JP2006005155A - Electronic component mounting equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide electronic component mounting equipment for much more accurately mounting electronic components on a substrate. <P>SOLUTION: In this electronic component mounting device 1, a mounting head 6 connected to an X-axial needle 24 formed so as to be freely moved along an X-axial fixer 25 arranged in a base 70 formed so as to be movable along a first frame 71 is formed so as to be movable along a second frame 72 bridged across the first frame. The mounting head is configured to move along the first frame or the second frame, and the electronic components to be supplied from a component feeder 4 can be mounted on a substrate P. Then, the fixing of one terminal 25c of the X-axial fixer to one base by a chucking mechanism 30 and the support of the terminal 25c movably along the axial direction of the X-axial fixer to one base may be switched, and an other terminal 25d of the X-axial fixer is fixed to the other base. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electronic component mounting apparatus for mounting electronic components on a substrate.

  Conventionally, as an apparatus for mounting electronic components on a substrate, an electronic component in which a plurality of electronic components supplied by a component supply unit are sucked by a suction nozzle provided in a mounting head, transferred to a substrate, mounted, and mounted A mounting apparatus is known (for example, refer to Patent Document 1).

A conventional electronic component mounting apparatus 100 shown in FIG. 9 includes a substrate conveying conveyor 102 provided on an upper surface 101a of a base 101, and a conveyor at a right edge with respect to the conveying direction of the conveyor 102 at an upper surface side edge of the base 101. Two support beams 103 provided so as to straddle 102, two frames 104 spanned between the two support beams 103, and two each attached to the two frames 104 to supply components An electronic component is picked up from the unit 105 and provided with a mounting head 106 and the like for mounting on the substrate.
In addition, the electronic component mounting apparatus 100 includes a plurality of linear motors having a movable portion and a fixed portion as a plurality of moving means for moving the mounting head 106 to an arbitrary position. That is, the frame 104 is fixed in the longitudinal direction of the support beam 103 by the movable portion 107a attached to the lower surface of both ends of the frame 104 and the fixed portion 107b attached to the upper surface in the length direction of the support beam 103 corresponding to the movable portion 107a. It is movable in the (Y-axis direction). Further, the mounting head 106 is mounted in the length direction of the frame 104 (not shown) by a movable portion 108a attached to the mounting head 106 and a fixing portion (not shown) attached to the lower surface in the length direction of the frame 104 corresponding to the movable portion 108a. It can be moved in the X-axis direction).
Therefore, by programming the operations of the plurality of mounting heads 106 in advance, it is possible to mount and mount the electronic component at an arbitrary position on the substrate that is conveyed to the electronic component mounting apparatus 100 by the conveyor 102 and positioned. It is like that.
Japanese Patent Laid-Open No. 5-41596

However, in the case of Patent Document 1, when the linear motor attached to the frame 104 generates heat due to its operation, the frame 104 and the like are thermally expanded by the heat. In particular, when the frame 104 and the slider or linear motor are made of different materials, the frame 104 or the like may be bent due to a difference in thermal expansion coefficient between these different members.
If the frame 104 is bent and deformed, an error occurs with respect to the position of the mounting head 106 provided in the frame 104, and the mounting head 106 cannot pick up an electronic component from the component supply unit 105, or the board. There may be a problem that the mounting accuracy of the electronic component on the top is deteriorated.

  It is an object of the present invention to mount an electronic component on a board more reliably by the electronic component mounting apparatus.

  In order to solve the above-described problems, the invention described in claim 1 is a pair of first frames, a base portion provided to be movable along the first frame, and a base portion disposed on the base portion. A second frame that is disposed on the base portion and spans the first frame, a mover of the linear motor that is movably provided along the stator, and a mover connected to the mover. A mounting head that is movably provided along the second frame, wherein the mounting head holds the electronic component supplied by the component supply unit and also mounts the electronic component on a substrate. Fixing one end portion of the stator disposed on one base portion to the one base portion, and fixing the one end portion to the one base portion in the axial direction of the stator. Move And be supported ability provided with a stator supporting means capable of switching the other end of the stator is characterized in that it is fixed to the other of the base portion.

  According to the first aspect of the present invention, in the electronic component mounting apparatus, the mounting head is provided movably along the stator of the linear motor disposed on the base portion movably provided along the first frame. Connected to the mover of the linear motor. The mounting head is movably provided so as to be guided along a second frame disposed on the base portion and spanned by the first frame in accordance with the operation of the linear motor. As described above, the mounting head can move along the first frame and the second frame so as to hold the electronic component supplied by the component supply unit and to mount the electronic component on the substrate. It has become.

And the one end part of the stator is fixed to one base part by the stator support means, and the one end part is supported to be movable in the axial direction of the stator with respect to the one base part. The other end portion of the stator is fixed to the other base portion.
In other words, in an electronic component mounting device, even if the stator is heated and thermally expanded due to heat generated by the operation of the linear motor, the stator support means is fixed even if the length of the stator changes. By opening the one end of the stator so as to release it, and allowing the one end of the stator to move, the length change that occurs in the stator is released, and the distortion and deflection that occur in the stator are eliminated. Can be resolved. Then, one end of the stator can be fixed again.

In this way, by eliminating the distortion and bending that occur in the stator, errors related to the position of the mounting head connected to the mover supported by the stator are less likely to occur. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.
Therefore, the electronic component mounting apparatus can more reliably mount the electronic component on the substrate.

  According to a second aspect of the present invention, there is provided the electronic component mounting apparatus according to the first aspect, wherein the strain detecting means for detecting the strain of the stator and the strain detecting means detect the predetermined strain based on the detection of the predetermined strain. The means is provided with a strain support switching control means for operating the stator support means so that the one end part of the stator is released and movable, and the one end part is fixed again. To do.

According to the second aspect of the present invention, the electronic component mounting apparatus has the strain detecting means for detecting the strain of the stator. Based on the detection of the predetermined strain, the strain support switching control means operates the stator support means to release the fixed one end of the stator so that it can be moved, and to fix the one end again. You can fix it.
In other words, when the strain detection means detects the distortion of the stator due to the distortion or deflection of the stator, the strain support switching control means operates the stator support means, so that one end of the stator is Opening to release the fixing, and allowing one end of the stator to move so as to release the length change generated in the stator, eliminating the distortion and flexure generated in the stator, and again One end of the stator can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

  According to a third aspect of the present invention, in the electronic component mounting apparatus according to the first or second aspect, the temperature detection means for detecting the temperature of the stator and the temperature detection means are fixed based on detection of the predetermined temperature. And a temperature support switching control means for operating the stator support means so that the child support means can release and move the one end portion of the stator and fix the one end portion again. It is characterized by.

