JP2006116587A - Method and device for working minute recess - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form a minute recess with a constant depth even in the case that the contour shape of a workpiece is not detailedly obtained, by pressing a working roller against the outer peripheral face of the workpiece with a constant load, when forming a minute recess on the outer peripheral face of a workpiece. <P>SOLUTION: The minute recess is formed by moving a workpiece W in the Z axis direction while pressing a rolling roller 3 against an outer peripheral face Wa of the workpiece W in a state that the working roller 3 , which has minute projections and recesses 3b on its outer peripheral face 3a and is rotated on a roller shaft 2, or the workpiece W, which is rotated on a main shaft 4 parallel to the roller shaft 2, is rotated. The relative position of the working roller 3 and the workpiece W in the X axis direction is varied based on a pressing load of the working roller 3, while moving the workpiece W in the Z axis direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fine concave portion processing method and a fine concave portion processing apparatus used when forming fine concave portions on an outer peripheral surface of a workpiece, for example, an outer peripheral surface of a crankpin, a journal, or a cam journal.

Conventionally, when forming a fine recess on the outer peripheral surface of a workpiece such as a crank pin, a journal, or a cam journal as described above, a processing roller having fine irregularities on the outer peripheral surface is provided on the outer peripheral surface of the workpiece. A fine recess is formed by pressing with a constant load.
JP 2000-238245 A

  However, in the above-described conventional method for processing the fine recesses, when the processing roller is pressed against the workpiece with a constant load and processing is performed, if the details of the contour shape of the workpiece are not grasped, the processing roller is processed. There is a problem that it is difficult to keep pressing against the outer peripheral surface of the workpiece with a constant load, and therefore, there is a problem that a fine concave portion having a constant depth cannot be formed on the outer peripheral surface of the workpiece, and this problem can be solved. It has been a conventional problem.

  The present invention has been made paying attention to the above-described conventional problems, and when forming a fine recess on the outer peripheral surface of the workpiece, the processing roller is always applied with a constant load to the outer peripheral surface of the workpiece. A fine concave portion processing method and a fine concave portion processing apparatus capable of forming a fine concave portion having a constant depth even when the contour shape of the workpiece can not be grasped in detail. It is intended to provide.

  As a result of intensive studies to achieve the above object, the present inventors have made the processing roller follow the outer peripheral surface of the workpiece when forming the fine recesses on the outer peripheral surface of the workpiece. The inventors have found that the above object can be achieved and have completed the present invention.

  That is, according to the fine recess processing method of the present invention, the processing roller that rotates around the roller axis with fine irregularities on the outer peripheral surface or the workpiece that rotates around the rotation axis that is parallel to the roller axis is rotated. In the state, when the processing roller and the workpiece are moved relatively in a direction different from the roller pressing direction while pressing the processing roller against the outer peripheral surface of the workpiece, the pressing direction of the processing roller is formed. The relative position of the processing roller and the workpiece in the roller pressing direction is changed based on the pressing load of the processing roller while relatively moving the processing roller and the workpiece in different directions. The configuration of this fine recess processing method is a means for solving the above-described conventional problems.

  On the other hand, the fine recess processing apparatus of the present invention includes a processing roller that has fine irregularities on its outer peripheral surface and rotates around a roller axis, and a workpiece that rotates around a rotation axis that is parallel to the processing roller and the roller axis. A pressing mechanism that allows the outer peripheral surface of the processing roller to be pressed against the outer peripheral surface of the workpiece by relatively approaching and separating the workpiece, and the processing roller and the workpiece in a direction different from the roller pressing direction. A driving mechanism for moving, a pressing load measuring unit for measuring the pressing load of the processing roller against the workpiece, and a position correction signal is output to the pressing mechanism based on the load measured by the pressing load measuring unit to perform the processing It is characterized by having a control unit that changes the relative position of the roller and the work piece in the roller pressing direction. And a means for solving the problems.

