JP2005296737A - Beat plate - Google Patents

Beat plate Download PDF

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JP2005296737A
JP2005296737A JP2004113623A JP2004113623A JP2005296737A JP 2005296737 A JP2005296737 A JP 2005296737A JP 2004113623 A JP2004113623 A JP 2004113623A JP 2004113623 A JP2004113623 A JP 2004113623A JP 2005296737 A JP2005296737 A JP 2005296737A
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plate
porous
vibrator
beat
nickel
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Akira Shinpo
明 新保
Shinichiro Osumi
真一郎 大住
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Mikuni Corp
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Mikuni Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto

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  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive beat plate usable in spraying of corrosive liquid. <P>SOLUTION: This beat plate consists of a vibrator and a porous plate connected with the vibrator, and the porous plate is composed of a porous nickel plate and an amorphous coating film formed so as to cover the surface of the nickel plate and partially containing a diamond structure. The vibrator is preferably a piezo-vibrator. The beat plate is useful as a spraying means for electrolytic water, cosmetics and chemicals. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、ビートプレートに関する。更に詳細には、本発明はスキンケアに有効な電解水、化粧水、その他の化粧品、薬剤等の噴霧手段に有用なビートプレートに関するものである。   The present invention relates to a beat plate. More specifically, the present invention relates to a beet plate useful for spraying means such as electrolyzed water, lotion, other cosmetics, and drugs effective for skin care.

スキンケア等に有効な電解質水溶液を電解し、陽極側で電解生成されるｐＨの低い陽極電解水（酸性水）を殺菌や消毒に利用する技術は良く知られている（特許文献１）。また、陰極電解水（アルカリ水）を飲用等に利用する技術も知られている（特許文献２）。   A technique for electrolyzing an aqueous electrolyte solution effective for skin care or the like, and utilizing anode electrolyzed water (acidic water) having a low pH generated by electrolysis on the anode side for sterilization and disinfection is well known (Patent Document 1). Moreover, the technique which utilizes cathodic electrolyzed water (alkaline water) for drinking etc. is also known (patent document 2).

陽極側で生成する陽極電解水には次亜塩素酸が含まれている。次亜塩素酸には強力な酸化作用と塩素化作用があるので、陽極電解水は殺菌や消毒に利用できる。この様な利用方法は医療機関等で普及している。また陽極電解水中に微量に含まれるオゾンや溶存酸素は肉芽生成促進作用を有することから、外科治療の補助としての利用も研究されている。   The anodic electrolyzed water produced on the anode side contains hypochlorous acid. Since hypochlorous acid has a strong oxidizing action and chlorinating action, anodic electrolyzed water can be used for sterilization and disinfection. Such a method of use is prevalent in medical institutions. In addition, ozone and dissolved oxygen contained in a small amount in the anodic electrolyzed water have a granulation-promoting action, so that their use as an aid for surgical treatment is also being studied.

電解水を治療等に使用する場合、通常、電解水を噴霧装置により患部に噴霧する手法が採られる。液体の噴霧装置には、例えば圧電振動子に振動板を固着した超音波発生素子を用いたものが提案されている（特許文献３）。しかしながら、この提案の噴霧装置は、振動板がニッケル金属で構成されているため、陽極電解水のような腐蝕性液体により振動板が腐食を受ける。従って、この提案の噴霧装置を陽極電解水等の腐食性液体の噴霧用に用いると、振動板が腐食される。その結果、噴霧装置の噴霧性能がすぐに低下してしまう。また、治療に用いる陽極電解水中にニッケル金属が混入すると、金属アレルギー症が発症することが危惧される。このため、この提案の噴霧装置は陽極電解水の噴霧には使用できない。   When using electrolyzed water for treatment or the like, a technique of spraying electrolyzed water on the affected area with a spray device is usually employed. As a liquid spraying apparatus, for example, an apparatus using an ultrasonic generation element in which a diaphragm is fixed to a piezoelectric vibrator has been proposed (Patent Document 3). However, in this proposed spraying device, the diaphragm is made of nickel metal, so that the diaphragm is corroded by a corrosive liquid such as anodic electrolyzed water. Therefore, when this proposed spraying device is used for spraying corrosive liquid such as anodic electrolyzed water, the diaphragm is corroded. As a result, the spraying performance of the spraying device is quickly degraded. Moreover, if nickel metal is mixed in the anodic electrolyzed water used for treatment, there is a concern that metal allergy may develop. For this reason, this proposed spraying device cannot be used for spraying anodic electrolyzed water.

