JP2006122743A - Micro-reactor apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-reactor apparatus which can readily remove residual bubbles in micro-channels of the micro-reactor. <P>SOLUTION: In the micro-reactor apparatus 1, a tilting plate 42 can be inclined around the axis of a hinge 45 by rotating a bolt 43. Then, a micro-reactor 10 fixed to the upper surface of the plate 42 is also inclined in an integrated manner, causing the discharge outlet 112 to be higher than the introduction inlet 111. Residual bubbles in the channel 120 of the micro-reactor 10 thereby moves to the outlet 112 owing to the floating action and are discharged readily out of the outlet 112. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microreactor device including a microreactor.

  The microreactor is a device for performing chemical treatment by introducing a fluid such as a chemical solution into a fine channel formed inside. Specifically, a chemical treatment is performed by introducing a plurality of chemical liquids into an internal flow path to cause a chemical reaction, or by irradiating or heating the chemical liquid introduced into the flow path. If a microreactor is used, uniform and efficient chemical treatment can be performed with a small amount of chemical solution, so that it is expected to be put to practical use in the chemical and pharmaceutical industries.

  Such a microreactor is used by being incorporated in a microreactor apparatus provided with a supply system for supplying a chemical solution and a recovery system for recovering a liquid after processing. A conventional microreactor device including a microreactor is disclosed in, for example, Patent Document 1.

JP 2003-311697 A

  As described above, the microreactor has a fine flow path inside, and the chemical solution is processed in the flow path. For this reason, when bubbles exist in the flow path, there is a problem that the flow of the chemical solution in the flow path becomes non-uniform or adversely affects the intended chemical reaction. This problem is particularly serious when bubbles are inevitably generated by the intended chemical reaction. In addition, it is a particularly serious problem when a plurality of flow paths are provided in parallel in the microreactor and the flow of each flow path should be made uniform. On the other hand, since the flow path of the microreactor is a fine space isolated from the outside, it is very difficult to discharge the bubbles once remaining in the flow path to the outside.

  This invention is made | formed in view of such a situation, and it aims at providing the microreactor apparatus which can remove easily the bubble which remains in the fine flow path of a microreactor.

  In order to solve the above-mentioned problem, the invention according to claim 1 is a microreactor having a flow path inside, a fluid introduction port and a fluid discharge port at both ends of the flow channel, and a support means for supporting the microreactor. , Wherein the support means includes tilting means for holding the microreactor in a tilted state in which the fluid discharge port is higher than the fluid introduction port.

  The invention according to claim 2 is the microreactor device according to claim 1, wherein, in addition to the inclined state, the tilting means is in a horizontal state in which the height of the fluid insertion port and the height of the fluid discharge port are substantially equal. Further, the microreactor can be held.

  The invention according to claim 3 is the microreactor device according to claim 1 or 2, wherein the channel includes a plurality of parallel branch channels.

  The invention according to claim 4 is the microreactor device according to any one of claims 1 to 3, wherein the support means includes a fixed portion and an inclined portion that can be inclined while supporting the microreactor, The tilting means is means for fixing the inclined portion to the fixed portion in an inclined state.

  The invention according to claim 5 is the microreactor device according to any one of claims 1 to 4, wherein the tilting means is means for tilting the microreactor about two axes.

  The invention according to claim 6 is the microreactor device according to any one of claims 1 to 5, further comprising a control unit that operates the tilting means at a predetermined timing.

  The invention according to claim 7 is the microreactor device according to any one of claims 1 to 6, wherein at least one of the fluid introduction port and the fluid discharge port is provided on a bottom surface of the microreactor, The support means is means for supporting the microreactor from below via a support column.

  The invention according to claim 8 is the microreactor device according to any one of claims 1 to 7, wherein a fluid supply system that supplies a fluid to the microreactor and a fluid recovery that recovers the processed fluid from the microreactor The fluid supply system and the fluid recovery system are each connected to the microreactor via a removable intermediate connector.

