JP2003157973A - Manufacturing method and manufacturing apparatus of organic electroluminescence device, and manufacturing system and manufacturing method of display device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To promptly manufacture an organic EL device at low costs by forming a film with short tact time and low material costs. SOLUTION: For the purpose of manufacturing the organic electroluminescence device formed by successively laminating a plurality of layers on a substrate, the plurality of layers are laminated on the position of the substrate 2 to be deposited, by changing relative position of the substrate 2 to be deposited, against respective evaporation sources 142a-142d, by making the substrate sequentially pass through the position facing a plurality of evaporation sources 142a-142d arranged in a row.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an organic electroluminescence device (organic electroluminescence device; hereinafter referred to as “organic EL device”).
Element)) manufacturing method and manufacturing apparatus, and organic E
The present invention relates to a manufacturing system and a manufacturing method of a display device using an L element.

[0002]

2. Description of the Related Art Recently, organic flat panel display devices have been used as organic display devices.
A device in which an L element is used as a light emitting element (hereinafter referred to as “organic EL display”) has been attracting attention. This organic EL display is a self-luminous flat panel display that does not require a backlight, and has an advantage that a display having a wide viewing angle, which is peculiar to the self-luminous type, can be realized. In addition, since only the necessary pixels need to be turned on, it is advantageous in terms of power consumption compared to the backlight type (such as a liquid crystal display), and high-definition, high-speed video signals that are expected to be put to practical use in the future. Is considered to have a sufficient response performance.

An organic EL element used in such an organic EL display generally has a structure in which an organic material is vertically sandwiched between electrodes (anode and cathode). Then, holes are injected from the anode and electrons are injected from the cathode into the organic layer made of an organic material, and the holes and the electrons are recombined in the organic layer to emit light. At this time, in the organic EL element, several hundred to
A brightness of tens of thousands of cd / m ² can be obtained. In addition, light emission of a desired color can be obtained by appropriately selecting an organic material (fluorescent substance). From these things, organic EL
The element is very promising as a light emitting element for forming a multi-color or full-color display device.

By the way, the organic layer in the organic EL element is usually formed by laminating three to five layers such as a hole injection layer, a hole transport layer, a light emitting layer, a charge injection layer and the like.
However, the organic material forming each layer has low water resistance, and the wet process cannot be used. Therefore, when forming the organic layer, it is general that each layer is sequentially formed by vacuum vapor deposition using a vacuum thin film forming technique to form a laminated structure. Further, for example, in the case of performing full-color image display, organic layers made of three kinds of organic materials corresponding to R (red), G (green), and B (blue) color components are respectively provided at different pixel positions. Must be formed into a film. Therefore, when forming an organic layer corresponding to each color, the mask of the opening pattern corresponding to each color component is replaced one by one, or the mask of the same pattern is aligned each time, and each layer is formed for each color component. A method of patterning and depositing in sequence is used.

[0005]

However, it is conceivable that the conventional method may cause the following problems in forming the organic layer of the organic EL element.

[0006] For example, conventionally, when forming an organic layer having a laminated structure, a method of changing a vapor deposition source (type of organic material) in a vacuum chamber each time each layer is formed may be used. , In this case, three to three for each color component
It takes extra time to raise the temperature of the organic material by five times, and also requires time to stabilize the evaporation rate. Therefore, it becomes difficult to form the organic layer quickly, and as a result, it is feared that the tact time in manufacturing the organic EL element becomes difficult.

Further, conventionally, for example, a plurality of vapor deposition sources are arranged in the same vacuum chamber, and each vapor deposition source is covered with a shutter or the like which can be opened and closed. There is also a case where a method of making it possible is used. However, in this case, since it takes several tens of minutes to stably maintain the temperature of the organic material of each layer, even if the organic material is covered with a shutter or the like and is not used for film formation, the evaporation rate is stabilized. It consumes a lot until you let it do. In other words, when the selective film formation is performed, the organic material is wasted, which may increase the cost of the organic EL element due to the increase of the material consumption.

Further, it is conceivable that each layer is formed in a different vacuum chamber, that is, one vacuum chamber and one organic material are made to correspond to each other. As a result, many vacuum chambers are required, which causes difficulties in terms of equipment cost and installation space.

Therefore, the present invention enables a film formation with a short tact time and a small material consumption amount, thereby enabling an organic EL element to be manufactured rapidly and at low cost. An object of the present invention is to provide a device, a display device manufacturing system and a manufacturing method using the organic EL element.

