JP2006292630A - Frequency measuring method for piezoelectric vibrating plate, frequency classifying method for piezoelectric vibrating plate, frequency measuring apparatus for piezoelectric vibrating plate, and frequency classifying apparatus for piezoelectric vibrating plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a frequency measuring method and a frequency measuring apparatus for a piezoelectric vibrating plate, which have good productivity and high reliability in measurement. <P>SOLUTION: First, the height of lower electrodes 31 to 38 is measured to obtain operation correction information. Then, a crystal vibrating plate Q is sucked from a parts feeder by a first transfer device and is successively transferred to the upper surface of the lower electrode 31 positioned in an installation station of an index table. In a measuring station S, a frequency measuring section is installed. Under the instructions of a control section, the operation correction information for the lower electrode 31 is read from a memory 71 first, and an upper electrode approaches the lower electrode by a moving distance on the basis of the operation correction information. The frequency of the crystal vibrating plate Q is measured in a noncontact manner. The crystal vibrating plate Q is transferred from a discharge station O to a storage box by a second transfer device. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a frequency measuring method and a frequency measuring apparatus for a piezoelectric diaphragm such as an AT-cut quartz diaphragm, and also classifies and sorts piezoelectric diaphragms according to the measurement results, and a frequency classification method and a frequency classification apparatus for piezoelectric diaphragms It is about.

 For example, it is known that the frequency of an AT-cut quartz diaphragm depends on its thickness, and a desired frequency is obtained by surface polishing to a predetermined thickness. However, it is unavoidable that the thickness or frequency varies due to manufacturing variations. In practice, the frequency in the base plate state is measured before the excitation electrode forming process, the frequency is grouped for each frequency band, and the amount of excitation electrode formed for each group. (Thickness) was determined.

  For example, as shown in Japanese Patent Application Laid-Open No. 11-142456 (Patent Document 1), the frequency measurement in the base plate state is performed by an air gap method in which the upper electrode is brought into close contact with the piezoelectric resonator placed on the lower electrode. It is known to make measurements. Since the accuracy of such measurement varies depending on the gap (proximity distance), it is important to set an appropriate gap. In Patent Document 1, the upper electrode is measured by a micrometer provided above the upper electrode. Was manually moved up and down to adjust the gap.

  FIG. 4 is a diagram showing a frequency measuring device 9 equipped with such a micrometer. The upper electrode body 93 is brought close to the piezoelectric diaphragm Q mounted on the lower electrode body 36 formed on the index table. The frequency measurement is performed with the predetermined gap L. The adjustment of the gap was performed by a micrometer 91 provided at the upper part of the apparatus.

  By the way, in such an adjustment method, when the upper electrode and the lower electrode are configured as a pair, the gap can be adjusted by determining the descending position of the upper electrode in the initial setting. However, in a configuration in which a plurality of lower electrodes correspond to one upper electrode in a movable state, such as a configuration in which a plurality of lower electrodes are provided in an index table, for example, the height of the lower electrode may vary, so It was difficult to specify the electrode lowering position.

JP-A-2004-191079 (Patent Document 2) is considered as a configuration for eliminating such a problem. The present invention obtains a correction value for each stage by measuring the frequency measurement error in each stage in advance, and eliminates variations in the stage by calculating the correction value even if there are variations in gap dimensions. It is. Such a method is very effective and improves productivity and reliability in a configuration in which a plurality of lower electrode bodies are provided on an index table rotating in a plane. However, when the thickness of the piezoelectric diaphragm is reduced to cope with high frequencies, variations in series resonance resistance values and amplitudes increase, and accurate measurement may not be performed.
JP-A-11-142456 JP 2004-191079 A

  The present invention has been made to solve the above-described problems, and provides a frequency measurement method and a frequency measurement device for a piezoelectric diaphragm which is excellent in productivity and has high reliability in measurement, and the frequency classification of the piezoelectric diaphragm. It is an object to provide a method and a frequency classification device.

