JP2005121417A - Inspection device for printed circuit board - Google Patents

Inspection device for printed circuit board Download PDF

Info

Publication number
JP2005121417A
JP2005121417A JP2003354911A JP2003354911A JP2005121417A JP 2005121417 A JP2005121417 A JP 2005121417A JP 2003354911 A JP2003354911 A JP 2003354911A JP 2003354911 A JP2003354911 A JP 2003354911A JP 2005121417 A JP2005121417 A JP 2005121417A
Authority
JP
Japan
Prior art keywords
circuit board
printed circuit
light receiving
receiving element
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003354911A
Other languages
Japanese (ja)
Inventor
Akira Ishimaru
朗 石丸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiren Co Ltd
Original Assignee
Seiren Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiren Denshi KK filed Critical Seiren Denshi KK
Priority to JP2003354911A priority Critical patent/JP2005121417A/en
Publication of JP2005121417A publication Critical patent/JP2005121417A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a wide-ranged and precise one-dimensional image of a printed circuit board, to cope with a mass production process, and to obtain an inspection result quickly and precisely, in an inspection device for inspecting optically through holes provided in the printed circuit board. <P>SOLUTION: The printed circuit board 1 is illuminated through a glass 2 with a diffusion processing function from a backface side (rear side) by a high-brightness line illumination lamp with a condenser. Transmission lights through through holes of the printed circuit board 1 are detected by two detecting parts 5a, 5b provided with a telecentric lens and a one-dimensional photoreception element, signals from the respective detecting parts 5a, 5b are calculated by parallel processing circuits 6a, 6b to be composed by an integration circuit 7, and the number of the through holes, positions thereof, dimensions thereof and the like are obtained based thereon. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、プリント回路基板に設けられた貫通穴の数、位置、寸法等を光学的に検査するプリント回路基板検査装置に関するものである。   The present invention relates to a printed circuit board inspection apparatus that optically inspects the number, position, dimensions, and the like of through holes provided in a printed circuit board.

プリント回路基板の量産工程において、プリント回路基板に設けられた貫通穴の数、位置、寸法等を検査する場合、一般的には光学的に基板表面を検査することが行われている。従来、このような検査を行う装置として、一次元もしくは二次元の受光素子と、汎用の結像光学系を用いた検査装置が知られている。   In the mass production process of a printed circuit board, when inspecting the number, position, dimension, etc. of through holes provided in the printed circuit board, generally, the substrate surface is optically inspected. Conventionally, as an apparatus for performing such an inspection, an inspection apparatus using a one-dimensional or two-dimensional light receiving element and a general-purpose imaging optical system is known.

図4は一次元受光素子を用いた従来の検査装置の概略構成を示す図である。同図中、101はプリント回路基板、102は一次元受光素子、103は結像光学系である。一次元受光素子102と結像光学系103からなる検出部の視野はaで示され、この検出部を主走査方向bと副走査方向cに移動させることで、プリント回路基板101の全表面の検査を行うことができる。   FIG. 4 is a diagram showing a schematic configuration of a conventional inspection apparatus using a one-dimensional light receiving element. In the figure, 101 is a printed circuit board, 102 is a one-dimensional light receiving element, and 103 is an imaging optical system. The field of view of the detection unit composed of the one-dimensional light receiving element 102 and the imaging optical system 103 is indicated by a. By moving this detection unit in the main scanning direction b and the sub-scanning direction c, the entire surface of the printed circuit board 101 is detected. Inspection can be performed.

図5に上記の検出部の具体的構成を示す。111はレンズで、112はCCDなどの一次元受光素子を示している。プリント回路基板101に設けられた貫通穴113の映像は、レンズ111を通して一次元受光素子112に結像される。114はその結像された貫通穴113の画像を表している。   FIG. 5 shows a specific configuration of the detection unit. Reference numeral 111 denotes a lens, and 112 denotes a one-dimensional light receiving element such as a CCD. The image of the through hole 113 provided in the printed circuit board 101 is imaged on the one-dimensional light receiving element 112 through the lens 111. Reference numeral 114 denotes an image of the imaged through hole 113.

