JP2006128083A - Field emission type image display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a field emission type image display device in which high illuminance can be realized without increasing anode voltage and high resolution can be realized by suppressing occurrence of cross talk between picture elements caused by excited light from the phosphor layer. <P>SOLUTION: The field emission type image display device 1 is constructed of a filed emission electron source 2 arranged in a vacuum container and a phosphor screen 3 which is arranged in the vacuum container opposed to the field emission electron source 2 and has a plurality of recessed portions 11 on the face opposed to the field emission electron source 2 and in which a phosphor layer 12 is formed in the recessed portions 11. The phosphor layer 12 is made to emit light by the collision of electrons emitted from the field emission electron source 2, and picture is displayed. The inner wall face of the recessed portion 11 is widened in taper shape from the bottom face side toward the opening face side, and the adjoining recessed portions 11 are divided by rib structures 13 made of a material having optical absorption function to the light of emission wavelength. The phosphor layer 12 is formed on almost whole surfaces of the bottom face and the inner wall face of the recessed portion 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a field emission display (FED) using a field emission electron source.

  Conventionally, cathode ray tubes (CRTs) have been mainstream as displays (image display devices) for color televisions and personal computers, but in recent years, image display devices are required to be smaller, lighter, and thinner. Accordingly, various thin image display devices are being developed and commercialized.

  Under the circumstances as described above, research and development of various thin image display devices have been recently made, and among them, development of liquid crystal displays and plasma displays is active. The liquid crystal display is applied to various products such as a portable personal computer, a portable television, a video camera, and a car navigation system, and the plasma display is applied to a product such as a large display of 20 to 40 inches. However, the liquid crystal display has a problem that the viewing angle is narrow and the response performance is slow, and the plasma display has a problem that it is difficult to obtain high luminance and the power consumption is large.

  Therefore, as a thin image display device that solves these problems, an image display device using a phenomenon called field emission in which electrons are emitted in a vacuum at room temperature (hereinafter referred to as “field emission image display device”). ) Is attracting attention. Since this field emission type image display device is a self-luminous type, it is possible to obtain a wide viewing angle and high luminance, and the basic principle (to make a phosphor emit light using an electron beam) is the conventional one. Since it is similar to a cathode ray tube, it is possible to display a natural and highly color reproducible image.

  Conventionally, as this type of field emission image display device, one having the following configuration is known (for example, see Patent Document 1). FIG. 7 schematically shows a configuration of a field emission image display device in the prior art.

  As shown in FIG. 7, a conventional field emission type image display device 200 is arranged in a vacuum container facing a field emission electron source 201 disposed in a vacuum container. And a phosphor screen 202. The field emission electron source 201 includes a cathode substrate 101, a cathode electrode 102 formed in a thin film shape on the cathode substrate 101, a conical emitter 105 formed on the cathode electrode 102, and the cathode electrode 102. The first insulating layer 103 is formed so as to surround the emitter 105, and the gate electrode 104 is formed on the first insulating layer 103. On the other hand, the phosphor screen 202 includes an anode substrate 106, an anode electrode 107 formed in a thin film shape on the anode substrate 106, and a second electrode formed on the anode electrode 107 so as to face the first insulating layer 103. Insulating layer 108, shielding electrode 109 formed on second insulating layer 108, phosphor layer formed on opening (recess) of shielding electrode 109 on anode electrode 107 and second insulating layer 108 110. In FIG. 7, only the configuration corresponding to one display pixel is shown for simplicity. FIG. 7 shows a configuration in which the number of emitters is one, but it is usually configured as an emitter array made up of several hundred emitters per pixel. Here, the shield electrode 109 has a convergence function that suppresses the spread of the trajectory of electrons emitted from the emitter array.

  In the field emission image display apparatus 200 having the above-described configuration, the emitter 105 is applied by applying a predetermined voltage (gate voltage, anode voltage, shield voltage) to the gate electrode 104, the anode electrode 107, and the shield electrode 109. Electrons emitted with a certain divergence angle are converged by the shielding electrode 109 while being accelerated toward the anode substrate 106 and collide with the phosphor layer 110. Thereby, the phosphor layer 110 emits light and an image is displayed.

When the field emission image display device having the above-described configuration is used for an application requiring high luminance characteristics of 1 × 10 ⁴ cd / m ² or more, it is necessary to set the anode voltage to 5 kV or more. There is.

