JP2003263119A - Rib-attached electrode and its manufacturing method - Google Patents
Rib-attached electrode and its manufacturing methodInfo
- Publication number
- JP2003263119A JP2003263119A JP2002061516A JP2002061516A JP2003263119A JP 2003263119 A JP2003263119 A JP 2003263119A JP 2002061516 A JP2002061516 A JP 2002061516A JP 2002061516 A JP2002061516 A JP 2002061516A JP 2003263119 A JP2003263119 A JP 2003263119A
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- Prior art keywords
- rib
- electrode
- bottom plate
- ribbed
- ribs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、プラズマデイスプ
レイパネル（ＰＤＰ）や、有機発光素子（ＥＬ）等のデ
ィスプレイ、あるいは、電気泳動、サーマルリライタブ
ル、エレクトロクロミー等の画像表示材料を利用した電
子ペーパーなどに利用されるリブ付き電極及びその製造
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display such as a plasma display panel (PDP) or an organic light emitting device (EL), or an electronic paper using an image display material such as electrophoresis, thermal rewritable or electrochromy. The present invention relates to a ribbed electrode and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】近年、画像表示媒体の大画面化に伴い、
薄型化、軽量化が重要になってきた。こういった背景か
ら液晶デイスプレイ（ＬＣＤ）やプラズマデイスプレイ
パネル（ＰＤＰ）がパーソナルコンピュータモニタや家
庭用テレビに使用されるようになってきた。2. Description of the Related Art In recent years, with the increase in screen size of image display media,
Thinning and weight reduction have become important. Against this background, liquid crystal displays (LCDs) and plasma display panels (PDPs) have come to be used in personal computer monitors and home televisions.
【０００３】これらはいずれも２枚以上の対向する基板
を有するが、高画質を得るためには基板間距離（セルギ
ャップ）を均一に保つことが必要である。このため、従
来より、電極とリブとが対として使用されることがあ
る。たとえば、プラズマデイスプレイパネル（ＰＤＰ）
では、駆動電圧を加えるために電極が使用され、また、
セルギャップを保つためにリブが使用される。更に、近
年開発が盛んな電子ペーパーにも、駆動方式に応じて、
同じ目的で電極とリブが使用されることがある。これら
はいずれも、フィルムまたはプレートの一方の面に電極
が設けられ、これと同じ面に必要に応じた形状のリブが
形成されたものが用いられている。Each of these has two or more opposed substrates, but it is necessary to keep the distance between the substrates (cell gap) uniform in order to obtain high image quality. Therefore, conventionally, the electrodes and the ribs may be used as a pair. For example, plasma display panel (PDP)
In, the electrodes are used to apply the drive voltage, and
Ribs are used to maintain the cell gap. Furthermore, even for electronic paper, which has been actively developed in recent years, depending on the drive system,
Electrodes and ribs may be used for the same purpose. In each of these, an electrode is provided on one surface of a film or a plate, and a rib having a shape according to need is formed on the same surface as the electrode.
【０００４】通常こうしたリブは、電極が設けられたフ
ィルムまたはプレート上にスクリーン印刷やフォトリソ
グラフィー、または、フォトリソグラフィーにサンドブ
ラストを合せた方法で成形されていた。これらの方法で
は、リブと電極を有する底板とは一体化されないため、
リブと電極を有する底板には界面が存在する。したがっ
て、リブを高く且つ幅狭にする（すなわち、リブの高さ
と５０％高さ位置幅の比率であるアスペクト比が大きく
なる）ほど、また電極の表面抵抗が小さくなるほど接着
は難しくなる。このため、長期使用時や高温高湿環境で
の使用時に、リブと電極の接着が維持できす、剥離して
しまうおそれがある。従って、リブの高さを一定限度未
満（たとえば５０μｍ未満）とするか、あるいは、リブ
の高さを上記一定限度以上にするときにはアスペクト比
をたとえば１未満とする必要があった。Usually, such ribs are formed on a film or plate provided with electrodes by screen printing, photolithography, or a method in which photolithography is combined with sandblasting. In these methods, since the rib and the bottom plate having the electrode are not integrated,
An interface exists on the bottom plate having the rib and the electrode. Therefore, as the ribs are made higher and narrower (that is, the aspect ratio, which is the ratio of the rib height to the 50% height position width, is larger), and the surface resistance of the electrode is smaller, the bonding becomes more difficult. Therefore, the adhesion between the ribs and the electrodes cannot be maintained or peeled off during long-term use or use in a high temperature and high humidity environment. Therefore, when the rib height is set to be less than a certain limit (for example, less than 50 μm), or when the rib height is set to be more than the above certain limit, it is necessary to set the aspect ratio to be less than 1, for example.
【０００５】ところが、このようにリブの高さやアスペ
クト比を制限すると、リブ壁と底板部が創り出す表面積
が小さくなってしまうため、例えばＰＤＰでは蛍光体塗
布量が少なく発光効率が悪くなる。また、電子ペーパー
では、画像形成材料の充填量が少なくなり、コントラス
トが低いなどの問題が生じる。However, if the rib height and aspect ratio are limited in this way, the surface area created by the rib wall and the bottom plate portion becomes small, so that, for example, in a PDP, the phosphor coating amount is small and the light emission efficiency is poor. Further, the electronic paper has a problem that the filling amount of the image forming material is small and the contrast is low.
【０００６】また、電極基板をハンドリングするために
は、強度の点からある程度の厚さが必要であり、このた
め電極はリブ側に形成されることが多いが、この場合、
電極の表面抵抗が低くするためには、電極の厚みを増す
必要がある。このため、段差の影響でリブとの接着性は
低下してしまう。また、特にスクリーン印刷によってリ
ブを成形する方法では、粘性のインクを基板上に乗せる
ため、成形時にリブのだれや崩れが起りやすく成形精度
が悪いという問題もあった。更には、リブと電極を別途
製造するため、製造効率が悪く、リブと電極の位置の再
現性（位置合わせの精度）が悪く、製造コストが高いと
いうことも課題であった。特にフォトリソグラフィー、
サンドブラストでは、高価なレジストを基板前面に塗布
した後、リブ以外の部分を除去するため、製造コストが
極めて高くなることがある。Further, in order to handle the electrode substrate, it is necessary to have a certain thickness from the viewpoint of strength. Therefore, the electrodes are often formed on the rib side, but in this case,
In order to reduce the surface resistance of the electrode, it is necessary to increase the thickness of the electrode. For this reason, the adhesiveness with the rib is lowered due to the influence of the step. Further, in particular, in the method of forming ribs by screen printing, since viscous ink is placed on the substrate, there is a problem that the ribs are likely to sag or collapse during molding, resulting in poor molding accuracy. Further, since the rib and the electrode are separately manufactured, the manufacturing efficiency is poor, the reproducibility of the position of the rib and the electrode (positioning accuracy) is poor, and the manufacturing cost is high. Especially photolithography,
In sandblasting, since an expensive resist is applied to the front surface of the substrate and then portions other than the ribs are removed, the manufacturing cost may be extremely high.
【０００７】[0007]
【発明が解決しようとする課題】本発明は、上記事実を
考慮し、環境変動時や長期使用時にリブの剥離が無く信
頼性の高いリブ付き電極、および、製造効率が高く、リ
ブと電極の位置の再現性が高く、製造コストの安いリブ
付き電極の製造方法を提供することを課題とする。SUMMARY OF THE INVENTION In consideration of the above facts, the present invention has a highly reliable ribbed electrode which is free from rib separation during environmental changes or long-term use, and has a high manufacturing efficiency and a rib and electrode An object of the present invention is to provide a manufacturing method of a ribbed electrode having high position reproducibility and low manufacturing cost.
【０００８】[0008]
【課題を解決するための手段】上記課題を解決するた
め、請求項１に記載の発明では、底板部と、この底板部
から突出すると共に底板部と一体的に形成されたリブ
と、を有するシートと、前記シートの少なくとも一面に
配置され、表面抵抗が１×１０9Ω以下の電極と、を有
するリブ付き電極であって、前記リブが、底板部法線方
向の断面において、前記底板部からの平均高さが５０μ
ｍ以上、高さ５０％の位置での幅ｄと高さｃとの比率
（ｃ／ｄ）が１以上とされていることを特徴とする。In order to solve the above problems, the invention according to claim 1 has a bottom plate portion and a rib projecting from the bottom plate portion and integrally formed with the bottom plate portion. An electrode with a rib, comprising: a sheet; and an electrode having a surface resistance of 1 × 10 9 Ω or less, the electrode being disposed on at least one surface of the sheet, wherein the rib has a cross section in a direction normal to the bottom plate portion. Average height from 50μ
The ratio (c / d) of the width d and the height c at a position of m or more and a height of 50% is 1 or more.
【０００９】すなわち、このリブ付き電極では、底板部
とリブとを一体化してシートを構成し、このシートの少
なくとも一面に電極を配置している。電極の表面抵抗は
１×１０9Ω以下とされているが、このように電極の表
面抵抗を小さくしても、リブが底板部から剥離すること
を防止できる。電極の表面抵抗を１×１０9Ω以下とす
ることで、電極の厚さや幅の制限が少なくなるので、電
極のパターンの自由度が高くなる。That is, in this ribbed electrode, the bottom plate portion and the rib are integrated to form a sheet, and the electrode is arranged on at least one surface of the sheet. Although the surface resistance of the electrode is set to 1 × 10 9 Ω or less, even if the surface resistance of the electrode is reduced as described above, the rib can be prevented from peeling from the bottom plate portion. By setting the surface resistance of the electrode to 1 × 10 9 Ω or less, the thickness and width of the electrode are less restricted, and the degree of freedom of the electrode pattern is increased.
