JP2006258499A - Device and method for non-destructive inspection and horn - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for non-destructive inspection capable of precisely performing non-destructive inspection at a high speed by a simple constitution and enabling high-degree analysis, a non-destructive inspection method and a horn. <P>SOLUTION: A slit-shaped incident aperture part composed of long and short sides is formed to the end part on the milli-wave incident side of a mill-wave receiving antenna 61 and a disk 84 is provided between the incident aperture part and an inspection target S as an incidence allowable member. A slit 84a is bored in the disk 84 and moved to the other end of the incident aperture part from one end by rotating the disk 84 to finely split the milli-wave incident on the incident aperture part in the extending direction of the long side of the incident aperture part to continuously receive. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a nondestructive inspection apparatus, an inspection method for nondestructive inspection, and a horn.

As a device for non-destructive inspection of an object to be inspected, electromagnetic waves such as radio waves, visible rays, and X-rays are irradiated on the object as an inspection medium, and electromagnetic waves transmitted, reflected, or scattered are analyzed. There are known non-destructive inspection apparatuses that are evaluated by the above (for example, Patent Document 1, Patent Document 2).
Japanese Patent Laid-Open No. 7-260944 Japanese Patent Laid-Open No. 11-83996

However, any of the nondestructive inspection apparatuses has a limit in inspection accuracy, and is not suitable for inspection that needs to detect minute abnormality.
As means for solving such a problem, the present applicant has applied for a nondestructive inspection apparatus capable of detecting an abnormality in a minute range in the application of Japanese Patent Application No. 2004-287621. In this apparatus, since the range that can be received by the receiving antenna is narrow, it was possible to perform high-level analysis by sampling the data of each part of the inspected object. However, on the other hand, an extremely sophisticated control circuit is necessary to highly drive and control the device under test and the receiving antenna. A means for solving this problem is to install a plurality of receiving antennas side by side, but it is necessary to install a receiver corresponding to each receiving antenna, which increases the size and cost of the apparatus. End up. Instead of installing the receiving antennas individually, it is possible to selectively switch the electromagnetic waves input from the receiving antennas to the receiver by sequentially switching the channels of the receiving antennas. However, a highly accurate control circuit for switching the channel of the receiving antenna is required. In order to solve these problems all at once, the applicant applied for an electromagnetic wave receiving horn in the application of Japanese Patent Application No. 2005-11739 for the purpose of obtaining a high-speed and high-precision inspection result by simple control. In this electromagnetic wave receiving horn, the incident opening where the electromagnetic wave is incident has a slit shape and noise can be prevented in the extending direction of the short side of the slit shape. By moving in the same direction as the extending direction, it was possible to perform nondestructive inspection with extremely high accuracy. However, in the inspection using the electromagnetic wave receiving horn, since the data of the electromagnetic wave incident on the incident aperture is processed at a time, only one-dimensional data can be obtained as a result. In other words, among the millimeter waves that have passed through the object to be inspected and exited from the exit surface, it was possible to comprehensively evaluate the area through which the millimeter waves incident on the entrance aperture were transmitted, but there was an abnormality. In addition, it has been impossible to perform advanced analysis to identify the location of the abnormality. Therefore, the apparatus in Japanese Patent Application No. 2005-11739 cannot be suitably used in an inspection that requires not only the presence / absence of abnormality in the object to be inspected but also a high-level analysis that specifies the location of the abnormality. It was.

  The present invention has been made in view of the above-described problems, and its object is to enable highly accurate and accurate analysis with a simple configuration without particularly adding a large-scale member or an advanced control circuit. An object is to provide a nondestructive inspection apparatus, a nondestructive inspection inspection method, and a horn.

The invention according to claim 1 is an object to be inspected, an electromagnetic wave transmitting unit for injecting an electromagnetic wave converged and shaped into a line shape to an incident surface of the object to be inspected, and a line shape incident on the incident surface of the object to be inspected. In a nondestructive inspection apparatus including an electromagnetic wave receiving unit that receives a linearly transmitted, scattered, or reflected electromagnetic wave that has been converged and shaped and transmitted, scattered, or reflected through the object to be inspected, and received by a receiving antenna. The receiving antenna is expanded in one direction of the opening surface of the incident opening from the proximal end toward the incident opening, with a tube having an incident opening for receiving the electromagnetic wave, The shape of the incident opening is formed into a slit shape, and an incident allowing member that partially allows the electromagnetic wave to enter is provided in the incident opening, and the region where the electromagnetic wave can enter the incident opening passes over time. Move with For, it provided a control means for controlling the incident allowing member.

  The invention of claim 2 is the nondestructive inspection apparatus according to claim 1, wherein the incident allowing member is a disc made of an electromagnetic wave non-transmitting material, and the radial direction from the vicinity of the central axis of the disc, By making a slit for allowing the incidence of electromagnetic waves and rotating the disk, the slit is moved with respect to the incident opening, and an area where the incidence of electromagnetic waves is allowed in the incident opening The time was changed from one end to the other end.

  According to a third aspect of the present invention, in the nondestructive inspection apparatus according to the first aspect, the incident allowing member is a liquid crystal shutter using liquid crystal, and the position of the opening of the liquid crystal shutter is set with respect to the incident opening. By controlling, in the said incident opening part, the area | region where incidence | injection of electromagnetic waves is accept | permitted was changed temporally from one end to the other end.

  According to a fourth aspect of the present invention, there is provided an object to be inspected, an electromagnetic wave transmitting unit that makes an electromagnetic wave converged and shaped in a line shape incident on an incident surface of the object to be inspected, and a line shape incident on the incident surface of the object to be inspected Electromagnetic waves received by a receiving antenna having an incident aperture for receiving electromagnetic waves that are linearly transmitted, scattered or reflected by the converged and shaped electromagnetic waves transmitted, scattered or reflected from the object to be inspected In the nondestructive inspection apparatus including a receiving unit, the electromagnetic wave transmitting unit is a horn for emitting electromagnetic waves, and a tube body having an emission opening for emitting the electromagnetic waves is emitted from a base end portion to the emitting unit. The shape of the exit opening was formed into a slit shape by expanding toward the opening in one direction of the opening surface of the exit opening.

  According to a fifth aspect of the present invention, there is provided an object to be inspected, an electromagnetic wave transmitting unit that makes an electromagnetic wave converged and shaped into a line shape incident on an incident surface of the object to be inspected, and a line shape incident on the incident surface of the object to be inspected Electromagnetic waves received by a receiving antenna having an incident aperture for receiving electromagnetic waves that are linearly transmitted, scattered or reflected by the converged and shaped electromagnetic waves transmitted, scattered or reflected from the object to be inspected In the nondestructive inspection apparatus including a receiving unit, the electromagnetic wave transmitting unit is a horn for emitting electromagnetic waves, and a tube body having an emission opening for emitting electromagnetic waves is connected to the emission opening from a base end part. The output opening is expanded in one direction on the opening surface of the emission opening, and the shape of the emission opening is formed into a slit shape. The reception antenna has an incident opening for receiving the electromagnetic wave. Tubular body, proximal Toward the entrance aperture from the aperture plane of the exit aperture of the horn is flared in the same direction as the direction of expanding, and the shape of the incident opening is formed in a slit shape.

  According to a sixth aspect of the present invention, in the nondestructive inspection apparatus according to the fourth or fifth aspect, an incident permitting member that partially allows an electromagnetic wave to enter is provided in the incident opening, and the electromagnetic wave is incident on the incident opening. In order to move the region that can be incident on the beam as time elapses, a control means is provided for controlling the incident allowing member.

  The invention of claim 7 is the nondestructive inspection apparatus according to claim 6, wherein the incidence allowing member is a disc made of an electromagnetic wave non-transmissive material, and from the vicinity of the central axis of the disc in the radial direction, By making a slit for allowing the incidence of electromagnetic waves and rotating the disk, the slit is moved with respect to the incident opening, and an area where the incidence of electromagnetic waves is allowed in the incident opening The time was changed from one end to the other end.

  According to an eighth aspect of the present invention, in the nondestructive inspection apparatus according to the sixth aspect, the incident allowing member is a liquid crystal shutter using liquid crystal, and the position of the opening of the liquid crystal shutter is set with respect to the incident opening. By controlling, in the said incident opening part, the area | region where incidence | injection of electromagnetic waves is accept | permitted was changed temporally from one end to the other end.

A ninth aspect of the present invention is the nondestructive inspection apparatus according to any one of the fourth to eighth aspects, wherein an electromagnetic wave shaping means is installed between the horn and the object to be inspected.
The invention according to claim 10 is a non-destructive inspection method for analyzing an inspected object by receiving an electromagnetic wave incident on the inspected object and transmitting, scattered or reflected through the inspected object. The beam is converged and shaped to be incident on the incident surface of the object to be inspected, and the line-shaped electromagnetic wave is emitted from the object to be inspected, and the line-shaped electromagnetic wave is incident from a part of the incident opening, and the electromagnetic wave is transmitted. The electromagnetic wave is continuously received and analyzed while moving the portion where the electromagnetic wave can be incident from one end of the incident opening to the other end with the passage of time, with the part, the object to be inspected, and the electromagnetic wave receiving part stationary. When the incidentable portion has completed moving to the other end, the new portion of the object to be inspected is moved by moving only the object to be inspected in a direction orthogonal to both the emission direction of the electromagnetic wave and the line extending direction. In line It is incident electromagnetic wave, the area of newly incident inspection object, and so as to analyze continuously receives electromagnetic waves by moving with the passage again part of the entrance aperture of the electromagnetic wave is incident time.

  The invention of claim 11 is a horn having a tube having an emission opening for emitting electromagnetic waves and a base end for introducing the oscillated electromagnetic wave into the tube, wherein the emission opening is A horn characterized by being formed into a slit shape by expanding in the direction perpendicular to the direction of electromagnetic wave emission toward the direction of electromagnetic wave emission from the base end.

  The invention of claim 12 is the horn according to claim 11, wherein a cylindrical lens is formed integrally with the exit opening of the horn.

  According to the first aspect of the present invention, only a part of the region where the electromagnetic wave is incident is allowed in the incident opening of the electromagnetic wave receiving antenna by the incident allowing member, so that the electromagnetic wave incident from the incident opening is received as a plurality of data. it can. In addition, since the region where the incidence of electromagnetic waves is allowed to change is temporally changed in the incident opening by the incident allowing member, the electromagnetic waves incident on the incident opening are regarded as a plurality of continuous data, Advanced analysis can be performed. Furthermore, the incident electromagnetic wave is low noise in the short side direction of the electromagnetic wave receiving antenna, and is also low noise because only a part of the incident is allowed by the incident allowing member in the long side direction. . As a result, since the received electromagnetic wave has extremely low noise, it is possible to perform a highly accurate nondestructive inspection.

  According to the invention of claim 2, by allowing the electromagnetic wave to be incident on the incident opening partly by the disk having the slits and rotating the disk, the allowable region is temporally changed. It moved from one end to the other end. Therefore, it is possible to easily control a region where the incidence of electromagnetic waves is allowed only by installing a simple member.

