JP2006147023A - Thin film magnetic head and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a rate of curve of an inverse shape of a magnetizing pattern by reducing a rate of curve of recording magnetic field intensity on a recording medium in order to correspond to high recording density of a magnetic recording apparatus, regarding a thin film magnetic head having a recording head part recording information on a recording medium with a vertical magnetic recording system and a reproducing head part reproducing information on the recording medium and its manufacturing method. <P>SOLUTION: In the thin film magnetic head 10 comprising a main magnetic pole part 1 applying a magnetic field of a vertical direction for a recording medium 3, and an auxiliary magnetic pole part 2 absorbing the magnetic field coming out the outside through the recording medium, and having a recording head part 11 recording information at an arbitrary position of the recording medium utilizing a magnetic circuit formed by the main magnetic pole part, the recording medium, and the auxiliary magnetic pole part, and a reproducing head part 12 reproducing information recorded at the arbitrary position of the recording medium, magnetic shield parts 7 being higher than film thickness of the main magnetic pole part are provided at both sides of a side wall of the main magnetic pole part. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention uses a perpendicular magnetic recording system to record information (data) at an arbitrary position on a recording medium such as a disk, and to reproduce information (data) recorded at an arbitrary position on the recording medium. The present invention relates to a thin film magnetic head that is used in a magnetic recording device such as a magnetic disk device or a magnetic tape device, and a method of manufacturing the thin film magnetic head.

  In a magnetic recording device such as a magnetic disk device or a magnetic tape device, a data write operation is performed by recording data at an arbitrary position on a recording medium using a magnetic head represented by a thin film magnetic head. A data read operation is executed by reproducing data recorded at an arbitrary position on the recording medium.

  As a magnetic recording method for recording data on a recording medium, a longitudinal magnetic recording method in which the direction of the magnetization signal is in the in-plane direction of the recording medium, which is already in practical use, and the direction of the magnetization signal are recorded. And a perpendicular magnetic recording system in a direction perpendicular to the medium surface. Generally, it is said that the perpendicular magnetic recording method is less susceptible to thermal fluctuations of the recording medium than the longitudinal magnetic recording method, and can achieve a relatively high magnetic recording density (for example, linear recording density). .

  The longitudinal magnetic recording type thin film magnetic head, which is currently in the mainstream, has a first magnetic layer and a second magnetic layer that are opposed to each other via a gap portion on the medium facing surface side of a recording medium. In this structure, a thin film coil is provided in a state in which at least a part thereof is electrically insulated between the first magnetic layer and the second magnetic layer.

  On the other hand, as a perpendicular magnetic recording type thin film magnetic head, a ring head having the same configuration as a longitudinal magnetic recording type thin film magnetic head and a magnetic field in a direction perpendicular to the recording medium is applied by a single main magnetic pole portion. Single magnetic pole type perpendicular magnetic recording head. Here, the latter single magnetic pole type perpendicular magnetic recording head will be described in detail.

  FIG. 1 is a schematic diagram for explaining the principle of information recording by a general perpendicular magnetic recording type thin film magnetic head. Hereinafter, the principle of information recording when a single-pole type perpendicular magnetic recording head is used as a thin film magnetic head of a general perpendicular magnetic recording system will be described with reference to FIG.

  In general, when information is recorded by a perpendicular magnetic recording type perpendicular magnetic recording head, a perpendicular two-layer medium as shown in FIG. In this perpendicular two-layer medium, a recording layer 30 in which two types of magnetization MT magnetized in a direction perpendicular to the recording medium surface are recorded as information, and a backing layer 31 positioned below the recording layer are laminated. It has a structure. This backing layer 31 has a function of holding the magnetization MT in the recording layer 3 in a direction perpendicular to the recording medium surface, and is usually a permalloy (containing iron (Fe) and nickel (Ni) elements). Made of soft magnetic material such as FeNi). For this reason, the backing layer 31 is also called a soft magnetic lower layer (also referred to as SUL (Soft Underlayer)). When the recording medium 3 is a disc, the downstream side in the rotational direction of the disc is the trailing edge side (also simply referred to as the trailing side), and the upstream side is the leading edge side (also simply referred to as the leading side).

  The perpendicular magnetic recording head shown in FIG. 1 has a single main magnetic pole portion 1 that applies a magnetic field in a direction perpendicular to the recording medium surface of the recording medium 3 and a magnetic field that appears outside through a recording layer 30 on the recording medium. The auxiliary magnetic pole part 2 to be absorbed and the connection part 4 made of a magnetic material for magnetically connecting the main magnetic pole part 1 and the auxiliary magnetic pole part 2 are provided. When information is to be recorded on the recording layer 30 on the recording medium, a predetermined magnetic field is generated by passing a current through the thin film coil 5 in the vicinity of the main magnetic pole portion 1. A magnetic field generated by the thin film coil 5 passes through the main magnetic pole portion 1 and is applied to the recording layer 30 as a recording magnetic field in a direction perpendicular to the recording medium surface of the recording medium 3. Further, the magnetic field that emerges from the recording layer 30 is absorbed by the auxiliary magnetic pole portion 2.

  In other words, the magnetic flux MF narrowed down in the main magnetic pole portion 1 by the magnetic field from the thin film coil 5 passes through the recording layer 30 and reaches the backing layer 31, passes through the recording layer 30 again, and enters the auxiliary magnetic pole. . A magnetic circuit is formed by the main magnetic pole portion 1, the recording medium 3, the auxiliary magnetic pole portion 2 and the connection portion 4. Using this magnetic circuit, the magnetization MT (information) in the direction perpendicular to the recording medium surface of the recording medium 3 can be recorded in the recording layer 30. As described above, when recording information on a recording medium in which a recording layer and a backing layer are laminated (that is, a perpendicular two-layer medium) using a single magnetic pole type perpendicular magnetic recording head, the perpendicular magnetic recording head and the recording medium are used. The correlation with is considerably large.

  FIG. 2 is a cross-sectional view showing a configuration example of a conventional thin film magnetic head including the single magnetic pole type perpendicular magnetic head described above. Here, the recording head unit 110 composed of the single magnetic pole type perpendicular magnetic head described above, and a reproducing head unit that reproduces information recorded at an arbitrary position on a recording layer on a recording medium (for example, a perpendicular two-layer medium). 1 shows a schematic configuration of a thin film magnetic head 100 having 12. 2A is a cross-sectional view perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIG. 2B is a substrate constituting the base of the thin film magnetic head. A sectional view in a direction perpendicular to the substrate surface (not shown) is shown.

  In the thin-film magnetic head 100 of FIG. 2, the recording head unit 110 has a single main magnetic pole unit that applies a magnetic field in a direction perpendicular to the recording medium surface of the recording medium, similar to the perpendicular magnetic recording head of FIG. 1, an auxiliary magnetic pole portion 2 that absorbs a magnetic field coming out through a recording layer (see FIG. 1) on the recording medium, and a magnetic material for magnetically connecting the main magnetic pole portion 1 and the auxiliary magnetic pole portion 2 And a connecting portion 4. Further, in the recording head portion 110 of FIG. 2, the yoke portion 6 made of a magnetic material for converging the magnetic field from the thin film coil 5 and supplying it efficiently to the main magnetic pole portion 1 is provided with the main magnetic pole portion 1 and the connection portion 4. Is formed between. Further, in the recording head part 110 of FIG. 2, the recording head part shield layer 19 made of a magnetic material for suppressing a stray magnetic field (floating magnetic field) from the outside of the thin film magnetic head 100 from entering the recording head part includes: The thin film magnetic head 100 is disposed on the top. In general, components such as the main magnetic pole part 1, the auxiliary magnetic pole part 2, the connection part 4, the thin film coil 5, the yoke part 6 and the recording head part shield layer 19 in the recording head part 110 are covered with a nonmagnetic insulating layer. However, in FIG. 2, the description of the nonmagnetic insulating layer is omitted.

  In the thin film magnetic head 100 of FIG. 2, when information is to be recorded on the recording layer on the recording medium, a current is passed through the thin film coil 5 in the vicinity of the main magnetic pole portion 1 in substantially the same manner as the perpendicular magnetic recording head of FIG. To generate a predetermined magnetic field. The magnetic field generated by the thin film coil 5 passes through the main magnetic pole portion 1 through the yoke portion 6 and is applied to the recording layer as a recording magnetic field in a direction perpendicular to the recording medium surface of the recording medium. Further, the magnetic field coming out from the recording layer is absorbed by the auxiliary magnetic pole portion 2. A magnetic circuit is formed by the yoke portion 6, the main magnetic pole portion 1, the recording medium, the auxiliary magnetic pole portion 2, and the connection portion 4. By using this magnetic circuit, magnetization (information) in a direction perpendicular to the recording medium surface of the recording medium can be recorded on the recording layer.

Further, in the thin film magnetic head 100 of FIG. 2, the reproducing head unit 12 is made of alumina (Al ₂ O) formed on a substrate (not shown) made of a ceramic material such as AlTiC (Al ₂ O ₃ .TiO). ₃ ) a nonmagnetic insulating layer (not shown) made of an insulating material such as, a lower shield layer 17-2 made of a magnetic material formed on the nonmagnetic insulating layer, and the lower shield layer 17-2 A magnetoresistive effect element (hereinafter also abbreviated as an MR (Magnetoresistance effect) element) 18 formed on a nonmagnetic insulating layer (not shown) on the nonmagnetic insulating layer 18 is formed on the MR element 18. And an upper shield layer 17-1 made of a magnetic material formed via a magnetic insulating layer (not shown). The upper shield layer 17-1 and the lower shield layer 17-2 have a function of suppressing the stray magnetic field from the outside from entering the MR element, and each has a thickness of, for example, 1 to 2 μm (micron meter). ). As the MR element, an anisotropic magnetoresistive effect element (also called an AMR (Anisotropic Magnetoresistance effect) element), a giant magnetoresistive effect element (also called a GMR (Giant Magnetoresistance effect) element), or a tunnel magnetoresistive effect element (TMR). An element using a magnetosensitive film exhibiting a magnetoresistive effect such as (also referred to as a “Tunneling Magnetoresistance effect” element) can be used.