【００１０】また、このリブ付き電極のリブは、底板部
法線方向の断面において、底板部からの平均高さが５０
μｍ以上、高さ５０％の位置での幅ｄと高さｃとの比率
（ｃ／ｄ）が１以上とされている。これにより、リブが
存在している部分（リブ部）とリブが存在していない部
分（リブ不在部）との体積比の自由度が高くなるので、
リブ付き電極の用途が広くなる。しかも、リブをこのよ
うな形状としても本発明ではリブが底板部と一体化され
ているので、リブの不用意な剥離を防止できる。The ribs of the ribbed electrode have an average height from the bottom plate portion of 50 in the cross section in the direction normal to the bottom plate portion.
The ratio (c / d) of the width d and the height c at the position of μm or more and the height of 50% is 1 or more. As a result, the degree of freedom of the volume ratio between the portion where the rib is present (rib portion) and the portion where the rib is not present (rib absent portion) is increased,
The application of the ribbed electrode becomes wider. Moreover, even if the rib has such a shape, in the present invention, since the rib is integrated with the bottom plate portion, it is possible to prevent the rib from being unintentionally peeled off.
【００１１】なお、電極の表面抵抗の下限値には特に制
限はなく、この値が小さいほうが、より効率的に電流を
流すことができるが、実際上は、電極を構成している材
料によって、表面抵抗の下限値が決まる。The lower limit value of the surface resistance of the electrode is not particularly limited. The smaller the value, the more efficiently the current can flow. However, in reality, depending on the material forming the electrode, The lower limit of surface resistance is determined.
【００１２】また、上記の比率（ｃ／ｄ）についても、
この上限値に特に制限はなく、このリブ付き電極の用途
などに応じて、最適な値とすることができる。Regarding the above ratio (c / d),
The upper limit value is not particularly limited, and can be set to an optimum value depending on the application of the ribbed electrode.
【００１３】請求項２に記載の発明では、請求項１に記
載の発明において、前記リブが、底板部法線方向にみた
ときにストライプ状又は格子状となるように形成されて
いることを特徴とする。According to a second aspect of the present invention, in the first aspect of the invention, the ribs are formed so as to have a stripe shape or a lattice shape when viewed in a direction normal to the bottom plate portion. And
【００１４】これにより、リブで囲んだ空間を形成で
き、リブ不在部とリブ部の体積比を大きくできるため、
リブ側にさらにフィルムやプレートを取り付けて使用す
る用途には効果が高い。As a result, a space surrounded by the ribs can be formed, and the volume ratio between the rib-absent portion and the rib portion can be increased,
It is highly effective for applications where a film or plate is attached to the rib side.
【００１５】請求項３に記載の発明では、請求項１又は
請求項２に記載の発明において、前記リブが、底板部法
線方向の断面において、前記底板部から高さ９０％の位
置での幅ａとリブの底部の幅ｂとの比率（ａ／ｂ）が
０．８以下とされていることを特徴とする。According to a third aspect of the present invention, in the first or second aspect of the present invention, the rib is at a position 90% in height from the bottom plate portion in a cross section in the direction normal to the bottom plate portion. The ratio (a / b) between the width a and the width b of the bottom of the rib is 0.8 or less.
【００１６】これにより、底板部から高さ９０％の位置
での幅ａ、すなわち、リブ先端（頂部）近傍での幅と比
較して、リブの底部の幅ｂが相対的に広くなるので、リ
ブの強度が高くなる。また、シートを法線方向にみたと
きに、リブの側面とリブの先端面が占める面積を比較す
ると、リブの先端面が占める面積が狭くなる。これによ
り、実質的に画像表示に寄与しない領域の面積を狭くす
ることが可能になる。As a result, the width b at the bottom of the rib becomes relatively wider than the width a at a position 90% in height from the bottom plate, that is, the width near the tip (top) of the rib. The rib strength is increased. Further, when the sheet is viewed in the normal direction, comparing the area occupied by the side surface of the rib and the tip surface of the rib, the area occupied by the tip surface of the rib becomes smaller. This makes it possible to reduce the area of the region that does not substantially contribute to image display.
【００１７】なお、この比率（ａ／ｂ）の下限値は特に
制限がなく、リブ付き電極の用途などに応じて、最適な
値とすることができる。The lower limit of this ratio (a / b) is not particularly limited and can be set to an optimum value depending on the application of the ribbed electrode.
【００１８】請求項４に記載の発明では、請求項３に記
載の発明において、前記リブの長手方向と直交する断面
において、リブの底部の平均幅が５μｍ以上５００μｍ
以下であり、隣り合うリブ間の平均間隔が２０μｍ以上
５００００μｍ以下であり、リブの平均高さが５０μｍ
以上１０００μｍ以下であることを特徴とする。According to a fourth aspect of the invention, in the invention of the third aspect, the average width of the bottom of the rib is 5 μm or more and 500 μm in a cross section orthogonal to the longitudinal direction of the rib.
The average distance between adjacent ribs is 20 μm or more and 50000 μm or less, and the average height of the ribs is 50 μm.
It is characterized in that it is 1000 μm or less.
【００１９】リブの形状をこのようにすることで、リブ
付き電極は製造適性に優れ、且つ、シート上に適度な間
隔でリブが存在するために、シート単体での機械的強度
が高くなり、リブ付き電極としての機械的強度も高くな
る。By making the shape of the ribs like this, the ribbed electrode has excellent manufacturability, and since the ribs are present at appropriate intervals on the sheet, the mechanical strength of the sheet alone becomes high, The mechanical strength of the ribbed electrode is also increased.
【００２０】請求項５に記載の発明では、請求項１〜請
求項４のいずれかに記載の発明において、全光線透過率
が６０％以上であることを特徴とする。The invention according to claim 5 is characterized in that, in the invention according to any one of claims 1 to 4, the total light transmittance is 60% or more.
【００２１】このように全光線透過率を６０％以上とす
ることで、リブ付き電極を透過する光線により、リブ付
き電極の背面（観察者と反対側の面）をリブ付き電極を
通して観察することが可能になる。また、リブの先端面
を不可視化する（あるいは目立たなくする）ことも可能
になる。By thus setting the total light transmittance to 60% or more, the back surface of the ribbed electrode (the surface on the side opposite to the observer) can be observed through the ribbed electrode by the light rays passing through the ribbed electrode. Will be possible. Further, it becomes possible to make the tip end surface of the rib invisible (or make it inconspicuous).
【００２２】請求項６に記載の発明では、請求項１〜請
求項５のいずれかに記載の発明において、前記底板部の
平均厚さが５μｍ以上３０００μｍ以下であることを特
徴とする。According to a sixth aspect of the invention, in the invention according to any one of the first to fifth aspects, the average thickness of the bottom plate portion is 5 μm or more and 3000 μm or less.
【００２３】これにより、リブ付き電極のハンドリング
を良好に維持できる。This makes it possible to maintain good handling of the ribbed electrode.
【００２４】請求項７に記載の発明では、請求項１〜請
求項６のいずれかに記載の発明において、前記電極が、
底板部法線方向にみたときにストライプ状に形成され、
且つ、電極長手方向と直交する断面において、平均幅が
１０μｍ以上１００００μｍ以下、隣り合う電極間の平
均間隔が１０μｍ以上１００００μｍ以下であることを
特徴とする。According to a seventh aspect of the invention, in the invention according to any one of the first to sixth aspects, the electrode is
When viewed in the normal direction of the bottom plate part, it is formed in a stripe shape,
In addition, in a cross section orthogonal to the longitudinal direction of the electrodes, the average width is 10 μm or more and 10000 μm or less, and the average interval between adjacent electrodes is 10 μm or more and 10000 μm or less.
【００２５】このような電極の形状とすることで、たと
えば、リブ不在部に対応して所望の電極パターンを構成
できるので、アドレスごとの情報を表示するような画像
表示媒体に、このリブ付き電極を好適に使用できる。With such an electrode shape, for example, a desired electrode pattern can be formed corresponding to the rib-absent portion. Therefore, the ribbed electrode can be formed on an image display medium for displaying information for each address. Can be preferably used.
【００２６】請求項８に記載の発明では、請求項１〜請
求項７のいずれかに記載のリブ付き電極の製造方法であ
って、射出成形、射出圧縮成形、エンボス成形、熱プレ
ス成形のいずれかの方法で前記リブと前記底板部とが一
体となった前記シートを成形し、その後、蒸着、スパッ
タリング、塗布、印刷のいずれかの方法で前記電極を付
与することを特徴とする。According to an eighth aspect of the present invention, there is provided a method for producing a ribbed electrode according to any one of the first to seventh aspects, which is one of injection molding, injection compression molding, embossing molding and hot press molding. It is characterized in that the sheet in which the ribs and the bottom plate portion are integrated is formed by any of these methods, and then the electrode is applied by any of vapor deposition, sputtering, coating, or printing.
【００２７】請求項８に記載のリブ付き電極の製造方法
によって請求項１〜請求項７のいずれかに記載のリブ付
き電極を製造すると、従来のように電極付きの基板にリ
ブを接着する必要がないので、製造効率が高くなる。When the ribbed electrode according to any one of claims 1 to 7 is manufactured by the ribbed electrode manufacturing method according to claim 8, it is necessary to bond the rib to a substrate with an electrode as in the conventional case. Therefore, the manufacturing efficiency is high.
