JP2005335349A - Inkjet head and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inkjet head capable of removing foreign matter included in an ink from other than a discharge port. <P>SOLUTION: The inkjet head 1 on which orifice plates 4 are stacked on a heater substrate 2, is provided with a common liquid chamber 5, a plurality of flow paths 6 from the common liquid chamber 5 to each discharge port 3, an ink feeding hole 7 into the common liquid chamber 5, an air communicating groove 8, a small communicating path 9 which connects the common liquid chamber 5 and the air communicating groove 8, a check valve 10 which is located in a boundary between the small communicating path 9 and the air communicating groove 8. The check valve 10 is normally closed and opens only by suction from the air communicating groove 8 side. When foreign matter is present inside the flow path 6 or the common liquid chamber 5, thus contaminating the ink, sucking action from the air communicating groove 8 through the use of a recovery device and the like, causes the check valve 10 to open. The ink and the contaminant in the common liquid chamber 5 and the flow path 6 are made to flow into the air communicating groove 8 by means of the small communicating path 9, to be sucked and discharged toward the outside. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ink jet head for forming droplets of recording liquid (ink) used in an ink jet recording system and a method for manufacturing the same.

  The ink jet recording method in which ink droplets are generated and ejected to adhere to a recording medium such as paper for recording is extremely low in noise during recording and can be recorded at high speed. Therefore, the recording system can be easily colored and the recording apparatus can be made compact. As one of the ink jet recording methods, there is a type in which ink is heated and foamed by a heating element, and ink is ejected using the growth of the bubbles.

Along with the recent progress in recording technology, ink jet recording technology is also demanded for higher density and higher accuracy recording. As an ink jet head that satisfies this requirement, for example, in Patent Document 1, an ink flow path pattern is formed on a substrate with a soluble resin by using a photolithography technique, and an epoxy is formed on the patterned soluble resin layer. A method has been proposed in which a resin is coated and cured, and after the substrate is appropriately cut, the soluble resin is eluted and removed.
JP-A-6-286149

  According to the above-described conventional manufacturing method, although an inkjet head capable of high-density and high-precision recording can be obtained, in recent years, there has been a demand for higher recording speed and higher recording quality. As the number of ejection ports of the inkjet head increases, the size of the ejection ports has become extremely small (specifically, the diameter of the ejection port is from about several tens to several tens of micrometers to several micrometers).

  For this reason, if the foreign matter mixed in the ink is clogged in the ejection port during the manufacturing process of the inkjet head or after reaching the user's hand, there is a risk of causing ejection failure. In this case, even if the recovery device provided in the recording apparatus main body is used to suck ink from the discharge port, if the discharge port is smaller than the foreign object, the foreign object cannot be removed or the discharge port is clogged with foreign matter as a result of the suction. It is possible to end up. In order to remove such foreign matter, it has been proposed to form a dummy discharge port having a size larger than that of the discharge port in the vicinity of the discharge port. In this case, the discharge port and the dummy discharge port are simultaneously sucked. As a result, there is a risk that the discharge port may be clogged with foreign matter.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ink jet head capable of removing foreign matters mixed in ink from other than the ejection port and a method for manufacturing the same.

  A feature of the present invention is that, in an inkjet head that ejects ink droplets from an ejection port, a common liquid chamber to which ink is supplied, a flow path extending from the common liquid chamber toward the ejection port, and a common liquid chamber An air communication groove that is open to the atmosphere, and a check valve provided between the common liquid chamber and the air communication groove. The check valve is normally closed and is connected to the air communication groove side. When it receives a suction force, it opens and communicates with the air communication groove and the common liquid chamber. According to this configuration, the foreign matter in the common liquid chamber and the flow path can be removed by suction from the atmosphere communication groove instead of the discharge port. A check valve is provided, and when the operation is stopped or during normal recording, the check valve closes, so there is no risk of ink leakage, etc., and normal operation can be performed and only when sucked from the atmosphere communication groove The check valve opens and foreign matter can be removed.