  Further, a nonmagnetic insulating layer (not shown) is formed on the upper shield layer 17-1 of the reproducing head unit 12, and the auxiliary magnetic pole unit 2 of the recording head unit 110 is formed on the nonmagnetic insulating layer. Is formed. On the auxiliary magnetic pole portion 2, the thin film coil 5, the connecting portion 4, the yoke portion 6, the main magnetic pole portion 1, and the recording head portion shield layer 19 as described above are formed.

  2. Description of the Related Art In a magnetic recording apparatus such as a magnetic disk apparatus, information is recorded at an arbitrary position on a recording surface on a recording medium using a recording head unit 110 (that is, a single magnetic pole type perpendicular magnetic recording head) as shown in FIG. It is possible to record or reproduce information at an arbitrary position on the recording surface using the reproducing head unit 12 as shown in FIG.

  Here, in a magnetic recording apparatus such as a magnetic disk apparatus, it is necessary to increase the surface recording density of the recording medium in order to increase the recording capacity per unit area of the recording medium such as a disk. In order to increase the surface recording density, it is necessary to improve the track density in the track width direction and the linear recording density in the track length direction of a recording medium such as a disk.

  In general, a storage medium such as a disk is composed of a plurality of concentric tracks that can be accessed by a thin film magnetic head. Further, each track is divided into a plurality of storage areas. Each of the plurality of storage areas is called a “sector”.

  When performing perpendicular magnetic recording type information recording on a recording medium in which a recording layer and a backing layer are laminated using a single magnetic pole type perpendicular magnetic recording head, the main magnetic pole part of the single magnetic pole type perpendicular magnetic recording head Thus, the distribution of the recording magnetic field strength applied to the recording surface of the recording medium is significantly different from that in the longitudinal magnetic recording type information recording. More specifically, the contour lines of the recording magnetic field strength when performing information recording by the perpendicular magnetic recording method are distributed concentrically with the central portion of the single main magnetic pole portion as the maximum intensity, and the distribution swells toward the outside of the contour lines. Show. Therefore, the distribution of the recording magnetic field strength on the trailing side that determines the magnetization state of the recording surface on the recording medium has a curved shape.

  When information is written on a recording medium such as a disk using a perpendicular magnetic recording head having such a recording magnetic field distribution, an image such as a magnetic force microscope (also called MFM (Magnetic Force Microscopy)) is used. FIG. 3 shows an enlarged state of the magnetization pattern MP when the magnetization pattern is observed. Further, FIG. 3A shows a magnetization pattern MP recorded by bending with a conventional perpendicular magnetic recording head, and FIG. 3B shows an ideal magnetization pattern MP. In FIG. 3, the state in which the magnetization direction of the magnetization pattern MP in the direction perpendicular to the recording medium surface is reversed is represented by black and white contrast.

  As shown in FIG. 3A, the position where the magnetization direction of the magnetization pattern MP is reversed at the center of the track TR on the disk is the position where the magnetization direction of the magnetization pattern MP is reversed at the end of the track TR. It is located on the rotation direction side of the disc. For this reason, the reversed shape when the magnetization direction of the magnetization pattern MP on the disk is reversed is curved. On the other hand, the inversion shape of the magnetization pattern when information is written in an ideal state is a linear shape having a good black-and-white contrast, as shown in FIG.

  As described above, when the reversal shape of the magnetization pattern on the recording medium is curved with respect to the track length direction, the reversal shape of the magnetization pattern is apparent when information is reproduced by the MR element. As the value increases, the half-value width in the reproduction signal of one piece of information increases. For this reason, the track edge noise at the end of the track is likely to be mixed in the reproduction signal, which causes a problem that the signal-to-noise ratio (SN ratio) of the reproduction signal is lowered. At the same time, as the linear recording density of the recording medium increases, there also arises a problem that the width of the track on which the curved magnetization pattern is recorded is substantially reduced. This problem may greatly hinder the realization of a higher recording density of a magnetic recording device such as a magnetic disk device.

  As one measure for coping with the above problems, attention is paid to the fact that the shape of the head air bearing surface of the main magnetic pole portion affects the distribution of the recording magnetic field strength, as shown in Patent Document 1 below. A perpendicular magnetic recording head is described in which a concave portion (recess) is formed on the downstream side in the rotation direction of the recording medium, that is, on the trailing side, with respect to the main magnetic pole portion of the single-pole type perpendicular magnetic recording head.

  However, in general, it is technically difficult to form a recess in the main magnetic pole portion of a perpendicular magnetic recording head having a fine structure. Therefore, it is practically impossible to manufacture the perpendicular magnetic recording head described in Patent Document 1, and in Patent Document 1, problems similar to those of the conventional thin film magnetic head still remain.

JP 2002-279606 A

  The present invention has been made in view of the above problems, and in order to improve the S / N ratio of a reproduction signal and to cope with an increase in recording density of a magnetic recording apparatus such as a magnetic disk apparatus, information recording of a perpendicular magnetic recording system is performed. Thin film magnetic head capable of reducing the degree of curvature of the recording magnetic field strength on the recording medium when performing recording, and thus reducing the degree of curvature of the inverted shape of the magnetization pattern recorded on the recording medium, and its manufacture It is intended to provide a method.

  In order to solve the above-described problems, one aspect of the present invention includes a main magnetic pole portion that applies a magnetic field in a direction perpendicular to a recording medium, and an auxiliary magnetic pole that absorbs a magnetic field that comes out through the recording medium. A recording head unit that records information at an arbitrary position on the recording medium using a magnetic circuit formed by the main magnetic pole unit, the recording medium, and the auxiliary magnetic pole unit, and the recording medium In a thin film magnetic head having a reproducing head portion for reproducing information recorded at an arbitrary position, magnetic shield portions higher than the thickness of the main magnetic pole portion are provided on both sides of the side wall of the main magnetic pole portion. Composed.

  Preferably, in one aspect of the present invention, the height of the magnetic shield part is 10 to 30% larger than the film thickness of the main magnetic pole part.

  Further preferably, in one embodiment of the present invention, the recording medium is composed of a recording layer on which information is recorded and a soft magnetic lower layer (that is, a backing layer) formed below the recording layer. The magnetic shield part which is a two-layer medium and is provided on both sides of the side wall of the main magnetic pole part is 1 to 1 of the distance from the head flying surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. It is arranged at a position three times away.

  Still preferably, in one aspect of the present invention, the magnetic shield part on the trailing edge side of the main magnetic pole part located on the downstream side in the rotation direction of the storage medium is upstream in the rotation direction of the storage medium. It is formed thicker than the magnetic shield part on the leading edge side of the main magnetic pole part located at the position.

  On the other hand, another aspect of the present invention includes a main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field that comes out through the recording medium, A recording head unit that records information at an arbitrary position on the recording medium using a magnetic circuit formed by the main magnetic pole unit, the recording medium, and the auxiliary magnetic pole unit; and an arbitrary position on the recording medium In a thin film magnetic head having a reproducing head for reproducing recorded information, magnetic shield portions higher than the thickness of the main magnetic pole portion are provided on both sides of the side wall of the main magnetic pole portion, and the storage medium is rotated. An auxiliary magnetic shield portion is provided along the upper surface on the trailing edge side of the main magnetic pole portion located downstream in the direction.

  Preferably, in another aspect of the present invention, the recording medium is a perpendicular two-layer medium comprising a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, Each of the magnetic shields provided on both sides of the side wall of the magnetic pole portion is disposed at an interval corresponding to 1 to 3 times the distance from the air bearing surface of the thin film magnetic head to the soft magnetic lower layer in the vertical two-layer medium. Is done.

  Still preferably, in another aspect of the present invention, the magnetic shield part on the trailing edge side of the main magnetic pole part located downstream in the rotation direction of the storage medium is upstream in the rotation direction of the storage medium. It is formed thicker than the magnetic shield part on the leading edge side of the main magnetic pole part located at the position.

  On the other hand, the present invention is formed by a main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field coming out through the recording medium. In the thin film magnetic head having a recording head portion for recording information at an arbitrary position on the recording medium using a magnetic circuit, the step of forming the main magnetic pole portion so as to have a predetermined shape, and the main magnetic pole portion And a step of forming a magnetic shield part higher than the film thickness of the main magnetic pole part on both sides of the side wall of the thin film magnetic head.

  Preferably, in the method of manufacturing a thin film magnetic head according to the invention, an insulating film is formed in a gap between the main magnetic pole part and the magnetic shield part by any one of ion beam deposition and chemical vapor deposition. Further included.

  Further preferably, in the method of manufacturing a thin film magnetic head according to the present invention, the main magnetic pole portion of the main magnetic pole portion is not caused to be displaced on the side wall of the main magnetic pole portion by any one of sputtering or plating (plating). The magnetic shield part is formed uniformly along the shape.