【００２８】しかも、このリブ付き電極の製造方法で
は、製造初期段階で位置合わせをしておくことも可能で
ある。これにより、リブと電極とを正確に位置合わせで
きるともに、製造コストを低くすることが可能になる。Moreover, in the method of manufacturing the ribbed electrode, it is possible to perform the alignment at the initial stage of manufacturing. As a result, the rib and the electrode can be accurately aligned, and the manufacturing cost can be reduced.
【００２９】請求項９に記載の発明では、請求項１〜請
求項７のいずれかに記載のリブ付き電極の製造方法であ
って、前記リブが未形成のフィルム又はプレートに、蒸
着、スパッタリング、塗布、印刷のいずれかの方法で前
記電極を付与し、その後、エンボス成形、熱プレス成形
のいずれかの方法で前記リブを形成することを特徴とす
る。According to a ninth aspect of the present invention, there is provided the method for producing a ribbed electrode according to any one of the first to seventh aspects, wherein the film or plate on which the ribs are not formed is vapor-deposited, sputtered, It is characterized in that the electrode is applied by any method of coating or printing, and then the rib is formed by any method of emboss molding or hot press molding.
【００３０】請求項９に記載のリブ付き電極の製造方法
によって請求項１〜請求項７のいずれかに記載のリブ付
き電極を製造すると、従来のように電極付きの基板にリ
ブを接着する必要がないので、製造効率が高くなる。When the ribbed electrode according to any one of claims 1 to 7 is manufactured by the ribbed electrode manufacturing method according to claim 9, it is necessary to bond the rib to a substrate with an electrode as in the conventional case. Therefore, the manufacturing efficiency is high.
【００３１】しかも、このリブ付き電極の製造方法で
は、製造初期段階で位置合わせをしておくことも可能で
ある。これにより、リブと電極とを正確に位置合わせで
きるともに、製造コストを低くすることが可能になる。Moreover, in the method of manufacturing the ribbed electrode, it is possible to perform the alignment at the initial stage of manufacturing. As a result, the rib and the electrode can be accurately aligned, and the manufacturing cost can be reduced.
【００３２】加えて、電極付与後にリブを形成するの
で、製造途中でのリブの破損を防止できる。In addition, since the rib is formed after applying the electrode, the rib can be prevented from being damaged during the manufacturing process.
【００３３】[0033]
【発明の実施の形態】図１には、本発明の一実施形態の
リブ付き電極１２が示されている。このリブ付き電極１
２は、図１（Ａ）に示すように、平板状に形成された底
板部１４と、この底板部１４から突出するリブ１６と、
が一体化されて構成されたシート１８を有している。シ
ート１８には、その少なくとも一面に、所望のパターン
の電極２０が付与されている。そして、シート１８と電
極２０とで、本発明のリブ付き電極１２が構成されてい
る。本発明のリブ付き電極１２では、後に詳述するよう
に、リブ１６の底部１６Ｂ（底板部１４との付け根部
分）から頂部１６Ｔ（先端）までの高さｃの平均（平均
高さ）が５０μｍ以上で、そのアスペクト比が１以上と
され、さらに、電極２０の表面抵抗が１×１０9Ω以下
とされている。1 shows a ribbed electrode 12 according to an embodiment of the present invention. This ribbed electrode 1
As shown in FIG. 1A, reference numeral 2 denotes a bottom plate portion 14 formed in a flat plate shape, and a rib 16 protruding from the bottom plate portion 14,
Has a sheet 18 that is integrally configured. At least one surface of the sheet 18 is provided with an electrode 20 having a desired pattern. The sheet 18 and the electrode 20 constitute the ribbed electrode 12 of the present invention. In the ribbed electrode 12 of the present invention, as will be described in detail later, the average (average height) of the heights c from the bottom portion 16B (root portion with the bottom plate portion 14) of the rib 16 to the top portion 16T (tip) is 50 μm. As described above, the aspect ratio is 1 or more, and the surface resistance of the electrode 20 is 1 × 10 9 Ω or less.
【００３４】なお、本発明のリブ付き電極１２におい
て、各部材の形状や物性の「平均」として値を示してい
る場合には、対象となっている箇所の任意の１０点を測
定して得た値の平均をいう。In addition, in the ribbed electrode 12 of the present invention, when the value is shown as the "average" of the shape and physical properties of each member, it is obtained by measuring arbitrary 10 points of the target site. It means the average of the values.
【００３５】リブ付き電極１２は、たとえば、液晶デイ
スプレイ（ＬＣＤ）やプラズマデイスプレイパネル（Ｐ
ＤＰ）、有機発光素子（ＥＬ）等のディスプレイ、電気
泳動、サーマルリライタブル、エレクトロクロミー等の
画像表示材料を利用した電子ペーパーなどの画像表示媒
体において、２枚の対向する基板の間に配置される。こ
の状態で、リブ１６は、基板間距離（セルギャップ）を
一定に維持するように作用する。そして、基板とリブ１
６及び底板部１４との間に封入された蛍光物質や画像表
示材料が、電極間の電位差などにより発光や移動などの
所定の挙動を行い、画像を表示する。なお、リブ１６
は、画像表示媒体の種類によっては、基板間の空隙を所
望の範囲に仕切る機能も併せ持っている。The ribbed electrode 12 is, for example, a liquid crystal display (LCD) or a plasma display panel (P).
DP), an organic light emitting device (EL) display, an image display medium such as electronic paper using an image display material such as electrophoretic, thermal rewritable, electrochromy, and the like, which are arranged between two opposing substrates. It In this state, the rib 16 acts to keep the distance between the substrates (cell gap) constant. And the substrate and rib 1
The fluorescent substance and the image display material enclosed between 6 and the bottom plate portion 14 perform a predetermined behavior such as light emission and movement due to the potential difference between the electrodes and display an image. The rib 16
Also has a function of partitioning the gap between the substrates into a desired range depending on the type of image display medium.
【００３６】図１（Ｂ）から分かるように、本実施形態
のリブ付き電極１２のリブ１６は、底板部１４の法線方
向に見たとき、一定間隔でストライプ状になるように、
複数形成されている。また、図１（Ａ）から分かるよう
に、リブ１６を、その長手方向と直交する断面（底板部
１４の法線方向の断面）又は端面で見たとき、底板部１
４から離間するにしたがって次第に先細りとなるよう
に、台形状に形成されている。As can be seen from FIG. 1 (B), the ribs 16 of the ribbed electrode 12 of this embodiment are arranged in stripes at regular intervals when viewed in the normal direction of the bottom plate portion 14.
A plurality is formed. Further, as can be seen from FIG. 1 (A), when the rib 16 is viewed in a cross section (a cross section in the normal direction of the bottom plate portion 14) orthogonal to its longitudinal direction or an end face, the bottom plate portion 1
It is formed in a trapezoidal shape so that it becomes gradually tapered as it is separated from 4.
【００３７】本発明のリブ付き電極１２のリブ１６は、
底部１６Ｂ（底板部１４との付け根部分）から頂部１６
Ｔ（先端）までの高さｃの平均（平均高さ）が５０μｍ
以上とされている。さらに、リブ１６は、そのアスペク
ト比が１以上とされている。このアスペクト比とは、リ
ブ１６の高さｃの５０％の位置での幅ｄと高さｃとの比
率（ｃ／ｄ）をいう。したがって、アスペクト比が大き
くなるほど、リブ１６はその高さｃに対し幅狭となる。
一般に画像表示媒体において、２枚の基板の間にリブを
配置して基板間距離を一定に保つ構成では、基板間にお
いてリブが存在している領域（リブ部）とリブが存在し
ていない領域（リブ不在部）との体積比を自由にコント
ロールできる程、画像表示媒体としての用途は広がる。
本発明では、リブ１６の平均高さを５０μｍ以上、アス
ペクト比を１以上のリブ１６を形成することで、この体
積比の自由度を高くしている。The rib 16 of the ribbed electrode 12 of the present invention is
From the bottom portion 16B (the base portion with the bottom plate portion 14) to the top portion 16
Average height c to T (tip) (average height) is 50 μm
That is all. Further, the rib 16 has an aspect ratio of 1 or more. The aspect ratio means a ratio (c / d) of the width d and the height c at a position of 50% of the height c of the rib 16. Therefore, the larger the aspect ratio, the narrower the rib 16 is with respect to its height c.
Generally, in an image display medium, in a configuration in which ribs are arranged between two substrates to keep the distance between the substrates constant, a region where the ribs exist (a rib portion) and a region where the ribs do not exist between the substrates. The more freely controllable the volume ratio to the (rib-free portion), the wider the application as an image display medium.
In the present invention, the degree of freedom of the volume ratio is increased by forming the rib 16 having an average height of 50 μm or more and an aspect ratio of 1 or more.
【００３８】なお、上記したように、アスペクト比を１
以上とすることで、本実施形態のリブ付き電極１２で
は、アスペクト比が１未満のリブを有するものと比較し
て、リブ１６が相対的に幅狭となっているが、リブ１６
は底板部１４と一体化されているので、不用意に剥離す
ることはない。また、従来のように、電極を有する底板
とリブとの間に界面が存在している構造ではリブが剥離
する可能性が高いが、本実施形態のリブ付き電極１２で
はこのような界面が存在しないので、電極の表面抵抗が
低い場合でも（換言すれば、電極の表面抵抗に関係な
く）、リブ１６の剥離を確実に防止できる。As described above, the aspect ratio is 1
As described above, in the ribbed electrode 12 of the present embodiment, the rib 16 is relatively narrower than the rib 16 having the aspect ratio of less than 1.