  According to the present invention, foreign matter in the common liquid chamber and the flow path can be removed by sucking from the air communication groove instead of the discharge port, so that the foreign matter is clogged even if the discharge port is very small. It is possible to suppress the ejection failure. In other words, it is not necessary to consider that foreign matter is clogged in the discharge port or suctioning and removing foreign matter from the discharge port, and a discharge port with a small size can be formed, so that high-definition recording is possible. It is valid.

  In the case of a configuration in which a check valve is provided between the atmosphere communication groove and the common liquid chamber, the user can repeatedly remove foreign matters at an arbitrary timing or periodically, thereby simplifying maintenance.

  On the other hand, when the sealing member is provided between the atmosphere communication groove and the common liquid chamber, an ink leakage accident may occur even if pressure fluctuation or impact is applied to the inkjet head and its surroundings. There is nothing.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

  The inkjet head of the present invention is mounted on an inkjet recording type recording apparatus (printer or the like) (not shown), and performs recording by ejecting ink droplets onto a recording medium and attaching them to the recording medium. It is. The ink jet head described below applies discharge energy to ink in a flow path and discharges the ink from the discharge port to the outside, and the foaming pressure of the ink due to heating is used as the discharge energy. Note that recording (printing) includes not only the formation of meaningful characters, figures, images, and the like, but also the formation of meaningless patterns and designs.

[First Embodiment]
The configuration of the ink jet head according to the first embodiment of the present invention will be described with reference to FIGS.

  In the inkjet head 1 of this embodiment, an orifice plate 4 having a plurality of discharge ports 3 provided corresponding to each heater is provided on a heater substrate 2 provided with a plurality of discharge energy generating elements (heaters) (not shown). It is a laminated structure, and between the heater substrate 2 and the orifice plate 4, a plurality of common liquid chambers 5, each extending from the common liquid chamber 5 toward each discharge port 3, each having a built-in heater. The flow path 6 is configured. The heater substrate 2 is provided with an ink supply hole 7 for supplying ink to the common liquid chamber 5. The orifice plate 4 is provided with an atmospheric communication groove 8. A communication passage 9 having a smaller diameter than the common liquid chamber 5 and the atmospheric communication groove 8 is formed between the heater substrate 2 and the orifice plate 4 to connect the common liquid chamber 5 and the atmospheric communication groove 8. A check valve 10 is provided at a boundary portion between the passage 9 and the atmosphere communication groove 8. The check valve 10 is closed as shown in FIG. 2A during normal operation, that is, when the recording apparatus is stopped or during recording operation, and only when it is sucked from the atmosphere communication groove 8 side. It is the structure opened as shown in (b).

  According to the inkjet head 1, a normal recording operation can be performed in the same manner as a conventional inkjet head. When foreign matter is mixed in the ink and exists in the flow path 6 or the common liquid chamber 5, it is sucked from the atmosphere communication groove 8 by using a recovery device (not shown), and as shown in FIG. As shown, the check valve 10 is opened, and the ink in the common liquid chamber 5 and the flow path 6 flows into the atmosphere communication groove 8 through the communication path 9 and is sucked and discharged outside. At this time, the foreign matter mixed in the ink is also discharged to the outside. As described above, according to the ink jet head 1 of the present embodiment, foreign matter can be discharged from the atmosphere communication groove 8 instead of the discharge port 3, so that it is not necessary to increase the size of the discharge port 3 in order to discharge the foreign matter. Accordingly, the discharge port 3 can be reduced in size (for example, about 5 μm in diameter) so that high-definition recording and a compact recording apparatus can be achieved, and discharge failure due to clogging of the foreign material in the discharge port 3 can be suppressed. Moreover, even if the discharge port 3 is clogged with foreign matter, the clogging can be easily eliminated. Instead of directly connecting the atmosphere communication groove 8 and the common liquid chamber 5, a communication path 9 having a smaller diameter than that of the common liquid chamber and the atmosphere communication groove is provided, and at the boundary between the communication path 9 and the atmosphere communication groove 8. Since the check valve 10 is provided, the check valve 10 can be reduced in size and manufactured easily.

