JP2005083510A - Valve device, chemical analysis device and chemical analysis system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a valve device with a micro valve having an extremely small dead volume, and to provide a chemical analysis device and a chemical analysis system. <P>SOLUTION: A microchip 1 has a first member 11 having a first fine flow path 21 allowing the flow of fluid, a second member 12 provided adjacent to the first member 11 and having a second fine flow path 22 communicative with the first flow path 11, and a third member 13 provided adjacent to the second member 12 and having a third fine flow path 23 communicative with the second fine flow path 22. With the first member 11 and the second member 12 relatively moved, the first fine flow path 21 and the second fine flow path 22 are communicated with each other. The flow of the fluid in the first fine flow path 21 is stopped by the adjacent face of the second member 12. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a valve device, a chemical analysis device, and a chemical analysis system used as a microchip for performing reaction and synthesis analysis of a trace amount of chemical substances.

  In recent years, attention has been focused on conducting chemical reactions in the microspace of a microchip because the amount of samples and reagents used for analysis of health and the environment can be minimized and the reaction speed can be increased. In addition, it is desired to mount a valve on the microchip for further sophistication of reaction and analysis.

  So far, several methods have been proposed as a mounting form of a valve on a microchip. As one of them, a method of closing a fine channel in a microchip by deforming a membrane has been developed (for example, see Non-Patent Document 1). In the membrane method, it is possible to stop the flow of fluid through the fine channel by pressing a membrane made of a soft material with high chemical resistance such as PDMS with air pressure to block the fine channel. .

In addition, a slide gate method has been developed as another form of mounting a valve on a microchip (see, for example, Non-Patent Document 2). In the slide gate method, it is possible to stop the flow of the fluid flowing through the fine flow path by inserting a member to be a gate into the fine flow path.
William H. Grover and four others, “Practical Valves and Pumps for Large-Scale Integration into Microfluidic Analysis Devices” ), ΜTAS 20002 (20002), pp.136-138 Albert P. Pisano, 1 other, "Low-Leakage Micro Gate Valve", Transducers'03, Berkley USA, June 11, 2003, pp. 143-146

  However, in the membrane type valve, in order to deform the membrane, it is necessary to install a membrane and a mechanism for driving the membrane around the fine channel. As a result, a portion where the channel width becomes unnecessarily wide (hereinafter referred to as “dead volume”) occurs. The presence of this dead volume causes contamination when different kinds of liquids are flowed. Also, when the membrane is deformed to block the fine flow path, liquid is pushed into the fine flow path, and when the membrane is deformed to release the fine flow path, the flow of the fine flow path is pulled back. May occur, which has been an obstacle to controlling the flow in the fine flow path.

  On the other hand, with a slide gate type valve, only the function of stopping the flow of liquid flowing through the fine flow path by opening and closing the gate (stop valve) can be realized. In addition, when the gate is opened, the fluid flowing through the fine flow path flows into the gate portion, so that this portion becomes a dead volume, and there is a problem that contamination occurs when different types of liquid are flowed.

  In view of the above problems, an object of the present invention is to provide a valve device, a chemical analysis device, and a chemical analysis system having a microvalve with a very small dead volume.

  In order to achieve the above object, the first feature of the present invention is that (a) a first member having a first flow path through which a fluid can move, and (b) a first member adjacent to the first member, A second member having a second flow path that can communicate with the first flow path, and the first member and the second member relatively move, whereby the first flow path and the second flow path It is a valve device that allows a flow path to communicate with each other and that a flow of a fluid flowing through the first flow path can be stopped by a first adjacent surface of the second member to the first member. And

  According to the valve device according to the first feature, a microvalve with an extremely small dead volume can be realized. Further, by moving a part of the micro flow path in the microchip relative to each micro chip, the micro flow paths can be separated and combined, and the flow in the micro flow path can be controlled.

  The valve device according to the first feature further includes a third member that is adjacent to the second member and has a third flow path that can communicate with the second flow path, and the second member; The relative movement of the third member causes the second flow path and the third flow path to communicate with each other, and the flow of the fluid flowing through the second flow path is changed to the second flow of the third member. It may be possible to stop at the second adjacent surface with the member.

  Further, in the valve device according to the first feature, the first member has a shape surrounding the second member, and further includes a fourth channel that can communicate with the second channel, When the member and the second member move relative to each other, the second flow path and the fourth flow path are communicated with each other, and the flow of the fluid flowing through the second flow path is changed to that of the first member. It may be possible to stop at the third adjacent surface with the second member.

  In the valve device according to the first feature, the second member rotates and moves, thereby causing the first flow path and the second flow path to communicate with each other, and the flow of fluid flowing through the first flow path. May be stopped by a surface of the second member adjacent to the first member.

  Moreover, the 1st adjacent surface of the valve apparatus which concerns on a 1st characteristic, and the adjacent surface of the 2nd member adjacent to a 2nd adjacent surface may be parallel. Moreover, the 1st adjacent surface of the valve apparatus which concerns on a 1st characteristic, and the adjacent surface of the 2nd member adjacent to a 3rd adjacent surface may be parallel.

  Further, the minimum gap between adjacent surfaces of the first member and the second member or the second member and the third member of the valve device according to the first feature closest to each other is 10 nm to 3 μm. Also good.

  Further, the valve device according to the first feature is characterized in that the surface roughness of the first member and the second member, or the adjacent surfaces of the second member and the third member that are closest to each other is an arithmetic average roughness. Ra may be 0.01 μm ≦ Ra ≦ 3 μm.

  Further, at least one member of the first member or the second member of the valve device according to the first feature may include a film made of an elastic body on at least one surface. In addition, at least one member of the first member, the second member, or the third member of the valve device according to the first feature may include a film made of an elastic body on at least one surface.

  In the valve device according to the first feature, the first member has a plurality of first flow paths, the third member has a plurality of third flow paths, and the plurality of first flow paths. One of the paths and one of the plurality of third flow paths can be connected by the second flow path, and the first member, the second member, or the third member moves relative to each other. Another one of the plurality of first flow paths and another one of the plurality of third flow paths may be connectable by the second flow path. The third member of the valve device is a member integrated with the first member, and the first member (third member) is a set having a second microchannel cross section of the second member. It is good also as a shape surrounding the side surface. The first member has a fourth flow path that can communicate with the second flow path, and the first member and the second member move relative to each other, so that the second flow path and the second flow path The four flow paths can be communicated, and the flow of the fluid flowing through the second flow path can be stopped by the adjacent surface of the first member.

