JP2003344316A - Reconstitution method of inclined three-dimensional x- ray ct image - Google Patents
Reconstitution method of inclined three-dimensional x- ray ct imageInfo
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- 238000003168 reconstitution method Methods 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 238000001914 filtration Methods 0.000 claims abstract description 6
- 238000005259 measurement Methods 0.000 claims description 9
- 238000003325 tomography Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000002591 computed tomography Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、産業用Ｘ線ＣＴ
（コンピュータ・トモグラフィ）装置等において、半導
体部品、プリント基板、ＩＣチップ、半田接合部や、機
械部品、複合材料、プラスチックの検査等を行うのに有
効な傾斜三次元Ｘ線ＣＴ画像の再構成方法に関するもの
であり、特にそのアルゴリズムに特徴のある傾斜三次元
Ｘ線ＣＴ画像の再構成方法に関するものである。TECHNICAL FIELD The present invention relates to an industrial X-ray CT.
Reconstruction of tilted three-dimensional X-ray CT images effective for inspecting semiconductor parts, printed circuit boards, IC chips, solder joints, mechanical parts, composite materials, plastics, etc. in (computer tomography) devices, etc. The present invention relates to a method, and more particularly to a method for reconstructing a tilted three-dimensional X-ray CT image, which is characterized by the algorithm.
【０００２】[0002]
【従来の技術】従来から知られている三次元Ｘ線ＣＴで
は、図４に示すように、回転軸の周りに回転する測定物
Ａに対して、その回転軸に垂直な方向からＸ線を投射
し、投影データを収集しており、Ｘ線焦点と二次元検出
器中心は、回転軸に直交する同じ水平面上に配置されて
いた。2. Description of the Related Art In a conventionally known three-dimensional X-ray CT, as shown in FIG. 4, an X-ray is emitted from a direction perpendicular to a rotation axis of a measuring object A rotating around the rotation axis. Projecting and collecting projection data, the X-ray focal point and the center of the two-dimensional detector were arranged on the same horizontal plane orthogonal to the rotation axis.
【０００３】また、現在の三次元画像再構成方法では、
Feldcampによって導出された三次元画像再構成アルゴリ
ズムが主流となっている。このアルゴリズムでは、図４
に示すように、再構成空間の座標系を（x,y,z）とし、
投影角度β、二次元検出器平面の座標系をｐ，ｑとする
と、物理空間内のある点（t,s,z）における吸収係数分
布ｆ(t,s,z)は、Further, in the current three-dimensional image reconstruction method,
The 3D image reconstruction algorithm derived by Feldcamp is the mainstream. In this algorithm,
As shown in, the coordinate system of the reconstruction space is (x, y, z),
If the projection angle β and the coordinate system of the two-dimensional detector plane are p and q, the absorption coefficient distribution f (t, s, z) at a point (t, s, z) in physical space is
【数１】 と表される。[Equation 1] Is expressed as
【０００４】ここで、ＤsoはＸ線焦点と測定物中心まで
の距離、ｓはＤsoから検出面までの距離、Here, Dso is the distance from the X-ray focal point to the center of the object to be measured, s is the distance from Dso to the detection surface,
【数２】
である。また、（p,q）座標系は検出面に固定された座
標系であるが、便宜的に再構成空間（測定物の物理座標
系）のｚ軸とｐ軸を重ねて考える。[Equation 2] Is. Although the (p, q) coordinate system is a coordinate system fixed to the detection surface, the z axis and p axis of the reconstruction space (physical coordinate system of the object to be measured) are considered for convenience.