Since is integrated with the bottom plate portion 14, it does not peel off accidentally. Further, as in the conventional structure, there is a high possibility that the rib will peel off in a structure in which an interface exists between the bottom plate having the electrode and the rib, but in the ribbed electrode 12 of the present embodiment, such an interface exists. Therefore, even if the surface resistance of the electrode is low (in other words, regardless of the surface resistance of the electrode), peeling of the rib 16 can be reliably prevented.
【００３９】そして、本発明のリブ付き電極１２では、
電極２０の表面抵抗を１×１０9Ω以下としている。こ
のように、電極２０を表面抵抗を一定値以下に制限する
ことで、電極２０の厚さや幅の制限が少なくなるので、
たとえば電極２０を細線化することが可能になり、電極
パターンの自由度が高くなる。また、エネルギー効率も
高くなる。Then, in the ribbed electrode 12 of the present invention,
The surface resistance of the electrode 20 is 1 × 10 9 Ω or less. Thus, by limiting the surface resistance of the electrode 20 to a certain value or less, the thickness and width of the electrode 20 are less limited,
For example, it is possible to make the electrode 20 thinner, and the degree of freedom of the electrode pattern is increased. Also, the energy efficiency is high.
【００４０】本発明では、上記の条件を満たしている限
り、リブ１６の具体的形状は特に限定されない。しか
し、リブ１６の底部の幅ｂの平均（平均幅）が５μｍ以
上５００μｍ以下であり、隣り合うリブ１６の間のギャ
ップｆの平均が２０μｍ以上５００００μｍ以下であ
り、リブ１６の高さｃの平均が５０μｍ以上１０００μ
ｍ以下である時、製造適性に優れ、且つ、リブ付き電極
１２としての機械強度が高くなるので、好ましい。In the present invention, the specific shape of the rib 16 is not particularly limited as long as the above conditions are satisfied. However, the average (average width) of the width b of the bottom of the rib 16 is 5 μm or more and 500 μm or less, the average of the gap f between the adjacent ribs 16 is 20 μm or more and 50000 μm or less, and the average of the height c of the rib 16 is Is 50 μm or more and 1000 μ
When it is m or less, the manufacturing suitability is excellent and the mechanical strength of the ribbed electrode 12 becomes high, which is preferable.
【００４１】また、図１（Ａ）に示すように、底板部１
４から高さ９０％の位置でのリブ１６の幅ａと、リブ１
６の底部の幅bとの比率（ａ／ｂ）を０．８以下とする
と、リブ１６は、その頂部１６Ｔ近傍と比較して底部１
６Ｂが相対的に幅広となるので、上下方向の任意の高さ
において頂部１６Ｔと同幅となっているリブ（実質的に
断面長方形状のリブ）よりも、リブ１６の機械的強度が
高くなる。さらに、底板部１４の法線方向に見たとき、
リブ１６の頂部１６Ｔ（先端）の占める面積が小さくな
るので、例えばデイスプレイなどの用途にリブ付き電極
１２を使用する際には、いわゆる開口率が大きくなり好
ましい。Further, as shown in FIG. 1 (A), the bottom plate portion 1
The width a of the rib 16 at a position where the height is 90% from 4 and the rib 1
When the ratio (a / b) of the bottom portion 6 to the width b of the bottom portion is 0.8 or less, the rib 16 has a bottom portion 1 in comparison with the vicinity of the top portion 16T.
Since 6B is relatively wide, the mechanical strength of the rib 16 is higher than that of a rib (rib having a substantially rectangular cross section) having the same width as the top portion 16T at an arbitrary height in the vertical direction. . Furthermore, when viewed in the normal direction of the bottom plate portion 14,
Since the area occupied by the top portions 16T (tips) of the ribs 16 is small, the so-called aperture ratio is large when the ribbed electrode 12 is used for applications such as a display, which is preferable.
【００４２】リブ１６の断面形状としては、上記した条
件を満たしていれば、台形状に限られない。たとえば、
図２〜図４に示すものを挙げることができる。The cross-sectional shape of the rib 16 is not limited to the trapezoidal shape as long as the above conditions are satisfied. For example,
The thing shown in FIGS. 2-4 can be mentioned.
【００４３】図２に示すリブ２２では、底部１６Ｂから
頂部１６Ｔに向かって中間までは一定幅で、中間から頂
部までは略三角形状（台形状でもよい）で先細りに形成
されている。In the rib 22 shown in FIG. 2, the width from the bottom portion 16B to the top portion 16T is constant from the middle portion to the middle portion, and the rib from the middle portion to the top portion is formed in a substantially triangular shape (may be trapezoidal) and is tapered.
【００４４】図３に示すリブ３２では、底部１６Ｂから
頂部１６Ｔに向かって先細り形状とされ、さらい側面が
外側に向かって凸になるように湾曲しており、いわゆる
釣鐘状に形成されている。The rib 32 shown in FIG. 3 has a tapered shape from the bottom portion 16B to the top portion 16T, and the side surface of the rib is curved so as to be convex outward, and is formed in a so-called bell shape.
【００４５】図４に示すリブ４２では、略台形状に形成
されている点は図１（Ａ）に示すものと外形は略同様で
あるが、リブ４２の内側を底板部１４側からくりぬいた
ようにし、リブ４２がトンネル状になっている。このリ
ブ４２では、くりぬいた部分（リブ４２の内側４２Ｎ）
にも、蛍光物質や画像表示材料を封入することができ
る。The rib 42 shown in FIG. 4 has substantially the same outer shape as that shown in FIG. 1A in that it is formed in a substantially trapezoidal shape, but the inside of the rib 42 is hollowed out from the bottom plate portion 14 side. Thus, the rib 42 has a tunnel shape. In this rib 42, a hollowed portion (42N inside the rib 42)
Also, a fluorescent substance or an image display material can be enclosed.
【００４６】本発明のリブ付き電極１２において、底板
部１４の厚さｅも特に限定されない。特に、本発明のリ
ブ付き電極１２では底板部１４とリブ１６とを一体化し
ているので、底板部１４が薄い場合であっても強度を維
持できるが、ハンドリングの低下を防止する観点から
は、底板部１４の平均厚さを５μｍ以上、好ましくは１
０μｍ以上とすれば、ハンドリングを良好に維持でき
る。但し、あまりに厚くすると、使用する材料にもよる
が、重量が重くなることでハンドリングができなくなっ
たり、底板部１４の成形精度が悪くなるなどの不都合が
生じる場合がある。このような不都合を防止する観点か
らは、底板部１４の平均厚さを３０００μｍ以下、好ま
しくは５００μｍ以上とすればよい。In the ribbed electrode 12 of the present invention, the thickness e of the bottom plate portion 14 is not particularly limited. Particularly, in the ribbed electrode 12 of the present invention, since the bottom plate portion 14 and the rib 16 are integrated, the strength can be maintained even when the bottom plate portion 14 is thin, but from the viewpoint of preventing a decrease in handling, The average thickness of the bottom plate 14 is 5 μm or more, preferably 1
If it is 0 μm or more, good handling can be maintained. However, if the thickness is too thick, depending on the material to be used, the weight may become heavy, which may cause inconveniences such as impossibility of handling and deterioration of molding accuracy of the bottom plate portion 14. From the viewpoint of preventing such an inconvenience, the average thickness of the bottom plate portion 14 may be 3000 μm or less, preferably 500 μm or more.
【００４７】本発明のリブ付き電極１２の光透過率も特
に限定されないが、全光線透過率を６０％以上なるよう
に構成すると、例えばリブ付き電極１２を透過した光に
よって背面側を視認することが可能になる。このよう
に、透過光によってリブ付き電極１２の背面を視認する
用途としては、例えば、光学式タッチパネルを挙げるこ
とができる。また、リブ１６と底板部１４とで囲まれた
空間（リブ不在部）に、蛍光物質や画像表示材料など材
料を入れた場合に、リブ１６の頂部１６Ｔ先端が不可視
化するため好ましい。このような用途としては例えばＰ
ＤＰ、電子ペーパーなどが挙げられる。特に、図４に示
す形状のリブ４２において、リブ４２の内側４２Ｎにも
蛍光物質や画像表示材料を封入した場合には、リブ４２
の光透過率を高くし、リブ４２内の視認性を高めること
が好ましい。The light transmittance of the ribbed electrode 12 of the present invention is not particularly limited, but if the total light transmittance is 60% or more, the back side can be visually recognized by the light transmitted through the ribbed electrode 12, for example. Will be possible. As an application of visually recognizing the back surface of the ribbed electrode 12 by the transmitted light, an optical touch panel can be given, for example. In addition, when a material such as a fluorescent substance or an image display material is put in the space surrounded by the rib 16 and the bottom plate portion 14 (rib absent portion), the tip of the top portion 16T of the rib 16 becomes invisible, which is preferable. An example of such an application is P
Examples include DP and electronic paper. Particularly, in the rib 42 having the shape shown in FIG. 4, when the fluorescent substance or the image display material is enclosed also in the inner side 42N of the rib 42, the rib 42
It is preferable to increase the light transmittance of the above and increase the visibility within the rib 42.
