JP2005315780A - Contact load regulator, and shape measuring machine equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact load regulator capable of restraining a size from getting large, and capable of obtaining a weak and constant contact load by simple constitution, and a shape measuring machine equipped therewith. <P>SOLUTION: This contact load regulator for regulating the contact load of a probe 3 contacting with a measured face W is provided with a support means 6 for supporting the probe 3 movably along an axial direction of the probe 3 by a dead weight of a member including the probe 3, and a fluid supply suction means 10 for supplying or sucking all the time a fluid toward a periphery of the probe 3 to make the fluid flow along the axial direction of the probe 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a contact load adjusting device that adjusts a contact load of a stylus contacting a surface to be measured and a shape measuring machine including the device.

In recent years, when a stylus is brought into contact with the surface of an object to be measured, various contact load adjusting devices for adjusting the contact load to be constant have been used. In addition, industrial products such as electronic devices have been miniaturized and refined, and in order to evaluate the performance of these precision parts with high accuracy, it is required to weaken the contact load.
Conventionally, the following devices have been proposed as these contact load adjusting devices (for example, see Patent Document 1). That is, as shown in FIG. 9, this contact load adjusting device is applied to, for example, a contact-type shape measuring machine, and this shape measuring machine has a spherical stylus 101 at the tip and has a column shape. A stylus probe shaft 102 formed and a housing 105 formed in a bottomed rectangular tube shape are provided. A stepped portion 109 is formed on the inner wall of the housing 105. A stylus probe shaft 102 is inserted into the hollow portion of the housing 105, and the stylus probe shaft 102 projects the stylus 101 outward by a spring mechanism using a compressive fluid. In a state of being urged, it is supported so as to be movable in the axial direction.
Further, the contact load adjusting device includes a lift-in intake port 108 and a push-down intake port 107 that communicate with the cavity and allow the compressive fluid to flow in and out, and a displacement meter that detects the axial displacement of the stylus 102. 104 and supply pressure control means (not shown) for controlling the supply pressure of the compressible fluid in accordance with the detected value of the displacement meter 104.

According to the contact load adjusting device as described above, when measuring the workpiece W, the displacement meter 104 detects the displacement amount of the stylus probe shaft 102 in the axial direction, and the stylus probe shaft 102 has a predetermined displacement amount. Is exceeded, the supply pressure of the fluid to the intake port 108 for lifting is increased by the supply pressure control means, or the supply pressure of the fluid to the intake port 107 for depression is decreased. Therefore, a force that pushes up the stylus probe shaft 102 is generated.
As a result, the contact load can be made constant without being affected by the surface shape of the object to be measured W, the contact load can be weakened, and an excessive contact load is applied to the surface of the object to be measured W. Can be prevented.
JP 11-316119 A

  However, according to such a configuration, in order to obtain a constant contact load, a control means for detecting the axial displacement amount of the stylus probe shaft 102 and feeding back the detection result is required. There is a problem that the device itself becomes large and complicated, and costs increase.

  The present invention has been made to solve such a problem. The contact load adjusting device capable of obtaining a weak and constant contact load with a simple configuration while suppressing the increase in size, and the shape using the device. The purpose is to provide a measuring machine.

In order to solve the above problems, the present invention provides the following means.
The invention according to claim 1 is a contact load adjusting device for adjusting a contact load of a stylus contacting a surface to be measured, wherein the stylus is moved by the weight of a member including the stylus. A support means for supporting the movement in the axial direction of the child, and a fluid supply for constantly supplying or sucking the fluid toward the periphery of the stylus so that the fluid flows along the axial direction of the stylus. And a suction means.

According to the contact load adjusting device according to the present invention, the stylus is movably supported by the weight of the member including the stylus, and is directed toward the periphery of the stylus by the fluid supply and suction unit. At all times, fluid is supplied or aspirated. As a result, a fluid flow always occurs along the axial direction of the stylus, and a constant propulsion force or retraction force is always applied to the stylus according to the fluid flow.
As a result, the contact load of the stylus on the surface to be measured is kept weak and constant, so there is no need for a control means for detecting the axial displacement of the stylus and feeding back the detection result. It becomes.