  In summary, according to the present invention, in the thin film magnetic head of the perpendicular magnetic recording system, the end portions of the tracks on the recording medium are formed by forming magnetic shield portions higher than the thickness of the main pole portion on both sides of the side wall of the main pole portion. Track edge noise is not mixed in the reproduction signal, the SN ratio of the reproduction signal is improved, and the distribution of the recording magnetic field strength on the trailing edge side where the magnetization reversal of the magnetization pattern is determined can be made more linear. In addition, the distribution of the recording magnetic field intensity in the track width direction on the recording medium can be made steeper.

  Furthermore, in the present invention, when the recording medium is a perpendicular two-layer medium composed of a recording layer and a soft magnetic lower layer (that is, a backing layer), the soft magnetism in the perpendicular two-layer medium from the head flying surface of the thin film magnetic head. By arranging the magnetic shield part at a position 1 to 3 times the distance to the lower layer, the distribution of the recording magnetic field strength on the trailing edge side is almost linear without reducing the recording magnetic field strength on the recording medium. And the distribution of the recording magnetic field strength in the track width direction on the recording medium can be made steeper.

  By using the thin film magnetic head having the above-described configuration, the degree of curvature of the reversal shape of the magnetization pattern can be reduced, and the linear recording density and the track density of the recording medium can be improved. Is possible. By mounting the thin film magnetic head having the above-described configuration on a magnetic recording apparatus such as a magnetic disk apparatus, it is possible to provide a magnetic recording apparatus having an improved magnetic recording density as compared with the prior art.

  The configuration of a preferred embodiment of the present invention will be described below with reference to the accompanying drawings (FIGS. 4 to 20).

  FIG. 4 is a plan view showing a schematic configuration of a disk apparatus including the thin film magnetic head of the present invention. Hereinafter, the same components as those described above are denoted by the same reference numerals.

  The disk device 20 shown in FIG. 4 roughly includes a disk enclosure 25 for housing the disk 32, the thin film magnetic head 10, the spindle motor 34, the voice coil motor 40, and the like in the disk device, and the thin film magnetic head 10. And a control unit (not shown) for controlling a data write operation and a data read operation with respect to the disk 32. In the disk enclosure 25, a rotating disk 32 such as a single hard disk or a plurality of hard disks that are rotationally driven by a spindle motor 34 coupled to a spindle 33 is coaxially provided. The operation of the spindle motor 34 is controlled by a servo controller (not shown) of the control unit. A plurality of tracks (or a plurality of cylinders) are formed on the magnetic recording surface of the recording layer on the front surface (or back surface) of the disk 32, and a data pattern corresponding to predetermined data in a sector at an arbitrary position on the track. (Magnetization pattern) is written.

  Here, “cylinder” refers to an assembly of a plurality of tracks in the vertical direction that can be simultaneously accessed by a plurality of thin film magnetic heads on each disk when a plurality of disks are stacked and arranged. (Ie, a plurality of cylinder-shaped tracks).

  More specifically, as shown in FIG. 4, the thin film magnetic head 10 has an arbitrary magnetic recording surface of the disk 32 by a perpendicular magnetic recording system as typified by examples shown in FIGS. A recording head unit for recording data at a position (for data writing operation) and data recorded at an arbitrary position on the magnetic recording surface of the disk 32 as a magnetic signal (for data reading operation) ) A structure in which the magnetoresistive effect reproducing head portion is integrated.

  Further, as shown in FIG. 4 again, the thin film magnetic head 10 is mounted on the tip of an arm 41 for supporting the head. The arm 41 is driven by a voice coil motor 40 controlled by a servo controller so as to reciprocate between the position of the inner peripheral portion (inner side) and the outer peripheral portion (outer side) of the disk 32. . As a result, it becomes possible to access the sectors of all data areas where data is written on the magnetic recording surface of the disk 32. Here, a pivot bearing 50 is attached to the central portion of the voice coil motor 40 so that the arm 41 can smoothly reciprocate.

  For example, when the arm 41 is rotated in the direction of arrow B by the voice coil motor 40, the thin film magnetic head 10 is moved in the radial direction of the disk 32, and a desired track can be scanned. The components including the voice coil motor 40 and the arm 41 are also called a head actuator. Further, a flexible printed circuit board (usually abbreviated as FPC (Flexible Printed Circuit)) 51 is attached to the head actuator, and the voice coil motor 40 and the thin film magnetic head 10 are passed through the flexible printed circuit board 51. Servo signals for controlling the operation are supplied.

  A ramp mechanism 42 is disposed on the outer periphery of the disk 32 and engages with the tip of the arm 41 to hold the thin film magnetic head 10 away from the disk 32.

  FIG. 5 is a sectional view showing a schematic configuration of the thin film magnetic head according to the first embodiment of the present invention. FIG. 5A shows a cross-sectional view perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIG. 5B shows a substrate (illustrated) constituting the base of the thin film magnetic head. A sectional view in a direction perpendicular to the substrate surface (not shown) is shown.

  However, in the thin film magnetic head 10 according to the embodiment of FIG. 5, the reproducing head portion excluding the recording head portion 11 has the same structure as the reproducing head portion 12 of the conventional thin film magnetic head as shown in FIG. Therefore, the reproducing head portion is not shown in FIG. Furthermore, the re-explanation of the reproducing head unit is omitted here.

  In the thin film magnetic head 10 of FIG. 5, the recording head unit 11 includes a single main magnetic pole unit 1 for applying a magnetic field in a direction perpendicular to the recording medium surface of the recording medium, and a recording layer on the recording medium (see FIG. 1). And an auxiliary magnetic pole portion 2 that absorbs the magnetic field that is exposed to the outside, and a connection portion 4 made of a magnetic material for magnetically connecting the main magnetic pole portion 1 and the auxiliary magnetic pole portion 2. Further, in the recording head portion 11 of FIG. 5, the yoke portion 6 made of a magnetic material for converging the magnetic field from the thin film coil 5 and supplying it efficiently to the main magnetic pole portion 1 includes the main magnetic pole portion 1 and the connection portion 4. Is formed between. Usually, the main magnetic pole part 1, the auxiliary magnetic pole part 2, the connection part 4, the thin film coil 5, the yoke part 6 and the connection part 4 in the recording head part 11 are covered with a gap layer (nonmagnetic insulating layer). . In the recording head part 11 of FIG. 5, the description of the recording head part shield layer (see FIG. 2) for suppressing the entry of stray magnetic fields from the outside is omitted.

  Further, in the thin film magnetic head 10 of FIG. 5, the recording head portion 11 is provided with magnetic shield portions 7 made of a magnetic shield layer higher than the thickness of the main magnetic pole portion 1 on both sides of the side wall of the main magnetic pole portion 1. The magnetic shield part 7 made of this magnetic shield layer is made of a soft magnetic material such as permalloy containing elements of iron and nickel. With this magnetic shield part 7, the distribution of the recording magnetic field intensity on the trailing edge side where the magnetization reversal of the magnetization pattern is determined can be made more linear, and the distribution of the recording magnetic field intensity in the track width direction on the recording medium. Can be made steeper.

  More specifically, in the thin film magnetic head 10 of FIG. 5, a nonmagnetic insulating layer such as alumina is formed on the upper shield layer (see FIG. 2) of the reproducing head portion (see FIG. 2). On the magnetic insulating layer, the auxiliary magnetic pole portion 2 that is the first magnetic layer of the recording head portion 11 is formed. The auxiliary magnetic pole portion 2 is made of a soft magnetic material such as permalloy containing iron and nickel elements. Further, a nonmagnetic insulating layer 8-1 such as alumina formed at a position where the thin film coil 5 is to be formed on the auxiliary magnetic pole portion 2, and a thin film coil formed on the nonmagnetic insulating layer 8-1. A nonmagnetic insulating layer 8-2 filled between the five windings is disposed. The nonmagnetic insulating layer 8-2 filled between the windings of the thin film coil 5 is made of a nonconductive and nonmagnetic material having fluidity when formed, such as a photoresist (photosensitive resin).

In the thin film magnetic head 10 of FIG. 5, a connecting portion 4 made of a magnetic material such as permalloy is formed on the auxiliary magnetic pole portion 2 at a position away from the medium facing surface, and the thin film coil 5 is wound around the periphery. It has been turned. Thereafter, a nonmagnetic insulating layer 8 made of a nonmagnetic and nonconductive material having excellent corrosion resistance, rigidity, and insulation, such as alumina and silicon oxide (SiO ₂ ), is placed on the uneven portion, and chemically Flattening is performed using a mechanical polishing method (also referred to as CMP (Chemical and Mechanical Polishing Method)). The nonmagnetic insulating layers 8-1 and 8-2 filled between the windings of the thin film coil 5 and the nonmagnetic insulating layer 8 covered after the connection portion is formed are collectively referred to as a gap layer. The gap layer has a thickness of 2 to 6 μm.

  The thin-film magnetic head 10 of FIG. 5 further includes a non-magnetic insulating layer 8 that has been flattened from the medium facing surface to at least the connecting portion 4 and a second magnetic layer made of a magnetic material formed on the connecting portion 4. And have. As shown in FIGS. 5A and 5B, the second magnetic layer is composed of a main magnetic pole portion 1 including a main magnetic pole layer and a yoke portion 6 including a yoke partial layer. .

  Further, the magnetic shield portions 7 are arranged on both sides of the side wall of the main magnetic pole portion 1 as viewed from the medium facing surface along the shape of the side wall of the main magnetic pole portion 1 at uniformly spaced positions. Yes. The position of the magnetic shield portion 7 has a correlation with the distance from the medium facing surface to the backing layer (see FIG. 2) of a recording medium such as a disk (vertical two-layer medium). Regarding the position of the magnetic shield part 7 provided on both sides of the side wall of the main magnetic pole part 1 with respect to the medium facing surface (head air bearing surface), it is avoided that the strength of the magnetic field supplied from the main magnetic pole part 1 to the recording medium is reduced. Therefore, it is desirable to arrange the magnetic shield part 7 at a position that is 1 to 3 times the distance from the medium facing surface to the backing layer in the recording medium.

