JP2006159117A - Method of correcting head position, apparatus for correcting head position, droplet discharge apparatus, method of manufacturing electro-ptical device, electro-optical device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for correcting a head position by which the correction of the position of a head unit is simply and precisely carried out with the addition of the mechanical precision error of an X-axial table or a Y-axial table. <P>SOLUTION: In the method of correcting the head position of a droplet discharge apparatus 1 for carrying out plotting on a work W with a functional liquid, alignment marks 203 provided in line with a prescribed pitch in the Y axial direction are recognized as an image to correct designed position data of the head unit 61 to previously take standard position data and when a new head unit 61 is mounted, the alignment mark 203 is recognized as an image to correct the standard position data to take final position data. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a head position correcting method, a head position correcting apparatus, and a head position correcting apparatus for correcting the position of a head unit of a droplet discharging apparatus that performs drawing with a functional liquid on a work while moving a head unit equipped with a functional liquid droplet discharging head, and The present invention relates to a droplet discharge device, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  Conventionally, a head unit in which a plurality of functional liquid droplet ejection heads are mounted on a sub-carriage is supported on a Y-axis table, and a workpiece is supported on an X-axis table via a set table. The function droplet discharge head is selectively driven to discharge while moving the workpiece relative to the head unit in the X-axis direction (main scanning direction) and the Y-axis direction (sub-scanning direction). A droplet discharge device (drawing device) that performs drawing with a liquid is known.

In such a droplet discharge device, a pair of reference pins are provided apart from each other in the sub-carriage of the head unit. When the head unit is replaced, the pair of reference pins is used as an X-axis for the set table. While moving in the direction, the head recognition camera mounted on the head captures and recognizes the image. The design position data of the head unit is corrected based on the recognition result, and the position of the head unit is corrected based on the correction data.
JP 2003-127344 A

By the way, when this type of droplet discharge device is applied to a manufacturing apparatus or the like that manufactures a large color filter, the workpiece becomes larger in accordance with this, and the X-axis table and the Y-axis table have long moving strokes. It is necessary to use it. For this reason, it becomes difficult to form the X-axis table and the Y-axis table mechanically with high accuracy.
In such a droplet discharge device, the conventional head position correction method has a problem that it cannot cope with the distortion of the X-axis table and the Y-axis table. In particular, if the Y-axis table supporting the head unit is distorted in the X-axis direction, the head unit changes its angle (θ rotation) in the horizontal plane during sub-scanning, and is displaced in the X-axis direction and the Y-axis direction. There's a problem. Of course, if the position of the head unit is measured and data correction is performed in the sub-scanning range, the above problem is solved. However, in an industrial application device such as a droplet discharge device, it is necessary to periodically replace the head unit. In such a case, the position of the head unit is measured every time it is replaced, which makes the operation complicated. There is a problem.

  Therefore, the present invention provides a head position correction method and head that can easily and accurately correct the position of the head unit in consideration of mechanical accuracy errors of the X-axis table and the Y-axis table when the head unit is replaced. It is an object of the present invention to provide a position correction device, a droplet discharge device, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  The head position correction method of the present invention includes a set table for setting a work, an X-axis table for main-scanning the work in the X-axis direction via the set table, a head unit equipped with a functional liquid droplet ejection head, A Y-axis table that detachably supports the head unit and sub-scans the head unit in the Y-axis direction, and discharges the functional liquid droplet ejection head while main-scanning and sub-scanning the head unit with respect to the workpiece. In the method of correcting the head position of a droplet discharge apparatus that performs drawing with a functional liquid on a work, a plurality of alignment marks that indicate the absolute reference position of the head unit in sub-scanning are placed on the set table instead of the work in the Y-axis direction. A mask setting process for setting alignment masks arranged at a predetermined pitch and a wafer attached to the head unit. The first image recognition process for recognizing a plurality of alignment marks over the scanning range of the sub-scan and the design position data of the head unit is corrected based on the recognition result in the first image recognition process. A reference position data acquisition step for acquiring reference position data, a first correction step for correcting the position of the head unit based on the acquired reference position data, and a head imaging means when a new head unit is mounted A second image recognition process for recognizing a pair of reference marks of the head unit, and a final position data acquisition process for correcting the reference position data and acquiring final position data based on the recognition result in the second image recognition process; And a second correction step for correcting the position of the new head unit based on the acquired final position data. And butterflies.

  The head position correction apparatus of the present invention has a set table for setting a work, and an X-axis table for main-scanning the work in the X-axis direction via the set table and a functional liquid droplet ejection head are mounted on a sub-carriage. A functional liquid droplet ejection head comprising: a head unit; and a Y-axis table that detachably supports the head unit and sub-scans the head unit in the Y-axis direction. Is a head position correction device for a droplet discharge device that performs drawing with a functional liquid on a work, and a plurality of alignments that indicate the absolute reference position of the head unit in sub-scanning on a set table instead of the work Set an alignment mask with marks arranged in the Y-axis direction at a predetermined pitch, and shoot a workpiece on the head unit. Based on the recognition result by the first image recognition means and the first image recognition means for controlling the workpiece imaging means attached to the head unit and recognizing the image of the alignment mark over the sub-scanning scanning range. A reference position data acquisition means for correcting the design position data of the head unit to acquire reference position data, a first correction means for correcting the position of the head unit based on the acquired reference position data, and a new head When the unit is mounted, a second image recognition unit that recognizes an image of a pair of reference marks of the head unit and a final position data by correcting the reference position data based on the recognition result by the second image recognition unit And a second position data acquisition unit for correcting the position of the new head unit based on the acquired final position data. A positive means, characterized by comprising a.

  According to this configuration, the position of the head unit is corrected over the scanning range of the sub-scan by using an alignment mask in which a plurality of alignment marks are arranged at a predetermined pitch in the Y-axis direction. It is possible to correct the positional deviation of the head unit in the X-axis direction and the Y-axis direction based on the direction distortion and the feed error in the Y-axis direction. On the other hand, when the head unit is replaced in this state, the position correction is performed based on the pair of reference marks of the new head unit. In addition, the Y-axis table distortion and feed error can be taken into account. Therefore, even if the head unit is frequently replaced, replacement work including position correction can be performed smoothly and in a short time. The arrangement pitch of the plurality of alignment marks is preferably determined in consideration of the drawing accuracy for the workpiece to be drawn.

  In the above method, the mark row composed of a plurality of alignment marks is composed of a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel. A first camera that captures an image of one mark row and a second camera that captures an image of the second mark row. In the first image recognition step, the first camera and the second camera perform the first scan over the scanning range of the sub-scan. It is preferable to recognize each image of the first mark row and the second mark row.

  Similarly, in the above apparatus, the mark row composed of a plurality of alignment marks is composed of a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel. It consists of a first camera that images the first mark row and a second camera that images the second mark row, and the first image recognition means uses the first camera and the second camera over the scanning range of the sub-scanning. It is preferable that each of the first mark row and the second mark row is recognized as an image.

