JP2005221386A - Calibration data control method for physical quantity sensor, physical quantity sensor, calibration device, and physical quantity sensing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a load for sensor calibration work, and to simplify circuit constitution for a sensor to reduce a size and an electric power consumption. <P>SOLUTION: When controlling calibration data for the physical quantity sensor provided with a sensor body 11 for detecting a physical quantity, a memory 14, a control part 12, a communication part 12 for communication with an outside, and an electric power source part 13, the control part of the present invention receives environmental information of a portion installed with the sensor body via the communication part, and prepares the calibration data for the detected physical quantity output from the sensor body in correspondence to the received environmental information. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a physical quantity sensor (hereinafter simply referred to as “sensor”) that detects various physical quantities, and more particularly to a calibration technique for detected physical quantities.

  As the physical quantity of the detection target of the sensor, for example, temperature, humidity, pressure, speed, acceleration, potential, voltage, current, concentration, liquid volume, solar radiation, radiation, gas detection, strain, moisture, etc. can be detected. There are physical quantities. It is proposed to add a communication function such as wireless to such a sensor that detects physical quantities, to install a large number of sensors in the equipment or device to be detected, and to connect these sensors through a communication network to form a sensor network (For example, refer nonpatent literature 1). According to this, for example, it is proposed to apply to services in a wide range of business fields such as medical and biotechnology fields, information communication, home appliances, transportation / urban systems, and the like.

  In addition, sensor modules incorporating a power generation function such as a solar cell, various sensors, and an optical communication function have been developed (see pages 120-121 of Non-Patent Document 1, Non-Patent Document 2). In such a sensor network system, a predetermined physical quantity is measured and transmitted to an external device by using a built-in power generation function and communication function, thereby being used for various businesses.

  By the way, not only a sensor incorporating a power generation function and a communication function, but also a mass-produced sensor, the work of acquiring sensor calibration data and the work of managing the acquired calibration data are problematic. That is, the sensor calibration data needs to be acquired for each sensor because, as is well known, the sensitivity characteristics, temperature characteristics, and the like of the detected physical quantity vary depending on individual sensors due to variations in manufacturing and the like. Therefore, as the number of sensors increases, the cost for manufacturing the sensor increases.

  For example, as a conventional technique for acquiring and managing calibration data, sensors are installed under predetermined environmental conditions such as a thermostatic bath, and the physical quantity detected by each sensor is received by the master unit to create calibration data. Based on this, it has been proposed to set a calibrated tolerance value in the nonvolatile memory of each sensor (for example, Patent Document 1). According to this, it is not necessary to store calibration data in the parent device constituting the sensor network system.

  Similarly, it is proposed that calibration data is created by the master unit, correction data such as sensitivity and temperature characteristics are stored in the sensor memory, and the sensor calibrates the detected physical quantity with the correction data and outputs it. (For example, Patent Document 2).

Japanese Patent Laid-Open No. 2001-336955 (page 3-7, FIG. 1) JP 2000-338193 A Fumada Takahashi and Hiroki Hamada “If the Sensor Connects to the Internet”, Nikkei Electronics 2002-7-15, Nikkei BP, July 15, 2002, p.100-129 B. Warneke, B. Atwood, K.S.J.Pister, "Smart Dust Mote Forerunners," Proceedings of the Fourteenth Annual International Conference on Microelectromechanical Systems (MEMS 2001), Interlaken, Switzerland, January 21-25, 2001, pp. 357-360.

  According to the techniques described in Patent Documents 1 and 2 and the like, when an output command for a detected physical quantity is transmitted from the parent machine to the sensor, the detected physical quantity is transmitted from the sensor to the parent machine. Then, the master unit obtains an allowable value or correction data of the detected physical quantity based on the calibration data, and transmits it to the sensor. For this reason, when the load of the calibration work in the parent device is high and the number of sensors is large, the calibration work takes a long time. In addition, since transmission / reception is repeated between the master unit and the sensor, the possibility of erroneous transmission and reception of signals increases depending on the number of transmissions / receptions, resulting in variations in sensor quality and a decrease in yield. there is a possibility.