According to the present invention, in a configuration in which a plurality of lower electrode bodies are provided on a substrate, height information (height position of the upper surface) for each lower electrode body is obtained in advance, and each lower electrode body is connected to the upper electrode body. The gap (proximity distance) is dynamically adjusted, and can be realized by the following methods and apparatuses.
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According to a first aspect of the present invention, a plurality of lower electrode bodies are provided on a substrate, and the piezoelectric vibration for measuring the frequency of the piezoelectric diaphragm in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the lower electrode body. A frequency measurement method for a plate,
Measuring the height of each lower electrode body provided on the substrate, obtaining the height information as operation correction information when the upper electrode body approaches the lower electrode body; A step of measuring the frequency of the piezoelectric diaphragm while keeping the gap between the two electrode bodies constant by bringing the upper electrode body close to the piezoelectric diaphragm based on the operation correction information with respect to the mounted piezoelectric diaphragm; The frequency measurement method of the piezoelectric diaphragm which has these is characterized.

Such a manufacturing method is suitable for a substrate using an index table that rotates in a plane, and as shown in claim 2, a plurality of lower electrode bodies are formed on the index table that rotates in a plane. A method for measuring the frequency of a piezoelectric diaphragm, which measures the frequency of the piezoelectric diaphragm in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the electrode body,
The height of each of the lower electrode bodies provided in the index table is measured, and based on the information on the respective heights, the upper electrode body moves the distance of movement of the upper electrode body so as to keep the gap between each lower electrode body constant. Obtaining the determined operation correction information, and operating the upper electrode body based on the operation correction information with respect to the piezoelectric diaphragm mounted on the lower electrode body, thereby forming a gap between the upper electrode body and the lower electrode body. And a step of measuring the frequency of the piezoelectric diaphragm in a state of being kept constant.

  If the gap between the lower electrode body and the upper electrode body is too large or too small, the measurement of the piezoelectric diaphragm is adversely affected. For example, about 0.1 mm is preferable, but this dimension varies depending on the frequency of the piezoelectric diaphragm, Adjustment is preferably performed. The height information of the lower electrode body is used as operation correction information when the upper electrode body approaches the lower electrode body, and the amount of movement of the upper electrode body is determined so as to be the optimum gap.

According to a third aspect of the present invention, a plurality of lower electrode bodies are provided on the substrate, and the frequency of the piezoelectric diaphragm is set with the upper electrode body in proximity to the piezoelectric diaphragm mounted on the lower electrode body. A method for measuring the frequency of a piezoelectric diaphragm to be measured,
A position where the oscillation waveform of the main vibration of the piezoelectric diaphragm is maximized by applying an excitation voltage while gradually moving the upper electrode body close to or away from each lower electrode body provided on the substrate. And measuring the frequency of the piezoelectric diaphragm with the gap between the lower electrode body and the upper electrode body adjusted for each lower electrode body. May be.

By obtaining a position where the oscillation waveform of the main vibration becomes maximum (peak), erroneous recognition with other spurious vibrations during frequency measurement can be avoided.

By the way, it is preferable that the upper electrode body be moved up and down in real time. For example, as shown in claim 4, the operation of the upper electrode body is performed by an electric actuator.

  According to a fifth aspect of the present invention, there is provided a method for measuring the height of each of the lower electrode bodies provided on the index table, wherein the upper electrode body attached to the electric actuator is in contact with the lower electrode body. Examples of the method include measuring with the position data of the electrode body, or measuring with the position data of the upper electrode body at the time when contact between both electrode bodies is detected by the proximity sensor.

Furthermore, claim 6 discloses a method for more appropriately adjusting the gap between the lower electrode body and the upper electrode body. In adjusting the gap between the two electrode bodies, a piezoelectric diaphragm is mounted on the lower electrode body. 3. A step of adjusting the gap to a position where the oscillation waveform of the main vibration of the piezoelectric diaphragm is maximized while applying an excitation voltage and gradually moving the upper electrode body closer to or away from the upper electrode body is added. Alternatively, the method for measuring the frequency of the piezoelectric diaphragm according to claim 4 or 5 is described. By obtaining a position where the oscillation waveform of the main vibration reaches a peak, erroneous recognition of other spurious vibrations can be avoided during frequency measurement.

  The present invention also proposes a method of classifying (selecting) the frequency measurement results for each predetermined frequency as a result of the above-mentioned frequency measurement. As shown in claim 7, the piezoelectric device according to any one of claims 1 to 6 is provided. Also disclosed is a frequency classification method for piezoelectric diaphragms, characterized in that the piezoelectric diaphragms are classified into predetermined frequency bands after being measured for the frequency of the diaphragms and stored in a classification box.