  According to this configuration, the mark row composed of a plurality of alignment marks is the first mark row and the second mark row that are spaced apart from each other in the X-axis direction and are arranged in parallel. Angle correction (θ correction) in the horizontal plane of the head unit can be accurately performed in units of mark arrangement pitch. With this correction, the head unit in sub-scanning can be accurately positioned even if the Y-axis table is distorted. Even if there is only one mark row, if the arrangement pitch of the alignment marks is rough, the angular deviation can be detected with a certain degree of accuracy. In such a case, however, the detection of the positional deviation in the Y-axis direction is rough. It goes without saying. In addition, the separation dimension between the first mark row and the second mark row is preferably equal to or larger than the separation dimension of the pair of reference marks of the head unit in consideration of the positional accuracy of the final head unit. .

  Another head position correction method of the present invention includes a set table for setting a work, and an X-axis table for main-scanning the work in the X-axis direction via the set table and a functional liquid droplet ejection head are mounted on the Y A plurality of head units constituting a continuous drawing line in the axial direction; and a Y-axis table that detachably supports the plurality of head units and performs sub-scanning in the Y-axis direction. In the head position correction method of a droplet discharge apparatus that performs drawing with a functional liquid on a work by discharging and driving the functional liquid drop discharge head while performing main scanning and sub-scanning of the head unit, An alignment marker in which a plurality of alignment marks indicating the absolute reference position of the head unit in scanning are arranged at a predetermined pitch in the Y-axis direction. A mask setting step for setting a workpiece, a dummy mounting step for mounting a plurality of dummy units incorporating workpiece imaging means instead of a plurality of head units on the Y-axis table, and a workpiece imaging means incorporated in each dummy unit Accordingly, the design position data of each head unit is corrected based on the recognition result in the first image recognition step and the first image recognition step for recognizing the alignment mark over the sub-scanning scanning range in each head unit. A reference position data acquisition step for acquiring reference position data, a first correction step for correcting the position of each dummy unit based on the acquired reference position data, and a plurality of head units are mounted instead of the plurality of dummy units. When the head imaging means recognizes a pair of reference marks of each head unit, Based on the recognition result in the image recognition step and the second image recognition step, the final position data acquisition step of correcting the reference position data to acquire the final position data, and the head unit of each head unit based on the acquired final position data And a second correction step for performing position correction.

  Another head position correction apparatus of the present invention has a set table for setting a work, and an X-axis table for main-scanning the work in the X-axis direction via the set table and a functional liquid droplet ejection head are mounted on the Y. A plurality of head units constituting a continuous drawing line in the axial direction; and a Y-axis table that detachably supports the plurality of head units and performs sub-scanning in the Y-axis direction. This is a head position correction device for a droplet discharge device that performs drawing with a functional liquid on a work by discharging the functional droplet discharge head while performing main scanning and sub-scanning of the head unit of the head unit. An alignment marker in which a plurality of alignment marks indicating the absolute reference position of the head unit in sub-scanning are arranged at a predetermined pitch in the Y-axis direction. And the Y-axis table is mounted with a plurality of dummy units incorporating workpiece imaging means instead of a plurality of head units, and the workpiece imaging means incorporated in each dummy unit is controlled, First position recognition means for recognizing the alignment mark over the sub-scanning scanning range in the head unit, and the reference position data by correcting the design position data of each head unit based on the recognition result by the first image recognition means. Reference position data acquisition means for acquiring the first correction means for correcting the position of each dummy unit based on the acquired reference position data, and when a plurality of head units are mounted instead of the plurality of dummy units , Second image recognition means for recognizing a pair of reference marks of each head unit, and recognition by the second image recognition means. A final position data acquisition unit that corrects the reference position data based on the result to acquire final position data, and a second correction unit that corrects the position of each head unit based on the acquired final position data. It is characterized by that.

  According to this configuration, the position of the dummy unit is corrected over the scanning range of the sub-scan by using an alignment mask in which a plurality of alignment marks are arranged at a predetermined pitch in the Y-axis direction. The positional deviation of each head unit in the X-axis direction and Y-axis direction based on the distortion in the X-axis direction and the feed error in the Y-axis direction can be corrected. Thereby, a drawing line can be maintained with high accuracy. On the other hand, in this state, when the head unit is replaced with the dummy unit, the position correction is performed based on the pair of reference marks of the head unit. The distortion and feed error of the Y-axis table can be taken into account. Therefore, even if the head unit is frequently replaced, replacement work including position correction can be performed smoothly and in a short time. Further, in the image recognition of the alignment mark, it is particularly useful when the work image pickup means cannot be attached to the head unit in a space by using a dummy unit incorporating the work image pickup means instead of the head unit. The arrangement pitch of the plurality of alignment marks is preferably determined in consideration of the drawing accuracy for the workpiece to be drawn.

  In the above method, the mark row composed of a plurality of alignment marks includes a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel. The first camera that images the first mark row and the second camera that picks up the second mark row. In the first image recognition step, each first camera and each second camera over the sub-scanning scanning range. Accordingly, it is preferable to recognize the images of the first mark row and the second mark row, respectively.

  Similarly, in the above apparatus, the mark row composed of a plurality of alignment marks is composed of a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel. The first camera that images the first mark row and the second camera that picks up the second mark row, and the first image recognition means includes the first camera and the second camera over the sub-scanning scanning range. It is preferable that each of the first mark row and the second mark row is recognized by the camera.

  According to this configuration, the mark row composed of a plurality of alignment marks is the first mark row and the second mark row that are spaced apart from each other in the X-axis direction and are arranged in parallel. Angle correction (θ correction) in the horizontal plane of the head unit can be accurately performed in units of mark arrangement pitch. With this correction, the head unit in sub-scanning can be accurately positioned even if the Y-axis table is distorted. Even if there is only one mark row, if the arrangement pitch of the alignment marks is rough, the angular deviation can be detected with a certain degree of accuracy. In such a case, however, the detection of the positional deviation in the Y-axis direction is rough. It goes without saying. In addition, the separation dimension between the first mark row and the second mark row is preferably equal to or larger than the separation dimension of the pair of reference marks of the head unit in consideration of the positional accuracy of the final head unit. .

  Moreover, in the said method, it is preferable that each dummy unit is substantially the same in weight and gravity center position as each head unit.

  Similarly, in the above apparatus, it is preferable that each dummy unit is formed to have substantially the same weight and center of gravity as each head unit.

  According to this configuration, by using a dummy unit having substantially the same weight and weight balance as that of the head unit, the twist of the Y-axis table based on the weight of the head unit and the like can be taken into the position correction result. Therefore, each head unit can be accurately aligned.

  In the above method, it is preferable that the plurality of head units are configured to be individually movable by the Y-axis table.

  Similarly, in the above apparatus, it is preferable that the plurality of head units are configured to be individually movable by a Y-axis table.

  According to this configuration, the head unit can be replaced and maintained efficiently, and a plurality of head units can be used properly according to the size of the workpiece.

  A droplet discharge device according to the present invention includes the above-described head position correction device.

  According to this configuration, it is possible to improve the positional accuracy of the head unit in consideration of sub-scanning, and thus it is possible to provide a droplet discharge device with high drawing accuracy.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a substrate.

  According to these configurations, since it is manufactured using a droplet discharge device capable of performing highly accurate drawing, a highly reliable electro-optical device can be manufactured. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. In this case, a film forming portion is formed by functional droplets of R, G and B colors on a substrate such as a color filter. Therefore, first, a substrate (workpiece) that is a functional droplet ejection target (drawing target) by the droplet ejection device will be briefly described. The values such as the size of the substrate listed below are approximate numbers.

