JP2004053360A - Ultrasonic imaging system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To allow imaging/inspection at a high speed, in an ultrasonic imaging system for emitting an ultrasonic wave toward an inspection object and for imaging a reflected echo to inspect a defect or the like. <P>SOLUTION: An ultrasonic transducer having a plurality of piezoelectric conversion parts 30 arranged respectively matrix-likely or in one line is used for generation/detection for the ultrasonic wave in this system, optional one out of the plurality of piezoelectric conversion parts 30 is driven, the reflected echo from the inspection object is detected by the the plurality of piezoelectric conversion parts to be converted into electric signals, and the converted electric signals are detected in parallel by a signal detecting circuit 4 to be parallel-operated in a signal processing part 70, so as to be imaging-processed. In the parallel operation, a plurality of processing means conducts, in parallel, processings for determining reflection intensity as to respective meshed areas, as to the respective electric signals detected in parallel, based on one time-directional data out of the electric signals detected in parallel, using a stored ultrasonic propagation time. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultrasonic imaging apparatus that irradiates an inspection object with an ultrasonic wave and images a reflected echo thereof to inspect a defect or the like, and in particular, an ultrasonic imaging apparatus suitable for faster imaging and inspection. About.
[0002]
[Prior art]
In the case of a device having a monocular ultrasonic sensor as an ultrasonic imaging device, for example, an ultrasonic wave is transmitted in a vertical direction using a water immersion method, and imaging is performed at a specific depth of focus on the assumption that there is a reflector in front. . In this case, it is not possible to cope with the case where the inside of the inspection target having a curved surface is imaged, and for example, there is a disadvantage that the focus is deviated and high-precision imaging cannot be performed.
[0003]
In addition, an ultrasonic imaging apparatus having an ultrasonic transducer composed of a large number of piezoelectric transducers arranged in a matrix or in a row can respond to high accuracy, but the inspection target has a plurality of different acoustic characteristics. The enormous amount of processing when inspecting and visualizing internal defects, voids, peeling, and the like when the layer structure or the surface has a curved surface shape is a problem. Such processing requires two-dimensional or three-dimensional calculations of refraction of a large number of ultrasonic waves transmitted and received between the piezoelectric transducers arranged in a matrix, resulting in an enormous processing time. I do.
[0004]
[Problems to be solved by the invention]
Therefore, in order to reduce the processing time, for example, when the layer structure or the surface shape of the inspection target can be specified, the ultrasonic signals transmitted and received between a large number of piezoelectric conversion units arranged in a matrix or in a line. It can be utilized that the propagation time is calculated in advance in accordance with a propagation path such as refraction and is stored in a table. This eliminates the need for one refraction calculation. However, even in this case, sufficient speedup cannot be achieved due to the large number of piezoelectric conversion units.
[0005]
The present invention has been made in consideration of the above-described circumstances, and provides an imaging / inspection at higher speed in an ultrasonic imaging apparatus that irradiates an inspection object with an ultrasonic wave and images a reflected echo thereof to inspect a defect or the like. It is an object of the present invention to provide an ultrasonic imaging device capable of performing the operation.
[0006]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention provides an ultrasonic transducer having a plurality of piezoelectric converters each arranged in a matrix or in a row, and connected to the plurality of piezoelectric converters, wherein the plurality of piezoelectric converters And a drive element selection unit capable of driving any one of the plurality of piezoelectric conversion units, reflection of ultrasonic waves emitted by the driven piezoelectric conversion units from an object to be inspected via a sound propagation medium. A signal detection circuit that detects electric signals generated by the plurality of piezoelectric conversion units in parallel by receiving echoes and a process of imaging the state of the inspection target from the electric signals detected in parallel are performed in parallel. A signal processing unit that performs the calculation using an operation, and a display device that displays the processed and imaged result, wherein the signal processing unit determines an area to be imaged in the inspection target. The ultrasonic propagation time from the driven piezoelectric conversion unit to one of the plurality of piezoelectric conversion units for each of the meshed and meshed regions, the driven piezoelectric conversion unit and the plurality of piezoelectric conversion units. Storage means for storing for each combination with the one of the above, using the stored ultrasonic propagation time, from the time direction data of one of the electrical signals detected in parallel, the meshed A plurality of processing means for performing the processing of determining the reflection intensity for each of the regions in parallel with each other for each of the electrical signals detected in parallel, and the meshing of the reflection intensity determined in parallel and processed. And an adding means for adding for each area.
