JP2006140626A - Pixel shifting fine movement mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pixel shifting fine movement mechanism capable of being driven highly precidely with a simple configuration. <P>SOLUTION: Light from a subject is passed through an optical system 6, reflected by a reflecting mirror 1, and imaged on an imaging element 7. Denoting the optical axis connecting the reflecting mirror 1 and imaging element 7 as a Z axis, a Y-axial fine movement mechanism 5 finely and mechanically moves the reflecting mirror 1 along a Y axis perpendicular to the Z axis and an X-axial fine movement mechanism 12 finely and mechanically moves the imaging element 7 along an X axis perpendicular to the Z axis and Y axis. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pixel shift fine movement mechanism that moves a subject image formed on an image sensor relative to the image sensor by a minute amount.

  In recent years, with the rapid spread of electronic cameras using solid-state image sensors, high-definition images have been required in various fields. A large number of light receiving elements (pixels) that perform photoelectric conversion are formed on the imaging surface of the solid-state imaging element. The resolution is determined by the formation density of the light receiving elements, that is, the pitch of the arrangement of the light receiving elements. At present, the number of pixels realized by an image pickup device such as a CCD such as a CCD is several million pixels, but the demand for high resolution is increasing. In order to increase the resolution, efforts have been made to increase the density by reducing the arrangement pitch of the light receiving elements, but the manufacturing process becomes complicated and the manufacturing cost tends to increase. Therefore, there is a limit to increasing the density of the image sensor.

  Therefore, in the electronic camera, as a method for obtaining a higher resolution image while maintaining the same number of pixels as the capability of the image sensor, a pixel shifting method, which is a technique not available in a silver salt photography camera, is used. . As an example, the imaging plane of the image sensor is shifted in the horizontal direction by half the arrangement pitch of the light receiving elements, the subject images captured before and after this shift are combined, the sampling frequency in the horizontal direction is doubled, and the horizontal resolution An imaging mechanism for doubling the number has been proposed (see, for example, Patent Document 1). However, this high resolution method can improve the resolution in the horizontal direction, but cannot improve the resolution in the vertical direction.

  Therefore, a pixel shifting method that improves both the horizontal and vertical resolutions has been proposed (see, for example, Patent Document 2). This will be described with reference to FIG. A fixing portion 52 a of the vertical minute displacement plate 52 is fixed to the base 50 via a spacer 51. The fixed portion 53 a of the horizontal minute displacement plate 53 is fixed to the movable portion 52 b of the vertical minute displacement plate 52. An imaging element substrate 56 that holds the imaging element 55 is fixed to the movable portion 53 b of the horizontal minute displacement plate 53 via a bracket 54. The piezoelectric actuator 52c attached to the vertical minute displacement plate 52 minutely drives the movable part 52b in the vertical direction with respect to the fixed part 52a. The piezoelectric actuator 53c attached to the horizontal minute displacement plate 53 slightly drives the movable portion 53b in the horizontal direction with respect to the fixed portion 53a. The photographing lens system 60 is fixed to the base 50 via a lens mount 61, a front panel 62, and a pair of mounting plates 63a and 63b.

  The taking lens system 60 forms a subject image on the image pickup surface of the image pickup device 55. In this state, the piezoelectric actuators 52c and 53c slightly move the image sensor 55 in the vertical direction and the horizontal direction by half the arrangement pitch of the light receiving elements. A high-resolution image can be obtained by electronically synthesizing images captured before and after the minute movement.

  However, the mechanism for finely moving the image sensor 55 in the vertical direction and the horizontal direction requires mechanical accuracy, and thus becomes a complicated and large-sized device. Furthermore, in addition to the image sensor 55, the image sensor substrate 56, and the bracket 54, the horizontal minute displacement plate 53 is also mounted on the movable portion 52b of the vertical minute displacement plate 52, so that it is driven by the load of the piezoelectric actuator 52c. The weight of the driven object increases. Therefore, high-speed driving in the vertical direction is difficult.

