JP2004082239A - Microcomponent gripping device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a simple and inexpensive gripping device keeping high reliability for a long period. <P>SOLUTION: This microcomponent gripping device 10 for picking up a microcomponent 50 by a chuck 40, comprises a chuck opening and closing means 15 for opening and closing a pair of claw members of the chuck 40 by a positioning motor, a means for detecting the microcomponent 50, composed of a CCD camera 17, and an operation processing means 18 for determining the opening and closing stroke of the pair of claw members of the chuck 40 based on detection signals on a width of a gripped part of the microcomponent 50 and an interval to the adjacent microcomponent from the detecting means, and the rotation of the positioning motor is controlled by a signal from the operation processing means 18. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a micro component gripping device, and in particular, automatically controls a micro component in a production operation of processing, assembling, inspecting, aligning and packing a micro component used in precision equipment, electronic equipment, and the like. The present invention relates to a device for holding and picking up with a chuck, and is particularly suitably used as a pickup device for a contact probe formed on a sheet in a high-density pattern.
[0002]
[Prior art]
Conventionally, various devices have been provided as a device for grasping such a minute component.
For example, in the grasping device 1 disclosed in Japanese Utility Model Publication No. 63-34868, as shown in FIG. 8, the root portion of the tweezers 2 is inserted into the holder 3, and the opening adjustment screw is located slightly forward of the tweezer fixing portion. 7, the maximum opening amount of the tweezers 2 is limited, and the tweezers 2 are moved by an operation screw 6 provided opposite to a tip of an operation lever 5 interlocked with the actuator 4. The actuator 4 is driven by air pressure, hydraulic pressure, a motor, or the like.
[0003]
In Japanese Patent Application Laid-Open No. 63-156680, an electrostrictive element, in Japanese Patent Publication No. 5-24771, a piezoelectric element, and in Japanese Patent Application Laid-Open No. 5-293778, a laminated piezo element is incorporated into a gripper of tweezers. There has been proposed a device for automatically opening and closing tweezers by applying force to grip a micropart.
[0004]
[Problems to be solved by the invention]
However, in the grasping device 1 disclosed in Japanese Utility Model Laid-Open Publication No. 63-34868, the actuator 4 for opening and closing the tweezers 2 is driven by pneumatic pressure, a motor, or the like. Is difficult, and since the opening and closing of the tweezers 2 is performed via the operation lever 5 between the tweezers 2 and the actuator 4, there is a problem that the weight and size of the device are not sufficiently reduced. Further, there is a problem that the opening / closing stroke of the tweezers 2 is narrow, and the flexibility with respect to the change of the type of the target object is low.
[0005]
Further, the apparatus for controlling the opening and closing of tweezers using the electrostrictive element described in JP-A-63-156680, the piezoelectric element described in Japanese Patent Publication No. Hei 5-24771, and the laminated piezoelectric element described in JP-A-5-293778 is all structured. There is a problem that the control itself for opening and closing the tweezers is complicated and very expensive, and a malfunction due to noise can be considered.
[0006]
The present invention has been made in view of the above problems, and has as its object to provide a gripping device that is simple, inexpensive, flexible, and has long-term reliability.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, the present invention relates to a micro component gripping device that picks up a micro component by a chuck,
Chuck opening / closing means for opening / closing a pair of claw members of the chuck by a positioning motor; detecting means for a minute component comprising a CCD camera; and detecting the width of a portion to be gripped by the minute component from the detecting means and the distance between adjacent parts. Comprising arithmetic processing means for setting the opening and closing stroke of the pair of claw members of the chuck based on the detection signal,
There is provided a micro component gripping device characterized in that a rotation amount of the positioning motor is controlled by a signal from the arithmetic processing means.
[0008]
With the above configuration, the CCD camera captures an image of the micro component, and a gripped portion (ex. Center of gravity position) of the micro component is determined by image processing such as binarization processing or pattern matching. The amount of opening of the chuck can be calculated from the distance between adjacent minute parts, and the amount of closing of the chuck can be calculated from the width of the gripped portion.
Further, since the opening / closing operation of the chuck is performed by the positioning motor, it is possible to control a minute opening / closing amount for each pulse of the positioning motor.
