JP2005288503A - レーザ加工方法 - Google Patents
レーザ加工方法 Download PDFInfo
- Publication number
- JP2005288503A JP2005288503A JP2004108300A JP2004108300A JP2005288503A JP 2005288503 A JP2005288503 A JP 2005288503A JP 2004108300 A JP2004108300 A JP 2004108300A JP 2004108300 A JP2004108300 A JP 2004108300A JP 2005288503 A JP2005288503 A JP 2005288503A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- crack
- workpiece
- sapphire
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title description 27
- 238000003754 machining Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 claims abstract description 62
- 238000010521 absorption reaction Methods 0.000 claims abstract description 32
- 230000000694 effects Effects 0.000 claims abstract description 31
- 238000005520 cutting process Methods 0.000 claims description 38
- 238000003672 processing method Methods 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000007493 shaping process Methods 0.000 claims 1
- 239000010980 sapphire Substances 0.000 abstract description 54
- 229910052594 sapphire Inorganic materials 0.000 abstract description 54
- 239000013078 crystal Substances 0.000 abstract description 8
- 238000012545 processing Methods 0.000 description 63
- 239000000758 substrate Substances 0.000 description 30
- 230000006378 damage Effects 0.000 description 18
- 230000008569 process Effects 0.000 description 15
- 239000011521 glass Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000000635 electron micrograph Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000012780 transparent material Substances 0.000 description 5
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000001788 irregular Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000009022 nonlinear effect Effects 0.000 description 4
- 239000005297 pyrex Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
Abstract
【解決手段】 レーザ光源101から出力される355nmパルスレーザ光を、光学系を介して、ステージ113上の加工対象物(例えば、サファイア)1に照射する。このとき、焦点位置を加工対象物1の内部に合わせる。355nmパルスレーザ光を照射することにより、加工対象物1の内部に3光子吸収による微小クラックを形成するとともに、そのクラックを自己収束効果により光軸方向に伸長させる。また、800nmやそれより長波長のベッセルビームを使用することにより、さらに光軸方向に長いクラックを形成することができる。
【選択図】 図3
Description
本発明者は、加工精度を向上させるためには、クラックのサイズ・形状を制御することが必要であることを見いだした。また、クラックのサイズ・形状を制御するためには、それが微小サイズであることを要するため、クラックの生成を、絶縁破壊による電子なだれにより生起されるものではなく、多光子吸収により生起されるものとする必要があることを見いだした。さらに、そのためには、加工対象物に対応して、使用するパルスレーザの波長を加工対象物のバンドギャップを考慮して最適化することが必要であることを見いだしたのである。
実験例1では、本発明のレーザ加工方法を用いて形成したクラックのサイズを実験により求めた。条件は、次の通りである。
・加工対象物:サファイア
・レーザ:波長355nm、パルス幅10ナノ秒
・パルスエネルギ:0.1mJ/パルス〜0.02mJ/パルス
・対物レンズ:開口数(NA)=0.2
・集光スポットサイズ:7.9×10−7cm2(半径5μmの円)
・集光位置における電界強度:1.1×1010〜0.22×1010W/cm2
・単発照射
実験例2では、本発明のレーザ加工方法を用いて実際にサファイア基板を切断した(図7参照)。条件は、次の通りである。
・加工対象物:厚さ400μmのサファイア基板
・レーザ:波長355nm、パルス幅10ナノ秒
・パルスエネルギ:1mJ/パルス
・対物レンズ:開口数(NA)=0.25
・集光スポットサイズ:7.9×10−7cm2(半径5μmの円)
・集光位置における電界強度:1.1×1011W/cm2
・水平方向走査速度:50mm/s
・深さ方向の集光位置:サファイア基板の丁度真ん中
実験例3では、本発明のレーザ加工方法を用いて実際にサファイア基板表面のスクライビングを行った(図9参照)。その結果、サファイア基板表面に微小なクラック21が形成された。条件は、次の通りである。
・加工対象物:サファイア基板(表面)
・レーザ:波長355nm、パルス幅10ナノ秒
・パルスエネルギ:0.1mJ/パルス以下
・対物レンズ:開口数(NA)=0.25
・集光スポットサイズ:7.9×10−7cm2(半径5μmの円)
・集光位置における電界強度:1.1×1010W/cm2以下
・水平方向走査速度:50mm/s
比較例1では、特許文献1に記載のレーザ加工方法を用いて形成したクラックのサイズを実験により求めた。条件は、次の通りである。
・加工対象物:サファイア
・レーザ:波長1064nm、パルス幅9ナノ秒
・パルスエネルギ:2mJ/パルス以下
・対物レンズ:開口数(NA)=0.1
・集光スポットサイズ:7.0×10−6cm2(半径15μmの円)
・集光位置における電界強度:1.2×1010W/cm2
・単発照射
本実施の形態は、いわゆるベッセルビーム(Bessel beam)を用いて加工対象物の切断を行う場合である。すなわち、実施の形態1では、レーザ光(ガウシアンビーム)の自己収束効果を利用して深さ方向に長い改質領域を形成するのに対し、本実施の形態では、ベッセルビームを利用してより積極的に深さ方向に長い改質領域を形成する。
100、300 レーザ加工装置
101、301 レーザ光源
103 テレスコープ光学系
105 偏光板
107 ダイクロイックミラー
109 対物レンズ
111 保護用窓プレート
113 ステージ
115 計測用光源
117 ビーム整形器
119 ハーフミラー
121 光検出器
123 コントローラ
125 照明用光源
127、313 CCDカメラ
129 コンピュータ
131 モニタ
L パルスレーザ光
Claims (7)
- 光学系を介してレーザ光を加工対象物の内部に集光照射し、前記加工対象物の内部に多光子吸収を生起させ光軸方向に伸長した形状のクラックを形成し、単一の走査で前記加工対象物の切断を行うことを特徴とするレーザ加工方法。
- 前記レーザ光は、前記クラックを光軸方向に伸長する自己収束効果を生起させるパワであることを特徴とする請求項1記載のレーザ加工方法。
- 前記光学系内のレンズは、前記クラックを光軸方向に伸長する自己収束効果を生起させる開口数であることを特徴とする請求項1記載のレーザ加工方法。
- 前記レンズは、開口数NA≦0.4のレンズであることを特徴とする請求項3記載のレーザ加工方法。