[0007]
That is, the present invention is based on the premise that an ultrasonic transducer having a plurality of piezoelectric conversion units arranged in a matrix or in a line is used for generating and detecting ultrasonic waves. Driving an arbitrary one of the plurality of piezoelectric conversion units, detecting reflected echoes from the inspection target with the plurality of piezoelectric conversion units, converting them into electric signals, and detecting the converted electric signals in parallel with a signal detection circuit Then, the image processing is performed by parallel operation in the signal processing unit.
[0008]
In the parallel operation, the above-mentioned storage means, a plurality of processing means, and addition means are used. The storage means meshes the area to be imaged in the inspection object, and for each of the meshed areas, the ultrasonic propagation time from the driven piezoelectric conversion unit to one of the plurality of piezoelectric conversion units is driven. The information is stored for each combination of the piezoelectric conversion unit and the one of the plurality of piezoelectric conversion units.
[0009]
A plurality of processing means, using the stored ultrasonic propagation time, from one time direction data of the electrical signals detected in parallel, processing to determine the reflection intensity for each meshed region, The electric signals detected in parallel are performed in parallel with each other. Such parallel processing enables high-speed processing. The processed result is added for each meshed area by the adding means. Thereby, imaging data can be obtained.
[0010]
The storage means, the plurality of processing means, and the addition means use, for example, a dedicated or general-purpose computer as hardware, and are configured by this hardware, and basic software and application software operating on the hardware. can do.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
As an embodiment of the present invention, instead of the storage unit, the signal processing unit meshes a region to be imaged in the inspection target, and for each of the meshed regions, a transmission-side ultrasonic wave from a certain piezoelectric conversion unit. A second storage unit that generalizes and stores the propagation time and the receiving-side ultrasonic propagation time to a certain piezoelectric conversion unit in common; and the plurality of processing units replaces the stored ultrasonic propagation time. Then, the stored transmission-side ultrasonic propagation time and the stored reception-side ultrasonic propagation time are used.
[0012]
By having such a second storage means, the required storage area can be greatly reduced. For example, the present invention can be applied to a case where the inspection target has a flat surface.
[0013]
In an embodiment of the present invention, in the storage unit of the signal processing unit, the region to be imaged is limited in consideration of the ultrasonic wave generation directivity characteristics of the plurality of piezoelectric conversion units. By providing such a restriction, it is possible to reduce storage areas that are not required for processing.
[0014]
Further, according to an embodiment of the present invention, in the second storage unit of the signal processing unit, the area to be imaged is limited in consideration of ultrasonic generation directivity characteristics of the plurality of piezoelectric conversion units. is there. Also in this case, it is possible to reduce storage areas that are not necessary for processing.
[0015]
Further, in an embodiment of the present invention, the signal processing unit meshes a region to be imaged in the inspection target, and from the driven piezoelectric conversion unit to the plurality of piezoelectric conversion units for each of the meshed regions. Further comprising a propagation intensity characteristic storing means for storing an ultrasonic wave propagation intensity characteristic to one of the combinations for each combination of the driven piezoelectric conversion unit and the one of the plurality of piezoelectric conversion units. The plurality of processing units of the unit use the stored ultrasonic wave propagation intensity characteristic for the process of determining the reflection intensity for correction.
[0016]
The ultrasonic wave propagation intensity characteristic from the driven piezoelectric conversion unit to one of the plurality of piezoelectric conversion units changes according to the directional characteristics of the piezoelectric conversion unit. For example, ultrasound emitted and received at an oblique angle will have reduced sensitivity. Therefore, by correcting such a decrease in sensitivity with the propagation intensity characteristic stored in the propagation intensity characteristic storage unit, the imaging result is made more accurate. The propagation intensity characteristic storage means may be provided with an address common to the ultrasonic wave propagation time storage means.
[0017]
Further, in an embodiment of the present invention, the signal processing unit meshes a region to be imaged in the inspection target, and for each of the meshed regions, there is a transmission-side ultrasonic wave propagation intensity characteristic from a certain piezoelectric conversion unit. Propagation intensity characteristic storage means for generalizing and commonly storing reception side ultrasonic propagation intensity characteristics to the piezoelectric conversion unit, wherein the plurality of processing units of the signal processing unit determine the reflection intensity The transmission-side ultrasonic wave propagation intensity characteristics and the reception-side ultrasonic wave propagation intensity characteristics stored above are used for correction.
[0018]
Also in this case, the accuracy of the imaging result is improved by correcting the decrease in sensitivity with the propagation intensity characteristic stored in the propagation intensity characteristic storage unit. Here, the required storage area of the propagation intensity characteristic storage means is greatly reduced. For example, the present invention can be applied to a case where the inspection target has a flat surface.