【００４８】本発明のリブ付き電極１２において、リブ
１６を底板部１４の法線方向に見たときの形状は、この
リブ付き電極１２が用いられる画像表示媒体の用途など
に応じて自由にすることができ、特に限定されるもので
はない。中でも、図１（Ｂ）に示したように、リブ１６
が一定間隔のストライプ状となるように成形されている
と、リブ１６で囲んだ空間を形成でき、リブ不在部とリ
ブ部の体積比を大きくできるため、リブ１６側にさらに
フィルムやプレートを取り付けて使用する場合に、用途
の自由度が高くなる。同様の観点からは、図５（Ａ）〜
（Ｃ）に示すように、リブ１６を格子状、菱形状、ハミ
カム状（六角形状）などに形成することができる。特
に、格子状或いはハニカム状にリブ１６を形成すると、
リブ１６の機械的強度がより高くなる。これに対し、リ
ブ１６をストライプ状に形成すると、リブ不在部とリブ
部の体積比をより大きく設定できる。なお、リブ１６を
格子状、菱形状、ハミカム状などの形状とした場合、リ
ブ１６によって取り囲まれた領域の各辺の長さは、必ず
しも等しくされている必要はない。たとえば、格子状に
リブ１６を形成した場合において、リブ１６によって囲
まれる領域は正方形であっても長方形であってもよい。In the ribbed electrode 12 of the present invention, the shape of the rib 16 when viewed in the normal direction of the bottom plate portion 14 can be freely set according to the use of the image display medium in which the ribbed electrode 12 is used. It is possible and is not particularly limited. Above all, as shown in FIG.
Is formed into a stripe shape with a constant interval, a space surrounded by the ribs 16 can be formed, and the volume ratio of the rib-absent portions to the rib portions can be increased. When used as a product, the degree of freedom of use is increased. From the same viewpoint, FIG.
As shown in (C), the rib 16 can be formed in a lattice shape, a rhombus shape, a Hamicam shape (hexagonal shape), or the like. Particularly, when the ribs 16 are formed in a lattice shape or a honeycomb shape,
The mechanical strength of the rib 16 becomes higher. On the other hand, when the rib 16 is formed in a stripe shape, the volume ratio of the rib absent portion to the rib portion can be set larger. When the rib 16 has a lattice shape, a rhombus shape, a Hamicam shape, or the like, the lengths of the sides of the region surrounded by the rib 16 do not necessarily have to be equal. For example, when the ribs 16 are formed in a lattice shape, the region surrounded by the ribs 16 may be square or rectangular.
【００４９】さらに、図６（Ａ）及び（Ｂ）に示すよう
に、リブ１６を略角錐（あるいは略円錐でもよい）形状
とし、これを底板部１４上にて点在するように配置した
ものであってもよい。このように、リブ１６を点在させ
ると、リブ不在部とリブ部の体積比をさらに大きく設定
することが可能になる。この構成において、リブ１６の
点在パターンは、リブ付き電極１２の用途やリブ部とリ
ブ不在部との体積比、リブ１６に求められる機械的強度
などを考慮して、適切な点在パターンとすることができ
る。Further, as shown in FIGS. 6A and 6B, the ribs 16 are formed into a substantially pyramid shape (or may be a substantially conical shape) and are arranged so as to be scattered on the bottom plate portion 14. May be In this way, if the ribs 16 are scattered, it is possible to set the volume ratio between the rib-absent portion and the rib portion to a larger value. In this configuration, the interspersed pattern of the ribs 16 is an appropriate interspersed pattern in consideration of the use of the ribbed electrode 12, the volume ratio between the rib portion and the rib absent portion, the mechanical strength required for the rib 16, and the like. can do.
【００５０】図５及び図６に示したリブの各種形状にお
いても、これらのリブの断面形状は、図１（Ａ）に示し
た台形状に限られず、たとえば、図２〜図４に示した各
種形状とすることができる。Even in the various shapes of the ribs shown in FIGS. 5 and 6, the sectional shape of these ribs is not limited to the trapezoidal shape shown in FIG. 1 (A), and for example, shown in FIGS. It can have various shapes.
【００５１】また、本発明のリブ付き電極１２におい
て、電極２０のパターンも特に限定されるものではない
が、電極２０の幅ｇの平均（平均幅）が１０μｍ以上１
００００μｍ以下、隣り合う電極２０の平均ギャップが
１０μｍ以上１００００μｍ以下のストライプ状に成形
すると、たとえば、アドレスごとの情報を必要とする用
途に最適である。特に、リブ１６の形状として上記した
ストライプ状、格子状、菱形状あるいはハニカム状とし
ているときは、基板間の領域がリブ１６によって仕切ら
れ、さらに、これらの仕切られた領域において、所望の
電極形状によって特定部分を発光させること等が可能に
なるので、アドレスごとに情報を表示することが容易に
行える。より具体的には、例えばこのリブ付き電極１２
のリブ１６側に、電極２０と垂直方向のストライプ電極
を施した基板を重ねれば、２つの基板間にパッシブマト
リックスの信号を与えることができる。電極２０は、リ
ブ１６が形成された側と反対側の面に限定されず、リブ
１６が形成された側の面に電極２０が付与されていても
よい。In the ribbed electrode 12 of the present invention, the pattern of the electrode 20 is not particularly limited, but the average width g of the electrode 20 (average width) is 10 μm or more.
When it is formed in a stripe shape having an average gap of 0000 μm or less and the adjacent electrodes 20 of 10 μm or more and 10000 μm or less, for example, it is most suitable for an application requiring information for each address. In particular, when the ribs 16 have the above-described stripe shape, lattice shape, rhombus shape, or honeycomb shape, the regions between the substrates are partitioned by the ribs 16, and the desired electrode shape is formed in these partitioned regions. Since it is possible to cause a specific portion to emit light, it is possible to easily display information for each address. More specifically, for example, this ribbed electrode 12
If a substrate on which the electrode 20 and a stripe electrode in the vertical direction are provided is overlapped with the rib 16 side, the signal of the passive matrix can be given between the two substrates. The electrode 20 is not limited to the surface on the side opposite to the side where the rib 16 is formed, and the electrode 20 may be provided on the surface on the side where the rib 16 is formed.
【００５２】また、リブ間ギャップｆと、電極２０の幅
ｇとの関係も特に制限されないが、リブ間ギャップの幅
ｆよりも電極２０の幅ｇを狭くすると、１つのリブ間ギ
ャップに複数の電極２０を配置できる。もちろん、電極
２０の幅ｇをリブ間ギャップｆよりも広くし、複数のリ
ブ間ギャップに共通して１つの電極２０が配置されてい
るように構成することも可能である。Further, the relationship between the inter-rib gap f and the width g of the electrode 20 is not particularly limited, but if the width g of the electrode 20 is narrower than the width f of the inter-rib gap, a plurality of inter-rib gaps may be formed. The electrode 20 can be arranged. Of course, it is also possible to make the width g of the electrode 20 wider than the inter-rib gap f so that one electrode 20 is arranged commonly to a plurality of inter-rib gaps.
【００５３】本発明のリブ付き電極１２に用いられる底
板部１４及びリブ１６の材料としては、特に限定される
ものではないが、具体例を挙げると、ポリカーボネー
ト、ポリエステル、ポリアミド、ポリイミド、ポリウレ
タン、ポリスチレン、ポリメチルメタクリレートなどの
熱可塑性樹脂、これらにジイソシアネート、トリイソシ
アネートなどブロック剤を加えた熱硬化型樹脂、シリコ
ーンやブタジエンの２液系ゴム材料、熱可塑樹脂とブタ
ジエンゴムのブレンド材料、液晶ポリエステル樹脂など
が挙げられる。これらの中でも、ポリカーボネート樹
脂、ポリエステル樹脂が製造性の点で好ましい。また、
これらの材料には、必要に応じて、可塑剤、紫外線吸収
剤、酸化防止剤、導電性微粒子などの任意の添加物を加
えることができる。Materials for the bottom plate portion 14 and the ribs 16 used in the ribbed electrode 12 of the present invention are not particularly limited, but specific examples thereof include polycarbonate, polyester, polyamide, polyimide, polyurethane, polystyrene. , Thermoplastic resins such as polymethylmethacrylate, thermosetting resins in which blocking agents such as diisocyanate and triisocyanate are added, two-component rubber materials of silicone and butadiene, blend materials of thermoplastic resins and butadiene rubber, liquid crystal polyester resins And so on. Among these, polycarbonate resin and polyester resin are preferable in terms of manufacturability. Also,
If necessary, any additive such as a plasticizer, an ultraviolet absorber, an antioxidant, and conductive fine particles can be added to these materials.
【００５４】本発明のリブ付き電極１２の電極２０の材
料としても、特に限定されるものではないが、例えば、
金、銀、銅、アルミニウムなどの金属、インジウム錫オ
キサイドや酸化チタンなどの酸化物、導電性カーボンな
どが挙げられる。特に、光透過率が高く、且つ導電性の
高い材料によって電極２０を構成する（いわゆる透明電
極とする）と、たとえばバックライドを備えた画像表示
媒体などでは、バックライトの光が透過しやすくなるの
で、好ましい。透明電極の材料としては、例えば酸化
錫、酸化インジウム、酸化インジウム錫（ＩＴＯ）など
の金属酸化物や、ポリアニリンなどの導電性高分子など
が挙げられる。また、バックライドを備えた画像表示媒
体などにリブ付き電極１２を適用する場合、その光全光
線透過率も、たとえば上記したように６０％以上とする
ことが好ましい。The material of the electrode 20 of the ribbed electrode 12 of the present invention is not particularly limited, but for example,
Examples thereof include metals such as gold, silver, copper and aluminum, oxides such as indium tin oxide and titanium oxide, and conductive carbon. In particular, when the electrode 20 is made of a material having a high light transmittance and a high conductivity (a so-called transparent electrode), for example, in an image display medium provided with a backlight, the light of the backlight is easily transmitted. Therefore, it is preferable. Examples of the material of the transparent electrode include metal oxides such as tin oxide, indium oxide and indium tin oxide (ITO), and conductive polymers such as polyaniline. When the ribbed electrode 12 is applied to an image display medium provided with a back light, the total light transmittance thereof is preferably 60% or more as described above.