  By performing classification based on high-accuracy measurements, it is possible to suppress variations during classification as much as possible, suppress variations during formation of excitation electrodes in the subsequent process, and frequency adjustment work in subsequent processes such as partial vapor deposition Can be done smoothly.

An eighth aspect of the present invention relates to a frequency measuring apparatus, wherein a plurality of lower electrode bodies are formed on the surface, an index table having a mechanism that rotates in a plane, and a mounting station, in which each lower electrode body of the index table is sequentially piezoelectric In the first transfer device on which the diaphragm is mounted and the measurement station, an excitation voltage is applied in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the lower electrode body of the index table, and the piezoelectric diaphragm A frequency measuring device for a piezoelectric diaphragm comprising: a frequency measuring unit for measuring the frequency of the first diaphragm; and a second transfer device for ejecting the piezoelectric diaphragm after frequency measurement of the index table from the index table at a discharge station. Because
The frequency measuring unit measures the height of each lower electrode body provided in the index table, and the operation correction information when the lower electrode body is brought close to the upper electrode body based on the respective height information A frequency measurement device for a piezoelectric diaphragm, comprising: a control unit that obtains a voltage; and an electric actuator that moves the upper electrode body so as to keep the gap between the lower electrode body and the upper electrode body constant based on the operation correction information, Is disclosed.

  The operation position of the upper electrode body is determined for each corresponding lower electrode body by the electric actuator based on the motion correction information based on the height information of the lower electrode body formed on the index table that rotates in a plane. The appropriate gap can be obtained.

  According to a ninth aspect of the present invention, an excitation voltage is applied in a state where the lower electrode body is mounted on the lower electrode body in the frequency measuring section, and the upper electrode body is gradually moved closer to or away from the gap to change the piezoelectric vibration. 9. The piezoelectric diaphragm frequency measuring device according to claim 8, wherein an adjustment mechanism for adjusting the gap is added at a position where the oscillation waveform of the plate is maximized, so that a more appropriate gap for each frequency of the piezoelectric diaphragm can be obtained. It can be obtained with high accuracy. The electric actuator may be, for example, one using a stepping motor, servo motor, or linear motor, but it is possible to obtain vertical movement adjustment accuracy in units of 0.005 mm.

Further, according to a tenth aspect of the present invention, there is provided an index table having a plurality of lower electrode bodies formed on the surface thereof and having a mechanism that rotates in a plane, and a piezoelectric diaphragm is sequentially applied to each lower electrode body of the index table in the mounting station. In the first transfer device to be mounted and the measurement station, an excitation voltage is applied in a state where the upper electrode body is brought close to the piezoelectric vibration plate mounted on the lower electrode body of the index table, and the frequency of the piezoelectric vibration plate is set. A frequency measurement device for a piezoelectric diaphragm comprising: a frequency measurement unit for measuring; and a second transfer device for ejecting the piezoelectric diaphragm after frequency measurement of the index table from the index table at a discharge station. ,
The frequency measuring unit applies an excitation voltage while gradually moving the upper electrode body close to or away from the lower electrode body provided on the index table while the piezoelectric electrode is mounted on the lower electrode body, and the oscillation waveform of the main vibration of the piezoelectric diaphragm A control unit that obtains motion correction information corresponding to a position where the maximum is, and an electric actuator that moves the upper electrode body based on the motion correction information so as to keep the gap between the lower electrode body and the upper electrode body constant. It may be a characteristic frequency measuring device for a piezoelectric diaphragm. With this configuration, a position where the oscillation waveform of the main vibration reaches a peak can be obtained, and erroneous recognition with other spurious vibrations during frequency measurement can be avoided.

  An eleventh aspect has a configuration in which a frequency classification function is added to the frequency measuring device disclosed in the eighth to tenth aspects, and the piezoelectric diaphragm is placed in a predetermined frequency band based on the measurement result of the above-described piezoelectric diaphragm frequency measuring apparatus. A frequency classification device for piezoelectric diaphragms, comprising: a classification unit that classifies each classification; and a storage box that stores the classified piezoelectric diaphragms.