  The manufacturing method of the inkjet head 1 of this embodiment is demonstrated in detail with reference to FIG. First, a sacrificial layer 11 for forming the check valve 10 is formed on the heater substrate 2 on which a plurality of heaters are formed (step 101). The sacrificial layer 11 is formed from a material that is finally chemically removable, such as aluminum. Next, the flow path 6, the common liquid chamber 5, the communication path 9, and the flow path wall layer 12 that becomes a part of the wall of the atmospheric communication groove 8 are formed and patterned into a desired shape using a photolithography technique ( Step 102, see FIG. 4 (a)). Here, one of the actions of the flow path wall layer 12 will be described. In order to reliably shut off the communication path 9 by the check valve 10, the cross-sectional shape is larger than that of the communication path 9 as shown in FIG. 2A (for example, longer in the vertical direction in FIG. 2A). The valve 10 is preferably used, and in order to enable such a configuration, the bottom surface of the communication passage 9 is formed one step higher than the atmosphere communication groove 8 which is the swing range of the check valve 10. Therefore, the flow path wall layer 12 is located at the bottom surface portion of the communication passage 9 and is higher than the bottom surface portion of the air communication hole 8.

  Next, a resist layer 13, which is a solid layer that can be dissolved, is applied to the portions that will eventually become the flow path 6, the common liquid chamber 5, and the communication path 9. The resist layer 13 is a positive resist made of, for example, polymethylisopropenyl ketone, and is patterned into the shape of the flow path 6 and the common liquid chamber 5 using a photolithography technique (see step 103, FIG. 4B). .

  Subsequently, a coating resin layer is formed, and the walls of the flow path 6, the common liquid chamber 5, and the communication path 9, the atmosphere communication groove 8, and the discharge port 3 (see FIG. 1) are formed in the coating resin layer. Thus, the orifice plate 4 is constructed (see step 104, FIG. 4C). The coating resin layer is composed of a negative photosensitive epoxy resin, and may be subjected to silane coupling treatment or the like for improving adhesion. Specifically, the coating resin layer can be applied on the heater substrate 2 on which the pattern of the flow path 6 and the like is formed by a conventionally known coating method, and then patterned by a photolithography technique to form an orifice. Plate 4 can be used.

  Thereafter, ink supply holes 7 are formed in the heater substrate 2 from the back side by an anisotropic etching method, a sand blasting method, an anisotropic plasma etching method, or the like (see step 105, FIG. 4D). Most preferably, the ink supply hole 7 is formed by a chemical silicon anisotropic etching method using tetramethylhydroxyamine (TMAH), NaOH, KOH or the like.

  Subsequently, after performing overall exposure with ultraviolet light (Deep-UV light), development and drying are performed to remove the resist layer 13 (step 106). Finally, the sacrificial layer 11 is removed with an acid to form the check valve 10 (see step 107, FIG. 4E).

  In general, the head component is formed on the heater substrate 2 having a larger area than the desired size of the ink jet head 1 by the above-described process. Therefore, the heater substrate 2 and the laminated body thereon are formed by a dicing saw or the like. Separate and cut to a desired size (step 108). After that, although not shown, an electrical joining member for driving a heater (heating resistor) and an ink supply member are joined to the separated head component (step 109), and the inkjet head 1 is completed.

  In this way, 100 inkjet heads 1 were manufactured, ink was supplied to them, and the foreign matter in the flow path 6 was discharged by suction from the air communication groove 8 instead of the discharge port 3. Thereafter, a recording inspection was performed, and the yield rate was 98%, indicating a good result. Further, when the ink jet head 1 was mounted on a recording apparatus main body (not shown) and recording was performed, about 10,000 sheets could be recorded without causing ejection failure due to foreign matter.

  As described above, according to the present embodiment, by sucking from the atmosphere communication groove 8, it is possible to remove foreign substances from the atmosphere communication groove 8 together with ink before reaching the discharge ports from the common liquid chamber 5. . The atmosphere communication groove 8 and the common liquid chamber 5 are connected to each other through a communication passage 9 having a smaller cross-sectional dimension than those, and a check valve 10 is provided at a boundary portion between the communication passage 9 and the atmosphere communication groove 8. It has been. Therefore, the opening / closing operation by the check valve 10 is facilitated, and the check valve 10 is easily formed. The check valve 10 can be easily formed if it is integrally formed with the orifice plate 4 in which the discharge port 3 is formed. In particular, if the check valve 10 is made of a photosensitive resin, a photolithography technique can be used. And can be easily formed. Further, the check valve 10 preferably includes at least one polyimide resin layer.