  According to the third aspect of the present invention, the liquid crystal shutter allows the electromagnetic wave to be partially allowed to enter. For this reason, the speed | rate at the time of changing the area | region where incidence | injection of electromagnetic waves is accept | permitted can be performed very rapidly, As a result, the inspection speed of a nondestructive inspection can be sped up. Further, since the liquid crystal shutter does not need to move the device itself, the entire device can be reduced in size. In addition, since the area where the incidence is allowed can be changed by electronic control, the setting of the area where the incidence is allowed can be easily changed.

  According to the invention of claim 4, since it is possible to emit an electromagnetic wave having a high collecting property at the time of emission, there is no need to separately provide electromagnetic wave shaping means for making the electromagnetic wave into a line shape, and the apparatus is downsized. It becomes possible. In addition, unlike electromagnetic wave collection by electromagnetic wave shaping means, etc., the distance between the electromagnetic wave oscillation part and the object to be inspected in the initial alignment is set in order to go straight with a certain degree of directivity while maintaining the linear convergence state. This saves you time and effort.

  According to the invention of claim 5, since it is possible to emit an electromagnetic wave having a high collecting property at the time of emission, there is no need to separately provide electromagnetic wave shaping means for making the electromagnetic wave into a line shape, and the apparatus is downsized. It becomes possible. Further, since the electromagnetic wave goes straight with a certain degree of directivity while substantially maintaining the linear convergence state, the electromagnetic wave with high wave collecting property can be incident on the object to be inspected. On the other hand, since the entrance opening of the electromagnetic wave receiving antenna also has a slit shape extending in the same direction as the exit opening, unnecessary noise is not received and low noise electromagnetic waves can be received. As a result, the object to be inspected can be analyzed with extremely accurate data. Furthermore, since the emitted electromagnetic wave maintains a certain degree of directivity, it is possible to save time and effort for setting the distance between the electromagnetic wave oscillating unit and the object to be inspected in the initial alignment.

  According to the invention of claim 6, since the electromagnetic wave is incident only from a part of the incident opening of the receiving antenna, the line-shaped electromagnetic wave emitted from the object to be inspected is subdivided in the direction in which the electromagnetic wave extends to enter the incident opening. It becomes possible to make it enter. Furthermore, since the incident area is moved with the passage of time, it becomes possible to cause the line-shaped electromagnetic wave to be incident as a plurality of continuous data. As a result, the electromagnetic wave transmitting unit, the object to be inspected, the electromagnetic wave Without moving any of the receivers, it is possible to highly analyze the region of the object to be inspected where the electromagnetic wave is incident and emitted in the direction in which the line-shaped electromagnetic wave extends.

  According to the invention of claim 7, since the electromagnetic wave is incident only from a part of the incident opening of the receiving antenna, the line-shaped electromagnetic wave emitted from the inspected object is subdivided in the direction in which the electromagnetic wave extends and the incident opening It becomes possible to make it enter. In addition, since the incident area is moved with the passage of time, it becomes possible to enter the line-shaped electromagnetic wave as a plurality of continuous data. As a result, the electromagnetic wave transmitting unit, the object to be inspected, the electromagnetic wave Without moving any of the receivers, it is possible to highly analyze the region of the object to be inspected where the electromagnetic wave is incident and emitted in the direction in which the line-shaped electromagnetic wave extends. Furthermore, by allowing a disk with slits to partially allow electromagnetic waves to enter the incident opening, and rotating the disk, the allowable region moves from one end to the other in time. I tried to do it. Therefore, it is possible to easily control a region where the incidence of electromagnetic waves is allowed only by installing a simple member.

  According to the invention of claim 8, since the electromagnetic wave is incident only from a part of the incident opening of the receiving antenna, the line-shaped electromagnetic wave emitted from the object to be inspected is subdivided in the direction in which the electromagnetic wave extends to enter the incident opening. It becomes possible to make it enter. In addition, since the incident area is moved with the passage of time, it becomes possible to enter the line-shaped electromagnetic wave as a plurality of continuous data. As a result, the electromagnetic wave transmitting unit, the object to be inspected, the electromagnetic wave Without moving any of the receivers, it is possible to highly analyze the region of the object to be inspected where the electromagnetic wave is incident and emitted in the direction in which the line-shaped electromagnetic wave extends. In addition, the liquid crystal shutter partially allowed the incidence of electromagnetic waves. For this reason, the speed | rate at the time of changing the area | region where incidence | injection of electromagnetic waves is accept | permitted can be performed very rapidly, As a result, the inspection speed of a nondestructive inspection can be sped up. Further, since the liquid crystal shutter does not need to move the device itself, the entire device can be reduced in size. In addition, since the area where the incidence is allowed can be changed by electronic control, the setting of the area where the incidence is allowed can be easily changed.

  According to the ninth aspect of the present invention, it is possible to obtain an electromagnetic wave having extremely high wave collecting property by further converging the linear electromagnetic wave emitted from the horn. Further, since the electromagnetic wave emitted from the horn has already been converged in a line shape, it is not necessary to perform initial alignment setting in consideration of maintaining the state in which the electromagnetic wave is converged.

  According to the invention of claim 10, a line-shaped electromagnetic wave is incident only by moving a portion where the electromagnetic wave can be incident at the incident opening without moving any of the electromagnetic wave transmitting unit, the object to be inspected, and the electromagnetic wave receiving unit. It becomes possible to analyze the area | region of the emitted to-be-inspected object highly. In addition, by alternately moving the portion where the electromagnetic wave can enter and the inspection object in the incident opening, it is possible to receive the electromagnetic wave transmitted through the entire surface of the inspection object. The entire surface of the object to be inspected can be highly analyzed.

  According to the eleventh aspect of the present invention, since the emission opening of the horn is formed into a slit shape, it is possible to emit electromagnetic waves in a state of being converged and formed in a line shape. Since the convergence molding is performed at the time of emission, a line-shaped electromagnetic wave having a high wave collecting property can be obtained without performing the convergence molding.

  According to the invention of claim 12, since the cylindrical lens and the emission opening are integrally formed, the linear electromagnetic wave emitted from the emission opening is further converged without increasing the size of the apparatus. As a result, it is possible to obtain a line-shaped electromagnetic wave having a very high wave collecting property.

<First Embodiment>
Hereinafter, a receiving antenna and a nondestructive inspection apparatus using the receiving antenna according to a first embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is an overall perspective view of a main part for explaining the configuration of a nondestructive inspection apparatus using millimeter waves.
In FIG. 1, a nondestructive inspection apparatus (hereinafter simply referred to as an inspection apparatus) 1 is roughly divided on a table 2 to be inspected placement unit 3, millimeter wave transmission unit 4 as an electromagnetic wave transmission unit, and electromagnetic wave reception unit. As a millimeter wave receiver 5 is also provided in the X-axis direction. The test placement unit 3 is a part on which the test subject S is placed, the millimeter wave transmission unit 4 irradiates the test subject S with millimeter waves, and the millimeter wave reception unit 5 passes through the test subject S. A transmitted wave (millimeter wave) is received.
(Inspection placement part 3)
The base 11 of the placement unit 3 to be inspected is fixed to the table 2. The base 11 is a frame, and supports the first screw screw 12 so as to be rotatable in the Y-axis direction perpendicular to the X-axis direction within the frame. The first screw screw 12 is rotated forward and backward by a first motor M1 attached to the outside of the base 11. A first support 13 is placed on the base 11 so as to be movable only in the Y-axis direction. The base end portion of the first support base 13 is fitted into the frame of the base 11 and is screwed into the first screw screw 12. Therefore, when the first screw screw 12 rotates forward and backward by the first motor M1, the first support base 13 reciprocates in the Y axis direction with respect to the base 11.

The first support base 13 is a frame extending in the Z-axis direction (axis perpendicular to the plane formed by the X-axis and Y-axis), and is second in the Z-axis direction within the frame. The screw screw 14 is rotatably supported. The second screw screw 14 is rotated forward and backward by a second motor M2 attached to the upper surface of the first support base 13. A first lifting block 15 is attached to the first support base 13 so as to be movable only in the Z-axis direction. The base end portion of the first lifting block 15 is fitted into the frame of the first support base 13 and is screwed into the second screw screw 14. Therefore, when the second screw screw 14 rotates forward and backward by the second motor M2, the first lifting block 15 reciprocates in the Z axis direction with respect to the first support base 13.

  A mounting table 16 is fixed to the first lifting block 15. The mounting table 16 is made of a plate bent in an L shape, and a portion parallel to the surface formed by the X axis and the Y axis is a mounting portion 16a, and the object S to be inspected is mounted on the mounting portion 16a. The Accordingly, the position of the inspection object S placed on the placement portion 16a is adjusted in the Y and Z axis directions within a predetermined range. That is, the base 11, the first and second screw screws 12, 14, the first support base 13, the first lifting block 15, the first and second motors M1, M2 are provided with the first moving means. It is configured.

(Millimeter wave transmitter 4)
A millimeter wave transmitter 4 is provided on one side of the inspected placement unit 3. The millimeter wave transmission unit 4 includes a rail 21 fixed to the table 2. The rail 21 extends in the X-axis direction, and a first rail carrier 22 is placed on the rail 21 so as to be reciprocally movable along the rail 21 (in the X-axis direction). A base 23 is fixed on the first rail carrier 22.

  A third screw screw 24 protruding in the Z-axis direction from the center of the upper surface of the base 23 is rotatably supported. The third screw screw 24 is rotated forward and backward by an adjustment knob 25 provided on the side surface of the base 23. In addition, a guide bar 26 is formed on the base 23 so as to protrude parallel to the third screw screw 24 on one side of the upper surface thereof.

  The guide bar 26 supports and supports the Z-axis direction moving table 27. The Z-axis direction moving table 27 is supported so as to be capable of reciprocating in the vertical direction (Z-axis direction) along the guide bar 26. The Z-axis direction moving base 27 is screwed with a third screw screw 24. Accordingly, when the third screw screw 24 is rotated forward and backward by the adjustment knob 25, the Z-axis direction moving base 27 is moved along the guide bar 26 in the vertical direction (Z-axis line) without being rotated by the third screw screw 24. Direction).

  A groove is formed on the upper surface of the Z-axis direction moving table 27 in the Y-axis direction, and an adjustment knob 28 is provided on a side surface of the Z-axis direction moving table 27. On the upper surface of the Z-axis direction moving table 27, a Y-axis direction moving table 29 is placed along the groove so as to be able to reciprocate in the Y-axis direction. On the lower surface of the Y-axis direction moving table 29, a convex portion extending in the Y-axis direction is fitted in a groove formed in the Z-axis direction moving table 27. The Y-axis direction moving table 29 is provided with a drive mechanism (not shown) provided between the Z-axis direction moving table 27 and the Y-axis direction moving table 29 by an adjustment knob 28 provided on the side surface of the Z-axis direction moving table 27. And reciprocates in the Y-axis direction. A second support table 30 is fixed on the upper surface of the Y-axis direction moving table 29, and a millimeter wave transmitter stage 31 is supported and fixed on the upper side of the second support table 30. Therefore, the position of the millimeter wave transmission unit stage 31 is adjusted in the X, Y, and Z axis directions within a predetermined range.