According to a second aspect of the present invention, in the contact load adjusting device according to the first aspect, the fluid supply / suction means is configured to supply or suck fluid while being inclined with respect to the axial direction of the stylus. To do.
According to the contact load adjusting apparatus according to the present invention, the fluid is supplied or sucked by the fluid supply / suction means while being inclined with respect to the axial direction of the stylus. Therefore, by directly supplying or sucking the fluid toward the shaft, the stylus is moved along the axial direction by the axial component of the pressing force or suction force of the fluid.
Thereby, the propulsive force and the retracting force can be efficiently and reliably applied to the stylus.

According to a third aspect of the present invention, in the contact load adjusting device according to the first or second aspect, the fluid supply / suction means performs both the supply and suction of the fluid.
According to the contact load adjusting device according to the present invention, the fluid is supplied by the fluid supply / suction means, and suction is also performed in accordance with the supply.
Thereby, a smooth fluid flow in the axial direction of the stylus can be easily created.

According to a fourth aspect of the present invention, in the contact load adjusting device according to any one of the first to third aspects, the fluid supply / suction means supplies or sucks the fluid around the stylus. It is characterized by carrying out simultaneously toward a plurality of locations.
According to the contact load adjusting device of the present invention, the fluid supply / suction means simultaneously supplies or sucks the fluid toward a plurality of locations around the stylus so that the fluid flows from the plurality of locations. Thus, the shaft is supported and guided in the movement in the axial direction.
As a result, friction during movement can be reduced, and shaft blurring and vibration can be prevented.

According to a fifth aspect of the present invention, in the contact load adjusting device according to any one of the first to fourth aspects, the fluid is a compressive fluid, and the fluid supply / suction means is the compressive fluid. It is characterized in that the pressure is adjustable.
According to the contact load adjusting apparatus according to the present invention, the pressure of the compressible fluid supplied or sucked is adjusted by the fluid supply / suction means, and the propulsive force or the retracting force of the stylus changes according to these pressures.
Thereby, an optimum contact load can be set according to the strength of the object to be measured.

According to a sixth aspect of the present invention, in the contact load adjusting device according to any one of the first to fifth aspects, the fluid supply / suction unit is configured to be capable of changing a direction of the fluid flow. It is characterized by.
According to the contact load adjusting device of the present invention, the direction of fluid flow is changed by the fluid supply / suction means. Can be given.
Thereby, an optimal contact load can be set according to the posture of the stylus.

The invention according to claim 7 includes the contact load adjusting device according to any one of claims 1 to 6.
According to the shape measuring machine according to the present invention, the contact load adjusting device is used as a stylus head.
Thereby, it is possible to accurately measure with a simple and inexpensive configuration, and it is possible to reduce the size of the measuring instrument.

  According to the present invention, it is possible not only to obtain a weak and constant contact load, but also to suppress an increase in size of the device itself and to configure the device simply and inexpensively.

(Example 1)
Hereinafter, a contact load adjusting device according to a first embodiment of the present invention will be described with reference to the drawings.
In this embodiment, a case where the contact load adjusting device is applied to a stylus head 1 of a contact-type shape measuring machine that measures the surface shape of the workpiece W will be described as an example.
FIG. 1 shows a stylus head 1 as a first embodiment of the present invention.
The stylus head 1 includes a stylus probe 2 that is brought into contact with the object to be measured W and a housing 5 that is formed in a bottomed rectangular tube shape. The stylus probe 2 is a stylus formed in a column shape. A probe shaft 4 and a spherical stylus 3 provided at the tip thereof are provided. A hollow portion (support means) 6 into which the stylus probe shaft 4 is inserted is provided inside the housing 5. An inner wall surface 9 of the housing 5 that forms the hollow portion 6 is provided linearly along the axis L direction. The reason why the inner wall surface 9 is provided in a straight line is that if a step portion is provided on the inner wall surface 9, vortices are likely to be generated near the step portion as the fluid flows in and out, and these vortices are generated This is because the air flow is disturbed in the cavity 6, thereby causing fine vibrations and making accurate measurement difficult.
A guide mechanism 8 having a blow hole for blowing fluid into the cavity 6 and a compressive fluid controlled by a static pressure regulator (not shown) are guided from the outside of the housing 5 to the inner wall of the housing 5. An intake port 7 for supplying the cavity 6 through the mechanism 8 is provided.

