JP2006157007A - Substrate gripper - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slim and lightweight substrate gripper in which operation is semipermanent, damage on a substrate can be minimized and contamination of the substrate can be reduced when it is gripped before and after a predetermined process. <P>SOLUTION: The substrate gripper comprises a cam drive portion 20 fixed such that a cam is interlocked with an actuator 22, a body section 40 incorporating the cam, and a gripper portion 60 fixed radially to the body section 40 and having a large number of grippers for gripping the substrate selectively while being interlocked with the cam to perform linear motion. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a substrate gripping device for gripping a substrate, and more particularly to a substrate gripping device including a gripper that interlocks with a cam for gripping a semiconductor wafer type article.

  In general, in a cleaning process for cleaning a semiconductor wafer type substrate pulled out from a cassette, a gripping device that grips the wafer and transfers the wafer by a chuck and performs a preset operation. Alternatively, a chucking device is arranged in the cleaning process.

  The conventional gripping apparatus is composed of a substantially frustoconical drive member on which a wafer is placed, and the drive member reciprocates up and down (radially) by means including a motor and a spring (bounce spring). The gripping claw (chucking arm) is linearly reciprocated by the driving member, and the peripheral portion of the substrate is gripped by the outer end portion (chucking claw, etc.) of the gripping claw (chucking arm). . (For example, see Patent Document 1)

Japanese Patent Laid-Open No. 11-163094 (paragraphs [0023] to [0026], [0036] to [0039], drawings 3 to 6)

  However, the conventional gripping device (chucking device) has a drawback that the shape of the gripping device becomes thick overall in order to secure a space for the upper and lower movements of the drive member. In addition, since the reciprocating motion of the drive member is performed by the pressure applied by the motor and the restoring force of the spring, fatigue is accumulated in the spring with the continuous repeated motion, and the accurate motion range is maintained for a long time. For this reason, maintenance work such as parts replacement has to be performed frequently, and there is a problem that it takes an enormous amount of time for data recovery for accurate maintenance work.

  The present invention has been devised in consideration of the above-mentioned problems, and the device can be slimmed and reduced in weight, and can be used semipermanently by ensuring an accurate range of motion by the cam and gripper section. In addition, the substrate gripping device can adjust the rotation speed of the cam so as to vary the movement speed of the gripper according to the set interval with the substrate, and can minimize the damage of the gripped substrate. The purpose is to provide.

  Another object of the present invention is to achieve the above-mentioned object and to install two cams in conjunction with one or more actuators, and when the substrate is gripped by the gripping device, each gripper is divided into two parts. Another object of the present invention is to provide a substrate gripping apparatus that can reduce contamination of a substrate due to gripping before and after a predetermined process by operating separately.

  The present invention achieves the above-mentioned object, and the substrate gripping device according to the first aspect of the present invention includes a cam drive unit mounted so that the cam is interlocked with the actuator, and the cam is built-in. And a gripper portion that is radially attached to the main body portion and has a plurality of grippers that selectively grip a substrate while moving linearly in conjunction with the cam. The substrate gripping apparatus.

  According to a second aspect of the present invention, in the cam drive unit, the cam and the actuator form a pair, and the cam is driven by the actuator. This is a substrate gripping apparatus.

  The invention of claim 3 is characterized in that two cams are driven by one actuator so that each gripper used when the substrate is gripped and re-gripped is operated in two parts. The substrate gripping device according to claim 1.

  According to a fourth aspect of the present invention, the two cams and the actuator are driven separately so that each gripper used when the substrate is gripped and re-gripped is operated in two parts. The substrate gripping device according to claim 1.

  According to a fifth aspect of the present invention, the main body portion includes a cam boss having a drive shaft fixed to the cam and fixed in contact with the cam so that the drive force of the actuator is transmitted to the cam. The substrate gripping device according to any one of claims 1 to 4, further comprising a coupling portion.