[0019]
Further, in the embodiment of the present invention, the signal processing unit may include a data providing unit that provides the storage unit with data of an ultrasonic propagation time as an initial value, and the ultrasonic wave propagation provided to the inspection object. A discontinuous surface or a discontinuous line of the inspection object is detected from the reflection intensity for each of the meshed regions obtained by performing the processing by the plurality of processing units using time data and adding by the adding unit. And means for resetting the contents of the storage means based on the detected discontinuous surface or discontinuity line.
[0020]
According to such a configuration, for example, when the ultrasonic propagation time as an initial value is given a numerical value assuming a single-layer inspection object, a discontinuous surface or a discontinuous line of the inspection object is obtained from the obtained reflection intensity. Can be detected. That is, it is possible to know the change in the position of the true inspection target (the inspection target not including the acoustic propagation medium). If the ultrasonic propagation time is stored again according to the change in the position, highly accurate imaging can be performed.
[0021]
The concept of the embodiment of the present invention described later is as follows.
[0022]
For example, in order to perform 3D image synthesis by aperture synthesis processing, it is necessary to associate ultrasonic echo waveforms (time direction data) transmitted and received between certain two piezoelectric conversion units in the distance direction. More specifically, each sampling data of the ultrasonic echo waveform is converted into distance data according to the sound speed, the reflected imaging mesh is specified, and the sampling data is associated with the specified imaging mesh. Then, for all the meshes in the 3D imaging region or all the meshes in the region limited by the directional angle, the above-described sampling data (intensity represented by the amplitude value) is added over all combinations of the two piezoelectric conversion units. By performing the processing, a 3D image can be drawn.
[0023]
Here, when the inspection is performed, it is general to transmit and receive ultrasonic waves to and from the inspection target through an acoustic propagation medium made of a resin shoe material immersed in water. Therefore, in the path in which the ultrasonic wave propagates, there are at least regions of different sound velocities, that is, the sound propagation medium and the inspection target. When the inspection target is composed of a plurality of layers having different sound velocities, a total of three or more layers are formed.
[0024]
In the case of a multi-layer configuration, it is necessary to perform 3D drawing by adding sampling data (amplitude value) according to the reciprocating distance obtained in consideration of refraction at the interface of each layer. Therefore, in general, refraction calculation is performed for each mesh, and the results are used to correlate and add sampling data, so the processing amount is enormous and it takes too much time to display, achieving practical performance It will be difficult to do.
[0025]
However, in a water immersion inspection under a shoe material of a fixed shape or under fixed conditions, if the propagation time data is tabulated without using one refraction calculation for each mesh, this can be used. By table conversion, processing corresponding to refraction calculation can be reduced to the memory access time. Further, by providing arithmetic circuits in parallel corresponding to the plurality of piezoelectric conversion units on the receiving side, the image synthesizing process can be further speeded up.
[0026]
Here, according to the above method, for example, when 10 × 10 piezoelectric conversion units are arranged in a matrix in a plane, two of the 100 piezoelectric conversion units (sending side and receiving side) are used. It is necessary to prepare table data corresponding to all combinations. For this reason, generally, the calculation time and data capacity when preparing table data in advance become enormous.
[0027]
Therefore, in order to reduce this, it is very effective to use the symmetry and the uniformity of the inspection object to share the table data regardless of the above combination. For example, when inspecting a flat inspection object with a shoe material having a constant thickness and a planar shape, if there is only a single table data corresponding to a one-way ultrasonic path, it is transmitted by an arbitrary piezoelectric conversion unit in coordinate conversion. And the propagation distance of reception can be calculated. Thereby, the memory capacity in the parallel operation circuit is reduced, and the processing is further speeded up by the high-speed access.
[0028]
Also, when creating the ultrasonic propagation time table data and the common table data, if the area of the table data is limited in consideration of the directional characteristics of the piezoelectric conversion unit, unnecessary imaging data is not drawn and image synthesis is performed. Processing efficiency can be improved.
[0029]
In addition, when creating the ultrasonic propagation time table data and the common table data, if sensitivity distribution data by directivity is stored in addition to the propagation time in the table data in consideration of the directional characteristics of the piezoelectric conversion unit, the sensitivity is low. By adjusting the gain of the oblique component of the ultrasonic wave, it becomes possible to effectively use the echo data of the oblique component that is effective for improving the accuracy.