[0010]

The present invention is a method for manufacturing an organic EL element devised to achieve the above object, which is a method for manufacturing an organic EL element in which a plurality of layers are sequentially laminated on a substrate. That is, the relative positions of the substrate and the plurality of vapor deposition sources are changed so as to sequentially pass through the positions facing the plurality of vapor deposition sources arranged in parallel, and the film formation location on the substrate is It is characterized by stacking a plurality of layers.

Further, the present invention is an apparatus for manufacturing an organic EL element devised to achieve the above object, for manufacturing an organic EL element in which a plurality of layers are sequentially laminated on a substrate. A plurality of vapor deposition sources corresponding to the plurality of layers are arranged side by side, and the substrate and the plurality of vapor deposition sources are arranged such that the deposition target portion on the substrate sequentially passes through a position facing the plurality of vapor deposition sources. Is provided with a transporting means for varying the relative position with respect to the vapor deposition source.

Further, the present invention is a manufacturing system of a display device using an organic EL element devised to achieve the above object, which is an organic EL device in which a plurality of layers are sequentially laminated on a substrate.
For manufacturing a display device using an element,
A plurality of vapor deposition sources corresponding to the plurality of layers are arranged side by side, and the substrate and the plurality of vapor depositions are arranged so that a film formation location on the substrate sequentially passes through a position facing the plurality of vapor deposition sources. A plurality of organic EL element manufacturing apparatuses provided with a conveying means for varying the relative position to the source, and each manufacturing apparatus is configured to form an organic EL element corresponding to a different color component. It is what

Further, the present invention is a method of manufacturing a display device using an organic EL element devised to achieve the above object, wherein the organic EL element is formed by sequentially laminating a plurality of layers on a substrate. A method of manufacturing a display device, wherein the relative positions of the substrate and the plurality of vapor deposition sources are changed so that the substrates pass through positions facing the plurality of vapor deposition sources arranged in parallel in order, and the target on the substrate is changed. A plurality of layers are stacked on the substrate by forming the organic EL element corresponding to one color component by stacking the plurality of layers at the film forming location and repeating the formation a plurality of times at different deposition locations on the substrate. The display device is configured by arranging each organic EL element corresponding to the color component of.

According to the method for manufacturing an organic EL element and the apparatus for manufacturing an organic EL element having the above-described procedure, the film formation location on the substrate sequentially passes through the position where the substrate faces each vapor deposition source. Each time, film formation is performed using the vapor deposition material from each vapor deposition source. That is, after the substrate has passed through the positions facing the respective vapor deposition sources, a plurality of layers are sequentially stacked at the film formation location on the substrate. Therefore, when depositing a plurality of layers on a substrate, preparation for processing (temperature rise, stabilization of vapor deposition rate, etc.) for each vapor deposition source can be performed almost simultaneously, and even in that case, the vapor deposition material from each vapor deposition source It will be used for film formation without waste.

Further, according to the display device manufacturing system having the above structure and the display device manufacturing method having the above procedure, as in the case of the organic EL element manufacturing method and the organic EL element manufacturing apparatus having the above structure, An organic EL element in which a plurality of layers are sequentially laminated is formed, and this is repeated for a plurality of color components. Therefore, even when configuring a display device in which a plurality of organic EL elements are arranged on a substrate, it becomes possible to continuously form each organic EL element, and furthermore, each organic EL element is formed. It is possible to realize film processing preparation and efficient consumption of vapor deposition materials.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION A method for manufacturing a film and a manufacturing apparatus for an organic EL element and a manufacturing system and a method for a display device using an organic electroluminescent element according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing a schematic configuration example of a manufacturing apparatus according to the present invention, FIG. 2 is a schematic diagram showing a configuration example of a main part thereof, and FIG. 3 is an organic E manufactured by the manufacturing apparatus.
FIG. 4 is a schematic diagram showing a schematic configuration example of an L element, and FIG.
FIG. 5 is a schematic diagram showing a schematic configuration example of a carrying jig used when manufacturing an element, and FIG. 5 is a schematic diagram showing a configuration example of a manufacturing system using the manufacturing apparatus according to the present invention.

First, a schematic structure of the organic EL element will be briefly described. As shown in FIG. 3, the organic EL element 1 manufactured in this embodiment is formed on a glass substrate 2 for forming an organic EL display, and includes a plurality of organic layers 1a made of different materials.
1d are sequentially laminated. Note that, here, the case where the number of layers to be laminated is four is given as an example, but the number of layers is not limited to this.

