JP2003238577A - Perfluoropolyether-modified silane, surface treating agent and antireflection filter - Google Patents

Perfluoropolyether-modified silane, surface treating agent and antireflection filter

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Publication number
JP2003238577A
JP2003238577A JP2002282847A JP2002282847A JP2003238577A JP 2003238577 A JP2003238577 A JP 2003238577A JP 2002282847 A JP2002282847 A JP 2002282847A JP 2002282847 A JP2002282847 A JP 2002282847A JP 2003238577 A JP2003238577 A JP 2003238577A
Authority
JP
Japan
Prior art keywords
group
perfluoropolyether
layer
antireflection
modified silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002282847A
Other languages
Japanese (ja)
Other versions
JP4412450B2 (en
Inventor
Koichi Yamaguchi
浩一 山口
Hirobumi Kinoshita
博文 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
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Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2002282847A priority Critical patent/JP4412450B2/en
Publication of JP2003238577A publication Critical patent/JP2003238577A/en
Application granted granted Critical
Publication of JP4412450B2 publication Critical patent/JP4412450B2/en
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Expired - Lifetime legal-status Critical Current

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  • Surface Treatment Of Optical Elements (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a perfluoropolyether-modified silane which has water/oil repellency, parting properties, chemical resistance, lubricity, durability, antifouling properties and fingerprint wipe-off property due to absence of a polar group, is useful as a surface treating agent for coating the surfaces of various kinds of substrates, is applicable to an antireflection filter that has been formed with a cured coating film on the surface, is hardly stained, has the stain to be readily wiped off, is excellent in slipperiness on the surface, is hardly damaged and keeps these performances for a long period of time. <P>SOLUTION: The perfluoropolyether-modified silane is represented by formula (1) (Rf is a bifunctional straight-chain perfluoropolyether group; R is a 1-4C alkyl group or phenyl group; X is a hydrolyzable group; (n) is 0-2; (m) is an integer of 1-5; (a) is 2 or 3). <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、撥水撥油性、離型
性、耐薬品性、潤滑性などに優れ、かつ耐久性、防汚
性、特に指紋拭き取り性に優れた新規なパーフルオロポ
リエーテル変性シラン及びこれを主成分とする表面処理
剤、並びに防汚性、指紋拭き取り性に優れ、特に耐久性
に優れた防汚層を有する反射防止フィルターに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel perfluoropolymer which is excellent in water and oil repellency, releasability, chemical resistance, lubricity, and the like, and is excellent in durability, stain resistance, especially fingerprint wipeability. The present invention relates to an ether-modified silane, a surface-treating agent containing the silane as a main component, and an antireflection filter having an antifouling layer having excellent antifouling properties and fingerprint wipeability, and particularly excellent durability.

【0002】[0002]

【従来の技術】一般にパーフルオロポリエーテル基含有
化合物は、その表面エネルギーが非常に小さいために、
撥水撥油性・耐薬品性・潤滑性・離型性・防汚性などを
有する。その性質を利用して、工業的には紙・繊維など
の撥水撥油防汚剤、磁気記録媒体の滑剤、精密機器の防
油剤、離型剤、化粧料、保護膜などに幅広く利用されて
いる。
2. Description of the Related Art Generally, a compound containing a perfluoropolyether group has a very small surface energy,
It has water and oil repellency, chemical resistance, lubricity, releasability, and stain resistance. Utilizing its properties, it is widely used industrially for water and oil repellent antifouling agents such as paper and fibers, lubricants for magnetic recording media, oil repellents for precision equipment, release agents, cosmetics, and protective films. ing.

【0003】しかし、その性質は同時に他の基材に対す
る非粘着性、非密着性があることを示しており、基材表
面に塗布することはできても、被膜を形成し密着させる
ことは困難であった。
However, its properties indicate that it is non-adhesive and non-adhesive to other base materials at the same time, and it is difficult to form a coating and adhere to it even though it can be applied to the surface of the base material. Met.

【0004】一方、ガラスや布などの基材表面と有機化
合物とを結合させるものとしては、シランカップリング
剤が良く知られている。シランカップリング剤は、1分
子中に有機官能基と反応性シリル基(一般にはアルコキ
シシリル基)を有する。アルコキシシリル基は、空気中
の水分などによって自己縮合反応をおこしてシロキサン
となり被膜を形成する。それと同時に、ガラスや金属な
どの表面と化学的・物理的に結合することによって、耐
久性を有する強固な被膜となる。シランカップリング剤
はこの性質を利用して各種基材表面のコーティング剤と
して幅広く利用されている。
On the other hand, a silane coupling agent is well known as a material for binding the surface of a substrate such as glass or cloth to an organic compound. The silane coupling agent has an organic functional group and a reactive silyl group (generally an alkoxysilyl group) in one molecule. The alkoxysilyl group undergoes a self-condensation reaction with water in the air to become a siloxane and forms a film. At the same time, it chemically and physically bonds to the surface of glass or metal to form a durable and strong film. Utilizing this property, silane coupling agents are widely used as coating agents on the surface of various substrates.

【0005】これらの特徴を生かしたものとして、特開
昭58−167597号公報では、下記式(2)
Japanese Patent Application Laid-Open No. 58-167597 discloses the following formula (2) which makes use of these characteristics.

【化3】 (式中、R1、R2は炭素数1〜4のアルキル基、Q1
CH2CH2CH2又はCH2CH2NHCH2CH2CH2
hは1〜4の整数、iは2又は3である。)で示される
フルオロアミノシラン化合物が開示されている。しかし
ながら、この化合物は、パーフルオロポリエーテル基の
部分が、ヘキサフルオロプロピレンオキサイド(HFP
O)の2〜5量体と短いため、上記パーフルオロポリエ
ーテル基の持つ特徴を十分に出すことができなかった。
[Chemical 3] (In the formula, R 1 and R 2 are alkyl groups having 1 to 4 carbon atoms, Q 1 is CH 2 CH 2 CH 2 or CH 2 CH 2 NHCH 2 CH 2 CH 2 ,
h is an integer of 1 to 4 and i is 2 or 3. ) Is disclosed. However, in this compound, the part of the perfluoropolyether group is hexafluoropropylene oxide (HFP).
Since it is as short as 2 to 5 mer of O), the characteristics of the above perfluoropolyether group could not be sufficiently exhibited.

【0006】また、特開昭58−122979号公報で
は、ガラス表面の撥水撥油剤として下記式(3)
Further, in JP-A-58-122979, a water- and oil-repellent agent for a glass surface is represented by the following formula (3):

【化4】 (式中、Rf1は炭素数1〜20個のポリフルオロアル
キル基であってエーテル結合を1個以上含んでもよい。
3は水素原子又は低級アルキル基、Aはアルキレン
基、X1は−CON(R4)−Q−又はSO2N(R4)−
Q−(但し、R4は低級アルキル基、Qは2価の有機基
を示す)、Zは低級アルキル基、Yはハロゲン、アルコ
キシ基又はR5COO−(但し、R5は水素原子又は低級
アルキル基を示す)、sは0又は1の整数、tは1〜3
の整数、uは0又は1〜2の整数を示す。)で示される
化合物が提示されているが、この場合も含フッ素基の部
分の炭素数が1〜20個と少なく、十分な効果が得られ
ていない。
[Chemical 4] (In the formula, Rf 1 is a polyfluoroalkyl group having 1 to 20 carbon atoms and may contain one or more ether bonds.
R 3 is a hydrogen atom or a lower alkyl group, A is an alkylene group, X 1 is -CON (R 4) -Q- or SO 2 N (R 4) -
Q- (provided that R 4 is a lower alkyl group, Q is a divalent organic group), Z is a lower alkyl group, Y is a halogen, an alkoxy group or R 5 COO- (provided that R 5 is a hydrogen atom or lower Represents an alkyl group), s is an integer of 0 or 1, t is 1 to 3
And u represents 0 or an integer of 1-2. ) Is presented, but in this case as well, the number of carbon atoms in the portion of the fluorine-containing group is as small as 1 to 20, and a sufficient effect is not obtained.

【0007】特に最近では、建築物の高層化に伴い窓ガ
ラスをメンテナンスフリー化することや、外観や視認性
をよくするためにディスプレイの表面に指紋が付きにく
くするなど「汚れにくくする」技術や、「汚れを落とし
易くする」技術に対する要求は年々高まってきており、
これらの要求に応えることのできる材料の開発が望まれ
ていた。
In particular, recently, with the increase in the number of buildings, the window glass is made maintenance-free, and the technique of "hardening stains" such as making the surface of the display hard to have fingerprints to improve the appearance and visibility. , The demand for "easy to remove dirt" technology is increasing year by year,
It has been desired to develop a material that can meet these requirements.

【0008】上記パーフルオロポリエーテル基含有化合
物及びシランカップリング剤の特性を活かし、基材表面
に強固な被膜を形成し、撥水撥油性、防汚性、耐薬品
性、潤滑性、離型性等に優れた表面処理剤として、下記
式(4)で表される含フッ素シラン化合物を防汚層に用
いたレンズが知られている(特開平9−258003号
公報)。
By utilizing the characteristics of the above-mentioned perfluoropolyether group-containing compound and silane coupling agent, a strong coating film is formed on the surface of the substrate, and water and oil repellency, antifouling property, chemical resistance, lubricity, and mold release are provided. As a surface treatment agent having excellent properties, a lens using a fluorine-containing silane compound represented by the following formula (4) in an antifouling layer is known (Japanese Patent Laid-Open No. 9-258003).

