JP2006245239A - Wide-range pressurizing mounting head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make it possible to detect a part mounting load by using a pressurizing mounting head in high accuracy and in a wide range without switching a detectable range using a changeover rod or the like. <P>SOLUTION: The pressurizing attaching head 1 is used to hold a part by a nozzle 19 attached to a shaft 18, and to pressurize and mount it at the specified position on a substrate. In this case, a small-load pressurization detector 17a including a load cell for small load, and a large-load pressurization detector 17b including a load cell for large load, are coaxially arranged in series on the shaft 18. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a wide range pressure mounting head, in particular, an electronic component that controls a load applied to the electronic component or the wiring board when the electronic component is automatically mounted on the wiring board such as a printed board or a liquid crystal display panel board. The present invention relates to a wide range pressure mounting head suitable for application to a mounting apparatus.

  Generally, in an electronic component mounting apparatus, an electronic component is sucked and held by a suction nozzle attached to a shaft of a mounting head that can move in a plane direction with respect to a wiring board installed at a predetermined position, and the wiring is positioned. The component is mounted by pressing (pressing) the component onto a predetermined position of the substrate from above.

  When mounting this component, it is important to apply an appropriate load to the component in accordance with the type and size of the component. For this reason, it is necessary to be able to measure the pressure load over a wide range.

  In Patent Document 1, as a mounting head 100 that meets this requirement, as shown in FIG. 13, a high load load cell 101 that measures a high load range and a low load load cell 102 that measures a low load range are arranged in parallel. When the load is high, the load cell switching rod 103 is set so as to contact the high load load cell 101 as shown by a solid line, and when the load is low, it is set so as to contact the low load load cell as shown by a broken line. Thus, there is disclosed a device that can easily switch and use two load cells and can detect a load when a chip 105 is mounted on a substrate 104 over a wide range.

  In addition, although not shown in Patent Document 2, a plurality of types of crimping heads are prepared, and the crimping heads are selected according to the load when the components are crimped, and reattached each time. Is disclosed.

Japanese Patent No. 2877120 JP 2004-55705 A

  However, in the technique of Patent Document 1, it is necessary to perform switching by operating the load cell switching rod according to the value of the load to be detected, which requires an operation mechanism and a control device for the load cell switching rod. There was a problem that the reliability was lowered due to the mechanism.

  In addition, when the load to be detected extends over the measurement range of both load cells, it is not possible to detect the load continuously. Therefore, it is necessary to stop the pressurization once and switch the measurement load cell and then restart the pressurization. It was.

  Furthermore, since the pressure point at the front end in the pressure direction and the load detection unit are not coaxial, there is a problem that an accurate load cannot be detected due to bending of the load cell switching rod.

  In Patent Document 2, since different pressure ranges can be accommodated by exchanging the crimping head, it is necessary to provide a mechanism for exchanging the crimping head, which increases the size of the head and consequently increases the weight of the movable part. As a result, there is a problem that an increase in load due to this and an increase in processes due to head replacement occur.

  Further, since replacement is necessary, there is a problem that it is impossible to apply different amounts of pressurization to one component in one mounting operation.

  Moreover, since it is necessary to provide a pressure drive part and a pressure detection part in each exchange-type crimp head, there existed a problem that cost was high.

  The present invention has been made to solve the above-mentioned conventional problems, and can detect the component mounting load with high accuracy over a wide range without switching the detectable range using a switching rod or the like. It is an object to provide a wide range pressure mounting head.

  The present invention provides a pressure mounting head in which a component is held by a nozzle mounted on a shaft, and the component is pressed and mounted on a substrate at a predetermined position by a pressure driving means. The above-described problems are solved by arranging the pressure detection units each including a plurality of different load sensors in series.