[0009]
The chuck opening / closing means includes a positioning motor, a cam operated by the positioning motor, an elevating member having both-side tapered portions that move up and down following the cam and expand downward, and a taper portion on both sides of the elevating member. A pair of claw members having a cam follower connected thereto connected to an upper end thereof and having a gripping claw at a lower end, spring means for urging the pair of claw members in a separating direction and connecting the pair, and the pair of claw members And a linear guide that slidably holds in the approaching / separating direction.
The rotation of the positioning motor raises and lowers the elevating member via the cam, and the cam follower and the spring means along the tapered portions on both sides of the elevating member move a pair of claw members closer to and away from each other to form a pair of chucks. The pawl member is configured to be opened and closed at a stroke set by the positioning motor.
[0010]
With the above configuration, by rotating the cam for each pulse by the positioning motor, the rotational movement of the cam is converted into the vertical movement of the lifting member, and the vertical movement of the lifting member is the horizontal opening and closing movement of the claw member. Is converted to
More specifically, the chuck opening / closing means attaches a spring between an upper wall of the housing and the elevating member to urge and hold the elevating member upward, and also guides the housing up and down in a vertical direction. And a sliding piece projecting from the elevating member is fitted to the guide rail.
By the upward biasing of the elevating member by the spring, the elevating member can be stably brought into contact with the cam. When the protruding side comes into contact with the elevating member by rotation of the cam, the elevating member is lowered, while the non-projecting side is the elevating member side. When it becomes, it can be raised by a spring, and the lifting member can follow the rotation of the cam. In addition, by attaching the elevating member to the guide rail so as to be slidable up and down, the elevating member can be moved up and down stably.
Therefore, an inexpensive gripping device with a simple structure can be provided, and minute opening / closing control for each pulse of the positioning motor can be performed.
[0011]
Means for positioning the chuck opening / closing means at a position of a target micro component, the positioning means including an X-axis table, a Y-axis table, and a Z-axis table, and the chuck opening / closing means being attached to the Z-axis table; .
[0012]
With the above configuration, the chuck opening / closing means is moved and positioned in the XY directions by the X-axis table and the Y-axis table, and the positioned chuck opening / closing means is moved down by the Z-axis table so as to be positioned on both sides of the micro component. After the claw member of the chuck is arranged, the chuck is closed and the micro component is gripped, and then lifted to pick up the micro component.
[0013]
An output shaft protruding downward from the chuck rotating motor is attached to the chuck opening / closing means, and the chuck opening / closing means is rotated with the center axis between the pair of claw members as a rotation axis, and the minute component gripped by the pair of claw members is removed. It is designed to be rotatable.
[0014]
With the above configuration, the micro component can be oriented in any direction by rotating the chuck opening / closing means by the chuck rotating motor with the micro component picked up, and the picked micro component is aligned in the next step. It is suitable for housing.
[0015]
A pair of claw members of the chuck are slidably fitted to the linear guide via a ball bearing,
The above-mentioned cam, which is rotated by less than 1/2 rotation at the time of the gripping operation of the micropart, is rotated once by lubrication of the ball at a time other than the time of the gripping operation, and the claw member moves on the linear guide, thereby The setting is such that the ball makes one or more rotations.
[0016]
The opening / closing stroke of the chuck when gripping a minute component is small, and the ball of the ball bearing rotates only less than 1/2 rotation (for example, about 1/10 to 1/15). It may be lost and worn. However, according to the above configuration, the time when the work of gripping the minute parts is not performed, the cam is rotated once to open and close the chuck largely, and the ball is rotated one or more times to lubricate the oil film on the ball surface. As a result, the long-term reliability of the guide can be improved.
[0017]
The micro components to be picked up are arranged on a sheet at high density, and the width of the gripped portion of the micro components to be gripped by the pair of claw members of the chuck is 0.05 to 5 mm. Is 2 mm or more, the opening and closing stroke of the pair of claw members of the chuck is 0 to 9.3 mm, and the positioning motor is opened and closed by 0.1 to 1.0 μm per pulse.