According to the third aspect of the present invention, the electronic component mounting apparatus has the temperature detecting means for detecting the temperature of the stator, while having the same effect as that of the first or second aspect of the invention. Based on the detection of the predetermined temperature by the detection means, the temperature support switching control means operates the stator support means to release and move the one end of the stator and to move the one end again. Can be fixed again.
That is, the stator may be distorted or bent when the stator is heated and thermally expanded, or when the stator is cooled and thermally contracted. When the temperature detection means detects a temperature change that causes distortion or bending of the stator and distortion, the temperature support switching control means operates the stator support means to fix one end of the stator. By releasing it so that one end of the stator can be moved, it is possible to release the length change that occurred in the stator, thereby eliminating the distortion and bending that occur in the stator, and fixing it again. One end of the child can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

  According to a fourth aspect of the present invention, in the electronic component mounting apparatus according to any one of the first to third aspects, an operation counting means for counting at least one of a time and a number of times the electronic component mounting apparatus operates, and an operation count The stator support means that the stator support means releases and fixes the one end of the stator based on counting a predetermined time or number of times, and allows the one end to be fixed again. And a timing support switching control means for operating the means.

According to the invention described in claim 4, the electronic component mounting apparatus performs at least the time and the number of times the electronic component mounting apparatus operates while performing the same operation as that of the invention described in any one of claims 1 to 3. Since the operation counting means for counting one side is provided, the timing support switching control means operates the stator support means based on the fact that the operation counting means has counted a predetermined time or number of times, and one end of the stator Can be released and can be moved, and one end thereof can be fixed again.
That is, when the electronic component mounting apparatus operates for a long time or continuously, the stator may be heated and thermally expanded by frictional heat or the like. Then, the stator may be warped or bent due to thermal expansion of the stator. When the operation counting means counts the operation time and the number of operations in which the stator is distorted or bent and distortion occurs, the timing support switching control means operates the stator support means, so that one end of the stator And releasing one end of the stator so as to release the length change generated in the stator, thereby eliminating the distortion and deflection generated in the stator, One end of the stator can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

According to the first aspect of the present invention, the one end portion of the stator of the electronic component mounting apparatus is fixed to one base portion by the stator support means, and the one end portion is fixed to the one base portion. The other end portion of the stator is fixed to the other base portion. The other end portion of the stator is fixed to the other base portion. In other words, in an electronic component mounting device, even if the stator is heated and thermally expanded due to heat generated by the operation of the linear motor, the stator support means is fixed even if the length of the stator changes. By opening the one end of the stator so as to release it, and allowing the one end of the stator to move, the length change that occurs in the stator is released, and the distortion and deflection that occur in the stator are eliminated. Can be resolved. Then, one end of the stator can be fixed again.
In this way, by eliminating the distortion and bending that occur in the stator, errors related to the position of the mounting head connected to the mover supported by the stator are less likely to occur. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.
Therefore, the electronic component mounting apparatus can more reliably mount the electronic component on the substrate.

According to the invention described in claim 2, since the electronic component mounting apparatus includes the strain detection means for detecting the strain of the stator, the strain support switching is performed based on the fact that the strain detection means detects the predetermined strain. The control means operates the stator support means to release and fix the one end of the stator, and to fix the one end again. In other words, when the strain detection means detects the distortion of the stator due to the distortion or deflection of the stator, the strain support switching control means operates the stator support means, so that one end of the stator is Opening to release the fixing, and allowing one end of the stator to move so as to release the length change generated in the stator, eliminating the distortion and flexure generated in the stator, and again One end of the stator can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

According to the invention described in claim 3, since the electronic component mounting apparatus includes the temperature detection means for detecting the temperature of the stator, the temperature support switching is performed based on the fact that the temperature detection means detects the predetermined temperature. The control means operates the stator support means to release and fix the one end of the stator, and to fix the one end again. That is, the stator may be distorted or bent when the stator is heated and thermally expanded, or when the stator is cooled and thermally contracted. When the temperature detection means detects a temperature change that causes distortion or bending of the stator and distortion, the temperature support switching control means operates the stator support means to fix one end of the stator. By releasing it so that one end of the stator can be moved, it is possible to release the length change that occurred in the stator, thereby eliminating the distortion and bending that occur in the stator, and fixing it again. One end of the child can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

According to the invention of claim 4, since the electronic component mounting apparatus includes the operation counting means for counting at least one of the time and the number of times the electronic component mounting apparatus operates, the operation counting means has a predetermined time or number of times. The timing support switching control means operates the stator support means based on the count of the stator to release the fixed one end of the stator so that it can be moved and to fix the one end again. . That is, when the electronic component mounting apparatus operates for a long time or continuously, the stator may be heated and thermally expanded by frictional heat or the like. Then, the stator may be warped or bent due to thermal expansion of the stator. When the operation counting means counts the operation time and the number of operations in which the stator is distorted or bent and distortion occurs, the timing support switching control means operates the stator support means, so that one end of the stator And releasing one end of the stator so as to release the length change generated in the stator, thereby eliminating the distortion and deflection generated in the stator, One end of the stator can be fixed again.
Therefore, by suitably eliminating the distortion and bending that occur in the stator, it becomes difficult for errors related to the position of the mounting head connected to the mover supported by the stator to occur, so the mounting head is electronically transmitted from the component supply unit. It is possible to improve accuracy when holding the component or mounting the electronic component on the substrate.

Hereinafter, embodiments of the present invention will be described in detail.
The electronic component mounting apparatus according to the present invention is an apparatus for mounting and mounting an electronic component supplied by a component supply unit (electronic component feeder) at a predetermined position on a substrate.
Here, in the electronic component mounting apparatus, the direction in which the substrate P is conveyed from the previous process to the subsequent process is defined as the X-axis direction, and one direction orthogonal thereto is defined as the Y-axis direction, and both the X-axis direction and the Y-axis direction. The direction orthogonal to is defined as the Z-axis direction.

(Embodiment 1)
FIG. 1 is a front view of the electronic component mounting apparatus 1, FIG. 2 is a right side view of the electronic component mounting apparatus 1, and FIG. 3 is a plan view of the electronic component mounting apparatus 1. 4 is a partially omitted sectional view taken along line IV-IV in FIG. FIG. 5 is a block diagram showing a main configuration of the electronic component mounting apparatus 1.

  As shown in FIGS. 1 to 5, the electronic component mounting apparatus 1 conveys the base 2 on which each component is placed on the upper surface and the substrate P from the previous process to the subsequent process along the X-axis direction. Board conveying means 3 for carrying out, a component supplying part 4 for supplying electronic components (not shown), a mounting head 6 for mounting the electronic components supplied by the component supplying part 4 on the substrate P, and the mounting head 6 as X, Y It has a head moving means 7 that moves in each direction of the shaft, a control unit 9 that controls the operation of each of the above parts, and the like.