  The height of the magnetic shield portion 7 is preferably higher than the film thickness of the main magnetic pole portion 1, that is, the pole length. For example, as shown in FIG. 5, the height is preferably about 10 to 30% thicker than the pole length. Preferably, the magnetic shield part on the trailing edge side of the main magnetic pole part 1 is formed thicker than the magnetic shield part on the leading edge side of the main magnetic pole part 1.

  The thin film magnetic head 10 of FIG. 5 further includes a protective layer made of a non-conductive and non-magnetic material such as alumina and covering the second magnetic layer. Preferably, the protective layer is made of the same material as the nonmagnetic insulating layer 8. Furthermore, the protective layer has a recording head portion shield layer (see FIG. 2) made of a magnetic material such as permalloy so as not to be affected by a stray magnetic field from the outside of the thin film magnetic head 10. Inserted at ~ 3 μm.

  Here, the main magnetic pole portion 1 is made of a recording magnetic material having a high saturation magnetic flux density such as FeCo (iron cobalt) or FeCoNi (iron cobalt / nickel), and has a thickness of 100 to 300 nm (nanometer). As the magnetic material of the magnetic shield part 7 disposed on both sides of the side wall of the main magnetic pole part 1, a magnetic material having a high magnetic permeability such as permalloy containing elements of iron and nickel is desirable. As the magnetic material of the yoke portion 6 forming the yoke portion layer, a magnetic material such as permalloy containing elements of iron and nickel can be used. The thickness of the yoke portion layer is, for example, 1 to 3 μm.

  According to the embodiment of FIG. 5, a linear recording magnetic field strength distribution can be obtained with respect to the perpendicular component of the recording magnetic field from the main magnetic pole portion as compared with the case without the magnetic shield portion. The conventional perpendicular magnetic recording method without a magnetic shield part shows a concentric magnetic field intensity distribution centered on the main magnetic pole part, and the magnetic field intensity distribution on the trailing edge side is particularly curved, and is written on the recording medium. The reversed shape of the magnetized pattern is also curved.

  On the other hand, as shown in the embodiment of FIG. 5, by providing magnetic shield portions higher than the pole length at appropriate positions on both sides of the side wall of the main magnetic pole portion, recording supplied from the main magnetic pole portion to the recording medium is performed. Only the leakage magnetic field can be suppressed without reducing the strength of the magnetic field. At the same time, the recording magnetic field intensity distribution on the trailing edge side can be made more linear, and the degree of curvature of the inverted shape of the magnetization pattern can be reduced. As a result, the curved state of the bit pattern recorded on the recording medium is improved, and it can be brought close to an ideal magnetization pattern. On the other hand, the recording magnetic field strength in the width direction of the track on the recording medium also becomes steep due to the gap between the magnetic shield portions arranged on both sides of the side wall of the main magnetic pole part. As a result, the linear recording density and the track density of the recording medium Both can be improved.

  FIG. 6 is a sectional view showing a schematic configuration of a thin film magnetic head according to a second embodiment of the present invention. 6A shows a cross-sectional view in a direction perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIG. 6B shows the substrate of the substrate constituting the base of the thin film magnetic head. A sectional view in a direction perpendicular to the plane is shown.

  However, in the thin film magnetic head 10 according to the embodiment of FIG. 6, the reproducing head portion excluding the recording head portion 11 has the same structure as the reproducing head portion 12 of the conventional thin film magnetic head as shown in FIG. Therefore, the reproducing head portion is not shown in FIG. Furthermore, the re-explanation of the reproducing head unit is omitted here.

  The configuration of the recording head unit 11 according to the second embodiment of FIG. 6 is substantially the same as the configuration of the recording head unit according to the first embodiment of FIG. However, in the first embodiment of FIG. 5, the magnetic shield portions are arranged only on both sides of the side wall of the main magnetic pole portion, whereas in the second embodiment of FIG. In addition to the magnetic shield portions 7 disposed on both sides of the side wall of the substrate, an auxiliary magnetic shield portion (here, the main magnetic pole upper shield layer 71 in FIG. 6) is disposed along the upper surface on the trailing edge side. Is different. Accordingly, here, only the description of the structure in which the magnetic shield part and the auxiliary magnetic shield part are arranged will be given, and the description of the other components will be omitted.

  In the recording head portion 11 according to the embodiment of FIG. 6, the shape of the side wall of the main magnetic pole portion 1 is formed on both sides of the side wall of the main magnetic pole portion 1 as viewed from the medium facing surface, similarly to the recording head portion of FIG. A magnetic shield part 7 made of a magnetic shield layer is disposed at a uniform distance along the line. The magnetic shield part 7 made of this magnetic shield layer is made of a soft magnetic material such as permalloy containing elements of iron and nickel.

  The position of the magnetic shield part 7 has a correlation with the distance from the medium facing surface to the backing layer (see FIG. 2) of a recording medium such as a disk. With respect to the position of the magnetic shield part 7 with respect to the medium facing surface (head air bearing surface), in order to avoid a reduction in the strength of the magnetic field supplied from the main magnetic pole part 1 to the recording medium, the medium facing surface is moved into the recording medium. It is desirable to arrange the magnetic shield part 7 at a position 1 to 3 times as far as the distance to the backing layer.

  The height of the magnetic shield portion 7 is preferably higher than the film thickness of the main magnetic pole portion 1, that is, the pole length, as in the embodiment of FIG. 5 described above. For example, as shown in FIG. A thickness of about 30% is desirable. Preferably, the magnetic shield part on the trailing edge side of the main magnetic pole part 1 is formed thicker than the magnetic shield part on the leading edge side of the main magnetic pole part 1.

  Further, in the recording head unit 11 according to the embodiment of FIG. 6, the main magnetic pole upper shield layer 71 is disposed along the upper surface on the trailing edge side. The main magnetic pole upper shield layer 71 functions as an auxiliary magnetic shield part for the magnetic shield part 7. By disposing the main magnetic pole upper shield layer 71 on the upper surface on the trailing edge side, the magnetic field intensity distribution on the trailing edge side can be made more linear, and the magnetic recording can be performed more than in the embodiment of FIG. A high-density magnetic disk drive can be obtained.

  Regarding the position of the main magnetic pole upper shield layer 71 from the medium facing surface (head floating surface), as in the case of the magnetic shield portion 7 described above, the distance from the medium facing surface to the backing layer in the recording medium is 1 to 1. It is desirable to dispose the main magnetic pole upper shield layer 71 at a position three times away. The main magnetic pole upper shield layer 71 may have a width equal to or larger than the width of the main magnetic pole portion 1 on the trailing edge side.

  According to the embodiment of FIG. 6, the magnetic shield part higher than the pole length is disposed at appropriate positions on both sides of the side wall of the main magnetic pole part, and the main magnetic pole upper shield layer (auxiliary auxiliary line is formed along the upper surface on the trailing edge side. By disposing the magnetic shield part), it is possible to suppress only the leakage magnetic field without reducing the strength of the recording magnetic field supplied from the main magnetic pole part to the recording medium. At the same time, the recording magnetic field strength distribution on the trailing edge side can be further linearized, and the degree of curvature of the inverted shape of the magnetization pattern can be further reduced.

  FIG. 7 is a sectional view showing a schematic configuration of a thin film magnetic head according to a third embodiment of the present invention. FIG. 7A shows a cross-sectional view in a direction perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIG. 7B shows the substrate constituting the base of the thin film magnetic head. A sectional view in a direction perpendicular to the plane is shown.

  However, in the thin film magnetic head 10 according to the embodiment of FIG. 7, the reproducing head portion excluding the recording head portion 11 has the same structure as the reproducing head portion 12 of the conventional thin film magnetic head as shown in FIG. Therefore, the reproducing head portion is not shown in FIG. Furthermore, the re-explanation of the reproducing head unit is omitted here.

  The configuration of the recording head unit 11 according to the third embodiment of FIG. 7 is substantially the same as the configuration of the recording head unit according to the second embodiment of FIG. However, the second embodiment shown in FIG. 6 has a structure in which the magnetic shield portions 7 are arranged on both sides of the side wall of the main magnetic pole portion 1 and the auxiliary magnetic shield portions are arranged along the upper surface on the trailing edge side. On the other hand, in the third embodiment of FIG. 7, the magnetic shield parts 7 arranged on both sides of the side wall of the main magnetic pole part 1 and the auxiliary magnetic shield parts arranged along the upper surface on the trailing edge side (here The difference lies in that the main magnetic pole upper shield layer 72) of FIG. 7 is completely magnetically connected. Accordingly, here, only the description of the structure in which the magnetic shield part and the auxiliary magnetic shield part are arranged will be given, and the description of the other components will be omitted.

  In the recording head portion 11 according to the embodiment of FIG. 7, the shape of the side wall of the main magnetic pole portion 1 is formed on both sides of the side wall of the main magnetic pole portion 1 as viewed from the medium facing surface, similarly to the recording head portion of FIG. A magnetic shield part 7 made of a magnetic shield layer is disposed at a uniform distance along the line. The magnetic shield part 7 made of this magnetic shield layer is made of a soft magnetic material such as permalloy containing elements of iron and nickel.