  As shown in FIG. 1, the substrate W is a transparent substrate made of quartz glass, polyimide resin, or the like. On the substrate W, a plurality of pixel regions 507a are arranged in a row direction (long side direction of the substrate) and a column direction (short side direction of the substrate). In addition, a pair of substrate alignment marks Wm and Wm whose positions are recognized by the introduced droplet discharge device are respectively formed at two positions before and after the peripheral edge of the substrate W, and the long side (row direction) is Y. It is set so that it is parallel to the axial direction (sideways). Various sizes of the substrate W are prepared. In this embodiment, a substrate W of the maximum standard (1500 mm × 1800 mm) that can be mounted on the droplet discharge device is used.

  Each pixel region 507a is a rectangular recess in plan view surrounded by a partition wall 507b (bank 503, see FIG. 14), and R (red) and G (green) by a functional liquid droplet ejection head 62 described later. When forming the B (blue) three-color film forming portions (colored layers 508R, 508G, and 508B), they become the landing area of the functional liquid droplets (see FIG. 14). The dimension Da of each pixel region in the row direction of the substrate is, for example, 300 μm, and the dimension Db of each pixel region in the column direction of the substrate is, for example, 100 μm. The dimension La of the partition wall portion 507b in the row direction of the substrate is, for example, 100 μm, and the dimension Lb of the partition wall portion 507b in the column direction of the substrate is, for example, 30 μm. Then, after the solvent of the landed functional droplet is volatilized, a predetermined amount of the functional droplet is landed so that the colored layer 508 having a predetermined thickness is formed.

  As will be described later, since the partition wall portion 507b is made of a hydrophobic (lyophobic) resin material, even if a functional liquid droplet lands on the partition wall portion 507b, the functional liquid droplet is adjacent to the pixel. It flows into the region 507a. On the other hand, the surface of the substrate W is made hydrophilic (lyophilic) by the surface treatment, and the landed functional liquid droplets wet and spread in the pixel region 507a.

  The color arrangement pattern of the large number of pixel regions 507a in the present embodiment is a stripe arrangement in which all the colors are the same in the row direction of the substrate W, but may be a stripe arrangement in which all the colors are the same in the column direction of the substrate W. Furthermore, the arbitrary three pixels arranged in the vertical and horizontal rows of the matrix may be a mosaic arrangement of three colors of R, G, and B, or may be a delta arrangement in which a plurality of pixel regions 507a form a staggered pattern. Good. Then, three pixel areas where the functional liquid droplets land, that is, a pixel area where the R functional liquid droplets land, a pixel area where the G functional liquid droplets land, and a pixel area where the B functional liquid droplets land Thus, a so-called pixel is formed.

  Next, the droplet discharge device according to the present invention will be described. As shown in FIGS. 2 to 4, the droplet discharge device 1 includes a drawing device 11 on which a functional droplet discharge head 62 is mounted, a maintenance unit 12 attached to the drawing device 11 and having a regular flushing box 114 and the like. The maintenance unit 12 maintains and restores the function of the functional liquid droplet ejection head 62, and the drawing device 11 performs a drawing process for discharging the functional liquid onto the substrate W. Further, the droplet discharge device 1 is incorporated with a controller 13 (a control unit 122, see FIG. 8) that is connected to a host computer 2 that controls the entire drawing system and controls each part of the droplet discharge device 1. Yes.

  Although not shown, the droplet discharge device 1 is provided with a work carry-in / out device configured by a robot arm, and the substrate W is introduced into the droplet discharge device 1 through the work carry-in / out device. Is done.

  First, the drawing device 11 in the droplet discharge device 1 will be described. The drawing apparatus 11 is installed on a floor and a plurality of (seven) carriage units 21 each composed of a head unit 61 and a main carriage 63 on which a plurality (twelve) functional liquid droplet ejection heads 62 are mounted. An X-axis table 22 that moves the substrate W in the X-axis direction, and the seven carriage units 21 individually in the Y-axis direction. A Y-axis table 23 to be moved and an image recognition means 26 having various cameras for recognizing images of the substrate W, the carriage unit 21 and the like are provided. Further, each functional liquid droplet ejection head 62 is connected to a functional liquid tank (not shown) for storing the functional liquid via the pressure regulating valve 25 (see FIG. 5), and the functional liquid whose water head pressure is adjusted. Is to be supplied.

  An area where the movement locus of the substrate W by the X-axis table 22 and the movement locus of the carriage unit 21 by the Y-axis table 23 intersect is a drawing area 31 where drawing processing is performed. A region outside the X-axis table 22 on the movement trajectory of the carriage unit 21 is a maintenance area 32, and each unit of the maintenance means is installed. The maintenance area 32 also serves as a work area for attaching / detaching (replacing) the head unit 61.

  On the other hand, the area on the near side of the X-axis table 22 is a work carry-in / out area 34 where the substrate W is carried in / out with respect to the droplet discharge device 1 by the work carry-in / out device.

  The X-axis table 22 is connected to a suction table 41 (set table) for sucking (air suction) and setting the introduced substrate W and a lower portion of the suction table 41, and the θ position of the substrate W is finely adjusted via the suction table 41. A workpiece θ axis table 42 to be adjusted (θ correction), a table support portion 43 that supports the workpiece θ axis table 42, an X axis air slider 44 that supports the table support portion 43 slidably in the X axis direction, and an X axis A pair of left and right X-axis linear motors (not shown) that extend in the direction and moves the substrate W in the X-axis direction via the suction table 41, and the X-axis air slider 44 move in parallel with the X-axis linear motor. Are provided with a pair of X-axis guide rails 45, 45 and an X-axis linear scale (not shown) for grasping the position of the suction table 41. Then, when the pair of X-axis linear motors are driven, the X-axis air slider 44 is moved in the X-axis direction while the pair of X-axis guide rails 45 and 45 are used as guides, and the substrate W set on the suction table 41 becomes X Move in the axial direction.

  The X-axis table 22 has a long dimension (about 4.0 m) in the X-axis direction corresponding to the large substrate W. In the present embodiment, when the substrate W (suction table 41) moves from the workpiece carry-in / out area 34 side to the drawing area 31 side (from the lower side to the upper side in FIG. 3), the forward movement is assumed. When moving to the carry-in / out area 34 side (from the upper side to the lower side in the figure), the return movement is assumed.

  The suction table 41 is formed in a substantially square shape in plan view, and the length of one side thereof is set to 1800 mm in accordance with the length of the long side of the maximum standard substrate W. It can be set at any center of the long side (parallel to the X-axis direction) and horizontally (the long side of the substrate W is parallel to the Y-axis direction) and at the center. However, in the present embodiment, the substrate W is set horizontally as described above.

  Although not shown, the suction table 42 is provided with a pair of X-axis width adjusting mechanisms in the X-axis direction and a pair of Y-axis width adjusting mechanisms in the Y-axis direction. Alignment). The pre-aligned workpiece W is further image-recognized by the workpiece recognition camera 101, and angle correction (θ correction) by the substrate θ-axis table 42 and correction of position data in the X-axis direction and the Y-axis direction are performed. By doing so, it is finally aligned.