【０００５】そして、三次元画像再構成アルゴリズムは
下記のステップで実行される。
１） 重み付き投影データ作成
投影データPβ（p,q）にＤso／(Ｄso2＋ｐ2＋ｑ2)1/2を
かけて、重み付き投影データを作成。
２） 投影データのフィルタリング
フィルター関数ｈと重み付き投影データをｐ座標に関し
てフーリエ変換し、畳み込み演算を行う。
３） 逆投影
フィルター処理した重み付き投影データを、三次元再構
成空間に逆投影する。Then, the three-dimensional image reconstruction algorithm is executed in the following steps. 1) Weighted projection data creation Multiply projection data Pβ (p, q) by Dso / (Dso 2 + p 2 + q 2 ) 1/2 to create weighted projection data. 2) Filtering projection data The filter function h and the weighted projection data are Fourier-transformed with respect to the p-coordinate, and a convolution operation is performed. 3) Backprojecting the weighted projection data that has been subjected to the backprojection filter processing to the three-dimensional reconstruction space.
【０００６】しかしながら、上記のように、測定物Ａの
回転軸に直交する平面内にＸ線焦点と検出器中心を配置
して撮影を行う方法では、プリントボードのように平た
い測定物を撮影する場合に、測定物の一部を拡大撮影し
たくても、測定物の回転半径が大きいために、回転させ
るときにＸ線発生器と干渉するので、透視の拡大率を挙
げることができず、また、減衰の大きな部分が平面内で
重なってビームハードニングが起こり、画像のコントラ
ストが低下する、などの問題があった。However, as described above, in the method of photographing by arranging the X-ray focus and the center of the detector in the plane orthogonal to the rotation axis of the measuring object A, a flat measuring object such as a printed board is photographed. In this case, even if it is desired to magnify a part of the object to be measured, since the radius of rotation of the object to be measured is large, it interferes with the X-ray generator when the object is rotated. In addition, there is a problem that a portion with large attenuation is overlapped in a plane to cause beam hardening, which lowers image contrast.
【０００７】一方、測定物の回転軸に対して斜めの方向
から撮影する方法にラミノグラフィがあるが、出力され
るのは二次元画像データであり、三次元ではないため、
高さ方向の分解能が低いものである。On the other hand, there is laminography as a method of photographing from a direction oblique to the rotation axis of the object to be measured, but since the output is two-dimensional image data, not three-dimensional image data,
The resolution in the height direction is low.
【０００８】[0008]
【発明が解決しようとする課題】本発明の技術的課題
は、Ｘ線焦点と二次元検出面中心を結ぶ線が、測定物の
回転中心軸と任意の角度で交わるようにし、即ち照射角
度を任意に選択できるようにした傾斜三次元Ｘ線ＣＴに
おける画像の再構成を行うための方法を提供することに
あり、特にその再構成のためのアルゴリズムに特徴を有
する画像再構成方法を提供することにある。本発明の他
の技術的課題は、平たい測定物の一部についての高拡大
率三次元画像をも再構成できるようにした傾斜三次元Ｘ
線ＣＴ画像の再構成方法を提供することにある。The technical problem of the present invention is that the line connecting the X-ray focal point and the center of the two-dimensional detection surface intersects with the rotation center axis of the object to be measured, that is, the irradiation angle. To provide a method for performing image reconstruction in tilted three-dimensional X-ray CT that can be arbitrarily selected, and particularly to provide an image reconstruction method having a characteristic algorithm for the reconstruction. It is in. Another technical problem of the present invention is to provide a tilted three-dimensional X which is capable of reconstructing a high magnification three-dimensional image of a part of a flat object.