  Moreover, in the techniques described in Patent Documents 1 and 2 and the like, the calibration process of the detected physical quantity is performed by the sensor, so that complicated signal processing is required for the information processing unit mounted on the sensor. Therefore, the circuit configuration of the transmission / reception unit in the sensor and the configuration of the information processing unit become complicated, which may lead to an increase in the size, power consumption, and cost of the entire sensor.

  It is an object of the present invention to reduce the load of sensor calibration work.

  Another object of the present invention is to reduce the size and power consumption of the sensor by simplifying the circuit configuration of the sensor.

  In order to solve the above-mentioned problems, the present invention is a physical quantity sensor calibration data management method comprising a sensor body that detects a physical quantity, a memory, a control unit, a communication unit that communicates with the outside, and a power supply unit. The control unit receives the environmental information of the part where the sensor main body is installed via the communication unit, and outputs the calibration data of the detected physical quantity output from the sensor main body corresponding to the received environmental information. It is characterized by creating.

  By configuring in this way, information on the environment in which the sensor body is installed (for example, detected physical quantities and environmental factors related to sensor characteristics such as temperature, pressure, voltage, etc.) from a calibration device such as a base unit to the sensor. With only one transmission, the calibration data is stored in the sensor memory and the sensor calibration operation is completed. Since this calibration work can be performed at the same time for a plurality of sensors placed in the same environment, it is possible to reduce the load of the sensor calibration work.

  In this case, the sensor can generate the calibration data in response to the reception of the environment information. However, the calibration data can be generated by transmitting a calibration data write command together with the environment information from the parent device. Note that the communication unit that communicates with the outside can be applied to any of wireless communication, optical communication using infrared rays, and wired communication.

  In the above case, the physical quantity sensor of the present invention can be configured to output the calibration data together with the detected physical quantity output from the sensor body in response to an externally detected physical quantity output command. . That is, the sensor responds to the detected physical quantity output command, adds calibration data to the detected physical quantity at that time, and transmits calibration data to the parent machine or the like, and the parent machine performs calibration processing of the detected physical quantity. Thereby, the function of the information processing part of a sensor can be simplified and it can contribute to size reduction and power saving. In this case, by assigning unique identification information to each sensor and sending the transmission data with the identification information when transmitting externally from the sensor, a large number of sensors can be connected to the same communication network. Even if connected to the sensor, each sensor can be identified by the master unit or the like.

  The calibration device of the present invention includes an environment control room in which the physical quantity sensor of the present invention is installed, and a calibrator including a communication unit and a control unit that communicate with the outside via a communication network. The control unit can be configured to include means for outputting environment information of the environment control room to the communication network via the communication unit of the calibrator. In this case, by making it possible to install a desired number of sensors in the environmental control room, a large number of sensors can be calibrated at the same time. Since the sensor has calibration data, the master unit does not need to hold calibration data.

  In addition, the physical quantity sensing system of the present invention includes a control unit having a communication unit that communicates with the outside via a communication network, and means for outputting a detected physical quantity output command to the communication network via the communication unit. A main unit, a sensor main body for detecting a physical quantity, a memory storing calibration data of the detected physical quantity of the sensor main body, a sensor communication unit for communicating with the outside via the communication network, a sensor control unit, and a power supply unit The sensor control unit responds to a detection physical quantity output command input via the sensor communication unit, and detects the self-identification information and the detection output from the sensor main body. Means for outputting a physical quantity and the calibration data to the communication network via the sensor communication unit, wherein the master unit receives the identification information, the detected physical quantity and the calibration data inputted via the communication unit. Based on the data, it can be configured with a means for calibrating the detection physical quantity of the physical quantity sensor.

  As described above, since the calibration process of the detected physical quantity output from the sensor of the present invention is performed by the master unit, the functional configuration of the sensor can be simplified to save power and reduce the size. Further, since the command from the master unit to the sensor is only the calibration data write command or the environment information and the output command of the detected physical quantity, the command decoding function on the sensor side can be simplified. Furthermore, since the sensor data output from the sensor has only one format including its own identification information, detected physical quantity, and calibration data, the circuit configuration of the communication unit of the sensor can be simplified.

  According to the present invention, it is possible to reduce the load of sensor calibration. In addition, the sensor circuit configuration can be simplified to reduce the size and power consumption of the sensor.