  The present invention also provides a pressure mounting head in which a component is held by a nozzle mounted on a shaft, and the component is pressure-mounted on a substrate at a predetermined position by a pressure driving means. When a pressure detection unit including a load sensor in a detection range is disposed, the shaft is lowered integrally with the pressure detection unit, and a component brought into contact with the substrate is pressurized by a pressure driving unit. By providing a load detection means for detecting a load in a load range different from that of the load sensor based on a load corresponding signal output in accordance with a pressurizing load, the problem is similarly solved.

  In the present invention, the pressurization detection unit compresses the pressurization spring during pressurization, and a pressurization spring interposed between the load sensor and a shaft to which a load is transmitted during pressurization. It is preferable to provide a stopper for restricting the shaft that moves to a predetermined position.

  According to the present invention, since the pressure detection unit is arranged coaxially with the shaft on which the nozzle is mounted, when the component held at the tip of the nozzle is pressurized to be mounted on the substrate, the pressure load Can be detected with high accuracy, and can be detected by another pressure detection unit with a different load range via the pressure detection unit, so that the load can be detected over a wide range without switching operation. Can be detected.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a schematic perspective view showing the configuration of the main part of an electronic component mounting apparatus to which the wide-range pressure mounting head according to the first embodiment of the present invention is applied.

  Reference numeral 1 in the figure denotes a mounting head that includes a pressurizing device that holds and holds components and pressurizes and mounts on the substrate, and a recognition device (not shown) for correcting the position of the components. is there. The mounting head 1 is attached to an X-axis gantry (drive mechanism) 2 and is movable in the X-axis direction of the electronic component mounting apparatus. The X-axis gantry 2 is attached to a Y-axis gantry 3 and attached. The head 1 can be integrated with the electronic component mounting apparatus in the Y-axis direction.

  In addition, a recognition device 4 using a CMOS camera or a CCD camera for recognizing the posture of the sucked electronic component is fixed to the electronic component mounting device, and the mounting device is mounted in front of the mounting device. An electronic component supply device 5 for supplying electronic components is installed.

  Next, the mounting head 1 will be described in detail with reference to FIG. The mounting head 1 has a head base 6 for fixing to the X-axis gantry 2. A linear guide 7 is fixed to a vertical surface of the head base 6, and a Z drive unit 15 is provided along the guide 7. The structure is movable in the Z-axis direction.

  On the upper part of the head base 6, a θ motor 8 for rotating a component held by a suction nozzle, which will be described later, and a ball screw threaded portion 13 connected via a coupling 11 are rotated to provide a Z drive unit. A Z-axis motor 9 for vertically moving 15 together with components is attached.

  A voice coil motor (pressure drive means, hereinafter referred to as VCM) 14 for impact avoidance drive is attached to the middle stage of the Z drive unit 15. The VCM 14 is connected to the θ motor 8 via a coupling 10, and the drive side of the VCM 14 is rotatably supported with respect to the Z drive unit 15 by a spline bearing and a rotary bearing (not shown). And the vertical movement is possible.

  A ball screw nut 12 is fixed to the Z drive portion 15, and a ball screw thread portion 13 connected to the Z-axis motor 9 via a coupling 11 is screwed to the nut 12. The Z drive unit 15 can be moved up and down by the nut portion 12 of the ball screw by rotating the screw portion 13 by the Z-axis motor 9.

  The Z drive unit 15 includes a cylindrical low load pressurization detection unit 17a and a large (high) load pressurization detection unit 17b, which can be selectively used depending on the load range to be detected. ing. The outer circumferences of the pressure detection units 17a and 17b are supported on the inner circumference of the Z drive unit 15 via ball guide bearings 16a and 16b, respectively. The structure can move up and down.

  A nozzle shaft 18 extends downward at a lower portion of the lower low-load pressure detection unit 17a, and a nozzle chuck mechanism 20 is provided at a lower end portion of the nozzle shaft 18. The nozzle 20 is moved by the mechanism 20. It has a structure that can be held and replaced. The electronic component (not shown) is sucked and held by the nozzle 19 and can be mounted on the substrate.