It is to provide a method for reconstructing a line CT image.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決するため
の本発明の傾斜三次元Ｘ線ＣＴ画像の再構成方法は、測
定物の回転軸方向に対して、９０度よりも小さい角度で
Ｘ線を照射し、検出した画像データに基づいて内部構造
を三次元再構成する方法であって、Ｘ線焦点と測定物の
回転中心までの距離および検出面までの距離を、Ｘ線源
の回転角の関数として表現し、得られた画像を測定物の
回転軸に平行となるようにトモグラフィ角度だけ回転さ
せて、垂直面画像に変換し、このとき、幾何学的な配置
の変換と共に、画像の強度も距離に応じて変換するステ
ップ、投影データに重み係数を掛けて重み付き投影デー
タを作成するステップ、フィルター関数と重み付き投影
データをフーリエ変換し、畳み込み演算を行う投影デー
タのフィルタリングのステップ、フィルター処理した重
み付き投影データを、三次元再構成空間に逆投影するス
テップを有するアルゴリズムで上記投影像を処理するこ
とを特徴とするものである。A method for reconstructing a tilted three-dimensional X-ray CT image according to the present invention for solving the above-mentioned problems is an X-ray at an angle smaller than 90 degrees with respect to the rotation axis direction of a measured object. It is a method of irradiating X-rays and three-dimensionally reconstructing the internal structure based on the detected image data. The distance between the X-ray focal point and the rotation center of the measured object and the distance to the detection surface Expressed as a function of angle, the obtained image is rotated by a tomography angle so as to be parallel to the rotation axis of the object to be converted into a vertical plane image, and at this time, along with the conversion of the geometrical arrangement, The image intensity is also converted according to the distance, the projection data is multiplied by a weighting coefficient to create the weighted projection data, the filter function and the weighted projection data are Fourier transformed, and the convolution calculation is performed on the projection data filter ring. Step, the weighted projection data filtering, the algorithm having a step of back projection to the three-dimensional reconstruction space is characterized in that processing the projected image.
【００１０】上記傾斜三次元Ｘ線ＣＴ画像の再構成方法
においては、デジタルラミノグラフィデータを、その二
次元検出面の法線が測定サンプルの回転軸に垂直になる
ように画像変換し、それを傾斜三次元Ｘ線ＣＴ画像デー
タとして使用することができる。また、上記傾斜三次元
Ｘ線ＣＴ画像の再構成方法は、面積が大きく平たい測定
物の一部を拡大して画像を再構成する場合に極めて有効
に適用できるものである。In the method of reconstructing the tilted three-dimensional X-ray CT image, the digital laminography data is image-converted so that the normal line of the two-dimensional detection surface is perpendicular to the rotation axis of the measurement sample, Can be used as tilted three-dimensional X-ray CT image data. Further, the method of reconstructing a tilted three-dimensional X-ray CT image can be very effectively applied when reconstructing an image by enlarging a part of a flat object having a large area.
【００１１】上記構成を有する本発明の画像再構成方法
は、従来の三次元画像再構成アルゴリズムを一般化した
もので、傾斜角度を任意に設定でき、それにより、電子
ボードなどのように厚さの薄く平たい測定物に対して
も、その一部を拡大透視して、内部構造を拡大三次元再
構成することができ、また、サンプルの高さ方向に対し
ても平面方向と同じ空間分解能を達成し、三次元的な構
造を高精度に再現することができる。The image reconstructing method of the present invention having the above-mentioned configuration is a generalization of the conventional three-dimensional image reconstructing algorithm, and the inclination angle can be arbitrarily set, so that the thickness of the electronic board can be increased. Even for thin and flat objects, the internal structure can be enlarged and three-dimensionally reconstructed by partially magnifying and seeing, and the same spatial resolution as the plane direction can be obtained in the height direction of the sample. Achieved and can reproduce the three-dimensional structure with high accuracy.