また、二次元受光素子(CCDなど)を用いても、同様にプリント回路基板の貫通穴の位置や寸法を検査することができる。更に、レーザ光を用いてプリント回路基板の外観を検査することも提案されている(例えば、特許文献1参照。)。
特開平8−5345号公報
Even if a two-dimensional light receiving element (CCD or the like) is used, the position and size of the through hole of the printed circuit board can be similarly examined. Further, it has been proposed to inspect the appearance of a printed circuit board using a laser beam (see, for example, Patent Document 1).
JP-A-8-5345

ところで、プリント回路基板の貫通穴の位置や寸法を保証するために、上記のようなCCD等を用いた検査装置が利用されるが、二次元受光素子を用いたものでは、検査時間が対象の穴数に比例して増加するとともに、検出部を移動させながら画像を取り込むことができないため、量産工程が要求するタクトには対応できないという問題がある。   By the way, in order to guarantee the position and size of the through hole of the printed circuit board, an inspection apparatus using a CCD or the like as described above is used. However, in the case of using a two-dimensional light receiving element, the inspection time is an object. In addition to increasing in proportion to the number of holes, there is a problem that the image cannot be captured while moving the detection unit, and thus cannot meet the tact required by the mass production process.

それに対し、一次元受光素子を用いた検査装置では、検査時間が対象の穴数に依存することなく、また任意の速度で移動させながら画像を取り込めることができるので、高速性に優れ、量産工程向きの装置として採用されている。   On the other hand, inspection equipment using a one-dimensional light receiving element can capture images while moving at an arbitrary speed without depending on the number of holes to be inspected. It is adopted as an orientation device.

しかしながら、この一次元受光素子を用いた場合、検出部を複数回走査させて対象のプリント回路基板全体の画像を得ており、検出部の視野が広いほど検査時間は短縮されるが、検出光学系に起因する以下の(a)〜(d)の理由によって、一度に取り込める視野を小さい範囲に限定せざるをえず、プリント回路基板の全域を検査するには走査回数が増え、本来の高速性が活かされなかった。   However, when this one-dimensional light receiving element is used, the detection unit is scanned a plurality of times to obtain an image of the entire target printed circuit board. The wider the field of view of the detection unit, the shorter the inspection time. Due to the following reasons (a) to (d) due to the system, the field of view that can be captured at one time must be limited to a small range, and in order to inspect the entire area of the printed circuit board, the number of scans increases and the original high speed Sex was not utilized.

(a)一次元受光素子に画像を結像させるレンズは、一般的には視差があるので視野周辺は斜めから見ることになり、プリント回路基板のような厚みがある対象を結像させる場合、正確な形が結像されないだけでなく、基板表面の情報しか保証されないため、穴の内壁にメッキだれ、異物付着などの異常があっても結像されないため、検査の信頼性に問題が生じる(図5参照)。これは、その後の電気的、ソフトウェア的処理では補うことができない。   (A) Since a lens that forms an image on a one-dimensional light receiving element generally has parallax, the periphery of the field of view is viewed from an oblique direction. When a thick target such as a printed circuit board is formed, Not only is the accurate shape not imaged, but only the information on the substrate surface is guaranteed, so even if there is an abnormality such as plating on the inner wall of the hole or foreign matter adhesion, there is a problem in the reliability of the inspection ( (See FIG. 5). This cannot be compensated by subsequent electrical and software processing.

(b)また、上記の視差のため、視野中央部においても厚みの大きいプリント回路基板を透過光で観察した場合、穴の寸法が実際の大きさよりも小さく検出される(図5参照)。   (B) Also, due to the above-described parallax, when a printed circuit board having a large thickness is observed with transmitted light even in the center of the visual field, the size of the hole is detected smaller than the actual size (see FIG. 5).

(c)更に、レンズ個体によってばらつく視野周辺部の収差(結像誤差)の補正は極めて複雑であり、ソフトウェアの負担が大きく、処理時間が増加する原因となっている。   (C) Furthermore, correction of aberrations (image formation errors) in the peripheral portion of the field of view that varies depending on the individual lens is extremely complicated, which imposes a heavy burden on software and increases processing time.

