路配線を形成する工程と、当該電子部品の上方面に、あらかじめ抜き部を設けたプリプレグとあらかじめスルーホールを設けた両面銅張り積層板とを積層する工程と、当該スルーホールの上方面に蓋状態の導体めっきを付与する工程からなることを特徴とする部品内蔵型プリント配線板の製造方法。   In the manufacturing method of the component built-in type printed wiring board in which the electronic component is arranged in the inner layer portion of the printed wiring board, the step of forming the circuit wiring from the pad portion where the electronic component is arranged, and the upper surface of the electronic component, A component comprising: a step of laminating a prepreg provided with a punched portion in advance and a double-sided copper-clad laminate provided with a through hole in advance, and a step of applying a conductor plating in a lid state on the upper surface of the through hole. A method for manufacturing a built-in printed wiring board.
JP2005123133A 2005-04-21 2005-04-21 Printed board with built-in component and manufacturing method thereof Pending JP2006303202A (en)

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008130915A (en) * 2006-11-22 2008-06-05 Murata Mfg Co Ltd Component built-in substrate
JP2008182024A (en) * 2007-01-24 2008-08-07 Dainippon Printing Co Ltd Wiring board including electronic component and method for removing electromagnetic noise of the same
JP2008235527A (en) * 2007-03-20 2008-10-02 Fujitsu Ltd Method of manufacturing component built-in substrate
JP2008283114A (en) * 2007-05-14 2008-11-20 Dainippon Printing Co Ltd Electronic component mounting wiring board, and electromagnetic noise removal method of electronic component mounting wiring board
JPWO2007034629A1 (en) * 2005-09-20 2009-03-19 株式会社村田製作所 Manufacturing method of component built-in module and component built-in module
JP2009147249A (en) * 2007-12-18 2009-07-02 Minami Kk Method of mounting electronic component on printed wiring board
JP2009238850A (en) * 2008-03-26 2009-10-15 Dainippon Printing Co Ltd Electronic component mounted wiring board, electromagnetic noise removing method thereof, and method of manufacturing electronic component mounted wiring board
US8412506B2 (en) 2009-03-02 2013-04-02 Fujitsu Limited Electromagnetic field simulation apparatus and computer readable storage medium storing electromagnetic field simulation program
US8426747B2 (en) 2009-10-26 2013-04-23 Denso Corporation Printed wiring board
JP5541424B2 (en) * 2012-01-11 2014-07-09 株式会社村田製作所 High frequency module
JP2014203951A (en) * 2013-04-04 2014-10-27 大日本印刷株式会社 Component mounting multilayer wiring board
WO2016047446A1 (en) * 2014-09-26 2016-03-31 株式会社村田製作所 Substrate for stacked module, stacked module, and method for manufacturing stacked module
JP2017512424A (en) * 2014-02-26 2017-05-18 エプコス アクチエンゲゼルシャフトEpcos Ag Tunable filter package
CN108807285A (en) * 2017-03-08 2018-11-13 Vega格里沙贝两合公司 Shell for high frequency chip
JP2022031223A (en) * 2020-08-07 2022-02-18 ズハイ アクセス セミコンダクター シーオー.,エルティーディー Embedded type package structure with shield chamber, and method of manufacturing the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1013037A (en) * 1996-06-19 1998-01-16 Ibiden Co Ltd Method for manufacturing multilayer printed wiring board for mounting ic
JPH11103176A (en) * 1997-09-29 1999-04-13 Mitsubishi Electric Corp Multilayered high-frequency circuit board and high-frequency device using the circuit board
JP2001267710A (en) * 2000-03-15 2001-09-28 Sony Corp Electronic circuit device and multilayer printed wiring board
JP2002084070A (en) * 2000-09-08 2002-03-22 Hitachi Aic Inc Multilayer wiring board incorporating electronic part
JP2003031955A (en) * 2001-07-17 2003-01-31 Hitachi Aic Inc Manufacturing method of electronic component built-in type multilayer board and metal core substrate used for the method
JP2004179573A (en) * 2002-11-29 2004-06-24 Sony Corp Substrate with built-in element, and its manufacturing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1013037A (en) * 1996-06-19 1998-01-16 Ibiden Co Ltd Method for manufacturing multilayer printed wiring board for mounting ic
JPH11103176A (en) * 1997-09-29 1999-04-13 Mitsubishi Electric Corp Multilayered high-frequency circuit board and high-frequency device using the circuit board
JP2001267710A (en) * 2000-03-15 2001-09-28 Sony Corp Electronic circuit device and multilayer printed wiring board
JP2002084070A (en) * 2000-09-08 2002-03-22 Hitachi Aic Inc Multilayer wiring board incorporating electronic part
JP2003031955A (en) * 2001-07-17 2003-01-31 Hitachi Aic Inc Manufacturing method of electronic component built-in type multilayer board and metal core substrate used for the method
JP2004179573A (en) * 2002-11-29 2004-06-24 Sony Corp Substrate with built-in element, and its manufacturing method