  The invention according to claim 9 is the microreactor device according to claim 8, wherein some or all of the plurality of intermediate connectors between the microreactor and the fluid supply system and the fluid recovery system are: It is characterized by being arranged in parallel.

  The invention according to claim 10 is the microreactor device according to claim 8 or 9, further comprising means for extracting a fluid existing in a pipe of the fluid supply system or the fluid recovery system. .

  The invention according to claim 11 is the microreactor device according to any one of claims 8 to 10, further comprising means for receiving a fluid below the intermediate connector.

  According to the first to eighth aspects of the invention, the microreactor can be fixed in an inclined state in which the fluid outlet is higher than the fluid inlet. For this reason, bubbles existing in the microreactor can be easily moved to the fluid discharge side by the action of buoyancy, and can be discharged from the fluid discharge port to the outside of the microreactor.

  In particular, according to the second aspect of the invention, the microreactor can be fixed not only in the inclined state but also in the horizontal state. For this reason, the microreactor can be tilted only when necessary according to the stage of processing and the state of occurrence of bubbles.

  In particular, according to the third aspect of the present invention, bubbles can be easily removed from a plurality of parallel branch flow paths, and the fluid flow in each branch flow path can be kept uniform.

  Particularly, according to the invention described in claim 4, since the supporting means has the fixed portion and the inclined portion, only the inclined portion and the microreactor supported by the inclined portion can be inclined, and the inclined portion is limited. can do.

  In particular, according to the fifth aspect of the present invention, the microreactor can be inclined in an arbitrary direction. For this reason, even when the flow path in the microreactor is bent, the microreactor can be inclined in accordance with the direction of the flow path.

  In particular, according to the invention described in claim 6, the microreactor can be tilted by automatically operating the tilting means at a predetermined timing by the control unit.

  In particular, according to the invention described in claim 7, a space is secured below the microreactor. For this reason, the operator can visually check the fluid introduction port and the fluid discharge port provided on the bottom surface of the microreactor from the outside of the apparatus, and can easily confirm abnormality such as liquid leakage.

  In particular, according to the invention described in claim 8, the microreactor can be easily detached from the microreactor device by attaching / detaching the intermediate connector portion. For this reason, the work efficiency at the time of maintenance improves.

  In particular, according to the invention described in claim 9, when removing the microreactor from the microreactor device, the intermediate connector portions arranged in parallel may be attached and detached in order. For this reason, the work efficiency at the time of maintenance further improves.

  In particular, according to the invention described in claim 10, the intermediate connector portion can be attached and detached after extracting the fluid existing in the pipe of the fluid supply system or the fluid recovery system. For this reason, it is possible to reduce scattering of the fluid when the intermediate connector portion is attached or detached.

  In particular, according to the eleventh aspect of the present invention, even if the fluid scatters when the intermediate connector portion is attached or detached, the fluid can be received at a predetermined location. Therefore, it is possible to prevent the fluid from adhering to an unintended location.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

<1. Microreactor configuration>
First, the configuration of the microreactor incorporated in the microreactor device of the present invention will be described. Various microreactors can be incorporated in the microreactor apparatus of the present invention. In the following, the configuration of the microreactors 10, 20, and 30 will be described as an example.

  1A and 1B are a top view and a longitudinal sectional view showing the configuration of the microreactor 10, respectively. As shown in FIGS. 1A and 1B, the microreactor 10 mainly includes a bottom substrate 11, a reactor plate 12, a transparent plate 13, and a top substrate 14. The bottom substrate 11 is obtained by cutting a rigid material such as stainless steel into a flat plate shape. The reactor plate 12 is a thin metal plate, and a fine flow path 120 is formed by performing precision processing such as etching on the surface thereof. The transparent plate 13 is obtained by cutting a transparent material such as glass into a flat plate shape. The upper surface substrate 14 is a flat plate made of stainless steel or the like, and a plurality of window portions 141 penetrating in the thickness direction are formed.