- 本来のレーザ光集光位置を、クラック形成予定位置よりも遠い位置に配置して、自己収束効果により生起されるクラックの形成位置を制御することを特徴とする請求項1記載のレーザ加工方法。
- 前記レーザ光はベッセルビームであることを特徴とする請求項1記載のレーザ加工方法。
- 前記ベッセルビームは、ガウシアンビームをアキシコンレンズにより整形して形成することを特徴とする請求項6記載のレーザ加工方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004108300A JP4418282B2 (ja) | 2004-03-31 | 2004-03-31 | レーザ加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004108300A JP4418282B2 (ja) | 2004-03-31 | 2004-03-31 | レーザ加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005288503A true JP2005288503A (ja) | 2005-10-20 |
JP4418282B2 JP4418282B2 (ja) | 2010-02-17 |
Family
ID=35322045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004108300A Expired - Lifetime JP4418282B2 (ja) | 2004-03-31 | 2004-03-31 | レーザ加工方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4418282B2 (ja) |
Cited By (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005288501A (ja) * | 2004-03-31 | 2005-10-20 | Hokkaido Univ | レーザ加工方法および装置 |
JP2006130691A (ja) * | 2004-11-02 | 2006-05-25 | Shibuya Kogyo Co Ltd | 脆性材料の割断方法とその装置 |
JP2007196277A (ja) * | 2006-01-27 | 2007-08-09 | Seiko Epson Corp | 微細構造体の製造方法、製造装置、及びデバイス |
JP2009175441A (ja) * | 2008-01-24 | 2009-08-06 | Hamamatsu Photonics Kk | 観察装置 |
JPWO2008126742A1 (ja) * | 2007-04-05 | 2010-07-22 | サイバーレーザー株式会社 | レーザ加工方法及び切断方法並びに多層基板を有する構造体の分割方法 |
JP2010188370A (ja) * | 2009-02-17 | 2010-09-02 | Aisin Seiki Co Ltd | レーザ加工装置及びレーザ加工方法 |
KR20100120297A (ko) * | 2008-03-07 | 2010-11-15 | 아이엠알에이 아메리카, 인코포레이티드. | 초단파 펄스 레이저에 의한 투명 재료 프로세싱 |
JP2011124323A (ja) * | 2009-12-09 | 2011-06-23 | Disco Abrasive Syst Ltd | 発光デバイス、発光デバイスの製造方法および発光デバイス素材の加工装置 |
JP2011147943A (ja) * | 2010-01-19 | 2011-08-04 | Hitachi Zosen Corp | レーザ加工方法とその装置 |
KR101073563B1 (ko) | 2010-02-08 | 2011-10-14 | 삼성모바일디스플레이주식회사 | 표시 장치 및 이의 제조 방법 |
JP2011223041A (ja) * | 2011-08-05 | 2011-11-04 | Toyoda Gosei Co Ltd | 半導体発光素子の分離方法 |
ITTO20110327A1 (it) * | 2011-04-08 | 2012-10-09 | Osai A S S R L | Metodo di taglio laser intramateriale con profondita' di campo estesa |
JP2012199374A (ja) * | 2011-03-22 | 2012-10-18 | Fujitsu Semiconductor Ltd | 半導体チップの製造方法 |
WO2013039162A1 (ja) * | 2011-09-16 | 2013-03-21 | 浜松ホトニクス株式会社 | レーザ加工方法及びレーザ加工装置 |
WO2014079570A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
KR101407993B1 (ko) * | 2013-12-10 | 2014-06-18 | 주식회사 엘티에스 | 기판 절단방법 |
KR101436627B1 (ko) * | 2014-03-06 | 2014-09-01 | 주식회사 엘티에스 | 유리기판 절단방법 |
JP2015032794A (ja) * | 2013-08-06 | 2015-02-16 | 株式会社ディスコ | ウエーハの加工方法 |
JP2015037808A (ja) * | 2013-08-02 | 2015-02-26 | ロフィン−ジナール テクノロジーズ インコーポレイテッド | 透明材料の内部でレーザーフィラメンテーションを実行する方法および装置 |
JP2015091606A (ja) * | 2014-12-22 | 2015-05-14 | イムラ アメリカ インコーポレイテッド | 超短パルスレーザでの透明材料処理 |
KR20150121659A (ko) * | 2014-04-21 | 2015-10-29 | 가부시기가이샤 디스코 | 단결정 기판의 가공 방법 |
EP2964417A2 (de) * | 2013-04-04 | 2016-01-13 | LPKF Laser & Electronics AG | Verfahren und vorrichtung zum einbringen von durchbrechungen in ein substrat sowie ein derart hergestelltes substrat |
EP2964416A2 (de) * | 2013-04-04 | 2016-01-13 | LPKF Laser & Electronics AG | Verfahren und vorrichtung zum trennen eines substrates |
KR20160010396A (ko) * | 2013-01-15 | 2016-01-27 | 코닝 레이저 테크놀로지스 게엠베하 | 레이저 빔 초점 라인을 사용하여 시트형 기판들을 레이저 기반으로 가공하는 방법 및 디바이스 |
WO2016079063A1 (de) * | 2014-11-19 | 2016-05-26 | Trumpf Laser- Und Systemtechnik Gmbh | Diffraktives optisches strahlformungselement |
KR20160061763A (ko) * | 2014-11-24 | 2016-06-01 | 주식회사 필옵틱스 | 베셀 빔을 이용한 절단용 광학기기 및 그를 이용한 절단 장치 |
KR20160098470A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 3d 형상의 투명한 취성 기판 처리 |
KR20160098469A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 이온-교환가능한 유리 기판의 레이저 절단 |
KR20160098468A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 엣지 챔퍼처리 방법 |
KR20160099673A (ko) * | 2013-12-17 | 2016-08-22 | 코닝 인코포레이티드 | 레이저 컷팅 화합물 유리 물품 및 컷팅 방법 |
KR20160113694A (ko) * | 2014-01-27 | 2016-09-30 | 코닝 인코포레이티드 | 레이저 컷팅 유리를 기계적으로 처리하여 챔퍼링된 에지 |
JP2016187835A (ja) * | 2016-06-14 | 2016-11-04 | イムラ アメリカ インコーポレイテッド | 超短パルスレーザでの透明材料処理 |