  On the table support 43, a dot dropout inspection table 116 is disposed adjacent to the suction table 41 on the forward side of the substrate W (left side in FIG. 4). The dot dropout inspection table 116 is provided with a test paper which can be rolled up on its upper surface. The functional liquid droplets are ejected from the full-function liquid droplet ejection head 62 onto the test paper and the drawing is performed. The result is image-recognized by a dot recognition camera 102, which will be described later, to inspect for the presence or absence of defective ejection such as missing dots, flying bends, etc. Further, a regular flushing box 114 described later is provided on the table support unit 43 adjacent to the dot missing inspection table 116 on the forward movement side of the substrate W.

  On the other hand, the Y-axis table 23 spans between the drawing area 31 and the maintenance area 32, and is moved individually between the drawing area 31 and the upper part of each unit of the maintenance means 12, It is supported on a pair of front and rear support stands 56, 56 extending in the Y-axis direction. Each of the support stands 56 includes four support columns 57 and a columnar support member (not shown) that spans between the four support columns 57.

  The Y-axis table 23 includes seven sets of Y-axis slide tables (not shown) that support the seven bridge plates 51 that vertically suspend the seven carriage units 21 so that they are aligned in the Y-axis direction. A pair of front and rear Y-axis linear motors (not shown) that extend in the Y-axis direction and move each bridge plate 51 in the Y-axis direction via each set of Y-axis slide tables, and extend in the Y-axis direction Then, two Y-axis guide rails (not shown) for guiding the movement of the seven bridge plates 51 (front and rear) (not shown) and a Y-axis linear scale for detecting the movement position of each carriage unit 21 (not shown). ).

  When a pair of Y-axis linear motors are driven, the seven sets of Y-axis slide tables can be moved independently, and the seven carriage units 21 can be individually moved in the Y-axis direction. Thereby, the replacement and maintenance of the head unit 61 can be performed efficiently, and a plurality of head units 61 can be used properly according to the size of the substrate W. Of course, it is also possible to move the seven carriage units 21 together in the Y-axis direction by simultaneously moving the seven sets of Y-axis slide tables in the Y-axis direction.

  The Y-axis table 23 has a long movement stroke corresponding to the large substrate W. That is, as will be described later, the seven carriage units 21 are mounted corresponding to the dimension (1800 mm) of the substrate W in the Y-axis direction, and the maintenance unit 12 corresponds to the seven carriage units 21. Since each unit is provided, the moving stroke is about 5.5 m.

  The seven carriage units 21 are suspended from the seven bridge plates 51 of the Y-axis table 23 and arranged in the Y-axis direction. Each of the carriage units 21 is twelve via a sub-carriage 64 (carriage). And a main carriage 63 for detachably supporting (suspending) the head unit 61. That is, the head unit 61 is detachably supported on the Y-axis table 23 via the main carriage 63. Although details will be described later, each main carriage 63 is configured to be capable of mounting a dummy unit 161 incorporating a dummy recognition camera 104 (work image pickup means) instead of the head unit 61 (see FIG. 10).

  As shown in FIG. 5, the head unit 61 includes a sub-carriage 64, a plurality (12) of functional droplet ejection heads 62 mounted on the sub-carriage 64, and each functional droplet ejection head 62 on the sub-carriage 64. And a head holding member 91 for attaching with high accuracy. In addition, the twelve pressure regulating valves 25 are mounted on the sub-carriage 64 so as to be respectively provided to the twelve functional liquid droplet ejection heads 62.

  Each sub-carriage 64 includes a head plate 65 having a substantially parallelogram in plan view for positioning and fixing the twelve functional liquid droplet ejection heads 62 and the twelve pressure regulating valves 25, and each carriage unit 21 on the premise of image recognition. A pair of reference pins 69 and 69 serving as a reference for positioning the head unit 61 in the X-axis, Y-axis, and θ-axis directions (position recognition) are provided (details will be described later). The positioning of the 12 functional liquid droplet ejection heads 62 with respect to the head plate 65 is performed by a separate device. When the functional liquid droplet ejection heads 62 are mounted on the main carriage 63, the pair of reference pins 69 and 69 and the respective functional liquid droplet ejection heads. The position accuracy of 62 is established.

  Each main carriage 63 has a carriage main body 66 that supports a sub-carriage 64 (head plate 65), a carriage main body 66 that is suspended, and is connected to an upper portion of the carriage main body 66, and is connected to the head unit 61 via the carriage main body 66. Is connected to a head θ axis table 67 (first correction means, second correction means) capable of fine adjustment (θ axis correction) by motor driving, and an upper portion of the head θ axis table 67. And a head Z-axis table 68 capable of finely adjusting the Z position of the head unit 61 by motor driving (Z-axis correction) via the carriage body 66.

  As shown in FIG. 6, the functional liquid droplet ejection head 62 is a so-called double series, a functional liquid introduction part 71 having two series of connecting needles 72, and a dual head substrate that is continuous with the functional liquid introduction part 71. 73 and a head main body 74 which is connected to the lower side (upper side in the figure) of the functional liquid introduction portion 71 and has an in-head flow path filled with the functional liquid therein. The connection needle 72 is connected to the functional liquid tank via the pressure adjustment valve 25 and supplies the functional liquid to the in-head flow path of the functional liquid droplet ejection head 62. The head main body 74 includes a cavity 81 formed of a piezoelectric element or the like, and a nozzle plate 82 having a nozzle surface 83 in which two nozzle rows 84 and 84 are formed in parallel to each other. The head substrate 73 is provided with two connectors 75, 75, and each connector 75 is connected to the head driver 131 (see FIG. 8) via a flexible flat cable. Reference numeral 86 in the drawing is a pair of marks when the functional liquid droplet ejection head 62 is positioned on the head plate 65 by the above-described separate apparatus.

  Each nozzle row 84 has a length of, for example, 1 inch (approximately 25.4 mm), and each nozzle row 84 includes 180 nozzles 85 arranged at an equal pitch (approximately 140 μm). One nozzle row 84 is shifted from the other nozzle row 84 by a half pitch (70 μm) in the nozzle row direction, and the dot density (resolution) is 360 dpi.

  As shown in FIGS. 5 and 7, each functional liquid droplet ejection head 62 is mounted on the sub-carriage 64 so that the two nozzle rows 84 and 84 are parallel to the Y-axis direction. It is fixed to. The twelve functional liquid droplet ejection heads 62 of each sub-carriage 64 are closely overlapped in the width direction (X-axis direction), and all ejection nozzles 85 (160 × 12) are continuous in the Y-axis direction. In this way, they are arranged in steps. Then, an R-system functional liquid droplet ejection head 62R, a G-system functional liquid droplet ejection head 62G, and a B-system functional liquid droplet ejection into which R, G, and B3 functional liquids are respectively introduced in order from the left side of FIG. It is the head 62B.

  That is, the twelve functional liquid droplet ejection heads 62 of each head unit 61 are configured with four partial drawing lines of each color by the plurality of nozzles 85 of the four functional liquid droplet ejection heads 62 of each color, and three color portions. The drawing lines are arranged four times in the Y-axis direction so as to form one divided drawing line. Further, seven divided drawing lines are continued in the Y-axis direction to form one drawing line. The length of this partial drawing line is 22.6 mm (25.4 mm / 180 × 160), and the length of the drawing line is 1897 mm (25.4 mm / 180 × 160 × 12 × 7). That is, since the seven head units 61 correspond to the drawing width (1800 mm) in the Y-axis direction of the substrate W, the drawing process (full line method) is performed on the entire area of the substrate W by one ejection scan. Can do.