  In addition, the method of manufacturing the inkjet head 1 according to the present embodiment includes a step of removing the foreign matter in the common liquid chamber 5 and the flow path 6 together with the ink by suction from the atmosphere communication groove 8 and opening the check valve 10. Is preferred. As a result, a highly reliable ink jet head from which foreign matter has been removed with high probability can be obtained. Further, even after the inkjet head 1 is completed, the foreign matter can be removed together with the ink by suction from the atmosphere communication groove 8 at an appropriate timing using a recovery means (not shown) or the like.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. Since the basic configuration of the ink jet head of this embodiment is the same as that of the first embodiment, description thereof is omitted. A method for manufacturing the ink jet head of this embodiment, which is the main difference from the first embodiment, will be described with reference to FIGS. In addition, about the part similar to 1st Embodiment, the same code | symbol is provided and description is abbreviate | omitted.

  In the present embodiment, a method is adopted in which each member is formed on the heater substrate 2 and the orifice plate 4 and individually completed and then bonded to each other.

  A flow path wall layer 12 made of a negative photosensitive epoxy resin is applied and formed on the heater substrate 2 and patterned into a desired shape by a photolithography technique (see step 102, FIG. 6A). The flow path wall layer 12 may be subjected to a silane coupling treatment or the like to improve adhesion, and can be applied by appropriately selecting a conventionally known coating method such as a spin coating method. It can also be formed by laminating a dry film. Next, the ink supply hole 7 is formed on the heater substrate 2 from the back side by the same method as that of the first embodiment such as anisotropic etching method, sand blasting method, anisotropic plasma etching method (step 105, FIG. 6 (b)). When the heater substrate 2 having a large area is used, the heater substrate 2 and the laminated body thereon are separated and cut into a desired size by a dicing saw or the like (step 108).

  On the other hand, the atmosphere communication groove 8, the check valve 10 and the discharge port 3 are formed on the film 14 made of polyimide resin (see FIG. 6C) by excimer laser processing or the like, and the orifice plate 4 is created (step 110). FIG. 6 (d)).

  The heater substrate 2 and the orifice plate 4 thus completed individually are overlapped and joined to each other (step 111, see FIG. 6E), and a heater (heating resistor) is driven (not shown). For this reason, the ink-jet head 1 similar to that of the first embodiment is completed by joining the electrical joining member and the ink supply member (step 109).

  In this way, 100 inkjet heads 1 were manufactured, ink was supplied to them, and the foreign matter in the flow path 6 was discharged by suction from the air communication groove 8 instead of the discharge port 3. Thereafter, a recording inspection was performed, and the yield rate was 96%, indicating a good result. Further, when the ink jet head 1 was mounted on a recording apparatus main body (not shown) and recording was performed, about 10,000 sheets could be recorded without causing ejection failure due to foreign matter. Also in this embodiment, substantially the same effect as in the first embodiment can be obtained.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. Since the basic configuration of the ink jet head of this embodiment is the same as that of the first and second embodiments, description thereof is omitted. A method for manufacturing the inkjet head of this embodiment, which is the main difference from the first and second embodiments, will be described below. In addition, about the part similar to 1st, 2 embodiment, the same code | symbol is provided and description is abbreviate | omitted.

  In the present embodiment, each member is formed on the heater substrate 2 and the orifice plate 4 and individually completed and then bonded to each other, and the layers are laminated on both the heater substrate 2 and the orifice plate 4. Are combined to form the flow path 6.