Although not shown in the figure, a plurality of organic EL elements 1 corresponding to respective color components of R, G, B are arranged on the glass substrate 2 in a matrix form in a matrix in a matrix according to a predetermined pattern. There is. The difference between the organic EL elements 1 lies in the organic material (fluorescent substance) forming the organic layers 1a to 1d. Accordingly, in the organic EL display including the glass substrate 2 and the organic EL elements 1, it is possible to selectively generate light having a predetermined wavelength in each organic EL element and display a color image. It becomes.

The arrangement of each organic EL element 1 for displaying such a color image is, for example, each organic EL element 1 by patterning film formation corresponding to each color component of R, G, B.
Can be realized by forming Here, a schematic configuration of a transfer jig used for patterning film formation will be described. As shown in FIG. 4, the patterning film formation is performed using a metal mask 3 formed in a flat plate shape and made of a ferromagnetic material such as iron (Fe) or nickel (Ni). The metal mask 3 is provided with a plurality of openings 3a corresponding to a predetermined film formation pattern. Then, while being adhered to the glass substrate 2 so as to cover the one surface side of the glass substrate 2 which is the film formation target, the glass substrate 2 is fixed by the magnetic force generated by the electromagnet 4 arranged on the other surface side of the glass substrate 2. It has become. With the integrated transport jig configured in this way,
It is possible to form a predetermined pattern of film on the glass substrate 2, and to prepare a plurality of types of metal masks 3 to form a multi-layered film of different patterns. As a result, a plurality of organic EL elements 1 can be formed. It is possible to arrange them vertically and horizontally.

Next, a manufacturing system for forming the organic EL element 1 on the glass substrate 2 by using the above-described transport jig to form an organic EL display will be described. The manufacturing system described in the present embodiment configures an organic EL display capable of displaying a color image,
This is for performing patterning film formation corresponding to each color component of R, G, B to arrange a plurality of organic EL elements 1 vertically and horizontally on the glass substrate 2.

Therefore, as shown in FIG. 5, the manufacturing system described in this embodiment is roughly classified into a substrate supply unit 11 to which the glass substrate 2 is supplied from the outside, and a cleaning for the glass substrate 2. A pretreatment unit 12 that performs pretreatment such as activation and activation, an R color alignment unit 13r that performs alignment corresponding to R color (positioning and fixing of the glass substrate 2 and the metal mask 3), and an R color correspondence unit An R-color film forming unit 14r that performs patterning film formation, a G-color alignment unit 13g that performs alignment corresponding to G color, and a G-color alignment unit 13g.
G-color film forming unit 14g for performing patterning film formation corresponding to color
And a B-color alignment section 13b for performing alignment corresponding to B-color, a B-color film forming section 14b for performing patterning film-forming corresponding to B-color, and post-processing such as separation of the glass substrate 2 and the metal mask 3 from each other. The post-processing unit 15 to be performed and the glass substrate 2
A return section 16 for supplying the metal mask 3 and the like separated from the R color alignment section 13r, and a substrate discharge section 17 for discharging the glass substrate 2 after the organic EL element 1 corresponding to each color is formed by patterning film formation. It consists of and.

Among these units 11 to 17, R color film forming unit 14r, G color film forming unit 14g and B color film forming unit 14b.
Corresponds to the organic EL element manufacturing apparatus described in the present embodiment. That is, the R-color film forming unit 14r and the G-color film forming unit 14
The g and B color film forming portions 14b are configured to form the organic EL element 1 corresponding to the respective R, G, and B color components.

Between the R-color alignment section 13r and the post-processing section 15, the glass substrate 2 is handled in a state in which the metal mask 3 and the electromagnet 4 constitute an integral carrying jig. Therefore, the glass substrate 2,
The transfer jig composed of the metal mask 3 and the electromagnet 4 is R
Color film forming unit 14r, G color film forming unit 14g, and B color film forming unit 1
4b will be passed in order.

Further, the R color film forming section 14r and the G color film forming section 14 are provided.
Since the R-color alignment section 13r, the G-color alignment section 13g, and the B-color alignment section 13b are arranged in front of the g- and B-color film forming sections 14b, respectively,
Alignment in different states (patterning film formation)
It is possible to correspond to. These parts 11 to 17
The transfer of the glass substrate 2 or the transfer jig between them, alignment adjustment, and the like are performed by using a well-known handling robot, a transfer conveyor, or the like, though the description thereof is omitted here.