Embodiments of the present invention will be described below with reference to the drawings.
(Embodiment 1)
FIG. 1 shows a flowchart of an embodiment of a calibration data management method of the present invention, FIG. 2 shows a configuration diagram of a sensor of an embodiment to which the calibration data management method of the present invention can be applied, and FIG. The block diagram of one Embodiment of the calibration apparatus of invention is shown.

  As shown in FIG. 2, the sensor 1 includes a sensor main body 11 that detects a physical quantity, a wireless communication / control unit 12, a power supply unit 13, a memory 14, and an antenna 15. The sensor body 11 can be applied to detect a physical quantity that can be measured, and is not limited to one that detects a single physical quantity, but can also apply a sensor that can detect a plurality of physical quantities. The wireless communication / control unit 12 transmits the detected physical quantity data measured by the sensor body 11 to an external device (for example, a master unit), receives a command from the external device, the sensor body 11, the power source unit 13, The memory 14 is controlled. The antenna 15 transmits and receives data between the sensor 1 and an external device. The power supply unit 13 supplies power necessary for driving the sensor 1.

  Specifically, the sensor body 11 includes temperature, humidity, concentration, viscosity, force, stress, pressure, acceleration, speed, vibration and sound frequency, sound wave, light (emission intensity, etc.), strain, displacement, impedance, conductance. It is possible to apply a device that detects measurable physical quantities such as inductance, resistance, conductivity, elastic constant, thermal diffusivity, thermal conductivity, specific heat, and other physical property values. The wireless communication / control unit 12 is not particularly limited as long as it is a communicable signal such as a signal in a specific frequency band, a signal in a plurality of frequency bands, or a signal in a multiband frequency band. In this embodiment, an example of wireless communication is shown. However, the communication with an external device is not necessarily limited to wireless communication. Optical communication using infrared rays or wired communication is not necessarily required. Communication can be employed.

  Further, the power supply unit 13 can adopt various autonomous power supply methods such as a power generation method and a battery, as well as other power supply methods from the outside by wire. As a power generation method, vibration power generation, piezoelectric power generation, thermoelectric power generation, photoelectric power generation including solar cells, power generation by an external fluid such as wind power, power generation by dielectric electromotive force using a coil, or a power source such as a fuel cell can be applied. Moreover, as a battery, batteries, such as a dry battery, a button battery, a lithium ion secondary battery, a hydrogen nickel battery, a lead acid battery, are applicable. The power supply method is not particularly limited as long as it is a power source that can drive the sensor 1.

  The memory 14 includes at least an area for storing identification information of each sensor and an area for storing calibration data (calibration table) of the sensor main body 11. The memory 14 is preferably a non-volatile memory so that information is not lost even if the power supply unit 13 is not functioning. The identification information is information such as a unique code number for each sensor 1 and is given before shipping the sensor 1 as a product. It is preferable that the identification information is not rewritable thereafter, or that a rewritable method can be adopted only by the manufacturer. The same applies to the calibration table, and it is preferable to adopt a method in which information written during calibration work at the manufacturer cannot be rewritten on the user side.

  In the embodiment of FIG. 2, the power supply unit 13 is connected to the sensor body 11, the wireless communication / control unit 12, and the memory 14, and the sensor body 11, the memory 14, and the antenna 15 are separately wireless. Although it is connected to the communication / control unit 12, any connection may be used as long as it is configured to receive power supplied from the power supply unit 13 and transmit the detected physical quantity measured by the sensor body 11 to an external device. .

  The sensor 1 configured as shown in FIG. 2, for example, is manufactured in large quantities and installed in an appropriate area of the measurement target facility, and is used by forming a network with an external device (for example, a master unit) via a communication network. Can do.

  Such a sensor 1 needs to be calibrated for each sensor 1 at the time of shipment, for example, because the characteristics of the individual sensor 1 differ due to manufacturing variations. The present invention features a sensor calibration method and calibration data management method, and an embodiment of an operation for calibrating a plurality of sensors at the same time will be described with reference to FIGS. 1 and 3.