  By performing classification based on high-accuracy measurements, it is possible to suppress variations during classification as much as possible, suppress variations during formation of excitation electrodes in the subsequent process, and frequency adjustment work in subsequent processes such as partial vapor deposition Can be done smoothly.

  According to the present invention, in a configuration in which a plurality of lower electrode bodies are provided on a substrate, height information (upper surface height position) for each lower electrode body is obtained in advance, and an upper electrode body is provided for each lower electrode body. By adjusting the gap (proximity distance) between the piezoelectric diaphragm and the piezoelectric diaphragm frequency measurement method and frequency measurement device with excellent productivity and high reliability in measurement, the frequency classification of the piezoelectric diaphragm is provided. A method and a frequency classification device can be obtained.

In particular, in frequency measurement of a thin piezoelectric diaphragm corresponding to a high frequency, variation in series resonance resistance value and amplitude is suppressed, and accurate measurement can be performed.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
An embodiment of the present invention will be described with reference to the drawings by taking an AT-cut quartz crystal diaphragm as a piezoelectric diaphragm as an example. FIG. 1 is a schematic configuration diagram of a manufacturing apparatus according to the present embodiment, FIG. 2 is a cross-sectional view of a frequency measuring unit, and FIG. 3 is a diagram showing a system configuration of the manufacturing apparatus in FIG.

In FIG. 1, 1 is a parts feeder, 2 is a first transfer device, 3 is an index table, 4 is a frequency measuring unit, 5 is a second transfer device, 6 is a storage box, and Q is a crystal diaphragm (piezoelectric vibration). Board).

  The quartz diaphragm Q is a rectangular AT-cut quartz diaphragm that is processed into a thin plate by parallel plane polishing, and is individually supplied by the parts feeder 1.

  The parts feeder 1 is a device that aligns a large number of charged quartz diaphragms Q and supplies them to the discharge port 12, forms a spiral channel (not shown) in the mortar-shaped container 11, and the container 11. In this configuration, the quartz diaphragm Q that is randomly input is sequentially pushed out to the discharge port 12 by giving minute vibrations to. Instead of the parts feeder, for example, a system may be used in which the index table is supplied from a pallet having a matrix-shaped crystal diaphragm storage chamber.

  The crystal diaphragm Q sent to the discharge port 12 of the parts feeder is taken out by the first transfer device 2. An arm 21 is attached to the first transfer device 2 at a position extending in a direction perpendicular to the base body 20 in a plan view. The arm 2 is perpendicular to the base body 20 (X direction) and along the base body. In addition to operating in the (Y direction), it also operates in the vertical direction (Z direction), enabling three-dimensional operation. The arm 21 is operated by an electric actuator (not shown), and the electric actuator is operated by a command from a first transfer control unit described later. A suction port 21 a for sucking the crystal diaphragm Q is formed at the tip of the arm 21. The suction mechanism performs suction or suction cancellation by supplying or stopping negative pressure air, for example. In the first transfer apparatus, the method of picking up the quartz diaphragm Q is not limited to the above-described suction method, but may be chucking for gripping the outer periphery of the quartz diaphragm, for example. The same applies to the second transfer device.

  The index table 3 on which the crystal vibrating plate Q is transferred by the first transfer device has a disk shape when seen in a plan view, and the lower electrode bodies 31, 32, 33, 34, 35, 36, 37, and 38 are provided over the entire circumference at predetermined equal intervals. The lower electrode body is made of a cylindrical conductive ceramic, and the upper surface thereof has a plane substantially parallel to the upper surface of the index table. Each lower electrode body is fixed to the index table via an insulator, and can be energized in an electrically independent state. The conductive ceramics used in the lower electrode body are superior in wear resistance compared to metals and can prevent wear due to hard quartz. Like the metal, the upper surface is polished to create a parallel and smooth plane. Obtainable.

Further, in the index table 3, a place where the parts are transferred from the parts feeder is a supply station I, and a discharge station O is formed on the opposite side of the supply station I. The arrangement position of the frequency measurement unit 4 is the measurement station S.