Further, each of these parts 11 to 17 forms a closed loop structure due to the presence of the return part 16. As a result, the metal mask 3 and the electromagnet 4 that form the transport jig have the R-color film forming unit 14r and the G-color film forming unit 14r.
g, the B-color film forming unit 14b and the return unit 16 are circulated. Specifically, the R-color film forming unit 14r, the G-color film forming unit 14g, the B-color film forming unit 14b, and the return unit 16 are connected to the R-color alignment unit 13r, the G-color alignment unit 13g, the B-color alignment unit 13b, and the rear unit. It is arranged in a rectangular shape with the processing unit 15 as the apex. However, the closed loop structure does not necessarily have to be rectangular. For example, the R color alignment unit 13 arranged in a straight line
It is also conceivable to construct a closed loop structure by disposing the return section 16 along the r, G color alignment section 13g and the B color alignment section 13b.

Next, a manufacturing apparatus for the organic EL element used in the above manufacturing system, that is, the R color film forming section 1
Details of the 4r, G-color film forming unit 14g, and B-color film forming unit 14b will be described with reference to FIGS. 1 and 2.

As shown in FIG. 1, the R color film forming portions 14r, G
The color film forming unit 14g and the B color film forming unit 14b (hereinafter, simply referred to as “element manufacturing apparatus”) each include a vacuum chamber 141 and a plurality of vapor deposition sources 142a arranged in parallel in the vacuum chamber 141. To 142d, a transfer means 143 for varying the relative positions of the glass substrate 2 and the vapor deposition sources 142a to 142d, and an inlet and an outlet of an integrated transfer jig into the vacuum chamber 141 (however, (Not shown), as well.

Of these, each of the vapor deposition sources 142a to 142d
Respectively correspond to the plurality of organic layers 1a to 1d formed on the glass substrate 2. For example, when the number of the organic layers 1a to 1d is four as described above, as shown in FIG. 2A, four vapor deposition sources arranged in a line along the relative position variable direction by the transport unit 143. It is conceivable that 142a to 142d are provided and different organic materials are evaporated in each. However, here, the case where the number of the vapor deposition sources 142a to 142d arranged in parallel is four is given as an example, but like the number of layers of the organic layers 1a to 1d described above, the number is not limited to this. Of course. Moreover, the number of organic layers 1a to 1d and the vapor deposition sources 142a to 14d are not always required.
The numbers in 2d do not have to match. For example, two or more vapor deposition sources for evaporating the same organic material may be provided adjacent to each other. In this case, even if the number of organic layers 1a to 1d is four, the vapor deposition sources 142a to 142d are provided. Will be five or more. That is, the organic layers 1a to 1 referred to here
The number corresponding to d includes not only the same number as the organic layers 1a to 1d but also a number larger than the organic layers 1a to 1d.

As shown in FIG. 2B, each of the vapor deposition sources 142a to 142d is formed in a linear shape extending in a direction substantially orthogonal to the direction in which the relative position of the carrying means 143 is varied. That is, each evaporation source 142a-142d
Has a vapor deposition width sufficient to cover the length of the side substantially orthogonal to the traveling direction of the glass substrate 2, and a uniform distribution of the organic material can be obtained over the entire vapor deposition width. Has become.

Further, the vapor deposition sources 142a to 142d are
For example, the organic material is evaporated by the heating of the heater 144, but an independent temperature controller 145 is connected to each of them, and each temperature controller 145 monitors the thickness of the film formation by the film thickness sensor 146. The vapor deposition rate of is kept stable. That is, the vapor deposition rates of the vapor deposition sources 142a to 142d are individually controlled by the temperature controller 145 and the film thickness sensor 146. However, the control of the vapor deposition rate is not limited to that by the temperature controller 145 or the like, and separately from this or in addition to this, for example, the distance between each of the vapor deposition sources 142a to 142d and the glass substrate 2 can be individually controlled. It is also conceivable to provide a mechanism for adjusting.

It should be noted that it is desirable to provide a spare evaporation source installation space around each of the evaporation sources 142a to 142d in order to easily cope with future increase in organic layers.

