JP2003149363A - Member for positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily form a beam shape reduced in weight without lowering rigidity. SOLUTION: A ceramic member used for a positioning device is formed by jointing a beam 3 and a plurality of plate bodies 1 made of ceramic, combining an adhesive and bolt fastening.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to various precision processing machines or precision measuring instruments, stage parts for semiconductor wafer inspection devices,
The present invention relates to a positioning device member that repeats high-speed movement in a precision positioning device used as a stage component for an exposure device.

[0002]

2. Description of the Related Art FIG. 5 shows a basic structure of a typical positioning device. Reference numeral 11 is a sample loading stage part, which is an X-axis guide 1
4 and Y slide 19 are connected to each other, and Y along the Y-axis guide 21
The X-axis guide 14 moves in the Y-axis direction by the axis linear motor 16, the X slide 15 moves in the X-axis direction along the X-axis guide 14, and the positioning points are controlled by the laser light by the mirrors 17 and 18. It is a mechanism to do.

In the positioning device for the inspection device and the exposure device, the line width of the semiconductor pattern has become thinner, and the demand for the positioning accuracy of the device has increased, and the throughput has increased.
In order to increase the rigidity and reduce the weight of the stage component 11, a solid material 5 of high rigidity and low specific gravity ceramic material as shown in FIG. 3 has been used.

However, there is a limit to weight reduction only by changing the material, and as shown in FIG. 4, a hollow body having a through-hole 6 and a beam 2 is formed, and a hollow body is formed by covering with a lid as necessary. To further reduce the weight. By using this as the stage component 11 shown in FIG. 5, for example, the weight can be reduced (see Japanese Patent Laid-Open No. 11-142555).

[0005]

In order to obtain a flesh-through shape as shown in FIG. 4, generally, the solid body 5 is machined to be manufactured. This method has a problem that the raw material is wasted and the time required for the cutting process is significantly increased.

[0006] In addition, since the rigidity is large and the performance cannot be greatly improved in the through-hole shape from one side without the lid as shown in Fig. 4, the lid that covers this is joined to the hollow body. There is a need to.

However, although a joining technique is required when joining the lid to the through-hole shape shown in FIG. 4, it has not been carried out because a sufficient joining technique for ceramics has not been established in reality.

That is, if the lid is simply fixed with an adhesive, it is fixed with a tape or the like immediately after the adhesion or is temporarily fixed such as by placing a weight, so that the adhesive layer is 200 to 500 mμ.
As described above, the thickness was thick and the pressure was insufficient, and unbonded portions and the like were generated, so that a sufficiently integrated hollow body could not be obtained, and the characteristics could not be improved. Also, simply fixing with bolts causes insufficient surface contact between parts, resulting in spot contact.
It had deteriorated the vibration characteristics.

There is a problem that the gain characteristic, which is an important characteristic of the positioning device, is deteriorated because the natural frequency is generated in a low frequency band due to the decrease in rigidity.

The present invention has been made in view of the above-mentioned problems, and an object thereof is to easily form a member for a positioning device that is lightweight and does not reduce rigidity.

[0011]

The present invention is a ceramic member used in a positioning device, wherein a plurality of plate-like members made of ceramics and a beam are joined together by using an adhesive and bolt fastening. It is what

Further, the present invention is characterized in that the beam and the plate-like body are made of different kinds of ceramics.

Further, the present invention is characterized in that the beam and the plate-like body are respectively formed of any one of alumina, silicon nitride, silicon carbide and cordierite.

Further, the present invention is characterized in that as the adhesive, a cured resin such as a phenol resin or an epoxy resin is used as a main component and an elastic modulus of 40 GPa or more is used.

Further, in the present invention, the thickness of the adhesive is 10
˜100 μm, and 65% or more of the area of the bonded portion is bonded.

Further, the present invention is characterized in that the gap between the beam and the plate-like members arranged at both ends thereof is set to 5 mm or less.

This makes it possible to reduce the weight of the positioning device member and to prevent the rigidity from decreasing.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a member for a positioning device of the present invention, which is formed by combining a plurality of plate-like bodies 1 made of ceramics and a beam 2, and between the plate-like bodies 1 and / or plate-like bodies. The body 1 and the beam 2 are joined together by bonding with an adhesive 22 and fastening with bolts 23 to form a hollow body.