  Various fine movement mechanisms that reduce the weight of the driven object have been proposed. As an example, a fine movement mechanism that is thin and lightweight will be described with reference to FIG. 11 (see, for example, Patent Document 3). For example, by cutting out a single metal plate having a thickness of about 5 mm with a wire electric discharge machine, one flat plate-shaped fixed base 110, one flat plate-shaped movable portion 111, and four The leaf spring portions 112a to 112d, the four drive spring portions 113a to 113d, the four arm portions 114a to 114d, and the four hinge portions 115a to 115d are formed. The square-shaped movable portion 111 is connected to the fixed base 110 via L-shaped leaf spring portions 112a to 112d at the four corners. In addition, the movable portion 111 is connected to the fixed base 110 via four drive spring portions 113a to 113d, four arm portions 114a to 114d, and four hinge portions 115a to 115d, respectively. The four drive spring portions 113a to 113d are linear with a narrow width, one end thereof is connected to the movable portion 111, and the other end is connected to one end of the four arm portions 114a to 114d in a substantially L shape. . The other ends of the four arm portions 114a to 114d are connected to the fixed base 110 via the four hinge portions 115a to 115d, respectively. As shown in the figure, when the X axis and the Y axis orthogonal to each other at the center of the movable portion 111 are defined, the four drive spring portions 113a to 113d are arranged along the X axis or the Y axis, and the leaf spring portion, the drive spring portion, The arm part and the hinge part are arranged substantially symmetrically with respect to the X axis and the Y axis. Piezoelectric actuators 116a and 116b are attached to an arm portion 114a extending in the X-axis direction and an arm portion 114d extending in the Y-axis direction, respectively. The piezoelectric actuators 116a and 116b displace the arm part 114a and the arm part 114d with respect to the fixed base 110 in a direction orthogonal to the longitudinal direction in the XY plane. Thus, the movable portion 111 can move in two directions of the X axis and the Y axis that are orthogonal to each other within the XY plane at the approximate center of the fixed base 110. An image sensor is mounted on the movable portion 111.

  For example, when a predetermined voltage is applied to the piezoelectric actuator 116a to be extended, the arm portion 114a causes a rotational movement (counterclockwise) with the hinge portion 115a as a fulcrum, and the drive spring portion 113a is moved in the + Y direction to be movable. The part 111 is slightly moved in the + Y direction. At this time, the two drive springs 113b and 113d on the X-axis connected to the movable part 111 are bent and deformed, but are arranged symmetrically on both sides of the movable part 111 with respect to the Y-axis. The unit 111 moves (translates) only in the + Y direction without causing rotational movement. Similarly, by applying a predetermined voltage to the piezoelectric actuator 116b, the movable portion 111 can be moved (translated) only in the + X direction without causing rotational movement.

With such a structure, the movable portion 111 arranged in the same plane as the fixed base 110 is not accompanied by rotational movement in the X-axis direction and the Y-axis direction and is orthogonal to the Z-axis (X-axis and Y-axis). The object image formed on the image sensor mounted on the movable portion 111 can be accurately moved along the arrangement direction of the light receiving elements. Become.
JP 59-13476 Japanese Patent Laid-Open No. 1-123580 JP 2003-98059 A

  However, in the fine movement mechanism of FIG. 11 described above, the leaf spring portion, the drive spring portion, the arm portion, the hinge portion, and the like are axially symmetrical and the balance of deflection is maintained so that the movable portion 111 does not rotate. As described above, it is necessary to process one metal plate with extremely high accuracy in consideration of the weight of the image sensor. Therefore, there is a problem that the fine movement mechanism becomes expensive and is not suitable for mass production.

  The present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a pixel shifting fine movement mechanism that can be driven with high accuracy by a simple mechanism.

  The first pixel shifting fine movement mechanism of the present invention includes an optical lens system, a reflecting mirror, and an imaging device, and light from a subject passes through the optical lens system and is reflected by the reflecting mirror and is reflected on the imaging device. A fine movement mechanism for shifting a pixel formed on the optical axis, wherein the optical axis connecting the reflecting mirror and the imaging device is the Z axis, and the reflecting mirror is moved in the Y axis direction which is one direction perpendicular to the Z axis. It further comprises a Y-axis direction fine movement mechanism that finely moves mechanically, and an X-axis direction fine movement mechanism that mechanically finely moves the image sensor in the X-axis direction perpendicular to the Z-axis and the Y-axis.