上記の問題を解決するため陽極電解水の噴霧装置の振動板には、陽極電解水のような酸性水でも腐蝕しない白金製の多孔板が使用される。しかしながら、白金は極めて高価な金属であるため、白金製の振動板を用いた噴霧装置は製造コストが高くなる問題がある。
特開平１１−９０４４２号公報（特許請求の範囲） 特開２００１−３４７２６９号公報（段落番号０００４） 特開平４−３７１２７３号公報（特許請求の範囲） In order to solve the above problems, a porous plate made of platinum that is not corroded by acidic water such as anodic electrolyzed water is used as the diaphragm of the anodic electrolyzed water spray device. However, since platinum is an extremely expensive metal, a spray device using a platinum diaphragm has a problem of high manufacturing cost.
Japanese Patent Laid-Open No. 11-90442 (Claims) JP 2001-347269 A (paragraph number 0004) JP-A-4-371273 (Claims)

本発明は上記事情に鑑みなされたもので、その目的とするところは、電解水のような腐食性の液体、化粧品、薬剤のような多少粘性の高い液体やエマルジョン等の噴霧に用いることができ、且つ、安価な噴霧装置に好適なビートプレートを提供することにある。   The present invention has been made in view of the above circumstances, and is intended to be used for spraying corrosive liquids such as electrolyzed water, slightly viscous liquids such as cosmetics and drugs, and emulsions. And it is providing the beat plate suitable for an inexpensive spraying apparatus.

上記目的を達成する本発明は、以下に記載するものである。   The present invention for achieving the above object is described below.

〔１〕 振動子と前記振動子に連結された多孔板とからなるビートプレートであって、前記多孔板が多孔ニッケル板と前記多孔ニッケル板の表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなることを特徴とするビートプレート。   [1] A beat plate comprising a vibrator and a porous plate connected to the vibrator, wherein the porous plate partially covers a diamond structure formed by covering the porous nickel plate and the surface of the porous nickel plate. A beat plate comprising an amorphous coating made of carbon and hydrogen.

〔２〕 振動子がピエゾ振動子である〔１〕に記載のビートプレート。   [2] The beat plate according to [1], wherein the vibrator is a piezo vibrator.

〔３〕 多孔板が孔径５〜５０μｍの細孔を有する〔１〕又は〔２〕に記載のビートプレート。   [3] The beat plate according to [1] or [2], wherein the porous plate has pores having a pore diameter of 5 to 50 μm.

〔４〕 アモルファス被膜が膜厚０．５〜５．０μｍである〔１〕乃至〔３〕の何れか１に記載のビートプレート。   [4] The beat plate according to any one of [1] to [3], wherein the amorphous coating has a thickness of 0.5 to 5.0 μm.

〔５〕 〔１〕に記載のビートプレートを噴霧手段に用いた噴霧器。   [5] A sprayer using the beat plate according to [1] as spraying means.

本発明のビートプレートは、多孔ニッケル板とその表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなる。アモルファス被膜は耐腐食性が高く、そのため、酸性水等の腐蝕性の液体の噴霧装置に用いることができる。   The beat plate of the present invention comprises a porous nickel plate and an amorphous coating made of carbon and hydrogen partially including a diamond structure formed by coating the surface thereof. Amorphous coatings have high corrosion resistance and can therefore be used in spraying apparatus for corrosive liquids such as acidic water.

また、多孔板に高価な白金を用いていないので、本発明のビートプレートを用いた腐蝕性液体用の噴霧装置は経済性に優れる。更に、本発明のビートプレートの多孔ニッケル板はニッケル板を基材として用いて製造しているので、振動特性が良く腐蝕性液体や高粘度液体、エマルジョン等を効率良く噴霧できる。また、基材のニッケル板は細孔を施す加工が容易である。   Further, since expensive platinum is not used for the perforated plate, the spraying device for corrosive liquid using the beat plate of the present invention is excellent in economy. Furthermore, since the porous nickel plate of the beat plate of the present invention is manufactured using a nickel plate as a base material, it has good vibration characteristics and can efficiently spray corrosive liquids, high viscosity liquids, emulsions and the like. Further, the nickel plate as the base material is easy to process to form pores.