【００１２】[0012]
【発明の実施の形態】図１は、本発明に係る傾斜三次元
Ｘ線ＣＴ画像の再構成方法のアルゴリズムにおける座標
系について説明するためのもので、基本的には、測定物
にその回転軸方向に対して９０°よりも小さい角度θで
Ｘ線を照射し、検出した画像データに基づいて内部構造
を三次元再構成するようにしている。この傾斜三次元Ｘ
線ＣＴ画像再構成のアルゴリズムでは、Ｘ線焦点と測定
物の回転中心までの距離および検出面までの距離を、Ｘ
線焦点が任意の軌道で走査する場合を想定して、Ｘ線源
の回転角の関数として表現し、すなわち、Ｘ線がサンプ
ル周りを回転する軌道を一般化し、Ｄsoおよびｓを平面
内の投影角度βの関数として表すことにより、傾斜配置
を考慮している。傾斜配置でのＤsoおよびｓをそれぞ
れ、ρ(β) とσ(β)とおくと、吸収係数分布ｆ(t,s,z)
は以下のようになる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is for explaining a coordinate system in an algorithm of a method for reconstructing a tilted three-dimensional X-ray CT image according to the present invention. X-rays are emitted at an angle θ smaller than 90 ° with respect to the direction, and the internal structure is three-dimensionally reconstructed based on the detected image data. This inclined three-dimensional X
In the algorithm of line CT image reconstruction, the distance between the X-ray focal point and the center of rotation of the measurement object and the distance to the detection surface are calculated as
Assuming that the line focus scans in an arbitrary trajectory, it is expressed as a function of the rotation angle of the X-ray source, that is, the trajectory in which the X-ray rotates around the sample is generalized, and Dso and s are projected in the plane. The tilted arrangement is taken into account by expressing it as a function of the angle β. If Dso and s in the inclined arrangement are ρ (β) and σ (β), respectively, the absorption coefficient distribution f (t, s, z)
Is as follows.
【００１３】[0013]
【数３】 [Equation 3]
【００１４】このアルゴリズムを用いた傾斜三次元画像
再構成アルゴリズムは、以下のステップで実行される。
１） 垂直面画像への変換
通常、二次元検出器の周辺部分は画像の歪みが大きいの
で、これを緩和するために検出面中心の法線をＸ線焦点
に向けて配置する。しかし、Feldcampのアルゴリズムに
基づいているので、得られた画像をサンプル回転軸に平
行となるようにｐ軸周りにトモグラフィ角度θだけ回転
させて、Ｄpq’座標系の画像に変換する（図２参照）。
このとき、幾何学的な配置の変換と共に、画像の強度も
距離に応じて変換する。The gradient three-dimensional image reconstruction algorithm using this algorithm is executed in the following steps. 1) Conversion to a vertical plane image Usually, the image distortion is large in the peripheral portion of the two-dimensional detector. Therefore, in order to alleviate this, the normal line to the center of the detection plane is arranged so as to face the X-ray focus. However, since it is based on the Feldcamp algorithm, the obtained image is rotated by the tomography angle θ around the p-axis so as to be parallel to the sample rotation axis and converted into an image in the Dpq 'coordinate system (Fig. 2 reference).
At this time, along with the conversion of the geometrical arrangement, the intensity of the image is also converted according to the distance.
【００１５】２） 重み付き投影データ作成
投影データPβ（p,q）にρ(β)／（ρ(β)2＋ｐ2＋ｑ2)
1/2を掛けて、重み付き投影データを作成する。
３） 投影データのフィルタリング
フィルター関数ｈと重み付き投影データをｐ座標に関し
てフーリエ変換し、畳み込み演算を行う。
４） 逆投影
フィルター処理した重み付き投影データを、三次元再構
成空間に逆投影する。2) Creation of weighted projection data ρ (β) / (ρ (β) 2 + p 2 + q 2 ) in the projection data Pβ (p, q)
Multiply by 1/2 to create weighted projection data. 3) Filtering projection data The filter function h and the weighted projection data are Fourier-transformed with respect to the p-coordinate, and a convolution operation is performed. 4) Backprojecting the weighted projection data that has been subjected to the backprojection filtering, onto the three-dimensional reconstruction space.
【００１６】上記アルゴリズムの流れを示すフローチャ
ートを、図２に示す。A flow chart showing the flow of the above algorithm is shown in FIG.