  The second pixel shifting fine movement mechanism of the present invention includes an optical lens system, a reflecting mirror, and an image sensor, and light from a subject passes through the optical lens system and is reflected by the reflector to be reflected on the image sensor. A fine movement mechanism for shifting a pixel formed on the optical axis, wherein the optical axis connecting the reflecting mirror and the imaging device is the Z axis, and the reflecting mirror is moved in the Y axis direction which is one direction perpendicular to the Z axis. A Y-axis direction fine movement mechanism that finely moves mechanically, and an X-axis direction fine movement mechanism that finely moves the optical lens system mechanically in the X-axis direction perpendicular to the Z-axis and the Y-axis. .

  The third pixel shift fine movement mechanism of the present invention is a pixel shift fine movement mechanism that includes an optical lens system and an image pickup device, and light from a subject passes through the optical lens system and forms an image on the image pickup device. When the optical axis connecting the optical lens system and the imaging device is the Z axis, the Y axis direction mechanically finely moves the optical lens system in the Y axis direction which is one direction perpendicular to the Z axis. It further includes a fine movement mechanism and an X-axis direction fine movement mechanism that mechanically finely moves the image sensor in the X-axis direction perpendicular to the Z-axis and the Y-axis.

  A fourth pixel shifting fine movement mechanism of the present invention includes a reflecting mirror, an optical lens system, and an image sensor, and light from a subject is reflected by the reflector and passes through the optical lens system to be on the image sensor. A fine movement mechanism for shifting a pixel formed on the optical axis, wherein the optical axis connecting the reflecting mirror and the imaging device is the Z axis, and the reflecting mirror is moved in the Y axis direction which is one direction perpendicular to the Z axis. It further comprises a Y-axis direction fine movement mechanism that finely moves mechanically, and an X-axis direction fine movement mechanism that mechanically finely moves the image sensor in the X-axis direction perpendicular to the Z-axis and the Y-axis.

  A fifth pixel shifting fine movement mechanism of the present invention includes a reflecting mirror, an optical lens system, and an imaging device, and light from a subject is reflected by the reflecting mirror and passes through the optical lens system to be on the imaging device. A fine movement mechanism for shifting a pixel formed on the optical axis, wherein the optical axis connecting the reflecting mirror and the imaging device is the Z axis, and the reflecting mirror is moved in the Y axis direction which is one direction perpendicular to the Z axis. A Y-axis direction fine movement mechanism that finely moves mechanically, and an X-axis direction fine movement mechanism that finely moves the optical lens system mechanically in the X-axis direction perpendicular to the Z-axis and the Y-axis. .

  According to the present invention, since the X-axis direction fine movement mechanism and the Y-axis direction fine movement mechanism that independently drive the displacement of the two members constituting the optical system are provided, the two members rotate according to the displacement. , There is no disadvantage that the image plane is shifted and the focus is softened. Moreover, such a high-precision drive mechanism has a simple configuration and can be easily mass-produced at a relatively low cost. Therefore, according to the present invention, it is possible to provide a pixel shift fine movement mechanism with little variation in minute displacement movement and high reliability.

  In the first to fifth pixel shifting fine movement mechanisms of the present invention, it is preferable that the Y-axis direction fine movement mechanism and the X-axis direction fine movement mechanism include a piezoelectric actuator. Thereby, it is possible to control the fine movement displacement with high accuracy. Further, by controlling the magnitude of the voltage applied to the piezoelectric actuator, it becomes possible to easily adjust the required drive displacement amount.

  Alternatively, in the first to fifth pixel shifting fine movement mechanisms of the present invention, it is preferable that the Y-axis direction fine movement mechanism and the X-axis direction fine movement mechanism include an electromagnetic actuator. As a result, it is possible to easily adjust the required driving displacement amount by controlling the magnitude of the current value flowing through the electromagnetic actuator.

  The pixel shifting fine movement mechanism of the present invention preferably includes a mechanism for finely moving the reflecting mirror and a mechanism for finely moving the image sensor, like the first and fourth pixel shifting fine movement mechanisms. This is due to the following reason. Since the optical lens system generally includes a focusing mechanism, the mechanism that finely moves the optical lens system is required to have a large driving force and high rigidity because of its large weight and easily changing the balance of the center of gravity. Is done. On the other hand, the reflecting mirror and the image sensor do not have such a problem, the structure of the mechanism for finely moving them can be simplified, and high reliability can be easily obtained.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
Embodiment 1 of the present invention will be described below.