US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US9617180B2 (en) | 2014-07-14 | 2017-04-11 | Corning Incorporated | Methods and apparatuses for fabricating glass articles |
US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
US9687936B2 (en) | 2013-12-17 | 2017-06-27 | Corning Incorporated | Transparent material cutting with ultrafast laser and beam optics |
US9701564B2 (en) | 2013-01-15 | 2017-07-11 | Corning Incorporated | Systems and methods of glass cutting by inducing pulsed laser perforations into glass articles |
JP2017521877A (ja) * | 2014-07-15 | 2017-08-03 | イノラス ソリューションズ ゲーエムベーハー | 平面結晶性基板、特に半導体基板のレーザ加工方法及び装置 |
KR20170102467A (ko) * | 2014-11-19 | 2017-09-11 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
US9815144B2 (en) | 2014-07-08 | 2017-11-14 | Corning Incorporated | Methods and apparatuses for laser processing materials |
US9819141B2 (en) | 2013-11-12 | 2017-11-14 | Imra America, Inc. | Compact fiber short pulse laser sources |
US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
WO2018064409A1 (en) * | 2016-09-30 | 2018-04-05 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
EP3311947A1 (en) * | 2016-09-30 | 2018-04-25 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
NL2017998B1 (en) * | 2016-12-14 | 2018-06-26 | Corning Inc | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
US10233112B2 (en) | 2013-12-17 | 2019-03-19 | Corning Incorporated | Laser processing of slots and holes |
US10252931B2 (en) | 2015-01-12 | 2019-04-09 | Corning Incorporated | Laser cutting of thermally tempered substrates |
US10280108B2 (en) | 2013-03-21 | 2019-05-07 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
US10335902B2 (en) | 2014-07-14 | 2019-07-02 | Corning Incorporated | Method and system for arresting crack propagation |
US10377658B2 (en) | 2016-07-29 | 2019-08-13 | Corning Incorporated | Apparatuses and methods for laser processing |
US10522963B2 (en) | 2016-08-30 | 2019-12-31 | Corning Incorporated | Laser cutting of materials with intensity mapping optical system |
US10525657B2 (en) | 2015-03-27 | 2020-01-07 | Corning Incorporated | Gas permeable window and method of fabricating the same |
US10526234B2 (en) | 2014-07-14 | 2020-01-07 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
US10661384B2 (en) | 2014-11-19 | 2020-05-26 | Trumpf Laser—und Systemtechnik GmbH | Optical system for beam shaping |
US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
US10710194B2 (en) * | 2017-01-17 | 2020-07-14 | Gigaphoton Inc. | Laser processing system and laser processing method |
US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
TWI715548B (zh) * | 2015-12-22 | 2021-01-11 | 鄭鈞文 | 硬脆材料的雷射切割方法及雷射切割機與雷射切割機的光學系統 |
CN112566749A (zh) * | 2018-08-20 | 2021-03-26 | 日本瑞翁株式会社 | 切割膜的制造方法、切割膜及切割膜用膜 |
WO2021069362A1 (de) * | 2019-10-11 | 2021-04-15 | Trumpf Laser- Und Systemtechnik Gmbh | Justage-vorrichtung für eine bessel-strahl-bearbeitungsoptik und verfahren |
JP2021065912A (ja) * | 2019-10-24 | 2021-04-30 | 株式会社ディスコ | レーザー加工装置 |
JP2021513951A (ja) * | 2018-02-15 | 2021-06-03 | ショット アクチエンゲゼルシャフトSchott AG | 透明な脆性材料に分割線を挿入するための方法および装置、ならびに本方法によって製造可能な、分割線が設けられた要素 |
JP2021085939A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社フジクラ | ビームシェイパ、加工装置、及びビームシェイピング方法 |
JP2021085940A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社フジクラ | ビームシェイパ、加工装置、及びビームシェイピング方法 |
US11062986B2 (en) | 2017-05-25 | 2021-07-13 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
US11111170B2 (en) | 2016-05-06 | 2021-09-07 | Corning Incorporated | Laser cutting and removal of contoured shapes from transparent substrates |
US11114309B2 (en) | 2016-06-01 | 2021-09-07 | Corning Incorporated | Articles and methods of forming vias in substrates |
US11186060B2 (en) | 2015-07-10 | 2021-11-30 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
WO2022260280A1 (ko) * | 2021-06-07 | 2022-12-15 | 삼성전자주식회사 | 광학 시스템 |
US11542190B2 (en) | 2016-10-24 | 2023-01-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