【0009】[0009]

【化5】 (式中、Rf’は炭素数1〜16の直鎖状又は分岐状パ
ーフルオロアルキル基、X’はヨウ素又は水素、Y1
水素又は低級アルキル基、Z1はフッ素又はトリフルオ
ロメチル基、R12は加水分解可能な基、R13は水素又は
不活性な一価の有機基、c’、d’及びf’は0〜20
0の整数、g’は0又は1、p’及びq’は0〜2の整
数、k’は1〜10の整数を示す。)
[Chemical 5] (In the formula, Rf ′ is a linear or branched perfluoroalkyl group having 1 to 16 carbon atoms, X ′ is iodine or hydrogen, Y 1 is hydrogen or a lower alkyl group, Z 1 is a fluorine or trifluoromethyl group, R 12 is a hydrolyzable group, R 13 is hydrogen or an inert monovalent organic group, and c ′, d ′ and f ′ are 0 to 20.
0 is an integer, g ′ is 0 or 1, p ′ and q ′ are integers from 0 to 2, and k ′ is an integer from 1 to 10. )

【0010】しかし、上記一般式(4)で表される含フ
ッ素シラン化合物は、1分子中の加水分解性基の含有割
合は比較的多いものの、片末端にしか存在しないことか
ら、特に基材への密着性が不十分で耐久性の点で問題が
あり、レンズの表面処理剤として利用した場合には、所
望の性能を長期間にわたって持続させ得るものではなく
適切なものとはいえなかった。
However, although the fluorine-containing silane compound represented by the above general formula (4) has a relatively large content of hydrolyzable groups in one molecule, it is present only at one end, so that it is particularly useful as a base material. There is a problem in terms of durability due to insufficient adhesion to, and when used as a surface treatment agent for lenses, the desired performance could not be maintained for a long period of time and could not be said to be appropriate. .

【0011】また、視認装置等の表面に設けられること
が一般的な反射防止膜にあっては、手垢や指紋、汗や唾
液、整髪料等の汚染物が付着し易く、その付着で表面反
射率が変化したり、付着物が白く浮き出て見えて表示内
容が不鮮明になるなど、単なる透明板等の場合に比べて
汚染が目立ち易いという難点があるため、かかる汚染物
の付着防止性や付着汚染の除去性に優れる反射防止膜の
提供が久しい課題となっている。
Further, in the case of an antireflection film which is generally provided on the surface of a visual recognition device or the like, contaminants such as hand marks, fingerprints, sweat, saliva, and hair styling materials are likely to adhere, and the adhesion causes surface reflection. There is a problem that contamination is more noticeable than in the case of a simple transparent plate, such as a change in the rate, and the displayed content is unclear due to the appearance of the attached material appearing white. It has been a long-standing problem to provide an antireflection film having excellent stain removability.

【0012】従来、耐汚染性の向上等を目的とした反射
防止膜としては、PVD法により形成した二酸化ケイ素
を主成分とする表面層を有する単層又は多層の無機物層
からなる反射防止層の表面に、有機ポリシロキサン系重
合物又はパーフルオロアルキル基含有重合物からなる硬
化層を有するものが知られていた(特公平6−5324
号公報)。
Conventionally, as an antireflection film for the purpose of improving stain resistance, etc., an antireflection layer formed of a single layer or a plurality of inorganic layers having a surface layer containing silicon dioxide as a main component formed by a PVD method is used. It is known that the surface thereof has a hardened layer made of an organic polysiloxane polymer or a polymer containing a perfluoroalkyl group (Japanese Patent Publication No. 6-5324).
Issue).

【0013】しかしながら、手垢や指紋等の人体的汚染
が付着した場合に、ティッシュペーパーなどで拭き取る
ことが困難で、汚染が薄膜に押し拡げられ、強く擦ると
反射防止膜が傷付くため、満足できる除去を達成できな
いという問題点があった。
However, when human stains such as hand marks and fingerprints are attached, it is difficult to wipe them off with a tissue or the like, the stains are spread to a thin film, and the antireflection film is scratched when strongly rubbed, which is satisfactory. There was a problem that removal could not be achieved.

【0014】一般に、パーフルオロポリエーテル基含有
化合物は、前述の特徴を有するもので、これらの特徴を
生かしたものとして、特開平11−29585号公報で
は、下記式(5)で示されるパーフルオロポリエーテル
変性アミノシランを防汚層に用いた反射防止膜が開示さ
れている。しかし、この反射防止膜は、撥水撥油性、防
汚性、耐薬品性、潤滑性、離型性等に優れているもの
の、防汚層に用いたパーフルオロポリエーテル変性アミ
ノシランの分子中に水との親和性の高いアミド基等の極
性基を含有しており、また、1分子中の加水分解性基の
割合(重量%)が少ないため、硬化までに時間を要する
ことや、基材への密着性の点などの問題点を有し、表面
処理剤として利用する上で更に十分な性能を与えること
が望まれた。
In general, the perfluoropolyether group-containing compound has the above-mentioned characteristics. As a compound utilizing these characteristics, in JP-A No. 11-29585, a perfluoro represented by the following formula (5) is shown. An antireflection film using a polyether-modified aminosilane as an antifouling layer is disclosed. However, although this antireflection film is excellent in water repellency, oil repellency, antifouling property, chemical resistance, lubricity, release property, etc., it is contained in the molecule of the perfluoropolyether-modified aminosilane used for the antifouling layer. It contains polar groups such as amide groups that have a high affinity for water, and the proportion (% by weight) of hydrolyzable groups in one molecule is small, so it takes time to cure and It has problems such as adhesiveness to the surface, and it has been desired to provide more sufficient performance for use as a surface treatment agent.

【化6】 (式中、X3は加水分解性基、R6は低級アルキル基、R
7は水素原子又は低級アルキル基、Q2はCH2CH2CH
2又はCH2CH2NHCH2CH2CH2、dは6〜50の
整数、eは2又は3、b及びcはそれぞれ1〜3の整
数。)
[Chemical 6] (In the formula, X 3 is a hydrolyzable group, R 6 is a lower alkyl group, R 6
7 is a hydrogen atom or a lower alkyl group, Q 2 is CH 2 CH 2 CH
2 or CH 2 CH 2 NHCH 2 CH 2 CH 2, d is an integer of 6 to 50, e is 2 or 3, b and c are each an integer of 1 to 3. )

【0015】また、特開平2001−188102号公
報では、下記式(6)で示されるパーフルオロポリエー
テル基含有シランカップリング剤を防汚層に用いた反射
防止フィルムが開示されており、この防汚層に用いられ
るパーフルオロポリエーテル基含有シランカップリング
剤は、極性基は含有していないものの、1分子中の加水
分解性基の割合が十分とは言えず、硬化までに時間を要
することや、基材への密着性が劣るなど、表面処理剤と
して利用する上で十分な性能を有しているとは言えなか
った。
Further, Japanese Patent Application Laid-Open No. 2001-188102 discloses an antireflection film using a perfluoropolyether group-containing silane coupling agent represented by the following formula (6) as an antifouling layer. Although the perfluoropolyether group-containing silane coupling agent used for the stain layer does not contain a polar group, it cannot be said that the ratio of hydrolyzable groups in one molecule is sufficient, and it takes time to cure. Moreover, it cannot be said that it has sufficient performance for use as a surface treatment agent, such as poor adhesion to a substrate.

【化7】 (但し、Rf2は炭素数1〜16の直鎖状又は分岐状パ
ーフルオロアルキル基、Rは炭素数1〜10のアルキル
基、kは1〜50の整数、rは0〜6の整数、jは0〜
3の整数、iは0〜3の整数であるが、0<j+i≦6
である。)
[Chemical 7] (However, Rf 2 is a linear or branched perfluoroalkyl group having 1 to 16 carbon atoms, R is an alkyl group having 1 to 10 carbon atoms, k is an integer of 1 to 50, r is an integer of 0 to 6, j is 0
3 is an integer, i is an integer of 0 to 3, and 0 <j + i ≦ 6
Is. )

【0016】よって、汚染が付着しにくく、かつ汚染が
付着した場合にもその汚染が目立ちにくいと共に、手垢
や指紋などの人体的汚染も含めて付着した汚染をティッ
シュペーパー等で容易に拭き取り除去でき、その拭き取
り操作で傷付きにくくて、水滴等の付着は容易に振り落
とすことができ、しかもかかる耐汚染性や易拭き取り除
去性、耐擦傷性や撥水性等の性能を長期に持続する反射
防止フィルターの開発が望まれていた。
[0016] Therefore, it is difficult for the stains to adhere, and even when the stains are attached, the stains are not conspicuous, and the adhered stains including human stains such as hand marks and fingerprints can be easily wiped off with a tissue paper or the like. , It is hard to be scratched by the wiping operation, water droplets etc. can be easily shaken off, and anti-reflection that keeps such stain resistance, easy wipe removal property, scratch resistance and water repellency for a long time The development of filters was desired.