  According to a sixth aspect of the present invention, the actuator controls the rotational speed of the cam so that the movement speed of the gripper changes according to the distance between the gripper and the substrate, and the gripper responds to the width of the substrate. 5. The substrate gripping device according to claim 1, wherein the rotation angle of the cam is controlled so that the interval of the linear motion is variable.

  Further, the invention according to claim 7 is characterized in that the cam is formed with concavities and convexities on the outer edge of the cam so that one end of the gripper contacts and induces a linear motion of the gripper. 5. A gripping device for a substrate according to any one of 1 to 4.

  The invention according to claim 8 is the substrate gripping device according to claim 7, wherein the unevenness has a shape having a steep slope and a gentle slope.

  The invention according to claim 9 is the substrate gripping apparatus according to claim 7, wherein the unevenness has a shape having a gentle upward / downward inclination.

  According to a tenth aspect of the present invention, the linear motion of the gripper is made such that one end of the gripper is slidably sandwiched in a groove formed in a peripheral portion of the cam. 4. The substrate gripping device according to claim 4.

  According to an eleventh aspect of the present invention, there is provided a body in which the main body portion is mounted so that the cam is rotatable, and a part of the gripper is inserted and mounted on a side portion so as to come into contact with the cam. The substrate gripping device according to claim 1, wherein a cover interposed between the actuator and the actuator is fastened.

  According to a twelfth aspect of the present invention, the gripper has a roller bracket mounted with a roller in contact with the cam and positioned inside the body, and a contactor protruding and fixed so as to hold the substrate. And an arm positioned outside the shaft is connected and fixed by a shaft, and an elastic body for maintaining contact between the roller and the cam is positioned between the roller bracket and the inner wall of the body. 12. The substrate according to claim 11, wherein a sleeve passing therethrough is fixed to the body, and a bellows is attached to the shaft so as to avoid interference between tip portions of the sleeve and the arm. Gripping device.

  The invention of claim 13 is the substrate gripping device according to claim 12, wherein the lower surface of the arm is formed so that a part thereof is inclined toward the substrate.

  The present invention is configured as described above. According to the present invention, the gripping and releasing of the substrate are performed by the horizontal rotational movement of the cam, so that the gripping device is slimmed and reduced in weight and used semipermanently. Yes, the gripper is actuated by the cam, so that the accuracy with respect to the range of motion is improved, and the rotational speed of the cam is adjusted so that the speed of the gripper varies according to the distance from the substrate. Sometimes, a predetermined peripheral portion of the substrate is gripped so as to slide on the lower inclined surface of the arm, thereby minimizing damage to the gripped substrate and simultaneously protecting the substrate.

  In addition, by adding the number of cams and actuators, each gripper used for gripping the substrate is divided into two and operates separately from each other, so that contamination of the substrate due to gripping and re-griping before and after a predetermined process can be prevented. There is also a further effect of obviously reducing.

