JP2006281174A - Method, apparatus and system for recycling wastewater - Google Patents

Method, apparatus and system for recycling wastewater Download PDF

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JP2006281174A
JP2006281174A JP2005108383A JP2005108383A JP2006281174A JP 2006281174 A JP2006281174 A JP 2006281174A JP 2005108383 A JP2005108383 A JP 2005108383A JP 2005108383 A JP2005108383 A JP 2005108383A JP 2006281174 A JP2006281174 A JP 2006281174A
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wastewater
recycling
water
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membrane
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Etsuji Tachiki
悦二 立木
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
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    • Y02A20/124—Water desalination
    • Y02A20/131—Reverse-osmosis

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for recycling wastewater which recycles and reutilizes the wastewater with a small amount of a pH adjustor, and an apparatus for recycling it. <P>SOLUTION: The apparatus for recycling the wastewater comprises a filter 1 for separating a particle from the wastewater, a membrane separator 3 for separating the filtered wastewater into concentrated water and penetrated water, and a reutilization pipe 4 for recycling the penetrated water separated by the membrane separator 3 wherein pH detection means 6 for detecting a pH of wastewater to be treated on the upstream side of the membrane separator 3, and a pH adjustment means 5 for adjusting a pH of wastewater to be treated based on a detected pH at not more than 6 or not less than 8. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、半導体工業や一般の製造業の工場からの排水及び有機性排水のリサイクル処理装置、特にプリント基板のエッチング工程等からの排水のリサイクル処理装置に関するものである。   The present invention relates to an apparatus for recycling wastewater from semiconductor industry and general manufacturing factories and organic wastewater, and more particularly to an apparatus for recycling wastewater from an etching process of a printed circuit board.

最近では、一般の製造業の工場において、排水を下水道放流する場合、下水道料金が製造コストに影響するため、排水をリサイクルし、下水道へ放流する水量を減らしたいというニーズが高くなってきている。   Recently, in general manufacturing factories, when wastewater is discharged into the sewerage system, the cost of the sewerage affects the manufacturing cost, so there is an increasing need to recycle the wastewater and reduce the amount of water discharged into the sewerage system.

すなわちＢＯＤ等の有機物は下水道で処理されるので、排水から水を回収する際に、有機物を処理せず水だけを回収しその濃縮液を下水道へ放流するというリサイクル法が望まれている。   That is, since organic matter such as BOD is treated in the sewer, a recycling method is desired in which when collecting water from wastewater, only the water is collected without treating the organic matter and the concentrated liquid is discharged into the sewer.

このようなニーズに対しては、逆浸透膜に代表される脱塩処理装置が、有機物と共に塩分も分離除去できるので、一般的に使用されている。   For such needs, a desalting apparatus represented by a reverse osmosis membrane is generally used because it can separate and remove salt together with organic matter.

しかし、有機物を含む排水に逆浸透膜を使用した場合、逆浸透膜内で有機物（ＴＯＣ（全有機炭素量））が濃縮されるため、膜内は微生物が発生しやすい環境となり、微生物による膜の閉塞が問題となる。   However, when a reverse osmosis membrane is used for wastewater containing organic matter, the organic matter (TOC (total organic carbon content)) is concentrated in the reverse osmosis membrane, so that the environment in the membrane is likely to generate microorganisms. Occlusion becomes a problem.

この問題を解決するため、ｐＨに注目した膜の殺菌方法が提案されている（例えば、特許文献１参照）。   In order to solve this problem, a membrane sterilization method focusing on pH has been proposed (for example, see Patent Document 1).

この膜の殺菌方法は、前処理後の供給液に硫酸等の安価な酸をｐＨ２．７〜４となるよう添加し、間欠的に膜付近の配管及び膜面を殺菌処理し、また耐酸性菌の膜への堆積状況に応じてｐＨを２．６以下となるよう添加し、間欠的に膜付近の配管及び膜面の耐酸性菌を殺菌処理するという方法である。   In this membrane sterilization method, an inexpensive acid such as sulfuric acid is added to the pre-treated feed solution so as to have a pH of 2.7 to 4, the pipes and membrane surfaces near the membrane are intermittently sterilized, and the acid resistance In this method, the pH is adjusted to 2.6 or less according to the state of accumulation of bacteria on the membrane, and the acid-resistant bacteria on the piping and membrane surface in the vicinity of the membrane are sterilized intermittently.