  Next, the internal structure of the pressure detection units 17a and 17b will be described with reference to FIG.

  As shown in the drawing, a high load pressure detection unit 17b is disposed above the low load pressure detection unit 17a, and the shaft 21 of the high load pressure detection unit 17b and the low load pressurization unit 17b. The fixing plate 22 of the detection unit 17a is fixed to each other, and both the pressure detection units 17a and 17b are connected in series in the Z-axis direction.

  A low load load cell 23a is fixed to the upper portion in the low load pressurization detecting portion 17a, and is in contact with the upper side of the pressurizing spring 25a via an upper spring plate 26a for holding the spring. The lower side of the pressurizing spring 25a contacts the lower spring plate 27a, and the plate 27a is fixed to the upper end of the nozzle shaft 18 that can move up and down by a spline bearing 28a.

  An upward force is applied to the nozzle shaft 18 inside the low-load pressure detection unit 17a, and the ascending operation is restricted so that the lower spring plate 27a does not hit the upper spring plate 26a and destroy the low-load load cell 23a. A protruding stopper 24a is provided. In other words, a certain load or more of the pressurized load transmitted through the shaft 18 by the stopper 24a is not applied to the low load load cell 23a.

Here, by setting the spring constant of the pressurizing spring 25a, for example, 5 [N] can be measured as the maximum detection value f _max of the low load pressurization detection unit 17a.

  On the other hand, a load cell 23b for heavy load is fixed to the upper portion in the heavy load pressurization detecting portion 17b, and is in contact with the upper side of the pressurizing spring 25b via an upper spring plate 26b for holding the spring. The lower side of the pressurizing spring 25b is in contact with the lower spring plate 27b, and the plate 27b is fixed to the upper end of the shaft 21 that can move vertically up and down by a spline bearing 28b.

  The heavy load pressurizing detection unit 17b also has an upward force applied to the shaft 21, and a protruding stopper that prevents the lower spring plate 27b from hitting the upper spring plate 26b and destroying the heavy load load cell 23b. 24b is provided. That is, the stopper 24b prevents a load greater than a certain load from being applied to the heavy load load cell 23b.

Further, as described above, wherein the low load pressure pressure detection portion 17a, by setting the spring constant of the pressurized spring 25a, f _max of the maximum load detection value of the low load pressure pressure detection portion 17a becomes detectable Therefore, the spring force exceeding this value is not applied to the low load load cell 23ba to prevent the breakage.

That is, the low load pressure pressure detection unit 17a, when the maximum pressure amount f _max or more pressure detectable pressure range the pressurized pressure detection portion 17a is applied to the low load pressure pressure detection portion 17a, the lower spring plate 27a is fixed in contact with the stopper 24a, the output value of the low load pressure pressure detection portion 17a becomes f _max fixed output even if a value of more than f _max is the f _max.

  FIG. 4 shows the main configuration of a control system that drives the wide-range pressure mounting head of this embodiment.

  The low-load load cell 23a and the heavy-load load cell 23b are connected to the CPU input port of the control device through separate channels, respectively, and the pressurizing VCM 14 is connected to the CPU output port via a VCM amplifier (not shown).

  Generally, the high load load cell 23b has a higher natural frequency than the low load load cell 23a, and the response speed of the load cell has a response speed of about 1/10 of the natural frequency. Further, the low load load cell 23a has a small measurement range and therefore has high resolution and can be detected with high accuracy.

  The flow of the electronic component crimping and mounting operation in the above configuration will be described with reference to FIGS.

  The X-axis gantry 2 and Y-axis gantry 3 of the mounting head 1 shown in FIG. 1 are operated to move the mounting head above the electronic component supply device 5 to suck the components.

  The mounting head 1 that has attracted the chip component is moved above the recognition device 4, and the recognition device 4 recognizes the component. After the recognition is completed, the mounting head 1 is moved to the part to be mounted on the substrate, and the adsorbed electronic component is pressure-bonded to the mounting position on the substrate for mounting.