Further, according to the invention of claim 1, according to the invention of claim 1, the cam is driven by the actuator, and the continuous board is gripped and released by the horizontal rotational movement of the cam, so that the gripping device is slimmed and lightened. It can be used semi-permanently, and the accuracy of the range of motion is improved by operating the gripper with a cam, and the cam rotates according to the set interval (approach distance) with the substrate by driving the actuator. By adjusting the speed, the movement speed of the gripper can be varied, which has the effect of protecting the substrate while minimizing damage to the gripped substrate.
Further, according to the invention of claim 2, the horizontal rotation of the cam is easy, which contributes to slimming and weight reduction.
Further, according to the invention of claim 3 or 4, the grippers used for gripping the substrate by adding the number of cams and actuators are divided into two parts and operated separately from each other, so that By gripping the subsequent substrate with different grippers, the gripper before and after the processing can be changed, and there is an additional effect that the contamination of the substrate is clearly reduced.
According to the invention of claim 5 or 6, it is easy to adjust the rotational speed of the cam, the movement speed of the gripper can be varied, and at the same time the damage to the gripped substrate is minimized. There is an effect to protect.
According to the invention of claim 7, 8 or 9, since the gripper is operated by the cam, the precision with respect to the range of motion is improved, and the effect of protecting the substrate while minimizing the damage of the substrate to be gripped is achieved. Contribute to increase.
In addition, according to the invention of claim 10, the precision with respect to the movement range of the gripper is improved, which contributes to minimizing damage to the gripped substrate and at the same time enhancing the effect of protecting the substrate.
According to the invention of claim 11, it contributes to slimming and weight reduction.
In addition, according to the twelfth aspect of the present invention, it contributes to slimming and weight reduction, improves the precision with respect to the movement range of the gripper, minimizes damage to the gripped substrate, and enhances the effect of protecting the substrate. To contribute.
According to the thirteenth aspect of the present invention, the predetermined peripheral portion of the substrate is gripped so as to slide on the lower inclined surface of the arm at the time of gripping, thereby minimizing damage to the gripped substrate and at the same time protecting the substrate. There is an effect to.

  Embodiments of a substrate gripping device according to the present invention will be described below in detail with reference to the drawings. 1 is a schematic perspective view showing a substrate-type gripping apparatus according to a preferred embodiment of the present invention, FIG. 2 is an exploded perspective view of this embodiment, and FIGS. 3 to 7 are shown in FIG. It is the top view and perspective view which show each member shown and other forms.

  Referring to FIGS. 1 and 2, this embodiment will be described with reference to FIGS. 1 and 2. The substrate-type gripping device 10 includes a cam drive unit 20 to which a cam 24 is mounted so as to rotate horizontally in conjunction with the actuator 22, and an actuator 22. The coupling portion 30 provided with the cam boss 32 that fastens the cam 24, the body portion 40 that fastens the body 42 containing the cam 24 and the cover 44, and the cam 24 so that the cam 24 moves linearly. The gripper portion 60 includes a plurality of grippers 50 that are attached to the side portions of the body 42 and are arranged radially.

  The cam drive unit 20 includes a cam 24 that is rotatably incorporated in the body 42 and an actuator 22 that is fastened to interlock with the cam 24 in order to provide a rotational force to the cam 24. Yes.

  As shown in FIG. 5, the cam 24 has recesses 24 ′ continuously formed on the outer edge where one end of the gripper 50 is in close contact, and the recesses 24 ′ are formed to match the number of grippers 50. The unevenness 24 ′ has a substantially wave shape having a steep slope and a gentle slope. One end of the gripper 52, that is, a roller 51 described later is positioned so as to come into contact with a gentle inclination. At this time, the rotation of the cam 24 is limited so that the roller 51 does not leave the gentle slope of one section. This is to prevent an abnormal operation due to an impact on the roller 51 and the gripper 50 as a whole passing through a steep slope.

  Further, unlike FIG. 5, the unevenness 24 ′ shown in FIG. 6 is formed in a generally wave shape in which a gentle slope is composed of an upward / downward slope, and may have such a form. In such a configuration, the roller 51 of the gripper 50 can be in contact with any surface, and such a wave-shaped unevenness causes the linear motion of the gripper 50 even if the cam 24 rotates in one direction. This is to ensure that it can be performed smoothly.

  The actuator 22 refers to a device including a motor and a cylinder as a power source capable of rotating the cam 24, and is a member for providing a rotational force of the cam 24 and adjusting a rotational speed and a rotational angle. . The actuator 22 controls the rotation angle of the cam 24 according to the restriction of the contact portion between the cam 24 and the roller 51, and an outer front end portion of the gripper 50 that linearly moves by the rotation of the cam 24, that is, a contactor 54 described later on the substrate. The rotational speed of the cam 24 can be controlled so as to change the traveling speed according to the approaching distance.