【００１７】上述した傾斜三次元Ｘ線ＣＴ画像の再構成
方法では、トモグラフィ角度を任意に設定し、必要に応
じてトモグラフィ角度を小さく取れるようにしたので、
回転動作する測定物と干渉せずに、Ｘ線焦点を拡大した
い領域の近くに設定することができ、このため、Ｘ線透
視画像の幾何学的な拡大率が高い状態で、すべての方向
からデータ収集できるようになり、高倍率の画像再構成
が可能になる。更に、三次元再構成グリッドが測定サン
プルの座標系に等方的に配置されるので、高さ方向に対
しても、平面と同じ空間分解能を達成することができ
る。In the method of reconstructing a tilted three-dimensional X-ray CT image described above, the tomography angle is arbitrarily set, and the tomography angle can be made small as necessary.
The X-ray focus can be set close to the area to be magnified without interfering with the rotating object to be measured, so that the X-ray fluoroscopic image can be viewed from all directions with a high geometric magnification. Data can be collected, and high-magnification image reconstruction becomes possible. Furthermore, since the three-dimensional reconstruction grid is isotropically arranged in the coordinate system of the measurement sample, it is possible to achieve the same spatial resolution in the height direction as in the plane.
【００１８】また、上述した傾斜三次元Ｘ線ＣＴ画像の
再構成アルゴリズムは、計算の並列化による高速化と、
ショートスキャン（１８０°＋Ｘ線コーンビームの広が
り角の半分のデータ）で計測時間を短縮することができ
る。更に、従来のラミノグラフィのデータと三次元ＣＴ
のデータは別の物と考えられており、そのため、ラミノ
グラフィと三次元ＣＴの画像データは互換性がないもの
としてそれぞれ別個にデータ収集されてきたが、ラミノ
グラフィのデジタルデータを、二次元検出面の法線が測
定サンプルの回転軸に垂直になるように画像変換する
と、上記アルゴリズムにより三次元画像再構成が可能で
あり、したがって、蓄積されたラミノグラフィデータベ
ースを有効活用することができる。In addition, the above-mentioned reconstruction algorithm for the inclined three-dimensional X-ray CT image is speeded up by parallel calculation, and
The measurement time can be shortened by the short scan (180 ° + half the data of the spread angle of the X-ray cone beam). Furthermore, conventional laminography data and 3D CT
The data of laminography and 3D CT image data have been separately collected because they are not compatible with each other. When the image is converted so that the normal line is perpendicular to the rotation axis of the measurement sample, three-dimensional image reconstruction can be performed by the above algorithm, and thus the accumulated laminography database can be effectively used.
【００１９】次に、本発明に基づいて再構成した傾斜三
次元Ｘ線ＣＴ画像と、ラミノグラフィによる再構成画像
との比較を、図３を参照して説明する。同図（ａ）に
は、トモグラフィ角度が６５度の場合に収集された投影
データに対して本発明に係るアルゴリズムを適用し、三
次元画像を再構成した例を示している。この像は、十円
硬貨の表面の再構成画像で、通常の三次元Ｘ線ＣＴのよ
うに側面からのＸ線投影ではＸ線が全く透過しないの
で、画像再構成は困難であったが、本発明による斜めか
らのＸ線透過像をもとに画像再構成をすると、Ｘ線の透
過距離が約１／１０となり、そのため、２０〜３０ミク
ロンの凹凸がある表面の模様を精度よく再現できた。同
図（ｂ）は、同様のサンプルをラミノグラフィで撮影し
た画像であるが、高さ方向の分解能が低く、コントラス
トも低いので、細かな表面形状が識別しにくくなってい
る。Next, a comparison between a tilted three-dimensional X-ray CT image reconstructed according to the present invention and a reconstructed image by laminography will be described with reference to FIG. FIG. 10A shows an example in which the algorithm according to the present invention is applied to the projection data collected when the tomography angle is 65 degrees to reconstruct a three-dimensional image. This image is a reconstructed image of the surface of a ten-yen coin, and since X-rays do not penetrate at all by X-ray projection from the side like ordinary three-dimensional X-ray CT, image reconstruction was difficult, When the image is reconstructed based on the oblique X-ray transmission image according to the present invention, the X-ray transmission distance becomes about 1/10. Therefore, it is possible to accurately reproduce the surface pattern having irregularities of 20 to 30 microns. It was FIG. 2B is an image of a similar sample taken by laminography, but the resolution in the height direction is low and the contrast is low, so that it is difficult to identify fine surface shapes.