  In the valve device according to the first feature, the first member includes a plurality of first flow paths, and the second member includes a plurality of second flow paths, the first member, or When the second member or the third member relatively moves, one of the plurality of first flow paths and the third flow path can be connected by one of the plurality of second flow paths. It may be. The third member of the valve device is a member integrated with the first member, and the first member (third member) is a set having a second microchannel cross section of the second member. It is good also as a shape surrounding the side surface. The first member has a fourth flow path that can communicate with the second flow path, and the first member and the second member move relative to each other, so that the second flow path and the second flow path The four flow paths can be communicated, and the flow of the fluid flowing through the second flow path can be stopped by the adjacent surface of the first member.

  In the valve device according to the first feature, the first member includes a plurality of first flow paths, the second member includes a plurality of second flow paths, and the third member includes: There are a plurality of third flow paths, and the first member, the second member, or the third member relatively moves, so that one of the plurality of first flow paths and the plurality of third flow paths One of the flow paths may be connectable by one of a plurality of second flow paths. The third member of the valve device is a member integrated with the first member, and the first member (third member) is a set having a second microchannel cross section of the second member. It is good also as a shape surrounding the side surface. The first member has a fourth flow path that can communicate with the second flow path, and the first member and the second member move relative to each other, so that the second flow path and the second flow path The four flow paths can be communicated, and the flow of the fluid flowing through the second flow path can be stopped by the adjacent surface of the first member.

  The valve device according to the first feature may further include a position sensor that detects a relative movement position of the first member or the second member.

  The valve device according to the first feature may further include a power source for moving the first member or the second member.

  The power source of the valve device according to the first feature may be any one of a motor, an electromagnetic solenoid, electrostatic drive, piezoelectric, ultrasonic drive, thermal expansion, bimetal, and shape memory alloy.

  In addition, the valve device according to the first feature may further include a guide mechanism that limits a moving direction of the first member or the second member.

  The valve device according to the first feature may further include a pressurizing mechanism that pressurizes so as to reduce a gap between the first member and the second member.

  The second feature of the present invention is that (a) a valve device and (b) a fluid flowing in the first flow path or the second flow path are subjected to physical or chemical treatment or physical or chemical treatment of the fluid. The gist of the present invention is that it is a chemical analysis device provided with a means for detecting a physical property.

  According to the chemical analyzer according to the second feature, it is possible to realize a microvalve with an extremely small dead volume, and it is possible to process or detect the fluid flowing through the flow path.

  The chemical analyzer according to the second feature may further include a sample through-hole for introducing a fluid flowing through the flow channel into another chemical analyzer or introducing a fluid from another chemical analyzer.

  In addition, the sample through hole of the chemical analyzer according to the second feature may be connected to the sample through hole of another chemical analyzer, bonded to another chemical analyzer, and laminated.

  Moreover, the sample through hole of the chemical analyzer according to the second feature may be connected to the sample through hole of another chemical analyzer and may be connected in parallel to the other chemical analyzer.

  The third feature of the present invention is that (a) a first member having a first flow path through which a fluid can move, and a second member adjacent to the first member and capable of communicating with the first flow path. A second member having a flow path, and the first member and the second member are moved relative to each other to cause the first flow path and the second flow path to communicate with each other. And (b) a relative movement position of the first member or the second member. The valve device which makes it possible to stop the flow of the fluid flowing through the flow path of the second member by the surface adjacent to the first member of the second member. (C) a power source for moving the first member or the second member, and (d) a control unit for controlling the operation of the power source based on the information of the position sensor. The gist is that it is a chemical analysis system.

  According to the chemical analysis system according to the third feature, a microvalve with an extremely small dead volume can be realized. Further, by moving a part of the micro flow path in the microchip relative to each micro chip, the micro flow paths can be separated and combined, and the flow in the micro flow path can be controlled.

  The chemical analysis system according to the third feature may further include a guide mechanism that restricts the moving direction of the first member or the second member.

  The chemical analysis system according to the third feature may further include a pressurizing mechanism that pressurizes the gap between the first member and the second member to be small.

  According to the present invention, it is possible to provide a valve device, a chemical analysis device, and a chemical analysis system having a microvalve with a very small dead volume.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and ratios of dimensions and the like are different from actual ones. Accordingly, specific dimensions and the like should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

(Valve device)
As shown in FIG. 1, the valve device 1 according to the embodiment of the present invention is adjacent to a first member 11 having a first fine channel 21 in which a fluid can move, the first member 11, A second member 12 having a second microchannel 22 that can communicate with one channel 11, and a third microstream adjacent to the second member 12 and that can communicate with the second microchannel 22. A third member 13 having a path 23 is provided. Then, the first member 11 and the second member 12 move relative to each other, thereby causing the first fine channel 21 and the second fine channel 22 to communicate with each other, and the first fine channel. The flow of the fluid flowing through 21 is stopped by the first adjacent surface of the second member 12. Further, the second member 12 and the third member 13 move relative to each other so that the second fine channel 22 and the third fine channel 23 are communicated with each other, and the second fine channel is provided. The flow of the fluid flowing through 22 is stopped by the second adjacent surface of the third member 13.

  The size of the valve device 1 shown in FIG. 1 is generally on the order of several to several tens of mm, and is called a so-called microchip. Examples of the material of the first member 11, the second member 12, and the third member include glass materials such as quartz, silicon rubber such as polydimethylsiloxane (PDMS), and acrylic resins such as polymethyl methacrylate (PMMA). It can be used. Furthermore, a glass epoxy resin, a fluorine resin such as polypropylene (PP) or polytetrafluoroethylene (PTFE), a semiconductor material such as silicon, a metal, or the like may be used.

  A sample introduction hole 5 and a first fine channel 21 are provided on the first member 11, a second fine channel 22 is provided on the second member 12, and a third member 13. On the top, a third fine channel 23 and a sample outlet hole 6 are provided. The width and depth of the fine channel are preferably 1 μm to 5 mm. Although the width may be 5 mm or more, the integration density is lowered and the function as a microchip is reduced. If the processing technology permits, a width of 1 μm or less is possible, but it is not realistic in terms of operability and analysis sensitivity in performing mixing, reaction, and analysis. Therefore, the width and depth of the fine channel may be about 20 μm to 1 mm in consideration of the integration density as a microchip, analysis sensitivity, and ease of manufacture. The first member 11, the second member 12, and the third member 13 are moved relative to each other in the vertical direction with respect to the plane of FIG. The second fine flow path 22 and the third fine flow path 23 are separated or combined. In the following description, a description indicating a direction such as “vertical direction” indicates a moving direction with respect to the drawing used for the description. When the first microchannel 21, the second microchannel 22, and the third microchannel 23 are combined, the sample introduced from the sample introduction hole 5 is the first microchannel 21, It passes through the second microchannel 22 and the third microchannel 23 and is discharged from the sample outlet hole 6. When the first microchannel 21 and the second microchannel 22 are separated, the sample introduced from the sample introduction hole 5 passes through the first microchannel 21 and the second member 22. The flow can be stopped at the side surface. Further, when the second microchannel 22 and the third microchannel 23 are separated, the sample that has passed through the second microchannel 22 flows in the side surface portion of the third member 23. It can be stopped. The first member 11, the second member 12, and the third member 13 serve as a slide valve (microvalve) that stops the flow of fluid by sliding. As described above, the first member 11, the second member 12, and the third member 13 are relatively moved in the vertical direction, so that the first minute channel 21, the second minute channel 22, and the third member 13 are moved. The flow path 23 is separated and combined, and the flow of fluid in the fine flow path can be controlled.