【0017】[0017]

【特許文献1】特開昭58−167597号公報[Patent Document 1] JP-A-58-167597

【特許文献2】特開昭58−122979号公報[Patent Document 2] JP-A-58-122979

【特許文献3】特開平9−258003号公報[Patent Document 3] Japanese Patent Laid-Open No. 9-258003

【特許文献4】特公平6−5324号公報[Patent Document 4] Japanese Patent Publication No. 6-5324

【特許文献5】特開平11−29585号公報[Patent Document 5] Japanese Patent Laid-Open No. 11-29585

【特許文献6】特開平2001−188102号公報[Patent Document 6] Japanese Patent Laid-Open No. 2001-188102

【0018】[0018]

【発明が解決しようとする課題】従って、本発明は、上
記要望に応えるべく、撥水撥油性、離型性、耐薬品性、
潤滑性などに優れ、かつ耐久性、防汚性、特に指紋拭き
取り性に優れた新規なパーフルオロポリエーテル変性シ
ラン及びこれを主成分とする表面処理剤、並びに防汚
性、指紋拭き取り性に優れ、特に耐久性に優れた防汚層
を表面に有する反射防止フィルターを提供することを目
的とする。
Therefore, in order to meet the above-mentioned demands, the present invention provides water and oil repellency, releasability, chemical resistance,
A novel perfluoropolyether-modified silane that has excellent lubricity, durability, stain resistance, especially fingerprint wipeability, and a surface treatment agent containing it as a main component, as well as stain resistance and fingerprint wipeability. In particular, it is an object of the present invention to provide an antireflection filter having an antifouling layer having excellent durability on its surface.

【0019】[0019]

【課題を解決するための手段及び発明の実施の形態】本
発明者は、上記要望に応えるために鋭意検討を行った結
果、下記一般式(1)
Means for Solving the Problems and Modes for Carrying Out the Invention As a result of intensive studies conducted by the present inventor to meet the above demands, the following general formula (1)

【化8】 (式中、Rfは二価の直鎖型パーフルオロポリエーテル
基、Rは炭素数1〜4のアルキル基又はフェニル基、X
は加水分解性基、nは0〜2、mは1〜5の整数、aは
2又は3である。)で表される新規なパーフルオロポリ
エーテル変性シランが、撥水撥油性、離型性、耐薬品
性、潤滑性、耐久性、防汚性、特に指紋拭き取り性に優
れており、表面処理剤として利用でき、反射防止フィル
ターの表面に硬化膜を形成することに適していることを
知見し、本発明をなすに至った。
[Chemical 8] (In the formula, Rf represents a divalent linear perfluoropolyether group, R represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, X
Is a hydrolyzable group, n is 0 to 2, m is an integer of 1 to 5, and a is 2 or 3. ) Is a new perfluoropolyether-modified silane, which is excellent in water and oil repellency, mold releasability, chemical resistance, lubricity, durability, antifouling property, especially fingerprint wiping property. As a result, they have found that they are suitable for forming a cured film on the surface of an antireflection filter, and completed the present invention.

【0020】また、二酸化ケイ素系無機層を有する無機
系反射防止層の表面層上に防汚層を形成すること、この
場合、上記式(1)のシランを用いるなどして、防汚層
を、オレイン酸に対する転落角が5°以下であり、且
つ、溶剤洗浄前の転落角に対する溶剤洗浄後の転落角の
変化率が10%以下のものとすることで、表面エネルギ
ーが小さく、汚染物質の付着力が小さい上に、その効果
が持続し、また、指紋、皮脂、汗、化粧品などの汚染物
質の付着を防止し、また、付着しても容易に拭き取れる
ようになり、擦過による防汚層の機能低下が少なく、反
射防止層表面に傷が付き難く、傷をきっかけとした反射
防止層の剥離を防ぐことができる反射防止フィルターが
得られることを知見し、本発明をなすに至った。
Further, by forming an antifouling layer on the surface layer of the inorganic antireflection layer having a silicon dioxide inorganic layer, in this case, by using the silane of the above formula (1), the antifouling layer is formed. When the sliding angle with respect to oleic acid is 5 ° or less and the rate of change of the sliding angle after solvent cleaning with respect to the sliding angle before solvent cleaning is 10% or less, the surface energy is small and contaminants In addition to its low adhesive strength, its effect continues, and it also prevents contaminants such as fingerprints, sebum, sweat, and cosmetics from adhering to it, and even if it adheres, it can be easily wiped off, preventing stains from rubbing. It was found that an antireflection filter capable of preventing the peeling of the antireflection layer caused by scratches, which is less likely to be scratched on the surface of the antireflection layer with less deterioration of the function of the layer, and has completed the present invention. .

【0021】従って、本発明は、上記一般式(1)のパ
ーフルオロポリエーテル変性シランを提供する。また、
このパーフルオロポリエーテル変性シラン及び/又はそ
の部分加水分解縮合物を主成分とする表面処理剤、並び
に表面層として二酸化ケイ素系無機層を有する無機系反
射防止層の表面層上に、オレイン酸に対する転落角が5
°以下であり、且つ、溶剤洗浄前の転落角に対する溶剤
洗浄後の転落角の変化率が10%以下である防汚層、特
に上記式(1)のシラン及び/又はその部分加水分解縮
合物を用いた防汚層を形成したことを特徴とする反射防
止フィルターを提供する。
Accordingly, the present invention provides the perfluoropolyether-modified silane of the above general formula (1). Also,
The surface treatment agent containing the perfluoropolyether-modified silane and / or its partial hydrolyzed condensate as a main component, and the inorganic antireflection layer having a silicon dioxide-based inorganic layer as the surface layer, on the surface layer of oleic acid Fall angle 5
An antifouling layer having a degree of change of 10 ° or less and a change rate of the sliding angle after solvent cleaning with respect to the sliding angle before solvent cleaning is 10% or less, particularly silane of the above formula (1) and / or its partial hydrolysis-condensation product. There is provided an antireflection filter characterized by forming an antifouling layer using.

【0022】以下、本発明につき更に詳しく説明する。
本発明のパーフルオロポリエーテル変性シランは、下記
一般式(1)で示されるものである。
The present invention will be described in more detail below.
The perfluoropolyether-modified silane of the present invention is represented by the following general formula (1).

【0023】[0023]

【化9】 (式中、Rfは二価の直鎖型パーフルオロポリエーテル
基、Rは炭素数1〜4のアルキル基又はフェニル基、X
は加水分解性基、nは0〜2、mは1〜5の整数、aは
2又は3である。)
[Chemical 9] (In the formula, Rf represents a divalent linear perfluoropolyether group, R represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, X
Is a hydrolyzable group, n is 0 to 2, m is an integer of 1 to 5, and a is 2 or 3. )

【0024】ここで、Rfは、二価の直鎖型パーフルオ
ロポリエーテル基であり、各種鎖長のパーフルオロポリ
エーテル基が含まれるが、好ましくは炭素数1〜4程度
のパーフルオロポリエーテル基を繰返し単位とする二価
の直鎖型パーフルオロポリエーテルである。この二価の
直鎖型パーフルオロポリエーテルとしては、例えば、以
下に示すようなものが挙げられる。 −CF2CF2O(CF2CF2CF2O)kCF2CF2− −CF2(OC24p−(OCF2q− 上記化学構造式中のk、p及びqはそれぞれ1以上の整
数を示す。具体的には1〜50、より好ましくは10〜
40の範囲が好ましい。なお、パーフルオロポリエーテ
ルの分子構造は、これら例示したものに限定されるもの
ではない。
Here, Rf is a divalent linear perfluoropolyether group and includes perfluoropolyether groups of various chain lengths, but preferably perfluoropolyether having about 1 to 4 carbon atoms. It is a divalent linear perfluoropolyether having a group as a repeating unit. Examples of this divalent linear perfluoropolyether include those shown below. -CF 2 CF 2 O (CF 2 CF 2 CF 2 O) k CF 2 CF 2 - -CF 2 (OC 2 F 4) p - (OCF 2) q - k in the above structural formula, p and q are Each represents an integer of 1 or more. Specifically, 1 to 50, more preferably 10
A range of 40 is preferred. The molecular structure of perfluoropolyether is not limited to those exemplified above.

【0025】Xは加水分解性基を表す。その具体例とし
ては、メトキシ基、エトキシ基、プロポキシ基、ブトキ
シ基などのアルコキシ基、メトキシメトキシ基、メトキ
シエトキシ基などのアルコキシアルコキシ基、アセトキ
シ基などのアシロキシ基、イソプロペノキシ基などのア
ルケニルオキシ基、クロル基、ブロモ基、ヨード基など
のハロゲン基などが挙げられる。中でもアルコキシ基、
アルケニルオキシ基等のオルガノオキシ基、クロル基が
好ましく、特にメトキシ基、エトキシ基、イソプロペノ
キシ基、クロル基が好ましい。
X represents a hydrolyzable group. Specific examples thereof include methoxy group, ethoxy group, propoxy group, alkoxy group such as butoxy group, methoxymethoxy group, alkoxyalkoxy group such as methoxyethoxy group, acyloxy group such as acetoxy group, alkenyloxy group such as isopropenoxy group, Examples thereof include halogen groups such as chloro group, bromo group and iodo group. Among them, alkoxy groups,
An organooxy group such as an alkenyloxy group and a chloro group are preferable, and a methoxy group, an ethoxy group, an isopropenoxy group and a chloro group are particularly preferable.

【0026】Rは、炭素数1〜4の低級アルキル基又は
フェニル基で、具体的にはメチル基、エチル基、フェニ
ル基などであり、中でもメチル基が好適である。nは0
〜2の整数であり、1が好ましい。また、mは1〜5の
整数であり、3が好ましい。aは2又は3であり、反応
性、基材に対する密着性の観点から、3が好ましい。
R is a lower alkyl group having 1 to 4 carbon atoms or a phenyl group, specifically, a methyl group, an ethyl group, a phenyl group and the like, among which a methyl group is preferable. n is 0
It is an integer of 2 and 1 is preferable. Further, m is an integer of 1 to 5, and 3 is preferable. a is 2 or 3, and 3 is preferable from the viewpoint of reactivity and adhesion to the substrate.

