JP2006153574A5 - - Google Patents

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JP2006153574A5
JP2006153574A5 JP2004342494A JP2004342494A JP2006153574A5 JP 2006153574 A5 JP2006153574 A5 JP 2006153574A5 JP 2004342494 A JP2004342494 A JP 2004342494A JP 2004342494 A JP2004342494 A JP 2004342494A JP 2006153574 A5 JP2006153574 A5 JP 2006153574A5
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JP
Japan
Prior art keywords
cantilever
vibration
glass plate
sample
liquid
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JP2004342494A
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Japanese (ja)
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JP2006153574A (en
JP4391925B2 (en
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Priority to JP2004342494A priority Critical patent/JP4391925B2/en
Priority claimed from JP2004342494A external-priority patent/JP4391925B2/en
Publication of JP2006153574A publication Critical patent/JP2006153574A/en
Publication of JP2006153574A5 publication Critical patent/JP2006153574A5/ja
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Claims (5)

液体中の試料を観察するための原子間力顕微鏡であり、
試料を保持する試料保持部と、
自由端に探針を持つ弾性変形可能なカンチレバーと、
カンチレバーと液体を保持するステージとを備えており、ステージは、液体を保持するガラス板と、カンチレバーを保持するカンチレバーホルダーと、カンチレバーホルダーを支持するステージベースと、ガラス板とカンチレバーホルダーの間とガラス板とステージベースの間に配置された振動絶縁材とを有し、カンチレバーホルダーとステージベースは振動絶縁材を介してガラス板を保持しており、試料はガラス板に保持された液体の中に置かれ、カンチレバーは試料に正対するように液体の中に置かれ、さらに、
ガラス板に設けられ、ガラス板と液体を介してカンチレバーを振動させるための励振手段と、
試料保持部をＸＹ方向に走査するためのＸＹ走査手段と、
カンチレバーの自由端の振動を光学的に検出するための振動検出手段と、
ＸＹ走査手段・振動検出手段からの情報に基づいて試料情報を取得するための情報取得手段とを備えている、原子間力顕微鏡。 An atomic force microscope for observing a sample in a liquid;
A sample holder for holding the sample;
An elastically deformable cantilever with a probe at the free end;
A cantilever and a stage for holding the liquid, the stage including a glass plate for holding the liquid, a cantilever holder for holding the cantilever, a stage base for supporting the cantilever holder, and between the glass plate and the cantilever holder; A vibration insulating material disposed between the plate and the stage base, the cantilever holder and the stage base hold the glass plate via the vibration insulating material, and the sample is contained in the liquid held on the glass plate. The cantilever is placed in the liquid so that it faces the sample, and
An excitation means provided on the glass plate for vibrating the cantilever through the glass plate and the liquid;
XY scanning means for scanning the sample holder in the XY direction;
Vibration detecting means for optically detecting vibration of the free end of the cantilever;
An atomic force microscope comprising: information acquisition means for acquiring sample information based on information from an XY scanning means and vibration detection means. 請求項１において、振動検出手段によって得られる情報に基づいて試料保持部をＺ方向に走査するためのＺ走査手段をさらに備え、情報取得手段はＸＹ走査手段・Ｚ走査手段からの情報に基づいて試料情報を取得する、原子間力顕微鏡。   2. The apparatus according to claim 1, further comprising Z scanning means for scanning the sample holder in the Z direction based on information obtained by the vibration detecting means, wherein the information acquisition means is based on information from the XY scanning means / Z scanning means. An atomic force microscope that acquires sample information. 請求項１または請求項２において、励振手段は、電気信号の供給に応じて振動を生成する振動子と、振動子の振動をガラス板に伝達する振動伝達ブロックとを備えている、原子間力顕微鏡。   3. The atomic force according to claim 1, wherein the excitation means includes an oscillator that generates vibration in response to supply of an electric signal and a vibration transmission block that transmits the vibration of the oscillator to the glass plate. microscope. 請求項３において、振動伝達ブロックは粘性材を介してガラス板に取り付けられている、原子間力顕微鏡。 4. The atomic force microscope according to claim 3, wherein the vibration transmission block is attached to the glass plate via a viscous material. 請求項３または請求項４において、振動伝達ブロックにおける振動の伝達方向は、ガラス板の液体を保持する面に対して３０度から６０度の角度をなしている、原子間力顕微鏡。5. The atomic force microscope according to claim 3, wherein the vibration transmission direction in the vibration transmission block is at an angle of 30 to 60 degrees with respect to the surface of the glass plate holding the liquid.
JP2004342494A 2004-11-26 2004-11-26 Atomic force microscope Active JP4391925B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004342494A JP4391925B2 (en) 2004-11-26 2004-11-26 Atomic force microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004342494A JP4391925B2 (en) 2004-11-26 2004-11-26 Atomic force microscope

Publications (3)

Publication Number Publication Date
JP2006153574A JP2006153574A (en) 2006-06-15
JP2006153574A5 true JP2006153574A5 (en) 2007-11-29
JP4391925B2 JP4391925B2 (en) 2009-12-24

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ID=36632074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004342494A Active JP4391925B2 (en) 2004-11-26 2004-11-26 Atomic force microscope

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JP (1) JP4391925B2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122325A (en) * 2006-11-15 2008-05-29 Jeol Ltd Scanning probe microscope
JP2008134190A (en) 2006-11-29 2008-06-12 Olympus Corp Cantilever holder and scanning probe microscope equipped therewith
JP4910949B2 (en) * 2007-08-29 2012-04-04 株式会社島津製作所 Method for analyzing samples in liquid
JP5185723B2 (en) * 2008-08-01 2013-04-17 オリンパス株式会社 Atomic force microscope
KR101065981B1 (en) 2009-05-20 2011-09-19 인하대학교 산학협력단 Mechanically-coupled vibrating tuning fork-scanning probe system
WO2011016256A1 (en) 2009-08-06 2011-02-10 国立大学法人 金沢大学 Cantilever excitation device and scanning probe microscope
KR101097768B1 (en) 2009-11-30 2011-12-23 한국표준과학연구원 Micro force sensor and micro force measurement method using double ended fork vibration
FR3054667B1 (en) 2016-07-26 2020-07-10 Universite De Bourgogne DEVICE FOR VOLUMETRIC ANALYSIS OF AN ORGANIC OR INORGANIC SAMPLE
WO2020044548A1 (en) * 2018-08-31 2020-03-05 オリンパス株式会社 Atomic force microscope

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