The substrate transport means 3 includes a transport belt (not shown), and transports the substrate P along the X-axis direction from the pre-process side to the post-process side.
Moreover, since the board | substrate conveyance means 3 mounts an electronic component on the board | substrate P with the mounting head 6, it stops conveyance of the board | substrate P in a predetermined component mounting position, and also supports the board | substrate P. FIG.

  The component supply unit 4 includes a plurality of electronic component feeders that convey electronic components arranged in a feeder bank on the upper surface of the base 2, and is provided in a feeder accommodating unit on the side of the substrate conveying unit 3. ing.

The mounting head 6 is provided on the X-axis frame 72 via a head base 23 described later, and has a predetermined number of suction nozzles (not shown) protruding downward (Z-axis direction). The suction nozzle is detachably provided so that it can be replaced according to the size and shape of the electronic component to be sucked and held.
The suction nozzle (not shown) is connected to, for example, an air suction means (not shown), and by passing vacuum air through a not-shown through hole formed in the suction nozzle, an electron is applied to the tip portion which is the lower end of the suction nozzle. It is possible to suck and hold parts. Further, the air suction means is provided with an electromagnetic valve (not shown), and the ventilation of the vacuum air can be switched by the electromagnetic valve, and the air suction means is switched between the air suction state and the air release state. In other words, vacuum air is passed through the through-hole when it is in the air suction state, and electronic parts can be sucked, and when it is open to the atmosphere, the inside of the through-hole of the suction nozzle is in the atmospheric pressure state, and suction of the sucked electronic parts is released To do.

The mounting head 6 includes a Z-axis moving unit (not shown) that moves a suction nozzle (not shown) in the Z-axis direction, and a Z-axis rotation unit (not shown) that rotates the suction nozzle (not shown) about the Z axis. And.
The Z-axis moving means (not shown) is provided on the mounting head 6 and moves the suction nozzle in the Z-axis direction. The suction nozzle moves in the Z-axis direction via this Z-axis movement means. The mounting head 6 is freely provided. As the Z-axis moving means, for example, a combination of a servo motor and a belt, a combination of a servo motor and a ball screw, or the like can be applied.
The Z-axis rotating means (not shown) is a rotation driving means that is provided on the mounting head 6 and rotates the suction nozzle. The suction nozzle can freely rotate about the Z axis through the Z-axis rotating means. The mounting head 6 is provided. The Z-axis rotating means includes, for example, an angle adjustment motor and an encoder that detects the rotation angle amount of the angle adjustment motor.

  The configuration and operation of the suction nozzle (not shown) in the mounting head 6 are the same as those conventionally known and will not be described in detail here.

  As shown in FIGS. 1 to 3, the head moving means 7 includes an X-axis moving means 7a for moving the mounting head 6 in the X-axis direction, and a Y-axis moving means 7b for moving the mounting head 6 in the Y-axis direction. , Is configured.

  As shown in FIGS. 1 to 3, the X-axis moving unit 7 a is arranged on the substrate transfer path of the substrate transfer unit 3 in the base 2 in a direction (Y-axis direction) perpendicular to the transfer direction (X-axis direction) of the substrate P. ) Provided on base portions 70 and 70 supported by Y-axis frames 71 and 71 as a pair of first frames provided so as to straddle the Y-axis frames 71 and 71. An X-axis frame 72 as a second frame extending in the X-axis direction, a pair of X-axis guides 21 and 21 provided in the X-axis frame 72 and extending in the X-axis direction, and the X-axis guide 21 along the X-axis guide 21 A pair of X-axis guide sliders 22, 22 provided to be slidable in the axial direction, a head base 23 disposed on the X-axis guide slider 22 to support the mounting head 6, and a linear motor provided to the head base 23. X-axis mover 24 Is constituted by X-axis frame 72 in parallel with X-axis stator 25 of the linear motor provided such as is provided in the base portion 70 is passed over to the Y-axis frame 71, 71.

As shown in FIGS. 1 to 3, the X-axis frame 72 is a beam-like member having a substantially U-shaped cross-sectional view, and both ends (72c, 72d) of the X-axis frame 72 are bases via the X-axis frame support 72a. It is fixed to the part 70.
One end 72c of the X-axis frame 72 is supported by one X-axis frame support 72a via a linear guide 73, and the other end 72d of the X-axis frame 72 is supported by the other X-axis frame support 72a. It is fixed.
The linear guide 73 includes a linear block (not shown) provided on the X-axis frame 72 side and a linear rail (not shown) provided on the X-axis frame support 72a side. The linear block (not shown) is a linear rail (not shown). (Not shown) is movable in the longitudinal direction (X-axis direction) of the X-axis frame 72. When the length in the longitudinal direction changes due to thermal expansion or contraction of the X-axis frame 72, the X-axis frame 72 moves on the one end 72c side. In other words, the length change generated in the X-axis frame 72 is released, and the X-axis frame 72 is prevented from being distorted or bent.

As shown in FIGS. 1 to 3, the X-axis guide 21 extends in the X-axis direction along protrusions 72 b and 72 b that protrude in the Y-axis direction on the upper end side and the lower end side of the X-axis frame 72. It is equipped as such.
The X-axis guide slider 22 is provided to be engaged with the X-axis guide 21 so as to be slidable in the X-axis direction along the X-axis guide 21.
The head base 23 is provided on the X-axis guide slider 22 and is movable in the X-axis direction. The head base 23 is provided with a mounting head 6, and the mounting head 6 can move in the X-axis direction.

As shown in FIGS. 1 and 3, the X-axis frame 72 is provided with a strain gauge 50 as strain detection means.
The strain gauge 50 is a detection member that detects the strain of the X-axis frame 72. The strain gauge 50 detects, for example, distortion caused by distortion or deflection generated in the X-axis frame 72 due to thermal expansion or contraction of the X-axis frame 72 and outputs the detected strain to the control unit 9.

As shown in FIGS. 1 to 3, the X-axis stator 25 that is a stator of the linear motor is a shaft-like member extending in the X-axis direction, and both end portions (25c, 25d) are fixed to the X-axis. It arrange | positions at the base part 70 via the child support stand 25a.
One end portion 25c of the X-axis stator 25 is supported by one X-axis stator support base 25a so as to be movable in the axial direction (X-axis direction, longitudinal direction) of the X-axis stator 25, and the X-axis stator. The support base 25 a is fixed to the base portion 70.
The other end portion 25 d of the X-axis stator 25 is fixed to the other X-axis stator support base 25 a, and the X-axis stator support base 25 a is fixed to the base portion 70. That is, the other end portion 25d of the X-axis stator 25 is fixed to the base portion 70 via the X-axis stator support base 25a.