(d)また、周知技術である自己集束レンズアレイを用いた場合、大きな一次元視野でも画面の均一性は容易に得られるが、一般のレンズに比べて解像度が劣り、ピントの合う範囲(被写界深度)が狭い、という問題があり、視差の問題も同様に発生するため、問題の解決にはならない。   (D) When a self-focusing lens array, which is a well-known technique, is used, screen uniformity can be easily obtained even with a large one-dimensional field of view, but the resolution is inferior to that of a general lens and the in-focus range (covered area) There is a problem that the depth of field) is narrow, and a parallax problem occurs in the same manner, so that the problem cannot be solved.

本発明は、上記のような問題点に鑑みてなされたもので、広範囲かつ高精度の一次元画像を得ることができ、量産工程に対応でき、高速かつ高精度で検査結果が得られるプリント回路基板検査装置を提供することを目的としている。   The present invention has been made in view of the above-described problems, and can provide a wide-range and high-precision one-dimensional image, can be applied to a mass production process, and can obtain inspection results at high speed and high accuracy. An object of the present invention is to provide a substrate inspection apparatus.

本発明に係るプリント回路基板検査装置は、プリント回路基板に設けられた貫通穴を光学的に検査する検査装置であって、前記プリント回路基板を照明する照明手段と、該プリント回路基板からの光をテレセントリックレンズを通して受光する一次元受光素子を備え、前記受光素子の出力から前記プリント回路基板の貫通穴を検査するように構成したものである。   A printed circuit board inspection apparatus according to the present invention is an inspection apparatus that optically inspects a through hole provided in a printed circuit board, and includes illumination means for illuminating the printed circuit board, and light from the printed circuit board. Is provided with a one-dimensional light receiving element for receiving light through a telecentric lens, and a through hole of the printed circuit board is inspected from the output of the light receiving element.

また、前記テレセントリックレンズと一次元受光素子を有した検出部を複数備え、更に、前記テレセントリックレンズの被写界深度を大きく設定したものである。   The telecentric lens includes a plurality of detection units having a one-dimensional light receiving element, and the depth of field of the telecentric lens is set to be large.

本発明によれば、広範囲かつ高精度の一次元画像を得ることができ、量産工程に対応でき、高速かつ高精度で検査結果が得られる。   According to the present invention, it is possible to obtain a wide-range and high-accuracy one-dimensional image, to cope with a mass production process, and to obtain an inspection result with high speed and high accuracy.

以下、本発明の実施例を図面について説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1は本発明の実施例の構成を示すブロック図であり、プリント回路基板に設けられた貫通穴の数、位置、寸法等を光学的に検査するプリント回路基板検査装置の基本構成を示している。   FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention, showing the basic configuration of a printed circuit board inspection apparatus for optically inspecting the number, position, dimensions, etc. of through holes provided in a printed circuit board. Yes.

同図において、1はプリント回路基板、2は拡散処理機能付ガラス、3は集光装置付きの高輝度ライン照明灯で、背面側(後側)からプリント回路基板を照明する照明手段として設けられている。4はレンズと受光素子を備えた二つの検出部5a、5bを有する検出ユニット、6a、6bは各々の検出部5a、5bからの信号を処理する並列処理回路、7は各並列処理回路6a、6bからの出力に基づいて上記プリント回路基板1に設けられた貫通穴の数、位置、寸法等を演算するための統合処理回路である。また図示していないが、検出部5a、5bの視野の相対位置を検出し、合成するハードウェア及びソフトウェアを備えている。   In the figure, 1 is a printed circuit board, 2 is a glass with a diffusion processing function, 3 is a high-intensity line illumination lamp with a condensing device, and is provided as illumination means for illuminating the printed circuit board from the back side (rear side). ing. 4 is a detection unit having two detection units 5a and 5b each having a lens and a light receiving element, 6a and 6b are parallel processing circuits for processing signals from the detection units 5a and 5b, and 7 is a parallel processing circuit 6a. 6b is an integrated processing circuit for calculating the number, position, size, and the like of through holes provided in the printed circuit board 1 based on the output from 6b. Although not shown in the drawing, hardware and software for detecting and synthesizing the relative positions of the fields of view of the detectors 5a and 5b are provided.