  According to the present invention, since the above-described configuration is adopted, when the fine recess is formed on the outer peripheral surface of the workpiece, the processing roller can always be pressed against the outer peripheral surface of the workpiece with a constant load. Regardless of whether the details of the contour shape of the workpiece can be grasped or not, a very excellent effect that it is possible to form a fine concave portion having a constant depth on the outer peripheral surface of the workpiece is brought about.

  For example, as shown in FIG. 5, the processing roller used in the fine recess processing method has a disk shape as a whole, and a processing roller 3 </ b> A having a ridge 31 b having a V-shaped cross section on its outer peripheral surface 31 a, As shown in FIG. 6, there is a processing roller 3 </ b> B that also has a disk shape as a whole and has fine convex portions 32 b on its outer peripheral surface 32 a, and the processing roller 3 </ b> A is substantially constant on the outer peripheral surface Wa of the workpiece W. If it is rotated while being pressed so as to be a load, a fine continuous groove Wb is formed on the outer peripheral surface Wa of the workpiece W, and the processing roller 3B becomes an almost constant load on the outer peripheral surface Wa of the workpiece W. In this way, a number of depressions Wc are formed on the outer peripheral surface Wa of the workpiece W.

  In the fine recess processing method of the present invention, when the pressing load of the processing roller obtained by the pressing load measuring unit or the like reaches a predetermined value, the workpiece is rotated and at the same time a direction different from the pressing direction of the processing roller. It is possible to adopt a configuration in which the processing roller and the workpiece are relatively moved to start processing of a fine shape, and in this case, the workpiece is processed based on the measurement value from the pressing load measurement unit. The position of the outer peripheral surface of the object can be specified, so that efficient machining can be performed regardless of the size of the workpiece and the contour shape.

  Further, in the fine recess processing method of the present invention, when the pressing load of the processing roller obtained by the pressing load measuring unit or the like exceeds a preset upper limit value, the relative distance in the roller pressing direction between the processing roller and the workpiece On the other hand, when the pressing load of the processing roller falls below a preset lower limit value, the relative distance in the roller pressing direction between the processing roller and the workpiece can be reduced.

  If this configuration is adopted, even if the details of the contour shape of the workpiece cannot be grasped, the processing roller and the workpiece are moved relative to each other in a direction different from the pressing direction of the processing roller. When the processing of the fine shape is started, the processing continues while automatically adjusting the relative distance in the roller pressing direction between the processing roller and the workpiece in accordance with the change of the pressing load in the range between the upper limit value and the lower limit value. That is, the processing is continued with a constant pressing load while following the outer peripheral surface of the workpiece.

  Furthermore, in the fine recess processing method of the present invention, the processing roller and the workpiece are relatively moved along a linear path programmed in advance with respect to a direction different from the pressing direction of the processing roller. When the pressing load exceeds the preset upper limit value, the relative distance in the roller pressing direction between the processing roller and the workpiece is increased. On the other hand, when the pressing load of the processing roller falls below the preset lower limit value, the processing roller Can be configured to reduce the relative distance between the workpiece and the workpiece in the roller pressing direction. In this case, the outer periphery of the workpiece regardless of whether or not the details of the contour shape of the workpiece can be grasped. A fine recess having a certain depth can be formed on the surface.

  On the other hand, the pressing load of the processing roller exceeded a preset upper limit value while relatively moving the processing roller and the workpiece along an arbitrary path with respect to a direction different from the pressing direction of the processing roller. In this case, the relative distance in the roller pressing direction between the processing roller and the workpiece is increased. On the other hand, when the pressing load of the processing roller falls below a preset lower limit value, the relative pressure in the roller pressing direction between the processing roller and the workpiece is increased. The distance can be reduced. In this case, for example, the details of the contour shape of the workpiece can be grasped, and the processing roller and the workpiece are relatively moved in accordance with the contour shape. At this time, even if the shape error of the workpiece before processing the fine recesses is large, the workpiece is processed with a constant pressing load while following the outer peripheral surface of the workpiece in the same manner as described above.

