JP2004294311A - Picture image measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coordinate measuring machine for easily performing teaching work for a coordinate measuring instrument equipped with a touch probe. <P>SOLUTION: A support device 4 comprises: an image acquisition part 41 for acquiring picked up image of a measuring object 7 by an imaging device 23; a display processing part 44 for displaying the picture image of the object 7 acquired by the acquisition part 41 on a display device 5 while overlay-displaying a mark designating the feeler shape of a touch probe 24 on the image displayed on the display device 5 in a size adapted to an imaging magnification, and a GUI part 43 for receiving the setting of virtual probing used for touch probe measurement by using the mark overlay-displayed on the image of the object 7. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an image measurement device having an imaging device for imaging an object to be measured and a touch probe.
[0002]
[Prior art]
2. Description of the Related Art An image measurement apparatus that captures an object to be measured placed on a horizontally movable stage via an optical system and measures the object from an obtained captured image is widely used. This image measurement device measures coordinates of a measurement point specified on a captured image. However, there are cases where accurate measurement cannot be performed by image measurement, such as a hole having a tapered cross section or an object having a side surface. For this reason, an image measuring device provided with a touch probe has also been proposed (for example, see Patent Document 1).
[0003]
The touch probe detects a signal output when the feeler (stylus) contacts the measurement point, and detects the coordinates of the feeler at this time to measure the coordinates of the measurement point.
[0004]
[Patent Document 1]
US Patent No. 33,774
[0005]
[Problems to be solved by the invention]
However, there are fine objects to be measured by the image measuring apparatus, such as sub-mm order. When the touch probe measurement is performed on such a minute object to be measured, there is a problem that the teaching operation by visual observation is difficult due to the minuteness.
[0006]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a coordinate measuring machine having a touch probe, which can easily perform a teaching operation.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 is an image measurement apparatus having an imaging device for imaging an object to be measured and a touch probe having a feeler, wherein the imaging of the object to be measured is performed by the imaging device. A display device for overlaying an image and a mark representing the feeler shape of the touch probe, and setting means for setting a procedure of touch probe measurement using the mark displayed on the display device. An image measuring device is provided.
[0008]
According to a second aspect of the present invention, in the image measurement device according to the first aspect, the display unit displays an area through which a feeler passes when performing a touch probe measurement in the procedure set by the setting unit. An image measuring device characterized by the following.
[0009]
According to a third aspect of the present invention, in the image measuring device according to the first or second aspect, when the magnification of the imaging device is changed, the display unit displays the mark to be overlaid on an image of the device under test. Alternatively, there is provided an image measuring device wherein the size of the area is changed to a size corresponding to the magnification after the magnification is changed.
[0010]
According to a fourth aspect of the present invention, in the image measurement device according to any one of the first to third aspects, the shape of the DUT at the time of setting the procedure and the shape of the DUT at the time of executing the touch probe are set. An image measuring apparatus further comprising a correction unit for detecting a deviation of the image, correcting the deviation, and executing the procedure.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described.
[0012]
FIG. 1 is a schematic configuration diagram of a coordinate measuring device according to an embodiment of the present invention.
[0013]
The coordinate measuring device according to the present embodiment includes a measuring device 1 that is an image measuring device provided with a touch probe, and a support device 4 that supports the measuring device 1. The measuring device 1 includes a measuring device main body 2 and a controller 3.
[0014]
The measuring device main body 2 includes a lens barrel 22 having an optical system with a magnification switching mechanism, an imaging device 23, a touch probe 24 with a feeler 24a, and an unillustrated moving the lens barrel 22 up and down (Z direction). And a stage 21 that can relatively move the lens barrel 22 and the DUT 7 in the horizontal direction (XY directions).
[0015]
The imaging device 23 captures an optical image of the DUT 7 placed on the object plane of the optical system of the lens barrel 22, and uses, for example, a CCD camera.
[0016]
The touch probe 24 has a feeler 24 a at its tip, and is fixed to the lens barrel 22. Therefore, the horizontal relative position between the center of the optical axis of the optical system of the lens barrel 22 and the feeler 24a of the touch probe 24 does not change. Further, the relative position in the vertical direction between the focal position of the optical system of the lens barrel 22 and the feeler 24a of the touch probe 24 does not change.