  FIG. 1 is a perspective view showing a schematic configuration of a pixel shifting fine movement mechanism according to Embodiment 1 of the present invention. The light coming from the subject passes through the optical lens system 6, is reflected by the reflecting mirror 1, focuses on the imaging device 7 that is an imaging device, is converted into an electrical signal by the imaging device 7, and is a signal processing unit (not shown). And is recognized as a subject image. Here, as shown in the drawing, an XYZ orthogonal coordinate system is defined in which the normal direction of the image sensor 7 is the Z axis, and two axes orthogonal to the Z axis are the X axis and the Y axis. The optical axis connecting the subject (not shown), the optical lens system 6 and the reflecting mirror 1 is parallel to the Y axis, and the optical axis connecting the reflecting mirror 1 and the image sensor 7 is parallel to the Z axis. The axes are orthogonal.

  FIG. 2 is a side view seen along the X axis of the pixel shifting fine movement mechanism according to the first embodiment, and shows a schematic configuration of the mechanism for finely moving the reflecting mirror 1 in the Y axis direction. The reflecting mirror 1 is held at a predetermined angle by a reflecting mirror holding table 2, and the reflecting mirror holding table 2 is an electronic device (not shown) via a piezoelectric actuator 3 that expands and contracts in the Y-axis direction and a reflecting mirror driving unit fixing table 4. It is fixed to the camera body. In this way, the fine movement mechanism 5 in the Y-axis direction of the reflecting mirror 1 is configured. The piezoelectric actuator 3 is connected to a voltage application circuit (not shown) via an electric wiring (not shown). By applying a voltage to the piezoelectric actuator 3, the reflecting mirror 1 can be driven to be displaced in the Y-axis direction.

  FIG. 3 is a side view taken along the Y axis of the pixel shift fine movement mechanism according to the first embodiment, and shows a schematic configuration of the mechanism for finely moving the image sensor 7 in the X axis direction. FIG. 4 is a perspective view of a mechanism for finely moving the image sensor 7 in the X-axis direction. The image sensor 7 is attached to a movable stage 8, and this movable stage 8 is connected to a movable stage drive fixed base 9 via a piezoelectric actuator 10 that expands and contracts in the X-axis direction. This movable stage drive fixed base 9 is fixed to an electronic camera body (not shown). When the movable stage 8 is finely driven in the X-axis direction, four guide pins 11 are provided on the movable stage drive fixed base 9 in order to prevent the movable stage 8 from shaking in the Y-axis direction perpendicular thereto. . Thus, the X-axis direction fine movement mechanism 12 of the image sensor 7 is configured. The piezoelectric actuator 10 is connected to a voltage application circuit (not shown) via an electric wiring (not shown). By applying a voltage to the piezoelectric actuator 10, the image sensor 7 can be driven to be displaced in the X-axis direction.

  The two fine movement mechanisms of the X-axis direction fine movement mechanism 12 and the Y-axis direction fine movement mechanism 5 constitute the pixel shifting fine movement mechanism of the present embodiment.

  Next, the operation of the pixel shifting fine movement mechanism of the present embodiment will be described.

  When a rectangular wave voltage is applied to the piezoelectric actuator 3 of the Y-axis direction fine movement mechanism 5, the piezoelectric actuator 3 causes expansion and contraction. This telescopic movement is transmitted to the reflecting mirror 1 via the reflecting mirror holding base 2, and the reflecting mirror 1 reciprocates between two points, for example, an origin position and a positive position in the Y-axis direction. This reciprocating motion of the reflecting mirror 1 can optimize the shape of the rectangular wave applied to the piezoelectric actuator 3, thereby extending the stay time at both end positions of the reciprocating motion and shortening the moving time between the two points. it can. As a result, the image sensor 7 recognizes the subject image formed by the optical lens system 6 on the image sensor 7 as two images periodically shifted slightly in the Y-axis direction. By controlling the magnitude of the voltage of the rectangular wave applied to the piezoelectric actuator 3, the amount of movement of the reflecting mirror 1 can be controlled, and the magnitude of the amount of deviation in the Y-axis direction between the two subject images recognized by the image sensor 7 can be controlled. Can be adjusted.