[0030]
Also, when creating ultrasonic propagation time table data and common table data, assuming a single layer of a solid or liquid acoustic propagation medium to be inspected and initial setting of table data for this, the resulting image Thus, the boundary surface between the sound propagation medium and the true inspection object can be extracted. Then, according to the table data recalculated using the processing result, it is possible to cope with imaging when the position changes. In addition, in preparation for a case where the shape of the true inspection object is complicated, the shape data is stored in advance, and the ultrasound propagation time table data and the common table data may be reset in consideration of the stored shape data. it can.
[0031]
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0032]
FIG. 1 is a diagram illustrating a configuration example in which an ultrasonic inspection is performed by an ultrasonic imaging apparatus according to an embodiment of the present invention. As shown in FIG. 1, this ultrasonic imaging apparatus includes a matrix sensor (ultrasonic transducer) 9, a signal generator 1, a drive element selector 2, a signal detection circuit 4, amplifiers 5a, 5b,. The processing unit 70 includes the display device 10. The signal processing unit 70 has A / D converters 6a, 6b,..., 6i, parallel processors 7a, 7b,. A sound propagation medium 16 is in close contact with the front surface of the matrix sensor 9, and the sound propagation medium 16 is brought into contact with an inspection target 17 via a coupling agent 18. The defect 14 may exist in the inspection target 17.
[0033]
The matrix sensor 9 has a plurality of piezoelectric converters 21a, 22a, 23a,..., 29a, 30a, 30b,. What is driven by the selection of the drive element selection unit 2 is determined, and the drive signal from the signal generation unit 1 is guided by a conductor. The electric signals generated by the respective piezoelectric conversion units 21a and the like are guided to the signal detection circuit 4 by conducting wires. When the piezoelectric conversion unit 21a and the like are electrically driven, ultrasonic waves are generated due to the properties of the piezoelectric body, and the generated ultrasonic waves reach the defect 14 in the inspection target 17 via the acoustic propagation medium 16. The ultrasonic echo U caused by the defect 14 is again input to the piezoelectric converters 21a and the like via the acoustic propagation medium 16, whereby the respective piezoelectric converters 21a and the like generate electric signals.
[0034]
The signal generation unit 1 generates a pulse-like or continuous drive signal so that the piezoelectric conversion unit 21a and the like generate ultrasonic waves. The generated drive signal is guided to the drive element selection unit 2. The drive signal selection unit 2 selects one or a plurality of piezoelectric conversion units 21a and the like to be driven, and guides a drive signal guided from the signal generation unit 1 to the selected piezoelectric conversion unit 21a and the like. .
[0035]
The signal detection circuit 4 detects an electric signal generated in the piezoelectric conversion unit 21a and the like. Of the detected electric signals, a plurality of necessary electric signals are guided to amplifiers 5a, 5b,..., 5i.
[0036]
The amplifiers 5a, 5b,..., 5i amplify the guided electric signals, and supply the amplified electric signals to the A / D converters 6a, 6b,. The A / D converters 6a, 6b,..., 6i perform A / D conversion of the guided electric signals, and guide the signals to the parallel processors 7a, 7b,.
[0037]
The parallel processors 7a, 7b, ..., 7i in the signal processing unit 70 process the digital signals derived from the A / D converters 6a, 6b, ..., 6i in parallel. This specifies the reflection intensity from the object. The specified reflection intensity is integrated by the integration processor 8 into imaging information, and further guided to the display device 10. The display device 10 displays the guided information.
[0038]
FIG. 2 is a diagram showing the configuration inside the signal processing unit 70 in further detail. As shown in the figure, the parallel processors 7a, 7b,... 7i have internal memories 105a, 105b,..., 105i and arithmetic circuits 106a, 106b,. Further, the integrated processor 8 includes an image integration processing unit 8a, a boundary extraction processing unit 8b, a shape data storage unit 8c, and a table data storage unit 107.
[0039]
, 105i temporarily store the A / D converted signals supplied from the A / D converters 6a, 6b,..., 6i and the propagation time data obtained from the table data storage unit 107, respectively. Is what you do. The arithmetic circuits 106a, 106b,..., 106i specify the reflection intensity of each mesh in the imaging area from the A / D conversion signals and the propagation time data stored in the internal memories 105a, 105b,. Then, each mesh is associated with the reflection intensity. The associated reflection intensity is supplied to the image integration processing unit 8a.
[0040]
The image integration processing unit 8a adds the supplied reflection intensity for each mesh to generate imaging information. The generated imaging information is guided to the display device 10.
[0041]
The boundary extraction processing unit 8b extracts a boundary existing inside the irradiation target from the result output by the image integration processing unit 8a. Information about the extracted boundary is sent to the table data storage unit 107.