US11633805B2 (en) | 2018-09-28 | 2023-04-25 | Corning Incorporated | Rotating light source utilized to modify substrates |
US11648623B2 (en) | 2014-07-14 | 2023-05-16 | Corning Incorporated | Systems and methods for processing transparent materials using adjustable laser beam focal lines |
US11773004B2 (en) | 2015-03-24 | 2023-10-03 | Corning Incorporated | Laser cutting and processing of display glass compositions |
US11774233B2 (en) | 2016-06-29 | 2023-10-03 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11610784B2 (en) | 2014-09-16 | 2023-03-21 | Lpkf Laser & Electronics Se | Method for introducing at least one cutout or aperture into a sheetlike workpiece |
PL3124163T3 (pl) * | 2015-07-29 | 2020-10-19 | Yaskawa Slovenija D.O.O | Układ i sposób obróbki laserowej |
CN110216389A (zh) * | 2019-07-01 | 2019-09-10 | 大族激光科技产业集团股份有限公司 | 一种晶圆的激光加工方法及系统 |
-
2004
- 2004-03-31 JP JP2004108300A patent/JP4418282B2/ja not_active Expired - Lifetime
Cited By (167)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005288501A (ja) * | 2004-03-31 | 2005-10-20 | Hokkaido Univ | レーザ加工方法および装置 |
JP2006130691A (ja) * | 2004-11-02 | 2006-05-25 | Shibuya Kogyo Co Ltd | 脆性材料の割断方法とその装置 |
JP4692717B2 (ja) * | 2004-11-02 | 2011-06-01 | 澁谷工業株式会社 | 脆性材料の割断装置 |
US9138913B2 (en) | 2005-09-08 | 2015-09-22 | Imra America, Inc. | Transparent material processing with an ultrashort pulse laser |
JP2007196277A (ja) * | 2006-01-27 | 2007-08-09 | Seiko Epson Corp | 微細構造体の製造方法、製造装置、及びデバイス |
JPWO2008126742A1 (ja) * | 2007-04-05 | 2010-07-22 | サイバーレーザー株式会社 | レーザ加工方法及び切断方法並びに多層基板を有する構造体の分割方法 |
JP2013223886A (ja) * | 2007-04-05 | 2013-10-31 | Charm Engineering Co Ltd | レーザ加工方法及び切断方法並びに多層基板を有する構造体の分割方法 |
JP5784273B2 (ja) * | 2007-04-05 | 2015-09-24 | チャーム エンジニアリング株式会社 | レーザ加工方法及び切断方法並びに多層基板を有する構造体の分割方法 |
KR101333518B1 (ko) * | 2007-04-05 | 2013-11-28 | 참엔지니어링(주) | 레이저 가공 방법 및 절단 방법 및 다층 기판을 가지는 구조체의 분할 방법 |
JP2009175441A (ja) * | 2008-01-24 | 2009-08-06 | Hamamatsu Photonics Kk | 観察装置 |
KR101690335B1 (ko) * | 2008-03-07 | 2016-12-27 | 아이엠알에이 아메리카, 인코포레이티드. | 초단파 펄스 레이저에 의한 투명 재료 프로세싱 |
JP2017024083A (ja) * | 2008-03-07 | 2017-02-02 | イムラ アメリカ インコーポレイテッド | 超短パルスレーザによる透明材料処理 |
KR20100120297A (ko) * | 2008-03-07 | 2010-11-15 | 아이엠알에이 아메리카, 인코포레이티드. | 초단파 펄스 레이저에 의한 투명 재료 프로세싱 |
JP2014037006A (ja) * | 2008-03-07 | 2014-02-27 | Imra America Inc | 超短パルスレーザによる透明材料処理 |
JP2010188370A (ja) * | 2009-02-17 | 2010-09-02 | Aisin Seiki Co Ltd | レーザ加工装置及びレーザ加工方法 |
JP2011124323A (ja) * | 2009-12-09 | 2011-06-23 | Disco Abrasive Syst Ltd | 発光デバイス、発光デバイスの製造方法および発光デバイス素材の加工装置 |
JP2011147943A (ja) * | 2010-01-19 | 2011-08-04 | Hitachi Zosen Corp | レーザ加工方法とその装置 |
KR101073563B1 (ko) | 2010-02-08 | 2011-10-14 | 삼성모바일디스플레이주식회사 | 표시 장치 및 이의 제조 방법 |
US8654304B2 (en) | 2010-02-08 | 2014-02-18 | Samsung Display Co., Ltd. | Flat panel display and manufacturing method thereof |
US8520182B2 (en) | 2010-02-08 | 2013-08-27 | Samsung Display Co., Ltd. | Flat panel display and manufacturing method thereof |
JP2012199374A (ja) * | 2011-03-22 | 2012-10-18 | Fujitsu Semiconductor Ltd | 半導体チップの製造方法 |
ITTO20110327A1 (it) * | 2011-04-08 | 2012-10-09 | Osai A S S R L | Metodo di taglio laser intramateriale con profondita' di campo estesa |
JP2011223041A (ja) * | 2011-08-05 | 2011-11-04 | Toyoda Gosei Co Ltd | 半導体発光素子の分離方法 |
WO2013039162A1 (ja) * | 2011-09-16 | 2013-03-21 | 浜松ホトニクス株式会社 | レーザ加工方法及びレーザ加工装置 |
TWI625186B (zh) * | 2011-09-16 | 2018-06-01 | Hamamatsu Photonics Kk | Laser processing method and laser processing device |
US9821408B2 (en) | 2011-09-16 | 2017-11-21 | Hamamatsu Photonics K.K. | Laser machining method and laser machining device |
JPWO2013039162A1 (ja) * | 2011-09-16 | 2015-03-26 | 浜松ホトニクス株式会社 | レーザ加工方法及びレーザ加工装置 |
JP2017064795A (ja) * | 2012-11-20 | 2017-04-06 | ユーエービー アルテクナ アールアンドディー | 透明材料の高速レーザ処理 |
WO2014079570A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
WO2014079478A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