As shown in FIG. 3, the sensor calibration work is performed by installing _n sensors 1 (11 to _n ) in an environment control room 2 in which environmental conditions such as a temperature-controlled room are controlled. The environmental control room 2 includes, in addition to temperature, physical quantities to be measured using the sensor 1, such as humidity and pressure, and environmental factors that are not directly measured by the sensor 1 but whose characteristics must be guaranteed as products. It has a function that can be controlled to a predetermined value. The master unit (calibrator) 3 that transmits the calibration work instruction to the sensor 1 may be installed inside the environment control room 2 or outside. The number n of sensors 1 installed in the environmental control room 2 may be any number as long as it can be calibrated at the same time. The number should be large as long as the content and accuracy of the calibration work are not adversely affected.

After the environmental factors in the environmental control room 2 are controlled and maintained constant, the calibration operation is started. As shown in FIGS. 1 and 3, the parent device 3 transmits environment information and a calibration table write command to n sensors 11 to _n at a time (S1). In response to this, each of the sensors 11 to _n receives supply of autonomous power from the mounted power supply unit 13 and receives a command from the base unit 3 by the wireless communication / control unit 12 via the antenna 15. To do. The n sensors 11 to _{n associate the} detected physical quantity signal output from the sensor main body 11 installed in the environmental control chamber 2 maintained constant with the environmental information input from the parent device 3. Then, it is stored as calibration data in the calibration table of the determined nonvolatile area of the memory 14 (S2). The operation of step S2 is executed without requiring external stimulation other than reception. By repeating the steps S1 and S2 with the environmental factor conditions, that is, the calibration points (S3 and S4), for example, three times, a unique calibration table of the sensor body 11 is created for each of the sensors 11 to _n. . That is, a correspondence table between the environmental information and the detected physical quantity of the sensor body 11 is created. At this time, no information of the individual sensors 11 to _n is accumulated on the base unit 3 side.

  FIG. 4 is a diagram showing the relationship between the environmental information and the detected physical quantity of the sensor main body 11 in the calibration work of FIG. The horizontal axis in FIG. 4 indicates environmental factors (for example, temperature, humidity, pressure, force, acceleration, etc.) of the environmental control room 2, and the vertical axis indicates the sensor output voltage correlated with the detected physical quantity as an example. It goes without saying that the sensor output voltage on the vertical axis is merely an example, and a signal other than the voltage may be used. In this figure, in order to obtain a correlation between the environmental factor and the detected physical quantity of the sensor main body 11, when the characteristic of the detected physical quantity with respect to the environmental factor has a predictable linear characteristic, calibration point data for at least one environmental factor is obtained. I just need it. However, if linearity or the like cannot be assumed, it is desirable to create a calibration table by acquiring the detected physical quantities of calibration points for three or more environmental factors. The format of the calibration table is the order of the environmental information and the detected physical quantity, but this is any format as long as the content of the calibration table can be confirmed on the master unit 3 side during calibration work and product use. It doesn't matter. However, considering the possibility of occurrence of a transmission / reception error of a detected physical quantity by a sensor, which will be described later, it is desirable that the one environment information and the detected physical quantity corresponding thereto be described as close as possible.

With this configuration, according to the present embodiment, environmental information (for example, detected physical quantities and environmental factors related to sensor characteristics such as temperature, pressure, voltage, etc.) where the sensor main body 11 is installed from the parent device 3. Is transmitted to the sensors 11 to _n once, the calibration data is stored in the calibration table of the memory 14 of the sensors 11 to _n , and the calibration operation is completed. In addition, since the calibration work can be performed for n sensors at a time, the load of the calibration work can be significantly reduced.

Further, in the present embodiment, an example in which calibration is performed using the parent device 3 has been described. However, since the parent device 3 and the sensor 1 do not have an inherent relationship when the calibration is completed, a dedicated calibration is used instead of the parent device 3. A machine can be used. For this reason, since the sensor can be calibrated separately from the manufacturing process of the parent device 3 of the sensoring system, the degree of freedom of the manufacturing process is high.
(Embodiment 2)
When the wireless communication / control unit 12 of the sensor 1 receives the output command of the detected physical quantity from the external device via the antenna 15, the self-identification information, the detected physical quantity detected by the sensor body 11 at that time, and the memory 14 is provided with a function of outputting sensor information including calibration data stored in 14 to the communication network via the antenna 15.