[0018]
The micro-parts are preferably used when picking up contact probes and the like formed at high density in a state of being adhered on a sheet, and when the opening and closing stroke of a pair of claw members of the chuck is set to the above dimensions, The micro component to be picked up without contacting the adjacent micro component can be sufficiently gripped. In addition, since the opening / closing stroke is set to 0 to 9.3 mm, even if the size of the micro component to be gripped is changed, it can be dealt with as it is.
Further, by setting the opening / closing dimension of the chuck per pulse of the positioning motor to 0.1 to 1.0 μm to achieve high resolution, it is possible to accurately hold even a small component arranged in a high-density pattern.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described with reference to the drawings.
FIG. 1 shows a micro component gripping device 10, in which an X-axis table 11 is fixed to a base 9, and a T-shaped X-direction movable portion 12 is mounted on the X-axis table 11 so as to be movable in the X direction. A protruding portion in the Y direction of the X direction movable portion 12 is a Y axis table 12a, and a Z axis table (also a Y direction movable portion) 13 is movably mounted on the Y axis table 12a in the Y direction. A Z-direction movable section 14 is attached to the Z-axis table 13 so as to be movable in the Z-axis direction, and a CCD camera (detection means) 17 and an arithmetic processing unit 18 electrically connected thereto are additionally provided. A chuck rotation motor 16 is fixed to the Z-direction movable section 14, and a chuck opening / closing means 15 is attached to an output shaft projecting downward from the chuck rotation motor 16.
[0020]
The chuck opening / closing means 15 fixes the housing 21 to the output shaft of the chuck rotation motor 16 and mounts a positioning motor 23 on the back side of the housing 21 as shown in FIG. An eccentric cam 24 is rotatably penetrated through the housing 21 and the eccentric cam 24 is fixed to the cam shaft 22.
Note that the positioning motor 23 of the present embodiment is a so-called stepping motor.
[0021]
An elevating member 25 that moves up and down in accordance with the rotation of the cam 24 is disposed below the cam 24, and a chuck 40 provided with a pair of claw members 33 that opens and closes in accordance with the up and down movement of the elevating member 25 is used to move the chuck 25 are provided in association with each other.
[0022]
The elevating member 25 is provided with a tapered cone-shaped concave portion 25c having a pair of tapered portions 25a and 25b extending downward at a lower portion. A sliding piece 29 protrudes from the back surface of the elevating member 25 and is vertically slidably fitted on a guide rail 32 fixed to the side wall of the housing 21 in the vertical direction. In addition, a cam follower receiving portion 27 is attached to the front side of the elevating member 25, and the cam follower receiving portion 27 is adjusted and supported by an adjusting portion 30 projecting from the elevating member 25.
A cam follower 26, which comes into contact with the outer peripheral surface of the cam 24, is rotatably mounted on the cam follower receiving portion 27, and a spring receiver 27a projecting forward from the cam follower receiving portion 27 and projecting downward from an upper wall of the housing 21. A spring S1 is contracted between the supporting member 21a and the supporting member 21a, and the lifting member 25 is supported in a state of being urged upward. As described above, since the lifting member 25 and the cam follower 26 are urged upward by the spring S1, the cam follower 26 is pressed against the outer peripheral surface of the cam 24 to make stable contact therewith, and the cam follower 26 is rotated in accordance with the rotation of the cam 24. The lifting member 25 is configured to be raised and lowered.
[0023]
The chuck 40 includes a pair of symmetric claw members 33. Each of the claw members 33 fixes the ball bearing 38 on the back surface of the main body 35, and the ball is fixed to a linear guide 39 provided on the side surface of the housing 21 in the horizontal direction. The bearing 38 is slidably fitted to support the claw members 33 slidably in the horizontal direction.
As shown in FIGS. 4 and 5, the ball bearing 38 is a slide bearing in which a plurality of balls 41 having a diameter of about 1 mm are arranged on a contact surface with the linear guide 39.
[0024]
A cam follower 34 is rotatably mounted on the upper end of the main body 35 of the claw member 33, and these cam followers 34 are positioned so as to abut the tapered portions 25a, 25b on both sides of the elevating member 25.
Further, a concave portion 35a-1 having an L-shaped cross section is formed to face the lower end 35a of the main body 35, and an attachment material 36 having a very fine gripping claw 36a protruding at the tip is fitted into the concave portion 35a-1 and a screw 37 is engaged. It is fixed with. A spring S2 for urging in the separating direction is stretched between the left and right claw members 33.