  In the fine recess processing apparatus of the present invention, the pressing mechanism includes a biasing unit that presses and biases the processing roller against the outer peripheral surface of the workpiece so as to be movable in a direction away from the workpiece. With this configuration, it is possible to always apply a load by bringing a part of the processing roller into contact with the outer peripheral surface of the workpiece.

  Further, in the fine recess processing apparatus of the present invention, when the pressing load of the processing roller measured by the pressing load measuring unit reaches a preset load, the workpiece is rotated simultaneously with a command from the control unit. When the mechanism is activated, it is possible to adopt a configuration in which processing of the fine shape is started by relatively moving the processing roller and the workpiece in a direction different from the pressing direction of the processing roller. Based on the measured value from the pressing load measuring unit, the position of the outer peripheral surface of the workpiece can be specified. Therefore, efficient machining is possible regardless of the size of the workpiece and the contour shape. Can be performed.

  Furthermore, in the fine recess processing apparatus of the present invention, when the pressing load of the processing roller exceeds a preset upper limit value, the pressing mechanism is operated by a command from the control unit, and the roller between the processing roller and the workpiece is processed. When the relative distance in the pressing direction is increased and the pressing load of the processing roller falls below the preset lower limit value, the pressing mechanism is actuated by a command from the control unit, and the roller pressing direction of the processing roller and workpiece is changed. It is possible to use a configuration that reduces the relative distance. If this configuration is adopted, even if the details of the contour shape of the workpiece cannot be grasped, the processing is performed in a direction different from the pressing direction of the processing roller. When the processing of the fine shape is started by moving the roller and the workpiece relative to each other, the processing roller is changed in accordance with the change of the pressing load in the range between the upper limit value and the lower limit value. The relative distance of the roller pressing direction of the workpiece is automatically adjusted, so that the processing at a certain pressing load while following the outer peripheral surface of the workpiece is continued.

  Furthermore, in the fine recess processing apparatus of the present invention, the driving mechanism is operated by a command from the control unit, and the processing roller and the workpiece are moved in a direction different from the pressing direction of the processing roller along a pre-programmed linear path. When the pressing load of the processing roller exceeds a preset upper limit value, the pressing mechanism is actuated by a command from the control unit, and the roller pressing direction between the processing roller and the workpiece is increased. When the relative distance is increased and the pressing load of the processing roller falls below the preset lower limit, the pressing mechanism is actuated by a command from the control unit, and the relative distance in the roller pressing direction between the processing roller and the workpiece is set. In addition to being able to be reduced, the drive mechanism is actuated by a command from the control unit, and the processing roller and workpiece are pressed along the arbitrary path. When the pressing load of the processing roller exceeds a preset upper limit value while relatively moving in a direction different from the direction, the pressing mechanism is actuated by a command from the control unit, and the processing roller, the workpiece, When the relative distance in the roller pressing direction is increased and the pressing load of the processing roller falls below the preset lower limit value, the pressing mechanism is actuated by a command from the control unit to press the processing roller and the workpiece. It can be set as the structure which shortens the relative distance of a direction.

  In the former case, regardless of whether or not the details of the contour shape of the workpiece can be grasped, it is possible to form a fine recess of a certain depth on the outer peripheral surface of the workpiece, while the latter In this case, when the processing roller and the workpiece are relatively moved in accordance with the contour shape of the workpiece whose details have been grasped, even if the shape error before the processing of the fine concave portion of the workpiece is large, the above and Similarly, processing is performed with a constant pressing load while following the outer peripheral surface of the workpiece.

  EXAMPLES Hereinafter, although an Example demonstrates this invention still in detail, this invention is not limited to a following example.