  On the millimeter wave transmitter stage 31, a millimeter wave oscillator 32 as an electromagnetic wave oscillator is placed. The millimeter wave oscillator 32 is positioned and fixed with respect to the millimeter wave transmitter stage 31 by a millimeter wave oscillator fixing jig 36 attached to a fixing member 35 erected on the millimeter wave transmitter stage 31. The fixing members 35 are erected on the millimeter wave transmitting unit stage 31 as a set of two in order to fix the millimeter wave oscillator fixing jig 36 in parallel to the millimeter wave transmitting unit stage 31.

A horn 34 is placed on the inspected placement unit 3 side of the millimeter wave transmitting unit stage 31 so as to face the inspected object S of the inspected placement unit 3. The horn 34 is positioned and fixed to the millimeter wave transmitter stage 31 by a horn fixing jig 37 attached to two fixing members 35 erected on the millimeter wave transmitter stage 31. The horn 34 is connected to the millimeter wave oscillator 32 via the waveguide 33. Accordingly, the millimeter wave oscillator 32, the waveguide 33, and the horn 34 that are positioned and fixed with respect to the millimeter wave transmitter stage 31 are adjusted in position in the X, Y, and Z axis directions within a predetermined range. Become. That is, the rail 21, the first rail carrier 22, the base 23, the third screw screw 24, the adjustment knobs 25 and 28, the guide bar 26, the Z-axis direction moving table 27, and the Y-axis direction moving table 29 are the second The moving means is configured.

  Then, the millimeter wave output from the millimeter wave oscillator 32 is transmitted to the horn 34 via the waveguide 33 and is emitted from the horn 34 toward the object S to be inspected. The millimeter wave diverges and propagates with a specific divergence angle with respect to the X-axis, but by being emitted by the horn 34, it becomes possible to propagate with good directivity while maintaining a shape substantially parallel to the X-axis. . The millimeter wave emitted by the horn 34 in a state of being substantially parallel to the X axis and having directivity is called a Gaussian beam.

  A second rail carrier 38 is mounted on the rail 21 on the inspected mounting portion 3 side of the first rail carrier 22 so as to be reciprocally movable along the rail 21 (in the X-axis direction). Has been. On the second rail carrier 38, a stand 39 extending in the Z-axis direction is fixed. A ring (annular support frame) 40 is attached to the upper portion of the stand 39 so as to be reciprocally movable in the Z-axis direction. The ring (annular support frame) 40 can be moved and adjusted in the Z-axis direction by an adjustment knob (not shown) provided on the stand 39. A cylindrical lens 41 as an electromagnetic wave shaping means is supported and fixed in the ring (annular support frame) 40 within the frame.

  The cylindrical lens 41 is arranged between the horn 34 and the inspected object S of the inspected mounting portion 3. The cylindrical lens 41 converges and shapes the millimeter wave emitted from the horn 34 into a line extending in the Z-axis direction.

  More specifically, the cylindrical lens 41 emits a millimeter wave, which is converged in a line extending in the Z-axis direction, from the horn 34 to the object S to be inspected. Therefore, the millimeter wave converged in a line extending in the Z-axis direction is irradiated from the cylindrical lens 41 onto the surface (irradiation surface) of the inspection object S facing the cylindrical lens 41. By adjusting the shape of the cylindrical lens 41 or the distance between the horn 34 and the cylindrical lens 41 in the X-axis direction, the millimeter wave is shaped so that the convergence portion is maintained by an arbitrary distance in the X-axis direction. It is possible. Accordingly, the millimeter wave can be converged and shaped so as to pass through the inside of the inspection object S while maintaining a line shape extending in the Z-axis direction. The length of the millimeter wave converged in a line extending in the Z-axis direction in the Z-axis direction can be adjusted by the shape of the cylindrical lens 41 or the distance between the horn 34 and the cylindrical lens 41 in the X-axis direction. ing. In the present embodiment, the distance in the Z-axis direction of the millimeter wave extending linearly in the Z-axis direction can be shaped to the same distance as or more than the distance in the Z-axis direction of the object S to be inspected. As described above, the shapes or installation positions of the horn 34 and the cylindrical lens 41 are set.

  Therefore, when a line-shaped millimeter wave that is converged and shaped on the Z-axis is incident on the inspection object S, the millimeter wave passes through the inspection object S and is transmitted from the opposite surface of the inspection object S. It is emitted as (transmitted millimeter wave). At this time, the transmitted millimeter wave is emitted as a linear millimeter wave converged on the same Z axis as the incident millimeter wave.

(Millimeter wave receiver 5)
On the other side of the inspected placement unit 3, a millimeter wave receiving unit 5 is provided. The millimeter wave receiving unit 5 has a base 51 fixed to the table 2. The base 51 is a frame, and supports the fourth screw screw 52 so as to be rotatable in the Y-axis direction perpendicular to the X-axis direction within the frame. The fourth screw screw 52 rotates forward and backward by a third motor M3 attached to the outside of the base 51. A third support 54 is mounted on the base 51 so as to be movable only in the Y-axis direction. The base end portion 53 of the third support base 54 is fitted in the frame of the base 51 and is screwed into the fourth screw screw 52. Accordingly, when the fourth screw screw 52 rotates forward and backward by the third motor M3, the third support base 54 reciprocates in the Y axis direction with respect to the base 51.

  The third support base 54 is a frame body, and supports the fifth screw screw 55 so as to be rotatable in the X-axis direction within the frame body. The fifth screw screw 55 rotates forward and backward by a fourth motor M4 attached to the outside of the third support base 54. A fourth support base 56 is placed on the third support base 54 so as to be movable only in the X-axis direction. The base end portion of the fourth support base 56 is fitted into the frame of the third support base 54 and is screwed into the fifth screw screw 55. Accordingly, when the fifth screw screw 55 rotates forward and backward by the fourth motor M4, the fourth support base 56 reciprocates in the X axis direction with respect to the third support base 54.

  The fourth support base 56 is a frame extending in the Z-axis direction, and supports the sixth screw screw 57 in the frame and rotatably in the Z-axis direction. The sixth screw screw 57 rotates forward and backward by a fifth motor M5 attached to the outside of the fourth support base 56. A second lifting block 58 is attached to the fourth support base 56 so as to be movable only in the Z-axis direction. The base end portion of the second elevating block 58 is fitted in the frame of the fourth support base 56 and is screwed into the sixth screw screw 57. Therefore, when the sixth screw screw 57 rotates forward and backward by the fifth motor M5, the second lifting block 58 reciprocates in the Z axis direction with respect to the fourth support base 56.

  A millimeter wave receiver stage 59 parallel to a plane formed by the X axis and the Y axis is fixed to the second lifting block 58. Therefore, the position of the millimeter wave receiver stage 59 is adjusted in the X, Y, and Z axis directions within a predetermined range. That is, the base 51, the fourth screw screw 52, the third support base 54, the fifth screw screw 55, the fourth support base 56, the sixth screw screw 57, the second lifting block 58, the third The fifth to fifth motors M3 to M5 constitute third moving means.

  A millimeter wave receiver 60 as an electromagnetic wave receiver is fixed to the millimeter wave receiver stage 59. A millimeter wave receiving antenna 61 as a receiving antenna for receiving millimeter waves is formed on the side surface of the millimeter wave receiver 60 on the inspected mounting portion 3 side so as to extend in the X-axis direction.

  Furthermore, a base 81 is fixed between the base 11 and the base 51 on the table 2, and a support base 82 is fixed to the base 81. The support base 82 extends in the Z-axis direction, and a motor placement portion 83 for fixing and supporting the sixth motor M6 is formed at the upper end portion thereof. A disc 84 as an incident allowing member is connected to the sixth motor M6 fixed on the motor mounting portion 83 at its central axis 84b. The disc 84 is a plate having an electromagnetic wave non-transparent property, and has a radius sufficient to completely block the propagation path from the millimeter wave emitted from the horn 34 to the millimeter wave receiving antenna 61. have.

Next, the millimeter wave receiving antenna 61 will be described with reference to FIGS.
The millimeter wave receiving antenna 61 is an antenna that receives a line-shaped transmitted millimeter wave that is converged on the Z-axis line that passes through the object S to be inspected and outputs it to the millimeter wave receiver 60. Body 6
3.

  The proximal end of the waveguide 62 is connected to the millimeter wave receiver 60 via the flange 64, and guides the line-shaped transmitted millimeter wave received by the tube 63 formed at the distal end to the millimeter wave receiver 60. The cross-sectional shape of the waveguide 62 is formed in a rectangle that is long in the Y-axis direction as shown in FIG. Since the standard of the waveguide 62 is defined by the transmitted millimeter wave frequency, the cross-sectional shape is uniquely determined with respect to the millimeter wave frequency used for the nondestructive inspection.

  As shown in FIGS. 2, 3, and 6, the tube body 63 formed at the distal end portion of the waveguide 62 has an opening surface that is widened in the Z-axis direction toward the inspection object S, An incident opening 63a is formed by converging in the Y-axis direction, and the incident opening 63a is formed in a slit shape extending narrowly in the Z-axis direction. Incidentally, the base end portion 63 b matches the cross-sectional shape of the waveguide 62.

  2 and 4, the side (long side) of the incident opening 63a in the Z-axis direction is about the length of the inspection object S in the Z-axis direction or more, and the line shape is transmitted through the inspection object S. The transmitted millimeter wave in the Z-axis direction is received. A side (short side) in the Y-axis direction of the incident opening 63a receives a transmission millimeter wave in the Y-axis direction of a line-shaped transmission millimeter wave that has passed through the inspection object S. In the present embodiment, the incident opening 63a is formed with a long side of 100 millimeters and a short side of 1 millimeter. In other words, the opening shape of the incident opening 63a needs to be the shape of the exit surface through which the line-shaped transmitted millimeter wave that is opposite to the line-shaped incident surface irradiated with the millimeter wave of the inspection object S is transmitted and emitted. It is determined according to the inspection accuracy. In short, the length of the long side is set to be equal to or longer than the length in the Z-axis direction on the transmission millimeter wave output surface, and the length of the short side is set to be equal to or less than millimeters.

  Accordingly, the tube 63 receives the line-shaped transmitted millimeter wave that passes through the device under test S and exits from the exit surface of the device under test S, and guides it to the waveguide 62. Then, the waveguide 62 outputs the transmitted millimeter wave received by the tube 63 to the millimeter wave receiver 60. As a result, the line-shaped transmitted millimeter wave that passes between the incident surface of the line-shaped millimeter wave in the inspected object S and the exit surface opposite to the incident surface is output to one millimeter-wave receiver 60. Will be.