Cited By (22)

* Cited by examiner, † Cited by third party
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JPWO2007034629A1 (en) * 2005-09-20 2009-03-19 株式会社村田製作所 Manufacturing method of component built-in module and component built-in module
US7885081B2 (en) 2005-09-20 2011-02-08 Murata Manufacturing Co., Ltd. Component incorporating module
JP4766049B2 (en) * 2005-09-20 2011-09-07 株式会社村田製作所 Manufacturing method of component built-in module and component built-in module
JP2008130915A (en) * 2006-11-22 2008-06-05 Murata Mfg Co Ltd Component built-in substrate
JP2008182024A (en) * 2007-01-24 2008-08-07 Dainippon Printing Co Ltd Wiring board including electronic component and method for removing electromagnetic noise of the same
JP2008235527A (en) * 2007-03-20 2008-10-02 Fujitsu Ltd Method of manufacturing component built-in substrate
JP2008283114A (en) * 2007-05-14 2008-11-20 Dainippon Printing Co Ltd Electronic component mounting wiring board, and electromagnetic noise removal method of electronic component mounting wiring board
JP2009147249A (en) * 2007-12-18 2009-07-02 Minami Kk Method of mounting electronic component on printed wiring board
JP2009238850A (en) * 2008-03-26 2009-10-15 Dainippon Printing Co Ltd Electronic component mounted wiring board, electromagnetic noise removing method thereof, and method of manufacturing electronic component mounted wiring board
US8412506B2 (en) 2009-03-02 2013-04-02 Fujitsu Limited Electromagnetic field simulation apparatus and computer readable storage medium storing electromagnetic field simulation program
US8426747B2 (en) 2009-10-26 2013-04-23 Denso Corporation Printed wiring board
JP5541424B2 (en) * 2012-01-11 2014-07-09 株式会社村田製作所 High frequency module
JP2014203951A (en) * 2013-04-04 2014-10-27 大日本印刷株式会社 Component mounting multilayer wiring board
JP2017512424A (en) * 2014-02-26 2017-05-18 エプコス アクチエンゲゼルシャフトEpcos Ag Tunable filter package
US10079586B2 (en) 2014-02-26 2018-09-18 Snaptrack, Inc. Package for a tunable filter
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JPWO2016047446A1 (en) * 2014-09-26 2017-04-27 株式会社村田製作所 LAMINATED MODULE AND METHOD FOR PRODUCING LAMINATED MODULE
US9922918B2 (en) 2014-09-26 2018-03-20 Murata Manufacturing Co., Ltd. Substrate for stacked module, stacked module, and method for manufacturing stacked module
CN108807285A (en) * 2017-03-08 2018-11-13 Vega格里沙贝两合公司 Shell for high frequency chip
CN108807285B (en) * 2017-03-08 2021-12-03 Vega格里沙贝两合公司 Housing for high-frequency chip
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