  FIG. 1B is a cross-sectional view in the long side direction of FIG. In FIG. 1A, it has been described that the sliding movement is made in the vertical direction with respect to the plane. However, as shown in FIG. 21, the second microchannel 22 and the third microchannel 23 can be separated and combined, and the flow of fluid in the microchannel can be controlled.

  In the microchip 1 according to the embodiment of the present invention, as shown in FIG. 2, the first member 11 has a shape surrounding the second member 12 and flows through the second microchannel 22. It is good also as a structure which stops the flow of the fluid by the 3rd adjacent surface of the 1st member 11. FIG.

  On the first member 11, the sample introduction hole 5, the sample outlet hole 6, and the first fine flow path 21 are provided, and on the second member 12, the second fine flow path 22 is provided. Yes. When the first member 11 and the second member 12 move relative to each other in the vertical direction with respect to the plane of FIG. 2, the first microchannel 21 and the second microchannel 22 are separated or combined. To do. For example, as shown in FIG. 2A, when the first microchannel 21 and the second microchannel 22 are combined, the sample introduced from the sample introduction hole 5 is the first microchannel. It passes through the channel 21 and the second fine channel 22 and is discharged from the sample outlet hole 6. A flow path provided on the first member 11 and connecting the second fine flow path 22 and the sample outlet hole 6 is referred to as a “fourth fine flow path”. On the other hand, as shown in FIG. 2B, when the first microchannel 21 and the second microchannel 22 are separated, the sample introduced from the sample introduction hole 5 is the first microchannel. The flow is stopped at the first adjacent surface of the second member 22 through the flow path 21. As described above, when the first member 11 and the second member 12 are relatively moved in the vertical direction, the first microchannel 21 and the second microchannel 22 are separated and combined, The flow of fluid can be controlled.

  In FIG. 2A, the second fine channel 22 is provided in the center of the second member 12, and when the second member 12 is located in the center of the first member 11, the first The microchannel 21 and the second microchannel 22 are connected, but the second microchannel 22 is provided in a portion closer to the end than the center of the second member, and the second member 22 is shown in FIG. ), The first microchannel 21 and the second microchannel 22 may be connected to each other.

  Further, as shown in FIG. 2C, the microchip 1 has an upper first fine channel 21 and an upper second channel when the second member 12 moves to the upper side surface of the hole 15. When the second member 12 moves to the lower surface side of the hole 15, the lower first microchannel 21 and the lower second microflow are formed. It is good also as a shape where the path | route 22 is connected.

  Further, as shown in FIG. 2D, the second member 12 does not have to be surrounded by the first member 11 on the four side surfaces, and may have a shape in which the three side surfaces are surrounded.

  In addition, as shown in FIG. 3, the microchip 1 according to the embodiment of the present invention causes the fluid flowing through the first microchannel 11 to flow through the second member 12 when the second member 12 rotates and moves. It is good also as a structure which stops by 12 side surfaces.

  On the first member 11, the sample introduction hole 5, the sample outlet hole 6, and the first fine flow path 21 are provided, and on the second member 12, the second fine flow path 22 is provided. Yes. FIG. 3 shows a case where the relative movement of the members described in FIG. 1 is a rotational movement, not a vertical sliding movement. When the second member 12 rotates with respect to the first member 11, the microchannel can be separated and combined, and the flow of fluid in the microchannel can be controlled.

(Parallelity, gap, roughness of valve device)
Next, the parallelism, gap, roughness, etc. between the members of the microchip 1 according to the embodiment of the present invention will be described.

  As for the microchip 1 which concerns on embodiment of this invention, as shown in FIG. 4, it is desirable that a set of side surface which has 2nd microchannel 22 cross section of the 2nd member 12 is parallel. Further, this parallelism is desirably 1 minute or less. If the parallelism is poor, when the second member 12 is slidably moved in the vertical direction, the second member 12 is engaged with the first member 11 and the third member 13, resulting in a problem that the second member 12 does not move. there is a possibility. If the parallelism is poor, the gap between the second member 12, the first member 11, and the third member 13 is widened when the second member 12 is slid relative to the vertical direction. There is a possibility that the liquid flowing through the flow channel leaks into the gap.

  Further, in the microchip 1 according to the embodiment of the present invention, as shown in FIG. 5, the minimum gap L between the side surfaces closest to each other when the first member 11 and the second member 12 are relatively moved is 10 nm to 3 μm. It is desirable that If the relative movement member has an excessively large gap, the force required for the relative movement is small, but the leakage of the fluid flowing through the fine channel increases. Conversely, if the gap is small, the amount of leakage decreases, but the force required for relative movement increases, and in some cases, the member may be destroyed. Therefore, the gap L between the relatively moving members is preferably about 10 nm to 3 μm.

  Although FIG. 5 shows the gap in the horizontal direction, the same applies to the gap in the vertical direction. That is, the gap between the second member 12 and the guide mechanism 31 in FIG. 7C described later is also preferably about 10 nm to 3 μm.

  When a film is provided as shown in FIG. 7B, the gap between the members is preferably about 10 nm to 30 μm. When the gap is widened, there is a possibility that the fluid flowing through the fine channel leaks into the gap between the second member 12, the first member 11, and the third member 13. However, when a film is provided on the surface of the member and the member is pressed in the direction of crushing the film, the gap between the members may be eliminated.

  Further, as shown in FIG. 6, the microchip 1 according to the embodiment of the present invention has an arithmetic average of the surface roughness of the side surfaces that are closest to each other when the first member 11 and the second member 12 are relatively moved. It is desirable that the roughness is 0.01 μm ≦ Ra ≦ 3 μm, where Ra is the roughness. The smaller the surface roughness of the sliding portion, the smaller the amount of liquid leakage. However, if the surface roughness is small, stiction that causes the members to adhere to each other may occur depending on the material. Therefore, an appropriate surface roughness is required for the sliding portion, and the arithmetic average roughness Ra is preferably about 0.01 to 3 μm. Further, the surface roughness processing may be performed on both surfaces that slide, or may be performed on one surface. In the case where a film is provided as will be described later in FIG. 7, this surface roughness may not be necessary.