[0017]
The touch probe 24 outputs a signal to the probe signal detection unit 34 of the controller 3 at the moment when the feeler 24a at the tip of the touch probe 24 comes into contact with a predetermined measurement point of the DUT 7 or when the touch probe 24 leaves the contact state. , The probe signal detection unit 34 generates a trigger signal.
[0018]
The diameter and position of the feeler 24a are obtained by measuring the same portion of the DUT 7 by using a correction value obtained in advance using a reference ball (a true sphere used to correct the diameter and position of the feeler) or the like. Then, the measured values are corrected so as to have the same coordinates. When a plurality of feelers are prepared, the measurement value of the touch probe measurement is corrected by the correction value of the actually used feeler among the correction values acquired in advance according to the diameter and position of the feeler for each feeler. When the magnification, the optical axis, and the focal position of the optical system change due to the magnification switching, the measurement value of the image measurement is corrected by the optical system correction value acquired in advance according to each magnification. The relative position of the optical system and the feeler 24a is determined by the correction value (and the correction value corresponding to the magnification and the feeler) obtained in advance by measuring the same reference ball or the like with both the image and the touch probe, and the image is measured. Even in the probe measurement, when the same part of the DUT 7 is measured, the measurement values are corrected so that the measured values have the same coordinates. The feeler 24a is detachable from the touch probe 24, and is usually housed in a rack (not shown). A plurality of types of feelers 24a can be accommodated in this rack, and the operator selects a desired feeler 24a from the plurality of types of feelers 24a accommodated in the rack and attaches it to the touch probe 24 for use. I do.
[0019]
The stage 21 has a moving mechanism and a coordinate detecting mechanism (not shown), and moves in the XY directions under the control of the drive control unit 31. The lens barrel 22 is controlled by the drive control unit 31 by the moving mechanism and moves in the Z direction. As the moving mechanism, a ball screw, a motor, or the like is used. Further, a linear encoder or the like is used as the coordinate detection mechanism, and outputs a coordinate signal to the coordinate detection unit 33. With these, the measurement object 7 and the observation position in the horizontal direction (the optical axis center position of the optical system of the lens barrel 22), the observation position in the vertical direction (the in-focus position of the optical system of the lens barrel 22), and the feeler 24a A relative moving route, moving speed, position, and the like are detected and controlled.
[0020]
In addition, the coordinate measuring apparatus according to the present embodiment has an auto-focus function, and can automatically focus on the DUT 7. In this autofocus method, a plurality of images are acquired by changing the relative distance between the lens barrel 22 and the DUT 7 in the Z-axis direction, and the contrast of the image detected by the image processing unit 46 described below is maximized. A method called a passive method of calculating a focus position, that is, a method called a passive method, or a method in which a laser diode or LED light is applied to the DUT 7 as auxiliary light, and the focus position is determined from the displacement of the light spot position of the reflected light. There is a so-called active method, in which the lens barrel position is controlled so that the detection position of the object to be measured is at the focal position of the lens barrel optical system.
[0021]
The controller 3 controls the measuring device main body 2, and processes signals from a coordinate detecting mechanism such as a support device IF unit 36, which is an interface with the support device 4, and a linear encoder, to detect coordinates and a moving speed. A detection unit 33, a drive control unit 31 that determines an acceleration / deceleration curve and speed distribution of each axis, performs a closed loop control of the motor driver based on the detected position and speed, and a probe signal that generates a trigger signal by receiving a signal from the touch probe 24 It is provided with a detection unit 34, an optical system control unit 35 for adjusting the magnification of the optical system and the amount of illumination, and the like.
[0022]
The support device 4 presents information to the operator using the controller IF unit 42, which is an interface with the controller 3, an input device 6 such as a mouse, a keyboard, and a joystick, and a display device 5 such as a CRT and an LCD. A graphical user interface (GUI) unit 43 for receiving instructions is provided. The support device 4 includes a teaching processing unit 47 having a teaching function such as teaching, storage, and reproduction of a measurement procedure, an image processing unit 46 having an image processing function such as edge detection, pattern matching, and contrast detection, and a coordinate display function. And a display processing unit 44 having an overlay display function of overlaying an image of the DUT 7 captured by the imaging device 23 and a mark of the feeler 24a, an inter-coordinate calculation, a geometric shape calculation, a numerical calculation, a statistical calculation, a tolerance determination, and the like. A measurement operation unit 45 having a measurement operation function, a data management unit 48 having a data management function such as storage of measurement result data and data relocation (measurement result report), and an image acquisition having a function of acquiring an image from the imaging device 23. A communication unit (not shown) having an external communication function with the unit 41, a network, a transport unit, and the like.