図2は上記の各検出部5a、5bの構成を示す断面図である。レンズとしてテレセントリックレンズ11を使用し、プリント回路基板1の貫通穴13の画像が結像される受光素子としてCCD等の一次元受光素子12を用いている。14はテレセントリックレンズ11を通して一次元受光素子12に結像された貫通穴13の穴画像を示している。   FIG. 2 is a cross-sectional view showing a configuration of each of the detection units 5a and 5b. A telecentric lens 11 is used as a lens, and a one-dimensional light receiving element 12 such as a CCD is used as a light receiving element on which an image of the through hole 13 of the printed circuit board 1 is formed. Reference numeral 14 denotes a hole image of the through hole 13 formed on the one-dimensional light receiving element 12 through the telecentric lens 11.

本実施例では、検出部5a、5bの移動手段としてXY直交アクチュエータを用いており、各々の検出部5a、5bによってプリント回路基板1の全表面が走査される。そして、各検出部5a、5bの検出信号はそれぞれ並列処理回路検出部6a、6bで計算された後、統合処理回路7で合成され、この統合処理回路7の出力からプリント回路基板1に設けられた貫通穴13の数、位置、寸法等のデータを得ることができる。   In this embodiment, an XY orthogonal actuator is used as the moving means of the detection units 5a and 5b, and the entire surface of the printed circuit board 1 is scanned by each of the detection units 5a and 5b. The detection signals of the detection units 5a and 5b are calculated by the parallel processing circuit detection units 6a and 6b, respectively, and then synthesized by the integrated processing circuit 7 and provided on the printed circuit board 1 from the output of the integrated processing circuit 7. Data such as the number, position, and dimensions of the through holes 13 can be obtained.

ここで、上記テレセントリックレンズ11は視差がゼロのレンズであるので、図2に示すように貫通穴13の精度の良い画像14が得られる。したがって、前述のように視野周辺部で正確な形が結像されない問題や、厚みの大きいプリント基板を透過光で観察した場合に穴の寸法が実際より小さく検出されたり、内部の異物を見逃すという問題が解決される(図2参照)。   Here, since the telecentric lens 11 is a lens with zero parallax, an accurate image 14 of the through hole 13 is obtained as shown in FIG. Therefore, there is a problem that an accurate shape is not imaged in the periphery of the visual field as described above, and when a thick printed circuit board is observed with transmitted light, the size of the hole is detected smaller than the actual size, or an internal foreign object is missed. The problem is solved (see FIG. 2).

また、検出部視野の相対的な位置関係は組立時に光学的手段によって測定された値が個別のパラメータとして入力済であり、視差と被写界深度の問題も光学的に解決されているので、ソフトウェアの補正処理の負荷が軽減され、処理時間が短縮される。   In addition, the relative positional relationship of the field of view of the detection unit has been input as individual parameters with values measured by optical means during assembly, and the problem of parallax and depth of field has also been optically solved, The load of software correction processing is reduced, and the processing time is shortened.

また、絞り値を大きく設計することにより、ピントの合う範囲(被写界深度)を広くし、厚みの大きいプリント回路基板1の貫通穴13においても先鋭な画像14を得ることができる。   In addition, by designing the aperture value to be large, the in-focus range (depth of field) can be widened, and a sharp image 14 can be obtained even in the through hole 13 of the printed circuit board 1 having a large thickness.

このように、本実施例では、プリント基板1の広範囲かつ高精度の一次元画像を得ることができ、量産工程に対応でき、高速かつ高精度で検査結果が得られるプリント回路基板検査装置を実現することができる。   As described above, this embodiment realizes a printed circuit board inspection apparatus that can obtain a wide-range and high-precision one-dimensional image of the printed circuit board 1, can cope with a mass production process, and can obtain inspection results at high speed and high accuracy. can do.