[0042]
The shape data storage unit 8c stores information on the surface shape and the layer structure of the irradiation target (or the inspection target 17) in advance. The stored information is sent to the table data storage unit 107 as needed.
[0043]
The table data storage unit 107 is a table in which the ultrasonic wave propagation time (or equivalent distance; the same applies hereinafter) between the piezoelectric conversion units 21a and the like is stored in advance as a table. Some or all of the stored ultrasonic propagation times are transferred to the internal memories 105a, 105b,..., 105i of the parallel processors 7a, 7b,. The ultrasonic propagation time stored in the table data storage unit 107 is based on the information on the extracted boundary of the irradiation target supplied by the boundary extraction processing unit 8b and the irradiation target (or inspection) supplied by the shape data storage unit 8c. The information can be reset by the information on the surface shape and the layer structure of the object 17).
[0044]
Next, an example of actual operation and processing by the configuration shown in FIGS. 1 and 2 will be described with reference to FIG. FIG. 3 is an explanatory diagram illustrating processing performed in each of the parallel processors 7a, 7b,..., 7i.
[0045]
A signal for driving the piezoelectric conversion unit 21a and the like is generated by the signal generation unit 1, and the signal is guided to the piezoelectric conversion unit (the piezoelectric conversion unit 25a in the figure) selected by the drive element selection unit 2. As a result, the piezoelectric conversion unit 25a generates an ultrasonic wave U, and the generated ultrasonic wave is applied to the inspection target 17 via the acoustic propagation medium 16 and the coupling agent 18.
[0046]
The ultrasonic wave U applied to the inspection target 17 is refracted on the surface thereof and further proceeds, for example, reflected by the defect 14 or the like, becomes an echo, and reaches the piezoelectric conversion unit 21a or the like via the inspection target 17 again.
[0047]
As a result, the piezoelectric converter 21a and the like generate an electric signal. The generated electric signal is guided to the signal detection circuit 4 and detected. In the signal detection circuit 4, electric signals necessary for the inspection (in the figure, those generated by the piezoelectric converters 21a,..., 29a) are guided to the amplifiers 5a,. The amplifiers 5a,..., 5i amplify the guided signals, respectively, and supply the amplified signals to the A / D converters 6a,. Further, the signals A / D converted by the A / D converters 6a,..., 6i are supplied to the parallel processors 7a, 7b,.
[0048]
Processing in each of the parallel processors 7a, 7b,..., 7i is performed as follows. Referring to FIG. 3, the piezoelectric conversion unit (j) 31 on the matrix sensor 9 corresponds to the piezoelectric conversion unit 25a that emits an ultrasonic wave (= transmission side) in FIG. Also, the piezoelectric converter (k) 32 on the matrix sensor 9 corresponds to one of the piezoelectric converters 21a,..., 29a (the receiving-side piezoelectric converter) in FIG.
[0049]
The imaging area 40 corresponds to the sound propagation medium 16 and the inspection target 17 in FIG. 1, and the imaging area 40A therein corresponds to the sound propagation medium 16, and the imaging area 40B corresponds to the sound propagation medium 40B. As shown in the figure, the imaging regions 40A and 40B are captured in a three-dimensional (or two-dimensional, easily seen cross section) mesh. Although the imaging area 40A and the matrix sensor 9 should be drawn in surface contact as shown in FIG. 1, they are drawn apart for convenience of illustration.
[0050]
The transmission / reception echo intensity P detected by the piezoelectric conversion unit (k) 32 and inputted to one of the parallel processors 7a, 7b,..., 7i is a time discrete signal as shown in the middle of FIG. is there. Each of the sampled intensities in this time discrete signal comes from reflections from somewhere in each mesh of the imaging area 40.
[0051]
For this association, the propagation time table data 207 is used. This propagation time table data 207 has been stored in the table data storage unit 107 in FIG. The propagation time table data 207 is created for each combination (j, k) of the piezoelectric conversion unit (j) 31 on the transmitting side and the piezoelectric conversion unit (k) on the receiving side, and corresponds to each mesh of the imaging region 40. It is a table in which the propagation time of (j → i → k) is recorded. As shown in the figure, here, table data 71 corresponding to the imaging area 40A and table data 40B corresponding to the imaging area 40B are included. The propagation time table data 207 is also structured three-dimensionally (or two-dimensionally in a cross section that is easily seen) as shown in the figure corresponding to the imaging area 40.