  The position of the magnetic shield part 7 has a correlation with the distance from the medium facing surface to the backing layer (see FIG. 2) of a recording medium such as a disk. With respect to the position of the magnetic shield part 7 with respect to the medium facing surface (head air bearing surface), in order to avoid a reduction in the strength of the magnetic field supplied from the main magnetic pole part 1 to the recording medium, the medium facing surface is moved into the recording medium. It is desirable to arrange the magnetic shield part 7 at a position 1 to 3 times as far as the distance to the backing layer.

  The height of the magnetic shield portion 7 is preferably higher than the film thickness of the main magnetic pole portion 1, that is, the pole length, as in the above-described embodiment of FIG. 6, for example, as shown in FIG. A thickness of about 30% is desirable. Preferably, the magnetic shield part on the trailing edge side of the main magnetic pole part 1 is formed thicker than the magnetic shield part on the leading edge side of the main magnetic pole part 1.

  Further, in the recording head unit 11 according to the embodiment of FIG. 7, the main magnetic pole upper shield layer 72 is disposed along the upper surface on the trailing edge side. The main magnetic pole upper shield layer 72 functions as an auxiliary magnetic shield part for the magnetic shield part 7. Here, the main magnetic pole upper shield layer 72 has a width larger than the width of the main magnetic pole portion 1 on the trailing edge side, and is magnetically connected to the magnetic shield portion 7. In other words, when viewed from the medium facing surface, the main magnetic pole portion 1 is surrounded by the magnetic shield portion and the auxiliary magnetic shield portion. With such a structure, the magnetic field intensity distribution on the trailing edge side can be made more linear, and a magnetic disk device having a higher magnetic recording density than that of the embodiment of FIG. 6 can be obtained.

  According to the embodiment of FIG. 7, magnetic shield portions higher than the pole length are arranged at appropriate positions on both sides of the side wall of the main magnetic pole portion, and are completely connected to the magnetic shield portion along the upper surface on the trailing edge side. By arranging the main magnetic pole upper shield layer (auxiliary magnetic shield part) as described above, it is possible to suppress only the leakage magnetic field without reducing the strength of the recording magnetic field supplied from the main magnetic pole part to the recording medium. At the same time, the recording magnetic field intensity distribution on the trailing edge side can be further linearized, and the degree of curvature of the inverted shape of the magnetization pattern can be significantly reduced.

  FIG. 8 is a diagram showing an example of the recording magnetic field strength distribution when there is no magnetic shield portion, and FIG. 9 is a diagram showing an example of the recording density magnetic field strength distribution when the magnetic shield portion is provided.

  As is clear from FIG. 8, in the conventional perpendicular magnetic recording system in which there are no magnetic shield portions on both sides of the side wall of the main magnetic pole portion 1, contour lines of concentric magnetic field strength distribution (RM) are obtained with the main magnetic pole portion 1 as the center. It is done. In this contour line, the distribution of the magnetic field strength on the trailing edge side is curved, and the inverted shape of the magnetization pattern written on the recording medium is also curved (see, for example, FIG. 3A). .

  In contrast, in the thin film magnetic head according to the embodiment of the present invention (FIGS. 5 to 7), the film thickness T of the main magnetic pole part 1 is higher (height) at appropriate positions on both sides of the side wall of the main magnetic pole part 1. H) The magnetic shield part 7 is arranged. As is apparent from FIG. 9, the contour line of the recording magnetic field intensity distribution (RM) on the trailing edge side located downstream in the rotation direction of the recording medium can be made more linear, and the magnetization The degree of curvature of the inverted shape of the pattern can be reduced (for example, see FIG. 3B).

  Therefore, for example, in the embodiment of FIG. 5, a linear recording magnetic field strength distribution can be obtained with respect to the perpendicular component of the recording magnetic field from the main magnetic pole portion as compared with the case without the magnetic shield portion. As a result, the curved state of the bit pattern recorded on the recording medium is improved, and the bit pattern can be brought closer to an ideal magnetization pattern (see, for example, FIG. 3B).

  Further, in the embodiment shown in FIGS. 6 and 7, the magnetic shield portions are disposed at positions on both sides of the side wall of the main magnetic pole portion, and the main magnetic pole upper shield layer (auxiliary magnetic shield portion) is formed along the upper surface on the trailing edge side. Therefore, the linearity of the recording magnetic field strength distribution on the trailing edge side can be further improved, and the degree of curvature of the inverted shape of the magnetization pattern can be significantly reduced.

  FIG. 10 is a cross-sectional view for explaining a manufacturing process of the thin film magnetic head according to the embodiment of FIG. FIG. 10 illustrates a process of actually manufacturing a magnetic shield portion around the main magnetic pole portion in the thin film magnetic head described in the first embodiment of FIG. Here, a sectional view in a direction perpendicular to the substrate surface of the substrate constituting the base of the thin film magnetic head is shown.

  When producing the main magnetic pole portion of the thin film magnetic head according to the embodiment of FIG. 5, first, as shown in FIG. 10A, the main magnetic pole portion is formed on the yoke portion layer 60 forming the yoke portion 6. The main magnetic pole layer 13 is formed. More specifically, as the main magnetic pole layer 13, a magnetic material made of an FeCo magnetic material having a high saturation magnetic flux density is formed by sputtering. In order to form this magnetic material into a predetermined shape, an alumina or silicon oxide film made of a nonmagnetic material is formed as a hard mask 14 by sputtering.

  Next, as shown in FIG. 10B, etching is performed to obtain a main magnetic pole portion shape having a predetermined narrow core width (trailing edge width). As this etching, it is possible to use a focused ion beam etching or an ion beam etching technique called ion milling.

  Further, as shown in FIG. 10C, a nonmagnetic insulating film having a uniform gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70 with respect to the shape of the main magnetic pole portion formed by etching. 15 is formed. In this case, as the nonmagnetic insulating film 15, an alumina or silicon oxide film made of a nonmagnetic material is formed with a uniform thickness according to the shape of the main magnetic pole portion. As a film forming method, it is desirable to perform film forming using a method by ion beam deposition or CVD (chemical vapor phase method).

  Further, as shown in FIG. 10D, after forming the nonmagnetic insulating film 15 having a gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70, the both sides of the side wall of the main magnetic pole layer 13 are formed. Then, the magnetic shield layer 70 that plays the role of shielding the leakage magnetic field is formed by either sputtering or plating (plating). As shown in FIG. 10E, the magnetic shield layer 70 is formed thicker than the main magnetic pole layer 70, ie, the pole length, and is planarized by chemical mechanical polishing (CMP). The magnetic shield layer 70 can be disposed without causing a positional shift on the side wall of the main magnetic pole layer 13, and the thin film magnetic head according to the first embodiment of the present invention can be manufactured.

  FIG. 11 is a cross-sectional view for explaining a manufacturing process of the thin film magnetic head according to the embodiment of FIG. FIG. 11 illustrates a process of actually manufacturing a magnetic shield portion around the main magnetic pole portion in the thin film magnetic head described in the second embodiment of FIG. Here, a sectional view in a direction perpendicular to the substrate surface of the substrate constituting the base of the thin film magnetic head is shown.

  When the main magnetic pole part of the thin film magnetic head according to the embodiment of FIG. 6 is manufactured, first, as shown in FIG. 11A, the main magnetic pole part is formed on the yoke part layer 60 forming the yoke part 6. The main magnetic pole layer 13 is formed. More specifically, as the main magnetic pole layer 13, a magnetic material made of an FeCo magnetic material having a high saturation magnetic flux density is formed by sputtering. Further, an alumina or silicon oxide film made of a nonmagnetic material is formed on the main magnetic pole layer 13 as an auxiliary hard mask 16 by sputtering. Further, the main magnetic pole upper shield layer 71 on the upper surface on the trailing edge side is formed by sputtering through alumina (or silicon oxide film) made of a nonmagnetic material. Further, an alumina or silicon oxide film made of a non-magnetic material is used as a hard mask 14 for forming a magnetic material in a predetermined shape on the main magnetic pole upper shield layer 71 as in the embodiment of FIG. A film is formed by sputtering.

  Next, as in the embodiment of FIG. 10 described above, in FIG. 11B, etching is performed to obtain a main magnetic pole portion shape having a predetermined narrow core width. As this etching, it is possible to use a focused ion beam etching or an ion beam etching technique called ion milling.

  Further, as shown in FIG. 11C, a nonmagnetic insulating film having a uniform gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70 with respect to the shape of the main magnetic pole portion formed by etching. 15 is formed. In this case, as the nonmagnetic insulating film 15, an alumina or silicon oxide film made of a nonmagnetic material is formed with a uniform thickness according to the shape of the main magnetic pole portion. As a film forming method, it is desirable to perform film forming using a method by ion beam deposition or CVD (chemical vapor phase method).

  Further, as shown in FIG. 11D, after forming the nonmagnetic insulating film 15 having a gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70, the both sides of the side wall of the main magnetic pole layer 13 are formed. The magnetic shield layer 70 is formed by either sputtering or plating (plating). As shown in FIG. 11E, the magnetic shield layer 70 is formed thicker than the main magnetic pole layer 70, that is, the pole length, and is planarized by chemical mechanical polishing (CMP). The magnetic shield layer 70 can be disposed without causing a positional shift on the side wall of the main magnetic pole layer 13, and the thin film magnetic head according to the second embodiment of the present invention can be manufactured.

  According to the method of manufacturing the thin film magnetic head of FIG. 11, the width of the main pole upper shield layer 71 on the upper surface on the trailing edge side is equal to the core width of the main pole layer 13, The magnetic shield layer 70 larger than the thickness of the main magnetic pole layer 13 can be disposed at a predetermined position at the same time.