That is, as shown in FIG. 5, in a normal sensing operation, an output command of a detected physical quantity is output from the external device such as a master unit to the sensor 1 (S11). In response to this, the sensor 1 transmits sensor data including its own identification information, a detected physical quantity at that time, and calibration data to the outside via the antenna 15 (S12). In this way, the master unit that has received the sensor data transmitted from the sensor 1 calibrates the received detected physical quantity using the simultaneously received calibration data (S13), and based on the calibrated detected physical quantity, the sensor Recognize the physical quantity of the target device of the part where 1 is installed. Similar processing is executed for all the sensors 11 to _n (S14, S15).

  Moreover, it is preferable to transmit the sensor data transmitted from the sensor 1 in the order of the identification information, the detected physical quantity, and the calibration data as described above. As a result, it is possible to recognize which physical quantity is measured by which sensor 1 without having to store calibration tables for all the sensors 1 on the base unit 3 side. Further, since the detected physical quantity is not calibrated and transmitted to the parent device 3 on the sensor 1 side, the information amount of the entire sensing system and the information processing amount of the sensor 1 can be reduced.

  Also, if the calibration table data does not reach the parent device 3 due to a transmission / reception error, for example, the calibration table data of the sensor 1 that was normally transmitted / received in the previous communication is left on the parent device 3 side. For example, when at least the identification information and the detected physical quantity are normally received, the detected physical quantity from the sensor body 11 can be calibrated to the actual physical quantity.

(Embodiment 3)
Instead of the second embodiment, the normal sensing operation of the third embodiment shown in FIG. 6 can be applied. That is, a data format storing identification information is output together with an output command of a detected physical quantity from an external device such as a master unit to the sensor 1 (S21). The area for storing the detected physical quantity and the calibration data in this data format is blank. In response to this, the sensor 1 stores the detected physical quantity at that time and the calibration data in the data format, and transmits them as sensor data via the antenna 15 (S22). In this way, the master unit that has received the sensor data transmitted from the sensor 1 calibrates the detected physical quantity in the data format using the calibration data (S23), and the sensor 1 performs the calibration based on the calibrated detected physical quantity. Recognize the physical quantity of the target device of the installed site. Similar processing is executed for all the sensors 11 to _n (S24, S25). Depending on the communication method between the master and the sensor, the identification information of the sensor 1 may be transmitted without being written in the data format, and the identification information may be written by the sensor 1.

(Embodiment 4)
Using the function of the second or third embodiment, for example, defective products of the sensor 1 can be eliminated during the calibration operation of FIG. That is, for the sensor 1 that deviates from the range allowed as the manufacturing tolerance indicated by the dotted line in FIG. 4, as shown in FIG. 7, an output command of the detected physical quantity is output from the master unit 3, and each sensor is responded to this. _The point that the parent device 3 receives the sensor data output from 1 to _n is the same as steps S1 and S2 in FIG. Next, the detected physical quantity is calibrated using the received calibration data (S5), and it is determined whether or not the detected physical quantity of each of the sensors 1 to _n is out of the allowable range for manufacturing tolerance. Defective product (S6). In other words, after completing a certain calibration work, the base unit 3 sets the predetermined environment information, requests the output of the detected physical quantity of the sensors 1 to _n in that case, and the detected physical quantity deviates from the allowable range. In such a case, the identification information of the sensor 1 is recorded as a defective product on the base unit 3 side, and is selected at the time of shipment.

(Embodiment 5)
8 to 10 show embodiments of the physical quantity sensing system of the present invention. The embodiment of FIG. 8 shows a case where the sensors 11 to _n are individually connected to the base unit 3 by communication. In the case of the present embodiment, the sensor 1 that has received the output command of the detected physical quantity from the parent device 3 transmits the sensor data in the order of the identification information, the detected physical quantity, and the calibration table as described in the second embodiment.