The plate-shaped body 1 includes a lid 1a, a bottom plate 1b,
Combining side plates 1c, with two beams 2 in the center
Adhesive 22 is adhered to these abutting surfaces with an adhesive 22 interposed therebetween, and a bush 24 having a screw formed therein is embedded and fastened with a bolt 23. The thickness t of the adhesive 22 is 10 to 10
The range of 0 μm is preferable, and the gap d between both ends of the beam 2 and the side plate 1c is preferably 5 mm or less.

Further, it is preferable that the plate 1 and the beam 2 are made of different kinds of ceramics. This can be made higher than the natural frequency of a single material by forming the plate 1 and the beam 2 from different ceramics. For example, when the plate 1 and the beam 2 are made of only alumina. Compared with, the resonance frequency can be increased by forming the plate-shaped body 1 from alumina and the beam 2 from silicon carbide.

Further, as the ceramics forming the plate 1 and the beam 2, alumina, silicon nitride, silicon carbide,
It is preferable to use cordierite.

When one of the plate-shaped member 1 and the beam 2 is made of alumina among the combinations of these ceramics, the rigidity can be improved without significantly increasing the cost. Further, when silicon carbide is used, since the Young's modulus is high and the rigidity is high, the resonance frequency can be increased as compared with the combination of aluminas having low rigidity. In particular, by forming the plate-shaped body 1 of alumina and at least a part of the beam 2 of silicon carbide, a high-rigidity and lightweight structure can be obtained.

Further, although cordierite has a low rigidity, its use is limited as a structural body. For example, by combining the plate-shaped body 1 with cordierite and the beam 2 with silicon nitride having a small thermal expansion, cordierite is used. It can be used as a structure with higher rigidity than a single unit without impairing the low thermal expansion characteristics of the light.

In the above-mentioned combination, a combination of increasing the resonance frequency is shown, but the combination of the plate-shaped body 1 and the beam 2 makes the resonance frequency lower than the case where the members are made of the same material. The desired resonance frequency can be obtained.

Further, the conventional lightening shape and the like could not be produced unless the same raw material was used, but in the case where the number of beams 2 cannot be increased for the sake of design, some parts are made of high-rigidity ceramics. By forming it, the rigidity can be partially improved.

Each of the above-mentioned parts is formed by molding a ceramic raw material by CIP or the like, cutting it, firing it, and then grinding it, and a metal bush 24 for fastening the bolts 23 at necessary places. Are adhered to each other, and the respective parts are adhered with an adhesive 22 and are fastened with bolts 23 to fix the same.
3 and tighten the final thickness t of the adhesive 22 to 10-1.
It was assembled under the control of 00 μm.

Although the adhesive layer cannot be controlled only by conventional adhesion and the adhesive layer varies, and the adhesive area is non-uniform, the thickness of the adhesive 22 can be increased by fastening the bolts 23 together. By making t uniform and arranging the bolts 23 evenly, the adhesive surface can be evenly pressed, so that the adhesive area can be evenly distributed.

As described above, by using the fastening of the adhesive 22 and the bolt 23 together, the thickness t of the adhesive 22 can be made thin and uniform, whereby the natural frequency can be increased.

FIG. 5 is a perspective view showing the basic structure of a typical positioning device. 11 is a sample loading stage part X
By connecting the axis guide 14 and the Y slide 19, the Y axis guide 2
X axis guide 14 with Y axis linear motor 16
Is a mechanism that moves in the Y-axis direction, the X-slide 15 moves in the X-axis direction along the X-axis guide 14, and the mirrors 17 and 18 control the positioning point by laser light.

Here, as the stage component 11, the member for the positioning device of the present invention composed of the plate-like body 1 and the beam 2 as shown in FIG. 1 can be used.

The shape of the beam 2 is F depending on the stage shape.
It can be arbitrarily designed by using a simulation technique such as EM. Further, since the raw material can be minimized because the beam 2 and the plate-shaped body 1 can be configured, the manufacturing cost can be significantly reduced because the cutting process after molding can be minimized.

The adhesive 22 is mainly composed of a cured resin such as phenol resin or epoxy resin, and has an elastic modulus of 40 GPa.
It is decided to be above.