Further, one end portion 25c of the X-axis stator 25 is supported by a chucking mechanism portion 30 as a stator support means on the outer side with respect to one X-axis stator support base 25a.
The chucking mechanism portion 30 is provided on a pedestal portion 31 provided on the X-axis stator support base 25a so that the holding portion 30a of the chucking mechanism portion 30 holds the one end portion 25c of the X-axis stator 25. I support it.
The clamping part 30a of the chucking mechanism part 30 switches between clamping and releasing the one end part 25c of the X axis stator 25, whereby the one end part 25c of the X axis stator 25 is connected to the base part 70. It is possible to switch between fixing to the base portion 70 and supporting the base portion 70 so as to be movable in the axial direction of the X-axis stator 25.

Specifically, as shown in FIG. 4, one end portion 25 c of the X-axis stator 25 is supported by a ball bush 26 provided on one X-axis stator support base 25 a, and It can move in the axial direction.
Then, the one end portion 25c of the X-axis stator 25 is clamped and fixed by the clamping portion 30a of the chucking mechanism section 30, so that the one end portion 25c is connected to the base portion 70 via the X-axis stator support base 25a. Fixed against.
Further, the one end portion 25 c of the X-axis stator 25 is opened so as to release the fixation by the clamping portion 30 a of the chucking mechanism portion 30, so that the one end portion 25 c is relative to the base portion 70. 25 is supported so as to be movable in the axial direction.
When the length of the X-axis stator 25 changes in the longitudinal direction due to thermal expansion or contraction, the clamping portion 30a of the chucking mechanism portion 30 is connected to one end of the X-axis stator 25. 25c is released so as to release the fixing, and one end portion 25c (X-axis stator 25) is made movable so that the length change generated in the X-axis stator 25 is released and the X-axis fixed. The child 25 is prevented from being distorted or bent. And the one end part 25c of the X-axis stator 25 can be fixed with respect to the base part 70 by clamping the one end part 25c again.
In addition, since the pinching part 30a of the chucking mechanism part 30 can apply a conventionally well-known technique as an operation mechanism for pinching or opening the one end part 25c of the X-axis stator 25, It is not detailed here.

As shown in FIGS. 1 and 3, the X-axis stator 25 is provided with a strain gauge 50 as strain detecting means.
The strain gauge 50 is a detection member that detects the strain of the X-axis stator 25. The strain gauge 50 detects, for example, distortion due to distortion or deflection generated in the X-axis stator 25 due to thermal expansion or contraction of the X-axis stator 25 and outputs the detected strain to the control unit 9.

As shown in FIGS. 1 to 3, the X-axis mover 24 that is a mover of the linear motor is arranged so that the X-axis stator 25 penetrates a through hole (not shown) of the X-axis mover 24. The X-axis mover 24 is movably provided so as to slide along the X-axis stator 25.
The X-axis movable element 24 is connected to the head base 23 so as to be separated via a spacer S. That is, the mounting head 6 provided in the head base 23, the X-axis guide slider 22, the X-axis guide 21, the X-axis frame 72, and the like are connected to the X-axis movable element 24 so as to be separated by the spacer S. .
The spacer S is preferably a substance having a low thermal conductivity. Furthermore, it is preferable that the substance has a buffering ability capable of absorbing vibration and impact.

Here, the X-axis movable element 24 of the linear motor and the X-axis stator 25 of the linear motor will be described.
As shown in FIG. 6, a plurality of X-axis stators 25 are arranged so that the same poles of the permanent magnets M are opposed to each other, and the periphery thereof is a shaft covered with an outer cylinder Y that is a nonmagnetic material. is there.
The X-axis mover 24 is a slider arranged so that the three-phase coil C circulates around the X-axis stator 25 that is a shaft.
That is, this linear motor is a drive motor called a shaft motor.
For example, a plurality of cylindrical permanent magnets M having a length (height) of about 60 mm to 120 mm, one end face being an N pole and the other end face being an S pole are prepared. The S poles are arranged so that they face each other. Each magnet is repelled but forced into a single bar shape. By covering it with the outer cylinder Y and forming it as a shaft, the X-axis stator 25 of the linear motor is formed. In this shaft, magnetic lines of force emerge from the part where the N and N poles face each other, and go to the part where the S and S poles face each other.
An X-axis movable element 24 that is a slider is disposed so as to surround the outer peripheral surface of the X-axis stator 25 that is the shaft. The X-axis mover 24 is provided with a guide or the like (for example, the X-axis guide 21, the X-axis guide slider 22 or the like), and an X-axis stator 25 (shaft) and an X-axis mover 24 (slider) are provided. It is preferable to arrange so as not to contact.
In the X-axis movable element 24, about one to four sets of three-phase coils C are arranged in the axial direction of the shaft in the direction in which the coil is wound around the X-axis stator 25 (shaft). The length of each coil (the axial length of the shaft) is the same as the pitch of the shaft magnets, that is, 60 mm to 120 mm. One coil crosses the magnetic flux generated from either the N pole or the S pole. When a current is passed through this, a shaft motor that operates as a synchronous motor is obtained.

By operating this linear motor, the X-axis movable element 24 moves along the X-axis stator 25 so as to slide in the X-axis direction. The head base 23 connected to the X-axis movable element 24 moves in the X-axis direction so that the X-axis guide slider 22 is guided along the X-axis frame 72 so that the X-axis guide slider 22 moves along the X-axis guide 21. To do.
In other words, the mounting head 6 connected via the head base 23 moves in the X-axis direction along the X-axis frame 72 by the operation of the linear motor (X-axis movable element 24, X-axis stator 25). It is free to move.

  As described above, the linear motor of the electronic component mounting apparatus 1 according to the present invention is provided with a plurality of magnets so that the same poles of the magnets face each other, and a shaft whose periphery is covered with an outer cylinder that is a nonmagnetic material is used as a stator. Since the shaft motor uses a slider arranged so that a three-phase coil circulates around the shaft as a mover, the configuration of the linear motor can be simplified and the assemblability can be improved. . Moreover, the smooth operation in the electronic component mounting apparatus 1 can be enabled.

  As shown in FIGS. 1 to 3, the Y-axis moving unit 7 b is arranged on the substrate transport path of the substrate transport unit 3 in the base 2 in a direction (Y-axis direction) perpendicular to the transport direction (X-axis direction) of the substrate P. Y-axis frames 71 and 71 as a pair of first frames provided so as to straddle), a Y-axis guide 11 provided in each Y-axis frame 71 and extending in the Y-axis direction, and a Y-axis guide 11 A Y-axis guide slider 12 slidably provided in the Y-axis direction along the Y-axis guide slider 12, a base part 70 disposed on the Y-axis guide slider 12 and supported by the Y-axis frame 71, and a linear part provided in the base part 70. The motor includes a Y-axis movable element 14 of the motor, a Y-axis stator 15 of a linear motor that is provided on each Y-axis frame 71 and extends in the Y-axis direction, and the like.