The embodiment of FIG. 9 is a case where the connection order of each sensor 1 with respect to the parent device 3 is determined in advance. In such a case, as in the third embodiment, when the output instruction of the detected physical quantity is transmitted from the parent device 3 to the specific sensor 1, the identification number of the target sensor 1, the detected physical quantity of the blank, and the blank calibration table are included. The data format is transmitted to the first sensor 1 in the sensor group (for example, sensor 1 _{1-1 in} FIG. 9). When the identification information is different from its own identification information, the sensor 1 _1-1 transfers the received output command of the detected physical quantity to the next sensor 1 _{1-2 as} it is. On the other hand, the sensor 1 _1-2 that coincides with its own identification information fills the detected physical quantity in the data format and the blank of the calibration table, and transmits it to the next sensor 1 _1-3 . In addition, when transmitting an output command of the detected physical quantity _to all the sensors 11 to _n , the detected physical quantity in the data format and the blank of the calibration table are filled in the sensor 1 having the same identification information and transmitted to the next sensor 1. What should I do?

  The embodiment of FIG. 10 is a case where the sensor 1 and the parent device 3 are arbitrarily connected to each other by a method such as ad hoc connection. Also in this case, as in FIG. 9, the sensor 1 that has received a signal with matching identification information rewrites the detected physical quantity in the data format and the calibration table, and does not rewrite them when a signal with mismatching identification information is received. To other sensors 1 and the main unit 3. Thereby, the output of the sensor 1 desired by the parent device 3 can be transmitted to the parent device 3. As a method for stopping transmission / reception of a signal in the middle of a route when a signal necessary for the master unit 3 first arrives, a known technique such as an Internet connection method may be applied.

(Embodiment 6)
11 to 14 show an embodiment in which a specific sensor network is configured using the sensor 1 of the present invention. The embodiment shown in FIG. 11 shows a case where a sensor group including a plurality of sensors 1 is used as a physical quantity sensor of an intelligent transportation system (ITS). That is, the poles 6 with the sensors 1 attached to the road 5 are installed at appropriate intervals. Then, the sensor 1 detects the road surface temperature, humidity or wind speed and transmits it to the automobile 7 traveling on the road 5. In the automobile 7, control is performed based on the received information such as the road surface temperature. In addition, as a measurement physical quantity, temperature (air temperature / road surface), humidity, dry state of road surface, atmospheric pressure, wind speed, wind direction, and the like can be considered. By calibrating the sensitivity of the sensor 1 related to these physical quantities before shipping, it is possible to reduce the man-hours and costs for calibration work and network operation when the sensor 1 configures a network.

  FIG. 12 shows an embodiment in which the sensor 1 is embedded in the structure 8 in order to measure strain and displacement in the structure (for example, a concrete structure). In the present embodiment, in particular, there is an advantage that calibration information of the sensor 1 embedded in an unspecified number of places does not need to be recorded in the parent device 3. When the detected physical quantity output from the sensor 1 continues to deviate extremely from the calibration table, the sensor 1 can be removed from the network as a damaged product.

  FIG. 13 shows an embodiment when used as a monitoring sensor for a piping system of a power plant. The power plant operates the boiler 22 with the fuel supplied from the fuel system 21, drives the turbine / generator 23 with the generated steam, and supplies the generated power to the outside through the transmission line 24. ing. The boiler 22 is supplied with necessary air and gas from an air / gas supply system 25. The steam that has driven the turbine / generator 23 is condensed by the ascites device 26 and circulated to the boiler 22. Boiler water is supplied to the ascites device 26 from a supply water system 27.

  By providing the sensor 1 at an arbitrary location such as the piping system of the power plant configured as described above and monitoring it by the monitoring device 28 such as the master unit, for example, leakage of piping can be detected. Even in such a case, calibration work is required before shipment or during regular inspection, and the cost including maintenance can be reduced by applying the calibration data management method according to the present invention.

  FIG. 14 shows an embodiment in which the physical quantity sensor of the present invention is embedded in the tire 8 as an air pressure sensor of the tire 8 of the automobile 7. Various methods have been proposed for air pressure sensors for automobile tires, but in any case, the calibration operation has not been clarified. Even for such a physical quantity sensor, by applying the calibration data management method according to the present invention, the air pressure detected by each sensor 1 can be calibrated without having a calibration table in the main unit provided on the vehicle body side. Can be measured. In addition, since the base unit does not have a calibration table, there is an advantage that there is no need to rewrite any information on the base unit in the automobile even if the tire is replaced.