In FIG. 1, the transfer means 143 moves the integrated transfer jig including the glass substrate 2 so as to change the relative positions of the glass substrate 2 and the vapor deposition sources 142a to 142d. Has become. At this time,
In the transfer means 143, it is necessary to move the transfer jig in a vacuum, and the problem of dust due to vapor deposition is taken into consideration.
A simple method is adopted, in which a trolley equipped with a transfer jig is connected to a closed wire and the wire is externally driven at a constant speed by a servo motor or the like to pull the wire, thereby realizing the movement of the transfer jig. It is possible. However, it goes without saying that a well-known transfer method using a ball screw, a belt conveyor or the like may be used as long as degassing measures are taken.

Next, an example of processing operation in the element manufacturing apparatus configured as described above, that is, the organic EL device according to the present invention.
A method of manufacturing the element will be described.

In forming the organic EL device 1 on the glass substrate 2, first, a pre-process of the device manufacturing apparatus, specifically, the R color alignment part 13r, the G color alignment part 13g or the B color alignment part 13b is performed. Thus, the precision alignment between the glass substrate 2 and the metal mask 3 is performed. This precision alignment is performed, for example, by detecting and recognizing an alignment mark that is attached in advance by image processing or the like. And after precision alignment,
The glass substrate 2 and the metal mask 3 form an integrated transfer jig through the magnetic force of the electromagnet 4, and are transferred from the carry-in port into the vacuum chamber 141 of the element manufacturing apparatus by a handling robot, a transfer conveyor, or the like.

In the vacuum chamber 141, for example, when the organic layers 1a to 1d of the materials A, B, C, and D are formed on the glass substrate 2, the vapor deposition sources 142a to 142 corresponding to these organic layers 1a to 1d are formed.
42d is arranged in the order of the materials A, B, C, D along the relative position variable direction by the transporting means 143. As described above, each of the vapor deposition sources 142a to 142d has a vapor deposition width that sufficiently covers the lateral width of the glass substrate 2 and has a uniform distribution.

Therefore, the transfer means 143 moves the integrated transfer jig transferred into the vacuum chamber 141,
The film forming portion of the glass substrate 2 that constitutes the transport jig, that is, the portion where the opening 3a of the metal mask 3 is formed,
Each evaporation source 142a in which materials A, B, C, D are arranged in this order
To 142d, the organic layers 1a to 1d are deposited in the order of the materials A, B, C, and D at the deposition target portion of the glass substrate 2 when the glass substrate 2 is sequentially passed. become. That is, the film formation of the organic layers 1a to 1d is continuously performed by the integral transport jig passing over the vapor deposition sources 142a to 142d.

At this time, each of the vapor deposition sources 142a to 142d
The vapor deposition rate is individually controlled by the temperature controller 145 and the like, according to preset settings. The vapor deposition rate is set for each organic layer 1
a to 1d film thickness ratio and each vapor deposition source 142a corresponding thereto
The ratio between the vapor deposition rate and the vapor deposition rate of 142d is equal, and the value of the vapor deposition rate after the setting is maximized.
In order to do so, the vapor deposition rate may be adjusted to the most severe heat resistance of the organic material.

Specifically, it is possible to set the vapor deposition rates of the vapor deposition sources 142a to 142d as described below. For example, in order to form the required film thicknesses of the respective organic layers 1a to 1d, when the film formation is performed at the maximum evaporation rate that can be set by the respective evaporation sources 142a to 142d, 10 minutes each,
The case where it takes 8 minutes, 12 minutes, and 5 minutes will be taken as an example. In this case, if each is the maximum evaporation rate,
Since the integral transport jig passes through the vapor deposition sources 142a to 142d at a constant speed, the organic layers 1a to 1d do not have a desired film thickness. Therefore, in this case, each evaporation source 1
The evaporation rates of 42a to 142d are the most time consuming.
According to the vapor deposition source 142c that requires 2 minutes, the organic layers 1a to 1d are set to have a desired film thickness within that time. At this time, if necessary, two or more vapor deposition sources corresponding to a certain organic layer may be provided adjacent to each other to optimize the overall vapor deposition rate.

The time required to form the required organic layers 1a to 1d depends on the vapor deposition sources 142a to 142d.
It can be specified from the vapor deposition rate of 142d and the moving speed of the integrated transfer jig. From this, each of the organic layers 1a to 1d can be controlled by controlling the moving speed of the transfer jig.
It is also possible to control the film thickness of.