[0025]
As described above, the pair of claw members 33 are slidably supported in the housing 21 via the linear guide 39 in the horizontal direction, and are urged in the separating direction by the spring S2 connecting the claw members 33 to each other. Is pressed against the tapered portions 25a and 25b of the elevating member 25. Therefore, when the elevating member 25 descends, the cam followers 34 on both sides approach each other, and the gripping claws 36a move in the closing direction. When the elevating member 25 rises, the cam followers 34 on both sides move apart and the gripping claws 36a move in the opening direction. The configuration is such that
[0026]
As shown in FIG. 7, the gripping claw 36a at the tip of the claw member 33 has T ≧ 0.1 mm and L = 1 to 3 mm when the thickness is Tmm and the length is Lmm.
The reason why the thickness T is set to 0.1 mm or more is to prevent bending of the gripping claws 36a themselves and to obtain a sufficient gripping force. The length L is set to 3 mm or less in order to prevent the gripping claw 36a from being bent and to obtain a sufficient gripping force.
[0027]
The micro component 50 is used for a contact probe for inspection of an IC pad, a precision device, an electronic device, and the like. As shown in FIG. 7, the thickness is set to Wmm, and the mutual pitch in the thickness direction is set to Pmm. Many are arranged on the silicon rubber sheet 51. The values of the thickness W and the pitch P are W = 0.05 to 5 mm and P ≧ 0.2 mm.
The thickness W is set to 5 mm or less, because the thickness T of the gripping claw 36a is as thin as 0.1 mm or more, and when the thickness W of the micro component 50 is larger than 5 mm, the gripping claw 36a may be broken, This is because if the thickness W of the micro component 50 increases when the micro component 50 is removed from the adhesive silicon rubber sheet 51, the removing force increases.
The pitch P is set to 0.2 mm or more because the thickness T of the gripping claw 36a of the claw member 33 is 0.1 mm or more, and it is necessary to secure the opening and closing stroke of the chuck 40.
[0028]
A method for forming the micropart 50 is a method called a LIGA (lithography galvano-formung Abformung) process, in which a thick resist is patterned by deep lithography using X-rays obtained from synchrotron radiation, and a mold is formed by electroplating. A large number of microparts 50 are produced in a large amount and high density by molding, and a large number of microparts 50 are transferred by pressing an adhesive silicon rubber sheet 51 against the molding die, and are collectively taken out from the molding die. .
[0029]
Next, a procedure for picking up the micro component 50 by the micro component holding device 10 will be described.
First, the CCD camera 17 captures an image of the micro component 50 attached to the adhesive silicon rubber sheet 51, and the arithmetic processing unit 18 determines the center of gravity of the specific micro component 50 by image processing such as binarization processing or pattern matching.
Then, based on the detection signal of the width W of the position of the center of gravity of the micro component 50 from the CCD camera 17 and the interval P between the micro component 50 and the adjacent micro component 50, the X-axis movable table 12 and the Y-axis The direction movable portion 13 is moved in the X-Y direction, and the chuck opening / closing means 15 is positioned directly above the micro component 50.
[0030]
Next, the arithmetic processing means 18 calculates the opening amount of the chuck 40 from the interval P between the adjacent micro parts 50, calculates the closing amount of the chuck 40 from the width W of the center of gravity, and then uses the Z-axis table 13 The Z-direction movable part 14 is lowered, the gripping claw 36a of the claw member 33 is stopped in a state where it is positioned in the gap on both sides of the micro component 50, the pulse of the positioning motor 23 is finely adjusted, the chuck 40 is closed, and the gripping claw is closed. The micro component 50 is gripped at 36a.
[0031]
The gripping operation of the minute component 50 by opening and closing the chuck 40 will be described in detail.
FIG. 2 shows a state in which the chuck 40 is closed, from which the rotation of the positioning motor 23 causes the cam 24 to rotate via the cam shaft 22, and as shown in FIG. The elevating member 25 slides upward to contact the outer peripheral edge of the small diameter portion.