図3は上述の各検出部5a、5bの検出動作を示す図である。テレセントリックレンズ11a、11bと一次元受光素子12a、12bから構成される検出部5a、5bを複数(ここでは二つ)搭載することにより、視野を任意に拡大し、高速の検査を可能にすることができる。各検出部5a、5bの視野をA、Bとすると、全体の視野はA+Bとなる。   FIG. 3 is a diagram illustrating a detection operation of each of the detection units 5a and 5b described above. By mounting a plurality (two in this case) of detection units 5a and 5b composed of telecentric lenses 11a and 11b and one-dimensional light receiving elements 12a and 12b, the field of view can be arbitrarily expanded and high-speed inspection can be performed. Can do. When the visual fields of the detection units 5a and 5b are A and B, the entire visual field is A + B.

このように、検出部5a、5bを複数設けることにより、単一の検出部の場合に比べて次のような利点がある。すなわち、視野を分割して同時に取り込むことにより、取り込み周期を短縮することができる。また、レンズ単体の光学設計における周辺部の収差補正が容易になり、結果として視野全体の結像性能を均一化することができる。   Thus, by providing a plurality of detection units 5a and 5b, there are the following advantages compared to the case of a single detection unit. In other words, the capture cycle can be shortened by dividing the field of view and capturing simultaneously. In addition, aberration correction at the peripheral portion in the optical design of a single lens becomes easy, and as a result, the imaging performance of the entire field of view can be made uniform.

なお、上記の実施例では、絞り値を大きく設計することによって受光光量が小さくなるのを補うため、集光装置付きのライン照明と拡散効果付きのガラスで構成された高輝度ライン照明を採用しているが、照明の形式はこれに限定されるものではない。   In the above embodiment, in order to compensate for the reduction in the amount of received light by designing a large aperture value, high-luminance line illumination composed of line illumination with a condensing device and glass with a diffusion effect is adopted. However, the form of illumination is not limited to this.

本発明は、プリント回路基板に設けられた貫通穴の検査に有効である。   The present invention is effective for inspection of through holes provided in a printed circuit board.

本発明の実施例の構成を示すブロック図The block diagram which shows the structure of the Example of this invention. 実施例の検出部の構成を示す断面図Sectional drawing which shows the structure of the detection part of an Example 実施例の検出動作を示す説明図Explanatory drawing which shows the detection operation of an Example 従来例の構成を示す説明図Explanatory drawing showing the configuration of a conventional example 従来の検出部の構成を示す断面図Sectional drawing which shows the structure of the conventional detection part

符号の説明Explanation of symbols

1 プリント回路基板
2 拡散処理機能付ガラス
3 高輝度ライン照明灯
5a 検出部
5b 検出部
6a 並列処理回路
6b 並列処理回路
7 統合処理回路
11 テレセントリックレンズ
11a テレセントリックレンズ
11b テレセントリックレンズ
12 一次元受光素子
12a 一次元受光素子
12b 一次元受光素子
13 貫通穴
DESCRIPTION OF SYMBOLS 1 Printed circuit board 2 Diffusion processing glass 3 High-intensity line illumination lamp 5a Detection part 5b Detection part 6a Parallel processing circuit 6b Parallel processing circuit 7 Integrated processing circuit 11 Telecentric lens 11a Telecentric lens 11b Telecentric lens 12 One-dimensional light receiving element 12a Primary Original light receiving element 12b One-dimensional light receiving element 13 Through hole

Claims (3)

プリント回路基板に設けられた貫通穴を光学的に検査する検査装置であって、前記プリント回路基板を照明する照明手段と、該プリント回路基板からの光をテレセントリックレンズを通して受光する一次元受光素子を備え、前記受光素子の出力から前記プリント回路基板の貫通穴を検査することを特徴とするプリント回路基板検査装置。   An inspection apparatus for optically inspecting a through hole provided in a printed circuit board, comprising: an illuminating means for illuminating the printed circuit board; and a one-dimensional light receiving element for receiving light from the printed circuit board through a telecentric lens And a printed circuit board inspection apparatus for inspecting a through hole of the printed circuit board from an output of the light receiving element. 前記テレセントリックレンズと一次元受光素子を有した検出部を複数備えたことを特徴とする請求項1に記載のプリント回路基板検査装置。   The printed circuit board inspection apparatus according to claim 1, further comprising a plurality of detection units including the telecentric lens and a one-dimensional light receiving element. 前記テレセントリックレンズの被写界深度を大きく設定したことを特徴とする請求項1または2に記載のプリント回路基板検査装置。   3. The printed circuit board inspection apparatus according to claim 1, wherein a depth of field of the telecentric lens is set large.
JP2003354911A 2003-10-15 2003-10-15 Inspection device for printed circuit board Pending JP2005121417A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003354911A JP2005121417A (en) 2003-10-15 2003-10-15 Inspection device for printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003354911A JP2005121417A (en) 2003-10-15 2003-10-15 Inspection device for printed circuit board