  As shown in FIG. 1, the fine recess processing apparatus 1 includes a processing roller 3 having a fine unevenness 3 b on an outer peripheral surface 3 a and rotating around a roller shaft 2, and the processing roller 3 parallel to the roller shaft 2. A pressing mechanism 10 capable of pressing the outer peripheral surface 3a of the processing roller 3 against the outer peripheral surface Wa of the workpiece W by approaching and separating from the workpiece W rotating about a main shaft (rotating shaft) 4 forming A movable bed (drive mechanism) 5 that moves the workpiece W in a direction (Z-axis direction) orthogonal to the roller pressing direction (X-axis direction), and a pressing load measuring unit that measures the pressing load of the processing roller 3 on the workpiece W 6 and a control unit 7 that outputs a position correction signal to the pressing mechanism 10 based on the load measured by the pressing load measuring unit 6 to change the position of the processing roller 3 in the X-axis direction with respect to the workpiece W. And processed W is adapted to be attached via a chuck 8 to the main axis 4.

  The pressing mechanism 10 includes a stepping motor 11 as a drive source, a ball screw 12 that reciprocates in the X-axis direction by forward and reverse rotation of the stepping motor 11, and a slider 13 that is connected to the tip (lower end in the figure) of the ball screw 12. And an arm 15 that supports the processing roller 3 via the roller shaft 2 and is capable of moving back and forth in the X-axis direction with respect to the housing 14. Is provided with a coil spring (biasing means) 16 that presses and biases the processing roller 3 against the workpiece W, and the pressing load measuring unit 6 is disposed between the housing 14 and the coil spring 16. is there.

  In this case, the processing roller 3 is movable in a direction away from the workpiece W with respect to the housing 14 by providing the coil spring 16 in the housing 14 to press and bias the processing roller 3 against the workpiece W. As shown in FIG. 2, when the housing 14 moves along a straight path set in the direction of the dotted arrow, the processing roller 3 is moved while moving the processing roller 3 along the solid line arrow. While following the outer peripheral surface Wa of the workpiece W, the machining can be continued with a constant pressing load.

  In the fine recess processing apparatus 1, when the pressing load F of the processing roller 3 measured by the pressing load measuring unit 6 reaches a preset load F0, the workpiece W is rotated by a command from the control unit 7. At the same time, the movable bed 5 is operated to move the workpiece W in the Z-axis direction so as to start processing with a fine shape.

  Moreover, in the said fine recessed part processing apparatus 1, the movable bed 5 is act | operated by the command from the control part 7, and while the workpiece W is moved to a Z-axis direction along the linear path programmed beforehand, the processing roller 3 When the pressing load F exceeds the preset upper limit F1, the stepping motor 11 of the pressing mechanism 10 is actuated by a command from the control unit 7 to move the processing roller 3 away from the workpiece W and the processing roller 3. When the relative distance in the X-axis direction with the workpiece W is increased, on the other hand, when the pressing load F of the processing roller 3 falls below a preset lower limit value F2, a stepping motor of the pressing mechanism 10 according to a command from the control unit 7 11 is operated so that the processing roller 3 is brought close to the workpiece W to reduce the relative distance between the processing roller 3 and the workpiece W in the X-axis direction.

  In the fine recess processing apparatus 1, when the movement amount Z of the workpiece W in the Z-axis direction exceeds the predetermined movement amount Z0, the processing roller 3 is moved to the workpiece W by a command from the control unit 7. The processing of the fine shape is finished away from.

  Therefore, a description will be given of the point of forming the fine recesses on the outer peripheral surface Wa of the workpiece W using the fine recess processing apparatus 1 described above.

  First, as shown in FIG. 3, in step 101, an operation command is output from the control unit 7 to the stepping motor 11 of the pressing mechanism 10, whereby the processing roller 3 is moved together with the housing 14 and the arm 15 to the workpiece W. When the pressing load F of the processing roller 3 measured by the pressing load measuring unit 6 reaches the preset load F0 in step 102, the process proceeds to the next step 103, where the pressing load F is set. If the load F0 has not been reached, the processing roller 3 is further pressed against the workpiece W until the set load F0 is reached.