【００２０】[0020]
【発明の効果】以上に詳述した本発明の傾斜三次元Ｘ線
ＣＴ画像の再構成方法によれば、測定物の回転軸に対し
て任意の方向から収集した透過画像をもとにした三次元
画像再構成が可能となったので、平らな測定物の部分拡
大撮影が可能となり、ビームハードニングが大幅に低下
し、Ｘ線減衰の大きな部分が含まれる測定サンプルで
も、その一部を拡大して良好な画像を得ることができ
る。また、これまで用いられてきたラミノグラフィで
は、二次元面は良好に見えるが高さ方向の分解能が悪い
ので、全体像がつかみにくいのに対し、本発明によれ
ば、微細な構造を三次元的に可視化することができる。According to the method of reconstructing a tilted three-dimensional X-ray CT image of the present invention described in detail above, a cubic image based on a transmission image acquired from an arbitrary direction with respect to the rotation axis of the measurement object is used. Since the original image can be reconstructed, it is possible to take a partial magnified image of a flat measurement object, significantly reduce beam hardening, and magnify a part of the measurement sample containing a large X-ray attenuation. And a good image can be obtained. Further, in the laminography that has been used so far, the two-dimensional surface looks good, but the resolution in the height direction is poor, so that the whole image is difficult to grasp, while the present invention makes it possible to obtain a fine structure in three-dimensional form. Can be visualized.
【図１】本発明に係る傾斜三次元Ｘ線ＣＴ画像の再構成
アルゴリズムにおける座標系についての説明図である。FIG. 1 is an explanatory diagram of a coordinate system in a reconstruction algorithm of a tilted three-dimensional X-ray CT image according to the present invention.
【図２】本発明に基づいて傾斜三次元Ｘ線ＣＴ画像を再
構成する場合のアルゴリズムの流れを示すフローチャー
トである。FIG. 2 is a flowchart showing a flow of an algorithm when reconstructing a tilted three-dimensional X-ray CT image according to the present invention.
【図３】（ａ）は本発明に基づいて再構成した傾斜三次
元Ｘ線ＣＴ画像（図面代用写真）、（ｂ）はラミノグラ
フィによる再構成画像（図面代用写真）である。FIG. 3A is a tilted three-dimensional X-ray CT image reconstructed based on the present invention (drawing substitute photograph), and FIG. 3B is a reconstructed image by laminography (drawing substitute photograph).