  However, in the case of the field emission image display device having the above configuration, the potential of the shielding electrode can be optimally set in the region where the anode voltage is 1 kV or less, but in the high voltage region where the anode voltage is 5 kV or more, Since the withstand voltage between the anode electrode and the anode electrode cannot be maintained safely, it is difficult to optimally set the potential of the shielding electrode. If the potential of the shielding electrode is not optimally set, the convergence performance of the shielding electrode is deteriorated, so that crosstalk between pixels that causes light to be emitted even to pixels adjacent to the original light emitting pixel occurs. It becomes a deterioration factor.

  In view of such problems, there has been proposed a field emission image display device that can achieve high luminance without increasing the anode voltage (see, for example, Patent Document 2). FIG. 8 schematically shows a configuration on the phosphor screen side of the field emission image display device.

  As shown in FIG. 8, the phosphor screen 219 of the field emission image display device includes a transparent substrate 220, a black matrix layer 221 that is formed on one surface of the transparent substrate 220 and includes a plurality of openings 226, Phosphor layers 227R, 227G, and 227B formed at least in the openings 226 of the black matrix layer 221, a plurality of barriers 225 formed at predetermined positions on the black matrix layer 221 and made of an inorganic conductive material, and barriers 225 is provided between the black matrix layer 221 and an intermediate layer 224 made of an inorganic conductive material. The wall surface of the barrier 225 is formed in a tapered shape having a taper angle of 45 degrees to 80 degrees with respect to the surface of the transparent substrate 220. The intermediate layer 224 includes an undercoat layer 222 and a conductive layer 223.

According to the configuration of the field emission image display device shown in FIG. 8, the wall surface of the barrier 225 is formed in a tapered shape, so that the phosphor layers 227R, 227G, and 227B corresponding to the respective pixels of the phosphor screen 219 are formed. Since the effective surface area can be greatly increased, the light emission luminance can be improved. As a result, it is possible to realize a field emission image display device that can achieve high luminance without increasing the anode voltage.
JP 2001-110343 A JP 2004-47140 A

  By the way, when electrons emitted from the field emission electron source collide with the phosphor layer, since the electrons have sufficient excitation energy, light of visible band wavelength is excited from the phosphor layer. When the excitation light reaches an adjacent pixel, it becomes a stray light component and causes inter-pixel crosstalk.

  However, in the case of the field emission type image display device having the configuration shown in FIG. 8, the black matrix layer 221 having a light absorption function has a planar structure, and therefore, external light mainly entering from the transparent substrate 220. Only the light absorption effect on the pixel can be exhibited, and crosstalk between pixels caused by excitation light from the phosphor layers 227R, 227G, and 227B has not been prevented.

  The present invention has been made to solve the above-described problems in the prior art, and can achieve high luminance without increasing the anode voltage, and can also achieve cross-pixel crossing caused by excitation light from the phosphor layer. An object of the present invention is to provide a field emission type image display device capable of increasing the resolution by suppressing the occurrence of talk.

  In order to achieve the above object, a first configuration of a field emission image display device according to the present invention includes a field emission electron source disposed in a vacuum container, and the vacuum facing the field emission electron source. A phosphor screen disposed in a container and having a plurality of recesses on a surface facing the field emission electron source and having a phosphor layer formed in the recess, and the field emission electrons A field emission type image display device that displays an image by causing the phosphor layer to emit light by collision of electrons emitted from a source, wherein the inner wall surface of the recess is from the bottom surface side of the recess to the opening surface side. And the adjacent recesses are partitioned by a rib structure made of a material having a light absorption function (black effect) with respect to light of the emission wavelength, and the recesses The bottom surface and the inner wall surface of Wherein the phosphor layer is formed over the entire surface.