US9850159B2 (en) | 2012-11-20 | 2017-12-26 | Corning Incorporated | High speed laser processing of transparent materials |
EP3246296A1 (en) | 2012-11-20 | 2017-11-22 | UAB Altechna R&D | Layered material |
EP3241809A1 (en) | 2012-11-20 | 2017-11-08 | UAB Altechna R&D | A method for laser pre-cutting a layered material and a laser processing system for pre-cutting such material |
KR101818409B1 (ko) * | 2012-11-20 | 2018-01-12 | 유에이비 알테크나 알앤드디 | 투명 재료들의 고속 레이저 프로세싱 |
KR101793351B1 (ko) * | 2012-11-20 | 2017-11-02 | 유에이비 알테크나 알앤드디 | 투명 재료들의 고속 레이저 프로세싱 |
JP2016503383A (ja) * | 2012-11-20 | 2016-02-04 | ユーエービー アルテクナ アールアンドディー | 透明材料の高速レーザ処理 |
US11028003B2 (en) | 2013-01-15 | 2021-06-08 | Corning Laser Technologies GmbH | Method and device for laser-based machining of flat substrates |
KR20160010396A (ko) * | 2013-01-15 | 2016-01-27 | 코닝 레이저 테크놀로지스 게엠베하 | 레이저 빔 초점 라인을 사용하여 시트형 기판들을 레이저 기반으로 가공하는 방법 및 디바이스 |
JP2016509540A (ja) * | 2013-01-15 | 2016-03-31 | コーニング レーザー テクノロジーズ ゲーエムベーハーCORNING LASER TECHNOLOGIES GmbH | レーザビーム焦線を用いたシート状基板のレーザベースの機械加工方法及び装置 |
US11345625B2 (en) | 2013-01-15 | 2022-05-31 | Corning Laser Technologies GmbH | Method and device for the laser-based machining of sheet-like substrates |
KR102230762B1 (ko) * | 2013-01-15 | 2021-03-23 | 코닝 레이저 테크놀로지스 게엠베하 | 레이저 빔 초점 라인을 사용하여 시트형 기판들을 레이저 기반으로 가공하는 방법 및 디바이스 |
JP2016513024A (ja) * | 2013-01-15 | 2016-05-12 | コーニング レーザー テクノロジーズ ゲーエムベーハーCORNING LASER TECHNOLOGIES GmbH | フラット基板のレーザベースの機械加工方法および装置 |
US10421683B2 (en) | 2013-01-15 | 2019-09-24 | Corning Laser Technologies GmbH | Method and device for the laser-based machining of sheet-like substrates |
JP2019034343A (ja) * | 2013-01-15 | 2019-03-07 | コーニング レーザー テクノロジーズ ゲーエムベーハーCORNING LASER TECHNOLOGIES GmbH | レーザビーム焦線を用いたシート状基板のレーザベースの機械加工方法及び装置 |
US9701564B2 (en) | 2013-01-15 | 2017-07-11 | Corning Incorporated | Systems and methods of glass cutting by inducing pulsed laser perforations into glass articles |
US11713271B2 (en) | 2013-03-21 | 2023-08-01 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
US10280108B2 (en) | 2013-03-21 | 2019-05-07 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
US10610971B2 (en) | 2013-04-04 | 2020-04-07 | Lpkf Laser & Electronics Ag | Method for producing recesses in a substrate |
EP2964416A2 (de) * | 2013-04-04 | 2016-01-13 | LPKF Laser & Electronics AG | Verfahren und vorrichtung zum trennen eines substrates |
EP2964417A2 (de) * | 2013-04-04 | 2016-01-13 | LPKF Laser & Electronics AG | Verfahren und vorrichtung zum einbringen von durchbrechungen in ein substrat sowie ein derart hergestelltes substrat |
JP2016517626A (ja) * | 2013-04-04 | 2016-06-16 | エル・ピー・ケー・エフ・レーザー・ウント・エレクトロニクス・アクチエンゲゼルシヤフト | 基板に貫通穴を開ける方法及び装置とそのようにして製作された基板 |
US11618104B2 (en) | 2013-04-04 | 2023-04-04 | Lpkf Laser & Electronics Se | Method and device for providing through-openings in a substrate and a substrate produced in said manner |
EP2964416B1 (de) * | 2013-04-04 | 2023-07-19 | LPKF Laser & Electronics SE | Verfahren zum trennen eines substrates |
EP2964417B1 (de) * | 2013-04-04 | 2022-01-12 | LPKF Laser & Electronics AG | Verfahren zum einbringen von durchbrechungen in ein substrat |
JP2015037808A (ja) * | 2013-08-02 | 2015-02-26 | ロフィン−ジナール テクノロジーズ インコーポレイテッド | 透明材料の内部でレーザーフィラメンテーションを実行する方法および装置 |
JP2015032794A (ja) * | 2013-08-06 | 2015-02-16 | 株式会社ディスコ | ウエーハの加工方法 |
US9819141B2 (en) | 2013-11-12 | 2017-11-14 | Imra America, Inc. | Compact fiber short pulse laser sources |
KR101407993B1 (ko) * | 2013-12-10 | 2014-06-18 | 주식회사 엘티에스 | 기판 절단방법 |
US10173916B2 (en) | 2013-12-17 | 2019-01-08 | Corning Incorporated | Edge chamfering by mechanically processing laser cut glass |
KR102287201B1 (ko) * | 2013-12-17 | 2021-08-09 | 코닝 인코포레이티드 | 이온-교환가능한 유리 기판의 레이저 절단 |
US9687936B2 (en) | 2013-12-17 | 2017-06-27 | Corning Incorporated | Transparent material cutting with ultrafast laser and beam optics |
US10597321B2 (en) | 2013-12-17 | 2020-03-24 | Corning Incorporated | Edge chamfering methods |