Next, the millimeter wave receiving antenna 61 and the disk 84 will be described with reference to FIGS.
FIG. 8 is a front view of the millimeter wave receiving antenna 61 and the disk 84.
In the disk 84, a slit 84a is formed in the radial direction from the vicinity of the central axis 84b in which the short side is 1 millimeter and the long side is substantially equal to the radius of the disk 84. Since the slit 84a rotates around the central axis 84b of the disc 84 as the disc 84 rotates, the region where the incident opening 63a of the millimeter wave receiving antenna 61 is exposed from the slit 84a corresponds to the rotation of the disc 84. Thus, it moves from one end to the other end. That is, the region of the incident opening 63 a where the electromagnetic wave can enter the millimeter wave receiving antenna 61 moves from one end to the other end in accordance with the rotation of the disk 84.

  FIG. 9 is a rear perspective view of the millimeter wave receiving antenna 61 and the disc 84. The rotation shaft of the sixth motor M6 is connected to the central shaft 84b (not shown in FIG. 9) of the disc 84, and can be rotated by driving the sixth motor M6. Therefore, the sixth motor M6 and the disk 84 have a function as an encoder. The function as an encoder will be described in detail later.

As shown in FIGS. 8 and 9, the millimeter wave receiving antenna 61 includes a millimeter wave (that is, the short side of the incident opening 63a and the slit 84a) that has passed through the region where the slit 84a is located in the incident opening 63a. Only a millimeter wave that has passed through a minute range surrounded by). Therefore, in accordance with the movement of the slit 84a, the millimeter wave continuously received as a plurality of signals from the millimeter wave incident on one end of the incident opening 63a to the millimeter wave incident on the other end of the incident opening 63a. Is input to the device 60.

Next, the electrical configuration of the nondestructive inspection apparatus 1 configured as described above will be described with reference to FIG.
In FIG. 10, the nondestructive inspection apparatus 1 includes a computer 70 as control means and analysis means, and the computer 70 is electrically connected to the millimeter wave oscillator 32 and the millimeter wave receiver 60. The computer 70 drives and controls the millimeter wave oscillator 32 based on a predetermined program. The computer 70 inputs information received by the millimeter wave receiver 60 via the millimeter wave reception antenna 61. The computer 70 analyzes and evaluates the inspected object S based on the voltage value from the millimeter wave receiver 60.

  FIGS. 11A and 11B are system configuration diagrams for explaining the millimeter wave receiver 60. FIG. 11A shows a case where a super-heterodyne detection method is used for the millimeter wave receiver 60. In the superheterodyne detection method, the signal received from the millimeter wave receiving antenna 61 and the signal generated by the local oscillator Lo are mixed by the frequency mixer MIX, and an intermediate frequency is generated from the sum or difference of the frequencies of both signals. The intermediate frequency is amplified by the intermediate frequency amplifier IF, and the frequency of the signal received by the millimeter wave receiving antenna 61 from the intermediate frequency is demodulated by the detector DET. The signal demodulated by the detector DET is converted into a voltage value according to the power value by detection, and the extracted voltage value is input to the computer 70.

FIG. 11B shows a case where a quadrature detection method is used for the millimeter wave receiver 60. In the quadrature detection method, the signal received by the millimeter wave receiving antenna 61 is divided into two, one input to the 90 ° phase shifter 60a and the other input to the 0 ° phase shifter 60b. The 90 ° phase shifter 60a outputs two signals, a signal shifted in phase by π / 2 and a signal not shifted in phase, and the 0 ° phase shifter 60b outputs two signals not shifted in phase. Those signals are inputted one by one to two independent frequency mixers MIX. That is, two signals whose phases are not shifted are input to one frequency mixer MIX, and a signal whose phase is shifted and a signal whose phases are not shifted are input to one of the frequency mixers MIX. The difference signals of the input signals are separated from the two frequency mixers MIX, and are derived as signals ch1 and ch2. The two signals are further subjected to removal of high frequency components by a low-pass filter LPF and input to a computer. In the computer 70, it is possible to obtain an amplitude-modulated signal by converting the two signals ch1 and ch2 according to ((ch1) ² + (ch2) ² ) ^1/2 , and this signal is processed as an amplitude value. Is done.

  The computer 70 is electrically connected to the first to sixth motor drive circuits 71 to 76 constituting the control means. The computer 70 controls the rotation of the corresponding first to sixth motors M1 to M6 via the first to sixth motor drive circuits 71 to 76, respectively. The computer 70 appropriately controls rotation of the first to sixth motors M1 to M6 according to a program for position adjustment, and appropriately controls rotation of the first to sixth motors M1 to M6 according to a program for inspection. It has become.

Next, position adjustment of the inspected placement unit 3, the millimeter wave transmission unit 4, and the millimeter wave reception unit 5 configured as described above will be described.
(Millimeter wave transmitter 4)
The position of the horn 34 and the cylindrical lens 41 is adjusted so that the millimeter wave emitted from the millimeter wave transmitter 4 is converged and shaped at the position of the inspection object S on the X axis. First, the position of the cylindrical lens 41 in the Z-axis direction is arbitrarily determined. Since the cylindrical lens 41 cannot move in the Y-axis direction, the positions of the cylindrical lens 41 in the Y-axis direction and the Z-axis direction are determined at this point.

  Next, the horn 34 is aligned with the determined position of the cylindrical lens 41. By rotating the adjusting knob 25 of the base 23 and the adjusting knob 28 of the Y-axis direction moving table, the millimeter wave transmitting unit stage 31 is moved and adjusted in the Y-axis direction and the Z-axis direction, and the Y-axis direction of the horn 34 is adjusted. Determine the position in the Z-axis direction. By determining the positions in the Y-axis direction and the Z-axis direction, the millimeter wave emitted from the horn 34 enters the cylindrical lens 41 as a Gaussian beam substantially parallel to the X-axis line.

  Finally, the position of the cylindrical lens 41 is adjusted with respect to the X-axis direction. That is, by sliding the second rail carrier 38 on the rail 21 in the X-axis direction, the distance between the cylindrical lens 41 and the object S to be inspected is adjusted, and the Z-axis line on the incident surface of the object S to be inspected. The line-shaped millimeter wave extending in the direction is set to be converged and shaped so as to be incident.

  In addition, since the millimeter wave is easily attenuated by the influence of air, it is preferable that the propagation path is short. Therefore, the first rail carrier 22 on the rail 21 is moved in the X-axis direction so that the distance between the horn 34 and the cylindrical lens 41 approaches. However, since the distance in the X-axis direction where the converging part of the millimeter wave is maintained changes according to the distance between the horn 34 and the cylindrical lens 41, it is necessary to move the lens in consideration of the state of the converging shaping of the millimeter wave. With the above operation, the position adjustment of the millimeter wave transmission unit 4 is completed. Further, in the millimeter wave transmission unit 4, a line-shaped millimeter wave extending in the Z-axis direction on the incident surface with respect to the inspection object S placed on the placement unit 16 a of the inspection placement unit 3 is obtained. The position adjustment is not limited to the above procedure.

(Inspection placement part 3)
In the inspected placement unit 3, the initial position of the inspected object S is determined. First, the first motor M1 provided on the base 11 is rotated so that the end of the inspected object S in the Y-axis direction is irradiated with a line-shaped millimeter wave extending in the Z-axis direction. The support base 13 is moved in the Y axis direction. Next, in the Z-axis direction, the second motor M2 provided on the first support base 13 is rotated so that the millimeter wave is irradiated to the entire area to be inspected S, and the first lifting block 15 is moved. Move. With the above operation, the initial alignment of the inspection object S is completed. The alignment operation of the initial position of the inspection object S only needs to be able to align the inspection object S at the intended position in the Y and Z axis directions, and the operation order is not limited to the above.

(Millimeter wave receiver 5)
Next, the position of the millimeter wave receiving unit 5 is adjusted. The millimeter wave receiving unit 5 determines the initial position of the millimeter wave receiving antenna 61. The position of the millimeter wave receiving antenna 61 in the Y-axis direction is a range in which the millimeter wave emitted from the horn 34 in the Y-axis direction can be incident on the central portion, that is, on the Z-axis line by the cylindrical lens 41. The third motor M3 provided on the base 51 is rotated so as to be on the Y-axis opposite to the line-shaped millimeter wave that is converged and shaped. Next, a fifth motor provided on the fourth support base 56 so that the millimeter wave transmitted through the entire region in the Z-axis direction of the inspected object S is incident on the incident opening 63a of the millimeter-wave receiving antenna 61. Rotate M5.

Next, when receiving with the millimeter wave receiving antenna 61, the object to be inspected S, the mounting portion 16a, and the mounting table 16 are not affected by interference when moving, and as close as possible to the object to be inspected S without contact. The fourth motor M4 provided on the third support base 54 is rotated to the position as described above, and the fourth support base 56 is moved in the X-axis direction. With the above operation, the alignment of the millimeter wave receiving antenna 61 is completed. The initial position adjustment operation of the millimeter wave receiving antenna 61 is only required to align the millimeter wave receiving antenna 61 at the intended position on the X, Y, and Z axes, and the operation order is not limited to the above. Absent. In addition, the slit 84a may be moved from one end to the other end of the incident opening 63a from the start of the inspection, so that it is not necessary to set the alignment strictly at the initial stage.

Next, the operation of nondestructive inspection will be described.
When the position adjustment described above is completed, the computer 70 executes a nondestructive inspection processing operation based on a nondestructive inspection program.

  First, the computer 70 drives the millimeter wave oscillator 32 to emit a millimeter wave from the horn 34. The millimeter wave emitted from the horn 34 is converged and shaped on the Z-axis by the cylindrical lens 41, is incident on the inspection object S, and is transmitted through the inspection object S. The millimeter wave that has passed through the inspected object S is received by the millimeter wave receiver 60 via the millimeter wave receiving antenna 61 that is opposed to the transmitted millimeter wave and starts a nondestructive inspection.

  In the nondestructive inspection, as shown in FIGS. 12B and 12C, the millimeter-wave receiving antenna 61 is a disc of the line-shaped transmitted millimeter waves that pass through the device under test S and extend in the Z-axis direction. Only the millimeter wave that has passed through the slit 84 a formed in 84 is received by the tube 63 (incident opening 63 a) of the millimeter wave receiving antenna 61. Since the slit 84a moves from one end of the incident opening 63a to a position corresponding to the other end in accordance with the rotation of the disk 84, the tubular body 63 (the incident opening 63a) of the millimeter wave receiving antenna 61 has the slit 84a. Receive continuous millimeter wave as the movement of. Therefore, in the present embodiment, a line-shaped transmitted millimeter wave extending in the Z-axis direction is moved from one end to the other end without moving the millimeter-wave receiving antenna 61 (millimeter-wave receiver 60) in the Z-axis direction. The millimeter waves in each region can be received continuously.