(Equipped with a film on the surface of the valve device)
Next, an example in which a film made of an elastic body is provided on the surface of the member of the microchip 1 according to the embodiment of the present invention will be described.

  FIG. 7B is a cross-sectional view of FIG. 7A and shows a case where an elastic film 30 is provided around the second member 12. When the first member 11, the second member 12, and the third member 13 are made of a brittle material such as glass, the gaps between the first member 11, the second member 12, and the third member 13 are reduced. Since there is a limit to reducing fluid leakage, there is a possibility that slight leakage and cross contamination between the flow paths due to the leakage may occur. Therefore, a film made of an elastic body of about 1 to 100 μm is provided around the second member 12, and the film 30 provided around the second member 12 by the first member 11 and the third member 13 is provided. Sealing by crushing can reduce leakage.

  FIG. 7C shows an example in which a film 30 is provided to adjust the vertical gap of the second member 12. Between the second member 12 and the first member 11 and the third member 13 for sliding movement, the height of the second member 12 is the same as that of the first member 11 and the third member 13. It must be smaller than the height. Therefore, the first member 11 and the third member 13 or the portion for fixing the first member 11 and the third member 13 is provided with an elastic film 30 of about 1 to 100 μm, and the portion provided with the film. Can be a gap.

  FIG. 7D shows an example in which a film 30 is provided between the first member 11, the second member 12, the third member 13 and the guide mechanism 31 arranged above and below. With the configuration shown in FIG. 7D, it is possible to prevent liquid from flowing between the guide glass plate serving as the guide mechanism 31 and the microchip 1 and causing cross contamination. Further, the second member 12 can be prevented from leaking in the vertical direction, and the slidability can be improved.

(Manufacturing method of valve device)
Next, a method for manufacturing the microchip 1 according to the embodiment of the present invention will be described with reference to FIGS.

  (A) First, as shown in FIG. 8 (a), the substrate including the fine flow path is cut in parallel. Dicing etc. can be considered as a cutting method. Then, the end face is polished in parallel. As the polishing method, double-sided and single-sided lapping and polishing can be considered. In this way, the substrate is divided into the first member 11, the second member 12, and the third member 13. FIG.8 (b) is the figure which looked at Fig.8 (a) from the top. Further, at the time of cutting / polishing, cutting / polishing may be performed after filling the fine flow path so that cutting powder and polishing powder do not enter the fine flow path inside. The material to be packed inside is preferably a viscous material that does not flow outside during cutting and polishing. Alternatively, a substance that dissolves by heat and has a low viscosity is poured into a fine channel at high temperature, and cutting / polishing is performed. After the cutting and polishing are completed, the padding is removed at a high temperature. Also good.

  (B) Next, as shown in FIG. 8C, the cut first member 11 and third member 13 are sandwiched between upper and lower plates to be the guide mechanism 31, and the gap with the second member 12 is The position is adjusted and fixed so that a desired gap is obtained. At this time, each member is fixed by adhesion or heat fusion, clamped by a clamp member, or the first member 11, the second member 12, and the third member 13 are set in a separate state in the apparatus. It may be fixed depending on the situation. FIG.8 (d) is the figure which looked at FIG.8 (c) from the top.

  (C) Next, as shown in FIG. 8E, the cut second member 12 is inserted into the space surrounded by the first member 11, the third member 13, and the guide mechanism 31. FIG. 8F is a view of FIG. 8E viewed from above. By sliding the second member 12, it is possible to separate and combine the internal microchannels. Since the second member 12 must have a desired gap in the vertical direction, polishing is performed so that the vertical gap becomes a desired gap, or the first member 11, the second member 12, and the third member are polished. The member 13 may be provided with a film.

  In this way, by cutting and polishing the substrate having one fine flow path, the first member 11, the third member 13, and the second member 12 have the same height in the vertical direction, and are fine. Disturbance of flow and generation of dead volume can be suppressed at the separation / joining part of the flow path.

  In FIG. 8, the microchip in which the plate engraved with the fine flow path and the plate with holes is bonded is cut, but the plate engraved with the fine flow path and the plate with holes are bonded together. They may be bonded together after cutting and polishing to obtain a desired size. If the bonding is performed later, it is easier to remove the cutting powder and polishing powder that have entered the fine flow path during cutting and polishing.

  Next, a method for manufacturing a microchip by cutting and polishing different kinds of substrates will be described with reference to FIG. The dimensions L1 to L13 of the substrate shown in FIG. 9 are examples, and are not limited thereto.

  (A) First, as shown in FIG. 9A, a substrate to be the first member 11 and the third member 13 is prepared. The length L1 of the long side of the substrate is about 70 mm, and the length L2 of the short side is about 30 mm. By cutting and polishing the substrate, the first member 11 and the third member 13 are formed as shown in FIG. 9B. The long side length L3 of the first member 11 is about 41 ± 0.1 mm, and the long side length L4 of the third member 13 is about 26 ± 0.1 mm. A member of about 3 mm is formed between the first member 11 and the third member L5, but this member is not used.

  (B) Next, as shown in FIG. 9C, a substrate to be the second member 12 is prepared. By cutting and polishing the substrate, a plurality of second members 12 are created as shown in FIG. The width L7 of the second member is about 3 ± 0.1 mm, and the switching width L6 of the engraved fine channel and the widths L8 and L9 to the switching position are about 1 ± 0.1 mm.

  (C) Next, when one of the first member 11, the third member 13, and the second member 12 shown in FIG. 9 (d) shown in FIG. 9 (b) is combined, FIG. As shown, a microchip is completed. The length L11 of the first member 11 is about 41 ± 0.1 mm, the length L13 of the second member 12 is about 3 ± 0.1 mm, and the length L12 of the third member 13 is 26 ± 0.1 mm, and the short side length L10 of the microchip is about 30 ± 0.1 mm.

  By relatively moving the first member 11, the second member 12, and the third member 13, it is possible to separate and combine the fine flow paths and control the flow of the fluid inside the fine flow paths.

  In such a manufacturing method, it is desirable that the substrate to be the first member 11 (third member 13) and the substrate to be the second member 12 have the same height.

(Function of valve device)
Next, functions of the microchip 1 according to the embodiment of the present invention will be described.