  As described above, the dimension Da of each pixel region in the row direction (Y-axis direction) of the substrate is, for example, 300 μm, and the dimension La of the partition wall portion 507b in the row direction of the substrate is, for example, 100 μm. In this case, 56 pixel regions 507a correspond to one partial drawing line. A partial drawing region Dp (see FIG. 7) is configured by the 56 columns of pixel regions 507a. That is, the pixel region 507a of the entire substrate W is virtually divided into 84 partial drawing regions Dp in the row direction (Y-axis direction) of the substrate. In FIG. 7, the 1 × 56 pixel region 507a is represented by one rectangle.

  As shown in FIGS. 2 to 4, the image recognition means 26 is arranged so as to face both the front and rear sides of the work carry-in / out area 34, and two substrate alignment marks Wm formed on both long side portions of the substrate W, respectively. , Wm are respectively mounted so as to be movable in the Y-axis direction by two workpiece recognition cameras 101 and a camera moving mechanism (not shown) attached to the Y-axis table 23. 116 is connected to two dot recognition cameras 102 for recognizing functional droplets (dots) ejected on 116 and the X-axis air slider 44 of the X-axis table 22, and 2 of each head unit 61 (sub-carriage 64). And a head recognition camera 103 (see FIG. 9) for recognizing one reference pin as an image. Based on the image recognition results of these various cameras, the above-described position correction of the substrate W and the head unit 61 is performed. Further, as will be described in detail later, the image recognition means 26 has a dummy recognition camera 104 incorporated in a dummy unit 161 mounted on each main carriage 63 instead of the head unit 61.

  Next, the maintenance means 12 in the droplet discharge device 1 will be described with reference to FIGS. The maintenance means 12 is disposed in the maintenance area 32, and includes seven suction units 111 that perform suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 62, and the functional liquid droplet ejection head. Wiping unit 112 for wiping 62 nozzle surfaces 83, eight suction units 111 and eight unit lifting mechanisms (not shown) for individually supporting the wiping unit 112 so as to be lifted and lowered, and an angle frame for supporting these units 118. Further, the maintenance means 12 includes a regular flushing box 114 disposed on the table support portion 43 and a pair of pre-drawing flushing boxes 115 and 115 disposed on both front and rear sides of the suction table 41. .

  The seven suction units 111 respectively correspond to the seven carriage units 21, and each suction unit 111 faces each carriage unit 21 from below, and the nozzle surfaces of the twelve functional liquid droplet ejection heads 62. Twelve caps (not shown in the figure) are provided to be sealed to 83. Thereby, it is possible to prevent the functional function of the nozzle 85 of each functional liquid droplet ejection head 62 from being dried and lowering the ejection function when not in operation. Further, the functional liquid is sucked from the nozzle 85 with each cap sealed to the nozzle surface 83, and the functional liquid thickened in the functional liquid droplet ejection head 62 is discharged.

  The wiping unit 112 is disposed on the drawing area 31 side of the suction unit 111 and presses the wiping sheet 112a against the nozzle surface 83 that is contaminated with the functional liquid by suction of the functional liquid droplet ejection head 62 or the like. Wipe off. And by the above suction process and this wiping, the discharge function of the functional liquid droplet discharge head 62 in which nozzle clogging has occurred can be recovered.

  The regular flushing box 114 is for receiving regular flushing performed when the substrate W is replaced. When the suction table 41 faces the work carry-in / out area 34 for exchanging the substrate W, the regular flushing box 114 faces the drawing area 31 and the functional liquid droplet ejection head 62 is provided on the table support portion 43. It is designed to receive the discarded discharge from all the nozzles 85. By this regular flushing, it is possible to prevent clogging of the nozzles of the functional liquid droplet ejection head 62 that is on standby.

  The pair of pre-drawing flushing boxes 115, 115 are for receiving pre-drawing flushing performed immediately before the functional liquid is discharged onto the substrate W (during a series of drawing operations). The suction table 41 is disposed so as to sandwich the suction table 41 in the X-axis direction, and waste discharge from all nozzles 85 (discharge nozzles) performed immediately before the discharge drive of the functional liquid droplet discharge head 62 accompanying the reciprocation of the substrate W is performed. To receive. By this pre-drawing flushing, the functional liquid droplets can be ejected onto the substrate W while the functional liquid droplet ejection from the functional liquid droplet ejection head 62 is stable.

  Next, the control system of the entire droplet discharge device 1 will be described with reference to FIG. The control system of the droplet discharge device 1 basically has a drive having various drivers for driving the host computer 2 and the function droplet discharge head 62, the X-axis table 22, the Y-axis table 23, the maintenance means 12, and the like. And a control unit 122 (controller 13) that controls the entire droplet discharge device 1 including the drive unit 121.

  The host computer 2 is configured by connecting a computer 127 connected to the controller 13 to a keyboard 127 and a display 128 for displaying an image of an input result or the like by the keyboard 127.

  The drive unit 121 includes a head driver 131 that controls the ejection of the functional liquid droplet ejection head 62, a moving driver 132 that controls the motors of the X-axis table 22 and the Y-axis table 23, and a suction unit of the maintenance unit 12. 111, a wiping unit 112, and a maintenance driver 133 that drives and controls the unit lifting mechanism.

  The control unit 122 includes a CPU 141, a ROM 142, a RAM 143, and a P-CON 144, which are connected to each other via a bus 145. The ROM 142 has a control program area for storing a control program processed by the CPU 141, and a control data area for storing control data for performing a drawing operation and image recognition.

  The RAM 143 includes various register groups, a drawing data storage unit that stores drawing data for discharging functional liquid onto the substrate W, a position data storage unit that stores design position data of the substrate W and the head unit 61, and the like. It has a storage unit and is used as various work areas for control processing. The design position data of the head unit 61 is the position data stored immediately before the drawing process. In addition to the position data at the time of design (newly installed) of the droplet discharge device 1, the updated position data It is a concept that includes data.

  In addition to various drivers of the drive unit 121, various cameras of the image recognition means 26 are connected to the P-CON 144, and a logic circuit is constructed to supplement the functions of the CPU 141 and handle interface signals with peripheral circuits. Built in. For this reason, the P-CON 144 receives various commands and the like from the host computer 2 as they are or processes them and imports them into the bus 145, and in conjunction with the CPU 141, the data and control signals output from the CPU 141 and the like to the bus 145 are directly received. Or it processes and outputs to the drive part 121. FIG.

  The CPU 141 inputs various detection signals, various commands, various data, etc. via the P-CON 144 according to the control program in the ROM 142, processes various data, etc. in the RAM 143, and then drives via the P-CON 144. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 121 and the like. For example, the CPU 141 controls the functional droplet discharge head 62, the X-axis table 22, and the Y-axis table 23 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions. Further, the CPU 141 controls various cameras of the image recognition means 26, recognizes the image of the imaging target, acquires position correction data based on the recognition result, and further performs data correction (details will be described later). To do).