  That is, the mounting head 1 sucks the component by the suction nozzle 19, rotates the component by the θ-axis motor 8, changes the posture to the mounting angle, and then operates the Z-axis motor 9 to lower the ball screw nut 12. As a result, the nozzle 19 is lowered, and the component is mounted on a substrate (not shown).

  At the time of mounting, the VCM 14 is operated in the vertical Z-axis direction so that the output value becomes a set load in accordance with the outputs of the low load pressure detection unit 17a and the large load pressure detection unit 17b. Control.

  Next, the pressure detection operation by the mounting head 1 will be described in detail with reference to FIG. 2, FIG. 3, and FIG.

(Low load)
When the value of the low-load load cell 23a is input and the output value Ra of the low-load load cell 23a is smaller than the maximum detection value f _max of the low-load load cell 23a (below in step 1), the load cell 23b When the output value Rb is equal to or less than the output value of the same value as the minimum detected load value f _min of the heavy load load cell 23b (below in step 2), that is, the applied pressure is applied to the compression spring 25b of the heavy load load cell 23b. When the pressure is smaller than the pressure and the spring length of the pressurizing spring 25b is substantially unchanged, the pressurizing amount F applied to the mounting head 1 becomes the output value Ra of the low load load cell 23a (step 3).

(In the case of medium load)
When the value of the low load load cell 23a is input and the output value Ra of the low load load cell 23a is smaller than the maximum detection value f _max of the low load load cell 23a (below in step 1), When the output value Rb is an output value greater than or equal to the minimum detected load value f _min of the heavy load load cell 23b (right in Step 2), that is, the applied pressure is larger than the pre pressure of the preload spring 25b of the heavy load load cell 23b. If there is a change in the spring length of the pressurizing spring 25b, it is determined in step 4 whether accuracy or response speed is required. When the accuracy is required, the output value Ra of the low load load cell 23a is used (step 5), and when the response speed is required, the output value Rb of the heavy load load cell 23b is output (step 6). .

  To select either accuracy or response speed, input data specific to accuracy or speed according to the component to be installed in the data specific to the component that constitutes the installation program. Make a selection based on the data. For example, thin chip parts that are fragile parts that require attention to impact load during mounting are mounted with emphasis on speed, and bare chips that are important for mounting accuracy are selected with emphasis on accuracy.

(In case of heavy load)
When the value of the low load load cell 23a is input and the output value Ra of the low load load cell 23a is equal to or greater than the detection maximum value f _max of the low load load cell 23a (right in step 1), the low load load cell 23a The output value is fixed at the maximum value. If the output value Rb of the large load for the load cell 23b was greater output value than the minimum detected load value f _min of the large load for the load cell 23b (bottom in step 7), i.e. pressure preload spring 25b of the large load for the load cell 23b If the spring length of the pressurizing spring 25b is changed, the amount of pressure applied to the mounting head 1 becomes the output value Rb of the heavy load load cell 23b (step 8).

  According to the present embodiment described in detail above, as in the prior art disclosed in the above-mentioned Patent Document 1, the component mounting load can be increased over a wide range without switching by operating the load cell switching rod according to the detected load value. Thus, it can be detected with high accuracy. Therefore, since the operation mechanism and control device of the load cell switching rod are not required, the apparatus can be reduced in size, and the reliability can be improved due to the absence of the operation mechanism.

  In addition, when the load to be detected extends over the measurement range of each load cell, the conventional mounting head cannot pressurize continuously, so pressurization is stopped once and the load cell is switched. Although it was necessary to restart, according to this embodiment, since it is not necessary to switch the load cell, it is possible to continuously pressurize.

  In the present embodiment, since the pressure detection point that is the tip of the nozzle mounted on the shaft and the load detection unit composed of the load cells 23a and 23b are on the same axis, the force is directly transmitted to the detection unit. Detection is possible.