  As shown in FIG. 10, the microchip 1 according to the embodiment of the present invention has a function of cutting out or injecting a quantitative liquid by sliding movement. The first member 11 of the microchip 1 according to the embodiment of the present invention has a plurality of first microchannels 21, and the third member 13 has a plurality of third microchannels 23. One of the plurality of first microchannels 21 and one of the plurality of third microchannels 23 are simultaneously connected by the second microchannel 22, and the first member 11 or the second member 12 or the third member 13 moves, so that another one of the plurality of first microchannels 21 and another one of the plurality of third microchannels 23 become the second microchannels. 22 are simultaneously connected. At this time, the second fine channel 22 may be one or plural.

  For example, the sample liquid is pressurized so as to flow from the upper sample introduction hole 5 and the carrier liquid from the lower sample introduction hole 5. When the second member 12 is slid upward and the fine channel 1A and the fine channel 3A are connected, the sample liquid flows on the fine channel on the upper side. Subsequently, when the second member 12 is slid downward to separate the fine flow path 1A, the fine flow path 3A, and the second fine flow path 22, the fluid in the fine flow path 1A and the fine flow path 3A And the sample liquid is cut out in the second fine channel 22 by a certain amount. Furthermore, if the second member 12 is slid and the fine channel 1B, the fine channel 3B, and the second fine channel 22 are connected, the carrier liquid flows on the lower fine channel, and the carrier liquid The sample liquid cut out by the second member 22 is quantitatively injected.

  Next, as shown in FIG. 11, the microchip 1 according to the embodiment of the present invention has a flow path switching function by slide movement. The first member 11 of the microchip 1 according to the embodiment of the present invention has a plurality of first microchannels 21, and the second member 12 has a plurality of second microchannels 22. By moving the first member 11, the second member 12, or the third member 13, one of the plurality of first microchannels 21 and the third microchannel 23 are formed by the plurality of first microchannels 23. It is connected by one of the two fine channels 22.

  For example, in FIG. 11, pressure is applied to the sample introduction hole 5 in the first member 11 in order to flow the cleaning liquid, pure water, and sample liquid from above. Depending on the position of the second microchannel 22, the cleaning liquid filled in the first microchannel 21 connected to the third microchannel 23 flows into the third member 13. Then, the pure water filled in the first microchannel 22 connected to the third microchannel 23 flows into the third member 13 by the slide movement. Then, the sample liquid filled in the first microchannel 23 connected to the third microchannel 23 flows into the third member 13 by the slide movement.

  For such a structure, as shown in FIG. 11, the flow path interval between the fine flow paths of the second member 12 is (on the right side of the second fine flow path 22c and the second fine flow path 22d). (Channel interval A) = (channel interval A ′ on the left side of the first microchannel 21d and second microchannel 22d), (right side of the second microchannel 22c and second microchannel 22e) It is desirable that the channel interval B) = (the channel interval B ′ on the left side of the first microchannel 21e and the second microchannel 22e).

  Next, another structure of the microchip 1 according to the embodiment of the present invention, which has a flow path switching function by sliding movement, is shown in FIG. The first member 11 of the microchip 1 according to the embodiment of the present invention has a plurality of first microchannels 21, and the second member 12 has a plurality of second microchannels 22. The third member 13 has a plurality of third microchannels 23, and the first member 11, the second member 12, or the third member 13 moves to move the plurality of first microchannels 23. One of the microchannels 21 and one of the plurality of third microchannels 23 are connected by one of the plurality of second microchannels 22.

  For example, FIG. 12 shows that a plurality of microchannels 21 inside the first member 11 and a plurality of microchannels 23 inside the third member 13 are replaced by a plurality of microchannels 22 inside the second member 12. It shows the case of switching. By sliding the second member 12, a plurality of fine flow paths inside the first member 11 and the third member 13 can be arbitrarily connected.

  In this way, by changing the shape of the fine flow path 22 in the second member 12, the fluid can be controlled sequentially by sliding movement in one direction such as from top to bottom.

(Position sensor, power source, pressure mechanism)
Next, a mechanism provided in the microchip 1 according to the embodiment of the present invention will be described.

  As shown in FIG. 13, the microchip 1 according to the embodiment of the present invention includes a position sensor 35 that detects a relative movement position of the first member 11, the second member 12, and the third member 13.

  In order to separate and combine the fine flow paths inside the first member 11, the second member 12, and the third member 13 that move relative to each other, the amount of relative movement must be grasped. Therefore, sensors for measuring the positions of the first member 11, the second member 12, and the third member 13 are attached, and the positions of the first member 11, the second member 12, and the third member 13 are measured. It is necessary.

  As shown in FIG. 13A, the position sensor 35 may be provided outside the second member 12 or may be provided on the second member 12 by film formation or the like. The position sensor 35 may be a contact type as shown in FIG. 13 (a), or may be a non-contact type using laser light or the like as shown in FIG. 13 (b). As the position sensor 35, a microelectrode that can be formed by forming a film on a member, electromagnetic induction, optical interference, laser interference, or the like can be used. Further, as the position detection, the relative movement amount may be detected, or the absolute movement amount may be detected.

  In addition, as shown in FIG. 14, the microchip 1 according to the embodiment of the present invention includes a power source 36 for moving the first member 11, the second member 12, and the third member 13.

  In order to relatively move the members, a power source 36 for moving the members is necessary. The power source 36 and the members 11, 12, and 13 may be directly joined, or may be joined via a joining jig for joining. As the power source, a motor, electromagnetic solenoid, electrostatic drive, piezoelectric, ultrasonic drive, thermal expansion, bimetal, shape memory alloy, or the like can be used.

  Moreover, the microchip 1 which concerns on embodiment of this invention is provided with the guide mechanism 31 which restrict | limits the moving direction of the 1st member 11, the 2nd member 12, and the 3rd member 13 as shown to FIG. .

  In order to separate and combine the fine flow paths inside the member by relative movement, it is necessary to control the movement direction. For this reason, it is necessary to provide the guide mechanism 31.

  FIG. 15A shows a guide mechanism 31 in which plates are arranged above and below to guide the moving direction of the second member 12, and FIG. 15B shows a cross-sectional view of FIG. .

  FIG. 16A shows an example in which the second member 12 is fixed to a movable guide mechanism 31 in order to guide the moving direction of the second member 12, and FIG. Sectional drawing of 16 (a) is shown. The guide mechanism 31 can easily move the second member 12 by being connected to the linear slide mechanism 38.

  Further, the microchip 1 according to the embodiment of the present invention is added so as to reduce the gap between the members of the first member 11, the second member 12, and the third member 13, as shown in FIGS. A pressurizing mechanism for pressing is provided.