また、膜の殺菌とｐＨとの関係では、高ｐＨ条件下（ｐＨ９以上）では、排水中に含まれる有機物や微生物に対する耐汚染性も向上するのでアルカリによる調整を特徴とした水処理方法も提案されている（例えば、特許文献２参照）。   In addition, regarding the relationship between membrane sterilization and pH, under high pH conditions (pH 9 or higher), the contamination resistance against organic matter and microorganisms contained in the wastewater is also improved, so a water treatment method characterized by adjustment with alkali is also proposed. (For example, refer to Patent Document 2).

また、フッ酸とアンモニアを含む排水では、水酸化ナトリウムを添加してフッ化ナトリウムとするとともに、排水をｐＨ４〜５の酸性に調整した後、逆浸透膜装置で処理する排水処理装置も提案されている（例えば、特許文献３参照）。
特開２０００−３５４７４４号公報 特開２００２−１９２１５２号公報 特開２００２−１４３８５０号公報 For wastewater containing hydrofluoric acid and ammonia, a wastewater treatment device is proposed in which sodium hydroxide is added to form sodium fluoride, and the wastewater is adjusted to an acidity of pH 4-5 and then treated with a reverse osmosis membrane device. (For example, refer to Patent Document 3).
JP 2000-354744 A JP 2002-192152 A JP 2002-143850 A

しかしながら、このような排水処理装置や処理方法では、特定物質の除去や純水製造のための殺菌を目的としており、ｐＨ４以下、あるいはｐＨ９．５以上というように、酸性側かアルカリ性側か、どちらか一つの範囲内に調整する必要があった。   However, such wastewater treatment equipment and treatment methods are intended for the removal of specific substances and sterilization for the production of pure water. Either pH 4 or less, or pH 9.5 or more, either the acidic side or the alkaline side. It was necessary to adjust within one range.

すなわち、酸性かアルカリ性、どちらかにｐＨを変化させなければならず、排水がアルカリ性の時ｐＨを酸性に調整する場合や、逆に排水が酸性の時ｐＨをアルカリ性に調整する場合には、多量のｐＨ調整剤が必要となるという課題があった。   That is, when the pH must be changed to acidic or alkaline, and the pH is adjusted to acidic when the drainage is alkaline, or conversely, the pH is adjusted to alkaline when the drainage is acidic. There has been a problem that a pH adjuster is required.

本発明は、このような従来の課題を解決するものであり、少量のｐＨ調整剤で排水のリサイクル、再利用が図れる排水のリサイクル処理方法及び処理装置を提供することを目的とする。   This invention solves such a conventional subject, and it aims at providing the wastewater recycling processing method and processing apparatus which can aim at the recycling and reuse of wastewater with a small amount of pH adjusters.

前記目的を達成するために、本発明の排水のリサイクル処理方法は、排水中から粒子を分離する濾過工程と、その濾過した排水を濃縮水と透過水に分離する膜分離工程と、前記膜分離工程で分離した透過水をリサイクルするための返送工程からなり、前記膜分離工程で処理する排水のｐＨは、６以下あるいは８以上に設定したものである。   In order to achieve the object, the wastewater recycling method of the present invention includes a filtration step for separating particles from wastewater, a membrane separation step for separating the filtered wastewater into concentrated water and permeate, and the membrane separation. It consists of a return process for recycling the permeated water separated in the process, and the pH of the waste water treated in the membrane separation process is set to 6 or less or 8 or more.

また、本発明の排水リサイクル処理装置は、排水中から粒子を分離する濾過器と、その濾過した排水を濃縮水と透過水に分離する膜分離装置と、前記膜分離装置で分離した透過水をリサイクルするための再利用管からなり、前記膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けた構成としている。   In addition, the wastewater recycling apparatus of the present invention includes a filter that separates particles from wastewater, a membrane separation device that separates the filtered wastewater into concentrated water and permeated water, and permeated water separated by the membrane separation device. A pH detection means for detecting the pH of the wastewater to be treated upstream of the membrane separation device, and a pH detection means for detecting the pH of the wastewater to be treated based on the detected pH. The pH adjusting means for adjusting the pH of the waste water to be treated to 6 or less or 8 or more based on the detected pH is provided.