US10611668B2 (en) | 2013-12-17 | 2020-04-07 | Corning Incorporated | Laser cut composite glass article and method of cutting |
JP2020097519A (ja) * | 2013-12-17 | 2020-06-25 | コーニング インコーポレイテッド | 3d成形透明脆性基板の加工 |
US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
KR20160098468A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 엣지 챔퍼처리 방법 |
JP2017511777A (ja) * | 2013-12-17 | 2017-04-27 | コーニング インコーポレイテッド | エッジ面取り加工方法 |
US9815730B2 (en) | 2013-12-17 | 2017-11-14 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
US10392290B2 (en) | 2013-12-17 | 2019-08-27 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
KR20160098470A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 3d 형상의 투명한 취성 기판 처리 |
JP2017507878A (ja) * | 2013-12-17 | 2017-03-23 | コーニング インコーポレイテッド | 3d成形透明脆性基板の加工 |
US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
KR20160098469A (ko) * | 2013-12-17 | 2016-08-18 | 코닝 인코포레이티드 | 이온-교환가능한 유리 기판의 레이저 절단 |
US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
KR102287200B1 (ko) * | 2013-12-17 | 2021-08-09 | 코닝 인코포레이티드 | 레이저 컷팅 화합물 유리 물품 및 컷팅 방법 |
US10293436B2 (en) | 2013-12-17 | 2019-05-21 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
KR20160099673A (ko) * | 2013-12-17 | 2016-08-22 | 코닝 인코포레이티드 | 레이저 컷팅 화합물 유리 물품 및 컷팅 방법 |
KR102288418B1 (ko) * | 2013-12-17 | 2021-08-11 | 코닝 인코포레이티드 | 엣지 챔퍼처리 방법 |
US11148225B2 (en) | 2013-12-17 | 2021-10-19 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US10144093B2 (en) | 2013-12-17 | 2018-12-04 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US10233112B2 (en) | 2013-12-17 | 2019-03-19 | Corning Incorporated | Laser processing of slots and holes |
US10179748B2 (en) | 2013-12-17 | 2019-01-15 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
US10183885B2 (en) | 2013-12-17 | 2019-01-22 | Corning Incorporated | Laser cut composite glass article and method of cutting |
KR102288419B1 (ko) * | 2013-12-17 | 2021-08-11 | 코닝 인코포레이티드 | 3d 형상의 투명한 취성 기판 처리 |
KR102432658B1 (ko) * | 2014-01-27 | 2022-08-16 | 코닝 인코포레이티드 | 레이저 컷팅 유리를 기계적으로 처리하여 챔퍼링된 에지 |
KR20160113694A (ko) * | 2014-01-27 | 2016-09-30 | 코닝 인코포레이티드 | 레이저 컷팅 유리를 기계적으로 처리하여 챔퍼링된 에지 |
JP2017510535A (ja) * | 2014-01-27 | 2017-04-13 | コーニング インコーポレイテッド | レーザ切断済みガラスを機械的に加工することによる縁部面取り |
KR101436627B1 (ko) * | 2014-03-06 | 2014-09-01 | 주식회사 엘티에스 | 유리기판 절단방법 |
KR102163442B1 (ko) | 2014-04-21 | 2020-10-08 | 가부시기가이샤 디스코 | 단결정 기판의 가공 방법 |
TWI630968B (zh) * | 2014-04-21 | 2018-08-01 | 日商迪思科股份有限公司 | Processing method of single crystal substrate |
JP2015207664A (ja) * | 2014-04-21 | 2015-11-19 | 株式会社ディスコ | 単結晶基板の加工方法 |
KR20150121659A (ko) * | 2014-04-21 | 2015-10-29 | 가부시기가이샤 디스코 | 단결정 기판의 가공 방법 |
US11697178B2 (en) | 2014-07-08 | 2023-07-11 | Corning Incorporated | Methods and apparatuses for laser processing materials |
US9815144B2 (en) | 2014-07-08 | 2017-11-14 | Corning Incorporated | Methods and apparatuses for laser processing materials |
US9975799B2 (en) | 2014-07-14 | 2018-05-22 | Corning Incorporated | Methods and apparatuses for fabricating glass articles |
EP3169634A1 (en) * | 2014-07-14 | 2017-05-24 | Corning Incorporated | Methods and apparatuses for fabricating glass articles |
US11648623B2 (en) | 2014-07-14 | 2023-05-16 | Corning Incorporated | Systems and methods for processing transparent materials using adjustable laser beam focal lines |
US9617180B2 (en) | 2014-07-14 | 2017-04-11 | Corning Incorporated | Methods and apparatuses for fabricating glass articles |
US10526234B2 (en) | 2014-07-14 | 2020-01-07 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
US10335902B2 (en) | 2014-07-14 | 2019-07-02 | Corning Incorporated | Method and system for arresting crack propagation |
US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
JP2017521877A (ja) * | 2014-07-15 | 2017-08-03 | イノラス ソリューションズ ゲーエムベーハー | 平面結晶性基板、特に半導体基板のレーザ加工方法及び装置 |
KR102138964B1 (ko) * | 2014-11-19 | 2020-07-28 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