[0023]
Next, the operation of measuring the coordinates of the DUT 7 using the image measurement device will be described.
[0024]
The teaching processing unit 47 of the support device 4 transmits a movement command to the controller 3 via the controller IF unit 42. The drive control unit 31 of the controller 3 drives the XY axes of the stage 21 and the Z axis of the lens barrel 22 according to the movement command received from the support device 4 via the support device IF unit 36, and the command coordinates of the observation optical system Control the movement so that it is the center. The controller 3 may be provided with operating means such as a joystick, and the drive control unit 31 may drive the XY axes of the stage 21 and the Z axis of the lens barrel 22 according to the operation input to the operating means.
[0025]
In addition, the teaching processing unit 47 of the support device 4 transmits a magnification switching command of the optical system to the controller 3 via the controller IF unit 42. The optical system control unit 35 of the controller 3 controls the magnification of the optical system of the lens barrel 22 according to the magnification switching command received from the support device 4 via the support device IF unit 36. Note that the magnification switching command is also transmitted, for example, when an operator operates an operation unit provided in the controller 3 in addition to a case where the magnification is changed by the teaching function.
[0026]
In the support device 4, an optical system correction value (a magnification correction value and a correction value relating to the position of the optical axis and the position of the parfocal point at each magnification) are registered in the measurement calculation unit 45 for each magnification of the optical system of the lens barrel 22. Have been. The teaching processing unit 47 notifies the measurement calculation unit 45 of the magnification indicated by the magnification switching command transmitted to the controller 3. The measurement calculation unit 45 sets the optical system correction value corresponding to the magnification to be used for correcting the detected coordinates. After the optical system is set as described above, an image of a predetermined range of the DUT 7 is captured by the imaging device 23 and is captured by the support device 4 via the image acquisition unit 41.
[0027]
Next, a method for measuring the coordinates of the DUT 7 from the captured image will be described.
[0028]
When the controller 3 receives the image acquisition timing signal, the support device 4 acquires the XYZ coordinate values from the encoder (not shown) via the coordinate detection unit 33 that detects the XYZ coordinate values (the XYZ coordinate values of the measuring device main body 2). . The support device 4 processes the image acquired by the imaging device 23 by the image processing unit 46 to calculate the in-screen edge position. Further, it is calculated as a coordinate value from the optical system correction value (in-screen coordinate value). Measurement coordinates are calculated from the XYZ coordinate values of the measuring device main body 2 and the coordinate values in the screen. Further, it is also possible to calculate a line, a shape, and the like of the object detected by an instruction from the operator.
[0029]
Next, a method of measuring the shape of the test sample 7 using the touch probe 24 will be described.
[0030]
The touch probe 24 probes the device under test 7 through a path taught by a method described later. Upon receiving the touch trigger signal from the touch probe signal detecting unit 34, the coordinate detecting unit 33 of the controller 3 acquires XYZ coordinate values from a coordinate detecting mechanism (not shown) of the measuring device main body 2, and receives the XYZ coordinate values via the support device IF unit 36. To the support device 4. The measurement calculation unit 45 of the support device 4 calculates an accurate value of the detected coordinates from the XYZ coordinate values and the feeler correction values (correction values related to the feeler diameter, position, and the like in each feeler). In addition, the measurement calculation unit 45 can also calculate the geometric shape and the like of the object detected by the designation of the operator.
[0031]
Next, the work coordinate system will be described.
[0032]
When the object to be measured is replaced, the object to be measured is not placed at exactly the same position on the stage 21, but is slightly shifted. Therefore, a plurality of positions of the measured object are measured by an image or touch probing, and a coordinate system (work coordinate system) of each measured object is set from those positions. Since the coordinate system is determined based on the shape of the device under test, the coordinate system of each device under test is the same regardless of the position on the stage 21 where the device under test is placed. A method for setting this coordinate system will be described.