このように、本発明の排水リサイクル処理装置によれば、膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けた構成としているため、排水がｐＨ６以下の酸性あるいはｐＨ８以上のアルカリ性の場合は、ｐＨ調整剤は不要で、前記以外の中性域のｐＨの場合のみ、ｐＨ調整剤が必要となり、さらにその添加量は最大でｐＨ１変化させるだけの少量で良いというように、ランニングコストの低減が図れる。   Thus, according to the wastewater recycling apparatus of the present invention, the pH detection means for detecting the pH of the wastewater to be treated upstream of the membrane separator, and the pH of the wastewater to be treated based on the detected pH is 6 or less. Alternatively, since the pH adjusting means for adjusting to 8 or more is provided, if the drainage is acidic at pH 6 or lower or alkaline at pH 8 or higher, no pH adjusting agent is required, and only in the case of neutral pH other than the above. The running cost can be reduced so that a pH adjusting agent is required, and the addition amount of the pH adjusting agent may be small enough to change pH 1 at the maximum.

本発明の排水リサイクル処理装置は、排水中から粒子を分離する濾過器と、その濾過した排水を濃縮水と透過水に分離する膜分離装置と、前記膜分離装置で分離した透過水をリサイクルするための再利用管からなり、前記膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けた構成としている。このｐＨの調整範囲により、ｐＨ調整剤の添加量を低減できる。   The waste water recycling apparatus of the present invention recycles the filter that separates particles from waste water, the membrane separation device that separates the filtered waste water into concentrated water and permeated water, and the permeated water separated by the membrane separation device. And a pH detecting means for detecting the pH of the wastewater to be treated upstream of the membrane separation device, and adjusting the pH of the wastewater to be treated to 6 or less or 8 or more based on the detected pH. It is set as the structure which provided the pH adjustment means. The amount of pH adjuster added can be reduced by this pH adjustment range.

また、本発明の排水リサイクル処理装置は、膜分離装置に逆浸透膜を用いることが好ましい。この逆浸透膜により排水中の不純物の除去率を向上できる。   In the wastewater recycling apparatus of the present invention, it is preferable to use a reverse osmosis membrane for the membrane separator. This reverse osmosis membrane can improve the removal rate of impurities in the waste water.

また、本発明の排水リサイクル処理装置は、脱塩処理装置を濾過器と膜分離装置の間に設けることが好ましい。この脱塩処理装置を設けることにより、膜に炭酸カルシウム等のスケールが析出するのを防止できる。   In the wastewater recycling apparatus of the present invention, it is preferable to provide a desalting apparatus between the filter and the membrane separator. By providing this desalting apparatus, scales such as calcium carbonate can be prevented from being deposited on the membrane.

本発明の排水リサイクル処理システムは、処理水を貯留する貯留槽と、前記貯留槽に貯留した処理水を使用して生産を行う生産装置と、前記生産装置内のある装置からの汚水を処理する汚水処理装置と、排水リサイクル処理装置と、前記生産装置内の残りの装置からの排水を、前記排水リサイクル処理装置及び前記汚水処理装置に振分けする排水ピットと、前記排水リサイクル処理装置からの循環水を前記貯留槽に戻す再利用管とを備え、前記排水リサイクル処理装置は、排水中から粒子を分離する濾過器と、濾過した排水を濃縮水と透過水に分離する膜分離装置と、前記膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けたものである。このシステムにより、排水のリサイクル率を向上できる。   The wastewater recycling treatment system of the present invention treats sewage from a storage tank that stores treated water, a production apparatus that performs production using the treated water stored in the storage tank, and an apparatus in the production apparatus. Wastewater treatment apparatus, wastewater recycling apparatus, wastewater pit for distributing the wastewater from the remaining apparatus in the production apparatus to the wastewater recycling apparatus and the wastewater treatment apparatus, and circulating water from the wastewater recycling apparatus And a recycling pipe for returning the water to the storage tank, wherein the wastewater recycling apparatus includes a filter for separating particles from the wastewater, a membrane separation device for separating the filtered wastewater into concentrated water and permeate, and the membrane PH detecting means for detecting the pH of the waste water to be treated upstream of the separator, and pH adjusting means for adjusting the pH of the waste water to be treated to 6 or less or 8 or more based on the detected pH It is those provided. This system can improve the wastewater recycling rate.