[0032]
Since the lifting member 25 moves upward and the pair of claw members 33 are urged in the separating direction by the spring S2, the cam followers 34 on both sides follow the tapered portions 25a and 25b, and the claw members 33 The ball bearing 38 fixed on the linear guide 39 slides left and right on the linear guide 39, the pair of claw members 33 move in the separating direction, and the chuck 40 is opened.
The operation of closing the chuck 40 is the reverse of the opening operation based on the same principle as described above, and the pair of claw members 33 are closed in the approaching direction by lowering the elevating member 25.
[0033]
The opening / closing stroke of the chuck 40 is set to a sufficient size of 0 to 9.3 mm, so that even if the size of the minute component 50 is changed, it can be dealt with as it is. The positioning motor 23 has a rotational resolution of 0.036 ° per pulse and the opening / closing dimension of the chuck 40 per pulse of the positioning motor 23 is as high as 0.1 to 1.0 μm. It is possible to grip the micro component 50 with high accuracy.
[0034]
After the micro component 50 is gripped (chucked) by the chuck 40, the micro component 50 can be picked up by raising the chuck opening / closing means 15 by raising the Z-direction movable portion 14 with the Z-axis table 13.
By rotating the chuck opening / closing means 15 about the central axis of the chuck 40 as a rotation axis by the chuck rotation motor 16 in a state where the micro component 50 is picked up, the micro component 50 can be directed in an arbitrary direction. In the process, the chuck 40 is opened, and the minute parts 50 can be arranged in the housing case.
[0035]
With the above configuration, by rotating the cam 24 for each pulse by the positioning motor 23, it is possible to control the minute opening / closing amount of the chuck 40, and it is possible to provide an inexpensive gripping device 10 with a simple structure. .
Needless to say, the gripping device 10 is preferably used even when the microparts 50 are not arranged at a narrow pitch and the pitch P between the microparts is large.
[0036]
Further, the gripping device 10 lubricates the oil film of the ball 41 inside the ball guide 38 by rotating the cam 24 once during a time other than the operation of gripping the minute component 50.
For example, when the pitch P of the microparts 50 arranged on the adhesive silicon rubber sheet 51 is 0.2 mm, the opening and closing of the claw member 33 of the chuck 40 is performed so that the gripping claw 36a does not interfere with the adjacent microparts 50. The stroke becomes as small as 0 to 0.18 mm.
Even if a very small ball 41 having a diameter of 1 mm is used as the ball 41 of the ball guide 38, the ball 41 rotates only a small amount and does not rotate once because the circumference thereof is about 3.14 mm. There is a danger that the oil film will be lost due to rubbing only at a part and abrasion will occur locally.
[0037]
However, in the present invention, the cam 24 is rotated once to open and close the claw member 33 of the chuck largely to lubricate the oil film on the surface of the ball 41 by utilizing the time when the work of holding the micropart 50 is not performed. Therefore, the wear and the like of the ball 41 can be prevented, and the long-term reliability can be improved.
In this embodiment, a ball 41 having a diameter of φ1 mm is used, the circumference of which is about 3.14 mm, and the opening and closing stroke of the claw member 33 of the chuck 40 is 0 to 9.3 mm. By rotating the ball once, the ball 41 can be rotated about three times.
[0038]
【The invention's effect】
As is clear from the above description, according to the present invention, by controlling the minute opening / closing amount of the chuck by rotating the cam for each pulse by the positioning motor, an inexpensive gripping device having a simple structure can be obtained. Can be provided.
Further, by setting the opening and closing stroke of the chuck to a sufficient size of 0 to 9.3 mm, it is possible to cope with a change in the size of a minute component as it is, and it is also possible to respond to one pulse of the positioning motor. By setting the opening / closing dimension of the chuck to a high resolution of 0.1 to 1.0 μm, it is possible to accurately hold even a small component arranged in a high-density pattern.
Furthermore, by utilizing the time when the small parts are not gripped, the cam is rotated once to open and close the chuck so that the oil film on the ball surface of the ball guide can be lubricated. Can be improved.
[Brief description of the drawings]
FIG. 1 is a perspective view of a micro component gripping device according to an embodiment of the present invention.
FIG. 2 is a front view of a chuck opening / closing unit.