以下、図面を参照しながら本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the drawings.

図１は本発明のビートプレートの一例を示す平面図、図２は図１のａ−ａ線に沿う断面図である。   FIG. 1 is a plan view showing an example of a beat plate of the present invention, and FIG. 2 is a cross-sectional view taken along the line aa in FIG.

図２中、１００はビートプレートで、２は平板状の振動子である。この振動子２は両表面に電圧を印加することにより振動する素子で、水晶板等のピエゾ素子からなる。   In FIG. 2, 100 is a beat plate and 2 is a flat plate-like vibrator. The vibrator 2 is an element that vibrates when a voltage is applied to both surfaces, and is composed of a piezoelectric element such as a quartz plate.

前記振動子２の両面にはそれぞれ電極４、６が形成されている。電極４、６の一端側にはそれぞれ端子８、１０が接続されている。前記電極４の他端側には、多孔板１２の一端側が固着部１４で接合されている。多孔板１２には多数の細孔１６が形成されている。細孔の孔径は、５〜５０μｍが好ましく、細孔の密度は１ｃｍ2 あたり６０００〜１５０００個であることが好ましい。 Electrodes 4 and 6 are formed on both surfaces of the vibrator 2, respectively. Terminals 8 and 10 are connected to one ends of the electrodes 4 and 6, respectively. One end side of the perforated plate 12 is joined to the other end side of the electrode 4 by a fixing portion 14. A large number of pores 16 are formed in the porous plate 12. The pore diameter is preferably 5 to 50 μm, and the density of the pores is preferably 6000 to 15000 per cm 2 .

図３は多孔板１２の細孔１６近傍の拡大断面図である。図３中、１８は多孔ニッケル板で、ニッケル製の平板に多数の細孔１６が形成してある。前記多孔ニッケル板１８の表面はアモルファス被膜２０で被覆されている。   FIG. 3 is an enlarged cross-sectional view of the vicinity of the pores 16 of the porous plate 12. In FIG. 3, reference numeral 18 denotes a porous nickel plate having a large number of pores 16 formed on a nickel flat plate. The surface of the porous nickel plate 18 is covered with an amorphous coating 20.

図３に示すように、多孔板１２の一面１３には所定深さ（Ｔｃ）の円板状第一孔１６ａが穿設されている。   As shown in FIG. 3, a disk-shaped first hole 16 a having a predetermined depth (Tc) is formed in one surface 13 of the porous plate 12.

前記第一孔１６ａの底面には第一孔の径（Ｄａ）よりも小径（Ｄｃ）で、他面に向うに従って徐々に大径に至る第二孔１６ｂが穿設されている。この第二孔１６ｂは、その側面の断面形状が内側に凸となる緩やかな曲線で形成され、この曲線は他面１５に漸近している。   A second hole 16b having a diameter (Dc) smaller than the diameter (Da) of the first hole and gradually increasing toward the other surface is formed in the bottom surface of the first hole 16a. The second hole 16 b is formed by a gentle curve whose side cross-sectional shape is convex inward, and this curve is asymptotic to the other surface 15.

前記細孔１６は、第一孔底部１９と他面１５とで細孔径Ｄｃ、Ｄｂが異なっており、本図においては、最小径Ｄｃは他面径Ｄｂの１／１０に形成されている。この最小径Ｄｃと他面径Ｄｂの比は１／２〜１／１０であることが好ましい。また、細孔１６は、一面１３と他面１５とで一面径Ｄａ、他面径Ｄｂが略同一に形成されている。尚、前記第一孔１６ａの深さ（Ｔｃ）は、多孔板の厚みＴの約１／１０である。   The pore 16 has the pore diameters Dc and Db different between the first hole bottom 19 and the other surface 15, and the minimum diameter Dc is formed to be 1/10 of the other surface diameter Db in this figure. The ratio of the minimum diameter Dc to the other surface diameter Db is preferably 1/2 to 1/10. Further, the one surface 13 and the other surface 15 of the pore 16 are formed so that the one surface diameter Da and the other surface diameter Db are substantially the same. The depth (Tc) of the first hole 16a is about 1/10 of the thickness T of the porous plate.