In this way, each of the vapor deposition sources 142a-14a
After passing through the integrated transport jig on 2d, that is, when the organic layers 1a to 1d are continuously deposited, the transport jig after the deposition is unloaded by a handling robot or a transport conveyor. Is carried out from the vacuum chamber 141 of the element manufacturing apparatus. Then, it is sent to the element manufacturing apparatus corresponding to the next color component, and the same precision alignment and film forming processing as those described above are performed again. By repeating this, the organic EL elements 1 corresponding to the respective color components of R, G, B are arranged vertically and horizontally on the glass substrate 2.

As described above, according to the method for manufacturing the organic EL device 1 and the device manufacturing apparatus for executing the same described in the present embodiment, the plurality of vapor deposition sources 142a to 142a arranged in parallel are arranged.
The integrated transport jig including the glass substrate 2 is moved so that the organic layers 1a to 1d are sequentially laminated at the film formation locations on the glass substrate 2 so as to sequentially pass through the position facing 42d. It has become. In other words, the glass substrate 2 is located at each film formation location on the glass substrate 2 by the vapor deposition source 142a.
~ 142d, the film is formed by the vapor deposition material from each of the vapor deposition sources 142a to 142d every time it passes through the positions facing each other.

Therefore, the organic EL element 1 of the present embodiment
According to the manufacturing method and the element manufacturing apparatus of the glass substrate 2
When depositing each of the organic layers 1a to 1d on top, each vapor deposition source 1
Processing preparations (temperature rise, stabilization of vapor deposition rate, etc.) for 42a to 142d can be performed substantially at the same time. Therefore, no extra time is required to increase the temperature or stabilize the evaporation rate for each organic material, and thus it is possible to realize rapid film formation of the organic layers 1a to 1d. As a result, it is expected that the tact time in manufacturing the organic EL element 1 is improved.

Specifically, as in the case described above, for example, in order to form the film thickness of each of the organic layers 1a to 1d having a four-layer structure,
When film formation is performed at the maximum evaporation rate that can be set by each of the evaporation sources 142a to 142d, 10 minutes, 8 minutes, 12 minutes, and 5 minutes, respectively.
An example is the case where it takes time such as minutes. in this case,
The conventional method may require 10 minutes + 8 minutes + 12 minutes + 5 minutes = 35 minutes in total, but according to the manufacturing method and the element manufacturing apparatus of the present embodiment, it is necessary to adjust to the vapor deposition rate that takes the longest time. , 12 minutes + evaporation source 142a-
The passing time of the entire 142d is 8 minutes = 20 minutes in total, and as a result, it is possible to realize a tact time reduction of about 40%.

Moreover, according to the method of manufacturing the organic EL device 1 and the device manufacturing apparatus of this embodiment, each vapor deposition source 142a.
~ 142d through the glass substrate 2 in order to sequentially deposit the organic layers 1a ~ 1d, vapor deposition material from the vapor deposition sources 142a ~ 142d can be deposited without waste. Will be used. Since it is possible to improve the efficiency of the material consumption in each of the vapor deposition sources 142a to 142d and to reduce the material consumption rate similarly to the reduction of the tact time, it is possible to realize the cost reduction of the organic EL element 1 as compared with the conventional case. Can be expected.

Further, in the method of manufacturing the organic EL device 1 and the device manufacturing apparatus of this embodiment, one vacuum chamber 1 is used.
Since the plurality of organic layers 1a to 1d are continuously formed in the film 41, one vacuum chamber 141 is sufficient even when the organic layers 1a to 1d are multilayered. That is, it is possible to speed up the film forming process and improve the efficiency of material consumption without requiring many vacuum chambers. Therefore, it is possible to realize the improvement of the manufacturing tact time of the organic EL element 1 and the cost reduction without increasing the facility cost and the installation space.

Further, in the device manufacturing apparatus of this embodiment, each of the vapor deposition sources 142a to 142d is formed in a linear shape extending in a direction substantially orthogonal to the direction in which the relative position of the carrying means 143 is varied. Therefore, in the orthogonal direction, each organic layer 1
Since the film thicknesses of a to 1d are made uniform, the respective organic layers 1a to 1d
Even when the film is continuously formed, it is very easy to ensure the film thickness accuracy and the like. However, although it is desirable that each of the vapor deposition sources 142a to 142d be configured in a linear shape as described above, it is not necessarily required to be a linear shape.
For example, even if they are formed in a dot shape, if they are arranged in parallel, it is possible to improve the manufacturing tact time and reduce the cost.