  In the first configuration of the field emission image display device according to the present invention, the electron beam shield having an opening corresponding to the opening size of the recess is disposed in the vicinity of the field emission electron source side of the phosphor screen. It is preferable to further comprise a plate. According to this preferable example, by applying a positive voltage between the extraction voltage (gate voltage) and the anode voltage to the electron beam shielding plate, electrons emitted from the field emission electron source are subjected to a lens action. It goes straight without being blocked, and only the surrounding electrons are mechanically blocked (blocked) by the spatial filter action of the electron beam shielding plate. As a result, since an electron beam can be prevented from being incident on adjacent pixels, the occurrence of crosstalk between pixels can be suppressed and high resolution can be achieved. In this case, it is preferable that a getter film having a gas adsorption action is formed on at least one surface of the electron beam shielding plate. According to this preferred example, the gas emission component generated by the collision of electrons with the phosphor layer can be efficiently absorbed, so that the degree of vacuum in the field emission image display device can be maintained well. it can. As a result, it is possible to prevent the emitter constituting the field emission electron source from becoming inoperable due to the discharge breakdown, thereby extending the life of the field emission electron source, and consequently the field emission image display. The lifetime of the apparatus can be extended.

  In the first configuration of the field emission image display device of the present invention, an opening corresponding to the opening size of the recess is disposed in contact with the surface of the phosphor screen on the field emission electron source side. It is preferable to further include an electron beam shielding plate. In this case, it is preferable that a getter film having a gas adsorption action is formed on the surface of the electron beam shielding plate on the field emission electron source side.

  In the first configuration of the field emission image display device of the present invention, it is preferable that the plurality of recesses are arranged in a matrix or a line.

  A second configuration of the field emission image display device according to the present invention is a field emission electron source disposed in a vacuum vessel, and is disposed in the vacuum vessel so as to face the field emission electron source. And a phosphor screen having a plurality of recesses on a surface facing the field emission electron source and having a phosphor layer formed in the recess, and is emitted from the field emission electron source. A field emission type image display device for displaying an image by causing the phosphor layer to emit light by collision of electrons, wherein an inner wall surface of the recess is tapered from a bottom surface side of the recess toward an opening surface side. The phosphor layer is formed over substantially the entire bottom surface and inner wall surface of the recess, and is disposed in the vicinity of the field emission electron source side of the phosphor screen. Has an opening corresponding to the opening size Further comprising an electron beam shielding plate that, and, on at least one surface of said electron beam shielding plate, characterized in that the getter film is formed having a gas adsorption.

  A third configuration of the field emission image display device according to the present invention is a field emission electron source disposed in a vacuum container, and is disposed in the vacuum container so as to face the field emission electron source. And a phosphor screen having a plurality of recesses on a surface facing the field emission electron source and having a phosphor layer formed in the recess, and is emitted from the field emission electron source. A field emission type image display device for displaying an image by causing the phosphor layer to emit light by collision of electrons, wherein an inner wall surface of the recess is tapered from a bottom surface side of the recess toward an opening surface side. The phosphor layer is formed over substantially the entire bottom surface and the inner wall surface of the recess, and is disposed in contact with the surface of the phosphor screen on the field emission electron source side. Corresponding to the opening size of the recess Further comprising an electron beam shielding plate having a mouth, and, in the field emission electron source side of the surface of the electron beam shielding plate, wherein the getter film having a gas adsorption action is formed.

  According to the present invention, since the effective surface area of the phosphor layer corresponding to each pixel of the phosphor screen can be greatly increased, the light emission luminance can be improved. As a result, it is possible to realize a field emission image display device that can achieve high luminance without increasing the anode voltage. In addition, the inner wall surface of the recess in which the phosphor layer is formed is tapered from the bottom surface side to the opening surface side of the recess so that it enters the phosphor layer on the inner wall surface in the recess. The reflected electron beam (reflective component) can be re-incident on the phosphor layer in the same recess, so that the emission luminance can be improved. Furthermore, adjacent recesses are partitioned by a rib structure made of a material having a light absorption function (black effect) with respect to light of the emission wavelength, so that between pixels caused by excitation light from the phosphor layer It is possible to increase the resolution by suppressing the occurrence of crosstalk.

  Hereinafter, the present invention will be described more specifically using embodiments.

  FIG. 1 is a cross-sectional view schematically showing the configuration of a field emission image display device according to an embodiment of the present invention. FIG. 2 shows the shape of a recess for forming a phosphor layer in the field emission image display device. FIG. 3 is a front view showing the shape of the recess.

  As shown in FIG. 1, a field emission image display device 1 according to the present embodiment is opposed to a field emission electron source 2 disposed in a vacuum container (not shown) and the field emission electron source 2. And a phosphor screen 3 disposed in the vacuum vessel.