  By making the combination of the disk 84 and the sixth motor M6 (not shown in FIG. 12) also function as an encoder, the position of the slit 84a can be monitored. By utilizing this, it can be detected that the slit 84a has moved from one end to the other end, and can be used as a signal for instructing the timing for moving the inspection object S in the Y-axis direction. Although a receiver that receives a signal from the encoder is not shown, the signal is input to the computer 70 and serves as a trigger for driving the first motor M1. When the inspection object S is moved in the Y-axis direction by the first motor M1 (not shown in FIG. 12), a line-shaped millimeter wave is incident on a new portion of the inspection object S. The millimeter wave reception antenna 61 (millimeter wave receiver 60) transmits the transmission millimeter wave that passes through the slit 84a out of the transmission millimeter wave that is emitted from the emission surface opposite to the incident surface on which the millimeter wave is newly incident. Receives millimeter waves and performs nondestructive inspection.

  By repeating this operation, the non-destructive inspection is performed on all parts of the inspection object S. FIG. 12A is a schematic diagram for explaining the nondestructive inspection. In FIG. 12A, first, a line-shaped transmitted millimeter wave emitted from a portion (first region D1) extending in the Z axis direction closest to the object S to be inspected is converted into a millimeter wave receiving antenna 61 (millimeter wave receiver). 60), the millimeter wave receiving antenna 61 is sequentially received from one end to the other end in the Z-axis direction while rotating the circular plate 84. Next, the inspected object S is moved forward, and the line-shaped transmitted millimeter wave emitted from the portion extending in the Z-axis direction adjacent to the first region D1 (second region D2) is converted into the millimeter-wave receiving antenna 61 (millimeter wave). With the wave receiver 60) fixed, the millimeter wave receiving antenna 61 is sequentially received from one end to the other end in the Z-axis direction while rotating the disc 84.

As described above, since the millimeter wave receiving antenna 61 does not need to be moved during the inspection, the inspected object S is continuously moved according to the rotation of the disk 84 while receiving the millimeter wave with the millimeter wave receiving antenna 61. By moving it forward, the first region D1, the second region D2, the third region D3, and the fourth region D4 can be continuously nondestructively inspected. Moreover, each region has a slit 8
Since the area is subdivided by 4a, non-destructive inspection can be performed in detail in each area (D1, D2, D3, D4).

  In short, in this embodiment, in FIG. 12A, the signal obtained from the disk 84 and the sixth motor M6 functioning as an encoder while the millimeter wave receiving antenna 61 (millimeter wave receiver 60) is fixed. Accordingly, the non-destructive inspection is performed on all the parts of the inspection object S only by controlling the first motor M1 and moving the inspection object S forward. In this case, by sufficiently increasing the rotational angular velocity of the sixth motor M6, it becomes possible to increase the speed of scanning each region in the Y-axis direction, so that the inspection object S is continuously moved. Thus, it is possible to control the first motor M1.

  Accordingly, in the present embodiment, after the position adjustment (setting) of the inspection placement unit 3 (inspection object S), the millimeter wave transmission unit 4 and the millimeter wave reception unit 5 is performed once, the inspection placement unit 3 is changed. Nondestructive inspection is performed only by controlling movement only in the Y-axis direction. That is, the millimeter wave transmission unit 4 and the millimeter wave reception unit 5 remain stationary and do not need to be changed during the nondestructive inspection. More specifically, as compared to controlling the movement of the millimeter wave transmission unit 4 and the millimeter wave reception unit 5 in synchronization with each other, the control is only performed on the inspected mounting unit 3, and therefore, nondestructive inspection can be performed easily and with high accuracy. Can do. In addition, the inspected mounting unit 3, the millimeter wave transmission unit 4, and the millimeter wave reception unit 5 do not move in the X-axis direction during the inspection, so that the phase or the like is not shifted and a high-accuracy inspection can be performed. . Further, in the Z-axis direction, the distance in the linearly extending millimeter wave direction, the length of the side extending in the Z-axis direction of the incident opening 63a of the millimeter-wave receiving antenna 61, and the radius of the disk 84 are defined. By adjusting in accordance with the inspection object S, it becomes possible to quickly and highly non-destructively inspect the inspection object S of any size.

  When the millimeter wave receiver 60 receives the transmitted millimeter wave transmitted through the inspected object S, the millimeter wave receiver 60 detects the received millimeter wave by the above-described superheterodyne detection method or quadrature detection method, and the voltage value data is detected. Output to the computer 70.

  13A, 13B, and 13C, the millimeter wave received by the millimeter wave receiving antenna 61 is received by the millimeter wave receiver 60 with the configuration shown in FIG. Is a graph showing the distribution of voltage values. The X axis of the graph displays the difference between the millimeter wave voltage values (V). In other words, voltage value data obtained when transmitting and receiving millimeter waves without the inspection object S being set is used as a control value, and actual measurement value data obtained when the inspection object S is actually installed. The voltage value obtained by subtracting the control value from the X axis is taken as the X axis. The Y axis corresponds to each region in the inspection object S in FIG. 12A (corresponding to the first region D1, the second region D2, the third region D3, and the fourth region D4 in FIG. 12A). ing. The Z-axis line corresponds to the position in the Z-axis direction of the slit 84a in the disc 84 in FIG. That is, the Y-axis-Z-axis in the graphs of FIGS. 13A, 13B, and 13C is a surface formed by the Y-axis direction and the Z-axis direction in the inspected object S, that is, a millimeter wave is incident. , Corresponding to the transparent surface. The millimeter wave receiver 60 subdivides the incident opening 63a with the slit 84a in the Z-axis direction, and obtains a large number of samplings of the transmitted millimeter wave transmitted through the object S to be inspected in the Z-axis direction. Further, after moving the inspection object S in the Y-axis direction, a large number of samples are obtained again in the Z-axis direction and output to the computer 70. Accordingly, the voltage value distribution of the electromagnetic wave can be displayed on the graph set on the axis corresponding to the Y axis and the Z axis of the object S to be inspected, and the inside of the object S to be inspected based on the obtained voltage value distribution. Can be easily evaluated.

More specifically, in the distribution of voltage values in the graph shown in FIG. 13A, the voltage values are uniform in all regions, and no significant deviation is observed between the voltage values. In such a case, it can be evaluated that the inside of the inspection object S is uniform in all regions of the inspection object S,
That is, it is determined that there is no abnormality in the inspection object S.

  On the other hand, in the voltage value difference distribution in the graph shown in FIG. 13B, there is a portion where the voltage value difference is locally large. In particular, since the distribution map protrudes in the minus direction, this indicates that the millimeter wave is attenuated for some reason in this region. That is, it is determined that some abnormality exists in the inspection object S in this region.

  FIG. 13C is a graph in which the display form is improved so that the data obtained as shown in FIG. More specifically, the graph axis is a two-dimensional matrix with the YZ axis, and the absolute value of the voltage value difference in each matrix is expressed by the shade of the display color. The matrix color is darkly displayed in a region that coincides with a region that is recognized as having an abnormality in the graph of FIG. By setting it as such a display form, matching with acquisition data and the plane of the to-be-inspected object S Y-axis is easy, and the position of about 0-25 in the Y-axis in the graph of FIG.13 (c). Thus, it can be easily grasped that there is an abnormality in the inspection object S at a position corresponding to a position of about 65 to 75 on the Z axis.

Next, the effect of the nondestructive inspection apparatus 1 configured as described above will be described below.
(1) According to the present embodiment, the incident opening 63a of the millimeter wave receiving antenna 61 (tubular body 63) is formed into a slit shape extending narrowly in the Z-axis direction, and a circle is formed between the incident opening 63a and the test object S. A plate 84 was provided. Further, a slit 84a is formed in the circular plate 84, and in a region where the incident opening 63a and the slit 84a coincide with each other, the incident surface of the object to be inspected S and the line-shaped light that exits from the exit surface opposite to the entrance surface. The transmission millimeter wave can be received. Therefore, a line-shaped transmission millimeter wave that passes between the incident surface of the line-shaped millimeter wave in the object to be inspected S and the opposite exit surface with a simple configuration is subdivided in the line-shaped extending direction to provide one unit. Can be output to the millimeter wave receiver 60. As a result, all the regions of the inspection object S can be nondestructively inspected at high speed only by rotating the disk 84 and moving the inspection object S. Since the length of the side (short side) in the Y-axis direction of the incident aperture 63a is very short, low noise reception is possible. In addition, since the inspection object S is moved in the short side direction (Y-axis direction), even a very small abnormal range can be detected. Furthermore, since the entrance opening 63a is subdivided in the long side direction (Z-axis direction), it is possible to acquire two-dimensional data and perform advanced analysis such as specification of an abnormal position.

(2) In the present embodiment, the disk 84 is rotated after the position adjustment (setting) of the inspected mounting unit 3 (inspected object S), the millimeter wave transmitting unit 4 and the millimeter wave receiving unit 5 is once performed. The non-destructive inspection is performed on all the parts of the inspected object S only by moving and controlling the inspected mounting portion 3 in the Y axis direction based on the encoder signal. Therefore, the millimeter wave transmitter 4 and the millimeter wave receiver 5 may remain stationary during the nondestructive inspection, and complicated control is not necessary.
Furthermore, since the inspected mounting unit 3, the millimeter wave transmission unit 4, and the millimeter wave reception unit 5 do not move in the X-axis direction during the inspection, the phase or the like is not shifted, and a high-accuracy inspection can be performed. .

(3) Since the millimeter wave incident on the inspected object S is a millimeter wave converged in a line extending in the Z-axis direction by the cylindrical lens 41, the millimeter wave receiver 60 is stable at a high level (high value). A detection signal can be obtained.

(4) In the above-described embodiment, in the millimeter wave transmitter 4, the horn 34 and the cylindrical lens 41 are independently movable in the X axis direction. Therefore, when the cylindrical lens 41 is set together with the horn 34 on the millimeter wave transmitter stage 31, the position adjustment is very easy as compared with the case where the cylindrical lens 41 is positioned on the millimeter wave transmitter stage 31. Become. In particular, since the spreading angle of the millimeter wave varies depending on the shape and frequency of the horn, the horn 34 can be transmitted according to the millimeter wave frequency in order to efficiently transmit the millimeter wave of an arbitrary frequency as a Gaussian beam. When changing the shape, it is necessary to adjust the position of the cylindrical lens 41 with respect to the horn 34. The waveguide 33 needs to be changed to an integral multiple of the wavelength of the millimeter wave to be used, but the horn 34 is first adjusted in position relative to the waveguide 33 and then adjusted in position with the cylindrical lens 41. Therefore, the position adjustment is very easy.

(5) As the length of the short side of the slit 84a is shortened, the millimeter wave incident from the incident opening 63a can be subdivided and received, so that more advanced analysis can be performed. On the contrary, if the length of the short side is increased, the area of the millimeter wave that can be received at a time becomes wider, so that the inspection speed of the nondestructive inspection can be increased. In this way, the degree of analysis and inspection speed of nondestructive inspection can be changed simply by adjusting the short side of the slit 84a, so that the nondestructive inspection apparatus 1 can be inspected for any inspection with only simple adjustments. It becomes possible to make it correspond to the purpose.