1-3, the Y-axis frame 71 is a guide member disposed on the base 2 so as to extend in the Y-axis direction, and the Y-axis frames 71 are parallel to each other. Is arranged.
The Y-axis guide 11 is provided on the upper surface of the Y-axis frame 71 so as to extend in the Y-axis direction, as shown in FIGS.
The Y-axis guide slider 12 is provided to be engaged with the Y-axis guide 11 so as to be slidable in the Y-axis direction along the Y-axis guide 11.
The base portion 70 is provided in the Y-axis guide slider 12 and is movable in the Y-axis direction. Mounted on this base portion 70 via an X-axis moving means 7a (X-axis frame 72, X-axis guide 21, X-axis guide slider 22, head base 23, X-axis movable element 24, X-axis stator 25, etc.). A head 6 is provided, and the mounting head 6 is movable in the Y-axis direction.

1 to 3, the Y-axis stator 15 is a shaft-like member extending in the Y-axis direction, and both ends thereof are connected to the Y-axis frame 71 via the Y-axis stator support base 15a. It is fixed.
As shown in FIGS. 1 to 3, the Y-axis mover 14 is disposed so that the Y-axis stator 15 passes through a through hole (not shown) of the Y-axis mover 14. 14 is movably provided so as to slide along the Y-axis stator 15.
Further, the Y-axis movable element 14 is connected to the base portion 70 so as to be separated via the spacer S. That is, the X-axis frame 72 and the like of the X-axis moving means 7 a provided in the base unit 70 are connected to the Y-axis movable element 14 so as to be separated from each other via the spacer S.
The spacer S is preferably a substance having a low thermal conductivity. Furthermore, it is preferable that the substance has a buffering ability capable of absorbing vibration and impact.

Since the Y-axis movable element 14 of the linear motor and the Y-axis stator 15 of the linear motor have the same configuration as the X-axis movable element 24 of the linear motor and the X-axis stator 25 of the linear motor, respectively. Omitted.
As the linear motor operates, the Y-axis movable element 14 moves along the Y-axis stator 15 so as to slide in the Y-axis direction. The base unit 70 connected to the Y-axis movable element 24 moves in the Y-axis direction so that the Y-axis guide slider 12 is guided along the Y-axis frame 71 so that the Y-axis guide slider 12 moves along the Y-axis guide 11. To do.
In other words, the mounting head 6 connected via the X-axis frame 72 and the like disposed on the base portion 70 is operated by the linear motor (the Y-axis movable element 14 and the Y-axis stator 15). It is movable along the axis frame 71 in the Y-axis direction.

  The mounting head 6 is moved in the X-axis direction and the Y-axis direction by the head moving means 7 (X-axis moving means 7a, axis-moving means 7b), and electronic components supplied by the component supply unit 4 are transferred to the mounting head. 6 is picked up by a suction nozzle (not shown) and mounted on the board P at the component mounting position in the board transport means 3.

As shown in FIG. 5, the control unit 9 of the electronic component mounting apparatus 1 includes a CPU 9a, a ROM 9b, and a RAM 9c.
The CPU 9a executes various control operations according to the control program for the electronic component mounting apparatus stored in the ROM 9b.
A control program and control data for controlling the electronic component mounting apparatus 1 are written and stored in the ROM 9b. As this control data, for example, data (strain amount data) relating to strain of the X-axis stator 25 and the X-axis frame 72, which is a reference value for determining whether or not to operate the chucking mechanism unit 30, and the electronic component mounting apparatus 1 The time data relating to the time during which the electronic component mounting apparatus 1 operates and the frequency data relating to the number of times the electronic component mounting apparatus 1 operates are stored.
The RAM 9c is provided with various work memories and counters, and is used as a work area when the CPU 9a executes the control program.

And the control part 9 is a chucking mechanism based on having detected the distortion | strain of the X-axis stator 25 and the X-axis flame | frame 72 that the strain gauge 50 exceeds predetermined reference value as a support switching control means for distortion | strains. The part 30 releases the fixation of the one end 25c of the X-axis stator 25 so as to be movable, and controls the operation of the chucking mechanism 30 so as to fix the one end 25c again.
That is, for example, when the X-axis stator 25 is thermally expanded by being heated in accordance with the operation of the linear motor, and the X-axis stator 25 is distorted or bent, the strain due to the distortion or the bending is strain gauge. Based on the detection by 50, the clamping part 30a of the chucking mechanism part 30 is opened so as to release the fixing of the one end part 25c of the X-axis stator 25, and the one end part 25c (X-axis stator 25) is opened. By making it movable, the length change (distortion or deflection) generated in the X-axis stator 25 is released, and the distortion or deflection of the X-axis stator 25 is eliminated. And the one end part 25c of the X-axis stator 25 is fixed with respect to the base part 70 by clamping the one end part 25c again.
Such distortion and deflection of the X-axis stator 25 are more likely to occur as the difference between the thermal expansion coefficient of the material constituting the X-axis stator 25 and the thermal expansion coefficient of the material constituting the X-axis frame 72 is larger. . In addition, distortion and bending of the X-axis stator 25 that occur when the X-axis stator 25 cools down due to cooling or the like can be similarly eliminated.
The control unit 9 as the strain support switching control means operates the chucking mechanism unit 30 based on the difference between the strain of the X-axis stator 25 detected by the strain gauge 50 and the strain of the X-axis frame 72. Alternatively, the chucking mechanism unit 30 may be operated based only on the strain of the X-axis stator 25 detected by the strain gauge 50.

Moreover, the control part 9 performs control which counts the time which the electronic component mounting apparatus 1 operate | moves, and the frequency | count that the electronic component mounting apparatus 1 operate | moves as an operation | movement count means.
Then, the control unit 9 serves as the timing support switching control unit, based on the fact that the control unit 9 as the operation counting unit has counted a time (for example, 1 hour) that exceeds a predetermined reference value. The part 30 releases the fixation of the one end 25c of the X-axis stator 25 so as to be movable, and controls the operation of the chucking mechanism 30 so as to fix the one end 25c again.
Further, the control unit 9 serves as a timing support switching control unit, and the number of times that the control unit 9 as an operation counting unit exceeds a predetermined reference value (for example, 100 operations as a mounting operation for 100 substrates) , The chucking mechanism 30 releases the fixed end portion 25c of the X-axis stator 25 and allows the X-axis stator 25 to move. Control to operate the chucking mechanism unit 30 is performed so as to fix 25c again.
That is, the control unit 9 as the timing support switching control unit periodically fixes the one end portion 25c of the X-axis stator 25 by the chucking mechanism unit 30 at predetermined time intervals at which the electronic component mounting apparatus 1 operates. The chucking mechanism 30 is controlled so as to be released and movable, and to fix the one end 25c again.
This is because, as the electronic component mounting apparatus 1 operates for a predetermined time, the X-axis stator 25 is heated and thermally expanded due to the operation of the linear motor for that time, which may cause distortion or deflection. The strain gauge 50 is not limited to detecting the strain of the X-axis stator 25 and the X-axis frame 72 that exceeds a predetermined reference value, but the length change (distortion) periodically generated in the X-axis stator 25 is not limited. And the distortion of the X-axis stator 25 is eliminated.