  Due to the bonding of the upper and lower plates shown in FIGS. 8C and 8E and fixing by thermal fusion, the gap L shown in FIG. 5 is practically limited to about 1 μm. When the pressure of the fluid flowing through the flow path is low, the fluid can be stopped even with a gap of about 1 μm. Alternatively, even if cross-contamination due to leakage occurs, it can be within a range that is acceptable for analysis or the like.

  However, as shown in FIG. 22, which will be described later, when the length of the flow path is increased by including many functions on the flow path, or when a function requiring high fluid pressure such as column separation is arranged at the rear stage of the flow path. The pressure applied to the slide channel is increased. In such a case, there arises a problem that liquid leaks from the slide portion with a gap of about 1 μm. Therefore, even when the pressure of the fluid flowing inside is high, in order to reduce the amount of leakage, it is conceivable to reduce the gap L shown in FIG. A method of applying pressure from both sides can be used. Thus, a gap of 1 μm or less can be easily obtained by pressurizing both sides.

  FIG. 17 shows that a force F is applied to the relative moving member in a direction in which the fluid does not leak in order to prevent the liquid from leaking between the relative moving members. In FIG. 17, the fine channel is in the left-right direction, and in order to reduce liquid leakage, a pressurizing mechanism such as a spring or a hydraulic mechanism is provided to suppress the first member 11 and the third member 13 from both sides. Is desirable.

  A specific example is shown in FIG. FIG. 18 shows a method of reducing fluid leakage due to pressing from both sides shown in FIG. In order to separate and recombine the flow paths by sliding or relative movement, it is necessary to manage the positions of the first member 11, the second member 12, and the third member 13. Therefore, in order to slide the second member 12, the first member 11 and the third member 13 are fixed to a linear slide mechanism 38 capable of managing the position in the lateral direction. As a fixing method, the chip 1 may be directly fixed, or may be fixed by a chip holding member 39 fixed to the linear slide mechanism 38.

  As shown in FIG. 18, when the slide movement is performed in the vertical direction, a force may be applied in the direction of crushing the second member 12 in the left-right direction in order to reduce the amount of liquid leakage. Possible materials for applying force include springs, pneumatics, and hydraulics. As a method of applying a force, a force may be directly applied to the chip from these members, or a force may be applied to the chip holding member 39 to which the chip is fixed.

  Next, an example in which the position sensor 35, the power source 36, and the pressure mechanism 43 described above are mounted on the microchip 1 will be described with reference to FIG.

  As shown in FIG. 19A, the microchip 1 according to the embodiment of the present invention includes a movable first member 11, a second member 12, a third member 13, a position sensor 35, a power source 36, A pressurizing mechanism 43 is provided. FIG.19 (b) shows sectional drawing of Fig.19 (a). The first member 11 and the third member 13 have a gap of several μm in the vertical direction so that they can move only in the horizontal direction. Inside the microchip 1, there is a pressurizing mechanism 43 that can apply a force such as a leaf spring, and the first member 11 and the third member 13 connected thereto apply a force in the direction of tightening the second member 12. be able to. Due to the power source 36 and the position sensor 35, the second member 12 slides in the vertical direction on the plane in FIG. As a result, the microchannels arranged inside the first member 11, the second member 12, and the third member 13 can be separated and combined to control the flow of fluid inside the microchannel. It becomes.

(Treatment or detection of fluid inside valve device)
Next, a fluid processing unit and a detection unit provided in the microchip 1 according to the embodiment of the present invention will be described.

  As shown in FIGS. 20 to 23, the chemical analyzer 3 according to the embodiment of the present invention applies fluid flowing through the first microchannel 21, the second microchannel 22, and the third microchannel 23. Means for performing physical or chemical treatments or detecting physical or chemical properties of fluids.

  20 and 21 show examples in which physical and chemical treatment units are arranged before and after the slide valve described in FIGS.

  In FIG. 20, different types of fluids can be mixed by the Y-shaped merging structure of the two flow paths arranged on the upper left. Further, if the second member 12 is slid upward and the upper first fine flow path 21 and the upper third fine flow path 23 are connected by the second fine flow path 22, the upper flow The mixing reaction can be performed by the path structure. That is, the sample introduced from the sample introduction hole 5 on the first member 11 is mixed in the mixing unit 7, and the mixed sample is the second fine channel 22 and the upper third fine channel 23. And is discharged to the sample outlet hole 6.

  In this state, the second member 12 is slid down, and the lower first microchannel 21 and the lower third microchannel 23 are connected by the second microchannel 22. At this time, the second fine channel 22 is filled with the mixed solution. Then, by flowing the carrier liquid to the lower first fine flow path 21, the fluid filled in the second fine flow path 22 is quantitatively cut into the carrier liquid, and the lower third fine flow path 21 is obtained. Injection into the flow path 23 is possible. Then, the detection of the fluid quantified by the second microchannel 22 can be performed by the detection unit 8 provided in the lower third microchannel 23.

  In FIG. 21, the second channel 12 is slid up and down to connect the microchannel 21 inside the first member 11 and the microchannel 23 inside the third member 23 one by one. Can do. For example, if pressure is applied so that cleaning liquid, pure water, sample, reaction liquid, and the like flow from each sample introduction hole 5 of the first member 11, the third microchannel 22 can be moved by the sliding movement of the third microchannel 22. By changing the flow path connected to the member 23, these fluids can be switched to flow through the reaction section 25 and the detection section 8 connected to the third fine flow path 23.

  In FIG. 21, the reaction unit 25 and the detection unit 8 are shown after the slide valve. However, the physical and chemical processing units are not limited to these two, and the arrangement thereof may be before the slide valve.

  FIG. 22 shows the microchip 1 in which relative slide movement and physical and chemical treatments and detections arranged before and after the slide movement are arranged on a substantially plane. As shown in FIG. 22, the mixing unit 7, the detection unit 8, the heating unit 9, and the column separation 10 are arranged on a substantially plane on the first member 11 and the second member 12. By disposing on a substantially flat surface, it is possible to suppress the dead volume generated in the connector portion and the connecting tube portion as much as possible when the fluid is moved between the microchips 1. Further, as shown in FIG. 23, the physical or chemical processing unit or the detection unit may be disposed on the second member 12 that slides.

(Connection between microchips)
Next, an example in which the microchips 1 according to the embodiment of the present invention are connected will be described with reference to FIGS.

  In FIG. 24, the microchip 1 arranged on the upper side has a first member 11, a second member 12, and a third member 13, and controls the fluid by sliding movement of these members, and on the lower side. The arranged microchip 1 has a detection unit 8. The microchip 1 disposed on the upper side is provided with a sample through-hole 26 whose position is controlled on the lower side, and the microchip 1 disposed on the lower side is provided with an upper and lower microchip. The fluid is circulated between the two. Of course, fluid conduction between the upper and lower microchips 1 may be performed via a connector. By adopting such a three-dimensional structure, the entire process can be constructed by combining the microchips 1 for processes such as fluid control, reaction, and detection.