  The actuator 22 and the cam 24 are fastened by the cam boss 32 shown in FIGS. 2 and 7 so that the cam 24 is rotated by the rotating shaft 22a of the actuator 22, or the actuator 22 is linearly reciprocated. It is also possible to configure the cam 24 to rotate, and various embodiments relating to such a configuration can utilize known techniques.

  The rotational speed of the cam 24 will be described. The cam 24 moves slowly within a set interval (approach distance) between the contactor 54 and the substrate, and rapidly moves away from the set interval. The overall processing time of the gripping process is generally the same, but the damage to the substrate due to the gripping of the contactor 54 is minimized.

  Further, the coupling portion 30 includes a cam boss 32 that is fastened in surface contact with the cam 24 so that the drive shaft 22a of the actuator 22 penetrates and the drive shaft 22a is fixed, and between the cam boss 32 and the actuator 22. The cover 44 is formed to include a cam bush 34a installed so as to avoid interference between the drive shaft 22a and a fastening assisting member 34 such as a wrench or washer.

  On the other hand, the main body 40 is built in such a manner that the cam 24 can rotate, and a body 42 in which a part of the gripper 50 is inserted and attached to the side so that the cam 24 and the roller 51 come into contact with each other. In addition, a cover 44 that is fastened to the body 42 is formed so that the position in which the cam 24 and the coupling portion 30 are incorporated is stabilized.

  As shown in FIGS. 2 and 3, the body 42 is formed with a groove 42a for accommodating the cam 24 at the center, and this groove 42a is formed by a part of the gripper 50 to be inserted and the body frame 42b. In order to avoid interference with the cam 24, it is desirable to form a radially extending portion. The rotating member 42c is rotatably mounted on the body frame 42b and fixedly attached to the cam 24 so that the cam 24 can be smoothly rotated. Has been.

  On the other hand, as shown in the exploded perspective view of FIG. 4, the gripper 50 holds the substrate, and the roller bracket 52 mounted on the roller 51 that contacts the outer edge of the rotating cam 24 and positioned inside the body 42. As described above, the arm 53 in which the contactor 54 is projected and fixed to the outside of the body 42 and the roller bracket 52 and the arm 53 are fixed to both ends, and the shaft 55 penetrates the side of the body frame 42b. And an elastic body 56 that is located between the roller bracket 52 and the body frame 42b, passes through the shaft 55, and is provided so that the roller 51 and the cam 24 are in close contact with each other.

  A part of the lower surface of the arm 53 is inclined toward the substrate side, and when the substrate is sandwiched and gripped between the contactor 54 and the lower surface of the arm 53, the local portion that grips the substrate is the inclined surface of the arm 53. By being positioned at a fixed position while sliding, the impact of the substrate to be gripped can be mitigated.

  Further, the gripper 50 has a sleeve 57 through which a part of the shaft 55 is inserted and fixed to the body frame 42b so as to avoid interference between the shaft 55 and the body frame 42b, A bellows 58 mounted so as to avoid interference between the tip of the fixed sleeve 57 and the tip of the arm 53 reciprocating is formed.

  Next, another embodiment of the substrate gripping apparatus according to the present invention will be described with reference to FIGS. 8, 9, 10, and 11. These embodiments have been devised so that the grippers used before and after the process executed on the substrate are separated and operated, for example, by distinguishing the grippers before and after the cleaning process. It is intended to prevent contamination of the substrate by the gripper. Hereinafter, the same constituent elements that perform the same functions as those of the first embodiment according to the present invention are given the same reference numerals, and the description thereof is omitted.

  First, the gripping device 10a of another embodiment shown in FIGS. 8 and 9 includes upper and lower cams 24 and 24a and two actuators installed so that the upper and lower cams 24 and 24a are individually linked. When a continuous number is given to each gripper 50 in the circumferential direction, the roller 51 of the even-numbered gripper 50 is in close contact with the upper cam 24 and the odd-numbered gripper is attached to the lower cam 24a. 50 rollers 51 are arranged so as to be in close contact with each other.