本発明における多孔板１２は、例えば、多孔ニッケル板１８の表面を当業者が公知の方法で、ダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜２０で被覆することにより作製することができる。この被覆方法としては、高真空下に炭化水素を充満させた雰囲気に多孔ニッケル板１８を入れ、プラズマ処理する方法を例示することができる。アモルファス被膜２０の被膜厚み（Ｔｂ）は、０．５〜５．０μｍであることが好ましい。また、多孔ニッケル板の厚み（Ｔａ）は０．０２〜１．０ｍｍであることが好ましい。アモルファス被膜２０の被膜厚み（Ｔｂ）が上記の範囲であると、多孔ニッケル板１８を電解水による腐食から長期に亘り保護できる。また、経済性にも優れる。尚、ダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜２０は、通称ＤＬＣ（Ｄｉａｍｏｎｄ ｌｉｋｅ Ｃａｒｂｏｎ）で表わされている。   The porous plate 12 in the present invention can be produced, for example, by coating the surface of the porous nickel plate 18 with an amorphous coating 20 made of carbon and hydrogen partially containing a diamond structure by a method known to those skilled in the art. . An example of this coating method is a method in which a porous nickel plate 18 is placed in an atmosphere filled with hydrocarbons under a high vacuum and plasma treatment is performed. The film thickness (Tb) of the amorphous film 20 is preferably 0.5 to 5.0 μm. Further, the thickness (Ta) of the porous nickel plate is preferably 0.02 to 1.0 mm. When the thickness (Tb) of the amorphous coating 20 is in the above range, the porous nickel plate 18 can be protected from corrosion by electrolytic water over a long period of time. Moreover, it is excellent also in economical efficiency. Incidentally, the amorphous coating 20 made of carbon and hydrogen partially containing a diamond structure is represented by a so-called DLC (Diamond like Carbon).

また、アモルファス被膜２０の蒸着に用いる多孔ニッケル板１８には、ニッケル板に当業者が公知の方法で細孔を多数穿孔したものを用いることができる。この穿孔方法としては、例えば、以下に述べる電鋳法を挙げることができる。   The porous nickel plate 18 used for vapor deposition of the amorphous coating 20 may be a nickel plate having a large number of fine holes drilled by a method known to those skilled in the art. Examples of the drilling method include the electroforming method described below.

即ち、ステンレス板の片面にレジストを塗布し、フォトレジスト法にて円柱状の硬化レジストが多数存在するステンレス板を得る。次いでこのステンレス板上にニッケルメッキを施し、更に、ニッケルメッキ部分をステンレス金属面及び硬化レジスト面から剥離して、多数の貫通孔が形成されたニッケル板を得る。   That is, a resist is applied to one surface of a stainless steel plate, and a stainless steel plate having a large number of cylindrical hardened resists is obtained by a photoresist method. Next, nickel plating is performed on the stainless steel plate, and the nickel plated portion is peeled off from the stainless steel metal surface and the hardened resist surface to obtain a nickel plate in which a large number of through holes are formed.

図４は電解槽３８及び、電解槽３８に結合した噴霧手段２００を示す拡大図である。電解槽３８は、扁平な電解槽筐体４２内に、平行に配設された陽極４４、及び陰極４６を有する。なお、４８は陽極４４に接続された陽極端子、５０は陰極４６に接続された陰極端子である。   FIG. 4 is an enlarged view showing the electrolytic cell 38 and the spray means 200 coupled to the electrolytic cell 38. The electrolytic cell 38 has an anode 44 and a cathode 46 arranged in parallel in a flat electrolytic cell housing 42. Note that 48 is an anode terminal connected to the anode 44, and 50 is a cathode terminal connected to the cathode 46.