CN112799236A (zh) * | 2014-11-19 | 2021-05-14 | 通快激光与系统工程有限公司 | 衍射光学射束成形元件 |
US11780033B2 (en) | 2014-11-19 | 2023-10-10 | Trumpf Laser- Und Systemtechnik Gmbh | System for asymmetric optical beam shaping |
US10620444B2 (en) | 2014-11-19 | 2020-04-14 | Trumpf Laser- Und Systemtechnik Gmbh | Diffractive optical beam shaping element |
KR102251985B1 (ko) * | 2014-11-19 | 2021-05-17 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
US10661384B2 (en) | 2014-11-19 | 2020-05-26 | Trumpf Laser—und Systemtechnik GmbH | Optical system for beam shaping |
US11150483B2 (en) | 2014-11-19 | 2021-10-19 | Trumpf Laser- Und Systemtechnik Gmbh | Diffractive optical beam shaping element |
WO2016079063A1 (de) * | 2014-11-19 | 2016-05-26 | Trumpf Laser- Und Systemtechnik Gmbh | Diffraktives optisches strahlformungselement |
CN107027325A (zh) * | 2014-11-19 | 2017-08-08 | 通快激光与系统工程有限公司 | 衍射光学射束成形元件 |
CN107027325B (zh) * | 2014-11-19 | 2021-02-02 | 通快激光与系统工程有限公司 | 衍射光学射束成形元件 |
KR20200090967A (ko) * | 2014-11-19 | 2020-07-29 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
US10882143B2 (en) | 2014-11-19 | 2021-01-05 | Trumpf Laser- Und Systemtechnik Gmbh | System for asymmetric optical beam shaping |
KR20170102467A (ko) * | 2014-11-19 | 2017-09-11 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | 비대칭 광학 빔 정형을 위한 시스템 |
US20170276951A1 (en) * | 2014-11-19 | 2017-09-28 | Trumpf Laser- Und Systemtechnik Gmbh | Diffractive optical beam shaping element |
KR101655428B1 (ko) * | 2014-11-24 | 2016-09-08 | 주식회사 필옵틱스 | 베셀 빔을 이용한 절단용 광학기기 및 그를 이용한 절단 장치 |
KR20160061763A (ko) * | 2014-11-24 | 2016-06-01 | 주식회사 필옵틱스 | 베셀 빔을 이용한 절단용 광학기기 및 그를 이용한 절단 장치 |
US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
US11014845B2 (en) | 2014-12-04 | 2021-05-25 | Corning Incorporated | Method of laser cutting glass using non-diffracting laser beams |
JP2015091606A (ja) * | 2014-12-22 | 2015-05-14 | イムラ アメリカ インコーポレイテッド | 超短パルスレーザでの透明材料処理 |
US10252931B2 (en) | 2015-01-12 | 2019-04-09 | Corning Incorporated | Laser cutting of thermally tempered substrates |
US11773004B2 (en) | 2015-03-24 | 2023-10-03 | Corning Incorporated | Laser cutting and processing of display glass compositions |
US10525657B2 (en) | 2015-03-27 | 2020-01-07 | Corning Incorporated | Gas permeable window and method of fabricating the same |
US11186060B2 (en) | 2015-07-10 | 2021-11-30 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
TWI715548B (zh) * | 2015-12-22 | 2021-01-11 | 鄭鈞文 | 硬脆材料的雷射切割方法及雷射切割機與雷射切割機的光學系統 |
US11111170B2 (en) | 2016-05-06 | 2021-09-07 | Corning Incorporated | Laser cutting and removal of contoured shapes from transparent substrates |
US11114309B2 (en) | 2016-06-01 | 2021-09-07 | Corning Incorporated | Articles and methods of forming vias in substrates |
JP2016187835A (ja) * | 2016-06-14 | 2016-11-04 | イムラ アメリカ インコーポレイテッド | 超短パルスレーザでの透明材料処理 |
US11774233B2 (en) | 2016-06-29 | 2023-10-03 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
US10377658B2 (en) | 2016-07-29 | 2019-08-13 | Corning Incorporated | Apparatuses and methods for laser processing |
US10522963B2 (en) | 2016-08-30 | 2019-12-31 | Corning Incorporated | Laser cutting of materials with intensity mapping optical system |
CN109803786A (zh) * | 2016-09-30 | 2019-05-24 | 康宁股份有限公司 | 使用非轴对称束斑对透明工件进行激光加工的设备和方法 |
US11130701B2 (en) | 2016-09-30 | 2021-09-28 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
KR102078294B1 (ko) | 2016-09-30 | 2020-02-17 | 코닝 인코포레이티드 | 비-축대칭 빔 스폿을 이용하여 투명 워크피스를 레이저 가공하기 위한 기기 및 방법 |
KR20190065335A (ko) * | 2016-09-30 | 2019-06-11 | 코닝 인코포레이티드 | 비-축대칭 빔 스폿을 이용하여 투명 워크피스를 레이저 가공하기 위한 기기 및 방법 |
WO2018064409A1 (en) * | 2016-09-30 | 2018-04-05 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
EP3311947B1 (en) | 2016-09-30 | 2019-11-20 | Corning Incorporated | Methods for laser processing transparent workpieces using non-axisymmetric beam spots |
EP3597353A1 (en) * | 2016-09-30 | 2020-01-22 | Corning Incorporated | Apparatuses for laser processing transparent workpieces using non-axisymmetric beam spots |