Under such a configuration, the stylus probe shaft 4 is inserted into the cavity 6 and the stylus 3 is directed in the direction of gravity, that is, downward, and the stylus probe 2 is in the direction of the axis L only by its own weight. Is supported so as to be movable. That is, the stylus probe 2 in the present embodiment is configured to move downward only by its own weight in a free state when inserted into the cavity 6. Further, a clean and dry compressible fluid is ejected from the intake port 7 through the guide mechanism 8 into the cavity 6, thereby providing a space between the outer peripheral surface of the stylus probe shaft 4 and the inner wall surface 9 of the cavity 6. A small gap is formed in the stylus probe, so that the stylus probe 2 moves without contact with the inner wall surface 9, that is, with reduced friction. Thereby, the stylus 3 is in a state of being biased downward only by the weight of the stylus probe 2.
In addition, a measurement displacement sensor 13 for detecting the displacement amount of the stylus probe 2 is provided at the bottom of the housing 5, and the detection signal is input to a calculation unit (not shown). The surface shape of the measurement object W is calculated.

  Further, the stylus head 1 in this embodiment includes a supply pump (not shown) that constantly supplies a compressive fluid with a predetermined pressure, and a pair of load adjustment intake ports for allowing the compressive fluid to flow into the cavity 6. The load adjusting intake port 10 is formed so as to be inclined with respect to the axis L and to be disposed at a symmetrical position with the axis L interposed therebetween. That is, the load adjusting intake port 10 is configured to have an inclination from the outer side of the housing 5 toward the inner side of the hollow portion 6 toward the rear end of the stylus probe 2. As a whole, the cross section is configured to have an inverted V shape. The angle formed with respect to the axis L of the load adjusting intake port 10 may be an angle smaller than 90 degrees. However, when considered effectively, for example, 30 degrees to 50 degrees is desirable. The supply pump can adjust the pressure of the fluid to be supplied.

  In this configuration, when the supply pump is driven, the compressive fluid is constantly supplied from the supply pump, so that the compressive fluid is ejected from the load adjusting intake port 10 toward the periphery of the stylus probe shaft 4. The compressive fluid presses the stylus probe shaft 4 from an oblique direction of the stylus probe shaft 4. As a result, the stylus 3 is counteracted by the urging force of the stylus probe 2 due to its own weight. A retracting force in the direction from the front end to the rear end is generated. Further, the retracting force of the stylus 3 can be adjusted by adjusting the pressure of the fluid supplied from the supply pump. The supply pump and the load adjusting intake port 10 constitute fluid supply / suction means.

Next, the operation of the stylus head 1 in this embodiment configured as described above will be described.
As described above, the stylus head 1 is used by being incorporated in, for example, a contact-type shape measuring machine. In the measurement, the stylus 3 is brought into contact with the surface of the object W to be measured with the tip of the stylus probe 2 facing downward, and the stylus probe 2 is scanned in this contacted state. Then, since the stylus 3 is urged downward, it is moved in the direction of the axis L according to the surface shape of the object W to be measured. Then, the displacement amount of the stylus probe 2 during this measurement is detected by the measurement displacement sensor 13, and the surface shape of the workpiece W is calculated by the calculation unit based on this detection signal.

In order to maintain a constant weak contact load with respect to the workpiece W during these measurements, a complicated configuration using various feedback control means or the like is required. In this case, the weak contact load can be always made constant as follows.
That is, the pressure of the fluid supplied from the supply pump is set in advance according to the surface strength of the workpiece W before measurement. Then, the compressive fluid is constantly supplied toward the periphery of the stylus probe shaft 4 through the load adjusting intake port 10 under the optimum pressure. At this time, since the load adjusting intake port 10 is provided so as to incline from the front of the axis L to the rear of the axis L, the compressive fluid ejected from the load adjusting intake port 10 L has a backward vector and touches the outer surface of the stylus probe shaft 4 at an angle. These fluids flow from the front of the axis L toward the rear. Since the stylus 3 is supported so as to always move downward by a constant load only by its own weight, the stylus 3 is moved in the rearward direction of the axis L of the pressing force by the constantly flowing compressive fluid. The stylus probe 2 is directed in the rearward direction of the axis L against the urging force caused by the weight of the stylus probe 2 due to the component and friction generated in the stylus probe shaft 4 by the flow of fluid in the rearward direction of the axis L. A certain retraction force is generated.

  The retraction force at this time is constantly maintained at a constant size because the compressive fluid is constantly supplied by the supply pump, and is a force that is about 1 mgf to 100 mgf smaller than the weight of the stylus probe 2. Become. Thereby, while being able to maintain the contact load with respect to the to-be-measured object W of the stylus 3 constant, the contact load can be made weak.