  By the way, the index table 3 can be rotationally driven in a plane, and the rotation is driven by, for example, a servo motor. The servo motor is driven by a pulse signal from the index table drive control unit and controls the rotation speed, the rotation amount, and the like, so that the index table 3 can be operated with an arbitrary setting. In the present embodiment, since eight lower electrode bodies are provided at equal intervals, rotation is performed intermittently by 45 degrees when performing frequency measurement. This amount of rotation can be arbitrarily set depending on the necessary manufacturing man-hours other than frequency measurement, and can be adjusted by a control signal to the servo motor. Of course, it may be four configurations in which the lower electrode body is arranged in the index table every 90 degrees. In this case, the rotation amount is 90 degrees.

  In such an index table 3, the frequency measuring unit 4 is disposed at 90 degrees clockwise from the supply station I, and the discharge confirmation unit 45 is disposed at 90 degrees clockwise from the discharge station O. The arranged confirmation station C is provided.

  The frequency measuring unit 4 includes an electric actuator 41, an insulator 42 that moves up and down by the electric actuator 41, and an upper electrode body 43. The upper electrode body 43 is made of a material having good conductivity, such as copper, brass, or SK material, and a parallel plane is formed so that the surface facing the lower electrode body can be kept parallel. The upper electrode body 43 is configured with an appropriate gap together with the lower electrode body, and the piezoelectric diaphragm is disposed on the upper surface of the lower electrode body, whereby the frequency of the piezoelectric diaphragm is measured by an air gap method.

The electric actuator 41 is configured to perform a predetermined amount of operation by an external control signal. For example, a configuration in which a rotary motion by a stepping motor is linearly moved by a ball screw and a coupling, or a servo motor, an encoder, a ball screw, and a coupling. Or a configuration in which a predetermined amount of operation is performed by an ultrasonic motor using a piezoelectric element. In the present embodiment, a stepping motor, a ball screw, and a coupling actuator are used, and the upper electrode body 43 moves up and down with high speed and high accuracy by the electric actuator 41. When a stepping motor is used, it is an open-loop type one-way control. However, in recent years, it is possible to improve accuracy by adopting a motor with a small basic step angle or adding a step-out-less function. Can be improved. When a servo motor is used, positioning with higher accuracy can be performed by using a high-resolution encoder that detects the rotational position of a closed loop type.

  The second transfer device 5 has a function of transferring the crystal resonator Q sent to the discharge station O of the index table 3 to the storage box. Similarly to the first transfer device, the second transfer device is basically provided with a suction port 51a for sucking the crystal diaphragm Q at the tip portion of the arm 51. Suction or suction is canceled by supplying or stopping air of pressure. The arm 51 operates in a direction perpendicular to the base body 50 (X direction) and in a direction along the base body (Y direction), and also in the vertical direction (Z direction), enabling three-dimensional operation. Yes. As a result, the quartz crystal plate Q in the discharge station O is sucked by the suction port 51a of the arm 51, moved upward, then moved in the XY direction, and further moved downward to release the suction, and the storage box 6 has a predetermined Relocate to the place.

  The storage box 6 is made of resin or metal, and has a configuration in which pockets for storing the crystal diaphragm Q after frequency measurement are arranged in a matrix. In the present embodiment, each pocket is divided for each predetermined frequency band, and the crystal diaphragm Q is stored in the predetermined pocket according to the frequency measurement result described above. Therefore, as a result of the measurement, the crystal diaphragms in the same frequency band are stored in the same pocket.

Note that the crystal diaphragms may be stored one by one in the order of measurement in a matrix pocket. In this case, since the frequency of the crystal diaphragm can be specified by the position of the pocket of the storage box, when the next process takes over the pocket position data and frequency data, when processing such as electrode formation individually on the crystal diaphragm It is effective for.

  The discharge confirmation unit 45 is provided in the process part of the confirmation station C, and forcibly discharges the quartz diaphragm Q that has not been discharged from the upper surface of the lower electrode body by the discharge station O using the suction tube valve.

  FIG. 3 shows a control system according to this embodiment. The control system in FIG. 3 has a configuration in which a control unit of each mechanism is connected to a central control unit 70 composed of, for example, a CPU, and the first transfer device 2 is connected via a first transfer control unit 72 to The second transfer device 5 is connected to the central control unit 70 via the second transfer control unit 73. Each transfer control unit controls each transfer device movement operation, movement amount, suction operation, and the like. The index table 3 is connected to the central control unit via the index table drive control unit 74, and the frequency measurement unit 4 and the electric actuator 41 are connected to the central control unit via the control unit 75. The central control unit 70 is connected to a memory 71 for storing frequency measurement data and the like.