ポンプ（図示していない）から供給される電解原料水は、電解槽３８の下部に形成された流入孔５２から電解槽３８内に供給され、層流状態を保ちながら槽内を上方に移動すると共に陽極４４、陰極４６間に印加されている電圧により電気分解され、陽極４４近傍には酸性水が生成し、陰極４６近傍にはアルカリ性水が生成する。   Electrolytic raw water supplied from a pump (not shown) is supplied into the electrolytic cell 38 from an inflow hole 52 formed in the lower part of the electrolytic cell 38, and moves upward in the cell while maintaining a laminar flow state. At the same time, it is electrolyzed by the voltage applied between the anode 44 and the cathode 46, and acidic water is generated near the anode 44 and alkaline water is generated near the cathode 46.

電解槽３８内の電解原料水は層流状態で流れているので、生成した酸性水は陽極４４の表面に沿って矢印Ａで示される様に上方に流れ、酸性水のみが電解槽３８の上部側に形成された取出し孔５４を通って噴霧手段２００の噴霧室５６に供給される。   Since the electrolytic raw material water in the electrolytic cell 38 flows in a laminar flow state, the generated acidic water flows upward along the surface of the anode 44 as indicated by the arrow A, and only acidic water is the upper part of the electrolytic cell 38. It is supplied to the spraying chamber 56 of the spraying means 200 through an extraction hole 54 formed on the side.

５８は多孔板で、これにより噴霧手段２００の噴霧室５６と外界とが分離されている。前記多孔板５８は、孔径１８〜２４μｍの細孔が多数形成されていると共に、この多孔板５８はピエゾ振動子６０に固定されている。従って、このピエゾ振動子６０に交流やパルス電圧が印加される事により振動子６０が振動し、これに伴い振動子６０に連結された多孔板５８が振動する。これにより、噴霧室５６内に充満された酸性水が多孔板５８に形成された細孔を通して外部に微細液滴６２として噴霧される。   A perforated plate 58 separates the spray chamber 56 of the spray means 200 from the outside. The porous plate 58 has a large number of pores having a pore diameter of 18 to 24 μm, and the porous plate 58 is fixed to the piezo vibrator 60. Therefore, when an alternating current or a pulse voltage is applied to the piezoelectric vibrator 60, the vibrator 60 vibrates, and accordingly, the perforated plate 58 connected to the vibrator 60 vibrates. Thereby, the acidic water filled in the spray chamber 56 is sprayed to the outside as fine droplets 62 through the pores formed in the porous plate 58.

一方、電解槽３８内で生成したアルカリ性水は、矢印Ｂにより示されるように、陰極４６に沿って上方に移動し、廃液口６４を通ってアルカリ性水貯槽（図示していない）に蓄えられる。   On the other hand, the alkaline water generated in the electrolytic cell 38 moves upward along the cathode 46 as indicated by an arrow B, and is stored in an alkaline water storage tank (not shown) through the waste liquid port 64.

本発明を実施例により更に説明する。   The invention is further illustrated by the examples.

図１及び図２に示すビートプレート１００を下記の通り作製した。   The beat plate 100 shown in FIGS. 1 and 2 was produced as follows.

電鋳法により、厚みが１．０ｍｍ、幅が２０ｍｍ、長さが１７ｍｍの多数の細孔を有する矩形多孔ニッケル板１８を作製した。穿孔した細孔の平均直径は、一面での直径が約１００μｍ、他面での直径が約１００μｍ、最小径部での直径が約１０μｍ、第一孔の深さが約０．１ｍｍであり、細孔の設置密度は１ｃｍ2 当たり６５００個とした。 A rectangular porous nickel plate 18 having a large number of pores having a thickness of 1.0 mm, a width of 20 mm, and a length of 17 mm was produced by electroforming. The average diameter of the perforated pores is about 100 μm on one side, about 100 μm on the other side, about 10 μm on the smallest diameter, and about 0.1 mm deep on the first hole, The installation density of the pores was 6500 per cm 2 .

次いで、この多孔ニッケル板１８をプラズマ処理器内に入れ、器内を１×１０-3Ｐａの高真空とした後、器内にメタンガスを導入し、プラズマ処理により多孔ニッケル板の全表面にダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜２０を形成さて多孔板１２を得た。アモルファス被膜２０の被膜厚み（Ｔｂ）は、０．５μｍとした。 Next, the porous nickel plate 18 is placed in a plasma processing apparatus, and after the inside of the apparatus is set to a high vacuum of 1 × 10 −3 Pa, methane gas is introduced into the container, and diamond is applied to the entire surface of the porous nickel plate by plasma processing. The porous coating 12 was obtained by forming an amorphous coating 20 composed of carbon and hydrogen partially containing the structure. The film thickness (Tb) of the amorphous film 20 was 0.5 μm.