  A first flow path wall layer 12a made of a negative photosensitive epoxy resin is applied to the heater substrate 2 and patterned into a desired shape by a photolithography technique (see step 102, FIG. 8A). The channel wall layer 12a also has a function as a substrate flattening layer, and may be subjected to a silane coupling treatment or the like for improving adhesion, and a conventionally known coating method such as a spin coating method is appropriately used. It can be selected and applied, or can be formed by laminating a dry film. Next, the ink supply hole 7 is formed on the heater substrate 2 from the back side by an anisotropic etching method, a sand blasting method, an anisotropic plasma etching method or the like (step 105, see FIG. 8B). Most preferably, the ink supply hole 7 is formed by a chemical silicon anisotropic etching method using tetramethylhydroxyamine (TMAH), NaOH, KOH or the like. When the heater substrate 2 having a large area is used, the heater substrate 2 and the laminated body thereon are separated and cut into a desired size by a dicing saw or the like (step 108).

  On the other hand, a second flow path wall layer (adhesive layer) 12b is formed on the film 14 made of polyimide resin (see step 112, FIG. 8C), and the flow path 6 and the common liquid chamber are formed by excimer laser processing or the like. The orifice plate 4 is formed by forming the shape 5, the atmosphere communication groove 8, the check valve 10, and the discharge port 3 (see step 110, FIG. 8D).

  The heater substrate 2 and the orifice plate 4 that are individually completed in this manner are overlapped with each other, and the first flow path wall layer 12a and the second flow path wall layer 12b are combined to form a desired flow path and a common flow path. Bonding is performed so as to form a liquid chamber (see step 111, FIG. 8E), and an electric bonding member and an ink supply member for driving a heater (heating resistor) are bonded to each other (not shown). The inkjet head 1 similar to that of the first embodiment is completed (step 109).

  In this way, 100 inkjet heads 1 were manufactured, ink was supplied to them, and the foreign matter in the flow path 6 was discharged by suction from the air communication groove 8 instead of the discharge port 3. Thereafter, a recording inspection was conducted, and the non-defective rate was 93%, indicating a good result. Further, when the ink jet head 1 was mounted on a recording apparatus main body (not shown) and recording was performed, about 10,000 sheets could be recorded without causing ejection failure due to foreign matter. Also in this embodiment, substantially the same effect as in the first embodiment can be obtained.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. Unlike the first to third embodiments, the inkjet head of the present embodiment does not have the check valve 10, and after removing the foreign matter by suction from the air communication groove 8 other than the discharge port 3 during manufacturing, The atmosphere communication groove 8 and / or the communication passage 9 are completely sealed. That is, although the communication path 9 and the atmosphere communication groove 8 connected from the common liquid chamber 5 are formed as in the first to third embodiments, the atmosphere communication groove 8 and / or the communication path 9 are sealed in the completed state. 15 is completely sealed.

  A method for manufacturing the ink jet head of this embodiment will be described below. In addition, about the part similar to 1st-3rd embodiment, the same code | symbol is provided and description is abbreviate | omitted.

  First, on the heater substrate 2, the flow path 6, the common liquid chamber 5, the communication path 9, and the flow path wall layer 12 that becomes a part of the wall of the atmosphere communication groove 8 are formed, and a desired photolithography technique is used. Patterning into a shape (see step 102, FIG. 10A). Next, a resist layer 13, which is a solid layer that can be dissolved, is applied to the portions that will eventually become the flow path 6, the common liquid chamber 5, and the communication path 9. The resist layer 13 is a positive resist made of, for example, polymethylisopropenyl ketone, and is patterned into the shape of the flow path 6 and the common liquid chamber 5 using a photolithography technique (see step 103, FIG. 10B). .

  Subsequently, the coating resin layer is formed, and the walls of the flow path 6, the common liquid chamber 5, and the communication path 9, the air communication groove 8, and the discharge port 3 (see FIG. 1) are formed to constitute the orifice plate 4. (Step 104, see FIG. 10C). The coating resin layer is composed of a negative photosensitive epoxy resin, and may be subjected to silane coupling treatment or the like for improving adhesion. Specifically, the coating resin layer can be applied on the heater substrate 2 on which the pattern of the flow path 6 and the like is formed by a conventionally known coating method, and then patterned by a photolithography technique to form an orifice. Plate 4 can be used.