As described above, since the control means for detecting the displacement amount of the stylus 3 in the direction of the axis L and feeding back the detection result becomes unnecessary, the stylus head 1 can be prevented from being enlarged and touched. The needle head 1 can be configured inexpensively and easily.
Furthermore, since a fluid having an upward vector can be directly sprayed onto the stylus probe shaft 4, a retracting force can be efficiently and reliably applied to the stylus 3.
Further, by adjusting the pressure of the fluid supplied from the supply pump, an optimum contact load can be set according to the strength of the workpiece W.
Further, since the load adjusting intake port 10 is formed symmetrically with the axis L interposed therebetween, the stylus probe shaft 4 can be stably moved.

(Example 2)
FIG. 2 shows a second embodiment of the present invention.
2, the same parts as those shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.
This embodiment and the first embodiment have the same basic configuration, and are different from the above-described embodiment in the following points. That is, a load adjusting intake port 10 is provided in the guide mechanism 8, and a pump for supplying fluid to the guide mechanism 8 and a supply pump for supplying toward the stylus probe shaft 4 are combined. It is composed.
Under such a configuration, when a fluid is supplied from the intake port 7 toward the guide mechanism 8, the fluid branches in two directions at an intermediate position, one of which is in the guide mechanism 8 and the other is in the load adjusting intake port. 10 is supplied to the cavity 6 through 10.
As described above, both pumps can be used together, and by reducing the number of parts, it can be configured more simply and inexpensively.

Example 3
FIG. 3 shows a third embodiment of the present invention.
This embodiment and the second embodiment have the same basic configuration, and are different in the following points. That is, in this embodiment, when a plurality of load adjusting intake ports 10 are formed at equal intervals in the direction of the axis L, and a fluid is supplied from the supply pump into the cavity 6 via the intake port 7, a plurality of load adjusting intake ports 10 are provided. Fluid is ejected simultaneously from the intake port 10. Therefore, the stylus probe shaft 4 is supported and guided so that the movement in the direction of the axis L is smooth, whereby friction is reduced and occurrence of vibration and vibration of the stylus probe shaft 4 is prevented.
As described above, the guide mechanism 8 shown in FIG. 2 is not required, and the configuration can be further simplified and reduced by reducing the number of parts.

Example 4
FIG. 4 shows a fourth embodiment of the present invention.
This embodiment and the first embodiment have the same basic configuration and are different in the following points. That is, in this embodiment, a first load adjustment port 11 and a second load adjustment port 12 are provided in place of the load adjustment intake port 10. Further, instead of the supply pump, a supply suction pump capable of switching between a function of supplying fluid and a function of sucking fluid is provided, and the first supply suction pump 11 is provided in the first load adjustment port 11. A second supply suction pump is connected to the second load adjustment port 12.

  Further, the first load adjusting port 11 is provided symmetrically with the axis L interposed therebetween, and similarly, the second load adjusting port 12 is provided symmetrically with the axis L interposed therebetween. The first and second ports 11 and 12 are formed so as to be parallel to each other and directed in a direction substantially orthogonal to the axis L. Further, the relative positions of the first and second ports 11 and 12 are such that the first load adjustment port 11 is disposed on the front side of the axis L with respect to the second load adjustment port 12. ing. The first and second ports 11 and 12 and the first and second supply / suction pumps constitute fluid supply / suction means.

  Under such a configuration, when the function of supplying the fluid by driving the first supply suction pump is operated, and the function of sucking the fluid by driving the second supply suction pump is operated, The fluid is supplied into the cavity 6 through the load adjustment port 11, and the fluid is sucked through the second load adjustment port 12. Therefore, a fluid flow is generated in the cavity 6 from the front direction of the axis L to the rear direction. Thereby, a retracting force is applied to the stylus 3. In addition, by switching the functions of the first and second supply suction pumps and setting the supply and suction functions to be opposite to those described above, in the opposite direction, that is, from the rear direction to the front direction of the axis L. There is a fluid flow that goes. Thereby, the thrust force directed to the forward direction of the axis L is given to the stylus 3.

From the above, a smooth flow of the fluid in the axial direction can be easily created regardless of the angle with the axis L of the first and second ports 11 and 12.
Further, the contact load can be adjusted by changing the direction of fluid flow according to the posture of the stylus probe 2. For example, when measuring the workpiece W from below, it is necessary to turn the stylus head 1 upside down so that the stylus probe 2 faces upward. By applying a propulsive force as described above, it is possible to set an appropriate contact load on the workpiece W.