次に、得られた多孔板１２の一端を長さ（Ｌｂ）が１９ｍｍの振動子３の一端と固着部６の長さ（Ｌｃ）が３ｍｍとなるように固着させビートプレート１００を得た。   Next, one end of the obtained porous plate 12 was fixed so that one end of the vibrator 3 having a length (Lb) of 19 mm and the length (Lc) of the fixing portion 6 was 3 mm to obtain a beat plate 100.

得られたビートプレート１００は、多孔板１２の幅（Ｗ）が２０ｍｍ、多孔板２の長さ（Ｌａ）が１７ｍｍ、多孔板２の厚み（Ｔ）が１．０ｍｍ、振動子３の長さ（Ｌｂ）が２２ｍｍである。多孔板２、振動子３と固着部６の寸法は、ビートプレート１００を噴霧器の部品として用いるための実用上適度な寸法にしてある。   The obtained beat plate 100 has a width (W) of the porous plate 12 of 20 mm, a length (La) of the porous plate 2 of 17 mm, a thickness (T) of the porous plate 2 of 1.0 mm, and the length of the vibrator 3. (Lb) is 22 mm. The dimensions of the perforated plate 2, the vibrator 3, and the fixing portion 6 are set to practically appropriate dimensions for using the beat plate 100 as a component of the sprayer.

多孔板１２に施された細孔１６は、多孔板の一面１３での直径（Ｄａ）が平均１００μｍ、多孔板の他面１５での直径（Ｄｂ）が平均１００μｍ、第一孔底部での直径（Ｄｃ）が平均２０μｍ、第一孔の深さ（Ｔｃ）が平均０．１ｍｍである。また、細孔１６の設置密度は、多孔板１ｃｍ2 当たり６５００個である。上記細孔１６の寸法（Ｄａ、Ｄｂ、Ｄｃ、Ｔｃ）、設置密度は、ビートプレート１００を電解水用噴霧器の部品として用いた際に、治療上適度な量及びサイズの霧状電解水を噴霧器から発生できるように設定してある。 The pores 16 formed in the porous plate 12 have an average diameter (Da) on one surface 13 of the porous plate of 100 μm, an average diameter (Db) on the other surface 15 of the porous plate of 100 μm, and a diameter at the bottom of the first hole. (Dc) has an average of 20 μm, and the depth (Tc) of the first hole has an average of 0.1 mm. The installation density of the pores 16 is 6500 per 1 cm 2 of the perforated plate. The dimensions (Da, Db, Dc, Tc) of the fine pores 16 and the installation density of the atomized water with a therapeutically appropriate amount and size when the beat plate 100 is used as a component of the electrolyzed water atomizer. It is set so that it can be generated from.

このようにして得られた多孔板１２の表面を被覆しているアモルファス被膜２０（ＤＬＣ）の酸性溶液に対する耐性評価を行った。多孔板１２の部分を秤量後、ｐＨ２．０の希塩酸（１５ｍｌ）中に室温（２０〜２５℃）にて３００時間浸漬させた。次いで、多孔板１２を取り出し、水洗、乾燥後、質量測定と表面観察を行った。その結果、多孔板１２の質量変化は全く無く、また多孔板表面のＤＬＣ外観に変化は認められなかった。   Thus, the tolerance evaluation with respect to the acidic solution of the amorphous film 20 (DLC) which coat | covers the surface of the porous plate 12 obtained in this way was performed. The porous plate 12 was weighed and then immersed in diluted hydrochloric acid (15 ml) having a pH of 2.0 at room temperature (20 to 25 ° C.) for 300 hours. Next, the porous plate 12 was taken out, washed with water, dried, and then subjected to mass measurement and surface observation. As a result, there was no change in the mass of the porous plate 12, and no change was observed in the DLC appearance on the surface of the porous plate.