  Thereafter, the ink supply holes 7 are formed on the heater substrate 2 from the back side by an anisotropic etching method, a sand blast method, an anisotropic plasma etching method, or the like (see step 105, FIG. 10D). Most preferably, the ink supply hole 7 is formed by a chemical silicon anisotropic etching method using tetramethylhydroxyamine (TMAH), NaOH, KOH or the like.

  Subsequently, after performing overall exposure with ultraviolet light (Deep-UV light), development and drying are performed to remove the resist layer 13 (see step 106, FIG. 10E).

  When the heater substrate 2 having a large area is used, the heater substrate 2 and the laminated body thereon are separated and cut into a desired size by a dicing saw or the like (step 108), and then a heater (not shown) The electrical joining member for driving the heating resistor) and the ink supply member are joined (step 109). At this time, the atmosphere communication groove 8, the communication path 9, and the common liquid chamber 5 remain open and communicate with the atmosphere. Therefore, although not shown, ink is supplied from the ink supply hole 7 to the common liquid chamber 5 and is sucked from the atmosphere communication groove 8 instead of the discharge port 3 to discharge foreign matter in the flow path 6 (step 113). Then, the resin sealing material 15 is disposed and solidified at the boundary between the atmospheric communication groove 8 and the communication path 9 and completely sealed (see step 114, FIG. 10 (f)). Thus, the inkjet head 1 is completed.

  When 100 inkjet heads 1 were manufactured by this method and the recording inspection was performed, the yield rate was 93% and a good result was shown. Further, a tank (not shown) for supplying ink to the inkjet head 1 is washed, and ink is injected into the tank through a mesh filter with a 0.1 μm interval to prevent foreign matter from flowing into the inkjet head 1. When the ink jet head 1 was mounted on a recording apparatus main body (not shown) and recording was performed in such a configuration as to be avoided, about 10,000 sheets could be recorded without causing ejection failure due to foreign matter.

  The ink jet head 1 of this embodiment can suck and remove foreign matter from the atmosphere communication groove before sealing with the sealing material, and there is no risk of ink leakage after sealing with the sealing material. Normal operation can be performed. However, since it is difficult to suck and remove foreign matter from the atmosphere communication groove 8 after the inkjet head 1 is completed, as described above, it is preferable to filter the ink flowing into the inkjet head 1 during recording using a filter.

  In the present embodiment, the atmosphere communication groove 8 and the common liquid chamber 5 are connected via a communication path 9 having a smaller cross-sectional size than those of the common communication chamber 5, and the sealing material 15 is a boundary between the communication path 9 and the atmosphere communication groove 8. It is provided in the part. Therefore, sealing with the sealing material 15 is easy.

FIG. 2 is a schematic plan view showing a part of the ink jet head according to the first embodiment of the present invention. (A) is the sectional view on the AA line of the state which closed the check valve of the ink jet head of a 1st embodiment, and (b) is the sectional view on the AA line of the state where the check valve was opened. 3 is a flowchart illustrating a method for manufacturing the ink jet head according to the first embodiment. It is typical sectional drawing which shows the manufacturing method of the inkjet head of 1st Embodiment in order of a process. It is a flowchart which shows the manufacturing method of the inkjet head of 2nd Embodiment. It is typical sectional drawing which shows the manufacturing method of the inkjet head of 2nd Embodiment in order of a process. It is a flowchart which shows the manufacturing method of the inkjet head of 3rd Embodiment. It is typical sectional drawing which shows the manufacturing method of the inkjet head of 3rd Embodiment in order of a process. It is a flowchart which shows the manufacturing method of the inkjet head of 4th Embodiment. It is typical sectional drawing which shows the manufacturing method of the inkjet head of 4th Embodiment in order of a process.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inkjet head 2 Heater board 3 Ejection port 4 Orifice plate 5 Common liquid chamber 6 Flow path 7 Ink supply hole 8 Atmospheric communication groove 9 Communication path 10 Check valve 11 Sacrificial layer 12 Channel wall layer 12a First channel wall layer (Substrate flattening layer)
12b Second channel wall layer (adhesive layer)
13 Resist layer 14 Film 15 Sealing material

Claims (13)