  In the X-axis fine movement mechanism 12 shown in FIG. 4, by applying a rectangular wave voltage similar to that of the piezoelectric actuator 3 of the Y-axis direction fine movement mechanism 5 to the piezoelectric actuator 10, the piezoelectric actuator 10 causes expansion and contraction. This expansion / contraction motion is transmitted to the image sensor 7 via the movable stage 8 in which the shake in the Y-axis direction is restricted by the four guide pins 11, and the image sensor 7 is, for example, the origin position and the positive side position in the X-axis direction. And reciprocating between two points. Thereby, as in the case of the fine movement mechanism 5 in the Y-axis direction, the image sensor 7 periodically shifts the subject image formed on the image sensor 7 by the optical lens system 6 slightly in the X-axis direction. Recognize as one image. By controlling the magnitude of the voltage of the rectangular wave applied to the piezoelectric actuator 10, the amount of movement of the image sensor 7 can be controlled, and the magnitude of the amount of deviation in the X-axis direction between the two subject images recognized by the image sensor 7 can be controlled. Can be adjusted.

  Therefore, by optimally controlling the rectangular wave voltage applied to the two piezoelectric actuators 3 and 10, four subject images that are shifted in the X-axis direction and the Y-axis direction are obtained via the image sensor 7. That is, when the X-axis direction position and the Y-axis direction position (X, Y) of the image sensor 7 are at the (origin position, origin position), the first image is captured (positive side position, origin position). A second image picked up at (3), a third image picked up at (positive position, positive position), and a fourth image picked up at (origin position, positive position) are obtained.

  In the pixel shifting fine movement mechanism of the present embodiment, the image sensor 7 is driven in the X-axis direction, and the reflecting mirror 1 is driven in the Y-axis direction. As described above, since the driven component in the X-axis direction and the driven component in the Y-axis direction are different, the driving mechanism is simplified and no mutual interference occurs between the two fine movement mechanisms. Therefore, for example, compared to a mechanism that drives one image sensor in two axes in the X-axis direction and the Y-axis direction, driving accuracy is improved, and a highly reliable pixel shifting fine movement mechanism can be realized.

(Embodiment 2)
A second embodiment of the present invention will be described below.

  FIG. 5 is a side view of the pixel shifting fine movement mechanism according to the second embodiment viewed along the X axis, and shows a schematic configuration of the mechanism for finely moving the reflecting mirror 1 in the Y axis direction. The light coming from the subject passes through the optical lens system 6, is reflected by the reflecting mirror 1, focuses on the imaging device 7 that is an imaging device, is converted into an electrical signal by the imaging device 7, and is a signal processing unit (not shown). And is recognized as a subject image. As in the first embodiment, an XYZ orthogonal coordinate system is defined in which the normal direction of the image sensor 7 is the Z axis, and two axes orthogonal to the Z axis are the X axis and the Y axis.

  In the second embodiment, the reflecting mirror 1 and the Y-axis direction fine movement mechanism 5 that finely moves the reflecting mirror 1 in the Y-axis direction are the same as those in the first embodiment. The same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  In the second embodiment, unlike the first embodiment, the image sensor 7 is fixed, and the optical lens system 6 is driven to be displaced in the X-axis direction.

  FIG. 6 is a perspective view showing a schematic configuration of the X-axis direction fine movement mechanism 22 for finely moving the optical lens system 6 in the X-axis direction. The X-axis direction fine movement mechanism 22 has a similar structure to the X-axis direction fine movement mechanism 12 shown in FIG. The optical lens system 6 is attached to a movable stage 18, and this movable stage 18 is connected to a movable stage drive fixed base 19 via a piezoelectric actuator 20 that expands and contracts in the X-axis direction. This movable stage drive fixed base 19 is fixed to an electronic camera body (not shown). In order to prevent the movable stage 18 from moving in the Z-axis direction perpendicular thereto when the movable stage 18 is finely driven in the X-axis direction, the four guide pins 21 are provided on the movable stage drive fixed base 19. . In this way, the X-axis direction fine movement mechanism 22 of the optical lens system 6 is configured. The piezoelectric actuator 20 is connected to a voltage application circuit (not shown) via an electric wiring (not shown). By applying a voltage to the piezoelectric actuator 20, the optical lens system 6 can be driven to be displaced in the X-axis direction. A piezoelectric actuator 20 that generates a necessary driving force in consideration of the weight of the optical lens system 6 is used.