(6) By setting the short side of the incident opening 63a to 1 millimeter, it is possible to reduce the millimeter wave incident on the millimeter wave receiving antenna 61 with low noise in the direction in which the short side of the incident opening 63a extends. . Further, the incident opening 63a is subdivided by a slit 84a whose long side extends in the direction in which the long side extends, so that the noise can be reduced even in the direction in which the long side of the incident opening 63a extends. is there. As a result, the millimeter wave that is continuously incident as a plurality of data has extremely low noise, so that the inspection accuracy can be remarkably improved.

<Second Embodiment>
Next, a second embodiment of the nondestructive inspection apparatus will be described.
FIG. 14A is a simplified perspective view for explaining a configuration in which a liquid crystal shutter 85 and a millimeter wave receiving antenna 61 as an incidence allowing member different from the above embodiment are combined. The millimeter wave receiving antenna 61 in the second embodiment can be used similarly as the millimeter wave receiving antenna 61 by a device equivalent to the nondestructive inspection device in FIG. However, since the liquid crystal shutter 85 is provided in the incident opening 63a as an alternative to the disk 84 as the incident allowing member in FIG. 1, it is not necessary to install a large installation such as the disk 84 and the sixth motor M6. It is. That is, the inspected mounting unit 3 and the millimeter wave transmitting unit 4 can use the same ones as in the first embodiment, and the initial position alignment and data analysis method can be performed in the same manner as in the first embodiment. it can. Therefore, in the description of the second embodiment, only the combination of the liquid crystal shutter 85 and the millimeter-wave receiving antenna 61 which are features will be described, and the other description will be omitted.

  As shown in the cross-sectional view of FIG. 14B, the liquid crystal shutter 85 is composed of two polarizing plates 86a and 86b and a liquid crystal panel 87 interposed between the polarizing plates. Although not shown, the liquid crystal panel 87 is obtained by injecting nematic liquid crystal between glass substrates with electrodes subjected to alignment treatment. The two polarizing plates 86a and 86b are combined so that the degree of polarization is twisted by 90 degrees. When a voltage is applied between the electrodes, the optical rotation is lost by changing the molecular arrangement of the liquid crystal due to the electric field, and as a result, millimeter waves cannot pass. Conversely, when no voltage is applied, optical rotation occurs due to the orientation of the liquid crystal molecules, and as a result, millimeter waves are transmitted. By combining the polarization degree of the two polarizing plates 86a and 86b in the same direction, the millimeter wave can be transmitted when a voltage is applied, and the millimeter wave can be blocked when a voltage is not applied. Good. In any case, the liquid crystal shutter 85 can be turned on / off by controlling the voltage applied between the electrodes.

Thus, by controlling the voltage applied to the liquid crystal shutter 85, the opening 85a can be formed only in a part of the liquid crystal shutter 85, and the millimeter wave is allowed to enter only a part of the incident opening 63a. It becomes possible. Further, since the opening 85a can be moved from one end to the other end of the incident opening 63a by voltage control, a region where millimeter waves are allowed to enter the incident opening 63a through the liquid crystal shutter 85. Can be moved from one end to the other end.

  As described above, since the liquid crystal shutter 85 itself does not need to be moved even when the portion where the millimeter wave is allowed to be incident on the incident opening 63a is temporally changed, it is shown in FIG. As described above, the liquid crystal shutter 85 and the millimeter wave receiving antenna 61 can be integrally formed.

The effects of the nondestructive inspection apparatus 1 configured as in the second embodiment will be described below.
(1) By using the liquid crystal shutter 85 corresponding to the slit 84a as an incident allowing member, the light transmission region can be switched at a high speed, and as a result, the inspection speed of the nondestructive inspection can be quickly performed.
(2) Since it is not necessary to install a large member as an incident allowing member like the circular plate 84, the apparatus can be miniaturized.
(3) Furthermore, since the liquid crystal shutter device itself does not need to be moved, it can be formed integrally with the incident opening 63a, and further miniaturization can be realized.
(4) The liquid crystal shutter 85 has already been applied in various liquid crystal display fields. In the incident opening 63a, a light-transmitting region in which millimeter waves can be transmitted from one end of the incident opening 63a to the other. The device itself and the control circuit for moving to the end can be easily manufactured.
(5) Since the liquid crystal shutter 85 can change the setting of the area of the opening 85a simply by controlling the voltage to be applied, the liquid crystal shutter 85 can quickly respond to the required inspection accuracy or inspection speed. Become. That is, when high inspection accuracy is required, a region where the millimeter wave in the direction in which the long side of the incident opening 63a extends is set to be narrow, and conversely, high-speed inspection is required. The region where the millimeter wave in the direction in which the long side of the incident opening 63a extends is allowed to be wide.

<Third Embodiment>
Next, a third embodiment of the nondestructive inspection apparatus 1 will be described.
In the first embodiment, the horn 34 has a circular cross section on the YZ plane. That is, as described above, the millimeter wave emitted from the horn 34 is incident on the cylindrical lens 41 as a Gaussian beam having a substantially cylindrical shape and substantially parallel to the X axis and having directivity. Therefore, the cylindrical lens 41 also has a circular cross-sectional shape on the YZ plane in accordance with the opening shape of the horn 34. However, in such a configuration, it is necessary to set the horn 34 and the cylindrical lens 41 apart from each other in order to maintain the converging portion of the millimeter wave for an intended distance in the X-axis direction. Therefore, there are problems such as attenuation of millimeter waves and an increase in the size of the apparatus. The third embodiment relates to the nondestructive inspection apparatus 1 using a horn 34 and a cylindrical lens 41 for solving such a problem in the millimeter wave transmitter 4.

  The third embodiment is characterized by the horn 34 and the cylindrical lens 41 in the millimeter wave transmitter 4, and the inspected placement unit 3 can be the same as that of the first embodiment, and the millimeter The wave receiving unit 5 can use either the first embodiment or the second embodiment. Therefore, in the following description of the third embodiment, only the millimeter wave transmission unit 4 will be described, and the setting of the initial positions of each component and the data analysis method will be omitted.

  FIGS. 15-19 is a figure for demonstrating the horn 34 different from the said embodiment. As shown in FIGS. 15, 16, and 19, the horn 34 is composed of a tubular body 34c having an emission opening 34a and a base end 34b. The proximal end portion 34b is connected to the waveguide 33, and the waveguide 33 is connected to a millimeter wave oscillator 32 (not shown). The standard of the waveguide 33 is defined by the frequency of the millimeter wave to be guided. Accordingly, the cross-sectional shape on the YZ plane is uniquely determined with respect to the frequency of the millimeter wave used for the nondestructive inspection, and the proximal end portion 34b of the horn 34 on the millimeter wave oscillator 32 side is also uniquely determined. Is done. The horn 34 expands in the Z-axis direction in the direction of emitting millimeter waves in the X-axis direction from the base end portion 34b on the waveguide 33 side, so that the cross-sectional shape on the YZ plane is long in the Z-axis direction. It is formed to be rectangular. That is, the exit opening 34 a of the horn 34 has a slit shape similar to that of the entrance opening 63 a of the millimeter wave receiving antenna 61. By forming the emission opening 34a of the horn 34 in such a shape, the millimeter wave has already converged in the Y-axis direction at the time of emission. Accordingly, it is possible to obtain a line-shaped millimeter wave having a higher collection quality than a line-shaped millimeter wave obtained by converging and shaping a cylindrical Gaussian beam by the cylindrical lens 41. Furthermore, as shown in FIG. 20, a cylindrical lens 41 can be installed on the horn 34 in the present embodiment. As the cylindrical lens 41 in this case, it is desirable to use a lens whose cross-sectional shape on the YZ plane is similar to the slit shape of the emission opening 34a. Since the millimeter wave emitted from the horn 34 has a high wave collecting property at the time of emission, there is no need to consider the distance between the horn 34 and the cylindrical lens 41 as in the first embodiment, and the emission is performed. The opening 34a and the cylindrical lens 41 can be installed integrally. In this way, when the cylindrical lens 41 is integrally installed on the horn 34, it is possible to obtain a line-shaped millimeter wave that further emphasizes the collecting portion.

  21A and 21B use the horn 34 described above for the millimeter-wave transmitter 4 and simplify the entire apparatus when the liquid crystal shutter 85 described in the second embodiment is used as an incident allowing member. This is shown in FIG.

  As shown in FIGS. 21A and 21B, since the horn 34, the liquid crystal shutter 85, and the millimeter wave receiving antenna 61 are all short in the Y-axis direction, the entire apparatus has a space in the Y-axis direction. Can be omitted. Furthermore, since the horn 34 and the cylindrical lens 41 are integrally formed, and the millimeter wave receiving antenna 61 and the liquid crystal shutter 85 are integrally formed, the length in the X-axis direction can be shortened. As a result, the nondestructive inspection apparatus 1 can be extremely miniaturized.

  Furthermore, as indicated by the broken lines in FIGS. 21A and 21B, the millimeter wave emitted from the horn 34 remains in a linear shape extending in the Z-axis direction and is substantially parallel to the X-axis line and maintaining directivity. Since it is incident on the inspection object, passes through and exits the inspection object, and enters the millimeter wave receiving antenna 61, it can receive a stable electromagnetic wave and perform highly accurate analysis.

  The horn 34 in the present embodiment is characterized by being capable of emitting a line-shaped millimeter wave with high wave collecting properties, and therefore is combined with an incident allowing member such as the millimeter wave receiving antenna 61 and the liquid crystal shutter 85. Needless to say, the horn 34 alone can be used for a nondestructive inspection apparatus.

The effect of the nondestructive inspection apparatus 1 configured as in the third embodiment will be described below.
(1) Since the millimeter wave emitted from the emission opening 34a has already converged, it is not necessary to provide the cylindrical lens 41 for convergence shaping. Even if it is provided, the horn 34 and the cylindrical lens 41 are provided. Since it can be configured integrally, the apparatus can be miniaturized.
(2) By reducing the propagation distance of the millimeter wave from the horn 34 to the millimeter wave receiving antenna 61, it is possible to reduce noise such as attenuation and disturbance of the millimeter wave.
(3) Since the quality of the wave collecting section is improved, a highly accurate signal can be obtained. In particular, when combined with the cylindrical lens 41, this effect becomes remarkable.
(4) Further, when used in combination with the millimeter wave receiving antenna 61, since the electromagnetic wave of low noise is incident on the receiving side, the accuracy of both the transmitting side and the receiving side of the electromagnetic wave is improved. It becomes possible to perform extremely high-precision analysis.
(5) Since the cylindrical lens 41 can be installed integrally with the emission opening 34a, the setting process for initial alignment can be simplified.