Further, in the element manufacturing apparatus of this embodiment, the carrying means 143 moves the integrated carrying jig,
The relative positions of the glass substrate 2 and the vapor deposition sources 142a to 142d are made variable. Therefore, it becomes very easy to perform the relative position variable with a simple method and with high accuracy. However, it goes without saying that the vapor deposition sources 142a to 142d may be moved instead of the glass substrate 2.

Further, in the element manufacturing apparatus of this embodiment, the temperature controllers 145 and the like are provided in correspondence with the vapor deposition sources 142a to 142d, so that the vapor deposition sources 142a to 142a-1.
The vapor deposition rate can be controlled individually for each 42d. Therefore, even if the integrated transport jig passes over the vapor deposition sources 142a to 142d at a constant speed, the film thickness of each of the organic layers 1a to 1d can be formed to a desired value. Further, since it is possible to perform feedback control or the like based on the monitor result of the film thickness for each of the vapor deposition sources 142a to 142d, it is possible to further improve the accuracy of film formation.

Further, according to the organic EL display manufacturing system and the manufacturing method using the manufacturing system described in the present embodiment, the transport jig including the glass substrate 2, the metal mask 3 and the electromagnet 4 has different colors. The R-color film forming unit 14r, the G-color film forming unit 14g, and the B-color film forming unit 14b corresponding to the components are sequentially passed.
Therefore, organic EL corresponding to each color component of R, G, B
It becomes possible to continuously construct an organic EL display comprising the element 1, and at that time, each organic EL element 1
As described above, it is possible to realize the preparation of the film forming process and the efficiency of the consumption of the vapor deposition material.

Further, according to the manufacturing system of this embodiment, the R color alignment section 13r and the G color alignment section 1 are provided.
3g and the B color alignment section 13b individually perform the alignment corresponding to each color, so that the R color film forming sections 14r, G
Even when the color film forming unit 14g and the B color film forming unit 14b continuously form the organic EL element 1 of each color, it is possible to appropriately perform the patterning film formation corresponding to each color.

Further, according to the manufacturing system of this embodiment, since the closed loop structure is constructed by the presence of the return section 16, the transfer jig circulates in the closed loop. Therefore, even when the organic EL elements 1 corresponding to the respective color components are continuously formed, it is possible to realize the complete automation of the series of flows, which is very suitable for improving the efficiency of manufacturing the organic EL display. It will be

In particular, as described in the present embodiment, when the closed loop structure has a rectangular shape, the movement distance of the transfer jig by the return section 16 can be minimized, and the manufacturing system installation area is also reduced. Since space can be saved, as a result, downsizing of the system configuration and cost reduction can be easily realized.

Although the present embodiment has been described with reference to a preferred specific example for carrying out the present invention, the present invention is not limited to this and can be variously modified. That is, the material, shape, operating mechanism, and the like of the series of constituent elements that make up the element manufacturing apparatus described in the present embodiment are not necessarily limited to these, and the functions of the respective constituent elements can be similarly ensured. It can be freely changed as long as possible. Even in this case, the same effect as that of the present embodiment can be obtained. For example, in the present embodiment, the case where the organic EL element 1 is formed on the plate-shaped glass substrate 2 has been described as an example, but a roll-shaped substrate such as a film material made of a resin material may be used. , Can be handled in exactly the same way.

[0054]

As described above, according to the method and apparatus for manufacturing an organic EL element and the system and method for manufacturing a display device using the organic EL element according to the present invention, a plurality of vapor deposition sources arranged in parallel are provided. The relative positions of the substrate on which the organic EL element is formed and each vapor deposition source are changed so that the organic EL device is sequentially passed through a position facing each other, and a plurality of layers are sequentially laminated at the film formation location on the substrate. Therefore, it becomes possible to form a film with a shorter takt time and a smaller material consumption amount as compared with the conventional one, and as a result, an organic EL element can be manufactured quickly and at low cost.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a schematic configuration example of a manufacturing apparatus according to the present invention.

FIG. 2 is a schematic view showing a configuration example of a main part of the manufacturing apparatus according to the present invention, FIG. 2 (a) is a view of the main part as seen from the front,
(B) is the figure which looked at the principal part from the side.

FIG. 3 is a schematic view showing a schematic configuration example of an organic EL element manufactured by the manufacturing apparatus according to the present invention.

FIG. 4 is a schematic view showing a schematic configuration example of a carrying jig used when manufacturing an organic EL element.

FIG. 5 is a schematic diagram showing a configuration example of a manufacturing system of a display device using the organic EL element according to the present invention.