(Example 5)
FIG. 5 shows a fifth embodiment of the present invention.
This embodiment and the fourth embodiment have the same basic configuration, and are different in the following points. That is, in the present embodiment, the first and second ports 11 and 12 are provided in the guide mechanism 8, and the pump for supplying fluid to the guide mechanism 8 and the supply toward the stylus probe shaft 4 are provided. For this purpose, the first and second supply suction pumps are also used.
As described above, the pump can also be used, and by reducing the number of parts, it can be configured more simply and inexpensively.
Further, for example, as shown in FIG. 6, when the stylus probe 2 is oriented in the horizontal direction, the contact load on the surface to be measured of the stylus 3 is substantially determined by the driving force applied to the stylus 3. Become. Therefore, a weak and constant contact load can be maintained with an extremely small driving force.

(Example 6)
FIG. 7 shows a sixth embodiment of the present invention.
This embodiment and the fourth embodiment have the same basic configuration, and are different in the following points. That is, in the present embodiment, the first load adjustment port 11 and the second load adjustment port 12 are used in combination, and the first supply suction pump and the second supply suction pump 2 Is also used. The combined first and second ports 11 and 12 are formed on the bottom of the housing 5 along the direction of the axis L, and the measurement displacement sensor 13 is provided on the inner wall surface 9 of the housing 5. Is.
Under such a configuration, when the fluid is sucked from the cavity 6 by the combined first and second supply suction pumps, the fluid flows toward the rear of the axis L. As a result, a retracting force is applied to the stylus 3. Further, when the fluid is supplied into the cavity 6 by switching the function of the supply suction pump, a fluid flow is generated in the forward direction of the axis L, and a propulsive force is applied to the stylus 3.
As described above, the number of parts can be reduced, and the configuration can be simplified and inexpensive.
In addition, since the fluid supply and suction directions coincide with the moving direction of the stylus probe 2, the fluid can be flowed efficiently and smoothly.

(Example 7)
FIG. 8 shows a seventh embodiment of the present invention.
In this embodiment, a case where the contact load adjusting device is applied to a contact-type shape measuring machine 20 that measures the surface shape of the workpiece W will be described as an example.
The shape measuring machine 20 includes a measuring unit 22 that measures the object to be measured W and a support unit 21 that supports the object to be measured W, both of which are arranged on the base 23 so as to face each other. Is.
The measurement unit 22 includes a measurement unit 24 that actually measures the workpiece W and the like, a measurement machine plate 25 on which the measurement unit 24 is placed, and a measurement machine base 26 on which the measurement machine plate 25 is placed.

  The measuring machine plate 25 is fixed to the measuring machine base 26 via z drive shafts 27 a and 27 b arranged at both ends in the length direction, and the measuring machine base 26 is arranged on the side farther from the support portion 21. When the z drive shaft 27b is driven by a drive unit (not shown), the measuring instrument plate 25 is inclined toward the support unit 21 side. Further, the measuring machine base 26 can be reciprocated in the direction perpendicular to the axis L of the stylus probe 2 and in the horizontal direction via the x drive shaft 28 by an x axis drive unit (not shown). The movement of the measuring machine base 26 is detected by the x-axis length measuring device 29.

The measurement unit 24 includes, for example, the stylus head 1 in the first embodiment and a probe shaft length measuring device 30 for measuring the displacement of the stylus 3.
The stylus head 1 is provided on the measuring machine plate 25 so that the stylus probe 2 is directed in the horizontal direction toward the workpiece W. Therefore, the stylus probe 2 is supported so as to be able to reciprocate in the direction of approaching and separating from the object W to be measured.
The probe shaft length measuring device 30 is provided in the vicinity of the stylus probe 2 and detects the amount of movement of the stylus probe shaft 4 in the direction of the axis L.

  In addition, the support portion 21 includes a holding wall portion 31, and a work holder 32 that holds the workpiece W is provided on the holding wall portion 31. The workpiece holder 32 holds the workpiece W. When the workpiece W is attached to the holding wall 31 via the workpiece holder 32, the workpiece W protrudes toward the measuring section 22 side. It is supposed to be retained. Thereby, when the workpiece W is held by the work holder 32, the workpiece W and the stylus 3 provided on the measurement unit 22 side are arranged to face each other.