  Next, a series of drawing operations on the substrate W by the drawing apparatus 11 will be described. First, the substrate W to be drawn is placed on the suction table 41, and after the pre-alignment, the workpiece recognition camera 101 images the substrate alignment marks Wm and Wm of the set substrate W, and the image recognition result Based on the above, position correction in the θ-axis direction by the work θ-axis table 42 and position data correction of the substrate W in the X-axis direction and the Y-axis direction are performed.

  The head position correction process described later corrects in advance the positional deviation of each head unit 61 in the X-axis direction and the Y-axis direction based on the mechanical accuracy error of the X-axis table 22 and the Y-axis table 23. The position correction is performed on each newly inserted head unit 61 based on the imaging result of the head recognition camera 103.

  When the preparation for the discharge operation on the substrate W is thus completed, the drawing apparatus 11 reciprocates the substrate W in the X-axis direction by the X-axis table 22, and the seven carriage units 21 are synchronized with this. Each functional liquid droplet ejection head 62 is selectively ejected and functional liquid is ejected (drawn) on the upper surface Wa of the substrate W facing the drawing area 31 by a full line method.

  Here, in this embodiment, since the pixel regions 507a corresponding to the R, G, and B3 colors are arranged in the vertical direction (X-axis direction) of the substrate W, the sub-scan that moves the head unit 61 in the Y-axis direction. Are performed twice to eject and land three-color functional droplets on each of the R, G, and B three-color pixel regions 507a.

  Specifically, as shown in FIG. 7, first, as the first main scan, the first, fourth,..., (3n-2),. , (3n−1),..., 83rd partial drawing region Dp (of the pixel region 507a corresponding to B) .., (3n),..., 84th partial drawing region Dp (corresponding to G of each of the pixel regions 507a) corresponding to R. A functional droplet of G is landed on each pixel region 507a) (see FIG. 7A).

  Subsequently, after each head unit 61 is moved in the Y-axis direction by the partial drawing line (first sub-scanning), as the second main scanning, the (3n-2) -th partial drawing region Dp is The G functional droplet is landed, the B functional droplet is landed on the (3n-1) th partial drawing region Dp, and the R functional droplet is landed on the (3n) th partial drawing region Dp. It is landed (see (b) of the figure).

  Furthermore, after each head unit 61 is moved in the Y-axis direction by the partial drawing line (second sub-scanning), the third main scanning is performed with respect to the (3n-2) -th partial drawing region Dp. , The G functional droplet is landed on the (3n-1) th partial drawing region Dp, and the B functional droplet is landed on the (3n) th partial drawing region Dp. Thus, drawing on the substrate W is completed (see FIG. 10C).

  In this way, the functions of the R, G, and B colors are applied to the (3n-2) th, (3n-1) th, and (3n) th partial drawing areas Dp, that is, to all the partial drawing areas Dp. Droplets can be landed. In this series of drawing processes, the sub-scan for the partial drawing lines is performed twice for each head unit 61. Therefore, the scanning range (sub-scanning range) of each head unit 61 is equal to the partial drawing line. It is roughly equivalent to twice the length (45.2 mm).

  Next, a method for positioning (position correction) the head unit 61 with respect to the substrate W will be described. As shown in the schematic diagram of FIG. 9, an alignment mask 200 is set on the set table 41 of the X-axis table 22 in place of the substrate W, while the seven main carriages 63 of the Y-axis table 23 are A dummy unit 161 is mounted instead of the head unit 61. As described above, the X-axis air slider 44 is provided with the head recognition camera 103 (head recognition means) facing upward, and the X-axis table 23 is driven to drive the head unit by the Y-axis table 23. The head recognition camera 103 can be positioned on the 61 movement locus.

  The alignment mask 200 is a glass mask made of quartz glass or the like, like the substrate W, and has the same thickness as the substrate W. Formed on the surface of the alignment mask 200 are a first mark row 201 and a second mark row 202 that are spaced apart from and parallel to each other in the X-axis direction. The first mark row 201 and the second mark row 202 are formed exactly the same, and in the Y-axis direction, the same separation dimension as the mutual separation dimension of the first camera 104a and the second camera 104b of the dummy recognition camera 104 described later. And at the same position in the X-axis direction. Each of the mark rows 201 and 202 is composed of a plurality of alignment marks 203 for indicating the absolute reference position of the head unit 61 in the sub-scanning, and the movement range in the sub-scanning of the seven head units 61 (dummy units 161). It has a length to cover.

  The plurality of alignment marks 203 in each of the mark rows 201 and 201 is composed of one reference line 204 and a plurality of intersecting lines 205 orthogonal to the reference line 204. A plurality of intersecting lines 205 are arranged at a predetermined arrangement pitch in the Y-axis direction. Although the details will be described later, the arrangement pitch of the alignment mark 203 is a position correction point of the head unit 61. In the embodiment, the pixel pitch of the substrate W and the linearity accuracy of the Y-axis table are improved. Considering this, the pitch is 10 mm.

  As shown in FIG. 10, the dummy unit 161 includes a dummy plate 165 having substantially the same basic form as the head plate 65 of the head unit 61 shown in FIG. 5, and the first camera 104a and the second camera 104b mounted on the dummy plate 165. And a dummy recognition camera 104. The first camera 104a and the second camera 104b are each constituted by a CCD camera, and are spaced apart from each other in the X-axis direction and back-to-back with the camera head 106 facing downward. In this case, the positions of the first camera 104 a and the second camera 104 b correspond to the positions of the pair of reference pins 69 and 69 in the head unit 61. A pair of camera openings 167 and 167 are formed in the dummy plate 165 immediately below each camera head 106, and the first camera 104 a and the second camera 104 b image the alignment mark 203 from the camera opening 167.

  Reference numeral 168 in the figure is a pair of balance weights, and reference numeral 169 is a balance opening. With the balance weight 168 and the balance opening 169, the weight and the center of gravity position of the dummy plate 165 are adjusted to be substantially the same as those of the head unit 61. Thereby, the twist of the Y-axis table 23 based on the weight of the head unit 61 and the like can be taken into the result of position correction described later. The weight and the center of gravity of the dummy plate 165 are preferably in a state in which the functional liquid discharge head 62 and the pressure regulating valve 25 are mounted on the head unit 61 and are filled with a functional liquid. .

  Next, a series of operations of the head position correction procedure that is the main part of the present invention will be described in detail. First, seven dummy units 161 are mounted on the seven main carriages 63 (S11 in FIG. 11). Subsequently, the alignment mask 200 is set on the suction table 41 and the position of the alignment mask 200 is corrected (S12). The setting and position correction of the alignment mask 200 are performed in the same manner as the setting and position correction of the substrate W described above. When the alignment mask 200 is set and position corrected on the suction table 41, the plurality of alignment marks 203 function as indicators of the absolute reference position of the head unit 61.

  Next, the origin adjustment of the dummy recognition camera 104 incorporated in each mounted dummy unit 161 is performed (S13). Here, as will be described later, each dummy unit 161 recognizes an image of a plurality of alignment marks 203 over the sub-scanning range of each corresponding head unit 61. The first camera 104a and the second camera 104b perform imaging by imaging an arbitrary alignment mark 203 in the first mark row 201 and an arbitrary alignment mark 203 in the second mark row 202, respectively, in the corresponding sub-scanning range.