[0033]
First, an arbitrary point in the measured object is set as a temporary origin. The GUI unit 43 of the support device 4 selects a measurement target such as a point or a line according to an instruction of the operator. Next, the image processing unit 46 performs edge detection on the image acquired from the imaging device 23 via the image acquisition unit 41, and detects a measurement target such as a point or a line. The measurement calculation unit 45 measures the selected or detected coordinates of the measurement target. In the case of touch probing, an operation means such as a joystick provided on the controller 3 is operated to actually execute a touch probing operation to measure coordinates. This series of measurement operations is registered in the teaching list as a coordinate system setting operation. The measurement calculation unit 45 sets the point measured in this way to the origin of the workpiece coordinate system (work coordinate system), and sets the measured line to the X axis of the workpiece coordinate system (work coordinate system). The work coordinate system is preferably set at the beginning of teaching.
[0034]
The image measuring device according to the present embodiment includes one-point edge detection by image processing, multi-point edge detection by image processing, pattern matching template image storage by image processing, pattern matching detection by image processing, height detection by passive autofocus, It has detection functions (codes) such as height detection by active autofocus, continuous multipoint detection by active autofocus, probing by a touch probe, virtual probing detection described later, and input of an elapsed point.
[0035]
In addition, point, multipoint average, maximum point, minimum point, circle, line, plane, point-to-point distance, point-to-line distance, plane-to-point distance, line-to-line intersection, numerical calculation, statistical calculation, progress It has calculation functions (codes) such as point setting, work coordinate system setting, work coordinate system clear, and work reference plane setting.
[0036]
Next, a teaching method for inputting the measurement position of the touch probe to the image measurement device will be described. FIG. 2 shows a flowchart of the teaching method.
[0037]
Note that this detection function is called a virtual probing code. This is a function of teaching the position, route, and the like of probing by the touch probe without actually probing by using an image captured by the imaging device 23. Of course, it goes without saying that a detection function with actual probing exists separately.
[0038]
Before starting teaching, it is necessary to set some conditions in advance. First, it is necessary to correct the position where the image measurement is performed, that is, the positional relationship between the center and the focus position of the image measurement and the touch probe using a reference ball or the like. In addition, default values of parameters related to the feeler must be set. Here, the parameters related to the feeler include parameters necessary for performing a touch probe measurement using the feeler 24a, such as a feeler ID, a feeler diameter and a correction value thereof, an approach distance, an approach speed, an overtravel distance, and a Z offset distance. (Hereinafter referred to as feeler information). A default value is defined for each feeler 24a housed in a rack (not shown) of the measuring device main body 2, and is stored in the feeler information storage unit 45. Note that the overtravel distance is to reach the measurement point when the feeler 24a does not reach the measurement point even when the feeler 24a is moved according to the set path, that is, when the trigger signal is not output. Is the maximum distance to be additionally moved.
[0039]
After confirming that these conditions are set, the operator starts the probing teaching work. Upon receiving a teaching work start instruction from the operator via the input device 6, the GUI unit 43 of the support device 4 displays a GUI screen for receiving the teaching work on the display device 5 (S101). FIG. 3 is a diagram illustrating an example of a GUI screen displayed on the display device 5. On the GUI screen, an image display area 51 for displaying a captured image acquired by the image acquisition unit 41 from the imaging device 23, a code selection area 52 for selecting a function code to be added to the teaching list, a coordinate input area 53, teaching information List display area 54 for displaying a list of the images, a feeler selection area 55 provided with a selection box for the feeler 24a, a magnification selection area 56 provided with an optical magnification selection box, and a display for displaying the probing information being set. It has a probing information display area 57 and a simple execution button 58 for moving the feeler 24a in accordance with the probing information displayed in the probing information display area 57. Here, the selection boxes of the code selection area 52, the feeler selection area 55, and the magnification selection area 56 are, for example, selection boxes of a drop-down menu format. In an initial state, a predetermined feeler ID and an optical magnification (the optical magnification of the lens barrel 22) are set. The magnification set as a standard for the system) is selected by default. The codes selected in the code selection area 52 include a progress point setting, a work coordinate system setting, a work coordinate system clear, and a work reference plane setting. When a code, feeler, or magnification is selected, the function of the code, feeler replacement, and magnification conversion are registered in teaching. In FIG. 3, reference numeral 517 is a cursor. The operator can operate the cursor using the input device 6 such as a mouse.
[0040]
First, the measurement calculation unit 45 sets a coordinate system (work coordinate system) for the above-described DUT 7 (S102).