<Fourth embodiment>
Next, a fourth embodiment of the nondestructive inspection apparatus will be described.
FIG. 22 is a simplified perspective view for explaining the configuration of the nondestructive inspection apparatus 1 different from the above embodiment. In the nondestructive inspection apparatus 1 described in FIG. 22, a belt conveyor 3 a as a transport body is used as an alternative to the inspection placement unit 3 in FIG. 1. On the belt conveyor 3a, a plurality of test objects S are placed side by side in the Y-axis direction. A horn 34, a cylindrical lens 41, a liquid crystal shutter 85, and a millimeter wave receiving antenna 61 are provided on the X-axis along the belt conveyor 3a. Further, in the fourth embodiment, as described in the third embodiment, the horn 34 is formed by integrally forming the cylindrical lens 41, and the incident allowing member is used in the second embodiment. The liquid crystal shutter used is used and formed integrally with the millimeter wave receiving antenna 61. The millimeter wave transmission unit 4 and the millimeter wave reception unit 5 are part of the same components as the millimeter wave transmission unit 4 and the millimeter wave reception unit 5 in FIG. 1 described above, but are omitted in FIG. is doing. Needless to say, the horn 34 and the liquid crystal shutter 85 can be replaced with the horn 34 and the disk 84 described in the first embodiment.

  In the alignment of the initial position of the nondestructive inspection apparatus in FIG. 22, the position of the horn 34 and the millimeter wave receiving antenna 61 on the X, Y and Z axes is adjusted with respect to the belt conveyor 3a. The detailed procedure can be performed in the same manner as in the above embodiment. However, in this embodiment, since the plurality of objects to be inspected S cross the millimeter wave in the Y-axis direction, the end of the object to be inspected S in the Y-axis direction and the line shape extending in the Z-axis direction. It is not always necessary to match the millimeter wave converged in the Y-axis direction. That is, when the non-destructive inspection is started, all of the inspected objects S may cross the millimeter wave in the Y axis direction.

  When the alignment of the initial position is completed, the nondestructive inspection can be executed. During the inspection, it is not necessary to move the millimeter wave transmission unit 4 and the millimeter wave reception unit 5, and it is only necessary to continuously move the belt conveyor 3a in the Y-axis direction.

However, in order to perform highly accurate and advanced analysis in this apparatus, it is necessary to consider the moving speed of the belt conveyor 3a and the moving speed of the opening 85a of the liquid crystal shutter 85 as follows. Strictly speaking, if the area where the millimeter wave is incident on the object S to be inspected is changed before the opening 85a in the liquid crystal shutter 85 completes the movement from one end to the other end of the incident opening 63a, strictly speaking, It does not mean that the entire surface of the body S has been nondestructively inspected. That is, when the millimeter wave is incident on a region of the inspection object S and the opening 85a is moved and the region is nondestructively inspected, the inspection object S is moved before the opening 85a completes the movement. In other words, in the region where the millimeter wave is first incident, the non-destructive inspection is performed only halfway. Further, since the non-destructive inspection is performed from the middle of the region where the millimeter wave is incident next, the computer 70 divides the first half of the first region and the second half of the next region. The inspection object S is processed as data of the same region. Accordingly, it is necessary to set the opening 85a to completely move from one end to the other end before the region of the inspection object S on which the millimeter wave is incident is changed by the movement of the belt conveyor 3a.

In this embodiment, the inside of the inspection object S can be evaluated by the same method as in the first embodiment.
As described above in detail, according to the present embodiment, in addition to the effects of the first embodiment, a plurality of objects to be inspected S are placed on the belt conveyor 3a by placing a plurality of objects to be inspected on the belt conveyor 3a. It is possible to perform non-destructive inspection continuously and at high speed with high accuracy. Furthermore, once the setting is made in the X-axis direction and the Z-axis direction, the translucent area of the liquid crystal shutter is controlled while the millimeter-wave transmitter 4 and the millimeter-wave receiver 5 are stationary during the nondestructive inspection. Since the belt conveyor 3a only needs to be driven in the Y-axis direction, non-destructive inspection can be performed with simple drive control.

Embodiment of invention is not limited to the said embodiment, You may implement as follows.
In the above-described embodiment, the data of the millimeter wave power value as a parameter is detected as a voltage value and the nondestructive inspection is performed. However, the inspection may be performed using a value converted into a digital value by A / D conversion. The parameter may be applied to the inspection apparatus using not only the millimeter wave power value but also phase information. In this case, when the superheterodyne detection method is used, it is necessary to replace the detector DET with a phase detector. On the other hand, when the quadrature detection method is adopted, a signal that is phase-modulated by tan ⁻¹ (ch1 / ch2) may be obtained using the two signals ch1 and ch2.
In the quadrature detection method, the low-pass filter LPF can be omitted according to the signal level of the received signal and the parameters used for the inspection. That is, the two signals output from the frequency mixer MIX may be directly input to the computer without going through the low pass filter LPF.
The order in which the line-shaped millimeter waves are incident on each part of the inspection object S is not limited to the above, and it is sufficient that the entire surface of the inspection object S can be finally detected.
In the above-described embodiment, millimeter waves that pass through the object to be inspected S are received. Good.
In the above embodiment, regarding the opening shape of the incident opening 63a, the length of the short side is 1 millimeter, but 0.7 millimeters, 0.5 millimeters, 0.1 millimeters, etc. depending on the required inspection accuracy Can be set as follows. In other words, the shorter the length of the short side, the more accurate non-destructive inspection can be performed in the direction in which the short side extends. The length of the short side is not particularly limited and is required. It can be set arbitrarily in millimeters or less depending on the inspection accuracy.
In the first embodiment, the electromagnetic wave shaping means for converging and shaping the millimeter wave emitted from the horn 34 is a position in the X-axis direction where the millimeter wave is converged into a line extending in the Z-axis direction by a plurality of lenses. By adjusting the distance, the distance between the millimeter wave transmitter 4 and the inspected placement unit 3 (inspection object S) may be shortened. In this case, since the distance between the millimeter wave transmission unit 4 and the inspected placement unit 3 (inspected object S) can be shortened, attenuation of the millimeter wave can be prevented and the apparatus can be downsized. In this application example, the characteristic of the Gaussian beam is used in which the focal length of the millimeter wave is shortened by performing the convergence shaping after expanding the divergence angle of the millimeter wave in advance. Accordingly, examples of the plurality of lenses include lenses such as a concave lens, a convex lens, a cylindrical concave lens, and a cylindrical convex lens. However, the lenses are not limited to these, and the millimeter wave transmission unit 4 and the test placement unit 3 ( It is only necessary to adjust the position in the X-axis direction where the millimeter wave converges in a line extending in the Z-axis direction so that the distance from the inspection object S) can be shortened.
In the first embodiment, the electromagnetic wave shaping means for converging and shaping the millimeter wave emitted from the horn 34 can adjust the length of the millimeter wave converged in a line shape in the Z-axis direction by a plurality of lenses. May be implemented. In this case, the millimeter wave converged in a line extending in the Z-axis direction is incident on the inspection object S because it is too long in the Z-axis direction with respect to the length of the inspection object S in the Z-axis direction. It is possible to prevent a region that is propagated without occurrence, and to prevent wasteful leakage of millimeter waves. Further, it is possible to prevent an increase in the inspection process due to the millimeter wave converged in a line extending in the Z-axis direction being too short in the Z-axis direction with respect to the length of the inspected object S in the Z-axis direction. Is possible. Examples of the plurality of lenses include lenses such as a concave lens, a convex lens, a cylindrical concave lens, and a cylindrical convex lens, but are not limited to these, and depending on the distance in the Z-axis direction of the inspection object S, It is only necessary to adjust the distance in the Z-axis direction of the millimeter wave converged in a line extending in the Z-axis direction.
In the first embodiment, the electromagnetic wave shaping means for converging and shaping the millimeter wave emitted from the horn 34 is a converging unit for the millimeter wave according to the distance in the X-axis direction of the object S to be inspected by a plurality of lenses. May be maintained and adjusted by an arbitrary distance in the X-axis direction. In this case, since the millimeter wave can pass through the inspection object S while maintaining the converging part, it is possible to perform a highly accurate inspection. In this application example, when the focal length of the millimeter wave is changed by a plurality of lenses, the Gaussian beam characteristic that the distance in the X-axis direction where the converging part of the millimeter wave is maintained also changes is used. . Therefore, examples of the plurality of lenses include lenses such as a concave lens, a convex lens, a cylindrical concave lens, and a cylindrical convex lens. However, the present invention is not limited to these lenses, and the millimeter wave converging portion can be maintained and adjusted by an arbitrary distance. Good.
In the first embodiment, the disc 84 is used as the entrance allowing member, and the disc 84 is moved by rotating the disc 84 from one end to the other end of the entrance opening 63a. Yes. However, for example, a sheet having slits is fixed to a support base such as the first support base 13 or the fourth support base 56 in FIG. 1 so as to reciprocate up and down the entrance opening 63a. Also good. In other words, as the incidence allowing member, the millimeter wave is allowed to be incident on only a part of the incident opening 63a, and the area where the millimeter wave is allowed to enter is changed from one short side to the other short side of the incident opening 63a. It only needs to be changeable in time.
In the second embodiment, the liquid crystal shutter 85 is used as the incident allowing member. As the liquid crystal used for the liquid crystal panel 87, a nematic liquid crystal has been described. That is, it is possible to form the opening 85a capable of allowing only a part of the millimeter wave to enter the incident opening 63a, and further to change the opening 85a from one end of the incident opening 63a to the other end over time. It only has to be able to realize movement with it.
In the second embodiment, the liquid crystal shutter 85 is used as the incident allowing member. A panel for manually setting the voltage to be applied to the liquid crystal shutter 85 in a stepwise manner is installed. For example, by setting parameters such as “high-precision inspection” and “high-speed inspection”, the area of the opening 85a can be easily set. May be set.
In the third embodiment, the exit opening 34a of the horn 34 is formed into a slit shape by expanding in the Z-axis direction, but the width of the millimeter wave converged on the Z-axis is intentionally set in the Y-axis direction. Therefore, the length of the emission opening 34a of the horn 34 may be adjusted also in the Y-axis direction.
In the fourth embodiment, the moving speed of the belt conveyor 3a and the opening 85a has been described. However, by using an apparatus equivalent to the function as an encoder described in the description of the first embodiment, The movement may be controlled. That is, in the liquid crystal shutter 85, a sensor for detecting that the opening 85a has moved from one end to the other end is installed, and an output from the sensor is input to the computer 70, and a signal is output from the sensor. The belt conveyor 3a is moved by a predetermined distance only when the By configuring in this way, the inspected object S can be kept stationary while the area where the millimeter wave is incident on the inspected object S is continuously inspected nondestructively. As a result, it becomes possible to non-destructively inspect a plurality of inspected objects S continuously with high accuracy.
In the nondestructive inspection apparatus according to the fourth embodiment, the horn 34, the cylindrical lens 41, the liquid crystal shutter 85, and the millimeter wave receiving antenna 61 are provided on the X axis with the belt conveyor 3a interposed therebetween. However, as shown in FIG. 23, the belt conveyors 3b and 3c are installed in series in the Y-axis direction with a gap therebetween, and the horn 34 and the cylindrical lens are sandwiched by the gap formed between the belt conveyors 3b and 3c. 41, the liquid crystal shutter 85 and the millimeter wave receiving antenna 61 may be provided on the Z-axis. That is, the millimeter wave is incident on the inspection object S from the horn 34 installed above the Z axis, and the transmitted millimeter wave transmitted through the inspection object S propagates through the gap between the belt conveyors 3b and 3c. Install in. In this case, as in the fourth embodiment, it is desirable that the horn 34 and the cylindrical lens 41 are integrally formed, and the millimeter wave receiving antenna 61 and the liquid crystal shutter 85 are integrally formed. With this configuration, of the millimeter waves that have propagated through the gap between the belt conveyors 3 b and 3 c, a millimeter wave in an area corresponding to the light transmitting area of the liquid crystal shutter 85 is incident on the millimeter wave receiving antenna 61. By configuring the non-destructive inspection apparatus 1 in such a positional relationship, it becomes possible to save space in the line process, and thus the non-destructive inspection apparatus 1 can be installed without being restricted in the width direction of the line process. It becomes possible to do. In this case, it is necessary to provide a gap between the belt conveyor 3b and the belt conveyor 3c so as not to prevent the transmission of the transmitted millimeter wave, but in order not to affect the conveyance of the inspection object S, It is preferable to set the distance between the belt conveyors 3b and 3c to the minimum as long as propagation of the transmitted millimeter wave is not hindered. In short, if the inspected object S can be transported in a direction that does not hinder the propagation of millimeter waves and is orthogonal to both the extending direction of the millimeter wave receiving antenna 61 and the emitting direction of the millimeter waves, The means for doing this is not limited at all. Needless to say, as in the fourth embodiment, the horn 34 and the liquid crystal shutter 85 can be replaced with the horn 34 and the disk 84 described in the first embodiment, respectively.