  As described above, according to each embodiment of the present invention, calibration work for a large amount of physical quantity sensors can be carried out simultaneously. In addition, since it is not necessary to have a calibration table on the base unit side, the processing amount in the control unit of the sensor can be reduced, and the system configuration can be simplified. In particular, since the format of sensor data output from the sensor can be made constant, the system configuration is simplified, the processing amount in the sensor control unit can be reduced, and the cost of the product can be reduced. In addition, since the calibration work can be processed simultaneously in parallel, the labor and time required for calibration can be greatly reduced, and the cost of the product can be greatly reduced.

It is a flowchart which shows the procedure of the calibration data creation process of one Embodiment of the calibration data management method of this invention. It is a block diagram of one Embodiment of the physical quantity sensor which can apply the calibration data management method of this invention. It is a figure explaining the point which produces calibration data by the calibration data management method of the present invention. It is a diagram which shows the relationship between the environmental information in a calibration operation | work, and the detection physical quantity of a sensor main body. It is a flowchart of one Embodiment of the sensing operation | movement using the physical quantity sensor which concerns on this invention. It is a flowchart of other embodiment of the sensing operation | movement using the physical quantity sensor which concerns on this invention. It is a flowchart of embodiment which sorts inferior goods at the time of calibration data creation of the calibration data management method of the present invention. It is a block diagram of one Embodiment of the physical quantity sensing system of this invention. It is a block diagram of other embodiment of the physical quantity sensing system of this invention. It is a block diagram of further another embodiment of the physical quantity sensing system of the present invention. It is a block diagram of one Embodiment which applied the physical quantity sensing system of this invention to the intelligent transportation system (ITS). It is embodiment which applied the physical quantity sensing system of this invention to the system which measures the distortion and displacement in a concrete structure. It is embodiment which applied the physical quantity sensing system of this invention as a monitoring sensor system of the piping system of a power plant. 1 is an embodiment in which a physical quantity sensing system of the present invention is applied as an air pressure sensor system for an automobile tire.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sensor 2 Environment control room 3 Main | base station 11 Sensor main body 12 Wireless communication and control part 13 Power supply part 14 Memory 15 Antenna

Claims (6)

  A physical quantity sensor calibration data management method comprising: a sensor main body that detects a physical quantity; a memory; a control unit; a communication unit that communicates with the outside; and a power supply unit, wherein the control unit Calibration of the physical quantity sensor, wherein the calibration information of the detected physical quantity output from the sensor body is generated in correspondence with the received environment information Data management method.   The calibration data management method for a physical quantity sensor according to claim 1, wherein the calibration data is output together with the detected physical quantity of the sensor body in response to an externally detected physical quantity output command.   A sensor main body that detects a physical quantity, a memory, a control unit, a communication unit that communicates with the outside, and a power supply unit, wherein the control unit is an environment of a part where the sensor main body is installed via the communication unit A physical quantity sensor comprising means for receiving information and storing the detected physical quantity output from the sensor body as calibration data in the memory in correspondence with the received environmental information.   In response to a detected physical quantity output command input via the communication unit, the control unit transmits its own identification information, a detected physical quantity output from the sensor body, and the calibration data via the communication unit. The physical quantity sensor according to claim 3, further comprising means for outputting to the outside.   An environment control room in which the physical quantity sensor according to claim 3 or 4 is installed, and a calibrator including a communication unit and a control unit that communicate with the outside, wherein the control unit of the calibrator communicates with the calibrator. A physical quantity sensor calibration apparatus comprising means for outputting environmental information of the environmental control room to the outside via a unit. A master unit comprising a communication unit that communicates with the outside via a communication network, and a control unit that has a means for outputting a detected physical quantity output command to the communication network via the communication unit;
A sensor main body for detecting a physical quantity, a memory storing calibration data of the detected physical quantity of the sensor main body, a sensor communication unit that communicates with the outside via the communication network, a sensor control unit, and a power supply unit A physical quantity sensor,
The sensor control unit responds to a detected physical quantity output command input via the sensor communication unit, and sends the identification information of itself, the detected physical quantity output from the sensor body, and the calibration data to the sensor communication unit. Means for outputting to the communication network via
The base unit is a physical quantity sensing system including means for calibrating the detected physical quantity based on the identification information, the detected physical quantity, and the calibration data input via the communication unit.

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