  The pixel shifting fine movement mechanism of the present embodiment is the same as that of the first embodiment except for the above. By optimally controlling the rectangular wave voltage applied to the piezoelectric actuator 20 of the X-axis direction fine movement mechanism 22 and the piezoelectric actuator 3 of the Y-axis direction fine movement mechanism 5, via the image sensor 7 as in the first embodiment, Four subject images that are shifted in the X-axis direction and the Y-axis direction are obtained.

  Also in the present embodiment, as in the first embodiment, the driving accuracy is improved by a simple driving mechanism, and a highly reliable pixel shifting fine movement mechanism can be realized.

(Embodiment 3)
Embodiment 3 of the present invention will be described below.

  FIG. 7 is a side view taken along the X axis of the pixel shifting fine movement mechanism according to the third embodiment, and shows a schematic configuration of the X axis direction fine movement mechanism 12 that finely moves the image sensor 7 in the Y axis direction. Yes. As shown in the drawing, an XYZ orthogonal coordinate system is defined in which the normal direction of the image sensor 7 is the Z axis, and two axes orthogonal to the Z axis are the X axis and the Y axis. In the present embodiment, the reflecting mirror 1 shown in the first and second embodiments is not provided. The subject (not shown), the optical lens system 6 and the image sensor 7 are arranged on a straight line parallel to the Z axis. The light coming from the subject passes through the optical lens system 6, is focused on the imaging device 7 that is an imaging device, is converted into an electric signal by the imaging device 7, and is recognized as a subject image through a signal processing unit (not shown). The

  The image sensor 7 is finely driven in the X-axis direction by the X-axis direction fine movement mechanism 12 shown in the first embodiment. The optical lens system 6 is finely driven in the Y-axis direction by the Y-axis direction fine movement mechanism 23 installed so that the X-axis direction fine movement mechanism 22 shown in the second embodiment is driven in the Y-axis direction.

  By optimally controlling the rectangular wave voltage applied to the piezoelectric actuator of the X-axis direction fine movement mechanism 12 and the piezoelectric actuator of the Y-axis direction fine movement mechanism 23, similarly to the first and second embodiments, the imaging element 7 is used. Four subject images that are shifted in the X-axis direction and the Y-axis direction are obtained.

  Also in the present embodiment, as in the first and second embodiments, the driving accuracy is improved by a simple driving mechanism, and a highly reliable pixel shifting fine movement mechanism can be realized.

(Embodiment 4)
Embodiment 4 of the present invention will be described below.

  FIG. 8 is a side view of the pixel shifting fine movement mechanism according to the fourth embodiment viewed along the X axis, and shows a schematic configuration of the X axis direction fine movement mechanism 5 for finely moving the reflecting mirror 1 in the Y axis direction. Yes. Light coming from a subject (not shown) is reflected by the reflecting mirror 1, passes through the optical lens system 6, is focused on the imaging device 7 that is an imaging device, is converted into an electrical signal by the imaging device 7, It is recognized as a subject image through a signal processing unit (not shown). As shown in the drawing, an XYZ orthogonal coordinate system is defined in which the normal direction of the image sensor 7 is the Z axis, and two axes orthogonal to the Z axis are the X axis and the Y axis. The optical axis connecting the subject and the reflecting mirror 1 is parallel to the Y axis.

  In the fourth embodiment, the reflecting mirror 1 and the Y-axis direction fine-movement mechanism 5 that finely moves the reflecting mirror 1 in the Y-axis direction, and the imaging element 7 and the X-axis direction fine-movement mechanism 12 that finely moves the imaging element 7 in the X-axis direction are described in the embodiment. The same as 1 is used. The present embodiment is different from the first embodiment only in the positional relationship between the reflecting mirror 1 and the Y-axis direction fine moving mechanism 5 for finely moving the reflecting mirror 1 and the optical lens system 6. The same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  By optimally controlling the rectangular wave voltage applied to the piezoelectric actuator of the X-axis direction fine movement mechanism 12 and the piezoelectric actuator of the Y-axis direction fine movement mechanism 5, the X-axis is passed through the image sensor 7 as in the first embodiment. Four subject images shifted in the direction and the Y-axis direction are obtained.