  As shown in FIG. 9, the actuator 26 is mounted so that two built-in cylinders 26 a and 26 b are interlocked with two drive shafts 26 c and 26 d arranged so as to overlap each other, respectively. The two drive shafts 26c and 26d are arranged so as to interlock with the upper cam 24 or the lower cam 24a, respectively. At this time, one drive shaft 26c is located on the lower side of the upper cam 24 and is coupled to a cam boss 32a fastened to the upper cam 24 to control the rotation of the upper cam 24. The other drive shaft 26d The rotation of the lower cam 24a is controlled by being coupled to a flange 32b that is positioned below the lower cam 24a and fastened to the lower cam 24a.

  Further, the rollers 51 of the upper and lower grippers 50 are preferably arranged at positions that are biased to the upper side or the lower side of the roller bracket 52a so as to be in close contact with the upper cam 24 or the lower cam 24a, respectively.

  Further, the gripping device 10b of another embodiment shown in FIG. 10 is formed such that two cams 24, 24a are separated and overlapped, and the two cams 24, 24a are simultaneously rotated by one actuator 22. Has been. The cams 24 and 24a have the same waveform, but are mounted so that the slopes of the corrugated irregularities of the cams 24 and 24a are reversed.

  Further, in the gripping device 10c according to another embodiment shown in FIG. 11, two sets of cam drive units 20 and 20b each consisting of a cam and an actuator are arranged symmetrically separately. That is, the new cam drive unit 20b is mounted on the gripping device 10 of FIG. 1 so as to be symmetrical to the opposite side of the cam drive unit 20 mounted in advance. At this time, it is a matter of course that the cover 44a and the connecting portion (not shown) must be further provided and mounted.

  Here, when the two cams 24, 24a are arranged as in the other embodiments shown in FIGS. 8, 10, and 11, each of the cams 24, 24a is an arbitrary even-numbered or odd-numbered gripper 50. It is desirable to arrange so as to be in close contact with the roller 51.

  When the actuator 22 moves forward or reverse, rotation angle, rotational speed, etc., and the even-numbered gripper 50 moves inward to grip the substrate, the odd-numbered gripper 50 is unlocked so that the gripping of the substrate is unlocked. Is located outward. Conversely, when the odd numbered grippers 50 move inward and grip the substrate, the even numbered grippers 50 are positioned outward. That is, the odd-numbered and even-numbered grippers 50 alternately perform the gripping operation or the grip releasing operation.

  Further, in the embodiment of FIGS. 8, 10, and 11, it is desirable that the number of grippers 50 is about twice that of the embodiment of FIG. 1, for example, in the embodiment of FIG. In contrast, in another embodiment, there are twelve. In addition, the gripper 50 of the embodiment of FIG. 11 can be arranged in a zigzag shape so as to be easily interlocked with the cam. At this time, according to the even-numbered or odd-numbered gripper 50 in order to closely contact the cam. By adjusting the size of the roller 51, the roller bracket 52 can be mounted so as to be biased upward or downward, and the upper and lower arms 53 of the even-numbered gripper and the odd-numbered gripper can be mounted. By making the lower lengths different from each other, a substrate positioned at a certain height can be gripped.

  In addition, the two cams 24 and 24a in the embodiments of FIGS. 8, 10, and 11 are used for holding and re-holding the substrate, respectively, and function individually with a time difference. It is natural.

  On the other hand, each gripper 50 is common in all embodiments when the substrate is held or unlocked. However, the grippers 50 operate simultaneously with the corresponding cam, and have the same traveling direction, traveling speed, and traveling distance. And so on.