The control unit 9 as the strain support switching control unit and the control unit 9 as the timing support switching control unit can be moved by the chucking mechanism unit 30 releasing the fixation of the one end portion 25c of the X-axis stator 25. In addition, the timing at which the chucking mechanism 30 is operated so as to fix the one end portion 25c again is temporarily stopped by the electronic component mounting apparatus 1 or the mounting head 6 or the head moving means 7 is operated. In particular, it is preferable that the X-axis movable element 24 be stationary with respect to the X-axis stator 25.
At the timing when the mounting head 6 and the head moving means 7 are operating or the X-axis movable element 24 is moved along the X-axis stator 25, the chucking mechanism 30 is one end of the X-axis stator 25. When the fixing of 25c is released, the inertial force accompanying the operation of the mounting head 6 and the head moving means 7 and the inertial force accompanying the movement of the X-axis movable element 24 are acting on the X-axis stator 25. This is because the length change generated in the X-axis stator 25 cannot be suitably released, and the distortion and the deflection of the X-axis stator 25 may not be eliminated.

Thus, in the electronic component mounting apparatus 1 according to the present invention, the X-axis stator 25 may be heated and thermally expanded due to heat generated by the operation of the linear motor, and the X-axis stator 25 may be distorted or bent. However, the clamping part 30a of the chucking mechanism part 30 is opened so as to release the fixing of the one end part 25c of the X-axis stator 25, and the one end part 25c (X-axis stator 25) can be moved. Thus, the length change (distortion or deflection) generated in the X-axis stator 25 can be released, and the distortion or deflection of the X-axis stator 25 can be eliminated.
Accordingly, an error related to the position of the mounting head 6 connected to the X-axis movable element 24 supported by the X-axis stator 25 is less likely to occur, so that the mounting head 6 (a suction nozzle (not shown)) is electronically transmitted from the component supply unit 4. The accuracy when picking up components or mounting electronic components on the substrate P can be improved.
Therefore, the electronic component mounting apparatus 1 can more reliably mount the electronic component on the board P.

Further, in the X-axis moving means 7a of the electronic component mounting apparatus 1, both ends of the X-axis stator 25 of the linear motor are fixed to the base portion 70 via the X-axis stator support base 25a. Further, both ends of the X-axis frame 72 are fixed to the base portion 70 via the X-axis frame support 72a. The X-axis frame 72 is provided with the X-axis guide 21, the X-axis guide slider 22, the head base 23, the X-axis movable element 24, and the mounting head 6 so as to be integrated.
That is, the load of the X-axis stator 25 of the linear motor is applied to the base portion 70, and the load of the X-axis stator 25 is not applied to the X-axis frame 72. Since the load of the X-axis stator 25 is not applied to the X-axis frame 72, the load applied to the X-axis frame 72 is reduced accordingly. (The X-axis frame 72 supports the loads of the X-axis guide 21, the X-axis guide slider 22, the head base 23, the X-axis movable element 24, and the mounting head 6.)
Therefore, in the conventional electronic component mounting apparatus, the X axis of the electronic component mounting apparatus 1 of the present invention is higher than the case where the X axis frame 72 supports both the X axis movable element 24 and the X axis stator 25 of the linear motor. Since the load applied to the frame 72 is small, the amount of deformation that the X-axis frame 72 is bent in the vertical direction (Z-axis direction) is reduced, and deformation of the X-axis frame 72 can be suppressed. Accordingly, since an error related to the position of the mounting head 6 supported by the X-axis frame 72 is less likely to occur, the mounting head 6 (a suction nozzle (not shown)) picks up an electronic component from the component supply unit 4 or electronic on the substrate P. The accuracy when mounting components can be improved. And the electronic component mounting apparatus 1 can mount an electronic component on the board | substrate P more reliably.

Further, when the X-axis mover 24 of the linear motor moves along the X-axis stator 25 in order to move the mounting head 6 in the X-axis direction, the reaction force accompanying the movement of the X-axis mover 24 is changed to the X-axis. Acts on the stator 25. The reaction force that has acted on the X-axis stator 25 is transmitted to the base portion 70 via the X-axis stator support base 25a, and further removed so as to be transmitted to the Y-axis frame 71 side.
That is, the reaction force acting on the X-axis stator 25 is difficult to be transmitted to the X-axis frame 72 side, so that vibration caused by the reaction force is not easily transmitted to the X-axis frame 72.
Therefore, since the vibration of the X-axis stator 25 when the linear motor operates is not easily transmitted to the mounting head 6 via the X-axis frame 72, the position accuracy of the mounting head 6 based on the operation vibration of the linear motor is affected. Can be reduced.

The X-axis movable element 24 of the linear motor is connected to the head base 23 so as to be separated by a spacer S, and an air layer as a heat radiation layer is provided between the X-axis movable element 24 and the head base 23. Therefore, the heat generated in the X-axis movable element 24 due to the operation of the linear motor is not easily transmitted to the head base 23 side. Therefore, the heat generated in the X-axis movable element 24 is not easily transmitted to the X-axis frame 72, and the deformation of the X-axis frame 72 due to thermal expansion can be reduced.
Even if the X-axis frame 72 is deformed due to thermal expansion, the X-axis frame 72 is movably supported by the X-axis frame support 72 a via the linear guide 73. The movement of the X-axis frame 72 can be eliminated by moving so as to release the length change generated in the X-axis frame 72.

In the Y-axis moving unit 7b of the electronic component mounting apparatus 1, both ends of the Y-axis stator 15 of the linear motor are fixed to the Y-axis frame 71 via the Y-axis stator support 15a. Further, both ends of the X-axis frame 72 are fixed to the base portion 70 via the X-axis frame support 72a.
When the Y-axis movable element 14 of the linear motor moves along the Y-axis stator 15 in order to move the mounting head 6 in the Y-axis direction via the base portion 70 and the X-axis frame 72, the Y-axis movable A reaction force accompanying the movement of the child 14 acts on the Y-axis stator 15. The reaction force acting on the Y-axis stator 15 escapes so as to be transmitted to the Y-axis frame 71 via the Y-axis stator support 12a.
That is, the reaction force acting on the Y-axis stator 15 is difficult to be transmitted to the base portion 70 side, so that vibration caused by the reaction force is not easily transmitted to the X-axis frame 72.
Therefore, the vibration when the linear motor (the Y-axis movable element 14 and the Y-axis stator 15) operates is not easily transmitted to the mounting head 6 via the base portion 70 and the X-axis frame 72. The influence on the positional accuracy of the mounting head 6 can be reduced.