  Also in the present embodiment, as in the first embodiment, the driving accuracy is improved by a simple driving mechanism, and a highly reliable pixel shifting fine movement mechanism can be realized.

(Embodiment 5)
Embodiment 5 of the present invention will be described below.

  FIG. 9 is a side view seen along the X axis of the pixel shifting fine movement mechanism according to the fifth embodiment, and shows a schematic configuration of the X axis direction fine movement mechanism 5 that finely moves the reflecting mirror 1 in the Y axis direction. Yes. Light coming from a subject (not shown) is reflected by the reflecting mirror 1, passes through the optical lens system 6, is focused on the imaging device 7 that is an imaging device, is converted into an electrical signal by the imaging device 7, It is recognized as a subject image through a signal processing unit (not shown). Similar to the fourth embodiment, an XYZ orthogonal coordinate system is defined in which the normal direction of the image sensor 7 is the Z axis, and two axes orthogonal to the Z axis are the X axis and the Y axis. The optical axis connecting the subject and the reflecting mirror 1 is parallel to the Y axis.

  In the fifth embodiment, the reflecting mirror 1 and the Y-axis direction fine movement mechanism 5 that finely moves the reflecting mirror 1 in the Y-axis direction, and the optical lens system 6 and the X-axis direction fine movement mechanism 22 that finely moves this in the X-axis direction are implemented. The thing similar to the form 2 is used. The present embodiment is different from the second embodiment in that the reflecting mirror 1 and the Y-axis direction fine movement mechanism 5 that finely moves the reflecting mirror 1 and the optical lens system 6 and the X-axis direction fine movement mechanism 22 that finely moves this in the X-axis direction are different. Only positional relationship. The same components as those of the second embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  By optimally controlling the rectangular wave voltage applied to the piezoelectric actuator of the X-axis direction fine movement mechanism 22 and the piezoelectric actuator of the Y-axis direction fine movement mechanism 5, the X-axis is passed through the image sensor 7 as in the second embodiment. Four subject images shifted in the direction and the Y-axis direction are obtained.

  Also in the present embodiment, as in the first and second embodiments, the driving accuracy is improved by a simple driving mechanism, and a highly reliable pixel shifting fine movement mechanism can be realized.

  In the first to fifth embodiments described above, the piezoelectric actuator is used as the drive source of the fine movement mechanism of the reflecting mirror 1, the image pickup device 7, or the optical lens system 6. However, the present invention is not limited to this, and a highly accurate minute As long as displacement driving is guaranteed, an electromagnetic actuator may be used, or another type of actuator may be used.

  The field of application of the present invention is not particularly limited. For example, it is useful as a fine pixel shifting mechanism necessary for high-definition imaging of an electronic camera. In addition to the high performance of the electronic camera, scientific observation such as a high resolution image electronic photographing device mounted on a microscope can be obtained by using the pixel shifting fine movement mechanism of the present invention. It can also be applied to industrial optical equipment.

It is the perspective view which showed schematic structure of the pixel shift fine movement mechanism which concerns on Embodiment 1 of this invention. It is the side view seen along the X-axis of the pixel shift fine movement mechanism which concerns on Embodiment 1 of this invention. It is the side view seen along the Y-axis of the pixel shift fine movement mechanism which concerns on Embodiment 1 of this invention. FIG. 3 is a perspective view showing a schematic configuration of a mechanism for finely moving an image sensor in the X-axis direction in the pixel shifting fine movement mechanism according to Embodiment 1 of the present invention. It is the side view seen along the X-axis of the pixel shift fine movement mechanism which concerns on Embodiment 2 of this invention. FIG. 9 is a perspective view showing a schematic configuration of a mechanism for finely moving an optical lens system in an X-axis direction in a pixel shifting fine movement mechanism according to a second embodiment of the present invention. It is the side view seen along the X-axis of the pixel shift fine movement mechanism which concerns on Embodiment 3 of this invention. It is the side view seen along the X-axis of the pixel shift fine movement mechanism which concerns on Embodiment 4 of this invention. It is the side view seen along the X-axis of the pixel shift fine movement mechanism which concerns on Embodiment 5 of this invention. It is the disassembled perspective view which showed an example of the conventional minute displacement drive mechanism. It is the top view which showed another example of the conventional minute displacement drive mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Reflective mirror 2 Reflective mirror holding base 3 Piezoelectric actuator 4 Reflective mirror drive part fixed base 5,23 Y-axis direction fine movement mechanism 6 Optical lens system 7 Imaging element 8, 18 Movable stage 9, 19 Movable stage drive fixed base 10, 20 Piezoelectric Actuators 11, 21 Guide pins 12, 22 X-axis fine movement mechanism 50 Base 51 Spacer 52 Vertical minute displacement plate 52a Fixed portion 52b Movable portion 52c Piezo actuator 53 Horizontal minute displacement plate 53a Fixed portion 53b Movable portion 53c Piezo actuator 54 Bracket 55 Image sensor 56 Image sensor substrate 60 Shooting lens system 61 Lens mount 62 Front panel 63a, 63b Mounting plate 110 Fixed base 111 Movable part 112a-112d Leaf spring part 113a-113d Drive spring part 114a-114d Arm part 115a-115d Hinge 116a, 116d piezoelectric actuator