  In the microreactor 10, the bottom substrate 11, the reactor plate 12, the transparent plate 13, and the top substrate 14 are superposed in this order and fixed with screws or the like (not shown). Since the transparent plate 13 is bonded to the upper surface of the reactor plate 12, the upper surface of the flow channel 120 formed in the reactor plate 12 is blocked by the transparent plate 13, and the flow channel 120 becomes a space isolated from the outside. .

  In the bottom substrate 11, inlets 111 a and 111 b (hereinafter collectively referred to as “inlet ports 111”) for introducing a chemical solution into the flow path 120, and the liquid processed in the reactor are discharged. A drainage port 112 is formed. Both the inlet 111 and the drain 112 are formed by threading the bottom substrate 11 in the thickness direction and screwing a liquid feeding connector therethrough. The chemical solution supplied from the outside is introduced into the flow path 120 through the introduction port 111 from below the microreactor 10. The treated liquid is discharged from the flow path 120 to the lower side of the microreactor 10 through the drain port 112.

  The channel 120 is a fine channel having a diameter of about several tens of μm to several mm. In the microreactor 10, the flow path 120 has a two-liquid mixed type pattern. That is, the two flow paths 121 and 122 merge with the single flow path 123 on the downstream side. The upstream ends of the two channels 121 and 122 are connected to the inlets 111a and 111b, respectively, and the downstream ends of the channels 123 are connected to the drain port 112. The separate chemicals introduced from the inlets 111a and 111b are mixed and reacted in the channel 123 through the channels 121 and 122, respectively, and discharged from the drain port 112.

  The upper surface of the channel 120 is closed with the transparent plate 13, and a window portion 141 is formed on the upper surface substrate 14 covering the upper side. For this reason, light can reach the flow path 120 from above the microreactor 10. For example, when light is irradiated from above the microreactor 10, the light reaches the chemical liquid flowing in the flow channel 120. Further, the liquid flowing in the flow channel 120 can be observed from above the microreactor 10.

  A plurality of heaters 113 such as ceramic heaters are affixed to the bottom surface of the bottom substrate 11. The heater 113 operates based on a predetermined electrical signal and can heat the liquid in the flow path 120 via the bottom substrate 11 and the reactor plate 12.

  2A and 2B are a top view and a longitudinal sectional view showing the configuration of the microreactor 20, respectively. As shown in FIGS. 2A and 2B, the microreactor 20 mainly includes a bottom substrate 21, a reactor plate 22, and a top substrate 23. Unlike the microreactor 10 described above, the upper surface substrate 23 is bonded to the upper surface of the reactor plate 22 without using a transparent plate. The introduction port 211 is formed in the bottom substrate 21, and the drainage port 231 is formed in the top substrate 23. No window is formed on the top substrate 23.

  In the microreactor 20, the chemical solution is introduced from below into the flow path 220 through the introduction port 211, and the treated liquid is discharged upward through the drainage port 231. That is, the vicinity of the introduction port 211 and the drainage port 231 is a flow from the low position to the high position. For this reason, the air bubbles present in the flow path 220 are easily discharged to the drainage side. In the microreactor 20, the upper surface substrate 23 made of stainless steel or the like that is easily threaded is disposed at a position immediately above the flow path 220, so that the drainage port 231 can be provided on the upper surface side. Other configurations of the microreactor 20 are the same as those of the microreactor 10 described above.

  FIGS. 3A and 3B are a top view and a longitudinal sectional view showing the configuration of the microreactor 30. The microreactor 30 is different from the microreactor 10 in the pattern of the flow path 320. FIG. 4 is an enlarged view of the flow path 320 of the microreactor 30. The flow path 320 has a plurality (for example, 16) of parallel branch flow paths 320a, 320b, 320c,. In this flow path 320, the chemical solution introduced from one introduction port 311 flows through the branch flow paths 320a, 320b, 320c,..., Joins again, and is discharged from one drainage port 312. The chemical solution flowing through the plurality of branch flow paths 320a, 320b, 320c,... Flows linearly along the flow paths at substantially the same speed. For this reason, in the microreactor 30, light and heat can be evenly applied to the chemical solution. Other configurations of the microreactor 30 are the same as those of the microreactor 10 described above.