  The field emission electron source 2 includes a cathode substrate 4 made of glass or the like, a cathode electrode 5 made of a metal film or the like formed in a thin film on the cathode substrate 4, and a plurality of cathode portions formed on the cathode electrode 5. 6, an insulating layer 7 made of an insulating film such as silicon oxide, which is also formed on the cathode electrode 5 so as to surround the cathode portion 6, and a gate made of Nb metal, a polysilicon film or the like formed on the insulating layer 7. The electrode 8 is configured. Here, the cathode portions 6 are arranged in a matrix, and each cathode portion 6 is composed of a plurality of conical emitters made of a refractory metal such as molybdenum or a semiconductor such as silicon. Is configured as an emitter array. The gate electrode 8 functions as an extraction electrode for applying a voltage to each emitter so that electrons are emitted from the tip of each emitter.

  The phosphor screen 3 is formed by facing an anode substrate 9 made of glass or the like, an anode electrode 10 made of a metal film or the like formed on the anode substrate 9 in a thin film, and facing each cathode portion 6 on the anode electrode 10. The plurality of recesses 11 and the phosphor layer 12 formed in the recess 11 are configured. That is, each recess 11 in which the phosphor layer 12 is formed corresponds to one display pixel, and the recess 11 is arranged in a matrix like the cathode portion 6 (see FIGS. 2 and 3). ). Adjacent recesses 11 are partitioned by rib structures (which form inner wall surfaces of the individual recesses 11).

  In the field emission image display device 1 having the above-described configuration, each cathode of the field emission electron source 2 is applied by applying a predetermined voltage (gate voltage, anode voltage) to the gate electrode 8 and the anode electrode 10. The electrons emitted from the unit 6 are accelerated in the direction of the phosphor screen 3 and collide with the corresponding phosphor layer 12, whereby the phosphor layer 12 emits light and an image is displayed.

  As shown in FIGS. 1 to 3, the recess 11 in which the phosphor layer 12 is formed has a rectangular cross section perpendicular to a straight line connecting the centers of the cathode part 6 and the recess 11 forming a pair, and The inner wall surface is formed in a so-called quadrangular frustum shape that tapers from the bottom surface side toward the opening surface side. A phosphor layer 12 is formed over substantially the entire bottom surface and inner wall surface of the recess 11. Since the formation region of the phosphor layer 12 has such a configuration, the effective surface area of the phosphor layer 12 corresponding to each pixel of the phosphor screen 3 can be significantly increased to about 30 to 40%. The light emission luminance can be improved as compared with the conventional case. As a result, it is possible to realize the field emission type image display apparatus 1 that can achieve high luminance without increasing the anode voltage applied to the anode electrode 10. Further, as described above, the inner wall surface of the recess 11 in which the phosphor layer 12 is formed is tapered from the bottom surface side to the opening surface side, whereby the phosphor on the inner wall surface in the recess 11 is formed. Since the electron beam (reflected component) incident on the layer 12 and reflected can be incident again on the phosphor layer 12 in the same recess 11, the emission luminance can be improved.

  The taper angle α of the inner wall surface of the recess 11 is preferably in the range of 60 degrees <α <90 degrees. Since the phosphor layer 12 is formed on the bottom surface of the recess 11 and the tapered inner wall surface, in order to increase the effective surface area of the phosphor layer 12 corresponding to each pixel of the phosphor screen 3, the taper angle α It is desirable to increase the value. On the other hand, when the taper angle α is increased, there arises a problem that the technical difficulty of the forming process increases. If a sandblasting method used for rib formation of a plasma display panel (PDP) is used, processing with a taper angle α of 60 degrees or more is possible.

  By the way, when electrons emitted from the cathode portion 6 of the field emission electron source 2 collide with the phosphor layer 12, the electrons have sufficient excitation energy. Is excited. Then, when this excitation light reaches an adjacent pixel, it becomes a stray light component and causes crosstalk between pixels. In order to prevent the occurrence of this crosstalk, the rib structure 13 that partitions the adjacent recesses 11 is made of a material having a light absorption function (black effect) with respect to light in the visible band wavelength (emission wavelength). Yes. As a material having a light absorption function (black effect), for example, a black matrix resist generally used in a CRT phosphor screen is suitable. As described above, the rib structure 13 that forms the inner wall surface of each recess 11 is formed by using a material having a light absorption function with respect to light of a visible band wavelength (light emission wavelength). The generation of crosstalk caused by the excitation light from the pixel 12 can be suppressed and the resolution can be increased.