Claims (7)

A pixel shift fine movement mechanism that includes an optical lens system, a reflecting mirror, and an image sensor, and that light from a subject passes through the optical lens system and is reflected by the reflector to form an image on the image sensor. ,
When the optical axis connecting the reflecting mirror and the imaging device is the Z axis,
A Y-axis direction fine movement mechanism that mechanically finely moves the reflecting mirror in the Y-axis direction which is one direction perpendicular to the Z-axis;
A pixel shift fine movement mechanism further comprising: an X-axis direction fine movement mechanism that mechanically finely moves the image sensor in an X-axis direction perpendicular to the Z-axis and the Y-axis. A pixel shift fine movement mechanism that includes an optical lens system, a reflecting mirror, and an image sensor, and that light from a subject passes through the optical lens system and is reflected by the reflector to form an image on the image sensor. ,
When the optical axis connecting the reflecting mirror and the imaging device is the Z axis,
A Y-axis direction fine movement mechanism that mechanically finely moves the reflecting mirror in the Y-axis direction which is one direction perpendicular to the Z-axis;
A pixel shift fine movement mechanism further comprising: an X-axis direction fine movement mechanism that mechanically finely moves the optical lens system in an X-axis direction perpendicular to the Z-axis and the Y-axis. A pixel shift fine movement mechanism comprising an optical lens system and an image sensor, wherein light from a subject passes through the optical lens system and is imaged on the image sensor;
When the optical axis connecting the optical lens system and the image sensor is the Z axis,
A Y-axis direction fine movement mechanism that mechanically finely moves the optical lens system in the Y-axis direction which is one direction perpendicular to the Z-axis;
An X-axis direction fine movement mechanism that mechanically finely moves the image sensor in the X-axis direction perpendicular to the Z-axis and the Y-axis. A pixel shift fine movement mechanism that includes a reflecting mirror, an optical lens system, and an image sensor, and that reflects light from a subject, passes through the optical lens system, and forms an image on the image sensor. ,
When the optical axis connecting the reflecting mirror and the imaging device is the Z axis,
A Y-axis direction fine movement mechanism that mechanically finely moves the reflecting mirror in the Y-axis direction which is one direction perpendicular to the Z-axis;
A pixel shift fine movement mechanism further comprising: an X-axis direction fine movement mechanism that mechanically finely moves the image sensor in an X-axis direction perpendicular to the Z-axis and the Y-axis. A pixel shift fine movement mechanism that includes a reflecting mirror, an optical lens system, and an image sensor, and that reflects light from a subject, passes through the optical lens system, and forms an image on the image sensor. ,
When the optical axis connecting the reflecting mirror and the imaging device is the Z axis,
A Y-axis direction fine movement mechanism that mechanically finely moves the reflecting mirror in the Y-axis direction which is one direction perpendicular to the Z-axis;
A pixel shift fine movement mechanism further comprising: an X-axis direction fine movement mechanism that mechanically finely moves the optical lens system in an X-axis direction perpendicular to the Z-axis and the Y-axis.   The pixel shifting fine movement mechanism according to claim 1, wherein the Y-axis direction fine movement mechanism and the X-axis direction fine movement mechanism include piezoelectric actuators. The pixel shifting fine movement mechanism according to claim 1, wherein each of the Y-axis direction fine movement mechanism and the X-axis direction fine movement mechanism includes an electromagnetic actuator.

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