  Further, according to this embodiment, since a wide range can be pressurized with a single mounting head with high accuracy, there is no need to replace the crimping head as in Patent Document 2. Therefore, it is not necessary to have a mechanism for exchanging the crimping head, the weight of the movable part can be reduced by downsizing the head, and the work load in the head exchanging process can be reduced.

  Further, since the pressure bonding head does not have a replacement mechanism, it is not necessary to have a pressure driving unit and a pressure detection unit, and the cost can be reduced. In addition, different amounts of pressure can be applied to a single component by a single operation.

  The pressurizing mechanism of the pressurizing mounting head may not be the VCM 14, but may be a combination of a linear motor or a rotary servo motor with a ball screw, or an air cylinder. Further, the arrangement of the Z axis, the θ axis, and the pressure driving source is not limited to that shown in the embodiment. Furthermore, although two load cells are used as the load detector, three or more load cells may be arranged in series and used depending on the detected pressurization amount.

  FIG. 6 shows an outline of the wide-range pressure mounting head according to the second embodiment of the present invention, and FIG. 7 shows the main configuration of the control system.

  The pressure mounting head of the present embodiment has a hardware configuration obtained by removing the large load pressure detection unit 17b from the pressure mounting head of the first embodiment, and the low load pressure detection unit 17a, that is, a low load load cell. The detection of a large load that cannot be detected by 23a is realized by a CPU and a pressure control unit (load detection means) as shown in FIG. 7A corresponding to FIG.

  Specifically, this is realized by feeding back the back electromotive voltage (load corresponding signal) of the pressurizing VCM 14 and performing pressurization control.

  FIG. 7B is a block diagram showing the main part of the pressure control unit. In the present embodiment, as shown in FIG. 5A, the low load load cell 23a is connected to the input port of the CPU, and the pressurizing VCM (pressurizing drive means) 14 is connected to the load cell 23a via the pressure control unit. Connect to the input port and output port of a different channel from the input port.

  As shown in FIG. 2B, the pressure control unit is composed of an AMP (deviation amplifier) and PWM (Pulse Width Modulation) drive circuit, a D / A converter (not shown), and the like. This PWM drive circuit is a circuit that changes the duty of a pulse for driving the motor.

  The pressure detection operation by the pressure mounting head of the present embodiment is substantially the same as that of the first embodiment with respect to the control of a small load. Therefore, the description thereof will be omitted, and the operation at the time of a large load will be described below. .

  When the mounting head 1 is lowered and a pressing operation is performed by the VCM 14 when the component comes into contact with the substrate, a load in the upward direction is generated in the VCM 14, and the load (pressing load) according to the load at that time (pressurizing load) A counter electromotive voltage is generated.

  This counter electromotive voltage is the same phenomenon as a so-called generator, and is a phenomenon in which a voltage proportional to the external force is generated when an external force is applied to the motor, and the voltage generated from the motor at that time is called a counter electromotive voltage. The counter electromotive voltage is fed back to the VCM 14, the counter electromotive voltage is input to the AMP, the pressurizing VCM 14 is driven by the PWM drive circuit, and control is performed so that the specified pressurizing amount is obtained.

  The amount of pressurization can be detected by inputting the back electromotive voltage to the CPU and calculating the amount of pressurization according to the back electromotive voltage.

  The only difference from the first embodiment is that instead of the signal of the heavy load load cell 23b, the signal of the back electromotive force of the VCM 14 of the pressurizing drive source is inputted to the CPU. This is the same as the first embodiment.

  The pressure detection operation of this embodiment will be described with reference to FIGS.

(In case of low load)
This is the same as in the case of the first embodiment.

(In the case of medium load)
Enter values for low load for the load cell 23a, if the output value Ra of the load cell 23a is smaller than the detection maximum value f _max of the load cell, when requesting the precision, uses the output value Ra of the low load for the load cell When the pressurization control is performed and a response speed is requested, the pressure control by the pressurization VCM 14 is performed.