  In the vicinity of the field emission electron source 2 side of the phosphor screen 3, it is desirable to arrange an electron beam shielding plate 14 having an opening 14 a corresponding to the size (opening size) of the opening surface of the recess 11. According to this desirable configuration, by applying an intermediate voltage (positive) between the extraction voltage (gate voltage) and the anode voltage to the electron beam shielding plate 14, electrons emitted from the field emission electron source 2 have a lens action. The electron beam is shielded (blocked) mechanically by the spatial filter action of the electron beam shielding plate 14. As a result, since it is possible to prevent the electron beam from entering adjacent pixels, it is possible to further increase the resolution by suppressing the occurrence of crosstalk between pixels.

  As described above, according to the configuration of the present embodiment, it is possible to realize the field emission type image display apparatus 1 that can simultaneously achieve high luminance and high resolution.

  Further, when electrons emitted from the cathode portion 6 of the field emission type electron source 2 collide with the phosphor layer 12, gas components are emitted into the field emission type image display device 1 to lower the degree of vacuum, which is the worst. In such a case, the emitter constituting the cathode part 6 falls into an inoperable state due to discharge breakdown. In order to prevent this reduction in the degree of vacuum, it is desirable to form a getter film 17 having a gas adsorption action on at least one surface of the electron beam shielding plate 14 disposed in the vicinity of the phosphor screen 3. Since the getter effect of the getter film 17 varies greatly depending on the gas component, it is important to select an optimal material for the getter film 17. As a material for the getter film 17, for example, a Ba compound material, a Ti compound material, or the like can be used. In this way, the getter film 17 having a gas adsorption action is formed on the surface of the electron beam shielding plate 14 disposed in the vicinity of the phosphor screen 3, and thus is generated by collision of electrons with the phosphor layer 12. Since the gas emission component can be efficiently absorbed, the degree of vacuum in the field emission type image display device 1 can be maintained well. As a result, it is possible to prevent the emitter constituting the cathode portion 6 of the field emission type electron source 2 from being brought into an inoperable state due to the discharge breakdown, so that the lifetime of the field emission type electron source 2 is increased. As a result, the lifetime of the field emission image display device 1 can be extended.

  Here, a method of manufacturing the phosphor screen 3 will be described with reference to FIG.

  First, as shown in FIG. 4A, on the anode substrate 9 made of glass, as a transparent conductive film, for example, an ITO thin film is formed by a vapor deposition method or the like, and selectively removed by etching. The electrode 10 is formed.

  Next, as shown in FIG. 4B, on the anode substrate 9 on which the anode electrode 10 is formed, a sheet-like material containing a material having a light absorption function with respect to light in the visible band wavelength (emission wavelength). The dielectric material 15 is formed with a desired film thickness (100 μm) by a bonding process. Next, a mask pattern 16 serving as an etching mask for the next process is formed by photolithography using a thick film resist.

  Next, as shown in FIG. 4C, after the etching process is performed under the optimum process conditions using the sandblast method, the mask pattern 16 is removed. Thereby, the recess 11 having a tapered inner wall surface is formed.

  Finally, as shown in FIG. 4 (d), three types of phosphors that emit light in R (red), G (green), and B (blue) are sequentially formed on the bottom surface of the recess 11 using a screen printing method. The phosphor layer 12 is formed by printing over substantially the entire inner wall surface.

  In this embodiment, the recess 11 is formed in a quadrangular frustum shape. However, the present invention is not necessarily limited to this configuration. For example, a conical shape, a polygonal frustum shape, or the like may be used. Good.

  In the present embodiment, the recesses 11 in which the phosphor layer 12 is formed are arranged in a matrix corresponding to each pixel, but the present invention is not necessarily limited to this configuration. It may be arranged in a line as shown in FIG.

  In the present embodiment, the electron beam shielding plate 14 is disposed away from the phosphor screen 3, but as shown in FIG. 6, the electron beam shielding plate 14 is brought into contact with the phosphor screen 3. You may arrange in the state. In this case, a getter film 17 having a gas adsorption action is formed on the surface of the electron beam shielding plate 14 on the field emission electron source 2 side.