本発明のビートプレートの一例を示す概略平面図である。It is a schematic plan view which shows an example of the beat plate of this invention. 図１のａ−ａ断面図である。It is aa sectional drawing of FIG. 本発明のビートプレート細孔の一例を示す拡大断面図である。It is an expanded sectional view showing an example of the beat plate pore of the present invention. 本発明のビートプレートを用いた噴霧手段を示す拡大図である。It is an enlarged view which shows the spraying means using the beat plate of this invention.

符号の説明Explanation of symbols

１００ ビートプレート
２ 振動子
４、６ 電極
８、１０ 端子
１２ 多孔板
１３ 多孔板の一面
１４ 固着部
１５ 多孔板の他面
１６ 細孔
１６ａ 細孔の第一孔
１６ｂ 細孔の第二孔
１８ 多孔ニッケル板
１９ 細孔第一孔の底部
２０ アモルファス被膜
２００ 噴霧手段
３８ 電解槽
４２ 電解槽筐体
４４ 陽極
４６ 陰極
４８ 陽極端子
５０ 陰極端子
５２ 流入孔
５４ 取出孔
５６ 噴霧室
５８ 多孔板
６０ ピエゾ振動子
６２ 液滴
Ｔ 多孔板の厚み
Ｔａ 多孔ニッケル板の厚み
Ｔｂ アモルファス被膜の厚み
Ｔｃ 細孔の第一孔の深さ
Ｄａ 細孔の一端の直径
Ｄｂ 細孔の他端の直径
Ｄｃ 細孔の最小径部の直径
Ｗ 多孔板の幅
Ｌａ 多孔板の長さ
Ｌｂ 振動子の長さ
Ｌｃ 固着部の長さ DESCRIPTION OF SYMBOLS 100 Beat plate 2 Vibrator 4, 6 Electrode 8, 10 Terminal 12 Porous plate 13 One surface of the porous plate 14 Adhering portion 15 Other surface of the porous plate 16 Pore 16a Pore first hole 16b Pore second hole 18 Porous Nickel plate 19 Bottom of first pore 20 Amorphous coating 200 Spraying means 38 Electrolytic tank 42 Electrolytic tank housing 44 Anode 46 Cathode 48 Anode terminal 50 Cathode terminal 52 Inflow hole 54 Extraction hole 56 Spray chamber 58 Porous plate 60 Piezo vibrator 62 Droplet T Thickness of porous plate Ta Thickness of porous nickel plate Tb Thickness of amorphous coating Tc Depth of first pore of Da Da Diameter of one end of pore Db Diameter of other end of pore Dc Minimum diameter of pore Diameter of the part W Width of the perforated plate La Length of the perforated plate Lb Length of the vibrator Lc Length of the fixed portion

Claims (5)

振動子と前記振動子に連結された多孔板とからなるビートプレートであって、前記多孔板が多孔ニッケル板と前記多孔ニッケル板の表面を被覆して形成されたダイアモンド構造を一部含んだ炭素と水素からなるアモルファス被膜とからなることを特徴とするビートプレート。 A beat plate comprising a vibrator and a porous plate connected to the vibrator, wherein the porous plate includes a porous nickel plate and a part of a diamond structure formed by covering the surface of the porous nickel plate. A beat plate characterized by comprising an amorphous coating made of hydrogen. 振動子がピエゾ振動子である請求項１に記載のビートプレート。 The beat plate according to claim 1, wherein the vibrator is a piezo vibrator. 多孔板が孔径５〜５０μｍの細孔を有する請求項１又は２に記載のビートプレート。 The beat plate according to claim 1 or 2, wherein the perforated plate has pores having a pore diameter of 5 to 50 µm. アモルファス被膜が膜厚０．５〜５．０μｍである請求項１乃至３の何れか１項に記載のビートプレート。 The beat plate according to any one of claims 1 to 3, wherein the amorphous coating has a thickness of 0.5 to 5.0 µm. 請求項１に記載のビートプレートを噴霧手段に用いた噴霧器。 A sprayer using the beet plate according to claim 1 as a spraying means.
JP2004113623A 2004-04-07 2004-04-07 Beat plate Pending JP2005296737A (en)

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