  Further, the Y-axis movable element 14 of the linear motor is connected to the base part 70 so as to be separated via the spacer S, and an air layer as a heat radiation layer is provided between the Y-axis movable element 14 and the base part 70. Therefore, the heat generated in the Y-axis movable element 14 due to the operation of the linear motor (the Y-axis movable element 14 and the Y-axis stator 15) is not easily transmitted to the base portion 70 side. Therefore, the heat generated in the Y-axis movable element 14 is difficult to be transmitted to the X-axis frame 72 via the base portion 70, and deformation of the X-axis frame 72 due to thermal expansion can be reduced.

(Embodiment 2)
Next, a second embodiment of the electronic component mounting apparatus according to the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same part as Embodiment 1, and only a different part is demonstrated.
FIG. 7 is a front view of the electronic component mounting apparatus 10, and FIG. 8 is a block diagram showing the main configuration of the electronic component mounting apparatus 10.

As shown in FIGS. 7 and 8, the X-axis frame 72 and the X-axis stator 25 are each provided with a temperature sensor 55 as temperature detecting means.
The temperature sensor 55 is a detection member that detects the temperature of the X-axis frame 72 and the X-axis stator 25. The temperature sensor 55 detects the temperature of the X-axis frame 72 and the X-axis stator 25 that change due to heat generated by the operation of the linear motor, for example, and outputs the detected temperature to the control unit 9.

As shown in FIG. 7, the X-axis stator 25 is a shaft-like member extending in the X-axis direction, and both end portions (25c, 25d) are base portions via the X-axis stator support base 25a. 70.
One end portion 25 c of the X-axis stator 25 is fixed to one X-axis stator support base 25 a, and the X-axis stator support base 25 a is provided on the base portion 70 via the linear guide 60.
The linear guide 60 includes a linear block 60a provided on the X-axis stator support base 25a side and a linear rail 60b provided on the base portion 70 side. The linear block 60a extends along the linear rail 60b along the X The shaft stator 25 is movable in the axial direction (X-axis direction, longitudinal direction). That is, the X-axis stator support base 25 a to which the one end portion 25 c of the X-axis stator 25 is fixed is supported so as to be movable in the axial direction of the X-axis stator 25 with respect to the base portion 70.
The other end portion 25 d of the X-axis stator 25 is fixed to the other X-axis stator support base 25 a, and the X-axis stator support base 25 a is fixed to the base portion 70. That is, the other end portion 25d of the X-axis stator 25 is fixed to the base portion 70 via the X-axis stator support base 25a.

In addition, one X-axis stator support base 25a to which one end portion 25c of the X-axis stator 25 is fixed is supported by a chucking mechanism section 40 as a stator support means.
The chucking mechanism portion 40 is provided on a pedestal portion 41 provided on the base portion 70, and supports the pinching portion 40a of the chucking mechanism portion 40 so as to pinch one X-axis stator support base 25a. Yes.
The pinching portion 40a of the chucking mechanism portion 40 switches between holding and releasing the X-axis stator support base 25a, whereby the one end portion 25c of the X-axis stator 25 is connected to the base portion 70. It is possible to switch between fixing and supporting the base portion 70 so as to be movable in the axial direction of the X-axis stator 25.

Specifically, one end portion 25c of the X-axis stator 25 is fixed to one X-axis stator support base 25a and supported by the base portion 70 via the linear guide 60, and the one end portion 25c thereof. Is movable in the axial direction of the X-axis stator 25 with respect to the base portion 70.
Then, the X-axis stator support base 25a is clamped and fixed by the clamping section 40a of the chucking mechanism section 40, so that one end 25c of the base is interposed between the X-axis stator support base 25a and the linear guide 60. It is fixed with respect to the part 70.
Further, the X-axis stator support base 25a is opened so as to release the fixing by the clamping part 40a of the chucking mechanism part 40, so that one end part 25c of the X-axis stator 25 with respect to the base part 70 is released. It is supported so as to be movable in the axial direction.
When the length in the longitudinal direction changes due to thermal expansion or contraction of the X-axis stator 25, the clamping portion 40a of the chucking mechanism section 40 is connected to the X-axis stator support base 25a. The X-axis stator 25 is opened so as to release the fixation, and the one end 25c (X-axis stator 25) can be moved, so that the length change generated in the X-axis stator 25 is released. It prevents the distortion and bending. And the one end part 25c of the X-axis stator 25 can be fixed with respect to the base part 70 by clamping the X-axis stator support base 25a again.

As shown in FIG. 8, the control unit 9 of the electronic component mounting apparatus 10 includes a CPU 9a, a ROM 9b, and a RAM 9c.
The CPU 9a executes various control operations according to the control program for the electronic component mounting apparatus stored in the ROM 9b.
A control program and control data for controlling the electronic component mounting apparatus 10 are written and stored in the ROM 9b. As this control data, for example, data (temperature data) relating to the temperature of the X-axis stator 25 and the X-axis frame 72, which is a reference value for determining whether or not to operate the chucking mechanism unit 40, and the electronic component mounting apparatus 10 The time data regarding the operating time and the frequency data regarding the number of times the electronic component mounting apparatus 10 operates are stored.
The RAM 9c is provided with various work memories and counters, and is used as a work area when the CPU 9a executes the control program.

And the control part 9 is a chucking mechanism based on the fact that the temperature sensor 55 detects the temperature of the X-axis stator 25 and the X-axis frame 72 that exceed a predetermined reference value as the temperature support switching control means. The portion 40 releases the fixation of the X-axis stator support base 25a that holds the one end portion 25c of the X-axis stator 25 so as to be movable, and re-fixes the X-axis stator support base 25a again. Control for operating the chucking mechanism 40 is performed.
That is, for example, when the X-axis stator 25 generates heat due to the operation of the linear motor, the clamping unit 40a of the chucking mechanism unit 40 detects that the temperature sensor 55 detects the temperature increased due to the generated heat. The shaft stator support base 25a is opened so as to be released, and the one end portion 25c (X axis stator 25) held by the X axis stator support base 25a is movable so that heat is generated due to heat generation. The length change (distortion and deflection) generated in the X-axis stator 25 is expanded and the distortion and the deflection of the X-axis stator 25 are eliminated. Then, the one end portion 25 c of the X-axis stator 25 is fixed to the base portion 70 by sandwiching the X-axis stator support base 25 a again.
Note that the distortion and deflection of the X-axis stator 25 that occur when the X-axis stator 25 cools down due to cooling or the like can be similarly eliminated by detecting the lowered temperature of the X-axis stator 25. Can do.
The control unit 9 as the temperature support switching control means operates the chucking mechanism unit 40 based on the difference between the temperature of the X-axis stator 25 detected by the temperature sensor 55 and the temperature of the X-axis frame 72. Alternatively, the chucking mechanism 40 may be operated based only on the temperature of the X-axis stator 25 detected by the temperature sensor 55.