また、本発明の排水リサイクル処理システムは、排水ピットに電気伝導度を検知する検知手段を備え、その検知した電気伝導度により前記生産装置からの排水を前記排水リサイクル処理装置及び前記汚水処理装置に振分けするものである。電気伝導度を利用することにより、排水を汚濁状態に応じて連続的に振分けることができる。   Moreover, the wastewater recycling system of the present invention includes a detecting means for detecting electrical conductivity in the drainage pit, and the wastewater from the production apparatus is supplied to the wastewater recycling system and the sewage treatment system based on the detected electrical conductivity. It is a sort. By using the electrical conductivity, the wastewater can be continuously distributed according to the pollution state.

以下に、本発明の排水リサイクル処理装置について例をあげて説明するが、本発明はこれに限定されるものではない。   Hereinafter, the wastewater recycling apparatus of the present invention will be described by way of example, but the present invention is not limited to this.

（実施例１）
図１において、濾過器１、脱塩処理装置２、膜分離装置３がこの順番で配管により接続され、排水は濾過器１から導入され、膜分離装置３の膜透過水は、再利用管４により、再利用場所へ戻っていく。濾過器１の前にはｐＨ調整手段５が、脱塩処理装置２と膜分離装置３の間には、ｐＨ検知手段６が設けられ、さらに膜分離装置３で分離された濃縮水は、返送管７で脱塩処理装置２に返送される。また、濾過器１や脱塩処理装置２からの排出物は別途処理または系外へ排出される。 Example 1
In FIG. 1, a filter 1, a desalting treatment device 2, and a membrane separation device 3 are connected by piping in this order, waste water is introduced from the filter 1, and the membrane permeated water of the membrane separation device 3 is reused by a reuse pipe 4. To return to the reuse location. A pH adjusting means 5 is provided in front of the filter 1, and a pH detecting means 6 is provided between the desalting apparatus 2 and the membrane separation apparatus 3, and the concentrated water separated by the membrane separation apparatus 3 is returned. It is returned to the desalting apparatus 2 by the pipe 7. In addition, the effluent from the filter 1 and the desalting apparatus 2 is separately processed or discharged out of the system.

濾過器１としては、砂等の濾材を用いたものや、マイクロフィルターや限外濾過膜等の膜を用いたものが使用され、脱塩処理装置２としては、逆浸透膜や電気透析装置、特に自己洗浄機能を持つ極性転換方式の電気透析装置が好ましく、膜分離装置３には、逆浸透膜を用いるのが好ましい。   As the filter 1, one using a filter medium such as sand or one using a membrane such as a microfilter or an ultrafiltration membrane is used. As the desalting apparatus 2, a reverse osmosis membrane, an electrodialyzer, In particular, a polarity-changing electrodialyzer having a self-cleaning function is preferable, and a reverse osmosis membrane is preferably used for the membrane separator 3.

極性転換方式の電気透析装置は、自己洗浄能力により、通常運転では薬品の注入を必要とせず、水利用率を９０％以上にすることができるので、水のリサイクルに適している。逆浸透膜は分離膜の中では０．５ｎｍ以下の最も微細な物質まで分離でき、排水リサイクルの最終工程に適している。   The electrodialysis apparatus of the polarity switching system is suitable for water recycling because it does not require chemical injection in normal operation and the water utilization rate can be 90% or more due to its self-cleaning ability. A reverse osmosis membrane can separate even the finest substances of 0.5 nm or less among separation membranes, and is suitable for the final process of wastewater recycling.