【0027】本発明のパーフルオロポリエーテル変性シ
ラン化合物の分子量は、特に制限されないが、安定性、
取扱い易さ等の点から、数平均分子量で500〜2万、
好ましくは1000〜1万のものが適当である。
The molecular weight of the perfluoropolyether-modified silane compound of the present invention is not particularly limited, but stability,
From the viewpoint of ease of handling, the number average molecular weight is 500 to 20,000,
It is preferably 1,000 to 10,000.

【0028】上記パーフルオロポリエーテル変性シラン
の具体例としては、例えば、下記構造式で示されるもの
が挙げられる。但し、下記例示に限定されるものではな
い。
Specific examples of the above perfluoropolyether-modified silane include those represented by the following structural formula. However, it is not limited to the following examples.

【0029】[0029]

【化10】 (上記式中、Lは1〜50、pは1〜50、qは1〜5
0、p+qの和は10〜100の整数であり、式中の繰
り返し単位の配列はランダムである。)これらは1種単
独でも2種以上を組み合わせても使用することができ
る。
[Chemical 10] (In the above formula, L is 1 to 50, p is 1 to 50, and q is 1 to 5
The sum of 0 and p + q is an integer of 10 to 100, and the repeating unit sequence in the formula is random. ) These can be used alone or in combination of two or more.

【0030】本発明のパーフルオロポリエーテル変性シ
ランの製造方法としては、例えば、両末端にα−不飽和
結合を含有するパーフルオロポリエーテルに加水分解性
基を有するヒドロシランを、白金系触媒を用いたヒドロ
シリル化の常法より付加させる方法がある。
As the method for producing the perfluoropolyether-modified silane of the present invention, for example, a hydrosilane having a hydrolyzable group is added to a perfluoropolyether having α-unsaturated bonds at both ends and a platinum-based catalyst is used. The conventional method of hydrosilylation is available.

【0031】[0031]

【化11】 (式中、Rf、R、X、n、m及びaは前記と同じであ
る。)
[Chemical 11] (In the formula, Rf, R, X, n, m and a are the same as above.)

【0032】ここで、上記両末端にα−不飽和結合を含
有するパーフルオロポリエーテルの合成方法としては、
下記式(7)で表される両末端アルコール変性パーフル
オロポリエーテルを、K、Na、Li等のアルカリ金
属、KOH、NaOH、LiOH等のアルカリ金属水酸
化物と反応させて、式(8)で表される両末端アルコラ
ート変性パーフルオロポリエーテルを生成させ、次にこ
の両末端アルコラート変性パーフルオロポリエーテルを
α−不飽和結合含有ハロゲン化物と反応させることによ
り得られる。 Rf[(CH2n−OH]2 (7) Rf[(CH2n−OM]2 (8) (式中、nは前記と同じ、Mはアルカリ金属である。)
Here, as a method for synthesizing the perfluoropolyether having an α-unsaturated bond at both ends,
A perfluoropolyether modified with alcohols at both ends represented by the following formula (7) is reacted with an alkali metal such as K, Na and Li and an alkali metal hydroxide such as KOH, NaOH and LiOH to obtain the formula (8). It is obtained by producing a perfluoropolyether modified at both ends with alcoholate modified and then reacting the perfluoropolyether modified with both ends with alcoholate with an α-unsaturated bond-containing halide. Rf [(CH 2) n -OH ] 2 (7) Rf [(CH 2) n -OM] 2 (8) ( wherein, n as defined above, M is an alkali metal.)

【0033】本発明のパーフルオロポリエーテル変性シ
ランは、分子中に特性面ではマイナス要因となり得る極
性基を全く含まないことから、撥水撥油性、防汚性、耐
薬品性、潤滑性、離型性等に優れており、各種基材表面
にコーティングすることにより表面処理剤として利用す
ることができる。また、分子の両末端に加水分解性のシ
リル基等の加水分解性基を少なくとも2個ずつ有してお
り、両末端が基材に強固に密着しているため、その効果
を長期間持続させることができる。
Since the perfluoropolyether-modified silane of the present invention contains no polar group in the molecule, which can be a negative factor in terms of characteristics, it has water and oil repellency, antifouling property, chemical resistance, lubricity and release property. It has excellent moldability and can be used as a surface treatment agent by coating the surface of various substrates. Further, at least two hydrolyzable groups such as hydrolyzable silyl groups are provided at both ends of the molecule, and both ends are firmly adhered to the base material, so that the effect is maintained for a long time. be able to.

【0034】この機能を利用した応用例として、次のよ
うなものが挙げられる。 撥水撥油剤…紙・布・金属・ガラス・プラスチック・セ
ラミックなど、 離型剤…粘着テープ用・樹脂成形用金型・ロール用な
ど、 防汚加工剤…紙・布・金属・ガラス・プラスチック・セ
ラミックなど、 その他…塗料添加剤、樹脂改質剤、無機質充填材の流動
性・分散性を改質、テープ・フィルムなどの潤滑性の向
上など。
The following are examples of applications using this function. Water- and oil-repellent agent: Paper, cloth, metal, glass, plastic, ceramic, etc. Release agent: For adhesive tape, resin molding dies, rolls, etc. Antifouling agent: Paper, cloth, metal, glass, plastic・ Ceramics, etc. Others: improving the fluidity and dispersibility of paint additives, resin modifiers, inorganic fillers, and improving the lubricity of tapes and films.

【0035】本発明のパーフルオロポリエーテル変性シ
ランは、表面処理剤として好適に用いられ、反射防止フ
ィルターの表面に硬化被膜を形成することができる。本
発明の表面処理剤は、本発明の式(1)に示すパーフル
オロポリエーテル変性シラン及び/又はその部分加水分
解縮合物を主成分とする。
The perfluoropolyether-modified silane of the present invention is preferably used as a surface treatment agent and can form a cured film on the surface of an antireflection filter. The surface treating agent of the present invention contains, as a main component, the perfluoropolyether-modified silane represented by the formula (1) of the present invention and / or its partial hydrolysis-condensation product.

【0036】この表面処理剤には、必要に応じてオルガ
ノオキシシラン加水分解縮合触媒を添加してもよい。オ
ルガノオキシシラン加水分解縮合触媒としては、ジブチ
ル錫ジメトキシド、ジラウリン酸ジブチル錫などの有機
錫化合物、テトラn−ブチルチタネートなどの有機チタ
ン化合物、酢酸、メタンスルホン酸などの有機酸、塩
酸、硫酸などの無機酸が挙げられる。特に酢酸、テトラ
n−ブチルチタネート、ジラウリン酸ジブチル錫などが
好ましい。添加量は通常の触媒量であり、パーフルオロ
ポリエーテル変性シラン及び/又はその部分加水分解縮
合物100重量部に対して0.01〜5重量部が好まし
く、特に0.1〜1重量部が好ましい。
If desired, an organooxysilane hydrolysis condensation catalyst may be added to this surface treatment agent. Examples of the organooxysilane hydrolysis condensation catalyst include organic tin compounds such as dibutyltin dimethoxide and dibutyltin dilaurate, organic titanium compounds such as tetra n-butyl titanate, organic acids such as acetic acid and methanesulfonic acid, hydrochloric acid and sulfuric acid. Inorganic acids may be mentioned. In particular, acetic acid, tetra-n-butyl titanate, dibutyltin dilaurate and the like are preferable. The addition amount is a usual amount of catalyst, preferably 0.01 to 5 parts by weight, and particularly preferably 0.1 to 1 part by weight, based on 100 parts by weight of perfluoropolyether-modified silane and / or its partial hydrolysis-condensation product. preferable.

【0037】また、本発明の処理剤は、パーフルオロポ
リエーテル変性シラン及び/又はその部分加水分解縮合
物をそのまま使用してもよいが、適当な溶剤で希釈して
用いてもよい。溶剤は2種以上の混合溶剤でもよく、パ
ーフルオロポリエーテル変性シラン及び/又はその部分
加水分解縮合物を、均一に溶解させるものが望ましい。
In the treating agent of the present invention, the perfluoropolyether-modified silane and / or its partial hydrolysis-condensation product may be used as it is, or may be diluted with an appropriate solvent. The solvent may be a mixed solvent of two or more kinds, and it is desirable that the perfluoropolyether-modified silane and / or its partial hydrolysis-condensation product be uniformly dissolved.

【0038】溶剤としては、パーフルオロヘプタン、パ
ーフルオロオクタンなどのフッ素変性脂肪族炭化水素系
溶剤、m−キシレンヘキサフロライド、ベンゾトリフロ
ライドなどのフッ素変性芳香族炭化水素系溶剤、メチル
パーフルオロブチルエーテル、パーフルオロ(2−ブチ
ルテトラヒドロフラン)などのフッ素変性エーテル系溶
剤、パーフルオロトリブチルアミン、パーフルオロトリ
ペンチルアミンなどのフッ素変性アルキルアミン系溶
剤、石油ベンジン、ミネラルスピリッツ、トルエン、キ
シレンなどの炭化水素系溶剤、アセトン、メチルエチル
ケトン、メチルイソブチルケトンなどのケトン系溶剤が
挙げられる。溶解性、濡れ性などの点で、フッ素変性さ
れた溶剤が好ましく、特に、m−キシレンヘキサフロラ
イド、パーフルオロ(2−ブチルテトラヒドロフラ
ン)、パーフルオロトリブチルアミンが好ましい。
Examples of the solvent include fluorine-modified aliphatic hydrocarbon solvents such as perfluoroheptane and perfluorooctane, fluorine-modified aromatic hydrocarbon solvents such as m-xylene hexafluoride and benzotrifluoride, and methyl perfluoro. Fluorine-modified ether solvents such as butyl ether and perfluoro (2-butyltetrahydrofuran), fluorine-modified alkylamine solvents such as perfluorotributylamine and perfluorotripentylamine, hydrocarbons such as petroleum benzine, mineral spirits, toluene and xylene. Examples of the solvent include ketone solvents such as acetone, methyl ethyl ketone, and methyl isobutyl ketone. From the viewpoint of solubility and wettability, a fluorine-modified solvent is preferable, and m-xylene hexafluoride, perfluoro (2-butyltetrahydrofuran), and perfluorotributylamine are particularly preferable.