Publications (1)

Publication Number Publication Date
JP2005121417A true JP2005121417A (en) 2005-05-12

Family

ID=34612684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003354911A Pending JP2005121417A (en) 2003-10-15 2003-10-15 Inspection device for printed circuit board

Country Status (1)

Country Link
JP (1) JP2005121417A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016170083A (en) * 2015-03-13 2016-09-23 セイコーインスツル株式会社 Component inspection device
KR20190020794A (en) * 2016-06-29 2019-03-04 코닝 인코포레이티드 Method and system for measuring geometric parameters of through-holes
CN109557054A (en) * 2018-11-27 2019-04-02 江门市利诺达电路科技有限公司 A kind of detection device of the circuit board via quality based on infrared external reflection principle
US11972993B2 (en) 2017-05-25 2024-04-30 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016170083A (en) * 2015-03-13 2016-09-23 セイコーインスツル株式会社 Component inspection device
KR20190020794A (en) * 2016-06-29 2019-03-04 코닝 인코포레이티드 Method and system for measuring geometric parameters of through-holes
JP2019522797A (en) * 2016-06-29 2019-08-15 コーニング インコーポレイテッド Method and system for measuring geometric parameters of through-holes
KR102501212B1 (en) * 2016-06-29 2023-02-17 코닝 인코포레이티드 Method and system for measuring geometrical parameters of through holes
US11774233B2 (en) 2016-06-29 2023-10-03 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11972993B2 (en) 2017-05-25 2024-04-30 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
CN109557054A (en) * 2018-11-27 2019-04-02 江门市利诺达电路科技有限公司 A kind of detection device of the circuit board via quality based on infrared external reflection principle

Similar Documents

Publication Publication Date Title
US8878929B2 (en) Three dimensional shape measurement apparatus and method
KR101207198B1 (en) Board inspection apparatus
JP2020017969A (en) Inspection system and method
KR101241175B1 (en) Mounting boards inspection apparatus and method thereof
US20190226837A1 (en) Three-dimensional shape measurement apparatus
CN106248684B (en) Optical device and method for detecting internal defects of transparent substrate
JP4706356B2 (en) Screw shape measuring device
CN112697800B (en) Defect detection device and method
US20100239156A1 (en) Method and apparatus for visual inspection
US10841561B2 (en) Apparatus and method for three-dimensional inspection
KR20130141345A (en) Solder height detection method and solder height detection device
JP2012002676A (en) Mask defect checking device and mask defect checking method
CN101673043B (en) Wide-angle distortion testing system and method
US20020031250A1 (en) Method and apparatus for examining through holes
JP2012247743A (en) Chart for checking resolution and method for checking resolution
JP2005121417A (en) Inspection device for printed circuit board
KR101017300B1 (en) Apparatus for measurement of surface profile
JP2009139285A (en) Solder ball inspection device, its inspection method, and shape inspection device
US20050206883A1 (en) Single source, single camera inspection system
JP2007147376A (en) Inspection device
JP2008128770A (en) Lens performance inspection device and lens performance inspection method
TWI626421B (en) Apparatus and method of measuring straightness
JP2007310202A (en) Confocal microscope
JP5541646B2 (en) Line lighting device
KR100576392B1 (en) Apparatus for vision inspection

Legal Events

Date Code Title Description
A977 Report on retrieval

Effective date: 20051222

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060110

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060509