濾過器１に導入される排水は、工場等の生産工程で発生する洗浄水等で、排水としては汚染度は低く、多量に使用されるため、リサイクルを図っている。リサイクル時での問題は膜表面での微生物の繁殖であり、膜で処理する排水のｐＨを６以下あるいは８以上の中性域以外に設定することにより、微生物の繁殖を抑制できる。   The wastewater introduced into the filter 1 is washing water generated in production processes at factories and the like, and the wastewater has a low degree of contamination and is used in large quantities, so it is recycled. The problem at the time of recycling is the propagation of microorganisms on the surface of the membrane. By setting the pH of the wastewater treated with the membrane to be other than the neutral range of 6 or less or 8 or more, the propagation of microorganisms can be suppressed.

上記構成において、ｐＨ検知手段６で検知したｐＨが６より大きく７以下の場合は、ｐＨ調整剤として硫酸等の酸をｐＨ調整手段５により添加し、膜分離装置３で処理する排水のｐＨを６以下の酸性とする。またｐＨ検知手段６で検知したｐＨが７より大きく８以下の場合は、ｐＨ調整剤としてＮａＯＨ等のアルカリをｐＨ調整手段５により添加し、膜分離装置３で処理する排水のｐＨを８以上のアルカリ性とする。このようなｐＨ調整においては、ｐＨの変化は最大で１となり、ｐＨ調整剤としての酸あるいはアルカリの添加量は少なくできる。   In the above configuration, when the pH detected by the pH detector 6 is greater than 6 and 7 or less, an acid such as sulfuric acid is added as a pH adjuster by the pH adjuster 5 and the pH of the waste water to be treated by the membrane separation device 3 is adjusted. The acidity is 6 or less. When the pH detected by the pH detection means 6 is greater than 7 and less than or equal to 8, an alkali such as NaOH is added as a pH adjuster by the pH adjustment means 5, and the pH of the waste water treated by the membrane separation device 3 is 8 or more. Alkaline. In such pH adjustment, the maximum change in pH is 1, and the amount of acid or alkali added as a pH adjuster can be reduced.

以上のように、膜分離装置３で処理する排水のｐＨを６以下あるいは８以上に調整することで、微生物の繁殖を抑制でき、ｐＨ調整剤等の薬剤の使用も少なく、排水のリサイクルが可能となる排水リサイクル処理装置が提供できる。   As described above, by adjusting the pH of the wastewater to be treated by the membrane separation device 3 to 6 or less or 8 or more, the growth of microorganisms can be suppressed, the use of chemicals such as pH adjusters is small, and the wastewater can be recycled. It is possible to provide a wastewater recycling apparatus.

なお、本実施例では、ｐＨ調整手段５、ｐＨ検知手段６を設けたが、工場等の洗浄水で、予めｐＨが６以下あるいは８以上と分かっている場合は、特に設けなくてもよい。   In the present embodiment, the pH adjusting means 5 and the pH detecting means 6 are provided. However, when the pH is known to be 6 or less or 8 or more beforehand with washing water from a factory or the like, it may not be provided.

また、本実施例では、ｐＨ調整手段５を濾過器１の前に設けたが、ｐＨ検知手段６の上流側でｐＨ調整剤の影響を受けない場所であれば、特に設ける場所は限定しない。   Further, in this embodiment, the pH adjusting means 5 is provided in front of the filter 1, but the place to be provided is not particularly limited as long as it is not affected by the pH adjusting agent on the upstream side of the pH detecting means 6.

（実施例２）
図２は、実施例１の排水リサイクル処理装置を用いた排水リサイクルシステムの一実施例である。 (Example 2)
FIG. 2 is an example of a wastewater recycling system that uses the wastewater recycling apparatus of the first embodiment.