  Next, an example of an operation for measuring the frequency of the crystal diaphragm Q using this apparatus and classifying the frequency into a predetermined frequency based on the measurement result will be described with reference to FIGS.

  First, the height of the lower electrode bodies 31 to 38 is measured before the crystal diaphragm is mounted on the lower electrode body of the index table. The height is measured based on position data (height data) of the upper electrode body 43 when the upper electrode body 43 attached to the electric actuator 41 comes into contact with the lower electrode body. Examples of contact determination include a method of determining by short-circuiting both electrode bodies, a method of determining by a pressure sensor attached to the upper electrode body, and the like.

  The measured position data is taken into the memory for each lower electrode body, and the corrected movement distance when the upper electrode body approaches the lower electrode body with respect to a preset gap between the upper electrode body and the lower electrode body Information is calculated by the central control unit 70 or the control unit 75. For example, the gap is preferably about 0.1 mm, but in order to maintain this gap, the movement distance of the upper electrode body is determined in consideration of the position data, and becomes the motion correction information. Thus, the operation correction information of the upper electrode body for each lower electrode body is stored in the memory 71.

  In adjusting the gap between the two electrode bodies, the excitation electrode is applied while sweeping the frequency in a state where a quartz diaphragm is mounted on each lower electrode body, and the upper electrode body 43 is gradually approached or separated by the electric actuator 41. The gap may be adjusted to a position where the frequency response of the main vibration of the crystal diaphragm is maximized (the oscillation waveform is maximized).

  Such adjustment may be performed by measuring the height of the lower electrode body described above and adding it to a frequency measurement method for keeping the gap between the two electrode bodies constant according to the operation correction information. You may obtain | require an optimal gap only by the method of adjusting a gap to the position where an oscillation waveform becomes the maximum. In the case of obtaining the optimum gap by the latter method, it is possible to obtain a measurement result with higher accuracy in the subsequent frequency measurement work by using a reference crystal diaphragm having a specified frequency.

  As described above, the gap between the electrode bodies can be maintained in an optimum state for the frequency to be measured by the initial setting before the frequency measurement.

  Next, the frequency measurement operation of the crystal diaphragm is performed. First, a large number of quartz diaphragms Q are put into the parts feeder 1, and the quartz diaphragms Q are sequentially sent to the discharge port 12 by the conveying operation of the parts feeder 1. In response to a command from the first transfer control unit 72, the first transfer device 2 sucks the quartz crystal plate Q at the discharge port by the arm 21 and sequentially transfers it to the upper surface of the lower electrode body 31 located at the mounting station. To do.

The index table 3 is driven by the servo motor in accordance with an instruction from the index table drive control unit 74, and intermittently rotates in the arrow B direction, which is clockwise. When the index table 3 is intermittently rotated, when the next lower electrode body 32 is positioned at the mounting station, the crystal diaphragm Q is sequentially transferred to the lower electrode body.

  When the crystal diaphragm Q mounted on the lower electrode body 31 rotates intermittently from the mounting station in two stages, the crystal diaphragm Q moves to the measurement station S. In the measurement station S, a frequency measurement unit is installed, and according to an instruction from the control unit, the operation correction information for the lower electrode body 31 is first read from the memory 71, and the upper electrode body is moved by the movement distance based on the operation correction information. Close to the body. This proximity or separation operation is performed by the operation of the electric actuator according to a command from the control unit 75. By applying a voltage of a predetermined frequency between both electrode bodies in this non-contact state, the frequency of the quartz diaphragm Q is measured by an air gap method. The measured frequency data is transferred to the memory via the central control unit, and the pocket position of the storage box 6 determined for each frequency is determined.