[0041]
Next, when the operator operates the cursor 517 and selects a virtual probing code in the function selection area 52 (S103), the GUI unit 43 instructs the display processing unit 44 to display an overlay. In response to this, the display processing unit 44, via the GUI unit 43, places a circular symbol indicating the virtual feeler 24a on the captured image displayed in the image display area 51 of the GUI screen, or displays the feeler during probing. An oval symbol or the like representing an area through which 24a passes is displayed as an overlay (S104).
[0042]
When the operator operates the cursor 517 and designates the first target detection position in the image display area 51, the display processing unit 44 displays the captured image of the sample 7 to be measured displayed in the image display area 51 on the captured image. A default value of feeler information such as a feeler diameter, an approach distance, an approach speed, an overtravel distance, and a Z offset distance is displayed as an overlay. When these values are to be changed, numerical values are directly input to the feeler selection area 55 and the path information area 57 (S105).
[0043]
In FIG. 3, reference numerals 512 and 513 denote marks indicating an elapsed point (probing start point) and a feeler at a detection point, reference numeral 514 denotes a mark indicating an approach locus, and reference numeral 516 denotes an overtravel locus. Is a mark indicating In FIG. 3, reference numeral 515 is a mark indicating a feeler interference range at the time of probing (the area through which the feeler 24a passes when performing the touch probe measurement).
[0044]
Here, the diameter of the mark indicating the feeler, the length of the approach trajectory, and the length of the overtravel trajectory are determined by the feeler diameter, approach distance, overtravel distance, and magnification selection area 61 specified by the read feeler information. The display size is rewritten in conjunction with the switching of the selected optical magnification. The coordinates to be moved may be input to the coordinate input area 53 as numerical values.
[0045]
The GUI unit 43 receives an approach direction with respect to the target detection position 513, that is, a direction of moving from the start position 512 to the target detection position 513 from the operator. In accordance with the operation of the cursor 517 by the operator, the GUI unit 43 displays marks 512 and 513 indicating a feeler, a mark 514 indicating an approach locus, a mark 515 indicating an overtravel locus, and a feeler interference range which are overlaid on the image display area 51. Is rotated about the mark 513 (target detection position). Thereby, the designation of the approach direction is received from the operator. In addition, if necessary, the approach distance, the overtravel distance, and the like are corrected.
[0046]
Then, when the GUI unit 43 receives an instruction to register information on the movement of the probe (hereinafter, referred to as a virtual probing code) from the operator, the GUI unit 43 notifies the teaching processing unit 47 of that. In response to this, the teaching processing unit 47 generates the marks 512 and 513 indicating the feeler, the mark 514 indicating the approach trajectory, the mark 515 indicating the overtravel trajectory, and the mark indicating the feeler interference range, which are overlaid on the image display area 51. From the position in the screen 515, the lapse point (probing start point), the coordinate value of the detection point (the coordinate of the work coordinate system), the approach distance, the overtravel distance, and the like are determined, and are determined as the virtual target detection position. It is added to the teaching list as a probing code (S106).
[0047]
Similarly, a second virtual probing is input. This operation is repeated to add a plurality of virtual probing to the teaching list (S111).
[0048]
Here, when designating another part which does not fit in the image display area 51, the XYZ axes are driven by operating means such as a joystick provided in the controller 3, and virtual probing is registered at a desired target detection position. . In probing using an actual touch probe, the input target detection coordinates are sequentially measured. At this time, if the linear movement path of the touch probe interferes with the DUT, Enter and register points (pass points). Elapsed points can also be added and edited with on-screen graphics. A probe path includes the linear movement path and the progress point of the touch probe.
[0049]
When the probe path display button 582 is selected by the operator operating the cursor 517 on the GUI screen shown in FIG. 3 (S107), the display processing unit 44 is registered in the teaching list as shown in FIG. The probe path 518 determined by the plurality of virtual probing codes is displayed as an overlay on the captured image displayed in the image display area 51 (S108).
[0050]
When the feeler is replaced or the feeler is attached / detached, the touch probe is registered in the teaching list as the feeler replacement. Similarly, it is also possible to install a reference ball near the rack and select to automatically execute calibration after replacing the feeler.
[0051]
Next, upon receiving an instruction to save the teaching list from the operator (S109), the GUI unit 43 notifies the teaching processing unit 47 of the instruction. In response to this, the teaching processing unit 47 assigns a name to the teaching list and saves it as a teaching file (S110). Note that a template image to be described later can also be stored together with the teaching file.