図２において、排水は貯留槽１１を起点として、生産装置１２、排水ピット１３、排水リサイクル処理装置１４を経て、貯留槽１１に戻るという循環でリサイクルされている。一方、生産装置１２で発生したリサイクルに適さない、汚染度の高い汚水は、汚水処理設備１５に導入され、濾過器１及び脱塩処理装置２からの排出物とともに、処理される。さらには、排水ピット１３で振分けられた汚染度の高い汚水も汚水処理設備１５に導入され、処理される。   In FIG. 2, the wastewater is recycled in a circulation starting from the storage tank 11, returning to the storage tank 11 through the production device 12, the drainage pit 13, and the wastewater recycling processing device 14. On the other hand, highly contaminated sewage that is not suitable for recycling generated in the production apparatus 12 is introduced into the sewage treatment facility 15 and treated together with the discharge from the filter 1 and the desalination treatment apparatus 2. Furthermore, highly contaminated sewage distributed in the drain pit 13 is also introduced into the sewage treatment facility 15 and processed.

上記の構成において、排水ピット１３での排水の振分けは、電気伝導度を常時監視し、連続的に行っている。すなわち、電気伝導度と水の汚染度が比例関係にある、という性質を利用し、ある設定値以上の場合は汚水処理設備１５へ、以下の場合は排水リサイクル処理装置１４へと振分けられる。例えば、排水リサイクル処理装置１４の処理性能を上げれば、電気伝導度の設定値を上げることができ、排水リサイクル処理装置１４への供給水量を増加させられる。   In the above configuration, the drainage distribution in the drainage pit 13 is continuously performed by constantly monitoring the electrical conductivity. That is, the property that the electrical conductivity and the degree of contamination of water are in a proportional relationship is utilized. For example, if the treatment performance of the wastewater recycling apparatus 14 is increased, the set value of electrical conductivity can be increased, and the amount of water supplied to the wastewater recycling apparatus 14 can be increased.

次に、このリサイクル処理システムの運転例を、各装置の水量で示す。値は全てｍ3／日である。 Next, an example of operation of this recycling processing system is shown by the amount of water in each device. All values are m 3 / day.

まず、貯留槽１１への供給ａは１０９７、貯留槽１１から生産装置１２へは１９２０、生産装置１２から排水ピット１３へは１８００、排水リサイクル処理装置１４内の濾過器１へは１３５０、濾過器１から脱塩処理装置２へは１０８０、脱塩処理装置２から膜分離装置３へは１０２９、膜分離装置３から貯留槽１１へは８２３となり、最終的なリサイクル率は８２３／１９２０で４３％となった。   First, supply a to the storage tank 11 is 1097, 1920 from the storage tank 11 to the production apparatus 12, 1800 from the production apparatus 12 to the drain pit 13, 1350 to the filter 1 in the waste water recycling processing apparatus 14, filter 1 to 1080 from the desalinator 2, 1029 from the desalter 2 to the membrane separator 3, 823 from the membrane separator 3 to the storage tank 11, and the final recycling rate is 823/1920, 43% It became.

このリサイクル率は従来２７％であり、実施例１の排水リサイクル処理装置を採用し、排水ピット１３の電気伝導度の設定値を２０００から３０００に変更することにより、リサイクル率１６％の向上が可能となったものである。   This recycling rate is 27% in the past. By adopting the wastewater recycling equipment of Example 1 and changing the electrical conductivity setting value of the drainage pit 13 from 2000 to 3000, the recycling rate can be improved by 16%. It has become.

以上のように、本発明の排水のリサイクル処理装置によれば、少量のｐＨ調整剤で排水のリサイクル、再利用が図れるため、排水のリサイクル設備に広く利用できる。   As described above, according to the wastewater recycling apparatus of the present invention, wastewater can be recycled and reused with a small amount of a pH adjusting agent, and thus can be widely used in wastewater recycling facilities.

本発明の実施例１を示す構成図The block diagram which shows Example 1 of this invention 本発明の実施例２を示す構成図The block diagram which shows Example 2 of this invention

符号の説明Explanation of symbols

１ 濾過器
２ 脱塩処理装置
３ 膜分離装置
４ 再利用管
５ ｐＨ調整手段
６ ｐＨ検知手段
７ 返送管
１１ 貯留槽
１２ 生産装置
１３ 排水ピット
１４ 排水リサイクル処理装置
１５ 汚水処理装置