The control unit 9 as the temperature support switching control means allows the chucking mechanism unit 40 to release the X-axis stator support base 25a and move it, and to fix the X-axis stator support base 25a again. As described above, the timing at which the chucking mechanism unit 40 is operated is a timing at which the electronic component mounting apparatus 1 temporarily stops operating or the mounting head 6 or the head moving unit 7 does not operate. It is preferable that the timing 24 is stationary with respect to the X-axis stator 25.
At the timing when the mounting head 6 and the head moving means 7 are operating or when the X-axis movable element 24 is moved along the X-axis stator 25, the chucking mechanism 40 is attached to the X-axis stator support base 25a. When the fixing is released, the inertial force associated with the operation of the mounting head 6 and the head moving means 7 and the inertial force associated with the movement of the X-axis movable element 24 cause the X-axis stator 25 and the X-axis stator support base 25a. This is because the length change generated in the X-axis stator 25 cannot be suitably released, and the distortion and the deflection of the X-axis stator 25 may not be eliminated.

Thus, in the electronic component mounting apparatus 10 according to the present invention, the X-axis stator 25 may be heated and thermally expanded due to heat generated by the operation of the linear motor, and the X-axis stator 25 may be distorted or bent. However, the clamping part 40a of the chucking mechanism part 40 is opened so as to release the fixation of the X-axis stator support base 25a, and the one end part 25c of the X-axis stator 25 can be moved with respect to the base part 70. By doing so, the length change (distortion and deflection) generated in the X-axis stator 25 can be released, and the distortion and deflection of the X-axis stator 25 can be eliminated.
Accordingly, an error related to the position of the mounting head 6 connected to the X-axis movable element 24 supported by the X-axis stator 25 is less likely to occur, so that the mounting head 6 (a suction nozzle (not shown)) is electronically transmitted from the component supply unit 4. The accuracy when picking up components or mounting electronic components on the substrate P can be improved.
Therefore, the electronic component mounting apparatus 10 can more reliably mount the electronic component on the board P.

In the above embodiment, the configuration in which one X-axis frame is disposed has been described as an example. However, the present invention is not limited to this, and at least one X-axis frame is disposed. Therefore, a configuration including a plurality of X-axis frames may be used.
Further, since at least one mounting head may be provided in the X-axis frame, a configuration in which a plurality of mounting heads are provided in the X-axis frame may be employed.
In other words, the electronic component mounting apparatus may include a plurality of X-axis frames, and each X-axis frame may include a plurality of mounting heads.

  In the above embodiment, the X-axis frame is moved by the Y-axis moving means. However, the X-axis frame is a fixed type in which the X-axis frame does not move. Also, the present invention can be applied.

  In the above embodiment, the pair of Y-axis frames are each provided with a linear motor (Y-axis mover, Y-axis stator), but one Y-axis frame is provided with a linear motor and the other is provided with the other. The Y-axis frame may include a guide and a slider that can follow the movement of the linear motor.

  In addition, it is needless to say that other specific detailed structures can be appropriately changed.

It is a front view which shows the electronic component mounting apparatus which concerns on this invention. It is a side view which shows the electronic component mounting apparatus which concerns on this invention, and is a right view from the arrow II direction of FIG. It is a top view which shows the electronic component mounting apparatus which concerns on this invention. It is sectional drawing in the IV-IV line of FIG. It is a block diagram which shows the principal part structure of the electronic component mounting apparatus which concerns on this invention. It is explanatory drawing which shows the structure of the stator (shaft) and the needle | mover (slider) of a linear motor. It is a front view which shows the electronic component mounting apparatus in Embodiment 2 which concerns on this invention. It is a block diagram which shows the principal part structure of the electronic component mounting apparatus in Embodiment 2 which concerns on this invention. It is a perspective view which shows the conventional electronic component mounting apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 10 Electronic component mounting apparatus 3 Board | substrate conveyance means 4 Component supply part 6 Mounting head 7 Head moving means 7a X-axis moving means 7b Y-axis moving means 9 Control part (Strain support switching control means, Temperature support switching control means, Motion counting means, timing support switching control means)
70 Base 71 Y-axis frame (first frame)
11 Y-axis guide 12 Y-axis guide slider 14 Y-axis movable element 15 Y-axis stator 15a Y-axis stator support 72 X-axis frame (second frame)
72a X-axis frame support base 72b Protruding part 72c One end part 72d Other end part 21 X-axis guide 22 X-axis guide slider 23 Head base 24 X-axis movable element 25 X-axis stator 25a X-axis stator support base 25c One end part 25d Other End 26 Ball bushing 30 Chucking mechanism (stator support means)
30a clamping part 40 chucking mechanism part (stator support means)
40a clamping part 50 strain gauge (strain detection means)
55 Temperature sensor (temperature detection means)
P substrate S spacer M permanent magnet Y outer cylinder C coil

Claims (4)

A pair of first frames;
A base part movably provided along the first frame;
A second frame disposed on the base and spanning the first frame;
A stator of a linear motor disposed on the base portion and stretched over the first frame;
A mover of a linear motor provided movably along the stator;
A mounting head coupled to the movable element and movably provided along the second frame, the mounting head holding the electronic component supplied by a component supply unit, and the electronic component An electronic component mounting apparatus mounted on a substrate,
Fixing one end portion of the stator disposed on one base portion to the one base portion; and fixing the one end portion to the one base portion in the axial direction of the stator. An electronic component mounting apparatus comprising: a stator support means capable of switching between movably supporting and the other end of the stator being fixed to the other base. Strain detecting means for detecting strain of the stator;
Based on the fact that the strain detection means has detected a predetermined strain, the stator support means releases the fixation of one end of the stator and is movable, so that the one end is fixed again, Strain support switching control means for operating the stator support means;
The electronic component mounting apparatus according to claim 1, further comprising: Temperature detecting means for detecting the temperature of the stator;
Based on the fact that the temperature detection means has detected a predetermined temperature, the stator support means releases the fixation of one end of the stator and is movable, so that the one end is fixed again, Temperature support switching control means for operating the stator support means;
The electronic component mounting apparatus according to claim 1, further comprising: Operation counting means for counting at least one of the time and the number of times the electronic component mounting apparatus operates;
Based on the fact that the operation counting means has counted a predetermined time or number of times, the stator support means releases and fixes the one end of the stator, and again fixes the one end. And a timing support switching control means for operating the stator support means;
The electronic component mounting apparatus according to any one of claims 1 to 3, further comprising:

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