  FIG. 12 is a cross-sectional view for explaining the manufacturing process of the thin film magnetic head according to the embodiment of FIG. FIG. 12 illustrates a process of actually producing a magnetic shield part around the main magnetic pole part in the thin film magnetic head described in the third embodiment of FIG. Here, a sectional view in a direction perpendicular to the substrate surface of the substrate constituting the base of the thin film magnetic head is shown.

  When the main magnetic pole portion of the thin film magnetic head according to the embodiment of FIG. 7 is manufactured, the upper portion of the yoke portion layer 60 that forms the yoke portion 6 in FIG. The main magnetic pole layer 13 that forms the main magnetic pole portion is laminated. More specifically, as the main magnetic pole layer 13, a magnetic material made of an FeCo magnetic material having a high saturation magnetic flux density is formed by sputtering. In order to form this magnetic material into a predetermined shape, an alumina or silicon oxide film made of a nonmagnetic material is formed as a hard mask 14 by sputtering.

  Next, as shown in FIG. 12B, etching is performed to obtain a main magnetic pole portion shape having a predetermined narrow core width. As this etching, it is possible to use a focused ion beam etching or an ion beam etching technique called ion milling.

  Further, as shown in FIG. 12C, a nonmagnetic insulating film having a uniform gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70 with respect to the shape of the main magnetic pole portion formed by etching. 15 is formed. In this case, as the nonmagnetic insulating film 15, an alumina or silicon oxide film made of a nonmagnetic material is formed with a uniform thickness according to the shape of the main magnetic pole portion. As a film forming method, it is desirable to perform film forming using a method by ion beam deposition or CVD (chemical vapor phase method).

  Further, as shown in FIG. 12D, after forming the nonmagnetic insulating film 15 having a gap between the side wall of the main magnetic pole layer 13 and the magnetic shield layer 70, the both sides of the side wall of the main magnetic pole layer 13 are formed. Then, the magnetic shield layer 70 that plays the role of shielding the leakage magnetic field is formed by either sputtering or plating (plating). As shown in FIG. 12E, the magnetic shield layer 70 is formed thicker than the main magnetic pole layer 70, ie, the pole length, and is planarized by chemical mechanical polishing (CMP). The magnetic shield layer 70 can be disposed without causing a positional shift on the side wall of the main magnetic pole layer 13.

  Further, as shown in FIG. 12 (f), the main magnetic pole upper shield layer 72 larger than the core width of the main magnetic pole layer 70 is formed on the upper surface on the trailing edge side, so that the third embodiment of the present invention is achieved. Such a thin film magnetic head can be manufactured. In this case, the main magnetic pole layer 13 is surrounded by the magnetic shield portions (the magnetic shield layer 70 and the main magnetic pole upper shield layer 72) as viewed from the medium facing surface.

  FIG. 13 is a cross-sectional view showing the state of film adhesion when a physical film formation method is used, and FIG. 14 shows the state of film adhesion when a chemical film formation method is used. It is sectional drawing shown. 13 and 14 show the difference in shape due to the difference in the method of forming the nonmagnetic insulating film 15 as shown in FIGS.

  As shown in FIG. 13A, when the nonmagnetic insulating film 15 is formed using a physical sputtering technique, the direction of the sputtered particles P is strong, and thus there are uneven patterns. Then, the probability of sputtered particles entering the concave portion is reduced. Therefore, a difference in sputtered particle deposition occurs between the flat portion and the edge portion, and unevenness in the thickness of the attached film occurs as shown in FIG. In particular, it becomes difficult for sputtered particles to be deposited on the side wall of the pattern when the edge stands sharply. As a result, when a thin film is formed by sputtering, a difference in film thickness due to a pattern step and shape occurs.

  On the other hand, as shown in FIG. 14A, when a chemical method such as CVD (chemical vapor deposition) is used, the mean free process of the reactive species (particles P) is large and isotropic. Even when the pattern has irregularities due to diffusion, the reactive species are uniformly deposited on the substrate. As a result, when a chemical method is used, it becomes possible to form a film with a uniform film thickness along the pattern shape as shown in FIG.

  FIG. 15 is a sectional view showing a schematic configuration of a thin film magnetic head according to the fourth embodiment of the present invention. FIG. 15A shows a cross-sectional view perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIG. 15B shows a substrate (illustrated) constituting the base of the thin film magnetic head. A sectional view in a direction perpendicular to the substrate surface (not shown) is shown.

  However, in the thin film magnetic head 10a according to the embodiment of FIG. 15, the reproducing head portion excluding the recording head portion 11a has the same structure as the reproducing head portion 12 of the conventional thin film magnetic head as shown in FIG. Therefore, the reproducing head portion is not shown in FIG. Furthermore, the re-explanation of the reproducing head unit is omitted here.

  In the thin film magnetic head 10a of FIG. 15, the recording head portion 11a includes a single main magnetic pole portion 1a for applying a magnetic field in a direction perpendicular to the recording medium surface of the recording medium, as in the embodiment of FIG. The auxiliary magnetic pole portion 2a that absorbs the magnetic field coming out through the recording layer (see FIG. 1) on the recording medium, and the connection made of a magnetic material for magnetically connecting the main magnetic pole portion 1a and the auxiliary magnetic pole portion 2a Part 6a, 6b.

  However, in the recording head portion 11a of FIG. 15, the auxiliary magnetic pole portion 2a is arranged at the position of the recording head portion shield layer (see FIG. 2) above the main magnetic pole portion 1, unlike the embodiment of FIG. Yes. Therefore, the auxiliary magnetic pole layer 2a also has a function of suppressing the intrusion of a stray magnetic field from the outside, and the above-described recording head portion shield layer becomes unnecessary. Further, in the recording head portion 11a of FIG. 15, a side shield portion 9 made of a magnetic material such as permalloy containing elements of iron and nickel is disposed along the side of the main magnetic pole portion 1a. The side shield portion 9 prevents the magnetic flux passing through the main magnetic pole portion 1a from leaking outside the main magnetic pole portion 1a.

  More specifically, in the thin film magnetic head 10 of FIG. 15, a nonmagnetic insulating layer (not shown) such as alumina is formed on the upper shield layer (see FIG. 2) of the reproducing head portion (see FIG. 2). A side shield portion 9 made of a magnetic material such as permalloy containing iron and nickel elements and a nonmagnetic insulating layer 8a for protecting the main magnetic pole portion 1a are formed on the nonmagnetic insulating layer. Has been. Further, the main magnetic pole portion 1 a is laminated on the side shield portion 9.

  Further, a nonmagnetic insulating layer 8-1a such as alumina formed at a position where the thin film coil 5a is to be formed on the main magnetic pole portion 1a, and a connecting portion made of a magnetic material such as permalloy containing elements of iron and nickel 6a and 6b are laminated. Further, a nonmagnetic insulating layer 8-2a filled between the windings of the thin film coil 5a formed on the nonmagnetic insulating layer 8-1a is disposed. The nonmagnetic insulating layer 8-2a filled between the windings of the thin film coil 5a is made of a nonconductive and nonmagnetic material having fluidity when formed, such as a photoresist. Further, the auxiliary magnetic pole portion 2a is laminated on the nonmagnetic insulating layer 8-2a. The auxiliary magnetic pole portion 2a is made of a soft magnetic material such as permalloy containing iron and nickel elements.

  Further, the recording head part 11a of FIG. 15 is provided with a trailing shield part 7a made of a magnetic shield layer higher than the thickness of the main magnetic pole part 1a on both sides of the side wall of the main magnetic pole part 1a. The trailing shield portion 7a made of this magnetic shield layer is made of a soft magnetic material such as permalloy containing elements of iron and nickel. With this trailing shield portion 7a, the distribution of the recording magnetic field intensity on the trailing edge side where the magnetization reversal of the magnetization pattern is determined can be made more linear, and the recording magnetic field intensity in the width direction of the track on the recording medium can be made. The distribution can be made steeper. Further, in the recording head portion 11a of FIG. 15, by providing the connecting portions 6a and 6b and the side shield portion 9, a magnetic circuit can be formed in a more complete form than in the case of the above-described embodiment of FIG. As a result, only the leakage magnetic field can be suppressed without substantially reducing the strength of the recording magnetic field supplied from the main magnetic pole portion 1a to the recording medium.

  Further, the trailing shield portions 7a are arranged on both sides of the side wall of the main magnetic pole portion 1a as viewed from the medium facing surface along the shape of the side wall of the main magnetic pole portion 1a at uniformly spaced positions. ing. The position of the trailing shield portion 7a has a correlation with the distance from the medium facing surface to the backing layer (see FIG. 2) of a recording medium such as a disk. With regard to the position of the trailing shield part 7a provided on both sides of the side wall of the main magnetic pole part 1a with respect to the medium facing surface (head floating surface), the strength of the magnetic field supplied from the main magnetic pole part 1a to the recording medium is reduced. In order to avoid this, it is desirable to arrange the trailing shield portion 7a at a position 1 to 3 times the distance from the medium facing surface to the backing layer in the recording medium.

  The height of the trailing shield part 7a is preferably higher than the film thickness of the main magnetic pole part 1a, that is, the pole length. For example, the height is preferably about 10 to 30% thicker than the pole length.

  Further, by forming a trailing shield portion 7a larger than the core width of the main magnetic pole portion 1a on the upper surface on the trailing edge side, the three sides of the main magnetic pole portion 1a are surrounded by the trailing shield portion when viewed from the medium facing surface. It has a structured structure.