FIG. 3 is a sectional view of the chuck opening / closing means taken along line II.
FIG. 4 is an enlarged front view of a main part.
FIG. 5 is an enlarged sectional view of a main part.
FIG. 6 is a front view of the chuck opening / closing means in a state where a cam is rotated.
FIG. 7 is a top view showing a state in which minute components are arranged.
FIG. 8 is a perspective view of a conventional grasping device.
[Explanation of symbols]
Reference Signs List 10 Micro component holding device 11 X-axis table 12 X-direction movable part 12a Y-axis table 13 Z-axis table (Y-direction movable part)
14 Z direction movable part 15 Chuck opening / closing means 16 Chuck rotation motor 17 CCD camera (detection means)
18 arithmetic processing means 21 housing 22 camshaft 23 positioning motor 24 cam 25 elevating members 25a, 25b taper portion 26 cam follower 27 cam follower receiving portion 29 sliding piece 30 adjusting portion 32 guide rail 33 claw member 34 cam follower 35 main body portion 36 mounting member 36a Gripping pawl 37 Screw 38 Ball bearing 39 Linear guide 40 Chuck 41 Ball 50 Micropart 51 Adhesive silicon rubber sheet S1, S2 Spring

Claims (7)

In a micro component holding device that picks up a micro component with a chuck,
Chuck opening / closing means for opening / closing a pair of claw members of the chuck by a positioning motor; detecting means for a minute component comprising a CCD camera; and detecting the width of a portion to be gripped by the minute component from the detecting means and the distance between adjacent parts. Comprising arithmetic processing means for setting the opening and closing stroke of the pair of claw members of the chuck based on the detection signal,
A micro component gripping device, wherein a rotation amount of the positioning motor is controlled by a signal from the arithmetic processing means. The chuck opening / closing means includes a positioning motor, a cam operated by the positioning motor, an elevating member having both-side tapered portions that move up and down following the cam and expand downward, and a taper portion on both sides of the elevating member. A pair of claw members having a cam follower connected thereto connected to an upper end thereof and having a gripping claw at a lower end, spring means for urging the pair of claw members in a separating direction and connecting the pair, and the pair of claw members And a linear guide that slidably holds in the approaching / separating direction.
The rotation of the positioning motor raises and lowers the elevating member via the cam, and the cam follower and the spring means along the tapered portions on both sides of the elevating member move a pair of claw members closer to and away from each other to form a pair of chucks. The micro component gripping device according to claim 1, wherein the claw member is configured to be opened and closed at a stroke set by the positioning motor. Means for positioning the chuck opening / closing means at a target position of the micro component, the positioning means including an X-axis table, a Y-axis table, and a Z-axis table, and the chuck opening / closing means being attached to the Z-axis table; The micro component gripping device according to claim 1 or 2. An output shaft protruding downward from the chuck rotating motor is attached to the chuck opening / closing means, and the chuck opening / closing means is rotated with the center axis between the pair of claw members as a rotation axis, and the minute component gripped by the pair of claw members is removed. 4. The micro component gripping device according to claim 3, wherein the device is rotatable. A pair of claw members of the chuck are slidably fitted to the linear guide via a ball bearing,
The above-mentioned cam, which is rotated by less than 1/2 rotation at the time of the gripping operation of the micropart, is rotated once by lubrication of the ball at a time other than the time of the gripping operation, and the claw member moves on the linear guide, thereby The device for gripping a micro component according to any one of claims 2 to 4, wherein the ball is set to rotate one or more times. The micro components to be picked up are arranged on a sheet at high density, and the width of the gripped portion of the micro components to be gripped by the pair of claw members of the chuck is 0.05 to 5 mm. The opening and closing stroke of the pair of claw members of the chuck is 0 to 9.3 mm, and the positioning motor is opened and closed by 0.1 to 1.0 μm per pulse of the positioning motor. The micro component gripping device according to any one of claims 1 to 5. The chuck opening / closing means attaches a spring between the upper wall of the housing and the elevating member, biases the elevating member upward and holds the same, and provides a vertical guide rail on the housing, 7. The micro component gripping device according to claim 2, wherein a sliding piece protruding from the elevating member is fitted to the guide rail.

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