  Next, in step 103, following the command from the control unit 7, the workpiece W or the processing roller 3 starts to rotate, and in step 104, an operation command is output from the control unit 7 to the movable bed 5. As a result, the workpiece W moves in the Z-axis direction together with the movable bed 5, and processing of a fine shape is started.

  Next, through step 105, while the workpiece W is moved in the Z-axis direction together with the movable bed 5 in step 106, and the fine shape is being processed, in step 107, the pressing load F of the processing roller 3 is set. Exceeds the preset upper limit value F1, the stepping motor 11 of the pressing mechanism 10 is actuated by a command from the control unit 7 in step 108 to move the processing roller 3 together with the housing 14 and the arm 15 away from the workpiece W. On the other hand, if the pressing load F does not exceed the set upper limit value F1 in step 107, the process proceeds to step 109.

  Subsequently, when the pressing load F of the processing roller 3 falls below a preset lower limit value F2 in step 109, the stepping motor 11 of the pressing mechanism 10 is actuated by a command from the control unit 7 in step 110, and the housing 14 Then, the processing roller 3 is moved closer to the workpiece W together with the arm 15 and the process returns to step 109. On the other hand, if the pressing load F is not less than the set lower limit F2 in step 109, the process returns to step 104 to Continue processing.

  In step 105, when the movement amount Z of the workpiece W in the Z-axis direction exceeds the predetermined movement amount Z0, the processing roller 3 is moved from the workpiece W together with the housing 14 and the arm 15 in step 111. Subsequent to moving away, in step 112, the rotation of the workpiece W or the processing roller 3 is stopped by a command from the control unit 7 to finish the processing of the fine shape.

  Therefore, in the fine concave portion processing method using the fine concave portion processing apparatus 1 described above, when forming the fine concave portion on the outer peripheral surface Wa of the workpiece W, the processing roller 3 is always applied to the outer peripheral surface Wa of the workpiece W. Capable of being pressed with a substantially constant load, and capable of forming a fine recess having a constant depth on the outer peripheral surface Wa of the workpiece W regardless of whether or not the details of the contour shape of the workpiece W can be grasped. It becomes.

  Further, in the above-described embodiment, the processing roller 3 is processed via the arm 15 between the housing 15 and the arm 15 that supports the processing roller 3 and can move forward and backward in the X-axis direction with respect to the housing 14. Since the coil spring (biasing means) 16 that presses and biases the object W is provided, when the housing 14 moves along a straight path set in the direction of the dotted arrow shown in FIG. 2, as indicated by the solid arrow. Thus, the processing can be continuously performed with a constant pressing load while the processing roller 3 follows the outer peripheral surface Wa of the workpiece W.

  Further, in the fine recess processing apparatus 1 described above, when the pressing load F of the processing roller 3 measured by the pressing load measuring unit 6 reaches a preset load F0, the workpiece W is rotated and simultaneously the movable bed is rotated. 5, the workpiece W is moved in the Z-axis direction to start machining with a fine shape, so that the position of the outer peripheral surface Wa of the workpiece W is determined based on the measurement value from the pressing load measuring unit 6. Therefore, it is possible to perform efficient machining regardless of the size of the workpiece W and the contour shape.