【００５５】次に、本発明のリブ付き電極１２の製造方
法について説明する。リブ付き電極１２の製造方法とし
ては、リブ１６が未形成のフィルム（あるいはプレー
ト）に対し、まずリブ１６を形成し、次に電極２０を付
与する製造方法（製造方法１）と、リブ１６が未形成の
フィルム（あるいはプレート）に、まず電極２０を付与
し、次にリブ１６を形成する製造方法（製造方法２）と
に大別することができる。Next, a method of manufacturing the ribbed electrode 12 of the present invention will be described. As a method for manufacturing the ribbed electrode 12, a rib 16 is first formed on a film (or plate) on which the rib 16 is not formed, and then the electrode 20 is applied. It can be roughly classified into a manufacturing method (manufacturing method 2) in which the electrode 20 is first applied to the unformed film (or plate) and then the rib 16 is formed.
【００５６】［製造方法１］製造方法１では、まず、底
板部１４とリブ１６とが一体になっているフィルムまた
はプレートを射出成形、射出圧縮成形、エンボス成形、
熱プレス成形のいずれか１つの方法で成形する。[Manufacturing Method 1] In Manufacturing Method 1, first, a film or plate in which the bottom plate portion 14 and the rib 16 are integrated is formed by injection molding, injection compression molding, embossing molding,
Molding is performed by any one method of hot press molding.
【００５７】射出成形は樹脂を加熱溶融し、これを金型
内に射出して所望の形状を得る成形方法である。射出圧
縮成形は、射出成形において金型に外圧を加えること
で、型の成形品への転写の精度をより向上させる成形方
法である。エンボス成形は、フィルムを凹型の型と刃の
間に設置し、刃と凹型にかみ合わせることで形状を絞り
込む方法である。熱プレス成形はフィルムやプレートに
加熱した型を押し付けたり、フィルムを加熱したローラ
で挟み込み、少なくともローラの一方に型を形成してお
き、この型をフィルムに転写する方法である。Injection molding is a molding method in which a resin is heated and melted and then injected into a mold to obtain a desired shape. Injection compression molding is a molding method that further improves the accuracy of transfer of a mold to a molded product by applying external pressure to a mold in injection molding. Embossing is a method in which a film is placed between a concave die and a blade, and the shape is narrowed by engaging the blade and the concave die. The hot press molding is a method of pressing a heated mold against a film or a plate, sandwiching the film with a heated roller, forming a mold on at least one of the rollers, and transferring this mold to the film.
【００５８】こうして、底板部１４とリブ１６が一体と
なったシート１８が形成される（図１参照）。このシー
ト１８の少なくともいずれか一方の面に蒸着、スパッタ
リング、塗布、印刷のいずれかの方法で電極２０を付与
することで、本発明のリブ付き電極を製造する。Thus, the seat 18 in which the bottom plate portion 14 and the rib 16 are integrated is formed (see FIG. 1). The ribbed electrode of the present invention is manufactured by applying the electrode 20 to at least one surface of the sheet 18 by any method of vapor deposition, sputtering, coating, and printing.
【００５９】この製造方法１では、ロールツーロール
や、ロールツープレートによる製造が可能であり、ま
た、リブと電極付きの基板を接着する必要がある従来の
方法と比較して、その必要がないため製造効率が極めて
高い。更に、製造の初期段階においてフィルム等の位置
合せを行えば、リブ１６と電極２０の位置のずれを防止
でき、これらを所望の位置に合わせて形成できる。ま
た、製造コストも当然安価になる。This manufacturing method 1 can be manufactured by roll-to-roll or roll-to-plate, and it is not necessary as compared with the conventional method in which the rib and the substrate with the electrode need to be bonded. Therefore, the manufacturing efficiency is extremely high. Further, if the film or the like is aligned in the initial stage of manufacturing, it is possible to prevent the positional deviation between the rib 16 and the electrode 20, and to form these at desired positions. Also, the manufacturing cost is naturally low.
【００６０】［製造方法２］製造方法２では、まず、リ
ブ１６が未形成の任意のフィルムまたはプレートの一方
の面に蒸着、スパッタリング、塗布、印刷のいずれかの
方法で電極２０を付与する。これらの方法は製造効率の
点で優れた方法である。次に、このフィルムの少なくと
も一方の面に、エンボスまたは熱プレスでリブ１６を形
成する。この製造方法２も製造方法１と同様に、リブと
電極付きの基板を接着する必要がないので、製造効率が
極めて高い。更に、リブ１６と電極２０の位置合せも容
易であるり、製造コストも安価である。また、製造方法
２では、電極２０を付与した後、最後にリブ１６を形成
するため、製造中のリブ１６の破損が少ない。[Manufacturing Method 2] In Manufacturing Method 2, first, the electrode 20 is provided on one surface of an arbitrary film or plate on which the ribs 16 are not formed by any one of vapor deposition, sputtering, coating, and printing. These methods are excellent in terms of production efficiency. Next, the rib 16 is formed on at least one surface of the film by embossing or hot pressing. Similar to the manufacturing method 1, the manufacturing method 2 does not need to bond the rib and the substrate with the electrode, and therefore the manufacturing efficiency is extremely high. Further, the rib 16 and the electrode 20 can be easily aligned with each other, and the manufacturing cost is low. Further, in the manufacturing method 2, since the rib 16 is formed last after the electrode 20 is applied, the rib 16 is less damaged during manufacturing.
【００６１】[0061]
【実施例】以下実施例にて本発明を具体的に説明する
が、本発明はこれらにより限定されるものではない。The present invention will be described in more detail with reference to the following examples, but the present invention is not limited thereto.
【００６２】＜実施例１＞実施例１では、上記の製造方
法１によってリブ付き電極を製造した。Example 1 In Example 1, a ribbed electrode was manufactured by the manufacturing method 1 described above.
【００６３】まず、ポリカーボネート樹脂（帝人社製、
パンライト）を原料とし、射出成形機（山城精機社製、
ＳＪ−１５−４０−ＰＶ）にて、樹脂溶融温度２８０℃
にて射出成形し、リブ１６の平均高さ２００μｍ、平均
アスペクト比２．４、リブ１６の底部１６Ｂの平均幅１
００μｍ、リブ間ギャップ１ｍｍで格子状になったリブ
１６と底板部１４が一体となった５ｃｍ角サイズのシー
ト１８（リブ付きフィルム）を成形した。底板部１４の
平均厚みは３０μｍであった。First, polycarbonate resin (manufactured by Teijin Limited,
Injection molding machine (made by Yamashiro Seiki Co., Ltd.
SJ-15-40-PV), resin melting temperature 280 ° C
Injection-molded, the rib 16 has an average height of 200 μm, an average aspect ratio of 2.4, and an average width of the bottom portion 16B of the rib 16 is 1
A 5 cm square size sheet 18 (ribbed film) in which the ribs 16 in a lattice shape and the bottom plate portion 14 were integrated with each other at 00 μm and a gap between the ribs of 1 mm was molded. The average thickness of the bottom plate portion 14 was 30 μm.
【００６４】このシート１８のリブ１６が無い方の面に
スパッタリングによりインジウム錫酸化物（ＩＴＯ）電
極を電極の平均幅９００μｍ、電極間ギャップ１００μ
ｍのストライプ状に、表面抵抗３００Ωで施し、リブ付
き電極１２を得た。An indium tin oxide (ITO) electrode was formed on the surface of the sheet 18 on which the ribs 16 were not formed by sputtering, with an average electrode width of 900 μm and an interelectrode gap of 100 μm.
The electrode 12 with ribs was obtained by applying a surface resistance of 300Ω to a stripe shape of m.
【００６５】このリブ付き電極１００枚について、温度
８０℃、湿度８５％環境室で２週間放置した後、粘着テ
ープにてリブ１６と底板部１４の剥離試験を実施し、剥
離の生じた枚数を測定した。また、１００枚のリブ付き
電極１２の作製に要した時間を１００で割り、製造効率
として評価した。更に、１００枚のリブ付き電極１２に
ついて、リブ１６と電極２０との位置のずれが５％以上
になったものの枚数を測定した。結果を表1に示す。After leaving the ribbed electrodes 100 sheets in an environment chamber at a temperature of 80 ° C. and a humidity of 85% for 2 weeks, a peeling test of the ribs 16 and the bottom plate portion 14 was carried out with an adhesive tape, and the number of peeled sheets was determined. It was measured. Further, the time required for producing 100 ribbed electrodes 12 was divided by 100 to evaluate the production efficiency. Further, for 100 ribbed electrodes 12, the number of the ribs 16 and the electrodes 20 in which the positional deviation between the ribs 16 and the electrode 20 was 5% or more was measured. The results are shown in Table 1.
【００６６】＜実施例２＞実施例２でも、上記の製造方
法１によってリブ付き電極を製造した。<Example 2> In Example 2 as well, a ribbed electrode was manufactured by the above manufacturing method 1.