In an inkjet head that ejects ink droplets from an ejection port,
A common liquid chamber to which ink is supplied, a flow path extending from the common liquid chamber toward the ejection port, an air communication groove connected to the common liquid chamber and opened to the atmosphere, and the common liquid chamber And a check valve provided between the atmospheric communication groove and
The non-return valve is normally closed, and opens when the suction force is received from the atmosphere communication groove side to connect the atmosphere communication groove and the common liquid chamber. A plurality of the discharge ports and the flow channels are provided, and the flow channels extend from the common liquid chamber toward the discharge ports,
An ink supply hole for supplying ink to the common liquid chamber;
2. The ink jet head according to claim 1, wherein the air communicating groove is capable of inflowing an ink on the way from the ink supply hole to the ejection port.   The atmosphere communication groove and the common liquid chamber are connected via a communication path having a smaller cross-sectional dimension than the atmosphere communication groove and the common liquid chamber, and the check valve is connected to the communication path and the atmosphere communication groove. The inkjet head according to claim 1, wherein the inkjet head is provided at a boundary portion.   The inkjet head according to claim 1, wherein the check valve is formed integrally with a member in which the discharge port is formed. In the manufacturing method of the ink-jet head according to any one of claims 1 to 4,
Forming a common liquid chamber to which ink is supplied and a flow path extending from the common liquid chamber on the substrate;
Another substrate stacked on the substrate includes a discharge port located in the flow path, an air communication groove connected to the common liquid chamber and opened to the atmosphere, and the common liquid in a completed state. Forming a check valve located between the chamber and the atmosphere communication groove. A method for manufacturing an ink jet head, comprising: A communication path having a smaller cross-sectional dimension than the atmospheric communication groove and the common liquid chamber, which connects the atmospheric communication groove and the common liquid chamber, is formed in the substrate simultaneously with the atmospheric communication groove and the common liquid chamber,
6. The method of manufacturing an ink jet head according to claim 5, wherein the check valve is formed on the another substrate so as to be positioned at a boundary portion between the communication passage and the atmosphere communication groove in a completed state.   The method of manufacturing an ink jet head according to claim 5, wherein the another substrate is formed by solidifying a resin layer applied on the substrate.   The method of manufacturing an ink jet head according to claim 5, wherein the another substrate is laminated on the substrate after the step of forming the discharge port, the atmosphere communication groove, and the check valve.   The inkjet according to any one of claims 5 to 8, further comprising a step of suctioning from the atmosphere communication groove to open the check valve and removing foreign matter in the common liquid chamber and the flow path together with ink. Manufacturing method of the head. In an inkjet head that ejects ink droplets from an ejection port,
A common liquid chamber to which ink is supplied, a flow path extending from the common liquid chamber toward the ejection port, an air communication groove connected to the common liquid chamber and opened to the atmosphere, and the common liquid chamber And a sealing material provided between the air communication groove and the atmosphere communication groove.   The said sealing material has block | closed between the said common liquid chamber and the said atmosphere communication groove in the state from which the foreign material in the said common liquid chamber and the said flow path was removed from the said atmosphere communication groove. Inkjet head. In the manufacturing method of the ink-jet head according to claim 10 or 11,
Forming a common liquid chamber to which ink is supplied and a flow path extending from the common liquid chamber on the substrate;
Forming, on another substrate laminated on the substrate, a discharge port located in the flow path and an air communication groove connected to the common liquid chamber and opened to the atmosphere;
A step of removing foreign matter in the common liquid chamber and the flow path together with ink by sucking from the atmosphere communication groove in a state where the substrate and the other substrate are laminated;
A method for manufacturing an ink jet head, comprising: sealing between the common liquid chamber and the atmosphere communication groove with the sealing material after the step of removing foreign matter by suction from the atmosphere communication groove.   A communication path having a smaller cross-sectional dimension than the atmospheric communication groove and the common liquid chamber is formed on the substrate simultaneously with the atmospheric communication groove and the common liquid chamber, and connects the atmospheric communication groove and the common liquid chamber. Item 13. A method for producing an inkjet head according to Item 12.

Images