[0052]
Now, for example, when the reflection intensity from the imaging mesh (i) 51 is determined from the data of the transmission / reception echo intensity P, first, the storage position of the propagation time table data 207 corresponding to the imaging mesh (i) 51 is determined. The propagation time (i) 61 is extracted. Then, a sampling value of the transmission / reception echo intensity P at a time t corresponding to the propagation time (i) 61 is specified. The sampling value becomes the reflection intensity from the imaging mesh (i) 51.
[0053]
Similarly, for the imaging mesh (i + 1) 52, the imaging mesh (i + 2) 53, the imaging mesh (i + 3) 54, the imaging mesh (i + 4) 55,..., The propagation time (i + 1) 62, the propagation time ( The reflection intensity can be determined using (i + 2) 63, propagation time (i + 3) 64,.
[0054]
The determination of the reflection intensity for each mesh as described above is performed by changing the value of k of the piezoelectric conversion unit (k) 32 on the receiving side for each of the parallel processors 7a, 7b, ..., 7i in the signal processing unit 70. Performed in parallel. Then, these results are sent to the image integration processing unit 8a and added for each mesh. That is, in the processing described above, parallel processing is performed by the parallel processors 7a, 7b,..., 7i, so that extremely high-speed processing is realized.
[0055]
The final image is obtained, for example, when the above-described processing is completed for all combinations of the piezoelectric conversion unit (j) 31 on the transmitting side and the piezoelectric conversion unit (k) on the receiving side. As a simplification, for example, a point in time when the above-described processing is completed for all combinations of the piezoelectric conversion units (j) 31 on the sending side and the piezoelectric conversion units (k) on the receiving side may be arranged. These results are displayed on the display device 10. By the way, if the defect 14 exists, the reflection intensity of the ultrasonic wave U from the area increases, so that the imaged result reflects the position and the degree.
[0056]
The propagation time table data 207 can be created in advance by performing refraction calculation in consideration of the difference in the material of the imaging regions 40A and 40B and specifying the propagation path. Here, refraction occurs at the interface between the imaging regions 40A and 40B due to the difference in material between them, as shown in the figure. By taking this refraction into account, the propagation time (j → i → k) is obtained.
[0057]
The propagation time table data 207 is initially stored in the table data storage unit 107 in FIG. 2, but in an actual process, necessary parts are transferred to the internal memories 105a, 105b,. Is done. With the transfer configuration, high-speed memories can be used as the internal memories 105a, 105b,..., 105i to contribute to higher-speed processing as a whole.
[0058]
Next, another example of the actual operation and processing by the configuration shown in FIGS. 1 and 2 will be described with reference to FIG. FIG. 4 is an explanatory diagram for explaining another example of the processing performed in each of the parallel processors 7a, 7b,..., 7i, and the portions described in FIG. The description will be made below with avoiding duplication.
[0059]
In this processing example, instead of the propagation time table data 207, a common and one-way irrespective of the combination (j, k) of the piezoelectric conversion unit (j) 31 on the transmitting side and the piezoelectric conversion unit (k) on the receiving side. The one-way propagation time table data 95 in which the propagation time is stored is used. The one-way propagation time table data 95 includes table data 96 corresponding to the imaging area 40A and table data 97 corresponding to the imaging area 40B.
[0060]
Such one-way propagation time table data 95 can be used when the inspection object 17 has a shape symmetry or a planar surface property. This is because the transmitting side can assume a uniform propagation time by the value of the difference (ji), that is, without depending on the value of the individual j. Similarly, the receiving side can assume a uniform propagation time by the value of the difference (ik), that is, without depending on the value of the individual k.
[0061]
Now, for example, when the reflection intensity from the imaging mesh (i) 51 is determined from the data of the transmission / reception echo intensity P, first, from the one-way propagation time table data 95, the transmission-side propagation is performed using (ji) as an argument. The time (ji) 81 is taken out. Similarly, the receiving-side propagation time (ik) 91 is extracted from the one-way propagation time table data 95 using (ik) as an argument. Then, the transmission side propagation time (ji) 81 and the reception side propagation time (ik) 91 are added, and the sampling value of the transmission / reception echo intensity P at the time t corresponding to the added value is specified. The sampling value becomes the reflection intensity from the imaging mesh (i) 51.
[0062]
Similarly, with respect to the imaging mesh (i + 1) 52, the imaging mesh (i + 2) 53, the imaging mesh (i + 3) 54, the imaging mesh (i + 4) 55,. The reflection intensity can be determined using the time (ji−2) 83,..., The propagation time (i + 1−k) 92, the propagation time (i + 2−k) 93,.