【００６７】まず、ビスフェノールZ型ポリカーボネー
ト樹脂（三菱化学社製、ユーピロンＺ３００）を原料と
し、射出成形機（山城精機社製、ＳＪ−１５−４０−Ｐ
Ｖ）にて、樹脂溶融温度３００℃にて射出、型締力１０
００ｋＮで型圧縮する射出圧縮成形にて、リブ１６の平
均高さ１００μｍ、平均アスペクト比２．２、リブ１６
の底部１６Ｂの平均幅５０μｍ、リブ間ギャップ０．５
ｍｍで格子状になったリブ１６と底板部１４が一体とな
った５ｃｍ角サイズのシート１８（リブ付きフィルム）
を成形した。底板部１４の平均厚みは１０μｍであっ
た。First, using a bisphenol Z type polycarbonate resin (Mitsubishi Chemical Co., Iupilon Z300) as a raw material, an injection molding machine (Yamashiro Seiki Co., SJ-15-40-P).
V), injection at resin melting temperature 300 ° C, mold clamping force 10
The average height of the ribs 16 was 100 μm, the average aspect ratio was 2.2, and the ribs 16 were injection-compressed at 00 kN.
Average width of the bottom portion 16B of the rib is 50 μm, and inter-rib gap is 0.5
5 cm square sheet 18 (ribbed film) in which ribs 16 having a grid shape in mm and bottom plate portion 14 are integrated
Was molded. The average thickness of the bottom plate portion 14 was 10 μm.
【００６８】このシート１８のリブ１６が無い方の面に
実施例1と同様に表面抵抗３００Ωの電極２０を施し、
リブ付き電極１２を得た。An electrode 20 having a surface resistance of 300Ω is applied to the surface of the sheet 18 on which the rib 16 is not provided, as in the first embodiment.
A ribbed electrode 12 was obtained.
【００６９】このリブ付き電極１２について実施例1と
同様の評価を実施した。結果を表1に示す。The same evaluation as in Example 1 was carried out on this ribbed electrode 12. The results are shown in Table 1.
【００７０】＜実施例３＞実施例３では、上記の製造方
法２によってリブ付き電極を製造した。Example 3 In Example 3, a ribbed electrode was manufactured by the manufacturing method 2 described above.
【００７１】厚さ１８８μｍ、Ａ４サイズのポリエステ
ルフィルム（東レ社製、ルミラー）の片面にダイコータ
塗布によりカーボン電極を全面塗布した。このフィルム
をエンボス加工し、平均高さ２００μｍ、底部の平均幅
２００μｍ、アスペクト比１．８、ギャップ２ｍｍのス
トライプ状のリブ１６を、リブ１６が電極２０の面とは
反対の面に突き出すように成形した。リブ１６に対応す
る部分の電極はエンボス加工により切断され、電極２０
もリブ同様のギャップを有するストライプ状に形成され
た。この電極２０の表面抵抗は１００Ωであった。A carbon electrode was applied over the entire surface by die coater application to one surface of a 188 μm-thick A4 size polyester film (Lumirror manufactured by Toray Industries, Inc.). By embossing this film, stripe-shaped ribs 16 having an average height of 200 μm, an average width of the bottom of 200 μm, an aspect ratio of 1.8, and a gap of 2 mm are formed so that the ribs 16 project on the surface opposite to the surface of the electrode 20. Molded. The electrode of the portion corresponding to the rib 16 is cut by embossing,
Was also formed in a stripe shape having a gap similar to that of the rib. The surface resistance of this electrode 20 was 100Ω.
【００７２】このリブ付き電極について実施例1と同様
の評価を実施した。結果を表1に示す。This ribbed electrode was evaluated in the same manner as in Example 1. The results are shown in Table 1.
【００７３】＜実施例４＞実施例４でも、上記の製造方
法２によってリブ付き電極を製造した。<Example 4> In Example 4 as well, a ribbed electrode was manufactured by the manufacturing method 2 described above.
【００７４】厚さ１８８μｍ、幅４００ｍｍ、長さ２０
０ｍのポリエチレンナフタレートフィルムロール（帝人
社製、Ｋａｌａｄｅｘ）にスパッタリングとエッチング
で、長手方向に平行に、平均幅９００μｍ、ギャップ１
００μｍのストライプ状の電極２０（ＩＴＯ電極）を施
した。この電極２０の表面抵抗は７００Ωであった。こ
の電極付きフィルムロールにロールツーロール方式で、
プレス用ヒートロールの温度を２２０℃、フィルム送り
を１０ｍｍ／ｓｅｃの条件で熱プレスし、平均高さ１０
０μｍ、底部の平均幅１００μｍ、アスペクト比１．
８、ギャップ５０μｍの格子状のリブ１６を形成した。
このようにして得られたリブ付き電極のフィルムロール
を５ｃｍ角の大きさに切り出し、実施例1と同様に評価
した。結果を表1に示す。Thickness 188 μm, width 400 mm, length 20
A 0 m polyethylene naphthalate film roll (Kaladex, manufactured by Teijin Ltd.) was sputtered and etched in parallel with the longitudinal direction to give an average width of 900 μm and a gap of 1
A 00 μm stripe-shaped electrode 20 (ITO electrode) was applied. The surface resistance of this electrode 20 was 700Ω. This film roll with electrodes is roll-to-roll system,
An average height of 10 was obtained by hot pressing the heat roll for press at 220 ° C. and film feed at 10 mm / sec.
0 μm, bottom average width 100 μm, aspect ratio 1.
8 and a grid-shaped rib 16 having a gap of 50 μm was formed.
The film roll of the ribbed electrode thus obtained was cut into a size of 5 cm square and evaluated in the same manner as in Example 1. The results are shown in Table 1.
【００７５】＜比較例１＞厚さ１ｍｍ、５ｃｍ角のガラ
ス板の片面に電極幅９００μｍ、電極間ギャップ１００
μｍの電極２０（ＩＴＯ電極）を蒸着し、表面抵抗５０
０Ωの電極板を得た。この電極を有する方の面に、フォ
トリソグラフでフォトリソレジストを２００μｍの厚さ
で全面塗布した後、サンドブラスト法で余分なレジスト
を除去し、平均幅１００μｍ、平均高さ２００μｍ、ア
スペクト比１、リブ間ギャップ１ｍｍのリブを形成し
た。この一体化されてはいないリブを有する電極板を実
施例1と同様に評価した。結果を表1に示す。<Comparative Example 1> A glass plate having a thickness of 1 mm and a size of 5 cm was formed on one surface of which an electrode width was 900 μm and an interelectrode gap was 100.
The electrode 20 (ITO electrode) of μm is vapor-deposited, and the surface resistance 50
An electrode plate of 0Ω was obtained. After applying a photolithographic resist with a thickness of 200 μm on the entire surface having this electrode by a photolithography method, the excess resist is removed by a sandblasting method to obtain an average width of 100 μm, an average height of 200 μm, an aspect ratio of 1, and a rib interval. Ribs with a gap of 1 mm were formed. The electrode plate having the ribs which were not integrated was evaluated in the same manner as in Example 1. The results are shown in Table 1.
【００７６】＜比較例２＞厚さ０．６ｍｍ、５ｃｍ角の
ガラスエポキシ板の片面に電極幅９０μｍ、電極間ギャ
ップ１０μｍで銅電極を蒸着し、表面抵抗５００Ωの電
極板を得た。この電極を有する方の面に、印刷インク
（アサヒ化学研究社製、Ｄｍ３００）を用い、スクリー
ン印刷（マイクロテック社製、ｍＴ３２０−TVC）に
て、８回積層で、平均高さ２２０μｍ、平均アスペクト
比０．９、底部の平均幅１００μｍ、リブ間ギャップ１
ｍｍで格子状になったリブを作製した。この一体化され
てはいないリブを有する電極板を実施例1と同様に評価
した。結果を表1に示す。Comparative Example 2 A copper electrode was vapor-deposited on one surface of a glass epoxy plate having a thickness of 0.6 mm and a size of 5 cm and a width of 90 μm and a gap between the electrodes of 10 μm to obtain an electrode plate having a surface resistance of 500Ω. On the side having this electrode, using a printing ink (Dm300 manufactured by Asahi Chemical Research Co., Ltd.), screen printing (manufactured by Microtec, mT320-TVC) was performed 8 times to laminate, and an average height of 220 μm and an average aspect ratio. Ratio 0.9, average width of bottom 100 μm, gap between ribs 1
A rib having a lattice shape of mm was produced. The electrode plate having the ribs which were not integrated was evaluated in the same manner as in Example 1. The results are shown in Table 1.
【００７７】[0077]
【表１】
表1を見ても明らかなように、実施例１〜４の本発明の
リブ付き電極は、高温多湿環境時、長期使用時において
もリブ１６の剥離が起こらず、製造効率が高く、電極２
０とリブ１６とのずれも起っていない。[Table 1] As is clear from Table 1, the ribbed electrodes of the present invention of Examples 1 to 4 have high production efficiency because the ribs 16 are not peeled off even in a high temperature and high humidity environment or during long-term use.
There is no deviation between 0 and the rib 16.
【００７８】一方、比較例１及び比較例２のリブ付き電
極は、環境や使用時間によって、リブの剥離が起ってし
まう。また、製造効率が悪く、リブと電極との位置精度
が悪いため、コストが極めて高価になるこことがある。On the other hand, in the ribbed electrodes of Comparative Example 1 and Comparative Example 2, the ribs peeled off depending on the environment and the time of use. In addition, the manufacturing efficiency is poor and the positional accuracy between the rib and the electrode is poor, which may result in extremely high cost.