  When the quartz crystal plate Q further intermittently rotates from the measurement station S in two steps, it moves to the discharge station O. In the discharge station O, the quartz diaphragm Q on the upper surface of the lower electrode body is transferred to the storage box by the second transfer device. The second transfer device operates in accordance with a command from the second transfer control unit based on the frequency measurement data from the central control unit, and the crystal diaphragm on the upper surface of the lower electrode body is sucked by the arm 51 to perform a three-dimensional operation. By this, it is transferred to the pocket defined for each frequency band of the storage box. In addition, the structure which specifies the pocket to transfer by the storage box moving planarly may be sufficient.

Thereafter, the index table 3 is rotated sequentially, and when the lower electrode body 31 moves to the confirmation station C, the discharge confirmation unit 45 forces the quartz diaphragm Q remaining on the lower electrode body to be forced by the suction tube valve. To be discharged.

By sequentially performing such a series of operations for the crystal diaphragm Q supplied from the parts feeder 1, frequency measurement and frequency classification of the crystal diaphragm are advanced.

In the above-described embodiment, a plurality of crystal diaphragms (piezoelectric diaphragms) may be mounted on one lower electrode body. For example, two quartz crystal plates are arranged in parallel at a predetermined interval on one lower electrode body, and the frequency measurement is performed by sequentially bringing the upper electrode body close to each quartz crystal plate at the time of frequency measurement. Therefore, when the lower electrode body is moved to the next stage, the rotation amount of the index table is increased, and when the adjacent crystal diaphragm arranged in parallel with the lower electrode body is moved, the rotation amount of the index table is decreased. .

The height measurement of the lower electrode body may be performed when the frequency band of the piezoelectric diaphragm to be measured changes, but the initial height measurement reveals the height position of each lower electrode body. Therefore, the moving distance of the upper electrode body may be obtained by referring to the data of the height position and the new frequency band.

  In this embodiment, an example of manufacturing an AT-cut quartz diaphragm has been described. However, the present invention may be applied to measurement of other thickness vibration type piezoelectric diaphragms. Good.

  It can be applied to mass production of piezoelectric vibration devices such as crystal oscillators and crystal oscillators or other electronic components.

The top view which shows embodiment by this invention 1 is a cross-sectional view taken along line AA of FIG. 1 showing an embodiment according to the present invention. The figure which shows the system configuration | structure by this invention Figure showing a conventional example

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Parts feeder 2 1st transfer apparatus 3 Index table 31,32,33,34,35,36,37 Lower electrode body 4 Frequency measuring part 41 Electric actuator 43 Upper electrode body 5 2nd transfer apparatus 6 Storage box

Claims (11)