【0039】被膜を形成する方法としては、刷毛塗り、
ディッピング、スプレー、蒸着処理など公知の方法で処
理できる。処理温度は、処理方法によって最適な温度は
異なるが、例えば刷毛塗りやディッピングの場合は、室
温から120℃の範囲が好ましい。処理湿度は、加湿下
で行うことが反応を促進する上で好ましいが、使用する
シラン化合物や他の添加剤によってその都度最適化する
ことが好ましい。
As a method for forming a film, brush coating,
It can be processed by a known method such as dipping, spraying or vapor deposition. The optimum treatment temperature varies depending on the treatment method, but in the case of brush coating or dipping, for example, the range of room temperature to 120 ° C. is preferable. The treatment humidity is preferably performed under humidification in order to accelerate the reaction, but it is preferable to optimize the treatment humidity depending on the silane compound and other additives used.

【0040】被膜を形成する基材としては、紙、布、金
属及びその酸化物、ガラス、プラスチック、陶磁器、セ
ラミックなど各種材質のものを用いることができる。
As the base material for forming the film, various materials such as paper, cloth, metal and its oxide, glass, plastic, ceramics and ceramics can be used.

【0041】ここで、硬化被膜を表面に形成する物品と
しては、めがねレンズ、反射防止フィルターなど光学部
材(指紋、皮脂付着防止コーティング)、浴槽、洗面台
のようなサニタリー製品(撥水、防汚コーティング)、
自動車、電車、航空機などの窓ガラス、ヘッドランプカ
バーなど(防汚コーティング)、外壁用建材(撥水、防
汚コーティング)、台所用建材(油汚れ防止用コーティ
ング)、電話ボックス(撥水、防汚及び貼り紙防止コー
ティング)、美術品など(撥水・撥油性、及び指紋付着
防止付与のコーティング)、コンパクトディスク、DV
D(指紋付着防止コーティング)などが好ましい。特
に、レンズ、フィルターなどの光学部材に被膜を形成
し、反射防止性、防汚性などを付与するには本発明の表
面処理剤は好適である。
Here, as the article on which the cured film is formed on the surface, there are sanitary products (water repellent and antifouling) such as spectacle lenses, antireflection filters, optical members (fingerprint and sebum adhesion preventing coating), bathtubs and wash basins. coating),
Window glass for automobiles, trains, aircraft, etc., headlight covers, etc. (antifouling coating), building materials for outer walls (water repellent, antifouling coating), building materials for kitchen (oil antifouling coating), telephone boxes (water repellent, antifouling) Anti-staining and sticking paper coating), works of art (water- and oil-repellent coating to prevent fingerprints from sticking), compact discs, DV
D (fingerprint adhesion preventing coating) and the like are preferable. In particular, the surface treatment agent of the present invention is suitable for forming a coating film on an optical member such as a lens and a filter to impart antireflection property, antifouling property and the like.

【0042】本発明は、更に反射防止フィルター、特に
上記式(1)のパーフルオロポリエーテル変性シラン及
び/又はその部分加水分解縮合物の硬化被膜を表面に有
する反射防止フィルターを提供する。この場合、本発明
の反射防止フィルターは、表面層として二酸化ケイ素系
無機層を有する反射防止層の表面に防汚層を形成したも
ので、前記防汚層として、オレイン酸に対する転落角が
5°以下であり、且つ、溶剤洗浄前の転落角に対する溶
剤洗浄後の転落角の変化率が10%以下であるものを使
用することを特徴とする。
The present invention further provides an antireflection filter, particularly an antireflection filter having a cured coating of the perfluoropolyether-modified silane of the above formula (1) and / or its partial hydrolysis-condensation product on its surface. In this case, the antireflection filter of the present invention has an antifouling layer formed on the surface of an antireflection layer having a silicon dioxide-based inorganic layer as a surface layer, and the antifouling layer has a sliding angle of 5 ° with respect to oleic acid. It is characterized in that the change rate of the falling angle after the solvent cleaning is 10% or less with respect to the falling angle before the solvent cleaning.

【0043】ここで、防汚層は、オレイン酸に対する転
落角が5°以下、好ましくは3°以下であり、且つ、溶
剤洗浄前の転落角に対する溶剤洗浄後の転落角の変化率
が10%以下、好ましくは5%以下である。オレイン酸
に対する転落角が5°より大きいと、汚染防止性に乏し
く、特に指紋等が付着し易く、また汚染の拭き取り性に
乏しくなり、また拭き取りの際の表面での滑り性に乏し
い場合がある。
Here, the antifouling layer has a sliding angle with respect to oleic acid of 5 ° or less, preferably 3 ° or less, and a change rate of the sliding angle after solvent cleaning with respect to the sliding angle before solvent cleaning is 10%. It is preferably 5% or less. When the sliding angle with respect to oleic acid is larger than 5 °, the anti-staining property is poor, especially fingerprints and the like are apt to be attached, the stain-wiping property is poor, and the slipperiness on the surface during wiping may be poor. .

【0044】溶剤洗浄前の転落角Aに対する溶剤洗浄後
の転落角Bの変化率[(B−A)/A]×100が10
%を超えると、汚染防止性及び指紋拭き取り性に関し
て、耐久性に乏しい場合がある。なお、オレイン酸に対
する転落角は、通常用いられる接触角計で測定する。ま
た、溶剤洗浄は、該当溶剤中に5分間浸漬後、軽く掛流
す方法で行ない、溶剤は通常の洗浄で用いられるもので
よく、例えば、HCFC−225、ノナフルオロブチル
メチルエーテル等が挙げられる。
The change rate [(B−A) / A] × 100 of the falling angle B after solvent cleaning with respect to the falling angle A before solvent cleaning is 10
If it exceeds%, the durability may be poor in terms of anti-staining property and wipeability of fingerprints. The falling angle with respect to oleic acid is measured with a contact angle meter that is usually used. The solvent washing may be carried out by dipping in the corresponding solvent for 5 minutes and then gently pouring, and the solvent may be one used in ordinary washing, and examples thereof include HCFC-225 and nonafluorobutyl methyl ether.

【0045】また、防汚層の粘着テープに対する接着力
及び溶剤洗浄後の防汚層の粘着テープに対する接着力が
それぞれそれぞれ0.2N/19mm以下であることが
好ましい。防汚層の粘着テープに対する接着力が0.2
N/19mmより大きいと、指紋拭き取り性に乏しい場
合がある。防汚層の粘着テープに対する接着力は、防汚
層表面にポリエステル粘着テープで、引張試験機を用い
て180°の角度で剥離速度300mm/minで測定
する。
The adhesive strength of the antifouling layer to the adhesive tape and the adhesive strength of the antifouling layer after solvent cleaning to the adhesive tape are preferably 0.2 N / 19 mm or less, respectively. The adhesive strength of the antifouling layer to the adhesive tape is 0.2
If it is larger than N / 19 mm, the fingerprint wiping property may be poor. The adhesive strength of the antifouling layer to the adhesive tape is measured with a polyester adhesive tape on the surface of the antifouling layer using a tensile tester at an angle of 180 ° and a peeling speed of 300 mm / min.

【0046】この場合、防汚層は、パーフルオロポリエ
ーテル変性シランを用いて形成されることが好ましく、
特に前述と同様の下記一般式(1)で示されるパーフル
オロポリエーテル変性シラン又はその部分加水分解物の
硬化皮膜が好ましい。
In this case, the antifouling layer is preferably formed using perfluoropolyether-modified silane,
In particular, a cured film of perfluoropolyether-modified silane represented by the following general formula (1) or a partially hydrolyzed product thereof as described above is preferable.

【化12】 (式中、Rfは二価の直鎖型パーフルオロポリエーテル
基、Rは炭素数1〜4のアルキル基又はフェニル基、X
は加水分解性基、nは0〜2、mは1〜5の整数、aは
2又は3である。)
[Chemical 12] (In the formula, Rf represents a divalent linear perfluoropolyether group, R represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, X
Is a hydrolyzable group, n is 0 to 2, m is an integer of 1 to 5, and a is 2 or 3. )

【0047】防汚層を形成する方法としては、刷毛塗
り、ディッピング、スプレー、蒸着処理など公知の方法
の処理が挙げられる。処理温度は、処理方法によって最
適な温度は異なり、例えば刷毛塗りやディッピングの場
合は、室温から120℃の範囲が好ましい。処理湿度
は、加湿下で行うことが反応を促進する上で好ましい
が、使用するシラン化合物や他の添加剤によって処理条
件は異なるため、その都度最適化することが好ましい。
Examples of the method for forming the antifouling layer include known methods such as brush coating, dipping, spraying and vapor deposition. The optimum treatment temperature varies depending on the treatment method. For example, in the case of brushing or dipping, the treatment temperature is preferably in the range of room temperature to 120 ° C. The treatment humidity is preferably performed under humidification in order to accelerate the reaction, but the treatment conditions are different depending on the silane compound and other additives used, and therefore it is preferable to optimize each time.

【0048】この様な塗布作業において、パーフルオロ
ポリエーテル変性シランをそのまま使用してもよいが、
適当な溶剤で希釈して用いてもよい。溶剤は2種以上の
混合溶媒でもよく、パーフルオロポリエーテル変性シラ
ンを均一に溶解させるものが好ましい。
In such a coating operation, the perfluoropolyether-modified silane may be used as it is,
You may dilute with a suitable solvent and may use it. The solvent may be a mixed solvent of two or more kinds, and one in which the perfluoropolyether-modified silane is uniformly dissolved is preferable.

【0049】溶剤としては、上記した溶剤と同様のもの
を使用することができる。また、更に必要に応じて、上
記したものと同様のオルガノオキシシラン加水分解縮合
触媒を添加してもよい。
As the solvent, the same solvents as those mentioned above can be used. Further, if necessary, the same organooxysilane hydrolysis condensation catalyst as described above may be added.

【0050】なお、防汚層の膜厚は、適宜選定される
が、通常0.1nm〜5μm、特に1〜100nmが好
ましい。
The thickness of the antifouling layer is appropriately selected, but is usually 0.1 nm to 5 μm, and particularly preferably 1 to 100 nm.

【0051】本発明の反射防止フィルターは、表面層と
して二酸化ケイ素系無機層を有する無機系反射防止層の
表面層上に上記のように防汚層を形成する反射防止フィ
ルターであるが、この場合、無機系反射防止層は、支持
基材上に直接又はハードコート層等の中間層を介して設
けることが好ましい。図1,2は、これを示すもので、
図中1は支持基材、2は中間層、3は無機系反射防止
層、4は防汚層である。
The antireflection filter of the present invention is an antireflection filter in which an antifouling layer is formed on the surface layer of an inorganic antireflection layer having a silicon dioxide inorganic layer as a surface layer as described above. The inorganic antireflection layer is preferably provided directly on the supporting substrate or via an intermediate layer such as a hard coat layer. Figures 1 and 2 show this,
In the figure, 1 is a supporting substrate, 2 is an intermediate layer, 3 is an inorganic antireflection layer, and 4 is an antifouling layer.

【0052】ここで、無機系反射防止層は、実質的な反
射防止機能を担う部分であり、本発明においては、単層
構造又は複層構造の適宜な構造とすることができるが、
反射防止膜の表面層は二酸化ケイ素系無機層である。
Here, the inorganic antireflection layer is a portion having a substantial antireflection function, and in the present invention, it may have an appropriate structure of a single layer structure or a multilayer structure.
The surface layer of the antireflection film is a silicon dioxide-based inorganic layer.

【0053】従って、無機系反射防止層としては、例え
ば特開昭58−46301号公報、特開昭59−495
01号公報や特開昭58−50401号公報、特開平1
−294709号公報や特公平6−5324号公報など
に基く従来技術の如く、従来に準じた構造の反射防止層
として形成することができる。
Therefore, as the inorganic antireflection layer, for example, JP-A-58-46301 and JP-A-59-495 are used.
No. 01, No. 58-50401, and No. 1
It can be formed as an antireflection layer having a structure according to the prior art, as in the prior art based on JP-A-294709 and JP-B-6-5324.

【0054】反射防止層は、反射防止効果等の点より、
複層構造とすることが好ましく、特に、表面層の二酸化
ケイ素系無機層よりも高い屈折率の層を1層又は2層以
上内在させた複層構造とすることが好ましい。その場
合、各層の厚さや屈折率の設定等については、公知技術
に準じることができる。
The antireflection layer is, from the viewpoint of antireflection effect and the like,
A multi-layer structure is preferable, and a multi-layer structure in which one or more layers having a higher refractive index than the silicon dioxide-based inorganic layer of the surface layer is contained is particularly preferable. In that case, the thickness of each layer, the setting of the refractive index, and the like can be based on known techniques.

【0055】無機系反射防止層の形成には、無機酸化
物、無機ハロゲン化物、それらの複合物等よりなる無機
物を用いることができる。その具体例としては、SiO
2、ZrO2、Al23、Y23、TiO2等の無機酸化
物、MgF2、BaF2、CaF 2、LaF2、LiF、N
aF、SrF2等の無機ハロゲン化物などが代表例とし
て挙げられる。
To form the inorganic antireflection layer, an inorganic oxide is used.
Substance, inorganic halide, inorganic compound composed of these
A thing can be used. As a specific example, SiO
2, ZrO2, Al2O3, Y2O3, TiO2Inorganic oxidation such as
Thing, MgF2, BaF2, CaF 2, LaF2, LiF, N
aF, SrF2Typical examples include inorganic halides such as
Can be mentioned.

【0056】反射防止層を形成する無機物は、下記の形
成方法などに応じてその1種又は2種以上が固体物、あ
るいはバインダー用ポリマー等と混合した分散液などの
適宜の状態で用いられるが、その場合、無機物を30重
量%以上含有する組成で用いることが、硬度や耐汚染性
などの点より好ましい。なお、バインダー用ポリマーと
しては、適宜のポリマーを用いることができ、特に限定
はないが、硬度等の点より、ポリオルガノシロキサンを
形成しうる各種の有機ケイ素化合物やその加水分解物な
どが好ましい。
The inorganic material for forming the antireflection layer is used in an appropriate state such as a solid material or a dispersion liquid in which one or more kinds thereof are mixed with a polymer for a binder or the like according to the following forming method. In that case, it is preferable to use a composition containing 30% by weight or more of an inorganic substance in terms of hardness and stain resistance. An appropriate polymer can be used as the binder polymer, and it is not particularly limited, but from the viewpoint of hardness and the like, various organosilicon compounds capable of forming polyorganosiloxane and hydrolysates thereof are preferable.

【0057】無機系反射防止層の形成は、例えば真空蒸
着法、スパッタリング法、イオンプレーティング法等で
代表される各種のPVD(Phisical Vapo
rDeposition)法、あるいはスピンコート
法、浸漬コート法、カーテンフローコート法、ロールコ
ート法、スプレーコート法、流し塗り法等で代表される
流体塗布法などの適宜な薄膜形成法にて行うことができ
る。
The inorganic antireflection layer is formed by various types of PVD (Physical Vapo) represented by, for example, a vacuum deposition method, a sputtering method, an ion plating method and the like.
rDeposition) method, or an appropriate thin film forming method such as a spin coating method, a dip coating method, a curtain flow coating method, a roll coating method, a spray coating method, or a fluid coating method typified by a flow coating method. .

【0058】PVD法には、上記に例示したSiO2
の無機酸化物やMgF2等の無機ハロゲン化物などが好
ましく用いられ、特に表面層となる二酸化ケイ素系無機
層は、表面硬度の高さや防汚層の密着性などの点より、
PVD法により二酸化ケイ素を主成分として含有する層
に形成したものが好ましい。
[0058] The PVD method, such as inorganic halides such as inorganic oxides and MgF 2 of SiO 2 or the like exemplified above are preferably used, particularly the surface layer to become silicon dioxide-based inorganic layer, Ya height of the surface hardness From the viewpoint of adhesion of the antifouling layer,
What was formed in the layer containing silicon dioxide as a main component by the PVD method is preferable.

【0059】また、無機系反射防止層には、帯電による
ゴミ等の付着を防止するために静電気の除去効果や電磁
波のシールド効果も発揮する導電層を含ませてもよい。
かかる導電層は、例えば金、銀、アルミニウム等の金属
薄膜、酸化スズ、酸化インジウム、それらの混合物(I
TO)等の無機酸化物薄膜などからなる透明導電膜とし
て形成される。可視領域では、光の吸収が極めて少ない
無機酸化物系の透明導電膜が特に好ましい。
In addition, the inorganic antireflection layer may include a conductive layer which also exhibits a static electricity removing effect and an electromagnetic wave shielding effect in order to prevent adhesion of dust and the like due to charging.
Such a conductive layer may be, for example, a metal thin film of gold, silver, aluminum or the like, tin oxide, indium oxide, or a mixture thereof (I
It is formed as a transparent conductive film made of an inorganic oxide thin film such as TO). In the visible region, an inorganic oxide-based transparent conductive film that absorbs very little light is particularly preferable.

【0060】一方、支持基材としては適宜なものを用い
てよく、特に限定はないが、液状コーティング法等で反
射防止膜を形成する場合などには、ガラスやプラスチッ
クからなる支持基材が好ましく用いられる。なお、図で
は、支持基材1の片面に無機系反射防止層3を設けてな
る反射防止フィルターを例示したが、支持基材1の片面
又は両面に無機系反射防止層3を設けてもよい。
On the other hand, as the supporting base material, any suitable material may be used, but it is not particularly limited, but when forming an antireflection film by a liquid coating method or the like, a supporting base material made of glass or plastic is preferable. Used. In addition, in the figure, the antireflection filter formed by providing the inorganic antireflection layer 3 on one surface of the supporting substrate 1 is illustrated, but the inorganic antireflection layer 3 may be provided on one surface or both surfaces of the supporting substrate 1. .

【0061】支持基材がガラス基材の場合には、反射防
止層にMgF2やCaF2等の低屈折率を示すものを含ま
せることが、高い反射効果を得る点などより好ましい。
またプラスチック基材の場合には、反射防止層にSiO
2のような屈折率が比較的低くて硬度の高いものを含ま
せることが、耐久性などの点より好ましい。プラスチッ
クの例としては、例えば、アクリル系樹脂、ジエチレン
グリコールビスアリルカーボネート樹脂、ポリカーボネ
ート系樹脂、ポリエチレンテレフタレートや不飽和ポリ
エステル等のポリエステル系樹脂、トリアセチルセルロ
ース等のアセテート系樹脂、スチレン系樹脂、ポリ塩化
ビニル系樹脂などが挙げられる。
When the supporting base material is a glass base material, it is preferable that the antireflection layer contains a material having a low refractive index such as MgF 2 or CaF 2 in order to obtain a high reflection effect.
In the case of a plastic substrate, the antireflection layer is made of SiO 2.
It is preferable from the standpoint of durability etc. to include a material such as 2 having a relatively low refractive index and high hardness. Examples of plastics include acrylic resins, diethylene glycol bisallyl carbonate resins, polycarbonate resins, polyester resins such as polyethylene terephthalate and unsaturated polyester, acetate resins such as triacetyl cellulose, styrene resins, polyvinyl chloride. Examples include resin.

【0062】支持基材は、フィルム、シート及び板等の
適宜な形態を有するものであってよく、その厚さは任意
である。また支持基材は、中間層としてハードコート層
を有するものであってもよい。この場合には、図2に例
示のように、反射防止層3と支持基材1の間にハードコ
ート層2を有する形態の反射防止フィルターとなる。
The supporting base material may have a suitable form such as a film, a sheet and a plate, and its thickness is arbitrary. Further, the supporting base material may have a hard coat layer as an intermediate layer. In this case, as shown in FIG. 2, the antireflection filter has a form having the hard coat layer 2 between the antireflection layer 3 and the supporting substrate 1.

【0063】ハードコート層も従来に準じて形成するこ
とができる。例えば、有機ケイ素化合物、特に下記一般
式(9)で示される有機ケイ素化合物やその部分加水分
解縮合物の硬化物からなるハードコート層が好ましい。 R9 f10 gSi(OR114-f-g (9) (式中、R9、R10はアルキル基、アルケニル基、アリ
ール基、又はハロゲン基、エポキシ基、グリシドキシ
基、アミノ基、メルカプト基、メタクリルオキシ基、シ
アノ基等を有する炭化水素基などであり、R11は炭素数
1〜8のアルキル基、アルコキシアルキル基、アシル
基、又はアリール基などである。f、gは0又は1であ
り、f+gは、0,1又は2である。)
The hard coat layer can also be formed in a conventional manner. For example, a hard coat layer made of an organic silicon compound, particularly a cured product of an organic silicon compound represented by the following general formula (9) or a partially hydrolyzed condensate thereof is preferable. R 9 f R 10 g Si (OR 11 ) 4-fg (9) (In the formula, R 9 and R 10 are an alkyl group, an alkenyl group, an aryl group, or a halogen group, an epoxy group, a glycidoxy group, an amino group, and a mercapto. Group, a methacryloxy group, a hydrocarbon group having a cyano group, etc., R 11 is an alkyl group having 1 to 8 carbon atoms, an alkoxyalkyl group, an acyl group, an aryl group, etc. f and g are 0 or 1 and f + g is 0, 1 or 2.)

【0064】ハードコート層は、例えばゾル−ゲル法な
どにより平均粒径が0.5〜5μmのシリカや金属酸化
物などの微粒子を含有させる方法、あるいはバフ、コロ
ナ放電、イオンエッチングの如き適宜な方法で、中心線
平均粗さが0.01〜0.5μmの凹凸表面とする方式
などにより、防眩機能を有するものとして付設すること
もできる。
The hard coat layer is formed by a method of containing fine particles such as silica or metal oxide having an average particle diameter of 0.5 to 5 μm by a sol-gel method, or an appropriate method such as buffing, corona discharge or ion etching. It can also be attached as a method having an antiglare function by a method of forming an uneven surface having a center line average roughness of 0.01 to 0.5 μm.

【0065】更に、支持基材は、中間層として、ハード
コート層に代えて、あるいはハードコート層と共に、例
えば反射防止膜の密着性、硬度や耐薬品性、耐久性や染
色性等の向上などを目的に、適宜なコート層を有した
り、表面処理されたものなどであってもよい。
Further, the supporting base material may be used as an intermediate layer, instead of or together with the hard coat layer, for example, improvement of adhesion, hardness, chemical resistance, durability, dyeability, etc. of the antireflection film. For this purpose, it may have an appropriate coat layer or may be surface-treated.

【0066】なお、硬度の向上には、特公昭50−28
092号公報、特公昭50−28446号公報、特公昭
50−39449号公報、特公昭51−24368号公
報、特公昭57−2735号公報や特開昭52−112
698号公報などに記載された高硬度化用の適宜な材料
を用いうる。また、チタン、アルミニウム、スズ等の金
属又はケイ素の酸化物をコーティングする方法や、(メ
タ)アクリル酸のペンタエリトリトール等による架橋体
などのアクリル系架橋体の付設なども硬度の向上に有効
である。
Incidentally, in order to improve the hardness, Japanese Patent Publication No. 50-28
092, Japanese Patent Publication No. 50-28446, Japanese Patent Publication No. 50-39449, Japanese Patent Publication No. 51-24368, Japanese Patent Publication No. 57-2735 and Japanese Patent Publication No. 52-112.
Appropriate materials for increasing the hardness described in Japanese Patent No. 698 can be used. Further, a method of coating an oxide of a metal such as titanium, aluminum, tin or the like or a silicon oxide, and addition of an acrylic crosslinked product such as a crosslinked product of pentamethyrritol of (meth) acrylic acid, etc. are also effective for improving hardness. .

【0067】[0067]

【実施例】以下、合成例、実施例及び比較例を示し、本
発明を具体的に説明するが、本発明は下記の実施例に制
限されるものではない。なお、下記の例において部は重
量部を示す。
EXAMPLES The present invention will be specifically described below with reference to synthesis examples, examples and comparative examples, but the present invention is not limited to the following examples. In the following examples, parts are parts by weight.

【0068】[合成例]下記式(10)で表される両末
端にα−不飽和結合を有するパーフルオロポリエーテル
160g、メタキシレンヘキサフロライド80gと塩化
白金酸をCH2=CH−Si(CH32OSi(CH3
2−CH=CH2で変性した触媒0.1gに70℃乾燥エ
アー雰囲気下でトリメトキシシラン15gを滴下し、8
時間撹拌反応させた後、溶媒を留去したところ、下記式
(11)で示される無色透明の液体165g(粘度:4
5.5cSt、比重:1.730、屈折率:1.30
5)が得られた。
[Synthesis Example] 160 g of perfluoropolyether having α-unsaturated bonds at both ends represented by the following formula (10), 80 g of metaxylene hexafluoride and chloroplatinic acid were converted into CH 2 ═CH—Si ( CH 3) 2 OSi (CH 3 )
Was added dropwise trimethoxysilane 15g at 70 ° C. Drying under air atmosphere 2 -CH = CH 2 modified with catalyst 0.1 g, 8
After stirring and reacting for a period of time, the solvent was distilled off. As a result, 165 g of a colorless transparent liquid represented by the following formula (11) (viscosity: 4
5.5 cSt, specific gravity: 1.730, refractive index: 1.30
5) was obtained.

【化13】 [Chemical 13]

【0069】[実施例1]PETフィルム(厚さ:10
0μm)基材上に、シリカゾル135重量部、γ−グリ
シドキシプロピルトリエトキシシラン129重量部の加
水分解物、γ−クロロプロピルトリメトキシシラン70
重量部の加水分解物を主としてなるエタノール溶液に塗
布、硬化して、厚さ3μmのハードコート層を形成し
た。その上にスパッタリング方式で、SiO2層、Ti
2層、SiO2層、TiO2層、SiO 2層の5層をそれ
ぞれλ/4光学膜厚で順次積層して反射防止層を付設し
た。次に合成例で得られた上記式(11)で表される化
合物1のパーフルオロエーテル変性シラン0.2gをパ
ーフルオロ(2−ブチルテトラヒドロフラン)99.8
gに溶解させ、コーティング溶液を調製した。この処理
液を前記の反射防止層にスピンコート法で塗工し、25
℃、湿度70%の雰囲気下で24時間放置して硬化させ
防汚層を形成させた。この試料片を用いて、下記(1)
〜(3)の評価を行なった。結果を表1に示す。
[Example 1] PET film (thickness: 10
0 μm) On a substrate, 135 parts by weight of silica sol, γ-gly
Addition of 129 parts by weight of cidoxypropyltriethoxysilane
Water decomposition product, γ-chloropropyltrimethoxysilane 70
Apply 1 part by weight of hydrolyzate to the main ethanol solution.
Cloth, cured to form a hard coat layer with a thickness of 3 μm
It was On top of that, by sputtering method, SiO2Layer, Ti
O2Layer, SiO2Layer, TiO2Layer, SiO 25 layers of it
An antireflection layer is attached by sequentially stacking each with a λ / 4 optical thickness.
It was Next, the compound represented by the above formula (11) obtained in the synthesis example
Compound 1 was mixed with 0.2 g of perfluoroether-modified silane.
-Fluoro (2-butyltetrahydrofuran) 99.8
and the coating solution was prepared. This process
The liquid is applied to the antireflection layer by spin coating,
Let stand for 24 hours in an atmosphere of ℃ and 70% humidity to cure
An antifouling layer was formed. Using this sample piece, the following (1)
-(3) was evaluated. The results are shown in Table 1.

【0070】(1)表面特性の評価 転落角 接触角計(協和界面科学社製CA−A型)を用いて、直
径2mmの大きさからなるオレイン酸液滴の防汚層に対
する転落角を測定した。表面上の異なる5ヶ所にて測定
を行ない、その平均値で示した。 接着力 防汚層表面にポリエステル粘着テープ(日東電工社製N
o.31B、幅19mm)を貼り、その接着力を測定し
た。測定は引張試験機を用いて180°の角度で剥離速
度300mm/minで行った。 (2)被膜の耐久性の評価 試料片をフッ素系溶剤(旭ガラス社製AK−225)に
5分間浸漬後取出し乾燥したのち、上記測定及びで
示した方法で転落角及び接着力を測定して耐久性の評価
とした。 (3)防汚性の評価 防汚層表面に人差し指を5秒間押し当てて指紋を付着さ
せた後、その指紋を乾いた布で拭き取った時の指紋の拭
き取り易さを評価した。以下の評価基準により、被験者
5人の平均をその評価とした。指紋の拭き取り易さ ○:指紋を軽く拭き取ることができる △:指紋は拭き取りにくいが跡は残らない ×:指紋は拭き取りにくく跡も残る
(1) Evaluation of surface characteristics A sliding angle contact angle meter (CA-A type manufactured by Kyowa Interface Science Co., Ltd.) was used to measure the sliding angle of oleic acid droplets having a diameter of 2 mm with respect to the antifouling layer. did. The measurement was carried out at five different points on the surface, and the average value was shown. Adhesive strength Polyester adhesive tape (Nitto Denko N
o. 31B, width 19 mm) was applied and the adhesive force was measured. The measurement was performed using a tensile tester at an angle of 180 ° and a peeling speed of 300 mm / min. (2) Evaluation of durability of coating film A sample piece was immersed in a fluorine-based solvent (AK-225 manufactured by Asahi Glass Co., Ltd.) for 5 minutes, taken out and dried, and then the falling angle and the adhesive force were measured by the methods described above and. The durability was evaluated. (3) Evaluation of antifouling property The index finger was pressed against the surface of the antifouling layer for 5 seconds to attach the fingerprint, and the fingerprint was wiped off with a dry cloth to evaluate the ease of wiping the fingerprint. Based on the following evaluation criteria, the average of 5 subjects was used as the evaluation. Ease of wiping fingerprints ○: Fingerprints can be lightly wiped △: Fingerprints are difficult to wipe but no marks are left ×: Fingerprints are hard to wipe and marks are left

【0071】[比較例1〜3]実施例で用いた化合物1
のパーフルオロポリエーテル変性シランのかわりに、下
記化合物2〜4を用いた他は、実施例と同様の方法で評
価した。評価結果を表1に示す。
[Comparative Examples 1 to 3] Compound 1 used in Examples
Evaluation was performed in the same manner as in the example except that the following compounds 2 to 4 were used instead of the perfluoropolyether-modified silane. The evaluation results are shown in Table 1.

【0072】[0072]

【化14】 [Chemical 14]

【0073】[0073]

【表1】 [Table 1]

【0074】実施例は、比較例以上の表面特性を有し、
かつ、耐久性、指紋拭き取り性に優れている。
The example has surface characteristics superior to those of the comparative example,
Moreover, it is excellent in durability and fingerprint wipeability.

【0075】[0075]

【発明の効果】本発明におけるパーフルオロポリエーテ
ル変性シランは、分子中に特性面ではマイナス要因とな
り得る極性基を含まないことから、撥水撥油性、離型
性、耐薬品性、潤滑性、耐久性、防汚性、指紋拭き取り
性に優れており、各種基材表面にコーティングする表面
処理剤として利用することができ、硬化被膜を表面に形
成した反射防止フィルターに応用することができる。ま
た、本発明の反射防止フィルターは、汚れにくく、その
汚れを拭き取り易く、表面の滑り性が良好で傷付きにく
く、それらの性能を長期にするなどの特徴を有して、例
えばLCD等の各種の視認装置類や偏光板等の各種の光
学素子類に用いることができる。
Since the perfluoropolyether-modified silane of the present invention does not contain a polar group in the molecule, which can be a negative factor in terms of characteristics, it has water and oil repellency, releasability, chemical resistance, lubricity, It has excellent durability, antifouling property, and fingerprint wiping property, and can be used as a surface treatment agent for coating various substrate surfaces, and can be applied to an antireflection filter having a cured coating formed on the surface. Further, the antireflection filter of the present invention has features that it is hard to stain, is easy to wipe off the stain, has good surface slipperiness and is not easily scratched, and has a long-term performance thereof. Can be used for various visual devices such as the above-mentioned visual recognition devices and various optical elements such as polarizing plates.

【0076】[0076]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る反射防止フィルターの一例を示す
断面図である。
FIG. 1 is a cross-sectional view showing an example of an antireflection filter according to the present invention.

【図2】本発明に係る反射防止フィルターの他の例を示
す断面図である。
FIG. 2 is a cross-sectional view showing another example of the antireflection filter according to the present invention.

【符号の説明】[Explanation of symbols]

1 支持基材 2 中間層 3 無機系反射防止層 4 防汚層 1 Support substrate 2 Middle class 3 Inorganic antireflection layer 4 Antifouling layer

フロントページの続き (72)発明者 木下 博文 群馬県碓氷郡松井田町大字人見1番地10 信越化学工業株式会社シリコーン電子材料 技術研究所内 Fターム(参考) 2K009 AA05 AA15 BB02 BB06 BB11 CC02 CC03 CC09 CC26 CC42 DD02 DD03 DD06 EE05 4H020 BA31 4H049 VN01 VP02 VQ21 VR21 VR43 VU21 VW02 Continued front page    (72) Inventor Hirofumi Kinoshita             Gunma Prefecture Usui District, Matsuida Town             Shin-Etsu Chemical Co., Ltd. Silicone electronic materials             Inside the technical laboratory F term (reference) 2K009 AA05 AA15 BB02 BB06 BB11                       CC02 CC03 CC09 CC26 CC42                       DD02 DD03 DD06 EE05                 4H020 BA31                 4H049 VN01 VP02 VQ21 VR21 VR43                       VU21 VW02

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 下記一般式(1) 【化1】 (式中、Rfは二価の直鎖型パーフルオロポリエーテル
基、Rは炭素数1〜4のアルキル基又はフェニル基、X
は加水分解性基、nは0〜2、mは1〜5の整数、aは
2又は3である。)で示されるパーフルオロポリエーテ
ル変性シラン。
1. The following general formula (1): (In the formula, Rf represents a divalent linear perfluoropolyether group, R represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, X
Is a hydrolyzable group, n is 0 to 2, m is an integer of 1 to 5, and a is 2 or 3. ) A perfluoropolyether-modified silane represented by
【請求項2】 加水分解性基Xがオルガノオキシ基であ
ることを特徴とする請求項1記載のパーフルオロポリエ
ーテル変性シラン。
2. The perfluoropolyether-modified silane according to claim 1, wherein the hydrolyzable group X is an organooxy group.
【請求項3】 請求項1又は2記載のパーフルオロポリ
エーテル変性シラン及び/又はその部分加水分解縮合物
を主成分とする表面処理剤。
3. A surface treating agent comprising the perfluoropolyether-modified silane according to claim 1 or 2 and / or its partial hydrolysis-condensation product as a main component.
【請求項4】 表面層として二酸化ケイ素系無機層を有
する無機系反射防止層の表面層上に、オレイン酸に対す
る転落角が5°以下であり、且つ、溶剤洗浄前の転落角
に対する溶剤洗浄後の転落角の変化率が10%以下であ
る防汚層を形成したことを特徴とする反射防止フィルタ
ー。
4. A sliding angle to oleic acid of 5 ° or less on the surface layer of an inorganic antireflection layer having a silicon dioxide inorganic layer as a surface layer, and after solvent cleaning to the sliding angle before solvent cleaning. An antireflection filter formed by forming an antifouling layer having a change rate of the falling angle of 10% or less.
【請求項5】 防汚層の粘着テープに対する接着力及び
溶剤洗浄後の防汚層の粘着テープに対する接着力がそれ
ぞれ0.2N/19mm以下であることを特徴とする請
求項4記載の反射防止フィルター。
5. The antireflection according to claim 4, wherein the adhesive strength of the antifouling layer to the adhesive tape and the adhesive strength of the antifouling layer after solvent cleaning to the adhesive tape are 0.2 N / 19 mm or less, respectively. filter.
【請求項6】 防汚層が、パーフルオロポリエーテル変
性シラン及び/又はその部分加水分解縮合物を用いて形
成されることを特徴とする請求項4又は5記載の反射防
止フィルター。
6. The antireflection filter according to claim 4, wherein the antifouling layer is formed by using a perfluoropolyether-modified silane and / or a partial hydrolysis-condensation product thereof.
【請求項7】 パーフルオロポリエーテル変性シラン
が、下記一般式(1) 【化2】 (式中、Rfは二価の直鎖型パーフルオロポリエーテル
基、Rは炭素数1〜4のアルキル基又はフェニル基、X
は加水分解性基、nは0〜2、mは1〜5の整数、aは
2又は3である。)で示される化合物であることを特徴
とする請求項6記載の反射防止フィルター。
7. A perfluoropolyether-modified silane has the following general formula (1): (In the formula, Rf represents a divalent linear perfluoropolyether group, R represents an alkyl group having 1 to 4 carbon atoms or a phenyl group, X
Is a hydrolyzable group, n is 0 to 2, m is an integer of 1 to 5, and a is 2 or 3. 7. The antireflection filter according to claim 6, which is a compound represented by the formula (1).
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