  FIG. 25 shows another example in which a plurality of microchips 1 are connected. In FIG. 24, the plurality of microchips 1 are connected by three-dimensionally bonding them in the vertical direction. However, as shown in FIG. 25, the plurality of microchips 1 are connected in parallel by being arranged in parallel. It doesn't matter. As a connection method, the connection may be made by a connector or a tube. Of the microchips 1 arranged in a plurality, those that do not slide can be connected by placing them in a holder or the like and arranging them in parallel.

(Chemical analysis system)
Next, a chemical analysis system including the above-described microchip, position sensor, power source, etc. will be described. In FIG. 19 and the like, the position sensor 35, the power source 36, and the pressurizing mechanism 46 are provided on the microchip 1. However, these may be provided outside the microchip 1.

  As shown in FIG. 26, the chemical analysis system 2 according to the embodiment of the present invention performs the operation of the power source 36 based on the information of the microchip 1, the position sensor 35, the power source 36, and the position sensor 35. And a control unit 37 for controlling. In order to separate and combine the fine flow paths inside the member by relative movement, it is necessary to control the relative movement amount. Therefore, a position sensor for detecting the absolute movement amount and the relative movement amount, a control unit connected thereto, and a power source connected thereto are prepared. Based on the information from the position sensor, the power required for relative movement by the control unit is calculated, transmitted to the power source, and the relative movement amount is controlled.

  In addition, the chemical analysis system 2 according to the embodiment of the present invention reduces the guide mechanism for limiting the moving direction of the first member 11, the second member 12, and the third member 13 and the gap between the members. And a pressurizing mechanism that pressurizes the head.

  FIG. 27 shows an example in which the chemical analysis system 2 is constructed as an apparatus on the base material 42. A chip holding member 39 for holding the microchip 1 to be relatively moved is provided on the substrate 42, and the microchip 1 is fixed thereon. A power source 36 fixed to the base 42 is connected to the second member 12 that is moved by relative movement. In addition, when the member moved by relative movement is other than the 2nd member 12, the power source 36 is connected with another member. Further, the power source 36 and the member to be moved (here, the second member 12) are connected by a connecting member 41 suitable for movement. If necessary, a position sensor 35 that can measure the position of the moving member is installed to measure the position of the moving member.

(Operations and effects of valve device, chemical analysis device, and chemical analysis system according to this embodiment)
According to the valve device (microchip) 1 according to the embodiment of the present invention, a microvalve with an extremely small dead volume can be realized.

  Further, by moving a part of the micro flow path in the microchip relative to each micro chip, the micro flow paths can be separated and combined, and the flow in the micro flow path can be controlled.

  Furthermore, by changing the shape of the relatively moving member and the flow path structure inside the relatively moving member, it is possible to realize functions such as switching of the fluid in the fine flow path and cut injection by the fine flow path.

(Other embodiments)
Although the present invention has been described according to the above-described embodiments, it should not be understood that the descriptions and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples, and operational techniques will be apparent to those skilled in the art.

  For example, in FIG. 2, each of the first member 11 and the second member 12 has only one fine channel (the first fine channel 21 and the second fine channel 22). The number and structure of the fine channels included in the member may be arbitrary. The same applies to the fine channels shown in the other drawings.

  In FIG. 1, the microchip 1 includes three members (a first member 11, a second member 12, and a third member 13), and an example in which the second member 12 mainly slides is described. However, the number of members and the number of moving members may be large.

  In the description of the drawings and the like, the size and height of the microchip 1 and the like are described, but this is a numerical value given as an example, and it is needless to say that the numerical value is not limited thereto.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

It is a schematic diagram of the microchip which concerns on this embodiment (the 1). It is a schematic diagram of the microchip which concerns on this embodiment (the 2). It is a schematic diagram of the microchip which concerns on this embodiment (the 3). It is a figure which shows the parallelism of the microchip which concerns on this embodiment. It is a figure which shows the clearance gap between the members of the microchip which concerns on this embodiment. It is a figure which shows the surface roughness of the microchip which concerns on this embodiment. It is a figure which shows the film | membrane with which the microchip which concerns on this embodiment was equipped. It is a figure which shows the manufacturing method of the microchip which concerns on this embodiment (the 1). It is a figure which shows the manufacturing method of the microchip which concerns on this embodiment (the 2). It is a figure which shows the flow-path switching function of the microchip which concerns on this embodiment (the 1). It is a figure which shows the flow-path switching function of the microchip which concerns on this embodiment (the 2). It is a figure which shows the flow-path switching function of the microchip which concerns on this embodiment (the 3). It is a figure which shows the position sensor of the microchip which concerns on this embodiment. It is a figure which shows the motive power source of the microchip which concerns on this embodiment. It is a figure which shows the guide mechanism of the microchip which concerns on this embodiment (the 1). It is a figure which shows the guide mechanism of the microchip which concerns on this embodiment (the 2). It is a figure which shows the pressurization mechanism of the microchip which concerns on this embodiment (the 1). It is a figure which shows the pressurization mechanism of the microchip which concerns on this embodiment (the 2). It is a figure which shows the pressurization mechanism of the microchip which concerns on this embodiment (the 3). It is a figure which shows the detection part of the chemical analyzer which concerns on this embodiment. It is a figure which shows the reaction part of the chemical analyzer which concerns on this embodiment. It is a figure which shows the process part and detection part of the chemical analyzer which concern on this embodiment (the 1). It is a figure which shows the process part and detection part of the chemical analyzer which concern on this embodiment (the 2). It is the connection example of the microchip which concerns on this embodiment (the 1). It is the example of a connection of the microchip which concerns on this embodiment (the 2). It is a schematic diagram which shows the chemical analysis system which concerns on this embodiment (the 1). It is a schematic diagram which shows the chemical analysis system which concerns on this embodiment (the 2).