[Explanation of symbols]

1 ... Organic EL element, 1a, 1b, 1c, 1d ... Organic layer,
2 ... Glass substrate, 3 ... Metal mask, 14r ... R color film forming part, 14g ... G color film forming part, 14b ... B color film forming part, 141
... Vacuum chambers 142a, 142b, 142c, 14
2d ... Evaporation source, 143 ... Conveying means, 144 ... Heater, 1
45 ... Temperature controller, 146 ... Film thickness sensor

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yu Yamaguchi             6-735 Kita-Shinagawa, Shinagawa-ku, Tokyo Soni             -Inside the corporation F-term (reference) 3K007 AB18 DB03 FA01                 4K029 AA09 BA62 BB02 BB03 BC07                       CA01 DA12 DB14 HA03 KA01

Claims (11)

[Claims] 1. A method of manufacturing an organic electroluminescent device comprising a substrate and a plurality of layers sequentially stacked, wherein the substrate and the substrate are arranged so as to sequentially pass through a position facing a plurality of vapor deposition sources arranged in parallel. A method for manufacturing an organic electroluminescence device, characterized in that the relative positions with respect to a plurality of vapor deposition sources are varied, and the plurality of layers are laminated at a film formation location on the substrate. 2. An apparatus for manufacturing an organic electroluminescence device, which comprises a substrate and a plurality of layers sequentially stacked thereon, wherein a plurality of vapor deposition sources corresponding to the plurality of layers are arranged side by side, and on the substrate. An organic electroluminescence device is provided, which is provided with a transfer unit that changes a relative position between the substrate and the plurality of vapor deposition sources so that a deposition target position sequentially passes through a position facing the plurality of vapor deposition sources. Device manufacturing equipment. 3. The plurality of vapor deposition sources are each configured in a linear shape extending in a direction substantially orthogonal to a direction in which the relative position of the transport means is varied.
The manufacturing apparatus of the organic electroluminescent element of description. 4. The organic electroluminescent device according to claim 2, wherein the transporting means moves the substrate to change the relative positions of the substrate and the plurality of vapor deposition sources. Manufacturing equipment. 5. The apparatus for manufacturing an organic electroluminescent device according to claim 2, further comprising a control means for individually controlling a vapor deposition rate for each of the plurality of vapor deposition sources. 6. A manufacturing system of a display device using an organic electroluminescent device comprising a substrate and a plurality of layers sequentially stacked, wherein a plurality of vapor deposition sources corresponding to the plurality of layers are arranged side by side. , Organic electroluminescence provided with a transfer means for varying relative positions of the substrate and the plurality of vapor deposition sources so that a film formation portion on the substrate passes sequentially through positions facing the plurality of vapor deposition sources. A system for manufacturing a display device using an organic electroluminescent device, comprising a plurality of device manufacturing devices, each manufacturing device being configured to form an organic electroluminescent device corresponding to a different color component. 7. The organic electroluminescent element according to claim 6, wherein a mask used for patterning the substrate and a film formation portion on the substrate is configured to sequentially pass through each manufacturing apparatus. Display device manufacturing system used. 8. A display device using an organic electroluminescence device according to claim 7, wherein an alignment device for aligning the substrate and the mask is arranged in front of each manufacturing device. Manufacturing system. 9. In addition to a plurality of manufacturing devices and an alignment device arranged corresponding to each manufacturing device, a return device for supplying a mask passing through the last manufacturing device to the foremost alignment device is provided. The manufacturing system of a display device using an organic electroluminescent element according to claim 8, wherein a closed loop structure is constructed by each manufacturing device, each alignment device, and the return device. 10. The organic electroluminescent device according to claim 9, wherein the closed loop structure is constructed by arranging each manufacturing apparatus and the return apparatus in a rectangular shape having each alignment apparatus as a vertex. Display device manufacturing system using. 11. A method of manufacturing a display device using an organic electroluminescent device comprising a plurality of layers sequentially stacked on a substrate, the method comprising sequentially passing a position facing a plurality of vapor deposition sources arranged in parallel. , The relative positions of the substrate and the plurality of vapor deposition sources are varied, and the plurality of layers are stacked at a film formation location on the substrate to form an organic electroluminescent device corresponding to one color component. It is characterized in that a display device is formed by arranging each organic electroluminescent element corresponding to a plurality of color components on the substrate by repeating a plurality of times with different deposition positions on the substrate. A method for manufacturing a display device using an organic electroluminescent device.