<2. Configuration of microreactor device>
Next, the configuration of the microreactor device 1 incorporating the microreactor 10 will be described. FIG. 5 is a side view schematically showing the configuration of the microreactor apparatus 1. FIG. 6 is a top view of the microreactor device 1.

  The microreactor apparatus 1 mainly includes a microreactor 10, a support base 40 that supports the microreactor 10, an irradiation lamp 50 that irradiates light to the microreactor 10, a supply system 60 that supplies a chemical solution and a rinse solution to the microreactor 10, and a microreactor 20. A recovery system 70 that recovers the processed liquid and a control unit 80 are provided.

  The support base 40 is fixed on a horizontally fixed plate 41, an inclined plate 42 that can be inclined with respect to the fixed plate, a bolt 43 that inclines the inclined plate 42, and an upper surface of the inclined plate 42. And a support column 44 that supports the frame from below. The inclined plate 42 is placed over the fixed plate 41, and one end of the fixed plate 41 and the inclined plate 42 is connected via a hinge 45. A bolt 43 is screwed to the other end side of the inclined plate 42. The bolt 43 penetrates the inclined plate 42 in the thickness direction, and the tip thereof is in contact with the upper surface of the fixed plate 41. Therefore, when the bolt 43 is rotated, the inclined plate 42 and the microreactor 10 can be tilted about the axis of the hinge 45 as shown in FIG.

  The microreactor 10 is attached to the upper surface of the inclined plate 42 via a support 44. That is, the microreactor 10 is configured to be supported above the inclined plate 42 via the space SP. For this reason, the operator can easily visually check the introduction port 111 and the drainage port 112 provided on the back surface of the microreactor 10 from the outside of the apparatus. The vicinity of the introduction port 111 and the drainage port 112, which is a boundary portion with the fine channel 120, is a portion where a change in the pressure of the liquid is large and liquid leakage is likely to occur. If the space SP is provided below the microreactor 10 as in the present apparatus, it is possible to easily check for liquid leakage at the inlet 111 and the drain 112. Furthermore, if the distance between the microreactor 10 and the inclined plate 42 is secured about 100 mm or more, operations such as attaching and detaching connectors to the back surface of the microreactor 10 can be easily performed.

  The irradiation lamp 50 is provided above the microreactor 10 and is fixed to the inclined plate 42 via a support column. When the inclined plate 42 is inclined, the irradiation lamp 50 is also integrally inclined. The irradiation lamp 50 can irradiate light such as ultraviolet rays from above the microreactor 10 toward the microreactor 10.

  The supply system 60 is a piping system for supplying the chemical liquid and the rinse liquid from the chemical liquid supply source 611 and the rinse liquid supply source 612, respectively. A pipe 621 is connected to the chemical solution supply source 611, and is connected to the pipe 64 via a valve 631. On the other hand, a pipe 622 is connected to the rinse liquid supply source 612, and is connected to the pipe 64 via a valve 632. For this reason, a chemical | medical solution and a rinse liquid can be selectively supplied to the piping 64 by switching the valve | bulb 631,632. A pump 65 for pumping a chemical solution or a rinse solution and a three-way valve 66 are inserted in the pipe 64. The other port of the three-way valve 66 is connected to the waste liquid tank 90.