Sectional drawing which shows typically the structure of the field emission type image display apparatus in one embodiment of this invention The perspective view which shows the shape of the recessed part which forms a fluorescent substance layer of the field emission-type image display apparatus in one embodiment of this invention The front view which shows the shape of the recess which forms a fluorescent substance layer of the field emission type image display apparatus in one embodiment of this invention Process drawing which shows the manufacturing method of the phosphor screen of the field emission type image display apparatus in one embodiment of this invention The perspective view which shows the other example of the shape of the recess which forms a fluorescent substance layer of the field emission type image display apparatus in one embodiment of this invention Sectional drawing which shows typically the other structure of the field emission type image display apparatus in one embodiment of this invention Sectional drawing which shows typically the structure of the field emission type image display apparatus in a prior art Sectional drawing which shows typically the other structure of the field emission type image display apparatus in a prior art

Explanation of symbols

1 Field Emission Image Display (FED)
2 Field Emission Electron Source 3 Phosphor Screen 4 Cathode Substrate 5 Cathode Electrode 6 Cathode Part 7 Insulating Layer 8 Gate Electrode 9 Anode Substrate 10 Anode Electrode 11 Recess 12 Phosphor Layer 13 Rib Structure 14 Electron Beam Shielding Plate 14a Opening 17 Getter film

Claims (8)

A field emission electron source disposed in a vacuum vessel;
The field emission type electron source is disposed in the vacuum container so as to face the field emission type electron source, and has a plurality of recesses on a surface facing the field emission type electron source, and a phosphor layer is formed in the recess. A phosphor screen,
A field emission image display device that displays an image by causing the phosphor layer to emit light by collision of electrons emitted from the field emission electron source,
The inner wall surface of the recess extends in a tapered shape from the bottom surface side to the opening surface side of the recess, and the adjacent recess is made of a material having a light absorption function with respect to light of the emission wavelength. Partitioned by a rib structure, and
The field emission image display device, wherein the phosphor layer is formed over substantially the entire bottom surface and inner wall surface of the recess.   2. The field emission image display apparatus according to claim 1, further comprising an electron beam shielding plate disposed in the vicinity of the field emission electron source side of the phosphor screen and having an opening corresponding to the opening size of the recess.   3. The field emission image display device according to claim 2, wherein a getter film having a gas adsorption action is formed on at least one surface of the electron beam shielding plate.   2. The field emission type according to claim 1, further comprising an electron beam shielding plate disposed in contact with the surface of the phosphor screen on the field emission electron source side and having an opening corresponding to the opening size of the recess. Image display device.   5. The field emission image display device according to claim 4, wherein a getter film having a gas adsorption action is formed on a surface of the electron beam shielding plate on the field emission electron source side.   The field emission image display device according to claim 1, wherein the plurality of recesses are arranged in a matrix or a line. A field emission electron source disposed in a vacuum vessel;
The field emission type electron source is disposed in the vacuum container so as to face the field emission type electron source, and has a plurality of recesses on a surface facing the field emission type electron source, and a phosphor layer is formed in the recess. A phosphor screen,
A field emission image display device that displays an image by causing the phosphor layer to emit light by collision of electrons emitted from the field emission electron source,
The inner wall surface of the recess is tapered from the bottom surface side to the opening surface side of the recess, and the phosphor layer is formed over substantially the entire bottom surface of the recess and the inner wall surface. And
An electron beam shielding plate disposed near the field emission electron source side of the phosphor screen and having an opening corresponding to the opening size of the recess, and at least one surface of the electron beam shielding plate A field emission image display device, wherein a getter film having a gas adsorption action is formed. A field emission electron source disposed in a vacuum vessel;
The field emission type electron source is disposed in the vacuum container so as to face the field emission type electron source, and has a plurality of recesses on a surface facing the field emission type electron source, and a phosphor layer is formed in the recess. A phosphor screen,
A field emission image display device that displays an image by causing the phosphor layer to emit light by collision of electrons emitted from the field emission electron source,
The inner wall surface of the recess is tapered from the bottom surface side to the opening surface side of the recess, and the phosphor layer is formed over substantially the entire bottom surface of the recess and the inner wall surface. And
An electron beam shielding plate disposed in contact with a surface of the phosphor screen on the field emission electron source side and having an opening corresponding to the opening size of the recess, and the electron beam shielding plate A field emission image display device, characterized in that a getter film having a gas adsorption action is formed on the surface of the field emission electron source side.

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