This is because if the elasticity of the adhesive 22 is small, the natural vibration is affected and the natural frequency is lowered due to the damping effect, and the gain characteristic is deteriorated.
By making the adhesive layer smaller than Gpa, an assembled structure that does not affect the vibration characteristics is possible.

The thickness t of the adhesive 22 is 10-100.
μm, preferably 50 μm or less is good, and 6
It is preferable that 5% or more is an effective adhesive surface.

Further, the beam 2 does not have to be continuous, and the gap between the end of the beam 2 and the side plate 1c may be 5 mm or less. Within this range, the rigidity is not significantly affected, and the natural vibration is the same as that of the continuous beam 2.

On the contrary, by providing a gap, the bending can be divided in a state where the influence on the rigidity is small, and the beam 2 and the plate-shaped body 1 can be assembled without being limited to lightening. The gap is preferably 2 mm or less.

[0038]

Example (Experimental Example 1) As shown in FIG.
A stage plate 3 of × 500 mm × 30 mm was made of various ceramics and bonded to the guide 4 with an adhesive 22 and a bolt 23.

As an embodiment of the present invention, the stage plate 3 is shown in FIG.
A hollow body composed of a plate-like body 1 and a beam 2 as shown in
As a comparative example, a solid body (FIG. 3) and a single-sided meat piercing (FIG. 4) sample were prepared. Weight, self-deflection and FF respectively
The resonance frequency was measured with a T analyzer and the results shown in Table 2 were obtained. An epoxy resin adhesive is used as the adhesive 22, and the characteristics of the various ceramic materials used are as shown in Table 1.

From Table 2, in all the ceramic materials,
The hollow body according to the example of the present invention was made lighter in weight, and the flexure and the natural frequency thereof were similar to those of the solid product.

The stage plate made of a hollow body in which the plate-like body is made of alumina and the beam is made of silicon carbide has a weight of 0.4 kg and a weight-deflection of 0.13 × 10 10 as compared with the alumina hollow body.
^-3 mm smaller, allowing higher rigidity and lighter weight than alumina alone.

Further, the stage plate made of a hollow body in which the plate-like body is made of cordierite and the beam is made of silicon nitride has a higher resonance frequency than the cordierite hollow body without impairing the low thermal expansion characteristics of cordierite. It can be seen that the structure has high rigidity.

Further, the conventional lightening shape and the like could not be produced unless the same raw material was used, but in the case where the number of beams cannot be increased for the convenience of the design, the present invention uses some parts of high rigidity ceramic material. It is also possible to partially increase the rigidity by combining with.

[0044]

[Table 1]

[0045]

[Table 2]

Further, the influence of the method of fastening the structure and the natural frequency was measured. As shown in FIG. 2, the stage plate 3 is prepared on the guide 4 by bolting only, bonding only, bolting and bonding together, and four types of samples formed integrally,
Table 3 shows the result of measuring the natural vibration.

Only by fastening the bolts, the integration of the parts was not sufficient, and the natural frequency was greatly reduced, which was not practical. Adhesion alone does not have a sufficient function, and by using it together, the thickness of the adhesive layer can be controlled, and the same characteristics as the integrated product were obtained.

[0048]

[Table 3]

(Experimental Example 2) Two-component mixed epoxy resin adhesive (two types of elastic modulus 40 GPa and 65 GPa) was used as the adhesive 22.
And silicone adhesive (elastic modulus 20GPa, 15GPa 2
, The hollow body of the present invention shown in FIG.
The natural frequency was measured with an analyzer.

As a result, the two types of epoxy adhesives had a primary natural frequency in the 860 Hz range, while the silicone adhesives showed a significant decrease at 400 Hz or less. The results are shown in Table 4. Therefore, it has been confirmed that if the adhesive has an elastic modulus of 40 GPa or more, it can satisfy the natural frequency equivalent to that of the integral body.

[0051]

[Table 4]

Experimental Example 3 The relationship between the adhesive layer thickness t of the adhesive 22 and the adhesive strength was measured using a test piece, and the results shown in FIG. 6 were obtained. Adhesive strength is 10-100 μm
It was found that the vicinity shows the strongest strength, and the adhesive layer of about 50 μm is the most desirable.