  The pipe 64 is connected to the introduction port 111 of the microreactor 10 via the intermediate connector 67 and the auxiliary pipe 68. The intermediate connector 67 is constituted by a union joint or the like, and the auxiliary pipe 68 can be attached and detached. For this reason, when removing the microreactor 10 from the support base 40, the auxiliary pipe 68 can be removed from the intermediate connector 67. When removing the auxiliary pipe 68, first, the port on the pump 65 side of the three-way valve 66 is closed, and the connection between the intermediate connector 67 and the auxiliary pipe 68 is loosened with the other two ports opened. In this way, the chemical solution remaining in the pipe 64 between the three-way valve 66 and the intermediate connector 67 flows into the waste liquid tank 90 by its own weight, and when the auxiliary pipe 68 is removed from the intermediate connector 67, the intermediate connector Spattering of chemicals and the like from the connection port 67 can be reduced.

  Further, the intermediate connector 67 is attached to an upper portion of a tray 671 provided on the upper surface of the inclined plate 42. For this reason, even if the chemical solution is scattered when the auxiliary pipe 68 is attached or detached, the chemical solution is received by the receiving tray 671. Therefore, it is possible to prevent the chemical solution from adhering to a place other than the tray 671 and causing corrosion or the like.

  Although only one set of supply system 60 is shown in FIG. 5, in fact, since the microreactor 10 has two introduction ports 111a and 111b, supply to each of the introduction ports 111a and 111b. Systems 60a and 60b are provided. In particular, the intermediate connectors 67a and 67b and the auxiliary pipes 68a and 68b are provided in parallel as shown in the top view of FIG. 6 so that the attachment / detachment work can be performed efficiently.

  The recovery system 70 is a piping system for recovering the processed liquid and bubbles discharged from the microreactor 10 to a recovery tank 771 and a waste liquid tank 772. The drainage port 112 of the microreactor 10 is connected to the pipe 73 via the auxiliary pipe 71 and the intermediate connector 72. A three-way valve 74 is inserted in the pipe 73, and the other port of the three-way valve 74 is connected to the waste liquid tank 90. The pipe 73 branches into two pipes 751 and 752. One pipe 751 is connected to the recovery tank 771 through the valve 761, and the other pipe 752 is connected to the waste liquid tank 772 through the valve 762. Yes.

  The intermediate connector 72 is composed of a union joint or the like, similar to the intermediate connector 67 described above, and the auxiliary pipe 71 can be attached and detached. The intermediate connector 72 is attached to an upper portion of a tray 721 provided on the upper surface of the inclined plate 42 in the same manner as the intermediate connector 67 described above.

  The control unit 80 is electrically or mechanically connected to the bolt 43, the irradiation lamp 50, the valves 631, 632, 761, 762, the pump 65, the three-way valves 66, 74, etc., and performs these operations at a predetermined timing. Can be controlled.

<3. Operation of microreactor device>
Next, the operation of the microreactor device 1 having the above configuration will be described. In addition, in the operation described below, the control unit 80 electrically or mechanically controls the operation of the bolt 43, the irradiation lamp 50, the valves 631, 632, 761, 762, the pump 65, the three-way valves 66, 74, and the like. To proceed.

  FIG. 8 is a flowchart showing a flow of basic operations of the microreactor apparatus 1. As shown in FIG. 8, the microreactor apparatus 1 performs a rinsing process (step S2) after performing a chemical liquid process (step S1).

  In the chemical processing (step S1), first, the valves 631 and 761 are opened with the valves 632 and 762 being closed. The three-way valves 66 and 74 respectively close the ports in the direction of the waste liquid tank 90. Then, the pump 65 is operated to feed the chemical liquid from the chemical liquid supply source 611. The chemical liquid is pressure-fed from the chemical liquid supply source 611 through the pipe 621, the pipe 64, and the auxiliary pipe 68 to the flow path 120 in the microreactor 10 through the inlet 111. In the microreactor 10, mixing of the chemical solution, heating by the heater 113, and processing of the light irradiation lamp by the irradiation lamp 50 are performed. The treated liquid is discharged from the drain port 112 and is collected in the collection tank 771 through the auxiliary pipe 71, the pipe 73, and the pipe 751.