  Selection of which one of accuracy and response speed is required can be performed in the same manner as in the first embodiment.

(In case of heavy load)
Enter values for low load for the load cell 23a, if the output value Ra of the load cell 23a is larger than the detection maximum value f _max of the load cell 23a, the output value of the low load for the load cell 23a at this time is fixed and the maximum value Therefore, the pressure control applied to the load head 1 is performed by the pressure VCM 14.

  FIG. 8 shows an outline of a pressure mounting head according to the third embodiment of the present invention, and FIG. 9 shows a main configuration of the control system.

  The pressure mounting head of the present embodiment is a pressure driving means that causes the Z-axis motor 9 to perform the pressure driving at the time of mounting as well as the vertical movement of the Z driving unit 15 except for the pressure VCM 14 from the second embodiment. Is also made to function.

  Therefore, as shown in FIG. 9, a torque control unit for controlling the rotation of the Z-axis motor 9 is installed instead of the pressure control unit shown in FIG. 7A, and a control signal from the control unit is input to the CPU. Except for this, it is substantially the same as the second embodiment.

  In any of the first to third embodiments described in detail above, load detection at the time of component mounting can be performed according to the flowchart shown in FIG. A case where a load cell is used will be described in detail as an example.

  When mounting the component adsorbed by the nozzle 19 on the substrate using the mounting head 1 that uses the load cell for large load and the load cell for low load for load detection as in the first embodiment, the component By detecting the moment of contact with the substrate as fast as possible, the mounting operation can be speeded up.

  In this case, since it is necessary to detect contact or detect the impact load at a high speed, the contact detection and the maximum value of the maximum load are detected using the load cell 23b for large load with a higher response speed. Steps 11, 12, and 13 in the flowchart shown in FIG. 10 show this operation when there are two or more load cells.

  As described above, after using the load cell for large loads having a higher response speed and detecting the contact or detecting the maximum value of the impact load, the process goes to the start of step 0 in FIG. As described above, the optimum detector for the target load such as a low load load cell is selected to perform load control.

  In addition, in order to pressurize to the target load value after contact, when using the low load load cell 23a with a slow response speed, the response speed is slow, so the amount of pressurization must be increased slowly. . However, when a load cell for heavy load is used for contact detection as in step 13 above, pressurization is performed at a high speed to a value in the vicinity of the target predetermined load, and then the pressure is reduced to a value slightly smaller than the predetermined load value. By switching to the load cell for load, the weight can be controlled with high accuracy and controlled to a predetermined load amount.

  By the way, the method of switching the load detector to detect the contact is not limited to the case of using two load detectors of the low load load cell and the large load load cell as in the first embodiment, but also the table of FIG. As shown for the high-speed mounting, the load cell for low load, medium load, and heavy load are used, and the load cell corresponding to the target load to be detected is detected by the load cell in the upper load area. You may do it.

  That is, as shown in the figure, when the pressurization amount for load control is the load control range in the middle load region, contact is detected by the load cell for the large load region, and the pressurization amount for load control is the load in the low load region. In the control range, the contact timing can be detected at high speed by detecting the contact with the load cell for the medium load region.

  In addition, since load detection is performed at a high speed using a load detector in a range larger than the target pressurization amount range, the speed at the time of contact is too high, and the load resistance of components loaded Even when a problem that exceeds the load occurs, the impact load can be detected.

  If an impact load larger than the set load capacity of the component is generated, an error signal is displayed to the operator, and the mounting of the component is stopped.

  From the next time, for the same parts that gave an error, the mounting conditions are changed so as to reduce the speed at the time of mounting the parts, and the production is continued so that the impact load is reduced.

  Further, when the component to be mounted is a very fragile component, the contact timing is detected from as small a load as possible, and the load control can reduce damage in contact with the component.