[0052]
Note that, when the simple execution button 581 is selected by the operator operating the cursor 517 on the GUI screen shown in FIG. 3, the teaching processing unit 47 transmits a command to the controller 3 to actually perform the probing operation. Thereby, the probing operation can be confirmed. When the edit button 583 is selected, the teaching processing unit 47 accepts editing of information that has been added to the teaching list. Thereby, even after the virtual probing is once determined, the graphic such as the probe path can be displayed again and the parameters can be edited again.
[0053]
This teaching operation can be performed without actually mounting the touch probe (feeler) except for the simple execution function. Note that the teaching operation can be performed in the same manner by displaying the drawing of the sample to be measured on the display screen instead of displaying the image of the sample 7 to be detected on the display screen.
[0054]
Now, according to the image measurement device according to the present embodiment, automatic measurement can be performed by replaying the teaching file that has been taught as described above. First, open the teaching file. A position (characteristic portion, end point, or the like) used for setting a temporary origin of the object to be measured placed at an arbitrary position on the stage at the time of teaching is observed, and the position is set as a temporary origin. Thereafter, when the replay operation is started, the teaching processing section 47 drives the positioning to the XYZ coordinates at the time of teaching, the edge detection area and direction in the screen, illumination, magnification, various parameters of image processing, touch probing (virtual probing is performed in real time). The movement of the lapse point is reproduced as recorded at the time of teaching, and the automatic measurement is executed one after another in the order of the teaching list. All the measurement values calculated by the measurement calculation unit 45 are stored in a predetermined file by the data management unit 48. When all the items in the teaching list are completed, the automatic measurement ends. If necessary results are specified at the time of teaching, only the necessary results are totaled at the end. Make a table if instructed. At the time of actual probing, an unrelated portion is reflected on the display screen, so that it may be masked. When the measurement function after imaging is selected at the time of replay, an image of a measurement portion is acquired prior to probing, probing is performed in a state in which a graphic at the time of teaching is displayed in an overlay manner, and a detection point is additionally displayed on the graphic.
[0055]
Even during teaching or with an existing teaching file open, you can select one or more codes on the teaching list and easily execute or edit the selected code. .
[0056]
By executing the teaching file set as described above, the shape of the DUT 7 can be measured using the touch probe 24. When the image measurement device according to the present embodiment is used, a teaching operation can be easily performed on a display screen on which the measurement target 7 obtained by the imaging device 23 at the measurement position of the touch probe 24 is displayed.
[0057]
Next, a description will be given of a probing correction function in a case where there is a large variation in dimensions and the like between the DUT 7 used in the teaching operation and the DUT 7 to be actually measured by the touch probe.
[0058]
This is because if the shape of the DUT 7 used during teaching and the shape of the DUT 7 measured during execution of measurement vary, the feeler 24a is moved according to the path set by the teaching operation. It is used when accurate measurement cannot be made due to non-contact with the measurement point or contact with another part of the DUT 7.
[0059]
At the time of teaching, when the GUI unit 43 receives the selection of the attention area in the captured image displayed in the image display area 51 by the operation of the cursor 517 by the operator prior to the virtual probing, the measurement calculation unit 45 The selected image is set as a template image (pattern matching search), and its center is set and registered as the origin of the temporary coordinate system. At the time of replay, the image processing unit 46 acquires a new captured image of the DUT 7 by the imaging device 23 via the image acquisition unit 41. Then, in the captured image, a portion that matches the above-described template image is found by a pattern matching process (a process of searching for an area that matches the template image on the screen), and the coordinates (search coordinates) are output. When the template coordinates and the search coordinates specified by the matching process are shifted, the measurement calculation unit 45 sets the coordinates by temporarily shifting the coordinates by the shift amount. Accordingly, even when there is a large variation in the processing of the object to be measured, the touch probe measurement can be performed.
[0060]
In the present embodiment, the setting of the procedure of the touch probe measurement is received by using a mark representing a virtual feeler which is overlaid on the captured image of the device 7. Further, when the touch probe measurement is performed in accordance with the setting of the procedure, the area through which the feeler 24a of the touch probe 24 passes is displayed as an overlay on the captured image of the DUT 7. Therefore, unlike the teaching work by visual observation, it is not necessary to actually move the feeler 24a of the touch probe 24 to set the procedure. Therefore, it is possible to support the touch probe measurement so that the teaching operation on the minute measurement object can be performed more easily and safely than in the case of visual observation.