  Under such a configuration, when the workpiece W is attached to the work holder 32 and the drive unit is driven, the z drive shaft 27b is driven, and the measuring instrument plate 25 is inclined toward the support unit 21 side. . As a result, the stylus head 1 is also tilted, and the stylus 3 is moved toward the tip in the axial direction only by the axial component of its own weight of the stylus probe 2. Therefore, the stylus 3 is urged with a constant force toward the front side of the axis L, that is, the object W to be measured, only by the axial component of its own weight. At this time, by driving the supply pump, the fluid is constantly ejected from the load adjusting intake port 10 shown in FIG. 1 into the cavity 6 of the housing 5, and the stylus is operated in the same manner as in the first embodiment. A constant retracting force is applied to the child 3 in the rearward direction of the axis L.

  When the x-axis drive unit is driven in this state, the stylus 3 moves in the horizontal direction via the measuring machine base 26, and the horizontal movement moves from the side of the workpiece W to the surface thereof. Contact. Since the stylus 3 is biased in the forward direction of the axis L, when the stylus 3 is further moved in the same direction, the stylus 3 follows the surface shape of the object W to be measured in the direction of the axis L. Moving. The amount of movement of the stylus probe shaft 4 in the direction of the axis L at this time is detected by the probe axis length measuring device 30 and the amount of movement in the horizontal direction is detected by the x-axis length measuring device 29. Based on the detection results of the x-axis length measuring device 29 and the probe shaft length measuring device 30, the surface shape of the workpiece W is calculated.

  As described above, the stylus 3 is biased in the forward direction of the axis L only by the axial component of its own weight of the stylus probe 2 and given a certain retraction force. The control means for controlling the contact load is eliminated. For this reason, the shape measuring machine 20 can be prevented from becoming large, and the measuring machine itself can be configured simply and inexpensively.

In the first embodiment, the load adjusting intake port 10 is configured to have an inclination from the front end to the rear end of the stylus probe 2. However, the present invention is not limited to this. The probe 2 has an inclination from the rear end to the front end, that is, has a V-shape as a whole in the longitudinal section of the stylus head 1, and the load adjusting intake port 10 serves as a supply port in the cavity 6. A propulsive force may be applied to the stylus 3 by supplying a fluid to the stylus 3. Further, by providing both the V-shaped and inverted V-shaped ports, a propelling force or a retracting force may be applied to the stylus 3 according to the posture of the stylus probe 2.
Further, the installation position, angle, shape, number, etc. of the load adjusting intake port 10 may be appropriately changed.
Further, in the seventh embodiment, for example, the stylus head 1 in the first embodiment is provided. However, the stylus head 1 in the second to sixth embodiments is not limited to this. Also good.
The technical scope of the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is sectional drawing which shows the 1st Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the 2nd Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the 3rd Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the 4th Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the 5th Example of the contact load adjusting device which concerns on this invention. In the said 5th Example, it is sectional drawing which shows a mode that the stylus head was orient | assigned to the horizontal direction. It is sectional drawing which shows the 6th Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the 7th Example of the contact load adjusting device which concerns on this invention. It is sectional drawing which shows the conventional contact load adjusting device.

Explanation of symbols

3 Stylus 6 Cavity (support means)
10 Load adjustment intake port (fluid supply means)
11 First load adjusting port (fluid supply means)
12 Second load adjustment port (fluid supply means)
20 Shape measuring machine W Object to be measured (surface to be measured)

Claims (7)

A contact load adjusting device for adjusting a contact load of a stylus contacting a surface to be measured,
Support means for supporting the stylus so as to be movable in the axial direction of the stylus by the weight of a member including the stylus;
A fluid supply / suction unit that constantly supplies or sucks the fluid toward the periphery of the stylus so that the fluid flows along the axial direction of the stylus; apparatus.   2. The contact load adjusting device according to claim 1, wherein the fluid supply / suction unit is configured to supply or suck fluid while being inclined with respect to an axial direction of the stylus.   The contact load adjusting device according to claim 1, wherein the fluid supply / suction unit performs the supply and suction of the fluid together.   The contact according to any one of claims 1 to 3, wherein the fluid supply / suction unit simultaneously supplies or sucks the fluid toward a plurality of locations around the stylus. Load adjustment device. The fluid is a compressible fluid;
The contact load adjusting device according to any one of claims 1 to 4, wherein the fluid supply / suction means is configured to be capable of adjusting a pressure of the compressive fluid.   The contact load adjusting device according to claim 1, wherein the fluid supply / suction unit is configured to be capable of changing a flow direction of the fluid. A shape measuring machine comprising the contact load adjusting device according to any one of claims 1 to 6.

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