  Note that, during the chemical treatment (step S1), the bolt 43 is not operated, and the inclined plate 42 and the microreactor 10 are kept in a horizontal state (state shown in FIG. 5). If the microreactor 10 is in a horizontal state, the temperature gradient in the flow path 120 can be reduced, and the chemical reaction can be performed uniformly.

  When the chemical treatment for a predetermined time is finished, the pump 65 is stopped, the valves 631 and 761 are closed, and the chemical treatment (step S1) is finished. Subsequently, a rinsing process (step S2) is performed.

  In the rinsing process (step S2), first, the bolt 43 is rotated to incline the inclined plate 42 (state shown in FIG. 6). Then, the valves 632 and 762 are opened with the valves 631 and 761 closed. The three-way valves 66 and 74 respectively close the ports in the direction of the waste liquid tank 90. In such a state, the pump 65 is operated and the rinse liquid is pumped from the rinse liquid supply source 612. The rinse liquid is pumped from the rinse liquid supply source 612 to the flow path 120 in the microreactor 10 through the pipe 622, the pipe 64, and the auxiliary pipe 68. In the microreactor 10, the flow path 120 is washed with the rinse liquid. Thereafter, the rinsing liquid is discharged from the drainage port 112 and is collected in the waste liquid tank 772 through the auxiliary pipe 71, the pipe 73, and the pipe 752.

  In this rinsing process (step S2), the microreactor 10 is held in an inclined state in which the drainage port 112 is higher than the introduction port 111. For this reason, when bubbles remain in the flow path 120, the bubbles move to the drainage port 112 side by the action of buoyancy, and are easily discharged out of the microreactor 10 from the drainage port 112. Air bubbles discharged from the drainage port 112 are collected together with the rinsing liquid through the auxiliary pipe 71 and the pipes 73 and 752 to the waste liquid tank 772.

<4. Other>
As described above, in the microreactor apparatus 1, the microreactor 10 can be fixed in an inclined state in which the drainage port 112 is higher than the introduction port 111. For this reason, even when bubbles exist in the flow path 120 of the microreactor 10, the bubbles can be easily moved to the liquid discharge port 112 side by the action of buoyancy and discharged to the outside. Note that the discharge operation may be more effectively realized by applying vibration or the like to the microreactor 10 during the bubble discharge operation.

  In the above example, the microreactor 10 is set to the horizontal state during the chemical solution processing (step S1), and the microreactor 10 is set to the inclined state during the rinsing processing (step S2). However, the microreactor 10 may be set to the inclined state during the chemical processing. In this way, air bubbles in the flow path can be removed at any time during the chemical treatment. In particular, when performing a process in which bubbles are generated during the chemical solution process, it is necessary to perform the process while removing the bubbles. Therefore, it is desirable to place the microreactor 10 in an inclined state. In the microreactor device 1 described above, since the irradiation lamp 50 is fixed to the upper surface of the inclined plate 42, it is possible to uniformly irradiate the microreactor 10 with light even in the inclined state.

  Further, in the above example, the bolt 43 is used as the means for inclining the microreactor 10, but other known means may be used. For example, one of the inclined plates 42 may be lifted by an air cylinder.

  In the above example, the microreactor 10 is inclined only about one axis. However, the microreactor 10 may be inclined about two axes. For example, a second inclined plate that can be inclined around a different axis with respect to the inclined plate 42 is further provided on the upper surface of the inclined plate 42, and the microreactor 10 is fixed to the upper surface. If it does in this way, it will become possible to incline a 2nd inclination board to arbitrary directions. Therefore, even when the flow path of the microreactor 10 is bent in a complicated manner, the microreactor 10 can be tilted according to the direction of the flow path.