【図４】通常の三次元Ｘ線ＣＴ画像の再構成アルゴリズ
ムにおける座標系についての説明図である。FIG. 4 is an explanatory diagram of a coordinate system in a normal three-dimensional X-ray CT image reconstruction algorithm.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 イオン ティセアヌ 茨城県つくば市東１−１−１ 独立行政法 人産業技術総合研究所つくばセンター内 (72)発明者 平嶋 龍介 神奈川県大和市下鶴間505−１ 株式会社 ユニハイトシステム内 (72)発明者 若林 直浩 神奈川県大和市下鶴間505−１ 株式会社 ユニハイトシステム内 (72)発明者 小泉 和人 神奈川県大和市下鶴間505−１ 株式会社 ユニハイトシステム内 Ｆターム(参考） 2G001 AA01 BA11 CA01 DA09 GA06 GA08 GA13 HA01 HA07 HA08 HA13 HA14 JA08 JA11 JA13 KA03 PA12 5B057 AA03 BA03 BA17 CA02 CA08 CA12 CA16 CB02 CB08 CB13 CB16 CD11 CD14 CE06 CE08 CG05 DA07 DA08 DB03 DB09 DC02 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Aeon Ticeane 1-1-1 Higashi 1-1-1 Tsukuba City, Ibaraki Prefecture Inside the Tsukuba center (72) Inventor Ryusuke Hirashima 505-1 Shimotsuruma, Yamato City, Kanagawa Prefecture Within Uniheight system (72) Inventor Naohiro Wakabayashi 505-1 Shimotsuruma, Yamato City, Kanagawa Prefecture Within Uniheight system (72) Inventor Kazuto Koizumi 505-1 Shimotsuruma, Yamato City, Kanagawa Prefecture Within Uniheight system F-term (reference) 2G001 AA01 BA11 CA01 DA09 GA06 GA08 GA13 HA01 HA07 HA08 HA13 HA14 JA08 JA11 JA13 KA03 PA12 5B057 AA03 BA03 BA17 CA02 CA08 CA12 CA16 CB02 CB08 CB13 CB16 CD11 CD14 CE06 CE08 CG05 DA07 DA08 DB03 DB09 DC02
Claims (3)
も小さい角度でＸ線を照射し、検出した画像データに基
づいて内部構造を三次元再構成する方法であって、 Ｘ線焦点と測定物の回転中心までの距離および検出面ま
での距離を、Ｘ線源の回転角の関数として表現し、得ら
れた画像を測定物の回転軸に平行となるようにトモグラ
フィ角度だけ回転させて、垂直面画像に変換し、このと
き、幾何学的な配置の変換と共に、画像の強度も距離に
応じて変換するステップ、 投影データに重み係数を掛けて重み付き投影データを作
成するステップ、 フィルター関数と重み付き投影データをフーリエ変換
し、畳み込み演算を行う投影データのフィルタリングの
ステップ、 フィルター処理した重み付き投影データを、三次元再構
成空間に逆投影するステップ、を有するアルゴリズムで
上記投影像を処理する、ことを特徴とする傾斜三次元Ｘ
線ＣＴ画像の再構成方法。1. A method for irradiating an X-ray at an angle smaller than 90 degrees with respect to a rotation axis direction of an object to be measured, and three-dimensionally reconstructing an internal structure based on the detected image data. The distance from the focus to the center of rotation of the object to be measured and the distance to the detection surface are expressed as a function of the rotation angle of the X-ray source, and only the tomography angle is used so that the obtained image is parallel to the axis of rotation of the object. Rotate and convert to a vertical plane image. At this time, along with the conversion of the geometrical arrangement, the step of converting the image intensity according to the distance, multiplying the projection data by a weighting factor to create weighted projection data Step, Fourier transform of the filter function and the weighted projection data to perform a convolution operation on the projection data filtering step, and a step of backprojecting the filtered weighted projection data onto the three-dimensional reconstruction space. A gradient three-dimensional X, characterized in that the projection image is processed with an algorithm having
Reconstruction method of line CT image.
次元検出面の法線が測定サンプルの回転軸に垂直になる
ように画像変換し、それを傾斜三次元Ｘ線ＣＴ画像デー
タとして使用する、ことを特徴とする請求項１に記載の
傾斜三次元Ｘ線ＣＴ画像の再構成方法。2. Digital laminography data is image-converted so that the normal line of its two-dimensional detection surface is perpendicular to the rotation axis of the measurement sample, and it is used as tilted three-dimensional X-ray CT image data. The method for reconstructing a tilted three-dimensional X-ray CT image according to claim 1, wherein.
て画像を再構成する、ことを特徴とする請求項１に記載
の傾斜三次元Ｘ線ＣＴ画像の再構成方法。3. The method for reconstructing a tilted three-dimensional X-ray CT image according to claim 1, wherein a part of a flat object having a large area is enlarged to reconstruct the image.
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