  Next, each dummy unit 161 images a plurality of alignment marks 203 over the corresponding sub-scanning range of each head unit 61, and measures the displacement based on the image recognition result (S14). Specifically, each dummy unit 161 is moved by one pitch (10 mm) of the alignment mark 203 in the Y-axis direction by the Y-axis table 23, and the first mark row is respectively obtained by the first camera 104a and the second camera 104b. 201 and the alignment mark 203 of the second mark row 202 are individually imaged.

  FIG. 12 shows an image recognition result of the alignment mark (first alignment mark 203) of the first mark row 201 by the first camera 104a, and an alignment mark (second alignment mark 203) of the second mark row 202 by the second camera 104b. The image recognition result is shown. In the first alignment mark 203, the imaging center CC of the first camera 104a is shifted from the origin 0 by + ΔX1 and + ΔY1. Further, in the second alignment mark 203, the imaging center CC of the second camera 104b is at a position shifted from the origin 0 by −ΔX2 and −ΔY2.

  As described above, the positional deviation data (+ ΔX1, + ΔY1-ΔX2, -ΔY2) is acquired based on the recognition results by the first camera 104a and the second camera 104b, and the design of the head unit 61 is based on the positional deviation data. The position data is corrected (data correction in the X-axis direction and the Y-axis direction), and reference position data is acquired (S15).

  The image recognition by the first camera 104a and the second camera 104b and the correction of the design position data based on the image recognition are performed on all the alignment marks 203 in the corresponding sub-scanning range of each head unit 61. The design position data of the head unit 61 can be corrected in units of arrangement pitch, and the reference position data can be acquired in units of the arrangement pitch.

  Then, based on the obtained reference position data, the head θ-axis table 67 is controlled, and each dummy unit 161 is rotated to perform θ correction of each dummy unit 161 (S16). In this state, when the dummy unit 161 is not replaced with the head unit 61 (S17; No), the position correction process is completed.

  As described above, the position of the dummy unit 161 is corrected over the sub-scanning range of each corresponding head unit 61 by the alignment mask 200 in which a plurality of alignment marks 203 are arranged at a predetermined pitch in the Y-axis direction. As a result, it is possible to correct distortion in the X-axis direction and displacement in the Y-axis direction in the Y-axis table 23. Thereby, a drawing line can be maintained with high accuracy.

  Furthermore, the first camera 104a and the second camera 104b recognize the images of the first mark row 201 and the second mark row 202, respectively, so that the θ correction of the head unit 61 is performed in units of the arrangement pitch of the alignment marks 203. Can be performed with high accuracy. In addition, it is also possible to acquire reference position data having a finer pitch than the arrangement pitch of the alignment marks 203 by complementing positional deviation data between the alignment marks 203 based on the imaging results of the alignment marks 203. It is also possible to obtain reference position data corresponding to the sub-scanning position of the head unit 61.

On the other hand, after the θ correction (S16) of each dummy unit 161, when the dummy unit 161 is replaced with the head unit 61 (S17; Yes), a pair of reference pins 69, Based on the image recognition result of 69, θ correction of each head unit 61 is performed (S21 to S23).
Specifically, first, the X-axis table 22 is driven so that the head recognition camera 103 is positioned on the movement locus of the Y-axis table 23, and the Y-axis table 23 is driven to directly connect the head recognition camera 103. Each head unit 61 faces the upper portion, the pair of reference pins 69 and 69 are imaged, and the positional deviation is measured based on the image recognition result (S21). The head recognition camera 103 may be constituted by two cameras corresponding to the pair of reference pins 69, 69, and the pair of reference pins can be moved by moving one camera by the X-axis table 22. 69 and 69 may be imaged respectively. Of course, seven head recognition cameras 103 may be installed corresponding to the seven head units 61.

  Next, based on the obtained image recognition result (position shift data), the reference position data is corrected, and final position data is acquired (S22).

  Finally, based on the obtained final position data, each head θ-axis table 67 is controlled, each head unit 61 is rotated, and θ correction of each head unit 61 is performed (S23). In this way, a series of head position correction processing is completed.

  As described above, when the dummy unit 161 is replaced with the head unit 61, the θ correction of each head unit 61 is performed. Therefore, the position correction taking into account the distortion of the Y-axis table and the feed error as described above. In addition, the position of each mounted head unit 61 can be easily corrected. Therefore, even if the head unit 61 is frequently replaced, replacement work including position correction can be performed smoothly and in a short time.

  In the present embodiment, the design position data is corrected using the dummy unit 161. However, without using the dummy unit 161, a camera (work image pickup means) for imaging the alignment mark 203 is attached to the head unit 61. The design position data may be corrected based on the image recognition of the alignment mark 203 by the camera. However, using the dummy unit 161 of this embodiment instead of attaching the camera to the head unit 61 is particularly useful in terms of space.

  As described above, according to the head position correction process of this embodiment, when the head unit 61 is replaced, the position correction of the head unit 61 can be easily performed in consideration of the mechanical accuracy error of the X-axis table and the Y-axis table. And it can be performed with high accuracy. Therefore, in the droplet discharge device 1, the positional accuracy of the head unit 61 in consideration of sub-scanning can be improved.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 13 is a flowchart showing the manufacturing process of the color filter, and FIG. 14 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 14B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 14C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 14D, the functional liquid droplets are ejected by the functional liquid droplet ejection head 62, and each pixel region 507a surrounded by the partition wall portion 507b is disposed. Let it land. In this case, the functional liquid droplet ejection head 62 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 15 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 14, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 15 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 62. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 62.

FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 17 shows a third example in which a liquid crystal device is configured using the color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 18 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 19, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode forming step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 20, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 62, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the suction table 41 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 22, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 62 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 23, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 24, the pixel composition (second liquid composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 24)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 25, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 62, as shown in FIG. 26, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 27, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 28 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the suction table 41 of the droplet discharge device 1.
First, the liquid material (functional liquid) containing the conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 62. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 62, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 29 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 30A, and when these are formed, as shown in FIG. 30B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a typical top view of a substrate. It is an external appearance perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is a typical top view of a head unit. It is an external appearance perspective view of a functional droplet discharge head. It is a schematic diagram explaining a series of drawing processes by a droplet discharge apparatus. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a schematic diagram explaining the position correction method of a head unit. (A) is a top view of a dummy head, (b) is an external perspective view of a dummy head. It is a flowchart which shows the position correction process of a head unit. It is a figure which shows the image recognition result of the alignment mark by a dummy recognition camera. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 13 ... Controller 22 ... X-axis table 23 ... Y-axis table 41 ... Suction table 61 ... Head unit 62 ... Functional droplet discharge head 69 ... Reference pin 103 ... Head recognition camera 104 ... Dummy recognition camera 161 ... Dummy unit 200 ... Alignment mask 203 ... Alignment mark W ... Substrate

Claims (16)