  Therefore, in the case of a very fragile part, since it is necessary to detect contact from a minute pressurizing amount, as shown in steps 11, 14, and 15 in FIG. 10, a lower load region can be detected with high accuracy. Detects contact using a load cell for low load, and after detecting contact, goes to step 0 in FIG. 5 and selects the optimum detector for the target load such as low load load cell as in the first embodiment. To control the load.

  In this case, the contact can be detected by the load cell in the lower load region one step below by the load cell corresponding to the load to be detected. That is, as shown in FIG. 12, when the pressurization amount for load control is in the load control range in the middle load region, contact is detected by the load cell for the low load region, and the pressurization amount for load control is the load in the large load region. In the control range, the contact timing can be detected at high speed by detecting the contact with the load cell for the medium load region.

  The load detector used for contact timing detection is set in advance to select whether to use a load detector that is one step higher or lower than the load detector corresponding to the target pressure. As shown in FIG. 11, a load detector that is one level higher than the load detector that sets the target load setting value as shown in FIG. In this case, as shown in FIG. 12, a load detector one level lower than the load detector used for the target load setting value is used.

The schematic perspective view which shows the principal part of the electronic component mounting apparatus to which the pressure mounting head which concerns on this invention was applied 1 is a schematic side view showing a pressure mounting head according to a first embodiment of the present invention. The schematic side view which extracts and shows the principal part of the pressurization mounting head of a 1st embodiment. The block diagram which shows the principal part of the control system of 1st Embodiment The flowchart which shows the load control of 1st Embodiment. Schematic side view showing a pressure mounting head according to a second embodiment of the present invention. The block diagram which shows the principal part of the control system of 2nd Embodiment Schematic side view showing a pressure mounting head according to a third embodiment of the present invention. The block diagram which shows the principal part of the control system of 3rd Embodiment Flow chart showing contact operation to substrate by pressure mounting head Chart showing the relationship between contact load and control load during high-speed mounting Chart showing the relationship between contact load and control load when mounted finely Schematic diagram showing an example of a conventional pressure mounting head

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Mounting head 2 ... X-axis gantry 3 ... Y-axis gantry 4 ... Recognition apparatus 5 ... Electronic component supply apparatus 6 ... Head base 7 ... Linear guide 8 ... θ motor 9 ... Z-axis motor 10, 11 ... Coupling 12 ... Nut 13 ... Screw part 14 ... Voice coil motor (VCM)
DESCRIPTION OF SYMBOLS 15 ... Z drive part 16 ... Ball guide bearing 17a ... Low load pressurization detection part 17b ... Large load pressurization detection part 18 ... Nozzle shaft 19 ... Adsorption nozzle 23a ... Low load load cell 23b ... Heavy load load cell 24a, 24b ... Stopper 25a, 25b ... Pressurizing spring 26a, 26b ... Upper spring plate 27a, 27b ... Lower spring plate

Claims (3)

In a pressure mounting head that holds a component with a nozzle mounted on a shaft and pressurizes and mounts the component on a substrate at a predetermined position by a pressure driving means.
A wide-range pressure mounting head characterized in that a pressure detection unit including a plurality of load sensors having different load detection ranges is arranged in series on the same axis of the shaft. In a pressure mounting head that holds a component with a nozzle mounted on a shaft and pressurizes and mounts the component on a substrate at a predetermined position by a pressure driving means.
A pressure detection unit including a load sensor having a predetermined load detection range is disposed on the same axis of the shaft, and
Based on the load corresponding signal output according to the pressurization load when the shaft is lowered integrally with the pressurization detection unit and the component brought into contact with the substrate is pressurized by the pressurization driving means. A wide-range pressure mounting head comprising load detection means for detecting a load in a load range different from the load sensor. A pressurizing spring interposed between the load sensor and a shaft to which a load is transmitted during pressurization;
The wide-range pressure mounting head according to claim 1, further comprising a stopper that restricts the shaft that moves in a compressing direction of the pressurizing spring at a predetermined position during pressurization.