  Here, to explain the unevenness formed on the outer edge of the cam, this unevenness is provided so that one end of the gripper is in close contact and the cam rotates so that the gripper moves linearly. Unlike the cam of the configuration, although not shown in the drawings, a groove may be formed on the upper surface or the lower surface of the peripheral portion of the cam, and one end portion of the gripper may be sandwiched so as to slide in the groove. . In the present embodiment, an example in which the gripper performs a linear motion by the rotational motion of the cam is described, and such an embodiment can naturally use various known techniques. That is.

  Hereinafter, the operation of the substrate gripping apparatus according to the present embodiment will be briefly described.

  First, a description will be given with reference to the embodiment of FIG. 1. When the substrate is positioned at a substantially central portion of the body 42 to be placed on the gripping device 10 or to hold the placed substrate, the actuator 22 is arranged. Is activated and the cam 24 rotates horizontally. Each gripper 50 moves inward while controlling the traveling speed according to the rotation angle and rotation speed of the cam 24, and between the contactor 54 and the arm 53 attached to the outer end of the gripper 50. The minimum peripheral part of the substrate comes into contact and is gripped.

  When the substrate thus gripped is positioned at a predetermined position for the processing step, the actuator 22 is actuated to rotate the cam 24 in the horizontal reverse direction, and each gripper 50 moves outward to grip the substrate. Is released. In this state, the substrate is subjected to predetermined processing steps.

  After the processing step, the substrate is re-gripped by the gripping device 10. This operation is the same as the gripping operation.

  On the other hand, the embodiment of FIGS. 8, 10, and 11 will be described. Although the operation is almost similar to that in FIG. 1, there is a difference in the operation relationship of the gripper 50 due to the difference in the configuration of the actuator 22 and the cam 24. This is because a fundamental difference is that the gripper 50 that is divided is used when the substrate on which a predetermined process is performed is gripped. The difference between the embodiments will be described below.

  First, in the embodiment of FIG. 8, when the substrate is gripped before the process, one actuator 26 a is operated to rotate the upper cam 24, and each even-numbered gripper 50 in close contact with the upper cam 24 is provided. At this time, the odd numbered grippers 50 that are in close contact with the lower cam 24a are located outward.

  Further, when the substrate is re-gripped after the processing step, the other actuator 26b is operated to rotate the lower cam 24a, and the odd numbered grippers 50 that are in close contact with the lower cam 24a are directed inward. At this time, the even-numbered grippers 50 in close contact with the upper cam 24 are positioned outward.

  Other operations are the same as those of the gripping device 10 including the pair of cams 24 and the actuators 22.

  On the other hand, in the embodiment of FIG. 10, when the substrate is gripped before the processing step, one actuator 22 is operated, and the upper and lower cams 24 and 24 a to which the cam corrugations are mounted are forwardly rotated. Then, the even-numbered grippers 50 in close contact with the upper cam 24 move inward to grip the substrate, and at the same time, the odd-numbered grippers 50 in close contact with the lower cam 24a face outward. Move to the location.

  In addition, when the substrate is re-gripped after the processing step, the upper and lower cams 24 and 24a are rotated in reverse and forward, respectively, and the even-numbered grippers 50 that are in close contact with the upper cam 24 are directed outward. At the same time as moving, the odd numbered grippers 50 in close contact with the lower cam 24a move inward to re-grip the thin plate type object.

  Other operations are the same as those of the gripping device 10 including the pair of cams 24 and the actuators 22.

  On the other hand, in the embodiment of FIG. 11, when the substrate is gripped before the processing step and when the substrate is gripped after the processing step, the upper and lower actuators are separately operated. The even-numbered or odd-numbered grippers that are in close contact with each other function according to the divided functions and grip the substrate.

  Also, in the embodiments of FIGS. 8, 10, and 11, the cam 24 is gripped or released according to the shape of the unevenness 24 ′ formed on the outer edge of the cam 24, that is, as in FIG. Therefore, forward rotation and reverse rotation may be alternately performed, and the cam 24 may be rotated in one direction for gripping or releasing as in the case of FIG.