Further, in order to confirm the relationship between the bonding area and the natural frequency, a test piece was prepared and the bonding area was measured with an ultrasonic flaw detector. The result is shown in FIG. Bonding area 6
Since the natural frequency decreases from 0% or less, the adhesive area is preferably 65% or more. (Experimental Example 4) Next, as a test when the beam 2 was discontinuous, the same measurement as in Experimental Example 1 was performed by leaving a gap between the central beam 2 of the hollow body shown in FIG.
Table 5 shows the results obtained by the FT analyzer. Both the primary vibration and the secondary frequency were reduced by several percent, and the result was that there was no problem in use. As a result of FEM simulation, it was also confirmed that if the gap is 5 mm or less, the rigidity is not affected.

[0054]

[Table 5]

[0055]

According to the present invention, a ceramic member used for a positioning device, wherein a plurality of plate-like members made of ceramics and a beam are joined together by using an adhesive and a bolt fastening, are conventionally joined. It is now possible to easily manufacture a hollow structure that could not be manufactured by other methods.

In addition to the fact that the material can be minimized because the component can be composed of only the beam and the plate, the cutting process after molding can be minimized.

By constructing the beam and the plate-like body by combining different kinds of ceramics, it is possible to make the structure lighter and more rigid than the structure made of the same material. For example, when the plate-shaped body is made of alumina and the beam is made of each ceramic of silicon carbide, the weight of the beam can be reduced by about 20% as compared with the case where both members are made of alumina. Further, the Young's modulus of silicon carbide is about 1.15 times that of alumina, and the rigidity can be improved. Furthermore, cordierite has low rigidity, so its use was limited as a structure, but cordierite
By combining the beam with silicon nitride, which has a small thermal expansion, the rigidity can be increased and the application can be expanded compared to the case where both members are made of cordierite.

Further, as the adhesive, a cured resin such as a phenol resin or an epoxy resin is mainly used, and an elastic modulus of 40 is used.
By using one having GPa or more, an assembled structure which does not affect the vibration characteristics can be obtained.

The thickness of the adhesive is 10 to 100 μm.
Since m is set and 65% or more of the area of the bonded portion is bonded, it is possible to prevent the natural frequency from decreasing.

Further, by setting the gap between the beam and the plate-shaped members arranged at both ends thereof to be 5 mm or less, there is no great influence on the rigidity and the natural vibration is not different from that of the continuous beam. It can be divided in a state where there is little influence of, and it is possible to assemble a beam and a plate-like body without being limited to lightening.

[Brief description of drawings]

FIG. 1 is a perspective view showing a member for a positioning device of the present invention.

FIG. 2 is a perspective view showing the shape of a vibration measurement sample of a member for a positioning device of the present invention.

FIG. 3 is a perspective view showing a conventional positioning device member.

FIG. 4 is a perspective view showing a conventional positioning device member.

FIG. 5 is a perspective view showing a positioning device.

FIG. 6 is a graph showing the relationship between adhesive thickness and adhesive shear strength in the positioning device member of the present invention.

FIG. 7 is a graph showing the relationship between the adhesion area and the natural vibration in the positioning device member of the present invention.

[Explanation of symbols]

1: Plate 2: Beam 3: Stage board 4: Guide 5: Medium body 11: Stage parts for sample loading 14: X-axis guide 15: X slide 16: Y-axis linear motor 17, 18: Mirror 19: Y slide 21: Y-axis guide 22: Adhesive 23: Bolt

Claims (6)

[Claims] 1. A ceramic member used in a positioning device, comprising a combination of a plurality of plate-shaped bodies made of ceramics and a beam, wherein the plate-shaped bodies are bonded together and the plate-shaped body and the beam are bonded together. A member for a positioning device, characterized by being joined together by using an agent and bolt fastening together. 2. The member for a positioning device according to claim 1, wherein the plate and the beam are made of different kinds of ceramics. 3. The positioning device member according to claim 1, wherein the plate and the beam are made of any one of alumina, silicon nitride, silicon carbide and cordierite. 4. The member for a positioning device according to claim 1, wherein the adhesive is mainly composed of a cured resin such as a phenol resin or an epoxy resin and has an elastic modulus of 40 GPa or more. 5. The positioning device member according to claim 1, wherein the adhesive has a thickness of 10 to 100 μm, and 65% or more of the area of the bonding portion is bonded. . 6. The gap between the beam and the plate-shaped members arranged at both ends thereof is 5 mm or less.
The member for a positioning device according to any one of 1.