DESCRIPTION OF SYMBOLS 1 Filter 2 Desalination processing apparatus 3 Membrane separation apparatus 4 Reuse pipe 5 pH adjustment means 6 pH detection means 7 Return pipe 11 Storage tank 12 Production apparatus 13 Drainage pit 14 Wastewater recycling apparatus 15 Sewage treatment apparatus

Claims (6)

排水中から粒子を分離する濾過工程と、
その濾過した排水を濃縮水と透過水に分離する膜分離工程と、
前記膜分離工程で分離した透過水をリサイクルするための返送工程からなり、
前記膜分離工程で処理する排水のｐＨは、６以下あるいは８以上に設定した
排水のリサイクル処理方法。 A filtration step for separating particles from the waste water;
A membrane separation step for separating the filtered waste water into concentrated water and permeated water;
It consists of a return process for recycling the permeated water separated in the membrane separation process,
The wastewater recycling method in which the pH of the wastewater to be treated in the membrane separation step is set to 6 or less or 8 or more. 排水中から粒子を分離する濾過器と、
その濾過した排水を濃縮水と透過水に分離する膜分離装置と、
前記膜分離装置で分離した透過水をリサイクルするための再利用管からなり、
前記膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けた排水リサイクル処理装置。 A filter for separating particles from the waste water;
A membrane separation device for separating the filtered waste water into concentrated water and permeated water;
The recycling pipe for recycling the permeated water separated by the membrane separation device,
Waste water recycling provided with pH detecting means for detecting the pH of waste water to be treated on the upstream side of the membrane separation device, and pH adjusting means for adjusting the pH of waste water to be treated to 6 or less or 8 or more based on the detected pH Processing equipment. 前記膜分離装置は、逆浸透膜を用いた請求項２記載の排水リサイクル処理装置。 The wastewater recycling apparatus according to claim 2, wherein the membrane separator uses a reverse osmosis membrane. 脱塩処理装置を前記濾過器と前記膜分離装置の間に設けた請求項２記載の排水リサイクル処理装置。 The wastewater recycling apparatus according to claim 2, wherein a desalting apparatus is provided between the filter and the membrane separator. 処理水を貯留する貯留槽と、
前記貯留槽に貯留した処理水を使用して生産を行う生産装置と、
前記生産装置内のある装置からの汚水を処理する汚水処理装置と、
排水リサイクル処理装置と、
前記生産装置内の残りの装置からの排水を、前記排水リサイクル処理装置及び前記汚水処理装置に振分けする排水ピットと、
前記排水リサイクル処理装置からの循環水を前記貯留槽に戻す再利用管とを備え、
前記排水リサイクル処理装置は、排水中から粒子を分離する濾過器と、その濾過した排水を濃縮水と透過水に分離する膜分離装置と、前記膜分離装置の上流側で処理する排水のｐＨを検知するｐＨ検知手段と、その検知したｐＨに基づいて処理する排水のｐＨを６以下あるいは８以上に調整するｐＨ調整手段を設けた
排水リサイクル処理システム。 A storage tank for storing treated water;
A production device for producing using the treated water stored in the storage tank;
A sewage treatment device for treating sewage from a certain device in the production device;
Wastewater recycling equipment,
A wastewater pit for distributing wastewater from the remaining devices in the production device to the wastewater recycling treatment device and the wastewater treatment device,
A recycling pipe for returning the circulating water from the waste water recycling treatment apparatus to the storage tank;
The wastewater recycling apparatus includes a filter that separates particles from wastewater, a membrane separator that separates the filtered wastewater into concentrated water and permeate, and a pH of wastewater that is treated upstream of the membrane separator. A wastewater recycling system comprising pH detecting means for detecting and pH adjusting means for adjusting the pH of wastewater to be treated to 6 or less or 8 or more based on the detected pH. 前記排水ピットに電気伝導度を検知する検知手段を備え、
その検知した電気伝導度により前記生産装置からの排水を前記排水リサイクル処理装置及び前記汚水処理装置に振分けする請求項５記載の排水リサイクル処理システム。



A detection means for detecting electrical conductivity in the drain pit,
The wastewater recycling system according to claim 5, wherein wastewater from the production device is distributed to the wastewater recycling device and the sewage treatment device according to the detected electrical conductivity.



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