【００７９】[0079]
【発明の効果】本発明は上記の構成としたので、環境変
動時や長期使用時にリブの剥離が無く信頼性の高いリブ
付き電極、および、製造効率が高く、リブと電極の位置
の再現性が高く、製造コストの安い電極付きリブの製造
方法を提供できる。EFFECTS OF THE INVENTION Since the present invention has the above-mentioned structure, the ribbed electrode has high reliability without peeling of the rib when the environment changes or is used for a long time, and the reproducibility of the position of the rib and the electrode is high. It is possible to provide a method of manufacturing a rib with an electrode having a high manufacturing cost and a low manufacturing cost.
【図１】 本発明の一実施形態のリブ付き電極を示し、
（Ａ）はリブの長手方向と直交する断面図であり、
（Ｂ）は底板部の法線方向にみた平面図である。FIG. 1 shows a ribbed electrode of one embodiment of the present invention,
(A) is a cross-sectional view orthogonal to the longitudinal direction of the rib,
(B) is a plan view of the bottom plate portion viewed in the direction of the normal line.
【図２】 本発明のリブ付き電極の図１（Ａ）とは異な
る断面形状を示す断面図である。FIG. 2 is a cross-sectional view showing a cross-sectional shape of the ribbed electrode of the present invention different from that shown in FIG.
【図３】 本発明のリブ付き電極の図１（Ａ）及び図２
とは異なる断面形状を示す断面図である。3A and 3B of a ribbed electrode of the present invention.
It is sectional drawing which shows the cross-sectional shape different from.
【図４】 本発明のリブ付き電極の図１（Ａ）、図２及
び図３とは異なる形状を示す断面図である。FIG. 4 is a cross-sectional view showing a shape of the ribbed electrode of the present invention, which is different from FIGS. 1 (A), 2 and 3.
【図５】 （Ａ）〜（Ｃ）はいずれも、本発明のリブ付
き電極を平面視したときの図１（Ｂ）とは異なる形状を
示す平面図である。5A to 5C are plan views each showing a shape different from that in FIG. 1B when the ribbed electrode of the present invention is viewed in plan view.
【図６】 （Ａ）及び（Ｂ）はいずれも、本発明のリブ
付き電極を平面視したときの図１（Ｂ）及び図５（Ａ）
〜（Ｃ）とは異なる形状を示す平面図である。6 (A) and FIG. 6 (B) are both FIG. 1 (B) and FIG. 5 (A) when the ribbed electrode of the present invention is viewed in plan.
It is a top view which shows a different shape from (C).
１２ リブ付き電極 １４ 底板部 １６ リブ １８ シート ２０ 電極 ２２ リブ ３２ リブ ４２ リブ ａ リブの底板部から高さ９０％位置での幅 ｂ リブの底部の幅 ｃ リブの高さ ｄ リブの底板部から高さ５０％位置での幅 ｅ 底板部の厚さ ｆ リブ間ギャップの幅 ｇ 電極の幅 12 Ribbed electrode 14 Bottom plate 16 ribs 18 sheets 20 electrodes 22 ribs 32 ribs 42 ribs a Width at the height 90% from the bottom plate of the rib b Width of bottom of rib c Rib height d Width at the height 50% from the bottom plate of the rib e Thickness of bottom plate f Width of rib gap Width of electrode
───────────────────────────────────────────────────── フロントページの続き (72)発明者 額田 克己 神奈川県南足柄市竹松1600番地 富士ゼロ ックス株式会社内 Ｆターム(参考） 5C094 AA31 AA43 AA44 AA48 BA31 BA43 CA19 DA11 EA04 EC03 FA04 FB01 FB12 FB15 JA01 JA05 JA08 JA11 5G435 AA14 AA17 BB06 BB12 CC09 HH02 HH12 HH14 KK05 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Katsumi Nukata Fuji Zero, 1600 Takematsu, Minamiashigara City, Kanagawa Prefecture X Co., Ltd. F-term (reference) 5C094 AA31 AA43 AA44 AA48 BA31 BA43 CA19 DA11 EA04 EC03 FA04 FB01 FB12 FB15 JA01 JA05 JA08 JA11 5G435 AA14 AA17 BB06 BB12 CC09 HH02 HH12 HH14 KK05
Claims (9)
に底板部と一体的に形成されたリブと、を有するシート
と、 前記シートの少なくとも一面に配置され、表面抵抗が１
×１０9Ω以下の電極と、 を有するリブ付き電極であって、 前記リブが、底板部法線方向の断面において、前記底板
部からの平均高さが５０μｍ以上、高さ５０％の位置で
の幅ｄと高さｃとの比率（ｃ／ｄ）が１以上とされてい
ることを特徴とするリブ付き電極。1. A sheet having a bottom plate portion and a rib projecting from the bottom plate portion and integrally formed with the bottom plate portion; and a sheet disposed on at least one surface of the sheet and having a surface resistance of 1
A ribbed electrode having an electrode of × 10 9 Ω or less, wherein the rib is at a position where the average height from the bottom plate portion is 50 μm or more and the height is 50% in a cross section in the direction normal to the bottom plate portion. The electrode with ribs, wherein the ratio (c / d) of the width d and the height c of the electrode is 1 or more.
にストライプ状又は格子状となるように形成されている
ことを特徴とする請求項１に記載のリブ付き電極。2. The ribbed electrode according to claim 1, wherein the rib is formed so as to have a stripe shape or a lattice shape when viewed in a direction normal to the bottom plate portion.
いて、前記底板部から高さ９０％の位置での幅ａとリブ
の底部の幅ｂとの比率（ａ／ｂ）が０．８以下とされて
いることを特徴とする請求項１又は請求項２に記載のリ
ブ付き電極。3. The rib has a ratio (a / b) of a width a at a position 90% in height from the bottom plate to a width b of the bottom of the rib in a cross section in the direction normal to the bottom plate. The ribbed electrode according to claim 1 or 2, wherein the number is 8 or less.
いて、リブの底部の平均幅が５μｍ以上５００μｍ以下
であり、隣り合うリブ間の平均間隔が２０μｍ以上５０
０００μｍ以下であり、リブの平均高さが５０μｍ以上
１０００μｍ以下であることを特徴とする請求項３に記
載のリブ付き電極。4. In a cross section orthogonal to the longitudinal direction of the rib, the average width of the bottom of the rib is 5 μm or more and 500 μm or less, and the average spacing between adjacent ribs is 20 μm or more 50.
The ribbed electrode according to claim 3, wherein the rib has an average height of 50 µm or more and an average rib height of 50 µm or more and 1000 µm or less.
特徴とする請求項１〜請求項４のいずれかに記載のリブ
付き電極。5. The ribbed electrode according to any one of claims 1 to 4, wherein the total light transmittance is 60% or more.
００μｍ以下であることを特徴とする請求項１〜請求項
５のいずれかに記載のリブ付き電極。6. The bottom plate portion has an average thickness of 5 μm or more 30
The ribbed electrode according to any one of claims 1 to 5, wherein the electrode has a thickness of 00 m or less.
にストライプ状に形成され、且つ、電極長手方向と直交
する断面において、平均幅が１０μｍ以上１００００μ
ｍ以下、隣り合う電極間の平均間隔が１０μｍ以上１０
０００μｍ以下であることを特徴とする請求項１〜請求
項６のいずれかに記載のリブ付き電極。7. The electrode is formed in a stripe shape when viewed in a direction normal to a bottom plate portion, and has an average width of 10 μm or more and 10000 μm in a cross section orthogonal to a longitudinal direction of the electrode.
m or less, the average distance between adjacent electrodes is 10 μm or more and 10
The ribbed electrode according to claim 1, wherein the ribbed electrode has a thickness of 000 μm or less.
リブ付き電極の製造方法であって、 射出成形、射出圧縮成形、エンボス成形、熱プレス成形
のいずれかの方法で前記リブと前記底板部とが一体とな
った前記シートを成形し、その後、蒸着、スパッタリン
グ、塗布、印刷のいずれかの方法で前記電極を付与する
ことを特徴とするリブ付き電極の製造方法。8. The method for manufacturing a ribbed electrode according to claim 1, wherein the rib is formed by any one of injection molding, injection compression molding, embossing molding, and hot press molding. A method for producing a ribbed electrode, characterized in that the sheet integrated with the bottom plate portion is formed, and then the electrode is applied by any one of vapor deposition, sputtering, coating, and printing.
リブ付き電極の製造方法であって、 前記リブが未形成のフィルム又はプレートに、蒸着、ス
パッタリング、塗布、印刷のいずれかの方法で前記電極
を付与し、その後、エンボス成形、熱プレス成形のいず
れかの方法で前記リブを形成することを特徴とするリブ
付き電極の製造方法。9. The method for producing a ribbed electrode according to claim 1, wherein the film or plate on which the ribs are not formed is any one of vapor deposition, sputtering, coating, and printing. A method for producing a ribbed electrode, wherein the electrode is applied by a method, and then the rib is formed by any one of embossing molding and hot press molding.
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|---|---|---|---|
| JP2002061516A JP2003263119A (en) | 2002-03-07 | 2002-03-07 | Rib-attached electrode and its manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002061516A JP2003263119A (en) | 2002-03-07 | 2002-03-07 | Rib-attached electrode and its manufacturing method |
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