[0063]
As described above, in this example, instead of the propagation time table data 207, the transmission time table data 207 is common regardless of the combination (j, k) of the sending-side piezoelectric conversion unit (j) 31 and the receiving-side piezoelectric conversion unit (k). Since the one-way propagation time table data 95 in which the one-way propagation time is stored is used, the necessary storage area can be reduced to each stage.
[0064]
It should be noted that such a reduction in the storage area can be further performed by taking the following measures. That is, since the ultrasonic waves emitted from the reference piezoelectric converter 38 shown in FIG. 4 have directivity, it is not sufficient to prepare a storage area corresponding to a range outside the transmittable / receiveable range 39. No storage area is given to such a range. (Note that the reason why the reference piezoelectric conversion unit 38 is located at the upper left in the figure and is not located at the upper center is that the left-right symmetry is used.)
[0065]
Next, a few points will be supplemented with respect to an example of actual operation and processing by the configuration shown in FIGS.
[0066]
When creating the propagation time table data 207 and the one-way propagation time table data 95, sensitivity distribution data based on directivity is stored in these table data in addition to the propagation time in consideration of the directional characteristics of the piezoelectric conversion unit 21a and the like. You may do so. This makes it possible to correct the gain of the oblique component of the ultrasonic wave whose sensitivity is low, and use the echo data of the oblique component so as to contribute to the improvement of accuracy.
[0067]
When creating the propagation time table data 207 and the one-way propagation time table data 95, a single layer of a solid or liquid acoustic propagation medium is assumed to be inspected, and the table data is used as the data providing means. The initialization may be performed by the integrated processor 8 (the configuration in the integrated processor 8 for this purpose is not shown). By imaging the result obtained by this processing setting, it is possible to extract and detect a boundary surface (that is, a discontinuous line or a discontinuous line) between the acoustic propagation medium 16 and the true inspection object 17 (the processing is performed at the boundary This is performed by the extraction processing unit 8b). This is because the assumption and the actual result are different depending on the existing position of the boundary surface, so that the existence and position of the boundary surface can be specified.
[0068]
The integrated processor 8 resets the table data 207 and 95 based on the specification of the boundary surface (the configuration in the integrated processor 8 is not shown). By using 207 and 95, it is possible to cope with imaging when the position of the inspection target 17 changes.
[0069]
Further, in case the shape of the true inspection object 17 is complicated, the shape data is stored in advance in the shape data storage unit 8c, and the wave propagation time table data 207 and the one-way propagation An operation may be performed to reset the time table data 95.
[0070]
【The invention's effect】
As described in detail above, according to the present invention, high-speed processing can be performed by parallel processing.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a configuration example in which an ultrasonic inspection is performed by an ultrasonic imaging apparatus according to an embodiment of the present invention.
FIG. 2 is a diagram showing the configuration inside a signal processing unit 70 shown in FIG. 1 in further detail;
FIG. 3 is an explanatory diagram for explaining processing performed in each of the parallel processors 7a, 7b,..., 7i shown in FIG. 2;
FIG. 4 is an explanatory diagram illustrating another example of the processing performed in each of the parallel processors 7a, 7b,..., 7i shown in FIG. 2;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Signal generation part 2 ... Driving element selection part 4 ... Signal detection circuit 5a, 5b, ..., 5i ... Amplifiers 6a, 6b, ..., 6i ... A / D converters 7a, 7b, ..., 7i ... Parallel processor 8 ... Integrated processor 8a ... Image integration processing unit 8b ... Boundary extraction processing unit 8c ... Shape data storage unit 9 ... Matrix sensor 10 ... Display device 14 ... Defect 16 ... Sound propagation medium 17 ... Inspection object 18 ... Couprants 21a, 22a, 23a, , 25a, ..., 29a, 30a, 30b, ..., 30h ... piezoelectric conversion section 31 ... piezoelectric conversion section (j) 32 ... piezoelectric conversion section (k) 38 ... reference piezoelectric conversion section 39 ... transmittable and receiveable range 40, 40A, 40B: imaging area 51: imaging mesh (i) 52: imaging mesh (i + 1) 53: imaging mesh (i + 2) 54: imaging mesh (i + 3) 55: image Mesh (i + 4) 61 Propagation time (i) 62 Propagation time (i + 1) 63 Propagation time (i + 2) 64 Propagation time (i + 3) 70 Signal processing unit 71 Table data corresponding to imaging area 40A 72 ... Table data corresponding to the imaging area 40B 81 ... Propagation time (ji) 82 ... Propagation time (ji + 1) 83 ... Propagation time (ji + 2) 91 ... Propagation time (ik) 92 ... Propagation time (I + 1-k) 93: Propagation time (i + 2-k) 95: One-way propagation time table data 96: Table data corresponding to the imaging area 40A 97: Table data 105a, 105b, ..., 105i corresponding to the imaging area 40B ... internal memories 106a, 106b, ..., 106i ... arithmetic circuits 107 ... table data storage unit 207 ... propagation time table data U Ultrasonic P ... echo strength