  Here, the main magnetic pole portion 1a is made of a recording magnetic material having a high saturation magnetic flux density such as FeCo (iron cobalt) or FeCoNi (iron cobalt / nickel), and has a thickness of 100 to 300 nm. As the magnetic material of the trailing shield portion 7a disposed on both sides of the side wall of the main magnetic pole portion 1a, a magnetic material having a high magnetic permeability such as permalloy containing iron and nickel elements is desirable. As the magnetic material of the yoke portions 6a and 6b, a magnetic material such as permalloy containing elements of iron and nickel can be used, and the thickness of the yoke portion is, for example, 1 to 3 μm.

  According to the embodiment of FIG. 15, by arranging magnetic shield portions higher than the pole length at appropriate positions on both sides of the side wall of the main magnetic pole portion, the intensity of the recording magnetic field supplied from the main magnetic pole portion to the recording medium can be increased. Without lowering, the recording magnetic field intensity distribution on the trailing edge side can be made more linear, and the degree of curvature of the inverted shape of the magnetization pattern can be reduced. Further, by arranging the auxiliary magnetic pole portion at a position having a function of suppressing the entry of the stray magnetic field from the outside, it is possible to reduce the components of the thin film magnetic head.

  FIG. 16 is a cross-sectional view (No. 1) for explaining the manufacturing process of the thin film magnetic head according to the embodiment of FIG. 15, and FIG. 17 is for explaining the manufacturing process of the thin film magnetic head according to the embodiment of FIG. FIG. 18 is a cross-sectional view for explaining a manufacturing process of the thin film magnetic head according to the embodiment of FIG. 15 (No. 3), and FIG. 19 is a thin film magnetic according to the embodiment of FIG. FIG. 20 is a cross-sectional view (No. 4) for explaining the head manufacturing process, and FIG. 20 is a cross-sectional view (No. 5) for explaining the thin-film magnetic head manufacturing process according to the embodiment of FIG.

  FIGS. 16A to 20A are cross-sectional views in the direction perpendicular to the medium facing surface (head air bearing surface) of the recording medium, and FIGS. ) Shows a cross-sectional view in a direction perpendicular to the substrate surface of a substrate (not shown) constituting the base of the thin film magnetic head. A manufacturing process of the recording head portion 11a according to the embodiment of FIG. 15 will be described below.

  First, as shown in FIG. 16, a nonmagnetic insulating layer such as alumina is formed on the upper shield layer (see FIG. 2) of the reproducing head portion (see FIG. 2). A side shield part 9 and a nonmagnetic insulating layer 8a for protecting the main magnetic pole part 1a are formed thereon. Further, the main magnetic pole portion 1 a is formed on the side shield portion 9.

  Second, as shown in FIG. 17, the trailing shield portions are uniformly spaced along the shape of the side wall of the main pole portion 1a on both sides of the side wall of the main pole portion 1a as viewed from the medium facing surface. 7a is formed. The position of the trailing shield portion 7a has a correlation with the distance from the medium facing surface to the backing layer (see FIG. 2) of a recording medium such as a disk. In order to avoid a decrease in the strength of the magnetic field supplied to the recording medium from the main magnetic pole part 1a, the trailing shield part is located at a position 1 to 3 times the distance from the medium facing surface to the backing layer in the recording medium. It is desirable to arrange 7a.

  The height of the trailing shield portion 7a is preferably higher than the film thickness of the main magnetic pole portion 1a, that is, the pole length. Furthermore, a trailing shield portion 7a larger than the core width of the main magnetic pole portion 1a is also formed on the upper surface on the trailing edge side.

  Third, as shown in FIG. 18, a nonmagnetic insulating layer 8-1a such as alumina formed on the auxiliary magnetic pole portion 2 at a position where the thin film coil 5a is to be formed, and the nonmagnetic insulating layer 8 The thin film coil 5a formed on -1a and a part of the connecting portion 6a are formed.

  Fourth, as shown in FIG. 19, the remaining portions of the connecting portions 6a and 6b are formed on the nonmagnetic insulating layer 8-1a.

  Fifth, as shown in FIG. 20, a nonmagnetic insulating layer 8-2a filled between windings of the thin film coil 5a is formed on the nonmagnetic insulating layer 8-1a. The nonmagnetic insulating layer 8-2a is made of a nonconductive and nonmagnetic material that has fluidity when formed, such as a photoresist. Finally, the auxiliary magnetic pole portion 2a is formed on the nonmagnetic insulating layer 8-2a. The auxiliary magnetic pole portion 2a is produced by sputtering a soft magnetic material such as permalloy containing iron and nickel elements, and has a function of suppressing the entry of stray magnetic fields from the outside.

(Supplementary Note 1) A main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field that comes out through the recording medium, and includes the main magnetic pole portion and the recording medium And a recording head section for recording information at an arbitrary position on the recording medium by using a magnetic circuit formed by the auxiliary magnetic pole section, and reproducing information recorded at an arbitrary position on the recording medium In a thin film magnetic head having a reproducing head portion,
A thin-film magnetic head, wherein a magnetic shield portion higher than the thickness of the main magnetic pole portion is provided on both sides of the side wall of the main magnetic pole portion.
(Additional remark 2) The said recording medium is a perpendicular | vertical double layer medium which consists of the recording layer in which the information was recorded, and the soft-magnetic lower layer formed in the lower part of this recording layer, From the said main pole part to the said recording medium 2. The thin film magnetic head according to claim 1, wherein the applied magnetic field passes through the recording layer, reaches the soft magnetic lower layer, passes through the recording layer again, and is input to the auxiliary magnetic pole portion. .

(Additional remark 3) The thin film magnetic head of Additional remark 1 or 2 characterized by the height of the said magnetic-shielding part being 10 to 30% larger than the film thickness of the said main magnetic pole part.
(Additional remark 4) The said recording medium is a perpendicular | vertical double layer medium which consists of the recording layer in which the information was recorded, and the soft-magnetic lower layer formed in the lower part of this recording layer, and it is on both sides of the side wall of the said main magnetic pole part. The provided magnetic shield portion is arranged at a position 1 to 3 times as far as the distance from the head floating surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. 2. The thin film magnetic head according to 1.
(Supplementary note 5) The thin film according to Supplementary note 1 or 2, wherein the magnetic shield part is arranged at a uniform interval with respect to the side wall of the main magnetic pole part along the shape of the side wall of the main magnetic pole part. Magnetic head.

(Supplementary Note 6) The leading portion of the main magnetic pole portion where the magnetic shield portion on the trailing edge side of the main magnetic pole portion located on the downstream side in the rotation direction of the storage medium is located on the upstream side in the rotation direction of the storage medium. The thin film magnetic head according to appendix 1 or 2, wherein the thin film magnetic head is formed to be thicker than the magnetic shield part on the edge side.
(Supplementary Note 7) A main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field that comes out through the recording medium, and includes the main magnetic pole portion and the recording medium And a recording head section for recording information at an arbitrary position on the recording medium by using a magnetic circuit formed by the auxiliary magnetic pole section, and reproducing information recorded at an arbitrary position on the recording medium In a thin film magnetic head having a reproducing head portion,
On both sides of the side wall of the main magnetic pole part, magnetic shield parts higher than the film thickness of the main magnetic pole part are provided, and on the upper surface on the trailing edge side of the main magnetic pole part located downstream in the rotation direction of the storage medium. A thin-film magnetic head, wherein an auxiliary magnetic shield is provided along the thin film magnetic head.
(Supplementary note 8) The thin film magnetic head according to supplementary note 7, wherein the auxiliary magnetic shield portion is magnetically connected to the magnetic shield portion.

  (Supplementary Note 9) The recording medium is a perpendicular two-layer medium including a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, and the recording medium is formed from the main magnetic pole portion. The thin film according to appendix 7 or 8, wherein the applied magnetic field passes through the recording layer, reaches the soft magnetic lower layer, passes through the recording layer again, and is input to the auxiliary magnetic pole portion. Magnetic head.

  (Supplementary note 10) The thin film magnetic head according to any one of Supplementary notes 7 to 9, wherein a height of the magnetic shield portion is 10 to 30% larger than a film thickness of the main magnetic pole portion.

(Additional remark 11) The said recording medium is a perpendicular | vertical double layer medium which consists of the recording layer in which the information was recorded, and the soft-magnetic lower layer formed in the lower part of this recording layer, and it is on both sides of the side wall of the said main magnetic pole part. The provided magnetic shield portion is arranged at a position 1 to 3 times as far as the distance from the head floating surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. 9. A thin film magnetic head according to 7 or 8.
(Additional remark 12) Any one of Additional remarks 7 to 9 characterized in that the magnetic shield part is arranged at a uniform interval with respect to the side wall of the main magnetic pole part along the shape of the side wall of the main magnetic pole part. The thin film magnetic head according to one item.

(Supplementary Note 13) The leading portion of the main magnetic pole portion positioned upstream of the storage medium in the rotating direction of the storage medium is a magnetic shield portion on the trailing edge side of the main magnetic pole portion positioned on the downstream side in the rotational direction of the storage medium. 10. The thin film magnetic head according to any one of appendices 7 to 9, wherein the thin film magnetic head is formed to be thicker than a magnetic shield portion on an edge side.
(Supplementary Note 14) A main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field emitted to the outside through the recording medium, and the main magnetic pole portion and the recording medium And a recording head section for recording information at an arbitrary position on the recording medium by using a magnetic circuit formed by the auxiliary magnetic pole section, and reproducing information recorded at an arbitrary position on the recording medium In a thin film magnetic head having a reproducing head portion,
The auxiliary magnetic pole portion is disposed at a position having a function of suppressing the entry of a stray magnetic field from the outside,
A thin-film magnetic head, wherein a magnetic shield portion higher than the thickness of the main magnetic pole portion is provided on both sides of the side wall of the main magnetic pole portion.