The whole principal part perspective view of the nondestructive inspection device of the present invention. The front perspective view of a millimeter wave receiving antenna. The rear perspective view of a millimeter wave receiving antenna. The left view of a millimeter wave receiving antenna. The right view of a millimeter wave receiving antenna. Sectional drawing of a millimeter wave receiving antenna. Sectional drawing in the AA in FIG. 6 of a millimeter wave receiving antenna. The front view of a millimeter wave receiving part. The rear perspective view of a millimeter wave receiving part. The block diagram explaining the electrical constitution of the nondestructive inspection device of the present invention. (A) The block diagram explaining the electrical constitution of a millimeter wave receiver. (B) The block diagram explaining the electrical constitution of a millimeter wave receiver. (A) The schematic diagram for demonstrating a nondestructive inspection. (B) The schematic diagram for demonstrating the same nondestructive inspection. (C) The schematic diagram for demonstrating the same nondestructive inspection. (A) The graph which shows distribution of the voltage value output from a millimeter wave receiver. (B) The graph which shows distribution of the voltage value output from the same millimeter wave receiver. (C) The graph which shows distribution of the voltage value output from the same millimeter wave receiver. (A) The front perspective view of the millimeter wave receiving part as 2nd Embodiment. (B) Sectional drawing of the millimeter wave receiving part as 2nd Embodiment. (C) Sectional drawing of the millimeter wave receiving part as 2nd Embodiment. The horn front perspective view as 3rd Embodiment. The horn back perspective view as a 3rd embodiment. The horn right side view as a 3rd embodiment. The horn left view as 3rd Embodiment. The horn sectional view as a 3rd embodiment. The front perspective view of the millimeter wave transmission part as 3rd Embodiment. (A) The schematic of the whole apparatus at the time of using the millimeter wave transmission part of 2nd Embodiment, and 3rd Embodiment millimeter wave reception part. (B) The schematic of the whole apparatus at the time of using the millimeter wave transmission part of 2nd Embodiment, and 3rd Embodiment millimeter wave reception part. The principal part perspective view of the nondestructive inspection apparatus as 4th Embodiment. The principal part perspective view for demonstrating another example of the nondestructive inspection apparatus of 4th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS S ... Test object, 1 ... Nondestructive inspection apparatus, 4 ... Millimeter wave transmission part as electromagnetic wave transmission part, 5 ... Millimeter wave reception part as electromagnetic wave reception part, 34 ... Horn, 34a ... Output opening part, 34b ... Base End part, 34c ... tubular body, 41 ... cylindrical lens as electromagnetic wave shaping means, 61 ... millimeter wave receiving antenna as receiving antenna, 63 ... tubular body, 63a ... incident aperture, 63b ... base end part, 70 ... control means And a computer as an analysis means, 84... A disk as an incidence allowing member, 84 a... Slit, 84 b... A central axis, 85.

Claims (12)

A subject to be inspected;
An electromagnetic wave transmitting unit that makes the electromagnetic wave converged and shaped in a line shape incident on the incident surface of the object to be inspected;
The receiving antenna receives the line-like transmitted, scattered or reflected electromagnetic waves emitted by the electromagnetic waves that are converged and shaped into the line shape incident on the incident surface of the object to be inspected and transmitted, scattered or reflected through the object to be inspected. An electromagnetic wave receiving unit for receiving;
In non-destructive inspection equipment with
The receiving antenna is expanded in one direction of the opening surface of the incident opening from the base end portion toward the incident opening by the tube having the incident opening for receiving the electromagnetic wave. While forming the shape of the opening into a slit shape,
In order to move the region where the electromagnetic wave can be incident on the incident opening with time, the incident allowing member is partially provided to allow the electromagnetic wave to be incident on the incident opening. A nondestructive inspection apparatus, characterized in that a control means for controlling is provided. In the nondestructive inspection device according to claim 1,
The incident allowing member is a disc made of an electromagnetic wave non-transmissive material,
A slit for allowing the incidence of electromagnetic waves is formed in the radial direction from the vicinity of the central axis of the disk, and the slit is moved with respect to the incident opening by rotating the disk. In the non-destructive inspection apparatus, the region in which the electromagnetic wave is allowed to enter is changed temporally from one end to the other end. In the nondestructive inspection device according to claim 1,
The incident allowing member is a liquid crystal shutter using liquid crystal,
By controlling the position of the liquid crystal shutter opening with respect to the incident opening, the region where electromagnetic waves are allowed to enter in the incident opening is changed temporally from one end to the other end. A nondestructive inspection device characterized by that. A subject to be inspected;
An electromagnetic wave transmitting unit that makes the electromagnetic wave converged and shaped in a line shape incident on the incident surface of the object to be inspected;
An electromagnetic wave that is converged and shaped into a line shape that is incident on the incident surface of the object to be inspected is transmitted through the object to be inspected, scattered or reflected, and the electromagnetic wave that has been transmitted, scattered or reflected in a line shape is incident on the electromagnetic wave. An electromagnetic wave receiving unit that is received by a receiving antenna having an incident aperture for
In non-destructive inspection equipment with
The electromagnetic wave transmission unit is a horn for emitting electromagnetic waves, and the tube having an emission opening for emitting the electromagnetic waves is opened from the base end toward the emission opening. A non-destructive inspection apparatus, wherein the exit opening is formed in a slit shape by expanding in one direction of the surface. A subject to be inspected;
An electromagnetic wave transmitting unit that makes the electromagnetic wave converged and shaped in a line shape incident on the incident surface of the object to be inspected;
An electromagnetic wave that is converged and shaped into a line shape that is incident on the incident surface of the object to be inspected is transmitted through the object to be inspected, scattered or reflected, and the electromagnetic wave that has been transmitted, scattered or reflected in a line shape is incident on the electromagnetic wave. An electromagnetic wave receiving unit that is received by a receiving antenna having an incident aperture for
In non-destructive inspection equipment with
The electromagnetic wave transmitting portion is a horn for emitting electromagnetic waves, and a tube body having an emission opening for emitting electromagnetic waves is opened from the base end toward the emission opening, and the opening surface of the emission opening Expanding in one direction, forming the shape of the exit opening into a slit shape,
The receiving antenna is a tubular body having an incident opening for receiving the electromagnetic wave, and a direction in which an opening surface of the emitting opening of the horn widens from a base end toward the incident opening. A nondestructive inspection apparatus characterized in that it is expanded in the same direction and the shape of the entrance opening is formed in a slit shape. In the nondestructive inspection device according to claim 4 or 5,
In order to move the region where the electromagnetic wave can be incident on the incident opening with time, the incident allowing member is partially provided to allow the electromagnetic wave to be incident on the incident opening. A nondestructive inspection apparatus, characterized in that a control means for controlling is provided. The nondestructive inspection apparatus according to claim 6,
The incident allowing member is a disc made of an electromagnetic wave non-transmissive material,
A slit for allowing the incidence of electromagnetic waves is formed in the radial direction from the vicinity of the central axis of the disk, and the slit is moved with respect to the incident opening by rotating the disk. In the non-destructive inspection apparatus, the region in which the electromagnetic wave is allowed to enter is changed temporally from one end to the other end. The nondestructive inspection apparatus according to claim 6,
The incident allowing member is a liquid crystal shutter using liquid crystal,
By controlling the position of the liquid crystal shutter opening with respect to the incident opening, the region where electromagnetic waves are allowed to enter in the incident opening is changed temporally from one end to the other end. A nondestructive inspection device characterized by that. The nondestructive inspection apparatus according to any one of claims 4 to 8, wherein electromagnetic wave shaping means is installed between the horn and the object to be inspected. In an inspection method for nondestructive inspection in which an electromagnetic wave is incident on an object to be inspected, and the object to be inspected is analyzed by receiving electromagnetic waves transmitted, scattered or reflected by the object to be inspected.
The electromagnetic wave is converged and shaped into a line shape, is incident on the incident surface of the object to be inspected, and the line-shaped electromagnetic wave is emitted from the object to be inspected, and the line-shaped electromagnetic wave is incident from a part of the incident opening. West,
With the electromagnetic wave transmitter, the object to be inspected, and the electromagnetic wave receiver stationary, the electromagnetic wave can be received and analyzed continuously while moving the part where the electromagnetic wave can be incident from one end of the incident aperture to the other. Like
When the incidentable part has completed moving to the other end, only the object to be inspected is moved in a direction perpendicular to both the emission direction of the electromagnetic wave and the direction extending in a line, and a line is formed in a new part of the object to be inspected. The electromagnetic wave is incident, and the newly incident area of the object to be inspected is continuously received and analyzed by moving the portion of the incident opening where the electromagnetic wave is incident again over time. Non-destructive inspection method characterized by A tube having an emission opening for emitting electromagnetic waves;
A base end for introducing the oscillated electromagnetic wave into the tube,
A horn having
A horn characterized in that the emission opening is formed in a slit shape by expanding in a direction orthogonal to the emission direction of the electromagnetic wave in a direction of emitting the electromagnetic wave from the base end. The horn according to claim 11,
A horn, wherein a cylindrical lens is integrally formed at the exit opening of the horn.

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