A set table for setting a workpiece; an X-axis table for main-scanning the workpiece in the X-axis direction via the set table; a head unit equipped with a functional liquid droplet ejection head; and the head unit being detachable And a Y-axis table that supports and sub-scans this in the Y-axis direction,
In a head position correction method for a droplet discharge apparatus, in which the functional liquid droplet discharge head is driven to discharge while performing the main scanning and the sub scanning of the head unit with respect to the work, and drawing with the functional liquid on the work is performed. ,
Mask set for setting an alignment mask in which a plurality of alignment marks indicating the absolute reference position of the head unit in the sub-scanning are arranged at a predetermined pitch in the Y-axis direction instead of the work Process,
A first image recognition step for recognizing the plurality of alignment marks over the scanning range of the sub-scanning by a workpiece imaging means attached to the head unit;
A reference position data acquisition step of correcting reference position data by correcting the design position data of the head unit based on the recognition result in the first image recognition step;
A first correction step for correcting the position of the head unit based on the acquired reference position data;
A second image recognition step for recognizing a pair of reference marks of the head unit by a head imaging means when the head unit is newly mounted;
A final position data acquisition step of correcting the reference position data and acquiring final position data based on a recognition result in the second image recognition step;
And a second correcting step for correcting the position of the new head unit based on the acquired final position data. The mark row composed of the plurality of alignment marks comprises a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel.
The workpiece imaging means includes a first camera that images the first mark row, and a second camera that images the second mark row,
The first image recognition step includes recognizing images of the first mark row and the second mark row, respectively, by the first camera and the second camera over the scanning range of the sub-scanning. 2. The head position correcting method according to 1. A set table for setting a work; an X-axis table for main-scanning the work in the X-axis direction via the set table; and a functional liquid droplet ejection head and a continuous drawing line in the Y-axis direction. A plurality of head units comprising, and a Y-axis table that detachably supports the plurality of head units and sub-scans them in the Y-axis direction,
Head position correction of a droplet discharge device that performs drawing with a functional liquid on the workpiece by discharging the functional droplet discharge head while causing the plurality of head units to perform main scanning and sub-scanning on the workpiece. In the method
Mask set for setting an alignment mask in which a plurality of alignment marks indicating the absolute reference position of the head unit in the sub-scanning are arranged at a predetermined pitch in the Y-axis direction instead of the work Process,
A dummy mounting step of mounting a plurality of dummy units incorporating work imaging means instead of the plurality of head units on the Y-axis table;
A first image recognition step of recognizing the alignment mark over the sub-scanning scanning range in each head unit by the workpiece imaging means incorporated in each dummy unit;
A reference position data acquisition step of correcting reference position data by correcting the design position data of each head unit based on the recognition result in the first image recognition step;
A first correction step for correcting the position of each dummy unit based on the acquired reference position data;
A second image recognition step of recognizing a pair of reference marks of each head unit by a head imaging means when the plurality of head units are mounted instead of the plurality of dummy units;
A final position data acquisition step of correcting the reference position data and acquiring final position data based on a recognition result in the second image recognition step;
And a second correcting step for correcting the position of each head unit based on the acquired final position data. The mark row composed of the plurality of alignment marks comprises a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel.
Each of the workpiece imaging means includes a first camera that images the first mark row, and a second camera that images the second mark row,
In the first image recognition step, the first mark row and the second mark row are respectively recognized by the first camera and the second camera over the sub-scanning scanning range. The head position correcting method according to claim 3.   5. The head position correcting method according to claim 3, wherein each of the dummy units has a weight and a center of gravity that are substantially the same as each of the head units.   The head position correction method according to claim 3, wherein the plurality of head units are configured to be individually movable by the Y-axis table. An X-axis table that has a set table for setting a work, and that main-scans the work in the X-axis direction via the set table; a head unit on which a functional liquid droplet ejection head is mounted on a sub-carriage; and the head unit A Y-axis table that detachably supports and sub-scans this in the Y-axis direction,
A head position correction device for a droplet discharge device that performs drawing with a functional liquid on the workpiece by discharging the functional droplet discharge head while causing the head unit to perform the main scanning and the sub scanning with respect to the workpiece. There,
In place of the work, an alignment mask in which a plurality of alignment marks indicating the absolute reference position of the head unit in the sub-scan is arranged at a predetermined pitch in the Y-axis direction is set on the set table,
And what attached the work imaging means to the head unit,
A first image recognition means for controlling the workpiece imaging means attached to the head unit and recognizing the alignment mark over the scanning range of the sub-scanning;
Reference position data acquisition means for correcting the design position data of the head unit and acquiring reference position data based on the recognition result by the first image recognition means;
First correction means for correcting the position of the head unit based on the acquired reference position data;
Second image recognition means for recognizing an image of a pair of reference marks of the head unit when the head unit is newly mounted;
Final position data acquisition means for correcting the reference position data and acquiring final position data based on the recognition result by the second image recognition means;
A head position correction apparatus comprising: second correction means for correcting the position of the new head unit based on the acquired final position data. The mark row composed of the plurality of alignment marks comprises a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel.
The workpiece imaging means includes a first camera that images the first mark row, and a second camera that images the second mark row,
The first image recognizing means causes the first camera and the second camera to recognize images of the first mark row and the second mark row, respectively, over a scanning range of the sub-scanning. Item 8. The head position correcting device according to Item 7. A set table for setting a work; an X-axis table for main-scanning the work in the X-axis direction via the set table; and a functional liquid droplet ejection head and a continuous drawing line in the Y-axis direction. A plurality of head units comprising, and a Y-axis table that detachably supports the plurality of head units and sub-scans them in the Y-axis direction,
Head position correction of a droplet discharge device that performs drawing with a functional liquid on the workpiece by discharging the functional droplet discharge head while causing the plurality of head units to perform main scanning and sub-scanning on the workpiece. A device,
In place of the work, an alignment mask in which a plurality of alignment marks indicating the absolute reference position of the head unit in the sub-scan is arranged at a predetermined pitch in the Y-axis direction is set on the set table,
And in place of the plurality of head units on the Y-axis table, a plurality of dummy units incorporating work imaging means are mounted.
First image recognition means for controlling the workpiece imaging means incorporated in each dummy unit and recognizing the alignment mark over the sub-scanning scanning range in each head unit;
Reference position data acquisition means for correcting the design position data of each head unit based on the recognition result by the first image recognition means to acquire reference position data;
First correction means for correcting the position of each dummy unit based on the acquired reference position data;
A second image recognition means for recognizing a pair of reference marks of each head unit when the plurality of head units are mounted instead of the plurality of dummy units;
Final position data acquisition means for correcting the reference position data and acquiring final position data based on the recognition result by the second image recognition means;
A head position correction apparatus comprising: second correction means for correcting the position of each head unit based on the acquired final position data. The mark row composed of the plurality of alignment marks comprises a first mark row and a second mark row that are spaced apart from each other in the X-axis direction and arranged in parallel.
Each of the workpiece imaging means includes a first camera that images the first mark row, and a second camera that images the second mark row,
The first image recognizing unit causes the first mark row and the second mark row to be image-recognized by the first camera and the second camera over the scanning range of the sub-scanning, respectively. The head position correction device according to claim 9.   11. The head position correcting apparatus according to claim 9, wherein each of the dummy units has a weight and a center of gravity that are substantially the same as each of the head units.   The head position correcting apparatus according to claim 9, wherein the plurality of head units are configured to be individually movable by the Y-axis table.   A liquid droplet ejection apparatus comprising the head position correction apparatus according to claim 7.   14. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 13 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 13, wherein a film forming portion using functional droplets is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 14 or the electro-optical device according to claim 15.

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