  In the above example, the microreactor device 1 incorporating the microreactor 10 has been described. However, the microreactor device 1 may incorporate other microreactors such as the microreactors 20 and 30. In the microreactor device incorporating the microreactor 20, the liquid discharge port 231 is provided on the upper side of the flow path 220, so that bubbles can be discharged more efficiently. Further, in the microreactor device incorporating the microreactor 30, bubbles can be easily removed from the plurality of branch channels 320a, 320b, 320c,..., And the flow of the chemical solution in each branch channel 320a, 320b, 320c,. Can be kept even.

  When a microreactor having a large number of inlets and drainage ports is used, as shown in FIG. 9, intermediate connectors 67c, 67d, 67e, 72a, 72b, 72c corresponding to the respective inlets and each drainage port. Are preferably arranged in parallel. With such a configuration, it is possible to quickly attach and detach the intermediate connector portion in order, and work efficiency during maintenance is improved.

It is the upper side figure and longitudinal cross-sectional view which showed the structure of the microreactor. It is the upper side figure and longitudinal cross-sectional view which showed the structure of the microreactor. It is the upper side figure and longitudinal cross-sectional view which showed the structure of the microreactor. It is an enlarged view of the flow path of a microreactor. It is the side view which showed the structure of the microreactor apparatus typically. It is a top view of a micro reactor device. It is the side view which showed the state which inclined the microreactor. It is the flowchart which showed the flow of the basic operation | movement of the microreactor apparatus. It is a top view of the micro reactor apparatus which has many intermediate | middle connectors.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microreactor apparatus 10,20,30 Microreactor 111, 211,311 Inlet port 112,231,312 Drainage port 120,220,320 Flow path 40 Support stand 41 Fixing plate 42 Inclined plate 43 Bolt 44 Post 60 Supply system 67 Intermediate connector 68 Auxiliary piping 671 Receptacle 70 Recovery system 71 Auxiliary piping 72 Intermediate connector 721 Receptacle

Claims (11)

A microreactor having a flow path inside and having a fluid inlet and a fluid outlet at both ends of the flow path;
Support means for supporting the microreactor;
A microreactor device comprising:
The microreactor apparatus characterized in that the support means has an inclination means for holding the microreactor in an inclined state in which the fluid discharge port is higher than the fluid introduction port. The microreactor device according to claim 1,
In addition to the inclined state, the inclination means can hold the microreactor in a horizontal state in which the height of the fluid insertion port and the height of the fluid discharge port are substantially equal. The microreactor device according to claim 1 or 2,
The microreactor device, wherein the flow path includes a plurality of parallel branch flow paths. A microreactor device according to any one of claims 1 to 3,
The support means includes a fixed portion and an inclined portion that can be inclined while supporting the microreactor,
The microreactor device characterized in that the tilting means is means for fixing the inclined portion in an inclined state relative to the fixing portion. A microreactor device according to any one of claims 1 to 4, wherein
The microreactor apparatus, wherein the tilting means is a means for tilting the microreactor about two axes. A microreactor device according to any one of claims 1 to 5,
The microreactor apparatus further comprising a control unit that operates the tilting means at a predetermined timing. A microreactor device according to any one of claims 1 to 6,
At least one of the fluid introduction port and the fluid discharge port is provided on the bottom surface of the microreactor,
The microreactor apparatus characterized in that the support means is means for supporting the microreactor from below via a support column. A microreactor device according to any one of claims 1 to 7,
A fluid supply system for supplying fluid to the microreactor;
A fluid recovery system for recovering the processed fluid from the microreactor;
Further comprising
The microreactor apparatus, wherein the fluid supply system and the fluid recovery system are connected to the microreactor via detachable intermediate connectors. The microreactor device according to claim 8, wherein
Part or all of the plurality of intermediate connectors between the microreactor and the fluid supply system and the fluid recovery system are arranged in parallel. The microreactor device according to claim 8 or 9, wherein
A microreactor apparatus further comprising means for extracting a fluid existing in a pipe of the fluid supply system or the fluid recovery system. A microreactor device according to any one of claims 8 to 10,
A microreactor device further comprising means for receiving a fluid below the intermediate connector.

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