  In the fine recess processing apparatus 1 described above, the pressing load F of the processing roller 3 exceeds the preset upper limit value F1 while moving the workpiece W along a linear path programmed in advance in the Z-axis direction. At this point, the stepping motor 11 of the pressing mechanism 10 is operated to move the processing roller 3 away from the workpiece W. On the other hand, when the pressing load F of the processing roller 3 falls below a preset lower limit value F2, Since the stepping motor 11 of the mechanism 10 is operated to bring the processing roller 3 closer to the workpiece W, the Z-axis direction is used regardless of whether or not the details of the contour shape of the workpiece W can be grasped. When the workpiece W is moved to start processing of a fine shape, the processing roller 3 is made to follow the outer peripheral surface Wa of the workpiece W in a range between the upper limit value F1 and the lower limit value F2. It will be capable of performing to continue working with a constant pressing force, therefore, and thus capable of forming a minute concave portions of the predetermined depth in the outer peripheral surface Wa of the workpiece W.

  In the above-described embodiment, the workpiece W is moved along a pre-programmed linear path with respect to the Z-axis direction. However, as another configuration, along the arbitrary path with respect to the Z-axis direction. While the processing roller 3 and the workpiece W are relatively moved, when the pressing load F of the processing roller 3 exceeds a preset upper limit F1, the stepping motor 11 of the pressing mechanism 10 is operated to perform processing. The roller 3 is moved away from the workpiece W. On the other hand, when the pressing load F of the processing roller 3 falls below a preset lower limit value F2, the stepping motor 11 of the pressing mechanism 10 is operated, and the processing roller 3 is processed. It can be set as the structure which approaches the thing W.

  In this case, as shown in FIG. 4, the details of the contour shape of the workpiece WA can be grasped, and when the processing roller 3 and the workpiece WA are relatively moved in accordance with the contour shape, Even if the shape error (the dotted line portion in the drawing) of the workpiece WA before machining the fine concave portion is large, the workpiece roller 3 can be processed with a constant pressing load while following the outer peripheral surface WAa of the workpiece WA. Become.

It is plane explanatory drawing which shows one Example of the fine recessed part processing apparatus of this invention. (Example 1) It is an expansion explanatory view of the processing roller part of the fine recessed part processing apparatus of FIG. (Example 1) It is a flowchart of the fine recessed part processing method by one Example performed using the fine recessed part processing apparatus of FIG. (Example 1) It is expansion explanatory drawing of the processing roller part at the time of performing the fine recessed part processing method by another Example using the fine recessed part processing apparatus of FIG. (Example 2) It is side surface explanatory drawing which shows the condition which performs a fine recessed part process using a process roller. It is side surface explanatory drawing which shows the condition which performs a fine recessed part process using another process roller.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fine recessed part processing apparatus 2 Roller shaft 3 Processing roller 3a Outer peripheral surface 3b Concavity and convexity 4 Main axis (rotating shaft)
5 Movable bed (drive mechanism)
6 Pressing load measuring unit 7 Control unit 10 Pressing mechanism 11 Stepping motor 12 Ball screw 14 Housing 15 Arm 16 Coil spring (biasing means)
W Workpiece Wa Wafer outer peripheral surface

Claims (11)