Claims (7)

An ultrasonic transducer having a plurality of piezoelectric conversion units each arranged in a matrix or in a row,
A drive element selection unit connected to the plurality of piezoelectric conversion units and capable of driving any one of the plurality of piezoelectric conversion units,
The plurality of piezoelectric conversion units are connected to the plurality of piezoelectric conversion units, and the plurality of piezoelectric conversion units are generated by receiving reflected echoes from an inspection target via an acoustic propagation medium by ultrasonic waves emitted by the driven piezoelectric conversion units. A signal detection circuit for detecting electric signals in parallel,
A signal processing unit that performs a process of imaging the state of the inspection target from the electric signals detected in parallel by using a parallel operation,
A display device for displaying the processed and imaged result,
The signal processing unit,
The ultrasonic wave propagation time from the driven piezoelectric conversion unit to one of the plurality of piezoelectric conversion units is meshed for each of the meshed regions in the inspection target by meshing an area to be imaged in the inspection target. Storage means for storing for each combination of the conversion unit and the one of the plurality of piezoelectric conversion units,
Using the stored ultrasonic propagation time, from one time direction data of the electrical signals detected in parallel, the process of determining the reflection intensity for each of the meshed regions, the processing in parallel A plurality of processing means for performing in parallel with each other on each of the detected electric signals,
An ultrasonic imaging apparatus comprising: an adding unit configured to add the reflection intensity determined in parallel with the processing for each of the meshed regions. The signal processing unit, instead of the storage unit, meshes a region to be imaged in the inspection target, and for each of the meshed regions, a transmission-side ultrasonic propagation time from a certain piezoelectric conversion unit and a certain piezoelectric conversion unit Second storage means for generalizing and commonly storing the receiving-side ultrasonic propagation time to the receiving side, wherein the plurality of processing means replaces the stored ultrasonic transmitting time with the stored transmission time. 2. The ultrasonic imaging apparatus according to claim 1, wherein a side ultrasonic wave propagation time and the stored receiving side ultrasonic wave propagation time are used. 2. The storage device according to claim 1, wherein, in the storage unit of the signal processing unit, the region to be imaged is limited in consideration of directional characteristics of ultrasonic generation in the plurality of piezoelectric conversion units. A sound imaging device. 3. The apparatus according to claim 2, wherein in the second storage unit of the signal processing unit, the area to be imaged is limited in consideration of the ultrasonic wave generation directivity characteristics of the plurality of piezoelectric conversion units. An ultrasound imaging device as described. The signal processing unit meshes a region to be imaged in the inspection object, and ultrasonic wave propagation intensity characteristics from the driven piezoelectric conversion unit to one of the plurality of piezoelectric conversion units for each of the meshed regions. Further, further comprising a propagation intensity characteristic storage means for storing for each combination of the driven piezoelectric conversion unit and the one of the plurality of piezoelectric conversion units, the plurality of processing means of the signal processing unit, The ultrasonic imaging apparatus according to claim 1, wherein the stored ultrasonic wave propagation intensity characteristic is used for correcting the reflection intensity for correction. The signal processing unit meshes a region to be imaged in the inspection target, and for each of the meshed regions, a transmission-side ultrasonic wave propagation intensity characteristic from a certain piezoelectric conversion unit and a reception-side ultrasonic wave to a certain piezoelectric conversion unit. The signal processing unit further includes a propagation intensity characteristic storage unit that generalizes and stores the propagation intensity characteristics, and the plurality of processing units of the signal processing unit include the transmission-side ultrasonic wave stored in the process of determining the reflection intensity. The ultrasonic imaging apparatus according to claim 2, wherein the propagation intensity characteristic and the receiving-side ultrasonic propagation intensity characteristic are used for correction. The signal processing unit,
Data providing means for providing data of ultrasonic propagation time as an initial value to the storage means,
From the reflection intensity for each of the meshed regions obtained by processing by the plurality of processing means using the data of the ultrasonic propagation time given to the inspection object and adding by the adding means, Means for detecting a discontinuous surface or a discontinuous line to be inspected;
2. The ultrasonic imaging apparatus according to claim 1, further comprising: means for resetting the contents of said storage means based on said detected discontinuous plane or discontinuous line.

Images