1 is a schematic perspective view showing a first embodiment of a substrate gripping apparatus according to the present invention. It is the disassembled perspective view which showed the gripper apparatus for substrates of 1st Embodiment. It is the perspective view which showed the body of 1st Embodiment. It is the disassembled perspective view which showed the gripper of 1st Embodiment. It is the top view which showed the cam of 1st Embodiment. It is a top view which shows the other form of a cam. It is the perspective view which showed the cam boss of 1st Embodiment. It is a schematic perspective view of a substrate type gripping apparatus according to a second embodiment of the present invention. It is a principal part top view of 2nd Embodiment. It is a schematic perspective view of a substrate type gripping apparatus according to a third embodiment of the present invention. It is a schematic perspective view of a substrate type gripping apparatus according to a fourth embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Gripping apparatus 10a, 10b, 10c Gripping apparatus 20, 20a Cam drive part 22 Actuator 24, 24a Cam 30 Coupling part 32 Cam boss 40 Main part 42 Body 42a Groove 44 Cover 50 Gripper 51 Roller 52 Roller bracket 53 Arm 54 Contact 55 Shaft 56 Elastic body 57 Sleeve

Claims (13)

A cam drive unit mounted so that the cam is linked to the actuator;
A main body in which the cam is incorporated;
A gripping device for a substrate, comprising: a gripper portion that is radially attached to the main body portion and has a plurality of grippers that selectively grip a substrate while moving linearly in conjunction with the cam.   2. The substrate gripping device according to claim 1, wherein the cam driving unit is configured such that the cam and the actuator are paired and the cam is driven by the actuator. 3.   2. The substrate according to claim 1, wherein two cams are driven by one actuator so that each gripper used when the substrate is gripped and re-gripped is operated by being divided into two. Gripping device.   The two sets of cams and actuators are driven separately so that each gripper used when the substrate is gripped and re-gripped is operated in two parts. Substrate gripping equipment.   The main body portion includes a coupling portion including a cam boss that is fixedly coupled to the cam so that a driving shaft of the actuator is fixed so that the driving force of the actuator is transmitted to the cam. A substrate gripping device according to any one of claims 1 to 4.   The actuator controls the rotational speed of the cam so that the movement speed of the gripper changes according to the distance from the substrate, so that the interval of the linear movement of the gripper varies according to the width of the board. 5. The substrate gripping device according to claim 1, wherein a rotation angle of the cam is controlled.   5. An unevenness is continuously formed on the outer edge of the cam so that one end of the gripper contacts and induces a linear motion of the gripper. Gripping device for substrates.   8. The substrate gripping device according to claim 7, wherein the unevenness has a shape having a steep slope and a gentle slope.   8. The substrate gripping device according to claim 7, wherein the unevenness has a shape having a gentle upward / downward inclination.   5. The substrate according to claim 1, wherein the linear movement of the gripper is performed by slidably sandwiching one end of the gripper in a groove formed in a peripheral portion of the cam. Gripping device.   The main body is interposed between the cam and the actuator, and a body in which the cam is rotatably mounted and a part of the gripper is inserted and mounted on the side so as to come into contact with the cam. The substrate gripping device according to any one of claims 1 to 4, wherein the cover is fastened.   The gripper includes a roller bracket that is mounted on the inside of the body with a roller that contacts the cam, and an arm that is positioned outside the body with a contactor protruding and fixed so as to grip a substrate. Is connected and fixed by a shaft, and an elastic body for maintaining contact between the roller and the cam is located between the inner wall of the roller bracket and the body, and a sleeve through which the shaft passes is attached to the body. 12. The substrate gripping device according to claim 11, wherein a bellows is attached to the shaft so as to avoid interference between the sleeve and the tip of the arm.   13. The substrate gripping device according to claim 12, wherein the lower surface of the arm is formed so that a part thereof is inclined toward the substrate side.

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