Explanation of symbols

1 Valve device (microchip)
DESCRIPTION OF SYMBOLS 2 Chemical analysis system 3 Chemical analyzer 5 Sample introduction hole 6 Sample extraction hole 7 Mixing part 8 Detection part 9 Heating part 10 Column separation 11 1st member 12 2nd member 13 3rd member 21 1st microchannel 22 Second microchannel 23 Third microchannel 25 Reaction unit 26 Sample through hole 30 Membrane 31 Guide mechanism 33 Spring 35 Position sensor 36 Power source 37 Control unit 38 Linear slide mechanism 39 Chip holding member 41 Connecting member 42 Base Material 43 Pressurization mechanism

Claims (30)

A first member having a first flow path through which fluid can move;
A second member having a second flow path adjacent to the first member and capable of communicating with the first flow path;
When the first member and the second member move relatively, the first channel and the second channel communicate with each other, and the fluid flowing through the first channel The valve device characterized in that the flow can be stopped by the first adjacent surface of the second member with the first member. A third member having a third flow path adjacent to the second member and capable of communicating with the second flow path;
The second member and the third member move relative to each other, so that the second channel and the third channel communicate with each other, and the fluid flowing through the second channel 2. The valve device according to claim 1, wherein the flow can be stopped by a second adjacent surface of the third member with the second member. The first member has a shape surrounding the second member, and further includes a fourth channel that can communicate with the second channel,
When the first member and the second member move relatively, the second channel and the fourth channel communicate with each other, and the fluid flowing through the second channel 2. The valve device according to claim 1, wherein the flow can be stopped by a third adjacent surface of the first member with the second member.   When the second member rotates, the first channel and the second channel communicate with each other, and the flow of the fluid flowing through the first channel is changed to the second member. The valve device according to claim 1, wherein the valve device can be stopped by a surface adjacent to the first member.   The valve device according to claim 2, wherein the first adjacent surface and the adjacent surface of the second member adjacent to the second adjacent surface are parallel to each other.   The valve device according to claim 3, wherein the first adjacent surface and an adjacent surface of the second member adjacent to the third adjacent surface are parallel to each other.   5. The valve device according to claim 1, wherein a minimum gap between adjacent surfaces of the first member and the second member that are closest to each other is 10 nm to 3 μm.   The valve device according to claim 2, wherein a minimum gap between adjacent surfaces of the second member and the third member that are closest to each other is 10 nm to 3 µm.   2. The surface roughness of the adjacent surfaces of the first member and the second member that are closest to each other is 0.01 μm ≦ Ra ≦ 3 μm, where Ra is an arithmetic average roughness. The valve apparatus of any one of -4.   3. The surface roughness of the adjacent surfaces of the second member and the third member that are closest to each other is 0.01 μm ≦ Ra ≦ 3 μm, where Ra is an arithmetic average roughness. The valve device described in 1.   5. The valve according to claim 1, wherein at least one member of the first member or the second member includes a film made of an elastic body on at least one surface. apparatus.   The valve device according to claim 2, wherein at least one member of the first member, the second member, or the third member includes a film made of an elastic body on at least one surface. . The first member has a plurality of the first flow paths,
The third member has a plurality of the third flow paths,
One of the plurality of first flow paths and one of the plurality of third flow paths can be connected by the second flow path, and the first member, the second member, or the When the third member relatively moves, another one of the plurality of first flow paths and another one of the plurality of third flow paths can be connected by the second flow path. The valve device according to claim 2, wherein The first member has a plurality of the first channel and the fourth channel,
One of the plurality of first flow paths and one of the plurality of fourth flow paths are connectable by the second flow path, and the first member or the second member is relatively By moving, another one of the plurality of first flow paths and another one of the plurality of fourth flow paths can be connected by the second flow path. Item 4. The valve device according to Item 3. The first member has a plurality of the first flow paths,
The second member has a plurality of the second flow paths,
When the first member, the second member, or the third member relatively moves, one of the plurality of first flow paths and the third flow path are The valve device according to claim 2, wherein the valve device can be connected by one of the second flow paths. The first member has a plurality of the first flow paths,
The second member has a plurality of the second flow paths,
When the first member or the second member relatively moves, one of the plurality of first flow paths and the fourth flow path are one of the plurality of second flow paths. The valve device according to claim 3, wherein the valve device can be connected to each other. The first member has a plurality of the first flow paths,
The second member has a plurality of the second flow paths,
The third member has a plurality of the third flow paths,
One of the plurality of first flow paths and one of the plurality of third flow paths are caused by the relative movement of the first member, the second member, or the third member. The valve device according to claim 2, wherein the valve device is connectable by one of the plurality of second flow paths. The first member has a plurality of the first channel and the fourth channel,
The second member has a plurality of the second flow paths,
When the first member or the second member relatively moves, one of the plurality of first flow paths and one of the plurality of fourth flow paths are changed to the plurality of second flow paths. The valve device according to claim 3, wherein the valve device can be connected by one of the flow paths.   The valve device according to any one of claims 1 to 4, further comprising a position sensor that detects a relative movement position of the first member or the second member.   The valve device according to any one of claims 1 to 4, further comprising a power source for moving the first member or the second member.   21. The valve device according to claim 20, wherein the power source is any one of a motor, an electromagnetic solenoid, electrostatic drive, piezoelectric, ultrasonic drive, thermal expansion, bimetal, and shape memory alloy.   The valve device according to any one of claims 1 to 4, further comprising a guide mechanism that restricts a moving direction of the first member or the second member.   5. The valve device according to claim 1, further comprising a pressurizing mechanism that pressurizes the first member and the second member so as to reduce a gap between the first member and the second member. The valve device according to any one of claims 1 to 23;
And a means for performing physical or chemical treatment on the fluid flowing in the first flow path or the second flow path, or detecting physical or chemical properties of the fluid. apparatus.   25. The chemical analysis apparatus according to claim 24, further comprising a sample through-hole for introducing a fluid flowing through the flow path into another chemical analysis apparatus or introducing a fluid from another chemical analysis apparatus.   26. The chemical analysis apparatus according to claim 25, wherein the sample through hole is connected to a sample through hole of the other chemical analysis apparatus, and is bonded to and stacked on the other chemical analysis apparatus.   26. The chemical analyzer according to claim 25, wherein the sample through hole is connected to a sample through hole of the other chemical analyzer and is connected in parallel to the other chemical analyzer. A first member having a first flow path through which a fluid can move; and a second member having a second flow path adjacent to the first member and capable of communicating with the first flow path. And the first member and the second member move relative to each other so that the first channel and the second channel communicate with each other, and the first channel flows through the first channel. A valve device capable of stopping the flow of fluid by the adjacent surface of the second member to the first member;
A position sensor for detecting a relative movement position of the first member or the second member;
A power source for moving the first member or the second member;
A chemical analysis system comprising: a control unit that controls the operation of the power source based on information of the position sensor.   29. The chemical analysis system according to claim 28, further comprising a guide mechanism for limiting a moving direction of the first member or the second member. 30. The chemical analysis system according to claim 28 or 29, further comprising a pressurizing mechanism that pressurizes the first member and the second member so as to reduce a gap between the first member and the second member.

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