US10730783B2 (en) | 2016-09-30 | 2020-08-04 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
EP3311947A1 (en) * | 2016-09-30 | 2018-04-25 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
CN109803786B (zh) * | 2016-09-30 | 2021-05-07 | 康宁股份有限公司 | 使用非轴对称束斑对透明工件进行激光加工的设备和方法 |
US11542190B2 (en) | 2016-10-24 | 2023-01-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
NL2017998B1 (en) * | 2016-12-14 | 2018-06-26 | Corning Inc | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
US10710194B2 (en) * | 2017-01-17 | 2020-07-14 | Gigaphoton Inc. | Laser processing system and laser processing method |
US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
US11972993B2 (en) | 2017-05-25 | 2024-04-30 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
US11062986B2 (en) | 2017-05-25 | 2021-07-13 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
JP7198285B2 (ja) | 2018-02-15 | 2022-12-28 | ショット アクチエンゲゼルシャフト | 透明な脆性材料に分割線を挿入するための方法および装置、ならびに本方法によって製造可能な、分割線が設けられた要素 |
JP2021513951A (ja) * | 2018-02-15 | 2021-06-03 | ショット アクチエンゲゼルシャフトSchott AG | 透明な脆性材料に分割線を挿入するための方法および装置、ならびに本方法によって製造可能な、分割線が設けられた要素 |
US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
CN112566749A (zh) * | 2018-08-20 | 2021-03-26 | 日本瑞翁株式会社 | 切割膜的制造方法、切割膜及切割膜用膜 |
US11633805B2 (en) | 2018-09-28 | 2023-04-25 | Corning Incorporated | Rotating light source utilized to modify substrates |
CN114555276A (zh) * | 2019-10-11 | 2022-05-27 | 通快激光与系统工程有限公司 | 用于贝塞尔射束加工光学器件的调整设备和方法 |
WO2021069362A1 (de) * | 2019-10-11 | 2021-04-15 | Trumpf Laser- Und Systemtechnik Gmbh | Justage-vorrichtung für eine bessel-strahl-bearbeitungsoptik und verfahren |
JP2021065912A (ja) * | 2019-10-24 | 2021-04-30 | 株式会社ディスコ | レーザー加工装置 |
JP7383340B2 (ja) | 2019-10-24 | 2023-11-20 | 株式会社ディスコ | レーザー加工装置 |
JP7236371B2 (ja) | 2019-11-26 | 2023-03-09 | 株式会社フジクラ | ビームシェイパ、加工装置、及びビームシェイピング方法 |
JP2021085939A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社フジクラ | ビームシェイパ、加工装置、及びビームシェイピング方法 |
JP2021085940A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社フジクラ | ビームシェイパ、加工装置、及びビームシェイピング方法 |
WO2022260280A1 (ko) * | 2021-06-07 | 2022-12-15 | 삼성전자주식회사 | 광학 시스템 |
Also Published As
Publication number | Publication date |
---|---|
JP4418282B2 (ja) | 2010-02-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4418282B2 (ja) | レーザ加工方法 | |
JP4490883B2 (ja) | レーザ加工装置およびレーザ加工方法 | |
JP5449665B2 (ja) | レーザ加工方法 | |
JP4478184B2 (ja) | レーザ割断方法およびレーザ加工装置 | |
JP5134928B2 (ja) | 加工対象物研削方法 | |
JP5054496B2 (ja) | 加工対象物切断方法 | |
JP4322881B2 (ja) | レーザ加工方法及びレーザ加工装置 | |
JP5089735B2 (ja) | レーザ加工装置 | |
US20110132885A1 (en) | Laser machining and scribing systems and methods | |
JP4584322B2 (ja) | レーザ加工方法 | |
JP2002192371A (ja) | レーザ加工方法及びレーザ加工装置 | |
JP2002205180A (ja) | レーザ加工方法 | |
JP5378314B2 (ja) | レーザ切断方法 | |
JP2005313238A (ja) | レーザ加工方法 | |
JP4607537B2 (ja) | レーザ加工方法 | |
JP3751970B2 (ja) | レーザ加工装置 | |
KR20110139007A (ko) | 펨토초 레이저에 의해 나노 보이드 어레이 형성을 통한 절단방법 | |
JP3873098B2 (ja) | レーザ加工方法および装置 | |
JP3867108B2 (ja) | レーザ加工装置 | |
JP2006165593A (ja) | 半導体材料基板の切断方法 | |
JP2006165594A (ja) | 半導体材料基板の切断方法 | |
JP2006167810A (ja) | レーザ加工方法 | |
JP2005142303A (ja) | シリコンウエーハの分割方法および分割装置 | |
JP5613809B2 (ja) | レーザ切断方法およびレーザ加工装置 | |
JP2005123329A (ja) | 板状物の分割方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070308 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090612 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090623 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090821 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091104 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091127 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4418282 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121204 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121204 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131204 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131204 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |