JP2003232752A - Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibration - Google Patents
Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibrationInfo
- Publication number
- JP2003232752A JP2003232752A JP2002033359A JP2002033359A JP2003232752A JP 2003232752 A JP2003232752 A JP 2003232752A JP 2002033359 A JP2002033359 A JP 2002033359A JP 2002033359 A JP2002033359 A JP 2002033359A JP 2003232752 A JP2003232752 A JP 2003232752A
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- ray
- inspection apparatus
- sample
- sensitivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、透過Ｘ線の検出に
よって被検査物に含まれる異物の検出を行うＸ線異物検
査装置の感度校正方法及び前記感度校正用異物試料体に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensitivity calibration method for an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by detecting transmitted X-rays, and a foreign matter sample body for sensitivity calibration.
【０００２】[0002]
【従来の技術】従来から、食品や医薬品に含まれる異物
（金属、石、ガラス、合成樹脂、骨、ゴム等）の検出
に、Ｘ線異物検査装置が用いられている。また、前記Ｘ
線異物検査装置は、被検査物にＸ線が照射され、その透
過Ｘ線の画像デ−タに基づいて、前記被検査物に含まれ
る異物の検出を行うものである。また、前記Ｘ線異物検
査装置はラインセンサを備えることによって、搬送装置
上の被検査物の透過像を検出することができ、前記被検
査物に含まれる異物が検出されれば、搬送装置上から排
除することを行っている。2. Description of the Related Art Conventionally, an X-ray foreign substance inspection apparatus has been used to detect foreign substances (metal, stone, glass, synthetic resin, bone, rubber, etc.) contained in foods and pharmaceuticals. Also, the above X
The X-ray particle inspection apparatus irradiates an object to be inspected with X-rays, and detects an object contained in the object to be inspected based on image data of transmitted X-rays. Further, since the X-ray foreign matter inspection apparatus is provided with a line sensor, it is possible to detect a transmission image of the inspection object on the transportation apparatus, and if a foreign matter contained in the inspection object is detected, the X-ray foreign matter inspection apparatus moves on the transportation apparatus. Are going to be excluded from.
【０００３】従来のＸ線異物検査装置は、例えば搬送装
置上の被検査物を透過したＸ線をラインセンサによって
撮像し、前記撮像によって得られる画像デ−タに基づい
て、しきい値との比較判定処理を行うことで異物検出を
行っている。また、被検査物の異物検査に対して、事前
に感度校正を行っている。該感度校正の方法として、被
検査物を、前記Ｘ線異物検査装置に通してＸ線異物検査
装置の感度校正を自動で行う方法と、異物試料を混入し
た被検査物を、前記Ｘ線異物検査装置に通してＸ線異物
検査装置の感度校正を手動で行う方法がある。また、異
物試料を用いた手動の方法として、複数の異物試料を混
入させた複数の被検査物を用意して、前記複数の被検査
物毎に該被検査物をＸ線異物検査装置に通して、その都
度、感度校正を行っている。また、前記Ｘ線異物検査装
置では、使用中においてＸ線照射量の変動、その他によ
り、異物検出感度の変動が生じることがある。そこで、
使用状態の途中においても、異物試料を混入した被検査
物をＸ線異物検査装置に通して、その感度校正を行って
いる。In a conventional X-ray foreign matter inspection apparatus, for example, an X-ray transmitted through an object to be inspected on a conveying apparatus is imaged by a line sensor, and a threshold value is obtained based on the image data obtained by the imaging. The foreign matter is detected by performing the comparison determination process. Further, the sensitivity calibration is performed in advance for the foreign matter inspection of the inspection object. As the sensitivity calibration method, a method of automatically performing sensitivity calibration of the X-ray foreign matter inspection apparatus by passing the object to be inspected through the X-ray foreign matter inspection apparatus, and an object to be inspected containing a foreign matter sample There is a method of manually performing the sensitivity calibration of the X-ray foreign matter inspection device through the inspection device. Further, as a manual method using a foreign substance sample, a plurality of inspected substances in which a plurality of foreign substance samples are mixed are prepared, and the inspected substance is passed through an X-ray foreign substance inspection device for each of the plurality of inspected substances. The sensitivity is calibrated each time. Further, in the X-ray foreign matter inspection apparatus, the foreign matter detection sensitivity may vary due to variations in the X-ray irradiation dose during use. Therefore,
Even in the middle of use, the object to be inspected mixed with the foreign matter sample is passed through the X-ray foreign matter inspection apparatus and its sensitivity is calibrated.
【０００４】[0004]
【発明が解決しようとする課題】前述したように、従来
のＸ線異物検査装置では、異物試料を用いて感度校正を
手動で行う場合に、使用前と使用途中において、異物試
料毎に異物試料を被検査物に混入したものをＸ線異物検
査装置に通して、その都度、感度校正を行う必要がある
ので、校正作業に手間がかかるとともに、時間が必要と
し、効率的な校正作業が行えないという問題点がある。As described above, in the conventional X-ray foreign matter inspection apparatus, when the sensitivity calibration is manually performed using the foreign matter sample, the foreign matter sample is collected for each foreign matter sample before and during use. Since it is necessary to pass through the X-ray foreign matter inspection device what has been mixed with the object to be inspected and perform sensitivity calibration every time, it takes time and labor for the calibration work, and efficient calibration work can be performed. There is a problem that it does not exist.
【０００５】そこで、本発明は、このような従来技術の
問題点を解決し、異物試料を用いたＸ線異物検査装置の
感度校正作業を効率的に行うことができる校正方法と、
感度校正用異物試料体を提供することを目的とする。Therefore, the present invention solves the problems of the prior art, and a calibration method capable of efficiently performing a sensitivity calibration operation of an X-ray foreign matter inspection apparatus using a foreign matter sample,
An object is to provide a foreign matter sample body for sensitivity calibration.
【０００６】[0006]
【課題を解決するための手段】透過Ｘ線によって、被検
査物に含まれる異物の検出を行うＸ線異物検査装置の感
度校正方法において、第一の容積を有する異物試料と第
二の容積を有する異物試料を一組として、一体的に備え
た異物試料体に対して、Ｘ線照射し、その透過Ｘ線像の
画像デ−タに基づいて出力される、前記異物試料に対す
る異物検出信号により、前記Ｘ線異物検査装置の感度校
正を行うことを特徴とする（請求項１）。In a sensitivity calibration method of an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by transmission X-ray, a foreign matter sample having a first volume and a second volume are measured. According to the foreign matter detection signal for the foreign matter sample, which is a set of the foreign matter samples that the foreign body sample body has, is irradiated with X-rays and is output based on the image data of the transmitted X-ray image. The sensitivity calibration of the X-ray foreign matter inspection apparatus is performed (Claim 1).
【０００７】これにより、２種類の異なる容積を有する
一組の異物試料に対して、同時に異物検査し、前記各試
料毎の異物検出結果に基づいて、前記Ｘ線異物検査装置
の感度校正を行うことができ、感度校正を効率的に行う
ことが可能である。As a result, a set of two kinds of foreign matter samples having different volumes are simultaneously inspected for foreign matter, and the sensitivity of the X-ray foreign matter inspection apparatus is calibrated based on the result of foreign matter detection for each sample. Therefore, sensitivity calibration can be performed efficiently.
【０００８】そして、透過Ｘ線によって、被検査物に含
まれる異物の検出を行うＸ線異物検査装置の感度校正方
法において、それぞれ第一の容積を有する異物試料と第
二の容積を有する異物試料を一組とした、複数の異物試
料による複数の組を、さらに一体的に備えた異物試料体
に対して、Ｘ線照射し、その透過Ｘ線像の画像デ−タに
基づいて出力される、前記複数の組の異物試料に対する
異物検出信号により、前記Ｘ線異物検査装置の感度校正
を行うことを特徴とする（請求項２）。Then, in a sensitivity calibration method of an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by transmission X-ray, a foreign matter sample having a first volume and a foreign matter sample having a second volume, respectively. A plurality of sets of a plurality of foreign matter samples, each of which is a set, is irradiated with X-rays on a foreign body sample body that is integrally provided, and is output based on the image data of the transmitted X-ray image. The sensitivity calibration of the X-ray foreign matter inspection apparatus is performed based on the foreign matter detection signals for the plurality of sets of foreign matter samples (claim 2).
【０００９】これによって、さらに２種類の異なる容積
を有する異物試料を一組とした、複数の異物試料による
複数の組を、同時に異物検査し、前記複数の組の各試料
毎の異物検出結果に基づいて、前記Ｘ線異物検査装置の
感度校正を行うことができ、感度校正をより効率的に行
うことが可能である。As a result, a plurality of sets of a plurality of foreign matter samples, which are one set of foreign matter samples having two different volumes, are simultaneously inspected for a foreign matter, and a foreign matter detection result is obtained for each sample of the plurality of sets. Based on this, the sensitivity calibration of the X-ray foreign matter inspection apparatus can be performed, and the sensitivity calibration can be performed more efficiently.
【００１０】そして、請求項１及び請求項２に記載のＸ
線異物検査装置の感度校正方法について、前記異物試料
体に備えられた異物試料の組において、第一の容積を有
する異物試料は異物として検出され、第二の容積を有す
る異物試料は異物として検出されないように、前記Ｘ線
異物検査装置の感度校正を行うことを特徴とする（請求
項３）。X according to claim 1 and claim 2
Regarding a method for calibrating the sensitivity of a line foreign matter inspection apparatus, a foreign matter sample having a first volume is detected as a foreign matter and a foreign matter sample having a second volume is detected as a foreign matter in a set of foreign matter samples provided in the foreign matter sample body. The sensitivity calibration of the X-ray foreign matter inspection apparatus is performed so as not to be performed (Claim 3).
【００１１】これにより、前記異なる容積を有する異物
試料の組の内、一方の異物試料が異物検出されず、他方
の異物試料が異物検出されるように前記Ｘ線異物検査装
置の感度校正を行うことができ、感度校正をより簡便で
且つ正確に行うことが可能である。Thus, the sensitivity calibration of the X-ray foreign matter inspection apparatus is performed so that one foreign matter sample is not detected as a foreign matter and the other foreign matter sample is detected as a foreign matter in the set of foreign matter samples having different volumes. Therefore, sensitivity calibration can be performed more easily and accurately.
【００１２】さらに、透過Ｘ線によって、被検査物に含
まれる異物の検出を行うＸ線異物検査装置の感度校正用
異物試料体において、第一の容積を有する異物試料と第
二の容積を有する異物試料を一組として、一体的に備え
ることを特徴とする（請求項４）。Further, in the foreign matter sample body for sensitivity calibration of the X-ray foreign matter inspection apparatus for detecting the foreign matter contained in the inspection object by the transmitted X-ray, the foreign matter sample having the first volume and the second volume are provided. One set of foreign matter samples is integrally provided (claim 4).
【００１３】これにより、２種類の異なる容積を有する
一組の異物試料を、一体に備えた異物試料体を提供する
ことができ、これを用いて前記Ｘ線異物検査装置の感度
校正を効率的に行うことが可能である。Thus, it is possible to provide a foreign matter sample body integrally provided with a set of two kinds of foreign matter samples having different volumes, and by using this, the sensitivity calibration of the X-ray foreign matter inspection apparatus can be efficiently performed. It is possible to
【００１４】また、透過Ｘ線によって、被検査物に含ま
れる異物の検出を行うＸ線異物検査装置の感度校正用異
物試料体において、第一の容積を有する異物試料と第二
の容積を有する異物試料を一組として複数の異物試料に
よる複数の組の異物試料をさらに一体的に備えることを
特徴とする（請求項５）。Further, in the foreign matter sample body for sensitivity calibration of the X-ray foreign matter inspection apparatus for detecting the foreign matter contained in the object to be inspected by the transmitted X-ray, the foreign matter sample having the first volume and the second volume are provided. It is characterized in that a set of foreign matter samples is provided as a set, and a plurality of sets of foreign matter samples of a plurality of foreign matter samples are further integrally provided.
【００１５】これにより、２種類の異なる容積を有する
異物試料を一組とした、複数の異物試料の複数の組を一
体に備えた異物試料体を提供することができ、これを用
いて複数の異物試料に対する前記Ｘ線異物検査装置の感
度校正を効率的に行うことが可能である。Thus, it is possible to provide a foreign matter sample body that integrally includes a plurality of sets of a plurality of foreign matter samples, each of which is a set of two kinds of foreign matter samples having different volumes. It is possible to efficiently calibrate the sensitivity of the X-ray foreign matter inspection apparatus for a foreign matter sample.
【００１６】さらに、４及び請求項５に記載のＸ線異物
検査装置の感度校正用異物試料体について、前記異物試
料体に備えられた異物試料の組において、第一の容積を
有する異物試料は異物として検出され、第二の容積を有
する異物試料は異物として検出されないように、前記第
一及び第二の容積を選択することを特徴とする（請求項
６）。Further, regarding the foreign matter sample body for sensitivity calibration of the X-ray foreign matter inspection apparatus according to the fourth and fifth aspects, in the foreign matter sample group provided in the foreign matter sample body, the foreign matter sample having the first volume is The first and second volumes are selected so that a foreign matter sample detected as a foreign matter and having a second volume is not detected as a foreign matter (claim 6).
【００１７】これによって、前記異物試料の組におい
て、Ｘ線異物検査装置が許容できる容積を有する試料に
対して、異物検出しないで、許容できない容積を有する
試料に対して、異物検出するように、それぞれの異物試
料の組における試料の容積を選択しているので、これを
用いることによって、Ｘ線異物検査装置のより適正な感
度校正を行うことが可能である。Thus, in the set of foreign matter samples, the foreign matter is not detected with respect to the sample having an allowable volume by the X-ray foreign matter inspection apparatus, and the foreign matter is detected with respect to the sample having the unacceptable volume. Since the volume of the sample in each set of foreign matter samples is selected, by using this, more appropriate sensitivity calibration of the X-ray foreign matter inspection apparatus can be performed.
【００１８】[0018]
【発明の実施の形態】次に、添付図面に基づいて、本発
明の実施の形態について本発明をより詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will now be described in more detail with reference to the accompanying drawings.
【００１９】図１は、本発明の感度校正方法及び感度校
正用異物試料体を適用することができるＸ線異物検査装
置１の構成図を示す。Ｘ線異物検査装置はＸ線発生部２
とＸ線ラインセンサ４とを搬送コンベア３を挟んで対向
して配置し、Ｘ線ラインセンサ４は、Ｘ線撮像制御部５
により被検査物９の撮像を行い、Ｘ線画像処理部６は前
記撮像した透過Ｘ線を画像処理して、透過Ｘ線の画像デ
−タを生成する。また、画像デ−タは異物検出判定部７
に入力され、被検査物に含まれる異物の検出判定を行
い、結果が表示部８に表示される。 これによって被検
査物中の異物検出の有無と異物の位置を確認することが
できる。FIG. 1 is a block diagram of an X-ray foreign matter inspection apparatus 1 to which the sensitivity calibration method and the foreign matter sample body for sensitivity calibration of the present invention can be applied. The X-ray foreign matter inspection apparatus has an X-ray generation unit 2
And the X-ray line sensor 4 are arranged so as to face each other with the transport conveyor 3 interposed therebetween, and the X-ray line sensor 4 includes the X-ray imaging controller 5
The X-ray image processing unit 6 image-processes the imaged transmitted X-rays to generate image data of the transmitted X-rays. In addition, the image data is the foreign matter detection determination unit 7
Is input to the inspection object, the foreign matter contained in the inspection object is detected and determined, and the result is displayed on the display unit 8. This makes it possible to confirm the presence / absence of foreign matter detection in the inspection object and the position of the foreign matter.
【００２０】図２は、本発明の第一の実施の形態にかか
る異物試料体の外観を概略的に示す図である。図２にお
いて、１０は、複数の異物試料を一体的に備えた異物試
料体であり、１２ａ及び１３ａは例えば、金属の異物試
料による組であり、１２ａはＸ線異物検査装置により異
物検出されなくてもよい大きさ（φ０．４ｍｍ）の球に
より形成され、１３ａはＸ線異物検査装置により異物検
出されるべき大きさ（φ０．５ｍｍ）の球により形成さ
れている。また、１２ｂ及び１３ｂは例えば、石の異物
試料による組であり、１２ｂはＸ線異物検査装置により
異物検出されなくてもよい大きさ（φ１ｍｍ）の球によ
り形成され、１３ｂはＸ線異物検査装置により異物検出
されるべき大きさ（φ２ｍｍ）の球により形成されてい
る。また、１２ｃ及び１３ｃは例えば、ガラスの異物試
料による組であり、１２ｃはＸ線異物検査装置により異
物検出されなくてもよい大きさ（φ１ｍｍ）の球により
形成され、１３ｃはＸ線異物検査装置により異物検出さ
れるべき大きさ（φ２ｍｍ）の球により形成されてい
る。FIG. 2 is a view schematically showing the appearance of the foreign matter sample body according to the first embodiment of the present invention. In FIG. 2, 10 is a foreign matter sample body integrally provided with a plurality of foreign matter samples, 12a and 13a are, for example, a set of metal foreign matter samples, and 12a is not detected by the X-ray foreign matter inspection apparatus. It is formed by a sphere having a size (φ0.4 mm), and 13a is formed by a sphere having a size (φ0.5 mm) to be detected by the X-ray particle inspection apparatus. Further, 12b and 13b are, for example, a set of foreign matter samples of stone, 12b is formed by a sphere of a size (φ1 mm) that does not need to be detected by the X-ray foreign matter inspection apparatus, and 13b is an X-ray foreign matter inspection apparatus. It is formed by a sphere having a size (φ2 mm) to be detected by the foreign material. Further, 12c and 13c are, for example, a set of glass foreign matter samples, 12c is formed by a sphere of a size (φ1 mm) that does not need to be detected by the X-ray foreign matter inspection apparatus, and 13c is an X-ray foreign matter inspection apparatus. It is formed by a sphere having a size (φ2 mm) to be detected by the foreign material.
【００２１】また、１２ｄ及び１３ｄは例えば、高密度
合成樹脂の異物試料による組であり、１２ｄはＸ線異物
検査装置により異物検出されなくてもよい大きさ（□１
ｍｍ）の立方体により形成され、１３ｄはＸ線異物検査
装置により異物検出されるべき大きさ（□２ｍｍ）の立
方体により形成されている。さらに１２ｅ及び１３ｅは
例えば、高密度ゴムの異物試料による組であり、１２ｅ
はＸ線異物検査装置により異物検出されなくてもよい大
きさ（□１ｍｍ）の立方体により形成され、１３ｅはＸ
線異物検査装置により異物検出されるべき大きさ（□２
ｍｍ）の立方体により形成されている。前記各異物試料
は前記異物試料体の基材１１に固定または埋め込まれて
いる。また、その他にも、硬骨、貝殻、卵の殻等の異物
試料も備えることができる。また、前記複数の異物試料
による組は異物試料体の基材１１に列を形成して配設さ
れている。前記基材１１は、前記異物試料とはできるだ
け密度の異なる低密度の材質のものが適しており、例え
ば低密度樹脂を採用することができる。また、形状は図
２に示すような板状のものの他にシ−ト状に形成しても
よい。Further, 12d and 13d are, for example, a set of foreign matter samples of high-density synthetic resin, and 12d is a size (□ 1) where foreign matter may not be detected by the X-ray foreign matter inspection apparatus.
mm), and 13d is a cube having a size (.quadrature.2 mm) to be detected by the X-ray particle inspection apparatus. Furthermore, 12e and 13e are, for example, a set of foreign matter samples of high-density rubber.
Is formed by a cube having a size (□ 1 mm) that does not need to be detected by the X-ray particle inspection device, and 13e is X
The size (□ 2
mm) cubes. Each foreign matter sample is fixed or embedded in the base material 11 of the foreign matter sample body. In addition, foreign matter samples such as bones, shells and egg shells can also be provided. The sets of the plurality of foreign matter samples are arranged in rows on the base material 11 of the foreign matter sample body. The base material 11 is preferably made of a low-density material whose density is as different as possible from the foreign material sample, and for example, a low-density resin can be adopted. Further, the shape may be a sheet shape other than the plate shape as shown in FIG.
【００２２】さらに、前記異物試料体１０は、例えば図
３に示すように、被検査物９に添えて、搬送コンベア３
上に載置して搬送され、異物検査が行われる。続いて、
図４に示すようにＸ線異物検査装置１の画像モニタに
て、前記被検査物の透過Ｘ線デ−タに基づく解析画像１
４を見て、前記被検査物に添えられた、前記異物試料体
１０に備えられた各異物試料の組について、その異物検
出の有無と異物の位置を確認する。前記異物検出結果に
基づいて、複数の異物試料の組毎に、検出されなくても
よい試料と、検出されるべき試料が、異物検出が正しく
行われているかどうかの判断を行い、異物検出が正しく
行われていないときには、異物検出が正しく行われるよ
うにＸ線異物検査装置の感度調整を行う。また、図４
は、異物試料体１０の複数の試料毎に容積の大きい方の
試料に対して、適正に異物検出されたことをしめしてい
る。続いて、前記感度調整後に再度、前記異物試料体１
０が備えられた前記異物検査物をＸ線異物検査装置に通
して、異物検出結果の確認を行う。図４は、異物試料体
１０の複数の試料毎に容積の大きい方の試料に対して、
適正に異物検出されたことを示している。また、Ｘ線異
物検査装置の感度調整には、Ｘ線照射用の管球の管電圧
や管電流による調整方法及び異物検出のしきい値の調整
方法等がある。Further, the foreign matter sample body 10 is attached to the object 9 to be inspected, as shown in FIG.
It is placed on top and transported, and a foreign matter inspection is performed. continue,
As shown in FIG. 4, an analysis image 1 based on the transmitted X-ray data of the inspection object is displayed on the image monitor of the X-ray foreign matter inspection apparatus 1.
4, the presence or absence of foreign matter detection and the position of the foreign matter are confirmed for each set of foreign matter samples included in the foreign matter sample body 10 attached to the object to be inspected. Based on the foreign matter detection result, for each group of a plurality of foreign matter samples, it is determined whether the foreign matter detection is properly performed between the sample that may not be detected and the sample that should be detected, and the foreign matter detection is performed. If the foreign matter is not correctly detected, the sensitivity of the X-ray foreign matter inspection apparatus is adjusted so that the foreign matter is correctly detected. Also, FIG.
Indicates that, for each of the plurality of samples of the foreign matter sample body 10, the foreign matter is properly detected for the sample having the larger volume. Subsequently, after the sensitivity adjustment, the foreign matter sample body 1 is again provided.
The foreign matter inspection object provided with 0 is passed through an X-ray foreign matter inspection device to confirm the foreign matter detection result. FIG. 4 shows a sample having a larger volume for each of a plurality of samples of the foreign matter sample body 10,
This indicates that the foreign matter is properly detected. For adjusting the sensitivity of the X-ray foreign matter inspection apparatus, there are a method of adjusting the tube voltage and the tube current of a tube for X-ray irradiation, a method of adjusting a threshold value for foreign object detection, and the like.
【００２３】[0023]
【発明の効果】以上のように、本発明によれば、Ｘ線異
物検査装置において、２種類の異なる容積を有する異物
試料の組を備える異物試料体を用いて、異物検査した結
果に基づいて、前記Ｘ線異物検査装置の感度校正を行う
ことができ、感度校正をより簡便且つ効率的に行うこと
が可能である。As described above, according to the present invention, in the X-ray foreign matter inspection apparatus, based on the result of foreign matter inspection using a foreign matter sample body provided with a set of two kinds of foreign matter samples having different volumes. The sensitivity calibration of the X-ray foreign matter inspection apparatus can be performed, and the sensitivity calibration can be performed more easily and efficiently.
【図１】 本発明の感度校正方法及び感度校正用異物試
料体を適用することができるＸ線異物検査装置の構成図
である。FIG. 1 is a configuration diagram of an X-ray foreign matter inspection apparatus to which a sensitivity calibration method and a foreign matter sample body for sensitivity calibration of the present invention can be applied.
【図２】 本発明の感度校正用異物試料体の外観を概略
的に示す図である。FIG. 2 is a diagram schematically showing the external appearance of a foreign matter sample body for sensitivity calibration of the present invention.
【図３】 本発明の感度校正用異物試料体の使用例を
概略的に示す図である。FIG. 3 is a diagram schematically showing an example of use of the foreign matter sample body for sensitivity calibration of the present invention.
【図４】 本発明の感度校正方法及び感度校正用異物試
料体を適用することができるＸ線異物検査装置の解析画
像を示す図である。FIG. 4 is a diagram showing an analysis image of an X-ray foreign matter inspection apparatus to which the sensitivity calibration method and the foreign matter sample body for sensitivity calibration of the present invention can be applied.
１ Ｘ線異物検査装置
２ Ｘ線発生部
３ 搬送コンベア
４ Ｘ線ラインセンサ
５ Ｘ線撮像制御部
６ Ｘ線画像処理部
７ 異物検出判定部
８ 表示部
９ 被検査物
１０ Ｘ線異物試料体
１１ Ｘ線異物試料体の基材
１２ａ〜１２ｅ 異物試料
１３ａ〜１３ｅ 異物試料
１３ａ’〜１３ｅ’ 異物試料１３ａ〜１３ｅの異物検
出分析画像
１４ Ｘ線異物検査の解析画像DESCRIPTION OF SYMBOLS 1 X-ray foreign matter inspection device 2 X-ray generation unit 3 Conveyor 4 X-ray line sensor 5 X-ray imaging control unit 6 X-ray image processing unit 7 Foreign matter detection determination unit 8 Display unit 9 Inspected object 10 X-ray foreign matter sample body 11 Base material 12a to 12e of X-ray foreign matter sample body Foreign matter sample 13a to 13e Foreign matter sample 13a 'to 13e' Foreign matter detection analysis image 14 of foreign matter sample 13a to 13e Analysis image of X-ray foreign matter inspection
Claims (6)
異物の検出を行うＸ線異物検査装置の感度校正方法にお
いて、第一の容積を有する異物試料と第二の容積を有す
る異物試料を一組として、一体的に備えた異物試料体に
対して、Ｘ線照射し、その透過Ｘ線像の画像デ−タに基
づいて出力される、前記異物試料に対する異物検出信号
により、前記Ｘ線異物検査装置の感度校正を行うことを
特徴とするＸ線異物検査装置の感度校正方法。1. A method for calibrating a sensitivity of an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by transmission X-ray, wherein a foreign matter sample having a first volume and a foreign matter sample having a second volume are used. As a set, the foreign matter sample body integrally provided is irradiated with X-rays, and the foreign matter detection signal for the foreign matter sample is output based on the image data of the transmitted X-ray image. A method for calibrating the sensitivity of an X-ray foreign matter inspection apparatus, which comprises calibrating the sensitivity of a foreign matter inspection apparatus.
異物の検出を行うＸ線異物検査装置の感度校正方法にお
いて、それぞれ第一の容積を有する異物試料と第二の容
積を有する異物試料を一組とした、複数の異物試料によ
る複数の組を、さらに一体的に備えた異物試料体に対し
て、Ｘ線照射し、その透過Ｘ線像の画像デ−タに基づい
て出力される、前記複数の組の異物試料に対する異物検
出信号により、前記Ｘ線異物検査装置の感度校正を行う
ことを特徴とするＸ線異物検査装置の感度校正方法。2. A foreign matter sample having a first volume and a foreign matter sample having a second volume, respectively, in a sensitivity calibration method of an X-ray foreign matter inspection apparatus for detecting a foreign matter contained in an object to be inspected by transmission X-ray. A plurality of sets of a plurality of foreign matter samples, each of which is a set, is irradiated with X-rays on a foreign body sample body that is integrally provided, and is output based on the image data of the transmitted X-ray image. A sensitivity calibration method for an X-ray foreign matter inspection apparatus, wherein the sensitivity calibration of the X-ray foreign matter inspection apparatus is performed by foreign matter detection signals for the plurality of sets of foreign matter samples.
組において、第一の容積を有する異物試料は異物として
検出され、第二の容積を有する異物試料は異物として検
出されないように、前記Ｘ線異物検査装置の感度校正を
行うことを特徴とする請求項１及び請求項２に記載のＸ
線異物検査装置の感度校正方法。3. In the set of foreign matter samples provided in the foreign matter sample body, the foreign matter sample having a first volume is detected as a foreign matter, and the foreign matter sample having a second volume is not detected as a foreign matter. The X according to claim 1 or 2, wherein sensitivity calibration of the X-ray foreign matter inspection apparatus is performed.
Sensitivity calibration method for wire foreign matter inspection equipment.
異物の検出を行うＸ線異物検査装置の感度校正用異物試
料体において、第一の容積を有する異物試料と第二の容
積を有する異物試料を一組として、一体的に備えること
を特徴とするＸ線異物検査装置の感度校正用異物試料
体。4. A foreign matter sample body for sensitivity calibration of an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by transmission X-ray, comprising a foreign matter sample having a first volume and a second volume. A foreign matter sample body for sensitivity calibration of an X-ray foreign matter inspection apparatus, characterized in that the foreign matter sample is integrally provided as a set.
異物の検出を行うＸ線異物検査装置の感度校正用異物試
料体において、第一の容積を有する異物試料と第二の容
積を有する異物試料を一組として複数の異物試料による
複数の組の異物試料をさらに一体的に備えることを特徴
とするＸ線異物検査装置の感度校正用異物試料体。5. A foreign matter sample body for sensitivity calibration of an X-ray foreign matter inspection apparatus for detecting foreign matter contained in an object to be inspected by transmission X-ray, comprising a foreign matter sample having a first volume and a second volume. A foreign matter sample body for sensitivity calibration of an X-ray foreign matter inspection apparatus, wherein a plurality of foreign matter samples of a plurality of foreign matter samples are integrally provided as one set of foreign matter samples.
組において、第一の容積を有する異物試料は異物として
検出され、第二の容積を有する異物試料は異物として検
出されないように、前記第一及び第二の容積を選択する
ことを特徴とする請求項４及び請求項５に記載のＸ線異
物検査装置の感度校正用異物試料体。6. In the set of foreign matter samples provided in the foreign matter sample body, a foreign matter sample having a first volume is detected as a foreign matter, and a foreign matter sample having a second volume is not detected as a foreign matter. The foreign matter sample body for sensitivity calibration of the X-ray foreign matter inspection apparatus according to claim 4 or 5, wherein the first and second volumes are selected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002033359A JP2003232752A (en) | 2002-02-12 | 2002-02-12 | Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002033359A JP2003232752A (en) | 2002-02-12 | 2002-02-12 | Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003232752A true JP2003232752A (en) | 2003-08-22 |
Family
ID=27776177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002033359A Pending JP2003232752A (en) | 2002-02-12 | 2002-02-12 | Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibration |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003232752A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1760458A1 (en) * | 2004-06-24 | 2007-03-07 | Anritsu Industrial Solutions Co.,Ltd. | X-ray detection device for foreign matter |
| JPWO2006001107A1 (en) * | 2004-06-24 | 2007-08-02 | 株式会社イシダ | X-ray inspection apparatus and method for generating image processing procedure of X-ray inspection apparatus |
| JP2008224346A (en) * | 2007-03-12 | 2008-09-25 | Ishida Co Ltd | X-ray inspection device and production system |
| JP2011520094A (en) * | 2008-03-14 | 2011-07-14 | チェイニー・デザイン・アンド・ディベロップメント・リミテッド | Test equipment |
| JP2012137387A (en) * | 2010-12-27 | 2012-07-19 | Anritsu Sanki System Co Ltd | X-ray inspection device |
| JP2014126534A (en) * | 2012-12-27 | 2014-07-07 | Kao Corp | Detecting method of absorptivity polymer |
| CN110954562A (en) * | 2019-11-25 | 2020-04-03 | 上海微现检测设备有限公司 | X-ray foreign matter detection method and system |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124037A (en) * | 1979-03-19 | 1980-09-24 | Toshiba Corp | Test chart for x-ray photograph evaluation |
| JPS5628742A (en) * | 1979-08-20 | 1981-03-20 | Tokyo Shibaura Electric Co | Measuring instrument for xxray device for diagnosis |
| JPS6041952A (en) * | 1983-08-19 | 1985-03-05 | 株式会社東芝 | X-ray phantom |
| JPS63222247A (en) * | 1987-03-11 | 1988-09-16 | Hitachi Medical Corp | Correction of image distortion |
| JPH06233193A (en) * | 1993-01-29 | 1994-08-19 | Toshiba Corp | Fluoroscope |
| JPH0743320A (en) * | 1993-03-15 | 1995-02-14 | Hitachi Ltd | X-ray inspection method and its system, and inspection method for prepreg and production of multi-layer wiring board |
| JPH09164131A (en) * | 1995-11-06 | 1997-06-24 | Siemens Ag | Roentgenology device with digital picture device |
| JP2001004560A (en) * | 1999-06-16 | 2001-01-12 | Shimadzu Corp | X-ray inspecting device |
| JP2002022675A (en) * | 2000-07-03 | 2002-01-23 | Ishida Co Ltd | X-ray article inspection device and method, and article used therein |
-
2002
- 2002-02-12 JP JP2002033359A patent/JP2003232752A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124037A (en) * | 1979-03-19 | 1980-09-24 | Toshiba Corp | Test chart for x-ray photograph evaluation |
| JPS5628742A (en) * | 1979-08-20 | 1981-03-20 | Tokyo Shibaura Electric Co | Measuring instrument for xxray device for diagnosis |
| JPS6041952A (en) * | 1983-08-19 | 1985-03-05 | 株式会社東芝 | X-ray phantom |
| JPS63222247A (en) * | 1987-03-11 | 1988-09-16 | Hitachi Medical Corp | Correction of image distortion |
| JPH06233193A (en) * | 1993-01-29 | 1994-08-19 | Toshiba Corp | Fluoroscope |
| JPH0743320A (en) * | 1993-03-15 | 1995-02-14 | Hitachi Ltd | X-ray inspection method and its system, and inspection method for prepreg and production of multi-layer wiring board |
| JPH09164131A (en) * | 1995-11-06 | 1997-06-24 | Siemens Ag | Roentgenology device with digital picture device |
| JP2001004560A (en) * | 1999-06-16 | 2001-01-12 | Shimadzu Corp | X-ray inspecting device |
| JP2002022675A (en) * | 2000-07-03 | 2002-01-23 | Ishida Co Ltd | X-ray article inspection device and method, and article used therein |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1760458A1 (en) * | 2004-06-24 | 2007-03-07 | Anritsu Industrial Solutions Co.,Ltd. | X-ray detection device for foreign matter |
| JPWO2006001107A1 (en) * | 2004-06-24 | 2007-08-02 | 株式会社イシダ | X-ray inspection apparatus and method for generating image processing procedure of X-ray inspection apparatus |
| US7570787B2 (en) | 2004-06-24 | 2009-08-04 | Ishida Co., Ltd. | X-ray inspection apparatus and method for creating an image processing procedure for the X-ray inspection apparatus |
| EP1760458A4 (en) * | 2004-06-24 | 2013-11-13 | Anritsu Ind Solutions Co Ltd | X-ray detection device for foreign matter |
| JP2008224346A (en) * | 2007-03-12 | 2008-09-25 | Ishida Co Ltd | X-ray inspection device and production system |
| JP2011520094A (en) * | 2008-03-14 | 2011-07-14 | チェイニー・デザイン・アンド・ディベロップメント・リミテッド | Test equipment |
| EP2265904B1 (en) * | 2008-03-14 | 2019-02-27 | Cheyney Design & Development Limited | Test apparatus |
| JP2012137387A (en) * | 2010-12-27 | 2012-07-19 | Anritsu Sanki System Co Ltd | X-ray inspection device |
| JP2014126534A (en) * | 2012-12-27 | 2014-07-07 | Kao Corp | Detecting method of absorptivity polymer |
| CN110954562A (en) * | 2019-11-25 | 2020-04-03 | 上海微现检测设备有限公司 | X-ray foreign matter detection method and system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2010055728A1 (en) | Radioactive ray detecting appratus, radioactive image acquiring system, and radioactive ray detecting method | |
| MY146449A (en) | Apparatus and method for quick imaging and inspecting moving target | |
| TW201018902A (en) | Radiation detection device, radiation image acquisition system, radiation inspection system, and radiation detection method | |
| KR20090034920A (en) | X-ray inspecting device, and x-ray inspecting program | |
| JP2007195966A (en) | Method and apparatus for tomosynthesis image quality control | |
| JP2003232752A (en) | Calibration method for sensitivity of x-ray foreign matter inspection apparatus and foreign matter sample body for sensitivity calibration | |
| JP3715524B2 (en) | X-ray foreign object detection device | |
| JP2002168805A (en) | X-ray foreign matter detector | |
| JP4902170B2 (en) | Inspection system | |
| JP2004125715A (en) | Method and apparatus for calibrating sensitivity of x-ray foreign matter inspection instrument | |
| JP4906602B2 (en) | Defect inspection apparatus and defect inspection method for polycrystalline silicon substrate | |
| JP2010230559A (en) | X-ray inspection apparatus | |
| JP2011085518A (en) | X-ray inspection apparatus | |
| JP2009080030A (en) | X-ray inspection device | |
| JP2004239753A (en) | X-ray foreign substance inspection apparatus | |
| JP2010139425A (en) | X-ray inspection apparatus | |
| JP4491602B2 (en) | X-ray inspection equipment | |
| JP6385058B2 (en) | Fat mass testing equipment | |
| JPH1019813A (en) | Method and device for automatically selecting vegetables and fruits using nuclear magnetic resonance | |
| JPH1026592A (en) | X-ray type foreign matter inspecting apparatus | |
| JPH10318951A (en) | Apparatus for inspection of wood by nuclear magnetic resonance and x-ray | |
| JP3682587B2 (en) | X-ray foreign substance inspection apparatus and determination parameter setting apparatus for X-ray foreign substance inspection apparatus | |
| JP2002243668A (en) | X-ray foreign-body detection apparatus | |
| JP4156645B2 (en) | X-ray foreign object detection device | |
| JP2016090494A (en) | X-ray inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050120 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060926 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061010 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070227 |