[0061]
Further, in the present embodiment, when the imaging magnification of the imaging device 23 is changed, the probing and the probe path for displaying the overlay on the captured image of the DUT 7 so as to have a size corresponding to the changed imaging magnification are performed. The size of the mark has been changed. For this reason, compared with the case of the naked eye observation, the presence or absence of the interference between the probe path and the DUT 7 and the addition of the progress point can be more easily visually performed.
[0062]
Further, in the present embodiment, the search coordinates of the DUT 7 to be actually subjected to the touch probe measurement are obtained by using the template image of the DUT 7 recorded at the time of teaching and the captured image of the DUT 7 to be actually subjected to the touch probe measurement. The coordinate system set at the time of the teaching operation is temporarily corrected according to the difference between the template coordinates of the DUT used at the time of the teaching. If there is a large variation in the dimensions and the like between the DUT 7 used for the teaching operation and the DUT 7 to be actually measured by the touch probe, if the feeler 24a is moved according to the path set by the teaching operation, the feeler 24a A situation may occur in which measurement cannot be performed accurately because the measurement point of the measurement target 7 does not contact the measurement point or the measurement target 7 contacts another part. However, in the present embodiment, since the probing position is corrected as described above, the possibility that such a situation occurs can be reduced.
[0063]
It should be noted that the present invention is not limited to the above embodiment, and various modifications are possible.
[0064]
The registered teaching file can be corrected off-line, that is, even when the teaching file is not connected to the measuring device 1. However, in this case, the simple execution of the touch probe measurement (the simple execution button in FIG. 3) cannot be performed.
[0065]
In the above-described embodiment, in the teaching operation, a CAD drawing or the like of the DUT 7 registered in advance in a memory or the like is used instead of the captured image of the DUT 7 acquired from the measuring device 1. Is also good. In this manner, as in the case of modifying a registered teaching file, the modification can be performed off-line, that is, in a state where the teaching file is not connected to the measuring device 1. However, in this case, the simple execution of the touch probe measurement (the simple execution button in FIG. 3) cannot be performed.
[0066]
【The invention's effect】
As described above, according to the present invention, in a coordinate measuring device provided with a touch probe, a coordinate measuring machine that can easily perform a teaching operation can be provided.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a coordinate measuring system to which an embodiment of the present invention is applied.
FIG. 2 is a flowchart for explaining a supporting operation of a teaching operation of the supporting device 4 shown in FIG. 1;
FIG. 3 is a diagram illustrating an example of a GUI screen displayed on the display device 5;
4 is a diagram showing an example of an overlay display of a probe path displayed in an image display area 51 of a GUI screen shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Measuring machine, 2 ... Measuring machine main body, 3 ... Controller, 4 ... Support device, 5 ... Display device, 6 ... Input device, 21 ... Stage, 22 ... Barrel, 23 ... Imaging device, 24 ... Touch probe, 24a ... Feeler, 31 ... Drive control unit, 33 ... Coordinate detection unit, 34 ... Probe signal detection unit, 35 ... Optical control unit, 36 ... Support device IF unit, 41 ... Image acquisition unit, 42 ... Controller IF unit, 43 ... GUI Unit, 44 display processing unit, 45 measurement operation unit, 46 image processing unit, 47 teaching processing unit, 48 data management unit

Claims (4)

In an image measurement device having an imaging device for imaging an object to be measured and a touch probe having a feeler,
A display device that overlays a captured image of the measured object captured by the imaging device and a mark representing a feeler shape of the touch probe,
Setting means for setting a procedure of a touch probe measurement using a mark overlay-displayed on the display device. 2. The image measurement apparatus according to claim 1, wherein the display unit displays an area through which a feeler passes when performing a touch probe measurement in the procedure set by the setting unit. 3. When the magnification of the imaging device is changed, the display unit changes the size of the mark or the area to be overlaid on the image of the device under test to a size according to the changed magnification. The image measuring device according to claim 1 or 2, wherein: The apparatus further includes a correction unit configured to detect a deviation between the shape of the DUT at the time of setting the procedure and the shape of the DUT at the time of executing the touch probe, correct the deviation, and execute the procedure. The image measurement device according to claim 1.

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