  (Supplementary Note 15) The recording medium is a perpendicular two-layer medium including a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, and the recording medium is formed from the main magnetic pole portion. 15. The thin film magnetic head according to claim 14, wherein the applied magnetic field passes through the recording layer, reaches the soft magnetic lower layer, passes through the recording layer again, and is input to the auxiliary magnetic pole portion. .

  (Supplementary note 16) The thin film magnetic head according to supplementary note 14 or 15, wherein a height of the magnetic shield portion is 10 to 30% larger than a film thickness of the main magnetic pole portion.

  (Supplementary Note 17) The recording medium is a perpendicular two-layer medium including a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, on both sides of the side wall of the main magnetic pole portion. The provided magnetic shield portion is arranged at a position 1 to 3 times as far as the distance from the head floating surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. 14. The thin film magnetic head according to 14.

  (Supplementary note 18) The thin film according to Supplementary note 14 or 15, wherein the magnetic shield part is arranged at a uniform interval with respect to the side wall of the main magnetic pole part along the shape of the side wall of the main magnetic pole part. Magnetic head.

  (Supplementary Note 19) The magnetic shield part on the trailing edge side of the main magnetic pole part located on the downstream side in the rotation direction of the storage medium is the leading of the main magnetic pole part located on the upstream side in the rotation direction of the storage medium. 16. The thin film magnetic head according to appendix 14 or 15, wherein the thin film magnetic head is formed to be thicker than the edge side magnetic shield portion.

(Supplementary Note 20) Utilizing a magnetic circuit formed by a main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field coming out through the recording medium In a thin film magnetic head having a recording head portion for recording information at an arbitrary position on the recording medium,
Forming the main magnetic pole portion to have a predetermined shape;
Forming a magnetic shield portion higher than the thickness of the main magnetic pole portion on both sides of the side wall of the main magnetic pole portion.
(Supplementary note 21) The supplementary note 20, further comprising a step of forming an insulating film in a gap between the main magnetic pole part and the magnetic shield part by any one of ion beam deposition and chemical vapor deposition. A manufacturing method of the thin film magnetic head described.
(Additional remark 22) The magnetic shield part is uniformly formed along the shape of the main magnetic pole part without causing a positional shift on the side wall of the main magnetic pole part by either sputtering or plating. The method for manufacturing a thin-film magnetic head according to appendix 20, wherein:

  The present invention relates to a thin film magnetic head having a structure in which a single magnetic pole type perpendicular magnetic recording head and a magnetoresistive effect reproducing head are integrated, and a high recording density such as a magnetic disk device incorporating the thin film magnetic head. The present invention can be applied to a magnetic recording apparatus.

It is a schematic diagram for explaining the principle of information recording by a general perpendicular magnetic recording type thin film magnetic head. It is sectional drawing which shows the structural example of the conventional thin film magnetic head. It is a magnetization pattern figure which expands and shows the magnetization pattern recorded by curving and the ideal magnetization pattern. 1 is a plan view showing a schematic configuration of a disk device including a thin film magnetic head of the present invention. 1 is a cross-sectional view showing a schematic configuration of a thin film magnetic head according to a first embodiment of the invention. It is sectional drawing which shows schematic structure of the thin film magnetic head based on the 2nd Example of this invention. It is sectional drawing which shows schematic structure of the thin film magnetic head based on the 3rd Example of this invention. It is a figure which shows an example of recording magnetic field strength distribution in case there is no magnetic shield part. It is a figure which shows an example of recording magnetic field strength distribution at the time of providing a magnetic shield part. It is sectional drawing for demonstrating the manufacturing process of the thin film magnetic head based on the Example of FIG. FIG. 7 is a cross-sectional view for explaining a manufacturing process of the thin film magnetic head according to the embodiment of FIG. 6. FIG. 8 is a cross-sectional view for explaining a manufacturing process of the thin film magnetic head according to the embodiment of FIG. 7. It is sectional drawing which shows the mode of adhesion | attachment of the film | membrane at the time of using the film-forming method of a physical effect | action. It is sectional drawing which shows the mode of adhesion | attachment of the film | membrane at the time of using the film-forming method of a chemical action. It is sectional drawing which shows schematic structure of the thin film magnetic head based on the 4th Example of this invention. FIG. 16 is a cross-sectional view (No. 1) for describing a manufacturing step of the thin film magnetic head according to the example of FIG. 15; FIG. 16 is a cross-sectional view (No. 2) for describing a manufacturing step of the thin film magnetic head according to the example of FIG. 15; FIG. 16 is a cross-sectional view (No. 3) for explaining the production process of the thin film magnetic head according to the embodiment of FIG. 15; FIG. 16 is a sectional view (No. 4) for explaining a production step of the thin film magnetic head according to the embodiment of FIG. 15; FIG. 16 is a sectional view (No. 5) for explaining a production step of the thin film magnetic head according to the embodiment of FIG. 15;

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main magnetic pole part 2 Auxiliary magnetic pole part 3 Recording medium 4 Connection part 5 Thin film coil 6 Yoke part 7 Magnetic shield part 7a Trailing shield part 8 Nonmagnetic insulating layer 9 Side shield part 10 Thin film magnetic head 11 Recording head part 12 Playback head part 13 Main magnetic pole layer 14 Hard mask 15 Nonmagnetic insulating film 16 Auxiliary hard mask 17-1 Upper shield layer 17-2 Lower shield layer 18 Magnetoresistive element (MR element)
DESCRIPTION OF SYMBOLS 19 Recording head part shield layer 20 Disk apparatus 25 Disk enclosure 32 Disk 33 Spindle 34 Spindle motor 40 Voice coil motor 60 Yoke part layer 70 Magnetic shield layer 71 Main pole upper shield layer 72 Main pole upper shield layer

Claims (10)

A main magnetic pole portion for applying a magnetic field in a direction perpendicular to the recording medium; and an auxiliary magnetic pole portion for absorbing a magnetic field coming out through the recording medium. The main magnetic pole portion, the recording medium, and the auxiliary magnetic pole portion A recording head unit for recording information at an arbitrary position on the recording medium using a magnetic circuit formed by the unit, and a reproducing head unit for reproducing information recorded at an arbitrary position on the recording medium; In a thin film magnetic head having
A thin-film magnetic head, wherein a magnetic shield portion higher than the thickness of the main magnetic pole portion is provided on both sides of the side wall of the main magnetic pole portion.   2. The thin film magnetic head according to claim 1, wherein the height of the magnetic shield part is 10 to 30% larger than the film thickness of the main magnetic pole part.   The recording medium is a perpendicular two-layer medium including a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, and the magnetic medium provided on both sides of the side wall of the main magnetic pole portion. 2. The shield portion is disposed at a position that is 1 to 3 times as far as a distance from a head flying surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. Thin film magnetic head.   The magnetic shield part on the trailing edge side of the main magnetic pole part located on the downstream side in the rotation direction of the storage medium is magnetic on the leading edge side of the main magnetic pole part located on the upstream side in the rotation direction of the storage medium. 2. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is formed thicker than the shield portion. A main magnetic pole portion for applying a magnetic field in a direction perpendicular to the recording medium; and an auxiliary magnetic pole portion for absorbing a magnetic field coming out through the recording medium. The main magnetic pole portion, the recording medium, and the auxiliary magnetic pole portion A recording head unit for recording information at an arbitrary position on the recording medium using a magnetic circuit formed by the unit, and a reproducing head unit for reproducing information recorded at an arbitrary position on the recording medium; In a thin film magnetic head having
On both sides of the side wall of the main magnetic pole part, magnetic shield parts higher than the film thickness of the main magnetic pole part are provided, and on the upper surface on the trailing edge side of the main magnetic pole part located downstream in the rotation direction of the storage medium. A thin-film magnetic head, wherein an auxiliary magnetic shield is provided along the thin film magnetic head.   The recording medium is a perpendicular two-layer medium including a recording layer on which information is recorded and a soft magnetic lower layer formed below the recording layer, and the magnetic medium provided on both sides of the side wall of the main magnetic pole portion. 6. The shield part according to claim 5, wherein the shield part is disposed at a position 1 to 3 times the distance from the head air bearing surface of the thin film magnetic head to the soft magnetic lower layer in the perpendicular two-layer medium. Thin film magnetic head.   The magnetic shield part on the trailing edge side of the main magnetic pole part located on the downstream side in the rotation direction of the storage medium is magnetic on the leading edge side of the main magnetic pole part located on the upstream side in the rotation direction of the storage medium. 6. The thin film magnetic head according to claim 5, wherein the thin film magnetic head is formed thicker than the shield portion. The recording is performed using a magnetic circuit formed by a main magnetic pole portion that applies a magnetic field in a direction perpendicular to the recording medium, the recording medium, and an auxiliary magnetic pole portion that absorbs a magnetic field coming out through the recording medium. In a thin film magnetic head having a recording head unit for recording information at an arbitrary position on a medium,
Forming the main magnetic pole portion to have a predetermined shape;
Forming a magnetic shield portion higher than the thickness of the main magnetic pole portion on both sides of the side wall of the main magnetic pole portion.   9. The thin film according to claim 8, further comprising a step of forming an insulating film in a gap between the main magnetic pole portion and the magnetic shield portion by any one of ion beam deposition and chemical vapor deposition. Manufacturing method of magnetic head.   The magnetic shield portion is uniformly formed along the shape of the main magnetic pole portion without causing a positional shift on the side wall of the main magnetic pole portion by any one of sputtering and plating methods. A method of manufacturing a thin film magnetic head according to claim 8.

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