  With the processing roller rotating around the roller axis having fine irregularities on the outer peripheral surface or the workpiece rotating around the rotation axis parallel to the roller axis, the processing roller is rotated When the fine roller is formed by relatively moving the processing roller and the workpiece in a direction different from the roller pressing direction while pressing against the outer peripheral surface, the processing roller and the workpiece in a direction different from the pressing direction of the processing roller. And a relative position of the processing roller and the workpiece in the roller pressing direction is changed based on the pressing load of the processing roller.   When the pressing load of the processing roller reaches a predetermined value, the workpiece is rotated, and at the same time, the processing roller and the workpiece are moved relative to each other in a direction different from the pressing direction of the processing roller to form a fine shape. The fine recess processing method according to claim 1, wherein the processing is started.   Set the upper and lower limits of the pressing load of the processing roller. If the pressing load of the processing roller exceeds the upper limit, the relative distance in the roller pressing direction between the processing roller and the workpiece is increased, and the pressing load of the processing roller The method for processing a fine recess according to claim 1 or 2, wherein the relative distance in the roller pressing direction between the processing roller and the workpiece is shortened when the value is below the lower limit.   Processing is performed when the pressing load of the processing roller exceeds the upper limit value while relatively moving the processing roller and the workpiece along a pre-programmed linear path with respect to a direction different from the pressing direction of the processing roller. 4. The relative distance in the roller pressing direction between the roller and the workpiece is increased, and the relative distance in the roller pressing direction between the processing roller and the workpiece is reduced when the pressing load of the processing roller falls below a lower limit value. A method for processing fine recesses.   When the pressing load of the processing roller exceeds the upper limit value while relatively moving the processing roller and the workpiece along an arbitrary path with respect to a direction different from the pressing direction of the processing roller, 4. The fine distance according to claim 3, wherein the relative distance in the roller pressing direction with respect to the workpiece is increased, and the relative distance in the roller pressing direction between the processing roller and the workpiece is reduced when the pressing load of the processing roller falls below a lower limit value. Recess processing method.   A processing roller having fine irregularities on its outer peripheral surface and rotating around a roller shaft, and a processing roller that relatively closes and separates the processing roller and a workpiece rotated around a rotation shaft that is parallel to the roller shaft. A pressing mechanism that can press the outer peripheral surface of the processing roller against the outer peripheral surface of the workpiece, a driving mechanism that relatively moves the processing roller and the workpiece in a direction different from the roller pressing direction, and a target of the processing roller. A pressing load measuring unit that measures the pressing load on the workpiece, and a position correction signal is output to the pressing mechanism based on the load measured by the pressing load measuring unit, in the roller pressing direction of the processing roller and the workpiece. A fine recess processing apparatus comprising a controller for changing a relative position.   The fine recess processing apparatus according to claim 6, wherein the pressing mechanism includes a biasing unit that presses and biases the processing roller against the outer peripheral surface of the workpiece so as to be movable in a direction away from the workpiece.   When the pressing load of the processing roller measured by the pressing load measuring unit reaches a preset load, the drive mechanism is activated simultaneously with the command from the control unit, and the above-mentioned processing roller is pressed. The fine recess processing apparatus according to claim 6 or 7, wherein the processing of the fine shape is started by relatively moving the processing roller and the workpiece in a direction different from the direction.   When the pressing load of the processing roller exceeds the preset upper limit value, the pressing mechanism is actuated by a command from the control unit, and the relative distance in the roller pressing direction between the processing roller and the workpiece is increased. The press mechanism is actuated by a command from the control unit when the pressing load falls below a preset lower limit value, and the relative distance in the roller pressing direction between the processing roller and the workpiece is reduced. The fine recess processing apparatus according to any one of the items.   The drive mechanism is actuated by a command from the control unit, and the processing roller is pressed while moving the processing roller and the workpiece along a pre-programmed linear path in a direction different from the pressing direction of the processing roller. When the load exceeds the preset upper limit value, the pressing mechanism is actuated by a command from the control unit, the relative distance in the roller pressing direction between the processing roller and the workpiece is increased, and the pressing load of the processing roller is increased in advance. The fine recess processing apparatus according to claim 9, wherein when the value falls below a set lower limit value, the pressing mechanism is actuated by a command from the control unit to reduce the relative distance in the roller pressing direction between the processing roller and the workpiece.   The drive mechanism operates in response to a command from the control unit, and the processing roller and workpiece are moved in a direction different from the pressing direction of the processing roller along an arbitrary path, and the pressing load of the processing roller is increased. When the preset upper limit is exceeded, the pressing mechanism is actuated by a command from the control unit, the relative distance in the roller pressing direction between the processing roller and the workpiece is increased, and the pressing load of the processing roller is preset. The fine recess processing apparatus according to claim 9, wherein when the pressure falls below the lower limit value, the pressing mechanism is actuated by a command from the control unit to reduce the relative distance between the processing roller and the workpiece in the roller pressing direction.

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