A method for measuring a frequency of a piezoelectric diaphragm, wherein a plurality of lower electrode bodies are provided on a substrate, and the frequency of the piezoelectric diaphragm is measured with the upper electrode body in proximity to the piezoelectric diaphragm mounted on the lower electrode body Because
Measuring the height of each lower electrode body provided on the substrate, and obtaining the height information as operation correction information when the upper electrode body approaches the lower electrode body;
The frequency of the piezoelectric diaphragm is maintained with the gap between the two electrode bodies kept constant by bringing the upper electrode body close to the piezoelectric diaphragm based on the operation correction information with respect to the piezoelectric diaphragm mounted on the lower electrode body. Measuring the
Method for measuring frequency of piezoelectric diaphragm having A plurality of lower electrode bodies are formed on an index table that rotates in a plane, and the frequency of the piezoelectric diaphragm is measured in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the lower electrode body. A method for measuring the frequency of a piezoelectric diaphragm,
The height of each of the lower electrode bodies provided in the index table is measured, and the upper electrode body travels to keep the gap between each lower electrode body constant based on the respective height information. Obtaining the determined motion correction information;
By operating the upper electrode body based on the operation correction information for the piezoelectric diaphragm mounted on the lower electrode body, the frequency of the piezoelectric diaphragm is maintained with the gap between the upper electrode body and the lower electrode body kept constant. Measuring the
Method for measuring frequency of piezoelectric diaphragm having A method for measuring a frequency of a piezoelectric diaphragm, wherein a plurality of lower electrode bodies are provided on a substrate, and the frequency of the piezoelectric diaphragm is measured with the upper electrode body in proximity to the piezoelectric diaphragm mounted on the lower electrode body Because
A position where the oscillation waveform of the main vibration of the piezoelectric diaphragm is maximized by applying an excitation voltage while gradually moving the upper electrode body close to or away from each lower electrode body provided on the substrate. Adjusting the gap to
Measuring the frequency of the piezoelectric diaphragm by the gap with the upper electrode body adjusted for each lower electrode body;
Method for measuring frequency of piezoelectric diaphragm having 4. The method for measuring a frequency of a piezoelectric diaphragm according to claim 1, wherein the operation of the upper electrode body is performed by an electric actuator. Whether the method of measuring the height of each lower electrode body provided in the index table is based on the position data of the upper electrode body when the upper electrode body attached to the electric actuator comes into contact with the lower electrode body. 5. The frequency measurement method for a piezoelectric diaphragm according to claim 1, 2 or 4, characterized in that the measurement is performed based on position data of the upper electrode body at the time when contact between both electrode bodies is detected by a proximity sensor. . In adjusting the gap between the two electrode bodies, an excitation voltage is applied with the piezoelectric diaphragm mounted on the lower electrode body, and the oscillation waveform of the main vibration of the piezoelectric diaphragm is maximized while gradually moving the upper electrode body closer to or away from the lower electrode body. 6. The method for measuring a frequency of a piezoelectric diaphragm according to claim 1, further comprising a step of adjusting a gap at a position where The frequency of the piezoelectric diaphragm according to any one of claims 1 to 6, wherein the piezoelectric diaphragm is classified into predetermined frequency bands and stored in a classification box after frequency measurement of the piezoelectric diaphragm is performed. Classification method. An index table having a mechanism in which a plurality of lower electrode bodies are formed on the surface and rotated in a plane;
In the mounting station, a first transfer device that sequentially mounts a piezoelectric diaphragm on each lower electrode body of the index table;
In the measurement station, a frequency measuring unit that applies an excitation voltage in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the lower electrode body of the index table, and measures the frequency of the piezoelectric diaphragm;
A frequency measuring device for a piezoelectric diaphragm comprising a second transfer device for discharging the piezoelectric diaphragm after measuring the frequency of the index table from the index table at a discharge station;
The frequency measuring unit measures the height of each lower electrode body provided in the index table, and the operation correction information when the lower electrode body is brought close to the upper electrode body based on the respective height information A frequency measurement device for a piezoelectric diaphragm, comprising: a control unit that obtains the power; and an electric actuator that moves the upper electrode body so as to keep a gap between each of the lower electrode body and the upper electrode body constant based on the operation correction information. In the frequency measurement unit, an excitation voltage is applied in a state where a piezoelectric diaphragm is mounted on the lower electrode body, and the gap is changed by gradually approaching or separating the upper electrode body,
9. The frequency measuring device for a piezoelectric diaphragm according to claim 8, further comprising an adjustment mechanism for adjusting the gap at a position where the oscillation waveform of the piezoelectric diaphragm is maximized. An index table having a mechanism in which a plurality of lower electrode bodies are formed on the surface and rotated in a plane;
In the mounting station, a first transfer device that sequentially mounts a piezoelectric diaphragm on each lower electrode body of the index table;
In the measurement station, a frequency measuring unit that applies an excitation voltage in a state where the upper electrode body is brought close to the piezoelectric diaphragm mounted on the lower electrode body of the index table, and measures the frequency of the piezoelectric diaphragm;
A frequency measuring device for a piezoelectric diaphragm comprising a second transfer device for discharging the piezoelectric diaphragm after measuring the frequency of the index table from the index table at a discharge station;
The frequency measuring unit applies an excitation voltage while gradually moving the upper electrode body close to or away from the lower electrode body provided on the index table while the piezoelectric electrode is mounted on the lower electrode body, and the oscillation waveform of the main vibration of the piezoelectric diaphragm A control unit that obtains motion correction information corresponding to a position where the maximum is, and an electric actuator that moves the upper electrode body based on the motion correction information so as to keep the gap between the lower electrode body and the upper electrode body constant. A frequency measurement device for a piezoelectric diaphragm, which is characterized. A control unit that classifies the piezoelectric diaphragm for each predetermined frequency band classification based on the measurement result of the frequency measurement device for the piezoelectric diaphragm according to claim 8, claim 9, or claim 10, and the classified piezoelectric diaphragm A frequency classification device for piezoelectric diaphragms, comprising a storage box for storing.

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